A white light interferometer and a white light interferometric optical system

By using a combination of volume phase holographic grating and polarizer in a white light spectrometer, along with double-cemented achromatic lenses and mirrors to optimize the optical path, the problems of low accuracy and energy efficiency were solved, achieving high-efficiency imaging quality and wide-range detection.

CN120947816BActive Publication Date: 2026-02-13CONTROLWAY
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Patent Information

Application Number
CN202511494664.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-10-20
Publication Date
2026-02-13
Estimated Expiration
2045-10-20

AI Technical Summary

Technical Problem

Existing white light spectrophotometers suffer from poor precision and low energy efficiency, resulting in poor imaging quality, a smaller measurement range, and severe spectral distortion.

Method used

A combination of volume phase holographic grating and polarizer is used, along with collimated and focused doublet achromatic lenses. The optical path structure is optimized by combining a reflector to improve diffraction efficiency and imaging quality.

Benefits of technology

It improves the energy efficiency and imaging accuracy of the spectrometer, reduces aberrations, extends the detectable distance, and improves the accuracy of the spectrum and the quality of the imaging.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present application relates to the technical field of optical detection, and specifically provides a white light spectrometer and a white light interference optical system, wherein the white light spectrometer comprises an entrance, a collimating assembly, a diffraction assembly, a focusing assembly and a camera; the entrance is connected with an incident optical fiber; the diffraction assembly comprises a polarizer and a volume phase holographic grating; the collimating assembly comprises coaxially arranged cemented collimating lenses; the focusing assembly comprises at least one coaxially arranged cemented focusing lens; the polarizer and the cemented collimating lenses are coaxially arranged and are both located on a first light path; the cemented focusing lenses are all located on a second light path; the camera is arranged at an exit end of the second light path; and light output by the volume phase holographic grating is focused on an image plane of the camera by the cemented focusing lenses. The present application solves the technical problem of poor imaging quality caused by poor precision and low energy efficiency of the spectrometer in the related art.
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Description

TECHNICAL FIELD

[0001] The application relates to the field of optical detection technology, in particular to a white light spectrometer and a white light spectrometer optical system. BACKGROUND

[0002] White light spectrometer (FD-OCT) has the characteristics of non-contact, high precision and fast speed, and is often used for measuring optical and geometric parameters such as refractive index, thickness, distance and displacement, or indirectly measuring physical quantities such as temperature and pressure. From the application scene, the technology is mainly used for detecting biological tissues, thin films or parts.

[0003] In the FD-OCT system, white light is used for interference, and a spectrometer is used to separate the interference light of different wavelengths. For example Figure 1 The white light spectrometer in the related art is shown in the figure. The interference light is emitted from the optical fiber, collimated by the off-axis parabolic mirror, and incident on the diffraction grating at a certain angle. The diffraction grating separates the light of different wavelengths into monochromatic light propagating in different directions, and the single-piece double-cemented lens and the plane mirror are used to image on the image plane. However, in fact, on the one hand, the pixel has a certain size, and a certain line width of light is distributed on each pixel; on the other hand, in the light splitting process, the light spots of each wavelength are not an ideal point, but a light spot with a certain size. The two factors cause the camera pixels to actually receive the superposition of many wavelength light spots within a certain wavelength range, or the quasi-monochromatic light with a certain line width. This situation will cause the detectable distance to be shortened, that is, the range will be reduced, and the spectrum distortion phenomenon will also occur at the low frequency band. SUMMARY

[0004] The application provides a white light spectrometer and a white light spectrometer optical system, which solves the technical problem of poor imaging quality caused by poor precision and low energy efficiency of the spectrometer in the related art.

[0005] To achieve the above-mentioned purpose, the application adopts the following technical scheme:

[0006] In a first aspect, the application provides a white light spectrometer, which comprises an optical input, a collimating assembly, a diffraction assembly, a focusing assembly and a camera.

[0007] The optical input is connected to an incident optical fiber, and the incident optical fiber is used to provide an interference light signal to be analyzed.

[0008] The diffraction assembly comprises a polarizer and a bulk phase holographic grating, the collimating assembly comprises a coaxially arranged cemented collimating lens, and the focusing assembly comprises at least one coaxially arranged cemented focusing lens.

