Anti-blocking crucible cover for vacuum coating

Abstract

The invention relates to an anti-blocking crucible cover for vacuum coating. The anti-blocking crucible cover comprises a cover body, a nozzle and a terminal, the cover body is of a plate-shaped structure with a preset thickness, the cover body is placed at the top of an external crucible, a through hole is formed in the top of the cover body, the through hole penetrates through the top and the bottom of the cover body, and the cover body and the crucible form a heating cavity; the nozzle is of a hollow structure with an upper opening and a lower opening, is arranged at the top of the cover body and communicates with the through hole; the terminal is arranged at the top of the top cover and used for being connected with an external power supply; the top of the cover body is covered with a coating, and the coating on the top of the cover body comprises a pyrolytic boron nitride layer and a graphite layer and is used for enabling the cover body to have a heating function; by means of the arrangement, it can be guaranteed that the cover body and the nozzle are evenly heated, the evaporation environment of the crucible is not affected at all, the problem that the nozzle is blocked is further solved, and the problem that the stability of evaporation coating equipment and the process is seriously affected due to the fact that the nozzle is blocked is solved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to an anti-clogging crucible cover for vacuum coating. Background Technology

[0002] Vacuum coating technology has been widely used in applications such as semiconductor chip fabrication, photovoltaic cell film fabrication, capacitor conductive film fabrication, and OLED film fabrication. As one of the emerging high-tech industry application technologies, its technical methods and applications have developed rapidly in recent years.

[0003] Currently, the main methods for manufacturing micron-thickness conductive metal films are evaporation and sputtering. Sputtering is slower, requiring a longer time to form the film, and the equipment is more expensive. Evaporation, on the other hand, is faster, forming the film in a shorter time. Evaporation deposition works by heating the material in a crucible to directly sublimate it, then expelling the material gas through a crucible nozzle and uniformly depositing it onto a substrate. In this process, the nozzle is heated by an external hot wire. The impact of the hot wire on the evaporation environment of the crucible must be considered, leading to nozzle clogging, which seriously affects the stability of the evaporation deposition equipment and process. Therefore, designing a suitable evaporation source or crucible to solve the problem of crucible nozzle clogging is one of the main challenges facing engineers in the industry. Summary of the Invention

[0004] In view of this, this application provides an anti-clogging crucible cover for vacuum coating, which achieves uniform heating by applying a coating to the surface of the anti-clogging crucible cover for vacuum coating without affecting the evaporation environment.

[0005] According to one aspect of this application, a clogging-resistant crucible cover for vacuum coating is provided, comprising a cover body, a nozzle, and a terminal; the cover body is a plate-shaped structure with a preset thickness, the cover body is placed on top of an external crucible, the top of the cover body has a through hole, the through hole penetrates the top and bottom of the cover body, and the cover body and the crucible form a heating chamber; the nozzle is a hollow structure with openings at the top and bottom, disposed on the top of the cover body, and the nozzle communicates with the through hole; the terminal is disposed on the top of the cover body for connection to an external power source; the top of the cover body is covered with a coating, the coating comprising a pyrolytic boron nitride layer and a graphite layer, for enabling the cover body to have a heating function.

[0006] In one possible implementation, the coating comprises a first pyrolytic boron nitride layer, a graphite layer, and a second pyrolytic boron nitride layer; the first pyrolytic boron nitride layer is laid on top of the cover; the graphite layer is laid on top of the first pyrolytic boron nitride layer; and the second pyrolytic boron nitride layer is laid on top of the graphite layer.

[0007] In one possible implementation, the nozzle is also covered with the coating, and the first pyrolytic boron nitride layer is laid on the outer peripheral wall of the nozzle.

[0008] In one possible implementation, the graphite layer on the nozzle is linearly arranged and includes a plurality of annular lines and two vertical lines; the plurality of annular lines surround the nozzle and are arranged in the vertical direction of the nozzle, and the two vertical lines are arranged symmetrically with respect to the nozzle and are perpendicularly connected to the annular lines.

[0009] In one possible implementation, the first pyrolytic boron nitride layer and the graphite layer are also deposited on the terminal, and the first pyrolytic boron nitride layer is deposited on the outer surface of the terminal.

[0010] In one possible implementation, the graphite layer is arranged in multiple consecutive "U" shapes on the first pyrolytic boron nitride layer.

