Precise substrate glass carrying device and carrying method

Abstract

The invention discloses a precise substrate glass carrying device and a carrying method, a visual positioning module is used for collecting a substrate glass image, a laser scanning position of the substrate glass is positioned, a laser scanning module is used for carrying out laser scanning based on coordinates of the laser scanning position of the substrate glass, and the height of the substrate glass and the inclination angle of the substrate glass are obtained; the control center determines the extension length of the clamping jaw and the adjustment of the clamping angle of the clamping jaw according to the height of the substrate glass and the inclination angle of the substrate glass, the positioning precision during substrate glass carrying is improved, the data processing module carries out clamping fitness comprehensive calculation by collecting parameter data in the clamping process of the clamping jaw, a clamping fitness coefficient is obtained, and the clamping precision is improved. And the clamping fitness is compared with a preset clamping fitness standard range, and the clamping strength is adjusted, so that the function of adaptively adjusting the clamping strength is realized, and the non-destructive clamping of the substrate glass is ensured.

Description

Technical Field

[0001] This invention belongs to the field of liquid crystal glass production technology, and relates to a substrate glass handling device, specifically a precision substrate glass handling device and handling method. Background Technology

[0002] In the TFT-LCD manufacturing field, the substrate glass, as the core carrier of the display panel, is directly affected by the handling operations during its processing, impacting production efficiency and product yield. Modern TFT-LCD production lines are developing towards ultra-large and ultra-thin substrate glass, with conventional sizes reaching G8.5 and thicknesses of only 0.5mm or even thinner, placing extremely high demands on handling equipment.

[0003] Currently, the industry commonly uses two main handling methods: one is pneumatic suction cup handling, which transfers the substrate glass through vacuum adsorption, but it suffers from problems such as adsorption marks, particulate contamination, and limited positioning accuracy; the other is mechanical clamping handling, which uses rigid grippers to hold the edges of the substrate glass, but this is prone to stress concentration, leading to micro-cracks or breakage of the substrate glass, especially before the grinding process, any damage to the surface of the substrate glass will directly affect the quality of subsequent processes. In addition, existing handling equipment mostly uses pneumatic or ordinary motor drives, resulting in low positioning accuracy and large repeatability errors, which cannot meet the requirements of modern precision manufacturing processes. During the transfer of substrate glass, due to the lack of precise coordinated control, accidents such as collisions and scratches are prone to occur, and sometimes the clamping force of the substrate glass is not precisely controlled, resulting in unstable clamping of the substrate glass or wear on the edges of the substrate glass. Summary of the Invention

[0004] To address the shortcomings mentioned in the background art, the present invention provides a precision handling device and method for substrate glass, which can improve the positioning accuracy when handling substrate glass and adaptively adjust the clamping force according to real-time conditions.

[0005] The objective of this invention can be achieved through the following technical solutions: This invention provides an adaptive control system for grippers used to transport substrate glass, comprising: The visual positioning module acquires images of the substrate glass, locates the laser scanning position of the substrate glass using the images, and sends the coordinates of the laser scanning position of the substrate glass to the laser scanning module. The laser scanning module performs laser scanning based on the laser scanning position coordinates of the substrate glass to obtain the height and tilt angle of the substrate glass, and then sends them to the control center. The control center compares the height and tilt angle of the substrate glass with the initial extension length and initial tilt angle of the gripper, and dynamically adjusts the extension length and gripping angle of the gripper. The data processing module collects parameter data of the clamping jaw clamping process, performs clamping fitness comprehensive calculation, obtains a clamping fitness coefficient of the clamping jaw, and sends the clamping fitness coefficient to the control center. The control center compares the clamping fitness coefficient with a preset clamping fitness standard range. When the clamping fitness coefficient is not equal to the clamping fitness standard range, the clamping force of the clamping jaw is adjusted, otherwise, no adjustment is needed, so as to realize adaptive control of the clamping jaw.

