Vacuum window structure and vacuum processing apparatus

Abstract

The application relates to the technical field of vacuum processing, and particularly discloses a vacuum window structure and a vacuum processing device. The vacuum window structure comprises a vacuum chamber, a window assembly, a protection channel, a low-temperature trapping assembly and a gas supply assembly; the vacuum chamber is provided with an inspection window; the window assembly is arranged in the vacuum chamber; the protection channel is arranged in the vacuum chamber; an air outlet of the low-temperature trapping assembly is communicated with one side of the protection channel far from the inspection window; the gas supply assembly comprises a gas supply control assembly, a gas supply pipeline and a plasma generator; the gas supply control assembly is arranged outside the vacuum chamber; one end of the gas supply pipeline is communicated with the gas supply control assembly; the other end of the gas supply pipeline is communicated with one side of the protection channel close to the inspection window; and the plasma generator is arranged in the gas supply pipeline. The vacuum window structure can avoid material vapor from being deposited on the window assembly and ensure that the vacuum processing area can be monitored in real time.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum processing, in particular to a vacuum window structure and a vacuum processing equipment. BACKGROUND

[0002] The vacuum processing equipment is a kind of equipment used for carrying out various process treatments in a vacuum environment, and its application range is wide, including but not limited to electron beam evaporation equipment and electron beam selective melting equipment. Among them, the vacuum window is a transparent window installed on the vacuum processing equipment for observing the internal state of the vacuum chamber, and the main functions include optical monitoring, temperature observation and process control, etc.

[0003] At present, the vacuum window will be exposed to the vacuum processing environment during use, and the material vapor generated in the vacuum chamber will be deposited on the vacuum window, affecting the use of the vacuum window. In the prior art, a movable baffle is installed on the vacuum chamber to achieve protection of the vacuum window, but this structure will block the vacuum window and cannot realize real-time monitoring of the vacuum processing area. SUMMARY

[0004] The purpose of the present application is to provide a vacuum window structure and a vacuum processing equipment to solve the problem that in the prior art, a movable baffle is installed on the vacuum chamber to achieve protection of the vacuum window, but this structure will block the vacuum window and cannot realize real-time monitoring of the vacuum processing area.

[0005] To achieve the above purpose, the present application adopts the following technical solutions:

[0006] On the one hand, the present application provides a vacuum window structure, comprising:

[0007] a vacuum chamber, the vacuum chamber is provided with a viewing window;

[0008] a window assembly, the window assembly is arranged on the vacuum chamber and covers one side of the viewing window outside the vacuum chamber;

[0009] a protection channel, the protection channel is arranged in the vacuum chamber and is connected to one side of the viewing window inside the vacuum chamber;

[0010] a low-temperature trapping assembly, the low-temperature trapping assembly has an air outlet connected to one side of the protection channel away from the viewing window, for low-temperature absorption of the material vapor in the protection channel;

[0011] A gas supply assembly includes a gas supply control assembly, a gas supply pipeline and a plasma generator, the gas supply control assembly is arranged outside the chamber, one end of the gas supply pipeline is connected to the gas supply control assembly, the other end of the gas supply pipeline is connected to the protective channel near one side of the viewing window, and the plasma generator is arranged in the gas supply pipeline; the gas supply control assembly is used to blow process gas into the protective channel through the gas supply pipeline to form a gas flow protection layer, and the plasma generator is used to ionize part of the process gas in the gas supply pipeline.

[0012] As an optional solution of the above-mentioned vacuum window structure, the vacuum window structure further includes an adsorption fin assembly arranged on the inner wall of the protective channel; the adsorption fin assembly includes a plurality of adsorption fin assemblies which are arranged in a spaced and surrounding manner along the extension direction of the protective channel; and the adsorption fin assembly is used to adsorb the material vapor.

[0013] As an optional solution of the above-mentioned vacuum window structure, the adsorption fin assembly includes a fin body arranged on the inner wall of the protective channel and an adsorption consumable which is detachably sleeved on the fin body.

[0014] As an optional solution of the above-mentioned vacuum window structure, the vacuum window structure further includes a magnetic attraction assembly arranged on the outer wall of the protective channel, and the magnetic attraction assembly is used to form a magnetic field protection layer in the protective channel.

[0015] As an optional solution of the above-mentioned vacuum window structure, the magnetic attraction assembly includes a plurality of magnetic attraction assemblies which are arranged in a spaced and surrounding manner along the extension direction of the protective channel.

