A pipeline support for gallium nitride production and a quartz gallium boat

Abstract

The present application relates to the technical field of pipeline support, and particularly relates to a pipeline support for gallium nitride production and a quartz gallium boat, which comprises at least two gas pipelines, at least one pair of support discs, mounting holes corresponding to the number of the gas pipelines are formed in the support discs, the gas pipelines are sequentially and movably penetrated through the mounting holes in the two support discs, a plurality of airflow holes are formed in the support discs, and a limiting assembly fixed to the gas pipelines is arranged on the support discs. The technical problem that the traditional support adopts a welding or glue fixing mode, which leads to a complicated installation and disassembly process, is solved, the quick maintenance or replacement of the pipeline is not facilitated, and in a multi-pipeline system, the fixed support is difficult to be flexibly adjusted to adapt to different pipe diameters or pipeline layout changes, which limits the maintainability and operation flexibility of the equipment.

Description

Technical Field

[0001] This invention relates to the technical field of pipe support, specifically to a pipe support component and a gallium quartz boat for gallium nitride production. Background Technology

[0002] Gallium nitride (GaN), as a third-generation semiconductor material, has wide applications in optoelectronics, high-frequency high-power devices, and other fields. In the chemical vapor deposition (CVD) process of GaN production, a quartz gallium boat is typically used as a reaction vessel to hold gallium and other metal source materials. These materials are then combined with reactive gases such as ammonia and hydrogen in a high-temperature environment to generate gallium nitride crystals.

[0003] In existing technologies, reactant gases (such as NH3 and H2) must be transported to the reaction chamber through quartz pipes. Due to the high gas transport pressure, the high-speed gas flow can strongly impact the inner wall of the quartz pipe, affecting production stability. Considering that quartz gas transport pipes are typically long, existing technologies generally use fixed supports on the outside of the quartz pipe to enhance its impact resistance and stability. However, traditional supports are mostly fixed by welding or adhesive bonding, resulting in cumbersome installation and disassembly processes, which are not conducive to rapid maintenance or replacement of the pipes. Especially in multi-pipe systems, fixed supports are difficult to adapt to the needs of different pipe diameters or layout adjustments, reducing the maintainability and flexibility of the equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a pipeline support component and a quartz gallium boat for gallium nitride production, which solves the technical problems of traditional support components being fixed by welding or adhesive bonding, resulting in cumbersome installation and disassembly processes, which are not conducive to rapid maintenance or replacement of pipelines. Furthermore, in multi-pipeline systems, fixed support components are difficult to adjust flexibly to adapt to different pipe diameters or pipeline layout changes, thus limiting the maintainability and operational flexibility of the equipment.

[0005] This invention is achieved through the following technical solution:

[0006] A pipeline support for gallium nitride production includes at least two gas pipelines and at least a pair of support plates. The support plates have mounting holes corresponding to the number of gas pipelines. The gas pipelines sequentially pass through the mounting holes on the two support plates. The support plates also have several airflow holes. Limiting components that are fixed to the gas pipelines are provided on the support plates.

[0007] Furthermore, the limiting assembly includes a first limiting part on one of the support plates, the same number as the number of gas pipes, and a second limiting part on the other support plate, the same number as the number of gas pipes.

[0008] The first limiting part includes two first limiting shells disposed on the corresponding support plate. The two first limiting shells are respectively placed on both sides of the mounting hole. The outer wall of the first limiting shell is provided with a first opening, and the first limiting shell is provided with a first arc plate.

[0009] The second limiting part includes two second limiting shells disposed on the corresponding support plate. The two second limiting shells are respectively placed on both sides of the mounting hole. The outer wall of the second limiting shell is provided with a second opening, and a second arc-shaped plate is disposed inside the second limiting shell. Both the first limiting shell and the second limiting shell are provided with a driving device for driving the corresponding arc-shaped plate to move.

[0010] Furthermore, the driving device includes a movable plate connected to the corresponding arc-shaped plate. The movable plate is slidably disposed in the corresponding first limiting shell and second limiting shell. The movable plate has an inclined surface. A first placement hole is provided in the first limiting shell. A sleeve is also provided on the first limiting shell. A triggering device is provided in the sleeve. A second placement hole is provided in the second limiting shell. When the triggering device in the first placement hole enters the second placement hole, the triggering device triggers the movable plate to move.

