An ozone generator

Abstract

The application discloses an ozone generator, comprising a plurality of front and rear superimposed ozone generating units, the ozone generating unit comprising a cooling plate, an ozone sheet and a heat-conducting insulating plate, the front surface of the cooling plate being provided with a high-voltage electrode cavity, the back surface being provided with an ionization cavity, and the inside being provided with a cooling water channel; the ozone sheet is arranged in the high-voltage electrode cavity; the heat-conducting insulating plate is connected between the ozone sheet and the cooling plate; the side surface of the ozone sheet facing the heat-conducting insulating plate is printed with a conductive layer, and the conductive layer is connected with a high-voltage electrode wire. The ozone generator can effectively press the ozone sheet through the elastic supporting strip, effectively solves the problem of slight deformation of the ozone sheet in the process of sharp temperature change, guarantees the uniformity and consistency of the ionization airway gap in any environment, simultaneously slows down the shear force of the pressure bearing position of the ozone sheet isolation part, avoids the breaking of the ozone sheet, and also guarantees the consistency of the electrical performance parameters of each working point on the ionization surface.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of ozone preparation device, and particularly relates to an ozone generator. BACKGROUND

[0002] The ozone generator is a high-energy-consumption product. Compared with the traditional tubular ozone generator, the plate-type ozone generator has the advantages of low energy consumption, small size and the like, and is more and more widely applied in the market, representing the development direction of the ozone generator in the future. However, the plate-type ozone generator still has the following two outstanding problems:

[0003] Firstly, compared with the tubular product, the reliability of the plate-type ozone generator is relatively low, which is one of the key factors restricting the application of the plate-type ozone generator. The reliability problem is also a big technical problem that has been puzzling the industry.

[0004] Secondly, how to continuously and effectively reduce the unit operation energy consumption is the eternal primary research goal of the ozone technology. Although the plate-type ozone generator has the advantage of low energy consumption compared with the tubular ozone generator, the operation energy consumption is still relatively high. Under the condition of an ozone concentration of 130 mg / L, the operation energy consumption is not less than 6.2 kW / 1 kg O3; under the condition of an ozone concentration of 148 mg / L, the operation energy consumption is not less than 7.5 kW / 1 kg O3; under the condition of an ozone concentration of 168 mg / L, the operation energy consumption is not less than 9 kW / 1 kg O3; under the condition of an ozone concentration of 200 mg / L, the operation energy consumption is not less than 12 kW / 1 kg O3. For the ozone generator with a higher concentration, such as 350 mg / L or more, the operation energy consumption is as high as 28.6 kW / 1 kg O3. Such ozone generators are difficult to realize large-scale, and are generally small systems of about 100 g, which are widely used in the semiconductor industry.

[0005] We found through research and a large number of experiments that the reasons for the low reliability and high energy consumption of the plate-type ozone generator are the non-uniform discharge of the gas channel and the long-term excessive bearing of the rigid pressure by the ozone sheet. The non-uniform discharge of the gas channel caused by the large local discharge power of the corner discharge and the tip discharge is the main reason for the breakdown of the ozone sheet, accounting for more than 70% of the total failure rate, as shown in Figure 5 Figure 5 is a relatively typical gas channel mode of various plate-type ozone generators at present. The distance (C in Figure 5 ) between the integrated gas channel isolation strip and the conductive layer of the ozone sheet is shorter than the ionization distance (A+C in Figure 5 ) of the gas channel. A discharge with a larger power than the ozone ionization layer is often formed at the position of the gas channel isolation strip, and the local large-current discharge is more likely to occur at the corner or the tip to break down the ozone sheet. The bearing of the rigid pressure accounts for about 16% of the total failure rate. For example, Figure 5 ​As shown, due to the fact that the airway isolation strip and the ground electrode cooling plate are integrated structures, due to the accumulation of errors of various factors such as processing, materials and assembly, the airway isolation strip often causes excessive pressure on the ozone sheet and breaks the ozone sheet. The above two problems become the key factors that seriously affect the reliability of the plate type ozone generator and restrict the application of the plate type ozone generator. SUMMARY

[0006] In view of the problems in the prior art, the purpose of the present application is to provide an ozone generator.

