Vapor deposition furnace

Abstract

The invention relates to the technical field of vapor deposition, in particular to a vapor deposition furnace which comprises a deposition chamber provided with a workpiece fixing groove, the groove wall of the workpiece fixing groove forms the inner wall of the deposition chamber, and the workpiece fixing groove is configured to fix a workpiece so that the non-coating surface of the workpiece can be attached to the groove wall of the workpiece fixing groove, and the coating surface of the workpiece can be exposed. The problem that the workpiece yield is affected by coating falling is solved.

Description

Technical Field

[0001] This application relates to the field of vapor deposition technology, and more particularly to a vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) is a thin film preparation technique widely used in materials science and engineering. This technique primarily utilizes one or more gaseous compounds or elements containing thin film elements to chemically react on the surface of a workpiece to generate a thin film.

[0003] Currently, chemical vapor deposition (CVD) processes are mainly carried out using vapor deposition furnaces. However, as the reaction chamber of the vapor deposition furnace undergoes multiple vapor depositions, the coating on the inner wall of the reaction chamber gradually thickens. After the coating peels off, it remains on the surface of the workpiece, affecting the workpiece yield. Summary of the Invention

[0004] In view of this, embodiments of this application provide a vapor deposition furnace to solve the problem of coating peeling affecting workpiece yield.

[0005] In a first aspect, one embodiment of this application provides a vapor deposition furnace, comprising: a deposition chamber having a workpiece fixing groove, the groove wall of the workpiece fixing groove forming the inner wall of the deposition chamber, the workpiece fixing groove being configured to fix a workpiece so that the uncoated surface of the workpiece is in contact with the groove wall of the workpiece fixing groove, and the coated surface of the workpiece is exposed.

[0006] In conjunction with the first aspect, the vapor deposition furnace also includes a limiting element located at the opening of the workpiece fixing groove. The limiting element is configured to stop the workpiece and fix it in the workpiece fixing groove.

[0007] In conjunction with the first aspect, the inner wall of the deposition chamber is provided with an installation groove, which is located at the opening of the workpiece fixing groove. A limiting member is provided at the installation groove, which protrudes from the groove wall of the installation groove and extends into the opening of the workpiece fixing groove to cooperate with the workpiece stop.

[0008] In conjunction with the first aspect, the inner wall of the deposition chamber has multiple workpiece fixing grooves, the groove walls of the multiple workpiece fixing grooves together form the inner wall of the deposition chamber, the multiple workpiece fixing grooves are arranged sequentially along the circumference of the deposition chamber, and there are multiple limiting components, with limiting components provided on both sides of the groove opening of the workpiece fixing groove.

[0009] In conjunction with the first aspect, the limiting member includes a first limiting segment and a second limiting segment connected together, with an included angle between the first limiting segment and the second limiting segment, and the first limiting segment and the second limiting segment respectively extending into the slots of two adjacent workpiece fixing slots; and / or, a plurality of workpiece fixing slots are arranged opposite each other in pairs, and a limiting member is provided between two adjacent workpiece fixing slots.

[0010] In conjunction with the first aspect, the extension direction of the limiting component and the extension direction of the workpiece fixing groove are both the same as the axial direction of the deposition chamber.

[0011] In conjunction with the first aspect, the deposition chamber includes a first forming part and a second forming part. The second forming part is provided at both ends of the first forming part. The inner walls of the first forming part and the inner walls of the second forming part together form a workpiece fixing groove. The rigidity of the first forming part is less than that of the second forming part.

[0012] In conjunction with the first aspect, the cross-section of the workpiece fixing groove is semi-circular or rectangular.

[0013] In conjunction with the first aspect, the deposition chamber also includes a heating element disposed at the workpiece fixing groove; and / or, the deposition chamber also includes an air inlet pipe and an air outlet pipe disposed at both ends of the deposition chamber, and both the air inlet pipe and the air outlet pipe are connected to the deposition chamber.

[0014] In conjunction with the first aspect, the vapor deposition furnace also includes a furnace body, and multiple deposition chambers are located within the furnace body.