[0011] In one possible implementation, there are multiple nozzles and multiple through holes, with the number of nozzles being the same as the number of through holes, and the nozzles being located at the central axis of the top horizontal plane of the cover.

[0012] In one possible implementation, the number of terminals is two, with the two terminals respectively disposed on both sides of the top of the cover and on the same horizontal line as the nozzle.

[0013] In one possible implementation, a thermocouple is disposed on the second pyrolytic boron nitride layer and on the graphite layer on the terminal.

[0014] In one possible implementation, the cover is a cuboid structure, the nozzle is a hollow cylindrical structure with upper and lower openings, and the terminal is a cylindrical structure.

[0015] In one possible implementation, the nozzle and the cover are integrated, and the terminal and the cover are integrated.

[0016] The beneficial effects of this invention are as follows: The cover, nozzle, and terminal are configured. The cover is a plate-like structure with a predetermined thickness, placed on top of an external crucible, forming a heating chamber. A through hole is provided on the top of the cover for connection to the nozzle. The nozzle is a hollow structure with openings at the top and bottom, located on the top of the cover and connected to the through hole. This configuration allows the evaporation material in the crucible to directly sublimate during heating and be ejected as gas through the nozzle. The terminal is located on the top of the cover for connection to an external power source. The top of the cover is covered with a coating consisting of a pyrolytic boron nitride layer and a graphite layer. The terminal, in conjunction with the external power source, connects to the external power source. Because the graphite layer has good conductivity, current is transferred to the pyrolytic boron nitride layer and the graphite layer to heat the cover. This heating method ensures uniform heating of the cover, does not affect the evaporation environment of the crucible, and further prevents nozzle clogging. Attached Figure Description

[0017] Figure 1 This invention provides a schematic diagram illustrating the specific structure of an anti-clogging crucible lid for vacuum coating according to an embodiment of this application.

[0018] Figure 2 This illustration shows a schematic diagram of the coating on an anti-clogging crucible lid for vacuum coating according to an embodiment of this application.

[0019] Figure 3 This diagram shows a schematic of the graphite layer on the upper surface of the anti-clogging crucible lid for vacuum coating according to an embodiment of this application.

[0020] Figure 4 A front view showing the graphite layer on the nozzle of the anti-clogging crucible lid for vacuum coating according to an embodiment of this application;

[0021] Figure 5 A left view showing the graphite layer on the nozzle of the anti-clogging crucible lid for vacuum coating according to an embodiment of this application;

[0022] Figure 6 A top view showing the graphite layer on the nozzle of the anti-clogging crucible lid for vacuum coating according to an embodiment of this application;

[0023] Figure 7 This diagram illustrates the connection between the terminals of the anti-clogging crucible cover for vacuum coating according to an embodiment of this application and an external power supply. Detailed Implementation

[0024] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0025] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar symbols denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the invention, and should not be construed as limiting the invention.

[0026] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention or to simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0028] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," "fixing," "linking," "hinging," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0029] like Figure 1 As shown, the anti-clogging crucible cover for vacuum coating includes a cover body 100, a nozzle 200, and a terminal 300. The cover body 100 is a plate-shaped structure with a preset thickness. The cover body 100 is placed on top of an external crucible. A through hole 110 is provided on the top of the cover body 100, and the cover body 100 and the crucible form a heating chamber. The nozzle 200 is a hollow structure with openings at the top and bottom. It is located on the top of the cover body 100 and is connected to the through hole 110. The terminal 300 is located on the top of the cover body 100 and is used to connect to an external power supply 500. The top of the cover body 100 is covered with a coating 400, which includes a pyrolytic boron nitride layer 410 and a graphite layer 420, to enable the cover body 100 to have a heating function.

