Temperature measuring structure and vertical furnace tube

Abstract

The invention discloses a temperature measuring structure and a vertical furnace tube. The vertical furnace tube comprises a base, a wafer boat, a furnace body, a lifting mechanism, a plurality of temperature measuring pieces, a plurality of heating pieces and the temperature measuring structure, the bottom of the wafer boat is connected to the base; the furnace body is suitable for accommodating a wafer boat and is detachably connected with the wafer boat; when the wafer boat is detached from the furnace body, the lifting mechanism can drive the base to lift so as to drive the wafer boat to lift; the plurality of heating elements are used for heating the internal space of the furnace body; the temperature measuring structure can be connected to the base so that the temperature measuring structure can be driven by the lifting mechanism to ascend and descend, the temperature measuring structure comprises a temperature correcting piece with a preset length, at least part of the temperature correcting piece is located in the furnace body, and in the ascending and descending process of the temperature measuring structure, the temperature correcting piece can measure the temperature of the area between any two temperature measuring pieces. And the temperature calibration piece can also measure the temperature of an area between the lowermost temperature measurement piece and the bottom of the wafer boat. Through the above arrangement, the detection precision of the temperature measurement structure is improved, and the installation difficulty of the temperature measurement structure is reduced.

Description

Technical Field

[0001] The present application relates to the technical field of vertical furnace tubes, and in particular to a temperature measurement structure and a vertical furnace tube. Background Art

[0002] The silicon carbide vertical furnace tube can perform processes such as annealing and activation. It can repair lattice damage through the annealing process and can also allow doped impurity atoms to enter the lattice position and play an electrical role through the activation process.

[0003] When performing the aforementioned process in a vertical silicon carbide furnace, the internal temperature is relatively high, typically between 1200°C and 2000°C. Therefore, an infrared pyrometer is required for temperature control. However, since the infrared pyrometer's measurement location is typically not the same as the process location, a temperature measurement device such as a calibrated thermocouple is required to calibrate the internal temperature of the furnace and test the temperature control accuracy of the constant temperature zone within the furnace.

[0004] In the related art, for example, the patent application with publication number CN113899221A discloses a temperature measurement method and temperature measurement device for the constant temperature zone of a vertical oxidation furnace. The temperature measurement device includes a bracket, a lifting mechanism, a thermocouple seat and a thermocouple. The lifting mechanism is installed on the bracket, and the thermocouple seat is provided on the lifting mechanism. The thermocouple is vertically arranged and the bottom is detachably installed on the thermocouple seat. The bottom of the oxidation furnace is provided with a thermocouple through-hole for the thermocouple to pass through, so that the thermocouple can move vertically in the furnace and measure the temperature value in real time to obtain continuous temperature data in the vertical direction of the furnace, thereby improving the temperature uniformity of the entire furnace.

[0005] However, the aforementioned patent application requires an independent lifting mechanism (i.e., the temperature measurement device is an external device independent of the oxidation furnace) to drive the calibration thermocouple up and down. This independent lifting mechanism makes it difficult to align the calibration thermocouple with the temperature measurement hole, complicating installation. Furthermore, an independent lifting mechanism makes it difficult to accurately align the coordinates of the temperature measurement point, resulting in low temperature measurement accuracy. Summary of the Invention

[0006] In order to address the deficiencies of the prior art, the purpose of the present application is to provide a temperature measuring structure and a vertical furnace tube, which can improve the detection accuracy of the temperature measuring structure and reduce the difficulty of installing the temperature measuring structure.

[0007] In a first aspect, an embodiment of the present application provides a temperature measuring structure suitable for measuring the temperature of a vertical furnace tube. The temperature measuring structure can be connected to the base of the vertical furnace tube so that the temperature measuring structure can be driven by the lifting mechanism of the vertical furnace tube to be raised and lowered. The temperature measuring structure includes a temperature calibration component with a preset length. The temperature calibration component is at least partially located in the furnace body of the vertical furnace tube. During the lifting and lowering process of the temperature measuring structure, the temperature calibration component can measure the temperature of the area between any two temperature measuring components of the vertical furnace tube. The temperature calibration component can also measure the temperature of the area between the lowest temperature measuring component and the bottom of the crystal boat of the vertical furnace tube.

[0008] In one possible implementation, the temperature measurement structure includes: a base and a telescopic tube assembly, the base is detachably connected to the base of the vertical furnace tube; the two ends of the telescopic tube assembly are respectively connected to the base and the crystal boat, and are mounted on the temperature calibration component, and the telescopic tube assembly is suitable for extending and retracting as the temperature calibration component rises and falls to close the space between the crystal boat and the base for accommodating the temperature calibration component.

