Coating device

Abstract

The invention discloses a coating device, which comprises a shell with an accommodating cavity; the at least one roller is contained in the containing cavity and can rotate in the containing cavity, each roller comprises a film coating cavity used for containing a base material to be coated, the base material rolls in the film coating cavity along with rotation of the roller, and a communicating part is arranged on the wall of the roller and used for communicating the film coating cavity with the containing cavity; the feeding system is used for conveying coating raw materials to the containing cavity, and the coating raw materials enter the coating cavity through the communicating part; the vacuum system is communicated with the accommodating cavity, and the vacuum system is used for vacuumizing the accommodating cavity and the coating cavity; and the driving system is used for driving the roller to rotate. By the adoption of the film coating device, the film coating effect can be more uniform.

Description

[0001] This invention was made with the support of the Ministry of Industry and Information Technology's Project No. 163 of 2023, Project No.: 2340STCZB1921 / 163. Technical Field

[0002] This invention relates to the field of coating technology, and more particularly to a coating apparatus. Background Technology

[0003] As the core equipment for the functionalization of material surfaces, coating equipment has deeply penetrated into key fields such as electronic device manufacturing, optical component processing, industrial corrosion protection, and surface modification of biomedical materials. Its performance directly determines the functional realization and service life of the coating layer.

[0004] However, in practical applications, taking Parylene coating technology as an example, with the continuous upgrading of equipment, the application fields of Parylene coatings are gradually expanding in various industries, while also promoting the development of related fields. Currently, traditional Parylene equipment mostly uses stationary or rotating supports, where the substrate is relatively stationary relative to the support, and the connection point with the support is in a shielded state. Under conditions of thick coating, film adhesion occurs, and the shielded areas cannot be coated, seriously affecting the stability of the final product quality.

[0005] Meanwhile, some existing coating equipment fixes the substrate by adding supports or other methods. However, this reduces the density of the substrate arrangement, resulting in a significant reduction in the number of complex-structured substrates that can be processed in a single batch. This not only significantly reduces production efficiency but also greatly increases the processing cost per unit product, making it difficult to meet the demand for high-quality, high-volume coatings in the high-end manufacturing sector. Summary of the Invention

[0006] The technical problem solved by the present invention is to provide an improved coating apparatus.

[0007] To address the aforementioned technical problems, embodiments of the present invention provide a coating apparatus, comprising: a housing having a receiving cavity; at least one roller housed within the receiving cavity and rotatable within the receiving cavity, each roller including a coating cavity for placing a substrate to be coated, rotatable with the roller, the substrate tumbling within the coating cavity, a communicating portion provided on the wall of the roller for connecting the coating cavity and the receiving cavity; a feeding system for conveying coating raw materials to the receiving cavity, the coating raw materials entering the coating cavity through the communicating portion; a vacuum system connected to the receiving cavity, the vacuum system being used to evacuate the receiving cavity and the coating cavity; and a drive system for driving the rollers to rotate.

[0008] Optionally, the housing includes: an air inlet, connected to the feeding system, for receiving the coating material input by the feeding system; and an air outlet, disposed opposite to the air inlet and for discharging residual coating material in the receiving cavity, wherein the residual coating material is discharged from the air outlet in gaseous form.

[0009] Optionally, the vacuum system includes a vacuum pumping device, which is directly or indirectly connected to the outlet, and the vacuum pumping device is used to evacuate the receiving cavity.

[0010] Optionally, the vacuum system includes a cold trap connected to the outlet for adsorbing at least a portion of the residual coating material.

[0011] Optionally, the cold trap includes: a shell having an absorption cavity, wherein the shell has an inlet and an outlet communicating with the absorption cavity, and the inlet is communicating with the air outlet.

[0012] Optionally, the cold trap further includes a cooling section disposed within the absorption cavity, the cooling section being connected to one of the top wall and bottom wall of the cold trap and extending toward the other, the inlet being closer to the bottom wall than the outlet, and the residual coating material being adsorbed by the cooling section.

[0013] Optionally, the cooling section is provided with a cooling medium so that the temperature of the cooling section is lower than the temperature of the gas at the outlet.

[0014] Optionally, the temperature of the cooling section is taken from [-80, -150]℃.

[0015] Optionally, the cold trap further includes: at least one partition disposed within the absorption cavity, the partition being used to divide the absorption cavity into meandering air channels, wherein during the flow of gas entering the cold trap from the outlet within the air channels, the residual coating material is adsorbed by the partition and the inner wall of the outer shell.

[0016] Optionally, the at least one partition includes: a first partition extending from the top wall of the housing to the bottom wall, the first partition dividing the absorption cavity into an air inlet and an air outlet, the inlet and the outlet being formed on the top wall, the inlet communicating with the air inlet, the outlet communicating with the air outlet, and a non-zero gap between the first partition and the bottom wall to connect the air inlet and the air outlet.

[0017] Optionally, the at least one partition includes: a plurality of second partitions, the plurality of second partitions being alternately connected to one of a pair of opposite sidewalls of the housing and extending toward the other, the plurality of second partitions dividing the absorption cavity into an air inlet, an air outlet, and a plurality of connecting channels connecting the air inlet and the air outlet, the inlet being connected to the air inlet.

[0018] Optionally, there may be multiple air inlets, and different air inlets are used to receive coating materials in different original states, including solid, gas and liquid.

[0019] Optionally, a support rail is provided on the inner wall of the housing to support the roller, and the roller can rotate relative to the support rail.

[0020] Optionally, there may be multiple support rails, which are spaced apart along the outer circumferential surface of the roller.

[0021] Optionally, the support rail includes: a fixing part, which is fixedly connected to the inner wall of the housing; and a roller part, which is rotatably connected to the fixing part, and the roller rotates relative to the housing via the roller part.

[0022] Optionally, the coating apparatus further includes: a rolling bracket rotatably disposed in the receiving cavity, wherein the roller is mounted on the rolling bracket and rotates with the rotation of the rolling bracket.

[0023] Optionally, a support rail is provided on the inner wall of the housing to support the rolling bracket.

[0024] Optionally, the rolling bracket is provided with a plurality of mounting portions along the circumferential direction, and the plurality of mounting portions correspond one-to-one with the plurality of rollers, with each mounting portion used to mount the corresponding roller.

[0025] Optionally, the rolling bracket includes: a front cover plate and a rear cover plate disposed opposite to each other, and a support rod supported between the front cover plate and the rear cover plate. The mounting part includes a mounting groove formed in the front cover plate and an insertion groove formed in the rear cover plate. A protrusion is provided on the side of the roller facing the rear cover plate. The protrusion of the roller located on the mounting part is inserted into the corresponding insertion groove. The other end of the roller is located in the mounting groove.

[0026] Optionally, the roller includes: an inner cylinder for forming the coating cavity, the inner cylinder having a plurality of small holes on its wall, the plurality of small holes being adapted to form the connecting portion; and an outer cylinder fitted onto the inner cylinder, the outer cylinder being connected to the rolling support, the outer cylinder having a grid-like wall.

[0027] Optionally, the rolling bracket includes a boss disposed at one end of the rolling bracket along the axial direction, and the housing has a through hole structure, through which the driving system is directly or indirectly connected to the boss.

[0028] Optionally, the roller includes a boss disposed at one end of the roller along the axial direction, and the housing is provided with a through hole structure, through which the drive system is directly or indirectly connected to the boss.

[0029] Optionally, the connecting portion includes: multiple detachable perforated plates, spaced apart circumferentially along the roller, wherein the coating cavity and the receiving cavity are connected through holes in the perforated plates.

[0030] Optionally, the drum is provided with multiple baffles spaced apart along the inner wall of the drum. The baffles are used to stir the substrate in the coating chamber during the rotation of the drum.

[0031] Optionally, the coating apparatus further includes: a discharge system comprising: an electrode disposed within the receiving cavity and used for discharge; and a power supply located outside the coating cavity and electrically connected to the electrode, the power supply being used to supply power to the electrode.

[0032] Optionally, the electrode rotates synchronously with the roller.

[0033] Optionally, the electrode is connected to the axial end wall of the roller, and at least a portion of the electrode extends through the end wall and out of the coating cavity to be electrically connected to the power source.

[0034] Optionally, the discharge system further includes: an electrical connection assembly for electrically connecting the electrode and the power supply; wherein the electrical connection assembly includes: a first conductive portion fixedly connected to a first wall of the housing along the axial direction; a conductive shaft passing through the first conductive portion, at least a portion of the conductive shaft extending into the receiving cavity; a second conductive portion fixedly connected to one end of the conductive shaft extending into the receiving cavity, the second conductive portion having a receiving groove on its end face facing the roller, the receiving groove being used to receive at least a portion of the electrode to electrically connect the conductive shaft and the electrode.

[0035] Optionally, the electrical connection assembly further includes: a first insulating connector for physically connecting the first conductive part and the first wall, the first insulating connector having a through hole, and the outer wall of the conductive shaft and the inner wall of the through hole being sealed together.

[0036] Optionally, the electrical connection assembly further includes: a second insulating connector for connecting the second conductive part and the end wall of the roller facing the first wall, wherein the electrode and the second insulating connector rotate synchronously with the roller as the roller rotates.

[0037] Optionally, the second insulating connector has at least one mating groove on its end face facing the roller, and the roller has at least one protrusion on its end wall facing the first wall. The protrusion is adapted to be inserted into the corresponding mating groove so that the second insulating connector can rotate synchronously with the roller.

[0038] Optionally, the discharge system further includes a matching unit, wherein the power supply, the matching unit, and the first conductive part are electrically connected in sequence.

[0039] Optionally, the electrode is located in the central region of the receiving cavity, or the electrode is located on the inner wall of the receiving cavity.

[0040] Optionally, the electrode is columnar or plate-shaped.

[0041] Optionally, the electrode has a porous structure.

[0042] Optionally, the feeding system includes a liquid feed component, a solid feed component, and a gaseous feed component.

[0043] Optionally, the raw materials supplied by the liquid raw material feeding assembly, the solid raw material feeding assembly, and the gaseous raw material feeding assembly ultimately enter the receiving cavity in gaseous form.

[0044] Optionally, the liquid raw material feeding assembly includes: a vaporization heating chamber for heating the liquid raw material, wherein the liquid raw material is vaporized by the vaporization heating chamber and then fed into the receiving cavity.

[0045] Optionally, the solid raw material feeding assembly includes: a hopper for holding the solid raw material; a sublimation chamber for heating and sublimating the solid raw material; and a pyrolysis furnace for pyrolyzing the gas after sublimation of the solid raw material into a second gaseous raw material and conveying the second gaseous raw material to the coating chamber.

[0046] Optionally, the solid raw material feeding assembly further includes a rotary feeding mechanism for controllably conveying the solid raw material in the hopper to the sublimation chamber.