[0030] Specifically, the structure of the anti-clogging crucible cover for vacuum coating includes a cover body 100, a nozzle 200, and a terminal 300. The cover body 100 is designed to work in conjunction with the crucible. The cover body 100 is a plate-like structure with a preset thickness. It is placed on top of the outer crucible, forming a heating chamber. The evaporation material is placed in the heating chamber for heating and sublimation. The nozzle 200 is used to eject the evaporation material gas during heating and sublimation, allowing it to be uniformly deposited onto the outer substrate. Therefore, the nozzle 200 is a hollow structure with openings at the top and bottom. To allow the nozzle 200 to communicate with the heating chamber, a through hole 110 is formed in the cover body 100, penetrating both the top and bottom. The nozzle 200 is positioned within the through hole 110, thus connecting the nozzle 200 to the heating chamber. Terminal 300 is provided for connection to an external power supply 500. Meanwhile, a coating 400 is provided on the top of the cover 100. The coating 400 includes a pyrolytic boron nitride layer 410 and a graphite layer 420. The pyrolytic boron nitride layer 410 is made of pyrolytic boron nitride, and the graphite layer 420 is made of graphite. This arrangement is because pyrolytic boron nitride has good thermal conductivity and insulation, and graphite has good electrical and thermal conductivity. By combining it with the terminal 300, the cover 100 is heated, giving the whole structure a heating function.

[0031] In one possible implementation, the top coating 400 of the cover 100 includes a first pyrolytic boron nitride layer 411, a graphite layer 420, and a second pyrolytic boron nitride layer 412; the first pyrolytic boron nitride layer 411 is laid on the top of the cover 100; the graphite layer 420 is laid on the first pyrolytic boron nitride layer 411; and the second pyrolytic boron nitride layer 412 is laid on the graphite layer 420.

[0032] Specifically, such as Figure 2 As shown, the coating 400 comprises three layers, two of which are pyrolytic boron nitride layers 410, namely a first pyrolytic boron nitride layer 411 and a second pyrolytic boron nitride layer 412, and one layer is a graphite layer 420. The laying order of the first pyrolytic boron nitride layer 411, the second pyrolytic boron nitride layer 412, and the graphite layer 420 is as follows: the first pyrolytic boron nitride layer 411 is laid on the top of the cover 100; the graphite layer 420 is laid on the first pyrolytic boron nitride layer 411; and the second pyrolytic boron nitride layer 412 is laid on the graphite layer 420. The pyrolytic boron nitride layer 410 is distributed on both the upper and lower surfaces of the graphite layer 420, mainly serving to insulate the graphite layer 420.

[0033] In one possible implementation, a coating 400 is also deposited on the nozzle 200, and a first pyrolytic boron nitride layer 411 is deposited on the outer peripheral wall of the nozzle 200.

[0034] Specifically, such as Figure 2 As shown, in order to allow the nozzle 200 to also be heated, a first pyrolytic boron nitride layer 411, a graphite layer 420, and a second pyrolytic boron nitride layer 412 are also laid on the nozzle 200. The first pyrolytic boron nitride layer 411 is laid on the outer peripheral wall of the nozzle 200, thus avoiding the opening at the top of the nozzle 200 and preventing the evaporating material gas from being unable to be ejected. The laying order of the first pyrolytic boron nitride layer 411, the graphite layer 420, and the second pyrolytic boron nitride layer 412 on the outer peripheral wall of the nozzle 200 is the same as the laying order on the cover 100, as follows: the first pyrolytic boron nitride layer 411 is laid on the outer peripheral wall of the nozzle 200; the graphite layer 420 is laid on the first pyrolytic boron nitride layer 411; and the second pyrolytic boron nitride layer 412 is laid on the graphite layer 420.

[0035] In one possible implementation, the first pyrolytic boron nitride layer 411 and the graphite layer 420 are also laid on the terminal 300, and the first pyrolytic boron nitride layer 411 is laid on the outer surface of the terminal 300.

[0036] Specifically, such as Figure 2 As shown, in order to enable the terminal 300 to output power better, a first pyrolytic boron nitride layer 411 and a graphite layer 420 are also laid on the terminal 300. The first pyrolytic boron nitride layer 411 is laid on the outer surface of the terminal 300, so that the entire surface of the terminal 300 is covered with the first pyrolytic boron nitride layer 411. The graphite layer 420 is laid on the first pyrolytic boron nitride layer 411 on the surface of the terminal 300. The graphite layer 420 is directly connected to the external power supply 300, which can conduct electricity better.

[0037] In one possible implementation, the graphite layer 420 is arranged in multiple consecutive "U" shapes on the first pyrolytic boron nitride layer 411.

[0038] Specifically, such as Figure 3 As shown, in order to achieve more uniform electrical conductivity and make the cover 100 heat up more evenly, the graphite layer 420 is arranged in multiple continuous "U" shapes on the first pyrolytic boron nitride layer 411.

