Injection device and cutting device

Abstract

The invention provides an injection device and a cutting device, the injection device is provided with a working cavity with an open end, and a liquid environment is formed in the working cavity; a high-frequency resonator is arranged in the working cavity, when the high-frequency resonator works, special ultrasound of 0.5-30 kilomegahertz is generated to act on the liquid environment, a sound beam is generated, and the sound beam faces the open end of the working cavity. When the sound beam is used for injection, the injection device can realize injection of liquid or particles to a target. When the sound beam is used for cutting, the cutting device can cut a target object.

Description

[0001] This application is a divisional application of Chinese Patent Application No. 202410832207.9, filed on June 26, 2024, entitled "Method for generating microscale columnar high-speed acoustic beams in a liquid environment and its application". Technical Field

[0002] This application relates to the field of microfluidics, specifically to the application of generating microscale columnar high-speed acoustic beams in a liquid environment, and particularly to an injection device and a cutting device. Background Technology

[0003] In the field of acoustic fluid technology, acoustic flow is a stable flow induced by sound waves, a phenomenon manifested as momentum transfer from sound waves to fluid motion. When ultrasound propagates in a sound-absorbing fluid, it causes overall movement of the medium. The acoustic flow effect is more pronounced because the special sound waves generated by high-frequency resonators are absorbed faster and travel shorter distances in the fluid. The regional vibrations generated at the working interface of the high-frequency resonator form traveling waves in the liquid, exerting a continuous thrust on the local liquid within the liquid environment. This drives the local liquid to move in the direction of the traveling wave propagation. Simultaneously, based on fluid viscosity, the surrounding liquid also moves, creating a flow effect in the direction directly opposite the working interface. Here, the local liquid refers to the liquid portion directly opposite the working interface of the high-frequency resonator. As the high-frequency resonator continues to operate, the continuous flow of the liquid further generates secondary fluids such as eddies and convection within the liquid environment.

[0004] Besides driving liquid flow, generating eddies, and convection, the ultrasonic waves of high-frequency resonators can also, in certain scenarios, generate focused acoustic beams—i.e., high-speed columnar jets of fluid—within the liquid's propagation direction. These acoustic beams are characterized by their alignment with the sound wave's direction of propagation in the liquid, their cylindrical shape within their travel path, low mixing with the surrounding liquid, and a clear basal flow pattern. The acoustic beam represents a relatively stable flow, allowing for better momentum transfer. These characteristics can be used to manipulate the directional movement of specific liquid components or to control the directional movement of substances contained within the acoustic beam.

[0005] Therefore, how to provide a solution for enabling ultrasonic devices to generate sound beams in liquids is a technical problem that needs to be solved. Summary of the Invention

[0006] In view of the above-mentioned problems of the prior art, this application provides an application for generating microscale columnar high-speed acoustic beams in a liquid environment, particularly an injection device and a cutting device.

[0007] The first aspect of this application provides an injection device, comprising:

[0008] A working cavity with an open end is provided, and a liquid environment is formed within the working cavity. A high-frequency resonator is provided within the working cavity, and the acoustic beam generated by the high-frequency resonator is directed toward the open end of the working cavity.

[0009] The high-frequency resonator, when operating, generates 0.5-30 GHz ultrasonography which acts on the liquid environment to produce directional fluid motion at the solid-liquid interface along the direction of sound wave propagation in the liquid. This directional fluid motion includes a focused columnar acoustic beam. The high-frequency resonator is driven by a first power for at least one driving cycle, each driving cycle including a first stage and a second stage. In the first stage, the high-frequency resonator is driven to generate 0.5-30 GHz ultrasonography, and in the second stage, the driving of the high-frequency resonator is stopped. The magnitude of the first power causes the high-frequency resonator to generate the acoustic beam during the first stage.

[0010] As one possible implementation of the first aspect, it further includes: a drug solution chamber integrally or detachably disposed with the injection device; the working chamber is connected to the drug solution chamber via a channel or conduit.

[0011] As one possible implementation of the first aspect, the size of the open end of the working cavity is designed such that when the high-frequency resonator is not in operation, the liquid in the working cavity does not flow out due to the internal and external air pressure difference or the surface tension of the liquid.

[0012] As one possible implementation of the first aspect, it further includes: the open end of the working cavity is provided with a mesh structure; the working cavity has a plurality of high-frequency resonators, and the directional transmission direction of the acoustic beam generated by each high-frequency resonator is directly opposite to a mesh hole of the mesh structure.

[0013] A second aspect of this application provides a cutting apparatus, comprising:

[0014] A working cavity with an open end, wherein a liquid environment can be formed within the working cavity; a high-frequency resonator is provided within the working cavity, and the acoustic beam generated by the high-frequency resonator is directed toward the open end of the working cavity.

[0015] The high-frequency resonator, when operating, generates 0.5-30 GHz ultrasonography which acts on the liquid environment to produce directional fluid motion at the solid-liquid interface along the direction of sound wave propagation in the liquid. This directional fluid motion includes a focused columnar acoustic beam. The high-frequency resonator is driven by a first power for at least one driving cycle, each driving cycle including a first stage and a second stage. In the first stage, the high-frequency resonator is driven to generate 0.5-30 GHz ultrasonography, and in the second stage, the driving of the high-frequency resonator is stopped. The magnitude of the first power causes the high-frequency resonator to generate the acoustic beam during the first stage.

[0016] As a possible implementation of the second aspect, it further includes: a liquid supply device that is integrally or detachably configured with the cutting device; the working chamber is connected to the liquid supply device via a channel or conduit.

[0017] As one possible implementation of the first and second aspects, the distance between the solid-liquid interface of the high-frequency resonator and the open end of the working cavity is between 200 micrometers and 300 micrometers.

[0018] As one possible implementation of the first and second aspects, the liquid environment includes liquids or particles to be transported by the acoustic beam.

[0019] As one possible implementation of the first and second aspects, the intensity of the first power is increased to increase the intensity of the acoustic beam, or the duration of the first phase or the duty cycle within a drive cycle is reduced, and the intensity of the first power is increased to increase the intensity of the acoustic beam.

[0020] As one possible implementation of the first aspect, the duration of the first phase under the first power is less than a second threshold or the duty cycle of the first phase in one drive cycle is less than a first threshold, so that the temperature of the high-frequency resonator is within a third threshold, or / and the duration of the first phase under the first power is less than the second threshold or the duty cycle of the first phase in one drive cycle is less than the first threshold, so as to suppress the high-frequency resonator from generating secondary flow in the liquid environment.

[0021] As one possible implementation of the first and second aspects, the acoustic beam is controlled using one or more of the following parameters: the number of durations of the drive cycle; the duration of the first phase and / or the duration of the second phase in the drive cycle; and the magnitude of the first power.

[0022] A third aspect of this application provides a method for generating a microscale columnar high-speed acoustic beam in a liquid environment, comprising: a liquid environment; a high-frequency resonator that, when operating, generates 0.5-30 GHz ultrasonography acting on the liquid environment to generate directional fluid motion at the solid-liquid interface along the direction of sound wave propagation in the liquid, the directional fluid motion being a focused columnar acoustic beam; driving the high-frequency resonator to operate for at least one driving cycle with a first power, each driving cycle including a first stage and a second stage, wherein in the first stage the high-frequency resonator is driven to generate 0.5-30 GHz ultrasonography, and in the second stage the driving of the high-frequency resonator is stopped; wherein the magnitude of the first power causes the high-frequency resonator to generate the acoustic beam during the first stage.

[0023] Therefore, this application uses the first power of the above-mentioned magnitude to drive the high-frequency resonator through each driving cycle including the first stage and the second stage, which can realize the generation of a focused columnar acoustic beam in a liquid environment.

[0024] As a possible implementation of the third aspect, the duration of the first stage at the first power is less than the second threshold or the duty cycle of the first stage in one drive cycle is less than the first threshold, so that the temperature of the high-frequency resonator is within the third threshold.

[0025] Therefore, by limiting the duration or duty cycle of the first stage as described above, the temperature of the high-frequency resonator device or the liquid environment in which the device is located can be controlled within the third threshold while generating the aforementioned acoustic beam, thus avoiding overheating.

[0026] As a possible implementation of the third aspect, the high-frequency resonator suppresses secondary flow generated in the liquid environment when the duty cycle of the first phase is less than a first threshold or the duration is less than a second threshold.

[0027] Therefore, by limiting the duration or duty cycle of the first stage as described above, it is possible to suppress the generation of eddies or convection in the liquid environment when generating the aforementioned acoustic beam, so as to facilitate the manipulation of the liquid or particles in the liquid transported by the acoustic beam.

[0028] As a possible implementation of the third aspect, the acoustic beam generated by the high-frequency resonator reaches its highest speed in the first phase of each driving cycle.

[0029] As one possible implementation of the third aspect, the acoustic beam generated by the driving of the high-frequency resonator reaches its maximum velocity at a distance of 200-300 micrometers from the high-frequency resonator. Specifically, the location of the maximum velocity is also related to the input power of the high-frequency resonator and the device size; in some cases, the maximum velocity location is between 100-200 micrometers, while in others it is less than 100 micrometers.

[0030] As a possible implementation of the third aspect, the intensity of the first power is increased to increase the intensity of the acoustic beam, or the duration of the first phase or the duty cycle within a drive cycle is reduced, and the intensity of the first power is increased to increase the intensity of the acoustic beam.