[0047] Optionally, the coating apparatus further includes at least one gas equalization plate disposed at at least one of the liquid raw material inlet, solid raw material inlet, and gas raw material inlet, wherein the liquid raw material inlet, the solid raw material inlet, and the gas raw material inlet are formed on the wall of the housing, and the liquid raw material inlet is connected to the liquid raw material feeding assembly, the solid raw material inlet is connected to the solid raw material feeding assembly, and the gas raw material inlet is connected to the gas raw material feeding assembly.

[0048] Optionally, the roller may include multiple hanging rods, and the substrate may be suspended on the hanging rods.

[0049] Optionally, the coating apparatus further includes: a plurality of isolation chambers, each isolation chamber having an isolation cavity, each isolation cavity containing at least one substrate, the plurality of isolation chambers rotating within the coating cavity, and the isolation chambers having a plurality of holes communicating with the isolation cavity and the coating cavity.

[0050] Optionally, each isolation chamber is spherical; and / or each isolation chamber is formed by two detachably connected hemispherical shells.

[0051] Optionally, the coating apparatus further includes: a bracket housed in the receiving cavity, wherein the roller is supported by the roller bracket and is capable of moving along the axial direction of the receiving cavity with the bracket to be pushed into or pulled out of the receiving cavity.

[0052] Optionally, the bracket includes: a pair of cover plates disposed opposite each other and a pair of connecting rods supported between the pair of cover plates; support wheels, at least one pair of support wheels provided on each of the cover plates, the roller being directly or indirectly supported at both ends along the axial direction by the support wheels and being able to rotate via the support wheels; and sliding wheels, disposed on the side of the cover plate away from the roller, the sliding wheels being able to roll along the inner wall of the housing forming the receiving cavity.

[0053] Compared with the prior art, the technical solution of the embodiments of the present invention has the following beneficial effects:

[0054] The technical solution of this application, by incorporating a roller in the coating apparatus, allows the substrate to tumble within the coating chamber, avoiding the uneven gas flow and electric field problems caused by the fixed position of the substrate in traditional coating apparatuses. During the tumbling process, all parts of the substrate are more evenly exposed to the coating material, significantly improving the coating uniformity of substrates with complex shapes. Simultaneously, the roller can accommodate multiple substrates, increasing the number of substrates that can be coated in a single batch. The connecting section enables communication between the coating chamber and the receiving chamber, ensuring that the coating material can smoothly enter the coating chamber, providing a sufficient material basis for substrate coating, and making the gas environment within the chamber more uniform, thus improving the overall coating quality.

[0055] Furthermore, the coating device also includes a cold trap, which is connected to the air outlet and can adsorb at least a portion of the residual coating material, reducing the emission of harmful substances in the exhaust gas to meet environmental protection requirements; some of the recovered coating material can be reused, reducing production costs.

[0056] Furthermore, the coating apparatus includes multiple air inlets, which can receive coating raw materials in different initial states (solid, gas, liquid) to meet diverse coating needs. Different raw materials can enter the receiving cavity simultaneously or sequentially according to process requirements, enriching the coating process options and improving the applicability of the apparatus.

[0057] Furthermore, the multi-functional feeding method provides conditions for the equipment to deposit different film layers. For example, by combining different types and methods of raw materials, the equipment can deposit multi-functional composite film layers sequentially or simultaneously, integrating ordinary CVD, PECVD, and ICVD technologies. This solves the problem that existing equipment can only achieve single CVD deposition technology, that is, it can only pass in a single type of raw material and can only deposit one coating at a time. It requires multiple start-ups and shutdowns and feedings to complete the composite coating, resulting in poor film quality and long coating cycles.

[0058] Furthermore, multiple baffles are spaced along the inner wall of the drum to agitate the substrate within the coating chamber as the drum rotates. This agitation causes the substrate to rub against each other and tumble more thoroughly, further promoting uniform coating on all parts of the substrate and improving the uniformity of the coating.

[0059] Furthermore, the electrical connection assembly includes a first conductive part fixed to the first wall of the housing, a conductive shaft passing through the first conductive part, and a second conductive part fixed to the conductive shaft and equipped with a receiving groove. This achieves a reliable electrical connection between the electrode and the power supply. Simultaneously, the first insulating connector ensures insulation between the first conductive part and the first wall, and the second insulating connector connects and insulates the second conductive part to the end wall of the drum, preventing leakage and ensuring safe operation of the equipment. For example, using a conductive electromagnetic fluid to connect the electrode and the radio frequency power supply effectively solves the problems of complex and unreliable traditional power supply access methods, optimizing the equipment structure. It solves the discharge problem of the rotating electrode, enabling discharge treatment of a large area inside the drum. A discharge electrode is designed inside the chamber, connected to a matching device and the radio frequency power supply. After the chamber is evacuated, the alternating current of the radio frequency power supply excites the introduced helium or other gases to generate plasma, which acts on the workpiece surface for plasma surface treatment. This solves the cumbersome processing steps of existing processes that require separate plasma equipment for workpiece surface treatment before coating.

[0060] Furthermore, the feeding system includes liquid raw material feeding components, solid raw material feeding components, and gas raw material feeding components, which can simultaneously process multiple types of raw materials, enrich the selection of coating raw materials, meet the diverse raw material requirements of different coating processes, and improve the versatility of the equipment.

[0061] Furthermore, the coating apparatus also includes multiple isolation chambers that roll within the coating chamber. Each isolation chamber contains at least one substrate, and openings in the chamber connect the isolation chamber to the coating chamber. The isolation chambers protect the substrates from collisions and abrasions, while also ensuring more uniform dispersion of the substrates within the chamber, promoting coating uniformity and increasing the number of substrates that can be coated in a single pass. Attached Figure Description

[0062] Figure 1This is a schematic diagram of a coating apparatus according to an embodiment of the present invention;

[0063] Figure 2 yes Figure 1 Schematic diagram of the intercooler trap;

[0064] Figure 3 yes Figure 2 A schematic diagram of a variation of the structure shown;

[0065] Figure 4 yes Figure 3 A schematic diagram of the structure shown from another perspective;

[0066] Figure 5 yes Figure 2 A schematic diagram of another variation of the structure shown;

[0067] Figure 6 yes Figure 1 A schematic diagram of a variation of the illustrated embodiment;

[0068] Figure 7 yes Figure 6 Schematic diagram of the central air distribution plate;

[0069] Figure 8 yes Figure 1 A schematic diagram of another variation of the illustrated embodiment;

[0070] Figure 9 yes Figure 8 Schematic diagram of the middle roller;

[0071] Figure 10 This is a schematic diagram of a coating apparatus according to another perspective of an embodiment of the present invention;

[0072] Figure 11 yes Figure 1 Schematic diagram of the middle roller;

[0073] Figure 12 yes Figure 1 Schematic diagram of the internal structure of the middle roller;

[0074] Figure 13 yes Figure 1 Schematic diagram of the intermediate discharge system;

[0075] Figure 14 yes Figure 13 A schematic diagram of a variation of the structure shown;

[0076] Figure 15 yes Figure 14 Schematic diagram of the middle electrode;

[0077] Figure 16 yes Figure 15 A schematic diagram of a variation of the electrode shown;

[0078] Figure 17 yes Figure 11 A schematic diagram of a variation of the structure shown;

[0079] Figure 18 This is a schematic diagram of an isolation chamber according to an embodiment of this application;

[0080] Figure 19 This is a schematic diagram of a bracket in an embodiment of this application;

[0081] Figure 20 yes Figure 1 A schematic diagram of another variation of the illustrated embodiment. Detailed Implementation

[0082] As mentioned in the background section, the coating effect of existing coating devices needs to be improved.

[0083] To address the aforementioned technical problems, embodiments of the present invention provide a coating apparatus, comprising: a housing having a receiving cavity; at least one roller housed within the receiving cavity and rotatable within the receiving cavity, each roller including a coating cavity for placing a substrate to be coated, the substrate tumbling within the coating cavity as the roller rotates, a communicating portion provided on the wall of the roller for connecting the coating cavity and the receiving cavity; a feeding system for conveying coating raw materials to the receiving cavity, the coating raw materials entering the coating cavity through the communicating portion; a vacuum system connected to the receiving cavity, the vacuum system being used to evacuate the receiving cavity and the coating cavity; and a drive system for driving the rollers to rotate.

[0084] The technical solution of this application, by incorporating a roller in the coating apparatus, allows the substrate to tumble within the coating chamber, avoiding the uneven gas flow and electric field problems caused by the fixed position of the substrate in traditional coating apparatuses. During the tumbling process, all parts of the substrate are more evenly exposed to the coating material, significantly improving the coating uniformity of substrates with complex shapes. Simultaneously, the roller can accommodate multiple substrates, increasing the number of substrates that can be coated in a single batch. The connecting section enables communication between the coating chamber and the receiving chamber, ensuring that the coating material can smoothly enter the coating chamber, providing a sufficient material basis for substrate coating, and making the gas environment within the chamber more uniform, thus improving the overall coating quality.

[0085] To make the above-mentioned objectives, features and beneficial effects of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0086] Figure 1 This is a schematic diagram of a coating apparatus 100 according to an embodiment of the present invention.

[0087] refer to Figure 1The coating apparatus 100 includes: a housing 1 having a receiving cavity 11; at least one roller 2 housed in the receiving cavity 11 and rotatable within the receiving cavity 11, each roller 2 including a coating cavity 21 for placing a substrate to be coated, the substrate tumbling within the coating cavity 21 as the roller 2 rotates, and a communicating portion 22 is provided on the wall of the roller 2 for connecting the coating cavity 21 and the receiving cavity 11; a feeding system 3 for feeding coating raw materials into the receiving cavity 11, the coating raw materials entering the coating cavity 21 through the communicating portion 22; a vacuum system 4 connected to the receiving cavity 11, the vacuum system 4 for evacuating the receiving cavity 11 and the coating cavity 21; and a drive system 5 for driving the roller 2 to rotate.

[0088] Specifically, the coating device 100 has a wide range of applications in multiple fields. For example, in the field of magnetic material production, with the miniaturization of technology, the size of magnetic materials is becoming smaller and smaller. Parylene coating can cover these materials without any weak points. Parylene has applications in magnetic materials such as protection and mechanical modification, and it has excellent corrosion resistance, good electrical insulation, moisture resistance, and mildew resistance. In the field of rubber and sealing ring production, rubber and sealing rings may come into contact with various chemicals during use. Parylene coating can effectively isolate corrosive media such as acids, alkalis, and salts, preventing them from eroding the rubber and sealing rings, extending their service life, enhancing wear resistance, while maintaining their original flexibility and elasticity. In the medical industry, it is used for surface treatment of medical devices and biomedical sensors, improving their safety and biocompatibility, enabling medical devices to better meet clinical needs, and promoting technological progress in the medical industry. For example, surface coatings on implantable medical devices such as artificial joints and pacemakers improve their safety and service life in the human body, providing technical support for the development of the medical industry. In the aerospace field, the coating device 100 can be used to protect critical components from radiation, extreme temperatures, and corrosive media in the space environment. In the defense field, it is used to protect military equipment, enhancing its reliability and durability, and ensuring national defense security. This helps improve the technological level and equipment quality of the aerospace and defense industries, and promotes the development of related industries.