[0039] In one possible implementation, the cover 100 is a cuboid structure, the nozzle 200 is a hollow cylindrical structure with openings at the top and bottom, and the terminal 300 is a cylindrical structure.

[0040] Specifically, such as Figure 1 and Figure 3As shown, the cover 100 is a cuboid structure, the nozzle 200 is a hollow cylindrical structure with openings at the top and bottom, and the terminal 300 is a cylindrical structure. However, it is not limited to this structure. The shapes of the cover 100, nozzle 200, and terminal 300 can be changed according to the shape of the crucible. For example, they can all be circular, square, etc.

[0041] In one possible implementation, the nozzle 200 and the cover 100 are integrated, and the terminal 300 and the cover 100 are integrated. There are multiple nozzles 200 and multiple through holes 110. The number of nozzles 200 is the same as the number of through holes 110. The nozzles 200 are located at the central axis of the top horizontal plane of the cover 100, and the nozzles 200 are evenly arranged along the length of the cover 100.

[0042] Specifically, such as Figures 1 to 3 As shown, in this embodiment, the cover 100 has a cuboid structure, the nozzle 200 has a hollow cylindrical structure with openings at the top and bottom, and the terminal 300 has a cylindrical structure. For ease of use, the nozzle 200 and the cover 100 are integrated, and the terminal 300 is also integrated. To better facilitate the sublimation of the evaporating material by ejecting the evaporating material gas through the nozzle 200, thus accelerating the process, both the number of nozzles 200 and the number of through holes 110 are multiple. The number of nozzles 200 and the number of through holes 110 are the same, and the positions of the nozzles 200 and the through holes 110 are the same, all evenly distributed along the length direction of the cover 100. The aforementioned length direction refers to... Figure 3 The direction is from left to right, and each nozzle 200 is set on the graphite layer 420.

[0043] In one possible implementation, there are two terminals 300, which are respectively disposed on both sides of the top of the cover 100 and are on the same horizontal line as the nozzle 200.

[0044] Specifically, such as Figure 3As shown, in this embodiment, two terminals 300 and multiple nozzles 200 form a group, and multiple groups can be set according to actual conditions. The two terminals 300 are respectively set on both sides of the top of the cover 100, and multiple nozzles 200 are set on the two terminals 300 and are parallel to the length direction of the cover 100. One terminal 300 is the starting end of the graphite layer 420, and the other terminal 300 is the ending end of the graphite layer 420. The graphite layer 420 starts from the starting end and is set in a U-shape towards the ending end. During this process, it encounters the nozzle 200. The graphite layer 420 on the nozzle 200 is linearly set and includes multiple circular lines 421 and two vertical lines 422. The multiple circular lines 421 surround the nozzle 200 and are set in the vertical direction of the nozzle 200. The two vertical lines 422 are symmetrically set with respect to the nozzle 200, and the vertical lines 422 are perpendicularly connected to the circular lines 421 and then set towards the ending end.

[0045] In one possible implementation, thermocouples are provided on the second pyrolytic boron nitride layer 412 and on the graphite layer 420 on the terminal 300.

[0046] Specifically, thermocouples are installed on the second pyrolytic boron nitride layer 412 and the graphite layer 420 on the terminal 300 to detect and provide feedback on their temperature, thereby enabling the temperature of the cover 100 and the nozzle 200 to be set and adjusted.

[0047] The material of the lid 100 and nozzle 200 can be the same as the material of the crucible itself, or they can be different. Depending on the sublimation point of the evaporation material, common materials include titanium, tantalum, graphite, and pyrolytic silicon nitride.

[0048] To better adapt to terminal 300, the external power supply 500 includes a connecting clip 510, power terminal 520, and fixing bolt 530, according to... Figure 4 It can be seen that there are two connecting clips 510, which are symmetrically arranged around the terminal 300 to clamp the terminal 300. The power terminal 520 is located inside the opposite end of the connecting clip 510 and the terminal 300. The two connecting clips 510 are fixed by fixing bolts 530 to clamp the terminal 300. In order to improve conductivity, the material of the two connecting clips 510 is graphite.

[0049] When using this application: the evaporation material is placed in a crucible, the cover 100 is placed on top, and the connection is made to the external power supply 500 via the terminal 300 and the connecting clip 510 to conduct electricity, so that the cover 100 and the nozzle 200 have a heating function, heating the evaporation material in the crucible, the evaporation material begins to sublimate, and the material gas is sprayed out through the nozzle 200, and then uniformly deposited onto the substrate.

