Magnetic polishing device based on two-dimensional vibration assistance and polishing method
By using a two-dimensional vibration-assisted mechanism and automated adjustment of magnetic pole distance, the problems of uneven polishing and low efficiency of magnetic grinding devices on complex curved surfaces are solved, achieving efficient and uniform polishing and processing of workpiece surfaces.
Patent Information
- Application Number
- CN202511154074.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-18
- Publication Date
- 2025-11-11
AI Technical Summary
Existing magnetic polishing devices suffer from uneven polishing and low processing efficiency when dealing with complex curved surfaces. In particular, the single-axis vibration mode is difficult to cover all areas of the workpiece surface, and manually adjusting the magnetic pole distance is cumbersome and has limited accuracy.
A two-dimensional vibration-assisted mechanism is adopted, which generates an elliptical vibration trajectory through an eccentric shaft. Combined with a magnetic pole distance adjustment mechanism and a PLC control system, the magnetic pole distance and vibration frequency are automatically adjusted. With the notch design of the magnetic pole head and the non-bonded magnetic abrasive, a dense cross-processing path is formed.
It significantly improves the uniformity of workpiece surface polishing, increases processing efficiency and ease of operation, reduces manual intervention, and ensures the stability and efficiency of the processing.
Smart Images

Figure CN120921179A_ABST
Abstract
Description
[Technical Field]
[0001] This invention belongs to the field of machining and surface treatment technology, specifically a magnetic polishing device and polishing method based on two-dimensional vibration assistance. [Background Technology]
[0002] In the field of precision machining, vibration-assisted polishing and magnetic abrasive polishing are two important surface treatment methods. Traditional vibration-assisted polishing methods often use uniaxial reciprocating vibration, which can easily lead to deeper scratches or uneven grinding on the workpiece surface in practical applications, thus affecting the polishing quality. Meanwhile, magnetic abrasive polishing technology, with its ability to effectively handle complex curved surfaces, has been widely used in industrial production. However, there is still room for improvement in magnetic abrasive polishing technology in terms of improving surface quality and processing efficiency.
[0003] Most existing magnetic polishing devices rely on single-axis vibration assistance, which has limitations in achieving uniform polishing results. Specifically, the motion mode of single-axis vibration is relatively simple and cannot fully cover all areas of the workpiece surface, especially when processing workpieces with complex geometries, easily leading to under-polishing or over-polishing in localized areas. Furthermore, when adapting to the processing requirements of workpieces of different thicknesses, traditional devices often require manual adjustment of the distance between the magnetic poles and the workpiece, which is cumbersome and has limited precision, thus affecting overall processing efficiency.
[0004] Therefore, how to improve polishing uniformity, increase processing efficiency, and enhance the automation level of the device by optimizing vibration modes and device structure design has become an urgent technical problem to be solved. [Summary of the Invention]
[0005] One of the main objectives of this invention is to provide a magnetic polishing device based on two-dimensional vibration assistance, which improves the uniformity of workpiece surface polishing and increases processing efficiency by optimizing the vibration mode and device structure design.
[0006] This invention achieves the above objectives through the following technical solution: a magnetic polishing device based on two-dimensional vibration assistance, comprising a two-dimensional vibration assistance mechanism, a magnetic grinding mechanism, a magnetic pole distance adjustment mechanism, a sample positioning mechanism, and a PLC control system; the two-dimensional vibration assistance mechanism drives an eccentric shaft to rotate via a driving component to generate an elliptical vibration trajectory; the magnetic grinding mechanism includes a magnetic pole head and magnetic abrasive, the magnetic pole head adopting a notch-type design and having multiple slots; the magnetic pole distance adjustment mechanism includes a Z-axis drive module for adjusting the Z-axis position of the magnetic pole head, and a Z-axis lifting platform for adjusting the Z-axis position of the workpiece. The system includes a displacement sensor for detecting the distance between the magnetic pole head and the workpiece, and a pressure sensor for detecting the pressure exerted by the magnetic pole head on the workpiece. The specimen positioning mechanism comprises an XY transfer module that drives the workpiece to perform high-frequency reciprocating motion in the XY direction, a support platform located at the movable end of the XY transfer module, and a clamping device and a limiting device for fixing the workpiece on the support platform. The PLC control system is electrically connected to the Z-axis drive module, the Z-axis lifting platform, the XY transfer module, the drive unit, the displacement sensor, and the pressure sensor to control operating parameters.