[0031] As one possible implementation of the third aspect, the area of ​​the acoustic beam generation region is approximately 10-1,000,000 μm. 2 Preferably, it is about 100-40000μm 2 More preferably 1000–10000 μm 2 The first power is approximately 0.1-500W, preferably 2-50W, and more preferably 5-15W.

[0032] A third aspect of this application provides a method for directional transport, comprising: generating an acoustic beam in a liquid based on any of the methods described in the third aspect, wherein the direction of the acoustic beam is the direction of the directional transport; and directionally transporting the liquid acted upon by the high-frequency resonator, or particles in the acted liquid, through the drag force of the acoustic beam.

[0033] As a possible implementation of the fourth aspect, the liquid environment includes one or two liquid layers, wherein the two liquid layers include a first liquid layer in contact with the interface of the high-frequency resonator and a second liquid layer away from the interface of the high-frequency resonator and in contact with the first liquid layer; the directional transport includes: directionally moving particles in the first liquid layer or directionally transporting particles in the first liquid layer to the second liquid layer by means of an acoustic beam.

[0034] As a possible implementation of the fourth aspect, it also includes a target material, the interface between the target material and the high-frequency resonator including the liquid environment; the directional delivery includes: directionally delivering the first layer of liquid or particles in the first layer of liquid to the target material via an acoustic beam.

[0035] The fifth aspect of this application provides a method for processing a target object, comprising: making the distance between the interface of a high-frequency resonator and the action position of the target object 0.05–10 mm, preferably 0.1–5 mm, and most preferably between about 200–400 micrometers; generating an acoustic beam using any of the methods described in the third aspect, and applying the acoustic beam to the target object with liquid in a liquid environment or liquid containing particles, so as to perform liquid injection or cutting on the target object, or to perform rinsing, polishing, or peeling of surface deposits on the target object.

[0036] As one possible implementation of the first, second, third, fourth, and fifth aspects, the acoustic beam is controlled using one or more of the following parameters: the number of durations of the drive cycle; the duration of the first phase and the duration of the second phase in the drive cycle; and the magnitude of the first power.

[0037] The above-described solution can rapidly generate a high-speed, focused columnar acoustic beam in a liquid environment, and can achieve the generation of the acoustic beam while controlling the device temperature within a threshold range, thereby reducing or avoiding the generation of secondary currents. Furthermore, the above provides applications based on the acoustic beam, including high-speed directional transport of liquids or particles in liquids, injection or cutting of target objects with liquids or particles, or rinsing, polishing, or peeling off surface deposits of target objects. Attached Figure Description

[0038] Figure 1 In the diagram, 'a' represents a schematic representation of jet and secondary flow phenomena in a liquid environment. Figure 1 b in the figure is an image of the acoustic beam generated in a liquid environment using the method of this application;

[0039] Figure 2 These are consecutive frames illustrating the acoustic beam generation process of this application;

[0040] Figure 3 This is a composite trajectory diagram of the continuous time of the acoustic beam generated in this application;

[0041] Figure 4 This is a circuit schematic diagram for implementing the method of this application;

[0042] Figure 5 Is using Figure 4 A timing schematic diagram of an embodiment of the circuit that generates the output signal of the drive unit:

[0043] Figure 6 Is using Figure 4 A timing schematic diagram of another embodiment of the circuit that generates the output signal of the drive unit;

[0044] Figure 7This is a schematic diagram of the signal generator after the signal is tuned into a triangular wave;

[0045] Figure 8 This is a size comparison diagram of the bulk acoustic wave device used in this application;

[0046] Figure 9 This is a schematic diagram illustrating an application of the method provided in this application.

[0047] Figure 10 This is a schematic diagram illustrating another application of the method provided in this application, according to an embodiment of the present application.

[0048] Figure 11 This is an analysis chart of the experimental results data in this application;

[0049] Figure 12 This is a schematic diagram showing the dimensions of each high-frequency resonator used in the experiments of this application.

[0050] It should be understood that the dimensions and shapes of the blocks in the above structural diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the blocks presented in the structural diagrams are only schematic representations of the structural relationships between the blocks, and are not intended to limit the physical connection methods of the embodiments of the present invention. Detailed Implementation

[0051] The technical solutions provided in this application will be further described below with reference to the accompanying drawings and embodiments. It should be understood that the system architecture and business scenarios provided in the embodiments of this application are mainly for illustrating possible implementations of the technical solutions of this application and should not be construed as the sole limitation on the technical solutions of this application. Those skilled in the art will recognize that the technical solutions provided in this application are equally applicable to similar technical problems as system architectures evolve and new business scenarios emerge.

[0052] It should be understood that the schemes for generating microscale columnar high-speed acoustic beams provided in the embodiments of this application include methods for generating microscale columnar high-speed acoustic beams and their applications. Since these technical solutions solve problems based on the same or similar principles, some repetitive details may not be repeated in the following descriptions of specific embodiments, but these specific embodiments should be considered as mutually referencing each other and can be combined with each other.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application. To accurately describe the technical content of this application and to accurately understand the invention, the following explanations or definitions of the terms used in this specification are provided before describing specific embodiments:

[0054] 1) High-frequency resonator: This can be a device that generates mechanical vibration by applying voltage based on the piezoelectric effect. In this application, a piezoelectric resonator that generates ultrasonic waves of not less than 0.5 GHz (GHz is equivalent to gigahertz) during operation is used. Preferably, it is a piezoelectric resonator that generates ultrasonic waves of not less than 1 GHz and not more than 30 GHz during operation, for example, it can be 2 GHz to 2.5 GHz. Such piezoelectric resonators can be, for example, surface acoustic wave (SAW) devices, bulk acoustic wave (BAW) devices, etc. For example, when it is BAW, it can be a thin-film bulk acoustic wave resonator (FBAR), a solid-state assembled resonator (SMR), or a Lamb wave resonator (LWR). For ease of description, the piezoelectric resonator that can generate ultrasonic waves of not less than 0.5 GHz will be referred to as an ultrasonic device below.

[0055] 2) Jet phenomenon is a phenomenon of sound waves from ultrasonic devices at the solid-liquid interface. The regional vibration generated at the working interface of the high-frequency resonator can form a traveling wave in the liquid and exert a continuous thrust on the local liquid in the liquid environment, causing at least a portion of the liquid to move in a straight line along the direction of sound wave propagation. This phenomenon of straight-line motion is called jet phenomenon.

[0056] Secondary flow phenomena, including eddies and thermal backflow, are another phenomenon generated when ultrasonic devices act on liquids. They include eddies (or micro vortices) caused by local circulation generated by the jet driving the liquid, and thermal backflow generated by the heating of ultrasonic devices.

[0057] The jet phenomenon and secondary flow phenomenon can be found in [reference needed]. Figure 1 The image and diagram shown in section 'a' are as follows. Figure 1 The diagram shown in a figure illustrates the use of eddies for particle capture.

[0058] 3) Acoustic beam: Acoustic beam is a unique type of jet phenomenon. Its characteristics include a fluid moving at high speed along the direction of sound wave propagation, forming a thin cylindrical jet within its path. Before significant attenuation, the acoustic beam and the surrounding liquid are essentially in a laminar flow state, with low mixing. For example... Figure 1 Image b in the figure shows an image of the acoustic beam produced by the scheme of this application, captured by a high-speed camera. Figure 1 As can be seen from b in the diagram, the acoustic beam has a high degree of focusing and is no longer like... Figure 1 In the a, there are clusters of jets, and Figure 1 It is clearly not visible in b in the middle. Figure 1 The secondary flow phenomenon in a.

[0059] 4) Confined jet and free jet: This refers to whether the jet is restricted by external firmware or sidewalls after it is ejected, and is divided into confined jet and free jet. Unless otherwise specified, the jet described in the embodiments of this application usually refers to free jet.

[0060] 5) Reynolds Number (Re): In fluid mechanics, the Reynolds number is a measure of the ratio of inertial force to viscous force in a fluid. It can be used to determine whether a fluid flow is laminar or turbulent, and also to determine the resistance experienced by an object flowing in a fluid. A lower Reynolds number indicates stable, laminar flow; conversely, a higher Reynolds number indicates less stable flow, where small changes in velocity easily develop and intensify, forming a turbulent and irregular flow field. In some cases, Re = ρvd / η, where v, ρ, and η are the fluid velocity, density, and viscosity coefficient, respectively, and d is a characteristic length, such as the diameter at the initiation of a jet, like the diameter of a jet nozzle. In this application, d represents the jet diameter.

[0061] 6) Signal duration within one drive cycle: In this application, electrical energy is applied intermittently, as can be found in the following reference. Figure 5 As shown, during the power-on phase of the switching power supply (corresponding to...) Figure 5 The high-level switch signal represents the duration of the signal within the drive cycle, also known as the first stage of the drive cycle. Corresponding to the output signal of the drive unit, several signals will be output during this duration. For example, when the signal generator outputs a 1GHz signal, assuming the first stage lasts for 1 microsecond, the drive unit will output 1000 signals during this first stage. The power applied during the first stage will be applied to these 1000 signals. The stage during which no drive signal is output within the drive cycle is the second stage, which also corresponds to the power supply off stage (corresponding to...). Figure 5 (Switch signal low level).

[0062] In certain cases, such as when the first phase is executed only once and then ends, this is equivalent to, or considered as, executing only one drive cycle, and therefore this situation is also within the scope of protection of this application.

[0063] 7) In some embodiments, the driving section of the high-frequency resonator of this application may be as follows: Figure 4As shown, it includes a control unit and a drive unit, the drive unit including a signal generator and a power amplifier.