[0050] This application includes a cover, a nozzle, and a terminal. The cover is a plate-like structure with a predetermined thickness, placed on top of an external crucible, forming a heating chamber. A through hole is provided at the top of the cover for connection to the nozzle. The nozzle is a hollow structure with openings at the top and bottom, located at the top of the cover and connected to the through hole. This arrangement allows the evaporating material in the crucible to directly sublimate during heating and be ejected as gas through the nozzle. The terminal is located at the top of the cover for connection to an external power source. The top of the cover covers... The coating consists of a pyrolytic boron nitride layer and a graphite layer on the top of the cover. After mating with the terminals, the terminals are connected to an external power source. Because the graphite layer has good conductivity, and because the graphite layer is arranged in multiple "U" shapes on the first pyrolytic boron nitride layer, current is transferred to the pyrolytic boron nitride layer and the graphite layer to heat the cover. This arrangement ensures that the cover and the nozzle are heated evenly, without affecting the evaporation environment of the crucible. It further prevents the nozzle clogging problem and solves the problem of nozzle clogging, which seriously affects the stability of the evaporation coating equipment and process.

[0051] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope disclosed in the present invention, based on the technical solution and concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A clog-resistant crucible lid for vacuum coating, characterized in that, Includes the cover, nozzle, and terminals; The cover is a plate-shaped structure with a preset thickness. The cover is suitable for covering the top of an external crucible. The top of the cover has a through hole that passes through the top and bottom of the cover. The cover and the crucible form a heating chamber. The nozzle is a hollow structure with openings at the top and bottom, and is disposed on the top of the cover, and the nozzle is connected to the through hole; The terminal is located on the top of the top cover and is used for connection to an external power source; The top of the cover is covered with a coating comprising a pyrolytic boron nitride layer and a graphite layer, which enables the cover to have a heating function.

2. The anti-clogging crucible lid for vacuum coating according to claim 1, characterized in that, The coating comprises a first pyrolytic boron nitride layer, a graphite layer, and a second pyrolytic boron nitride layer; The first pyrolytic boron nitride layer is laid on the top of the cover; The graphite layer is laid on the first pyrolytic boron nitride layer; The second pyrolytic boron nitride layer is laid on the graphite layer.

3. The anti-clogging crucible lid for vacuum coating according to claim 2, characterized in that, The nozzle is also covered with the coating, and the first pyrolytic boron nitride layer is laid on the outer peripheral wall of the nozzle.

4. The anti-clogging crucible lid for vacuum coating according to claim 3, characterized in that, The graphite layer on the nozzle is arranged linearly and includes multiple circular lines and two vertical lines; The plurality of said annular lines surround the nozzle and are arranged in the vertical direction of the nozzle, and the two said vertical lines are arranged symmetrically with respect to the nozzle and are perpendicularly connected to the annular lines.

5. The anti-clogging crucible lid for vacuum coating according to claim 4, characterized in that, The first pyrolytic boron nitride layer and the graphite layer are also laid on the terminal, and the first pyrolytic boron nitride layer is laid on the outer surface of the terminal.

6. The anti-clogging crucible lid for vacuum coating according to claim 5, characterized in that, The graphite layer is arranged in multiple continuous "U" shapes on the first pyrolytic boron nitride layer.

7. The anti-clogging crucible lid for vacuum coating according to any one of claims 1-6, characterized in that, The number of nozzles and the number of through holes are both multiple, the number of nozzles is the same as the number of through holes, and the nozzles are located at the central axis of the top horizontal plane of the cover.

8. The anti-clogging crucible lid for vacuum coating according to claim 7, characterized in that, The number of terminals is two, and the two terminals are respectively located on both sides of the top of the cover, and are on the same horizontal line as the nozzle.

9. The anti-clogging crucible lid for vacuum coating according to claim 8, characterized in that, Thermocouples are disposed on the second pyrolytic boron nitride layer and on the graphite layer on the terminal.

10. The anti-clogging crucible lid for vacuum coating according to any one of claims 1-6, characterized in that, The cover is a cuboid structure, the nozzle with its upper and lower openings is a hollow cylindrical structure, and the terminal is a cylindrical structure. The nozzle and the cover are integrated, and the terminal and the cover are integrated.

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