Feeding device and wobble plate equipment

Abstract

The invention discloses a feeding device and tray placing equipment. The feeding device comprises a first mounting frame; the first carrying table is arranged on the first mounting frame; the mounting disc is positioned above the first carrying table; a first driving member; the abutting structure comprises a transmission disc arranged on the mounting disc, a second driving part and a pressing plate arranged on the mounting disc, the second driving part is suitable for driving the transmission disc to rotate, and the pressing plate responds to rotation of the transmission disc to be switched to the avoiding state or the blocking state; the sheet assembly comprises a diaphragm and a sheet, when the pressing plate is in the avoiding state, the sheet assembly borne on the first bearing table does not coincide with the projection of the pressing plate in the Z-axis direction, and when the pressing plate is in the blocking state, the projection of the diaphragm partially coincides with the projection of the pressing plate in the Z-axis direction, and the projection of the sheet does not coincide with the projection of the pressing plate in the Z-axis direction. The pressing plate is driven by the first driving piece to abut against the membrane downwards. By the adoption of the structure, sheets are placed in order, the position reliability is good, and the tray placing efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor wafer stacking technology, and particularly to a feeding device and stacking equipment. Background Technology

[0002] After semiconductor wafers are manufactured, they need to be cleaved by a cleaving device. The cleaved wafers then flow to a sorting device for sorting and placing them onto trays. For example, Chinese invention patent CN202011552366.1 discloses a semiconductor chip sorting machine, which includes a feeding tray, a receiving tray, and a swing arm. The feeding tray is used to hold the chips to be sorted, and the receiving tray is used to hold and store the chips. The bottom of the feeding tray and the receiving tray are respectively provided with a driving mechanism. The swing arm is located between the feeding tray and the receiving tray and is adapted to swing to the feeding tray to pick up the chips and swing to the receiving tray to place the chips onto the receiving tray.

[0003] However, the chips are placed haphazardly on the feeding tray, resulting in poor positional reliability and making it inconvenient for the swing arm to pick up the chips, which greatly affects the tray placement efficiency.

[0004] Therefore, it is necessary to improve the existing technology to overcome the aforementioned defects. Summary of the Invention

[0005] The purpose of this invention is to provide a feeding device that provides reliable positioning of the sheet material at the feeding device, thereby improving tray loading efficiency.

[0006] The objective of this invention is achieved through the following technical solution: a feeding device, comprising: First mounting bracket; The first platform is disposed on the first mounting frame; The mounting plate is located above the first platform, and its middle part has a clearance area through which the sheet assembly is placed on the first platform along the Z-axis. A first driving component is disposed on the first mounting bracket and is connected to the mounting plate in a driving manner; The pressing structure includes a transmission disk, a second driving member, and a pressure plate disposed on the mounting disk. The transmission disk is rotatable about a direction parallel to the Z-axis. The transmission disk has a third clearance hole for placing the sheet assembly on the first platform. The second driving member is adapted to drive the transmission disk to rotate. The pressure plate switches to a clearance state or a blocking state in response to the rotation of the transmission disk. The sheet assembly includes a diaphragm and a sheet attached to the diaphragm in a cleaved state. When the pressure plate is in an avoidance state, the projection of the sheet assembly supported on the first platform and the pressure plate in the Z-axis direction do not coincide. When the pressure plate is in a blocking state, the projection of the diaphragm and the pressure plate in the Z-axis direction partially coincides, while the projection of the sheet and the pressure plate in the Z-axis direction does not coincide. The pressure plate presses against the diaphragm downward along the Z-axis in response to the drive of the first driving member.

[0007] Furthermore, the installation disk includes: The base plate is connected to the output end of the first driving component. The base plate has a circular structure and a first clearance hole is provided in the middle. The cover plate has a circular structure and is coaxially disposed above the bottom plate. A second clearance hole with the same axis as the first clearance hole is provided in the middle. The first clearance hole and the second clearance hole cooperate to form the clearance area. A connecting ring is attached between the base plate and the cover plate; The transmission disc is coaxially disposed between the base plate and the cover plate and is housed within the connecting ring, the inner edge of which is adapted to guide the rotation of the transmission disc.