[0064] A signal generator is used to generate high-frequency signals, the frequency of which is the same as or approximately the operating frequency of the load (such as an ultrasonic device).

[0065] A power amplifier is used to amplify the signal to be output so that it can drive a load (such as a supersonic device).

[0066] The control unit can be a switching power supply, which controls the output switching signal. This switching signal can be a periodic signal, with a high level corresponding to the switching on phase (such as the conduction phase of the switching power supply's switching transistor). Figure 5 In the first stage, the switch-off stage corresponds to a low level, which is... Figure 5 The second stage is described. The control unit can also control the operating voltage input to the power amplifier to achieve different output powers, which are referred to in this application as the first power. In this application, the first power can be understood as the average energy density input to the high-frequency resonator in one driving cycle (one driving cycle consists of a first stage and a second stage). Since the amount of energy is related to power and time, the amount of energy input to the high-frequency resonator in one driving cycle is related to the level of the first power, the duration of the first stage, or its duty cycle.

[0067] The control unit can control the output of the drive unit in at least the following ways:

[0068] The first type: such as Figure 5 As shown, the original signal from the signal generator is modulated by the switching signal of the control unit, and the modulated output signal is amplified to form the output signal of the drive unit.

[0069] The second type: such as Figure 6 As shown, the original signal from the signal generator is amplified by power, and the amplified signal is modulated under the control of the switching signal of the control unit. The modulated signal is the output signal of the drive unit.

[0070] The driving circuit of the high-frequency resonator can also be in other forms, or the method of controlling the output signal can also be other methods, as long as it can output... Figure 5 or Figure 6 The output signal of the drive unit is sufficient.

[0071] 8) Conversion rate of acoustic energy (or mechanical energy generated by a high-frequency resonator) to kinetic energy of fluid: In this application, it refers to the conversion rate of the vibration energy (or acoustic energy) of a high-frequency resonator into the kinetic energy of fluid along the direction of acoustic wave propagation.

[0072] In typical acoustic-fluid scenarios, the acoustic radiation generated at the working interface of an ultrasonic device creates a continuous thrust on the local liquid environment, propelling this portion of the liquid to flow at high speed along the direction of sound wave propagation. Simultaneously, this high-speed liquid flow also influences the surrounding liquid, creating an eddy current effect. Furthermore, due to the heat generated by the acoustic device itself, thermal convection occurs at the device-liquid interface. Therefore, the fluid (jet) moving along the direction of sound wave propagation can be considered a direct fluid motion behavior caused by the propagation of sound waves in water, while eddies and thermal convection are secondary effects. From an energy transfer perspective, these secondary fluid effects (eddies and thermal convection) reduce the kinetic energy of the jet, hindering the formation of a unidirectional high-speed sound beam. Moreover, the fluid velocity is roughly proportional to the sound intensity (applied power), thus often requiring higher power to drive the high-speed fluid movement. In acoustic-fluid scenarios, tiny ultrasonic devices, such as bulk acoustic wave chips, are used, typically ranging in size from 0.01 x 0.01 square millimeters to 1 square millimeter, or even smaller. Since microscale devices often have low power handling capacity, current acoustic fluid scenarios mostly use low power (milliwatt level, such as 0.1W, 0.2W, etc.) to continuously drive ultrasonic devices. However, continuously driving ultrasonic devices with higher power will also lead to the accumulation of thermal effects and damage to the devices.

[0073] First, it should be noted that when the acoustic beam is formed in this application, the flow is essentially laminar with the surrounding liquid, resulting in low mixing. This means that eddies and convection are absent or extremely rare during the formation of the acoustic beam. This also means that energy loss due to eddies or convection is reduced during energy conversion, leading to a higher conversion rate of sound wave energy to fluid kinetic energy and a faster fluid velocity. See also... Figure 2 The continuous frame diagrams of the acoustic beam generation process shown in this application are multi-frame diagrams of the acoustic beam generation process taken by a high-speed camera every 0.4ms when the input power of the high-frequency resonator is 1W. It can be seen that this application can quickly generate an acoustic beam within 0.4ms after applying power. Figure 3This is a composite trajectory diagram of the continuous time when the acoustic beam is generated in this application, showing a schematic diagram of trajectory synthesis after continuous high-speed shooting for 4ms and a schematic diagram of trajectory synthesis after continuous high-speed shooting for 40ms. This indicates that in the 40ms trajectory synthesis, the acoustic beam (mainly referring to the portion before it acts on the bottom of the liquid environment) maintains a linear or columnar focus, unlike the more diffused jets of conventional jets. This suggests that the acoustic beam exhibits a significant laminar flow phenomenon with the surrounding liquid. On the other hand, the partial displacement of particles in the liquid environment corresponds to the trajectory formed by their slow movement throughout the liquid environment (the acoustic beam is constrained by the bottom of the liquid environment, and its oblique action on the bottom drives the movement of the liquid environment, causing the particles in the liquid environment to move accordingly). It can be observed that the direction and length of the particle trajectory in the liquid environment (shorter, indicating slow movement) are significantly different from the direction and length of the acoustic beam trajectory (longer, indicating high speed). This means that the laminar flow phenomenon between the acoustic beam and the surrounding liquid (such as the liquid surrounding the acoustic beam) is significant, and it does not significantly drive the surrounding liquid to move at high speed, nor does it significantly form high-speed eddies or high-speed convection, thus not causing significant displacement of suspended particles in the liquid layer around the acoustic beam.

[0074] To form the desired acoustic beam, the following issues need to be considered:

[0075] 1) The sound waves need to be focused to increase the velocity of the acoustic fluid in order to achieve the velocity of the acoustic beam.

[0076] The high-frequency resonator used in this application has a size of approximately 0.01 x 0.01 square millimeters to 1 square millimeter or smaller. This microscale allows for the desired sound wave focusing effect. Furthermore, some of the ultrasonic devices used in the experiments described in this application are bulk acoustic wave devices, with dimensions such as... Figure 8 As shown, it is approximately 0.01-0.02 square millimeters.

[0077] On the other hand, the resonant frequency of the device is also related to the device size. The aforementioned micro-sized device can achieve the 0.5 GH operating frequency required by this application.

[0078] 2) The acoustic beam requires sufficient energy to drive it, so higher power needs to be input to the ultrasonic device. However, it is also necessary to avoid the high power acting on the microscale ultrasonic device to generate heat and damage the ultrasonic device.

[0079] Based on this, this application uses a first power as the input power, which is several times, tens of times, or even nearly a hundred times higher than the aforementioned low power. The first power is, for example, 0.4W, 0.8W, 4W, 10W, 60W, or even 100W or more. The magnitude of the first power is sufficient to drive the generation of an acoustic beam, wherein the intensity of the acoustic beam (e.g., speed, distance, force, etc.) is related to the magnitude of the first power. Simultaneously, it is also necessary to keep the high-frequency resonator in an intermittent operating mode, i.e., shorten the time the device is in the operating state (or operating phase), to reduce the heat generated by high input power, or to reduce or avoid the generation of secondary currents (eddies and convection).

[0080] Specifically, in the intermittent operating mode, at least one driving cycle is executed. Each driving cycle includes a first stage and a second stage. In the first stage, the high-frequency resonator is driven by the aforementioned first power to generate a supersonometer of not less than 0.5 GHz. In the second stage, the driving of the high-frequency resonator is stopped. The driving cycle can be on the order of microseconds (μs) to milliseconds (ms), for example, the value of the driving cycle can be between 1 microsecond and 100 milliseconds. The smaller the proportion of the first stage within a driving cycle, the shorter the time spent in the operating state within a driving cycle, the shorter the heat generation time, and the lower the secondary flow effect. Correspondingly, the second stage is longer, the heat dissipation time within a driving cycle is longer, and the more thoroughly the generated secondary flow (referring to the weak secondary flow that may be generated in the first stage) dissipates. Therefore, when the driving cycle is a fixed value, the smaller the proportion of the first stage, the higher the first power can be applied. In this case, the temperature of the high-frequency resonator can be controlled within a third threshold, and the generation of secondary flow by the high-frequency resonator in the liquid environment can be suppressed. In some embodiments, the proportion of the first phase within a driving cycle may not exceed 50%, or the duration may not exceed 10 milliseconds.

[0081] 3) To reduce or even avoid the generation of secondary fluid behaviors (eddies and convection).

[0082] Secondary fluids require more time to accumulate before they are generated. This application shortens the time the device is in operation (or in a working phase) when the high-frequency resonator is in an intermittent operating mode. The first phase time is insufficient to generate secondary fluids, or the generation of secondary fluids is not significant before the second phase begins, thus reducing the occurrence of secondary fluids. In other words, the duration of the first phase within a driving cycle is very short before entering the second phase, and the duration of the first phase has not yet led to the generation of secondary fluids, or the generation of secondary fluids is extremely subtle. The shorter the duration of the first phase and the smaller its proportion, the more difficult it is for secondary fluids to be generated or the less noticeable their generation. In some embodiments, when the ratio of the first phase to the second phase in the driving cycle is 1:1 (i.e., the first phase accounts for 50% of the driving cycle), the first phase can be 0.5 microseconds to 10 milliseconds. Especially when the first phase is between 0.5 and 100 microseconds, secondary fluids are practically unobservable.

[0083] It should also be noted that the generation of secondary fluids requires time to accumulate. High-speed camera observations show that the generation of eddies requires the device to be continuously operating (i.e., the first stage) for at least milliseconds or tens of milliseconds (related to the driving power), while the generation of thermal convection typically requires the device to be continuously operating (i.e., the first stage) for at least hundreds of milliseconds (related to the driving power). Therefore, by placing the high-frequency resonator in an intermittent operating mode as described above, and selecting an appropriate driving cycle and the duration or proportion of the first stage within the driving cycle, the generation of secondary flows can be effectively controlled, especially the generation of thermal convection.