[0007] Furthermore, the two-dimensional vibration auxiliary mechanism includes a support base, a drive component fixed on the support base, an eccentric shaft driven by the drive component to rotate around the Z-axis, a bearing platform connected to the top of the eccentric shaft, and a floating bracket disposed on the support base and supporting the bearing platform.
[0008] Furthermore, the floating support includes two sets of support assemblies arranged opposite each other along the X direction. Each support assembly includes a supporting base plate and a pair of elastic buffer columns arranged along the Y direction on the supporting base plate. The floating support forms a total of four elastic buffer columns to support the bottom of the bearing platform.
[0009] Furthermore, the eccentricity of the eccentric shaft can be adjusted within the range of 0.1 mm to 0.9 mm.
[0010] Furthermore, the PLC control system includes a main control unit, an input / output module, and a display interface; the main control unit receives sensor data signals and outputs control commands through a PID algorithm; the input / output module is connected to the Z-axis drive module, the Z-axis lifting platform, the XY transfer module, the drive component, the displacement sensor, and the pressure sensor; and the display interface is used to set and monitor operating parameters.
[0011] Furthermore, the bottom of the support base plate of the two-dimensional vibration auxiliary mechanism is equipped with a shock-absorbing pad to reduce the impact of vibration transmission to the external environment.
[0012] Another object of the present invention is to provide a magnetic polishing method based on two-dimensional vibration assistance, characterized in that it is implemented based on the magnetic polishing device described above, and includes the following steps:
[0013] S1. Place the workpiece on the bearing platform of the test piece positioning mechanism and fix it with the clamping device;
[0014] S2. Start the two-dimensional vibration auxiliary mechanism, and the driving component drives the eccentric shaft to rotate to generate an elliptical vibration trajectory.
[0015] S3. The magnetic grinding mechanism starts working. The magnetic field generated by the magnetic pole head causes the magnetic abrasive to form a flexible magnetic brush and grind the surface of the workpiece.
[0016] S4. The magnetic pole distance adjustment mechanism adjusts the distance between the magnetic pole head and the workpiece in real time through a servo motor based on the feedback data from the displacement sensor and pressure sensor.
[0017] S5. The specimen positioning mechanism starts the rapid reciprocating vibration function, and the bearing platform vibrates at high frequency in the X direction and is superimposed with the elliptical vibration of the two-dimensional vibration auxiliary mechanism.
[0018] S6, PLC control system optimizes vibration frequency, magnetic pole distance and stage moving speed according to preset parameters;
[0019] S7. After processing is complete, close all mechanisms and remove the workpiece.
[0020] Compared with existing technologies, the technical advantages of this invention's magnetic polishing device and method based on two-dimensional vibration assistance are as follows: By introducing a two-dimensional vibration assistance mechanism, the polishing uniformity of the workpiece surface is significantly improved. Specifically, the elliptical vibration trajectory generated by the two-dimensional vibration assistance mechanism covers a wider area of the workpiece surface, avoiding the problem of insufficient or excessive polishing in certain areas caused by uniaxial vibration. The magnetic pole distance adjustment mechanism achieves automatic adjustment through a servo motor and linear guide rail, adapting to the processing needs of workpieces of different thicknesses, reducing manual intervention, and improving operational convenience and accuracy. The rapid reciprocating vibration function of the test piece positioning mechanism works in conjunction with the two-dimensional vibration assistance mechanism to form a dense cross-processing path, further enhancing the polishing effect. The dynamic feedback module of the PLC control system adjusts the operating parameters in real time to ensure the stability and reliability of the entire processing process. In addition, the notched design and multi-groove notch of the magnetic pole head optimize the grinding efficiency when the magnetic brush rotates, while the non-bonded design of the magnetic abrasive enhances the uniformity of the abrasive particle distribution, thereby significantly improving processing efficiency and surface quality. [Attached Image Description]
[0021] Figure 1 This is a schematic diagram of the structure of an embodiment of the present invention;
[0022] Figure 2This is a schematic diagram of the structure of the two-dimensional vibration auxiliary mechanism in an embodiment of the present invention;
[0023] Figure 3 This is an exploded structural diagram of the two-dimensional vibration auxiliary mechanism in an embodiment of the present invention;
[0024] Figure 4 This is a schematic diagram of the structure of the magnetic pole head in an embodiment of the present invention.
