Magnetic attraction receding type full-platform automatic uncovering device for multi-cavity complete machine

Abstract

The invention discloses a magnetic attraction avoidance type full-platform automatic uncovering device for a multi-cavity complete machine, the magnetic attraction avoidance type full-platform automatic uncovering device is applied to wafer manufacturing equipment comprising a plurality of working cavities, the uncovering device comprises a lifting driving mechanism, a supporting platform, a rotary driving mechanism, a magnetic attraction controller, a first receiving piece and a second receiving piece, and an annular guide piece is arranged on the supporting platform; the first receiving piece and the second receiving piece are arranged on the annular guide piece in a sliding manner; the magnetic attraction controller is driven by the rotary driving mechanism to rotate, and the magnetic attraction controller attracts the first receiving piece and the second receiving piece to move along the annular guide piece in a spaced mode, so that the receiving pieces can be flexibly aligned with different working cavities; the magnetic attraction controller is in clearance fit with the receiving piece, so that interference parts in the lifting driving mechanism can be avoided; the supporting platform is driven by the lifting driving mechanism, the cavity cover is driven to move in the vertical direction, and cover opening can be achieved without manually lifting the cavity cover.

Description

Technical Field

[0001] This application relates to the field of wafer manufacturing equipment technology, and in particular to a magnetically assisted, positioning-avoiding, fully automatic cover opening device for multi-cavity wafer fabrication equipment. Background Technology

[0002] In the field of wafer manufacturing equipment, a complete machine typically consists of a polygonal transfer platform and multiple working cavities surrounding and connected to this platform. Each working cavity needs to be opened periodically for internal cleaning or component maintenance. Currently, opening the working cavity covers mostly relies on manual operation. Because the cavity covers often contain necessary structures required for the process, and the overall weight of the cavity covers is considerable, opening them requires the cooperation of multiple people, which not only wastes manpower and is inefficient, but also poses safety hazards such as personnel collisions and cavity covers falling off.

[0003] To address the shortcomings of manual operation, existing technologies are increasingly employing fixed hoisting equipment or traditional robotic arms to assist in opening covers. However, several problems remain. On one hand, fixed hoisting equipment is limited by tracks, resulting in significant spatial interference. This is especially problematic when switching between multiple working chambers with narrow spacing, where the hoisting equipment is prone to collisions with surrounding chambers. On the other hand, traditional robotic arms are bulky and cannot flexibly adjust their gripping position within the confined space between the transfer platform and the working chamber. This leads to inaccurate alignment of the retrieved parts with the cover, affecting the reliability and safety of opening the cover. All of these issues urgently need to be addressed. Summary of the Invention

[0004] The purpose of this application is to overcome the shortcomings of the existing technology and provide a magnetic suction-avoidance type automatic lid opening device for multi-cavity machines.

[0005] This application provides a multi-cavity, magnetically-assisted, fully automated cover-opening device for a wafer manufacturing equipment. The wafer manufacturing equipment includes a polygonal transfer platform and multiple working cavities arranged around and connected to the transfer platform. The cover-opening device includes: a lifting drive mechanism disposed on the transfer platform; a support platform, the lifting drive mechanism driving the support platform to move vertically towards or away from the transfer platform; a rotation drive mechanism and a magnetically-assisted controller disposed on the support platform, the rotation drive mechanism driving the magnetically-assisted controller to rotate so that the magnetically-assisted controller points to different working cavities; a first receiving component and a second receiving component; and a ring-shaped component on the support platform. The guide, an annular guide, extends along a path that matches the distribution of multiple working chambers. The first and second receiving components are slidably mounted on the annular guide. The magnetic controller can attract the first and second receiving components remotely, thereby driving them to move along the annular guide toward the working chamber that needs to be opened. During operation, the magnetic controller forms a gap fit with the first and second receiving components through magnetic attraction to avoid interference components in the lifting drive mechanism, thus achieving rotational displacement of the first and second receiving components. After the first and second receiving components work together to extract the target working chamber, the lifting drive mechanism drives the support platform to rise, thereby opening the working chamber.

[0006] Furthermore, the lifting drive mechanism includes: at least two sets of vertical guide rods, spaced apart along the circumferential direction on the transfer platform, and a support platform slidably mounted on the vertical guide rods; a top plate, located at the top of the vertical guide rods; a lifting drive component, located on the top plate; and a hoisting rope, one end of which is connected to the output end of the lifting drive component, and the other end of which is connected to the support platform; the lifting drive component can drive the support platform to move along the vertical guide rods by winding or releasing the hoisting rope.

[0007] Furthermore, a handle is provided on each side of the working chamber cover, and a first and a second receiving component are used to hook the handle; the first and / or second receiving components include: an arm, slidably mounted on an annular guide; a swing arm, rotatably mounted on the arm; an elastic element, located between the arm and the swing arm; a limiting plate, fixedly mounted on one side of the arm and angled to the arm, with the swing arm located between the arm and the limiting plate, the limiting plate being used to limit the maximum extension of the swing arm; during the opening process, the first and second receiving components are moved by a magnetic controller so that they are aligned with the handle; during descent, the first and second receiving components can be inserted into the handle, the swing arm is pushed by the handle, and the elastic element is compressed; after the swing arm passes through the handle, the elastic element recovers, and the swing arm extends outward; during ascent, the swing arm can support the handle.

[0008] Furthermore, the multi-cavity magnetic suction avoidance type full-platform automatic lid opening device also includes a release wedge, which is set on the transfer platform or working cavity and located directly below the handle. After the cavity cover is reinstalled, the first and second receiving parts are driven down by the lifting drive mechanism. The swing arm contacts the release wedge, forcing the swing arm to overcome the elastic force of the elastic element and rotate inward to the retracted state so that the first and second receiving parts can be disengaged from the handle.

[0009] Furthermore, the magnetic controller includes a magnetic attracting element, which is an electromagnet. Both the first and second receiving elements are provided with magnetic target areas made of magnetically conductive material. The magnetic lines of force emitted by the electromagnet can pass through the magnetic target areas to form a closed magnetic circuit. The area of ​​the magnetic target area is not less than the area of ​​the electromagnet's magnetic poles. And / or, the magnetic controller includes a magnetic attracting element and a telescopic drive element. The telescopic drive element is used to drive the magnetic attracting element to move radially to approach or move away from the first and second receiving elements. And / or, the magnetic controller includes a detection element, which is used to confirm whether the first and second receiving elements have been successfully attracted.

[0010] Furthermore, the magnetic controller includes: a connecting plate connected to the rotary drive mechanism; two magnetic components spaced apart on the connecting plate, one of which is used to attract the first receiving component, and the other is used to attract the second receiving component; through the two magnetic components, the magnetic controller can simultaneously control the first receiving component and the second receiving component to achieve rapid repositioning.

[0011] Furthermore, the magnetic controller also includes: a central gear, rotatably mounted on a connecting plate; a first rack, located on one side of the central gear and meshing with it, with one magnetic element mounted on the first rack; and a second rack, located on the other side of the central gear and also meshing with it, with another magnetic element mounted on the second rack; the first and second racks are centrally symmetrically arranged; causing the central gear to rotate, the first and second racks to move towards each other, allowing the two magnetic elements to approach each other; causing the central gear to rotate in the opposite direction, the first and second racks to move away from each other, allowing the two magnetic elements to move away from each other.

[0012] Furthermore, the magnetic controller includes a magnetic suction component and a telescopic drive component. The magnetic suction component is used to attract the first and second receiving components in the air. The output end of the telescopic drive component is provided with a baffle. When the cavity cover of the working cavity is lifted, the telescopic drive component can drive the baffle to move above the cavity cover, thereby preventing the cavity cover from tilting to the side.

[0013] Furthermore, the lower surface of the support platform is provided with a recessed annular guide, which is used for the sliding of the first and second receiving components to achieve rotational displacement. The support platform is made of stainless steel. The cross-section of the annular guide is T-shaped, and the annular guide is a T-shaped groove. The ends of the first and second receiving components that are connected to the annular guide are also T-shaped. The T-shaped groove is used to engage with the T-shaped connecting parts of the first and second receiving components. There are ball bearings between the T-shaped groove and the T-shaped connecting parts. The ball bearings can reduce sliding friction, avoid friction loss affecting the guiding accuracy, and also prevent the first and second receiving components from radially moving, so as to ensure their coaxiality during rotational displacement.

[0014] Furthermore, the support platform is equipped with a hook on its bottom surface facing the transfer platform. The hook can hook the cover plate of the transfer platform. When it is necessary to clean the inside of the transfer platform or repair the parts, the hook can be engaged with the lifting ring on the cover plate of the transfer platform, and the transfer platform can be opened by the lifting drive mechanism.