[0089] Furthermore, the coating device 100 can also be used in emerging application areas. For example, with the rapid development of emerging industries such as 5G communication, artificial intelligence, the Internet of Things, and new energy vehicles, the application of Parylene in these fields is constantly increasing, bringing new market demand and development opportunities to the Parylene industry and becoming a new economic growth point. For example, the use of Parylene coatings in components such as battery packs and motors of new energy vehicles improves safety and durability, promoting the development of the new energy vehicle industry and driving market growth in the Parylene industry. The electronics industry produces a huge amount of circuit boards and electronic components. Hundreds of millions of circuit boards of various types are produced globally each year, and the number of electronic components is even greater. To improve the stability and reliability of electronic devices, Parylene coatings, with their superior performance in moisture resistance, mildew resistance, and corrosion resistance, make them an ideal choice for high-end electronic products. For example, key components such as motherboards and chips in consumer electronics products such as smartphones, tablets, and laptops have extremely high requirements for protection performance, and their penetration rate in these high-end products is gradually increasing.

[0090] In practical applications, the substrate to be coated can include, for example, irregularly shaped metal parts, complex ceramic components, and precision plastic parts.

[0091] Furthermore, the housing 1 forms the basic framework of the coating apparatus 100, and the cavity 11 formed inside it provides a closed and controllable space for the entire coating process. Moreover, the sealing of the coating cavity 11 effectively isolates it from external environmental interference, such as dust and moisture, ensuring that the coating reaction takes place in a stable environment. Simultaneously, the cavity 11 also provides the space for the installation and operation of other core components, such as the roller 2, and is the basis for the coordinated operation of all components in the coating apparatus 100.

[0092] Furthermore, at least one roller 2 is housed within the receiving cavity 11 and is capable of rotating within the receiving cavity 11. Each roller 2 has an independent coating cavity 21, which is an area for placing the substrate to be coated. When the roller 2 rotates, the substrate within the coating cavity 21 undergoes a tumbling motion. In practical applications, this tumbling motion allows the various surfaces, edges, and uneven parts of the substrate to be alternately exposed to the coating environment, fundamentally solving the "edge effect" and "shadow effect" that easily occur in traditional fixed-position coating, and significantly improving the uniformity of the coating.

[0093] Furthermore, a connecting portion 22 is provided on the wall of the roller 2, which connects the coating chamber 21 and the receiving chamber 11. The connecting portion 22 provides a channel for the transfer of coating material, allowing the coating material conveyed from the feeding system to the receiving chamber 11 to enter the coating chamber 21 through the connecting portion 22 and make full contact with the tumbling substrate. By rationally designing the aperture and distribution of the connecting portion 22, the uniformity of the coating material entering the coating chamber 21 can be further ensured, providing support for uniform coating.

[0094] Furthermore, the feeding system 3 is the core of the coating raw material supply, used to accurately and stably deliver various required coating raw materials into the receiving cavity 11. Depending on the different requirements of the coating process, the feeding system 3 can deliver gaseous raw materials, liquid raw materials, or solid raw materials that have been processed and converted into a gaseous state. The coating raw materials delivered into the receiving cavity 11 enter the coating cavity 21 through the connecting part 22 on the wall of the roller 2, providing a sufficient and continuous material basis for the coating reaction of the substrate.

[0095] In some embodiments, the feeding system 3 can adjust the conveying rate and dosage of raw materials according to process parameters to ensure the precision and controllability of the coating process.

[0096] Furthermore, the vacuum system 4 is connected to the receiving cavity 11 to perform a vacuuming operation on the receiving cavity 11 and the coating cavity 21 connected by the connecting part 22. By evacuating, a low-pressure environment suitable for film formation can be created in the receiving cavity 11 and the coating cavity 21. This low-pressure environment facilitates the uniform diffusion of the coating material within the cavity, reduces uneven material distribution, and minimizes the impact of airborne impurities on the coating quality. Simultaneously, the vacuum state can enhance the activity of the coating material, promote the chemical reaction between the coating material and the substrate surface, and improve the quality and adhesion of the coating layer.

[0097] Furthermore, the drive system 5 provides the power source for the rotation of the roller 2, driving it to rotate at a set speed and in a set manner through stable power output. The stable operation of the drive system 5 ensures that the roller 2 rotates continuously and uniformly, thereby guaranteeing that the substrate undergoes regular tumbling motion within the coating chamber 21. By adjusting the parameters of the drive system 5, such as the rotational speed, it can adapt to the needs of different substrates and coating processes, providing reliable motion assurance for uniform coating of the substrate and ensuring the efficient execution of the coating process.

[0098] In some embodiments, continue to refer to Figure 1 The housing 1 may include: an air inlet 12, which is connected to the feeding system 3 and is used to receive the coating material input by the feeding system 3; and an air outlet 13, which is disposed opposite to the air inlet 12 and is used to discharge the residual coating material in the receiving cavity 11, wherein the residual coating material is discharged from the air outlet 13 in the form of gas.

[0099] Specifically, the configuration of the air inlet 12 and the air outlet 13 establishes a complete airflow circulation path for the input of coating materials and the discharge of residual coating materials. The air inlet 12 can be directly connected to the feeding system 3 to receive various coating materials supplied by the feeding system 3, such as gaseous materials, vaporized liquid materials, and solid materials that have undergone sublimation or pyrolysis. Thus, through the precise connection of the air inlet 12, the materials output by the feeding system 3 can stably and continuously enter the receiving cavity 11, providing initial material input assurance for subsequent materials to enter the coating cavity 21 through the connecting part 22 of the roller 2.

[0100] Furthermore, the air outlet 13 and the air inlet 12 are arranged opposite each other, which facilitates the formation of an orderly airflow within the receiving cavity 11. The opposite arrangement means that the air inlet 12 and the air outlet 13 are respectively located on opposite sides of the cross-section of the housing 1. The cross-section can be a plane perpendicular to the rotation axis of the roller 2. In the example where the roller 2 is cylindrical, the line connecting the air outlet 13 and the air inlet 12 is approximately parallel to the radial direction of the roller 2 and passes through the rotation axis of the roller 2.

[0101] Furthermore, the air outlet 13 is used to discharge residual coating material in the receiving cavity 11.

[0102] In some embodiments, the residual coating material may exist in gaseous form, such as unreacted raw material gas or reaction byproduct gas. Timely discharge of the residual gas through the outlet 13 prevents excessive accumulation of residual coating material within the containment cavity 11, which could affect the stability of the coating environment and prevent coating quality fluctuations caused by raw material concentration imbalances. Simultaneously, the synergistic effect of the coating material input through the inlet 12 and the residual coating material discharged through the outlet 13 creates a dynamic gas balance within the containment cavity 11, promoting more uniform diffusion and distribution of the coating material within the cavity, further improving coating uniformity, and providing a stable gas environment to support high-quality coating of the substrate.

[0103] In some embodiments, the vacuum system 4 may include a vacuum pumping device 41, which is directly or indirectly connected to the air outlet 13, and the vacuum pumping device 41 is used to evacuate the receiving cavity 11.

[0104] It should be understood that the vacuuming refers to reducing the vacuum level of the receiving cavity 11 and the coating cavity 21 to a target vacuum level below standard atmospheric pressure, rather than an absolute vacuum state.

[0105] In some embodiments, the main function of the vacuum device 41 is to extract gas from the containment cavity 11 through the outlet 13, thereby reducing the gas pressure in the containment cavity 11 and the coating cavity 21 connected thereto, and creating a low-pressure environment that meets the requirements of the coating process.

[0106] When the vacuum device 41 is directly connected to the outlet 13, the gas in the containment cavity can be directly extracted through the outlet 13 to achieve rapid vacuuming. An indirect connection may be made through intermediate components such as pipes or valves to the outlet 13. This connection method allows for the setting of gas processing steps or the adjustment of the extraction rate according to actual needs. The operation of the vacuum device 41 effectively removes air and other interfering gases from the containment cavity 11, reducing the impact of impurities on the coating reaction and creating a pure environment for the reaction of the coating raw materials. Simultaneously, during the vacuuming process, the function of the outlet 13 in discharging residual coating raw materials synergizes with the extraction action of the vacuum device 41, further accelerating the flow and renewal of gas within the containment cavity 11. This helps maintain the stability of the gas environment within the cavity. Combined with the fresh raw materials input through the inlet 12, this allows the coating raw materials to diffuse more evenly under low pressure, providing reliable pressure conditions for uniform coating of the substrate.

[0107] In some embodiments, combined with Figure 1 and Figure 2 The vacuum system 4 may further include a cold trap 42, connected to the outlet 13, for adsorbing at least a portion of the residual coating material.

[0108] In practical applications, during the coating process, some coating materials do not participate in the reaction or exist in gaseous form as reaction byproducts within the containment cavity 11. Direct discharge of these residual coating materials would not only waste materials but also potentially pollute the environment. The cold trap 42, connected to the outlet 13, can intercept and adsorb the residual coating materials along their discharge path. This enables the recycling of residual coating materials, reducing production costs, and also reduces harmful gas emissions, meeting environmental protection requirements. Simultaneously, the adsorption of residual coating materials by the cold trap 42 prevents their deposition in other components of the vacuum system 4, ensuring the stable operation of the vacuum system 4 and indirectly supporting the stability of the coating environment within the containment cavity 11.

[0109] In some embodiments, the cold trap 42 may include: a housing 421 having an absorption cavity 422, wherein the housing 421 has an inlet 423 and an outlet 424 communicating with the absorption cavity 422, and the inlet 423 is communicating with the air outlet 13.

[0110] Specifically, the cold trap 42 includes a shell 421, inside which an absorption cavity 422 is formed for processing residual coating materials. The absorption cavity 422 provides a closed space for the adsorption of residual coating materials.

[0111] Furthermore, the outer casing 421 may have an inlet 423 and an outlet 424, which are respectively connected to the absorption chamber 422. The inlet 423 is directly connected to the air outlet 13 of the casing 1, serving as a channel for residual coating material to enter the cold trap 42, ensuring that the residual coating material discharged from the receiving chamber 11 through the air outlet 13 can smoothly enter the absorption chamber 422 for processing. The outlet 424 is used to discharge the remaining gas after adsorption treatment from the cold trap 42, forming a complete closed loop for gas flow. Thus, the outer casing 421 provides a stable support and sealing environment for the absorption chamber 422, preventing leakage of residual coating material during processing.