Detailed Implementation Methods
[0025] Example 1:
[0026] Please refer to Figures 1-3 This embodiment is a magnetic polishing device 100 based on two-dimensional vibration assistance, which includes a worktable 1, an XY transfer module 2 disposed on the worktable 1, a Z-axis lifting platform 3 disposed at the movable end of the XY transfer module 2, a two-dimensional vibration assistance mechanism 4 disposed on the Z-axis lifting platform 3, a bracket 5 disposed on the worktable 1, a Z-axis drive module 6 fixed on the bracket 5, a magnetic polishing mechanism 7 driven by the Z-axis drive module 6 to move up and down, and a PLC control system 8.
[0027] The two-dimensional vibration auxiliary mechanism 4 includes a support base 41, a driving component 42 fixed on the support base 41, an eccentric shaft 43 driven by the driving component 42 to rotate around the Z-axis, a bearing platform 44 connected to the top of the eccentric shaft 43, and a floating bracket 45 disposed on the support base 41 and supporting the bearing platform 44. The floating bracket 45 includes two sets of bracket assemblies 451 arranged opposite each other along the X-direction. Each bracket assembly 451 includes a supporting base plate 4511 and a pair of elastic buffer columns 4512 arranged along the Y-direction. The floating bracket 45 forms four elastic buffer columns 4512 supporting the bottom of the bearing platform 44, specifically supporting the four corner areas. Under the drive of the eccentric shaft 43 and the floating support of the elastic buffer columns 4512, the bearing platform 44 achieves two-dimensional vibration. The bearing platform 44 is used to place the workpiece to be processed. When the drive component 42 drives the eccentric shaft 43 to rotate, the eccentric shaft 43 causes the bearing platform 44 to oscillate periodically. At the same time, the elastic buffer column 4512 provides floating support for the bearing platform 44 through its own elastic properties, thereby realizing two-dimensional vibration of the bearing platform 44 in the X and Y directions. This design effectively reduces directional coupling interference in the energy transfer process of biaxial vibration and improves the accuracy and stability of the vibration trajectory.
[0028] Bearings 46 are installed at both ends of the eccentric shaft 43. The function of the bearings 46 is to reduce the friction during the rotation of the eccentric shaft 43, thereby ensuring smooth rotation. The eccentricity of the eccentric shaft 43 can be adjusted within the range of 0.1mm to 0.9mm. This adjustment can be made manually or electrically, depending on the actual processing requirements. The support base plate 4511 adopts a shock-absorbing pad structure to absorb vibration energy and reduce the transmission of vibration to the external environment. The two-dimensional vibration auxiliary mechanism 4, in conjunction with the Z-axis lifting platform 3, generates an elliptical vibration trajectory through the rotation of the eccentric shaft 43. This trajectory covers a wider area of the workpiece surface, avoiding the problems of insufficient or excessive polishing caused by single-axis vibration.
[0029] The support platform 44 is equipped with a clamping device and a limiting device (not shown in the figure) for fixing the workpiece. The clamping device and the limiting device are configured according to the contour shape of the workpiece, and their structure is not limited in this embodiment. The clamping device is used to fix the workpiece, and the limiting device prevents the workpiece from shifting during vibration.
[0030] The XY transfer module 2, the Z-axis lifting platform 3, and the clamping and limiting devices on the bearing platform 44 together constitute the test piece positioning mechanism. The workpiece is rapidly reciprocated in the Z-axis direction by a servo motor and a linear slide rail. Combined with the two-dimensional vibration auxiliary mechanism 4, the polishing effect is further improved.
[0031] The XY transfer module 2 enables high-frequency reciprocating vibration of the workpiece in the XY direction. This rapid reciprocating vibration function, combined with the elliptical vibration generated by the two-dimensional vibration auxiliary mechanism 4, forms a dense cross-processing path, further improving the polishing effect. The moving speed and vibration frequency of the carrying platform 44 can be adjusted by the PLC control system 8 to adapt to workpieces of different materials and shapes.