[0007] To solve the above problems, the technical scheme adopted by the present application is as follows:

[0008] An ozone generator comprises a plurality of front and rear superimposed ozone generating units, the ozone generating unit comprises a cooling plate, an ozone sheet and a heat-conducting insulation plate, the front surface of the cooling plate is provided with a high-voltage electrode cavity, the back surface is provided with an ionization cavity, and the inside is provided with a cooling water channel; the ozone sheet is arranged in the high-voltage electrode cavity; the heat-conducting insulation plate is connected between the ozone sheet and the cooling plate; the side surface of the ozone sheet facing the heat-conducting insulation plate is printed with a conductive layer, and the conductive layer is connected with a high-voltage electrode wire; the high-voltage electrode cavity and the heat-conducting insulation plate are provided with a threading hole, the threading hole penetrates through the heat-conducting insulation plate, then passes through the middle of the cooling plate, and then penetrates out from the side wall of the cooling plate, and the high-voltage electrode wire penetrates out of the cooling plate from the threading hole; a plurality of airflow gap support strip assembly grooves are arranged in the ionization cavity, and elastic support strips are embedded in the airflow gap support strip assembly grooves; a plurality of sealing ring assembly grooves are arranged around the ionization cavity, and elastic sealing rings are embedded in the sealing ring assembly grooves; the side wall of the cooling plate is provided with two gas path interfaces and two water path interfaces, the two gas path interfaces are communicated with the ionization cavity through a gas path pipeline arranged in the cooling plate, and the two water path interfaces are respectively communicated with both ends of the cooling water channel; the elastic sealing ring and the elastic support strip of one ozone generating unit are placed on the surface of the ozone sheet of another ozone generating unit between two adjacent ozone generating units, the elastic support strip is supported between the bottom wall of the ionization cavity and the ozone sheet to form a uniform gap therebetween, and the elastic sealing ring, the ozone sheet and the bottom wall of the ionization cavity form a sealed ionization airway.

[0009] Preferably, a blank insulation strip is reserved at a position corresponding to the airflow gap support strip assembly groove on the ozone sheet, and the blank insulation strip is not printed with a conductive layer.

[0010] Preferably, the distance between the edge of the conductive layer and the corner of the airflow gap support strip assembly groove is not less than 6 times the discharge gap.

[0011] Preferably, the elastic support strip and the elastic sealing ring enclose the ionization airway into an S-shaped ionization airway, and the two gas path interfaces are respectively arranged at the two ends of the S-shaped ionization airway.

[0012] Preferably, the S-shaped ionization gas channel is provided with a gas flow buffer groove, which is a strip-shaped groove opened in the bottom of the ionization cavity.

[0013] Preferably, the depth of the ionization cavity is greater than 0.15 mm and less than 0.3 mm.

[0014] Preferably, the four corners of the cooling plate are respectively provided with screw rod perforations.

[0015] The beneficial effects of the present application are:

[0016] Compared with the prior art, the present application has the advantages of:

[0017] The elastic support strip of the present application can effectively compress the ozone sheet, effectively solve the problem of slight deformation of the ozone sheet during a sharp change in temperature, ensure the uniformity and consistency of the ionization gas channel gap in any environment, and slow down the shear force on the isolation part of the ozone sheet, thereby avoiding the breaking of the ozone sheet and ensuring the consistency of the electrical performance parameters at each working point of the ionization surface. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 is a structural schematic diagram of the present application;

[0019] Figure 2 is an exploded schematic diagram of the parts of the present application;

[0020] Figure 3 is a quarter sectional view of the ozone generation unit of the present application;

[0021] Figure 4 is a partial enlarged view of the sectional view of the present application;

[0022] Figure 5 is a structural schematic diagram of the prior art.

[0023] In the figure: 100, ozone generation unit; 1, cooling plate; 11, gas path interface; 12, water path interface; 13, screw rod perforation; 2, ozone sheet; 21, conductive layer; 211, high-voltage electrode wire; 22, blank insulating band; 3, heat-conducting insulating plate; 31, threading hole; 4, high-voltage electrode cavity; 5, ionization cavity; 51, gas flow gap support strip assembly groove; 52, elastic support strip; 53, elastic sealing ring; 54, gas flow buffer groove; 6, cooling water channel. DETAILED DESCRIPTION

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] like Figures 1-5 As shown, the present invention provides a technical solution: an ozone generator, comprising a plurality of ozone generating units 100 stacked one after the other, each ozone generating unit 100 including a cooling plate 1, an ozone sheet 2, and a thermally conductive insulating plate 3. The cooling plate 1 has a high-voltage electrode cavity 4 on its front side and an ionization cavity 5 on its back side, with a cooling water channel 6 inside. The ozone sheet 2 is disposed within the high-voltage electrode cavity 4. The thermally conductive insulating plate 3 is attached between the ozone sheet 2 and the cooling plate 1. A conductive layer 21 is printed on the surface of the ozone sheet 2 facing the thermally conductive insulating plate 3, and a high-voltage electrode wire 211 is connected to the conductive layer 21. A wire-passing hole 31 is provided on the high-voltage electrode cavity 4 and the thermally conductive insulating plate 3. The wire-passing hole 31 passes through the thermally conductive insulating plate 3, passes through the middle of the cooling plate 1, and then exits from the side wall of the cooling plate 1. The high-voltage electrode wire 211 exits the cooling plate 1 through the wire-passing hole 31. The ionization cavity 5 contains... Multiple airflow gap support strip assembly slots 51 are provided, and elastic support strips 52 are embedded in the airflow gap support strip assembly slots 51; sealing ring assembly slots are provided around the ionization chamber 5, and elastic sealing rings 53 are embedded in the sealing ring assembly slots; the side wall of the cooling plate 1 is provided with two gas passage interfaces 11 and two water passage interfaces 12. The two gas passage interfaces 11 are connected to the ionization chamber 5 through gas passage pipes provided in the cooling plate 1, and the two water passage interfaces 12 are respectively connected to both ends of the cooling water channel 6; between two adjacent ozone generating units 100, the elastic sealing ring 53 and the elastic support strip 52 of one ozone generating unit 100 abut against the surface of the ozone sheet 2 of the other ozone generating unit 100. The elastic support strip 52 supports the bottom wall of the ionization chamber 5 and the ozone sheet 2 to form a uniform gap between the two. The elastic sealing ring 53, the ozone sheet 2, and the bottom wall of the ionization chamber 5 enclose and form a sealed ionization gas channel.

