Carrying device

Abstract

The invention provides a conveying device capable of installing and conveying an object with high precision. The conveying device is provided with a frame (2) and a head part (3) which is fixed on the frame (2) and conveys the object to be conveyed. The frame (2) is provided with an upper main body part (20) which is fixed with the head part (3) and is bent into an arch shape in the direction opposite to the gravity direction.

Description

TECHNICAL FIELD

[0001] The present application relates to a conveyance device. BACKGROUND

[0002] At present, various technologies are proposed with respect to a conveyance device that conveys a conveyance target such as an electronic component (for example, refer to Patent Literature 1). Such a conveyance device has a frame and a head portion fixed to the frame, and conveys a conveyance target by, for example, suction or the like. The head portion takes a conveyance target from a first substrate that is a conveyance source where the conveyance target is prepared, and mounts the conveyance target at a prescribed position of a second substrate that is a conveyance destination.

[0003] However, the frame is composed of a member such as metal in order to ensure rigidity, and has a large weight. Therefore, in the conventional conveyance device, there is a possibility that a deflection occurs in the frame due to the self-weight of the frame itself, and a mounting position of a conveyance target by the head portion is deviated.

[0004] PRIOR ART DOCUMENTS

[0005] PATENT LITERATURE

[0006] Patent Literature 1: Japanese Patent Application Laid-Open No. 2013-254785 SUMMARY

[0007] PROBLEMS TO BE SOLVED BY THE INVENTION

[0008] The present application has been achieved in view of such a situation, and an object thereof is to provide a conveyance device capable of mounting a conveyance target with high accuracy.

[0009] MEANS OF SOLVING THE PROBLEMS

[0010] In order to achieve the above object, a conveyance device according to the present application has:

[0011] a frame; and

[0012] a head portion fixed to the frame and conveying a conveyance target,

[0013] the frame has an upper body portion to which the head portion is fixed and which is curved in an arch shape toward a direction opposite to a direction of gravity.

[0014] In the carrying device of the present application, the frame has an upper body portion having the head portion fixed thereto and curved in an arch shape toward a direction opposite to the direction of gravity. Therefore, the weight of the upper body portion or an external load (load of the head portion, etc.) with respect to the direction of gravity of the upper body portion acts as a compressive stress that compresses the upper body portion in the direction of extension thereof. Thus, the upper body portion is less likely to be deflected, and deviation of the mounting position of the carrying object based on the head portion due to deflection of the upper body portion can be prevented. Therefore, according to the present application, a carrying device capable of mounting a carrying object with high precision can be realized.

[0015] Also, the upper body portion can have a pair of upper column portions, and an upper beam portion having the head portion fixed thereto and bridging between the pair of upper column portions, one end of the direction of extension of the upper beam portion being continuous with the end portion of the axial direction of one of the upper column portions, the other end of the direction of extension of the upper beam portion being continuous with the end portion of the axial direction of the other upper column portion, the upper beam portion being curved in an arch shape toward a direction opposite to the direction of gravity. In this case, the degree of curvature of the upper beam portion can be adjusted while adjusting the length of the axial direction of the upper column portion. Thus, the height of the upper body portion along the direction of gravity can be optimized. At the same time, deflection of the upper beam portion due to the weight of the upper beam portion or an external load with respect to the direction of gravity of the upper beam portion can be prevented.

[0016] Also, the head portion can have a front end portion located at a position lower than the arrangement surface of the upper column portion. In this case, the center of gravity of the carrying device can be located at a low position. Therefore, the balance of the carrying device is stable, and deviation of the mounting position of the carrying object based on the head portion can be effectively prevented.

[0017] Also, the upper beam portion can have a first branch portion, a second branch portion separated from the first branch portion in a direction perpendicular to the direction of gravity, and an opening portion passing through between the first branch portion and the second branch portion along the direction of gravity. By forming the opening portion in the upper beam portion, the weight of the upper beam portion can be reduced, and deflection of the upper beam portion due to the weight of the upper beam portion can be prevented. In addition, an air current (downward flow) can be formed in such a manner that the air current passes through the opening portion from one side of the upper beam portion toward the other side along the direction of gravity. Thus, the cleanliness of the atmosphere around the carrying device can be improved, and contamination of the substrate due to dust, etc. can be prevented.

[0018] It can also be that the frame has a lower body portion that supports the upper body portion, and the lower body portion is curved in an arch shape toward a direction opposite to the direction of the gravity. In this case, the self-weight of the lower body portion or an external load with respect to the direction of the gravity of the lower body portion (a load of the upper body portion, etc.) acts as a compressive stress that compresses the lower body portion along its extending direction. Thus, the lower body portion is less likely to be deflected, and the upper body portion can be firmly supported by the lower body portion. As a result, the position of the upper body portion along the direction of the gravity is less likely to be changed due to the deflection of the lower body portion, and deviation of the mounting position of the carrying object based on the head can be effectively prevented.

[0019] It can also be that the lower body portion has a pair of lower column portions, and a lower beam portion that supports the upper body portion and bridges between the pair of lower column portions, one end of the extending direction of the lower beam portion is continuous with an end portion of the axial direction of one of the lower column portions, the other end of the extending direction of the lower beam portion is continuous with an end portion of the axial direction of the other of the lower column portions, and the lower beam portion is curved in an arch shape toward a direction opposite to the direction of the gravity. In this case, the degree of curvature of the lower beam portion can be adjusted while adjusting the length of the axial direction of the lower column portion. Thus, the height of the lower body portion along the direction of the gravity can be optimized. At the same time, the deflection of the lower beam portion due to the self-weight of the lower beam portion or an external load with respect to the direction of the gravity of the lower beam portion can be prevented. In addition, the height of the entire frame along the direction of the gravity can be adjusted according to the length of the axial direction of the lower column portion.

[0020] It can also be that the lower beam portion is configured to be orthogonal with respect to the upper body portion. In this case, the upper body portion can be well balanced by the lower beam portion, and deviation of the mounting position of the carrying object based on the head can be effectively prevented.

[0021] It can also be that, in the lower beam portion, a camera module including an imaging portion and a driving portion is movably fixed in three dimensions. In this case, the mounting position of the carrying object based on the head, the state of the substrate on which the carrying object is mounted, etc. can be imaged at a desired position by the camera module.

[0022] It can also be that the camera module images the mounting position of the carrying object based on the head and the position of the front end portion of the head. In this case, the position of the front end portion of the head can be matched with the mounting position (mounting scheduled position) of the carrying object based on the imaging information of each position acquired by the camera module, and the carrying object can be mounted at a desired mounting position by the head. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1A is a perspective view of a carrying device according to an embodiment of the present application.

[0024] Figure 1Bis a side view from the X-axis direction Figure 1A is a side view of the conveyance device shown in FIG. 1.

[0025] Figure 2A is Figure 1A is a perspective view of the upper body portion shown in FIG. 1.

[0026] Figure 2B is Figure 1A is a perspective view of the lower body portion shown in FIG. 1.

[0027] Figure 3 is Figure 1A is a perspective view of the conveyance device, the first stage, the second stage, and the setting table shown in FIG. 1.

[0028] Figure 4A is a perspective view for explaining the operation of the conveyance device or the like.

[0029] Figure 4B is Figure 4A is a side view of the conveyance device or the like shown in FIG. 1.

[0030] Figure 5A is a perspective view for explaining Figure 4A is a perspective view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0031] Figure 5B is Figure 5A is a side view of the conveyance device or the like shown in FIG. 1.

[0032] Figure 6 is a perspective view for explaining Figure 5A is a side view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0033] Figure 7 is a perspective view for explaining Figure 6 is a side view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0034] Figure 8A is a perspective view for explaining Figure 7 is a perspective view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0035] Figure 8B is Figure 8A is a side view of the conveyance device or the like shown in FIG. 1.