[0008] Furthermore, the inner diameter of the first clearance hole is larger than the inner diameter of the third clearance hole, the inner diameter of the second clearance hole is smaller than the inner diameter of the third clearance hole, a transmission rack is provided at the bottom of the transmission disk, the second driving member is provided on the base plate, and its output end is provided with a transmission gear that meshes with the transmission rack.

[0009] Furthermore, multiple pressure plates are arranged along the circumference of the transmission disk, and the top surface of the transmission disk is recessed inward to form a sliding groove corresponding to each pressure plate. The pressure plate is partially slidably placed in the sliding groove, and each pressure plate responds to the rotation of the transmission disk by synchronously switching to an avoidance state or synchronously switching to an obstruction state.

[0010] Furthermore, the pressure plate includes: The plate is fitted between the top surface of the transmission disc and the bottom surface of the cover plate, with a portion of the plate protruding relative to the inner wall of the third clearance hole to press against the diaphragm. A guide portion protrudes from the bottom of the plate and is slidably embedded in the groove; A guide pin has its axis parallel to the axis of the transmission disc, and its top protrudes relative to the top of the plate. The cover plate has a guide hole through the guide pin at the position corresponding to the guide pin, and the guide pin passes through the guide hole.

[0011] Furthermore, multiple first driving members are evenly distributed along the circumference of the mounting plate.

[0012] Furthermore, the first mounting bracket includes: Mounting bracket body; A rotating base is disposed on the mounting bracket body and can rotate about a direction parallel to the Z-axis; The first platform and the first driving component are both fixedly connected to the rotating seat. The mounting frame body is provided with a first driving component, which is adapted to drive the first platform to rotate.

[0013] Furthermore, the outer contours of the first platform and the rotating seat are both circular. The first platform is coaxially disposed on the top of the rotating seat. The outer periphery of the rotating seat is recessed inward to form a guide groove. The first mounting frame includes several guide bearings disposed on the mounting frame body. The guide bearings surround the outer periphery of the rotating seat and are partially embedded in the guide groove to support and guide the rotation of the rotating seat.

[0014] Furthermore, a ring of teeth is formed on the outer periphery of the first stage, and the first drive assembly is adapted to mesh with the teeth to drive the first stage to rotate.

[0015] In addition, the present invention also provides a tray-stacking device, including the aforementioned feeding device.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The present invention adopts the above-mentioned structure, where the sheet is attached to the diaphragm, avoiding the disorderly placement of particles from the sheet ruptures. Furthermore, the feeding device can fix the diaphragm, ensuring excellent sheet positioning reliability and making subsequent gripping and tray placement more convenient, thus improving tray placement efficiency. In addition, by setting up the mounting plate, the first driving member, and the pressing structure, initially, the pressure plate switches to an avoidance state under the drive of the second driving member, allowing the sheet assembly to be smoothly placed on the first platform. Then, the second driving member drives the pressure plate to switch to a blocking state, and the first driving member drives the pressure plate to descend, pressing the diaphragm firmly against the first platform. The diaphragm is stably placed on the first platform, while the sheet is protected by the avoidance area and the third avoidance hole, ensuring that the particles of the sheet can be accurately and reliably removed from the diaphragm, making the tray placement operation highly reliable. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the feeding device of the present invention.

[0018] Figure 2 This is a schematic diagram of the sheet assembly in this invention.

[0019] Figure 3 This is a schematic diagram of the feeding device of the present invention after removing the ejector pin mechanism and the first adjustment module.

[0020] Figure 4 yes Figure 3 A cross-sectional schematic diagram.

[0021] Figure 5 This is an exploded structural diagram of the mounting disk, the first driving component, and the pressing structure in this invention.

[0022] Figure 6 This is a schematic diagram of the pressure plate in the avoidance state in this invention.

[0023] Figure 7 This is a schematic diagram of the state when the pressure plate is in a blocking state in this invention.

[0024] Figure 8 yes Figure 3 A schematic diagram of its decomposed structure.

[0025] Figure 9 This is a schematic diagram of the ejector mechanism in this invention.

[0026] Figure 10 This is a schematic diagram of the structure of the tray-stacking device of the present invention.

[0027] Figure 11 This is a schematic diagram of the installation of the feeding device, the storage device, and the swing arm device in this invention.

[0028] Figure 12 This is a schematic diagram of the structure of the first transport mechanism in this invention.

