Epitaxial equipment comprising flexible gas connecting device

Abstract

The invention discloses extension equipment comprising a flexible gas connecting device, which comprises a gas connecting seat, a gas connecting box, a connecting pipeline, a cavity cover, a cavity and a cover opening mechanism, the gas connecting seat is arranged at the side part of the cavity, the gas inlet end of the gas connecting seat is connected to an external gas source, and the gas connecting box is arranged at the side part of the cavity cover; the air outlet end is communicated with the air inlet on the cavity cover through a connecting pipeline; the cavity cover is connected with the cover opening mechanism; when the uncovering mechanism drives the cavity cover to be sealed and covered with the cavity, the gas outlet end of the gas connecting base is communicated with the gas inlet end of the gas connecting box in a sealed mode, and a gas source is conveyed into the cavity. When the cover opening mechanism drives the cavity cover to be separated from the cavity, the gas outlet end of the gas connecting base and the gas inlet end of the gas connecting box are away from each other, and gas source conveying is stopped. The device has the advantages of being compact in structure, convenient to operate, high in reliability and the like, a solution is provided for forming an air inlet in a frequently-moving part, pipeline disassembly during cavity opening maintenance of extension equipment is avoided, and operability of a user is improved.

Description

Technical Field

[0001] This invention relates to the field of epitaxial equipment technology, and more specifically to an epitaxial device including a flexible gas connection device. Background Technology

[0002] The source gas required for epitaxial growth equipment typically first passes through external plant facilities to the equipment's gas supply system, and then is transported to the equipment's cavity inlet via related pipelines. The inlet is generally fixed to the cavity. Currently, the inlets on the epitaxial growth equipment cavities are mostly directly connected to the gas supply system via corrugated pipes or rigid pipes. This connection method restricts the flexible movement of components with inlets, requiring the removal of the fixed inlet and pipelines for any movement, causing inconvenience for equipment use and maintenance. Furthermore, this connection method limits the structure of the epitaxial growth equipment cavity and inlet, hindering the development of equipment towards greater flexibility and integration. In addition, corrugated pipes are prone to damage and leakage after repeated bending and stretching over a long period, posing a safety risk. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to address the shortcomings of the prior art by providing an epitaxial device that is compact, easy to assemble and disassemble, and highly reliable, and includes a flexible gas connection device.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: An extensional device including a flexible gas connection device includes: a gas connection seat, a gas connection box, a connecting pipe, a cavity cover, a cavity, and a cover opening mechanism. The gas connection seat is disposed on the side of the cavity, and its inlet end is connected to an external gas source. The gas connection box is disposed on the side of the cavity cover, and its outlet end is connected to the inlet on the cavity cover via the connecting pipe. The cavity cover is connected to the cover opening mechanism. When the cover opening mechanism drives the cavity cover to seal and close with the cavity, the outlet end of the gas connection seat and the inlet end of the gas connection box are sealed and connected to each other, so as to realize the delivery of external gas source to the cavity. When the cover opening mechanism drives the cavity cover to separate from the cavity, the outlet end of the gas connection seat and the inlet end of the gas connection box move away from each other, stopping the delivery of gas source.

[0005] As a further improvement of the present invention, the upper part of the gas connection seat is provided with a rotatable baffle, and the side of the cavity cover is also provided with a support rod, which is located on one side of the gas connection box; when the cavity cover is sealed with the cavity body, the support rod abuts the baffle against the side of the gas connection seat; when the cavity cover is separated from the cavity body, the support rod releases the baffle, and the baffle blocks the gas outlet at the top of the gas connection seat.

[0006] As a further improvement of the present invention, the baffle is connected to the gas connection seat via a rotating shaft, and the side of the baffle is equipped with a lever and a counterweight; when the cavity cover is sealed with the cavity body, the support rod abuts against the lever, limiting the baffle to the side of the gas connection seat; when the cavity cover is separated from the cavity body, the support rod releases the lever, and the counterweight drives the baffle to block the top of the gas connection seat.

[0007] As a further improvement of the present invention, the gas connection seat includes an air inlet pipe, a support and a docking plate. The docking plate is disposed on the top of the support and has a plurality of docking holes. The air inlet pipe extends from the bottom of the support into the support and communicates with the docking holes. The air inlet pipe is used to connect to an external gas source.