[0084] 4) It is necessary to improve the ability to convert mechanical energy (the energy of sound vibration) into fluid kinetic energy, that is, to improve the fluid's energy absorption capacity and conversion efficiency.

[0085] When a resonator is applied to a liquid, using high frequencies can shorten the propagation distance of sound waves within the liquid, enhance the liquid's energy absorption capacity in a short time, improve conversion efficiency, and shorten conversion time. Here, conversion efficiency refers to the rate at which the energy input to the core (i.e., the vibrational energy or acoustic energy of the high-frequency resonator) is converted into the kinetic energy of the fluid along the direction of sound wave propagation.

[0086] This application uses a high-frequency resonator operating above 0.5 GHz, preferably a high-frequency resonator operating above 1 GHz, and even more preferably a high-frequency resonator operating between 2 GHz and 2.5 GHz.

[0087] The following section will provide a more detailed explanation of the specific approach to achieving acoustic beams in this application, in order to better understand the solution provided in this application.

[0088] To form the desired high-speed acoustic beam, sufficient energy must first be applied to the local liquid. This energy is needed to rapidly propel the liquid into a high-speed jet, thus creating the desired acoustic beam—the aforementioned microscale columnar high-speed acoustic beam. Therefore, the primary challenge is to increase the energy applied to the local liquid.

[0089] The generation of a sound beam, viewed holistically, involves the conversion of electrical energy into a sound field (which can also be understood as a special type of high-frequency vibrational mechanical energy) and its input into a fluid field. Therefore, increasing the initial energy input is a direct solution to increase the energy output of the ultrasonic device to the liquid. In other words, by increasing the input power of the ultrasonic device, the energy exerted by the device on the local liquid can be increased to achieve the energy required to form a sound beam. However, devices with a microscale of approximately 0.01 to 1 square millimeter often have low power handling capacity, typically using milliwatt-level input power as mentioned earlier. Increasing the input power, especially by several times, tens of times, or even nearly a hundred times, will inevitably lead to increased heat generation or even burnout if the ultrasonic device is driven in a conventional manner. This application addresses this by placing the high-frequency resonator in an intermittent operating mode. Because the first stage has a limited duration, the heat generated by the ultrasonic device is limited, and the heat can be rapidly dissipated during the second stage, thus maintaining the ultrasonic device within an acceptable heat range. On the other hand, because the solution of this application makes the energy conversion efficiency of high frequency vibration mechanical energy (or acoustic energy) to fluid kinetic energy very high, the heat generation is also extremely low, which is conducive to improving the input power of the device.

[0090] Furthermore, as described above, eddies and thermal convection are secondary effects compared to jets. Secondary fluid behavior (i.e., eddies and thermal convection) requires more time to accumulate and form compared to jets. This application enables the high-frequency resonator to operate in an intermittent mode, limiting the duration of the first stage (i.e., the device's operating time within one drive cycle) to a length insufficient to form secondary fluids, effectively avoiding or reducing the generation of secondary fluids. On the other hand, due to the effective avoidance or reduction of infrasound fluids, the conversion of fluid kinetic energy is more concentrated in generating the sound beam, resulting in a higher conversion rate of mechanical energy to the kinetic energy of the fluid along the direction of sound wave propagation (i.e., the direction of the sound beam).

[0091] From a certain perspective, the heat generated when conventional low-frequency resonant devices (such as ultrasonic devices from 20kHz to 100kHz) act on a liquid can be regarded as the energy loss in the process of converting the input energy (electrical energy) into mechanical energy (ultrasonic energy) by the resonant device. This loss is presented in the form of heat, and can also be called thermal loss.

[0092] On the one hand, improving the efficiency and conversion rate of energy transfer from the resonant device to the water can reduce heat loss. As mentioned earlier, when using high-frequency devices in liquids, increasing the operating frequency means increasing the efficiency and conversion rate of energy transfer to the water. Experimental tests have shown that the efficiency and conversion rate of energy transfer to water for ultrasonic devices at operating frequencies above 0.5 GHz already meet the requirements, and heat loss (i.e., heat generation) can be maintained within the expected threshold. Further increasing the operating frequency of the ultrasonic device (i.e., the output frequency of the ultrasonic device) to above 1 GHz will further reduce heat loss, especially when the operating frequency is increased to above 2 GHz, the heat loss will be further reduced.

[0093] On the other hand, in the process of converting input energy (electrical energy) into mechanical energy (ultrasound) by the aforementioned ultrasonic device, this conversion process includes: a first process of injecting electrical energy into the ultrasonic device, and a second process of the ultrasonic device converting energy into mechanical energy (ultrasound). The first process is the transfer of electrons to the device, and the second process is the conversion of mechanical vibration generated by the device into mechanical energy (ultrasound). Energy loss (heat loss) can be understood as the portion of the input electrical energy that is not completely converted into mechanical energy (without considering other energy losses). Shortening the time of the first process is equivalent to shortening the power supply time within a driving cycle, thus reducing heat loss caused by continuous power supply (such as heat loss caused by device internal resistance). On the other hand, shortening the time of the first process also means a relative increase in the remaining time within a cycle, thus providing more time for the heat loss portion (i.e., the generated heat) to dissipate from the ultrasonic device within a cycle, thereby helping the ultrasonic device to remain within the heating threshold. Based on this, the signal at the input end of the ultrasonic device is input in a manner modulated by a switching signal, as can be found in the reference. Figure 5 or Figure 6 As shown, the signal at the input end of the ultrasonic device (i.e., the output signal of the drive unit) has a signal duration, then the input signal is turned off for a period of time, and then the input signal can be made to continue for a period of time again, thus forming a periodic signal input.

[0094] Based on the above analysis, the power supplied by the switching power supply to the ultrasonic device is set as the first power. The magnitude of the first power matches the amount of energy required for the desired acoustic beam. Furthermore, the first power is used to drive the ultrasonic device through an input drive unit modulated by a periodic switching signal. That is, the ultrasonic device is driven in an intermittent working mode by the first power. The intermittent working mode includes several driving cycles. Each driving cycle includes a first stage and a second stage. In the first stage, the high-frequency resonator is driven to generate ultrasonic waves of not less than 0.5 GHz, so that the ultrasonic device generates ultrasonic waves of more than 0.5 GHz that act on the liquid environment, generating an acoustic beam in the liquid environment. In the second stage, the driving of the ultrasonic device is stopped.

[0095] Furthermore, as described above, the shortening of the first process time facilitates the dissipation of heat from the ultrasonic device. Therefore, the pulse width of the high level of the switching signal can be made less than the first threshold, that is, the duty cycle of the first stage within a driving cycle can be less than the first threshold, or the duration can be less than the second threshold. In this case, the temperature of the ultrasonic device in the intermittent working mode can be kept within the third threshold.

[0096] Furthermore, increasing the intensity of the first power input to the ultrasonic device can increase the intensity of the acoustic beam. Further, by simultaneously reducing the pulse width of the high-level switching signal (i.e., shortening the duration of the first stage) while increasing the intensity of the first power, the intensity of the first power can be further increased, thereby further increasing the intensity of the acoustic beam. Moreover, since reducing the duty cycle or duration of the first stage within a driving cycle further increases the intensity of the first power, this also improves the response speed of the acoustic beam generation, meaning it can more quickly respond to the driving signal to generate the acoustic beam. Testing has shown that the pulse width of the high-level switching signal (i.e....) Figure 5 The signal duration within a drive cycle shown in the figure (i.e., the duration of the first stage within a drive cycle) can be shortened to 0.1 microseconds to 1 microsecond, and a power of up to 60W can be applied. At this time, the high-speed acoustic beam is generated almost instantly. The response delay of the generation of the high-speed acoustic beam to the drive signal is extremely short, within the microsecond range.

[0097] Furthermore, based on the inherent characteristics of the ultrasonic device itself, or through testing (which can be conducted with the ultrasonic device in a liquid environment), the maximum efficiency of the ultrasonic device in converting electrical energy into mechanical energy under different durations of the high level of the switching signal or different duty cycles can be obtained. For example, when the high level duty cycle of the switching signal is m1% (corresponding to the switching power supply being in the on stage), the amount of mechanical energy converted into different quantities can be calculated by applying different power (i.e., the amount of electrical energy injected), or by measuring the amount of heat loss (heating of the ultrasonic device) to calculate the amount of mechanical energy converted into mechanical energy. It can be predicted that, under the condition of a high-level duty cycle m1% for the switching signal, as the power supplied to the ultrasonic device gradually increases, the heat loss gradually increases in small increments (this part represents the normal operating heat generated by the device and can be effectively dissipated). However, as the power gradually increases to a certain point, the increase in heat loss or the amount of heat generated will increase significantly and instantaneously. This point means that within one T-cycle of the switching signal, the ultrasonic device has not reached the time required to convert almost all of the input energy into mechanical energy. The unconverted excess energy is presented as heat loss, hence the heat loss increment will increase significantly and instantaneously, meaning the device will exhibit instantaneous high heat. The input power corresponding to this point can be regarded as the power threshold of the ultrasonic device input under a high-level duty cycle m1% for the switching signal. Based on this method, the input power thresholds under different high-level duty cycles m1%, m2%, m3%, etc., for different switching signals can be obtained. Theoretically, assuming a constant total energy within this cycle T, the smaller the high-level duty cycle m1% of the switching signal, i.e., the shorter the on-state of the switch, the higher the threshold of the power applied during the high-level phase of the switching signal.

