Bent waveguide structure, electro-optical modulator and light quantum computer

Abstract

The invention provides a bent waveguide structure, an electro-optical modulator and a light quantum computer, and relates to the technical field of electro-optical modulation.The bent waveguide structure comprises an input waveguide, a bent waveguide and an output waveguide which are sequentially connected, and the bent waveguide comprises a substrate transmission waveguide layer, an input coupling part and an output coupling part; the input coupling part and the output coupling part are arranged at the two ends of the substrate transmission waveguide layer respectively, a shallow etching groove is formed between the input coupling part and the output coupling part, the input coupling part is connected with the input waveguide, and the output coupling part is connected with the output waveguide. Compared with the prior art, the shallow etching groove is formed between the input coupling part and the output coupling part, so that the thickness of the waveguide film at the bending part is reduced to ensure that the substrate transmission waveguide layer is of a single-mode structure, the transmission loss is reduced, and the bending waveguide is relatively independent from the input waveguide and the output waveguide, so that the transmission efficiency is improved. Therefore, the process precision of the bent waveguide can be independently adjusted, the process time is reduced, and the efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of electro-optic modulation technology, and more specifically, to a curved waveguide structure, an electro-optic modulator, and an optical quantum computer. Background Technology

[0002] Light is transmitted between on-chip optical structures via waveguide connections. To achieve light transmission between high-density and complex optical structures, waveguide bending is required during connection. Due to limitations in process technology and substrate parameters, waveguide bending may introduce mode conversion and higher-order mode coupling, thereby affecting the overall device performance.

[0003] Current traditional techniques control the shape of waveguide curvature, using a curvature function to define the curved portion and suppress mode transitions. However, for waveguides with large curvature, such as those where the thin film material thickness and refractive index meet certain conditions with the incident light wavelength, a 90-degree bend will inevitably cause a mode transition. Simply controlling the shape of the curved waveguide cannot solve the mode loss problem. Furthermore, the manufacturing precision is insufficient to perfectly control the curved portion of the waveguide along the shape constructed using the function. Summary of the Invention

[0004] The purpose of this invention is to provide a curved waveguide structure, an electro-optic modulator, and an optical quantum computer, which can solve the problems of mode conversion and high-order mode coupling that may be introduced when the waveguide is bent, reduce mode loss when the waveguide is bent, and improve the overall performance of the device.

[0005] In a first aspect, the present invention provides a curved waveguide structure, comprising an input waveguide, a curved waveguide, and an output waveguide connected in sequence. The curved waveguide includes a substrate transmission waveguide layer and an input coupling portion and an output coupling portion protruding from the substrate transmission waveguide layer. The input coupling portion and the output coupling portion are respectively disposed at both ends of the substrate transmission waveguide layer, and a shallow etched trench is formed between the input coupling portion and the output coupling portion. One end of the input coupling portion is connected to the input waveguide for coupling an optical signal into the substrate transmission waveguide layer, and one end of the output coupling portion is connected to the output waveguide for leading the optical signal out to the output waveguide.

[0006] In an optional embodiment, an input tip is formed at the end of the input coupling portion away from the input waveguide, and the width of the input tip gradually decreases along the transmission direction of the optical signal.

[0007] In an alternative implementation, the height of the input tip relative to the substrate transmission waveguide layer gradually decreases along the direction of optical signal transmission.

[0008] In an optional embodiment, an output tip is formed at the end of the output coupling portion away from the output waveguide, and the width of the output tip gradually increases along the transmission direction of the optical signal.

[0009] In an optional embodiment, the height of the output tip relative to the substrate transmission waveguide layer gradually increases along the direction of optical signal transmission.

[0010] In an optional embodiment, the bent waveguide has a 90-degree bent structure, and the substrate transmission waveguide layer is in the shape of a 1 / 4 arc.