[0011] Furthermore, the triggering device includes a number of support rods equal to the number of movable plates, and the support rods are slidably disposed within the first placement hole.

[0012] Furthermore, a buffer pad that mates with the outer wall of the gas pipeline is provided on the curved plate. This buffer pad helps prevent damage to the gas pipeline.

[0013] Furthermore, the support rod is equipped with a wedge-shaped block that engages with the inclined plane.

[0014] Furthermore, the horizontal plates are connected to the inner walls of the first placement hole and the second placement hole respectively through elastic components.

[0015] A quartz gallium boat for gallium nitride (GaN) production further includes a quartz gallium boat assembly connected to a gas pipeline. The quartz gallium boat assembly includes a reaction shell containing several quartz plates that divide the reaction shell into several cavities. The quartz plates have flow ports. These flow ports create a meandering gas path, extending the reaction time within the reaction shell, ensuring a more complete reaction, reducing waste of unreacted gas, and improving overall reaction efficiency.

[0016] Furthermore, several quartz plates are spaced apart. This creates a gradient reaction zone, allowing the reactant gas to diffuse more evenly between adjacent chambers.

[0017] Furthermore, the flow ports on adjacent quartz plates are staggered. The staggered arrangement of the flow ports forces the gas to form a spiral loop between adjacent chambers, significantly increasing the contact time and path length between the gas and the reaction interface.

[0018] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0019] 1. This application provides at least one support plate with mounting holes corresponding to the number of gas pipes on the support plate. The gas pipes pass through the mounting holes on two support plates in sequence. The support plate also has several airflow holes and a limiting component fixed to the gas pipes on the support plate, which can realize segmented support for long-distance gas pipes.

[0020] 2. The limiting component in this application, through the cooperation between the support rod, wedge block, arc plate and moving plate, only requires the two support plates to be relatively close to each other. The wedge block at both ends of the support rod pushes the moving plate to move, so that the arc plate on the moving plate contacts the gas pipe, thereby temporarily fixing the gas pipe. The support rod is set to trigger the contact between the arc plate and the gas pipe. When the arc plate is in close contact with the outer wall of the gas pipe, both support rods have reached the preset position, which means that the support plate is parallel to the ground. Since the length of the support rod is fixed and the two support rods need to reach the same position to achieve the effect of the arc plate contacting the gas pipe, it can be ensured that the support plate can be set horizontally, avoiding the problem of tilting.

[0021] 3. In this application, a buffer pad that matches the outer wall of the gas pipeline is provided on the arc plate. Since the pipeline is made of quartz, the buffer pad can prevent damage to the gas pipeline. Attached Figure Description

[0022] The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0023] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the limiting component structure according to Embodiment 1 of the present invention;

[0025] Figure 3 This is a schematic diagram of the structure of the limiting component and the gas pipeline in Embodiment 1 of the present invention;

[0026] Figure 4 This is a schematic diagram of the specific structure of the present invention before the two support disks are fitted together;

[0027] Figure 5 This is a schematic diagram of the specific structure of the two support disks after they are assembled.

[0028] Figure 6 This is the trajectory of the support rod of the present invention before it enters the second limiting shell;

[0029] Figure 7 This is the trajectory of the support rod of the present invention as it enters the second limiting shell;

[0030] Figure 8 This is a schematic diagram of the structure of the accommodating space of the present invention;

[0031] Figure 9 This is a schematic diagram of the internal structure of the first limiting shell of the present invention;

[0032] Figure 10 This is a schematic diagram of the structure of the arc-shaped plate and the gas pipeline in the first limiting shell of the present invention;

[0033] Figure 11 This is a schematic diagram of the internal structure of the second limiting shell of the present invention;

[0034] Figure 12 This is a schematic diagram of the internal structure of the reaction shell of the present invention.

[0035] The attached diagram shows the markings and corresponding component names:

[0036] 1-Gas pipe; 2-Support plate; 3-Mounting hole; 4-Airflow hole; 5-First limiting shell; 6-First opening; 7-First arc-shaped plate; 8-Second limiting shell; 9-Second opening; 10-Second arc-shaped plate; 11-Moving plate; 12-Horizontal plate; 13-Inclined surface; 14-First spring; 15-First placement hole; 16-Sleeve; 17-Second placement hole; 18-Support rod; 19-Buffer pad; 20-Wedge block; 21-Reaction shell; 22-Quartz plate; 23-Cavity; 24-Flow port; 25-Sealing rubber ring; 26-Accommodation space. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of the present invention are only used to explain the present invention and are not intended to limit the present invention.