[0015] This application provides a magnetic suction-type automatic capping device for multi-cavity wafer manufacturing equipment, applicable to wafer manufacturing equipment with multiple working cavities. The capping device includes a lifting drive mechanism, a support platform, a rotary drive mechanism, a magnetic suction controller, a first pick-up component, and a second pick-up component. The support platform is provided with an annular guide component, and the first and second pick-up components are slidably mounted on the annular guide component. The rotary drive mechanism drives the magnetic suction controller to rotate, and the magnetic suction controller attracts the first and second pick-up components along the annular guide component that matches the distribution trajectory of the working cavities. This allows the pick-up components to flexibly align with different working cavities, solving the problems of traditional robotic arms having difficulty adjusting in confined spaces and being unable to fully cover the working cavities. Furthermore, the magnetic suction controller and the pick-up components form a clearance fit, avoiding interference components in the lifting drive mechanism, thus preventing component interference and helping to ensure the stability and accuracy of capping, while improving capping efficiency and safety. The lifting drive mechanism drives the support platform to move the cavity caps vertically, achieving capping without manual lifting of the cavity caps, effectively reducing manpower consumption and avoiding the risk of personnel bumping into or the cavity caps falling. Attached Figure Description

[0016] Figure 1 A schematic diagram of a magnetic suction and positioning avoidance type full-platform automatic lid opening device for multi-cavity whole machine provided in this application; Figure 2 for Figure 1 The diagram shows a structural schematic of the multi-cavity magnetic suction and positioning avoidance type full-platform automatic lid opening device from another angle. Figure 3 for Figure 1 The diagram shows a structural schematic of the multi-cavity magnetic suction and positioning avoidance type full-platform automatic lid opening device from another angle. Figure 4 This application provides a structural schematic diagram of an extraction component and a handle; Figure 5 for Figure 4 The diagram shows the structure of the extraction component and handle in another state; Figure 6 A schematic diagram of another multi-cavity magnetic suction and positioning avoidance type full-platform automatic lid opening device provided in this application; Figure 7 for Figure 6 The diagram shows a structural schematic of the multi-cavity magnetic suction and positioning avoidance type full-platform automatic lid opening device from another angle. Figure 8 This is a schematic diagram of the structure of a magnetic controller provided in this application. Detailed Implementation

[0017] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0018] A wafer manufacturing apparatus includes a polygonal transfer platform 1 and a plurality of working cavities 2 arranged around the transfer platform 1 and respectively connected to the transfer platform 1.

[0019] Specifically, wafer manufacturing equipment refers to multi-chamber integrated processing equipment in the wafer manufacturing field. This type of equipment is commonly used in core process steps such as magnetron sputtering coating, plasma etching, and thin film deposition. Its characteristic is that by integrating multiple independent process units, it can realize continuous or step-by-step processing of multiple wafer processes to meet the requirements of high-precision and high-cleanliness wafer manufacturing.

[0020] Transfer platform 1, as the core hub for wafer fabrication equipment, is primarily used for temporary wafer storage, wafer transfer, and scheduling of collaborative process operations. Internally, transfer platform 1 integrates a small, precision vacuum suction robot arm, which can temporarily store wafers fed into external loading cavities or removed from working cavities 2, preventing delays in a single working cavity 2 from impacting the overall process flow. Simultaneously, the robot arm can automatically plan transfer paths based on the process progress of each working cavity 2, precisely delivering wafers to or retrieving them from a working cavity 2 for transfer to the next process. Transfer platform 1 keeps wafers in a closed vacuum or inert gas environment, ensuring that the wafers are not contaminated during transfer.

[0021] Work chamber 2 is an independent unit for performing specific wafer processing techniques. Each work chamber 2 corresponds to a single or a type of process function. For example, the magnetron sputtering work chamber contains a target, a magnetron system, and a vacuum system, which can deposit target atoms onto the wafer surface in a vacuum environment to form a metal thin film; the plasma etching work chamber can generate plasma by exciting process gases to perform patterned etching on the wafer thin film; the annealing work chamber can eliminate internal stress on the wafer with the help of a heating device under the protection of an inert gas. Each work chamber 2 is equipped with an independent vacuum, temperature, and gas control and monitoring system to ensure process stability and avoid cross-contamination between different processes.

[0022] After the equipment is started, the transfer platform 1 and all working chambers 2 are first evacuated to the required vacuum level and an inert atmosphere is maintained. Then, the external robotic arm sends the wafer to be processed into the loading chamber. After the internal robotic arm of the transfer platform 1 picks up the wafer from the loading chamber, it sends the wafer into the target working chamber 2 through the vacuum channel connected to the working chamber 2 according to the preset process flow. After the current working chamber 2 completes the process, the internal robotic arm takes out the wafer and transfers it to the next working chamber 2. After all processes are completed, the wafer is transferred to the unloading chamber and taken out by the external robotic arm, completing the processing.

[0023] The working chamber 2 needs to be opened periodically to meet the needs of equipment maintenance, process adjustment and troubleshooting.

[0024] Currently, the opening of working chambers mostly relies on manual intervention. Especially when dealing with multi-cavity complete equipment, workers need to assist cranes in lifting the target cavity cover, which is time-consuming, labor-intensive, and poses safety hazards.

[0025] Therefore, this application provides a multi-cavity, fully automatic, magnetically-assisted, and space-avoiding lid-opening device for a complete machine, comprising: a lifting drive mechanism disposed on a transfer platform 1; a support platform 11, wherein the lifting drive mechanism drives the support platform 11 to move vertically to approach or move away from the transfer platform 1; a rotation drive mechanism 12 and a magnetically-assisted controller 13 disposed on the support platform 11, wherein the rotation drive mechanism 12 drives the magnetically-assisted controller 13 to rotate so that the magnetically-assisted controller 13 points to different working cavities 2; a first receiving member 14 and a second receiving member 15; and an annular guide member 11a provided on the support platform 11, wherein the extension trajectory of the annular guide member 11a is adapted to the distribution trajectory of the multiple working cavities 2. The first receiving component 14 and the second receiving component 15 are slidably disposed on the annular guide 11a. The magnetic controller 13 can attract the first receiving component 14 and the second receiving component 15 in the air, thereby driving them to move along the annular guide 11a toward the working cavity 2 that needs to be opened. During operation, the magnetic controller 13 forms a gap fit with the first receiving component 14 and the second receiving component 15 through magnetic attraction, so as to avoid interference components in the lifting drive mechanism and realize the rotational displacement of the first receiving component 14 and the second receiving component 15. After the first receiving component 14 and the second receiving component 15 cooperate to extract the target working cavity 2, the lifting drive mechanism drives the support platform 11 to rise, thereby realizing the opening of the working cavity 2.

[0026] The lifting drive mechanism can be any drive that can drive the support platform 11 to move vertically up and down, such as an electric cylinder or a linear module.

[0027] The rotary drive mechanism 12 can be any type of rotary cylinder, motor, or other device that can drive the magnetic controller 13 to rotate around the center of a ring formed by the distribution of multiple working chambers 2, so that the magnetic controller 13 can point to different working chambers 2.

[0028] For details, please refer to Figures 1 to 3 In the illustrated embodiment, the support platform 11 is arranged in the shape of a circular plate, located above the transfer platform 1 and in a ring formed by multiple working chambers 2. The support platform 11 is connected to a lifting drive mechanism, and can rise or move away from the transfer platform 1 and the working chambers 2 under the drive of the lifting drive mechanism, or fall or move closer to the transfer platform 1 and the working chambers 2.

[0029] Continue to refer to Figure 2 The rotary drive mechanism 12 is located at the center of the upper surface of the support platform 11, and its output axis is downward, passing through the support platform 11 and connected to the magnetic controller 13.

[0030] The magnetic controller 13 includes a magnetic component, which can be any component with magnetic attraction, such as a permanent magnet or an electromagnet.

[0031] The annular guide 11a can be any component that can provide a guiding function, such as a guide rod, guide rail, or slide.

[0032] The first receiving component 14 and the second receiving component 15 can be any component that facilitates the extraction of the cavity cover, such as a gripper, a suction cup, or a hook capable of hooking the handle. The first receiving component 14 and the second receiving component 15 are made of materials that are easy for the magnetic controller 13 to attract, or the receiving components are provided with parts that are easy for the magnetic controller 13 to attract (such as iron blocks, magnets with opposite polarities, etc.), so that the magnetic controller 13 can attract the receiving components in the air and transmit motion force in a non-contact manner.

[0033] For details, please refer to Figures 1 to 3 In the illustrated embodiment, the lower surface of the support platform 11 is provided with a recessed annular groove, which serves as an annular guide 11a. The first receiving member 14 and the second receiving member 15 are slidably disposed in the annular guide 11a. The extension trajectory of the annular groove is adapted to the distribution trajectory of the multiple working cavities 2 arranged around the transfer platform 1, ensuring that the movement trajectories of the first receiving member 14 and the second receiving member 15 can cover all the working cavities 2.

[0034] Continue to refer to Figures 1 to 3 The rotation center of the magnetic controller 13 is the center of the annular guide 11a. After the magnetic controller 13 attracts the receiving part, the rotation drive mechanism 12 drives the magnetic controller 13 to rotate around the rotation center, and the magnetic controller 13 can drive the receiving part to move along the annular guide 11a.

[0035] The opening device provided in this application also includes a control system, which is electrically connected to the lifting drive mechanism, the rotating drive mechanism 12 and the magnetic controller 13 via a circuit, and can receive the opening signal of each working chamber 2.

[0036] During operation, when a working chamber 2 sends an open signal, the control system first calculates the rotation angle of the rotary drive mechanism 12 based on the coordinates of that working chamber 2 (after the equipment is installed and debugged, the coordinates of each working chamber 2 are clear and fixed, and the chamber cover configuration of each working chamber 2 is also clear and fixed). Then, the rotary drive mechanism 12 drives the magnetic suction controller 13 to rotate the receiving component to directly above the target working chamber 2 (when the magnetic suction controller 13 includes only one magnetic suction component, the receiving component can be transferred one by one; when the magnetic suction controller 13 includes two magnetic suction components, the two receiving components can be rotated and repositioned synchronously at the same time). Subsequently, the control system controls the lifting drive mechanism to drive the support platform 11 to descend so that the receiving component can be aligned and cooperate to extract the chamber cover. Then, the lifting drive mechanism drives the support platform 11 to rise to complete the opening of the cover. Throughout the entire opening process, a gap (non-rigid contact) is maintained between the magnetic suction component and the receiving component, forming a gap fit.