[0015] By applying the technical solution of this invention, a workpiece is fixed in a workpiece fixing groove, so that the uncoated surface of the workpiece is in contact with the groove wall, while the coated surface of the workpiece is exposed. During vapor deposition, vapor deposition is performed only on the exposed coated surface, resulting in a deposited thin film on the workpiece. Since the groove wall of the workpiece fixing groove forms the inner wall of the deposition chamber, the uncoated surface of the workpiece, in contact with the groove wall, effectively shields the inner wall of the deposition chamber. Consequently, no deposited coating forms on the inner wall of the deposition chamber, preventing coating peeling and thus improving workpiece yield. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of the deposition chamber provided in an embodiment of this application.

[0018] Figure 2 The image shown is a cross-sectional view of the first molding part provided in an embodiment of this application.

[0019] Figure 3 The figure shown is an assembly diagram of the deposition chamber and the workpiece provided in an embodiment of this application.

[0020] Figure 4 The image shown is another assembly diagram of the deposition chamber and workpiece provided in an embodiment of this application.

[0021] Figure 5 As shown Figure 4 A magnified view of a portion of point A in the middle.

[0022] Figure 6 The diagram shown is a structural schematic of the limiting member provided in an embodiment of this application.

[0023] Figure 7 The image shown is a cross-sectional view of the deposition chamber provided in an embodiment of this application.

[0024] Figure 8 The diagram shown is a schematic diagram of a vapor deposition furnace provided in an embodiment of this application.

[0025] Figure label:

[0026] 1. Workpiece;

[0027] 10. Deposition chamber; 11. Workpiece fixing groove; 12. Mounting groove; 13. First forming section; 14. Second forming section; 15. Heating element; 16. Air inlet pipe; 17. Air outlet pipe;

[0028] 20. Limiting component; 21. First limiting segment; 22. Second limiting segment;

[0029] 30. Furnace body. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] Chemical vapor deposition (CVD) is a fabrication process that utilizes one or more gaseous compounds or elements containing thin-film elements to chemically react on the surface of a workpiece, resulting in the deposition of a solid thin film on the workpiece surface. CVD is widely used for purifying substances, developing new crystals, and depositing various single-crystal, polycrystalline, or glassy inorganic thin-film materials. These materials can be oxides, sulfides, nitrides, carbides, or binary or multi-element inter-element compounds from groups III-V, II-IV, and IV-VI, and their physical properties can be precisely controlled through the vapor-doped deposition process.

[0032] Chemical vapor deposition (CVD) is typically performed inside a vapor deposition furnace. The workpiece 1 is placed inside the furnace, and the gases required for the reaction are introduced into the furnace, causing a chemical reaction on the surface of the workpiece 1 to form a solid film. The byproducts generated during the reaction are then removed.

[0033] Chemical vapor deposition (CVD) involves three key stages: diffusion of reactant gases onto the workpiece surface, adsorption of reactant gases onto the workpiece surface, and chemical reaction on the workpiece surface to form a solid deposit, followed by the removal of gaseous byproducts from the workpiece surface. The most common CVD reactions include thermal decomposition, chemical synthesis, and chemical transport reactions. For example, depositing TiC or TiN on the workpiece surface involves introducing gases such as TiCl4, H2, and CH4 into a reaction chamber at 850℃–1100℃, resulting in a chemical reaction that forms a coating on the workpiece surface.

[0034] Typically, workpiece 1 is placed inside a vapor deposition furnace using a support, and its size is relatively small compared to the furnace's internal dimensions. Furthermore, because different types of workpieces 1 are usually subjected to vapor deposition processes depending on the desired product, the resulting coating is partially deposited on workpiece 1 and partially accumulated on the furnace's inner wall. However, since different types of workpieces 1 deposit different types of solid films, various coatings form on the furnace's inner wall. As the coating gradually thickens, it can peel off. If this coating falls onto the surface of workpiece 1, it will affect the yield of the final product.