[0112] Further reference Figure 3 The cold trap 42 may further include a cooling section 425 disposed within the absorption cavity 422. The cooling section 425 is connected to one of the top wall and bottom wall of the cold trap 42 and extends toward the other. The inlet 423 is closer to the bottom wall than the outlet 424. The residual coating material is adsorbed by the cooling section 425.

[0113] Specifically, the cold trap 42 may further include a cooling section 425 disposed inside the absorption cavity 422 to absorb residual coating material.

[0114] In some embodiments, the cooling section 425 is connected to one of the top and bottom walls of the cold trap 42 and extends toward the other. For example, Figure 2 In the illustrated embodiment, the cooling section 425 is disposed on the top wall of the cold trap 42 and extends toward the bottom wall. This increases the coverage area of ​​the cooling section 425 within the absorption cavity 422, creating conditions for sufficient contact with residual coating material.

[0115] Furthermore, the inlet 423 is closer to the bottom wall of the cold trap 42 than the outlet 424. When the residual coating material enters the absorption chamber 422 from the inlet 423, it will gradually move towards the outlet 424 during the flow process. Since the cooling section 425 is located inside the absorption chamber 422 and has a lower temperature, when the residual coating material gas flows through the cooling section 425, the condensable components in it will undergo a phase change due to the temperature drop, changing from a gaseous state to a liquid or solid state, and then be adsorbed by the cooling section 425. The placement of the inlet 423 close to the bottom wall prolongs the contact path and time between the residual coating material and the cooling section 425 in the absorption chamber 422, improving the adsorption efficiency, ensuring that more residual coating material is effectively captured, and further enhancing the recovery and treatment effect of the cold trap 42 on the residual coating material.

[0116] In some embodiments, the cooling section 425 is provided with a cooling medium to ensure that the temperature of the cooling section 425 is lower than the temperature of the gas at the outlet 13. Thus, the cooling medium ensures that the cooling section 425 maintains a lower temperature. Since the residual coating material discharged from the outlet 13 exists in gaseous form and has a certain temperature, when this gas enters the absorption chamber 422 and comes into contact with the cooler cooling section 425, the condensable components in the gas release heat due to the temperature difference, undergoing liquefaction or solidification phase changes. The cooling medium continuously provides cooling to the cooling section 425, ensuring the stability of the low-temperature state of the cooling section 425, thereby continuously and efficiently condensing and adsorbing the residual coating material.

[0117] In some embodiments, the cooling medium may be, for example, liquid nitrogen, ethanol, Freon, cooling water, or other refrigerants.

[0118] In some embodiments, the temperature of the cooling section 425 is taken from [-80, -150] °C.

[0119] In some embodiments, combined with Figure 3 and Figure 4 The cold trap 42 further includes at least one partition 426 disposed within the absorption cavity 422. The partition 426 is used to divide the absorption cavity 422 into meandering air channels. During the flow of gas entering the cold trap 42 from the outlet 13 within the air channels, the residual coating material is adsorbed by the partition 426 and the inner wall of the outer shell 421.

[0120] Specifically, the partition 425 is used to divide the internal space of the absorption cavity 422, thereby forming a meandering air passage. This meandering air passage structure changes the flow path of the gas in the absorption cavity 422, extending the gas flow distance and residence time in the absorption cavity 422.

[0121] When the residual coating material gas enters the inlet 423 of the cold trap 42 from the outlet 13, it flows along the meandering gas channel formed by the partition 426. During the flow, the gas comes into full contact with the surface of the partition 426 and the inner wall of the outer shell 421.

[0122] In some embodiments, since the cold trap 42 can be kept in a low-temperature environment, the inner walls of the partition 426 and the outer shell 421 maintain a low temperature. The condensable components in the residual coating material will undergo a phase change due to the temperature drop during the contact process, and then be adsorbed by the inner walls of the partition 426 and the outer shell 421.

[0123] Furthermore, the design of the meandering air passage increases the contact area and contact time between the gas and the inner wall of the partition 426 and the outer shell 421, significantly improving the adsorption efficiency of residual coating materials and further enhancing the cold trap 42's ability to recover and process residual materials.

[0124] Furthermore, such as Figure 3 and Figure 4 As shown, the at least one partition 426 includes: a first partition 4261 extending from the top wall of the outer shell 421 toward the bottom wall, the first partition 4261 dividing the absorption cavity 422 into an air inlet 427 and an air outlet 428, the inlet 423 and the outlet 424 being formed on the top wall, the inlet 423 communicating with the air inlet 427, the outlet 424 communicating with the air outlet 428, and a non-zero gap between the first partition 4261 and the bottom wall to connect the air inlet 427 and the air outlet 428.

[0125] In a specific implementation, the first partition 4261 extends from the top wall to the bottom wall of the outer shell 421, clearly dividing the internal space of the absorption cavity 422 to form independent air inlet duct 427 and air outlet duct 428. Furthermore, both the inlet 423 and the outlet 424 are located on the top wall of the outer shell 421. The inlet 423 is connected to the air inlet duct 427, allowing the gas containing residual coating raw materials to directly flow into the air inlet duct 427 after entering through the inlet 423. The outlet 424 is connected to the air outlet duct 428, used to discharge the treated gas from the outlet duct 428 into the cold trap 42.

[0126] Furthermore, to facilitate gas flow between the inlet duct 427 and the outlet duct 428, a non-zero gap is maintained between the first partition 4261 and the bottom wall of the outer casing 421, which serves as a channel connecting the inlet duct 427 and the outlet duct 428. When residual raw material gas enters the inlet duct 427, it will flow downwards along the inlet duct 427 under the propulsion of the airflow. After reaching the vicinity of the bottom wall, it will enter the outlet duct 428 through the gap between the first partition 4261 and the bottom wall, and then flow upwards along the outlet duct 428 to be discharged through the outlet 424. Thus, the meandering airflow path significantly extends the flow distance and residence time of the gas in the absorption chamber 422, increasing the contact opportunities between the gas and the surface of the first partition 4261 and the inner wall of the outer casing 421. Combined with the low-temperature environment of the cold trap 42, more residual coating raw materials will be condensed and adsorbed during the flow process, further improving the adsorption efficiency and treatment effect of the cold trap 42.

[0127] In some embodiments, the first partition 4261 and the outer shell 421 forming the sidewall of the absorption cavity 422 may also have a non-zero gap to allow the gas entering the absorption cavity 422 to flow normally.

[0128] In some embodiments, the temperature of the housing 421 can be set to -80 to -150°C.

[0129] In some embodiments, the cross-sectional diameter of the inlet 423 and outlet 424 of the cold trap 42 can range from 15 mm to 63 mm.

[0130] In some embodiments, reference Figure 5 , Figure 5 The diagram shown is a top view of a cold trap 42.

[0131] The at least one partition 426 may include: a plurality of second partitions 4262, which are alternately connected to one of a pair of opposite sidewalls of the housing 421 and extend toward the other. The plurality of second partitions 4262 divide the absorption cavity 422 into an air inlet 427, an air outlet 428, and a plurality of connecting channels 429 connecting the air inlet 427 and the air outlet 428. The inlet 423 connects to the air inlet 427.

[0132] In some embodiments, the outer casing 421 may be cylindrical (e.g., Figure 5 (As shown). In this scenario, the opposing pair of sidewalls can be, for example, two radially opposing portions of the outer casing 421. In other words, the pair of sidewalls have a rounded transition and there are no definite corners or angles.

[0133] exist Figure 5 In the embodiment shown, the alternately arranged second partitions 4262 further divide the internal space of the absorption cavity 422, forming an air inlet 427, an air outlet 428, and multiple connecting channels 429. The connecting channels 429 are used to connect the air inlet 427 and the air outlet 428, while the inlet 423 is connected to the air inlet 427.

[0134] Furthermore, when the gas containing residual coating material enters the intake duct 427 from the inlet 423, it flows along a path separated by multiple second baffles 4262 under the action of airflow. Since the second baffles 4262 are alternately connected to opposite sidewalls, the gas needs to continuously turn and shuttle between the intake duct 427 and the connecting sections 429, finally reaching the outlet duct 428 and being discharged from the outlet 424. Thus, the multi-segmented, meandering airway structure greatly extends the flow path and residence time of the gas within the absorption chamber 422, significantly increasing the contact area and frequency between the gas and the surfaces of the second baffles 4262 and the inner wall of the outer shell 421. Combined with the low-temperature environment of the cold trap 42, the condensable components in the residual coating material can undergo phase change and be adsorbed more fully on the low-temperature surface, further improving the adsorption efficiency and treatment effect of the cold trap 42 on the residual material, enhancing material recovery and environmental performance.

[0135] In some embodiments, reference Figure 6The number of air inlets 12 is multiple, and different air inlets 12 are used to receive coating materials in different original states, including solid, gas and liquid.

[0136] The housing 1 has multiple air inlets 12, which can be functionally divided according to the original state of the coating material. Different air inlets 12 are used to receive coating materials that are in a solid, gas, or liquid state. This enables the classified input of materials in different forms, providing hardware support for diversified coating processes.

[0137] In some embodiments, during the actual coating process, an inert gas (such as helium or argon) in its original gaseous state can be introduced through part of the air inlet 12. Plasma discharge is used to perform surface activation pretreatment on the substrate to be coated, which is beneficial for the subsequent adhesion of the film layer. Alternatively, vaporized film layer raw materials (such as various organic or inorganic functional chemical monomers) can be introduced through part of the air inlet 12, forming a functional or protective film layer on the substrate surface in a plasma environment. Conversely, sublimated or pyrolyzed film layer raw materials (such as phenelzine) in their original solid state can be introduced through part of the air inlet 12, forming a phenelzine coating on the substrate surface. By combining different forms and types of raw materials, multiple film layers can be deposited sequentially or simultaneously to prepare multifunctional composite film layers. This integrates ordinary CVD, PECVD, and ICVD technologies, solving the problem that existing equipment can only achieve single CVD deposition technology, i.e., only a single type of raw material can be introduced, and only one coating can be deposited at a time. This requires multiple start-ups and shutdowns and material feeding to complete the composite coating, resulting in poor film quality and long coating cycles.

[0138] In one variation, at least a portion of the plurality of air inlets 12 may also be used to introduce materials that process the substrate at different stages into the receiving cavity 11.

[0139] Specifically, in actual coating processes, the substrate may need to undergo multiple stages such as pretreatment, coating, and post-treatment. Therefore, at least a portion of the multiple air inlets 12 can be used to introduce inert gas before coating to perform plasma activation treatment on the substrate surface, thereby enhancing the adhesion between the substrate and the subsequent coating layer; or to introduce specific film-forming gas during the coating process to adjust the reaction atmosphere and optimize the structure and performance of the coating layer; or to introduce protective gas after coating to prevent oxidation or contamination of the coating layer before exposure to air. The fact that some of the multiple air inlets 12 perform these functions enables independent and precise delivery of different processing materials, avoiding interference between materials at different stages.

