Flower basket slice drawing and inserting mechanism capable of changing direction of silicon slice

Abstract

The invention discloses a flower basket slice digging and inserting mechanism capable of changing the direction of a silicon wafer, which comprises a slice digging mechanism and a slice inserting mechanism, the slice digging mechanism is arranged at the feeding end of equipment and is in butt joint with the feeding section of a stepping belt transmission mechanism, and the slice inserting mechanism is arranged at the discharging end of the equipment and is in butt joint with the discharging section of the stepping belt transmission mechanism. The slice digging mechanism comprises a flower basket slice digging mechanism, a slice digging and correcting mechanism and a step feeding mechanism, and the slice inserting mechanism comprises a flower basket slice inserting mechanism, a slice inserting and correcting mechanism, a longitudinal beating and correcting mechanism and a step discharging mechanism. By means of the innovative structural design, 90-degree accurate steering silicon wafer taking and placing are achieved, the phenomenon of silicon wafer jumping is effectively reduced, under the condition of the same productivity, the equipment size is greatly reduced, the occupied area is reduced, structural parts are easier to manufacture, the productivity takt and stability of a wafer taking and inserting mechanism are effectively improved, the space utilization rate and the process adaptability are both improved, and the production cost is reduced. And the production line layout is optimized.

Description

Technical Field

[0001] The present invention relates to the field of automation equipment, in particular to a wafer-picking and wafer-inserting mechanism for changing the direction of silicon wafers. Background Art

[0002] The development and improvement of photovoltaic solar automation equipment has streamlined the large-scale production of solar cells, enabling widespread use of this clean energy source. However, the key issue in the online connection and transmission between automated solar photovoltaic cell manufacturing equipment and its main process equipment is how to achieve smooth wafer transfer. This directly impacts the size, precision, cost, and efficiency of the entire production line.

[0003] The market's growing demand for larger solar cells necessitates replacement or adjustment of wafer extraction and insertion mechanisms for wafers of varying sizes and specifications, increasing production costs and limiting flexibility. Smooth wafer transport during overall equipment operation is one of the factors affecting wafer breakage rates, as wafers are particularly susceptible to breakage during transport. The wafer extraction and insertion mechanisms require precise alignment and insertion of the wafer into the designated position. These mechanisms often utilize complex mechanical structures and advanced control systems to achieve high-speed, high-precision insertion, which can increase instability.

[0004] The existing wafer extraction and insertion mechanisms on the market generally use a conveyor belt to directly extract or insert silicon wafers from the flower basket. The direction of the mechanism is 180° parallel to the wafer output direction of the flower basket, which can easily cause silicon wafers to jump. Sometimes manual operation is still required, resulting in some deficiencies in the equipment in terms of accuracy, stability, adaptability, and degree of automation, thereby increasing the breakage rate and greatly reducing production efficiency. Summary of the Invention

[0005] In response to the above problems, the present invention provides a wafer picking and inserting mechanism that changes the direction of silicon wafers, realizes 90° direction change transmission of silicon wafers, saves mechanism installation space, and effectively improves the production capacity and stability of the wafer picking and inserting mechanism.

[0006] To solve the above technical problems, the technical solution adopted by the present invention is: a flower basket wafer picking and inserting mechanism for changing the direction of silicon wafers, including a wafer picking mechanism and a wafer inserting mechanism. The wafer picking mechanism is located at the loading end of the equipment and is connected to the loading section of the step belt transmission mechanism. The wafer inserting mechanism is located at the unloading end of the equipment and is connected to the unloading section of the step belt transmission mechanism. The wafer picking mechanism includes a flower basket wafer picking mechanism, a wafer picking and straightening mechanism, and a step feeding mechanism. The wafer inserting mechanism includes a flower basket wafer inserting mechanism, a wafer straightening mechanism, a longitudinal straightening mechanism, and a step unloading mechanism.

