A chip continuous extraction device for dry etching machine

Abstract

The application relates to the technical field of chip extraction, in particular to a continuous chip extraction device for a dry etching machine, which comprises a base and a horizontal plate, the horizontal plate is fixedly connected to the base, protrusions are fixedly connected to the horizontal plate, a mounting seat is slidably connected to the protrusions, a rotating shaft is rotatably connected to the mounting seat, a cam is fixedly connected to one end of the rotating shaft away from the mounting seat, a supporting plate is fixedly connected to the cam, an extraction component is installed on the supporting plate, the extraction component comprises a pressing plate, an air bag, a limiting rod and an expansion bag, in the application, the expansion bag is used to replace the supporting plate to hold up the chip, the chip is positioned in the middle of the limiting groove and does not contact the mounting seat, then the hydraulic rod is elongated and the mounting seat is pushed to reset, at this time, the supporting plate and the expansion bag are used to take out the chip and make the chip away from the placing box, the effect of rapidly extracting the chip is achieved, and the chip is prevented from being damaged due to friction with the placing box during the chip extraction process.

Description

Technical Field

[0001] This invention relates to the field of chip extraction technology, and in particular to a continuous chip extraction device for a dry etching machine. Background Technology

[0002] Dry etching is an etching process performed under atmospheric or vacuum conditions. It typically uses ions or chemicals in a gas to remove parts of the material surface. By adjusting the mask and etching parameters, it is possible to switch between anisotropic and isotropic etching to form the desired pattern or structure.

[0003] In existing technologies, a robotic arm in a dry etching machine is used to place the chip into a vacuum chamber for processing. However, when the chip is placed on a storage rack and the robotic arm is used to pick it up, friction between the chip and the storage rack can easily occur, causing the chip to wear down and affecting subsequent chip processing. At the same time, dust adhering to the surface can also affect the processing quality. Summary of the Invention

[0004] The purpose of this invention is to address the following shortcomings in the prior art: the prior art requires a robotic arm in a dry etching machine to place the chip into a vacuum chamber for processing. However, when the chip is placed on a storage rack and the robotic arm is used to extract the chip, friction between the chip and the storage rack is easily caused, resulting in chip wear and affecting subsequent chip processing. At the same time, dust adhering to the surface also affects the processing quality. Therefore, this invention proposes a continuous chip extraction device for a dry etching machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A continuous chip extraction device for a dry etching machine includes a base and a horizontal plate, wherein the horizontal plate is fixedly connected to the base.

[0007] A protrusion is fixedly connected to the horizontal plate, a mounting base is slidably connected to the protrusion, a rotating shaft is rotatably connected to the mounting base, a cam is fixedly connected to the end of the rotating shaft away from the mounting base, a support plate is fixedly connected to the cam, an extraction component is mounted on the support plate, the extraction component includes a squeezing plate, an airbag, a limiting rod, and an expansion bag, a groove is formed on the support plate, the expansion bag is fixedly connected in the groove, two limiting rods are fixedly connected to the support plate, the squeezing plate is slidably connected to the two limiting rods, the airbag is fixedly connected between the support plate and the squeezing plate, a straight tube is fixedly connected between the airbag and the expansion bag, and a spring is fixedly connected between the support plate and the squeezing plate.

[0008] A placement box is fixedly connected to the base. Limiting grooves are respectively opened at both ends of the placement box. A connecting pipe is fixedly connected to the base. A support plate is slidably connected to one end of the connecting pipe. The end of the support plate away from the connecting pipe is fixedly connected to the placement box.

[0009] Preferably, the extraction component further includes trapezoidal plates, and multiple trapezoidal plates are respectively fixedly connected to the inner walls at both ends of the placement box.

[0010] Preferably, the horizontal plate is hollow, and one end of the horizontal plate is connected to the end of the connecting pipe away from the extrusion plate.

[0011] Preferably, a vertical plate is fixedly connected to the end of the horizontal plate away from the connecting pipe, an air bag is fixedly connected to the vertical plate, an air supply pipe is fixedly connected between the air bag and the horizontal plate, an air inlet pipe is fixedly connected to the air bag, a one-way valve is installed on both the air inlet pipe and the air supply pipe, and the air bag is located on one side of the mounting base.

[0012] Preferably, a first gear is fixedly connected to the rotating shaft, and the first gear is disposed between the cam and the mounting base.

[0013] Preferably, a servo motor is fixedly connected to one of the outer side walls of the mounting base, and a second gear is fixedly connected to the drive shaft of the servo motor, the second gear meshing with the first gear.

[0014] Preferably, a hydraulic rod is fixedly connected to the base, and the end of the hydraulic rod away from the base is fixedly connected to the mounting base.