[0009] In one possible implementation, the telescopic tube assembly includes a bellows and a fixed plate, the bellows includes a first corrugated portion, a second corrugated portion, and a rigid portion located between the first corrugated portion and the second corrugated portion; the fixed plate is connected to the rigid portion; the temperature measuring structure includes a guide shaft, which is movably connected to the base and fixed to the fixed plate, and the guide shaft can move relative to the base along the lifting direction of the temperature correction component to limit the movement offset of the bellows.

[0010] In one possible implementation, the temperature measuring structure includes a linear bearing seat connected to the base, and the guide shaft is slidably connected to the linear bearing seat; two linear bearing seats and two guide shafts are provided, each guide shaft is matched with a corresponding linear bearing seat, and the two guide shafts are respectively fixed at both ends of the fixed plate and located on both sides of the bellows.

[0011] In one possible implementation, an upper flange and a lower flange are respectively provided at both ends of the bellows, the upper flange is connected to the crystal boat, the temperature measuring structure also includes a support plate connected to the base, the support plate is provided with a long strip of mounting holes, and the lower flange is rotatably connected to a long strip of mounting parts, the mounting parts are passed through the mounting holes and rotated to a fixed position, when the mounting parts are in the fixed position, the maximum width direction of the mounting parts is not parallel to the maximum width direction of the mounting holes.

[0012] In one possible implementation, the temperature measuring structure includes a first guide sleeve and a second guide sleeve. The first guide sleeve is located in the first corrugated portion and the upper flange, and the second guide sleeve is located in the second corrugated portion and the lower flange. The first guide sleeve and the second guide sleeve are both mounted on and contact the temperature calibration component to guide the temperature calibration component.

[0013] In one possible implementation, the temperature measuring structure includes a first clamp and a second clamp, the first clamp is clamped to the upper flange to clamp the upper flange and the first guide sleeve; the second clamp is clamped to the lower flange to clamp the lower flange and the second guide sleeve.

[0014] In a possible implementation, the temperature measurement structure includes a first sealing ring and a second sealing ring, the first sealing ring is located between the upper flange and the first clamp, and the second sealing ring is located between the lower flange and the second clamp.

[0015] In one possible implementation, the temperature calibration component includes a fixed portion located below the base and a temperature measuring portion passing through the first guide sleeve, the second guide sleeve, the crystal boat and the furnace body. The temperature measuring portion is provided with multiple temperature measuring points, and the multiple temperature measuring points can measure the temperature of the area between any two temperature measuring components. The multiple temperature measuring points can also measure the temperature of the area between the lowest temperature measuring component and the bottom of the crystal boat; the fixed portion is connected to the lower flange, and a sealing ring structure is provided at the connection between the two.

[0016] On the second aspect, an embodiment of the present application provides a vertical furnace tube, which includes a base, a crystal boat, a furnace body, a lifting mechanism, multiple temperature measuring components, multiple heating components and the above-mentioned temperature measuring structure; the bottom of the crystal boat is connected to the base; the furnace body is suitable for accommodating the crystal boat and is detachably connected to the crystal boat; when the crystal boat and the furnace body are disassembled, the lifting mechanism can drive the base to rise and fall to drive the crystal boat to rise and fall; at least one temperature measuring component is located at the top of the furnace body, and at least one temperature measuring component is located on the side wall of the furnace body to measure the temperature inside the furnace body; multiple heating components are installed at multiple positions inside the furnace body to heat the internal space of the furnace body.

[0017] The above-mentioned temperature measuring structure and vertical furnace tube can connect the temperature measuring structure to the base, and drive the temperature measuring structure to rise and fall through the lifting mechanism, so that the present application does not need to adopt an independent lifting device to drive the temperature measuring structure to rise and fall, which is conducive to the temperature calibration component to be able to align with the temperature measuring hole, and the temperature measuring structure is driven to move through the original lifting mechanism of the vertical furnace tube for loading, thereby making the installation of the temperature measuring structure easier to reduce the difficulty of installation of the temperature measuring structure; in addition, the original lifting mechanism of the vertical furnace tube for loading can accurately correspond to the coordinate value of the temperature measuring point, thereby improving the temperature measurement accuracy, that is, the detection accuracy of the temperature calibration component can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of the vertical furnace tube provided in an embodiment of the present application.

[0019] Figure 2 This is a cross-sectional view of the vertical furnace tube provided in an embodiment of the present application.

[0020] Figure 3 This is an exploded diagram of the temperature measurement structure provided in an embodiment of the present application.

[0021] Figure 4 A schematic structural diagram of the telescopic tube assembly and base of the temperature measurement structure provided in an embodiment of the present application.

[0022] Figure 5 Schematic diagram of the structure of the lower flange and support plate of the temperature measurement structure provided in an embodiment of the present application.