[0006] Further, the visual positioning module has a global coarse positioning camera. The process of collecting the substrate glass image by the visual positioning module includes: The global image of the substrate glass is collected by the global coarse positioning camera, and preprocessed to obtain a processed global image of the substrate glass. The global image of the substrate glass is profiled based on an edge detection algorithm to obtain a substrate glass profile. The center point of the substrate glass and the rotation angle of the substrate glass are determined based on the substrate glass profile by using a minimum circumscribed rectangle algorithm.

[0007] Further, the visual positioning module also has a local fine positioning camera. The process of positioning the laser scanning position of the substrate glass by the visual positioning module based on the substrate glass image includes: The position of the substrate glass is determined based on the center point of the substrate glass and the rotation angle of the substrate glass by the local fine positioning camera. The coordinates of the marked substrate glass points are accurately collected based on the position of the substrate glass, and the coordinates of the marked substrate glass points are taken as the coordinates of the laser scanning position of the substrate glass. The local fine positioning camera uses a sub-pixel method to find the marked points based on the position of the substrate glass in the central region of the field of view.

[0008] Further, the clamping jaw adaptive control system also includes a motion execution module. The process of adjusting the elongation length of the clamping jaw and the clamping angle of the clamping jaw by the control center includes: The initial elongation length of the clamping jaw is compared with the collected height of the substrate glass When = , the height of the substrate glass is equal to the initial elongation length of the clamping jaw, and no control signal needs to be sent. When > , a control signal of the elongation length is sent to the motion execution module. When < , a control signal of the shortening length is sent to the motion execution module. The initial inclination angle of the clamping jaw is compared with the collected inclination angle of the substrate glass When = When the substrate glass inclination angle is equal to the initial inclination angle of the clamping jaw, no control signal needs to be sent, and when ≠ a control signal adjusting the angle is sent to the motion execution module to adjust the clamping jaw inclination angle to adapt to the clamping angle of the substrate glass inclination angle. The motion execution module dynamically adjusts the elongation length of the clamping jaw and the clamping angle of the clamping jaw based on the control signal sent by the control center.

[0009] Further, the initial elongation length of the clamping jaw is A preset height threshold is used, wherein the preset height threshold is obtained by calculating the weighted average of a plurality of substrate glass heights after obtaining the plurality of substrate glass heights a plurality of times. The initial inclination angle of the clamping jaw is A preset inclination angle threshold is used, wherein the preset inclination angle threshold is obtained by calculating the weighted average of a plurality of substrate glass inclination angles after obtaining the plurality of substrate glass inclination angles a plurality of times.

[0010] Further, the parameter data of the clamping process collected by the data processing module includes clamping jaw contact force data, substrate glass deformation data, environmental temperature data, and environmental humidity data.

[0011] Further, the process of the data processing module for comprehensive calculation of clamping fitness includes: The parameter data of the clamping process is labeled, the clamping jaw contact force data is labeled as , the substrate glass deformation data is labeled as , the environmental temperature data is labeled as , and the environmental humidity data is labeled as , wherein is the label of the number of times of periodic collection by the data processing module according to the preset periodic time, , is the total number of times of collection by the data processing module; The clamping fitness coefficient is calculated using the formula ; Wherein, is the preset standard clamping jaw contact force coefficient, is the preset standard substrate glass deformation coefficient, is the preset standard environmental temperature coefficient, is the preset standard environmental humidity coefficient; is the clamping jaw contact force influence coefficient, is the substrate glass deformation influence coefficient, is the temperature influence coefficient,​ is the humidity influence coefficient.

[0012] Further, the process that the control center compares the clamping adaptability coefficient with the preset clamping adaptability standard range comprises: if > , a control signal for reducing the clamping intensity is sent to the motion execution module; if < , a control signal for increasing the clamping intensity is sent to the motion execution module; Through multiple adjustments of the clamping intensity, until ≤ ≤ ; if ≤ ≤ , no control signal needs to be sent; wherein \left [ {{C}_{min},{C}_{max}} \right ] is the preset clamping adaptability standard range, which is related to the size and weight of the substrate glass and can be obtained through a preset reference table.