[0038] Example 1:

[0039] like Figures 1 to 3 As shown, this application is a pipeline support for gallium nitride production, including at least two gas pipelines 1 and at least one support plate 2. The support plate 2 has mounting holes 3 corresponding to the number of gas pipelines 1. The gas pipelines 1 pass through the mounting holes 3 on the two support plates 2 in sequence. The support plate also has a number of airflow holes 4. A limiting component fixed to the gas pipelines 1 is provided on the support plate 2.

[0040] First of all, it should be noted that the limiting component can be a sealing rubber ring 25 provided on the mounting hole 3. Through the elasticity of the rubber ring and its contact with the gas pipe 1, the support plate 2 can be fixed in a specific position.

[0041] The specific working principle of this embodiment 1 is as follows:

[0042] Before placing the gas pipes into the reactor, first align the mounting holes 3 on one of the support plates 2 with the two gas pipes 1 and allow them to pass through. The limiting component can be a sealing rubber ring 25 installed on the mounting hole 3. Because the sealing rubber ring 25 has a certain degree of elasticity, its elastic deformation characteristics can be used to form an interference fit with the gas pipes 1, thus limiting the support plate 2 within a reasonable range predetermined by the operator. By setting at least one pair of support plates 2 (not limited to one pair, but can be configured with three or four support plates 2 as needed), segmented support for long-distance gas pipes 1 can be achieved. Furthermore, the sealing rubber ring 25 addresses the problem of cumbersome installation and disassembly processes caused by traditional welding or adhesive bonding methods for support components, which hinders rapid maintenance or replacement of the pipeline. Because the sealing rubber ring 25 has a certain degree of elasticity, it can adapt to gas pipes 1 of different sizes. Therefore, in multi-pipe systems, the sealing rubber ring 25 solves the technical problem of fixed support components being difficult to adjust flexibly to adapt to different pipe diameters or pipeline layout changes, thus limiting the maintainability and operational flexibility of the equipment.

[0043] Based on the segmented support of the gas pipeline 1, and considering that the reactive gases such as NH3 and H2 will generate strong airflow impact on the quartz pipeline during high-pressure transportation, several airflow holes 4 are also opened on the support plate 2. The porous structure disperses the concentrated airflow into multiple laminar flows, reducing local impact energy. The several airflow holes 4 can also reduce the total weight of the support plate 2, avoid applying excessive mechanical pressure to the gas pipeline 1, and thus improve the long-term stability of the system.

[0044] Example 2

[0045] Based on Embodiment 1, the limiting component has another implementation method:

[0046] like Figures 4 to 11 As shown, the limiting assembly includes a first limiting part on one of the support plates 2, which has the same number of gas pipes 1 as the number of gas pipes 1, and a second limiting part on the other support plate 2, which has the same number of gas pipes 1 as the number of gas pipes 1.

[0047] The first limiting part includes two first limiting shells 5 provided on the corresponding support plate 2. The two first limiting shells 5 are respectively placed on both sides of the mounting hole 3. The outer wall of the first limiting shell 5 is provided with a first opening 6, and the first limiting shell 5 is provided with a first arc plate 7.

[0048] The second limiting part includes two second limiting shells 8 provided on the corresponding support plate 2. The two second limiting shells 8 are respectively placed on both sides of the mounting hole 3. The outer wall of the second limiting shell 8 is provided with a second opening 9, and a second arc plate 10 is provided inside the second limiting shell 8. Both the first limiting shell 5 and the second limiting shell 8 are provided with a driving device for driving the corresponding arc plate to move.