[0023] Figure 6 Schematic diagram of the bellows of the temperature measurement structure provided in an embodiment of the present application in a stretched state.

[0024] Figure 7 Schematic diagram of the bellows of the temperature measurement structure provided in an embodiment of the present application in a compressed state.

[0025] Figure 8 Flowchart of the temperature measurement method of the temperature measurement structure provided in an embodiment of the present application.

[0026] Illustration: 100, vertical furnace tube; 11, base; 12, crystal boat; 121, temperature measuring hole; 13, furnace body; 14, lifting mechanism; 141, lifting guide rail; 142, guide rail seat; 143, screw; 144, drive motor; 15, temperature measuring element; 16, heating element; 200, temperature measuring structure; 21, temperature calibration element; 211, temperature measuring part; 212, fixing part; 22, base; 23, telescopic tube assembly; 231, bellows; 2311, first wave Corrugated portion; 2312, second corrugated portion; 2313, rigid portion; 2314, upper flange; 2315, lower flange; 232, fixing plate; 24, guide shaft; 25, linear bearing seat; 26, support plate; 261, mounting hole; 27, mounting part; 291, first guide sleeve; 292, second guide sleeve; 201, first clamp; 202, second clamp; 203, first sealing ring; 204, second sealing ring; 205, sealing ring structure. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation of the present application will be clearly and completely described below in conjunction with the drawings in the implementation of the present application.

[0028] It should be noted that the words "first", "second" and similar terms used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "an" do not indicate a quantity limitation, but rather indicate the presence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are used for ease of description only and are not limited to one position or one spatial orientation. Words such as "include" or "comprising" and similar terms mean that the elements or objects appearing before "include" or "comprising" include the elements or objects listed after "include" or "comprising" and their equivalents, and do not exclude other elements or objects. Words such as "connected" or "connected" and similar terms are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0029] As used in this specification and the appended claims, the singular forms "a," "the," and "the" may also include one or more, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein is used to describe an associative relationship between associated objects, indicating that three relationships may exist. For example, A and / or B may mean: A exists alone, A and B exist at the same time, and B exists alone, where A and B may be singular or plural.

[0030] In order to clearly illustrate the technical solution of this application, the following is also defined: Figure 1 Left, right, up, and down as shown.

[0031] like Figure 1 and Figure 2 As shown, the present application provides a vertical furnace tube 100, which includes a base 11, a wafer boat 12, a furnace body 13, a lifting mechanism 14, a temperature measuring element 15, and a heating element 16. The wafer boat 12 is suitable for carrying wafers, and its bottom is connected to the base 11 so that the wafer boat 12 can be supported by the base 11.

[0032] The furnace body 13 is adapted to accommodate the wafer boat 12, allowing the wafers carried by the wafer boat 12 to react within the furnace body 13. In this embodiment, the furnace body 13 is detachably connected to the wafer boat 12. For example, when the wafer boat 12 is detached from the furnace body 13, the lifting mechanism 14 can drive the base 11 to rise and fall, thereby driving the wafer boat 12 to rise and fall, allowing the wafer boat 12 to descend to a position for placing the wafers, thereby enabling the wafers and the wafer boat 12 to be loaded. When the wafer boat 12 is connected to the furnace body 13, a sealed reaction space is formed between the wafer boat 12 and the furnace body 13, within which the wafers carried by the wafer boat 12 can react.

[0033] Multiple temperature measuring elements 15 are provided. At least one temperature measuring element 15 is located at the top of the furnace body 13 to detect the temperature of the top of the furnace body 13, and at least one temperature measuring element 15 is located on the side wall of the furnace body 13 to detect the temperature of the inner side of the furnace body 13. Thus, the temperature inside the furnace body 13 can be measured by using multiple temperature measuring elements 15. In some embodiments, there are two temperature measuring elements 15 located on the side wall of the furnace body 13, and the two temperature measuring elements 15 are arranged in a vertical direction. In some embodiments, the temperature measuring element 15 can be an infrared pyrometer.

[0034] Multiple heating elements 16 are provided, and the multiple heating elements 16 can be installed at multiple locations within the furnace body 13 to heat the interior space of the furnace body 13, thereby making the temperature of the interior space of the furnace body 13 more uniform. For example, the vertical furnace tube 100 of the present application can independently control each heating element 16 based on the temperature detected by the multiple temperature measuring elements 15, so that the temperature of the interior space of the furnace body 13 can meet the reaction temperature of the wafers, and the temperature uniformity of the interior space of the furnace body 13 is high, so that the interior space of the furnace body 13 forms a constant temperature area. In some embodiments, the heating element 16 can be a component capable of heating, such as a heater.