[0015] Preferably, an exhaust box is fixedly connected to the pallet, an exhaust port is provided on one side wall of the exhaust box, and an exhaust pipe is fixedly connected to the exhaust box.

[0016] Preferably, a flexible hose is fixedly connected to the airbag, and the flexible hose is connected to the exhaust pipe.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] 1. The extrusion plate gradually moves closer to the support plate, compressing the airbag and spring. After the airbag is compressed, the internal gas enters the expansion bag through the straight tube. The expansion bag expands due to the increase in gas, thus contacting the lower surface of the chip. At this time, the expansion bag replaces the support plate to lift the chip, placing the chip in the middle of the limiting groove without contacting the mounting base. Then, the hydraulic rod extends and pushes the mounting base to its reset position. At this time, the support plate and the expansion bag remove the chip and move it away from the placement box, achieving the effect of rapid chip extraction and avoiding damage caused by friction with the placement box during chip extraction.

[0019] 2. Simultaneously, after the chip is extracted from the tray using an expansion bag, since the inner diameter of the exhaust pipe is much smaller than that of the straight pipe, the gas in the expansion bag will slowly enter the exhaust box from the exhaust pipe and be discharged to the upper surface of the chip through the exhaust port. This can blow off the dust attached to the upper surface of the chip, thus ensuring the dry etching machine can process the chip.

[0020] 3. Simultaneously, as the gas inside the expansion bag is slowly discharged through the exhaust pipe, the expansion bag contracts and no longer supports the chip. At this time, the chip is on the tray, which supports the chip so that it can be transported to the vacuum chamber in the dry etching machine for processing.

[0021] 4. The gas in the inflatable bag enters the connecting pipe through the gas supply pipe and the horizontal plate. As the gas in the connecting pipe increases, it can push the support plate to move up. When the support plate moves up to the amount of gas in the inflatable bag, the placement box can be used to extract the chip from the next placement box. Therefore, the placement box will rise once every time a chip is extracted, so as to achieve the effect of extracting the chips in the placement box in sequence. Attached Figure Description

[0022] Figure 1 This is a front structural schematic diagram of a continuous chip extraction device for a dry etching machine proposed in this invention;

[0023] Figure 2 This is a schematic diagram of the extrusion plate structure of a continuous chip extraction device for a dry etching machine proposed in this invention;

[0024] Figure 3 This is a schematic diagram of the mounting base structure of a continuous chip extraction device for a dry etching machine proposed in this invention;

[0025] Figure 4 This is a schematic diagram of the support plate structure of a continuous chip extraction device for a dry etching machine proposed in this invention;

[0026] Figure 5 This is a schematic diagram of the placement box structure of a chip continuous extraction device for a dry etching machine proposed in this invention;

[0027] Figure 6 This is a schematic diagram of the flexible tube structure of a continuous chip extraction device for a dry etching machine proposed in this invention;

[0028] Figure 7 This is a schematic diagram of the connecting pipe structure of a continuous chip extraction device for a dry etching machine proposed in this invention.

[0029] In the diagram: 1. Base, 2. Connecting pipe, 3. Protrusion, 4. Servo motor, 5. Horizontal plate, 6. Inflatable bag, 7. Air supply pipe, 8. Vertical plate, 9. First gear, 10. Expansion bag, 11. Support plate, 12. Cam, 13. Trapezoidal plate, 14. Placement box, 15. Airbag, 16. Extrusion plate, 17. Spring, 18. Limiting rod, 19. Exhaust pipe, 20. Exhaust box, 21. Rotating shaft, 22. Second gear, 23. Inlet pipe, 24. Mounting seat, 25. Support plate, 26. Straight pipe, 27. Hose, 28. Hydraulic rod. Detailed Implementation

[0030] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0031] Reference Figures 1-7 A continuous chip extraction device for a dry etching machine includes a base 1 and a horizontal plate 5. The horizontal plate 5 is fixedly connected to the base 1 and is hollow inside. One end of the horizontal plate 5 is connected to the end of the connecting pipe 2 away from the extrusion plate 16.

