Large-load six-degree-of-freedom piezoelectric nanometer deflection table

Abstract

The invention relates to the technical field of precision positioning tables, and discloses a large-load six-degree-of-freedom piezoelectric nanometer deflection table. And the XY linear piezoelectric driving mechanism, the Z-axis rotation driving mechanism, the XY deflection piezoelectric driving mechanism and the moving surface are sequentially connected in series from bottom to top and are used for pushing the moving surface to linearly move along the X axis and the Y axis, rotate around the Z axis and deflect around the X axis and the Y axis. And the Z-axis linear piezoelectric driving mechanism is connected with the XY linear piezoelectric driving mechanism and is used for driving the moving surface to linearly move along the Z axis. And an elastic assembly for applying a pre-tightening force to the moving surface is also arranged between the Z-axis rotation driving mechanism and the moving surface. According to the series connection structure, X, Y, Z, theta x, theta y and theta z six-degree-of-freedom ultra-precision movement is achieved, and nanoscale high-precision positioning and micro-radian high-precision angle deflection are achieved. The system is reasonable and compact in overall structural layout, small in occupied space, large in load, stable in operation, high in resolution ratio and high in response speed.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision positioning stages, and in particular relates to a large-load six-degree-of-freedom piezoelectric nano-teeter stage. Background Art

[0002] As scientific and technological exploration deepens into the microscopic world, more and more scientific fields have extreme demands for precision positioning, such as ensuring stable focusing of light beams at the nanometer level in laser processing, achieving precise wafer alignment in semiconductor testing, and performing super-resolution microscopic imaging in biomedicine. These application scenarios all have the same core demand - a precision positioning stage with multiple degrees of freedom, high precision, and fast response. In recent years, thanks to the advancement of piezoelectric ceramic manufacturing processes and technologies, current commercial piezoelectric ceramic sheets have significant characteristics such as miniaturization, high reliability and stability, and are very suitable for various precision adjustments and precision instrument applications. However, since multi-degree-of-freedom precision positioning stages are often complex in structure and large in size, on the one hand, they are not easy to integrate with other positioning systems, and on the other hand, they suffer from large motion coupling, low repeatability, small load, and resolution and response speed that cannot meet the requirements.

[0003] Based on the above, the current problem to be solved is to provide a large-load six-degree-of-freedom piezoelectric nano-tip tilt stage with high repeatability, high resolution, fast response speed and small size. Summary of the Invention

[0004] The purpose of the present invention is to provide a large-load six-degree-of-freedom piezoelectric nano-tipping table, aiming to solve the problems in the prior art of multi-degree-of-freedom positioning tables with complex structure, large size, low repeatability, low resolution, slow response speed and small load.

[0005] The present invention is achieved as follows: a large-load six-degree-of-freedom piezoelectric nano-teeter stage comprises: an XY linear piezoelectric drive mechanism, an XY deflection piezoelectric drive mechanism, a Z-axis linear piezoelectric drive mechanism and a Z-axis rotation drive mechanism;

[0006] The XY linear piezoelectric drive mechanism, the Z axis rotation drive mechanism, the XY deflection piezoelectric drive mechanism and the moving surface are sequentially connected in series from bottom to top, and are used to drive the moving surface to move linearly along the X axis and the Y axis, rotate around the Z axis, and deflect around the X axis and the Y axis;

[0007] The Z-axis linear piezoelectric drive mechanism is connected to the XY linear piezoelectric drive mechanism, and is used to drive the moving surface to move linearly along the Z-axis;

[0008] An elastic component is further provided between the Z-axis rotation drive mechanism and the moving surface, and the elastic component is used to apply a pre-tightening force to the moving surface.

[0009] Further, the XY deflection piezoelectric driving mechanism comprises an amplification body and a first piezoelectric ceramic arranged in the amplification body; the XY deflection piezoelectric driving mechanism is arranged as four, and the moving ends of the four XY deflection piezoelectric driving mechanisms are arranged in a circular array and connected with the moving surface.