[0016] As an optional solution of the above-mentioned vacuum window structure, the low-temperature trapping assembly includes a low-temperature trapping pump and a gas trapping pipeline, one end of the gas trapping pipeline is connected to the low-temperature trapping pump, and the other end of the gas trapping pipeline is connected to one side of the protective channel away from the viewing window.

[0017] As an optional solution of the above-mentioned vacuum window structure, the window assembly includes a support frame, a window glass, a fixed frame, a first annular sealing member and a second annular sealing member, the support frame is arranged in the vacuum chamber; the window glass and the fixed frame are arranged in the support frame, and the fixed frame is crimped on the window glass; the first annular sealing member is arranged between the support frame and the vacuum chamber, and the second annular sealing member is arranged between the support frame and the window glass.

[0018] As an alternative to the above-mentioned vacuum window structure, the window assembly further comprises an outer protective glass and an outer crimping frame, both of which are arranged on the fixed frame, and the outer crimping frame is crimped on the outer protective glass.

[0019] As an alternative to the above-mentioned vacuum window structure, the vacuum window structure further comprises an inner protective glass and an inner crimping frame, both of which are arranged on the vacuum chamber, and the inner crimping frame is crimped on the inner protective glass; the inner protective glass covers one side of the inspection window in the vacuum chamber.

[0020] In another aspect, the present application provides a vacuum processing apparatus comprising the above-mentioned vacuum window structure.

[0021] The present application has the following beneficial effects:

[0022] The vacuum window structure comprises a vacuum chamber, a window assembly, a protection channel, a low-temperature trapping assembly and a gas supply assembly. The vacuum chamber is provided with an inspection window, the window assembly is arranged in the vacuum chamber and covers one side of the inspection window outside the vacuum chamber, and the protection channel is arranged in the vacuum chamber and is communicated with one side of the inspection window inside the vacuum chamber, so that the internal state of the vacuum chamber can be observed through the window assembly and the protection channel. The gas suction port of the low-temperature trapping assembly is communicated with one side of the protection channel away from the inspection window, and the low-temperature trapping assembly is used for low-temperature suction of material vapor in the protection channel, so that the material vapor can be trapped and sucked at the inlet section of the protection channel, and the protection channel can also form a low-temperature area to inhibit the flow of the material vapor, thereby improving the trapping effect of the low-temperature trapping assembly on the material vapor. Meanwhile, the gas supply assembly comprises a gas supply control assembly, a gas supply pipeline and a plasma generator, the gas supply control assembly is arranged outside the vacuum chamber, one end of the gas supply pipeline is communicated with the gas supply control assembly, the other end of the gas supply pipeline is communicated with one side of the protection channel close to the inspection window, and the plasma generator is arranged in the gas supply pipeline. The gas supply control assembly is used for blowing process gas into the protection channel through the gas supply pipeline to form a gas flow protection layer, and the plasma generator is used for ionizing part of the process gas in the gas supply pipeline, so that the gas flow protection layer of the process gas can protect the window assembly and prevent the material vapor that is not trapped and absorbed by the low-temperature trapping assembly from being deposited on the window assembly through the protection channel, and since the process gas is charged after ionization, it can combine with the material vapor, further preventing the deposition of the material vapor on the window assembly. The vacuum window structure cooperates with the protection channel, the low-temperature trapping assembly and the gas supply assembly to trap and suck the material vapor at the inlet of the protection channel without affecting the normal observation of the interior of the vacuum chamber through the window assembly, and the material vapor that is not trapped will also be stopped by the gas flow protection layer, thereby avoiding the deposition of the material vapor on the window assembly and ensuring real-time monitoring of the vacuum processing area. BRIEF DESCRIPTION OF DRAWINGS

[0023] Fig. 1 A structure schematic diagram of the vacuum window structure provided by the embodiment of the present application;

[0024] Fig. 2 A structure schematic diagram of the magnetic attraction assembly and the protection channel provided by the embodiment of the present application;

[0025] Fig. 3 A partial structure schematic diagram of the vacuum window structure provided by the embodiment of the present application.