[0035] To solve the above problems, such as Figures 1 to 5 As shown, an embodiment of the present invention provides a vapor deposition furnace, which includes a deposition chamber 10. The deposition chamber 10 has a workpiece fixing groove 11. The groove wall of the workpiece fixing groove 11 forms the inner wall of the deposition chamber 10. The workpiece fixing groove 11 is configured to fix a workpiece 1 so that the uncoated surface of the workpiece 1 is in contact with the groove wall of the workpiece fixing groove 11, and the coated surface of the workpiece 1 is exposed.

[0036] By applying the technical solution of this invention, workpiece 1 is fixed in workpiece fixing groove 11, so that the uncoated surface of workpiece 1 is in contact with the groove wall of workpiece fixing groove 11, while the coated surface of workpiece 1 is exposed. During vapor deposition, vapor deposition is performed only on the exposed coated surface, resulting in a deposited thin film on workpiece 1. Since the groove wall of workpiece fixing groove 11 forms the inner wall of deposition chamber 10, the uncoated surface of workpiece 1 is in contact with the groove wall of workpiece fixing groove 11, thus shielding the inner wall of deposition chamber 10. Consequently, no deposited coating is formed on the inner wall of deposition chamber 10, preventing coating peeling and improving the yield of workpiece 1.

[0037] In this case, during the vapor deposition process, not all surfaces of workpiece 1 require film deposition; only specific surfaces or a few surfaces need it. In existing technologies, additional tooling, such as graphite tooling or tooling made of other materials, is typically used to cover surfaces that do not require coating in order to deposit a film on specific surfaces. The fabrication and maintenance of such tooling are costly, especially for semi-coated products requiring custom tooling, where the cost increase is even more significant.

[0038] By adopting the solution of the present invention, the uncoated surface of the workpiece 1 is brought into contact with the wall of the workpiece fixing groove 11 of the deposition chamber 10, thereby eliminating the need for additional tooling to cover the uncoated surface. This achieves a semi-coating effect without the need for expensive graphite tooling, which can significantly reduce the cost in the manufacturing process. The cost savings are even more significant for scenarios that require a large number of semi-coated products.

[0039] Generally, the workpiece 1 undergoing the gas deposition process has a regular shape, which also makes the workpiece fixing groove 11 have a relatively regular shape. The cross-sectional shape of the workpiece fixing groove 11 can be rectangular, semi-circular, or other regular shapes. This ensures that the workpiece 1 is stably fixed without exposing any uncoated surfaces.

[0040] Of course, depending on the different shapes of the workpiece 1, the workpiece fixing groove 11 should also be set in a form that matches the workpiece 1 so that when the workpiece 1 is fixed in the workpiece fixing groove 11, the uncoated surface is covered by the groove wall of the workpiece fixing groove 11.

[0041] It should be noted that when using the workpiece fixing groove 11 to fix the workpiece 1, it should be ensured that the groove wall of the workpiece fixing groove 11 is completely covered by the uncoated surface of the workpiece 1, and there should be no exposed groove wall. This prevents coating deposition at the workpiece fixing groove 11 and avoids coating peeling. Furthermore, even if there are areas in the deposition chamber 10 where the workpiece fixing groove 11 is not provided, and coating deposition occurs in these areas, the coating will not fall onto the surface of the workpiece 1 after peeling off because the workpiece 1 is within the workpiece fixing groove 11.

[0042] The inner wall of the deposition chamber 10 may have only one workpiece fixing groove 11 or multiple workpiece fixing grooves 11. When multiple workpiece fixing grooves 11 are provided on the inner wall of the deposition chamber 10, in order to make the most of the space, the workpiece fixing grooves 11 should be arranged sequentially in a specific direction, such as a ring direction.

[0043] Of course, each workpiece fixing slot 11 can hold one workpiece 1 that matches its shape, or it can hold multiple workpieces 1. When multiple workpieces 1 are placed in the workpiece fixing slot 11, the multiple workpieces 1 are stacked in the workpiece fixing slot 11 in sequence, so that the uncoated surfaces of the workpieces 1 can cover each other.