[0098] On the other hand, when the pulse frequency output by the switching power supply is relatively low, that is, the period T of the switching signal is relatively long, it may cause the ultrasonic device to convert almost all of the input energy into mechanical energy in less than T time. In this case, the power output of the switching power supply can be increased as above, or the pulse frequency output by the switching power supply can be increased (that is, the period T of the switching signal can be shortened). Both of these methods can increase the energy output rate of the switching power supply, which can correspondingly increase the intensity of the ultrasonic device acting on the sound beam in the liquid.

[0099] On the other hand, for ultrasonic devices, the closer the input pulse frequency (i.e., the output signal frequency of the drive unit) is to the device's operating frequency (i.e., its natural frequency), the greater the vibration amplitude and the higher the energy conversion efficiency when the ultrasonic device enters the resonant state. Therefore, the frequency of the signal generator's output signal can be designed based on the ultrasonic device's natural frequency.

[0100] On the other hand, the increase in input energy also means an increase in the velocity of the local liquid driven by the ultrasonic device. The increase in jet velocity leads to an increase in the Reynolds number. An increase in the Reynolds number is inherently detrimental to maintaining a laminar flow state, i.e., to maintaining a sound beam state. However, in actual experiments and calculations, when sufficient energy drives the generation of a sound beam, the focusing property of the energy makes the diameter of the sound beam much smaller than the increase in jet velocity. The Reynolds number can still be kept small enough to maintain the jet in a laminar flow state with the surrounding liquid, i.e., a sound beam. For example, preliminary calculations show that even when the input power of the ultrasonic device reaches 60W, the period of the switching signal is 0.1-0.3 microseconds, and the high-level duty cycle is 50%, and the sound beam velocity reaches the level of 10m / s, the diameter of the sound beam (including the observation width of the surrounding water of different densities) is still in the range of 1 mm. The Reynolds number calculated based on this is still small enough to show a clear sound beam.

[0101] In addition, the acoustic beam should be controllable, and the parameters that can be controlled for the acoustic beam include the following:

[0102] a1) The initial jet force, velocity, and jet path of the acoustic beam. Since the acoustic beam path is related to the velocity or acoustic beam force, these acoustic beam parameters can be controlled using the same input parameters of the ultrasonic device. For ease of description, the initial jet force, velocity, or jet path of the acoustic beam will be referred to as the first acoustic beam parameter below.

[0103] a2) Diameter of the acoustic beam.

[0104] The input parameters of the ultrasonic device, or the parameters of the ultrasonic device itself, or the environmental parameters that can affect the parameters by which the above-mentioned acoustic beam is controlled, include the following:

[0105] b1) Output parameters of the switching power supply: waveform parameters of the switching signal, such as the duration of the high level of the switching signal within one drive cycle, the duty cycle of the high level, and the number and location of high levels when the switching signal contains multiple high levels within one drive cycle; frequency (or period) and applied power (or amplified power) of the switching signal. The above waveform parameters, frequency, and power can be constant or variable values ​​within each drive cycle. The variable values ​​can also change in a regular manner. For example, it can be divided into large drive cycles, each of which includes several small drive cycles. The waveform parameters, frequency, or power of these small drive cycles are different.

[0106] For example, the waveforms of a signal generator, such as rectangular waves (square waves), sawtooth waves, spikes (or triangular waves), stepped waves, sine waves, half-waves, etc., are modulated into sawtooth waves, spikes (or triangular waves), stepped waves, sine waves, half-waves, etc., by the output signals of the corresponding drive units. Figure 7The modulated spike pulse (or triangular wave) wave is shown.

[0107] Here, b1 is a controllable parameter, and the value of the first acoustic beam parameter in a1 can be controlled by changing the parameter in b1. For example, to enhance the first acoustic beam parameter, the applied power can be increased, or the applied power can be increased while shortening the duration of the first stage within the aforementioned drive cycle (i.e., the high-level duration of the switching signal), or the frequency of the switching signal can be increased.

[0108] Tests showed that as the applied power increased, the diameter of the acoustic beam in a2 also increased, but the increase was very small, as reflected in some test data later. It can be predicted that when the first acoustic beam parameter is enhanced, the diameter of the acoustic beam will also increase, but the increase will be very small. The first acoustic beam parameter will have an impact on the acoustic beam diameter, but the proportion of the impact is small. Furthermore, based on the analysis of the test data later, the observed diameter of the acoustic beam includes the density changes of the surrounding liquid; the actual diameter of the acoustic beam is still very small.

[0109] b2) Parameters of the ultrasonic device itself (for selection): device type, device shape, device size, device structure, device solid-liquid interface surface structure, and arrangement of multiple ultrasonic devices. In some embodiments, the arrangement of multiple ultrasonic devices can be a combination of multiple independent ultrasonic devices, such as arranged in rows, columns, or arrays on the inner wall of a flow channel or container, such as a side wall, bottom, or top. In other embodiments, the arrangement of multiple ultrasonic devices can refer to the arrangement of multiple ultrasonic devices integrated on a single substrate, such as multiple ultrasonic devices arranged as described above on a substrate, with the positive and negative electrodes of the multiple ultrasonic devices converging at the positive and negative terminals on the substrate. After integrating multiple ultrasonic devices on the substrate, it exists as an independent device. When multiple ultrasonic devices are mentioned in the embodiments of this application, the arrangement of these ultrasonic devices can be any of the two types of arrangement described above.

[0110] The ultrasonic device can be polygonal, especially a polygon with an odd number of sides. For example, in one embodiment, it can be a regular pentagon or a scalene pentagon. In some embodiments, the size of the ultrasonic device (referring to the radial dimension, non-thickness dimension, i.e., the device interface dimension) is approximately 0.01 to 1 square millimeter or smaller. The size of the ultrasonic device is negatively correlated with the achievable resonant frequency; therefore, reducing the size can increase the resonant frequency. In other embodiments, the resonant frequency of the ultrasonic device can also be changed by altering the shape of the device, such as the number of polygonal polygons, the angles between adjacent sides, and the lengths of each side.

[0111] In some embodiments, the direction of the acoustic beam can be perpendicular to the surface of the ultrasonic device, for example, when the ultrasonic device is a bulk acoustic wave (BAW) device. This is because the directional characteristic of the piezoelectric constant d33 of the piezoelectric layer (such as an AlN layer) of the ultrasonic device is along the thickness direction, that is, the vibration direction of the piezoelectric layer of the ultrasonic device, and thus the sound wave transmission direction is perpendicular to the ultrasonic device. In other embodiments, the direction of the acoustic beam can be at an acute angle to the surface of the ultrasonic device. For example, when the ultrasonic device is a surface acoustic wave (SAW) device, the angle between the acoustic beam direction, that is, the sound wave transmission direction, and the surface of the ultrasonic device is approximately between 30 and 50 degrees.

[0112] In some embodiments, the ultrasonic device is a bulk acoustic wave device with a thickness-stretching vibration mode, formed by growing a piezoelectric material thin film layer in the vertical direction, and exciting vibrations through coupling a vertical electric field with the d33 piezoelectric coefficient. In some embodiments, the ultrasonic device includes an acoustic wave reflecting layer, a bottom electrode layer, a piezoelectric layer, and a top electrode layer arranged sequentially from bottom to top. The overlapping area of ​​the bottom electrode layer, piezoelectric layer, top electrode layer, and acoustic wave reflecting layer constitutes the ultrasonic wave generating region, and the thickness of the piezoelectric layer can range from approximately 1 nm to 2 μm. The top surface of the ultrasonic device can be disposed on the wall of a cavity or on other devices within the cavity, which is a liquid environment in which the ultrasonic device generates the aforementioned high-speed acoustic beam.

[0113] The diameter of the acoustic beam, corresponding to a2 above, is related to the parameters of the ultrasonic device itself. For example, the smaller the size of the ultrasonic device (referring to the radial dimension or interface dimension), the smaller the diameter of the acoustic beam. Based on observations of the impact of the acoustic beam on target tissue (in a liquid environment, the target tissue is located 200 to 300 micrometers away from the acoustic beam), the increase in power has a relatively small impact on the target tissue's effective range. The size of the acoustic beam is basically matched with the size of the ultrasonic device. For example, using a 0.01 square millimeter device, the effective range of the target tissue is also basically within 0.01 square millimeters. Therefore, the diameter of the acoustic beam is highly correlated with the size of the ultrasonic device.

[0114] b3) Environmental parameters that can affect the aforementioned acoustic beam include: liquid surface thickness, liquid properties (such as density, viscosity coefficient, and liquid acoustic impedance), and the liquid properties and thickness of the layer in contact with the ultrasonic device in multi-layered liquids. Since b3 are environmental parameters, which generally do not change under operating conditions, these parameters are briefly analyzed in this application as follows.

[0115] In this application, experiments have shown that in a liquid environment dominated by aqueous solution, the sound beam accelerates to its maximum speed between 100 and 400 micrometers from the interface of the ultrasonic device, especially between 200 and 300 micrometers. Based on this, when considering the application of the maximum speed of the sound beam, the thickness of the liquid surface and the distance between the interface of the ultrasonic device and the target object when the sound beam acts on the target object can be designed accordingly. The target object can include liquids, solids, colloids, tissues, etc.