[0013] Further, the present application also provides a substrate glass precision handling device, comprising a frame body, a clamping jaw, a first driver, a second driver and a third driver, the clamping jaw is installed on the frame body, the first driver is driven by a linear motor and cooperates with a grating ruler feedback to drive the clamping jaw to move and adjust the elongation length of the clamping jaw, the second driver is driven by a servo motor and cooperates with an absolute value encoder to drive the clamping jaw to rotate and adjust the clamping angle of the clamping jaw, and the third driver is driven by an electric cylinder and cooperates with a force sensor to drive the clamping jaw to clamp and adjust the clamping intensity of the clamping jaw, and the first driver, the second driver and the third driver are all controlled by the clamping jaw self-adaptive control system in claim 1-8.

[0014] Further, the handling method of the substrate glass precision handling device comprises the following steps: collecting a substrate glass image, positioning a laser scanning position of the substrate glass based on the substrate glass image, obtaining coordinates of the laser scanning position of the substrate glass, performing laser scanning based on the coordinates of the laser scanning position of the substrate glass, and obtaining a substrate glass height and a substrate glass inclination angle; comparing a preset height threshold value with the substrate glass height, determining the elongation length of the clamping jaw according to the comparison result, comparing a preset inclination angle threshold value with the substrate glass inclination angle, and determining the clamping angle of the clamping jaw according to the comparison result; According to the elongation length of the clamping jaw and the clamping angle of the clamping jaw, the clamping jaw is controlled by the first driver and the second driver to clamp the substrate glass; Parameter data in the clamping process of the clamping jaw is collected, and a clamping fitness coefficient is obtained by comprehensively calculating the clamping fitness. The preset clamping fitness standard range is compared with the clamping fitness coefficient, if the clamping fitness coefficient is not equal to the clamping fitness standard range, the clamping force is adjusted by the third driver, otherwise, no adjustment is needed, so as to realize the adaptive control of the clamping jaw.

[0015] The beneficial effects of the present application are: The substrate glass precision carrying device and carrying method provided by the present application collect the substrate glass image through the visual positioning module, and position the laser scanning position of the substrate glass, perform laser scanning based on the coordinates of the laser scanning position of the substrate glass through the laser scanning module, obtain the substrate glass height and the substrate glass inclination angle, and the control center determines the adjustment of the elongation length of the clamping jaw and the clamping angle of the clamping jaw according to the substrate glass height and the substrate glass inclination angle, thereby improving the positioning accuracy when carrying the substrate glass. The data processing module collects the parameter data in the clamping process of the clamping jaw, performs comprehensive calculation on the clamping fitness, obtains the clamping fitness coefficient, compares it with the preset clamping fitness standard range, adjusts the clamping force, realizes the function of adaptive adjustment of the clamping force, and ensures the lossless clamping of the substrate glass. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, for those skilled in the art, other drawings can also be obtained without creative labor based on these drawings.

[0017] Figure 1 is a schematic diagram of the clamping jaw adaptive control system of the present application.

[0018] Figure 2 is a flowchart of the carrying method of the present application. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0020] The application provides a substrate glass precision handling device, which comprises a frame body, a clamping jaw, a first driver, a second driver and a third driver, wherein the clamping jaw is installed on the frame body, the frame body is a box beam structure which is precisely processed by CNC from an aviation aluminum alloy material and has the characteristics of light weight and good rigidity, and the clamping surface of the clamping jaw is covered with a special silicon rubber material with a hardness of Shore A 30-40.

[0021] The first driver is driven by a linear motor and cooperates with a grating ruler feedback to drive the clamping jaw to move and adjust the elongation length of the clamping jaw, the second driver is driven by a servo motor and cooperates with an absolute value encoder to drive the clamping jaw to rotate and adjust the clamping angle of the clamping jaw, and the third driver is driven by an electric cylinder and cooperates with a force sensor to drive the clamping jaw to clamp and adjust the clamping force of the clamping jaw, wherein the first driver, the second driver and the third driver are all controlled through a clamping jaw adaptive control system, the clamping jaw adaptive control system supports EtherCAT industrial Ethernet communication and is used for cooperative control of the above drivers.