[0029] Figure 13 This is a schematic diagram of the structure of the second transport mechanism in this invention.

[0030] Explanation of icon numbers: 100. Feeding device; 110. First mounting bracket; 111. Mounting bracket body; 112. Rotary seat; 1121. Guide groove; 113. Guide bearing; 120. First platform; 121. Gear; 130. Mounting plate; 131. Base plate; 1311. First clearance hole; 132. Cover plate; 1321. Second clearance hole; 1322. Guide hole; 133. Connecting ring; 140. First driving component ; 151. Transmission plate; 1511. Third clearance hole; 1512. Slide groove; 1513. Transmission rack; 152. Second driving component; 1521. Transmission gear; 153. Pressure plate; 1531. Plate body; 1532. Guide part; 1533. Guide pin; 1534. Arc-shaped side; 160. First driving assembly; 170. Ejector pin mechanism; 171. Ejector pin assembly; 1711. Ejector rod; 1712 172. Ejector pin; 180. Second drive assembly; 200. First adjustment module; 210. Sheet assembly; 220. Diaphragm; 300. Sheet; 310. Storage device; 320. Second mounting bracket; 330. Second platform; 400. Swing arm device; 410. Swing arm; 420. Third drive assembly; 430. Vision assembly; 500. Conveying device; 510. First conveyor line; 520. Second conveyor line; 530. Third conveyor line; 600. Handling device; 610. First handling mechanism; 611. First handling module; 612. First support; 613. First pick-and-place assembly; 614. Second pick-and-place assembly; 615. Third drive component; 620. Second handling mechanism; 621. Second handling module; 622. Second support; 623. Third pick-and-place assembly; 700. Carrier tray. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, it should be noted that, for ease of description, only the parts relevant to this application are shown in the accompanying drawings, not the entire structure. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without inventive effort are within the scope of protection of this application.

[0032] The terms “comprising” and “having”, and any variations thereof, used in this application are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0033] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] Please see Figures 1 to 3 As shown, a feeding device 100 corresponding to a preferred embodiment of the present invention includes: a first mounting frame 110; a first platform 120 disposed on the first mounting frame 110; a mounting plate 130 located above the first platform 120, and having a clearance area for placing the sheet assembly 200 on the first platform 120 through its central portion along the Z-axis direction; a first driving member 140 disposed on the first mounting frame 110 and connected to the mounting plate 130 in a transmission manner; and a pressing structure including a transmission plate 151 disposed on the mounting plate 130, a second driving member 152, and a pressure plate 153 disposed on the mounting plate 130. The transmission plate 151 is rotatable about a direction parallel to the Z-axis, and the transmission plate 151 has a third clearance area for placing the sheet assembly 200 on the first platform 120. Hole 1511, second drive member 152 is adapted to drive transmission disk 151 to rotate, pressure plate 153 switches to avoidance state or blocking state in response to the rotation of transmission disk 151; wherein, sheet assembly 200 includes diaphragm 210 and sheet 220 attached to diaphragm 210 and in a split state, when pressure plate 153 is in avoidance state, the projection of sheet assembly 200 supported on first platform 120 and pressure plate 153 in the Z-axis direction does not coincide, and when pressure plate 153 is in blocking state, the projection of diaphragm 210 and pressure plate 153 in the Z-axis direction partially coincides, and the projection of sheet 220 and pressure plate 153 in the Z-axis direction does not coincide, and pressure plate 153 presses diaphragm 210 downward along Z-axis in response to the drive of first drive member 140.

[0035] The present invention employs the above-described structure, in which the sheet 220 is attached to the diaphragm 210, preventing the particles from the sheet 220 from being scattered haphazardly, and the feeding device 100 can fix the diaphragm 210, resulting in good positional reliability of the sheet 220 and making subsequent gripping and tray placement more convenient, thus improving tray placement efficiency; furthermore, by setting up the mounting plate 130, the first driving member 140, and the pressing structure, initially, the pressure plate 153 switches to an avoidance state under the drive of the second driving member 152, so that the sheet assembly The diaphragm 210 can be smoothly placed on the first stage 120. Then, the second drive unit 152 drives the pressure plate 153 to switch to the blocking state, and the first drive unit 140 drives the pressure plate 153 to descend, so as to press the diaphragm 210 against the first stage 120. The diaphragm 210 is stably placed on the first stage 120, while the sheet 220 is avoided by the avoidance area and the third avoidance hole 1511, ensuring that the particles of the sheet 220 can be accurately and reliably removed from the diaphragm 210, and the tray operation is very reliable.