[0007] The flower basket sheet picking mechanism includes a slider connecting plate, a sheet picking push seat, a sheet picking plate, a flower basket sheet picking mounting plate, a servo motor, a synchronous pulley, a synchronous belt, a slider and a linear guide rail. The sheet picking plate and the sheet picking push seat are mounted on the slider connecting plate, the slider is mounted on the linear guide rail, the linear guide rail and the synchronous pulley are mounted on the flower basket sheet picking mounting plate, the synchronous belt is fixed to the sheet picking push seat, the servo motor drives the sheet picking push seat to move through the synchronous pulley and the synchronous belt, and drives the sheet picking plate to perform reciprocating sheet picking motion, and the sheet picking direction is 90 degrees to the sheet discharging direction of the flower basket;

[0008] The sheet-picking and correcting mechanism includes an external threaded bearing, a lifting seat, a variable pitch positioning block, a sheet-picking and correcting driving block, a tension spring, a lifting seat, a slider side mounting plate, a lifting seat side plate, a linear guide rail, a slider, a screw stepper motor, and a mounting base plate. The lifting seat is mounted on the slider and the linear guide rail, the external threaded bearing, the variable pitch positioning block and the tension spring are mounted on the lifting seat, the sheet-picking and correcting driving block has an upper narrow and lower wide structure and is mounted on the mounting base plate, the external threaded bearing contacts the sheet-picking and correcting driving block and is connected by rolling along the side, the lifting seat is mounted on the slider through the lifting seat side plate, the linear guide rail is mounted on the slider side mounting plate, and the screw stepper motor is mounted under the mounting base plate to drive the lifting seat to move;

[0009] The step feeding mechanism includes a variable pitch mounting seat, a transverse movement base plate, an eccentric wheel mounting seat, a first transverse movement base plate, a silicon wafer transplanting plate, a second transverse movement base plate, a driving connecting rod, a screw stepping motor, a platform upright plate, a first servo motor and a second servo motor. The variable pitch mounting seat is driven by the screw stepping motor. The transverse movement base plate is mounted on the platform upright plate through a vertical slide rail. The first transverse movement base plate is mounted on the transverse movement base plate through a left-right slide rail. The second transverse movement base plate is mounted on the first transverse movement base plate through a vertical slide rail. The eccentric wheel mounting seat is mounted on the transverse movement base plate and driven by the second servo motor. The silicon wafer transplanting plate is fixedly connected to the first transverse movement base plate. The second transverse movement base plate is mounted on a driving connecting rod, and the driving connecting rod is driven by the first servo motor.

[0010] The flower basket inserting mechanism and stepping unloading mechanism have the same structure as the flower basket picking mechanism and stepping loading mechanism, but move in opposite directions.

[0011] The inserting plate correcting mechanism has the same structure as the pulling plate correcting mechanism, except that the inserting plate correcting driving block is different from the pulling plate correcting driving block. The inserting plate correcting driving block is a structure with a wide upper and lower part and a narrow middle part.

[0012] The longitudinal straightening mechanism includes a pneumatic clamp, a longitudinal straightening mounting seat, a straightening rod, and a clamp arm. The longitudinal straightening mounting seat is installed on the stepping unloading mechanism, the pneumatic clamp is installed on the longitudinal straightening mounting seat, and the straightening rod and clamp arm are installed on the pneumatic clamp.

[0013] Furthermore, an X-axis positioning block is provided on the sheet-cutting plate.

[0014] Furthermore, the silicon wafer transplanting plate is designed to be "H"-shaped, with one end connected to the flower basket wafer picking mechanism and the other end connected to the step feeding mechanism.

[0015] Furthermore, a Y-axis rear positioning block is installed on the silicon wafer transplanting plate.

[0016] From the above description of the structure of the present invention, it can be seen that compared with the prior art, the present invention has the following advantages:

[0017] 1. Through innovative structural design, the present invention can achieve 90° precise rotation of silicon wafers for picking and placing silicon wafers, realize the posture change of silicon wafers, break through the technical limitations of traditional one-way wafer picking, and effectively reduce the phenomenon of silicon wafer jumping. Under the condition of the same production capacity, the equipment size is greatly reduced, the space occupied is reduced, and the manufacturing of structural parts is simpler. It is also of great significance for reducing space resources and lowering the cost of battery cells in the future, achieving a dual improvement in space utilization and process adaptability, changing the disadvantages of the existing equipment with complex structure and large space occupation, and facilitating the optimization of production line layout.