[0022] As shown in Figure 1 , the clamping jaw adaptive control system comprises a visual positioning module, a laser scanning module, a data processing module, a motion execution module and a control center.

[0023] The visual positioning module is used for collecting a substrate glass image, positioning a laser scanning position of the substrate glass through the substrate glass image and sending the coordinates of the laser scanning position of the substrate glass to the laser scanning module.

[0024] The process of collecting the substrate glass image by the visual positioning module is as follows: A global image of the substrate glass is collected by the global coarse positioning camera and is preprocessed to obtain a processed global image of the substrate glass, the global image of the substrate glass is profiled based on an edge detection algorithm to obtain a substrate glass profile, and the center point of the substrate glass and the rotation angle of the substrate glass are determined based on the substrate glass profile by using a minimum circumscribed rectangle algorithm.

[0025] The process of positioning the laser scanning position of the substrate glass by the visual positioning module through the substrate glass image is as follows: The position of the substrate glass is determined based on the center point of the substrate glass and the rotation angle of the substrate glass by the local fine positioning camera, the coordinates of the marked substrate glass points are accurately collected based on the position of the substrate glass, and the coordinates of the marked substrate glass points are taken as the coordinates of the laser scanning position of the substrate glass. In this embodiment, the local fine positioning camera uses a sub-pixel method to find the marked points based on the position of the substrate glass in the central region of the field of view.

[0026] After receiving the laser scanning position coordinates of the substrate glass from the vision positioning module, the laser scanning module performs a laser scan on the substrate glass at that laser scanning position to obtain the height and tilt angle of the substrate glass, and then sends them to the control center.

[0027] The laser scanning module performs laser scanning on the substrate glass as follows: The distance between the substrate glass surface and the laser displacement sensor surface at the laser scanning position is collected by a laser displacement sensor and used as the substrate glass height, which is then marked as follows: And the local tilt angle of the substrate glass at the laser scanning position, as the substrate glass tilt angle, is marked as... The height of the substrate glass and substrate glass tilt angle The data is sent to the control center. Specifically, the local tilt angle of the substrate glass at the laser scanning position is obtained by acquiring the normal vector using a laser displacement sensor.

[0028] The control center is used to monitor the height of the received substrate glass. and substrate glass tilt angle The analysis compares the height and tilt angle of the substrate glass with the initial extension length and initial tilt angle of the gripper, and outputs control signals to the motion execution module to dynamically adjust the extension length and gripping angle of the gripper.

[0029] The process by which the control center adjusts the extension length of the gripper is as follows: Initial extension length of the gripper Height of the substrate glass collected Compare the results and adjust the extension length of the grippers accordingly: when > When this occurs, it indicates that the height of the substrate glass exceeds the initial extension length of the gripper, and the control center sends a control signal for the extension length to the motion execution module; when = When the height of the substrate glass is equal to the initial extension length of the gripper, no control signal needs to be sent; when < When this occurs, it indicates that the height of the substrate glass is lower than the initial extension length of the gripper, and the control center sends a control signal to shorten the length to the motion execution module. Specifically, the initial extension length of the gripper... A preset height threshold is used, which is obtained by calculating the weighted average of multiple substrate glass heights after obtaining multiple substrate glass heights multiple times.

[0030] The process of adjusting the gripper angle in the control center is as follows: The initial inclination angle of the clamping jaw The inclination angle of the collected substrate glass The comparison result is used to adjust the clamping angle of the clamping jaw: when , it indicates that the inclination angle of the substrate glass is the same as the initial inclination angle of the clamping jaw, and no control signal needs to be sent; when ≠ , the control center sends a control signal to the motion execution module to adjust the clamping angle of the clamping jaw to adapt to the clamping angle of the substrate glass. Specifically, the initial inclination angle of the clamping jaw is a preset inclination threshold value, which is obtained by calculating the weighted average of a plurality of substrate glass inclination angles obtained through multiple acquisitions.