[0036] Figure 9 is a perspective view for explaining Figure 8A is a perspective view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0037] Figure 10 is a perspective view for explaining Figure 9 is a perspective view for explaining the subsequent operation of the conveyance device or the like shown in FIG. 1.

[0038] Figure 11 is Figure 1AA perspective view of a modified example of the conveying device shown. Detailed Implementation

[0039] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Furthermore, the illustrations are merely schematic and exemplary for the purpose of understanding the present invention, and their appearance and size ratios may differ from the actual product. Additionally, the present invention is not limited to the following embodiments.

[0040] Figure 1A The conveying apparatus 1 shown in one embodiment of the present invention is an apparatus for acquiring conveyed objects such as electronic components from a conveying source and conveying them to a conveying destination. At the conveying destination, the conveying apparatus 1 performs a process of mounting the conveyed objects onto a substrate. The conveying apparatus 1 can, for example, convey electronic components such as capacitors, coils, and resistors. Furthermore, the conveying apparatus 1 can also convey surface-mount electronic components. Additionally, the conveying apparatus 1 can also convey optical elements such as LEDs. Furthermore, the conveying apparatus 1 can also convey bonding materials (coating materials) used to bond the aforementioned electronic components or elements to a substrate, and the substrate on which the aforementioned electronic components or elements are disposed. Hereinafter, the conveyed objects of the conveying apparatus 1 will sometimes be referred to as "workpieces".

[0041] The conveying device 1 has a frame 2 and a head 3 fixed to the frame 2 for conveying workpieces. In addition to these components, the conveying device 1 may also have a camera module 4. The frame 2 is a mechanism for mounting the head 3, positioning the head 3 at a desired height. The frame 2 has an upper body portion 20. In addition to the upper body portion 20, the frame 2 may also have lower body portions 40 and 50 that support the upper body portion 20.

[0042] In addition, Figure 1A In this diagram, the X-axis and Y-axis are axes that extend horizontally. When viewed from above, the X-axis extends along the long side of the lower main body 40 or 50, and the Y-axis extends along the long side of the upper main body 20. The Z-axis is an axis that extends vertically. Furthermore, the direction towards the negative Z-axis is sometimes referred to as the "gravity direction."

[0043] A head 3 is fixed to the upper body portion 20. The upper body portion 20 is not particularly limited and can be made of a high-rigidity metal such as SUS material, aluminum, steel, or casting. The rigidity (Young's modulus) of the upper body portion 20 is, for example, 69 GPa to 206 GPa. The length of the upper body portion 20 along the X-axis is not particularly limited, but is approximately 0.5 m. The length of the upper body portion 20 along the Y-axis (the distance between the lower body portion 40 and the lower body portion 50 along the Y-axis) is not particularly limited, but is approximately 2 m. The height of the upper body portion 20 along the Z-axis is not particularly limited, but is approximately 0.7 m.

[0044] The upper body portion 20 has an arched shape (arc shape, C-shape, or semi-circular shape), curving or buckling into an arch (arc shape, C-shape, or semi-circular shape) in a direction opposite to the direction of gravity (i.e., the positive Z-axis direction). Therefore, for example, compared to the case where the upper body portion 20 is flat (extending along a horizontal plane), the rigidity of the upper body portion 20 is increased. At least a portion of the head 3 can be disposed inside the arch formed by the upper body portion 20.

[0045] like Figure 2A As shown, the upper main body 20 may have an upper beam portion 21, an upper column portion 25, and an upper column portion 27. At the center of the upper beam portion 21 in the Y-axis direction, the head 3 is fixed in a way that allows it to move vertically. Furthermore, the head 3 is three-dimensionally movable and fixed to the upper beam portion 21. The upper beam portion 21 has an arched shape (arc shape, C-shape, or semi-circular shape), curving or buckling into an arched (arc shape, C-shape, or semi-circular) shape in a direction opposite to the direction of gravity (i.e., the positive Z-axis direction).

[0046] The upper beam portion 21 bridges the gap between a pair of upper column portions 25 and 27. One end of the upper beam portion 21 extending in the direction of extension is continuous with the axial end (upper end) of the upper column portion 25. The end of the upper beam portion 21 extending in the direction of extension can intersect the upper column portion 25 at a predetermined angle. In this embodiment, a bend 31 is formed at the intersection of the upper beam portion 21 and the upper column portion 25. Figure 2A As shown, when the intersection angle between the upper beam portion 21 and the upper column portion 25 (the angle formed by the extension direction of the upper beam portion 21 and the axial direction of the upper column portion 25 in the curved portion 31) is set to θ1, it is 90° < θ1 < 180°. In this embodiment, it is 120° < θ1 < 150°, but the range of θ1 is not limited to this.

[0047] The other end of the extending direction of the upper beam portion 21 is continuous with the axial end (upper end) of the upper column portion 27. The other end of the extending direction of the upper beam portion 21 and the upper column portion 27 may intersect at a predetermined angle. In this embodiment, a bend 32 is formed at the intersection of the upper beam portion 21 and the upper column portion 27. For example... Figure 2A As shown, when the intersection angle between the upper beam portion 21 and the upper column portion 27 (the angle formed by the extending direction of the upper beam portion 21 and the axial direction of the upper column portion 27 in the curved portion 32) is set to θ2, it is 90° < θ2 < 180°. In this embodiment, it is 120° < θ2 < 150°, but the range of θ2 is not limited to this. θ1 and θ2 are equal, but they can also be different.

[0048] Furthermore, the upper beam portion 21 and the upper column portion 25 can be smoothly curved. Similarly, the upper beam portion 21 and the upper column portion 27 can also be smoothly curved. Alternatively, the upper beam portion 21 and the upper column portion 25 can be integrated, but they can also be constructed separately. Similarly, the upper beam portion 21 and the upper column portion 27 can be integrated, but they can also be constructed separately. Alternatively, the upper column portions 25 and 27 can be omitted from the upper main body portion 20, and the upper beam portion 21 can be directly fixed to the lower main body portions 40 and 50.

[0049] The upper beam portion 21 may have a first branch portion 22 and a second branch portion 23 that is separated from the first branch portion 22 in the X-axis direction. The first branch portion 22 and the second branch portion 23 are arranged parallel to the Y-axis. The first branch portion 22 and the second branch portion 23 each have an arch shape (arc shape, C-shape, or semi-circular shape), and are curved or bent into an arch shape (arc shape, C-shape, or semi-circular shape) in the direction opposite to the direction of gravity (i.e., the positive Z-axis direction). In this embodiment, the upper beam portion 21 has two branches, but it may also have three or more branches. Alternatively, the upper beam portion 21 may not have a branch structure.

[0050] The first branch 22 may have a top 22a, a side 22b, and a side 22c. The top 22a is located at the highest point along the Z-axis in the first branch 22. The top 22a extends along the Y-axis and is arranged parallel to the horizontal plane (XY plane). However, the top 22a may also have a curved or buckled structure. For example, the top 22a may also have an arched shape (arc, C-shaped, or semi-circular) that is curved or buckled in the direction opposite to the direction of gravity (i.e., the positive Z-axis direction).

[0051] The side portion 22b extends obliquely relative to the Y-axis, facing the direction of gravity. One axial end of the side portion 22b is continuous with one Y-axis end of the top 22a, while the other axial end of the side portion 22b is continuous with the axial end (upper end) of the upper column portion 25 (column 26a).

[0052] The top 22a and the side 22b can intersect at a predetermined angle. In this embodiment, a bend 33 is formed at the intersection of the top 22a and the side 22b. Figure 2A As shown, when the intersection angle between the top 22a and the side 22b is set to θ3, it is 90° < θ3 < 180°. In this embodiment, it is 130° < θ3 < 160°, but the range of θ3 is not limited to this.