[0008] As a further improvement of the present invention, the air inlet end of the air inlet pipe is provided with an air pipe connector, and the air pipe connector is connected to an external air source through a pipe.

[0009] As a further improvement of the present invention, the gas connection box includes a panel and multiple gas outlet pipes, one of which is connected to a vacuum system. The panel has multiple air holes, which correspond to docking holes. One end of the gas outlet pipe is connected to the air hole, and the other end of the gas outlet pipe is connected to the air inlet or the vacuum system through a connecting pipe. When the cavity cover is sealed to the cavity body, the panel is sealed to the docking plate.

[0010] As a further improvement of the present invention, the panel is provided with an outer sealing ring. Except for the vacuum air path connected to the vacuum system, each of the other air holes is provided with an inner sealing ring. The inner sealing ring is located inside the outer sealing ring to achieve double sealing of the air holes. A vacuum is formed between the inner sealing ring and the outer sealing ring, and the sealing performance is judged by detecting the vacuum degree.

[0011] As a further improvement of the present invention, the top of the panel is connected to the cavity cover by screws, and the screws are fitted with adjusting springs.

[0012] As a further improvement of the present invention, both the mating plate and the panel are metal plates, and the contact surfaces of the mating plate and the panel are smooth surfaces.

[0013] As a further improvement of the present invention, the opening mechanism is a cylinder drive assembly, which drives the cavity cover to flip so as to seal or open the cavity.

[0014] Compared with the prior art, the advantages of the present invention are as follows: 1. The epitaxial device of the present invention, which includes a flexible gas connection device, is provided with a relatively independent gas connection seat and a gas connection box. The gas connection seat is located on the side of the cavity, and the gas inlet end of the gas connection seat is connected to an external gas source. The gas connection box is located on the side of the cavity cover, and the gas outlet end of the gas connection box is connected to the gas inlet on the cavity cover through a connecting pipe. When the opening mechanism drives the cavity cover to seal with the cavity, the gas connection box and the gas connection seat are also sealed and connected, thus realizing the delivery of external gas source into the cavity. When the cavity cover is separated from the cavity, the gas connection box and the gas connection seat are also separated, stopping the gas delivery. The present invention expands the cavity structure design of the epitaxial device, realizes the flexible connection between the gas circuit system and the cavity inlet, improves the flexibility of opening and closing the cavity cover and the convenience of maintenance, as well as the inherent safety of the device.

[0015] 2. The extension device of the present invention, including a flexible gas connection device, utilizes double sealing rings on the panel to achieve a sealed and flexible connection between the gas path system and the cavity inlet. By sleeved with adjusting springs around the connecting bolts between the gas connection box and the cavity cover, multi-point tight contact between the gas connection box and the gas connection seat is achieved. The cooperation of the support rod and the baffle ensures that when the gas connection box and the gas connection seat are separated, the baffle automatically covers the top of the gas connection seat, preventing the gas outlet of the gas connection seat from being directly exposed to the environment; when they are rejoined, the baffle opens, not obstructing the connection between the gas connection box and the gas connection seat. Simultaneously, a vacuum module is used to detect low pressure between the double sealing rings. The gas connection device of the present invention has a simple structure, flexible operation, and is safe and reliable. It provides a solution for opening air inlets for frequently moving components, while avoiding the disassembly of pipelines during maintenance of the extension device, thus improving the operability for users. Attached Figure Description

[0016] Figure 1 This is a schematic diagram illustrating the structural principle of the extended devices including the flexible gas connection device during merging in a specific embodiment of the present invention; Figure 2 This is a schematic diagram illustrating the structural principle of the epitaxial device including the flexible gas connection device during separation in a specific embodiment of the present invention; Figure 3 This is a schematic diagram illustrating the structural principle of the gas connection box and related pipelines in a specific embodiment of the present invention; Figure 4 This is a schematic diagram illustrating the structural principle of the gas connection box in a specific embodiment of the present invention; Figure 5 This is a schematic diagram illustrating the structural principle of the gas connection seat and related pipelines in a specific embodiment of the present invention; Figure 6 This is a schematic diagram of the partial structural principle of the gas connector and the gas connector box when they are combined in a specific embodiment of the present invention; Legend: 100, Gas connector; 200, Gas connector box; 300, Connecting pipe; 400, Baffle; 401, Paddle; 402, Counterweight; 500, Support rod; 600, Air inlet; 700, Cavity cover; 800, Cavity; 900, Opening mechanism; 101, Air inlet pipe; 1011, Air pipe connector; 102, Support; 103, Connecting plate; 104, Connecting hole; 201, Panel; 202, Adjusting spring; 203, Air outlet pipe; 204, Outer sealing ring; 205, Inner sealing ring; 2051, Vacuum air path. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0018] In the description of this invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more unless otherwise explicitly specified.

