Vacuum pump stacking frame and vacuum pump system

Abstract

The invention provides a vacuum pump stacking frame and a vacuum pump system. The vacuum pump stacking frame comprises a bottom plate assembly and a supporting assembly, the bottom plate assembly comprises at least two bottom plates, the bottom plates are used for providing support for vacuum pumps in the vertical direction, and the supporting assembly extends in the vertical direction to provide support for the vacuum pumps in the circumferential direction; the at least two bottom plates are arranged at intervals in the vertical direction and connected to the supporting assembly, and at least one bottom plate can move in the vertical direction. According to the method, the space between every two adjacent bottom plates can be adjusted by adjusting the positions of the bottom plates in the height direction of the vacuum pump stacking frame, so that the vacuum pump stacking frame adapts to installation and stacking of vacuum pumps of different sizes and specifications, the applicability of the vacuum pump stacking frame is improved, and the cost for manufacturing a new vacuum pump stacking frame is saved; and the manufacturing cost of the vacuum pump system is saved.

Description

Technical Field

[0001] This invention belongs to the field of vacuum pump equipment technology, specifically relating to a vacuum pump stacking rack and a vacuum pump system. Background Technology

[0002] In recent years, vacuum pump systems have been widely used in the semiconductor, chip, and photovoltaic fields. Vacuum pump systems have the advantages of fast installation speed, low operating cost, high stability and safety, which can significantly reduce the footprint and customer assembly and construction costs.

[0003] Existing stacked pump modules have limitations in achieving compatibility and interchangeability with different types of vacuum pumps, as well as the ability to freely switch between different module models. For example, when the lower vacuum pump is a 3000-level pump, the upper vacuum pump cannot be a 1200-level pump due to height limitations and installation difficulties. The upper and lower spaces of existing stacked pump modules are fixed and cannot be adjusted. If a customer wants to replace the 1200 / 1800-level pump set with an 1800 / 1800-level pump set, the existing vacuum pump module cannot be used for replacement due to the fixed space, and a new vacuum pump module needs to be manufactured. Summary of the Invention

[0004] The embodiments disclosed herein are intended to at least address one of the technical problems existing in the prior art, and to provide a vacuum pump stacking rack and a vacuum pump system.

[0005] An embodiment of the first aspect of this disclosure provides a vacuum pump stacking rack, the vacuum pump stacking rack comprising:

[0006] A base plate assembly comprising at least two base plates for providing vertical support for a vacuum pump;

[0007] A support assembly extends vertically to provide circumferential support for the vacuum pump. At least two base plates are spaced apart vertically and connected to the support assembly, wherein at least one base plate is movable along the vertical direction.

[0008] In some embodiments of this disclosure, the base plate is a rectangular plate, and the support assembly includes two pairs of support members connected to the four corners of the rectangular plate.

[0009] Alternatively, the support assembly may include three pairs of support members, with two pairs of support members connected to the four corners of the rectangular plate and the remaining pair of support members spaced apart on opposite sides of the rectangular plate.

[0010] In some embodiments of this disclosure, the vacuum pump stack rack further includes a pump body connection assembly disposed on the base plate assembly or the support assembly. The pump body connection assembly is used to define at least one vacuum pump accommodating space on the base plate and to provide mounting holes for the vacuum pump.

[0011] In some embodiments of this disclosure, the pump body connecting assembly is disposed on the upper surface of the base plate. The pump body connecting assembly includes: a first upright plate, a second upright plate, and a fixed connecting plate. The first upright plate and the second upright plate are spaced apart along the length direction of the base plate. The first upright plate and the second upright plate are respectively used to connect opposite sides of the vacuum pump. One side of the fixed connecting plate is fixed to the base plate, and the other side is used to connect to the bottom of the vacuum pump. At least one of the first upright plate, the second upright plate, and the fixed connecting plate has a mounting hole on the surface opposite to the vacuum pump.

[0012] In some embodiments of this disclosure, the second upright plate is movably connected to the base plate along the length direction of the base plate, and / or the second upright plate is movably connected to the base plate along the width direction of the base plate.