[0116] In addition, the properties of liquids will be reflected in their resistance to momentum. Therefore, it is speculated that when the density, viscosity coefficient and acoustic impedance of the liquid increase, the position where the acoustic beam accelerates to the maximum speed will be shortened if the driving signal (including device input power, driving cycle and the proportion of the first stage) remains unchanged.

[0117] Furthermore, when multiple liquid layers are present, the first liquid layer in contact with the ultrasonic device interface will absorb sound energy or, as described above, resist momentum. Therefore, it will affect the location or maximum velocity of the sound beam accelerating in the distant second liquid layer. Based on this characteristic, the location or maximum velocity of the sound beam accelerating in the second liquid layer can be adjusted by adding a first liquid layer or adjusting its thickness. For example, if the density, viscosity, or acoustic impedance of the added first liquid layer is higher than that of the second liquid layer, the location or maximum velocity of the sound beam accelerating in the second liquid layer can be reduced.

[0118] The aforementioned environmental parameters that can affect the acoustic beam also influence the first power required to generate a significant acoustic beam. These parameters include the level of the first power, the length of the first and / or second phases of the first power's drive cycle, and the duty cycle. In other words, depending on the environmental parameters of the acoustic beam, the aforementioned parameters related to the first power required to generate the acoustic beam will differ.

[0119] Under various environmental conditions, the parameters related to the first power of the generated acoustic beam can be determined experimentally. For example, first, the desired acoustic beam intensity is determined, such as the initial velocity (or the highest achievable velocity) of the acoustic beam, or the length of the acoustic beam (the farthest achievable position of the acoustic beam corresponding to the highest velocity), the acoustic beam pressure or intensity at a point within the beam's path, etc.; then, parameters such as the level of the first power, the size of the first stage and / or the second stage, or the duty cycle are adjusted until the desired acoustic beam is observed. Furthermore, since the formation of the acoustic beam involves parameters such as the first power, the first stage, and / or the second stage, multiple sets of parameters may be available to obtain an acoustic beam of the desired intensity, such as a first set of parameters (first power p01, first stage t11, second stage t12), a second set of parameters (first power p02, first stage t21, second stage t22), etc. Here, only the acoustic beam of the desired intensity is discussed. The other relevant data of the acoustic beam obtained under different sets of parameters may be different, such as the diameter of the generated acoustic beam, the heat generated by the ultrasonic device, and the degree of secondary flow phenomenon. Further optimization can be made from each set of parameters based on the desired degree of restriction on these other data.

[0120] In addition, this application also proposes some applications for generating acoustic beams in liquid environments, such as the following:

[0121] 1) A method for directional high-speed transport of liquid, comprising: generating a high-speed acoustic beam based on the aforementioned method for generating an acoustic beam in a liquid environment, wherein the direction of the acoustic beam is the direction of directional transport of the liquid, and transporting the liquid in the manner of an acoustic beam.

[0122] In some embodiments, it can serve as a power source for a localized liquid, enabling high-speed directional transport of that liquid. In other embodiments, when different liquids exist in the liquid environment, a localized high-speed directional transport of one liquid into another liquid can be achieved. For example, the different liquids may be two liquids in a laminar state or two immiscible liquids, where the first layer of liquid contacts the ultrasonic device, and a sound beam is generated in the first layer of liquid, transporting the sound beam from the first layer of liquid into the second layer of liquid. In some embodiments, the speed or depth of the sound beam, including the first layer of liquid, entering the second layer of liquid can be controlled by controlling the intensity of the sound beam, such as the maximum achievable speed or the location of the maximum speed. The duration of the sound beam can also be controlled to control the duration of the sound beam entering the second layer of liquid. Especially when both the first and second layers of liquid are continuously transported, the duration can be controlled to allow the sound beam generated in the first layer of liquid to be intermittently injected into the second layer of liquid. In some embodiments, the method can be applied to a first liquid layer being injected into a second liquid layer via a sound beam to allow a reaction between the second liquid layer and the first liquid layer under conditions of excess of the second liquid layer. This reaction can be a reaction between two liquids, or a reaction between particles in one liquid (e.g., particles in the first liquid layer) and another liquid (e.g., the second liquid layer), or a reaction between particles in two liquids, particularly a reaction between a liquid (e.g., the first liquid layer) or its particles in an excess of another liquid (e.g., the second liquid layer).

[0123] In addition, the amount of liquid delivered can be controlled by controlling the number (or duration) of consecutive drive cycles, including the first and second stages.

[0124] 2) A method for directional high-speed transport of particles in a liquid, comprising: generating a high-speed acoustic beam based on the aforementioned method for generating an acoustic beam in a liquid environment, causing the particles to be transported to enter the acoustic beam for directional high-speed transport, wherein the direction of the acoustic beam is the direction of directional transport of the liquid, and transporting the liquid including the particles in the manner of an acoustic beam.

[0125] In some embodiments, through experimental observation, particles actively enter the acoustic beam from the liquid environment under the action of the acoustic beam. For example, one observed phenomenon is that particles move along the solid-liquid interface of the ultrasonic device to the point where the solid-liquid interface faces the acoustic beam, and are then transported out by the acoustic beam.

[0126] Based on this, one method for transporting particles in a liquid could be: directing the acoustic beam generated by an ultrasonic device towards the solution transport direction, for example, consistent with the flow direction of a microchannel. Particles in the solution are moved to the acoustic beam (or captured by the acoustic beam), and under the constraint of the acoustic beam, they form a queue along the beam and are transported at high speed. This method can achieve high-throughput, queue-style high-speed transport of particles. Furthermore, the queue-style transport of particles downstream facilitates further processing or manipulation of the particles. Further processing or manipulation includes at least one of the following: detection, capture, offset movement control, screening, etc. See also... Figure 9 The diagram shows a high-speed transport embodiment of a particle formation queue captured by an acoustic beam.

[0127] In some embodiments, such as the two liquid scenarios described above, the particles may be located in the first liquid layer, and the target liquid is the second liquid layer. Particles in the first liquid layer are injected into the second liquid layer via an acoustic beam, allowing the injected particles to react with the second liquid layer under conditions of excess liquid. See also... Figure 10 The schematic diagram shows a flow channel comprising a laminar first liquid layer and a second liquid layer. An acoustic beam generated according to this application captures particles in the first liquid layer and, under constraint, propels the acoustic beam at high speed into the second liquid layer, allowing the particles to react with the second liquid layer in an excess environment. For simplicity, the effect of liquid flow on the acoustic beam is not shown in the diagram.

[0128] In some embodiments, a particle may be delivered to another substance, such as to a vesicle like a liposome, or to a cell or muscle tissue or similar tissue, or to subcutaneous tissue.

[0129] In some embodiments, the aforementioned particles can refer to microscopic particles that are located in a liquid environment and can be distinguished from the liquid environment (i.e., insoluble) and can be moved within the liquid environment. In some embodiments, the particle diameter can be in the nanometer or micrometer range, and the particles can include: cells, molecules, molecular polymers, DNA, nucleic acids, etc.

[0130] 3) In the above-mentioned methods for directional high-speed transport of liquids or directional transport of particles in liquids, one or more of the above-mentioned special ultrasonic devices can be set up. These special ultrasonic devices can each realize their own functions, or they can work together to realize a function based on the design of their arrangement and orientation, such as realizing the turning of liquids or particles in the high-speed transport process, or realizing high-speed impact by transporting multiple liquids or multiple particles to the same target position at high speed.

[0131] 4) Based on the above-mentioned application of directional high-speed delivery of liquids or particles, it can be further applied to the injection of liquids or particles into subcutaneous tissues, etc.

[0132] As mentioned above, the diameter of the acoustic beam generated by this application can be 0.1-1 mm or even smaller. A diameter of 0.1 mm and the aforementioned 10-100 MPa level can meet the requirements of needle-free injection.

[0133] In some embodiments, this method is applied to needle-free injection, injecting medications (such as vaccines, injectable drugs, etc.) into subcutaneous tissue, or even into the subcutaneous muscle layer, via acoustic beams. In some embodiments, it can be applied to cosmetic procedures, injecting nutrient solutions or fillers into the subcutaneous tissue via acoustic beams. For example, activating one or more high-frequency acoustic resonators generates body sound waves with a frequency of about 0.5 GHz in a liquid environment such as a solution, suspension, or gel, allowing bioactive agents in the liquid environment to enter or penetrate the patient's skin. Preferably, the first power input to the high-frequency acoustic resonator to generate body sound waves is about 0.1-500 W, more preferably 2-50 W, and more preferably 5-10 W.

[0134] In some embodiments, in the implementation of the injection device used for the above-mentioned injection, the working end of the injection device may have an open working cavity, and a liquid environment may be formed in the working cavity. For example, the working cavity is connected to the drug liquid cavity through a channel or conduit. The drug liquid cavity is integrally formed with the injection device or is detachably formed. The working cavity has an interface for a special ultrasonic device, and the sound wave transmission direction of the special ultrasonic device is toward the open end of the working cavity.

[0135] In some embodiments, the distance between the ultrasonic device interface and the open end of the working cavity can be between 200 and 300 micrometers, so that the acoustic beam within the working cavity can exit the working cavity when accelerated to its maximum speed. In other embodiments, the distance can be designed according to the pressure required for needle-free injection; for example, extending the distance to a distance greater than the distance required to reach maximum acceleration can reduce the pressure. In other embodiments, the pressure reduction can also be achieved by reducing the input power, or by reducing the first-stage time while keeping the input power constant.