[0020] Example like Figure 1 and Figure 2As shown, the extensional device of the present invention, including a flexible gas connection device, comprises: a gas connection seat 100, a gas connection box 200, a connecting pipe 300, a cavity cover 700, a cavity 800, and a cover opening mechanism 900. In this embodiment, the cavity cover 700 is connected to the cover opening mechanism 900; the cover opening mechanism 900 is a cylinder drive assembly, which drives the cavity cover 700 to rotate, thereby sealing or opening the cavity 800. The gas connection seat 100 is disposed on the side of the cavity 800, and the gas inlet end of the gas connection seat 100 is connected to an external gas source. The gas connection box 200 is disposed on the side of the cavity cover 700, and the gas outlet end of the gas connection box 200 is connected to the gas inlet 600 on the cavity cover 700 through the connecting pipe 300. The connecting pipe 300 is made of rigid material. Since the gas connection box 200 is directly connected and fixed to the cavity cover 700, and the connecting pipe 300 connects to both the gas connection box 200 and the air inlet 600, the connecting pipe 300 does not need to be removed separately during internal maintenance of the cavity 800. When the opening mechanism 900 drives the cavity cover 700 to seal with the cavity 800, the outlet end of the gas connection seat 100 is sealed and connected to the air inlet end of the gas connection box 200, thereby enabling the external gas source to be delivered to the cavity 800. When the opening mechanism 900 drives the cavity cover 700 to separate from the cavity 800, the outlet end of the gas connection seat 100 and the air inlet end of the gas connection box 200 move away from each other, stopping the gas source delivery.

[0021] In this embodiment, a relatively independent gas connector 100 and gas connector box 200 are provided. The gas connector 100 is located on the side of the cavity 800, with its inlet end connected to an external gas source. The gas connector box 200 is located on the side of the cavity cover 700, with its outlet end connected to the inlet 600 on the cavity cover 700 via a connecting pipe 300. When the cover opening mechanism 900 drives the cavity cover 700 to seal with the cavity 800, the gas connector box 200 and the gas connector 100 are also sealed and connected, thus enabling the external gas source to be delivered into the cavity 800. When the cavity cover 700 separates from the cavity 800, the gas connector box 200 and the gas connector 100 also separate, stopping the gas delivery. This invention expands the cavity structure design of the extended equipment, realizes a flexible connection between the gas path system and the cavity inlet, improves the flexibility of opening and closing the cavity cover, the convenience of maintenance, and the inherent safety of the equipment.

[0022] like Figure 1 , Figure 2 and Figure 5As shown, the gas connection seat 100 has a rotatable baffle 400 on its upper part, and the cavity cover 700 has a support rod 500 on its side. The support rod 500 is located on one side of the gas connection box 200 and consists of a round rod, a bearing, an elastic pin, and a retaining ring. The support rod 500 faces the gas connection seat 100. When the cavity cover 700 is sealed with the cavity body 800, the support rod 500 abuts the baffle 400 against the side of the gas connection seat 100. When the cavity cover 700 is separated from the cavity body 800, the support rod 500 releases the baffle 400, and the baffle 400 blocks the gas outlet at the top of the gas connection seat 100. By utilizing the cooperation between the support rod 500 and the baffle 400, when the gas connection box 200 is separated from the gas connection seat 100, the baffle 400 automatically covers the top of the gas connection seat 100, preventing the gas outlet of the gas connection seat 100 from being directly exposed to the environment. When the cavity cover 700 and the cavity 800 are combined, the baffle 400 is pushed open, without obstructing the connection between the gas connection box 200 and the gas connection seat 100.

