Rotary positioning system, control method of rotary positioning system and grinding equipment

Abstract

The invention relates to the technical field of grinding equipment, in particular to a rotary positioning system, a control method of the rotary positioning system and grinding equipment. The rotary positioning system comprises an inductive switch assembly, an inductive piece and a control module, the inductive switch assembly is installed on one of the rotary table and the fixed table, the inductive switch assembly comprises two inductive switches, and the two inductive switches are located on the same circumference with the rotating axis of the rotary table as the circle center; the induction sheet is mounted on the other one of the rotary table and the fixed table; when the induction piece axially rotates on the fixed table along with the rotary table to correspond to the positions of the two induction switches, the induction piece is used for being matched with the two induction switches so that the two induction switches can output induction signals at the same time. The control module is used for responding to induction signals output by the two induction switches at the same time and controlling the rotary table to stop axial rotation, and high-precision positioning of the rotary table can be achieved.

Description

Technical Field

[0001] This invention relates to the field of grinding equipment technology, and in particular to a rotary positioning system, a control method for the rotary positioning system, and grinding equipment. Background Technology

[0002] In wafer grinding equipment, after each wafer is clamped and fixed once, multiple processing steps are required. The current common method is to use a rotary table carrying the wafer to rotate and accurately position the wafer at the position to be processed. Therefore, the rotational positioning accuracy of the rotary table directly affects the processing accuracy.

[0003] Therefore, a control system that can improve the rotational positioning accuracy of the rotary table is urgently needed for research. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0005] Therefore, the present invention provides a rotary positioning system, a control method for the rotary positioning system, and a grinding device, which can achieve high-precision positioning of the rotary table.

[0006] According to a first aspect of the present invention, a rotary positioning system is applied to a grinding equipment. The grinding equipment includes a rotary table and a fixed table. The rotary table is used to place a wafer to be processed, and the fixed table is located below the rotary table. The rotary table rotates axially above the fixed table. The rotary positioning system includes: An inductive switch assembly is installed on one of a rotary table and a fixed platform. The inductive switch assembly includes two inductive switches, both of which are located on the same circumference with the rotation axis of the rotary table as the center. The sensing element is installed on the other of the rotary table and the fixed table. When the sensing element rotates axially with the rotary table on the fixed table to correspond to the positions of the two inductive switches, the sensing element is used to cooperate with the two inductive switches so that the two inductive switches output inductive signals at the same time. The control module is used to control the rotary table to stop axial rotation in response to the sensing signals output by the two inductive switches simultaneously.

[0007] Optionally, the control module includes a first rotary table control unit, which is used to switch the rotation speed of the rotary table to a low-speed mode when the sensing element rotates axially on the fixed platform with the rotary table to a position corresponding to one of the two sensing switches, so that the sensing element moves to a position corresponding to the other of the two sensing switches.

[0008] Optionally, the control module also includes: The judgment unit is used to determine whether the two inductive switches output inductive signals simultaneously when the inductive sheet and the two inductive switches are in the same position. The second rotary table control unit is used to control the rotary table to stop axial rotation if both inductive switches output inductive signals at the same time. The third rotary table control unit is used to control the rotary table to rotate to adjust the position of the sensing plate if only one of the two sensing switches outputs a sensing signal, based on the positional relationship between the sensing switch that outputs a sensing signal and the sensing switch that does not output a sensing signal, as well as the rotation direction of the rotary table, until both sensing switches output sensing signals simultaneously.

[0009] Optionally, there are at least two inductive switch assemblies, and the at least two inductive switch assemblies are distributed on the same circumference with the rotation axis of the rotary table as the center.

[0010] Optionally, the sensing element has a rectangular structure, and when the sensing element rotates axially on the fixed platform with the rotary table to correspond to the positions of both sensing switches, the sensing element blocks both sensing switches.

[0011] Optionally, when the sensing plate is mounted on the rotary table and the sensing switch assembly is mounted on the fixed table, the bottom of the sensing plate is arranged parallel to the surface of the rotary table, and the two sensing switches are equidistant from the surface of the rotary table.

[0012] Optionally, an overtravel sensor is provided on each side of the sensor; the rotary positioning system also includes an overtravel switch and an alarm module, with the overtravel switch mounted on a fixed platform; When the overtravel sensor rotates axially on the fixed platform with the rotary table to the position corresponding to the overtravel switch, the overtravel sensor cooperates with the overtravel switch to output an overtravel signal and send it to the alarm module so that the alarm module can sound an alarm.

[0013] According to a second aspect of the present invention, a control method for a rotary positioning system is applied to the rotary positioning system described above, the method comprising: The rotary positioning system controls the rotary table to rotate axially relative to the fixed table so that the induction plate and the two induction switches are in the same position. When the sensor plate is in conjunction with two inductive switches, and both inductive switches output inductive signals simultaneously, the control module controls the rotary table to stop rotating axially.

[0014] Optionally, controlling the rotary positioning system to rotate the rotary table axially relative to the fixed table so that the induction plate and the two induction switches are positioned correspondingly includes: When the induction plate rotates axially on the fixed platform with the rotary table to correspond to one of the two induction switches, the rotation speed of the rotary table is switched to low speed mode so that the induction plate moves to correspond to the other of the two induction switches.