[0037] It should be explained that, to ensure the accuracy and stability of the lifting movement, the lifting drive mechanism must include a vertical guide rod 21, and the support platform 11 is slidably mounted on the vertical guide rod 21. Without the constraint of the vertical guide rod 21, the support platform 11 is prone to tilting and swaying during the lifting process due to the shift in the center of gravity. This could cause the cavity cover to collide with the working cavity 2 or the transfer platform 1, or even cause the cavity cover to fall off. At the same time, the vertical guide rod 21 ensures that the support platform 11 always moves along the preset vertical path, ensuring that the receiving and picking parts can be accurately aligned with the cavity cover each time it is lifted, avoiding docking failure due to lifting offset.

[0038] Therefore, the vertical guide rod 21 is a key component of the lifting drive mechanism, and its existence is inevitable and cannot be omitted.

[0039] To accommodate the installation of the annular guide 11a, the support platform 11 must have an annular or circular structure, or even a panel with a larger coverage area. To prevent the support platform 11 from tilting during the lifting of the cavity cover, the lifting drive mechanism needs to include two or more vertical guide rods 21. Through multi-point support, the overall balance of the support platform 11 can be guaranteed.

[0040] To avoid the additional horizontal space occupied by the cover opening device added to the wafer manufacturing equipment and affecting the conventional factory layout, the vertical guide rod 21 is preferably set on the transfer platform 1.

[0041] At this time, the vertical guide rod 21 is the interference component in the lifting drive mechanism. It is exactly on the path of the first receiving member 14 and the second receiving member 15 rotating and shifting along the annular guide member 11a. If the receiving member and the rotation drive mechanism 12 remain connected, they cannot avoid the vertical guide rod 21 when they rotate, and interference will inevitably occur.

[0042] This application uses a magnetic controller 13 to form a gap fit with the receiving component (attraction without rigid connection), ensuring that the gap is not less than the radial dimension of the vertical guide rod 21, thus ensuring that the movement of the receiving component is no longer interfered with by the vertical guide rod 21.

[0043] In summary, the multi-cavity magnetic suction avoidance type full-platform automatic lid opening device provided in this application drives the support platform 11 through the lifting drive mechanism, causing the cavity lid to move vertically. It can open the lid without manual lifting, which can effectively reduce manpower consumption and avoid the risk of personnel bumping or the cavity lid falling. The magnetic suction controller 13 is driven to rotate by the rotation drive mechanism 12. Combined with the magnetic suction controller 13 attracting the first receiving part 14 and the second receiving part 15 in the air to move along the annular guide 11a that is adapted to the distribution trajectory of the working cavity 2, the receiving part can be flexibly aligned with different working cavities 2, which solves the problem of traditional robotic arms having difficulty adjusting in a narrow space and not being able to fully cover the working cavity. Moreover, the magnetic suction controller 13 and the receiving part form a gap fit, which can avoid interference parts in the lifting drive mechanism, avoid the occurrence of component interference, help ensure the stability and accuracy of lid opening, and improve lid opening efficiency and safety.

[0044] Optionally, the magnetic controller 13 includes a magnetic element, which is made of rare earth permanent magnets such as neodymium iron boron or high-performance electromagnets.

[0045] Neodymium iron boron rare earth permanent magnets have extremely high magnetic energy product and coercivity, which can provide a stable and strong air-to-air attraction force, ensuring that the first contact 14 and the second contact 15 are not easily dislodged during the movement along the annular guide 11a. They are suitable for long-term, high-frequency opening operations and can maintain magnetic force without continuous power supply, which can reduce energy consumption while simplifying circuit design.

[0046] Compared to permanent magnets, high-performance electromagnets offer the advantage of switchable and adjustable magnetic force. Specifically, by controlling the on / off state of the electromagnet through a control system, the magnetic attraction can be quickly started and stopped. Simultaneously, by adjusting the input current to the electromagnet, the magnetic force intensity can be precisely controlled. This provides sufficient attraction to ensure gripping stability when picking up heavier covers, while reducing the magnetic force when fine-tuning the position of the part being picked up. This prevents the part from sliding and jamming along the annular guide 11a due to excessive magnetic force, thus adapting to the precise requirements of magnetic attraction force and start / stop timing in automated control systems, further improving the stability and controllability of opening the cover.

[0047] Optionally, the first receiving member 14 and the second receiving member 15 are provided with magnetic material or magnetic elements with polarity opposite to that of the magnetic controller 13, so that they can be attracted by the magnetic controller 13 in the air.

[0048] Magnetic materials possess excellent magnetic permeability and magnetic adsorption responsiveness, such as ferrites and permalloys. Magnetic materials can quickly form a magnetic adsorption effect with the magnetic attractor. Simultaneously, ensuring the precise correspondence between the placement of the magnetic material and the position of the magnetic attractor ensures that the attractive force is concentrated on the core force-bearing area of ​​the receiving component. This prevents the receiving component from tilting or jamming during movement due to misalignment of the adsorption position, thereby ensuring that the magnetic controller 13 stably and reliably attracts the first receiving component 14 and the second receiving component 15 remotely, achieving precise movement of both along the annular guide 11a.

[0049] A magnetic component with the opposite polarity to the magnetic controller 13 is installed on the receiving component. For example, if the magnetic controller 13 uses an electromagnet that generates a north pole magnetic field when energized, a permanent magnet is correspondingly installed on the receiving component with its south pole facing the electromagnet. This achieves adsorption without contact through the principle of opposite poles attracting each other. This method can further enhance the stability of the adsorption.

[0050] Optionally, the lid opening device includes multiple docking components, each of which includes a first docking component 14 and a second docking component 15. The docking components work together to open the lid. The multiple docking components are slidably arranged on the annular guide 11a. The rotary drive mechanism 12 and the magnetic controller 13 work together to perform lid opening operations in multiple positions and different working chambers 2.

[0051] By setting up multiple docking parts, multiple working chambers 2 can be opened simultaneously. For example, if two working chambers 2 send an opening signal, the rotary drive mechanism 12 and the magnetic controller 13 cooperate to align one docking part with one of the working chambers 2 and the other docking part with the other working chamber 2. The support platform 11 rises and falls synchronously, thus opening the two working chambers 2 at the same time.

[0052] In one specific embodiment, the lifting drive mechanism includes: at least two sets of vertical guide rods 21, spaced apart along the circumferential direction on the transfer platform 1, and a support platform 11 slidably mounted on the vertical guide rods 21; a top plate 22, located at the top of the vertical guide rods 21; a lifting drive component 23, located on the top plate 22; and a suspension rope 24, one end of which is connected to the output end of the lifting drive component 23, and the other end of which is connected to the support platform 11; the lifting drive component 23 can drive the support platform 11 to move along the vertical guide rods 21 by winding or releasing the suspension rope 24.

[0053] For details, please refer to Figures 1 to 3In the illustrated embodiment, the vertical guide rod 21 is a cylindrical high-strength stainless steel rod with a precision-polished surface (to reduce sliding friction). The rod diameter is adapted to the sliding hole size on the support platform 11 to ensure no significant gaps during sliding. The number of vertical guide rods 21 is set to at least two sets, as shown in the figure (three sets). The three sets of vertical guide rods 21 are arranged at equal intervals along the circumference, which can meet the balance guidance requirements for the lifting and lowering of the support platform 11 and prevent the support platform 11 from tipping over due to increased weight during the opening process.

[0054] Continue to refer to Figures 1 to 3 The support platform 11 is specifically a circular stainless steel plate. Sliding holes are provided along the edge of the plate corresponding to the positions of the vertical guide rods 21. Wear-resistant bushings made of polytetrafluoroethylene are embedded in the sliding holes, and the vertical guide rods 21 pass through the wear-resistant bushings. The lower surface of the support platform 11 has a recessed annular guide member 11a, and a metal lifting ring is fixed at the center of the upper surface for connecting the lifting rope 24. The support platform 11 has a hollow design, resulting in a lightweight and highly rigid overall structure.

[0055] Continue to refer to Figures 1 to 3 The top plate 22 is a triangular stainless steel plate, connected to the top of the three sets of vertical guide rods 21. The top plate 22 is also designed with a hollow shape, and the whole structure is lightweight and highly rigid.

[0056] Continue to refer to Figures 1 to 3 The lifting drive component 23 is a servo motor with an integrated rope winder. The motor body is screwed to the top plate 22 through a flange. The motor output shaft is set horizontally and fixed coaxially with the rope winder. The servo motor can precisely control the direction and speed of the rope winder through forward and reverse rotation.

[0057] In one specific embodiment, the suspension rope 24 is a high-strength stainless steel wire rope with a diameter of 8-12mm. It has tensile strength and wear resistance. The surface of the suspension rope 24 is galvanized for rust prevention to adapt to the clean environment of the wafer manufacturing equipment. The two ends of the suspension rope 24 are fastened to the wheel groove of the rope winder and the lifting ring on the support platform 11 by buckles, respectively. In its natural state, it is taut (without slack).

[0058] During operation, the lifting drive 23 is activated, and its output end drives the rope winder to rotate clockwise. The hoisting rope 24 is gradually wound into the groove of the rope winder, and the length of the rope 24 extending outward shortens, thereby pulling the support platform 11 upward. Under the tension of the rope 24, the support platform 11 can move upward along the axis of the vertical guide rod 21, away from the transfer platform 1. Similarly, when the lifting drive 23 drives the rope winder to rotate counterclockwise, the rope 24 is gradually released from the groove of the rope winder, and the length of the rope 24 extending outward extends. Under the weight of itself and the load (such as the cavity cover), the support platform 11 can slide downward along the axis of the vertical guide rod 21, approaching the transfer platform 1. Throughout the process, the vertical guide rod 21 always provides guiding constraints for the support platform 11, ensuring that the support platform 11 can only move in the vertical direction and avoiding deviation or tilting.