[0036] Furthermore, referring to Figure 4 and Figure 5 As shown, the mounting plate 130 includes a base plate 131 and a cover plate 132 located above the base plate 131. The base plate 131 and the cover plate 132 are coaxially arranged in annular structure. A first clearance hole 1311 is coaxially formed in the middle of the base plate 131, and a second clearance hole 1321 is coaxially formed in the middle of the cover plate 132. The first clearance hole 1311 and the second clearance hole 1321 cooperate to form the aforementioned clearance area. A connecting ring 133 is connected between the base plate 131 and the cover plate 132 to form a receiving area for mounting the pressure plate 153. The connecting ring 133 can be integrally formed with the cover plate 132 and is arranged around the outer edge of the cover plate 132. The bottom of the connecting ring 133 is detachably connected to the base plate 131. Admittedly, in other embodiments, the connecting ring 133 can also be integrally formed with the base plate 131 and detachably connected to the cover plate 132.

[0037] The first driving component 140 is a linear cylinder arranged along the Z-axis, with its output end connected to the bottom of the base plate 131 to support and drive the mounting plate 130 to rise and fall along the Z-axis. Preferably, there are multiple first driving components 140, which are arranged at equal intervals along the circumference of the mounting plate 130. Multiple first driving components 140 cooperate to support and drive the mounting plate 130 to rise and fall, thereby improving the reliability of support and rising / falling.

[0038] Furthermore, the transmission disc 151 is coaxially disposed on the base plate 131 and housed within the connecting ring 133. The inner edge of the connecting ring 133 is adapted to guide the transmission disc 151 to rotate around its axis. The cover plate 132 is located above the transmission disc 151 to prevent the transmission disc 151 from detaching from the mounting plate 130. The top surface of the transmission disc 151 has an inwardly recessed groove 1512. The groove 1512 extends tangentially along the transmission disc 151 and is arranged in a circumferential array around the axis of the transmission disc 151. Multiple pressure plates 153 are arranged circumferentially along the transmission disc 151. Each pressure plate 153 corresponds to one of the grooves 1512. Part of the pressure plate is placed in the groove 1512 and can slide along the groove 1512, while the other part protrudes relative to the inner wall of the third clearance hole 1511. When the transmission disc 151 rotates, the pressure plate 153 can rotate under the push of the slide groove 1512 to adjust its protrusion relative to the inner wall of the third clearance hole 1511, thereby switching to the clearance state or the blocking state.

[0039] Furthermore, the pressure plate 153 includes a plate body 1531 and a guide portion 1532 protruding from the bottom of the plate body 1531. The guide portion 1532 is adapted to the slide groove 1512 and is embedded in the slide groove 1512. There is a gap between the top surface of the transmission disk 151 and the bottom surface of the cover plate 132. The plate body 1531 is fitted between the top surface of the transmission disk 151 and the bottom surface of the cover plate 132 to achieve axial positioning of the transmission disk 151 and the plate body 1531 on the mounting disk 130. Part of the plate body 1531 protrudes relative to the inner wall of the third clearance hole 1511 to press against the diaphragm 210. A guide pin 1533 is fixed on the pressure plate 153. The axial direction of the guide pin 1533 is parallel to the axial direction of the transmission disc 151, and its top protrudes relative to the top of the plate 1531. A guide hole 1322 is provided through the cover plate 132 at the position corresponding to the guide pin 1533. The guide hole 1322 is a strip-shaped hole, and the guide pin 1533 passes through the guide hole 1322. The guide hole 1322 is suitable for guiding the pressure plate 153 during rotation. The guide hole 1322 and the slide groove 1512 can cooperate with each other to make the pressure plate 153 rotate smoothly and reliably along the preset path to the avoidance state or the blocking state.