[0013] In some embodiments of this disclosure, the pump body connecting assembly further includes a supplementary connecting plate connected between the fixed connecting plate and the first upright plate, the supplementary connecting plate being connected to the base plate, and the supplementary connecting plate being used to connect to the bottom of the vacuum pump.

[0014] In some embodiments of this disclosure, the vacuum pump stack rack further includes a top plate assembly connected to the support assembly, the top plate assembly being located above the bottom plate assembly in a vertical direction, a mounting space being formed between the top plate assembly and the bottom plate assembly, and at least one mounting space being formed between at least two of the bottom plates of the bottom plate assembly, the top plate assembly including a top plate body and at least two movable top plates, the top plate body having a mounting groove, and the at least two movable top plates being mounted in an adjustable manner and covering the mounting groove.

[0015] In some embodiments of this disclosure, the vacuum pump stack rack includes:

[0016] At least two sets of air intake pipes, at least one set of the air intake pipes passing through the top plate body and extending into the corresponding installation space, and / or, at least one set of the air intake pipes passing through the movable top plate and extending into the corresponding installation space, the air intake pipes being used to connect to the air intake port of the vacuum pump in the corresponding installation space;

[0017] At least two sets of exhaust pipes, at least one set of the exhaust pipes passing through the top plate body and extending into the corresponding installation space, and / or, at least one set of the exhaust pipes passing through the movable top plate and extending into the corresponding installation space, the exhaust pipes being used to connect to the exhaust port of the vacuum pump in the corresponding installation space.

[0018] In some embodiments of this disclosure, the length direction of the mounting groove is the same as the length direction of the top plate body, and at least two movable top plates are arranged sequentially along the length direction of the mounting groove and cover the mounting groove.

[0019] A second aspect of this disclosure provides a vacuum pump system comprising a vacuum pump stacking rack according to any of the above embodiments and a vacuum pump corresponding to each base plate.

[0020] The vacuum pump stacking rack and vacuum pump system disclosed herein include a base plate assembly and a support assembly. The base plate assembly includes at least two base plates for providing vertical support for the vacuum pump. The support assembly extends vertically to provide circumferential support for the vacuum pump. At least two base plates are spaced apart vertically from the support assembly, and each base plate is connected to the support assembly. The support assembly provides support for the vacuum pump through the base plates. At least one base plate in the base plate assembly is movably connected to the support assembly vertically. By adjusting the position of the base plates along the height direction of the vacuum pump stacking rack, the space between two adjacent base plates can be adjusted, thereby accommodating the installation and stacking of vacuum pumps of different sizes and specifications, improving the applicability of the vacuum pump stacking rack, and saving the cost of manufacturing new vacuum pump stacking racks, i.e., saving the manufacturing cost of the vacuum pump system. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the vacuum pump stacking rack according to the first embodiment of this disclosure (first isometric view);

[0022] Figure 2 for Figure 1 The diagram shows the structure of the vacuum pump stacker (second isometric view).

[0023] Figure 3 for Figure 1 The diagram shows the structure of the vacuum pump stack rack (third axonometric view).

[0024] Figure 4 for Figure 1 The diagram shows the structure of the vacuum pump stacker (fourth axonometric view).

[0025] Figure 5 for Figure 1 The image shows the front view of the vacuum pump stack rack.

[0026] Figure 6 for Figure 1 Side view of the vacuum pump stack rack shown;

[0027] Figure 7 for Figure 1 Rear view of the vacuum pump stack rack shown;

[0028] Figure 8 for Figure 1 A top view of the vacuum pump stack rack shown;

[0029] Figure 9 This is a schematic diagram of the structure of the vacuum pump stacking rack according to the second embodiment of this disclosure;

[0030] Figure 10 This is a schematic diagram of the structure of the vacuum pump stacking rack according to the third embodiment of this disclosure.