[0059] The cavity cover is lifted by the hoisting rope 24. On the one hand, the flexible connection of the hoisting rope 24 can buffer the impact force when the support platform 11 is raised and lowered. Compared with rigid transmission (such as lead screw transmission), it can avoid the tilting of the support platform 11 or the cavity cover being bumped due to mechanical vibration. It is especially suitable for the high requirements of wafer manufacturing equipment for motion stability. At the same time, with the constraint of the vertical guide rod 21, the lifting offset of the support platform 11 can be controlled within a very small range, ensuring that the receiving parts are accurately connected to the cavity cover. On the other hand, the combination structure of the rope winder and the hoisting rope 24 is compact, and the lifting drive component 23 can be centrally installed in the center of the top plate 22. There is no need to set up complex rigid transmission components (such as lead screw and guide rail) between the transfer platform 1 and the support platform 11. This can effectively save internal space of the device and avoid spatial interference with the working cavity 2 surrounding the transfer platform 1, which is suitable for the narrow layout environment of multi-cavity whole machine. In addition, by selecting different diameters and strengths of the lifting ropes 24, or increasing the number of lifting ropes 24 (such as increasing from a single rope to two symmetrically arranged ropes), it is possible to flexibly adapt to cavity covers of different weights (from tens of kilograms to hundreds of kilograms); at the same time, the servo motor-driven rope winder can precisely control the lifting speed and lifting distance of the support platform 11 by adjusting the output torque, so as to meet the needs of different working conditions.

[0060] To facilitate opening the cover and applying force, a handle 2a is provided on each side of the cover of the working chamber 2. The first receiving part 14 and the second receiving part 15 are used to hook the handle 2a.

[0061] In one embodiment, the ends of the first receiving member 14 and the second receiving member 15 are hook-shaped, and the hook-shaped ends are used to engage with the handle 2a provided on the edge of the target working cavity 2 cover. In addition, the receiving members are made of high-strength alloy material (such as stainless steel alloy or aluminum alloy) to prevent the receiving members from being deformed due to excessive weight of the cavity cover.

[0062] For details, please refer to Figures 1 to 3In the illustrated embodiment, the handle 2a is a metal component fixed to both sides of the cavity cover, specifically a U-shaped bent rod. The two handles 2a are symmetrically distributed on the edge of the cavity cover. The material is stainless steel to meet the cleanliness, corrosion resistance and load-bearing requirements of wafer manufacturing equipment.

[0063] Continue to refer to Figures 1 to 3 Both the first receiving component 14 and the second receiving component 15 are designed with multi-segment bends to point towards the peripheral working cavity 2 while connecting to the annular guide component 11a. The two receiving components are positioned opposite each other, and both have hook-shaped ends at their bottom ends, forming upward-bent hook openings. The depth of the hook opening is slightly greater than the diameter of the U-shaped rod of the handle 2a, ensuring that the U-shaped rod can be fully embedded within the hook opening. Simultaneously, the length of the horizontal segment of the hook-shaped end matches the width of the U-shaped opening of the handle 2a, ensuring uniform force after hooking and preventing the cavity cover from tilting.

[0064] With the hook-shaped end engaging with the handle 2a, the specific opening process of the lid-opening device is as follows: Before the cover is opened, the support platform 11 is in a high position under the action of the lifting drive mechanism (avoiding all working chambers 2), and the first receiving component 14 and the second receiving component 15 are in the initial standby position along the annular guide 11a; at this time, the target working chamber 2 is in a closed state, and the handles 2a on both sides of the chamber cover are facing upward, waiting to dock with the receiving component.

[0065] After receiving the opening signal of the target working cavity 2, the control system activates the magnetic suction controller 13 to ensure that it attracts the receiving component, and activates the rotary drive mechanism 12 to make the magnetic suction controller 13 and the first receiving component 14 rotate until the first receiving component 14 is located above the side of the handle 2a on one side of the target working cavity 2; similarly, the second receiving component 15 is rotated to the other side of the handle 2a on the other side of the target working cavity 2; so that the cavity cover is located between the two receiving components.

[0066] The lifting drive mechanism is activated, causing the support platform 11 to descend; as the support platform 11 descends, the first receiving member 14 and the second receiving member 15 descend synchronously until their hook-shaped ends are below the handle 2a.

[0067] The positions of the two receiving parts are finely adjusted using the rotary drive mechanism 12 and the magnetic controller 13 so that the hooks at the two hook-shaped ends are located directly below the openings of the corresponding handles 2a.

[0068] The lifting drive mechanism is restarted, causing the support platform 11 to rise. When the support platform 11 rises, the hook-shaped ends of the first receiving part 14 and the second receiving part 15 will be inserted into the handle 2a, thereby pulling the handle 2a and driving the entire cavity cover to rise synchronously. After the cavity cover rises to the preset height, the lifting drive mechanism stops, and the opening process is completed.

[0069] In another embodiment, the first receiving member 14 and / or the second receiving member 15 includes: an arm 14a slidably disposed on an annular guide member 11a; a swing arm 14b rotatably disposed on the arm 14a; an elastic member disposed between the arm 14a and the swing arm 14b; a limiting plate 14c fixedly disposed on one side of the arm 14a and angled to the arm 14a, the swing arm 14b being disposed between the arm 14a and the limiting plate 14c, the limiting plate 14c being used to limit the maximum extension of the swing arm 14b; during the opening process, the first receiving member 14 and the second receiving member 15 are moved by the magnetic controller 13 so that they are aligned with the handle 2a; during descent, the first receiving member 14 and the second receiving member 15 can be inserted into the handle 2a, the swing arm 14b is pushed by the handle 2a, and the elastic member is compressed; after the swing arm 14b passes through the handle 2a, the elastic member recovers, and the swing arm 14b extends outward; during ascent, the swing arm 14b can support the handle 2a.

[0070] For details, please refer to Figure 4 and Figure 5 In the illustrated embodiment, arm 14a is a long, high-strength alloy rod (suitable for the load-bearing and deformation-resistant requirements of wafer manufacturing equipment). Its top end is slidably connected to the annular guide 11a, and its bottom end is machined with a shaft hole for rotating connection with the swing arm 14b. Bolt holes are also provided on the side of the arm 14a near the bottom end for fixing the limiting plate 14c.

[0071] Continue to refer to Figure 4 and Figure 5 The swing arm 14b is a short, strip-shaped metal rod, slightly longer than the lateral width of the handle 2a. One end of the swing arm 14b is machined with a pin hole that matches the shaft hole of the arm 14a. The swing arm 14b is rotatably connected to the arm 14a via the metal pin and can rotate around the pin in a vertical plane. Under normal conditions, the swing arm 14b extends outward under the action of the elastic element, with one side fitting against the limiting plate 14c, forming a posture that facilitates upward support.

[0072] The elastic element can be a torsion spring (in other embodiments, it can also be a spring sheet or a structural component made of elastic material). One end of the torsion spring is embedded in a pre-set groove at the bottom of the arm 14a, and the other end is embedded in a groove near the pin of the swing arm 14b. In its natural state, the torsion spring is in a slightly tensioned state, providing the swing arm 14b with a rotational elastic force away from the arm 14a, causing the swing arm 14b to maintain its unfolding tendency. When the swing arm 14b is subjected to an external force and moves closer to the arm 14a, the torsion spring can be compressed and deformed, storing elastic potential energy. After the external force disappears, the potential energy is released, causing the swing arm 14b to reset and unfold.

[0073] Continue to refer to Figure 4 and Figure 5The limiting plate 14c is a metal block, fixed to the side of the arm 14a near the swing arm 14b by bolts, perpendicular to the arm 14a at a 90° angle and located below the swing arm 14b. When the swing arm 14b extends outward under the action of the elastic element, it flips towards the limiting plate 14c and finally abuts against the limiting plate 14c. The limiting plate 14c can prevent the swing arm 14b from continuing to rotate, thereby limiting its maximum extension and ensuring that the swing arm 14b can stably support the handle 2a.

[0074] With the combination of the flip-arm type receiving component and handle 2a, the opening process of the opening device is as follows: First, the magnetic controller 13 attracts the arms 14a of the first receiving member 14 and the second receiving member 15 in the air. Driven by the rotary drive mechanism 12, the two arms slide along the annular guide member 11a until the two receiving members are aligned with the handle 2a openings on both sides of the target working cavity 2 cover. At this time, the swing arm 14b is in the extended state under the action of the elastic member and fits against the limiting plate 14c.

[0075] Subsequently, the lifting drive mechanism drives the support platform 11 to descend slowly, causing the receiving component to move downward as a whole. When the swing arm 14b is inserted into the opening of the handle 2a and contacts the side bar of the handle 2a, as the support platform 11 continues to descend, the handle 2a exerts a pushing force on the swing arm 14b towards the arm 14a, forcing the swing arm 14b to rotate inward around the pin axis. At this time, the elastic element (torsion spring) is compressed and stores elastic potential energy. The swing arm 14b gradually retracts until the overall thickness of the receiving component is less than the opening width of the handle 2a, ensuring that the receiving component can pass smoothly through the handle 2a.

[0076] When the support platform 11 descends until the swing arm 14b completely passes through the handle 2a (i.e., the free end of the swing arm 14b is freed from the side rod constraint of the handle 2a), the pushing force disappears, the elastic element releases the stored potential energy, and drives the swing arm 14b to rotate outward around the pin axis to reset, until the swing arm 14b is once again in contact with the limiting plate 14c and returns to the unfolded state. At this time, the swing arm 14b is exactly below the handle 2a, forming a shape that can support the handle 2a.

[0077] Finally, the lifting drive mechanism drives the support platform 11 to rise, and the upper surface of the swing arm 14b comes into close contact with the handle 2a. The supporting force drives the handle 2a and the entire cavity cover to rise. After the cavity cover rises to the preset height, the lifting drive mechanism stops running, and the opening process is completed.