[0053] The side portion 22c extends obliquely relative to the Y-axis, facing the direction of gravity. One axial end of the side portion 22c is continuous with the other end of the top 22a in the Y-axis direction, while the other axial end of the side portion 22c is continuous with the axial end (upper end) of the upper column portion 27 (column 28a).

[0054] The top portion 22a and the side portion 22c can intersect at a prescribed angle. In the present embodiment, a curved portion 34 is formed at the intersection of the top portion 22a and the side portion 22c. As shown in FIG. 2, the intersection angle of the top portion 22a and the side portion 22c can be the same as the intersection angle (θ3) of the top portion 22a and the side portion 22b. Figure 2A As shown, when the intersection angle of the top portion 22a and the side portion 22c is θ4, 90° < θ4 < 180°. In the present embodiment, 130° < θ4 < 160°, but the range of θ4 is not limited thereto.

[0055] Further, θ3 and θ4 are equal, but they can also be different. In addition, the top portion 22a and the side portion 22b can be smoothly curved. Likewise, the top portion 22a and the side portion 22c can also be smoothly curved.

[0056] The second branch portion 23 can have a top portion 23a, a side portion 23b, and a side portion 23c. The top portion 23a is located at the highest position in the second branch portion 23 along the Z axis. The top portion 23a extends along the Y axis and is arranged in parallel with respect to the horizontal plane. However, the top portion 23a can also have a curved structure or a bent structure. For example, the top portion 23a can also have an arch shape (arc shape, C shape, or semi-ring shape) that is curved or bent in an arch shape (arc shape, C shape, or semi-ring shape) toward a direction opposite to the direction of gravity (i.e., the positive direction side of the Z axis).

[0057] The side portion 23b extends obliquely with respect to the Y axis toward the direction of gravity. One end of the axial direction of the side portion 23b is continuous with one end of the Y axis direction of the top portion 23a, and the other end of the axial direction of the side portion 23b is continuous with the end (upper end) of the axial direction of the upper column portion 25 (the column body 26b).

[0058] The top portion 23a and the side portion 23b can intersect at a prescribed angle. In the present embodiment, a curved portion 33 is formed at the intersection of the top portion 23a and the side portion 23b. As shown in FIG. 3, the intersection angle of the top portion 23a and the side portion 23b can be the same as the intersection angle (θ3) of the top portion 22a and the side portion 22b. Figure 2A

[0059] The side portion 23c extends obliquely with respect to the Y axis toward the direction of gravity. One end of the axial direction of the side portion 23c is continuous with the other end of the Y axis direction of the top portion 23a, and the other end of the axial direction of the side portion 23c is continuous with the end (upper end) of the axial direction of the upper column portion 27 (the column body 28b).

[0060] The top portion 23a and the side portion 23c can intersect at a prescribed angle. In the present embodiment, a curved portion 34 is formed at the intersection of the top portion 23a and the side portion 23c. As shown in FIG. 4, the intersection angle of the top portion 23a and the side portion 23c can be the same as the intersection angle (θ4) of the top portion 22a and the side portion 22c. Figure 1A ​​

[0061] Further, θ3 and θ4 are equal, but they can also be different. In addition, the top portion 23a and the side portion 23b can be smoothly curved. Likewise, the top portion 23a and the side portion 23c can also be smoothly curved.

[0062] The upper body portion 20 can further have a head fixing portion 24, an opening portion 35, and an opening portion 36. The head fixing portion 24 is located between the top portion 22a and the top portion 23a. In the present embodiment, the head fixing portion 24 is a plate body arranged in parallel with respect to the horizontal plane, but the structure of the head fixing portion 24 is not particularly limited. The head fixing portion 24 is integrated with the first branch portion 22 (the top portion 22a) and the second branch portion 23 (the top portion 23a), but can also be configured in a separate body from the first branch portion 22 (the top portion 22a) and the second branch portion 23 (the top portion 23a). The head 3 is fixed to the head fixing portion 24.

[0063] The opening portion 35 is formed between the side portion 22b and the side portion 23b. The opening portion 35 penetrates between the first branch portion 22 and the second branch portion 23 along the direction of gravity. The opening portion 35 is configured by one opening portion, but can also be configured by a plurality of opening portions. Alternatively, the opening portion 35 can be omitted from the upper body portion 20. The opening shape of the opening portion 35 is a rectangular shape, but can also be a circular shape, an elliptical shape, a square shape, or another polygonal shape.

[0064] The opening portion 36 is formed between the side portion 22c and the side portion 23c. The opening portion 36 penetrates between the first branch portion 22 and the second branch portion 23 along the direction of gravity. The opening portion 36 is configured by one opening portion, but can also be configured by a plurality of opening portions. Alternatively, the opening portion 36 can be omitted from the upper body portion 20. The opening shape of the opening portion 36 is a rectangular shape, but can also be a circular shape, an elliptical shape, a square shape, or another polygonal shape.

[0065] By forming the opening portions 35 and 36 in the upper beam portion 21, it is possible to form an air current (a descending flow) in such a manner that the air current passes through the opening portions 35 and 36 from one side of the upper beam portion 21 toward the other side along the direction of gravity. Thereby, it is possible to improve the cleanliness of the atmosphere in the vicinity of the conveyance device 1 (FIG. 1), and to prevent contamination of the substrate caused by dust or the like. In addition to this, it is possible to reduce the weight of the upper beam portion 21. Figure 1A ) of the conveyance device 1 (FIG. 1).

[0066] The upper column portion 25 and the upper column portion 27 extend in the vertical direction, and have the same length. The upper column portion 25 and the upper column portion 27 are mechanisms mainly for adjusting the height of the upper beam portion 21 along the Z-axis. In the present embodiment, the height of the upper column portion 25 is lower than the height of the upper beam portion 21 in the Z-axis direction, but these lengths can also be equal. Alternatively, the height of the upper column portion 25 can be higher than the height of the upper beam portion 21. Thereby, it is possible to adjust the rigidity of the upper body portion 20. The same applies to the upper column portion 27.

[0067] The upper column portion 25 can have a column 26a and a column 26b. The columns 26a and 26b have the same shape and are separated in the X-axis direction. An axial end (upper end) of the column 26a is continuous with the side portion 22b of the first branch portion 22. An axial end (upper end) of the column 26b is continuous with the side portion 23b of the second branch portion 23. Between the columns 26a and 26b, a space is formed along the X-axis. The space communicates with the space on the inner side of the opening portion 35. Further, the upper column portion 25 can be composed of one column. Alternatively, the upper column portion 25 can be composed of three or more columns.

[0068] The upper column portion 27 can have a column 28a and a column 28b. The columns 28a and 28b have the same shape and are separated in the X-axis direction. An axial end (upper end) of the column 28a is continuous with the side portion 22c of the first branch portion 22. An axial end (upper end) of the column 28b is continuous with the side portion 23c of the second branch portion 23. Between the columns 28a and 28b, a space is formed along the X-axis. The space communicates with the space on the inner side of the opening portion 36. Further, the upper column portion 27 can be composed of one column. Alternatively, the upper column portion 27 can be composed of three or more columns.

[0069] The upper main body portion 20 can have an upper fixing portion 29 connecting the columns 26a and 26b, and an upper fixing portion 30 connecting the columns 28a and 28b. The upper fixing portion 29 has a plate body parallel to the horizontal plane, and connects an axial end (lower end) of the column 26a and an axial end (lower end) of the column 26b. Alternatively, the upper fixing portion 29 can connect the columns 26a and 26b with a plate body parallel to the XZ plane. However, the structure of the upper fixing portion 29 is not limited to the structure shown in the drawing. Figure 2A The upper main body portion 20 is fixed to the lower main body portion 40 via the upper column portion 25 and the upper fixing portion 29. The upper fixing portion 29 is an auxiliary structure for stably arranging the upper main body portion 20 on the lower main body portion 40. Further, the upper fixing portion 29 can be omitted from the upper main body portion 20.