[0136] In some embodiments, the open end of the working cavity can contact the target object (such as skin) to seal the working cavity. In some embodiments, when the ultrasound device is not activated, the size design of the open end of the working cavity, when not in contact with the target object (such as skin), can also prevent the liquid in the working cavity from flowing out due to the internal and external air pressure difference or liquid surface tension.

[0137] It should be noted that the size of the ultrasonic device is micro-sized, such as about 0.01 square millimeters to 1 square millimeter. Therefore, the diameter of the open end of the working cavity can also be small, with a diameter of about a millimeter being sufficient to form and maintain the surface tension of the liquid.

[0138] In other embodiments, if there is a scenario where multiple acoustic beams are generated simultaneously, the open end of the working cavity may have a mesh structure, and the working cavity contains several ultrasonic devices. The acoustic beam direction of each ultrasonic device may be directly aligned with a mesh opening. The mesh structure can keep the liquid in the working cavity by means of liquid tension when the ultrasonic devices are not working. The mesh structure can also be used for isolation, so that the contact part between the ultrasonic devices in the working cavity and the injected target object is kept at the required distance.

[0139] 5) Based on the above-mentioned applications of directional high-speed transport of liquids or particles, it can be further applied to the cutting of target objects.

[0140] In some embodiments, a "water jet" technique can be used to cut a target object. The liquid (including liquids containing particles) is accelerated by a sound beam, particularly by using a sound beam accelerated to or near its maximum speed for cutting. As mentioned earlier, the maximum speed of a sound beam in a liquid environment can reach 10 m / s, while the diameter of the sound beam is on the micrometer scale. At this point, the pressure acting on the target object is extremely strong, allowing for cutting. For example, even in a liquid environment, at a device location of 200-300 micrometers, when the maximum speed of the sound beam is 1 m / s, [the following text is incomplete and requires further context: "to achieve the maximum speed of cutting."] Figure 8 The device dimensions shown, assuming the radial dimension of the acoustic stream is approximately the same as the device dimensions (0.01-0.02 square millimeters), show that the pressure at the location of the highest acoustic stream velocity can reach 10 MPa. Under the same conditions, when the power is increased to drive the acoustic beam to a maximum velocity of 10 m / s, the pressure can reach 100 MPa. Furthermore, since the diameter of the acoustic beam generated by this application can be 0.1-1 mm or even smaller, a diameter of 0.1 mm and a pressure of 10-100 MPa are well within the range, which can far meet the pressure requirements for cutting tissues (such as muscles, internal organs, etc.) (typically, surgical water jets require approximately 0.5-1 MPa).

[0141] In some embodiments, the cutting device used for the above-described cutting process may have an open working cavity at its working end. A liquid environment may be formed within the working cavity. For example, the working cavity may be connected to a liquid supply device via a channel or conduit. The liquid supply device may be integrally or detachably configured with the cutting device. The working cavity may have an interface for an ultrasonic device, and the sound wave transmission direction of the ultrasonic device may be directed toward the open end of the working cavity. The distance between the ultrasonic device interface and the open end of the working cavity may be between 200 micrometers and 300 micrometers, so as to utilize its maximum speed to cut the target object.

[0142] In some other embodiments, the cutting device used for the above-mentioned cutting is applied in a liquid environment, which simplifies the working chamber and the liquid supply device.

[0143] 6) Based on the above-mentioned application of directional high-speed transport of liquids or particles, it can be further applied to the scouring, polishing, or peeling of the surface of the target object.

[0144] In some embodiments, when implementing these applications, the generated acoustic beam can be applied to the surface of a target object, wherein the acoustic beam and the target object surface can be tilted. In other embodiments, acoustic beams at different angles can be applied to the target location during rinsing, polishing, or peeling processes.

[0145] Below, we present some experimental data to verify some of the effects mentioned above (some of which have already been described previously). First, it should be noted that the width of the acoustic beam described below is based on the width observed optically. When the acoustic beam is generated, changes in the density of the beam and its surroundings create different refractive indices, which can then be observed. Furthermore, because the observed image includes regions with different densities, the observed width is wider than the actual width of the acoustic beam. As previously described, the width of the acoustic beam is primarily related to the size of the ultrasound device. In this experiment, the size of the ultrasound device is as follows: Figure 8 As shown, it is inferred that the width of the acoustic beam varies by about 0.1 mm.

[0146] After testing, in a water-based environment, using a 2k-sized (square micrometer, regular pentagonal shape) ultrasonic device, with a switching power supply outputting 10ms / 20ms pulses (meaning a period of 20ms and a pulse width of 10ms, i.e., the duration of the signal output by the control drive unit) to the drive unit, the following results were achieved: When the drive unit's power was 4W, the beam width (including the observation width of surrounding water of different densities) was 0.32mm, and the beam travel distance reached 7.2mm; when the drive unit's power was 8W, the beam width (including the observation width of surrounding water of different densities) was 0.46mm, and the beam travel distance reached 8.2mm; when the drive unit's power was 20W, the beam width (including the observation width of surrounding water of different densities) was 1mm, and the beam travel distance reached 13mm.

[0147] Under the same conditions, the acoustic beam velocity at a distance of 1-2 mm directly in front of the ultrasonic device was measured. Specifically: when the driving unit's power was 10 W, the acoustic beam velocity at this location reached 0.41 m / s; when the driving unit's power was 16 W, the acoustic beam velocity reached 0.7 m / s; and when the driving unit's power was 20 W, the acoustic beam velocity reached 1 m / s. Based on the above analysis, the acoustic beam velocity at a distance of 200 to 300 micrometers is the highest. Therefore, the measurements at 1-2 mm already represent a decelerated acoustic beam. Calculations suggest that increasing the power could achieve an acoustic beam velocity of 10 m / s at 200 to 300 micrometers.

[0148] Furthermore, under the aforementioned conditions, even with a further increase in the driving unit's power to 30W, the ultrasonic device remained in a stable operating state for an extended period, and the intensity of the acoustic beam was further improved. Moreover, when the pulse width of the switching power supply output waveform was shortened to the microsecond level, such as a 40µs / 80µs pulse, the driving unit's power could be increased to 50W, and the ultrasonic device remained in a stable operating state for an extended period. It is further speculated that with a 10µs / 20µs pulse, the driving unit's power could be increased to 60W. If the pulse width ratio is reduced, for example, to 10µs / 30µs, the power loaded by the driving unit could be further increased. Finally, by further reducing the pulse width ratio and attempting to load 100W of power, the ultrasonic device could still remain in a stable operating state for an extended period.

[0149] It should also be noted that the solution provided in this application can generate a high-speed, columnar focused acoustic beam in a liquid environment, and can control the temperature generated by the thermal effect within the desired value, as well as reduce or avoid the occurrence of secondary currents. In application, depending on the application scenario and / or the level of the first power applied to the high-frequency resonator, one can choose to focus more on temperature control or more on suppressing secondary currents, or both with roughly equal weight. In some embodiments, such as when applying high-speed transport of particles or fluids through an acoustic beam in a microchannel, the first power used may be below 0.5W, and the heat generation itself is relatively easy to control within the desired threshold. In such cases, more attention can be paid to suppressing secondary currents. By adjusting the duration or proportion of the first stage, the acoustic beam of secondary currents can be minimized. For example, reducing the duration of the first stage can reduce the possibility of secondary current generation, and / or extending the duration of the second stage can increase the time for secondary current dissipation, making the liquid environment more stable. Such adjustments also help suppress the temperature generated by the device. In other embodiments, such as those applied to subcutaneous injections or muscle tissue cutting, a higher first power is used, such as 20W to 100W. The focus is more on controlling the heat generated by the device at high power. In such cases, the duration or proportion of the first stage can be adjusted with heat control as a priority to keep the temperature within the desired threshold. For example, reducing the duration of the first stage can decrease the heat generation time, and / or extending the duration of the second stage can increase the heat dissipation time, ensuring that the temperature of the device or the liquid environment in which the device is located is within the desired threshold. Such adjustments also help suppress secondary currents. This example only considers adjusting the duration of the first and / or second stages. In practical applications, the first power can be adjusted together to achieve the required intensity of the acoustic beam while suppressing temperature and secondary currents.

[0150] This application also experimentally verified the following:

[0151] 1) Under the condition that the first power driving the high-frequency resonator is a constant value and the first stage power supply time is 1:1 with the second stage time, different durations of the first stage (i.e., the device operating time within one driving cycle) are considered. The shorter the duration of the first stage, the smaller the eddy current effect formed by the high-frequency resonator, and the more obvious the acoustic beam. It can be measured that when the duration of the first stage is below a certain value, no acoustic beam can be formed. This is because the total energy is determined by power and time; if the time is too short, the energy required to generate the acoustic beam cannot be reached. Therefore, the lower limit of the duration of the first stage for generating the acoustic beam under a constant first power value can be measured. It can also be measured that when the duration of the first stage is above a certain value, significant eddy currents will form. This is because the eddy current effect lags behind the acoustic beam. When the duration of the first stage reaches or approaches the lag time that causes the eddy current effect, significant eddy currents will form. Therefore, the upper limit of the duration of the first stage for generating the acoustic beam under a constant power value can be measured, and this upper limit avoids the formation of significant eddy currents.

[0152] 2) Under the condition that the time of the first stage and the time of the second stage are constant, the higher the first power, the faster the acoustic beam velocity.

