Slit coating head anti-collision device and control method
By installing a height-adjustable rangefinder and an anti-collision rangefinder on the coating equipment, the descent height of the slit coating head can be precisely controlled, solving the problem of collision between the slit coating head and the coating substrate, improving coating efficiency and reducing maintenance costs.
Patent Information
- Application Number
- CN202511139472.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-14
- Publication Date
- 2025-11-14
AI Technical Summary
How to avoid collisions between the slot coating nozzle and the substrate during coating operations or debugging, thereby reducing maintenance and time costs.
A liftable first rangefinder and an anti-collision rangefinder are installed on the outer side of the front end of the coating platform of the coating equipment. These are used to correct the lower limit of the descent of the slit coating head and to lower synchronously with the slit coating head via a contact rangefinder to avoid collision. Combined with the groove and lifting unit on the coating platform, this ensures precise control of the coating height.
It achieves precise height matching between the slit coating head and the coating substrate, avoids collisions, improves the efficiency and accuracy of coating height measurement, and reduces maintenance costs.
Smart Images
Figure CN120940184A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of coating technology, and in particular to a slit coating head anti-collision device and control method. Background Technology
[0002] Slit coating has been widely used in many fields in recent years, including perovskite solar cells, hydrogen fuel cells, quantum dot displays, and biosensors. Because slit coating heads are expensive and highly precise, they directly affect the quality of the coated film; moreover, the maintenance and time costs of slit coating heads are very high, thus attracting considerable attention during their use.
[0003] How to avoid collisions during coating operations or debugging of slot coating heads has become a technical problem that urgently needs to be solved in the industry. Summary of the Invention
[0004] To address the shortcomings of existing technologies, the present invention aims to provide a slit coating head anti-collision device and control method, which avoids the occurrence of collision between the lower surface of the slit coating head and the coating substrate.
[0005] To achieve the above objectives, this application provides a slit coating head anti-collision device, comprising: A liftable first rangefinder is installed on the outer front end of the coating platform of the coating equipment. There shall be at least one first rangefinder; The first rangefinder corresponds to the non-coated area of the slit spray nozzle; The first rangefinder is used to calibrate the lower limit point when the slit nozzle descends; The lower limit point is at the same horizontal plane as the upper surface of the coating stage; A liftable anti-collision rangefinder is installed at the coating start point of the coating stage, and there is no less than one anti-collision rangefinder. The collision avoidance rangefinder corresponds to the non-coated area of the slit spray nozzle; When the slit coating head is working, the upper surface of the anti-collision rangefinder does not protrude beyond the upper surface of the coating platform; When the coating substrate reaches the coating start point, and after the collision avoidance distance meter rises and detects that it is in contact with the non-coated area at the lower end of the slit head, the collision avoidance distance meter and the slit head descend synchronously to the coating height and then the slit head stops descending. The collision avoidance rangefinder continued to descend until it lost contact with the slot nozzle; After the collision avoidance rangefinder continues to descend until it loses contact with the slot nozzle, the slot nozzle begins the coating operation. The first rangefinder and the collision avoidance rangefinder are contact rangefinders.
[0006] Furthermore, it also includes: The base and the coating stage are set on the base, and the coating stage reciprocates in the horizontal direction on the base; The base is equipped with columns, which are located on the non-traveling side of the coating platform; The column is equipped with a coating head fixing plate, which is located above the coating platform.
[0007] Furthermore, the coating head fixing plate is connected to the column via a lifting unit; A slit spray nozzle is fixed on the spray nozzle fixing plate; There are at least two columns, which are arranged on both sides of the coating platform.
[0008] Furthermore, each column is matched with a lifting unit; The lifting unit includes a lifting module and a lifting motor; The lifting motor is fixed on the column, and the lifting module is movably mounted on the column.
[0009] Furthermore, there are at least two first rangefinders, each corresponding to the non-coated area at the lower end of the slit coating head.