[0015] According to a third aspect of the present invention, a control device for a rotary positioning system is applied to the control method of the aforementioned rotary positioning system. The device comprises: The rotation control module is used to control the axial rotation of the rotary positioning system relative to the fixed platform so that the induction plate and the two induction switches are in the same position. The positioning control module is used to determine the positioning angle of the rotary table relative to the fixed table for axial rotation based on the setting position of the induction switch assembly on the rotary table or fixed table when the induction plate and the two induction switches are in corresponding positions, and to control the rotary table to stop axial rotation.

[0016] According to a fourth aspect of the present invention, a grinding apparatus is provided, wherein the grinding apparatus uses the control method of the rotary positioning system described above.

[0017] According to a fifth aspect of the present invention, a computer-readable storage medium includes a stored program, wherein the program executes the control method of the rotary positioning system described above.

[0018] One of the above technical solutions has at least the following advantages or beneficial effects: The rotary positioning system provided by this invention involves installing an inductive switch assembly on one of a rotary table and a fixed platform, selecting the inductive switch assembly to include two inductive switches located on the same circumference centered on the rotation axis of the rotary table, and then installing an inductive plate that can cooperate with the two inductive switches on the other of the rotary table and the fixed platform. When the inductive plate rotates axially with the rotary table on the fixed platform to correspond to the positions of the two inductive switches and triggers the two inductive switches to output inductive signals simultaneously, the control module, after responding to the inductive signals at this time, controls the rotary table to stop rotating axially, thereby achieving high-precision positioning of the rotary table. Attached Figure Description

[0019] Figure 1 A schematic diagram of the structure of a rotary positioning system according to an embodiment of the present invention is shown; Figure 2 A schematic diagram of the installation structure of a rotary positioning system provided by the present invention on a grinding equipment is shown. Figure 3 A schematic diagram of the installation structure of a rotary positioning system provided by the present invention on a grinding equipment is shown. Figure 4 A flowchart illustrating a control method for a rotary positioning system according to an embodiment of the present invention is shown. Figure 5 A schematic diagram of a control device for a rotary positioning system according to an embodiment of the present invention is shown; Figure 6A schematic block diagram of an electronic device according to an embodiment of the present invention is shown.

[0020] Explanation of reference numerals in the attached figures: 1-Rotary table; 2-Adjusting plate, 201-Mounting plate, 202-First connecting plate, 203-Second connecting plate; 3-Inductive switch assembly, 301-Inductive switch; 4-Induction plate; 5-Drive motor; 6-Synchronous belt; 7-Overtravel switch; 8-Overrange sensor. Detailed Implementation

[0021] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] In existing technology, the rotation angle of the rotary table is generally determined by a combination of a sensor switch and a sensor plate. That is, the rotary table is determined to be in position when the sensor switch is blocked by the sensor plate.

[0023] However, since the inductive switch requires the cooperation of the sensing element, and the sensing element must have a certain width, the inductive switch has a feedback signal within the width range of the sensing element. Therefore, the rotation accuracy of the rotary table is easily limited by the width of the sensing element, making it impossible to achieve high-precision positioning of the rotary table.

[0024] To address at least one of the technical problems existing in the prior art or related technologies, this invention provides a rotary positioning system. The rotary positioning system includes an inductive switch assembly, an inductive plate, and a control module. The inductive switch assembly is mounted on one of a rotary table and a fixed platform, and includes two inductive switches located on the same circumference centered on the rotation axis of the rotary table. The inductive plate is mounted on the other of the rotary table and the fixed platform. When the inductive plate rotates axially with the rotary table on the fixed platform until it corresponds to the positions of the two inductive switches, the inductive plate engages with the two inductive switches to simultaneously output inductive signals. The control module responds to the simultaneous output inductive signals from the two inductive switches and controls the rotary table to stop its axial rotation. This application enables high-precision positioning of the rotary table by utilizing the control module's response to the simultaneous output inductive signals from the two inductive switches when the inductive plate rotates axially with the rotary table on the fixed platform until it corresponds to the positions of the two inductive switches, thereby stopping the rotary table's axial rotation.

[0025] The following describes, with reference to the accompanying drawings, some embodiments of the rotary positioning system, the control method of the rotary positioning system, and the grinding equipment provided according to the present invention.

[0026] See Figures 1 to 3 This invention provides a rotary positioning system applied to a grinding equipment. The grinding equipment includes a rotary table 1 and a fixed table. The rotary table 1 is used to place the wafer to be processed, and the fixed table is located below the rotary table 1. The rotary table 1 rotates axially above the fixed table. The rotary positioning system includes an inductive switch assembly 3, an inductive plate 4, and a control module. The inductive switch assembly 3 is installed on one of the rotary table 1 and the fixed table. The inductive switch assembly 3 includes two inductive switches 301, both located on the same circumference with the rotation axis of the rotary table 1 as the center. The inductive plate 4 is installed on the other of the rotary table 1 and the fixed table. When the inductive plate 4 rotates axially with the rotary table 1 on the fixed table until it corresponds to the position of both inductive switches 301, the inductive plate 4 cooperates with the two inductive switches 301 to make the two inductive switches 301 output inductive signals simultaneously. The control module is used to control the rotary table 1 to stop rotating axially in response to the inductive signals output simultaneously by the two inductive switches 301.