[0040] Preferably, in this embodiment, the diaphragm 210 is a circular sheet, and the sheet 220 is located in the central region of the diaphragm 210. The plate 1531 has an arcuate side 1534 facing the third clearance hole 1511. (Refer to...) Figure 6 and Figure 7As shown, when each pressure plate 153 switches to the clearance state, each arc-shaped side 1534 surrounds and forms a circular hole coaxial with the third clearance hole 1511. The inner diameter of the circular hole is larger than the outer diameter of the diaphragm 210 to allow the sheet assembly 200 to pass through and be placed on the first platform 120. When each pressure plate 153 switches to the blocking state, the corner of one end of the arc-shaped side 153 of the pressure plate 153 is close to the center of the transmission disk 151, and the corner of the other end is far away from the center of the transmission disk 151, so that the corner close to the center of the transmission disk 151 can be used to press against the diaphragm 210.

[0041] The inner diameter of the first clearance hole 1311 is larger than the inner diameter of the third clearance hole 1511; the inner diameter of the second clearance hole 1321 is smaller than the inner diameter of the third clearance hole 1511, and larger than the inner diameter of the circular hole formed by the arc-shaped side 1534. A transmission rack 1513 is provided at the bottom of the transmission disk 151. The transmission rack 1513 is an arc-shaped rack coaxial with the transmission disk 151. The second driving member 152 is a rotary motor fixed to the base plate 131. A transmission gear 1521 is provided at its output end. The transmission gear 1521 meshes with the transmission rack 1513. The transmission disk 151 is adapted to rotate clockwise to the first preset position under the transmission of the transmission gear 1521 and the transmission rack 1513, so that the pressure plate 153 is in a clearance state, or rotate counterclockwise to the second preset position, so that the pressure plate 153 is in a blocking state.

[0042] Furthermore, referring to Figure 3 and Figure 8 As shown, the first mounting frame 110 includes a mounting frame body 111 and a rotating base 112. The rotating base 112 is disposed on the mounting frame body 111 and can rotate about a direction parallel to the Z-axis. The first stage 120 and the first driving member 140 are both fixedly connected to the rotating base 112. A first driving assembly 160 is disposed on the mounting frame body 111, which is adapted to drive the first stage 120 to rotate. By adopting the above structure, the diaphragm 210 can rotate about a direction parallel to the Z-axis, so that the position can be corrected after the sheet assembly 200 is placed on the first stage 120, ensuring that the particles of the sheet 220 are arrayed along the X-axis and Y-axis, which facilitates subsequent tray placement.

[0043] Specifically, both the first platform 120 and the rotating seat 112 have circular outer contours. The first platform 120 is coaxially mounted on the top of the rotating seat 112, and the first driving member 140 is fixed to the outer periphery of the rotating seat 112, enabling the first platform 120 and the first driving member 140 to rotate synchronously with the rotating seat 112. A guide groove 1121 is recessed inward on the outer periphery of the rotating seat 112. The mounting frame body 111 has several guide bearings 113 on the periphery of the rotating seat 112, with the guide bearings 113 partially embedded in the guide groove 1121 to support and guide the rotation of the rotating seat 112. A toothed portion 121 is formed on the outer periphery of the first platform 120. The first driving assembly 160 is a motor-driven belt system, with the belt of the first driving assembly 160 meshing with the toothed portion 121 to drive the first platform 120 to rotate.

[0044] Preferably, both the first platform 120 and the rotating seat 112 are annular structures, and both have an inner hole in the middle that is coaxial with the outer edge. The mounting frame body 111 is a through structure corresponding to the middle of both. (Refer to...) Figure 1 and Figure 9 As shown, the feeding device 100 also includes a pin mechanism 170, which includes a pin assembly 171 and a second drive assembly 172. The second drive assembly 172 is located below the first mounting frame 110. The lower end of the pin assembly 171 is connected to the second drive assembly 172, and the upper end passes through the mounting frame body 111, the rotating seat 112, and the first platform 120 in sequence, passing through the clearance area and the third clearance hole 1511. The outer edge of the diaphragm 210 is supported by the first platform 120, and the middle part is suspended. The pin assembly 171 is adapted to support the particles to be removed from the sheet 220 along the Z-axis under the drive of the second drive assembly 172, so that the pick-and-place structure can more reliably remove the particles.