[0018] 2. The variable pitch module of the straightening mechanism in the sheet-pulling and inserting mechanism of the present invention adopts a single-motor drive-cam composite transmission mechanism, combined with spring tension compensation, and realizes synchronous control of jacking and variable pitch through a mechanical linkage device, which reduces the number of power sources by half, reduces the redundant design of the mechanism, effectively improves the action rhythm and action stability, and at the same time saves equipment costs, promoting the industry to develop in the direction of efficient production. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0020] Figure 1 It is a schematic diagram of the overall transmission structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the film-pulling mechanism of the present invention;

[0022] Figure 3 This is a schematic diagram of the inserting mechanism of the present invention;

[0023] Figure 4 This is a schematic diagram of the flower basket picking mechanism of the present invention;

[0024] Figure 5 This is a schematic diagram of the sheet-cutting and straightening mechanism of the present invention;

[0025] Figure 6This is a front view of the step feeding mechanism of the present invention;

[0026] Figure 7 This is an axonometric view of the step-feeding mechanism of the present invention;

[0027] Figure 8 This is a schematic diagram of the structure of the insert alignment drive block of the present invention;

[0028] Figure 9 It is a schematic diagram of the longitudinal straightening mechanism of the present invention. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0030] Example

[0031] refer to Figure 1-9 A wafer picking and inserting mechanism for changing the direction of silicon wafers includes a wafer picking mechanism 1 and a wafer inserting mechanism 2. The wafer picking mechanism 1 is located at the loading end of the overall automation equipment and docked with the loading section of the stepping belt transmission mechanism 3. The wafer inserting mechanism 2 is located at the unloading end of the overall automation equipment and docked with the unloading section of the stepping belt transmission mechanism 3. Figure 1 As shown, silicon wafers are taken out one by one from the full flower basket A and placed on the loading section of the stepping belt transmission mechanism 3. After the silicon wafers are transferred from the loading section to the unloading section of the stepping belt transmission mechanism 3, the stepping belt transports the silicon wafers to the inserting mechanism 2, and the inserting mechanism 2 inserts the silicon wafers into the empty flower basket B.

[0032] The piece picking mechanism 1 includes a flower basket piece picking mechanism 11, a piece picking and straightening mechanism 12, and a stepping feeding mechanism 13; the piece inserting mechanism 2 includes a flower basket piece inserting mechanism 21, a piece inserting and straightening mechanism 22, a longitudinal patting and straightening mechanism 23, and a stepping unloading mechanism 24.

[0033] The flower basket picking mechanism 11 includes a slider connecting plate 111, a picking push seat 112, a picking plate 113, an X-axis positioning block 114, a flower basket picking installation plate 115, a servo motor 116, a synchronous pulley 117, a synchronous belt 118, a slider 119 and a linear guide 1110. The picking plate 113 and the picking push seat 112 are installed on the slider connecting plate 111, the slider 119 is installed on the linear guide 1110, and the linear guide 1110 and the synchronous pulley are installed on the linear guide 1110. 117 is installed on the flower basket chip removal mounting plate 115, and the synchronous belt 118 is fixed on the chip removal push seat 112. The servo motor 116 drives the chip removal push seat 112 to move through the synchronous pulley 117 and the synchronous belt 118, driving the chip removal plate 113 to perform reciprocating chip removal movement. The chip removal direction is 90° to the chip removal direction of the flower basket. The chip removal plate 113 is provided with an X-axis positioning block 114, which can play an axial positioning role when the silicon wafer is taken out of the flower basket.

[0034] The sheet-picking and correcting mechanism 12 includes an external threaded bearing 121, a lifting seat 122, a variable pitch positioning block 123, a sheet-picking and correcting drive block 124, a tension spring 125, a lifting seat 126, a slider side mounting plate 127, a lifting seat side plate 128, a linear guide rail 129, a slider 1210, a screw stepper motor 1211, and a mounting base 1212. The lifting seat 122 is mounted on the slider 1210 and the linear guide rail 129. The external threaded bearing 121, the variable pitch positioning block 123 and the tension spring 125 are The spring 125 is installed on the lifting seat 122, and the piece-picking and straightening driving block 124 is a narrow-upper and wide-lower structure installed on the mounting base 1212. The external threaded bearing 121 is in contact with the piece-picking and straightening driving block 124 and is connected to it by rolling along the side. The lifting seat 126 is installed on the slider 1210 through the lifting seat side plate 128, and the linear guide rail 129 is installed on the slider side mounting plate 127. The screw stepper motor 1211 is installed under the mounting base 1212 to drive the lifting seat 126 to move.