[0027] In this configuration, the sensing element 4 cooperates with the inductive switch 301. This can be understood as at least a portion of the inductive switch 301 being blocked by the sensing element 4, allowing the inductive switch 301 to output a sensing signal. Simultaneously, the sensing element 4 is used to cooperate with two inductive switches 301 at the same time. Figure 1 At least a portion of the two inductive switches 301 are simultaneously blocked by the inductive plate 4, so that the two inductive switches 301 can output inductive signals at the same time, thereby locating the inductive switch assembly 3 or the inductive plate 4 on the rotary table 1 and rotating it to the position corresponding to the inductive plate 4 or the inductive switch assembly 3 on the fixed table, thus realizing the rotational positioning of the rotary table 1 on the fixed table.

[0028] Here, the rotary table 1 may be provided with a worktable for placing the wafer to be processed, and a grinding component may be provided above the rotary table 1. The grinding component is used to grind the surface of the wafer located on the worktable so that the grinding component can perform a thinning operation on the wafer.

[0029] It should be noted that when the induction plate 4 and the two induction switches 301 cooperate to simultaneously output induction signals, the control module controls the rotary table 1 to stop axial rotation. After the grinding assembly grinds the surface of the wafer located on the worktable, the control module controls the rotary table 1 to resume rotation. See [link to relevant documentation] Figure 2The rotary table 1 is fitted with a synchronous belt 6 on its side. The synchronous belt 6 is connected to the drive wheel installed at the output end of the drive motor 5. The synchronous belt 6 is driven by the drive motor 5 controlled by the control module to drive the drive wheel to rotate, thereby driving the rotary table 1 to rotate. In other words, the rotation of the rotary table 1 is controlled by the control module, which can control the start and stop of the drive motor 5.

[0030] Furthermore, the inductive switch assembly 3 is installed on one of the rotary table 1 and the fixed platform, and the inductive plate 4 is installed on the other of the rotary table 1 and the fixed platform. This can be understood as follows: when the inductive switch assembly 3 is installed on the rotary table 1, the inductive plate 4 is installed on the fixed platform; and when the inductive switch assembly 3 is installed on the fixed platform, the inductive plate 4 is installed on the rotary table 1. That is, the inductive switch assembly 3 and the inductive plate 4 cannot be located on the rotary table 1 or the fixed platform simultaneously. Only in this way can the inductive plate 4 be axially rotated with the rotary table 1 on the fixed platform to correspond to the positions of both inductive switches 301. Preferably, the inductive plate 4 is installed on the rotary table 1, and the inductive switch assembly 3 is installed on the fixed platform. The rotary table 1 and the fixed platform are coaxially arranged, and the radius of the rotary table 1 and the radius of the fixed platform are the same or substantially the same. The inductive plate 4 is installed on the side of the rotary table 1, and the inductive switch assembly 3 is installed on the side of the fixed platform.

[0031] It should also be noted that when the sensor 4 rotates axially on the fixed platform with the rotary table 1 to a position corresponding only to one of the two inductive switches 301, the sensor 4 can only cooperate with one of the two inductive switches 301 to output a single inductive signal. Consequently, the control module cannot simultaneously respond to the inductive signals output by each of the two inductive switches 301, and the control module cannot control the rotary table 1 to stop its axial rotation. That is, the sensor 4 can cooperate with both inductive switches 301 to simultaneously output the inductive signals corresponding to each of the two inductive switches 301, i.e., output two inductive signals, so that the control module can simultaneously respond to the inductive signals output by the two inductive switches 301, thereby enabling the control module to control the rotary table 1 to stop its axial rotation.

[0032] In this embodiment, by installing the inductive switch assembly 3 on one of the rotary table 1 and the fixed platform, and selecting the inductive switch assembly 3 to include two inductive switches 301 located on the same circumference with the rotation axis of the rotary table 1 as the center, and installing the sensing plate 4 that can cooperate with the two inductive switches 301 on the other of the rotary table 1 and the fixed platform, when the sensing plate 4 rotates axially with the rotary table 1 on the fixed platform to correspond to the positions of the two inductive switches 301, triggering the two inductive switches 301 to output sensing signals simultaneously, the control module uses the response of the sensing signals at this time to control the rotary table 1 to stop axial rotation, thereby achieving high-precision positioning of the rotary table 1, and avoiding the problem in the prior art where the form of one inductive switch and one sensing plate easily leads to the final rotation accuracy of the rotary table being limited by the width of the sensing plate, making it impossible to achieve high-precision positioning of the rotary table.

[0033] In one possible embodiment, the control module includes a first rotary table control unit, which is used to switch the rotation speed of the rotary table 1 to a low-speed mode when the sensing element 4 rotates axially on the fixed table with the rotary table 1 to a position corresponding to one of the two sensing switches 301, so that the sensing element 4 moves to a position corresponding to the other of the two sensing switches 301.

[0034] Here, the first rotary table control unit can be connected to the drive motor 5 used to drive the rotary table 1 to rotate axially, so as to control the operation of the drive motor 5 and thus control the switching of the rotation speed, so that when the induction plate 4 corresponds to one of the two induction switches 301, the rotation speed of the rotary table 1 is switched to a low speed mode.