[0031] The labels in the attached diagram are as follows:

[0032] 100. Vacuum pump stacking rack;

[0033] 10. Base plate assembly; 11. Fixed base plate; 12. Movable base plate;

[0034] 20. Supporting components; 21. Supporting parts;

[0035] 30. Pump body connecting assembly; 31. First vertical plate; 32. Second vertical plate; 33. Fixed connecting plate; 34. Supplementary connecting plate;

[0036] 40. Top panel assembly; 41. Top panel body; 411. Mounting groove; 42. Movable top panel;

[0037] 51. First intake pipe fitting; 52. Second intake pipe fitting;

[0038] 61. First exhaust pipe fitting; 62. Second exhaust pipe fitting. Detailed Implementation

[0039] Exemplary embodiments of the present disclosure will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0040] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0041] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0042] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure is flipped, an element described as "below other elements or features" or "below other elements or features" would subsequently be oriented as "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0043] like Figures 1 to 10As shown, an embodiment of the first aspect of this disclosure provides a vacuum pump stacking rack 100, which includes a base plate assembly 10 and a support assembly 20. The base plate assembly 10 includes at least two base plates for providing vertical support for the vacuum pump. The support assembly 20 extends vertically to provide circumferential support for the vacuum pump. The at least two base plates are spaced apart vertically and respectively connected to the support assembly 20, wherein at least one base plate is movably connected to the support assembly 20 in a vertical direction.

[0044] The vacuum pump stacking rack 100 of this disclosure includes a base plate assembly 10 and a support assembly 20. The base plate assembly 10 includes at least two base plates for providing vertical support for the vacuum pumps. The support assembly 20 extends vertically to provide circumferential support for the vacuum pumps. At least two base plates are spaced apart vertically from the support assembly 20, and each base plate is connected to the support assembly 20. The support assembly 20 provides support for the vacuum pumps through the base plates. At least one base plate in the base plate assembly 10 is movably connected to the support assembly 20 vertically. By adjusting the position of the base plates along the height direction of the vacuum pump stacking rack 100, the installation space between adjacent base plates can be adjusted, thereby adapting to the installation and stacking of vacuum pumps of different sizes and specifications, improving the applicability of the vacuum pump stacking rack 100, and saving the cost of manufacturing new vacuum pump stacking racks, i.e., saving the manufacturing cost of the vacuum pump system.

[0045] It should be noted that at least one base plate of the base plate assembly 10 is connected to the support assembly 20 in a vertically movable manner, meaning that the height of the base plate fixed to the support assembly 20 is adjustable. When not carrying a vacuum pump, at least one base plate can be separated from the support assembly 20 and moved along the height direction of the support assembly 20, i.e., movable in the vertical direction; when carrying a vacuum pump, the base plate is relatively fixed to the support assembly 20. Specifically, the support assembly 20 can be provided with multiple screw holes, which are spaced apart along the height direction of the support assembly 20. The base plate is connected to the screw holes at different heights of the support assembly 20 through screws, bolts, etc., to achieve the adjustment of the base plate along the height direction of the support assembly 20. Alternatively, the support assembly 20 can be provided with sliding grooves, snap-fit ​​connections, etc., and corresponding structures connected to the sliding grooves or snap-fits can be provided on the base plate to achieve the adjustment of the base plate along the height direction of the support assembly 20.

[0046] One base plate of the base plate assembly 10 may be non-adjustable along the height direction of the support assembly 20, meaning that the base plate is fixedly connected to the support assembly 20. The base plate may be located at the top or bottom of the support assembly 20. The periphery of the base plate is connected to the support assembly 20, which makes the support assembly 20 more robust.

[0047] In some embodiments of this disclosure, the base plate assembly 10 includes two base plates. Specifically, the two base plates include a fixed base plate 11 and a movable base plate 12. The fixed base plate 11 can be fixedly connected to the support assembly 20, or the fixed base plate 11 and the support assembly 20 can be integrally formed. The movable base plate 12 is connected to the support assembly 20 in a movable manner along the extension direction of the support assembly 20, and the movable base plate 12 is located above the fixed base plate 11. Specifically, the movable base plate 12 can be connected to different height positions of the support member 21 of the support assembly 20, thereby realizing the adjustability of the movable base plate 12 along the extension direction of the support assembly 20. Further, the movable base plate 12 and the support member 21 are detachably connected, which can be a bolt connection, a snap-fit ​​connection, etc.