[0026] In use, the elastic sealing ring 53 of one ozone generating unit 100 is placed on the surface of the ozone sheet 2 of another ozone generating unit 100 between the two adjacent ozone generating units 100, the elastic sealing ring 53 and the ozone sheet 2, and the bottom wall of the ionization cavity 5 form a sealed ionization air channel, the elastic support strip 52 is supported between the bottom wall of the ionization cavity 5 and the ozone sheet 2 to form a uniform gap therebetween, oxygen enters the ionization cavity 5 from the gas channel through the gas channel interface 11, the conductive layer 21 printed on the surface of the ozone sheet 2 is electrified through the high-voltage electrode wire 211, periodic high positive pressure and high negative pressure are generated, electrons pass back and forth in the ionization air channel between the conductive layer 21 and the bottom wall of the ionization cavity 5, oxygen is converted into ozone under the ionization and excitation, and finally discharged through a gas channel interface 11, the cooling water channel 6 in the cooling plate 1 is connected to the cooling water through the two water channel interfaces 12 to cool the cooling plate 1, and the heat conductive insulating plate 3 is connected between the ozone sheet 2 and the cooling plate 1 to realize insulation and transfer the heat of the ozone sheet 2 to the cooling plate 1 for cooling.

[0027] As shown in Figure 4 , the elastic support strip 52 can effectively compress the ozone sheet 2, effectively solve the problem of slight deformation of the ozone sheet 2 during temperature change, ensure the uniformity and consistency of the ionization air gap in any environment, and slow down the shear force of the ozone sheet 2 isolation part, avoid the ozone sheet 2 from breaking, and ensure the consistency of the electrical performance parameters of each working point of the ionization surface.

[0028] Further, as shown in Figure 3 , 4 , the ozone sheet 2 has a reserved blank insulating strip 22 at a position corresponding to the air flow gap support strip assembly groove 51, and the blank insulating strip 22 is not printed with a conductive layer 21, the ozone sheet 2 is insulated at the corresponding ionization layer corner part, effectively solving the problem of sharp end discharge and corner discharge, and ensuring that the ozone sheet 2 will not be broken down due to corner discharge and sharp end discharge.

[0029] Specifically, as shown in Figure 4 , the distance (B in Figure 4 ) between the edge of the conductive layer 21 and the corner of the air flow gap support strip assembly groove 51 is not less than 6 times the discharge gap (A in Figure 4 ).

[0030] The test results are as follows:

[0031]

[0032] Note: 1, the current test process is divided into segments, each segment lasts 10 minutes, so the number of failures is the number of damage under each current, and the failure rate is the cumulative number of failures (the sum of the number of failures caused by the current and the number of failures caused by the previous small current test).

[0033] 2, the original device can only be applied to a maximum of 5A current, so there is no test data for 6A current.

[0034] From the above test data, it can be seen that the ozone generator effectively solves the problems of uneven discharge in the airway, long-term excessive bearing of rigid pressure by the ozone sheet, and local discharge power caused by corner discharge and tip discharge, which leads to ozone sheet breakdown or fragmentation.

[0035] The on-site operation of the device of the present application is as follows:

[0036] A 30kg ozone system (a total of 540 ozone sheets) of the device has been operated in Fuyang, Anhui for 2 years and 3 months, a 10kg system (a total of 180 ozone sheets) has been operated in Qingdao for 2 years, a 20kg system (a total of 360 ozone sheets) has been operated in Wuhan for 1 year and 9 months, a 16kg system (288 ozone sheets) has been operated in Yuncheng, Shanxi for 1 year and 6 months, and a 3kg system (54 ozone sheets) has been operated in Yuncheng, Shanxi for 1 year and 6 months, and the ozone sheets are all intact so far.