[0140] In some embodiments, at least a portion of the air inlets 12 can precisely control the timing, rate, and dosage of material introduction according to the process requirements of different processing stages, ensuring that each processing step achieves the expected results, thereby further improving the overall coating quality and performance stability of the substrate.

[0141] In some embodiments, such as Figure 1 As shown, multiple air inlets 12 are arranged side by side along the axial direction of the receiving cavity 11.

[0142] In other embodiments, such as Figure 6 As shown, the plurality of air inlets 12 may also be arranged at circumferential intervals along the receiving cavity.

[0143] In some embodiments, reference Figure 6 A support rail 14 is provided on the inner wall of the housing 1 to support the roller 2, and the roller 2 can rotate relative to the support rail 14. Thus, the roller 2 can rotate stably around its axis within the receiving cavity 11.

[0144] In some embodiments, the support rail 14 may include: a fixing part 141, which is fixedly connected to the inner wall of the housing 1; and a roller part 142, which is rotatably connected to the fixing part 141, and the roller 2 rotates relative to the housing 1 via the roller part 142.

[0145] In some embodiments, the number of support rails 14 is plurality of, and the plurality of support rails 14 are spaced apart along the outer peripheral surface of the roller 2. For example, in Figure 6 In this configuration, there are two support rails 14, which are spaced apart on the underside of the roller 2.

[0146] In some embodiments, the axial direction of the roller portion 142 may be parallel to the axial direction of the drum 2.

[0147] In some embodiments, the coating apparatus 100 may further include an air equalization plate 34 disposed on the side of the air inlet 12 facing the roller 2, and the coating material fed into the air inlet 12 is uniformly filled into the receiving cavity 11 after passing through the air equalization plate 34.

[0148] In some embodiments, the air distribution plate 34 may include a flat plate region 341 and a hollowed-out region 342.

[0149] In some embodiments, the hollow area 342 may be located around the flat plate area 341, which may correspond to the air inlet 12. The gas carrying the coating material delivered by the air inlet 12 impacts the flat plate area 341 and then spreads outwards to achieve a uniform gas distribution effect.

[0150] In some embodiments, the air distribution plate 34 may only include the perforated area 342. In practical applications, a fully perforated or partially perforated baffle can be selected according to the characteristics of the raw materials and the film layer.

[0151] In some embodiments, combined with Figure 8 and Figure 9 The coating apparatus 100 may further include: a rolling bracket 6, rotatably disposed in the receiving cavity 11, and the roller 2 mounted on the rolling bracket 6 and rotating with the rotation of the rolling bracket 6.

[0152] Specifically, the rolling support 6 can rotate flexibly under the action of the drive system 5, thereby driving the rollers 2 mounted on it to rotate together, ensuring that the substrate inside the rollers 2 can tumble according to process requirements. Thus, the rolling support 6 can more stably support multiple rollers 2, facilitating the integrated installation of multiple rollers 2. Furthermore, the arrangement of multiple rollers 2 can reduce the number of substrates in a single roller 2, mitigating collisions and obstructions between them. In addition, by concentrating multiple rollers 2 on the rolling support 6, space can be rationally utilized within the receiving cavity 11, increasing the loading capacity of a single batch of substrates to be coated and improving production efficiency. Simultaneously, the synchronous rotation of the rolling support 6 ensures the consistency of rotation of each roller 2, making the coating environment of the substrates in different rollers more uniform, reducing coating quality fluctuations caused by differences in roller rotation, and further ensuring the stability and uniformity of the coating.

[0153] Continue to refer to Figure 8 In some embodiments, the rolling bracket 6 is provided with a plurality of mounting portions 61 along the circumference, and each of the mounting portions 61 corresponds one-to-one with a plurality of rollers 2. Each mounting portion 61 is used to mount the corresponding roller 2. Thus, by using the one-to-one mounting method between the rollers 2 and the mounting portions 61, it can be ensured that each roller 2 can be stably fixed on the rolling bracket 6, avoiding problems such as roller 2 offset or shaking during the rotation of the rolling bracket 6.

[0154] In some embodiments, the rolling bracket 6 includes a front cover plate 62 and a rear cover plate 63 disposed opposite to each other, and a support rod 64 supported between the front cover plate 62 and the rear cover plate 63. The mounting part 61 includes a mounting groove 621 formed in the front cover plate 62 and an insertion groove 631 formed in the rear cover plate 63. The roller 2 has a protrusion on one side facing the rear cover plate 63. The protrusion of the roller 2 located on the mounting part 61 is inserted into the corresponding insertion groove 631. The other end of the roller 2 is located in the mounting groove 621.

[0155] The rolling support 6 is specifically composed of a front cover plate 62, a rear cover plate 63, and a support rod 64 positioned between them. This frame structure provides the rolling support 6 with higher stability, ensuring sufficient strength and rigidity during rotation. The mounting part 61 includes a mounting groove 621 on the front cover plate 62 and an insertion groove 631 on the rear cover plate 63. A protrusion (not shown) is provided on the side of the roller 2 facing the rear cover plate 63. When installing the roller 2, the protrusion of the roller 2 is inserted into the corresponding insertion groove 631, while the other end is placed in the mounting groove 621. This "one end insertion, one end support" connection achieves a tight connection between the roller 2 and the rolling support 6. The engagement of the insertion groove 631 and the protrusion restricts the axial and circumferential displacement of the roller 2, while the mounting groove 621 provides support and positioning for the other end of the roller. Together, they ensure that the roller 2 does not loosen or fall off when the rolling support 6 rotates. At the same time, this installation structure facilitates the quick installation and removal of the roller 2. When it is necessary to replace or maintain the roller 2, the roller 2 can be easily removed from the installation part 61.

[0156] In some embodiments, the side of the roller 2 near the mounting groove 621 can also be connected to the front cover plate 62 by screws or other fasteners.

[0157] In some embodiments, combined with Figure 8 and Figure 9 The roller 2 may include: an inner cylinder 24 for forming the coating cavity 21, wherein the inner cylinder 24 has a plurality of small holes on its wall, the plurality of small holes being adapted to form the connecting part 22; and an outer cylinder 25 sleeved on the inner cylinder 24, the outer cylinder 25 being connected to the rolling bracket 6, the wall of the outer cylinder 25 being grid-shaped.

[0158] In specific implementation, the inner cylinder 24 is used to form a coating cavity 21 for placing the substrate to be coated. Multiple small holes are formed on the wall of the inner cylinder 24, which together constitute a connecting part 22 between the coating cavity 21 and the receiving cavity 11. This ensures that the coating material in the receiving cavity 11 can enter the coating cavity 21 through the small holes, contact the tumbling substrate, and complete the coating process. The outer cylinder 25 is fitted outside the inner cylinder 24 and is connected to the rolling support 6, becoming the connecting carrier between the roller 2 and the rolling support 6. When the rolling support 6 rotates, the outer cylinder 25 rotates synchronously, thereby causing the inner cylinder 24 and the internal substrate to tumble together. The wall of the outer cylinder 25 is grid-like. The grid structure does not obstruct the flow of the coating material in the receiving cavity 11 to the small holes of the inner cylinder 24, and also protects and supports the inner cylinder 24, enhancing the overall structural strength of the roller 2. Meanwhile, the grid-shaped outer cylinder 25 can reduce obstruction to airflow, making the distribution of coating materials in the receiving cavity 11 more uniform, further ensuring that the coating cavity 21 of the inner cylinder 24 can continuously obtain a sufficient and uniform supply of coating materials, thereby improving the coating quality of the substrate.

[0159] In some embodiments, the material of the inner cylinder 24 may be selected from stainless steel, plastic, etc.

[0160] In some embodiments, combined with Figures 8 to 10 The rolling bracket 6 includes a boss 65 disposed at one end of the rolling bracket 6 along the axial direction, and the housing 1 has a through hole structure 15.

[0161] It should be understood that Figure 10 In the coating apparatus 100 shown, the roller 2 can be either Figure 1 and Figure 6 The single large roller shown can also be Figure 8 and Figure 9 The diagram shows multiple small rollers.

[0162] Specifically, the drive system 5 is connected to the boss 65 via a magnetic fluid sealing rotation device, directly applying power to the rolling bracket 6, causing the rolling bracket 6 to rotate within the receiving cavity 11. This solves the spatial connection problem of the drive system 5 driving the internal rolling bracket 6 from outside the housing 1, ensuring both the sealing of the receiving cavity 11 of the housing 1 and achieving effective power transmission. Simultaneously, the cooperation between the boss 65 and the magnetic fluid sealing transmission device guides and limits the rotation of the rolling bracket 6, reducing radial offset during rotation and ensuring stable rotation of the rolling bracket 6 and the roller 2 mounted on it, providing reliable motion assurance for uniform coating of the substrate.

[0163] In some embodiments, combined with Figure 1 and Figure 10 In the application scenario of a single roller 2, the roller 2 includes a boss 65, which is disposed at one end of the roller 2 along the axial direction. The housing 1 is provided with a through hole structure 15, and a magnetic fluid sealing transmission device can be installed at the through hole structure 15. The drive system 5 is connected to the boss 65 through the magnetic fluid sealing transmission device.

[0164] In some embodiments, the drive system 5 may further include a drive motor 51, a transmission belt 52, a tensioner assembly 53, and a timing pulley 54, wherein the output end of the drive motor 51 is connected to the transmission belt 52, the timing pulley 54, and the rotating shaft of the magnetohydrodynamic sealed transmission device (e.g., a...). Figure 13 The conductive shaft 732 shown in the figure is connected to the transmission.

[0165] The drive motor 51 serves as the power source, providing continuous power for the rotation of the rolling support 6 (or roller 2). When the drive motor 51 starts, the rotation at its output end is transmitted directly or indirectly to the boss 65 via the transmission belt 52, thereby driving the rolling support 6 (or roller 2) to rotate within the receiving cavity 11. The transmission belt 52 enables flexible power transmission, effectively buffering impacts and vibrations during the driving process and reducing the impact on the rotational stability of the rolling support 6 and roller 2. The tensioning pulley assembly 53 is used to adjust the tension of the transmission belt 52. By applying appropriate pressure to the belt, it ensures good contact between the transmission belt 52 and the components in the drive system 5, preventing slippage and ensuring the efficiency and stability of power transmission.

[0166] In some embodiments, there may be two synchronous pulleys 54. One synchronous pulley 54 is fixedly connected to the rotating shaft of the magnetohydrodynamic sealing transmission device, and the other synchronous pulley 54 is fixedly connected to the output end of the drive motor 51. The two transmission pulleys 54 can rotate synchronously through the belt 52, thereby driving the rolling bracket 6 (or roller 2) to rotate in the receiving cavity 11.