[0031] The motion execution module is in communication connection with the first driver, the second driver, and the third driver, so as to adjust the elongation length of the clamping jaw and the clamping angle of the clamping jaw according to the instructions of the control signal sent by the control center after receiving the control signal, and perform clamping operation on the substrate glass. When the motion execution module controls the clamping jaw to contact the surface of the substrate glass, a processing signal is sent to the data processing module.

[0032] After receiving the processing signal sent by the motion execution module, the data processing module collects parameter data of the clamping process of the clamping jaw, and performs clamping fitness comprehensive calculation according to the parameter data to obtain a clamping fitness coefficient, which is sent to the control center.

[0033] The parameter data of the clamping process of the clamping jaw collected by the data processing module includes clamping jaw contact force data, substrate glass deformation data, environmental temperature data, and environmental humidity data. Specifically, the clamping jaw contact force data is collected by a force sensor placed at the position of the clamping jaw. The substrate glass deformation data is collected by emitting laser, specifically, a reference light and a measurement light reflected back from the measured surface are superimposed, the shape, density and size of the interference fringes formed by the two lights are determined to determine the substrate glass deformation data. Changes in environmental humidity data and environmental temperature data will affect the friction force at the contact position of the clamping jaw and the substrate glass. Changes in environmental temperature will affect the change of the material at the contact position, thereby affecting the friction coefficient. Changes in environmental humidity will affect the generation of water vapor at the contact position, thereby reducing the friction force.

[0034] The process of the data processing module for clamping fitness comprehensive calculation is as follows: The parameter data of the clamping process of the clamping jaw is marked, the clamping jaw contact force data is marked as , the substrate glass deformation data is marked as , the environmental temperature data is marked as , and the environmental humidity data is marked as​ In the formula, This is a label indicating the number of times the data processing module performs periodic data collection according to a preset time interval. , This represents the total number of times the data processing module collected the data. Based on the marked parameter data, a comprehensive calculation of clamping adaptability is performed to obtain the clamping adaptability coefficient. The calculation formula is as follows: ; in, To preset the standard gripper contact force coefficient, The deformation coefficient of the pre-set standard substrate glass is used. To preset the standard ambient temperature coefficient, The preset standard ambient humidity coefficient; This is the coefficient of influence of the gripper contact force. The coefficient representing the influence of substrate glass deformation is denoted as . This is the temperature influence coefficient. This is the humidity influence coefficient. In the specific implementation process, a preset standard gripper contact force coefficient is used. Preset standard substrate glass deformation coefficient Preset standard ambient temperature coefficient and preset standard ambient humidity coefficient This method involves collecting gripper contact force data, substrate glass deformation data, ambient temperature data, and ambient humidity data daily, and then performing multiple simulations and calculating the average values ​​of the data. In this embodiment, the gripper contact force influence coefficient, substrate glass deformation influence coefficient, temperature influence coefficient, and humidity influence coefficient are calculated based on a comprehensive evaluation of external factors, including human factors, machine inspection, and environmental factors, when acquiring these data daily. Human factors refer to those caused by improper operation or scanning.

[0035] The data processing module will calculate the clamping fitness coefficient. The data is sent to the control center, which will then hold the fitness coefficients. The preset clamping fit standard range is defined as follows: \left [ {{C}_{min},{C}_{max}} \right ] Compare and determine whether the clamping force of the grippers needs to be adjusted, when the clamping adaptability coefficient is... When the clamping force is outside the standard range, it is necessary to continuously adjust the clamping force of the grippers multiple times until... ≤ ≤ This is to achieve adaptive control of the grippers. The standard range of gripping adaptability is related to the size and weight of the substrate glass and can be obtained through a preset lookup table.

[0036] Among them, the control center will hold the fitness coefficient. The preset clamping fit standard range is defined as follows: \left [ {{C}_{min},{C}_{max}} \right ] The comparison process is as follows: If > If the clamping force of the gripper exceeds the tolerance range of the substrate glass, the control center sends a control signal to the motion execution module to reduce the clamping force; if ≤ ≤ If the gripper's clamping force is normal, the control center does not need to send a signal; otherwise... < If the clamping force is insufficient to clamp the substrate glass, and the substrate glass may fall off if the clamping force is not increased, the control center sends a control signal to the motion execution module to increase the clamping force.