[0035] During operation, when the flower basket mechanism is in the film-picking state, the external threaded bearing 121 is at the bottom of the film-picking and aligning drive block 124, and the lifting seat 122 is in an open state. At this time, the tension spring 125 at the other end is in a stretched state. When the screw stepper motor 1211 drives the lifting seat 126 upward, the external threaded bearing 121 also moves to the upper end along the film-picking and aligning drive block 124. At this time, due to elastic contraction of the spring, the lifting seat 122 is in a tightened state. At this time, the plane of the variable pitch positioning block 123 exceeds the X-axis positioning block 114 of the flower basket mechanism, and the silicon wafer is lifted and placed on the variable pitch positioning block 123, which acts as a limit. The lifting and variable pitch functions are driven by the screw stepper motor 1211, which is used to transport the silicon wafer to the step loading mechanism 13 in the next step.

[0036] The step feeding mechanism 13 includes a variable pitch mounting seat 131, a transverse base plate 132, an eccentric wheel mounting seat 133, a first transverse base plate 134, a silicon wafer transplanting plate 135, a Y-axis rear section positioning block 136, a second transverse base plate 137, a driving connecting rod 138, a screw stepper motor 139, a platform upright plate 1311, a first servo motor 1312 and a second servo motor 1313. The variable pitch mounting seat 131 is driven by the screw stepper motor 139, the transverse base plate 132 is mounted on the platform upright plate 1311 through a vertical slide rail, and the first transverse base plate 134 is mounted on the transverse base plate 1311 through a left and right slide rail. 32, the second transverse seat plate 137 is installed on the first transverse seat plate 134 through the up and down slide rails, the eccentric wheel mounting seat 133 is installed on the transverse base plate 132, and is driven by the second servo motor 1313, the silicon wafer transfer plate 135 is fixedly connected to the first transverse seat plate 134, and the silicon wafer transfer plate 135 is installed with a Y-axis rear section positioning block 136. The silicon wafer transfer plate 135 is designed to be "H"-shaped, with one end connected to the flower basket picking mechanism 11 and the other end connected to the step feeding mechanism 13. The second transverse seat plate 137 is installed with a driving connecting rod 138, and the driving connecting rod 138 is driven by the first servo motor 1312.

[0037] During operation, the movement direction of the step feeding mechanism 13 is at a 90° angle to the flower basket sheet picking mechanism 11. When the lifting seat 122 in the sheet picking and correcting mechanism 12 lifts the sheet, the connecting rod 138 is driven by the first servo motor 1312 to rotate around the first servo motor 1312, driving the second transverse seat plate 137 to move up and down, and the transverse base plate 132 driven by the second servo motor 1313 also drives the second transverse seat plate 137 on the transverse base plate to move left and right. When the driving connecting rod 138 moves to the limit position on the other side, due to the action of the eccentric wheel mounting seat 133, the second transverse seat plate 137 first descends and then moves horizontally, and then moves back and forth in a reciprocating cycle, lifting the silicon wafer lifted by the lifting seat 122 to the silicon wafer transplanting plate 135. Since the step feeding mechanism 13 is parallel to the step belt transmission mechanism 3 and docked, the cycle is repeated to transport groups of silicon wafers to the step belt transmission mechanism 3.

[0038] The flower basket inserting mechanism 21 and the stepping unloading mechanism 24 have the same structure as the flower basket picking mechanism 11 and the stepping loading mechanism 13, but move in opposite directions.

[0039] The inserting and correcting mechanism 22 has the same structure as the extracting and correcting mechanism 12, except that the inserting and correcting driving block 221 is different from the extracting and correcting driving block 124. Figure 8 As shown, the insert alignment driving block 221 is a structure that is wide at the top and bottom and narrow in the middle.