[0035] It should be noted that the low-speed mode here refers to the mode in which the rotational speed of the rotary table 1 is less than its rotational speed before the induction plate 4 corresponds to one of the positions of the two induction switches 301.

[0036] In this embodiment, during the axial rotation of the rotary table 1 on the fixed platform, in order to smoothly move the sensing plate 4 to a position corresponding to the positions of both sensing switches 301, when the sensing plate 4 rotates axially with the rotary table 1 on the fixed platform to a position corresponding to one of the two sensing switches 301, the sensing switch 301 can be triggered by the sensing plate 4 to send a sensing signal. At this time, the first rotary table control unit responds to the sensing signal and switches the rotation speed of the rotary table 1 to a low-speed mode, so that the sensing plate 4 slowly approaches the other of the two sensing switches 301 as the rotary table 1 rotates axially on the fixed platform, thereby making the sensing plate 4 quickly correspond to the positions of both sensing switches 301.

[0037] Furthermore, the control module also includes a judgment unit, a second rotary table control unit, and a third rotary table control unit.

[0038] The judgment unit is used to determine whether the two induction switches 301 output induction signals simultaneously when the induction sheet 4 and the two induction switches 301 are in the same position.

[0039] Since the sensor 4 and the two sensor switches 301 are in corresponding positions, there may be a situation where the sensor 4 and the two sensor switches 301 cannot cooperate at the same time. That is, one of the two sensor switches 301 does not cooperate with the sensor 4 and cannot output a sensing signal. Therefore, the judgment unit needs to judge whether the sensor 4 and the two sensor switches 301 cooperate at the same time to output a sensing signal. This allows the second rotary table control unit and the third rotary table control unit to adjust the rotation of the rotary table 1 on the fixed platform according to the judgment result of the judgment module, so that the sensor 4 and the two sensor switches 301 cooperate at the same time and that the two sensor switches 301 output a sensing signal at the same time.

[0040] The second rotary table control unit is used to control the rotary table 1 to stop axial rotation if both inductive switches 301 output inductive signals simultaneously.

[0041] Here, if both inductive switches 301 output inductive signals at the same time, it can be determined that the inductive plate 4 is simultaneously cooperating with both inductive switches 301 to sense. That is, through the cooperation of the inductive plate 4 and the inductive switch assembly, the rotational positioning position of the rotary table 1 on the fixed platform can be determined. Therefore, the rotary table 1 can be controlled to stop axial rotation at this time, and the rotational positioning of the rotary table 1 on the fixed platform can be completed.

[0042] The third rotary table control unit is used to control the rotary table 1 to rotate to adjust the position of the sensing plate 4 according to the positional relationship between the sensing switch 301 that outputs a sensing signal and the sensing switch 301 that does not output a sensing signal, and the rotation direction of the rotary table 1, if only one of the two sensing switches 301 outputs a sensing signal, until both sensing switches 301 output sensing signals at the same time.

[0043] Here, when only one of the two inductive switches 301 outputs an inductive signal, it means that one of the two inductive switches 301 cannot cooperate with the inductive element 4. At this time, it is necessary to adjust the positional relationship between the inductive element 4 and the inductive switch 301 that does not output an inductive signal so that after the inductive element 4 cooperates with both inductive switches 301, both inductive switches 301 can output inductive signals simultaneously. Therefore, based on the positional relationship between the inductive switch 301 that outputs an inductive signal and the inductive switch 301 that does not output an inductive signal, as well as the rotation direction of the rotary table 1, the rotary table 1 is controlled to rotate to adjust the position of the inductive element 4, which can achieve rapid cooperation between the inductive element 4 and the two inductive switches 301.

[0044] Before the third rotary table control unit controls the rotary table 1 to rotate to adjust the position of the sensing plate 4 based on the positional relationship between the sensing switch 301 that outputs the sensing signal and the sensing switch 301 that does not output the sensing signal, and the rotation direction of the rotary table 1, it is also used to determine the sensing switch 301 that outputs the sensing signal from the two sensing switches 301 according to the signal position corresponding to the sensing signal.

[0045] It should be noted that when controlling the rotation of the rotary table 1 to adjust the position of the sensing element 4 based on the positional relationship between the sensing switch 301 that outputs a sensing signal and the sensing switch 301 that does not output a sensing signal, and the rotation direction of the rotary table 1, the third rotary table control unit is used to determine whether rotating the rotary table 1 in its current rotation direction can move the sensing element 4 to the position corresponding to the sensing switch 301 that does not output a sensing signal. If so, the rotary table 1 is rotated in its current rotation direction; if not, the rotary table 1 is rotated in the opposite direction to its current rotation direction, so as to control the rotation of the rotary table 1 to adjust the position of the sensing element 4.

[0046] Taking two inductive switches 301 as inductive switch A and inductive switch B as an example, when the rotary table 1 is in its current rotation direction, the inductive plate 4 can first correspond to the position of inductive switch A, and then correspond to the position of inductive switch B. When the inductive plate 4 corresponds to the positions of both inductive switches 301, inductive switch A can output an inductive signal, while inductive switch B does not output an inductive signal. At this time, the third rotary table control unit controls the rotary table 1 to rotate in its current rotation direction so that inductive switch B can cooperate with inductive plate 4 to output an inductive signal.