[0011] Secondly, the present invention provides an electro-optic modulator, comprising a DC bias structure, a radio frequency modulation structure, a beam splitter waveguide, a first modulation arm, a second modulation arm, a beam combiner waveguide, and at least one of the aforementioned curved waveguide structures. The two output terminals of the beam splitter waveguide are respectively connected to the other ends of the first modulation arm and the second modulation arm, and the two input terminals of the beam combiner waveguide are respectively connected to the other ends of the first modulation arm and the second modulation arm. The beam combiner waveguide is connected to the input waveguide. The DC bias structure is disposed on both sides of the first modulation arm and is used to perform phase modulation on the optical signal of the first modulation arm. The radio frequency modulation structure is disposed on both sides of the first modulation arm and both sides of the second modulation arm and is used to perform high-speed modulation on the optical signals of the first modulation arm and the second modulation arm.

[0012] In an optional embodiment, the electro-optic modulator further includes an optical signal input waveguide and an optical signal output waveguide. The optical signal input waveguide is connected to the input end of the beam combiner waveguide, and the optical signal output waveguide is arranged in parallel with the optical signal input waveguide and connected to the output waveguide.

[0013] In optional embodiments, the beam splitter waveguide is an MMI structure, a Y-branch waveguide, or a DC coupler; and / or, the beam combiner waveguide is an MMI structure, a Y-branch waveguide, or a DC coupler.

[0014] Thirdly, the present invention provides an optical quantum computer, comprising a single-photon source, an optical quantum chip, and a single-photon detector. The optical quantum chip includes the aforementioned electro-optic modulator. The single-photon source is used to generate single photons. The optical quantum chip is used to control the single photons. The single-photon detector is used to measure the single photons and output the calculation results.

[0015] The beneficial effects of the embodiments of the present invention include: The curved waveguide structure, electro-optic modulator, and optical quantum computer provided in this invention feature a layered design of the curved waveguide, consisting of a substrate transmission waveguide layer and an input coupling portion and an output coupling portion protruding from the substrate transmission waveguide layer. The input coupling portion and the output coupling portion are respectively located at opposite ends of the substrate transmission waveguide layer, and a shallow etched trench is formed between them. One end of the input coupling portion is connected to the input waveguide for coupling optical signals into the substrate transmission waveguide layer, and the other end of the output coupling portion is connected to the output waveguide for leading optical signals out to the output waveguide. Compared to existing technologies, this invention, by designing protruding input and output coupling portions with shallow etched trenches between them, and by reducing the thickness of the waveguide film at the bend, ensures that the substrate transmission waveguide layer is a single-mode structure, thereby reducing transmission loss. Furthermore, the curved waveguide is relatively independent of the input and output waveguides, allowing for independent adjustment of the curved waveguide's manufacturing precision, reducing manufacturing time, and improving efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the curved waveguide structure provided in an embodiment of the present invention from a first perspective; Figure 2 A schematic diagram of the curved waveguide structure provided in an embodiment of the present invention from a second perspective; Figure 3 This is a schematic diagram of the waveguide optical path in the electro-optic modulator provided in an embodiment of the present invention; Figure 4 for Figure 3 A magnified view of a portion of point IV in the middle; Figure 5 This is a schematic diagram of the structure of an electro-optic modulator provided in an embodiment of the present invention.

[0018] Icons: 100 - Bent waveguide structure; 110 - Input waveguide; 130 - Output waveguide; 150 - Bent waveguide; 151 - Substrate transmission waveguide layer; 153 - Input coupling section; 155 - Output coupling section; 157 - Shallow etched trench; 158 - Input tip; 159 - Output tip; 200 - Waveguide optical path; 210 - Beam splitter waveguide; 230 - First modulation arm; 250 - Second modulation arm; 270 - Beam combiner waveguide; 280 - Optical signal introduction waveguide; 290 - Optical signal exit waveguide; 300 - Electro-optic modulator; 310 - DC bias structure; 330 - RF modulation structure; 350 - Input end face coupler; 370 - Output end face coupler. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this invention, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed, they are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] As disclosed in the background section, existing bent waveguides typically only control the bending properties and configuration, using a curvature function to limit the bending portion and suppress mode transitions. However, when the thin film material thickness and refractive index meet certain conditions with the incident light wavelength, a mode transition inevitably occurs after a 90-degree bend. Simply controlling the shape of the bent waveguide cannot solve the mode loss problem. This is because when the thin film material is anisotropic, such as lithium niobate, the effective refractive index of the waveguide varies along different directions. Consequently, when the thin film thickness and incident light wavelength meet certain conditions, the fundamental mode propagating laterally differs from the fundamental mode propagating longitudinally, inevitably leading to mode transitions during bending. Furthermore, regarding the waveguide shape, the manufacturing precision is insufficient to perfectly control the bending portion of the waveguide along the shape constructed using the function, meaning the bending effect is not ideal. These problems all contribute to increased mode loss during waveguide bending, affecting the overall device performance.