[0032] The Z-axis lifting platform 3 and the Z-axis drive module 6 constitute a magnetic pole distance adjustment mechanism, realizing coordinated control of the two Z-axis axes (Z+ and Z-). The Z-axis lifting platform 3 is used to drive the bearing platform 44 for precise control in the Z-axis direction; the Z-axis drive module 6 is used to realize precise control of the magnetic grinding mechanism 7 in the Z+ axis direction. The magnetic pole distance adjustment mechanism also includes a displacement sensor and a pressure sensor. The displacement sensor is used to monitor the actual distance between the magnetic pole head 71 in the magnetic field generation module 7 and the workpiece, and the pressure sensor is used to detect the pressure applied by the magnetic brush to the workpiece surface. The displacement sensor and the pressure sensor transmit the collected data to the PLC control system 8. The PLC control system 8 adjusts the operating status of the Z-axis lifting platform 3 and the Z-axis drive module 6 in real time according to the feedback data, thereby ensuring that the distance between the magnetic pole head 71 and the workpiece is always kept within the optimal range.
[0033] The magnetic field generating module 7 is located directly above the support platform 44. It generates a uniformly distributed magnetic field through a solenoid, providing the magnetic field environment required for the magnetorheological effect of the polishing slurry. The magnetic pole head 71 in the magnetic field generating module 7 has the following structure: Figure 4 As shown, the magnetic pole head 71 is sequentially arranged with a first disk portion 711, a second disk portion 712, and a third disk portion 713 along the axial direction. A circular slot 7131 is provided in the central region of the third disk portion 713, and several radially extending strip-shaped slots 7132 are arranged around the circular slot 7131. The angle and depth of the strip-shaped slots 7132 are optimized to enhance the grinding efficiency during magnetic brush rotation. The multi-slot notch design of the magnetic pole head 71 effectively improves polishing efficiency.
[0034] The nozzle of the magnetic field generation module 7 sprays magnetic abrasive, which fills the gap between the magnetic pole head 71 and the workpiece. Under the action of the magnetic field, it forms a flexible magnetic brush, which can uniformly grind the surface of the workpiece. The magnetic abrasive is made of a mixture of steel grit and silicon carbide, and its non-bonded design makes the abrasive particles more evenly distributed, thereby improving the polishing effect.
[0035] The PLC control system 8, as the core control unit of the entire device, mainly consists of a main control unit 81, an input / output module 82, and a display interface 83. The main control unit 81 receives data signals from displacement sensors, pressure sensors, and other sensors, and outputs control commands after calculation using a PID algorithm. The input / output module 82 connects to the XY transfer module 2, the Z-axis lifting platform 3, the Z-axis drive module 6, the drive component 42, the displacement sensor, and the pressure sensor, enabling data acquisition and command execution. The display interface 83 is used to set and monitor operating parameters, including vibration frequency, magnetic pole distance, and platform movement speed. The PLC control system 8 adjusts the operating status of each moving component in real time through a dynamic feedback module, ensuring the stability and reliability of the entire processing process.
[0036] In actual operation, the workpiece is first placed on the bearing platform 44 of the test piece positioning mechanism, fixed by the clamping device, and initially positioned using the limiting device. Then, the two-dimensional vibration auxiliary mechanism 4 is activated, and the driving component 42 drives the eccentric shaft 43 to rotate, generating an elliptical vibration trajectory. The vibration frequency and amplitude are preset according to the workpiece material and surface roughness requirements. When the magnetic grinding mechanism 7 starts working, the magnetic field generated by the magnetic pole head 71 causes the magnetic abrasive to form a flexible magnetic brush. The magnetic brush grinds the workpiece surface under the rotation of the magnetic pole head 71. Based on feedback data from the displacement and pressure sensors, the magnetic pole distance adjustment mechanism adjusts the distance between the magnetic pole head 71 and the workpiece in real time via the Z-axis lifting platform 3 and the Z-axis drive module 6 to ensure the grinding pressure remains within the optimal range. The test piece positioning mechanism activates the rapid reciprocating vibration function, and the bearing platform 44 vibrates at high frequency in the XY direction, superimposing with the elliptical vibration of the two-dimensional vibration auxiliary mechanism 4 to form a dense cross-processing path. The PLC control system 8 optimizes the vibration frequency, magnetic pole distance, and stage movement speed according to preset parameters to achieve the best polishing effect. After processing is completed, shut down all mechanisms and remove the workpiece for surface quality inspection.