[0035] In some embodiments, the lifting mechanism 14 includes a lifting guide rail 141 and a guide rail seat 142. The guide rail seat 142 is connected to the furnace body 13 so that the guide rail seat 142 can be fixed. The lifting guide rail 141 is located in the guide rail seat 142 and can move relative to the guide rail seat 142, and the moving direction is Figure 1 The up and down direction shown, that is, the lifting direction of the lifting mechanism 14 is Figure 1 The base 11 is connected to the lifting rail 141 so that the lifting rail 141 can drive the base 11 to move up and down, and drive the wafer boat 12 connected to the base 11 to move up and down.

[0036] In some embodiments, there are two lifting guide rails 141 and two guide rail seats 142, and the two lifting guide rails 141 are located on the left and right sides of the furnace body 13, and the two guide rail seats 142 are also located on the left and right sides of the furnace body 13, thereby improving the lifting stability of the base 11 and the crystal boat 12.

[0037] In some embodiments, the lifting mechanism 14 may further include a screw 143 and a drive motor 144. The drive motor 144 is in transmission connection with the screw 143 so that the drive motor 144 can drive the screw 143 to rotate. The lifting rail 141 is sleeved on the screw 143 and threadedly connected to the screw 143 so that the rotation of the screw 143 can drive the lifting rail 141 to move up and down, thereby realizing the lifting function of the lifting rail 141.

[0038] It should be noted that, since there are measurement gaps between the multiple temperature measuring elements 15, there is also a measurement gap between the lowest temperature measuring element 15 and the bottom of the wafer boat 12. Within this measurement gap, the temperature inside the furnace body 13 cannot be fully or partially acquired by the temperature measuring element 15. Furthermore, since the accuracy of the measurement of the temperature inside the furnace body 13 determines whether a constant temperature region can be formed inside the furnace body 13, the present application further provides a temperature measuring structure 200, which is capable of detecting the temperature within the above-mentioned measurement gap, thereby determining whether a constant temperature region is formed inside the furnace body 13 through the temperature detected by the temperature measuring structure 200 and the temperature measuring element 15, thereby facilitating improving the reaction stability and production quality of the wafer in the furnace body 13.

[0039] like Figure 2 and Figure 3 As shown, as an implementation method, the temperature measurement structure 200 is suitable for measuring the temperature of a vertical furnace tube 100. In the present application, since the wafer boat 12 is detachably connected to the base 11, for example, the wafer boat 12 and the base 11 are detachably connected by bolts. Therefore, the wafer boat 12 can be separated from the base 11 and connected to the furnace body 13. In this case, the temperature measurement structure 200 can be connected to the base 11, so that the temperature measurement structure 200 can be driven by the lifting mechanism 14 to be raised and lowered, thereby allowing the temperature measurement structure 200 to pass through the measurement intervals between multiple temperature measurement elements 15 and the measurement interval between the lowest temperature measurement element 15 and the bottom of the wafer boat 12. Therefore, the temperature measurement structure 200 can detect the temperature within the above-mentioned measurement intervals, thereby improving the detection accuracy of the internal temperature of the furnace body 13.

[0040] Specifically, the temperature measuring structure 200 includes a temperature calibration component 21 with a preset length. The temperature calibration component 21 is at least partially located in the furnace body 13. During the lifting and lowering process of the temperature measuring structure 200, the temperature calibration component 21 can measure the temperature of the area between any two temperature measuring components 15. The temperature calibration component 21 can also measure the temperature of the area between the lowest temperature measuring component 15 and the bottom of the crystal boat 12.

[0041] In some embodiments, the temperature calibration component 21 may be a temperature calibration thermocouple.

[0042] In some embodiments, the preset length can be adjusted according to the height inside the furnace body 13. It is only necessary to enable the temperature calibration component 21 with the preset length to detect the temperature between any two temperature measuring components 15 to meet the temperature detection at any position inside the furnace body 13.

[0043] It should be noted that a temperature measuring hole 121 that can be blocked is provided at the bottom of the wafer boat 12 , and the temperature calibration element 21 can enter the furnace body 13 through the temperature measuring hole 121 to detect the internal temperature of the furnace body 13 .

[0044] The above arrangement eliminates the need for a separate lifting device to drive the temperature measuring structure 200 to move up and down (i.e., lift and lower). This facilitates alignment of the temperature calibration element 21 with the temperature measuring hole 121. The temperature measuring structure 200 can be driven to move by the lifting mechanism 14 already installed on the vertical furnace tube 100 for loading materials, thereby simplifying and reducing the difficulty of installing the temperature measuring structure 200. Furthermore, the existing lifting mechanism 14 already installed on the vertical furnace tube 100 for loading materials can accurately correspond to the coordinates of the temperature measuring point, thereby improving temperature measurement accuracy, that is, improving the detection accuracy of the temperature calibration element 21.