[0048] In other embodiments of this disclosure, the base plate assembly 10 may further include two or more base plates. Specifically, the two or more base plates include one fixed base plate 11 and two or more movable base plates 12. The fixed base plate 11 is located at the bottom of the support assembly 20, and the fixed point 11 and the support assembly 20 may be fixedly connected or be an integrally formed structure. The two or more movable base plates 12 are located above the support assembly 20, and the base plates of the base plate assembly 10 are spaced apart to form multiple installation spaces. Furthermore, the two or more movable base plates 12 can achieve more flexible space adjustment to accommodate the installation and use of more different models of vacuum pumps, further improving the applicability of the vacuum pump stacking rack 100.

[0049] In other embodiments of this disclosure, the base plate assembly 10 includes two or more base plates, at least two movable base plates 12, that is, each base plate of the base plate assembly 10 is a movable base plate 12, which further improves the flexibility of space adjustment between the base plates, thereby improving the applicability of the vacuum pump stack rack 100.

[0050] In this embodiment, the base plate is movably connected to the support component 20. Specifically, the base plate is slidably connected to the support component 20. For example, a slide rail is provided in the height direction of the support component 20, and the base plate is driven to move along the slide rail by a driving device to achieve a sliding connection between the base plate and the support component 20. Alternatively, the base plate is connected to the support component 20 in a way that moves at intervals along the vertical direction. For example, multiple detachable connection structures are provided on the support component 20 at intervals along the vertical direction. The base plate is connected to the detachable connection structures at different height positions of the support component 20, thereby enabling the base plate to move along the height direction of the support component 20. The detachable structure can be a threaded structure or a snap-fit ​​structure, etc.

[0051] In some embodiments of this disclosure, the base plate is a rectangular plate, and the support assembly 20 includes two pairs of support members 21, such as... Figure 9In the second embodiment shown, the support member 21 consists of two pairs of support members 21, i.e., four support members 21, which are respectively connected to the four corners of the rectangular plate. The four support members 21 at the four corners can improve the firmness and stability of the connection between the support member 21 and the rectangular plate.

[0052] like Figures 1 to 8 , Figure 10 As shown, the support assembly 20 includes three pairs of support members 21, such as... Figures 1 to 8 The support member 21 in the first embodiment shown, and the support member 21 in the third embodiment shown in 10, wherein two pairs of support members 21, i.e., four support members 21, are respectively connected to the four corners of the rectangular plate. The four corner support members 21 can improve the firmness and stability of the connection between the support member 21 and the rectangular plate. Another pair of support members 21 are spaced apart along the width direction of the rectangular plate on opposite sides of the rectangular plate, and this other pair of support members 21 are spaced apart along the width direction of the rectangular body, that is, this other pair of support members 21 are respectively located on opposite long sides of the rectangular plate, further improving the reliability of the connection between the support assembly 20 and the base plate assembly 10.

[0053] In some embodiments of this disclosure, the vacuum pump stack rack 100 further includes a top plate assembly 40, which is located above the bottom plate assembly 10 in the vertical direction. That is, the top plate assembly 40 is connected to the top of the support assembly 20, and an installation space is formed between the top plate assembly 40 and the bottom plate assembly 10. At least one installation space is formed between each adjacent bottom plate of the bottom plate assembly 10. The bottom plate assembly 10 includes at least two bottom plates, that is, at least one installation space is formed between the bottom plate assemblies 10, and a corresponding vacuum pump is disposed in each installation space.

[0054] The top plate assembly 40 includes a top plate body 41 and at least two movable top plates 42. The top plate body 41 has a mounting groove 411. Each movable top plate 42 is movably mounted at a different position in the mounting groove 411. At least two movable top plates 42 are mounted in the mounting groove 411 in an adjustable manner, and at least two movable top plates 42 completely cover the mounting groove 411. An air inlet pipe can pass through the movable top plate 42. The position of the air inlet pipe can be adjusted by adjusting the position of the movable top plate 42 to accommodate the connection of the air inlet of the vacuum pump at different positions.

[0055] In some embodiments of this disclosure, the mounting groove 411 extends along the length of the base plate on the top plate body 41. The outer contour of the base plate is the same as the outer contour of the top plate body 41 and has the same size. That is, the mounting groove 411 extends along the length of the top plate body 41. At least two movable top plates 42 are sequentially arranged in the mounting groove 411 along the length of the base plate and at least two movable top plates 42 cover the mounting groove 411. That is, the position of the movable top plates 42 can be adjusted along the length of the top plate body 41, thereby adjusting the position of the air inlet of the air inlet pipe to adapt to the connection of the air inlet of the vacuum pump at different positions and improve the applicability of the vacuum pump stack rack 100.