[0078] Compared to embodiments where the ends of the first receiving member 14 and the second receiving member 15 are hook-shaped, the flexible swing arm receiving member is simpler to operate and has higher tolerance for docking errors. The hook-shaped end needs to be precisely aligned with the opening of the handle 2a. If there is a slight positional deviation between the receiving member and the handle 2a (such as horizontal offset or angular deviation), the hook-shaped end is easy to get stuck on the outside of the handle 2a. However, the swing arm 14b can be pushed and retracted by the side rod of the handle 2a during descent to automatically adapt to the opening of the handle 2a. Even if there is a slight positional deviation, it can still be smoothly inserted into the handle 2a, which greatly reduces the accuracy requirements during docking and reduces the failure to open the cover due to alignment deviation.

[0079] To facilitate the detachment of the flexible swing arm type receiving component from the handle 2a, in one embodiment, the swing arm 14b can be manually (with the aid of tools such as a long pole to ensure operational safety) assisted in retracting.

[0080] In another embodiment, the opening device further includes a release wedge, which is disposed on the transfer platform 1 or the working cavity 2 and located directly below the handle 2a. After the cavity cover is reinstalled, the first receiving member 14 and the second receiving member 15 are driven to descend by the lifting drive mechanism. The swing arm 14b contacts the release wedge, forcing the swing arm 14b to overcome the elastic force of the elastic member and rotate inward to the retracted state so that the first receiving member 14 and the second receiving member 15 can disengage from the handle 2a.

[0081] Specifically, an adaptation structure, such as a ramp or a roller, can be added to the tail of the arm 14a or the swing arm 14b (the lowest end away from the support platform 11). If a ramp is provided, it forms an angle of 30°-45° with the main body of the arm 14a or the swing arm 14b, with the ramp facing the direction of disengagement from the wedge, and its surface is polished to reduce collision friction. If a roller is provided, it is rotatably mounted at the tail of the arm 14a or the swing arm 14b via a pin, with the roller axis parallel to the rotation axis of the swing arm 14b to ensure smooth rolling during collision. Meanwhile, on the outer wall of the working chamber 2 or the transfer platform 1, at the position corresponding to the movement trajectory of the inclined surface / roller at the tail of the receiving part, a release wedge is fixedly installed. The release wedge is a right-angled triangular metal block, and its inclined surface is adapted to the angle of the inclined surface at the tail of the receiving part (or can form rolling contact with the roller). The installation height of the release wedge is precisely controlled to ensure that when the receiving part descends for the second time, the inclined surface / roller at the tail can just contact the inclined surface of the release wedge.

[0082] The disengagement process must be initiated after the cavity cover is reinstalled / reset: After the opening process is completed, the lifting drive mechanism first drives the support platform 11 to descend, and places the cavity cover smoothly on the cavity opening of the working cavity 2. At this time, the swing arm 14b for receiving parts is still in the extended state, and its top supports the lower surface of the handle 2a and has not detached from the handle 2a. The control system instructs the lifting drive mechanism to continue driving the support platform 11 to descend a short distance (usually 10-20mm). This descent distance must ensure that the inclined surface / roller at the tail of the receiving part can contact the inclined surface of the fixed release wedge. As the support platform 11 continues to descend, the inclined surface at the tail of the receiving part and the inclined surface of the release wedge press against each other (or the roller rolls along the inclined surface of the release wedge). The vertical force generated by the descent is converted into a horizontal component force that forces the swing arm 14b to rotate in the opposite direction around the pin. This component force can overcome the elastic force of the elastic element and push the swing arm 14b to retract inward until the overall thickness of the receiving part is less than the opening width of the handle 2a. The lifting drive mechanism drives the support platform 11 to rise synchronously with the receiving part. Since the swing arm 14b has been retracted, its top end will not interfere with the handle 2a. Finally, the receiving part passes through the handle 2a and completes the separation. After separation, the swing arm 14b re-extenses under the restoring action of the elastic element.

[0083] In this embodiment, the entire disengagement process relies on the collision and force conversion of a purely mechanical structure. There is no need to add additional electric or pneumatic drive components to the receiving part, nor is there any need to change the core logic of the original control system. Only a secondary descent is needed after the conventional descent action of the cavity cover reset, which can achieve the disengagement of the receiving part from the handle 2a. The structure is simple and highly reliable.

[0084] In another embodiment, an electromagnet is installed on arm 14a to attract swing arm 14b.

[0085] Specifically, after receiving the detachment signal, the control system instructs the electromagnet to be energized and generate magnetic force to attract the swing arm 14b to retract, forcing the swing arm 14b to overcome the elastic force of the elastic element and rotate around the pin to retract; after the overall thickness of the detached part is less than the opening width of the handle 2a, the control system instructs the lifting drive mechanism to drive the support platform 11 to rise, and the detached part can rise synchronously with the support platform 11 to achieve detachment.

[0086] Optionally, the magnetic controller 13 includes a magnetic element, which is an electromagnet.

[0087] The electromagnet has the characteristic of being switchable by magnetic force. When not energized, the electromagnet has no magnetic output. At this time, the first receiving component 14 and the second receiving component 15 can move freely on the annular guide 11a (such as manually fine-tuning their positions), or after opening the cover and disengaging from the handle 2a, they can be separated from the magnetic controller 13 without additional structure. When energized, it quickly generates magnetic force to attract the receiving components in the air, ensuring that the receiving components rotate and change position synchronously with the magnetic controller 13, and preventing the receiving components from falling off during movement.

[0088] This on-demand magnetic control is suitable for the entire process of the opening device, from aligning with the working chamber 2, moving the receiving part to the separation after the action is completed.

[0089] Optionally, both the first receiving member 14 and the second receiving member 15 are provided with magnetic target areas made of magnetically conductive material, and the magnetic lines of force emitted by the electromagnet can pass through the magnetic target areas to form a closed magnetic circuit; the area of ​​the magnetic target area is not less than the magnetic pole area of ​​the electromagnet.

[0090] Specifically, the magnetic target area is made of a magnetically conductive material, preferably low-carbon steel, permalloy, or other materials with high permeability and low magnetic resistance, to ensure efficient conduction of the magnetic lines of force generated by the electromagnet. The magnetic target area can be configured as a block-shaped protrusion or a flat patch. If it is a block-shaped protrusion, the magnetically conductive block is integrally formed or welded to the corresponding position of the receiving component corresponding to the magnetic controller 13, and the shape of the magnetically conductive block is adapted to the shape of the electromagnet poles (e.g., circular or rectangular). If it is a flat patch, a magnetically conductive metal sheet is pasted or riveted to the corresponding position of the receiving component. The surface of the metal sheet is polished to reduce the magnetic resistance between it and the electromagnet.

[0091] At the same time, the size of the magnetic target area needs to be strictly designed, and its area should not be less than the magnetic pole area of ​​the electromagnet, so as to ensure that the magnetic lines of force generated by the electromagnet can fully pass through the magnetic target area and avoid magnetic leakage due to the target area being too small.

[0092] The thickness of the magnetic target area is determined based on the magnetic saturation characteristics of the magnetic material (usually 3-5mm), which ensures that the magnetic lines of force can effectively penetrate and form a closed magnetic circuit, while avoiding excessive weight of the receiving part due to excessive thickness.

[0093] In addition, the magnetic target area on the receiving component must be precisely aligned with the electromagnet to ensure that the magnetic lines of force can pass perpendicularly through the magnetic target area after the electromagnet is energized, forming efficient magnetic coupling and avoiding the weakening of magnetic attraction force due to positional deviation.

[0094] The function of the magnetic target area is to cooperate with the electromagnet to form an efficient closed magnetic circuit, ensuring that the magnetic controller 13 can stably and reliably attract the receiving component without air contact. Specifically, the magnetic lines of force generated by the electromagnet after it is energized need to form a closed path through a magnetically conductive medium to exert maximum magnetic force. If the receiving component does not have a magnetic target area, the magnetic lines of force will diffuse through the air (high magnetic resistance), resulting in a significant reduction in effective magnetic force and an inability to stably attract the receiving component. However, the magnetic material of the magnetic target area has low magnetic resistance, which can guide the magnetic lines of force to concentrate through the target area and then return to the electromagnet through the main body of the receiving component (if the entire receiving component is made of a magnetically conductive material) or the air gap, forming a complete closed magnetic circuit. This significantly enhances the magnetic attraction force and ensures that the receiving component always maintains a stable magnetic attraction with the magnetic controller 13.

[0095] In addition, the magnetic target area also serves for positioning and force distribution. The fixed position of the magnetic target area acts as a precise docking reference between the electromagnet and the receiving component, preventing uneven force distribution on the receiving component due to magnetic misalignment (such as tilting of the receiving component). Simultaneously, the magnetic target area concentrates the electromagnet's magnetic force on a specific area of ​​the receiving component, preventing excessive localized stress caused by magnetic force dispersion. This prevents deformation of the receiving component due to long-term magnetic stress, further ensuring the service life of the receiving component and the stability of the opening action.

[0096] Optionally, the magnetic controller 13 includes a magnetic attractor and a telescopic drive, the telescopic drive being used to drive the magnetic attractor to move radially toward or away from the first receiving member 14 and the second receiving member 15.

[0097] By using the telescopic drive component to drive the magnetic component to move radially closer to or further away from the first receiving component 14 and the second receiving component 15, the magnetic gap between the magnetic component and the receiving component can be flexibly adjusted, thereby optimizing the magnetic attraction effect to adapt to the magnetic attraction requirements of the opening device under different working conditions and solving problems such as insufficient adsorption force and difficulty in detachment that may be caused by a fixed magnetic spacing.