[0010] Furthermore, a groove is provided at the coating start point of the coating stage, and the groove corresponds to the non-coating area at the lower end of the slit head. The collision avoidance rangefinder is installed inside the groove.
[0011] Furthermore, two grooves are arranged on both sides of the coating stage, and each groove contains at least one anti-collision rangefinder.
[0012] Furthermore, a thickness gauge is also provided on the coating head fixing plate, which is used to measure the thickness of the coating substrate located on the coating stage.
[0013] To achieve the above objectives, the control method for the slit applicator anti-collision device provided in this application employs the aforementioned slit applicator anti-collision device and includes: Adjust the upper surface of the first rangefinder, the upper surface of the anti-collision rangefinder, and the upper surface of the coating platform to be on the same plane, and record it as the lower limit point of the slit coating head; Match the lower limit point of the slit nozzle to the lower surface of the nozzle and record it as the matching height; Obtain the thickness dimension of the coating substrate; The slit nozzle is controlled to descend to the coating height. When the substrate is coated with the coating stage and moves to the coating start point, the coating height is the size of the matching height minus the thickness of the substrate, and then minus the gap threshold between the slit nozzle and the upper surface of the substrate.
[0014] Further, the step of aligning the lower surface of the slit applicator with the lower limit point of the drop includes: When the first rangefinder moves directly below the slit spray nozzle, it rises and comes into contact with the uncoated area at the lower end of the slit spray nozzle's surface. Then, the first rangefinder and the slit spray nozzle descend synchronously to the lower limit of the descent point. The first rangefinder stops moving when the gap between the uncoated area at the lower end of the slit spray nozzle's surface and the corresponding first rangefinder is within ±2 micrometers. This gap is then recorded as the matching height.
[0015] The slit coating head anti-collision device provided in this application accurately obtains the descent height of the lower surface of the slit coating head by setting a first rangefinder and an anti-collision rangefinder, thereby avoiding the collision between the slit coating head and the coating substrate and improving the efficiency and accuracy of obtaining the coating height dimension.
[0016] Other features and advantages of this application will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing this application. Attached Figure Description
[0017] The accompanying drawings are provided to further illustrate the present application and form part of the specification. Together with the embodiments of the present application, they serve to explain the present application but do not constitute a limitation thereof. In the drawings: Figure 1 This is a schematic diagram of the slit coating head anti-collision device according to an embodiment of this application; Figure 2 This is a schematic diagram of the slit coating head anti-collision device during planar calibration according to an embodiment of this application; Figure 3 This is a rear view of the slit coating head anti-collision device according to an embodiment of this application; Figure 4 A front view of the slit coating head anti-collision device according to an embodiment of this application; Figure 5 This is a flowchart illustrating the control method of the slit coating head anti-collision device according to an embodiment of this application.
[0018] Figure label: 101-Base; 102-Rail; 103-Coating platform; 104-Coating substrate; 105-First column; 106-Second column; 107-Lifting motor; 108-Lifting module; 109-Coating head fixing plate; 110-Slit coating head; 111-First rangefinder; 112-Anti-collision rangefinder; 113-Thickness gauge; 114-Plane calibration block. Detailed Implementation
[0019] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application.
[0020] Embodiments of this application will now be described in more detail with reference to the accompanying drawings. While some embodiments of this application are shown in the drawings, it should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this application. It should be understood that the drawings and embodiments of this application are for illustrative purposes only and are not intended to limit the scope of protection of this application.
[0021] The term "comprising" and its variations as used herein are open-ended inclusions, meaning "including but not limited to". The term "based on" means "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Definitions of other terms will be given in the description below.
[0022] It should be noted that the terms "first" and "second" may be used in this application only to distinguish different devices, components or parts, and are not used to define the order of functions performed by these devices, components or parts or their interdependence.