[0044] like Figure 3 and Figure 5 As shown, the vapor deposition furnace also includes a limiting member 20, which is located at the opening of the workpiece fixing groove 11. The limiting member 20 is configured to stop the workpiece 1, thereby fixing the workpiece 1 in the workpiece fixing groove 11. By using the aforementioned limiting member 20 to stop the workpiece 1, the workpiece 1 can be prevented from falling out of the workpiece fixing groove 11, which has the advantages of simple structure and easy operation.

[0045] The limiting component 20 can take many forms, such as a limiting rod, a limiting buckle, or a limiting ring, as long as it can limit the workpiece 1 and fix it in the workpiece fixing groove 11.

[0046] In some embodiments, in order to securely fix the workpiece 1 in the workpiece fixing groove 11 and prevent reactive gas from entering the gap between the uncoated surface of the workpiece 1 and the groove wall of the workpiece fixing groove 11, the limiting member 20 can be configured as a limiting rod structure, such that the extension direction of the limiting rod is the same as the extension direction of the workpiece fixing groove 11, thereby using the limiting rod to seal the gap between the uncoated surface of the workpiece 1 and the groove wall of the workpiece fixing groove 11.

[0047] In other embodiments, the limiting member 20 can also be segmented. When multiple workpieces 1 are placed in the workpiece fixing groove 11, different workpieces 1 can be disassembled and assembled separately by taking the limiting member 20 in sequence.

[0048] In this invention, the specific location of the limiting member 20 is not limited, as long as it can be located at the opening of the workpiece fixing groove 11 to limit the workpiece 1. In some embodiments, the limiting member 20 can be located at the end of the opening of the workpiece fixing groove 11, in which case the limiting member 20 can be set as a limiting ring or other structure. In some embodiments, the limiting member 20 can be located at the middle of the opening of the workpiece fixing groove 11, in which case the limiting member 20 can be set as a limiting buckle.

[0049] like Figure 1 and Figure 2As shown, the inner wall of the deposition chamber 10 is provided with a mounting groove 12, which is located at the opening of the workpiece fixing groove 11. A limiting member 20 is disposed at the mounting groove 12, protruding from the groove wall of the mounting groove 12 and extending into the opening of the workpiece fixing groove 11 to stop and cooperate with the workpiece 1. By installing the limiting member 20 at the mounting groove 12, the limiting member 20 can cooperate with both the mounting groove 12 and the workpiece 1, thereby limiting the workpiece 1 within the workpiece fixing groove 11.

[0050] The mounting groove 12 can take various forms, as long as it can support the limiting member 20 and enable the limiting member 20 to limit the workpiece 1. In some embodiments, the mounting groove 12 can be a recessed groove structure, in which a part of the limiting member 20 is inserted into the groove, and the other part of the limiting member 20 stops the workpiece 1.

[0051] Of course, depending on the different shapes of the limiting member 20, the shape of the mounting groove 12 can also be set in different forms, as long as it can provide support for the limiting member 20.

[0052] In some embodiments, the mounting groove 12 and the workpiece fixing groove 11 are connected, that is, the mounting groove 12 and the workpiece fixing groove 11 have a common boundary line, so that after the limiting member 20 is placed in the mounting groove 12, the part of the limiting member 20 protruding from the mounting groove 12 can directly cooperate with the workpiece 1, avoiding the inner wall of the deposition chamber 10 from being exposed, thereby further preventing the formation of a coating on the inner wall of the deposition chamber 10.

[0053] like Figures 1 to 3 As shown, the inner wall of the deposition chamber 10 has multiple workpiece fixing slots 11, the walls of which together form the inner wall of the deposition chamber 10. The multiple workpiece fixing slots 11 are arranged sequentially along the circumference of the deposition chamber 10. Multiple limiting members 20 are provided, with limiting members 20 on both sides of the slot opening of each workpiece fixing slot 11. Using this design, by placing a workpiece 1 in each workpiece fixing slot 11, multiple workpieces 1 can be subjected to vapor deposition simultaneously, thereby improving the efficiency of the vapor deposition process.