[0167] In some embodiments, combined with Figure 1 and Figure 11 The connecting part 22 includes multiple detachable perforated plates 221, spaced apart circumferentially along the roller 2. The coating chamber 21 and the receiving chamber 11 are connected through holes in the perforated plates 221. Thus, the detachable design of the perforated plates 221 facilitates maintenance and process adjustment of the roller 2. When it is necessary to replace perforated plates with different pore diameters and densities to adapt to different coating materials or process requirements, the perforated plates 221 can be easily disassembled and replaced. The perforated plates 221 spaced apart circumferentially along the roller 2 allow the coating material in the receiving chamber 11 to enter the coating chamber 21 from multiple positions through the holes in the perforated plates 221, ensuring the uniformity of the coating material entering the coating chamber 21 and avoiding local material concentration differences caused by a single connecting position. Simultaneously, the perforated structure of the perforated plates 221 can homogenize the material airflow, which is beneficial to improving the uniformity of material distribution within the coating chamber 21, creating favorable conditions for uniform coating of the substrate.

[0168] In some embodiments, combined with Figure 1 and Figure 12 The roller 2 is provided with multiple baffles 26, which are spaced along the inner wall of the roller 2. The baffles 26 are used to stir the substrate in the coating chamber 21 during the rotation of the roller 2, which can increase the tumbling frequency of the substrate during the coating process and realize 360° all-round coating of the substrate.

[0169] In practical applications, when the roller 2 rotates under the action of the drive system 5, the baffles 26 rotate synchronously with the roller 2, contacting the substrate and pushing it to move. The multiple, spaced baffles 26 create a multi-directional stirring effect on the substrate within the coating chamber 21, breaking the substrate's simple movement within the roller 2 and causing relative movement and tumbling between the substrates. This stirring effect prevents some surfaces from being insufficiently exposed to the coating material due to substrate accumulation, ensuring that all parts of the substrate are evenly in contact with the coating material, further improving the uniformity of the coating. Simultaneously, the stirring effect of the baffles 26 reduces adhesion between substrates, ensuring that each substrate can undergo an independent and thorough coating reaction.

[0170] In some embodiments, reference Figure 13 The coating apparatus 100 may further include a discharge system 7. The discharge system 7 may include: an electrode 71 disposed in the receiving cavity and used for discharge, the electrode 71 rotating synchronously with the roller 2; and a power supply 72 located outside the receiving cavity and electrically connected to the electrode 71, the power supply 72 being used to supply power to the electrode 71.

[0171] Specifically, by arranging electrode 71 to rotate synchronously with roller 2 within coating chamber 21, the discharge area can be uniformly distributed within coating chamber 21 as roller 2 rotates. When electrode 71 discharges, it excites the process gas, generating plasma rich in active species within coating chamber 21. This plasma activates the substrate surface, improving the adhesion between the film and the substrate. Simultaneously, the active components in the plasma are transported to the substrate surface to be deposited through diffusion (driven by concentration gradient) and convection (driven by gas flow), ultimately depositing a film on the substrate surface. Because electrode 71 rotates synchronously with roller 2, discharge is prevented from concentrating in a fixed area, ensuring a more uniform distribution of active materials within coating chamber 21 and sufficient contact with the tumbling substrate, further guaranteeing the uniformity of coating on all substrate surfaces. Power supply 72 is electrically connected to electrode 71 outside coating chamber 21, satisfying the power supply requirements of electrode 71 while preventing direct exposure of power supply 72 to the special environment of coating chamber 21, ensuring stable operation and lifespan of power supply 72, and providing continuous and stable power support for the discharge process.

[0172] In some embodiments, the electrode 71 is connected to the axial end wall of the roller 2, and at least a portion of the electrode 71 extends through the end wall and out of the coating cavity 21 to be electrically connected to the power supply 72.

[0173] In other embodiments, the electrical connection between the power supply 72 and the electrode 71 can also be achieved by extending an electrical connector into the coating cavity 21.

[0174] In some embodiments, the electrode 71 is connected to the end wall of the roller 2 on the side opposite to the boss 65.

[0175] In some embodiments, such as Figure 20 As shown, the electrode 71 can also be connected to the end wall of the roller 2 on the same side as the boss 65.

[0176] In some embodiments, the discharge system 7 further includes: an electrical connection assembly 73, electrically connecting the electrode 71 and the power supply 72; wherein the electrical connection assembly 73 includes: a first conductive portion 731, fixedly connected to a first wall 101 of the housing 1 along the axial direction; a conductive shaft 732, passing through the first conductive portion 731, at least a portion of the conductive shaft 732 extending into the receiving cavity 11; a second conductive portion 733, fixedly connected to one end of the conductive shaft 732 extending into the receiving cavity 11, the second conductive portion 733 having a receiving groove 734 on its end face facing the roller 2, the receiving groove 734 being used to receive at least a portion of the electrode 71 to electrically connect the conductive shaft 732 and the electrode 71.

[0177] Specifically, the first conductive part 731 is fixedly connected to the first wall 101 of the housing 1 along the axial direction, providing a stable mounting base for the entire electrical connection assembly 73. Furthermore, the conductive shaft 732 passes through the first conductive part 731, and at least a portion of the conductive shaft 732 extends into the receiving cavity 11. The conductive shaft 732 serves as an intermediate carrier for power transmission, capable of transferring power from an external power source to the receiving cavity 11. The second conductive part 733 is fixedly connected to one end of the conductive shaft 732 extending into the receiving cavity 11 and moves synchronously with the conductive shaft 732. The end face of the second conductive part 733 facing the roller 2 is provided with a receiving groove 734, which is used to receive at least a portion of the electrode 71. Electrical connection between the conductive shaft 732 and the electrode 71 is achieved through the cooperation of the electrode 71 and the receiving groove 734.

[0178] Furthermore, the electrical connection assembly 73 may further include: a first insulating connector 735 for physically connecting the first conductive part 731 and the first wall 101. The first insulating connector 735 has a through hole 7351, and the outer wall of the conductive shaft 732 and the inner wall of the through hole 7351 are sealed together. Thus, by providing a through hole 7351 in the first insulating connector 735, through which the conductive shaft 732 passes, and with the outer wall of the conductive shaft 732 and the inner wall of the through hole 7351 sealed together, gas leakage from the containment cavity 11 through the gap between the conductive shaft 732 and the first insulating connector 735 can be effectively prevented. This ensures that the containment cavity 11 maintains the vacuum environment or specific pressure environment required for coating, avoiding the impact of gas leakage on the stability and quality of the coating process. Simultaneously, the sealed connection also prevents external air or impurities from entering the containment cavity 11, reducing interference with the coating reaction and further ensuring the overall reliability of the device.

[0179] Furthermore, the first insulating connector 735 is made of insulating material, which can block the current conduction between the first conductive part 731 and the first wall 101 while realizing a stable connection between them, preventing power leakage through the housing 1, and ensuring the electrical safety of the coating device 100.

[0180] In some embodiments, the electrical connection assembly 73 may further include: a second insulating connector 736 for connecting the second conductive part 733 and the end wall (protrusion 65) of the roller 2 facing the first wall 101, wherein the electrode 71 and the second insulating connector 736 rotate synchronously with the roller 2 as the roller 2 rotates.

[0181] In some embodiments, the second insulating connector 736 has at least one mating groove 7361 on its end face facing the roller 2, and the roller 2 has at least one protrusion 27 on its end wall facing the first wall 101. The protrusion 27 is adapted to be inserted into the corresponding mating groove 7361 so that the second insulating connector 736 can rotate synchronously with the roller 2.

[0182] In the above scenario, as the drum 2 rotates, the electrode 71, the second conductive part 733, and the second insulating connector 736 also rotate with the drum 2. The conductive shaft 732 and the second conductive part 733 are fixedly connected (electrically connected). As the drum 2 rotates, the conductive shaft 732 also rotates within the through hole 7351 and is electrically connected to the first conductive part 731. The conductive shaft 732 can rotate relative to the first conductive part 731, and the first conductive part 731 and the first insulating connector 735 are fixedly connected.

[0183] In some embodiments, reference Figure 13The electrical connection assembly 73 may further include a third insulating connector 737 disposed between the boss 65 and the electrode 71.

[0184] In some embodiments, the discharge system 7 further includes a matching device 74, wherein the power supply 72, the matching device 74, and the first conductive part 731 are electrically connected in sequence.

[0185] In some embodiments, the first conductive part 731 and the conductive rotating shaft 732 constitute the magnetohydrodynamic sealing transmission device.

[0186] In some embodiments, reference Figure 13 The electrode 71 can be located in the central region of the receiving cavity 11. Thus, the active material generated by the discharge of the electrode 71 diffuses from the center outwards, uniformly covering all areas within the coating cavity 21.

[0187] In other embodiments, electrode 71 may not rotate with roller 2.

[0188] In some embodiments, reference Figures 14 to 16 The electrode 71 is located on the inner wall of the receiving cavity 11.

[0189] It should be understood that, in practical applications, for Figure 1 In the application scenario shown for a single roller 2, the electrode 71 can be located in the central region of the coating cavity 21 (at this time, the central region of the coating cavity 21 and the central region of the receiving cavity 11 are substantially coincident in space), and the electrode 71 can rotate with the roller 2; for Figure 8 In the application scenario of multiple rollers 2 shown, electrode 71 can be located in the central area of ​​receiving cavity 11, and electrode 71 can rotate with rolling support 6.

[0190] In some embodiments, the electrode 71 may be columnar or plate-shaped.

[0191] In some embodiments, the electrode 71 has a porous structure.

[0192] In some embodiments, reference Figure 1 The feeding system 3 includes a liquid raw material feeding component 31, a solid raw material feeding component 32, and a gaseous raw material feeding component 33.

[0193] Furthermore, the raw materials supplied by the liquid raw material feeding assembly 31, the solid raw material feeding assembly 32, and the gaseous raw material feeding assembly 33 ultimately enter the receiving cavity 11 in gaseous form. Thus, coating raw materials in different initial states can have a consistent physical state after entering the receiving cavity 11, facilitating uniform mixing and diffusion within the cavity 11 and providing a stable raw material environment for the coating reaction. The gaseous coating raw material can enter the coating cavity 21 more efficiently through the connecting part 22, ensuring full contact with the substrate and avoiding uneven coating caused by differences in raw material physical states, thereby guaranteeing the stability and reliability of the coating process.

[0194] In some embodiments, the liquid raw material feeding assembly 31 may include a vaporization heating chamber 311 for heating the liquid raw material, which is then vaporized by the vaporization heating chamber 311 and fed into the receiving cavity 11.