[0009] The polarizer is coaxially arranged with the cemented collimating lens and is located on the first light path, the first light path is a straight light path of the light inlet towards the volume phase holographic grating, and an included angle between the first light path and the volume phase holographic grating is 48.5°-49.5°.

[0010] The cemented focusing lenses are located on the second light path, the second light path is a light path between the volume phase holographic grating and the camera, an included angle between an incident end of the second light path and the volume phase holographic grating is 48°-50°, the camera is arranged at an exit end of the second light path, and light output by the volume phase holographic grating is focused on an image plane of the camera through the cemented focusing lenses.

[0011] Further, the cemented collimating lens is a double cemented achromatic lens, the focusing assembly includes two cemented focusing lenses, and the cemented focusing lenses are double cemented focusing lenses.

[0012] Further, the polarizer is arranged between the light inlet and the double cemented achromatic lens.

[0013] Further, a reflector is further included, the reflector is arranged between the two double cemented focusing lenses, and the reflector is used for turning the second light path to make the reflected second light path towards one end close to the light inlet.

[0014] Further, an optical cavity is further included, the optical cavity is arranged in a quadrilateral shell;

[0015] The quadrilateral shell includes three first sides and one second side, the three first sides correspond to the first light path, the second light path before reflection, and the second light path after reflection respectively, and a size of the second side is not more than that of the first side.

[0016] The light inlet and the camera are both arranged on the second side.

[0017] Further, the optical cavity includes a first sub-cavity, a second sub-cavity and a third sub-cavity.

[0018] The light inlet is arranged at one end of the first sub-cavity, the volume phase holographic grating is arranged at the other end of the first sub-cavity, and the polarizer and the double cemented achromatic lens are coaxially arranged in sequence along a first direction from the light inlet to the volume phase holographic grating.

[0019] The volume phase holographic grating is further arranged at one end of the second sub-cavity, the reflector is arranged at the other end of the second sub-cavity, one of the double cemented focusing lenses is arranged in the second sub-cavity, and an included angle between the reflector and the volume phase holographic grating is 0°±2°.

[0020] The mirror is also arranged at one end of the third sub-cavity, the camera is arranged at the other end of the third sub-cavity, and another double-cement focusing lens is arranged in the third sub-cavity.

[0021] Further, the interference light signal waveband that can be processed by the white light spectrometer is 810nm-850nm, and the diffraction limit is less than 8m;

[0022] The energy efficiency of the volume phase holographic grating is not less than 70%, the wavelength range is 790nm-910nm, the center wavelength is 850nm±10nm, and the diffraction angle corresponding to the center wavelength is 49.1°±0.3°.

[0023] In a second aspect, the present application further provides a white light spectrometer, comprising: a white light source, a circulator, a measuring head, and the white light spectrometer described above.

[0024] The white light source is connected with the input end of the circulator through an optical fiber; the input and output ends of the circulator are connected with the measuring head; the measuring head is used for projecting a part of the white light to a reference surface after light splitting to form reference light by reflection, and projecting another part of the white light to the surface of an object to be measured to form measurement light by reflection, and combining the reference light and the measurement light to form an interference light signal; the output end of the circulator is connected with the white light spectrometer, and the circulator is used for transmitting the white light emitted by the white light source to the measuring head, receiving the interference light signal returned by the measuring head, and sending the received interference light signal to the white light spectrometer.

[0025] Further, the pixel size of the camera is 4μm, the image size is 2048×1200 pixels, the frame rate is 159.4 fps when the entire image is transmitted, the transmission rate is 3424.66 fps when an image with a size of 2048×10 pixels is transmitted, and the spectral response rate to the near-infrared waveband is not less than 40%.

[0026] Further, the measuring head comprises a gradient refractive index lens and a reflecting prism.

[0027] The gradient refractive index lens is fixedly connected with the optical fiber of the input and output ends of the circulator through a sleeve, the reflecting prism is arranged on the output light path of the gradient refractive index lens, and a reflection-increasing film is further arranged on the reflection light path of the reflecting prism.

[0028] Further, the pitch of the gradient refractive index lens is 0.23P, the error range is ±5μm, the diameter is 1.8±0.2 mm, the length of the lens is 4.35±0.2 mm, and the end face has an inclination angle of 8±0.5°; the reflectivity of the reflection-increasing film is 30%±5%.