[0045] As an implementation method, since the interior of the furnace body 13 is in a high-temperature, low-pressure environment and there are graphite parts inside the furnace body 13 during the operation of the vertical furnace tube 100, a higher airtightness is required during the temperature calibration and temperature measurement process. Therefore, the temperature measurement structure 200 of the present application includes a base 22 and a telescopic tube assembly 23. Among them, the base 22 is detachably connected to the base 11, which can support the telescopic tube assembly 23. The two ends of the telescopic tube assembly 23 are respectively connected to the base 22 and the crystal boat 12, and are sleeved on the temperature calibration part 21. The telescopic tube assembly 23 is suitable for telescoping with the lifting and lowering of the temperature calibration part 21 to close the space between the crystal boat 12 and the base 22 for accommodating the temperature calibration part 21. During the lifting and lowering process of the temperature calibration part 21, it needs to move up and down relative to the temperature measuring hole 121, so the telescopic tube assembly 23 can close the gap between the temperature calibration part 21 and the temperature measuring hole 121. Through the above arrangement, the portion of the temperature control component 21 between the crystal boat 12 and the base 22 can be surrounded by the telescopic tube assembly 23 and can cooperate with the base 22 and the crystal boat 12 to form a seal, thereby improving the airtightness of the temperature control component 21 when measuring the internal temperature of the furnace body 13.

[0046] like Figure 2 、 Figure 3 and Figure 4 As shown, in some embodiments, the extension tube assembly 23 includes a bellows 231 and a fixing plate 232 connected to the bellows 231. Specifically, the bellows 231 includes a first corrugated portion 2311, a second corrugated portion 2312, and a rigid portion 2313 located between the first corrugated portion 2311 and the second corrugated portion 2312, and the fixing plate 232 is connected to the rigid portion 2313.

[0047] In this embodiment, the first corrugated portion 2311 and the second corrugated portion 2312 are both elastic, and the rigid portion 2313 can be made of a rigid material such as metal, so that the fixed plate 232 and the rigid portion 2313 can be rigidly connected to avoid displacement of the connection between the fixed plate 232 and the rigid portion 2313.

[0048] Furthermore, the temperature measurement structure 200 includes a guide shaft 24, which is movably connected to the base 22 and fixed to the fixed plate 232. The guide shaft 24 can move relative to the base 22 in the direction of the temperature calibration member 21, thereby limiting the displacement of the bellows 231. Specifically, the guide shaft 24 can limit the lateral displacement of the fixed plate 232. Since the fixed plate 232 is rigidly connected to the rigid portion 2313, the guide shaft 24 can limit the lateral displacement of the bellows 231, thereby improving the telescopic stability of the bellows 231.

[0049] In some embodiments, the temperature measurement structure 200 includes a linear bearing seat 25 connected to the base 22, and the guide shaft 24 is slidably connected to the linear bearing seat 25. The linear bearing seat 25 can improve the movement accuracy of the guide shaft 24, that is, the linear bearing seat 25 can enable the guide shaft 24 to move along the axis of the linear bearing seat 25, thereby improving the movement accuracy of the bellows 231.

[0050] In some embodiments, two linear bearing seats 25 and two guide shafts 24 are provided, each guide shaft 24 being matched with a corresponding linear bearing seat 25. The two guide shafts 24 are respectively fixed to the two ends of the fixed plate 232 and located on both sides of the bellows 231. This arrangement can further improve the lateral displacement of the fixed plate 232, thereby further improving the movement accuracy of the bellows 231.

[0051] It should be noted that the linear bearing seat 25 and the guide shaft 24 can also be provided in plurality, and this application does not impose any limitation thereto.

[0052] like Figure 3 、 Figure 4 and Figure 5 As shown, as an implementation method, an upper flange 2314 and a lower flange 2315 are respectively provided at both ends of the bellows 231, the upper flange 2314 is connected to the crystal boat 12, and the temperature measuring structure 200 also includes a support plate 26 connected to the base 22, the support plate 26 is provided with a long strip of mounting hole 261, and the lower flange 2315 is rotatably connected to a long strip of mounting part 27, the minimum width of the mounting part 27 is equal to or less than the minimum width of the mounting hole 261, and the maximum width of the mounting part 27 is greater than the minimum width of the mounting hole 261, the mounting part 27 is passed through the mounting hole 261 and rotated to a fixed position, when the mounting part 27 is in the fixed position, the maximum width direction of the mounting part 27 is not parallel to the maximum width direction of the mounting hole 261.

[0053] In some embodiments, the mounting member 27 can be a rectangular block structure, which is rotatably connected to the bottom of the lower flange 2315. By rotating the mounting member 27, the length direction of the mounting member 27 is parallel to the length direction of the mounting hole 261, so that the mounting member 27 can be snapped into the mounting hole 261 to fix the position of the lower flange 2315.