[0054] Furthermore, by providing limiting members 20 on both sides of the workpiece fixing groove 11, the limiting members 20 can respectively form a limiting engagement with both sides of the workpiece 1, so as to further fix the workpiece 1 in the workpiece fixing groove 11.

[0055] In this case, the wall of the workpiece fixing groove 11 is completely covered by the uncoated surface of the workpiece, so the inner wall of the deposition chamber 10 is not exposed.

[0056] In some embodiments, each workpiece fixing groove 11 may correspond to two limiting members 20, with the two limiting members 20 located on both sides of the workpiece fixing groove 11. In other embodiments, two adjacent workpiece fixing grooves 11 may share one limiting member 20 to reduce the number of limiting members 20 and lower manufacturing costs.

[0057] like Figure 4 and Figure 5 As shown, multiple workpiece fixing slots 11 are arranged in pairs facing each other, and a limiting member 20 is provided between two adjacent workpiece fixing slots 11. The limiting member 20 with the above structure can limit two workpieces 1 at the same time by having two limiting segments respectively limiting and cooperating with two workpieces 1, which can simplify the structure and reduce manufacturing costs.

[0058] like Figure 2 and Figure 6 As shown, the limiting member 20 includes a first limiting segment 21 and a second limiting segment 22 connected to each other, with an included angle between the first limiting segment 21 and the second limiting segment 22. The first limiting segment 21 and the second limiting segment 22 extend into the slots of two adjacent workpiece fixing grooves 11, respectively. The above-described limiting member structure has the advantages of simple structure and easy processing.

[0059] In some embodiments, the mounting groove 12 can be configured as an angular groove, with one boundary line shared with the boundary line of one of the two adjacent workpiece fixing grooves 11, and the other boundary line shared with the boundary line of the other of the two adjacent workpiece fixing grooves 11. The first limiting segment 21 and the second limiting segment 22 respectively fit against the two groove walls of the angular groove and extend into the groove openings of the two adjacent workpiece fixing grooves 11, thereby the first limiting segment 21 fits against one workpiece 1 to form a limiting position, and the second limiting segment 22 fits against the other workpiece 1 to form a limiting position.

[0060] The first limiting segment 21 and the second limiting segment 22 form an angular structure, which respectively fits against the two side walls of the angular groove.

[0061] In some embodiments, the extending direction of the limiting member 20 and the extending direction of the workpiece fixing groove 11 are both the same as the axial direction of the deposition chamber 10. With the above design, the workpiece 1 can be fixed by the limiting member 20 in the extending direction of the workpiece fixing groove 11, so that the workpiece 1 is fixed more stably.

[0062] In this context, the axial direction of the deposition chamber 10 refers to the direction of gas flow. To form a good deposited film on the coating surface of the workpiece 1, the coating surface of the workpiece 1 should extend along the gas flow direction, so that the extension direction of the workpiece fixing groove 11 is the same as the axial direction of the deposition chamber 10.

[0063] In this embodiment, the extension directions of the first limiting segment 21 and the second limiting segment 22 are both the same as the axial direction of the deposition chamber 10. The first limiting segment 21 can respectively fit with one wall of the mounting groove 12 and one of the two adjacent workpieces 1, thereby sealing the gap between the workpiece 1 and the workpiece fixing groove 11. The second limiting member 20 can respectively fit with the other wall of the mounting groove 12 and the other of the two adjacent workpieces 1, thereby sealing the gap between the workpiece 1 and the workpiece fixing groove 11.

[0064] like Figure 1 and Figure 7 As shown, the deposition chamber 10 includes a first forming part 13 and a second forming part 14. The second forming part 14 is respectively provided at both ends of the first forming part 13. The inner walls of the first forming part 13 and the second forming part 14 together form a workpiece fixing groove 11. The rigidity of the first forming part 13 is less than that of the second forming part 14. Using the above-described deposition chamber 10, the first forming part 13 forms the main body of the deposition chamber 10, and the second forming part 14 provides support for the first forming part 13. This allows the deposition chamber 10 to have high structural strength, providing the high-temperature environment required for the vapor deposition process.