[0023] like Figure 5 As shown, the baffle 400 is connected to the gas connection seat 100 via a rotating shaft, and the side of the baffle 400 is equipped with a lever 401 and a counterweight 402. When the cavity cover 700 and the cavity body 800 are sealed together, the support rod 500 first abuts against the lever 401, pushing the lever 401 to move, and the rotating shaft rotates in the forward direction, limiting the baffle 400 to the side of the gas connection seat 100. The top surface of the gas connection seat 100 with the air hole is exposed, and the bottom surface of the gas connection box 200 contacts the top surface of the gas connection seat 100. When the cavity cover 700 and the cavity body 800 are separated, the support rod 500 releases the lever 401, and under the action of the counterweight 402, the rotating shaft rotates in the reverse direction, causing the baffle 400 to return to its original position and block the top of the gas connection seat 100.

[0024] like Figure 5 and Figure 6 As shown, the gas connection seat 100 includes an air inlet pipe 101, a support 102, and a docking plate 103. The docking plate 103 is disposed on the top of the support 102, and the docking plate 103 is provided with a plurality of through docking holes 104. The air inlet pipe 101 extends from the bottom of the support 102 into the support 102 and communicates with the docking holes 104. The air inlet pipe 101 is used to connect to an external gas source.

[0025] Furthermore, the lengths of the various air intake pipes 101 are different, and the air intake end of the air intake pipe 101 is provided with an air pipe connector 1011, which is connected to an external air source through a pipe.

[0026] like Figure 3 and Figure 4As shown, the gas connection box 200 includes a panel 201 and multiple gas outlet pipes 203, one of which is connected to a vacuum system. The panel 201 has multiple air holes corresponding to the docking holes 104. One end of each gas outlet pipe 203 is connected to an air hole, and the other end is connected to an air inlet 600 or the vacuum system via a connecting pipe 300. When the cavity cover 700 and the cavity body 800 are sealed together, the panel 201 and the docking plate 103 are also sealed together.

[0027] In this embodiment, both the docking plate 103 and the panel 201 are metal plates, and the contact surfaces of the docking plate 103 and the panel 201 are smooth. After the gas connector 100 is docked with the gas connector box 200, the pipes at both ends are interconnected. The output pipes of the gas connector box 200 are connected to the air inlet 600 on the cavity cover 700 through the connecting pipe 300, thus realizing that gas flows from the pipes in the gas connector 100 into the pipes in the gas connector box 200.

[0028] like Figure 3 and Figure 4 As shown, panel 201 has a sealing groove, in which an O-ring outer sealing ring 204 is placed. Except for the vacuum passage 2051 connected to the vacuum system, all other air holes have sealing grooves on their outer periphery, in which an O-ring inner sealing ring 205 is placed. The inner sealing ring 205 is located inside the outer sealing ring 204 to achieve double sealing of the air holes. A corresponding docking hole 104 is provided on the docking plate 103 of vacuum passage 2051 to connect with vacuum passage 2051, forming a vacuum pipeline. Except for the absence of the inner sealing ring 205, the arrangement of vacuum passage 2051 is consistent with the arrangement of other air holes. When gas connection box 200 is connected to gas connection seat 100, vacuum passage 2051 without the sealing ring is connected to a vacuum system equipped with a pressure gauge. Vacuuming is performed to create a vacuum between the inner sealing ring 205 and the outer sealing ring 204. The sealing performance is judged by detecting the vacuum level, ensuring the double sealing effect between gas connection seat 100 and gas connection box 200. The system is equipped with a vacuum module to detect low pressure between the two sealing rings. The vacuum system operates independently and determines the sealing performance of the two sealing rings by detecting the vacuum pressure, and provides the necessary alarm information to the equipment, thereby improving the reliability of the sealing connection.

[0029] In this embodiment, the top of the panel 201 is connected to the cavity cover 700 by screws, and the screws are fitted with adjusting springs 202. By adjusting the screws between the panel 201 and the cavity cover 700, the adjusting springs 202 are tightened and loosened, thereby achieving horizontal adjustment of the gas connection box 200 and achieving multi-point tight contact between the gas connection box 200 and the gas connection seat 100.

[0030] The gas connection device in this embodiment has a simple structure, flexible operation, and is safe and reliable. It provides a solution for opening air inlets for frequently moving parts, while avoiding the disassembly of pipelines when maintaining external equipment, thus improving the operability for users.