[0054] It should be noted that the elongated mounting hole 261 allows the mounting member 27 to be adjusted in position along the length of the mounting hole 261, thereby allowing the center of the lower flange 2315 to be offset from the center of the mounting hole 261. In the present application, the lower flange 2315 is also sealed to the thermal control member 21 (described below). Therefore, this arrangement prevents the thermal control member 21 from becoming stuck or breaking due to bending moments.

[0055] In some embodiments, the provision of multiple linear bearing seats 25 and guide shafts 24 can make the up and down movement of the fixed plate 232 more precise, thereby making the expansion and contraction of the bellows 231 and the lifting and lowering of the temperature control component 21 in the bellows 231 more precise, thereby preventing the temperature control component 21 from getting stuck or breaking due to bending moment.

[0056] like Figure 3 and Figure 4 As shown, as an implementation method, the temperature measuring structure 200 includes a first guide sleeve 291 and a second guide sleeve 292. The first guide sleeve 291 is located in the first corrugated portion 2311 and the upper flange 2314, and the second guide sleeve 292 is located in the second corrugated portion 2312 and the lower flange 2315. The first guide sleeve 291 and the second guide sleeve 292 are both mounted on and contact the temperature control component 21 to guide the temperature control component 21, thereby improving the lifting and lowering accuracy of the temperature control component 21, and further making the centering of the temperature control component 21 and the temperature measuring hole 121 more accurate, so as to reduce the difficulty of assembling the temperature control component 21 and the temperature measuring hole 121.

[0057] In some embodiments, the first guide sleeve 291 abuts against the inner wall of the upper flange 2314, thereby allowing the first guide sleeve 291 to be positioned between the upper flange 2314 and the temperature-regulating element 21 and making contact with both. Simultaneously, the second guide sleeve 292 abuts against the inner wall of the lower flange 2315, thereby allowing the second guide sleeve 292 to be positioned between the lower flange 2315 and the temperature-regulating element 21 and making contact with both. This arrangement prevents lateral displacement of the temperature-regulating element 21 during the lifting process, thereby facilitating the lifting stability of the temperature-regulating element 21 and facilitating alignment of the temperature-regulating element 21 with the measuring hole, thereby reducing the difficulty of installing the temperature-regulating element 21 with the measuring hole.

[0058] In this embodiment, the temperature measuring structure 200 includes a first clamp 201 and a second clamp 202. The first clamp 201 is clamped to the upper flange 2314 to clamp the upper flange 2314 and the first guide sleeve 291; the second clamp 202 is clamped to the lower flange 2315 to clamp the lower flange 2315 and the second guide sleeve 292.

[0059] In some embodiments, in order to improve the sealing of the upper flange 2314 and the lower flange 2315, the temperature measurement structure 200 of the present application includes a first sealing ring 203 and a second sealing ring 204. The first sealing ring 203 is located between the upper flange 2314 and the first clamp 201, and the second sealing ring 204 is located between the lower flange 2315 and the second clamp 202, so that the sealing of the upper flange 2314 can be improved by the first sealing ring 203, and the sealing of the lower flange 2315 can be improved by the second sealing ring 204.

[0060] In this embodiment, the upper flange 2314 is connected to the wafer boat 12 via a flange interface.

[0061] like Figure 2 、 Figure 3 and Figure 4 As shown, as an implementation, the temperature calibration element 21 includes a temperature measuring portion 211 that penetrates the first guide sleeve 291, the second guide sleeve 292, the wafer boat 12, and the furnace body 13. The temperature measuring portion 211 is provided with multiple temperature measuring points. These multiple temperature measuring points can measure the temperature of the area between any two temperature measuring elements 15. The multiple temperature measuring points can also measure the temperature of the area between the lowest temperature measuring element 15 and the bottom of the wafer boat 12. The temperature measuring portion 211 can pass through the temperature measuring hole 121 at the bottom of the wafer boat 12 and enter the wafer boat 12 and the furnace body 13.

[0062] In some embodiments, the number of temperature measurement points can be adjusted according to actual needs, so that temperature measurement at any position inside the furnace body 13 can be achieved.

[0063] As an implementation method, the temperature correction component 21 also includes a fixed part 212 located below the base 22, the fixed part 212 is connected to the lower flange 2315, and a sealing ring structure 205 is provided at the connection between the two, so that the sealing ring structure 205 can achieve sealing between the fixed part 212 and the lower flange 2315.