[0056] Specifically, in this embodiment, there are three movable top plates 42, which are arranged sequentially along the length of the mounting groove 411. One of the movable top plates 42 can be used to install an air intake pipe, and the movable top plate 42 for installing the air intake pipe is located in the middle of the three movable top plates 42. Figures 1 to 4 , Figure 8 , Figure 9 The position of the second air intake pipe 52 in the first embodiment shown is either in a non-middle position among the three movable top plates 42, such as... Figure 10 The position of the second air intake pipe 52 in the third embodiment shown is adjusted by adjusting the position of the movable top plate 42 on which the air intake pipe is located. The mounting groove 411 is covered by at least two movable top plates 42 to ensure the overall integrity of the top plate assembly 40 and protect the vacuum pump below the top plate assembly 40.

[0057] In some embodiments of this disclosure, the vacuum pump stack 100 includes at least two sets of inlet pipes. At least one set of inlet pipes passes through the top plate body 41 and extends into a corresponding mounting space, and / or at least one set of inlet pipes passes through a movable top plate 42 and extends into a corresponding mounting space. The inlet pipes are used to connect to the inlet of a corresponding vacuum pump. Both sets of inlet pipes may pass entirely through the top plate body 41 and extend into the corresponding mounting space, or each set may pass through a different movable top plate 42 and extend into the corresponding mounting space. At least one set of inlet pipes passes through the top plate body 41 and extends into the corresponding mounting space, and at least one set passes through the movable top plate 42 and extends into the corresponding mounting space. The position of the inlet pipes can be moved via the movable top plate 42 to accommodate different vacuum pump inlet positions.

[0058] In this embodiment, there are two sets of air intake pipes. The first air intake pipe 51 passes through the top plate body 41, then through the movable bottom plate 12 and extends into the installation space between the fixed bottom plate 11 and the movable bottom plate 12, and is connected to the air intake of the vacuum pump in the installation space. The second air intake pipe 52 passes through the movable top plate 42 and extends into the installation space between the top plate assembly 40 and the movable bottom plate 12, and is connected to the air intake of the vacuum pump in the installation space.

[0059] In some embodiments of this disclosure, the vacuum pump stack 100 includes: at least two sets of exhaust pipes, at least one set of exhaust pipes passing through the top plate body 41 and extending into a corresponding mounting space, and / or at least one set of exhaust pipes passing through the movable top plate 42 and extending into a corresponding mounting space. The exhaust pipes are used to connect to the inlet of a corresponding vacuum pump, and the exhaust pipes are used to connect to the exhaust port of the vacuum pump. The at least two sets of exhaust pipes may all pass through the top plate body 41 and extend into the corresponding mounting space, or the at least two sets of exhaust pipes may each pass through different movable top plates 42 and extend into the corresponding mounting space, or... At least one set of exhaust pipes passes through the top plate body 41 and extends into the corresponding mounting space, and at least one set of exhaust pipes passes through the movable top plate 42 and extends into the corresponding mounting space.

[0060] In this embodiment, there are two sets of exhaust pipes. The first exhaust pipe 61 passes through the top plate body 41, then through the movable base plate 12 and extends into the installation space between the fixed base plate 11 and the movable base plate 12, and is connected to the exhaust port of the vacuum pump in the installation space. The second exhaust pipe 62 passes through the top plate body 41 and extends into the installation space between the top plate assembly 40 and the movable base plate 12, and is connected to the exhaust port of the vacuum pump in the installation space.

[0061] like Figure 1 , Figure 2 , Figure 9 and Figure 10 As shown, in some embodiments of this disclosure, the vacuum pump stacking rack 100 further includes a pump body connection assembly 30. The pump body connection assembly 30 is disposed on the base plate assembly 10, or on the support assembly 20. The pump body connection assembly 30 defines a vacuum pump accommodating space on at least one base plate, allowing the vacuum pump accommodating space on the base plate to be adjustable to accommodate the installation of vacuum pumps of different models or sizes. Specifically, the pump body connection assembly 30 has mounting holes for connecting to the vacuum pump, so that the connection between the pump body connection assembly 30 and the vacuum pump can be achieved through connection structures such as bolts and screws.