[0195] In a typical application scenario, the liquid raw material absorbs heat in the vaporization heating chamber 311, changing from a liquid to a gaseous state. The vaporized, gaseous coating raw material is then fed into the receiving cavity 11 through the liquid raw material inlet 121. The vaporization heating chamber 311 enables the phase transformation of the liquid raw material, allowing liquid raw materials that are originally difficult to directly participate in the vapor phase coating reaction to enter the reaction system in gaseous form. This expands the types of raw materials that the device can handle. At the same time, by controlling the heating temperature, the vaporization rate of the liquid raw material can be precisely controlled, ensuring that the amount of raw material entering the receiving cavity 11 is stable and controllable.

[0196] In some embodiments, the solid raw material feeding assembly 32 includes: a hopper 321 for holding solid raw materials; a sublimation chamber 322 for heating and sublimating the solid raw materials; and a pyrolysis furnace 323 for pyrolyzing the gas after sublimation of the solid raw materials and conveying it to the containment cavity 11.

[0197] In some embodiments, the hopper 321 can be used to hold multiple solid raw materials, such as spherical phenelzine, sheet phenelzine, or granular phenelzine.

[0198] Furthermore, the solid raw material enters the sublimation chamber 42 and is vaporized into gas, then is cracked into monomer gas in the cracking chamber 44, and then enters the containment chamber 11 and the coating chamber 21.

[0199] In some embodiments, the gas distribution plate 34 may be disposed at at least one of the liquid raw material inlet 121, the solid raw material inlet 122, and the gas raw material inlet 123, wherein the liquid raw material inlet 121, the solid raw material inlet 122, and the gas raw material inlet 123 are formed on the wall of the housing 1, and the liquid raw material inlet 121 is connected to the liquid raw material feeding assembly 31, the solid raw material inlet 122 is connected to the solid raw material feeding assembly 32, and the gas raw material inlet 123 is connected to the gas raw material feeding assembly 33.

[0200] In some embodiments, reference Figure 17 The roller 2 may include multiple hanging rods 28, and the substrate may be suspended on the hanging rods 28.

[0201] In some embodiments, the multiple hanging rods 28 can have various different shapes to facilitate the suspension of substrates. For example, the hanging rods 28 can be straight rods, slots, U-shaped rods, square rods, etc., to suspend substrates of different shapes and structures.

[0202] In some embodiments, reference Figure 18 The coating apparatus 100 may further include: a plurality of isolation chambers 8, each of the isolation chambers 8 having an isolation cavity 81, each of the isolation cavities 81 accommodating at least one of the substrates, the plurality of isolation chambers 8 rotating within the coating cavity 21, and the isolation chambers 8 having a plurality of holes communicating with the isolation cavity 81 and the coating cavity 21.

[0203] In some embodiments, each isolation chamber 8 is spherical. This spherical isolation chamber 8 allows it to roll more smoothly within the coating cavity 21.

[0204] In some embodiments, each of the isolation chambers 8 is formed by two detachably connected hemispherical shells.

[0205] In some variations, the isolation chamber 8 may also be elliptical, cylindrical, or the like.

[0206] In some embodiments, the two hemispherical shells of the spherical isolation chamber 8 can be connected by snap-fit ​​or screwed together. The cylindrical isolation chamber 8 may consist of a small cylindrical tube and a lid.

[0207] In some embodiments, combined with Figure 1 and Figure 19The coating apparatus 100 may further include a bracket 9 housed in the receiving cavity 11, wherein the roller 2 is supported by the roller bracket 9 and can be pushed into or pulled out of the receiving cavity 11 along the axial direction of the bracket 9. Thus, the bracket 9 facilitates the loading, unloading, maintenance, and substrate handling of the roller 2, allowing these operations to be completed without complex disassembly of the overall structure of the coating apparatus 100.

[0208] In embodiments employing the rolling bracket 6, the bracket 9 can also be used to support the rotation of the rolling bracket 6 within the receiving cavity 11.

[0209] In some embodiments, the housing 1 may have an end cap, which, when opened, allows the bracket 9, along with the roller 2 supported on the bracket 9, to be pulled out of the receiving cavity 11.

[0210] Specifically, the bracket 9 may include: a pair of support plates 91 disposed opposite to each other and a pair of connecting rods 92 supported between the pair of support plates 91; support wheels 93, at least one pair of support wheels 93 are provided on each support plate 91, the roller is supported on the support wheels 93 at both ends along the axial direction and can rotate via the support wheels 93; and sliding wheels 94 are disposed on the side of the support plate 91 opposite to the roller, the sliding wheels 94 can roll along the inner wall of the housing forming the receiving cavity.

[0211] Thus, a pair of support plates 91 and connecting rod 72 form the main support structure of bracket 9, ensuring that bracket 9 can reliably bear the weight of roller 2. Each support plate 91 is provided with at least a pair of support wheels 93, and the roller 2 is supported on the support wheels 93 at both ends along the axial direction, and the roller 2 can rotate via the support wheels 93. The support wheels 93 convert the sliding friction between roller 2 and support plate 91 into rolling friction, reducing the resistance when roller 2 rotates, making the rotation of roller 2 smoother, and also reducing component wear and extending the service life of coating device 100.

[0212] Furthermore, a sliding wheel 94 is provided on the side of the support plate 91 facing away from the roller 2, and the sliding wheel 94 can roll along the inner wall of the housing 1 forming the receiving cavity 11. In some embodiments, a support platform may be provided on the inner wall of the housing 1, for example, a reused support platform. Figure 6 The fixed part 141 is shown. The sliding wheel 94 can roll along the support platform to realize the pushing and pulling of the roller 2 (or the rolling bracket 6).

[0213] When it is necessary to push or pull out the roller 2, the sliding wheel 94 contacts the inner wall of the housing and rolls, which greatly reduces the frictional resistance between the bracket 9 and the housing 1, making it easier for the operator to drive the bracket 9 to drive the roller 2 to move axially, so as to realize the entry and exit of the roller 2 in the receiving cavity 11, and further improve the ease of operation of the device.

[0214] Therefore, by adopting the technical solution of this application, a roller 2 is provided in the coating apparatus 100, causing the substrate to tumble within the coating chamber 21, thus avoiding the problem of uneven gas flow and electric field caused by the fixed position of the substrate in traditional coating apparatuses. During the tumbling process, various parts of the substrate can be more evenly exposed to the coating material, significantly improving the coating uniformity of substrates with complex shapes. At the same time, the roller 2 can accommodate multiple substrates, increasing the number of substrates that can be coated in a single batch. The connecting part 22 enables the coating chamber 21 to be connected to the receiving chamber 11, ensuring that the coating material can smoothly enter the coating chamber 21, providing a sufficient material basis for substrate coating, and making the gas environment inside the chamber more uniform, which is conducive to improving the overall coating quality.

[0215] Furthermore, the coating apparatus 100 also includes a cold trap 42, which is connected to the air outlet 13 and can adsorb at least a portion of the residual coating material, thereby reducing the emission of harmful substances in the exhaust gas to meet environmental protection requirements; the recovered coating material can be reused, reducing production costs.

[0216] Furthermore, the coating apparatus 100 includes multiple air inlets 12, which can receive coating raw materials in different initial states (solid, gas, liquid) to meet diverse coating needs. Different raw materials can enter the receiving cavity 11 simultaneously or sequentially according to process requirements, enriching the coating process options and improving the applicability of the apparatus.

[0217] Furthermore, multiple baffles 26 are spaced along the inner wall of the drum 2 to agitate the substrate in the coating chamber 21 when the drum 2 rotates. The agitation action causes the substrate to rub against each other and turn over more thoroughly, further promoting uniform coating on all parts of the substrate and improving the uniformity of the coating.

[0218] Furthermore, the electrical connection assembly 73 includes a first conductive part 731 fixed to the first wall of the housing 1, a conductive shaft 732 passing through the first conductive part 731, and a second conductive part 733 fixed to the conductive shaft 732 and provided with a receiving groove 734. This achieves a reliable electrical connection between the electrode and the power supply. Simultaneously, the first insulating connector ensures that the first conductive part 731 is insulated from the first wall, and the second insulating connector connects and insulates the second conductive part 733 to the end wall of the roller 2, preventing leakage and ensuring safe operation of the equipment.

[0219] Furthermore, the feeding system 3 includes a liquid raw material feeding component 31, a solid raw material feeding component 32, and a gaseous raw material feeding component 33, which can simultaneously process multiple types of raw materials, enrich the selection of coating raw materials, meet the diverse raw material requirements of different coating processes, and improve the versatility of the device.

[0220] Furthermore, the coating apparatus 100 also includes multiple isolation chambers 8, which roll within the coating cavity 21. Each isolation chamber 8 contains at least one substrate, and an opening in the chamber connects the isolation chamber 81 to the coating cavity 21. The isolation chambers 8 can protect the substrates from mutual collision and wear, while also making the substrates more evenly dispersed within the cavity, promoting coating uniformity, and increasing the number of substrates that can be coated in a single pass.

[0221] It should be understood that the term "and / or" in this document is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document indicates that the preceding and following related objects are in an "or" relationship. As used herein, unless explicitly stated otherwise, the term "or" covers all possible combinations unless impractical. For example, if a component is declared to include A or B, then unless explicitly stated otherwise or impractical, the component can include A, or B, or A and B. As a second example, if a component is declared to include A, B, or C, then unless explicitly stated otherwise or impractical, the component can include A, or B, or C, or A and B, or A and C, or B and C, or A and B and C.

[0222] The term "multiple" in the embodiments of this application refers to two or more entities. Relational terms appearing in the embodiments of this application, such as "first," "second," etc., are used only to distinguish an entity or operation from another entity or operation, without requiring or implying any actual relationship or order between these entities or operations. Furthermore, the words "comprising," "having," and "including," and other similar forms, are intended to be equivalent in meaning and are open-ended; one or more items following any of these words do not imply an exhaustive list of such items or that they are limited to only the listed items. Exemplary embodiments have been disclosed in the drawings and specification. However, many variations and modifications can be made to these embodiments. Therefore, although specific terminology is used, it is used only in a general and descriptive sense and not for limiting purposes.

[0223] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A coating apparatus, characterized in that, include: The shell has a receiving cavity; At least one roller is housed in the receiving cavity and is rotatable within the receiving cavity. Each roller includes a coating cavity for placing a substrate to be coated. During rotation of the roller within the receiving cavity, the substrate is tumbled within the coating cavity. A communicating portion is provided on the wall of the roller for communicating the coating cavity and the receiving cavity. The feeding system is used to deliver coating raw materials into the receiving cavity, and the coating raw materials enter the coating cavity through the communicating part; A vacuum system, connected to the receiving cavity, is used to evacuate the receiving cavity and the coating cavity; A drive system is used to drive the roller to rotate.