[0047] In this embodiment, when the sensing element 4 and the two sensing switches 301 are both in position, the judgment unit determines whether the two sensing switches 301 output sensing signals simultaneously. When it is determined that the two sensing switches 301 output sensing signals simultaneously, the second rotary table control unit controls the rotary table 1 to stop rotating axially. When it is determined that only one of the two sensing switches 301 outputs a sensing signal, the third rotary table control unit controls the rotary table 1 to rotate according to the positional relationship between the sensing switch 301 that outputs a sensing signal and the sensing switch 301 that does not output a sensing signal, as well as the rotation direction of the rotary table 1, to adjust the position of the sensing element 4 until the two sensing switches 301 output sensing signals simultaneously, so as to ensure that the sensing element 4 can cooperate with the two sensing switches 301 simultaneously so that the two sensing switches 301 output sensing signals simultaneously.

[0048] In some possible embodiments, there are at least two inductive switch assemblies 3, and the at least two inductive switch assemblies 3 are distributed on the same circumference with the rotation axis of the rotary table 1 as the center.

[0049] Here, by selecting at least two inductive switch assemblies 3 and distributing them on the same circumference centered on the rotation axis of the rotary table 1, the rotary table 1 can be divided into at least two positioning regions. Each positioning region is the area enclosed by two adjacent inductive switch assemblies 3 and the rotation axis of the rotary table 1 on the rotary table 1. Therefore, by selecting a certain number of inductive switch assemblies 3 according to the processing requirements of the wafers located on the rotary table 1, the rotary table 1 can be divided into a target number of positioning regions.

[0050] For example, see Figure 3 When the rotary table 1 needs to be divided into positioning area A, positioning area B, and positioning area C, the robot arm can place the wafer in positioning area A when the rotary table 1 moves to the position corresponding to the robot arm in the grinding equipment; the coarse grinding axis can perform coarse grinding on the wafer located in positioning area B when the rotary table 1 moves to the position corresponding to the coarse grinding axis in the grinding assembly; and the fine grinding axis can perform fine grinding on the wafer located in positioning area C when the rotary table 1 moves to the position corresponding to the fine grinding axis in the grinding assembly. Three inductive switch assemblies 3 can be distributed on the same circumference centered on the rotation axis of the rotary table 1, so that the fan-shaped area enclosed by two adjacent inductive switch assemblies 3 and the rotation axis of the rotary table 1 on the rotary table 1 has a central angle of 120°.

[0051] In some possible embodiments, the sensing plate 4 has a rectangular structure, and when the sensing plate 4 rotates axially on the fixed platform with the rotary table 1 to a position corresponding to both sensing switches 301, the sensing plate 4 blocks both sensing switches 301.

[0052] Here, the inductive switch 301 includes two opposing inductive plates. When the inductive piece 4 moves between the two inductive plates and partially blocks the area between them, the inductive piece 4 and the inductive switch 301 can cooperate, and the inductive switch 301 can output an inductive signal. Specifically, when the inductive piece 4 moves between the two inductive plates on the inductive switch 301 and partially blocks the area between them, the inductive switch 301 outputs a signal of 1, which is the inductive signal. When the inductive piece 4 does not block any area between the two inductive plates, the inductive switch 301 outputs a signal of 0, which means no inductive signal is output.

[0053] In this embodiment, by selecting a rectangular structure for the sensing plate 4, n tangents can be formed when the sensing plate 4 rotates around the central axis of the rotary table 1. After adjusting the two inductive switches 301, it can be ensured that each tangent formed by the sensing plate 4 passes through the two inductive switches 301. When the sensing plate 4 rotates axially on the fixed platform with the rotary table 1 to correspond to the positions of the two inductive switches 301, the sensing plate 4 can smoothly block the corresponding areas of the two inductive switches 301, so that the two inductive switches 301 can output the corresponding sensing signals.

[0054] Furthermore, when the sensing plate 4 is installed on the rotary table 1 and the sensing switch assembly 3 is installed on the fixed platform, the bottom of the sensing plate 4 is arranged parallel to the surface of the rotary table 1, and the distance between the two sensing switches 301 and the surface of the rotary table 1 is the same.

[0055] Here, both inductive switches 301 are mounted on the fixed platform via an adjustment plate 2. The adjustment plate 2 is used to adjust the position of the two inductive switches 301 on the fixed platform so that the distance between the two inductive switches 301 and the surface of the rotary table 1 is the same. The adjusting plate 2 includes a mounting plate 201, a first connecting plate 202, and a second connecting plate 203. The mounting plate 201 is used to connect to the fixed platform by bolts, and a first elongated hole is formed in the mounting plate 201 along the height direction of the rotary table 1. The first connecting plate 202 is used to install a sensor switch 301, and a first threaded hole is formed in the first connecting plate 202. The first connecting plate 202 can be installed on the mounting plate 201 with adjustable height by bolts and the engagement of the first threaded hole and the first elongated hole. The second connecting plate 203 is used to install another sensor switch 301, and a second elongated hole is formed in the second connecting plate 203. The length direction of the second elongated hole is perpendicular to the length direction of the first elongated hole. A second threaded hole is formed in the first connecting plate 202, and the second threaded hole is located above the first elongated hole. The second connecting plate 203 can be installed on the first connecting plate 202 with adjustable horizontal direction by bolts and the engagement of the second threaded hole and the second elongated hole.