[0070] The upper fixing portion 30 has a plate body parallel to the horizontal plane, and connects an axial end (lower end) of the column 28a and an axial end (lower end) of the column 28b. Alternatively, the upper fixing portion 30 can connect the columns 28a and 28b with a plate body parallel to the XZ plane. However, the structure of the upper fixing portion 30 is not limited to the structure shown in the drawing. Figure 2A The upper main body portion 20 is fixed to the lower main body portion 50 via the upper column portion 27 and the upper fixing portion 30. The upper fixing portion 30 is an auxiliary structure for stably arranging the upper main body portion 20 on the lower main body portion 50. Further, the upper fixing portion 30 can be omitted from the upper main body portion 20.

[0071] As shown in the drawing, the upper main body portion 20 is fixed to the lower main body portion 40 via the upper column portion 25 and the upper fixing portion 29. The upper fixing portion 29 is an auxiliary structure for stably arranging the upper main body portion 20 on the lower main body portion 40. Further, the upper fixing portion 29 can be omitted from the upper main body portion 20. Figure 2BAs shown, the lower body portions 40 and 50 support the upper body portion 20, respectively. The lower body portions 40 and 50 are configured separately, but can be integrated. The lower body portion 40 and the lower body portion 50 have the same shape, but their shapes can be different. The lower body portion 40 and the lower body portion 50 are configured from the same components as the upper body portion 20, but can be configured from different components from the upper body portion 20. The length of the lower body portion 40 along the X axis is not particularly limited, but is about 1.8 m. The length of the lower body portion 40 along the Y axis is not particularly limited, but is about 0.2 m. The height of the lower body portion 40 along the Z axis is not particularly limited, but is about 0.8 m. The same applies to the lower body portion 50.

[0072] At least a portion of the lower body portion 40 has an arched shape (arc shape, C shape, or semi-ring shape) that is curved or bent in an arched shape (arc shape, C shape, or semi-ring shape) toward a direction opposite to the direction of gravity (i.e., the positive direction side of the Z axis).

[0073] The lower body portion 40 can have a lower beam portion 41, a lower column portion 42, and a lower column portion 43. In the central portion of the lower beam portion 41 in the Y axis direction, the upper column portion 25 of the upper body portion 20 is directly or indirectly fixed. The upper column portion 25 can be welded to the lower beam portion 41. The lower beam portion 41 has an arched shape (arc shape, C shape, or semi-ring shape) that is curved or bent in an arched shape (arc shape, C shape, or semi-ring shape) toward a direction opposite to the direction of gravity (i.e., the positive direction side of the Z axis). Therefore, for example, compared to a case where the lower beam portion 41 has a flat shape (extends along the horizontal plane), the rigidity of the lower beam portion 41 is higher.

[0074] The lower beam portion 41 bridges between the pair of lower column portions 42 and 43. The lower beam portion 41 is arranged along the X axis in a direction orthogonal to the upper body portion 20, and supports the upper body portion 20. One end of the extension direction of the lower beam portion 41 is continuous with the axial end portion (upper end) of the lower column portion 42. The one end of the extension direction of the lower beam portion 41 and the lower column portion 42 can intersect at a prescribed angle. In the present embodiment, a curved portion 45 is formed at the intersection of the lower beam portion 41 and the lower column portion 42. As shown, when the intersection angle of the lower beam portion 41 and the lower column portion 42 (the angle formed by the extension direction of the lower beam portion 41 and the axial direction of the lower column portion 42 at the curved portion 45) is θ5, 90° < θ5 < 180°. In the present embodiment, 100° < θ5 < 130°, but the range of θ5 is not limited thereto. Figure 2B

[0075] The other end of the extension direction of the lower beam portion 41 is continuous with the axial end portion (upper end) of the lower column portion 43. The other end of the extension direction of the lower beam portion 41 and the lower column portion 43 can intersect at a prescribed angle. In the present embodiment, a curved portion 46 is formed at the intersection of the lower beam portion 41 and the lower column portion 43. As shown, when the intersection angle of the lower beam portion 41 and the lower column portion 43 (the angle formed by the extension direction of the lower beam portion 41 and the axial direction of the lower column portion 43 at the curved portion 46) is θ6, 90° < θ6 < 180°. In the present embodiment, 100° < θ6 < 130°, but the range of θ6 is not limited thereto. Figure 2B ​As shown, when the intersection angle of the lower beam portion 41 and the lower column portion 43 (the angle formed by the extending direction of the lower beam portion 41 and the axial direction of the lower column portion 43 at the bent portion 46) is θ6, 90° < θ6 < 180°. In the present embodiment, 100° < θ6 < 130°, but the range of θ6 is not limited thereto. θ5 and θ6 are equal, but they can also be different.

[0076] Further, the lower beam portion 41 and the lower column portion 42 can be smoothly bent. Likewise, the lower beam portion 41 and the lower column portion 43 can also be smoothly bent. Alternatively, the lower beam portion 41 and the lower column portion 42 can be integrated, but can also be configured in a separate body. Likewise, the lower beam portion 41 and the lower column portion 43 can be integrated, but can also be configured in a separate body. Alternatively, the lower column portions 42 and 43 can be omitted from the lower main body portion 40, and the lower beam portion 41 can be directly fixed to the setting table (see the setting table 9). Figure 3 The lower beam portion 41 can have the same configuration as the upper beam portion 21 (see FIG. 2). Figure 2A

[0077] The lower beam portion 41 can have a top portion 41a, a side portion 41b, and a side portion 41c. The top portion 41a is located at the highest position in the lower beam portion 41 along the Z axis. The top portion 41a extends along the X axis and is arranged in parallel with respect to the horizontal plane. However, the top portion 41a can have a curved structure or a bent structure. For example, the top portion 41a can also have an arch shape (arc shape, C shape, or semi-ring shape) that is curved or bent in an arch shape toward a direction opposite to the direction of gravity (i.e., the positive direction side of the Z axis).

[0078] The side portion 41b extends obliquely with respect to the X axis toward the direction of gravity. One end of the axial direction of the side portion 41b is continuous with one end of the X axis direction of the top portion 41a, and the other end of the axial direction of the side portion 41b is continuous with the end portion (upper end) of the axial direction of the lower column portion 42.

[0079] The top portion 41a and the side portion 41b can intersect at a prescribed angle. In the present embodiment, a bent portion 47 is formed at the intersection portion of the top portion 41a and the side portion 41b. As shown, when the intersection angle of the top portion 41a and the side portion 41b is θ7, 90° < θ7 < 180°. In the present embodiment, 140° < θ7 < 170°, but the range of θ7 is not limited thereto. Figure 2B

[0080] The side portion 41c extends obliquely with respect to the X axis toward the direction of gravity. One end of the axial direction of the side portion 41c is continuous with the other end of the X axis direction of the top portion 41a, and the other end of the axial direction of the side portion 41c is continuous with the end portion (upper end) of the axial direction of the lower column portion 43.

[0081] ​​The top 41a and the side 41c can intersect at a predetermined angle. In this embodiment, a bend 48 is formed at the intersection of the top 41a and the side 41c. Figure 2B As shown, when the intersection angle between the top 41a and the side 41c is set to θ8, it is 90° < θ8 < 180°. In this embodiment, it is 140° < θ8 < 170°, but the range of θ8 is not limited to this.

[0082] Furthermore, θ7 and θ8 are equal, but they can also be different. Additionally, the top 41a and side 41b can be smoothly curved. Similarly, the top 41a and side 41c can also be smoothly curved.