[0032] A protrusion 3 is fixedly connected to the horizontal plate 5, and a mounting base 24 is slidably connected to the protrusion 3. A hydraulic rod 28 is fixedly connected to the base 1, and the end of the hydraulic rod 28 away from the base 1 is fixedly connected to the mounting base 24. The hydraulic rod 28 can push the mounting base 24 to move horizontally back and forth. A first gear 9 is fixedly connected to the rotating shaft 21, and the first gear 9 is located between the cam 12 and the mounting base 24. The protrusion 3 can limit the mounting base 24, so that the mounting base 24 can only move horizontally. The rotating shaft 21 is rotatably connected to the mounting base 24, and a cam 12 is fixedly connected to the end of the rotating shaft 21 away from the mounting base 24. A support plate 11 is fixedly connected to the cam 12, and the support plate 11 is used to transport the chip. A servo motor 4 is fixedly connected to one of the outer side walls of the mounting base 24. A second gear 22 is fixedly connected to the drive shaft of the servo motor 4, and the second gear 22 meshes with the first gear 9. An extraction component is installed on the support plate 11. The components include a compression plate 16, an airbag 15, a limiting rod 18, and an expansion bag 10. A groove is provided on the support plate 11, and the expansion bag 10 is fixedly connected in the groove. After the expansion bag 10 expands, its upper sidewall will protrude outside the groove. After the expansion bag 10 contracts, it will be inside the groove. Two limiting rods 18 are fixedly connected to the support plate 11. The compression plate 16 is slidably connected to the two limiting rods 18. The airbag 15 is fixedly connected between the support plate 11 and the compression plate 16. A straight pipe 26 is fixedly connected between the airbag 15 and the expansion bag 10. The inner diameter of the straight pipe 26 is much larger than the inner diameter of the exhaust pipe 19. Therefore, when the airbag 15 is compressed, it will quickly fill the expansion bag 10 and expand to the maximum extent. Then, it will slowly be discharged through the hose 27 until the gas is discharged. The expansion bag 10 and the airbag 6 have automatic contraction properties. A spring 17 is fixedly connected between the support plate 11 and the compression plate 16. The spring 17 is used to push the compression plate 16 down and reset.

[0033] The extraction component also includes a trapezoidal plate 13, which is a right-angled trapezoid with one end of its upper surface being inclined. Multiple trapezoidal plates 13 are fixedly connected to the inner walls of both ends of the placement box 14. An exhaust box 20 is fixedly connected to the tray 11. An exhaust port is opened on one side wall of the exhaust box 20. An exhaust pipe 19 is fixedly connected to the exhaust box 20. A flexible hose 27 is fixedly connected to the airbag 15. The flexible hose 27 is connected to the exhaust pipe 19.

[0034] A placement box 14 is fixedly connected to the base 1. Limiting grooves are opened at both ends of the placement box 14. A connecting pipe 2 is fixedly connected to the base 1. A support plate 25 is slidably connected to one end of the connecting pipe 2. The end of the support plate 25 away from the connecting pipe 2 is fixedly connected to the placement box 14. A vertical plate 8 is fixedly connected to the end of the horizontal plate 5 away from the connecting pipe 2. An air bag 6 is fixedly connected to the vertical plate 8. An air supply pipe 7 is fixedly connected between the air bag 6 and the horizontal plate 5. An air inlet pipe 23 is fixedly connected to the air bag 6. A one-way valve is installed on both the air inlet pipe 23 and the air supply pipe 7. The air bag 6 is located on one side of the mounting base 24.

[0035] In this invention, during use, the operator first places multiple chips into the limiting slots in the placement box 14, as shown in the attached diagram. Figure 1 As shown, firstly, the servo motor 4 is driven. When the servo motor 4 is driven, it can drive the second gear 22 to rotate. The second gear 22 drives the meshing first gear 9 to rotate. After the cam 12 rotates 90 degrees with the first gear 9 via the rotating shaft 21, the support plate 11 is located on one side of the placement box 14. Then, the hydraulic rod 28 retracts, driving the mounting base 24 to move towards the placement box 14 on the protrusion 3. It can move to the lower position of the limiting groove where the chip is placed. At the same time, the extrusion plate 16 can slide on the upper surface of the trapezoidal plate 13 and is limited by the trapezoidal plate 13, so that the extrusion plate 16 gradually moves towards the support plate 11. The airbag 15 and spring 17 are compressed. After the airbag 15 is compressed, the gas inside enters the expansion bag 10 through the straight tube 26. The expansion bag 10 expands due to the increase in gas, thus contacting the lower surface of the chip. At this time, the expansion bag 10 replaces the support plate 11 to lift the chip and make the chip in the middle of the limiting groove, without contacting the mounting base 24. Then the hydraulic rod 28 extends and pushes the mounting base 24 to reset. At this time, the support plate 11 and the expansion bag 10 remove the chip and move it away from the placement box 14, achieving the effect of rapid chip extraction and avoiding damage caused by friction with the placement box 14 during chip extraction.

[0036] Meanwhile, after the chip is extracted from the tray 11 using the expansion bag 10, since the inner diameter of the exhaust pipe 19 is much smaller than that of the straight pipe 26, the gas in the expansion bag 10 will slowly enter the exhaust box 20 from the exhaust pipe 19 and be discharged to the upper surface of the chip through the exhaust port. This can blow off the dust attached to the upper surface of the chip, so as to ensure the dry etching machine can process the chip. At the same time, as the gas in the expansion bag 10 is slowly discharged through the exhaust pipe 19, the expansion bag 10 shrinks and no longer supports the chip. At this time, the chip is on the tray 11, and the tray 11 is used to support the chip so as to transport the chip to the vacuum chamber in the dry etching machine for processing.