[0045] The second drive assembly 172 can use a motor in conjunction with a cam to achieve the reciprocating lifting and lowering of the ejector assembly 171. The ejector assembly 171 includes an ejector rod 1711 and ejector pins 1712. The ejector rod 1711 is arranged along the Z-axis direction, and its lower end is in transmission engagement with the second drive assembly 172. The ejector pins 1712 are fixed to the upper end of the ejector rod 1711. There is at least one ejector pin 1712, preferably four in this embodiment, to support one particle. Preferably, the ejector rod 1711 can also be provided with a debinding structure. When the ejector rod 1711 drives the ejector pins 1712 to rise, it can debind the particle to be removed, facilitating the removal of the particle.

[0046] In addition, the feeding device 100 also includes a first adjustment module 180, which is connected to the mounting frame body 111 to drive the mounting frame body 111 to move along the X-axis and Y-axis directions.

[0047] The feeding device 100 of the present invention operates as follows: Initially, the pressure plate 153 is in a clearance state, and the sheet assembly 200 is coaxially placed on the first platform 120; then the second driving member 152 drives the pressure plate 153 to switch to the blocking state, and then the first driving member 140 drives the mounting plate 130 to descend, so that the pressure plate 153 presses against multiple areas on the outer edge of the diaphragm 210; the first adjustment module 180 drives the first platform 120 to move step by step along a preset path, so that each particle on the sheet 220 flows to the picking position one by one, and each time the first platform 120 moves one step, the ejector pin mechanism 170 lifts the particle at the picking position upward, and then the picking structure removes the particle; after all the particles are removed, the mounting plate 130 rises, the pressure plate 153 releases the diaphragm 210 and resets to the clearance state, so that the picking structure can remove the unloaded diaphragm 210.

[0048] Furthermore, referring to Figure 10 As shown, the present invention also provides a tray-loading device, including the aforementioned feeding device 100, receiving device 300, swing arm device 400, conveying device 500, and handling device 600. The receiving device 300 is used to receive empty trays 700, and the swing arm device 400 is located between the feeding device 100 and the receiving device 300 to transfer particles from the feeding device 100 to the trays 700.

[0049] Furthermore, referring to Figure 11 As shown, the storage device 300 includes a second mounting frame 310, a second platform 320, and a second adjustment module 330. The second mounting frame 310 is convex with the second adjustment module 330. The structure of the second adjustment module 330 is the same as that of the first adjustment module 180, and will not be described again here. The second platform 320 is disposed on the second mounting frame 310 and is used to support and fix the tray 700. During operation, the second adjustment module 330 is adapted to drive the tray 700 to move stepwise along a preset path, so that each storage compartment of the tray 700 flows to the discharge position of the swing arm device 400 one by one, so that the particles are placed one by one into the tray 700.

[0050] The swing arm device 400 includes a swing arm 410 and a third drive assembly 420 for driving the swing arm 410. The end of the swing arm 410 is provided with a vacuum adsorption component for picking up and placing particles. Driven by the third drive assembly 420, the swing arm 410 can swing to a picking position or a discharging position in a direction parallel to the Z-axis. When swinging to the picking position or discharging position, it descends along the Z-axis, and when swinging away from the picking position or discharging position, it rises along the Z-axis to achieve particle transfer and tray placement. The swing arm device 400 is a conventional structure, and will not be described in detail here.

[0051] Preferably, the swing arm device 400 further includes two vision components 430, which correspond to the first stage 120 and the second stage 320 respectively, to acquire image information of the sheet assembly 200 and the carrier tray 700. The vision component 430 corresponding to the first stage 120 can correct the position of the sheet assembly 200 and inspect the appearance of the particles, while the vision component 430 corresponding to the second stage 320 can check whether the particles on the carrier tray 700 are placed correctly.

[0052] Furthermore, referring to Figure 10 , Figure 12 and Figure 13 As shown, the conveying device 500 includes a first conveyor line 510, a second conveyor line 520, and a third conveyor line 530. The first conveyor line 510 is used to input the sheet assembly 200. Specifically, the input end of the first conveyor line 510 is connected to the preceding dicing equipment, allowing the sheet assembly 200 output from the preceding dicing equipment to flow to the first conveyor line 510. The second conveyor line 520 is used to input empty trays 700, and the third conveyor line 530 is used to output fully loaded trays 700. The handling device 600 includes a first handling mechanism 610 and a second handling mechanism 620. The first handling mechanism 610 is adapted to handle the sheet assembly 200 from the first conveyor line 510 to the first platform 120. The second handling mechanism 620 is adapted to handle the empty trays 700 from the second conveyor line 520 to the second platform 320, or to handle the fully loaded trays 700 from the second platform 320 to the third conveyor line 530.