[0023] It should be noted that the terms "one" and "more" used in this application are illustrative rather than restrictive, and those skilled in the art should understand that, unless explicitly stated otherwise in the context, they should be understood as "one or more". "More" should be understood as two or more.
[0024] The slit head anti-collision device of this application includes: A liftable first rangefinder 111 is provided on the outer front side of the coating platform 103 of the coating equipment; There shall be no less than one first rangefinder 111; The first rangefinder 111 corresponds to the non-coating area of the slit coating head 110; The first rangefinder 111 is used to calibrate the lower limit position of the slit spray nozzle 110 when it descends; The lower limit point is at the same horizontal plane as the upper surface of the coating stage 103; A liftable anti-collision rangefinder 112 is installed at the coating start point of the coating stage 103, and there is no less than one anti-collision rangefinder 112. The collision avoidance rangefinder 112 corresponds to the non-coated area of the slit spray head 110; When the slit coating head 110 is working, the upper surface of the anti-collision rangefinder 112 does not protrude from the upper surface of the coating platform 103; When the coating substrate 104 moves to the coating start point, and after the anti-collision rangefinder 112 rises and detects that it is in contact with the non-coated area at the lower end of the slit nozzle 110, the anti-collision rangefinder 112 and the slit nozzle 110 descend synchronously to the coating height and then the slit nozzle 110 stops descending. The collision avoidance rangefinder 112 continues to descend until it loses contact with the slit spray nozzle 110; After the collision avoidance rangefinder 112 continues to descend until it loses contact with the slot spray nozzle 110, the slot spray nozzle 110 performs the coating operation. The first rangefinder 111 and the collision avoidance rangefinder 112 are contact rangefinders.
[0025] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.
[0026] Example 1 Figure 1 This is a schematic diagram of the slit coating head anti-collision device according to an embodiment of this application. Figure 2 This is a schematic diagram of the slit coating head anti-collision device during planar calibration according to an embodiment of this application. Figure 3 This is a rear view of the slit coating head anti-collision device according to an embodiment of this application. Figure 4 This is a front view of the slit coating head anti-collision device according to an embodiment of this application, as shown below. Figure 1-4 As shown, the slit spray nozzle anti-collision device of this application embodiment includes: a base 101, a column, a spray nozzle fixing plate 109, and a slit spray nozzle 110.
[0027] The slit coating head anti-collision device of this application embodiment includes a base 101, on which a coating platform 103 is provided.
[0028] In one exemplary embodiment, the upper surface of the coating stage 103 is flat, and the coating substrate 104 to be coated is placed on the coating stage 103.
[0029] In one exemplary embodiment, the coating stage 103 reciprocates on the base 101 along a first direction, for example, moving back and forth. Figure 1 As shown.
[0030] In one exemplary embodiment, a track 102 is provided on the base 101, and the coating stage 103 reciprocates along a first direction on the track 102.
[0031] In one exemplary embodiment, the base 101 is further provided with a column, which is disposed on the side of the coating stage 103 and is located on the non-traveling side of the coating stage 103; for example, when the coating stage 103 moves in the front-back direction, the column is located on the base 101 on the left and / or right side of the coating stage 103. In this embodiment, the example of having columns on both the left and right sides of the coating stage 103 is used for explanation. Figure 1 , Figure 3 as well as Figure 4 As shown.
[0032] In one exemplary embodiment, the column is also provided with a coating head fixing plate 109. When both sides of the coating platform 103 are provided with columns, the two columns are connected by the coating head fixing plate 109.
[0033] In one exemplary embodiment, the column includes a first column 105 and a second column 106, such as Figure 1 , Figure 3 as well as Figure 4 As shown.
[0034] In one exemplary embodiment, the coating head fixing plate 109 is disposed above the coating platform 103, and the first column 105 and the second column 106 are connected by the coating head fixing plate 109 to form a gantry structure.
[0035] In one exemplary embodiment, the coating head fixing plate 109 is connected to the column via a lifting unit.