[0049] In this embodiment 2, the operator sequentially moves the two support plates 2 through the airflow pipe. At this point, the part of the airflow pipe in contact with the two support plates 2 is partially between the two first limiting shells 5, and the other part is between the two second limiting shells 8. Then, by activating the drive device, the drive devices inside the first limiting shells 5 and the second limiting shells 8 can drive the corresponding arc-shaped plates to move. The arc-shaped plates of the two first limiting shells 5 move simultaneously from the first opening 6, and the arc-shaped plates of the two second limiting shells 8 move simultaneously from the second opening 9, until the two arc-shaped plates contact the outer wall of the gas pipe 1. Then, the support plates 2 are fixed to the gas pipe 1 by the arc-shaped plates. Compared with the limiting structure of embodiment 1, this embodiment 2 can adjust the position of the support plates 2 more flexibly and can improve the adjustment efficiency; while embodiment 1 requires manual movement of the rubber ring, which takes more time.

[0050] It should be noted that the driving device includes a movable plate 11 connected to the corresponding arc-shaped plate. The movable plate 11 is slidably disposed in the corresponding first limiting shell 5 and second limiting shell 8. The movable plate 11 has an inclined surface 13. A first placement hole 15 is provided in the first limiting shell 5. A sleeve 16 is also provided on the first limiting shell 5. A triggering device is provided in the sleeve 16. A second placement hole 17 is provided in the second limiting shell 8. When the triggering device in the first placement hole 15 enters the second placement hole 17, the triggering device triggers the movable plate 11 to move.

[0051] Firstly, it should be noted that the horizontal plate 12 is located at the bottom of the moving plate 11, and there is a receiving space 26 between the angle between the inclined surface 13 and the horizontal plate 12. This receiving space 26 is to provide space for the wedge block 20 on the support rod 18 to enter the first placement hole 15 and the second placement hole 17 respectively, so that the wedge block 20 can move downward and thus make contact with the inclined surface 13 of the moving plate 11.

[0052] It should be noted that the triggering device includes a number of support rods 18 equal to the number of moving plates 11. The support rods 18 are slidably disposed inside the sleeve 16, and the horizontal plate 12 is connected to the inside of the first placement hole 15 through an elastic component.

[0053] Firstly, it should be noted that the elastic component referred to here is the first spring 14, which has a compression function.

[0054] It should be noted that a buffer pad 19 is provided on the curved plate to fit the outer wall of the gas pipe 1. Since the pipe is made of quartz, the buffer pad 19 can prevent damage to the gas pipe 1.

[0055] It should be noted that both ends of the support rod 18 are provided with wedge blocks 20 that cooperate with the inclined surface 13.

[0056] The specific working principle of Example 2:

[0057] In this embodiment 2, at least one pair of cooperating support plates 2 are provided. Each support plate 2 has an equal number of mounting holes 3 as the gas pipeline 1. The operator moves one support plate 2 through the gas pipeline 1, and then moves the other support plate 2 through the gas pipeline 1 in the same way. As mentioned above, a first limiting shell 5 is fixedly installed on one support plate 2, and a second limiting shell 8 is fixedly installed on the other support plate 2. When a support plate 2 moves towards the other support plate 2, the first limiting shell 5 moves towards the second limiting shell 8. A sleeve 16 is fixedly installed on the first limiting shell 5, and a sliding groove is provided inside the sleeve 16. The support rod 18 is slidably mounted in the sliding groove via a slider. The sliding groove not only allows the support rod 18 to move vertically but also ensures that the support rod 18 does not sway or deviate left or right, keeping the support rod 18 in a vertical state. Both ends of the support rod 18 are provided with wedge blocks 20. When one support plate 2 moves closer to the other support plate 2 under the operation of the operator, one end of the support rod 18 first inserts into the second placement hole 17 of the second limiting shell 8. At this time, the wedge block 20 at this end will contact the inclined surface 13 of the moving plate 11 inside the second limiting shell 8. At the same time, as the support plate 2 continues to move closer to the other support plate 2, the wedge block 20 at the other end of the support rod 18 will also cooperate with the inclined surface 13 of the moving plate 11 inside the first limiting shell 5, so that the wedge blocks 20 at both ends simultaneously push the moving plate 11 inside the first limiting shell 5 and the second limiting shell 8 to move towards the gas pipeline 1. The movement of the moving plate 11 further drives the arc plate closer to the outer wall of the gas pipeline 1 until the arc plate is tightly attached to the outer wall of the pipeline, thereby achieving stable fixation of the support plate 2. The working principle of this embodiment 2 can be referred to as follows. Figures 6 to 8 As shown.