[0031] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. An epitaxial device comprising a flexible gas connection device, characterized in that, include: The system comprises a gas connector (100), a gas connector box (200), a connecting pipe (300), a cavity cover (700), a cavity (800), and a cover opening mechanism (900). The gas connector (100) is located on the side of the cavity (800), and its inlet end is connected to an external gas source. The gas connector box (200) is located on the side of the cavity cover (700), and its outlet end is connected to the inlet (600) on the cavity cover (700) via the connecting pipe (300). The cavity cover (700) is connected to the opening mechanism (900); when the opening mechanism (900) drives the cavity cover (700) to seal and close the cavity body (800), the gas outlet of the gas connector (100) is sealed and connected to the gas inlet of the gas connector box (200) so as to realize the external gas source to be delivered to the cavity body (800); when the opening mechanism (900) drives the cavity cover (700) to separate from the cavity body (800), the gas outlet of the gas connector (100) and the gas inlet of the gas connector box (200) move away from each other, and the gas source delivery is stopped.

2. The epitaxial device including a flexible gas connection device according to claim 1, characterized in that, The gas connector (100) is provided with a rotatable baffle (400) on the upper part, and a support rod (500) is provided on the side of the cavity cover (700). The support rod (500) is located on one side of the gas connector box (200). When the cavity cover (700) and the cavity (800) are sealed together, the support rod (500) abuts the baffle (400) against the side of the gas connector (100). When the cavity cover (700) and the cavity (800) are separated, the support rod (500) releases the baffle (400), and the baffle (400) covers the gas outlet at the top of the gas connector (100).

3. The epitaxial device including a flexible gas connection device according to claim 2, characterized in that, The baffle (400) is connected to the gas connection seat (100) via a rotating shaft, and the side of the baffle (400) is equipped with a lever (401) and a counterweight (402); when the cavity cover (700) and the cavity body (800) are sealed together, the support rod (500) abuts against the lever (401) to limit the baffle (400) to the side of the gas connection seat (100); when the cavity cover (700) and the cavity body (800) are separated, the support rod (500) releases the lever (401), and the counterweight (402) drives the baffle (400) to block the top of the gas connection seat (100).

4. The epitaxial device including a flexible gas connection device according to claim 2, characterized in that, The gas connector (100) includes an air inlet pipe (101), a support (102), and a docking plate (103). The docking plate (103) is located on the top of the support (102) and has multiple docking holes (104). The air inlet pipe (101) extends from the bottom of the support (102) into the support (102) and communicates with the docking holes (104). The air inlet pipe (101) is used to connect to an external gas source.

5. The epitaxial device including a flexible gas connection device according to claim 4, characterized in that, The air inlet end of the air inlet pipe (101) is provided with an air pipe connector (1011), which is connected to an external air source through a pipe.

6. The epitaxial device including a flexible gas connection device according to claim 4, characterized in that, The gas connection box (200) includes a panel (201) and multiple gas outlet pipes (203), one of which is connected to a vacuum system. The panel (201) has multiple air holes, which correspond to docking holes (104). One end of the gas outlet pipe (203) is connected to the air hole, and the other end of the gas outlet pipe (203) is connected to the air inlet (600) or the vacuum system through a connecting pipe (300). When the cavity cover (700) and the cavity body (800) are sealed together, the panel (201) and the docking plate (103) are sealed together.

7. The epitaxial device including a flexible gas connection device according to claim 6, characterized in that, The panel (201) is provided with an outer sealing ring (204). Except for the vacuum air passage (2051) connected to the vacuum system, each of the other air holes is provided with an inner sealing ring (205). The inner sealing ring (205) is located inside the outer sealing ring (204) to achieve double sealing of the air holes. A vacuum is formed between the inner sealing ring (205) and the outer sealing ring (204), and the sealing performance is judged by detecting the vacuum degree.

8. The epitaxial device including a flexible gas connection device according to claim 6, characterized in that, The top of the panel (201) is connected to the cavity cover (700) by screws, and the screws are fitted with adjusting springs (202).

9. The epitaxial device including a flexible gas connection device according to claim 6, characterized in that, Both the docking plate (103) and the panel (201) are metal plates, and the contact surfaces of the docking plate (103) and the panel (201) are smooth surfaces.

10. The epitaxial device comprising a flexible gas connection device according to any one of claims 1 to 8, characterized in that, The opening mechanism (900) is a cylinder drive assembly, which drives the cavity cover (700) to flip so as to seal or open the cavity (800).

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