2. The coating apparatus according to claim 1, characterized in that, The housing includes: An air inlet, connected to the feeding system, is used to receive the coating raw material input by the feeding system; An air outlet is disposed opposite to the air inlet and is used to discharge residual coating material in the receiving cavity. The residual coating material is discharged from the air outlet in gas form.

3. The coating apparatus according to claim 2, characterized in that, The vacuum system includes: A vacuum pumping device is directly or indirectly connected to the air outlet, and the vacuum pumping device is used to evacuate the receiving cavity.

4. The coating apparatus according to claim 2, characterized in that, The vacuum system includes a cold trap connected to the outlet for adsorbing at least a portion of the residual coating material.

5. The coating apparatus according to claim 4, characterized in that, The cold trap includes: The outer shell has an absorption cavity, and the outer shell has an inlet and an outlet that communicate with the absorption cavity. The inlet is connected to the air outlet.

6. The coating apparatus according to claim 5, characterized in that, The cold trap also includes: A cooling section is disposed within the absorption cavity. The cooling section is connected to one of the top and bottom walls of the cold trap and extends toward the other. The inlet is closer to the bottom wall than the outlet. The residual coating material is adsorbed by the cooling section.

7. The coating apparatus according to claim 6, characterized in that, The cooling section is provided with a cooling medium so that the temperature of the cooling section is lower than the temperature of the gas at the outlet.

8. The coating apparatus according to claim 7, characterized in that, The temperature of the cooling section is taken from [-80, -150]℃.

9. The coating apparatus according to claim 5, characterized in that, The cold trap also includes: At least one partition is disposed within the absorption chamber, the partition being used to divide the absorption chamber into meandering air channels, during which the residual coating material is adsorbed by the partition and the inner wall of the outer shell while the gas entering the cold trap from the outlet flows within the air channels.

10. The coating apparatus according to claim 9, characterized in that, The at least one partition includes: A first partition extends from the top wall of the outer casing toward the bottom wall, dividing the absorption cavity into an air inlet and an air outlet. The inlet and the outlet are located on the top wall, with the inlet communicating with the air inlet and the outlet communicating with the air outlet. A non-zero gap exists between the first partition and the bottom wall to connect the air inlet and the air outlet.

11. The coating apparatus according to claim 9, characterized in that, The at least one partition includes: A plurality of second partitions are alternately connected to one of a pair of opposite sidewalls of the housing and extend toward the other, the plurality of second partitions dividing the absorption cavity into an air inlet, an air outlet and a plurality of connecting channels connecting the air inlet and the air outlet, the inlet connecting to the air inlet.

12. The coating apparatus according to claim 2, characterized in that, The number of air inlets is multiple, and different air inlets are used to receive coating materials in different original states, including solid, gas and liquid.

13. The coating apparatus according to claim 1, characterized in that, The inner wall of the housing is provided with a support rail for supporting the roller, and the roller can rotate relative to the support rail.

14. The coating apparatus according to claim 13, characterized in that, The number of support rails is multiple, and the multiple support rails are spaced apart along the outer circumferential surface of the roller.

15. The coating apparatus according to claim 13, characterized in that, The support rail includes: The fixing part is fixedly connected to the inner wall of the housing; The roller is rotatably connected to the fixed part, and the drum rotates relative to the housing via the roller.

16. The coating apparatus according to claim 1, characterized in that, Also includes: A rolling bracket is rotatably disposed in the receiving cavity, and the roller is mounted on the rolling bracket and rotates with the rotation of the rolling bracket.

17. The coating apparatus according to claim 16, characterized in that, The inner wall of the housing is provided with a support rail for supporting the rolling bracket.

18. The coating apparatus according to claim 16, characterized in that, The rolling bracket is provided with multiple mounting parts along the circumference, and each mounting part corresponds to one of the multiple rollers. Each mounting part is used to install the corresponding roller.

19. The coating apparatus according to claim 18, characterized in that, The rolling support includes: The front cover plate and the rear cover plate are arranged opposite each other, and a support rod is supported between the front cover plate and the rear cover plate. The mounting part includes a mounting groove opened in the front cover plate and an insertion groove provided in the rear cover plate. A protrusion is provided on the side of the roller facing the rear cover plate. The protrusion of the roller located on the mounting part is inserted into the corresponding insertion groove. The other end of the roller is located in the mounting groove.

20. The coating apparatus according to claim 16, characterized in that, The roller includes: An inner cylinder is used to form the coating cavity. The inner cylinder has multiple small holes on its wall, which are adapted to form the connecting part. An outer cylinder is fitted onto the inner cylinder, and the outer cylinder is connected to the rolling bracket. The wall of the outer cylinder is grid-shaped.

21. The coating apparatus according to claim 16, characterized in that, The rolling support includes: A boss is provided at one end of the rolling bracket along the axial direction. The housing has a through hole structure. At least a portion of the boss extends out from the through hole structure. The drive system is directly or indirectly connected to the boss through the through hole structure.

22. The coating apparatus according to claim 1, characterized in that, The roller includes a boss located at one end of the roller along the axial direction. The housing has a through hole structure, through which the drive system is directly or indirectly connected to the boss.

23. The coating apparatus according to claim 1, characterized in that, The connecting portion includes: Multiple detachable perforated plates are spaced apart along the circumference of the roller, and the coating cavity and the receiving cavity are connected through holes in the perforated plates.

24. The coating apparatus according to claim 1, characterized in that, The drum is provided with multiple baffles, which are spaced apart along the inner wall of the drum. The baffles are used to stir the substrate in the coating chamber during the rotation of the drum.

25. The coating apparatus according to claim 1, characterized in that, Also includes: The discharge system includes: An electrode, which is disposed within the receiving cavity and is used for discharge; A power source, located outside the coating cavity and electrically connected to the electrode, is used to supply power to the electrode.

26. The coating apparatus according to claim 25, characterized in that, The electrode rotates synchronously with the roller.

27. The coating apparatus according to claim 25, characterized in that, The electrode is connected to the axial end wall of the roller, and at least a portion of the electrode penetrates the end wall and extends out of the coating cavity to be electrically connected to the power source.

28. The coating apparatus according to claim 25, characterized in that, The discharge system also includes: An electrical connection assembly electrically connects the electrodes and the power source; wherein The electrical connection component includes: The first conductive part is fixedly connected to the first wall of the housing along the axial direction; A conductive shaft passes through the first conductive portion, and at least a portion of the conductive shaft extends into the receiving cavity; The second conductive part is fixedly connected to one end of the conductive shaft that extends into the receiving cavity. The end face of the second conductive part facing the roller is provided with a receiving groove, which is used to receive at least a portion of the electrode to electrically connect the conductive shaft and the electrode.

29. The coating apparatus according to claim 28, characterized in that, The electrical connection assembly further includes: a first insulating connector for physically connecting the first conductive part and the first wall, the first insulating connector having a through hole, and the outer wall of the conductive shaft and the inner wall of the through hole being sealed together.

30. The coating apparatus according to claim 28, characterized in that, The electrical connection assembly further includes: a second insulating connector for connecting the second conductive part and the end wall of the roller facing the first wall, wherein the electrode and the second insulating connector rotate synchronously with the roller as the roller rotates.

31. The coating apparatus according to claim 30, characterized in that, The second insulating connector has at least one mating groove on its end face facing the roller, and the roller has at least one protrusion on its end wall facing the first wall. The protrusion is adapted to be inserted into the corresponding mating groove so that the second insulating connector can rotate synchronously with the roller.

32. The coating apparatus according to claim 28, characterized in that, The discharge system further includes a matching device, wherein the power supply, the matching device, and the first conductive part are electrically connected in sequence.

33. The coating apparatus according to claim 25, characterized in that, The electrode is located in the central region of the receiving cavity, or the electrode is located on the inner wall of the receiving cavity; and / or The electrodes are columnar or plate-shaped; and / or The electrode has a porous structure.

34. The coating apparatus according to claim 1, characterized in that, The feeding system includes a liquid feed component, a solid feed component, and a gas feed component.

35. The coating apparatus according to claim 34, characterized in that, The raw materials supplied by the liquid raw material feeding assembly, the solid raw material feeding assembly, and the gaseous raw material feeding assembly ultimately enter the receiving cavity in gaseous form.

36. The coating apparatus according to claim 34, characterized in that, The liquid feed assembly includes: A vaporization heating chamber is used to heat liquid raw materials. The liquid raw materials are vaporized in the vaporization heating chamber to form a first gaseous raw material, which is then input into the receiving cavity.

37. The coating apparatus according to claim 34, characterized in that, The solid raw material feeding assembly includes: A silo is used to store solid raw materials; A sublimation chamber is used to heat and sublimate the solid raw material. A pyrolysis furnace is used to pyrolyze the gas obtained after the solid raw material is sublimated into a second gaseous raw material, and to transport the second gaseous raw material to the coating chamber.

38. The coating apparatus according to claim 37, characterized in that, The solid raw material feeding assembly further includes a rotary feeding mechanism for controllably conveying the solid raw material in the hopper to the sublimation chamber.

39. The coating apparatus according to claim 34, characterized in that, It also includes at least one gas distribution plate disposed at at least one of the liquid raw material inlet, the solid raw material inlet, and the gas raw material inlet, wherein the liquid raw material inlet, the solid raw material inlet, and the gas raw material inlet are opened on the wall of the housing, and the liquid raw material inlet is connected to the liquid raw material feeding assembly, the solid raw material inlet is connected to the solid raw material feeding assembly, and the gas raw material inlet is connected to the gas raw material feeding assembly.

40. The coating apparatus according to claim 1, characterized in that, The roller may include multiple hanging rods, and the substrate may be suspended on the hanging rods.

41. The coating apparatus according to claim 1, characterized in that, Also includes: Multiple isolation chambers, each of which has an isolation cavity, each of which contains at least one substrate, the multiple isolation chambers roll within the coating cavity, and the isolation chambers have multiple holes communicating with the isolation cavity and the coating cavity.

42. The coating apparatus according to claim 41, characterized in that, Each of the isolation chambers is spherical; and / or each of the isolation chambers is formed by two detachably connected hemispherical shells.

43. The coating apparatus according to claim 1, characterized in that, Also includes: A bracket is housed in the receiving cavity, and the roller is supported by the roller bracket and is capable of being pushed into or pulled out of the receiving cavity as the bracket moves axially along the receiving cavity.

44. The coating apparatus according to claim 43, characterized in that, The bracket includes: A pair of cover plates arranged opposite each other and a pair of connecting rods supporting the pair of cover plates; Support wheels, at least one pair of support wheels are provided on each of the cover plates, and the roller is directly or indirectly supported by the support wheels at both ends along the axial direction and can rotate via the support wheels; A sliding wheel is disposed on the side of the cover plate opposite to the roller, and the sliding wheel is capable of rolling along the inner wall of the housing that forms the receiving cavity.

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