[0010] Further, the Z-axis rotation driving mechanism comprises a fixed part, a first flexible hinge, a rotating part and a second piezoelectric ceramic; the fixed part is arranged in the middle part, the rotating part is arranged at the outer periphery of the fixed part, and a plurality of first flexible hinges are connected with the fixed part and the rotating part in a radial manner;

[0011] The second piezoelectric ceramic is arranged as two, and the two ends of the second piezoelectric ceramic are respectively connected with the fixed part and the rotating part; the two second piezoelectric ceramics are arranged in parallel and opposite directions, and are used to jointly drive the rotating part to rotate along the Z-axis.

[0012] Further, the elastic assembly comprises a tension spring and a pull rod arranged at both ends of the tension spring, and the two pull rods are respectively arranged at the middle part of the fixed part and the middle part of the moving surface.

[0013] Further, the XY linear piezoelectric driving mechanism comprises a first connecting part, a second flexible hinge, a second connecting part, a third flexible hinge and a third connecting part from inside to outside;

[0014] The first connecting part is provided with a first groove in communication with the second connecting part, and the third connecting part is provided with a second groove in communication with the second connecting part; the first groove and the second groove are respectively provided with a third piezoelectric ceramic parallel to the X-axis and a fourth piezoelectric ceramic parallel to the Y-axis, two ends of the third piezoelectric ceramic are connected with the first connecting part and the second connecting part, and two ends of the fourth piezoelectric ceramic are connected with the second connecting part and the third connecting part.

[0015] Further, a plurality of second flexible hinges are arranged parallel to the Y-axis; and a plurality of third flexible hinges are arranged parallel to the X-axis.

[0016] Further, the Z-axis linear piezoelectric driving mechanism comprises two columns, a fourth flexible hinge connected with the top of the columns and a fifth piezoelectric ceramic arranged between the two columns; the columns and the fifth piezoelectric ceramic are arranged parallel to the Z-axis;

[0017] The third connecting part is provided with a hollow protrusion on the side close to the moving surface, the fourth flexible hinge is connected with the top of the protrusion, and the fifth piezoelectric ceramic is connected with the fourth flexible hinge through the protrusion.

[0018] Further, the XY linear piezoelectric driving mechanism is provided with a base below, and the fifth piezoelectric ceramic is connected to the base away from the fourth flexible hinge.

[0019] Further, the Z-axis linear piezoelectric driving mechanism is provided as four, and the four Z-axis linear piezoelectric driving mechanisms are uniformly connected to the periphery of the XY linear piezoelectric driving mechanism.

[0020] Further, the XY linear piezoelectric driving mechanism, the Z-axis rotary driving mechanism, the XY deflection piezoelectric driving mechanism and the Z-axis linear piezoelectric driving mechanism are respectively provided with a strain sensor.

[0021] The large-load six-degree-of-freedom piezoelectric nanometer deflection table provided by the application has the following advantages:

[0022] The application adopts the structure of parallel connection of three Z-axis linear piezoelectric driving mechanisms. The three Z-axis linear piezoelectric driving mechanisms jointly drive the linear movement of the moving surface along the Z-axis. The Z-axis linear piezoelectric driving mechanism adopts the direct driving mode of the fifth piezoelectric ceramic, has large output and large load, high resonance frequency and fast response speed. The application adopts the structure of parallel connection of four Z-axis rotary driving mechanisms, and realizes the deflection of the moving surface around the X-axis and the Y-axis by controlling the number of movements and the elongation of the Z-axis rotary driving mechanism. The linear movement of the Z-axis and the deflection movement of the X-axis and the Y-axis are realized by different driving mechanisms respectively, and have the characteristics of small motion coupling and high positioning accuracy.

[0023] The series connection structure of the XY linear piezoelectric driving mechanism, the Z-axis linear piezoelectric driving mechanism, the Z-axis rotary driving mechanism and the XY deflection piezoelectric driving mechanism realizes the six-degree-of-freedom ultra-precision movement of X, Y, Z, θx, θy and θz, achieves the nanometer high-precision positioning and the micro-radian high-precision angle deflection, and has fast response speed, and is suitable for static positioning and dynamic attitude adjustment.