[0029] The white light spectrometer of the present application adopts a volume phase holographic grating, which has higher diffraction efficiency than a reflective grating; in order to solve the problem that the volume phase holographic grating is not sensitive to polarization, resulting in that the interference signal cannot be received, a polarizer is added in the optical path structure and used in combination with the volume phase holographic grating, which filters out light of one polarization state while improving the diffraction efficiency; and two double-cemented focusing lenses are used in combination to focus the light separated by the grating. The present application solves the technical problem of poor imaging quality caused by poor precision and low energy efficiency of the spectrometer in the related art. BRIEF DESCRIPTION OF DRAWINGS

[0030] The drawings described herein are used to provide further understanding of the present application, constitute a part of the present application, the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0031] Figure 1 is a schematic diagram of the optical path structure of the white light spectrometer in the related art;

[0032] Figure 2 is a schematic diagram of the structure of the white light spectrometer of the embodiment of the present application;

[0033] Figure 3 is a schematic diagram of the optical path structure of the white light spectrometer of the embodiment of the present application;

[0034] Figure 4 is a design and performance diagram of a volume phase holographic grating; wherein, Fig. (a) is a schematic diagram of the structure of the volume phase holographic grating, and Fig. (b) is a schematic diagram of the energy efficiency of the volume phase holographic grating;

[0035] Figure 5 is the interference light signal received by the white light spectrometer of the embodiment of the present application when no polarizer is added;

[0036] Figure 6 is the interference light signal received by the white light spectrometer of the embodiment of the present application after the polarizer is added;

[0037] Figure 7 is an RMS graph of the white light spectrometer in the related art in the wavelength range of 810 nm-855 nm;

[0038] Figure 8 is an RMS graph of the white light spectrometer of the embodiment of the present application in the wavelength range of 810 nm-855 nm;

[0039] Figure 9 is a point column graph of the white light spectrometer of the embodiment of the present application;

[0040] Figure 10 is a structural schematic diagram of a white light spectroscopic interferometric optical system according to an embodiment of the present application.

[0041] Wherein, the above drawings include the following reference signs:

[0042] 1 - light inlet; 2 - polarizer; 3 - cemented collimating lens; 4 - volume phase holographic grating; 5 - cemented focusing lens; 6 - camera; 7 - mirror; 8 - housing; 9 - first sub-cavity; 10 - second sub-cavity; 11 - third sub-cavity. DETAILED DESCRIPTION

[0043] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0044] It should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should also be understood that when the terms "comprise" and / or "include" are used in the specification, there is a reference to the presence of a feature, step, operation, device, component, and / or combinations thereof.

[0045] Unless specifically stated otherwise, the relative arrangements of the components and steps illustrated in these embodiments and the numerical expressions and values set forth herein are not limiting of the scope of the present application. It should be understood that the various parts of the drawings are not necessarily drawn to scale, and that, for the purpose of convenience and clarity, not all components can be shown in the drawings with precise relationship. Techniques, methods, and devices known to those of ordinary skill can not be discussed in detail because such can be found in other places not discussed herein. In all examples shown and discussed herein, any specific values should be interpreted as merely illustrative and not as a limitation on the scope of the exemplary embodiments. Thus, other example embodiments of the exemplary embodiments can have different values. It should be noted that like reference numerals and letters refer to like items in the following drawings, and thus, once an item is defined in one drawing, it need not be discussed further in subsequent drawings.

[0046] Referring to Figure 2 and Figure 3 , the present application provides a white light spectroscopic interferometer, comprising: a light inlet 1, a collimating assembly, a diffraction assembly, a focusing assembly and a camera 6;

[0047] The light inlet 1 is connected with an incident optical fiber, and the incident optical fiber is used to provide an interference optical signal to be analyzed;

[0048] The diffraction assembly comprises a polarizer 2 and a volume phase holographic grating 4, the collimation assembly comprises coaxially arranged cemented collimation lenses 3, and the focusing assembly comprises at least one coaxially arranged cemented focusing lens 5;

[0049] The polarizer 2 and the cemented collimation lenses 3 are coaxially arranged and are located on a first light path, the first light path is a straight light path from the light inlet 1 to the volume phase holographic grating 4, and the included angle between the first light path and the volume phase holographic grating 4 is 48.5°-49.5°.