[0040] The longitudinal straightening mechanism 23 includes a pneumatic clamp 231, a longitudinal straightening mounting seat 232, a straightening rod 233, and a clamp arm 234. The longitudinal straightening mounting seat 232 is installed on the stepping unloading mechanism 24, the pneumatic clamp 231 is installed on the longitudinal straightening mounting seat 232, and the straightening rod 233 and the clamp arm 234 are installed on the pneumatic clamp 231.

[0041] During operation, when the lifting seat 122 lifts the silicon wafer, the Y-axis direction of the silicon wafer is limited by the action of the wafer positioning block on the lifting seat. At this time, the longitudinal alignment mechanism 23 moves, and the pneumatic clamp 231 drives the alignment rod 233 to align the silicon wafer, and the silicon wafer is aligned in the X-axis direction.

[0042] When the inserting mechanism 2 is actually working as a whole, the stepping unloading mechanism 24 first transports the silicon wafer along the Y-axis direction through the silicon wafer transfer plate. When the silicon wafer is transported to the inserting wafer straightening mechanism 23, the lifting seat rises, the silicon wafer transfer plate retreats, and then the silicon wafer is straightened by the longitudinal straightening mechanism 23. After that, the lifting seat descends under the action of the screw stepping motor, and the silicon wafer falls on the inserting plate of the flower basket inserting mechanism 21, and the silicon wafer is inserted into the empty flower basket along the X-axis.

[0043] Compared with the wafer-pulling and wafer-inserting mechanisms on the market, which generally use conveyor belts to directly take out or insert silicon wafers from the flower basket, the wafer-pulling direction of the mechanism is 180° parallel to the wafer-out direction of the flower basket. The present invention, through innovative structural design, can achieve 90° precise rotation of silicon wafers for picking and placing silicon wafers, realize the posture conversion of silicon wafers, break through the technical limitations of traditional one-way wafer extraction, and effectively reduce the phenomenon of silicon wafer jumping.

[0044] Under the same production capacity, the present invention greatly reduces the equipment size and occupancy, and at the same time, the structural parts are simpler to manufacture, which is also of great significance for reducing land resources and lowering the cost of battery cells in the future. It achieves a dual improvement in space utilization and process adaptability, changes the disadvantages of the existing equipment with complex structure and large space occupation, and is conducive to optimizing the production line layout.

[0045] The variable pitch module of the calibrating mechanism in the sheet-pulling and inserting mechanism adopts a single-motor drive-cam composite transmission mechanism, combined with spring tension compensation, and realizes synchronous control of jacking and pitch change through a mechanical linkage device, which reduces the number of power sources by half, reduces the redundant design of the mechanism, effectively improves the action rhythm and action stability, and saves equipment costs at the same time, promoting the industry to develop in the direction of efficient production.