[0024] The XY linear piezoelectric driving mechanism adopts the series connection structure of the first connecting part, the second flexible hinge, the second connecting part, the third flexible hinge and the third connecting part from inside to outside; the Z-axis rotary driving mechanism adopts the series connection structure of the fixed part, the first flexible hinge and the rotary part from inside to outside; and has the advantages of small motion coupling, fast response speed and compact structure. The thickness of the XY linear piezoelectric driving mechanism approaches the thickness of the third piezoelectric ceramic, and the thickness of the Z-axis rotary driving mechanism approaches the thickness of the second piezoelectric ceramic, which greatly reduces the height of the series connection of the mechanism and realizes the miniaturization of the large-load six-degree-of-freedom piezoelectric nanometer deflection table.

[0025] The application is provided with a strain sensor, the closed-loop version and the full-bridge design avoid the drift of temperature, the position is detected and fed back in real time, the hysteresis and creep characteristics of the piezoelectric ceramic can be eliminated, and the nanometer precision positioning control is realized.

[0026] In conclusion, the whole structure layout of the application is reasonable, compact, small in space occupation, has the characteristics of large load, stable operation, high resolution and fast response speed while realizing high-precision positioning of six degrees of freedom. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 A schematic diagram of the three-dimensional structure of the large-load six-degree-of-freedom piezoelectric nano deflection table provided by the application is shown in the figure.

[0028] Figure 2 A schematic diagram of the top view of the combination of the Z-axis linear piezoelectric driving mechanism, the Z-axis rotary driving mechanism, the XY deflection piezoelectric driving mechanism, the XY linear piezoelectric driving mechanism and the bottom cover provided by the application is shown in the figure.

[0029] Figure 3 A schematic diagram of the three-dimensional structure of the combination of the Z-axis linear piezoelectric driving mechanism, the Z-axis rotary driving mechanism, the XY deflection piezoelectric driving mechanism, the XY linear piezoelectric driving mechanism and the bottom cover provided by the application is shown in the figure.

[0030] Figure 4 A top view of the large-load six-degree-of-freedom piezoelectric nano deflection table provided by the application is shown in the figure.

[0031] Figure 5 A schematic diagram of the cross-sectional structure of the A-A direction of the large-load six-degree-of-freedom piezoelectric nano deflection table provided by the application is shown in the figure. Figure 4

[0032] Figure 6 A schematic diagram of the three-dimensional structure of the Z-axis rotary driving mechanism provided by the application is shown in the figure.

[0033] Figure 7 A bottom view of the Z-axis rotary driving mechanism provided by the application is shown in the figure.

[0034] Figure 8 A schematic diagram of the three-dimensional structure of the XY deflection piezoelectric driving mechanism provided by the application is shown in the figure.

[0035] Figure 9 A top view of the Z-axis rotary driving mechanism provided by the application is shown in the figure.

[0036] ​In the figure: 1-moving surface; 2-upper cover; 3-outer shell; 4-base; 5-XY linear piezoelectric driving mechanism; 51-first connecting part; 52-second flexible hinge; 53-second connecting part; 54-third flexible hinge; 55-third connecting part; 551-protrusion; 56-first recess; 57-second recess; 58-third piezoelectric ceramic; 59-fourth piezoelectric ceramic; 6-Z-axis linear piezoelectric driving mechanism; 61-stand; 62-fourth flexible hinge; 63-fifth piezoelectric ceramic; 7-Z-axis rotary driving mechanism; 71-fixed part; 72-first flexible hinge; 73-rotary part; 74-second piezoelectric ceramic; 8-XY deflection piezoelectric driving mechanism; 81-amplification body; 82-first piezoelectric ceramic; 9-elastic assembly; 91-tension spring; 92-tension rod; 10-strain sensor. DETAILED DESCRIPTION

[0037] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0038] The implementation of the present application will be described in detail below with reference to specific embodiments.

[0039] In the drawings of the embodiments, the same or similar reference numerals correspond to the same or similar components; in the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore the terms describing the positional relationship in the drawings should not be understood as indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore the terms describing the positional relationship in the drawings are only used for illustrative purposes and should not be understood as limiting the present application. For those skilled in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0040] Referring to Figures 1-9 , a preferred embodiment provided by the present application is shown.