[0053] The conveying directions of the first conveyor line 510, the second conveyor line 520, and the third conveyor line 530 are parallel to the X-axis direction. The feeding device 100, the swing arm device 400, and the receiving device 300 are arranged along the X-axis direction outside the second conveyor line 520 in the Y-axis direction. In this embodiment, two swing arm devices 400 are arranged at intervals along the X-axis direction, and the feeding device 100 and the receiving device 300 correspond one-to-one with the swing arm device 400, thereby enabling the two trays 700 to be tilted simultaneously, effectively improving the tilting efficiency.

[0054] Preferably, the two storage devices 300 are arranged adjacent to each other, with one feeding device 100 located outside the first storage device 300 in the X-axis direction, and the other feeding device 100 located outside the second storage device 300 in the X-axis direction. There are two first conveying mechanisms 610, corresponding one-to-one with the feeding devices 100. The two first conveying mechanisms 610 are located near the input and output ends of the first conveyor line 510, respectively. That is, the first conveyor line 510 has two loading positions for removing sheet assemblies 200, and each first conveying mechanism 610 can independently convey sheet assemblies 200 at different loading positions. There is one second conveying mechanism 620, located between the two first conveying mechanisms 610, and its conveying range covers both storage devices 300 simultaneously. By adopting the above structure, the number of second conveying mechanisms 620 can be reduced, thus lowering costs.

[0055] Further, the first handling mechanism 610 includes a first handling module 611, a first support 612, a first pick-and-place assembly 613, and a second pick-and-place assembly 614. The first support 612 is drivenly connected to the first handling module 611, and the first handling module 611 can drive the first support 612 to move along the X-axis, Y-axis, and Z-axis directions. The first pick-and-place assembly 613 and the second pick-and-place assembly 614 are both disposed on the first support 612, and at least one of the first pick-and-place assembly 613 and the second pick-and-place assembly 614 is drivenly connected to the first support 612 by a third driving member 615, which is a linear cylinder arranged along the Z-axis direction. Both the first pick-and-place assembly 613 and the second pick-and-place assembly 614 are vacuum adsorption structures. The first pick-and-place assembly 613 is used to pick up and place the sheet assembly 200, and the second pick-and-place assembly 614 is used to pick up and place the empty diaphragm 210 after the tray is set up. Preferably, both the first pick-and-place component 613 and the second pick-and-place component 614 are used to adsorb the outer edge of the membrane 210 to avoid damaging the sheet 220.

[0056] Furthermore, the second handling mechanism 620 includes a second handling module 621, a second support 622, and a third pick-and-place assembly 623. The second support 622 is drively connected to the second handling module 621, and the second handling module 621 can drive the second support 622 to move along the X-axis, Y-axis, and Z-axis directions. The third pick-and-place assembly 623 is disposed on the second support 622, and it is a gripper structure capable of clamping or releasing the carrier plate 700. One or two third pick-and-place assemblies 623 can be provided as needed.

[0057] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A feeding device, characterized in that, include: First mounting bracket (110); The first platform (120) is disposed on the first mounting frame (110). The mounting plate (130) is located above the first platform (120), and its middle part is provided with a clearance area for the sheet assembly (200) to be placed on the first platform (120) along the Z-axis direction; The first driving member (140) is disposed on the first mounting bracket (110) and is connected in a transmission manner to the mounting plate (130); The pressing structure includes a transmission disk (151) disposed on the mounting disk (130), a second driving member (152) and a pressure plate (153) disposed on the mounting disk (130). The transmission disk (151) is rotatable about a direction parallel to the Z-axis. The transmission disk (151) has a third clearance hole (1511) for placing the sheet assembly (200) on the first platform (120). The second driving member (152) is adapted to drive the transmission disk (151) to rotate. The pressure plate (153) switches to a clearance state or a blocking state in response to the rotation of the transmission disk (151). The sheet assembly (200) includes a diaphragm (210) and a sheet (220) attached to the diaphragm (210) and in a ruptured state. When the pressure plate (153) is in a clearance state, the projection of the sheet assembly (200) supported on the first platform (120) and the pressure plate (153) in the Z-axis direction does not coincide. When the pressure plate (153) is in a blocking state, the projection of the diaphragm (210) and the pressure plate (153) in the Z-axis direction partially coincides, and the projection of the sheet (220) and the pressure plate (153) in the Z-axis direction does not coincide. The pressure plate (153) presses against the diaphragm (210) downward along the Z-axis in response to the drive of the first drive member (140).