[0036] In one exemplary embodiment, a slit applicator 110 is fixed to the applicator fixing plate 109, for example, the slit applicator 110 is fixed directly below the applicator fixing plate 109, such as... Figure 1 As shown.
[0037] In one exemplary embodiment, the surface of the coating stage 103 facing the slit head 110 is a flat surface, that is, the upper surface of the coating stage 103 is a flat surface.
[0038] In one exemplary embodiment, a first rangefinder 111 is provided on the outer front end of the coating stage 103 and is retractable, such as... Figure 1 As shown.
[0039] In one exemplary embodiment, there is at least one first rangefinder 111.
[0040] In one exemplary embodiment, the first rangefinder 111 corresponds to the non-coating area of the slit applicator 110. Typically, the two ends of the lower surface of the slit applicator 110 are non-coating areas, that is, the first rangefinder 111 corresponds to the ends of the lower surface of the slit applicator 110. Figure 1 As shown.
[0041] In one exemplary embodiment, the first rangefinder 111 is used to calibrate the lower limit position when the slit applicator 110 descends.
[0042] In one exemplary embodiment, the lower limit point is at the same level as the upper surface of the coating stage 103, which can be understood as the slit head 110 not being able to directly contact the upper surface of the coating stage 103 when it descends.
[0043] In one exemplary embodiment, a collision avoidance rangefinder 112 is provided at the coating start point of the coating stage 103, and there is no less than one collision avoidance rangefinder 112; the coating start point can be understood as the starting point for starting the coating operation on the coating substrate 104.
[0044] In one exemplary embodiment, the collision avoidance rangefinder 112 corresponds to the non-coating area of the slit applicator 110, such as... Figure 1 As shown.
[0045] In one exemplary embodiment, when the slit applicator 110 is in operation, the upper surface of the anti-collision rangefinder 112 does not protrude beyond the upper surface of the coating stage 103.
[0046] In one exemplary embodiment, the first rangefinder 111 and the collision avoidance rangefinder 112 are contact rangefinders, such as the Keyence GT2 rangefinder from Japan.
[0047] In one exemplary embodiment, there are at least two columns. In this embodiment, two columns are used as an example for explanation. The first column 105 and the second column 106 are arranged on both sides of the coating stage 103. In this embodiment, one column is arranged on each side of the coating stage 103 for explanation.
[0048] In one exemplary embodiment, each column is matched with a lifting unit, that is, the first column 105 and the second column 106 each correspond to a lifting unit. As needed, both lifting units are active lifting units, that is, they are non-passive actions when working.
[0049] In one exemplary embodiment, the lifting unit includes a lifting module 108 and a lifting motor 107.
[0050] In one exemplary embodiment, the lifting motor 107 is fixed to the column, and the lifting module 108 is movably mounted on the column.
[0051] In an exemplary embodiment, it can be understood that a guide rail is provided on the opposite side of the column for the lifting module 108 to move up and down. When the lifting motor 107 is activated, the lifting module 108 moves up and down along the guide rail. As needed, the guide rail is perpendicular to the upper surface of the substrate. Of course, the column can also be perpendicular to the upper surface of the substrate as needed.
[0052] In one exemplary embodiment, the coating head fixing plate 109 is connected to the lifting module 108 on the left and right columns.
[0053] In one exemplary embodiment, during use, the lifting motors 107 on the two columns need to be in the same working state in order to drive the lifting module 108 to move up and down.
[0054] In one exemplary embodiment, there are at least two first rangefinders 111, each corresponding to a non-coated area at the lower end of the slit coating head 110; such as Figure 1 As shown, the two first rangefinders 111 correspond to the non-coated areas at both ends of the lower surface of the slit coating head 110.
[0055] In an exemplary embodiment, when the width of the coating stage 103 is greater than the length of the coating area on the lower surface of the slit head 110, that is, when the width of the coating stage 103 is greater than the effective coating width of the slit head 110, it is necessary to provide grooves on both sides of the coating starting point of the coating stage 103, and the grooves correspond to the non-coating area at the end of the lower surface of the slit head 110.