[0064] In summary, the temperature measuring structure 200 of the present application can be driven to move by the original lifting mechanism 14 of the vertical furnace tube 100, thereby making the installation of the temperature measuring structure 200 easier to reduce the installation difficulty of the temperature measuring structure 200; and can accurately correspond to the coordinate value of the temperature measuring point, thereby improving the temperature measurement accuracy, that is, improving the detection accuracy of the temperature control component 21. At the same time, the setting of the guide shaft 24 and the fixed plate 232 can make the expansion and contraction accuracy of the bellows 231 higher, that is, the bellows 231 will not be laterally offset, so that the temperature control component 21 will not be stuck or broken due to bending moment. In addition, the first guide sleeve 291 and the second guide sleeve 292 can also cooperate with the bellows 231 to further improve the lifting accuracy of the temperature control component 21.

[0065] In the present application, during the rising process of the temperature control member 21, the bellows 231 can be stretched (refer to Figure 6 ), during the descent of the temperature-calibrating element 21, the bellows 231 can be compressed (refer to Figure 7 ), so that during the lifting and lowering process of the temperature-regulating component 21, the bellows 231 can always maintain the sealing of the space where the temperature-regulating component 21 is located, so as to improve the sealing performance of the temperature-regulating component 21 when it is working.

[0066] It should be noted that in the present application, the connection between the guide shaft 24 and the fixed plate 232, the connection between the support plate 26 and the base 22, the connection between the linear bearing seat 25 and the base 22, and the connection between the base 22 and the base 11 can all be connected by bolts, thereby improving the assembly efficiency between the above components.

[0067] In this application, the installation process of the temperature measurement structure 200 is as follows: First, the wafer boat 12 is connected to the furnace body 13 so that the relative positions of the wafer boat 12 and the furnace body 13 are fixed; Secondly, the wafer boat 12 is separated from the base 11 so that the lifting mechanism 14 does not move the wafer boat 12 when driving the base 11 to move up and down; Then, the temperature measuring portion 211 of the temperature measuring structure 200 passes through the temperature measuring hole 121 at the bottom of the wafer boat 12 and enters the wafer boat 12 and the furnace body 13; Finally, the temperature measuring structure 200 is connected to the base 11 , so that the lifting mechanism 14 can drive the temperature measuring portion 211 of the temperature measuring structure 200 to move up and down in the furnace body 13 when driving the base 11 to move up and down.

[0068] Based on the installation process of the above-mentioned temperature measurement structure 200, as shown in FIG. Figure 8 As shown, as an implementation, the present application also provides a temperature measurement method of the temperature measurement structure 200, which includes the following steps: S1, connecting the wafer boat 12 and the furnace body 13, and separating the wafer boat 12 and the base 11; S2, connecting the temperature measuring structure 200 to the base 11, so as to drive the temperature measuring structure 200 to rise and fall through the lifting mechanism 14; S3 . The temperature measuring structure 200 measures the temperature of the area between any two temperature measuring elements 15 and the temperature of the area between the lowest temperature measuring element 15 and the bottom of the wafer boat 12 during the lifting process.

[0069] Through the above-mentioned setting, the temperature measuring structure 200 can be driven to move by the lifting mechanism 14 originally used for loading the vertical furnace tube 100, thereby making the installation of the temperature measuring structure 200 easier to reduce the installation difficulty of the temperature measuring structure 200; and the coordinate value of the temperature measuring point can be accurately corresponded, thereby improving the temperature measurement accuracy.

[0070] In some embodiments, the temperature measurement method further comprises the following steps: S4. Based on the temperatures measured by the temperature measuring structure 200 and the temperature measuring element 15 , the working state of the heating element 16 is controlled so that a constant temperature region is formed in the interior space of the furnace body 13 .

[0071] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all such improvements and changes should fall within the scope of protection of the claims appended to this application.

Claims

1. A temperature measurement structure (200) suitable for measuring the temperature of a vertical furnace tube (100). It is characterized in that The temperature measuring structure (200) can be connected to the base (11) of the vertical furnace tube (100), so that the temperature measuring structure (200) can be driven by the lifting mechanism (14) of the vertical furnace tube (100) to be lifted and lowered. The temperature measuring structure (200) includes a temperature calibration component (21) with a preset length. The temperature calibration component (21) is at least partially located in the furnace body (13) of the vertical furnace tube (100). During the lifting and lowering process of the temperature measuring structure (200), the temperature calibration component (21) can measure the temperature of the area between any two temperature measuring components (15) of the vertical furnace tube (100). The temperature calibration component (21) can also measure the temperature of the area between the lowest temperature measuring component (15) and the bottom of the crystal boat (12) of the vertical furnace tube (100).

2. The temperature measurement structure (200) according to claim 1, characterized in that: The temperature measurement structure (200) comprises: A base (22) detachably connected to the base (11) of the vertical furnace tube (100); The telescopic tube assembly (23) has two ends connected to the base (22) and the crystal boat (12) respectively, and is sleeved on the temperature control component (21). The telescopic tube assembly (23) is suitable for extending and retracting as the temperature control component (21) rises and falls, so as to close the space between the crystal boat (12) and the base (22) for accommodating the temperature control component (21).