[0025] To address the aforementioned problems, embodiments of the present invention provide a novel curved waveguide structure, waveguide optical path, and electro-optic modulator. It should be noted that, unless otherwise specified, the features in the embodiments of the present invention can be combined with each other.

[0026] See Figure 1 , Figure 2 and Figure 4 This invention provides a bent waveguide structure 100, which can solve the problems of mode conversion and high-order mode coupling that may be introduced when the waveguide is bent, reduce mode loss when the waveguide is bent, and improve the overall performance of the device.

[0027] The curved waveguide structure 100 provided in this embodiment of the invention includes an input waveguide 110, a curved waveguide 150, and an output waveguide 130 connected in sequence. The curved waveguide 150 includes a substrate transmission waveguide layer 151 and an input coupling portion 153 and an output coupling portion protruding from the substrate transmission waveguide layer 151. The input coupling portion 153 and the output coupling portion are respectively disposed at both ends of the substrate transmission waveguide layer 151, and a shallow etched trench 157 is formed between the input coupling portion 153 and the output coupling portion. One end of the input coupling portion 153 is connected to the input waveguide 110 for coupling optical signals into the substrate transmission waveguide layer 151, and one end of the output coupling portion is connected to the output waveguide 130 for leading optical signals out to the output waveguide 130.

[0028] It should be noted that the input waveguide 110 and the output waveguide 130 are located at both ends of the curved waveguide 150 and extend a short distance. Both the input waveguide 110 and the output waveguide 130 can be connected to other waveguide structures in the waveguide optical path 200 to form a complete optical path waveguide.

[0029] In some embodiments, a wedge-shaped input tip 158 is formed at the end of the input coupling portion 153 away from the input waveguide 110, and the width of the input tip 158 gradually decreases along the transmission direction of the optical signal. Further, the height of the input tip 158 relative to the substrate transmission waveguide layer 151 gradually decreases along the transmission direction of the optical signal. Specifically, the input coupling portion 153 has an input tip 158, which is semi-conical in shape, capable of coupling the optical signal into the substrate transmission waveguide layer 151. By thinning the thickness of the substrate transmission waveguide layer 151, a single-mode structure can be achieved, reducing mode loss.

[0030] In some embodiments, an output tip 159 is formed at the end of the output coupling portion away from the output waveguide 130, and the width of the output tip 159 gradually increases along the transmission direction of the optical signal. Further, the height of the output tip 159 relative to the substrate transmission waveguide layer 151 gradually increases along the transmission direction of the optical signal. Specifically, the output coupling portion has an output tip 159, which is semi-conical in shape, capable of drawing the optical signal from the substrate transmission waveguide layer 151. By thinning the thickness of the substrate transmission waveguide layer 151, a single-mode structure can be achieved, reducing mode loss.

[0031] In some embodiments, the bent waveguide 150 has a 90-degree bend, and the substrate transmission waveguide layer 151 is in the shape of a quarter arc. Of course, in other preferred embodiments of the present invention, the bent waveguide 150 may also have a bend at other angles, such as a 60-degree or 120-degree bend, and the substrate transmission waveguide layer 151 will also change shape accordingly. The bending angle of the bent waveguide 150 is not specifically limited here.

[0032] In the actual fabrication of the curved waveguide structure 100, multiple photolithography processes can be employed. First, a waveguide material layer with a curved portion is fabricated using photolithography and etching techniques. The bending angle of this curved portion is determined according to actual requirements. Then, the upper waveguide structure is fabricated again using photolithography to create shallow etching trenches 157, i.e., etching the curved portion, thereby forming the input tip 158, the output tip 159, and the shallow etching trenches 157. Finally, a silicon oxide capping layer is grown at high temperature to complete the fabrication of the curved waveguide structure 100. Of course, the curved waveguide 150 can also be a multi-layer structure, employing a multi-layer etching method to precisely control the etching height of each layer. A coupling structure is etched on the uppermost waveguide, allowing the optical signal to couple into the lower waveguide without mode change or loss. By controlling the etching height and the width and shape of the curved waveguide 150, the lower waveguide does not undergo mode conversion during bending. After bending, the signal returns to the upper waveguide for transmission through the coupling structure.