[0056] In one exemplary embodiment, the collision avoidance rangefinder 112 is disposed within a groove, that is, a groove is provided on each side of the coating platform 103, and a collision avoidance rangefinder 112 is disposed in each groove. Figure 1 As shown.
[0057] In one exemplary embodiment, the coating head fixing plate 109 is further provided with a thickness gauge 113, which is used to measure the thickness of the coating substrate 104 located on the coating stage 103.
[0058] In one exemplary embodiment, the thickness gauge 113 may be a laser thickness gauge, which can obtain the thickness of the coating substrate 104 by measuring the different distances when there is no coating substrate 104 on the coating stage 103 and when the coating substrate 104 is placed.
[0059] Example 2 Example 2 is a control method for a slit applicator anti-collision device, which adopts the slit applicator anti-collision device of the above embodiment.
[0060] Figure 5 This is a schematic flowchart illustrating the control method of the slit coating head anti-collision device according to an embodiment of this application. The following will be combined with... Figure 5 The control method of the slit coating head anti-collision device according to the embodiments of this application will be described in detail.
[0061] First, in step 201, the upper surface of the first rangefinder, the upper surface of the anti-collision rangefinder, and the upper surface of the coating platform are adjusted to be on the same plane, and recorded as the lower limit point of the slit coating head.
[0062] In one exemplary implementation, such as Figure 1 As shown, both the first rangefinder 111 and the anti-collision rangefinder 112 can extend and retract vertically, so that the upper surface of the first rangefinder 111, the upper surface of the anti-collision rangefinder 112, and the upper surface of the coating platform 103 are on the same plane, for example, controlled to be on the same horizontal plane.
[0063] In an exemplary embodiment, adjusting the upper surface of the first rangefinder 111, the upper surface of the anti-collision rangefinder 112, and the upper surface of the coating stage 103 to be on the same plane can be achieved by setting a plane calibration block 114 on the coating stage 103. That is, the plane calibration block 114 is placed flat on the upper surface of the coating stage 103, and the upper surfaces of the first rangefinder 111 and the anti-collision rangefinder 112 are in contact with the plane calibration block 114 without lifting the plane calibration block 114. At this time, it is considered that the upper surface of the first rangefinder 111, the upper surface of the anti-collision rangefinder 112, and the upper surface of the coating stage 103 are on the same plane. At this time, the position of the upper surface of the first rangefinder 111 is recorded as the lower limit point of the slit coating head 110.
[0064] Step 202: Match the lower surface of the slit applicator to the lower limit point.
[0065] In one exemplary embodiment, when the first rangefinder 111 moves directly below the slit spray nozzle 110, the first rangefinder 111 rises and comes into contact with the non-coated area at the lower end of the slit spray nozzle 110. Of course, in this process, the first rangefinder 111 can rise and the slit spray nozzle 110 can descend simultaneously.
[0066] In an exemplary embodiment, after the first rangefinder 111 contacts the non-coated area at the lower surface end of the slit applicator 110, the first rangefinder 111 stops moving when it descends synchronously to the lower limit point of the descent, that is, the upper surface of the first rangefinder 111 stops moving at the lower limit point of the descent. When the gap between the non-coated area at the lower surface end of the slit applicator 110 and the corresponding first rangefinder 111 is within ±2 micrometers, the slit applicator 110 stops descending and is recorded as the matching height.
[0067] In one exemplary embodiment, since the uncoated areas of the slit applicator 110 are distributed at both ends, the two first rangefinders 111 each correspond to the uncoated area at one end of the slit applicator 110; similarly, the two anti-collision rangefinders 112 each correspond to the uncoated area at one end of the slit applicator 110.