[0026] In the drawings:

[0027] 1, vacuum chamber; 11, inspection window; 2, window assembly; 21, support frame; 22, window glass; 23, fixed frame; 24, first annular seal; 25, second annular seal; 26, outer protective glass; 27, outer pressing frame; 3, protective channel; 4, cryogenic trapping assembly; 41, cryogenic trapping pump; 42, gas trapping pipeline; 5, gas supply assembly; 51, gas supply control assembly; 52, gas supply pipeline; 53, plasma generator; 6, adsorption fin assembly; 61, fin body; 62, adsorption consumables; 7, magnetic attraction assembly; 8, inner protective glass; 9, inner pressing frame. DETAILED DESCRIPTION

[0028] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0029] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and moreover, the "above", "above" and "above" of the first feature on the second feature include the first feature above and obliquely above the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature on the second feature include the first feature below and obliquely below the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0030] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] Embodiments of the present application are described below in the detailed description and illustrated in the accompanying drawings by way of examples which, as will become apparent to those skilled in the art upon reading the following detailed description and examples, are not intended to limit the present application to the examples but rather to explain the principles of the present application. Embodiments of the present application are described below in the detailed description and illustrated in the accompanying drawings by way of examples which, as will become apparent to those skilled in the art upon reading the following detailed description and examples, are not intended to limit the present application to the examples but rather to explain the principles of the present application.

[0032] As shown in FIG. 1, the present embodiment provides a vacuum window structure for observing the internal state of a vacuum chamber 1. Figs. 1-3

[0033] The vacuum window structure includes the vacuum chamber 1, a window assembly 2, a protection channel 3, a low-temperature trapping assembly 4, and a gas supply assembly 5. The vacuum chamber 1 is provided with an inspection window 11, the window assembly 2 is arranged in the vacuum chamber 1 and covers one side of the inspection window 11 outside the vacuum chamber 1, and the protection channel 3 is arranged in the vacuum chamber 1 and is connected to one side of the inspection window 11 inside the vacuum chamber 1, so that the internal state of the vacuum chamber 1 can be observed through the window assembly 2 and the protection channel 3. Optionally, the cross section of the protection channel 3 is larger than the cross section of the window assembly 2, so as to avoid the protection channel 3 from blocking the effective observation area of the window assembly 2.

[0034] The low-temperature trapping assembly 4 is connected to one side of the protection channel 3 away from the inspection window 11, and is used to trap the material vapor in the protection channel 3 at low temperature, so that the material vapor can be trapped at the inlet section of the protection channel 3, and the protection channel 3 can also form a low-temperature area to inhibit the flow of the material vapor, thereby improving the trapping effect of the low-temperature trapping assembly 4 on the material vapor. Specifically, the low-temperature trapping assembly 4 includes a low-temperature trapping pump 41 and a gas trapping pipeline 42, one end of the gas trapping pipeline 42 is connected to the low-temperature trapping pump 41, and the other end of the gas trapping pipeline 42 is connected to one side of the protection channel 3 away from the inspection window 11, so that the low-temperature trapping pump 41 can suck the material vapor through the gas trapping pipeline 42.

[0035] ​Meanwhile, the gas supply assembly 5 comprises a gas supply control assembly 51, a gas supply pipeline 52 and a plasma generator 53. The gas supply control assembly 51 is arranged outside the chamber 1. One end of the gas supply pipeline 52 is connected to the gas supply control assembly 51, and the other end of the gas supply pipeline 52 is connected to the protective channel 3 near the viewing window 11. The plasma generator 53 is arranged in the gas supply pipeline 52. The gas supply control assembly 51 is used to blow the process gas into the protective channel 3 through the gas supply pipeline 52 to form a gas flow protection layer. The plasma generator 53 is used to ionize part of the process gas in the gas supply pipeline 52, so that the gas flow protection layer of the process gas can protect the window assembly 2, preventing the material vapor that is not captured by the low-temperature capture assembly 4 from being deposited on the window assembly 2 through the protective channel 3, and since the process gas is ionized and charged, it can combine with the material vapor, further preventing the deposition of the material vapor on the window assembly 2.

[0036] The vacuum window structure can substantially capture and absorb the material vapor at the entrance of the protective channel 3 without affecting the normal observation of the interior of the vacuum chamber 1 through the window assembly 2, and the material vapor that is not captured can also be stopped by the gas flow protection layer, thereby avoiding the deposition of the material vapor on the window assembly 2 and ensuring real-time monitoring of the vacuum processing area.