[0056] In this embodiment, when the sensing plate 4 is mounted on the rotary table 1 and the sensing switch assembly 3 is mounted on the fixed platform, by setting the bottom of the sensing plate 4 parallel to the surface of the rotary table 1 and making the distance between the two sensing switches 301 and the surface of the rotary table 1 the same, the sensing plate 4 can extend into the two sensing switches 301 as the rotary table 1 rotates, so as to simultaneously block the two sensing switches 301.

[0057] In some possible embodiments, an overtravel sensing plate 8 is provided on each side of the sensing plate 4; the rotary positioning system also includes an overtravel switch 7 and an alarm module. The overtravel switch 7 is mounted on the fixed platform; when the overtravel sensing plate 8 rotates axially with the rotary table 1 on the fixed platform to correspond to the position of the overtravel switch 7, the overtravel sensing plate 8 is used to cooperate with the overtravel switch 7 to output an overtravel signal and send it to the alarm module so that the alarm module can sound an alarm.

[0058] The overtravel switch 7 can be located on one side of the induction switch 301 that cooperates with the induction piece 4. Taking the induction switch 301 as including induction switch A and induction switch B as an example, the induction piece 4 corresponds to the positions of induction switch A and induction switch B respectively as the rotary table 1 rotates. Therefore, the overtravel switch 7 is installed on the side of induction switch B away from induction switch A, so as to avoid the situation where the rotary table 1 rotates too fast and the signal of induction switch B is triggered, but the rotary table 1 does not stop in time and cannot be detected by the staff.

[0059] In addition, after the overtravel sensor 8 is used to output an overtravel signal in conjunction with the overtravel switch 7, the control module is also used to control the rotary table 1 to switch the rotation direction so that the sensor 4 moves to a position corresponding to both induction switches 301.

[0060] See Figure 4 A control method for a rotary positioning system according to an embodiment of the present invention, applied to the rotary positioning system described above, includes: S110. Control the rotary positioning system to rotate the rotary table 1 axially relative to the fixed table so that the induction plate 4 and the two induction switches 301 are in the same position.

[0061] S120. When the sensor 4 is engaged with the two sensor switches 301 and the two sensor switches 301 output sensor signals simultaneously, the control module controls the rotary table 1 to stop rotating axially.

[0062] Using the above method, when the induction plate 4 rotates axially on the fixed platform with the rotary table 1 to correspond to the positions of the two induction switches 301 and triggers the two induction switches 301 to output induction signals simultaneously, the control module can control the rotary table 1 to stop rotating axially by responding to the induction signals at this time, thereby achieving high-precision positioning of the rotary table 1.

[0063] Optionally, controlling the rotary positioning system to rotate the rotary table 1 axially relative to the fixed table so that the sensing plate 4 corresponds to the position of both sensing switches 301 may include: when the sensing plate 4 rotates axially on the fixed table with the rotary table 1 to correspond to one of the two sensing switches 301, switching the rotation speed of the rotary table 1 to a low speed mode so that the sensing plate 4 moves to correspond to the other of the two sensing switches 301.

[0064] Using the above method, when the induction plate 4 rotates axially on the fixed platform with the rotary table 1 to correspond to one of the two induction switches 301, the rotation speed of the rotary table 1 is switched to a low speed mode, so that the induction plate 4 slowly approaches the other of the two induction switches 301 as the rotary table 1 rotates axially on the fixed platform, thereby making the induction plate 4 quickly correspond to the positions of both induction switches 301.