3. The temperature measurement structure (200) according to claim 2, characterized in that: The telescopic tube assembly (23) comprises: A bellows (231) comprising a first corrugated portion (2311), a second corrugated portion (2312), and a rigid portion (2313) located between the first corrugated portion (2311) and the second corrugated portion (2312); a fixing plate (232) connected to the rigid portion (2313); The temperature measuring structure (200) includes a guide shaft (24) which is movably connected to the base (22) and fixed to the fixed plate (232); the guide shaft (24) can move relative to the base (22) along the lifting direction of the temperature calibration component (21) to limit the movement offset of the bellows (231).

4. The temperature measurement structure (200) according to claim 3, characterized in that: The temperature measuring structure (200) includes a linear bearing seat (25) connected to the base (22), and the guide shaft (24) is slidably connected in the linear bearing seat (25); There are two linear bearing seats (25) and two guide shafts (24), each of which is matched with a corresponding linear bearing seat (25). The two guide shafts (24) are respectively fixed at the two ends of the fixing plate (232) and are located on both sides of the bellows (231).

5. The temperature measurement structure (200) according to claim 3, characterized in that: An upper flange (2314) and a lower flange (2315) are respectively provided at both ends of the bellows (231), and the upper flange (2314) is connected to the crystal boat (12). The temperature measuring structure (200) further includes a support plate (26) connected to the base (22), and the support plate (26) is provided with an elongated mounting hole (261). The lower flange (2315) is rotatably connected to a elongated mounting member (27), and the mounting member (27) is passed through the mounting hole (261) and rotated to a fixed position. When the mounting member (27) is in the fixed position, the maximum width direction of the mounting member (27) is not parallel to the maximum width direction of the mounting hole (261).

6. The temperature measurement structure (200) according to claim 5, characterized in that: The temperature measuring structure (200) includes a first guide sleeve (291) and a second guide sleeve (292), wherein the first guide sleeve (291) is located in the first corrugated portion (2311) and the upper flange (2314), and the second guide sleeve (292) is located in the second corrugated portion (2312) and the lower flange (2315), and the first guide sleeve (291) and the second guide sleeve (292) are both sleeved on and contact the temperature calibration component (21) to guide the temperature calibration component (21).

7. The temperature measurement structure (200) according to claim 6, characterized in that: The temperature measuring structure (200) includes a first clamp (201) and a second clamp (202), wherein the first clamp (201) is clamped to the upper flange (2314) to clamp the upper flange (2314) and the first guide sleeve (291); and the second clamp (202) is clamped to the lower flange (2315) to clamp the lower flange (2315) and the second guide sleeve (292).

8. The temperature measurement structure (200) according to claim 7, characterized in that: The temperature measuring structure (200) comprises a first sealing ring (203) and a second sealing ring (204), wherein the first sealing ring (203) is located between the upper flange (2314) and the first clamp (201), and the second sealing ring (204) is located between the lower flange (2315) and the second clamp (202).

9. The temperature measurement structure (200) according to claim 6, characterized in that: The temperature calibration component (21) includes a fixing portion (212) located below the base (22) and a temperature measuring portion (211) passing through the first guide sleeve (291), the second guide sleeve (292), the crystal boat (12) and the furnace body (13); a plurality of temperature measuring points are provided on the temperature measuring portion (211); the plurality of temperature measuring points can measure the temperature of the area between any two temperature measuring components (15); and the plurality of temperature measuring points can also measure the temperature of the area between the lowest temperature measuring component (15) and the bottom of the crystal boat (12); The fixing portion (212) is connected to the lower flange (2315), and a sealing ring structure (205) is provided at the connection between the two.

10. A vertical furnace tube (100), comprising: Base (11); A crystal boat (12), the bottom of which is connected to the base (11); A furnace body (13) is suitable for accommodating the wafer boat (12) and is detachably connected to the wafer boat (12); a lifting mechanism (14), wherein when the crystal boat (12) and the furnace body (13) are disassembled, the lifting mechanism (14) can drive the base (11) to move up and down, thereby driving the crystal boat (12) to move up and down; a plurality of temperature measuring elements (15), at least one of the temperature measuring elements (15) being located at the top of the interior of the furnace body (13), and at least one of the temperature measuring elements (15) being located at the side wall of the interior of the furnace body (13), for measuring the temperature inside the furnace body (13); as well as A plurality of heating elements (16) are installed at a plurality of positions inside the furnace body (13) to heat the interior space of the furnace body (13); It is characterized in that The vertical furnace tube (100) further comprises a temperature measurement structure (200) according to any one of claims 1 to 9.

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