[0153] The high-frequency resonator has an upper limit to its received power. Beyond this limit, further increases in the initial power no longer significantly increase the beam velocity, and exceeding the limit leads to a significant increase in thermal effects. This is because, since the first and second stage times (the sum of the first and second stage times is the driving period) are constant, when the initial power increases beyond the upper limit of the energy that can be converted into a beam within that driving period, most of the excess energy manifests as thermal effects. Therefore, based on the temperature effect, the upper limit of the initial power when the first and second stage times are constant can be measured. Alternatively, as in 1) above, the lower limit of the initial power generating the beam when the first and second stage times are constant can also be measured.

[0154] 3) Under the conditions that the first power and the first stage time are constant, and that an acoustic beam can be formed, the larger the driving period (i.e., the smaller the duty cycle of the first stage, or the longer the second stage time), the smaller the eddy current effect. If the driving period is too short, eddy currents will be generated. This is because the larger the driving period, the longer the interval between two adjacent first stage times, while a shorter period is equivalent to a smaller time interval between two first stages, which makes it easier to generate eddy currents.

[0155] 4) The vortex is located near the end of the acoustic beam. When the location of the acoustic beam is the highest speed of the acoustic beam or its vicinity, there is no need to pay too much attention to the vortex.

[0156] 5) The eddy current effect lags behind the generation of the acoustic beam, and the thermal effect lags behind the eddy current effect. Based on this, the length of the first stage can be controlled to suppress the thermal effect below the threshold or to suppress the secondary eddy current effect.

[0157] 6) For high-frequency resonators of different sizes, under the same input power, the smaller the size, the higher the intensity of the generated acoustic beam and the faster the beam velocity. This reflects that the smaller the device size, the stronger the focusing ability.

[0158] The experimental results data of this application can be found in [reference needed]. Figure 11 As shown, the vertical axis represents the average acoustic beam velocity at a distance of 600 μm from the surface of the high-frequency resonator device, in m / s; the horizontal axis represents the power input to the device (see [reference]). Figure 4 That is, the input power of the input device after power amplification; the high-frequency resonators used are devices with dimensions (unit: square micrometers) of 2k, 5k, 10k, and 20k respectively. Figure 12This is a schematic diagram showing the dimensions of the various high-frequency resonators used in the experiments of this application. The devices are pentagonal, and the specific dimensions can be found in the diagram.

[0159] It should also be noted that, unless otherwise specified, the above descriptions of particles refer to examples using aqueous solutions (which may contain other particles). When the solution is another type of solution, such as an organic solution (e.g., oils), a gel solution, etc., the data mentioned above will change accordingly due to the properties of the liquid.

[0160] This application also combines experimental data with simulation analysis to further verify the conclusions drawn from the data. Specifically, a COMSOL model of a 5K high-frequency resonator was constructed. In the physical field model, the flow field is 1mm wide and 2mm high, with the high-frequency resonator located at the bottom center of the flow field. By modifying the magnitude of the volume force generated by the high-frequency resonator, transient simulations were performed to obtain the maximum acoustic beam velocity (maximum acoustic beam velocity = 50µm / time taken for the first beam to reach a distance of 50µm from the device surface) and the average acoustic beam velocity (average acoustic beam velocity = 600µm / time taken for the first beam to reach a distance of 600µm from the device surface), and the results were compared with experimental results. The order of magnitude and growth trend of the maximum and average acoustic beam velocities generated by the 5K high-frequency resonator in the simulation results are consistent with the experimental results, which also verifies the accuracy of both the experiment and the simulation.

[0161] The input power and volume force of a high-frequency resonator can be fitted with an approximately linear relationship. Therefore, the relationship between the input power and the maximum and average velocities of the acoustic beam can be obtained as follows: On the one hand, as the power increases, the maximum velocity of the acoustic beam also gradually increases. This is because the volume force generated above the device is greater when the applied power increases, thus enabling the acoustic beam to generate a higher initial velocity. On the other hand, the growth of the maximum velocity gradually slows down. This is due to the incompressibility of liquids; the initial velocity of the acoustic beam does not increase indefinitely with the increase of device power but rather gradually slows down and eventually stabilizes at a certain value. Most of the portion not converted into kinetic energy will manifest as heat. Especially when the power increases beyond a certain value, the heat generated in the first stage cannot be dissipated within the complete cycle formed by the first and second stage times, resulting in a significant thermal effect in the high-frequency resonator.

[0162] In the several embodiments provided in this application, it should be understood that the disclosed apparatus and methods are not limited to the above embodiments and can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between apparatuses or units may be electrical, mechanical, or other forms.

[0163] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0164] Furthermore, the terms "first, second, third, etc." or similar terms such as module A, module B, and module C used in the specification and claims are only used to distinguish similar objects and do not represent a specific ordering of objects. It is understood that, where permissible, a specific order or sequence may be interchanged so that the embodiments of this application described herein can be implemented in an order other than that illustrated or described herein.

[0165] In the above description, the labels of the steps involved, such as S10, S20, etc., do not mean that the steps will necessarily be executed. The order of the steps can be interchanged or executed simultaneously if permitted.

[0166] The term "comprising" as used in the specification and claims should not be construed as limiting itself to what follows; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the mentioned feature, integral, step, or component, but does not exclude the presence or addition of one or more other features, integrals, steps, or components, or groups thereof. Thus, the statement "device comprising means A and B" should not be limited to a device consisting solely of components A and B.

[0167] The terms "an embodiment" or "an embodiment" as used in this specification mean that a particular feature, structure, or characteristic described in conjunction with that embodiment is included in at least one embodiment of this application. Therefore, the terms "in one embodiment" or "in an embodiment" appearing throughout this specification do not necessarily refer to the same embodiment, but may refer to the same embodiment. Furthermore, in one or more embodiments, the particular features, structures, or characteristics can be combined in any suitable manner, as will be apparent to those skilled in the art from this disclosure.

[0168] Note that the above are merely preferred embodiments and the technical principles employed in this application. Those skilled in the art will understand that this application is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of this application. Therefore, although this application has been described in detail through the above embodiments, this application is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of this application, all of which fall within the scope of protection of this application.

Claims

1. An injection device, characterized in that, include: A working chamber with an open end, the open end of which is used to contact the target object to be injected, and a liquid environment can be formed inside the working chamber; The working cavity contains a high-frequency resonator, and the acoustic beam generated by the high-frequency resonator is directed toward the open end of the working cavity. The high-frequency resonator generates 0.5-30 GHz ultrasonic waves when it is working, which act on the liquid environment to generate directional fluid motion at the solid-liquid interface along the direction of sound wave propagation in the liquid. The directional fluid motion includes a focused columnar sound beam. The high-frequency resonator is driven to operate for at least one driving cycle with a first power, each driving cycle including a first stage and a second stage. In the first stage, the high-frequency resonator is driven to operate and generate a 0.5-30 GHz ultrasonometer. In the second stage, the driving of the high-frequency resonator is stopped. The magnitude of the first power is such that the high-frequency resonator generates the acoustic beam during the first stage.

2. The apparatus according to claim 1, characterized in that, Also includes: A drug solution chamber that is integrated with or detachable from the injection device; The working chamber is connected to the drug solution chamber via a channel or conduit.

3. The apparatus according to claim 1, characterized in that: The design of the size of the open end of the working cavity is limited so that when the high-frequency resonator is not in operation, the liquid in the working cavity will not flow out due to the internal and external air pressure difference or the surface tension of the liquid.

4. The apparatus according to claim 1, characterized in that, Also includes: The open end of the working cavity is provided with a mesh structure; The working cavity contains several high-frequency resonators, and the directional transmission direction of the acoustic beam generated by each high-frequency resonator is directly opposite a mesh opening of the mesh structure.

5. A cutting device, characterized in that, include: A working chamber with an open end, within which a liquid environment can be formed; The working cavity contains a high-frequency resonator, and the sound beam generated by the high-frequency resonator is directed toward the open end of the working cavity so as to cut the target object through the sound beam. The high-frequency resonator generates 0.5-30 GHz ultrasonic waves when it is working, which act on the liquid environment to generate directional fluid motion at the solid-liquid interface along the direction of sound wave propagation in the liquid. The directional fluid motion includes a focused columnar sound beam. The high-frequency resonator is driven to operate for at least one driving cycle with a first power, each driving cycle including a first stage and a second stage. In the first stage, the high-frequency resonator is driven to operate and generate a 0.5-30 GHz ultrasonometer. In the second stage, the driving of the high-frequency resonator is stopped. The magnitude of the first power is such that the high-frequency resonator generates the acoustic beam during the first stage.

6. The apparatus according to claim 5, characterized in that, Also includes: A liquid supply device that is integrated with or detachably mounted on the cutting device; The working chamber is connected to the liquid supply device via a channel or conduit.

7. The apparatus according to claim 1 or 5, characterized in that: The distance between the solid-liquid interface of the high-frequency resonator and the open end of the working cavity is between 200 micrometers and 300 micrometers.

8. The apparatus according to claim 1 or 5, characterized in that, The liquid environment includes liquids or particles to be transported by the acoustic beam.

9. The apparatus according to claim 1 or 5, characterized in that, The duration of the first phase at the first power is less than the second threshold, or the duty cycle of the first phase within one drive cycle is less than the first threshold, so that the temperature of the high-frequency resonator is within the third threshold, or / and The duration of the first stage at the first power is less than the second threshold or the duty cycle of the first stage within a drive cycle is less than the first threshold, in order to suppress the high-frequency resonator from generating secondary flow in the liquid environment.

10. The apparatus according to claim 1 or 5, characterized in that, The acoustic beam is controlled using one or more of the following parameters: The duration of the drive cycle; The duration of the first phase and / or the duration of the second phase in the driving cycle; The magnitude of the first power.

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