[0065] To facilitate understanding of the control method of the rotary positioning system provided in this embodiment, we take the positioning of the rotary table 1 rotating axially within 360° and the inductive switch assembly 3 consisting of three inductive switch assemblies 3 mounted on a fixed platform as an example. That is, the rotary table 1 is divided into three equal positioning regions, and the central angle of each positioning region is 120°. Figure 3 As shown, the control method of this rotary positioning system for the rotary positioning control of rotary table 1 is as follows: (1) Regardless of the current angle of the rotary table 1, it is driven by the drive motor 5 to rotate counterclockwise; (2) When the sensor 4 triggers one of the two sensor switches 301 on the sensor switch assembly 3 which is in the zero position as the rotary table 1 rotates, the drive motor 5 switches to a low speed so that the sensor 4 slowly approaches the other sensor switch 301 until the other sensor switch 301 is triggered and outputs a sensing signal. (3) When both induction switches 301 in the induction switch assembly 3 at the zero position output induction signals, confirm that the rotary table 1 has rotated to the zero position and can directly jump to step (6). (4) If, due to an unexpected situation, such as the drive motor 5 rotating too fast, the other induction switch 301 in step (2) is triggered by the induction piece 4, and the drive motor 5 does not stop in time, the overtravel switch 7 is triggered, and the alarm module will sound an alarm. (5) After the alarm module alarms, the drive motor 5 rotates clockwise at a slow speed until both induction switches 301 in the induction switch assembly 3 at the zero position output induction signals, which confirms that the rotary table 1 has rotated to the zero position. (6) If the rotary table 1 rotates axially by 0°≤θ<120°, the drive motor 5 drives the rotary table 1 to rotate clockwise, and when the induction plate 4 triggers one of the induction switches 301 in the next induction switch assembly 3, the rotation speed of the drive motor 5 switches to low speed. (7) Make the sensing plate 4 slowly approach the other sensing switch 301 in the sensing switch assembly 3 in step (6) with the rotating body until the other sensing switch 301 is triggered and outputs a sensing signal; (8) When both induction switches 301 in the induction switch assembly 3 in step (6) output induction signals, it can be determined that the rotary table 1 has rotated axially to 120° to complete the rotation of the rotary table 1 into position. (9) When the rotary table 1 rotates axially by 120° < θ ≤ 240°, the drive motor 5 can drive the rotary table 1 to rotate clockwise; (10) When the sensor 4 triggers one of the sensor switches 301 in the last sensor switch group 3, the rotation speed of the drive motor 5 is switched to low speed. (11) Make the sensing plate 4 slowly approach the other sensing switch 301 in the sensing switch assembly 3 in step (10) along with the rotating body until the other sensing switch 301 is triggered and outputs a sensing signal; (12) When both induction switches 301 in the induction switch assembly 3 in step (10) output induction signals, it can be determined that the rotary table 1 has rotated axially to 240° to complete the rotation of the rotary table 1 into position.

[0066] Figure 5 This is a schematic diagram of a control device for a rotary positioning system according to an embodiment of the present invention, as shown below. Figure 5 As shown, a control device for a rotary positioning system is applied to the control method of the aforementioned rotary positioning system. The device includes: The rotation control module 510 is used to control the axial rotation of the rotary positioning system relative to the fixed platform so that the induction plate and the two induction switches are in the same position. The positioning control module 520 is used to determine the positioning angle of the rotary table relative to the fixed table for axial rotation based on the setting position of the induction switch assembly on the rotary table or fixed table when the induction plate and the two induction switches are in corresponding positions, and to control the rotary table to stop axial rotation.

[0067] In some possible implementations, the rotation control module 510 includes: The first rotary table control unit is configured to switch the rotation speed of the rotary table to a low-speed mode when the sensing element rotates axially on the fixed platform with the rotary table to a position corresponding to one of the two sensing switches, so that the sensing element moves to a position corresponding to the other of the two sensing switches.

[0068] This disclosure provides an embodiment of a grinding apparatus. Optionally, the grinding apparatus includes a memory for storing processor-executable instructions; a processor configured to execute the executable instructions in the memory to implement the steps of the control method for the rotary positioning system provided in this disclosure.

[0069] Figure 6This is a schematic block diagram of an electronic device 1100 according to an embodiment of the present invention.

[0070] like Figure 6 As shown, the electronic device 1100 may include a grinding device, and the electronic device 1100 may further include: The system includes a memory 1101 and a processor 1102. The memory 1101 stores computer programs and transfers the program code to the processor 1102. In other words, the processor 1102 can retrieve and run the computer programs from the memory 1101 to implement the methods described in the embodiments of the present invention.

[0071] For example, the processor 1102 can be used to execute the above-described method embodiments according to instructions in the computer program.

[0072] In some embodiments of the present invention, the electronic device 1100 may include, but is not limited to: General-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0073] In some embodiments of the present invention, the memory 1101 includes, but is not limited to: Volatile memory and / or non-volatile memory. Non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. Volatile memory can be random access memory (RAM), used as an external cache. By way of example, but not limitation, many forms of RAM are available, such as Static RAM (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDR SDRAM), Enhanced Synchronous DRAM (ESDRAM), Synchronous Link DRAM (SLDRAM), and Direct Rambus RAM (DR RAM).

[0074] In some embodiments of the present invention, the computer program may be divided into one or more modules, which are stored in the memory 1101 and executed by the processor 1102 to perform the method provided by the present invention. The one or more modules may be a series of computer program instruction segments capable of performing a specific function, which describe the execution process of the computer program in the controller.

[0075] like Figure 6 As shown, the electronic device 1100 may further include: Transceiver 1103, which can be connected to processor 1102 or memory 1101.

[0076] The processor 1102 can control the transceiver 1103 to communicate with other devices; specifically, it can send information or data to other devices or receive information or data sent by other devices. The transceiver 1103 may include a transmitter and a receiver. The transceiver 1103 may further include antennas, and the number of antennas may be one or more.

[0077] It should be understood that the various components in the electronic device are connected through a bus system, which includes a data bus, a power bus, a control bus, and a status signal bus.

[0078] The present invention also provides a computer storage medium having a computer program stored thereon, which, when executed by a computer, enables the computer to perform the methods of the above-described method embodiments. Alternatively, one embodiment of the present invention also provides a computer program product containing instructions that, when executed by a computer, cause the computer to perform the methods of the above-described method embodiments.

[0079] When implemented using software, it can be implemented entirely or partially as a computer program product. This computer program product includes one or more computer instructions. When these computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of the present invention are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another via wired (e.g., coaxial cable, fiber optic, Digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium accessible to a computer or a data storage device such as a server or data center that integrates one or more available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., Digital Video Disc (DVD)), or a semiconductor medium (e.g., Solid State Disk (SSD)).