2. The feeding device as described in claim 1, characterized in that, The installation disk (130) includes: The base plate (131) is connected to the output end of the first driving member (140). The base plate (131) has a circular structure and a first clearance hole (1311) is provided in the middle. The cover plate (132) has a circular structure and is coaxially disposed above the bottom plate (131). A second clearance hole (1321) with the same axis as the first clearance hole (1311) is provided in the middle. The first clearance hole (1311) and the second clearance hole (1321) cooperate to form the clearance area. A connecting ring (133) is attached between the base plate (131) and the cover plate (132); The transmission disc (151) is coaxially disposed between the base plate (131) and the cover plate (132) and housed within the connecting ring (133). The inner edge of the connecting ring (133) is adapted to guide the transmission disc (151) to rotate.

3. The feeding device as described in claim 2, characterized in that, The inner diameter of the first clearance hole (1311) is larger than the inner diameter of the third clearance hole (1511), and the inner diameter of the second clearance hole (1321) is smaller than the inner diameter of the third clearance hole (1511). A transmission rack (1513) is provided at the bottom of the transmission disk (151), and the second driving member (152) is provided on the base plate (131), and its output end is provided with a transmission gear (1521) that meshes with the transmission rack (1513).

4. The feeding device as described in claim 2, characterized in that, Multiple pressure plates (153) are arranged along the circumference of the transmission disk (151). The top surface of the transmission disk (151) is recessed inward to form a sliding groove (1512) corresponding to each pressure plate (153). The pressure plates (153) are partially slidably placed in the sliding groove (1512). Each pressure plate (153) responds to the rotation of the transmission disk (151) and synchronously switches to the avoidance state or synchronously switches to the blocking state.

5. The feeding device as described in claim 4, characterized in that, The pressure plate (153) includes: The plate (1531) is fitted between the top surface of the transmission disc (151) and the bottom surface of the cover plate (132), and part of the plate (1531) protrudes relative to the inner wall of the third clearance hole (1511) to press against the diaphragm (210). A guide portion (1532) protrudes from the bottom of the plate (1531), and the guide portion (1532) is slidably embedded in the groove (1512). The guide pin (1533) has its axis parallel to the axis of the transmission disc (151), and its top protrudes relative to the top of the plate (1531). The cover plate (132) has a guide hole (1322) through it at the position corresponding to the guide pin (1533), and the guide pin (1533) passes through the guide hole (1322).

6. The feeding device as described in claim 1, characterized in that, The first drive element (140) is evenly distributed in multiples along the circumference of the mounting plate (130).

7. The feeding device as described in claim 1, characterized in that, The first mounting bracket (110) includes: Mounting bracket body (111); A rotating seat (112) is disposed on the mounting frame body (111) and can rotate about a direction parallel to the Z-axis; The first platform (120) and the first driving member (140) are both fixedly connected to the rotating seat (112). The mounting frame body (111) is provided with a first driving component (160), which is adapted to drive the first platform (120) to rotate.

8. The feeding device as described in claim 7, characterized in that, The outer contours of the first platform (120) and the rotating seat (112) are both circular. The first platform (120) is coaxially disposed on the top of the rotating seat (112). The outer periphery of the rotating seat (112) is recessed inward to form a guide groove (1121). The first mounting frame (110) includes a plurality of guide bearings (113) disposed on the mounting frame body (111). The guide bearings (113) surround the outer periphery of the rotating seat (112) and are partially embedded in the guide groove (1121) to support and guide the rotation of the rotating seat (112).

9. The feeding device as described in claim 8, characterized in that, The first stage (120) has a ring of teeth (121) formed on its outer periphery, and the first drive assembly (160) is adapted to engage with the teeth (121) to drive the first stage (120) to rotate.

10. A tray-stacking device, characterized in that, Includes the feeding device (100) as described in any one of claims 1 to 9.

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