[0065] Both the first forming section 13 and the second forming section 14 are made of insulating materials to ensure good insulation of the deposition chamber 10, enabling the vapor deposition process to proceed under suitable temperature conditions. Generally, the first forming section 13 can use insulating felt. For example, rock wool insulating felt, made primarily of rock through high-temperature melting and fiberization, has a high melting point and good fire resistance, while also providing significant thermal insulation. The second forming section 14 can use rigid carbon fiber insulating material or carbon-carbon composite material. Rigid carbon fiber insulating material is produced by molding carbon fibers with a binder, followed by carbonization, graphitization, and other processes. This material has high rigidity and strength while maintaining good thermal insulation performance. Carbon / carbon composite insulating material is a composite material made from carbon fiber as the matrix through multi-layer needle punching, deposition, graphitization, and other processes. It features high strength, low density, and high temperature resistance.

[0066] The inner cavity (i.e., the gas flow chamber) of the deposition chamber 10 extends through both ends of the first forming part 13 and is covered by the second forming part 14. After the workpiece 1 is installed, the inner wall of the first forming part 13 covers the side wall of the workpiece 1, and the second forming part 14 covers the end of the workpiece 1, so that the uncoated surface of the workpiece 1 is covered.

[0067] In some embodiments, the inner edge of the second molding portion 14 is flush with the inner side of the workpiece 1, so that the uncoated surface of the workpiece 1 can be completely covered by the second molding portion 14, and the second molding portion 14 will not be exposed to the workpiece 1, so that no coating will be formed on the second molding portion 14.

[0068] like Figure 7 As shown, the deposition chamber 10 also includes a heating element 15, which is disposed at the workpiece fixing groove 11. The heating element 15 can heat the deposition chamber 10, thereby providing the high-temperature environment required for the vapor deposition process, so that the vapor deposition process can be carried out under suitable temperature conditions.

[0069] In some embodiments, the extending direction of the heating element 15 can be the same as the extending direction of the workpiece fixing groove 11. This allows the heating element 15 to uniformly heat the entire workpiece 1 along its extending direction, resulting in a more uniform deposited film.

[0070] Of course, in order to make the temperature of workpiece 1 more uniform, heating elements 15 can be provided on both sides of the workpiece fixing groove 11 to heat the workpiece 1 on both sides respectively.

[0071] like Figure 1 and Figure 7 As shown, the deposition chamber 10 also includes an inlet pipe 16 and an outlet pipe 17, which are respectively located at both ends of the deposition chamber 10 and are connected to the deposition chamber 10. The inlet pipe 16 delivers the gas required for the reaction into the deposition chamber 10, allowing the gas to react on the surface of the workpiece 1. The outlet pipe 17 removes the byproducts generated after the reaction from the deposition chamber 10.

[0072] Each of the second forming sections 14 located at both ends of the sedimentation chamber 10 has an air vent, which is connected to the inner cavity of the sedimentation chamber 10. The air inlet pipe 16 and the air outlet pipe 17 are connected to the inner cavity of the sedimentation chamber 10 through the two air vents respectively.

[0073] After the vapor deposition process is completed on workpiece 1, the inlet pipe 16 and the second forming part 14 near the inlet pipe 16 are removed, and then the limiting member 20 is removed, so that the finished product can be taken out. This allows vapor deposition to be performed on another workpiece 1, so that the deposition chamber 10 is always in the state of first use in each vapor deposition, avoiding the effect of coating peeling off workpiece 1 due to repeated use of the deposition chamber 10.

[0074] like Figure 8As shown, in some embodiments, the vapor deposition furnace further includes a furnace body 30, and multiple deposition chambers 10 are arranged within the furnace body 30. Using the above design, multiple deposition chambers 10 are arranged within a single furnace body 30, which improves the space utilization within the furnace body 30 and allows for the simultaneous preparation of solid-state thin films on multiple workpieces 1, thereby increasing production efficiency.