[0083] The lower column portion 42 and the lower column portion 43 have the same shape and are separated in the X-axis direction. The lower column portion 42 and the lower column portion 43 extend in the vertical direction (Z-axis direction) and have the same length. The lower column portion 42 and the lower column portion 43 are used to fix the lower main body portion 40 to the mounting platform (see reference). Figure 3 The mechanism at the corner of the mounting platform 9). Additionally, the lower column portion 42 and lower column portion 43 are mechanisms for adjusting the height of the lower beam portion 41 along the Z-axis. In this embodiment, the height of the lower column portion 42 is higher than the height of the lower beam portion 41 in the Z-axis direction, but these lengths can also be equal. Alternatively, the height of the lower column portion 42 can also be higher than the height of the lower beam portion 41. This allows for adjustment of the rigidity of the lower main body portion 40. The same applies to the lower column portion 43.

[0084] The axial end (upper end) of the lower column portion 42 is continuous with the side portion 41b. The axial end (upper end) of the lower column portion 43 is continuous with the side portion 41c. Furthermore, the lower column portion 42 is composed of a single column, but it may also be composed of multiple columns. Similarly, the lower column portion 43 is composed of a single column, but it may also be composed of multiple columns.

[0085] The lower main body 40 may have a lower fixing part 44 that connects the lower column part 42 and the lower column part 43. The lower fixing part 44 has a plate parallel to the horizontal plane, connecting the axial end (lower end) of the lower column part 42 and the axial end (lower end) of the lower column part 43. However, the structure of the lower fixing part 44 is not limited to... Figure 2B The structure shown. The lower main body 40 is fixed to the mounting platform (see reference) via the lower fixing part 44. Figure 3 The mounting platform 9). The lower fixing part 44 is an auxiliary structure for stably positioning the lower main body part 40 on the mounting platform. Alternatively, the lower fixing part 44 can be omitted from the lower main body part 40, and the lower column parts 42 and 43 can be directly positioned on the mounting platform.

[0086] The lower body 50 has an arch shape (arc shape, C shape or semi-circular shape) and bends or buckles into an arch shape (arc shape, C shape or semi-circular shape) in the direction opposite to the direction of gravity (i.e., the positive Z-axis direction).

[0087] The lower body portion 50 can have a lower beam portion 51, a lower column portion 52, and a lower column portion 53. The respective structures of the lower beam portion 51, the lower column portion 52, and the lower column portion 53 of the lower body portion 50 are the same as the respective structures of the lower beam portion 41, the lower column portion 42, and the lower column portion 43 of the lower body portion 40. Therefore, the above-described explanation regarding the lower beam portion 41, the lower column portion 42, and the lower column portion 43 also applies to the lower beam portion 51, the lower column portion 52, and the lower column portion 53. The detailed explanation of the respective structures of the lower beam portion 51, the lower column portion 52, and the lower column portion 53 is omitted except for the case where it is particularly required.

[0088] The lower beam portion 51 bridges between the pair of lower column portions 52 and 53. The lower beam portion 51 is arranged along the X axis in an orthogonal manner with respect to the upper body portion 20, and supports the upper body portion 20. The upper column portion 27 of the upper body portion 20 is directly or indirectly fixed to the central portion of the lower beam portion 51 in the Y axis direction. The upper column portion 27 can be fused to the lower beam portion 51. The lower beam portion 51 has an arch shape (arc shape, C shape, or semi-ring shape), and is curved or bent into an arch shape (arc shape, C shape, or semi-ring shape) toward the direction opposite to the direction of gravity (i.e., the positive direction of the Z axis).

[0089] The lower beam portion 51 can have a top portion 51a, a side portion 51b, and a side portion 51c. The respective structures of the top portion 51a, the side portion 51b, and the side portion 51c of the lower beam portion 51 are the same as the respective structures of the top portion 41a, the side portion 41b, and the side portion 41c of the lower beam portion 41. Therefore, the above-described explanation regarding the top portion 41a, the side portion 41b, and the side portion 41c also applies to the top portion 51a, the side portion 51b, and the side portion 51c. The detailed explanation of the respective structures of the top portion 51a, the side portion 51b, and the side portion 51c is omitted except for the case where it is particularly required.

[0090] The top portion 51a extends along the X axis, and is arranged in parallel with respect to the horizontal plane. However, the top portion 51a can also have a curved structure or a bent structure. For example, the top portion 51a can have an arch shape (arc shape, C shape, or semi-ring shape) that is curved or bent into an arch shape (arc shape, C shape, or semi-ring shape) toward the direction opposite to the direction of gravity (i.e., the positive direction of the Z axis).

[0091] The respective structures of the lower column portion 52 and the lower column portion 53 of the lower body portion 50 are the same as the respective structures of the lower column portion 42 and the lower column portion 43 of the lower body portion 40. Therefore, the above-described explanation regarding the lower column portion 42 and the lower column portion 43 also applies to the lower column portion 52 and the lower column portion 53. The detailed explanation of the respective structures of the lower column portion 52 and the lower column portion 53 is omitted.

[0092] The lower main body 50 may have a lower fixing part 54 connecting the lower column part 52 and the lower column part 53. The lower fixing part 54 has a plate parallel to the horizontal plane, connecting the axial end (lower end) of the lower column part 52 and the axial end (lower end) of the lower column part 53. However, the structure of the lower fixing part 54 is not limited to... Figure 2B The structure shown. The lower main body 50 is fixed to the mounting platform (see reference) via the lower fixing part 54. Figure 3 The mounting platform 9). The lower fixing part 54 is an auxiliary structure for stably positioning the lower main body part 50 on the mounting platform. Alternatively, the lower fixing part 54 can be omitted from the lower main body part 50, and the lower column parts 52 and 53 can be directly positioned on the mounting platform.

[0093] like Figure 1B As shown, the head 3 is fixed to the upper beam 21 by means of suspension from the upper beam 21. The head 3 is configured to be able to move along the Z-axis, for example, to move back and forth in the Z-axis direction along an axis extending in the vertical direction. However, the head 3 can be configured to be able to move three-dimensionally along each of the X-axis, Y-axis and Z-axis. The head 3 has a workpiece holding part 3a, a base 3b on which the workpiece holding part 3a is provided, and a drive part 3c for driving the base 3b.

[0094] The workpiece holding unit 3a acquires a workpiece from a first substrate containing a workpiece from a transport source, and mounts the workpiece at a predetermined position on a second substrate at a transport destination. In this embodiment, the workpiece holding unit 3a holds the workpiece by adhesion. However, the workpiece holding unit 3a can also attach the workpiece to itself by attraction or adsorption (e.g., vacuum adsorption or electrostatic adsorption). In this case, the workpiece holding unit 3a may also have a nozzle suitable for attraction or adsorption. Furthermore, if the workpiece itself is adhesive, the workpiece holding unit 3a can attach the workpiece to itself by utilizing the workpiece's adhesiveness.

[0095] The workpiece holding part 3a can be freely mounted and detached from the base 3b. Alternatively, the workpiece holding part 3a can be integrated with the base 3b. Furthermore, as a structure for holding multiple workpieces, the workpiece holding part 3a can have multiple protrusions 3a1. The multiple protrusions 3a1 each protrude downward (in the direction of gravity) from the lower surface of the workpiece holding part 3a.

[0096] The protrusion 3a1 is made of an adhesive material, for example, and can hold the workpiece disposed on the substrate by adhesion. The material of the protrusion 3a1 is not particularly limited, but can be, for example, a viscoelastic elastomer such as polydimethylsiloxane (PDMS), silicone compound, or polyether rubber.

[0097] Multiple protrusions 3a1 can be arranged in a matrix at predetermined intervals along the X and Y axes. The multiple protrusions 3a1 are adhered to multiple workpieces arranged in a matrix on a substrate. Alternatively, the multiple protrusions 3a1 can be arranged randomly.