[0041] The large-load six-degree-of-freedom piezoelectric nanometer deflection table includes a moving surface 1, an upper cover 2 arranged on the outer periphery of the moving surface 1, an outer shell 3 arranged below the upper cover 2 and connected with the upper cover 2, and a base 4 arranged at the bottom of the outer shell 3, referring to Figure 1 . The moving surface 1, the upper cover 2, the outer shell 3 and the base 4 form a cavity structure. Inside the cavity structure, there are an XY linear piezoelectric driving mechanism 5 for driving the moving surface 1 to move linearly along the X-axis and the Y-axis, an XY deflection piezoelectric driving mechanism 8 for driving the moving surface 1 to deflect around the X-axis and the Y-axis, a Z-axis linear piezoelectric driving mechanism 6 for driving the moving surface 1 to move linearly along the Z-axis, and a Z-axis rotary driving mechanism 7 for driving the moving surface 1 to rotate around the Z-axis, referring toFigures 2-3 .

[0042] The XY linear piezoelectric drive mechanism 5, the Z-axis rotation drive mechanism 7, the XY deflection piezoelectric drive mechanism 8, and the moving surface 1 are sequentially connected in series from bottom to top. This series arrangement enables the moving surface 1 to move linearly along the X and Y axes, and deflect about θZ, θX, and θY. The Z-axis linear piezoelectric drive mechanism 6 is connected to the XY linear piezoelectric drive mechanism 5, thereby driving the moving surface 1 to move linearly along the Z axis. An elastic component 9 is also provided between the Z-axis rotation drive mechanism 7 and the moving surface 1. The elastic component 9 is used to apply a preload force to the moving surface 1 in the Z-axis direction, imparting a restoring force to the moving surface 1.

[0043] The XY deflection piezoelectric drive mechanism 8 includes an amplifier 81 and a first piezoelectric ceramic 82 disposed in the amplifier 81. Figure 8 Four XY deflection piezoelectric drive mechanisms 8 are provided. The moving ends of the four XY deflection piezoelectric drive mechanisms 8 are arranged in a circular array and connected to the moving surface 1. By controlling the movement amount and extension displacement of the XY deflection piezoelectric drive mechanisms 8, the θX and θY deflection angles can be controlled.

[0044] The fixed end of the XY deflection piezoelectric drive mechanism 8 is connected to the Z-axis rotation drive mechanism 7. The Z-axis rotation drive mechanism 7 includes a fixed portion 71, a first flexible hinge 72, a rotating portion 73 and a second piezoelectric ceramic 74. Figure 9 The fixed portion 71 is provided in the middle, the rotating portion 73 is provided on the periphery of the fixed portion 71 , and a plurality of first flexible hinges 72 are radially connected to the fixed portion 71 and the rotating portion 73 .

[0045] The two ends of the second piezoelectric ceramic 74 are respectively glued and connected to the fixed part 71 and the rotating part 73. There are two second piezoelectric ceramics 74. The two second piezoelectric ceramics 74 are staggered and arranged in parallel and move in opposite directions. The simultaneous extension of the two second piezoelectric ceramics 74 will generate a torsional force, causing the first flexible hinge 72 to deform and jointly drive the rotating part 73 to rotate along the Z axis. The fixed end of the XY deflection piezoelectric drive mechanism 8 is fixed to the rotating part 73 by a screw, and the rotating part 73 drives the XY deflection piezoelectric drive mechanism 8 and the moving surface 1 to rotate around the Z axis. The elastic component 9 includes a tension spring 91 and a pull rod 92 provided at both ends of the tension spring 91, refer to Figures 4-5 The two pull rods 92 are respectively provided at the middle of the fixed portion 71 and the middle of the moving surface 1 .

[0046] The XY linear piezoelectric drive mechanism 5 includes a first connecting portion 51, a second flexible hinge 52, a second connecting portion 53, a third flexible hinge 54 and a third connecting portion 55 from the inside out. Figure 7The first connecting portion 51 is provided with a first groove 56 parallel to the X-axis and connected to the second connecting portion 53. The third connecting portion 55 is provided with a second groove 57 parallel to the Y-axis and connected to the second connecting portion 53. A third piezoelectric ceramic 58 parallel to the X-axis and a fourth piezoelectric ceramic 59 parallel to the Y-axis are respectively disposed within the first groove 56 and the second groove 57. Several second flexible hinges 52 are disposed parallel to the Y-axis, and several third flexible hinges 54 are disposed parallel to the X-axis.