[0098] In some embodiments, the receiving component needs to carry cavity covers of varying weights. When the receiving component needs to grasp a heavier cavity cover, the telescopic drive component can drive the magnetic suction component closer to the receiving component, reducing the magnetic suction gap. Based on the characteristic that magnetic field strength is inversely proportional to the square of the distance, reducing the gap significantly enhances the magnetic suction force, ensuring the receiving component is stably attracted and preventing magnetic suction failure due to excessive load. When the receiving component needs to detach after opening the cover, the telescopic drive component can move the magnetic suction component away from the receiving component, increasing the magnetic suction gap and quickly reducing the magnetic suction force. This prevents the receiving component from failing to separate smoothly from the magnetic suction controller 13 due to excessive magnetic force, or from shifting during separation, ensuring smooth detachment.

[0099] Furthermore, during the operation of the opening device, the actual position of the receiving part may deviate slightly from the preset position due to factors such as the machining error of the annular guide 11a and the sliding wear of the receiving part (e.g., radial offset of 1-2 mm). If the position of the magnetic suction part is fixed, the magnetic suction target area and the magnetic pole may not be accurately aligned due to the deviation, affecting the magnetic suction effect. However, the telescopic drive can finely adjust the radial position of the magnetic suction part according to the actual position of the receiving part, so that the magnetic suction part is always aligned with the magnetic suction target area of ​​the receiving part. Even if there is a positional deviation, effective adsorption can be ensured by adjusting the spacing, reducing the dependence on machining accuracy and installation accuracy and improving the fault tolerance of the device.

[0100] Optionally, the magnetic controller 13 includes a detection element for confirming whether the first receiving element 14 and the second receiving element 15 have been successfully attracted.

[0101] A Hall sensor can be used as the detection element. In use, the Hall sensor is positioned adjacent to the magnetic attractor, with its sensing surface facing the magnetic target area of ​​the first and second attractors 14 and 15. The Hall sensor can detect changes in the surrounding magnetic field strength, and its output signal is linearly correlated with the magnetic field strength, thus matching the magnetic field characteristics of an electromagnet.

[0102] Specifically, after the magnetic controller 13 starts the magnetic attraction program, the magnetic components generate a magnetic field, and the Hall sensor can detect the magnetic field strength near the magnetic target area in real time. If the first receiving component 14 and the second receiving component 15 are successfully attracted, the magnetic field strength will increase significantly and reach a preset threshold (this threshold is set according to the magnetic attraction requirements during the device debugging stage). At this time, the Hall sensor outputs an electrical signal of "attraction success" (such as a high level). If the attraction is unsuccessful (such as the receiving component being offset or the magnetic target area not being aligned), the magnetic field strength is lower than the threshold, and an "attraction failure" signal (such as a low level) is output. The signal will be transmitted to the control system of the device in real time to provide a basis for judgment for subsequent actions.

[0103] The detection device can also be a proximity switch, such as an inductive proximity switch, which is also installed on the side of the magnetic component, with its detection end maintaining a preset distance from the magnetic target area of ​​the receiving component. The inductive proximity switch can output an on / off signal by detecting whether a metal object (the magnetic target area of ​​the receiving component is made of a magnetically conductive metal) is close, achieving detection without direct contact.

[0104] During the initialization of the opening device, the detection distance of the proximity switch is calibrated first. When the receiving part is in the normal adsorption position, the proximity switch detects the magnetic target area and outputs a "conduction" signal. When the magnetic part approaches the receiving part, if the receiving part is successfully adsorbed and moved to the preset position, the proximity switch continues to output a "conduction" signal, indicating that the adsorption is in place. If the receiving part is not adsorbed and its position is not within the detection range of the proximity switch, the switch maintains an "off" signal. After receiving the signal, the control system will pause subsequent lifting and rotating actions to avoid equipment failure due to dry running.

[0105] By setting up detection components, real-time feedback and safety verification can be provided for the magnetic attraction process, ensuring that the first receiving component 14 and the second receiving component 15 are stably attracted by the magnetic controller 13 before the opening action is performed. This avoids the failure of subsequent actions due to failure to attract or weak attraction, which could lead to risks such as the cavity cover falling or equipment collision, thus ensuring the safety and reliability of the device operation.

[0106] Furthermore, the signal from the detected component can be linked with the control and alarm systems of the capping device. When adsorption fails, the control system, in addition to pausing the operation, can display the cause of the fault (such as component misalignment or insufficient magnetic force) through a human-machine interface (such as the equipment display screen), and simultaneously trigger an audible and visual alarm to remind the operator to troubleshoot. In this way, there is no need for manual visual observation of the adsorption status, further reducing human intervention, adapting to the needs of automated production in wafer manufacturing equipment, and also reducing the operational risks caused by human error.

[0107] Optionally, the magnetic controller 13 includes: a connecting plate 13a connected to the rotary drive mechanism 12; two magnetic components 13b, which are spaced apart on the connecting plate 13a, one of which is used to attract the first receiving component 14, and the other is used to attract the second receiving component 15; through the two magnetic components 13b, the magnetic controller 13 can simultaneously control the first receiving component 14 and the second receiving component 15 to achieve rapid displacement.

[0108] For details, please refer to Figure 6 and Figure 7 In the illustrated embodiment, the connecting plate 13a is a horizontally arranged elongated metal plate, made of the same material as the support platform 11, using stainless steel to ensure rigidity and resistance to deformation. Its length is not less than the diameter of the working cavity 2 cover to cover the working range of the two receiving components. The magnetic controller 13 also includes a telescopic drive component. The connecting plate 13a is connected to the telescopic drive component, enabling it to rotate under the drive of the rotary drive mechanism 12 and move linearly in the radial direction under the drive of the telescopic drive component.

[0109] Continue to refer to Figure 6 and Figure 7 Two magnetic attractors 13b are spaced apart on the front of the connecting plate 13a facing the receiving component, with each magnetic attractor 13b corresponding to a receiving component. The magnetic pole face of the magnetic attractor 13b is aligned with the magnetic target area of ​​the receiving component to ensure that the magnetic lines of force can pass perpendicularly through the target area during magnetic attraction, avoiding the weakening of magnetic attraction force due to positional deviation.

[0110] Since the two magnetic accumulators 13b are directly connected to the rotary drive mechanism 12 through the connecting plate 13a, the rotary drive mechanism 12 can drive the connecting plate 13a and the two magnetic accumulators 13b to move synchronously along the annular guide 11a. There is no need to drive the two receiving parts to change position separately, which greatly shortens the alignment time of the receiving parts from the initial position to the target working cavity 2.

[0111] Furthermore, this structure supports both synchronous movement of the two receiving components and allows for individual movement of each receiving component through independent control of the magnetic chuck 13b. For example, if one of the receiving components shifts position due to sliding wear, the corresponding magnetic chuck 13b can be activated independently, cooperating with the rotary drive mechanism 12 to drive the receiving component for fine-tuning.

[0112] Optionally, the magnetic controller 13 further includes: a central gear 13c, rotatably mounted on the connecting plate 13a; a first rack 13d, located on one side of the central gear 13c and meshing with it, with one magnetic element 13b mounted on the first rack 13d; and a second rack 13e, located on the other side of the central gear 13c and also meshing with it, with another magnetic element 13b mounted on the second rack 13e. The first rack 13d and the second rack 13e are centrally symmetrically arranged, such that when the central gear 13c rotates, the first rack 13d and the second rack 13e move towards each other, and the two magnetic elements 13b can move closer to each other; or when the central gear 13c rotates in the opposite direction, the first rack 13d and the second rack 13e move away from each other, and the two magnetic elements 13b can move further away from each other.

[0113] For details, please refer to Figure 8 In the illustrated embodiment, the connecting plate 13a is a horizontally arranged elongated metal plate, and the central gear 13c is a cylindrical spur gear, rotatably mounted at the center of the connecting plate 13a via bearings. The first rack 13d and the second rack 13e are both elongated spur racks, centrally symmetrically distributed with the central gear 13c as the center of symmetry. The first rack 13d is located above the central gear 13c, and the second rack 13e is located below the central gear 13c. The tooth surfaces of both racks face the central gear 13c and precisely mesh with its tooth surfaces. The connecting plate 13a is also provided with guide components (such as guide rods or guide rails), and the racks are slidably mounted on these guide components. The guide components restrict the direction of movement of the racks, preventing vertical offset or tilting during transmission, and ensuring that the racks can stably perform horizontal reciprocating motion on the connecting plate 13a.

[0114] Continue to refer to Figure 8 One of the magnetic components 13b is fastened to the end of the first rack 13d away from the central gear 13c by bolts, while the other magnetic component 13b is fixed to the end of the second rack 13e away from the central gear 13c. The two magnetic components 13b correspond to the first receiving component 14 and the second receiving component 15 on the annular guide 11a, respectively.

[0115] When it is necessary to drive the two magnetic components 13b to move closer to each other (such as fine-tuning the relative position of the receiving components so that the receiving components are aligned with the cavity cover, or adjusting the distance between the two receiving components so that they are adapted to the cavity cover size of the target working cavity 2), the external drive source (such as a micro servo motor, integrated on the connecting plate 13a) drives the central gear 13c to rotate clockwise. Since the first rack 13d and the second rack 13e are both meshed with the central gear 13c and are centrally symmetrically distributed, the rotational motion of the central gear 13c will be converted into the opposing motion of the two racks, thereby driving the two magnetic components 13b to move closer to each other.

[0116] Similarly, when it is necessary to drive the two magnetic components 13b away from each other, the external drive source drives the central gear 13c to rotate in the opposite direction, so that the first rack 13d and the second rack 13e can move in opposite directions, thereby driving the two magnetic components 13b away from each other.

[0117] By adding a gear and rack linkage transmission structure, the synchronous and symmetrical movement of the two magnetic suction parts 13b can be realized, thereby precisely controlling the distance between the first receiving part 14 and the second receiving part 15, ensuring that the receiving parts can be adapted to different specifications of working chamber 2 covers, and at the same time realizing the rapid approach and withdrawal of the receiving parts, ensuring the smoothness and adaptability of the opening process.