[0098] The front end of the head 3 (at least a portion of the workpiece holding part 3a or the base 3b) may be located lower than the mounting surface 80 of the upper column part 25 of the upper main body 20 (the joint surface between the upper column part 25 and the lower beam part 41). Similarly, the front end of the head 3 (at least a portion of the workpiece holding part 3a or the base 3b) may also be located lower than the mounting surface 80 of the upper column part 27 of the upper main body 20 (the joint surface between the upper column part 27 and the lower beam part 51).

[0099] Alternatively, the front end of the head 3 (at least a portion of the workpiece holding part 3a or the base 3b) can be moved from a position above the mounting surface 80 of the upper column 25 (the joint surface between the upper column 25 and the lower beam 41) to a position below the mounting surface 80 of the upper column 25 by being driven by the drive part 3c. Similarly, the front end of the head 3 (at least a portion of the workpiece holding part 3a or the base 3b) can also be moved from a position above the mounting surface 80 of the upper column 27 (the joint surface between the upper column 27 and the lower beam 51) to a position below the mounting surface 80 of the upper column 27 by being driven by the drive part 3c.

[0100] like Figure 3 As shown, in this embodiment, the head 3 is fixed to a large frame 2 consisting of an upper main body 20, a lower main body 40, and a lower main body 50. The weight of the frame 2 is, for example, 800 kg to 1200 kg. On the other hand, the workpiece 10, which is the object to be transported by the head 3, is relatively small (the size of the workpiece 10 is, for example, on the order of several μm), and the head 3 (especially...) Figure 1B The workpiece holding part 3a and the base 3b) have a shape (size) sufficient to transport such workpiece 10, that is, smaller than the frame 2, and also smaller than... Figure 3 The human body shown is also small in shape. The head 3 (especially the workpiece holding part 3a and the base 3b) is small in itself, but by fixing the head 3 to this large frame 2, it is possible to prevent the frame 2 from deflecting and to prevent the installation position of the workpiece 10 based on the head 3 from deviating.

[0101] like Figure 2B As shown, the camera module 4 includes an image-capturing unit 4a and a drive unit 4b for driving the image-capturing unit 4a. The camera module 4 is positioned near the head 3. The image-capturing unit 4a is a dual-field-of-view camera, having a first lens 4a1 for capturing images above itself and a second lens 4a2 for capturing images below itself. However, the number of lenses in the image-capturing unit 4a is not particularly limited. The image-capturing unit 4a can be configured to move three-dimensionally along the X-axis, Y-axis, and Z-axis. The camera module 4 is fixed to the lower beams 41 and 51 via clamps 70. However, the camera module 4 can also be directly fixed to the lower beams 41 and 51.

[0102] In this embodiment, a portion of the drive unit 4b is fixed to the lower beams 41 and 51 via two clamps 70. Additionally, the camera unit 4a is fixed to the drive unit 4b by means of suspension from it. However, the structures of the camera unit 4a and the drive unit 4b are not limited to [specific configuration]. Figure 2B The structure shown.

[0103] The camera unit 4a moves back and forth in the X-axis direction, for example, along an axis extending along the X-axis direction. Additionally, the camera unit 4a moves back and forth in the Y-axis direction, for example, along an axis extending along the Y-axis direction. Furthermore, the camera unit 4a moves back and forth in the Z-axis direction, for example, along an axis extending along the Z-axis direction.

[0104] The camera unit 4a, at a desired position, uses the first lens 4a1 to capture images of the position of the front end of the head 3 (the position of the workpiece holding part 3a), etc. Additionally, the camera unit 4a, at a desired position, uses the second lens 4a2 to capture images of the mounting position of the workpiece 10 based on the head 3, and the state of the substrate on which the workpiece 10 is mounted. The image information obtained by the camera unit 4a is sent to the control unit (not shown) of the transport device 1. In this embodiment, based on the image information captured by the camera unit 4a, the position of the front end of the head 3 (the position of the workpiece holding part 3a) can be accurately aligned with the predetermined mounting position of the workpiece 10, and the workpiece 10 can be mounted in the desired predetermined mounting position using the head 3.

[0105] Next, refer to Figures 4A-9 The operation of the conveying device 1 will be explained below. Figure 4A The process shown is described in which the head 3 obtains the workpiece 10 from the first substrate 7 (the substrate of the transport source) on which the workpiece 10 is disposed, and installs the workpiece 10 at a predetermined position on the second substrate 8 (the substrate of the transport destination). Figure 4A As shown, a plurality of workpieces 10 are disposed on a first substrate 7. The first substrate 7 is, for example, disposed on a first stage 5 capable of free movement along each of the X and Y axes. In top view, the first substrate 7 is square, but it can also be circular, elliptical, rectangular, or other polygonal shapes. A second substrate 8 is, for example, disposed on a second stage 6 capable of free movement along each of the X and Y axes. In top view, the second substrate 8 is square, but it can also be circular, elliptical, rectangular, or other polygonal shapes. Figure 3 As shown, the first platform 5 and the second platform 6 are directly or indirectly disposed on the setting platform 9.

[0106] like Figure 4A As shown, firstly, the first stage 5, with the first substrate 7 placed on it, moves from a predetermined position (e.g., Figure 10to the lower side of the head 3. After the first substrate 7 is disposed directly below the head 3, the first stage 5 stops and waits at this position. Meanwhile, the second stage 6 moves from the prescribed position (for example, the position shown in FIG. 4) to a position separated from the head 3 (for example, a position adjacent to the first stage 5) and waits at this position. As shown in FIG. 5, the camera module 4 waits at a position separated from the first substrate 7 in the X-axis direction, for example. Figure 10 Figure 4B

[0107] Next, the camera module 4 advances in the arrow direction in FIG. 6 along the X-axis. Then, as shown in FIG. 7, the camera module 4 stops after disposing the imaging section 4a (the first lens 4al and the second lens 4a2) directly below the head 3, and imaging is performed by the imaging section 4a at this position. The imaging section 4a images the position of the tip of the head 3 (the position of the workpiece holding section 3a) and the like using the first lens 4al. In addition, the imaging section 4a images the position of the workpiece 10 mounted to the first substrate 7, the state of the first substrate 7 on which the workpiece 10 is mounted, and the like using the second lens 4a2. The camera module 4 transmits the imaging information obtained by the imaging of the imaging section 4a to the control section (omitted from the drawing) of the transfer device 1. Figure 4B Figure 5A Figure 5B

[0108] For example, in the case where the position of the tip of the head 3 (the position of the workpiece holding section 3a) is misaligned in the X-axis direction or the Y-axis direction with respect to the position of the workpiece 10 disposed on the first substrate 7, the control section transmits a control signal to the first stage 5 to adjust the position of the first stage 5 in the X-axis direction or the Y-axis direction. Thereby, it is possible to dispose the first substrate 7 disposed on the first stage 5 directly below the head 3. Alternatively, the control section can transmit a control signal to the head 3 to adjust the position of the head 3 in the X-axis direction or the Y-axis direction.

[0109] Next, the camera module 4 retreats in the arrow Al direction in FIG. 8 along the X-axis. Then, the camera module 4 waits at a position separated from the head 3 in the X-axis direction. Next, the head 3 descends in the arrow A2 direction in FIG. 9 along the Z-axis. Then, after the convex portion 3al of the workpiece holding section 3a comes into contact with the workpiece 10, the head 3 stops. At this time, the plurality of workpieces 10 are adhered to the plurality of convex portions 3al of the workpiece holding section 3a by adhesion. Thereby, the workpiece holding section 3a acquires the workpieces 10 from the first substrate 7. Figure 6 Figure 6 Next, the head 3 ascends in the arrow direction in FIG. 10 along the Z-axis, and waits at a position higher than the camera module 4, for example. Next, as shown in FIG. 11, the head 3 moves to a position separated from the camera module 4 in the X-axis direction (for example, a position adjacent to the second stage 6) and waits at this position.