[0037] The operation condition statistics of the original device are as follows:

[0038] According to the failure rate statistics for more than 10 years, the failure rate of ozone sheet breakdown of the original device is about 4% after 1 year of operation, about 6.5% after 2 years of operation, and about 8% after 3 years of operation.

[0039] Further, the elastic support strip 52 and the elastic sealing ring 53 enclose the ionization airway into an S-shaped ionization airway, and two air path interfaces 11 are respectively arranged at two ends of the S-shaped ionization airway, which ensures the effective utilization rate of the whole working surface of the ozone sheet 2, and prolongs the passing time of oxygen in the ionization airway, thereby effectively improving the output and reducing the energy consumption.

[0040] Further, the S-shaped ionization airway is provided with an air flow buffer groove 54 at the turning part, specifically, the air flow buffer groove 54 is a strip-shaped groove opened at the bottom of the ionization cavity 5, so that oxygen can pass through the air flow buffer groove 54 quickly, avoiding poor passing at the turning part of the S-shaped ionization airway.

[0041] Specifically, the depth of the ionization cavity 5 is greater than 0.15mm and less than 0.3mm.

[0042] Further, the four corners of the cooling plate 1 are respectively provided with screw rod through holes 13, so that a plurality of front and rear stacked ozone generating units 100 can be sealed and connected in series by using screw rods.

[0043] While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely divergences of the principles and spirit of the application and that numerous modifications, changes, substitutions, and alterations can be made thereto without departing from the spirit and scope of the application as defined by the appended claims and their equivalents.

Claims

1. An ozone generator comprising a plurality of ozone generating units (100) stacked one after the other, wherein each ozone generating unit (100) includes a cooling plate (1), an ozone sheet (2), and a thermally conductive insulating plate (3), characterized in that, The cooling plate (1) has a high-voltage electrode cavity (4) on the front and an ionization cavity (5) on the back, and a cooling water channel (6) inside. The ozone sheet (2) is disposed inside the high-voltage electrode cavity (4); the thermally conductive insulating plate (3) is attached between the ozone sheet (2) and the cooling plate (1); The ozone sheet (2) has a conductive layer (21) printed on the side facing the thermal insulation plate (3), and a high-voltage electrode wire (211) is connected to the conductive layer (21). The high-voltage electrode cavity (4) and the heat-conducting insulating plate (3) are provided with a wire hole (31). The wire hole (31) passes through the heat-conducting insulating plate (3), passes through the middle of the cooling plate (1), and then passes out from the side wall of the cooling plate (1). The high-voltage electrode wire (211) passes out of the cooling plate (1) through the wire hole (31). The ionization chamber (5) is provided with multiple airflow gap support bar assembly slots (51), and elastic support bars (52) are embedded in the airflow gap support bar assembly slots (51). The ionization chamber (5) is provided with a sealing ring assembly groove around it, and an elastic sealing ring (53) is embedded in the sealing ring assembly groove. The side wall of the cooling plate (1) is provided with two air passage interfaces (11) and two water passage interfaces (12). The two air passage interfaces (11) are connected to the ionization chamber (5) through the air passage pipes provided in the cooling plate (1), and the two water passage interfaces (12) are connected to both ends of the cooling water channel (6). Between two adjacent ozone generating units (100), the elastic sealing ring (53) and elastic support strip (52) of one ozone generating unit (100) press against the surface of the ozone sheet (2) of the other ozone generating unit (100). The elastic support strip (52) supports the bottom wall of the ionization chamber (5) and the ozone sheet (2) to form a uniform gap between the two. The elastic sealing ring (53) and the ozone sheet (2) and the bottom wall of the ionization chamber (5) enclose and form a sealed ionization channel. A blank insulating strip (22) is reserved at the position corresponding to the airflow gap support strip assembly groove (51) on the ozone sheet (2). The blank insulating strip (22) does not have a printed conductive layer (21).

2. An ozone generator according to claim 1, characterized in that, The distance between the edge of the conductive layer (21) and the corner of the airflow gap support strip assembly groove (51) is not less than 6 times the discharge gap.

3. An ozone generator according to claim 1, characterized in that, The elastic support strip (52) and the elastic sealing ring (53) enclose the ionization gas channel to form an S-shaped ionization gas channel, and the two gas channel interfaces (11) are respectively set at both ends of the S-shaped ionization gas channel.

4. An ozone generator according to claim 3, characterized in that, An airflow buffer groove (54) is provided at the bend of the S-shaped ionization channel. The airflow buffer groove (54) is a strip-shaped groove opened at the bottom of the ionization chamber (5).

5. An ozone generator according to claim 1, characterized in that, The depth of the ionization cavity (5) is greater than 0.15 mm and less than 0.3 mm.

6. An ozone generator according to claim 1, characterized in that, The cooling plate (1) has screw through holes (13) at its four corners.

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