[0047] The ends of the third piezoelectric ceramic 58 are connected to the first connecting portion 51 and the second connecting portion 53, respectively. Specifically, the movable end of the third piezoelectric ceramic 58 is connected to the first connecting portion 51, and the fixed end of the third piezoelectric ceramic 58 is connected to the second connecting portion 53. The extension of the third piezoelectric ceramic 58 causes the second flexible hinge 52 to deform, thereby driving the first connecting portion 51 to move linearly along the X-axis. The fixed portion 71 of the Z-axis rotation drive mechanism 7 is fixed to the first connecting portion 51 via screws. The first connecting portion 51 drives the Z-axis rotation drive mechanism 7, the XY deflection piezoelectric drive mechanism 8, and the moving surface 1 to achieve linear motion along the X-axis.

[0048] The ends of the fourth piezoelectric ceramic 59 are connected to the second connecting portion 53 and the third connecting portion 55, respectively. Specifically, the movable end of the fourth piezoelectric ceramic 59 is connected to the second connecting portion 53, and the fixed end of the fourth piezoelectric ceramic 59 is connected to the third connecting portion 55. The extension of the fourth piezoelectric ceramic 59 causes the third flexible hinge 54 to deform, thereby driving the first connecting portion 51, the second flexible hinge 52, and the second connecting portion 53 to move linearly along the Y-axis. This, in turn, drives the Z-axis rotation drive mechanism 7, the XY deflection piezoelectric drive mechanism 8, and the moving surface 1 to achieve linear motion along the Y-axis.

[0049] The Z-axis linear piezoelectric drive mechanism 6 includes two columns 61 and a fifth piezoelectric ceramic 63 disposed between the two columns 61. The columns 61 and the fifth piezoelectric ceramic 63 are arranged parallel to the Z axis. The tops of the columns 61 and the fifth piezoelectric ceramic 63 are connected to a fourth flexible hinge 62. The third connecting portion 55 is provided with a hollow protrusion 551 on the side close to the moving surface 1. Figure 6 . The fourth flexible hinge 62 is fixed to the bottom of the protrusion 551 by screws. The movable end of the fifth piezoelectric ceramic 63 passes through the hollow part of the protrusion 551 and is connected to the bottom surface of the middle part of the fourth flexible hinge 62. The fixed end of the fifth piezoelectric ceramic 63 is connected to the base 4. The fifth piezoelectric ceramic 63 stretches to drive the fourth flexible hinge 62 to deform along the Z-axis direction, thereby pushing the XY linear piezoelectric drive mechanism 5 to move along the Z-axis direction, and further driving the Z-axis rotation drive mechanism 7, the XY deflection piezoelectric drive mechanism 8, and the moving surface 1 to realize Z-axis linear motion.

[0050] Preferably, the Z-axis linear piezoelectric driving mechanism 6 is provided with 4 corresponding protrusions 551. The 4 Z-axis linear piezoelectric driving mechanisms 6 and the 4 protrusions 551 are evenly connected to the four sides of the XY linear piezoelectric driving mechanism 5.

[0051] The XY linear piezoelectric driving mechanism 5, the Z-axis rotary driving mechanism 7, the XY deflection piezoelectric driving mechanism 8 and the Z-axis linear piezoelectric driving mechanism 6 are respectively provided with strain sensors 10. Specifically, the side surfaces of the first flexible hinge 72, the second flexible hinge 52, the third flexible hinge 54 and the fourth flexible hinge 62 are pasted with strain sensors 10. The strain sensors 10 can detect and feedback the position in real time, eliminate the hysteresis and creep characteristics of the piezoelectric ceramic, and realize the nanoscale precision positioning and the micro-radian high-precision angle deflection control.

[0052] Without limiting the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A large-load six-degree-of-freedom piezoelectric nano-tilting stage, characterized in that: include: An XY linear piezoelectric drive mechanism (5), an XY deflection piezoelectric drive mechanism (8), a Z-axis linear piezoelectric drive mechanism (6), and a Z-axis rotation drive mechanism (7); The XY linear piezoelectric drive mechanism (5), the Z axis rotation drive mechanism (7), the XY deflection piezoelectric drive mechanism (8) and the moving surface (1) are sequentially connected in series from bottom to top, and are used to drive the moving surface (1) to move linearly along the X axis and the Y axis, rotate around the Z axis, and deflect around the X axis and the Y axis; The Z-axis linear piezoelectric drive mechanism (6) is connected to the XY linear piezoelectric drive mechanism (5) and is used to drive the moving surface (1) to move linearly along the Z-axis; An elastic component (9) is further provided between the Z-axis rotation drive mechanism (7) and the moving surface (1), and the elastic component (9) is used to apply a pre-tightening force to the moving surface (1).

2. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The XY deflection piezoelectric drive mechanism (8) comprises an amplifying body (81) and a first piezoelectric ceramic (82) disposed in the amplifying body (81); the XY deflection piezoelectric drive mechanism (8) is provided in four pieces, and the moving ends of the four XY deflection piezoelectric drive mechanisms (8) are arranged in a circular array and are connected to the moving surface (1).

3. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The Z-axis rotation drive mechanism (7) comprises a fixed portion (71), a first flexible hinge (72), a rotating portion (73) and a second piezoelectric ceramic (74); the fixed portion (71) is arranged in the middle, the rotating portion (73) is arranged on the periphery of the fixed portion (71), and a plurality of the first flexible hinges (72) are radially connected to the fixed portion (71) and the rotating portion (73); The second piezoelectric ceramics (74) are provided in two pieces, and the two ends of the second piezoelectric ceramics (74) are respectively connected to the fixed part (71) and the rotating part (73); the two second piezoelectric ceramics (74) are arranged in parallel and staggered and move in opposite directions, and are used to jointly drive the rotating part (73) to rotate along the Z axis.

4. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 3, characterized in that: The elastic component (9) includes a tension spring (91) and pull rods (92) provided at both ends of the tension spring (91), and the two pull rods (92) are respectively provided at the middle of the fixed portion (71) and the middle of the movable surface (1).

5. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The XY linear piezoelectric drive mechanism (5) comprises, from the inside out, a first connecting portion (51), a second flexible hinge (52), a second connecting portion (53), a third flexible hinge (54), and a third connecting portion (55); The first connecting portion (51) is provided with a first groove (56) connected to the second connecting portion (53), and the third connecting portion (55) is provided with a second groove (57) connected to the second connecting portion (53); a third piezoelectric ceramic (58) parallel to the X axis and a fourth piezoelectric ceramic (59) parallel to the Y axis are respectively provided in the first groove (56) and the second groove (57), and two ends of the third piezoelectric ceramic (58) are connected to the first connecting portion (51) and the second connecting portion (53), and two ends of the fourth piezoelectric ceramic (59) are connected to the second connecting portion (53) and the third connecting portion (55).

6. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 5, characterized in that: A plurality of the second flexible hinges (52) are arranged parallel to the Y axis; and a plurality of the third flexible hinges (54) are arranged parallel to the X axis.

7. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 5, characterized in that: The Z-axis linear piezoelectric drive mechanism (6) comprises two columns (61), a fourth flexible hinge (62) connected to the top of the columns (61), and a fifth piezoelectric ceramic (63) arranged between the two columns (61); the columns (61) and the fifth piezoelectric ceramic (63) are arranged parallel to the Z-axis; A hollow protrusion (551) is provided on one side of the third connecting portion (55) close to the moving surface (1), the fourth flexible hinge (62) is connected to the top of the protrusion (551), and the fifth piezoelectric ceramic (63) passes through the protrusion (551) and is connected to the fourth flexible hinge (62).

8. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: A base (4) is provided below the XY linear piezoelectric drive mechanism (5), and one end of the fifth piezoelectric ceramic (63) facing away from the fourth flexible hinge (62) is connected to the base (4).

9. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The Z-axis linear piezoelectric drive mechanisms (6) are provided in four pieces, and the four Z-axis linear piezoelectric drive mechanisms (6) are evenly connected around the XY linear piezoelectric drive mechanism (5).

10. The large-load six-degree-of-freedom piezoelectric nano-tilting stage according to claim 1, characterized in that: The XY linear piezoelectric drive mechanism (5), the Z-axis rotation drive mechanism (7), the XY deflection piezoelectric drive mechanism (8), and the Z-axis linear piezoelectric drive mechanism (6) are respectively provided with strain sensors (10).

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