[0118] This structure can synchronously control the movement of the two racks and the magnetic accumulator 13b by controlling the rotation direction and angle of the central gear 13c, without the need to control two independent drive sources separately, which helps to simplify the logic design of the control system.

[0119] Optionally, the magnetic controller 13 includes a magnetic suction component and a telescopic drive component. The magnetic suction component is used to attract the first receiving component 14 and the second receiving component 15 in the air. The output end of the telescopic drive component is also provided with a baffle 16. When the cavity cover of the working cavity 2 is lifted, the telescopic drive component can drive the baffle 16 to move above the cavity cover, thereby preventing the cavity cover from tilting to the side.

[0120] The telescopic drive can be any actuator, such as a pneumatic cylinder or an electric cylinder, that can drive the baffle 16 to telescopically move in the radial direction.

[0121] Before the device performs the opening action, the baffle 16 is in a retracted and ready state. At this time, the telescopic drive is not activated, and the baffle 16 is retracted below the support platform 11 and behind the interference component to avoid interfering with the magnetic attraction component to rotate and avoid positioning.

[0122] After the first receiving component 14 and the second receiving component 15 grasp the cavity cover, the control system instructs the telescopic drive component to move, causing the baffle 16 to extend forward until the baffle 16 moves horizontally to the area directly above the cavity cover.

[0123] To ensure the reliability of anti-tilt mechanism, the baffle 16 is preferably able to cover at least the center of the cavity cover along its length, and the centerline of the baffle 16 along its length coincides with the central axis of the cavity cover. Simultaneously, a small gap of 2-10mm is maintained between the lower surface of the baffle 16 and the upper surface of the cavity cover (to avoid contact friction damage to the cavity cover and to ensure timely anti-tilt). After the baffle 16 is in position, the lifting drive mechanism is activated, causing the support platform 11, the receiving component, the baffle 1, and the cavity cover to rise synchronously.

[0124] During the lifting process of the cavity cover, if the cavity cover tends to tilt due to uneven force on the receiving part (such as loose fit between the handle 2a on one side and the receiving part) or displacement of the center of gravity of the cavity cover, the tilted end of the cavity cover will first contact the baffle 16. The baffle 16 can prevent the cavity cover from tilting further through its own rigid structure, thereby limiting the tilt angle of the cavity cover within a safe range (usually ≤5°).

[0125] The cavity cover, as a sealing component of the working chamber 2, is typically made of metal and can weigh tens of kilograms. If the cavity cover tilts during lifting due to loose fitting of the receiving parts or insufficient magnetic attraction, it may fall, causing damage to equipment components (such as injuring the opening of the working chamber 2 or the transfer platform 1), and even endangering the safety of nearby operators. The baffle 16 forms a rigid protective barrier above the cavity cover, preventing tilting and confining the cavity cover to a stable lifting trajectory. This physically eliminates the possibility of the cavity cover falling, thus improving the overall safety of the machine.

[0126] Optionally, the lower surface of the support platform 11 is provided with an indented annular guide 11a, which is used for sliding the first receiving member 14 and the second receiving member 15 to achieve rotational displacement.

[0127] For details, please refer to Figure 3 or Figure 8 In the illustrated embodiment, the annular guide 11a is an integrated annular groove machined on the lower surface of the support platform 11. The support platform 11 is made of stainless steel, and its lower surface is precision milled to form a closed annular groove extending in the circumferential direction. The extension trajectory of this groove is perfectly matched with the distribution trajectory of the multiple working chambers 2 surrounding the transfer platform 1, ensuring that when the first receiving member 14 and the second receiving member 15 slide along the groove, they can accurately cover all the working chambers 2.

[0128] When the receiving component rotates and changes position, the magnetic controller 13 attracts the receiving component remotely, and under the drive of the rotation drive mechanism 12, the receiving component rotates synchronously around the center of the support platform 11 along with the magnetic controller 13. During this process, the receiving component slides along the annular guide 11a. The annular groove can limit the radial offset of the receiving component, preventing the receiving component from moving towards the center or the outside of the support platform 11, ensuring that the receiving component always moves along the preset annular trajectory until it is aligned with the target working cavity 2. After the receiving component completes the opening operation, the magnetic controller 13 can continue to drive the receiving component to slide along the annular guide 11a to the initial position or the next target working cavity 2.

[0129] The recessed annular guide 11a serves two purposes. First, it saves space and prevents the added guide from colliding with the opening of the working chamber 2, the side wall of the transfer platform 1, or the vertical guide rod 21 of the lifting drive mechanism. This allows it to fit the compact spatial layout of the multi-chamber unit and ensures the independent operation of each component. Second, it helps to enhance the structural rigidity of the support platform. Since the annular guide 11a is integrally recessed and is part of the same structure as the support platform 11, it avoids damage to the structural integrity of the support platform caused by adding guide rails later, compared to this method. At the same time, the circumferential distribution of the annular groove enhances the torsional rigidity of the support platform 11, reduces the deformation of the support platform 11 when bearing the weight of the chamber cover or during lifting and lowering movements, and ensures that the trajectory accuracy of the guide is not affected by the deformation of the support platform, further improving the stability of the receiving part's movement.

[0130] Optionally, the support platform 11 is made of stainless steel.

[0131] The support platform 11 needs to bear the weight of the receiving part and the cavity cover during operation. When the receiving part grabs the cavity cover, it will transmit a lateral pulling force. The stainless steel material has a balance of rigidity and toughness, which can not only effectively resist these external forces and prevent the support platform 11 from bending, twisting and other deformations, but also ensure that the annular guide 11a does not deform when it is pulled by the receiving part, so as to maintain the guiding accuracy.

[0132] Meanwhile, the support platform 11 needs to slide in long-term contact with the first receiving component 14, the second receiving component 15 (made of stainless steel or high-strength alloy), and the annular guide component 11a. The hardness and friction characteristics of stainless steel and stainless steel or high-strength alloy are matched, and "hard-soft wear" is less likely to occur when the two slide in contact (avoiding scratches on the softer material), which helps to extend the service life of the support platform 11 and the receiving components.

[0133] In addition, the magnetic properties of stainless steel (some stainless steels, such as martensitic stainless steel, have a certain magnetic permeability) or non-magnetic properties (such as austenitic stainless steel) can be adapted according to the needs of the magnetic controller 13 to ensure that it does not interfere with the magnetic force transmission of the magnetic components, so that the magnetic controller 13 can stably drive the receiving component to move.

[0134] Optionally, the cross-section of the annular guide 11a is T-shaped, and the annular guide 11a is a T-shaped groove. The ends of the first receiving member 14 and the second receiving member 15 used to connect the annular guide 11a are T-shaped, and the T-shaped groove is used to engage with the T-shaped connecting parts of the first receiving member 14 and the second receiving member 15.

[0135] In simple terms, the annular guide 11a is not a conventional rectangular groove. The bottom of the annular guide 11a is the groove opening, the top is the groove bottom, and the two sides of the groove bottom extend radially to form a T-shaped irregular groove.

[0136] Correspondingly, the ends of the first receiving member 14 and the second receiving member 15, which are used to insert into the T-shaped groove, are provided with a T-shape that matches the T-shaped groove. The radially extending wings of the T-shaped groove can stably hold the radially extending wings of the receiving member ends, so that the receiving member can be hung below the support platform 11.

[0137] Compared to the traditional rectangular interlocking joint, the T-shaped groove and T-shaped connector have a larger contact area and stronger guiding constraint, effectively suppressing vertical bouncing or lateral tilting of the receiving component during sliding. Especially when the magnetic controller 13 drives the receiving component to rotate and change position, the T-shaped fit ensures the motion accuracy of the receiving component, ensuring that the receiving component is accurately aligned with the target working cavity 2 after each slide, reducing opening failures caused by guiding deviations.

[0138] Optionally, a ball bearing is provided between the T-shaped groove and the T-shaped connecting part. The ball bearing can reduce sliding friction, avoid friction loss affecting the guiding accuracy, and also prevent the first receiving part 14 and the second receiving part 15 from radial movement, so as to ensure the coaxiality of the two during the rotational displacement process.

[0139] When the T-shaped groove and the T-shaped connecting part slide relative to each other, if they are in direct contact, significant sliding friction will occur. Over time, this can lead to wear on the contact surfaces, increasing the clearance and compromising the accuracy of the guide trajectory. Embedding a ball bearing between them converts the sliding friction into rolling friction, significantly reducing the coefficient of friction. This not only allows the receiving part to slide more smoothly along the annular guide 11a, reducing the driving force consumption of the magnetic controller 13, but also prevents wear on the contact surfaces caused by friction, thus maintaining the clearance accuracy of the T-fit over the long term and ensuring the stability of the receiving part's rotational displacement movement.

[0140] Furthermore, the ball bearings prevent radial movement of the receiving components, ensuring coaxiality during rotation and repositioning. When the opening device is operating, the receiving components need to rotate and reposition around the central axis of the support platform 11. If radial movement occurs (i.e., offset towards the center or outer side of the support platform 11), it will cause abnormal spacing between the two receiving components, leading to an inability to fit the cover of the working chamber 2, or even interference with components such as the vertical guide rod 21 of the lifting drive mechanism. The ball bearings form a rigid support by filling the radial gap between the T-shaped groove and the T-shaped connection. When the receiving components tend to move radially, the ball bearings will make close contact with the inner wall of the groove and the surface of the connection, using their rigidity to block the movement and control the radial offset of the receiving components within a very small range (usually ≤0.05mm). This ensures that the two receiving components always rotate and reposition synchronously around the central axis of the support platform 11, maintaining good coaxiality, thereby ensuring the docking accuracy between the receiving components and the cover, and avoiding opening failure or component collision due to movement.