[0068] In an exemplary embodiment, when the gaps between the non-coated areas at the lower end of the slit applicator 110 and their corresponding first rangefinder 111 are all within ±2 micrometers, the slit applicator 110 stops descending. This can be understood as the slit applicator 110 continuing to descend or performing a reciprocating motion of descending, rising, and descending after the first rangefinder 111 stops moving, until the gaps between the non-coated areas at both ends of the lower surface of the slit applicator 110 and their corresponding first rangefinder 111 are all within ±2 micrometers, the slit applicator 110 stops descending, and this is recorded as the matching height, that is, the height of the lower surface of the slit applicator 110 in order to match the lower limit point of descent.
[0069] Step 203: Obtain the thickness dimension of the coating substrate.
[0070] In one exemplary embodiment, the thickness dimension of the coating substrate 104 to be coated on the coating stage 103 is obtained.
[0071] Step 204: Control the slit nozzle to descend to the coating height. When the coating substrate moves to the coating start point along with the coating stage, the size of the coating height is the size of the lower limit point of descent minus the thickness of the coating substrate, and then minus the gap threshold between the slit nozzle and the upper surface of the coating substrate.
[0072] In one exemplary embodiment, when the coating substrate 104 moves to the coating start point along with the coating stage 103, the anti-collision rangefinder 112 rises and comes into contact with the non-coated area at the lower end of the slit coating head 110.
[0073] In one exemplary embodiment, the collision avoidance rangefinder 112 contacts the uncoated area at the lower surface end of the slit spray nozzle 110. This can be understood as the collision avoidance rangefinder 112 rising to contact the uncoated area at the lower surface end of the slit spray nozzle 110, or the collision avoidance rangefinder 112 rising while the slit spray nozzle 110 descends, and the collision avoidance rangefinder 112 rising to contact the uncoated area at the lower surface end of the slit spray nozzle 110.
[0074] In one exemplary embodiment, the slit applicator 110 rises back to its original position after being matched to the matching height. This is to avoid subsequent collisions with the coating substrate 104 to be coated, or to facilitate the placement of the coating substrate 104 by the operator.
[0075] In an exemplary embodiment, the first rangefinder 111 of this application is used to determine the lower limit of the descent point when the coating substrate 104 of the same batch and the same thickness is placed on the coating stage 103 for the first time. It can be understood that after obtaining the lower limit of the descent point, the slit coating head 110 directly enters the coating starting point from the coating substrate 104 and begins the descent action.
[0076] In one exemplary embodiment, after the collision avoidance rangefinder 112 rises and detects that it has come into contact with the non-coated area at the lower surface end of the slot nozzle 110, the collision avoidance rangefinder 112 and the slot nozzle 110 descend synchronously to the coating height. Then the slot nozzle 110 stops descending, while the collision avoidance rangefinder 112 continues to descend until it is no longer in contact with the slot nozzle 110. After the collision avoidance rangefinder 112 continues to descend until it is no longer in contact with the slot nozzle 110, the slot nozzle 110 performs the coating operation.
[0077] In one exemplary embodiment, the collision avoidance rangefinder 112 may continue to descend after disengaging from the slit coating head 110, as needed. This descent may occur until the upper surface of the collision avoidance rangefinder 112 is no higher than the upper surface of the coating substrate 104, or until it is no higher than the upper surface of the coating stage 103.
[0078] In an exemplary embodiment, the gap threshold can be understood as the gap size between the lower surface of the slit applicator 110 and the coating substrate 104. For example, if the thickness of the coating substrate 104 is 2 mm, the gap between the lower surface of the slit applicator 110 and the coating substrate 104 is controlled between 0.1 and 0.3 mm, typically 0.2 mm.