[0037] like Figure 2 As shown, the present invention also provides a method for handling substrate glass using a precision handling device, comprising the following steps: S101: Acquire an image of the substrate glass, locate the laser scanning position of the substrate glass based on the image, obtain the coordinates of the laser scanning position of the substrate glass, perform laser scanning based on the coordinates of the laser scanning position of the substrate glass, and obtain the height and tilt angle of the substrate glass.

[0038] S102: Compare the preset height threshold with the height of the substrate glass, determine the extension length of the gripper based on the comparison result, compare the preset tilt angle threshold with the tilt angle of the substrate glass, and determine the gripping angle of the gripper based on the comparison result.

[0039] S103, based on the extension length and gripping angle of the gripper, the first driver and the second driver control the gripper to perform a gripping operation on the substrate glass.

[0040] S104: Collect parameter data during the gripper's grasping process, and calculate the gripping adaptability coefficient by comprehensively analyzing the parameter data.

[0041] S105: Compare the preset clamping adaptability standard range with the clamping adaptability coefficient. If the clamping adaptability coefficient exceeds the clamping adaptability standard range, adjust the clamping force through the third driver. Otherwise, no adjustment is required to achieve adaptive control of the gripper.

[0042] The above formula in the present application is calculated by removing the dimension and taking the numerical value. The formula is obtained by collecting a large amount of data to simulate the closest real situation by software. The preset parameters and preset threshold values in the formula are set by the person skilled in the art according to the actual situation or obtained by a large amount of data simulation.

[0043] In the description of the present specification, the description referring to the terms "one embodiment", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present disclosure. In the present specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Also, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. An adaptive control system for grippers used to transport substrate glass, characterized in that, The application relates to a self-adaptive control method for a glass substrate clamping device. The method comprises the following steps: A visual positioning module collects a substrate glass image, positions a laser scanning position of the substrate glass through the substrate glass image, and sends the laser scanning position coordinates of the substrate glass to a laser scanning module; The laser scanning module performs laser scanning based on the laser scanning position coordinates of the substrate glass, obtains a substrate glass height and a substrate glass inclination angle, and sends the substrate glass height and the substrate glass inclination angle to a control center; The control center compares the substrate glass height and the substrate glass inclination angle with an initial elongation length and an initial inclination angle of a clamping jaw respectively, and dynamically adjusts the elongation length of the clamping jaw and a clamping angle of the clamping jaw; A data processing module collects parameter data in a clamping process of the clamping jaw, performs clamping fitness comprehensive calculation, obtains a clamping fitness coefficient of the clamping jaw, and sends the clamping fitness coefficient to the control center; 2. The clamp jaw adaptive control system of claim 1, wherein, The control center compares the clamping fitness coefficient with a preset clamping fitness standard range, adjusts clamping force of the clamping jaw when the clamping fitness coefficient exceeds the clamping fitness standard range, and does not need to be adjusted otherwise, so that self-adaptive control of the clamping jaw is realized. The visual positioning module has a global coarse positioning camera, and the process of collecting the substrate glass image by the visual positioning module comprises the following steps:

3. The clamp jaw adaptive control system of claim 2, wherein, A global image of the substrate glass is collected by the global coarse positioning camera, and preprocessed to obtain a processed global image of the substrate glass; an edge detection algorithm is used to detect the contour of the global image of the substrate glass to obtain a substrate glass contour; and a minimum circumscribed rectangle algorithm is used to determine a substrate glass center point and a substrate glass rotation angle based on the substrate glass contour. The visual positioning module also has a local fine positioning camera, and the process of positioning the laser scanning position of the substrate glass by the visual positioning module through the substrate glass image comprises the following steps:

4. The clamp jaw adaptive control system of claim 1, wherein, The local fine positioning camera is used to determine the substrate glass position based on the substrate glass center point and the substrate glass rotation angle, and accurately collect the coordinates of the marked substrate glass points based on the substrate glass position; the coordinates of the marked substrate glass points are taken as the coordinates of the laser scanning position of the substrate glass; and a sub-pixel method is used to find the marked points of the substrate glass position based on the central area in the field of view. The initial extension length of the clamping jaw The collected substrate glass height The comparison is made, when The substrate glass height is equal to the initial extension length of the clamping jaw, and no control signal is sent, when The control signal of the extension length is sent to the motion execution module, when The control signal of the shortening length is sent to the motion execution module.​​​ The initial angle of the clamping jaw The angle of the collected substrate glass When = The angle of the substrate glass is the same as the initial angle of the clamping jaw, and there is no need to send a control signal, when ≠ A control signal of the adjustment angle is sent to the motion execution module to adjust the angle of the clamping jaw to adapt to the clamping angle of the substrate glass. The method also comprises a motion execution module, and the process of adjusting the elongation length of the clamping jaw and the clamping angle of the clamping jaw by the control center comprises the following steps:

5. The clamp jaw adaptive control system of claim 4, wherein, The initial elongation length of the clamping jaw The preset height threshold is obtained by calculating a weighted average of the plurality of substrate glass heights. The initial jaw inclination angle The preset inclination threshold is obtained by calculating a weighted average of the plurality of substrate glass inclination angles.

6. The clamp jaw adaptive control system of claim 1, wherein, The motion execution module dynamically adjusts the elongation length of the clamping jaw and the clamping angle of the clamping jaw based on the control signal sent by the control center.

7. The clamp jaw adaptive control system of claim 6, wherein, The parameter data collected by the data processing module in the clamping process of the clamping jaw comprises clamping jaw contact force data, substrate glass deformation data, environmental temperature data and environmental humidity data. The parameter data of the clamping jaw clamping process is marked, the clamping jaw contact force data is marked as The substrate glass deformation data is marked as The ambient temperature data is marked as The ambient humidity data is marked as , wherein, is a mark of the number of times of periodic collection by the data processing module according to the preset period of time, , is the total number of times of collection by the data processing module; The process of performing clamping fitness comprehensive calculation by the data processing module comprises the following steps: A clamping fitness coefficient is calculated ; wherein, is a preset standard chuck contact force coefficient, is a preset standard substrate glass deformation coefficient, is a preset standard ambient temperature coefficient, is a preset standard ambient humidity coefficient; is a chuck contact force influence coefficient, is a substrate glass deformation influence coefficient, is a temperature influence coefficient, is a humidity influence coefficient.

8. The clamp jaw adaptive control system of claim 4, wherein, The formula is as follows: If > the control signal of reducing the clamping force is sent to the motion execution module. If the control signal of increasing the clamping force is sent to the motion execution module.​ By adjusting the clamping force several times, until ≤ ≤ stop; If ≤ ≤ , no control signal is sent. wherein, is a preset clamping fitness standard range, the clamping fitness standard range is related to the size and weight of the substrate glass, and can be obtained through a preset reference table.