[0033] It should be noted that the material of the bent waveguide structure 100 in this embodiment is not limited to lithium niobate, and it can be multiple bends cascaded. The bend can be a functional shape / Eulerian bend. For its shape, please refer to the waveguide bent structure in the prior art.

[0034] See Figure 3 and 4 The present invention also provides an electro-optic modulator 300, including a waveguide optical path 200. The waveguide optical path 200 includes a beam splitter waveguide 210, a first modulation arm 230, a second modulation arm 250, a beam combiner waveguide 270, and at least one of the aforementioned curved waveguide structures 100. The curved waveguide structure 100 includes an input waveguide 110, a curved waveguide 150, and an output waveguide 130 connected in sequence. The curved waveguide 150 includes a substrate transmission waveguide layer 151 and a component protruding from the substrate transmission waveguide layer. An input coupling section 153 and an output coupling section are respectively disposed at both ends of the substrate transmission waveguide layer 151, and a shallow etched trench 157 is formed between the input coupling section 153 and the output coupling section. One end of the input coupling section 153 is connected to the input waveguide 110 for coupling optical signals into the substrate transmission waveguide layer 151, and one end of the output coupling section is connected to the output waveguide 130 for leading optical signals out to the output waveguide 130. The two output ends of the beam splitter waveguide 210 are respectively connected to the other ends of the first modulation arm 230 and the second modulation arm 250, and the two input ends of the beam combiner waveguide 270 are respectively connected to the other ends of the first modulation arm 230 and the second modulation arm 250. The beam combiner waveguide 270 is connected to the input waveguide 110. The beam splitter 210 is a one-to-two structure, which can split the input optical signal into two beams, which are then modulated by the first modulation arm 230 and the second modulation arm 250 respectively, and then combined by the beam combining waveguide 270. The combined optical signal enters the curved waveguide structure 100 through the input waveguide 110, thereby realizing the direction conversion.

[0035] Furthermore, the waveguide optical path 200 also includes an optical signal input waveguide 280 and an optical signal output waveguide 290. The optical signal input waveguide 280 is connected to the input end of the beam combiner waveguide 270, and the optical signal output waveguide 290 is arranged in parallel with the optical signal input waveguide 280 and connected to the output waveguide 130. Specifically, the optical signal input waveguide 110 and the optical signal output waveguide 130 are respectively connected to the external input end-face coupler 350 and output end-face coupler 370. The optical signal input waveguide 110 can introduce optical signals, and the optical signal output waveguide 130 can output modulated optical signals.

[0036] In some embodiments, the beam splitter 210 is an MMI structure, a Y-branch waveguide, or a DC coupler; and / or, the beam combiner 270 is an MMI structure, a Y-branch waveguide, or a DC coupler. Preferably, both the beam splitter 210 and the beam combiner 270 are Y-branch waveguides.

[0037] It should be noted that there are two curved waveguide structures 100 here, and the curved waveguide 150 in each curved waveguide structure 100 is a 90° curved structure. Therefore, the optical signal output waveguide 290 and the optical signal input waveguide 280 can have opposite directions, thereby realizing the same side of light input and output, which greatly reduces the width occupied by the entire waveguide circuit and is conducive to the miniaturization of the device.