[0110] Next, the head 3 ascends in the arrow direction in FIG. 10 along the Z-axis, and waits at a position higher than the camera module 4, for example. Next, as shown in FIG. 11, the head 3 moves to a position separated from the camera module 4 in the X-axis direction (for example, a position adjacent to the second stage 6) and waits at this position. Figure 7 Figure 8A ​​​​​​​As shown, the first stage 5 and the second stage 6 are configured to be moved at the same time or at different timings. More specifically, the second stage 6 is moved downward to the position directly below the head 3 while the second substrate 8 is placed on the second stage 6. After the second substrate 8 is positioned directly below the head 3, the second stage 6 is stopped and waits. Meanwhile, the first stage 5 is moved to a position separated from the head 3 (for example, a position adjacent to the second stage 6) while the first substrate 7 is placed on the first stage 5, and waits at the position.

[0111] Next, the camera module 4 is moved along the X-axis in the direction of the arrow in FIG. 6A. Then, as shown in FIG. 6B, the camera module 4 is stopped after the imaging section 4a (the first lens 4al and the second lens 4a2) is positioned directly below the head 3, and imaging is performed by the imaging section 4a at the position. Figure 8B Figure 8A Figure 8B As shown in FIG. 6B, the camera module 4 is stopped after the imaging section 4a (the first lens 4al and the second lens 4a2) is positioned directly below the head 3, and imaging is performed by the imaging section 4a at the position. The imaging section 4a images the tip of the head 3 (the workpiece holding section 3a) and the like using the first lens 4al. Meanwhile, the imaging section 4a images the state of the second substrate 8 and the mounting intended position of the workpiece 10 based on the head 3 using the second lens 4a2. The camera module 4 transmits the imaging information obtained by the imaging performed by the imaging section 4a to the control section (not shown) of the conveyance device 1.

[0112] For example, in a case where the position of the tip of the head 3 (the position of the workpiece holding section 3a) is misaligned in the X-axis direction or the Y-axis direction with respect to the mounting intended position of the workpiece 10 based on the head 3, the control section transmits a control signal to the second stage 6 to adjust the position of the second stage 6 in the X-axis direction or the Y-axis direction. Thus, it is possible to position the second substrate 8 positioned on the second stage 6 directly below the head 3. Alternatively, the control section can transmit a control signal to the head 3 to adjust the position of the head 3 in the X-axis direction or the Y-axis direction.

[0113] Next, the camera module 4 is moved along the X-axis in the direction of the arrow in FIG. 6A. Then, as shown in FIG. 6B, the camera module 4 is stopped after the imaging section 4a (the first lens 4al and the second lens 4a2) is positioned directly below the head 3, and imaging is performed by the imaging section 4a at the position. Figure 9 Figure 9 Next, the camera module 4 is moved along the X-axis in the direction of the arrow in FIG. 6A. Then, as shown in FIG. 6B, the camera module 4 is stopped after the imaging section 4a (the first lens 4al and the second lens 4a2) is positioned directly below the head 3, and imaging is performed by the imaging section 4a at the position.

[0114] Next, as shown in FIG. 6D, the head 3 is moved along the Z-axis in the direction of the arrow A4 in FIG. 6D. Then, the head 3 is stopped after the workpiece 10 attached to the convex section 3al of the workpiece holding section 3a comes into contact with the second substrate 8. At this time, the workpiece holding section 3a can apply a load to the second substrate 8 or apply heat. Thus, the workpiece 10 attached to the convex section 3al is adhered to the mounting intended position of the second substrate 8. Thus, the workpiece holding section 3a can mount the workpiece 10 to the second substrate 8. Figure 10 ​​​As shown, the head 3 is raised away from the second substrate 8 and waits at a position higher than the camera module 4. Further, after the mounting of the workpiece 10 to the second substrate 8 by the head 3, the mounting position of the workpiece 10 and the state of the second substrate 8 after the mounting of the workpiece 10 can be imaged by the camera module 4. As above, the head 3 can pick up the workpiece 10 from the first substrate 7 (substrate of the source of conveyance) on which the workpiece 10 is disposed and mount the workpiece 10 to a prescribed position of the second substrate 8 (substrate of the destination of conveyance).

[0115] As shown in FIG. 1, the head 3 is mounted to the upper body portion 20 of the frame 2. The head 3 is configured to pick up the workpiece 10 from the first substrate 7 (substrate of the source of conveyance) and mount the workpiece 10 to a prescribed position of the second substrate 8 (substrate of the destination of conveyance). Figure 1A As shown in FIG. 1, the head 3 is mounted to the upper body portion 20 of the frame 2. The head 3 is configured to pick up the workpiece 10 from the first substrate 7 (substrate of the source of conveyance) and mount the workpiece 10 to a prescribed position of the second substrate 8 (substrate of the destination of conveyance). Figure 2A As shown in FIG. 1, the head 3 is mounted to the upper body portion 20 of the frame 2. The head 3 is configured to pick up the workpiece 10 from the first substrate 7 (substrate of the source of conveyance) and mount the workpiece 10 to a prescribed position of the second substrate 8 (substrate of the destination of conveyance).

[0116] Further, the upper body portion 20 has a pair of upper column portions 25 and 27 and the upper beam portion 21 that bridges between the pair of upper column portions 25 and 27 and on which the head 3 is mounted. Further, one end of the extension direction of the upper beam portion 21 is continuous with the upper end portion of the upper column portion 25 and the other end of the extension direction of the upper beam portion 21 is continuous with the upper end portion of the upper column portion 27. Further, the upper beam portion 21 is curved in an arch shape toward a direction opposite to the direction of gravity. In this case, the degree of curvature of the upper beam portion 21 can be adjusted while adjusting the lengths of the axial directions of the upper column portions 25 and 27. Thus, the height of the upper body portion 20 along the direction of gravity can be optimized. At the same time, the upper beam portion 21 can be prevented from being deflected due to the self weight of the upper beam portion 21 or external loads with respect to the direction of gravity of the upper beam portion 21.

[0117] Further, the front end portion of the head 3 (workpiece holding portion 3a or base 3b) is positioned at a lower position than the placement surface of the upper column portion 25 (the joint surface of the upper column portion 25 and the lower body portion 40). In this case, the center of gravity of the conveyance device 1 can be positioned at a low position. Thus, the conveyance device 1 is balanced stably and the deviation of the mounting position of the conveyance object by the head 3 can be effectively prevented.

[0118] Further, the upper beam portion 21 has a first branch portion 22, a second branch portion 23 separated from the first branch portion 22 in the X-axis direction, and openings 35 and 36 passing through between the first branch portion 22 and the second branch portion 23 in the direction of gravity. By forming the openings 35 and 36 in the upper beam portion 21, it is possible to reduce the weight of the upper beam portion 21 and prevent deflection of the upper beam portion 21 due to its own weight.

[0119] Further, as shown in Figure 1A and Figure 2B The frame 2 has a lower body portion 40 that supports the upper body portion 20, and the lower body portion 40 is curved in an arch shape toward a direction opposite to the direction of gravity. In this case, the weight of the lower body portion 40 or an external load with respect to the direction of gravity of the lower body portion 40 (a load of the upper body portion 20, etc.) acts on the lower body portion 40 as a compressive stress that compresses the lower body portion 40 in its extending direction. As a result, the rigidity of the lower body portion 40 is increased, and the lower body portion 40 is less likely to be deflected, and it is possible to firmly support the upper body portion 20 with the lower body portion 40. As a result, the position of the upper body portion 20 in the direction of gravity is less likely to fluctuate due to deflection of the lower body portion 40, and it is possible to effectively prevent deviation of the mounting position of the carrying object based on the head portion 3.