[0141] Optionally, the support platform 11 is provided with a hook on the bottom surface facing the transfer platform 1. The hook can hook the cover plate of the transfer platform 1. When it is necessary to clean the inside of the transfer platform 1 or repair the parts, the hook can be engaged with the lifting ring on the cover plate of the transfer platform 1, and the transfer platform 1 can be opened by the lifting drive mechanism.

[0142] As a core component of wafer manufacturing equipment, the transfer platform 1 typically integrates the connecting pipelines (such as gas delivery pipelines and vacuum pipelines), electrical circuits (such as control cables and sensor circuits), and transmission auxiliary components (such as guide rod fixing seats and buffer components) of the working chamber 2. After long-term operation, maintenance operations are required by opening the cover to carry out internal cleaning, component inspection and replacement, and other operations.

[0143] For details, please refer to Figure 1 To facilitate processing of the interior of the transfer platform 1, a sealing cover is installed on the top of the transfer platform 1, and a lifting ring is provided on the sealing cover. A hook is installed on the bottom surface of the support platform 11. When it is necessary to open the transfer platform 1, the worker manually engages the hook with the lifting ring, and the lifting drive mechanism can be used to open the transfer platform 1.

[0144] Thus, the opening device provided in this application can be used to open the working chamber 2 and the transfer platform 1, and can fully adapt to the opening needs of the whole machine.

[0145] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A magnetic suction-type automatic cover opening device for a multi-cavity wafer manufacturing equipment, applied to wafer manufacturing equipment, the wafer manufacturing equipment comprising a polygonal transfer platform (1) and a plurality of working cavities (2) arranged around the transfer platform (1) and respectively communicating with the transfer platform (1), characterized in that, include: A lifting drive mechanism is provided on the transfer platform (1); Support platform (11), the lifting drive mechanism is used to drive the support platform (11) to move in the vertical direction to move closer to or away from the transfer platform (1). A rotary drive mechanism (12) and a magnetic controller (13) are provided on the support platform (11). The rotary drive mechanism (12) is used to drive the magnetic controller (13) to rotate so that the magnetic controller (13) points to different working cavities (2). The first receiving component (14) and the second receiving component (15) are provided on the support platform (11), and the annular guide (11a) is provided on the support platform (11). The extension trajectory of the annular guide (11a) is adapted to the distribution trajectory of the multiple working cavities (2). The first receiving component (14) and the second receiving component (15) are slidably disposed on the annular guide (11a). The magnetic controller (13) can attract the first receiving component (14) and the second receiving component (15) in the air, thereby driving them to move along the annular guide (11a) toward the working cavity (2) that needs to be opened. During operation, the magnetic controller (13) forms a clearance fit with the first receiving member (14) and the second receiving member (15) through magnetic attraction, so as to avoid interference components in the lifting drive mechanism and realize the rotational displacement of the first receiving member (14) and the second receiving member (15); After the first receiving component (14) and the second receiving component (15) work together to extract the target working cavity (2), the supporting platform (11) is driven to rise by the lifting drive mechanism to open the working cavity (2).

2. The multi-cavity magnetic suction-avoidance type automatic lid opening device for a full-platform machine according to claim 1, characterized in that, The lifting drive mechanism includes: At least two sets of vertical guide rods (21) are spaced apart on the transfer platform (1) along the circumferential direction, and the support platform (11) is slidably mounted on the vertical guide rods (21); Top plate (22) is located at the top of the vertical guide rod (21); A lifting drive component (23) is provided on the top plate (22); The hoisting rope (24) has one end connected to the output end of the lifting drive (23) and the other end connected to the support platform (11); The lifting drive (23) can drive the support platform (11) to move along the vertical guide rod (21) by winding or releasing the hoisting rope (24).

3. The multi-cavity magnetic suction-avoidance type full-platform automatic lid opening device for complete machines according to claim 1, characterized in that, The working chamber (2) has a handle (2a) on each side of the chamber cover. The first receiving part (14) and the second receiving part (15) are used to hook the handle (2a). The first access member (14) and / or the second access member (15) includes: The arm (14a) is slidably mounted on the annular guide (11a); A swing arm (14b) is rotatably mounted on the arm (14a); An elastic element is disposed between the arm (14a) and the swing arm (14b); A limiting plate (14c) is fixedly disposed on one side of the arm (14a) and is set at an angle to the arm (14a). The swing arm (14b) is disposed between the arm (14a) and the limiting plate (14c). The limiting plate (14c) is used to limit the maximum extension of the swing arm (14b). During the opening process, the first receiving part (14) and the second receiving part (15) are moved by the magnetic controller (13) so that they are aligned with the handle (2a). During descent, the first receiving member (14) and the second receiving member (15) can be inserted into the handle (2a), the swing arm (14b) is pushed by the handle (2a), and the elastic element is compressed; After the swing arm (14b) passes through the handle (2a), the elastic element returns to its original state, and the swing arm (14b) extends outward; When rising, the swing arm (14b) can support the handle (2a).

4. The multi-cavity magnetic suction-avoidance type automatic lid opening device for a full-platform machine according to claim 3, characterized in that, It also includes a release wedge, which is disposed on the transfer platform (1) or the working chamber (2) and located directly below the handle (2a); After the cavity cover is reinstalled, the first receiving member (14) and the second receiving member (15) are driven to descend by the lifting drive mechanism. The swing arm (14b) contacts the disengagement wedge, forcing the swing arm (14b) to overcome the elastic force of the elastic member and rotate inward to the retracted state so that the first receiving member (14) and the second receiving member (15) can disengage from the handle (2a).

5. The multi-cavity magnetic suction-avoidance type automatic lid opening device for a full-platform machine according to claim 1, characterized in that, The magnetic controller (13) includes a magnetic attractor, which is an electromagnet. The first receiving part (14) and the second receiving part (15) are both provided with magnetic target areas made of magnetic conductive material. The magnetic lines of force emitted by the electromagnet can pass through the magnetic target areas and form a closed magnetic circuit. The area of ​​the magnetic target area is not less than the magnetic pole area of ​​the electromagnet. And / or, the magnetic controller (13) includes a magnetic element and a telescopic drive element, the telescopic drive element being used to drive the magnetic element to move radially to approach or move away from the first receiving element (14) and the second receiving element (15). And / or, the magnetic controller (13) includes a detection element for confirming whether the first receiving element (14) and the second receiving element (15) are successfully attracted.

6. The multi-cavity, magnetically abutting, fully automatic lid-opening device for a complete machine according to claim 1 or 5, characterized in that, The magnetic controller (13) includes: The connecting plate (13a) is connected to the rotary drive mechanism (12); Two magnetic attractors (13b) are spaced apart on the connecting plate (13a), one of the magnetic attractors (13b) is used to attract the first receiving member (14), and the other magnetic attractor (13b) is used to attract the second receiving member (15). The magnetic controller (13) can simultaneously control the first receiving member (14) and the second receiving member (15) through the two magnetic suction members (13b) to achieve rapid displacement.

7. The multi-cavity magnetic suction-avoidance type full-platform automatic lid opening device for complete machines according to claim 6, characterized in that, The magnetic controller (13) also includes: The central gear (13c) is rotatably mounted on the connecting plate (13a); A first rack (13d) is disposed on one side of the central gear (13c) and meshes with the central gear (13c), and one of the magnetic suction elements (13b) is disposed on the first rack (13d); The second rack (13e) is located on the other side of the central gear (13c) and also meshes with the central gear (13c), wherein another magnetic member (13b) is located on the second rack (13e); The first rack (13d) and the second rack (13e) are arranged symmetrically at the center; This causes the central gear (13c) to rotate, the first rack (13d) and the second rack (13e) to move toward each other, and the two magnetic attractors (13b) to move closer to each other; This causes the central gear (13c) to rotate in the opposite direction, the first rack (13d) and the second rack (13e) to move in opposite directions, and the two magnetic attractors (13b) to move away from each other.

8. The multi-cavity magnetic suction-avoidance type full-platform automatic lid opening device for complete machines according to claim 1, characterized in that, The magnetic controller (13) includes a magnetic suction component and a telescopic drive component. The magnetic suction component is used to attract the first receiving component (14) and the second receiving component (15) in the air. The output end of the telescopic drive component is provided with a baffle (16). When the cavity cover of the working cavity (2) is lifted, the telescopic drive can drive the baffle (16) to move above the cavity cover, thereby preventing the cavity cover from tilting.

9. The multi-cavity magnetic suction-avoidance type automatic lid opening device for a full-platform machine according to claim 1, characterized in that, The lower surface of the support platform (11) is provided with an indented annular guide (11a), which is used for the first receiving member (14) and the second receiving member (15) to slide to achieve rotational displacement; The support platform (11) is made of stainless steel; The cross-section of the annular guide (11a) is T-shaped, and the annular guide (11a) is a T-shaped groove. The first receiving member (14) and the second receiving member (15) are used to connect the ends of the annular guide (11a) in a T-shape. The T-shaped groove is used to engage with the T-shaped connecting parts of the first receiving member (14) and the second receiving member (15). A ball bearing is provided between the T-shaped groove and the T-shaped connecting part. The ball bearing can reduce sliding friction, avoid friction loss affecting the guiding accuracy, and also prevent the first receiving part (14) and the second receiving part (15) from radial movement, so as to ensure the coaxiality of the two during the rotation displacement process.

10. The multi-cavity magnetic suction-avoidance type full-platform automatic lid opening device for complete machines according to claim 1, characterized in that, The support platform (11) is provided with a hook on the bottom surface facing the transfer platform (1), and the hook is capable of hooking the cover plate of the transfer platform (1); When it is necessary to clean the interior of the transfer platform (1) or repair the parts, the hook is engaged with the lifting ring on the cover of the transfer platform (1), and the lifting drive mechanism can be used to open the cover of the transfer platform (1).

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