[0037] Simultaneously, as the mounting base 24 moves closer to the placement box 14 and stops squeezing the air bag 6, the one-way valve on the air supply pipe 7 closes and the one-way valve on the air inlet pipe 23 opens, allowing outside gas to enter the air bag 6 through the air inlet pipe 23. When the chip is extracted, the hydraulic rod 28 pushes the mounting base 24 to reset and moves, squeezing the air bag 6 again. At this time, the one-way valve on the air inlet pipe 23 closes and the one-way valve on the air supply pipe 7 opens, allowing the gas in the air bag 6 to enter the connecting pipe 2 through the air supply pipe 7 and the horizontal plate 5. As the gas in the connecting pipe 2 increases, it can push the support plate 25 upward. The placement box 14 moves upward with the support plate 25 by the amount of gas in one air bag 6, so that the tray 11 can extract the chip from the next placement box 14. Therefore, the placement box 14 will rise once each time a chip is extracted, achieving the effect of sequentially extracting the chips in the placement box 14.

[0038] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A continuous chip extraction device for a dry etching machine, comprising a base (1) and a horizontal plate (5), characterized in that, The horizontal plate (5) is fixedly connected to the base (1); A protrusion (3) is fixedly connected to the horizontal plate (5), and a mounting base (24) is slidably connected to the protrusion (3). A rotating shaft (21) is rotatably connected to the mounting base (24). A cam (12) is fixedly connected to one end of the rotating shaft (21) away from the mounting base (24). A support plate (11) is fixedly connected to the cam (12). An extraction component is installed on the support plate (11). The extraction component includes a squeezing plate (16), an airbag (15), a limiting rod (18), and an expansion bag (10). 1) A groove is provided on the upper part, the expansion bag (10) is fixedly connected in the groove, the two limiting rods (18) are fixedly connected on the support plate (11), the extrusion plate (16) is slidably connected on the two limiting rods (18), the airbag (15) is fixedly connected between the support plate (11) and the extrusion plate (16), the airbag (15) and the expansion bag (10) are fixedly connected by a straight tube (26), and the support plate (11) and the extrusion plate (16) are fixedly connected by a spring (17). A placement box (14) is fixedly connected to the base (1). Limiting grooves are opened at both ends of the placement box (14). A connecting pipe (2) is fixedly connected to the base (1). A support plate (25) is slidably connected to one end of the connecting pipe (2). The end of the support plate (25) away from the connecting pipe (2) is fixedly connected to the placement box (14). The extraction component also includes trapezoidal plates (13), and multiple trapezoidal plates (13) are respectively fixedly connected to the inner walls of both ends of the placement box (14).

2. The continuous chip extraction device for a dry etching machine according to claim 1, characterized in that, The horizontal plate (5) is hollow inside, and one end of the horizontal plate (5) is connected to the end of the connecting pipe (2) away from the extrusion plate (16).

3. The continuous chip extraction device for a dry etching machine according to claim 1, characterized in that, A vertical plate (8) is fixedly connected to one end of the horizontal plate (5) away from the connecting pipe (2). An air bag (6) is fixedly connected to the vertical plate (8). An air supply pipe (7) is fixedly connected between the air bag (6) and the horizontal plate (5). An air inlet pipe (23) is fixedly connected to the air bag (6). A one-way valve is installed on both the air inlet pipe (23) and the air supply pipe (7). The air bag (6) is located on one side of the mounting base (24).

4. The continuous chip extraction device for a dry etching machine according to claim 1, characterized in that, A first gear (9) is fixedly connected to the rotating shaft (21), and the first gear (9) is disposed between the cam (12) and the mounting base (24).

5. The continuous chip extraction device for a dry etching machine according to claim 4, characterized in that, A servo motor (4) is fixedly connected to one of the outer side walls of the mounting base (24). The drive shaft of the servo motor (4) is fixedly connected to a second gear (22), and the second gear (22) meshes with the first gear (9).

6. The continuous chip extraction device for a dry etching machine according to claim 1, characterized in that, A hydraulic rod (28) is fixedly connected to the base (1), and the end of the hydraulic rod (28) away from the base (1) is fixedly connected to the mounting base (24).

7. The continuous chip extraction device for a dry etching machine according to claim 1, characterized in that, An exhaust box (20) is fixedly connected to the tray (11). An exhaust port is provided on one side wall of the exhaust box (20). An exhaust pipe (19) is fixedly connected to the exhaust box (20).

8. The continuous chip extraction device for a dry etching machine according to claim 7, characterized in that, A hose (27) is fixedly connected to the airbag (15), and the hose (27) is connected to the exhaust pipe (19).

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