[0038] See Figure 5 The electro-optic modulator 300 further includes a DC bias structure 310, an RF modulation structure 330, and the aforementioned waveguide optical path 200. The waveguide optical path 200 includes a beam splitter waveguide 210, a first modulation arm 230, a second modulation arm 250, a beam combiner waveguide 270, and at least one of the aforementioned bent waveguide structures 100. The bent waveguide structure 100 includes an input waveguide 110, a bent waveguide 150, and an output waveguide 130 connected in sequence. The bent waveguide 150 includes a substrate transmission waveguide layer 151 and a layer protruding from the substrate. An input coupling portion 153 and an output coupling portion are respectively disposed at both ends of the substrate transmission waveguide layer 151, and a shallow etched trench 157 is formed between the input coupling portion 153 and the output coupling portion. One end of the input coupling portion 153 is connected to the input waveguide 110 for coupling optical signals into the substrate transmission waveguide layer 151, and one end of the output coupling portion is connected to the output waveguide 130 for leading optical signals out to the output waveguide 130. The two output ends of the beam splitter waveguide 210 are respectively connected to the other ends of the first modulation arm 230 and the second modulation arm 250, and the two input ends of the beam combiner waveguide 270 are respectively connected to the other ends of the first modulation arm 230 and the second modulation arm 250. The beam combiner waveguide 270 is connected to the input waveguide 110. The beam splitter waveguide 210 is a one-to-two structure, capable of splitting the input optical signal into two beams, which are then modulated by the first modulation arm 230 and the second modulation arm 250 respectively, and then combined by the beam combiner waveguide 270. The combined optical signal enters the curved waveguide structure 100 through the input waveguide 110, thereby achieving direction conversion. The DC bias structure 310 is disposed on both sides of the first modulation arm 230 for phase modulation of the optical signal of the first modulation arm 230; the radio frequency modulation structure 330 is disposed on both sides of the first modulation arm 230 and the second modulation arm 250 for high-speed modulation of the optical signals of the first modulation arm 230 and the second modulation arm 250.

[0039] Furthermore, the electro-optic modulator 300 also includes an input end-face coupler 350 and an output end-face coupler 370. The input end-face coupler 350 is connected to the optical signal introduction waveguide 280 to introduce optical signals, and the output end-face coupler 370 is connected to the optical signal output waveguide 290 to output optical signals. The input end-face coupler 350 and the output end-face coupler 370 are located on the same side of the waveguide optical path 200 structure, realizing same-side input and output of light, which can significantly reduce the device width and is beneficial to device miniaturization.

[0040] It should be noted that the electro-optic modulator 300 here also includes a substrate wafer, an adhesive film, and a lithium niobate thin film substrate. The lithium niobate thin film substrate is placed on top of the substrate wafer, the adhesive film is placed between the substrate wafer and the lithium niobate thin film substrate, and the waveguide optical path 200 is also disposed on the lithium niobate thin film substrate. Of course, the basic structure of the electro-optic modulator 300 here can be referred to the lithium niobate thin film electro-optic modulator 300 in the existing technology.

[0041] This invention also provides an optical quantum computer, including a single-photon source, an optical quantum chip, and a single-photon detector. The optical quantum chip includes the aforementioned electro-optic modulator 300. The single-photon source is used to generate single photons, the optical quantum chip is used to control the single photons, and the single-photon detector is used to measure the single photons and output the calculation results.

[0042] In practical applications, the electro-optic modulator 300 provided in this application can be implemented based on basic materials such as lithium niobate and integrated into an optical quantum computer. An optical quantum computer is a quantum computing device that uses photons (light particles) as qubits for information processing. An optical quantum computer mainly includes a single-photon source, an optical quantum chip, and a detection system. The single-photon source generates high-quality single photons as qubit carriers by exciting quantum dots with lasers or by spontaneous parametric down-conversion (SPDC). The optical quantum processor consists of optical components such as optical fibers, waveguides, beam splitters, phase modulators, and mirrors to achieve optical transmission and logical operations (such as Hadamard gates and CNOT gates). The detection system can measure the final state of the photons (such as polarization or path) and output the calculation results. For details on the specific processing procedures of an optical quantum computer, please refer to the relevant technical descriptions, which will not be elaborated here.