[0037] As shown in Fig. 1 and Fig. 2 The vacuum window structure further comprises an adsorption fin assembly 6 arranged on the inner wall of the protective channel 3. The adsorption fin assembly 6 comprises a plurality of adsorption fin assemblies 6 arranged along the extension direction of the protective channel 3 at intervals, and the adsorption fin assembly 6 is used to adsorb the material vapor, so that the material vapor entering the protective channel 3 will contact the adsorption fin assembly 6 and deposit during the flow process, thereby cooperating with the low-temperature capture assembly 4 to consume the material vapor. Specifically, the adsorption fin assembly 6 comprises a fin body 61 and an adsorption consumable 62. The fin body 61 is arranged on the inner wall of the protective channel 3, and the adsorption consumable 62 is detachably arranged on the fin body 61, so that the adsorption consumable 62 can be replaced after a long time of use, thereby avoiding weakening or failure of the adsorption fin assembly 6.

[0038] Further, the vacuum window structure further comprises a magnetic assembly 7 arranged on the outer wall of the protection channel 3, which is used to form a magnetic field protection layer in the protection channel 3, so as to effectively prevent the material vapor from being deposited on the window assembly 2, and the magnetic assembly 7 can also enhance the adsorption effect of the adsorption fin assembly 6 on the material vapor. Specifically, the magnetic assembly 7 can cooperate with the adsorption fin assembly 6 and the low-temperature trapping assembly 4, so that the protection channel 3 forms a magnetic channel with low-temperature adsorption function, so that the material vapor in this area is basically absorbed. At the same time, the magnetic assembly 7 can also cooperate with the adsorption fin assembly 6 and the gas supply assembly 5. After the process gas is ionized and charged and combined with the material vapor, the running track can be controlled by the magnetic field, forming a metal vapor protection and depositing on the adsorption fin assembly 6. Specifically, the magnetic assembly 7 comprises a magnetic pole base arranged on the protection channel 3 and a magnet arranged on the magnetic pole base. At the same time, the magnetic assembly 7 comprises a plurality of magnetic assemblies 7, which are arranged in a ring along the extension direction of the protection channel 3, so as to control the evacuation of the magnetic field by the plurality of magnetic assemblies 7, forming a multi-magnetic field protection layer to improve the inhibition and isolation of the material vapor.

[0039] As shown in Fig. 1 and Fig. 3 , the window assembly 2 comprises a support frame 21, a window glass 22, a fixed frame 23, a first annular seal 24 and a second annular seal 25. The support frame 21 is arranged in the vacuum chamber 1, the window glass 22 and the fixed frame 23 are arranged in the support frame 21, and the fixed frame 23 is crimped on the window glass 22. The first annular seal 24 is arranged between the support frame 21 and the vacuum chamber 1, and the second annular seal 25 is arranged between the support frame 21 and the window glass 22. Therefore, through the arrangement of the first annular seal 24 and the second annular seal 25, the sealing performance of the window assembly 2 when installed on the vacuum chamber 1 and the sealing performance of the window glass 22 can be ensured, so as to ensure that the inside of the vacuum chamber 1 is a vacuum environment. At the same time, the window assembly 2 further comprises an outer protective glass 26 and an outer crimping frame 27, both of which are arranged on the fixed frame 23, and the outer crimping frame 27 is crimped on the outer protective glass 26. Therefore, the outer protective glass 26 can protect the window glass 22 from being damaged by external factors, so as to avoid damage to the protective glass and affect the vacuum environment. Optionally, the outer protective glass 26 is lead glass for preventing X-rays, and the outer protective glass 26 can also be laser-proof glass for protection and verification.

[0040] Further, the vacuum window structure further comprises an inner protective glass 8 and an inner crimping frame 9, both of which are arranged in the vacuum chamber 1, and the inner crimping frame 9 is crimped to the inner protective glass 8, and the inner protective glass 8 covers one side of the observation window 11 in the vacuum chamber 1, so that the inner protective glass 8 can serve as the last protective barrier to directly isolate the material vapor and achieve protection of the window assembly 2, and at the same time, the inner protective glass 8 can be used as a consumable part and be replaced regularly to prolong the service life of the vacuum window structure.

[0041] The embodiment also provides a vacuum processing equipment comprising the vacuum window structure as described above, which can prevent the material vapor from being deposited on the window assembly 2 by using the vacuum window structure as described above, thereby achieving real-time monitoring of the vacuum processing area without affecting normal observation of the inside of the vacuum chamber 1.