[0062] In some embodiments of this disclosure, the pump body connecting assembly 30 is disposed on the upper surface of the base plate. The pump body connecting assembly 30 includes: a first upright plate 31, a second upright plate 32, and a fixed connecting plate 33. One side of the fixed connecting plate 33 is connected to the base plate, and the other side of the fixed connecting plate 33 is used to connect the vacuum pump. The first upright plate 31 and the second upright plate 32 are spaced apart along the length of the base plate. The first upright plate 31 and the second upright plate 32 are respectively close to opposite ends of the fixed connecting plate 33. The edge of the first upright plate 31 near one end of the base plate is disposed, and the edge of the second upright plate 32 near the other end of the base plate is disposed. The side of the second upright plate 32 away from the first upright plate 31 is also provided with a portion of the air inlet pipe and the air outlet pipe, etc. At least one of the first upright plate 31, the second upright plate 32, and the fixed connecting plate 33 has a mounting hole on the surface opposite to the vacuum pump to realize the connection between the vacuum pump and the pump body connecting assembly 30, thereby realizing the connection between the vacuum pump and the base plate.

[0063] Specifically, there are two second upright plates 32, which are spaced apart along the width of the base plate. The first upright plate 31 and the second upright plate 32 are used to connect the opposite sides of the vacuum pump, and the fixed connecting plate 33 is used to connect the bottom of the vacuum pump. The connection between the opposite sides and the bottom of the vacuum pump is achieved through the first upright plate 31, the second upright plate 32, and the fixed connecting plate 33.

[0064] In some embodiments of this disclosure, the second upright plate 32 is movably connected to the base plate along its length. By adjusting the position of the second upright plate 32 along the length of the base plate, the distance between the first upright plate 31 and the second upright plate 32 can be adjusted, thereby accommodating the installation of vacuum pumps of different lengths. Alternatively / and, the second upright plate 32 is movably connected to the base plate along its width. By adjusting the position of the second upright plate 32 along the width of the base plate, the distance between the two second upright plates 32 along the width of the base plate can be adjusted, thereby accommodating the installation of vacuum pumps of different widths.

[0065] like Figure 10 As shown, in some embodiments of this disclosure, the pump body connecting assembly 30 further includes a supplementary connecting plate 34. The supplementary connecting plate 34 is connected to the upper surface of the base plate and is connected between the fixed connecting plate 33 and the first upright plate 31. The supplementary connecting plate 34 is used to connect the bottom of the vacuum pump. The supplementary connecting plate 34 makes the connection between the pump body connecting assembly 30 and the bottom of the vacuum pump more secure.

[0066] The second aspect of this disclosure provides a vacuum pump system comprising at least two vacuum pumps and a vacuum pump stack 100 according to any of the above embodiments, wherein each vacuum pump is connected to a corresponding base plate via a corresponding pump body connection assembly 30.

[0067] The vacuum pump system of this disclosure includes at least two vacuum pumps and a vacuum pump stacking rack 100. The vacuum pump stacking rack 100 includes a base plate assembly 10 and a support assembly 20. The base plate assembly 10 includes at least two base plates for providing vertical support for the vacuum pumps. The support assembly 20 extends vertically to provide circumferential support for the vacuum pumps. At least two base plates are spaced apart vertically from the support assembly 20, and each base plate is connected to the support assembly 20. The support assembly 20 provides support for the vacuum pumps through the base plates. At least one base plate in the base plate assembly 10 is movably connected to the support assembly 20 vertically. By adjusting the position of the base plates along the height direction of the vacuum pump stacking rack 100, the installation space between two adjacent base plates can be adjusted, thereby adapting to the installation and stacking of vacuum pumps of different sizes and specifications, improving the applicability of the vacuum pump stacking rack 100, and saving the cost of manufacturing new vacuum pump stacking racks, i.e., saving the manufacturing cost of the vacuum pump system.