[0050] The cemented focusing lenses 5 are located on a second light path, the second light path is a light path between the volume phase holographic grating 4 and the camera 6, the included angle between the incident end of the second light path and the volume phase holographic grating 4 is 48°-50°, the camera 6 is arranged at the exit end of the second light path, and the light rays output by the volume phase holographic grating 4 are focused on the image plane of the camera 6 through the cemented focusing lenses 5.

[0051] In the embodiment of the present application, the cemented collimation lenses 3 adopt double cemented achromatic lenses for collimation, and due to the coaxial structure, compared with the off-axis parabolic mirror in the related art, the present application is easier to assemble and adjust.

[0052] The energy efficiency of the volume phase holographic grating 4 is not less than 70%, the wavelength range is 790nm-910nm, the central wavelength is 850nm±10nm, and the diffraction angle corresponding to the central wavelength is 49.1°±0.3°.

[0053] The polarizer 2 is arranged between the light inlet 1 and the double cemented achromatic lenses.

[0054] For the reflective grating in the related art, the energy efficiency is too low, only 20%-40%, so when measuring a non-cooperative target with weak surface return light, the measurement peak may be submerged in noise. Therefore, the reflective grating is replaced by a volume phase holographic grating 4 (VPH Grating) in the present application, as shown in Figure 4 The design central wavelength of the volume phase holographic grating 4 is 840nm, the wavelength range is 790nm-890nm, and the diffraction angle corresponding to the central wavelength is 49.1°. Through periodic modulation of the refractive index of the internal material, the diffraction efficiency of the grating can be improved, thereby improving the energy efficiency of the spectrometer system, reducing energy dissipation, and the energy efficiency of the volume phase holographic grating 4 is more than 70% in the range of 810nm-850nm.

[0055] However, the diffraction efficiency of the volume phase holographic grating 4 for s and p polarized light is related to its structural parameters, and when the incident angle satisfies the Bragg condition, the parameters are designed to be approximately the same for the diffraction efficiency of the two polarized lights, that is, not to have polarization selectivity, while the reflective grating is only sensitive to one of the polarized lights. Therefore, after using the volume phase holographic grating 4, the light received on the image plane is the superposition of the two polarized lights, which interfere with each other, and the contrast of the interference light is reduced, and even the interference signal cannot be completely received. As shown in Figure 5 , although there is still interference light, the gray level fluctuation signal generated by interference cannot be completely received.

[0056] In order to solve the problem that the volume phase holographic grating 4 is not sensitive to polarization and cannot receive the interference signal, the present application adds a polarizer 2 in the optical path structure, which is used in combination with the volume phase holographic grating 4, to filter out one of the polarized lights while improving the diffraction efficiency. As shown in Figure 6 , after adding the polarizer 2, the received interference light has good contrast.

[0057] In the embodiment of the present application, the focusing assembly includes two cemented focusing lenses 5, which use double cemented focusing lenses.

[0058] The present application uses two double cemented focusing lenses to focus the light separated by the grating, and compared with the optical spectrum interferometer in the related art, the aberration of the light with a spectral range of 810 nm-850 nm is smaller. Compared with Figure 7 and Figure 8 It can be seen that the diffraction limit of the optical path structure of the present application is less than 8 μm, which is lower than the diffraction limit of 12 μm in the related art, and within the wavelength range of 810 nm-850 nm, the RMS is close to the diffraction limit, so the imaging quality is improved compared with the related art.

[0059] In addition, in order to verify that the spectrometer of the present application can still achieve a wavelength resolution of 0.02 nm near the center wavelength, the embodiment of the present application uses zemax software to analyze the spot diagram near 825 nm, 830 nm and 835 nm, and the analysis results are as shown in Figure 9 . It can be seen that the spectrometer of the present application can still distinguish light with a wavelength difference of 0.02 nm near the center wavelength of 830 nm, so its wavelength resolution can meet the requirements.

[0060] As an optional embodiment, a mirror 7 is arranged between the two double cemented focusing lenses, which is used to turn the second light path, so that the reflected second light path is directed towards one end close to the light inlet.

[0061] By setting the mirror 7, the volume of the spectrometer can be reduced, so that the spectrometer structure of the present application is more compact and exquisite, and is convenient to use and carry.