[0037] In the above embodiments, the two-dimensional vibration auxiliary mechanism 4 generates an elliptical vibration trajectory through the synergistic action of the eccentric shaft 43 and the driving component 42. The magnetic grinding mechanism 7 achieves workpiece surface grinding through the cooperation of the magnetic pole head 71 and magnetic abrasive. The magnetic pole distance adjustment mechanism adjusts the distance between the magnetic pole head 71 and the workpiece through the precise control of the Z-axis lifting platform 3 and the Z-axis drive module 6. The test piece positioning mechanism works in conjunction with the two-dimensional vibration auxiliary mechanism 4 through the rapid reciprocating vibration function of the bearing platform 44. The PLC control system 8 adjusts the operating status of each moving component in real time through the dynamic feedback module. The connection and positional relationships between the components are clear, and their mutual cooperation is close, thereby ensuring the efficient operation of the entire device and the improvement of the polishing effect.
[0038] To enable those skilled in the art to fully understand and implement this invention, the specific implementation principle of this invention will be further explained below in conjunction with a specific application scenario.
[0039] In actual operation, the workpiece to be processed is first placed on the bearing platform 44 of the test piece positioning mechanism and fixed by the clamping device. The limiting device ensures that the workpiece will not shift during vibration, thus completing the initial positioning. Then, the two-dimensional vibration auxiliary mechanism 4 is activated, and the driving component 42 drives the eccentric shaft 43 to rotate. The rotational motion of the eccentric shaft 43 is converted into a smooth elliptical vibration trajectory through the bearings 46 installed at both ends. This elliptical vibration trajectory is determined by the eccentricity of the eccentric shaft 43, which can be adjusted within the range of 0.1mm to 0.9mm to adapt to workpieces with different materials and surface roughness requirements. The shock-absorbing pads at the bottom of the floating support 45 effectively absorb vibration energy and reduce the transmission of vibration to the external environment, thereby ensuring the stability of the device operation.
[0040] When the magnetic abrasive mechanism 7 starts working, the magnetic field generated by the magnetic pole head 71 acts on the magnetic abrasive filling the space between the magnetic pole head 71 and the workpiece, forming a flexible magnetic brush. The magnetic pole head 71 is designed with a notch-type structure, and the multiple slots at the notch are optimized to enhance the abrasive brush's grinding efficiency as the magnetic pole head 71 rotates. The magnetic abrasive is a mixture of steel grit and silicon carbide, and its non-bonded design ensures a more uniform distribution of abrasive particles, thereby improving the polishing effect. The support structure of the magnetic pole head 71 includes a magnetic pole steel sleeve and a plastic sleeve. The plastic sleeve is used to adhere the polishing pad, further optimizing the contact characteristics during the polishing process.
[0041] The magnetic pole distance adjustment mechanism precisely adjusts the distance between the magnetic pole head 71 and the workpiece via the Z-axis lifting platform 3 and the Z-axis drive module 6. A displacement sensor monitors the actual distance between the magnetic pole head 71 and the workpiece in real time, while a pressure sensor detects the pressure applied to the workpiece surface by the magnetic brush. This data is transmitted to the PLC control system 8. Based on the feedback data, the PLC control system 8 calculates and outputs control commands using a PID algorithm, adjusting the operating state of the servo motor 7 in real time to ensure that the distance between the magnetic pole head 71 and the workpiece is always maintained within the optimal range.
[0042] The sample positioning mechanism drives the support platform 44 to move along the XY direction via the XY transfer module 2, achieving high-frequency reciprocating vibration of the workpiece in the XY direction. This rapid reciprocating vibration function, combined with the elliptical vibration generated by the two-dimensional vibration auxiliary mechanism 4, forms a dense cross-processing path, further improving the polishing effect. The moving speed and vibration frequency of the support platform 44 can be adjusted by the PLC control system 8 to adapt to workpieces of different materials and shapes.
[0043] Throughout the processing, the PLC control system 8 serves as the core control unit, receiving data signals from displacement sensors, pressure sensors, and other sensors, and adjusting the operating status of each moving component in real time through a dynamic feedback module. The display interface is used to set and monitor operating parameters, including vibration frequency, magnetic pole distance, and stage movement speed. By optimizing the vibration frequency, magnetic pole distance, and stage movement speed using preset parameters, the best polishing effect is achieved.