[0058] After the reactor operation is completed, the support plate 2 needs to be removed. The operator pulls one support plate 2 away from the other, causing the wedge blocks 20 at both ends of the support rod 18 to disengage from the inclined surface 13 on the moving plate 11. If only one end of the support rod 18 disengages from the second placement hole 17 during pulling, the other end can be manually disengaged after one end of the support rod 18 is disengaged. Since the horizontal plates 12 in the first and second placement holes 15 and 17 are elastically connected to the inner walls of the first and second placement holes 15 and 17 via elastic components, and the horizontal plates 12 are connected to the moving plate 11, the elastic components of the moving plate 11 in the first and second limiting shells 5 and 8 recover their deformation after being squeezed by the wedge blocks 20 on the support rod 18. After the elastic components regain their elasticity, they move the moving plate 11 back to its original position via the horizontal plates 12. At this time, the arc-shaped plate on the movable plate 11 also detaches from the outer wall of the gas pipeline 1, so the support plate 2 can be removed. This setting facilitates the repeated use of the support plate 2 and minimizes damage to the support plate 2.

[0059] The purpose of setting up support rod 18 is that, since mounting holes 3 are opened on the support plate 2, and the diameter of the mounting holes 3 is larger than the pipe diameter, the support plate 2 can be moved through the gas pipe 1. However, because there is a certain gap between the mounting holes 3 and the gas pipe 1, the support plate 2 is very likely to be tilted and not parallel to the ground. A tilted support plate 2 will cause uneven contact between the arc plate and the outer wall of the gas pipe 1, with the contact point concentrated on one side, causing that area to bear greater local stress. Therefore, support rod 18 is set up to trigger the contact between the arc plate and the gas pipe 1. When the arc plate and the outer wall of the gas pipe 1 are in close contact, both support rods 18 reach the preset position, which means that the support plate 2 is parallel to the ground. Since the length of the support rods 18 is fixed, and both support rods 18 need to reach the same position to achieve the effect of contact between the arc plate and the gas pipe 1, it can be ensured that the support plate 2 can be set horizontally, avoiding the tilting problem.

[0060] One more point needs to be made here: it is possible to... Figure 1 As shown, with Figure 1 The directions are described as up and down, when the support rod 18 is along Figure 1When the support rod 18 moves vertically downwards, it will move until it contacts the horizontal plate 12 connected to the bottom of the moving plate 11, thus reaching the preset position. At this point, due to the obstruction of the horizontal plate 12, the support rod 18 cannot move further downwards. If the support plate 2 continues to move closer to the other support plate 2, it means that the horizontal distance between the two support plates 2 decreases. Since the lower end of the support rod 18 is blocked by the horizontal plate 12 and cannot move further downwards, and since the upper end of the support rod 18 is slidably mounted on the sleeve 16, the continued movement of the support plate 2 will cause the upper end of the support rod 18 to move upwards in the vertical direction, which will force the wedge block 20 at the upper end of the support rod 18 to contact the inclined surface 13 of the corresponding moving plate 11. By pushing the arc plate with the moving plate 11, the arc plates on the two support plates 2 can be moved. The upper and lower ends of the support rod 18 mentioned here are both... Figure 1 Direction is the guide.

[0061] Furthermore, this configuration is also applicable to different pipe diameters: when used for larger pipe diameters, the support rod 18, through its cooperation with the inclined surface 13 of the moving plate 11, causes the arc-shaped plate to contact the pipe wall in advance. At this time, although the support rod 18 has not reached the preset position (not in contact with the horizontal plate 12), its movement is prevented by the friction of the inclined surface 13. If the support plate 2 is moved further, the wedge block 20 at the other end of the support rod 18 will also contact the corresponding inclined surface 13 of the moving plate 11, ultimately achieving the effect of moving the arc-shaped plates on the two support plates 2 and fixing the pipe.

[0062] Example 3

[0063] like Figure 1 and Figure 12 As shown, a quartz gallium boat for gallium nitride production includes a quartz gallium boat assembly connected to a gas pipeline 1. The quartz gallium boat assembly includes a reaction shell 21, with the gas pipeline 1 connected to the reaction shell 21. Several quartz plates 22 are disposed within the reaction shell 21, dividing the reaction shell 21 into several cavities 23. Flow ports 24 are provided on the quartz plates 22. The flow ports 24 create a meandering path for the gas, extending the reaction time within the reaction shell 21, thereby ensuring a more complete reaction, reducing waste of unreacted gas, and improving the overall reaction efficiency.