[0062] Referring to Figure 2 , the white light spectrometer of the present application further comprises an optical cavity, which is arranged in the quadrilateral shell 8. The shell 8 comprises three first sides and one second side, the three first sides correspond to the first light path, the second light path before reflection, and the second light path after reflection respectively, and the size of the second side is not more than that of the first side. The light inlet 1 and the camera 6 are arranged at both ends of the second side.

[0063] The optical cavity comprises a first sub-cavity 9, a second sub-cavity 10 and a third sub-cavity 11.

[0064] The light inlet 1 is arranged at one end of the first sub-cavity 9, and the volume phase holographic grating 4 is arranged at the other end of the first sub-cavity 9; along a first direction from the light inlet 1 to the volume phase holographic grating 4, the polarizer 2 and the double-cement achromatic lens are coaxially arranged in sequence.

[0065] The volume phase holographic grating 4 is also arranged at one end of the second sub-cavity 10, the mirror 7 is arranged at the other end of the second sub-cavity 10, one double-cement focusing lens is arranged in the second sub-cavity 10, and the included angle between the mirror 7 and the volume phase holographic grating 4 is 0°±2°.

[0066] The mirror 7 is also arranged at one end of the third sub-cavity 11, the camera 6 is arranged at the other end of the third sub-cavity 11, and the other double-cement focusing lens is arranged in the third sub-cavity 11.

[0067] On the other hand, as Figure 10 shown, the present application also provides a white light spectrometer, which comprises a white light source, a circulator, a measuring head, and the white light spectrometer of the above-mentioned embodiment.

[0068] The white light source is connected with the input end of the circulator through an optical fiber; the input and output ends of the circulator are connected with the measuring head; the measuring head is used for projecting a part of the white light to a reference surface after light splitting to form reference light by reflection, and projecting another part of the white light to the surface of an object to be measured to form measurement light by reflection, and combining the reference light and the measurement light to form an interference light signal; the output end of the circulator is connected with the white light spectrometer, and the circulator is used for transmitting the white light emitted by the white light source to the measuring head, receiving the interference light signal returned by the measuring head, and sending the received interference light signal to the white light spectrometer.

[0069] The system comprises the above-mentioned white light spectrometer, and therefore, the white light spectrometer comprises all the technical effects of the above-mentioned embodiments.

[0070] In the embodiment of the present application, the pixel size of the camera 6 used is 4 microns, the image plane size is 2048*1200 pixels, the frame rate when transmitting the entire image plane is 159.4 fps, the transmission rate when transmitting an image plane of 2048*10 pixels is 3424.66 fps, and the spectral response rate to near-infrared light is not less than 40%.

[0071] The measuring head comprises a gradient refractive index lens and a reflecting prism; the gradient refractive index lens is fixedly connected with the optical fiber of the input / output end of the ring laser gyroscope through a sleeve, the reflecting prism serves as a reference surface and is arranged on the output light path of the gradient refractive index lens, and a reflection-increasing film is further arranged on the reflecting light path of the reflecting prism.

[0072] In the embodiment of the present application, the pitch of the gradient refractive index lens in the measuring head is 0.23P, the error range is ±5 microns, the diameter is 1.8±0.2 mm, the length of the lens is 4.35±0.2 mm, and the end face has an inclination angle of 8±0.5°, so that the reflected light of the end face can be avoided to mix into the light emission signal and interfere with the signal. The reflecting prism surface is coated with a reflection-increasing film of 30%±5%, and the transmission-reflection ratio is 7:3, which is beneficial to the measurement of a target with a relatively low surface reflectivity.

[0073] The measuring head of the present application has a small size and is suitable for measurement in some narrow spaces.

[0074] For the convenience of description, spatial relative terms such as "above", "upper", "top", "up", etc. can be used herein to describe the spatial positional relationship of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the devices described in the drawings. For example, if the devices in the drawings are inverted, the device described as "above" or "on" other devices or structures will be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The devices can also be positioned in other different ways (rotated by 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0075] In addition, it should be noted that the use of "first", "second", and the like words to qualify parts is merely for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the present application.