[0120] Further, the lower body portion 40 has a pair of lower column portions 42 and 43, and a lower beam portion 41 that supports the upper body portion 20 and bridges between the pair of lower column portions 42 and 43, one end of the extending direction of the lower beam portion 41 is continuous with the upper end portion of the lower column portion 42, the other end of the extending direction of the lower beam portion 41 is continuous with the upper end portion of the lower column portion 43, and the lower beam portion 41 is curved in an arch shape toward a direction opposite to the direction of gravity. In this case, it is possible to adjust the degree of curvature of the lower beam portion 41 while adjusting the lengths of the axial directions of the lower column portions 42 and 43. As a result, it is possible to optimize the height of the lower body portion 40 in the direction of gravity. At the same time, it is possible to prevent deflection of the lower beam portion 41 due to its own weight or an external load with respect to the direction of gravity of the lower beam portion 41. Further, it is possible to adjust the height of the entire frame 2 in the direction of gravity according to the lengths of the axial directions of the lower column portions 42 and 43.

[0121] Further, the lower beam portion 41 is disposed orthogonally with respect to the upper body portion 20. In this case, it is possible to support the upper body portion 20 with the lower beam portion 41 in good balance, and it is possible to effectively prevent deviation of the mounting position of the carrying object based on the head portion 3.

[0122] In addition, in recent years, with the progress in the miniaturization of the object to be carried and the further demand for high accuracy in the mounting accuracy of the object to be carried, there is a demand for improving the image detection system based on the camera module 4. In the case where the head 3 or the camera module 4 is fixed to the frame 2 without taking any measures, a deflection occurs in the frame 2 (particularly, the fixing position of the camera module 4) due to the self-weight of the frame 2 or an external load (a load of the head 3 and the camera module 4, etc.) in the direction of gravity with respect to the frame 2, and this deflection can cause an error in the imaging information (for example, the imaging position in the horizontal direction) acquired by the camera module 4. Further, this error becomes a main cause of deviation in the mounting position of the object to be carried based on the head 3. However, in the present embodiment, as described above, the upper body portion 20 or the lower body portion 40 is less likely to be deflected, and it is possible to prevent an error in the imaging information acquired by the camera module 4 due to the deflection of the upper body portion 20 or the lower body portion 40. As a result, it is possible to prevent deviation in the mounting position of the object to be carried based on the head 3.

[0123] Further, the present application is not limited to the above-described embodiments, and various changes can be made within the scope of the present application. For example, Figures 4A-10 In the present embodiment, as shown in FIG. 1, the position of the head 3 in the horizontal direction is fixed, and on the other hand, the first stage 5 on which the first substrate 7 is placed and the second stage 6 on which the second substrate 8 is placed are moved in the horizontal direction toward the lower side of the head 3. However, it is also possible that the positions of the first stage 5 and the second stage 6 in the horizontal direction are fixed, and the head 3 is moved in the horizontal direction toward the positions of the first stage 5 (the first substrate 7) and the second stage 6 (the second substrate 8).

[0124] As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 11 As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 2A As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 2B As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2).

[0125] As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 5A , Figure 5B , Figure 8A and Figure 8B As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 4A As shown in FIG. 1, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (a position other than the position directly below the head 3). For example, the camera module 4 can be disposed in a position separated from the head 3 in the X-axis direction (for example, as shown in FIG. 2). Figure 4BAs shown, the camera module 4 can capture images of the lifting and lowering of the head 3, and the forward or backward movement of the first platform 5 and the second platform 6, located at a position other than directly below the head 3. In this case, the first lens 4a1 and the second lens 4a2, which are capable of capturing images with a wide field of view (wide field of view lens), can be constructed using lenses.

[0126] In the above embodiment, the number of substrates (first substrate 7) of the transport source is one, but the number of substrates of the transport source can also be multiple. In this case, multiple stages (first stages 5) for mounting the substrates of the transport source can be prepared according to the number of substrates of the transport source.

[0127] like Figure 1A As shown, the upper main body 20 is bent into an arch shape as a whole in the direction opposite to the direction of gravity. However, only a portion of the upper main body 20 may be bent into an arch shape in the direction opposite to the direction of gravity. The lower main body 40 is the same.

[0128] Explanation of symbols

[0129] 1…Transportation device

[0130] 2…Framework

[0131] 3…head

[0132] 3a…Workpiece holding part

[0133] 3b…matrix

[0134] 3C…Driver Department

[0135] 4…Camera Module

[0136] 4a…Camera Department

[0137] 4b…Drive Section

[0138] 5…First Platform

[0139] 6…Second Platform

[0140] 7…First substrate

[0141] 8…Second substrate

[0142] 9…Setup Platform

[0143] 10…workpiece

[0144] 20… Upper Main Body

[0145] 21… Upper beam section

[0146] 22…First Branch

[0147] 22a…top

[0148] 22b, 22c … side portion

[0149] 23 … second branch portion

[0150] 23a … top portion

[0151] 23b, 23c … side portion

[0152] 24 … head fixing portion

[0153] 25, 27 … upper column portion

[0154] 26a, 26b, 28a, 28b … column body

[0155] 29, 30 … upper fixing portion

[0156] 31-34 … curved portion (bend portion)

[0157] 35, 36 … opening portion

[0158] 40 … lower main body portion

[0159] 41 … lower beam portion

[0160] 41a … top portion

[0161] 41b, 41c … side portion

[0162] 42, 43 … lower column portion

[0163] 44 … lower fixing portion

[0164] 45-48 … curved portion

[0165] 50 … lower main body portion

[0166] 51 … lower beam portion

[0167] 51a … top portion

[0168] 51b, 51c … side portion

[0169] 52, 53 … lower column portion

[0170] 54 … lower fixing portion

[0171] 70 … clamp

Claims

1. A carrying device, wherein having: a frame; and a head fixed to the frame and carrying a carrying object, the frame has an upper body portion to which the head is fixed and which is curved in an arch shape toward a direction opposite to a direction of gravity.

2. The carrying device according to claim 1, wherein the upper body portion has a pair of upper column portions and an upper beam portion to which the head is fixed and which bridges between the pair of upper column portions, one end of an extension direction of the upper beam portion is continuous with an end portion of an axial direction of one of the upper column portions, the other end of the extension direction of the upper beam portion is continuous with an end portion of an axial direction of the other of the upper column portions, the upper beam portion is curved in an arch shape toward a direction opposite to the direction of gravity.

3. The carrying device according to claim 2, wherein a front end portion of the head is located at a position lower than a setting surface of the upper column portion.

4. The carrying device according to any one of claims 1 to 3, wherein the upper beam portion has a first branch portion, a second branch portion separated from the first branch portion in a direction perpendicular to the direction of gravity, and an opening portion through between the first branch portion and the second branch portion along the direction of gravity.

5. The carrying device according to any one of claims 1 to 3, wherein the frame has a lower body portion that supports the upper body portion, the lower body portion is curved in an arch shape toward a direction opposite to the direction of gravity.

6. The carrying device according to claim 5, wherein the lower body portion has a pair of lower column portions and a lower beam portion that supports the upper body portion and bridges between the pair of lower column portions, one end of an extension direction of the lower beam portion is continuous with an end portion of an axial direction of one of the lower column portions, the other end of the extension direction of the lower beam portion is continuous with an end portion of an axial direction of the other of the lower column portions, the lower beam portion is curved in an arch shape toward a direction opposite to the direction of gravity.

7. The carrying device according to claim 6, wherein the lower beam portion is configured to be orthogonal with respect to the upper body portion.

8. The carrying device according to claim 6, wherein a camera module including an imaging portion and a driving portion is fixed to the lower beam portion so as to be movable three-dimensionally.

9. The carrying device according to claim 8, wherein the camera module images a mounting position of the carrying object based on the head and a position of a front end portion of the head.

Images