[0064] It should be noted that the quartz plates 22 are spaced apart. This creates a gradient reaction zone, allowing the reactant gas to diffuse more evenly between adjacent chambers 23.

[0065] It should be noted that the flow ports 24 on adjacent quartz plates 22 are staggered. The staggered arrangement of the flow ports 24 forces the gas to form a spiral loop between adjacent chambers 23, which significantly increases the contact time and path length between the gas and the reaction interface.

[0066] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A pipe support for gallium nitride production, comprising at least two gas pipes (1), characterized in that, It includes at least one pair of support plates (2), and the support plates (2) are provided with mounting holes (3) corresponding to the number of gas pipes (1). The gas pipes (1) pass through the mounting holes (3) on the two support plates (2) in sequence. A limiting component for fixing the gas pipes (1) is provided on the support plates (2). The limiting component includes a first limiting part on one of the support plates (2) with the same number as the number of gas pipes (1) and a second limiting part on the other support plate (2) with the same number as the number of gas pipes (1). The first limiting part includes two first limiting shells (5) provided on the corresponding support plate (2). The two first limiting shells (5) are respectively placed on both sides of the mounting hole (3). The outer wall of the first limiting shell (5) is provided with a first opening (6), and a first arc plate (7) is provided inside the first limiting shell (5). The second limiting part includes two second limiting shells (8) provided on the corresponding support plate (2). The two second limiting shells (8) are respectively placed on both sides of the mounting hole (3). The outer wall of the second limiting shell (8) is provided with a second opening (9), and a second arc plate (10) is provided inside the second limiting shell (8). The first limiting shell (5) and the second limiting shell (8) are both provided with a driving device for driving the corresponding arc plate to move. The driving device includes a movable plate (11) connected to the corresponding arc plate. The movable plate (11) is slidably disposed in the corresponding first limiting shell (5) and second limiting shell (8). An inclined surface (13) is provided on the movable plate (11). A first placement hole (15) is provided in the first limiting shell (5). A sleeve (16) is also provided on the first limiting shell (5). A triggering device is provided in the sleeve (16). A second placement hole (17) is provided in the second limiting shell (8). The triggering device includes a support rod (18), which is slidably disposed in the sleeve (16). Both ends of the support rod (18) are provided with wedge blocks (20) that cooperate with the inclined surface (13). When a pair of support plates (2) are close to each other, one end of the support rod (18) is inserted into the second placement hole (17) of the second limiting shell (8). The wedge block (20) at this end contacts the inclined surface (13) of the moving plate (11) in the second limiting shell (8). The wedge block (20) at the other end of the support rod (18) cooperates with the inclined surface (13) of the moving plate (11) in the first limiting shell (5). The wedge blocks (20) at both ends simultaneously push the moving plate (11) in the first limiting shell (5) and the second limiting shell (8) to move towards the gas pipeline (1).

2. The pipeline support for gallium nitride production according to claim 1, characterized in that, A buffer pad (19) is provided on the arc plate to cooperate with the outer wall of the gas pipe (1).

3. A pipe support for gallium nitride production according to claim 1, characterized in that, Each movable plate (11) is connected to a horizontal plate (12), and the horizontal plate (12) is connected to the inner wall of the corresponding limiting shell through elastic components.

4. A quartz gallium boat for gallium nitride production, characterized in that, The invention includes a pipeline support for gallium nitride production as described in any one of claims 1-3, and further includes a quartz gallium boat assembly connected to the gas pipeline (1). The quartz gallium boat assembly includes a reaction shell (21), in which a plurality of quartz plates (22) are disposed, the plurality of quartz plates (22) dividing the reaction shell (21) to form a plurality of cavities (23), and flow ports (24) are provided on the quartz plates (22).

5. A quartz gallium boat for gallium nitride production according to claim 4, characterized in that, Several quartz plates (22) are spaced apart.

6. A quartz gallium boat for gallium nitride production according to claim 4, characterized in that, The flow ports (24) on adjacent quartz plates (22) are staggered.

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