[0076] The above only is the preferred embodiment of the present application, and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A white light spectroscopic interferometric optical system, characterized by The application relates to a white light source, a circulator, a measuring head and a white light spectrometer. The white light source is connected with the input end of the circulator through an optical fiber; the input and output ends of the circulator are connected with the measuring head; the measuring head is used for projecting a part of white light to a reference surface after light splitting to form reference light, and projecting another part of white light to the surface of an object to be measured to form measuring light, and combining the reference light and the measuring light to form an interference light signal; the output end of the circulator is connected with the white light spectrometer; the circulator is used for transmitting the white light emitted by the white light source to the measuring head, receiving the interference light signal returned by the measuring head, and sending the received interference light signal to the white light spectrometer. The measuring head comprises a gradient refractive index lens and a reflecting prism. The gradient refractive index lens is fixedly connected with the optical fiber of the input and output ends of the circulator through a sleeve; the reflecting prism is arranged on the output light path of the gradient refractive index lens; and a reflection-increasing film is further arranged on the reflecting light path of the reflecting prism. The pitch of the gradient refractive index lens is 0.23P, the error range is + / -5um, the diameter is 1.8+ / -0.2mm, the length of the lens is 4.35+ / -0.2mm, the end face has an inclination angle of 8+ / -0.5 degrees; and the reflectivity of the reflection-increasing film is 30%+ / -5%. The white light spectrometer comprises an entrance, a collimating assembly, a diffraction assembly, a focusing assembly, a camera, a reflecting mirror and an optical cavity. The entrance is connected with an incident optical fiber which is used for providing the interference light signal to be analyzed; The diffraction assembly comprises a polarizer and a volume phase holographic grating; the collimating assembly comprises coaxially arranged cemented collimating lenses; and the focusing assembly comprises coaxially arranged cemented focusing lenses. The polarizer and the cemented collimating lenses are coaxially arranged on a first light path, the first light path is a straight light path from the entrance to the volume phase holographic grating, and the included angle between the first light path and the volume phase holographic grating is 48.5-49.5 degrees; The cemented focusing lenses are arranged on a second light path between the volume phase holographic grating and the camera, the included angle between the incident end of the second light path and the volume phase holographic grating is 48-50 degrees, the camera is arranged at the exit end of the second light path, and the light output by the volume phase holographic grating is focused on the image plane of the camera through the cemented focusing lenses; The cemented collimating lenses are double cemented achromatic lenses, the focusing assembly comprises two cemented focusing lenses, and the cemented focusing lenses are double cemented focusing lenses; The polarizer is arranged between the entrance and the double cemented achromatic lenses; The reflecting mirror is arranged between the two double cemented focusing lenses and is used for turning the second light path to make the second light path after reflection face the end close to the entrance; The optical cavity is arranged in a quadrilateral shell. ​ The quadrilateral shell comprises three first edges and one second edge, the three first edges correspond to the first light path, the second light path before reflection and the second light path after reflection respectively, and the size of the second edge is not more than that of the first edge; The light inlet and the camera are both arranged on the second edge.

2. The white light spectro-interferometric optical system according to claim 1, characterized in that, The optical cavity comprises a first sub-cavity, a second sub-cavity and a third sub-cavity; The light inlet is arranged at one end of the first sub-cavity, the volume phase holographic grating is arranged at the other end of the first sub-cavity, and the polarizer and the double cemented achromatic lens are coaxially arranged in sequence along a first direction from the light inlet to the volume phase holographic grating; The volume phase holographic grating is also arranged at one end of the second sub-cavity, the mirror is arranged at the other end of the second sub-cavity, one double cemented focusing lens is arranged in the second sub-cavity, and the included angle between the mirror and the volume phase holographic grating is 0°±2°. The mirror is also arranged at one end of the third sub-cavity, the camera is arranged at the other end of the third sub-cavity, and the other double cemented focusing lens is arranged in the third sub-cavity.

3. The white light spectro-interferometric optical system according to claim 1, characterized in that, The white light spectrometer can process an interference light signal band of 810nm-850nm, and the diffraction limit is less than 8μm. The energy efficiency of the volume phase holographic grating is not less than 70%, the wavelength range is 790nm-910nm, the center wavelength is 850nm±10nm, and the diffraction angle corresponding to the center wavelength is 49.1°±0.3°.

4. The white light spectroscopic interferometry optical system of claim 1, wherein, The pixel size of the camera is 4μm, the image size is 2048×1200 pixels, the frame rate when transmitting the entire image is 159.4 fps, the transmission rate when transmitting an image of 2048×10 pixels is 3424.66 fps, and the spectral response rate to the near-infrared band is not less than 40%.

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