[0046] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A wafer picking and inserting mechanism for changing the direction of silicon wafers, comprising a wafer picking mechanism (1) and a wafer inserting mechanism (2), wherein the wafer picking mechanism (1) is located at the feeding end of the device and docked with the feeding section of a stepping belt transmission mechanism (3), and the wafer inserting mechanism (2) is located at the unloading end of the device and docked with the unloading section of the stepping belt transmission mechanism (3), characterized in that: The sheet picking mechanism (1) includes a flower basket sheet picking mechanism (11), a sheet picking and straightening mechanism (12), and a stepping feeding mechanism (13); the sheet inserting mechanism (2) includes a flower basket sheet inserting mechanism (21), a sheet inserting and straightening mechanism (22), a longitudinal patting and straightening mechanism (23), and a stepping unloading mechanism (24); The flower basket sheet picking mechanism (11) comprises a slider connecting plate (111), a sheet picking push seat (112), a sheet picking plate (113), a flower basket sheet picking mounting plate (115), a servo motor (116), a synchronous pulley (117), a synchronous belt (118), a slider (119) and a linear guide rail (1110). The sheet picking plate (113) and the sheet picking push seat (112) are mounted on the slider connecting plate (111), and the slider (119) is mounted on the linear guide rail. On the guide rail (1110), the linear guide rail (1110) and the synchronous pulley (117) are installed on the flower basket sheet removal installation plate (115), the synchronous belt (118) is fixed on the sheet removal push seat (112), the servo motor (116) drives the sheet removal push seat (112) to move through the synchronous pulley (117) and the synchronous belt (118), and drives the sheet removal plate (113) to perform reciprocating sheet removal movement, and the sheet removal direction is 90 degrees to the sheet removal direction of the flower basket; The sheet-picking and correcting mechanism (12) comprises an external threaded bearing (121), a lifting seat (122), a pitch-variable positioning block (123), a sheet-picking and correcting driving block (124), a tension spring (125), a lifting seat (126), a slider side mounting plate (127), a lifting seat side plate (128), a linear guide rail (129), a slider (1210), a screw stepping motor (1211), and a mounting base (1212). The lifting seat (122) is mounted on the slider (1210) and the linear guide rail (129). The external threaded bearing (121), the pitch-variable positioning block (123) ) and a tension spring (125) are mounted on the lifting seat (122); the sheet-cutting alignment drive block (124) is a structure that is narrow at the top and wide at the bottom and is mounted on the mounting base (1212); the external threaded bearing (121) contacts the sheet-cutting alignment drive block (124) and is connected by rolling along the side; the lifting seat (126) is mounted on the slider (1210) through the lifting seat side plate (128); the linear guide rail (129) is mounted on the slider side mounting plate (127); and the screw stepping motor (1211) is mounted under the mounting base (1212) to drive the lifting seat (126) to move; The step feeding mechanism (13) comprises a variable pitch mounting seat (131), a transverse bottom plate (132), an eccentric wheel mounting seat (133), a first transverse bottom plate (134), a silicon wafer transplanting plate (135), a second transverse bottom plate (137), a driving connecting rod (138), a screw stepping motor (139), a platform upright plate (1311), a first servo motor (1312) and a second servo motor (1313), wherein the variable pitch mounting seat (131) is driven by the screw stepping motor (139), and the transverse bottom plate (132) is mounted on the platform upright plate (1311) via a slide rail in the up-down direction. ), the first transverse seat plate (134) is mounted on the transverse base plate (132) via a left-right slide rail, the second transverse seat plate (137) is mounted on the first transverse seat plate (134) via a top-bottom slide rail, the eccentric wheel mounting seat (133) is mounted on the transverse base plate (132) and driven by a second servo motor (1313), the silicon wafer transplanting plate (135) is fixedly connected to the first transverse seat plate (134), a driving connecting rod (138) is mounted on the second transverse seat plate (137), and the driving connecting rod (138) is driven by the first servo motor (1312); The flower basket inserting mechanism (21) and the stepping unloading mechanism (24) have the same structure as the flower basket picking mechanism (11) and the stepping loading mechanism (13), but have opposite movement directions; The inserting plate correcting mechanism (22) has the same structure as the pulling plate correcting mechanism (12), except that the inserting plate correcting driving block (221) is different from the pulling plate correcting driving block (124), and the inserting plate correcting driving block (221) has a structure with a wide upper and lower portion and a narrow middle portion; The longitudinal straightening mechanism (23) comprises a pneumatic clamp (231), a longitudinal straightening mounting seat (232), a straightening rod (233), and a clamp arm (234); the longitudinal straightening mounting seat (232) is mounted on the stepping blanking mechanism (24); the pneumatic clamp (231) is mounted on the longitudinal straightening mounting seat (232); and the straightening rod (233) and the clamp arm (234) are mounted on the pneumatic clamp (231).

2. The wafer-moving and inserting mechanism for changing the direction of a silicon wafer according to claim 1, characterized in that: An X-axis positioning block (114) is provided on the sheet-cutting plate (113).

3. The wafer-moving and inserting mechanism for changing the direction of a silicon wafer according to claim 1, characterized in that: The silicon wafer transplanting plate (135) is designed to be "H"-shaped, with one end connected to the flower basket wafer picking mechanism (11) and the other end connected to the step feeding mechanism (13).

4. The wafer-moving and inserting mechanism for changing the direction of a silicon wafer according to claim 1, characterized in that: A Y-axis rear section positioning block (136) is installed on the silicon wafer transplanting plate (135).

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