[0080] Those skilled in the art will recognize that the modules and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0081] In the several embodiments provided by this invention, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of modules is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between devices or modules may be electrical, mechanical, or other forms.

[0082] The modules described as separate components may or may not be physically separate. The components shown as modules may or may not be physical modules; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. For example, the functional modules in the various embodiments of this application may be integrated into one processing module, or each module may exist physically separately, or two or more modules may be integrated into one module.

[0083] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A rotary positioning system applied to a grinding equipment, the grinding equipment comprising a rotary table and a fixed table, the rotary table for placing a wafer to be processed, the fixed table being located below the rotary table, and the rotary table rotating axially above the fixed table, characterized in that, The rotary positioning system includes: An inductive switch assembly is installed on one of the rotary table and the fixed platform. The inductive switch assembly includes two inductive switches, both of which are located on the same circumference with the rotation axis of the rotary table as the center. A sensing element is installed on the other of the rotary table and the fixed table; when the sensing element rotates axially on the fixed table with the rotary table to correspond to the positions of the two sensing switches, the sensing element is used to cooperate with the two sensing switches so that the two sensing switches output sensing signals simultaneously. The control module is used to control the rotary table to stop axial rotation in response to the sensing signals output simultaneously by the two sensing switches.

2. The rotary positioning system according to claim 1, characterized in that, The control module includes a first rotary table control unit, which is used to switch the rotation speed of the rotary table to a low-speed mode when the sensing element rotates axially on the fixed platform with the rotary table to correspond to one of the two sensing switches, so that the sensing element moves to correspond to the other of the two sensing switches.

3. The rotary positioning system according to claim 2, characterized in that, The control module also includes: The judgment unit is used to determine whether the two inductive switches output inductive signals simultaneously when the inductive sheet and the two inductive switches are both in position corresponding. The second rotary table control unit is used to control the rotary table to stop axial rotation if both of the aforementioned inductive switches simultaneously output inductive signals. The third rotary table control unit is used to control the rotary table to rotate to adjust the position of the sensing plate if only one of the two sensing switches outputs a sensing signal, based on the positional relationship between the sensing switch that outputs a sensing signal and the sensing switch that does not output a sensing signal, and the rotation direction of the rotary table, until both sensing switches output sensing signals simultaneously.

4. The rotary positioning system according to claim 1, characterized in that, The inductive switch assembly comprises at least two components, and the at least two inductive switch assemblies are distributed on the same circumference with the rotation axis of the rotary table as the center.

5. The rotary positioning system according to claim 1, characterized in that, The sensing element has a rectangular structure, and when the sensing element rotates axially on the fixed platform with the rotary table to a position corresponding to both of the sensing switches, the sensing element blocks both of the sensing switches.

6. The rotary positioning system according to claim 1, characterized in that, When the sensing element is mounted on the rotary table and the sensing switch assembly is mounted on the fixed platform, the bottom of the sensing element is arranged parallel to the surface of the rotary table, and the two sensing switches are equidistant from the surface of the rotary table.

7. The rotary positioning system according to claim 6, characterized in that, An overtravel sensor is provided on each side of the sensor; the rotary positioning system also includes an overtravel switch and an alarm module, with the overtravel switch mounted on the fixed platform; When the overtravel sensor rotates axially on the fixed platform with the rotary table to correspond to the position of the overtravel switch, the overtravel sensor cooperates with the overtravel switch to output an overtravel signal and send it to the alarm module so that the alarm module can sound an alarm.

8. A control method for a rotary positioning system, characterized in that, The method, applied to the rotary positioning system according to any one of claims 1 to 5, comprises: The rotary positioning system is controlled to rotate axially relative to the fixed platform so that the induction plate and the two induction switches are positioned in the same direction. When the sensor plate cooperates with the two sensor switches, and the two sensor switches simultaneously output sensor signals, the control module controls the rotary table to stop rotating axially.

9. The control method for the rotary positioning system according to claim 8, characterized in that, The control of the rotary positioning system to rotate the rotary table axially relative to the fixed table, so that the induction plate and the two induction switches are all in positional correspondence, includes: When the sensing element rotates axially on the fixed platform with the rotary table to correspond to one of the two sensing switches, the rotation speed of the rotary table is switched to a low-speed mode so that the sensing element moves to correspond to the other of the two sensing switches.

10. A control device for a rotary positioning system, characterized in that, The control method applied to the rotary positioning system of claim 8 or 9, wherein the device comprises: A rotation control module is used to control the axial rotation of the rotary positioning system relative to the fixed platform, so that the induction plate and the two induction switches are positioned in tandem. The positioning control module is used to control the rotary table to stop axial rotation when the sensing element cooperates with the two sensing switches and the two sensing switches simultaneously output sensing signals.

11. A grinding apparatus, characterized in that, The grinding equipment uses the control method of the rotary positioning system described in claim 8 or 9.

12. A computer-readable storage medium, characterized in that, The computer-readable storage medium includes a stored program, wherein the program executes the control method of the rotary positioning system according to claim 8 or 9.

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