[0079] It will be understood by those skilled in the art that the above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A slit-type coating head anti-collision device, characterized in that, include: A liftable first rangefinder is installed on the outer front end of the coating platform of the coating equipment. The first rangefinder shall be no less than one; The first rangefinder corresponds to the non-coating area of the slit spray nozzle; The first rangefinder is used to calibrate the lower limit position when the slit spray nozzle descends; The lower limit point is at the same horizontal plane as the upper surface of the coating stage; A liftable anti-collision rangefinder is installed at the coating start point of the coating platform, and there is no less than one anti-collision rangefinder. The collision avoidance rangefinder corresponds to the non-coating area of the slit coating head; When the slit spray head is working, the upper surface of the anti-collision rangefinder does not protrude beyond the upper surface of the coating platform; when the coating substrate moves to the coating start point, and when the anti-collision rangefinder rises and detects that it contacts the non-coating area at the lower end of the slit spray head, the anti-collision rangefinder and the slit spray head descend synchronously to the coating height, and then the slit spray head stops descending; The collision avoidance rangefinder continues to descend until it disengages from the slit spray nozzle; After the collision avoidance rangefinder continues to descend until it is no longer in contact with the slit spray nozzle, the slit spray nozzle performs the coating operation; The first rangefinder and the collision avoidance rangefinder are contact rangefinders.
2. The slit coating head anti-collision device according to claim 1, characterized in that, It also includes: A base, wherein the coating stage is disposed on the base, and the coating stage reciprocates on the base in a horizontal direction; The base is provided with a column, which is located on the non-traveling side of the coating platform; The column is equipped with a coating head fixing plate, which is positioned above the coating platform.
3. The slit coating head anti-collision device according to claim 2, characterized in that, The coating head fixing plate is connected to the column via a lifting unit; The slit spray head is fixed on the spray head fixing plate; The column comprises at least two columns, which are arranged on both sides of the coating platform.
4. The slit coating head anti-collision device according to claim 3, characterized in that, Each of the columns is matched with one of the lifting units; The lifting unit includes a lifting module and a lifting motor; The lifting motor is fixed on the column, and the lifting module is movably mounted on the column.
5. The slit coating head anti-collision device according to claim 1, characterized in that, There are at least two first rangefinders, and the two first rangefinders respectively correspond to the non-coating area at the lower end of the slit coating head.
6. The slit coating head anti-collision device according to claim 1, characterized in that, A groove is provided at the coating start point of the coating platform, and the groove corresponds to the non-coating area at the lower end of the slit head. The collision avoidance rangefinder is located within the groove.
7. The slit coating head anti-collision device according to claim 1, characterized in that, Two grooves are arranged on both sides of the coating platform, and each groove contains at least one anti-collision rangefinder.
8. The slit coating head anti-collision device according to claim 2, characterized in that, The coating head fixing plate is also equipped with a thickness gauge, which is used to measure the thickness of the coating substrate located on the coating platform.
9. A control method for a slit applicator anti-collision device, employing the slit applicator anti-collision device according to any one of claims 1-8, characterized in that, include: Adjust the upper surface of the first rangefinder, the upper surface of the anti-collision rangefinder, and the upper surface of the coating platform to be on the same plane, and record it as the lower limit point of the slit coating head; Align the lower surface of the slit applicator with the lower limit of the descent point and record it as the matching height; Obtain the thickness dimension of the coating substrate; When the slit head is controlled to descend to the coating height, and the coating substrate moves to the coating start point along with the coating stage, the dimension of the coating height is the dimension of the matching height minus the thickness dimension of the coating substrate, and then minus the gap threshold between the slit head and the upper surface of the coating substrate.
10. The control method for the slit coating head anti-collision device according to claim 9, characterized in that, The step of aligning the lower surface of the slit applicator with the lower limit point of descent includes: When the first rangefinder moves directly below the slit spray nozzle, it rises and contacts the uncoated area at the lower end of the slit spray nozzle. Then, the first rangefinder and the slit spray nozzle descend synchronously to the lower limit point. When the gap between the uncoated area at the lower end of the slit spray nozzle and the corresponding first rangefinder is within ±2 micrometers, the slit spray nozzle stops descending and is recorded as the matching height.