[0042] Obviously, the above embodiment of the present application is merely an example for clear illustration of the present application, and is not a limitation on the embodiments of the present application. Based on the above description, other different forms of changes or variations can be made by those of ordinary skill in the art. Here, it is not necessary and impossible to exhaust all the embodiments. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A vacuum window structure, characterized in that, include: A vacuum chamber (1) is provided with an inspection window (11); A viewing window assembly (2) is disposed in the vacuum chamber (1) and covers the viewing window (11) on the outside of the vacuum chamber (1); A protective passage (3) is provided in the vacuum chamber (1) and is connected to the observation window (11) on one side of the vacuum chamber (1). The low-temperature trapping assembly (4) has its exhaust port connected to the side of the protective channel (3) away from the inspection window (11) for low-temperature extraction of material vapor in the protective channel (3); A gas supply assembly (5) is provided, comprising a gas supply control assembly (51), a gas supply pipeline (52), and a plasma generator (53). The gas supply control assembly (51) is located outside the vacuum chamber (1). One end of the gas supply pipeline (52) is connected to the gas supply control assembly (51), and the other end of the gas supply pipeline (52) is connected to the side of the protective channel (3) near the inspection window (11). The plasma generator (53) is located in the gas supply pipeline (52). The gas supply control assembly (51) is used to blow process gas into the protective channel (3) through the gas supply pipeline (52) to form a gas flow protection layer. The plasma generator (53) is used to ionize a portion of the process gas in the gas supply pipeline (52).

2. The vacuum window structure according to claim 1, characterized in that, The vacuum window structure further includes an adsorption fin assembly (6), which is disposed on the inner wall of the protective channel (3); the adsorption fin assembly (6) includes a plurality of them, which are arranged at intervals around the protective channel (3) along the extension direction; the adsorption fin assembly (6) is used to adsorb the material vapor.

3. The vacuum window structure according to claim 2, characterized in that, The adsorption fin assembly (6) includes a fin body (61) and an adsorption consumable (62). The fin body (61) is disposed on the inner wall of the protective channel (3), and the adsorption consumable (62) is detachably sleeved on the fin body (61).

4. The vacuum window structure according to claim 2, characterized in that, The vacuum window structure also includes a magnetic suction component (7), which is disposed on the outer wall of the protective channel (3) and is used to form a magnetic field protection layer in the protective channel (3).

5. The vacuum window structure according to claim 4, characterized in that, The magnetic attraction components (7) include a plurality of magnetic attraction components (7) arranged at intervals around the protective channel (3) along the extension direction of the protective channel (3).

6. The vacuum window structure according to claim 1, characterized in that, The cryogenic trapping assembly (4) includes a cryogenic trapping pump (41) and a gas trapping pipeline (42). One end of the gas trapping pipeline (42) is connected to the cryogenic trapping pump (41), and the other end of the gas trapping pipeline (42) is connected to the side of the protective channel (3) away from the inspection window (11).

7. The vacuum window structure according to claim 1, characterized in that, The viewing window assembly (2) includes a support frame (21), a viewing window glass (22), a fixing frame (23), a first annular seal (24), and a second annular seal (25). The support frame (21) is located in the vacuum chamber (1). The viewing window glass (22) and the fixing frame (23) are both located in the support frame (21), and the fixing frame (23) is pressed against the viewing window glass (22). The first annular seal (24) is located between the support frame (21) and the vacuum chamber (1), and the second annular seal (25) is located between the support frame (21) and the viewing window glass (22).

8. The vacuum window structure according to claim 7, characterized in that, The window assembly (2) further includes an outer protective glass (26) and an outer pressing frame (27), both of which are located on the fixed frame (23), and the outer pressing frame (27) is pressed against the outer protective glass (26).

9. The vacuum window structure according to any one of claims 1 to 8, characterized in that, The vacuum viewing window structure also includes an inner protective glass (8) and an inner pressing frame (9). The inner protective glass (8) and the inner pressing frame (9) are both located in the vacuum chamber (1), and the inner pressing frame (9) is pressed against the inner protective glass (8). The inner protective glass (8) covers the viewing window (11) on one side of the vacuum chamber (1).

10. A vacuum processing device, characterized in that, Includes the vacuum window structure as described in any one of claims 1 to 9.

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