9. A substrate glass precision handling apparatus characterized by comprising: The process of comparing the clamping fitness coefficient with the preset clamping fitness standard range by the control center comprises the following steps: The application relates to a self-adaptive control method for a glass substrate clamping device. The method comprises the following steps: A visual positioning module collects a substrate glass image, positions a laser scanning position of the substrate glass through the substrate glass image, and sends the laser scanning position coordinates of the substrate glass to a laser scanning module; The laser scanning module performs laser scanning based on the laser scanning position coordinates of the substrate glass, obtains a substrate glass height and a substrate glass inclination angle, and sends the substrate glass height and the substrate glass inclination angle to a control center; The control center compares the substrate glass height and the substrate glass inclination angle with an initial elongation length and an initial inclination angle of a clamping jaw respectively, and dynamically adjusts the elongation length of the clamping jaw and a clamping angle of the clamping jaw; A data processing module collects parameter data in a clamping process of the clamping jaw, performs clamping fitness comprehensive calculation, obtains a clamping fitness coefficient of the clamping jaw, and sends the clamping fitness coefficient to the control center; The control center compares the clamping fitness coefficient with a preset clamping fitness standard range, adjusts clamping force of the clamping jaw when the clamping fitness coefficient exceeds the clamping fitness standard range, and does not need to be adjusted otherwise, so that self-adaptive control of the clamping jaw is realized. The visual positioning module has a global coarse positioning camera, and the process of collecting the substrate glass image by the visual positioning module comprises the following steps: A global image of the substrate glass is collected by the global coarse positioning camera, and preprocessed to obtain a processed global image of the substrate glass; an edge detection algorithm is used to detect the contour of the global image of the substrate glass to obtain a substrate glass contour; and a minimum circumscribed rectangle algorithm is used to determine a substrate glass center point and a substrate glass rotation angle based on the substrate glass contour. The visual positioning module also has a local fine positioning camera, and the process of positioning the laser scanning position of the substrate glass by the visual positioning module through the substrate glass image comprises the following steps: The local fine positioning camera is used to determine the substrate glass position based on the substrate glass center point and the substrate glass rotation angle, and accurately collect the coordinates of the marked substrate glass points based on the substrate glass position; the coordinates of the marked substrate glass points are taken as the coordinates of the laser scanning position of the substrate glass; and a sub-pixel method is used to find the marked points of the substrate glass position based on the central area in the field of view. The method also comprises a motion execution module, and the process of adjusting the elongation length of the clamping jaw and the clamping angle of the clamping jaw by the control center comprises the following steps: The motion execution module dynamically adjusts the elongation length of the clamping jaw and the clamping angle of the clamping jaw based on the control signal sent by the control center. The parameter data collected by the data processing module in the clamping process of the clamping jaw comprises clamping jaw contact force data, substrate glass deformation data, environmental temperature data and environmental humidity data. The process of performing clamping fitness comprehensive calculation by the data processing module comprises the following steps: The formula is as follows: The process of comparing the clamping fitness coefficient with the preset clamping fitness standard range by the control center comprises the following steps: The frame body, the clamping jaw, the first driver, the second driver and the third driver are provided. The clamping jaw is installed on the frame body. The first driver is driven by a linear motor and cooperates with a grating ruler feedback to drive the clamping jaw to move and adjust the extension length of the clamping jaw. The second driver is driven by a servo motor and cooperates with an absolute value encoder to drive the clamping jaw to rotate and adjust the clamping angle of the clamping jaw. The third driver is driven by an electric cylinder and cooperates with a force sensor to drive the clamping jaw to clamp and adjust the clamping force of the clamping jaw. The first driver, the second driver and the third driver are controlled by the clamping jaw adaptive control system in claim 1-8.

10. A method of handling a substrate glass precision handling apparatus as defined in claim 9, characterized by, The method comprises the following steps: Collecting a substrate glass image, positioning a laser scanning position of the substrate glass based on the substrate glass image, obtaining coordinates of the laser scanning position of the substrate glass, performing laser scanning based on the coordinates of the laser scanning position of the substrate glass, and obtaining a substrate glass height and a substrate glass inclination angle; Comparing a preset height threshold value with the substrate glass height, determining the extension length of the clamping jaw according to the comparison result, comparing a preset inclination angle threshold value with the substrate glass inclination angle, and determining the clamping angle of the clamping jaw according to the comparison result; Controlling the clamping jaw to perform a clamping operation on the substrate glass according to the extension length of the clamping jaw and the clamping angle of the clamping jaw through the first driver and the second driver; Collecting parameter data in the clamping process of the clamping jaw, and performing clamping fitness comprehensive calculation on the parameter data to obtain a clamping fitness coefficient; Comparing a preset clamping fitness standard range with the clamping fitness coefficient, adjusting the clamping force through the third driver if the clamping fitness coefficient is not equal to the clamping fitness standard range, and otherwise, no adjustment is needed, so as to realize adaptive control of the clamping jaw.

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