[0043] In summary, the curved waveguide structure 100, electro-optic modulator 300, and optical quantum computer provided in the embodiments of the present invention are designed in layers as a substrate transmission waveguide layer 151 and an input coupling portion 153 and an output coupling portion protruding on the substrate transmission waveguide layer 151. The input coupling portion 153 and the output coupling portion are respectively disposed at both ends of the substrate transmission waveguide layer 151, and a shallow etched trench 157 is formed between the input coupling portion 153 and the output coupling portion. One end of the input coupling portion 153 is connected to the input waveguide 110 for coupling optical signals into the substrate transmission waveguide layer 151, and one end of the output coupling portion is connected to the output waveguide 130 for leading optical signals out to the output waveguide 130. Compared to existing technologies, this invention, through the design of a protruding input coupling portion 153 and an output coupling portion, and the formation of a shallow etched trench 157 between the input coupling portion 153 and the output coupling portion, ensures that the substrate transmission waveguide layer 151 is a single-mode structure by reducing the thickness of the waveguide film at the bend, thereby reducing transmission loss. Furthermore, the bend waveguide 150 is relatively independent from the input and output waveguides 130, so the process accuracy of the bend waveguide 150 can be adjusted independently, reducing process time and improving efficiency.

[0044] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A curved waveguide structure, characterized in that, The device includes an input waveguide, a curved waveguide, and an output waveguide connected in sequence. The curved waveguide includes a substrate transmission waveguide layer and an input coupling portion and an output coupling portion protruding from the substrate transmission waveguide layer. The input coupling portion and the output coupling portion are respectively disposed at both ends of the substrate transmission waveguide layer, and a shallow etched trench is formed between the input coupling portion and the output coupling portion. The input coupling portion is connected to the input waveguide for coupling optical signals into the substrate transmission waveguide layer, and the output coupling portion is connected to the output waveguide for leading the optical signals out to the output waveguide.

2. The curved waveguide structure according to claim 1, characterized in that, The input coupling part has a wedge-shaped input tip at the end away from the input waveguide, and the width of the input tip gradually decreases along the transmission direction of the optical signal.

3. The curved waveguide structure according to claim 2, characterized in that, The height of the input tip relative to the substrate transmission waveguide layer gradually decreases along the direction of optical signal transmission.

4. The curved waveguide structure according to claim 1, characterized in that, The output coupling part has a wedge-shaped output tip at the end away from the output waveguide, and the width of the output tip gradually increases along the transmission direction of the optical signal.

5. The curved waveguide structure according to claim 4, characterized in that, The height of the output tip relative to the substrate transmission waveguide layer gradually increases along the direction of optical signal transmission.

6. The curved waveguide structure according to claim 1, characterized in that, The curved waveguide has a 90-degree curved structure, and the substrate transmission waveguide layer is in the shape of a 1 / 4 arc.

7. An electro-optic modulator, characterized in that, The device includes a DC bias structure, a radio frequency modulation structure, a beam splitter waveguide, a first modulation arm, a second modulation arm, a beam combiner waveguide, and at least one curved waveguide structure as described in any one of claims 1-6. The two output terminals of the beam splitter waveguide are respectively connected to the other ends of the first modulation arm and the second modulation arm, and the two input terminals of the beam combiner waveguide are respectively connected to the other ends of the first modulation arm and the second modulation arm. The beam combiner waveguide is connected to the input waveguide. The DC bias structure is disposed on both sides of the first modulation arm and is used to perform phase modulation on the optical signal of the first modulation arm. The radio frequency modulation structure is disposed on both sides of the first modulation arm and both sides of the second modulation arm and is used to perform high-speed modulation on the optical signals of the first modulation arm and the second modulation arm.

8. The electro-optic modulator according to claim 7, characterized in that, The electro-optic modulator further includes an optical signal input waveguide and an optical signal output waveguide. The optical signal input waveguide is connected to the input end of the beam combiner waveguide. The optical signal output waveguide is arranged in parallel with the optical signal input waveguide and is connected to the output waveguide.

9. The electro-optic modulator according to claim 7, characterized in that, The beam splitter waveguide is an MMI structure, a Y-branch waveguide, or a DC coupler; and / or, the beam combiner waveguide is an MMI structure, a Y-branch waveguide, or a DC coupler.

10. An optical quantum computer, characterized in that, The device includes a single-photon source, a quantum chip, and a single-photon detector. The quantum chip includes an electro-optic modulator as described in any one of claims 7-9. The single-photon source is used to generate single photons. The quantum chip is used to control the single photons. The single-photon detector is used to measure the single photons and output calculation results.

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