[0075] When multiple deposition chambers 10 are provided in the furnace body 30, the workpiece 1 in different deposition chambers 10 can be the same workpiece 1 or different workpiece 1, that is, the workpiece 1 in different deposition chambers 10 can deposit the same solid film or deposit different solid films.

[0076] When different solid films are deposited in different deposition chambers 10, different gases or mixed gases with different proportions should be introduced into each deposition chamber 10. Furthermore, each deposition chamber 10 should be equipped with a separate heating element 15 to ensure that each deposition chamber 10 has a matching temperature.

[0077] When multiple deposition chambers 10 are provided inside the furnace body 30, the heating element 15 can also be provided in the furnace body 30 so that each deposition chamber 10 has the same temperature. At this time, the workpiece 1 in different deposition chambers 10 deposits the same solid film.

[0078] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0079] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0080] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0081] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0082] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A vapor deposition furnace, characterized in that, include: A deposition chamber having a workpiece fixing groove, the groove wall of which forms the inner wall of the deposition chamber, the workpiece fixing groove being configured to fix a workpiece such that the uncoated surface of the workpiece is in contact with the groove wall of the workpiece fixing groove, and the coated surface of the workpiece is exposed.

2. The vapor deposition furnace according to claim 1, characterized in that, The vapor deposition furnace also includes a limiting member located at the opening of the workpiece fixing groove. The limiting member is configured to stop the workpiece to fix the workpiece in the workpiece fixing groove.

3. The vapor deposition furnace according to claim 2, characterized in that, The inner wall of the deposition chamber is provided with an installation groove, which is located at the opening of the workpiece fixing groove. The limiting member is provided at the installation groove, protruding from the groove wall of the installation groove and extending into the opening of the workpiece fixing groove to cooperate with the workpiece stop.

4. The vapor deposition furnace according to claim 2, characterized in that, The inner wall of the deposition chamber has multiple workpiece fixing grooves, and the groove walls of the multiple workpiece fixing grooves together form the inner wall of the deposition chamber. The multiple workpiece fixing grooves are arranged sequentially along the circumference of the deposition chamber. There are multiple limiting members, and the limiting members are provided on both sides of the groove opening of the workpiece fixing groove.

5. The vapor deposition furnace according to claim 4, characterized in that, The limiting member includes a first limiting segment and a second limiting segment connected together, with an included angle between the first limiting segment and the second limiting segment, and the first limiting segment and the second limiting segment respectively extending into the slots of two adjacent workpiece fixing grooves; and / or, The multiple workpiece fixing slots are arranged opposite each other in pairs, and a limiting member is provided between two adjacent workpiece fixing slots.

6. The vapor deposition furnace according to claim 2, characterized in that, The extension direction of the limiting member and the extension direction of the workpiece fixing groove are both the same as the axial direction of the deposition chamber.

7. The vapor deposition furnace according to any one of claims 1 to 6, characterized in that, The deposition chamber includes a first forming part and a second forming part. The second forming part is respectively provided at both ends of the first forming part. The inner wall of the first forming part and the inner wall of the second forming part together form the workpiece fixing groove. The rigidity of the first forming part is less than that of the second forming part.

8. The vapor deposition furnace according to any one of claims 1 to 6, characterized in that, The cross-section of the workpiece fixing groove includes a semi-circle or a rectangle.

9. The vapor deposition furnace according to any one of claims 1 to 6, characterized in that, The deposition chamber further includes a heating element disposed at the workpiece fixing groove; and / or, The sedimentation chamber further includes an air inlet pipe and an air outlet pipe, which are respectively located at both ends of the sedimentation chamber and are connected to the sedimentation chamber.

10. The vapor deposition furnace according to any one of claims 1 to 6, characterized in that, Also includes: The furnace body contains multiple deposition chambers, all of which are located within the furnace body.

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