[0068] Specifically, by adjusting the position of the base plate along the height of the vacuum pump stacking rack 100, the distance between the movable base plate 12 and other base plates can be adjusted, that is, the installation space between them can be adjusted so that the vacuum pump stacking rack 100 can stack any two different vacuum pumps in the 1200 / 1800 / 3000 class, or stack any two vacuum pumps of the same class in the above three classes.

[0069] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of this disclosure, and this disclosure is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this disclosure, and these modifications and improvements are also considered to be within the scope of protection of this disclosure.

Claims

1. A vacuum pump stacking rack, characterized in that, The vacuum pump stack rack includes: A base plate assembly comprising at least two base plates for providing vertical support for a vacuum pump; A support assembly extends vertically to provide circumferential support for the vacuum pump. At least two base plates are spaced apart vertically and connected to the support assembly, wherein at least one base plate is movable along the vertical direction.

2. The vacuum pump stacking rack according to claim 1, characterized in that, The base plate is a rectangular plate, and the support assembly includes two pairs of support members, which are connected to the four corners of the rectangular plate. Alternatively, the support assembly may include three pairs of support members, with two pairs of support members connected to the four corners of the rectangular plate and the remaining pair of support members spaced apart on opposite sides of the rectangular plate.

3. The vacuum pump stacking rack according to claim 1, characterized in that, The vacuum pump stack rack also includes a pump body connection assembly disposed on the base plate assembly or the support assembly. The pump body connection assembly is used to define a vacuum pump accommodating space on at least one of the base plates and to provide mounting holes for the vacuum pump.

4. The vacuum pump stacking rack according to claim 3, characterized in that, The pump body connecting assembly is disposed on the upper surface of the base plate. The pump body connecting assembly includes: a first upright plate, a second upright plate, and a fixed connecting plate. The first upright plate and the second upright plate are spaced apart along the length direction of the base plate. The first upright plate and the second upright plate are respectively used to connect the opposite sides of the vacuum pump. One side of the fixed connecting plate is fixed to the base plate, and the other side is used to connect to the bottom of the vacuum pump. At least one of the first upright plate, the second upright plate, and the fixed connecting plate has a mounting hole on the surface opposite to the vacuum pump.

5. The vacuum pump stacking rack according to claim 4, characterized in that, The second upright plate is movably connected to the base plate along its length, and / or the second upright plate is movably connected to the base plate along its width.

6. The vacuum pump stacking rack according to claim 4, characterized in that, The pump body connecting assembly also includes a supplementary connecting plate, which is connected between the fixed connecting plate and the first vertical plate, and is connected to the base plate. The supplementary connecting plate is used to connect the bottom of the vacuum pump.

7. The vacuum pump stacking rack according to claim 1, characterized in that, The vacuum pump stack rack also includes a top plate assembly connected to the support assembly. The top plate assembly is located above the bottom plate assembly in the vertical direction, and an installation space is formed between the top plate assembly and the bottom plate assembly. At least one installation space is formed between at least two bottom plates of the bottom plate assembly. The top plate assembly includes a top plate body and at least two movable top plates. The top plate body has a mounting groove, and the at least two movable top plates are installed in an adjustable manner and cover the mounting groove.

8. The vacuum pump stacking rack according to claim 7, characterized in that, The vacuum pump stack rack includes: At least two sets of air intake pipes, at least one set of the air intake pipes passing through the top plate body and extending into the corresponding installation space, and / or, at least one set of the air intake pipes passing through the movable top plate and extending into the corresponding installation space, the air intake pipes being used to connect to the air intake port of the vacuum pump in the corresponding installation space; At least two sets of exhaust pipes, at least one set of the exhaust pipes passing through the top plate body and extending into the corresponding installation space, and / or, at least one set of the exhaust pipes passing through the movable top plate and extending into the corresponding installation space, the exhaust pipes being used to connect to the exhaust port of the vacuum pump in the corresponding installation space.

9. The vacuum pump stacking rack according to claim 7, characterized in that, The length direction of the mounting groove is the same as the length direction of the top plate body, and at least two of the movable top plates are arranged sequentially along the length direction of the mounting groove and cover the mounting groove.

10. A vacuum pump system, characterized in that, The vacuum pump system includes a vacuum pump stack rack according to any one of claims 1 to 9 and a vacuum pump corresponding to each base plate.

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