[0044] After processing, all mechanisms are shut down, and the workpiece is removed for surface quality inspection. Through these steps, the device achieves efficient polishing of the workpiece surface, significantly improving polishing uniformity and increasing processing efficiency. Throughout the operation of the entire device, the connections and positions of the various components are clearly defined and work closely together, ensuring efficient operation and improved polishing results.
[0045] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this invention, and these all fall within the protection scope of this invention.
Claims
1. A magnetic polishing device based on two-dimensional vibration assistance, characterized in that: It includes a two-dimensional vibration auxiliary mechanism, a magnetic abrasive mechanism, a magnetic pole distance adjustment mechanism, a specimen positioning mechanism, and a PLC control system. The two-dimensional vibration auxiliary mechanism drives an eccentric shaft to rotate and generate an elliptical vibration trajectory via a drive component. The magnetic abrasive mechanism includes a magnetic pole head and magnetic abrasive, with the magnetic pole head having a notch design and multiple slots. The magnetic pole distance adjustment mechanism includes a Z-axis drive module for adjusting the Z-axis position of the magnetic pole head, a Z-axis lifting platform for adjusting the Z-axis position of the workpiece, a displacement sensor for detecting the distance between the magnetic pole head and the workpiece, and a pressure sensor for detecting the pressure exerted by the magnetic pole head on the workpiece. The specimen positioning mechanism includes an XY transfer module for driving the workpiece to perform high-frequency reciprocating motion in the XY direction, a bearing platform located at the movable end of the XY transfer module, and a clamping device and a limiting device for fixing the workpiece on the bearing platform. The PLC control system is electrically connected to the Z-axis drive module, the Z-axis lifting platform, the XY transfer module, the drive component, the displacement sensor, and the pressure sensor to control the operating parameters.
2. The magnetic polishing apparatus as described in claim 1, characterized in that: The two-dimensional vibration auxiliary mechanism includes a support base, a drive component fixed on the support base, an eccentric shaft driven by the drive component to rotate around the Z-axis, a bearing platform connected to the top of the eccentric shaft, and a floating bracket disposed on the support base and supporting the bearing platform.
3. The magnetic polishing apparatus as described in claim 2, characterized in that: The floating support includes two sets of support assemblies arranged opposite each other along the X direction. Each support assembly includes a supporting base plate and a pair of elastic buffer columns arranged along the Y direction on the supporting base plate. The floating support forms a total of four elastic buffer columns to support the bottom of the bearing platform.
4. The magnetic polishing apparatus as described in claim 2, characterized in that: The eccentricity of the eccentric shaft can be adjusted within the range of 0.1 mm to 0.9 mm.
5. The magnetic polishing apparatus as described in claim 1, characterized in that: The PLC control system includes a main control unit, an input / output module, and a display interface. The main control unit receives sensor data signals and outputs control commands through a PID algorithm. The input / output module is connected to the Z-axis drive module, the Z-axis lifting platform, the XY transfer module, the drive components, the displacement sensor, and the pressure sensor. The display interface is used to set and monitor operating parameters.
6. The magnetic polishing apparatus as described in claim 3, characterized in that: The bottom of the support base plate of the two-dimensional vibration auxiliary mechanism is equipped with a shock-absorbing pad to reduce the impact of vibration transmission to the external environment.
7. A magnetic polishing method based on two-dimensional vibration assistance, characterized in that: Based on the magnetic polishing apparatus as described in any one of claims 1 to 9, the process includes the following steps: S1. Place the workpiece on the bearing platform of the test piece positioning mechanism and fix it with the clamping device; S2. Start the two-dimensional vibration auxiliary mechanism, and the driving component drives the eccentric shaft to rotate to generate an elliptical vibration trajectory. S3. The magnetic grinding mechanism starts working. The magnetic field generated by the magnetic pole head causes the magnetic abrasive to form a flexible magnetic brush and grind the surface of the workpiece. S4. The magnetic pole distance adjustment mechanism adjusts the distance between the magnetic pole head and the workpiece in real time through a servo motor based on the feedback data from the displacement sensor and pressure sensor. S5. The specimen positioning mechanism starts the rapid reciprocating vibration function, and the bearing platform vibrates at high frequency in the X direction and is superimposed with the elliptical vibration of the two-dimensional vibration auxiliary mechanism. S6, PLC control system optimizes vibration frequency, magnetic pole distance and stage moving speed according to preset parameters; S7. After processing is complete, close all mechanisms and remove the workpiece.