Front opening unified pod mechanical unit device for a semiconductor process tool

Abstract

The application relates to the technical field of semiconductor process equipment, and discloses a front opening unified pod (FOUP) mechanical unit device of semiconductor process equipment, which comprises an opening door unit, the opening door unit comprises an outer frame and a fourth air exhaust port connected to the outer frame, one side of the outer frame is connected with a fifth flexible sealing piece, the other end of the fifth flexible sealing piece is connected with an inner frame, one end of the inner frame is connected with a first guide shaft and is slidingly installed on the outer frame, the other end of the inner frame is connected with a frame driving mechanism and is fixedly installed on the outer frame, the inner frame is internally connected with a sixth flexible sealing piece, and the other end of the sixth flexible sealing piece is connected with an unlocking plate; the problem that particles generated in the working process of the front opening unified pod (FOUP) mechanical unit in the prior art cannot be effectively controlled and contaminate the inner cavity of the FOUP and a process chamber is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor process equipment, in particular to a front opening interface mechanical unit device of semiconductor process equipment. BACKGROUND

[0002] The front opening interface mechanical unit (FIMS) is an important part of the transmission system of semiconductor process equipment and vertical heat treatment equipment. At present, on the 11-inch semiconductor production line, the front opening wafer box (FOUP) is widely used as a container for wafer transmission and temporary storage. The FIMS can open the FOUP, so that the wafer can be transmitted between the FOUP and the process chamber of the semiconductor process equipment (usually a vertical furnace) under clean environment control.

[0003] With the development of semiconductor process, the cleanliness requirement inside the process equipment is getting higher and higher. The cleanliness of the internal environment of the process equipment is one of the core elements that determines the performance, yield and reliability of the chip. Since chip manufacturing involves nanometer precision processes, any small particle contaminants can cause chip yield to decrease, performance to decrease, and even to be scrapped.

[0004] The particle control of the FIMS in the prior art is difficult to meet the increasingly high cleanliness requirement of the process equipment. How to effectively reduce the particle pollution of the FIMS is a problem that needs to be solved in the semiconductor industry.

[0005] The FIMS needs to fix, open and close the FOUP during work to ensure that the wafer is as clean as possible during transmission between the FOUP and the process chamber. The interior of the FOUP and the process chamber are usually considered clean. In the prior art or products, the FIMS contains cylinders, linear guides, linear bearings and other moving parts. Through the combined movement of these moving parts and mechanical structural parts, the FIMS realizes the functions of unlocking, opening, horizontal movement and sealing of the FOUP. These moving parts inevitably generate small particles due to friction during movement, and gradually disperse into the surrounding gas environment.

[0006] When the FIMS unlocks and opens the FOUP, the gas environment containing many particles in the FIMS will be connected with the interior of the FOUP. This will cause the particles in the gas environment of the FIMS to diffuse into the FOUP, causing particle pollution of the wafer. When the FIMS completes the opening and unlocking action and is ready to move horizontally, the FIMS cavity and the partition plate need to be separated by a certain distance. At this time, the gas environment containing many particles will also be connected with the process chamber of the process equipment, causing the particles to diffuse into the process chamber and again causing particle pollution of the wafer. SUMMARY

[0007] To solve the problem that the particles generated in the working process of the front opening interface mechanical unit in the prior art are difficult to be effectively controlled and pollute the inner cavity of the FOUP and the process chamber, the application provides a front opening interface mechanical unit device of a semiconductor process equipment.

[0008] The front opening interface mechanical unit device of the semiconductor process equipment comprises a door opening unit, the door opening unit comprises an outer frame and a fifth flexible sealing piece connected to one side of the outer frame, and the other end of the fifth flexible sealing piece is connected with an inner frame, one end of the inner frame is connected with a first guide shaft and is slidingly installed on the outer frame, and the other end of the inner frame is connected with a frame driving mechanism and is fixedly installed on the outer frame, the inside of the inner frame is connected with a sixth flexible sealing piece, and the other end of the sixth flexible sealing piece is connected with a lock opening plate.

[0009] As a preferred scheme of the application, the full-sealed horizontal movement driving unit comprises a driving base and a driving connecting plate connected to the driving base, and the inside of the driving base is provided with a horizontal movement guide mechanism, the inside of the driving base is installed with a horizontal movement driving mechanism, and the horizontal movement driving mechanism is fixedly connected with the driving connecting plate, one side of the driving connecting plate is connected with a first flexible sealing piece, and the other side of the driving connecting plate is fixedly connected with a second flexible sealing piece.

[0010] As a preferred scheme of the application, the full-sealed horizontal movement guide unit comprises a guide base and a guide connecting plate connected to the guide base, and the inside of the guide base is provided with an auxiliary guide mechanism, one end of the guide connecting plate is fixedly connected with a third flexible sealing piece, and the other end of the guide connecting plate is fixedly connected with a fourth flexible sealing piece.

[0011] As a preferred scheme of the application, the fourth air outlet is fixedly arranged on the outer frame, and the inside of the outer frame is connected with the outside space.

[0012] As a preferred scheme of the application, the fifth flexible sealing piece is arranged on both upper and lower sides of the inner frame, and the outer frame, the inner frame and the fifth flexible sealing piece cooperate to form an inner cavity of a door opening mechanism.

[0013] As a preferred scheme of the application, the sixth flexible sealing piece is arranged on both upper and lower sides of the lock opening plate, and the sixth flexible sealing piece, the inner frame and the lock opening plate cooperate to form a sealed space.

[0014] As a preferred scheme of the application, one end of the driving base is connected with a first air outlet, and the inside of the driving base is connected with the outside space.

[0015] One end of the guide base is connected with a second air outlet, and the inside of the guide base is communicated with the outside space.

[0016] As a preferred scheme of the present application, the middle region of the inner frame is provided with a ventilation hole to ensure the air communication between the left and right sides of the inner frame.

[0017] As a preferred scheme of the present application, the two ends of the driving connecting plate are respectively fixedly connected with a first flexible sealing member and a second flexible sealing member, and the other ends of the first and second flexible sealing members are fixedly connected on the driving base.

[0018] The two ends of the guide connecting plate are respectively fixedly connected with a third flexible sealing member and a fourth flexible sealing member, and the other ends of the third and fourth flexible sealing members are fixedly connected on the guide base.

[0019] As a preferred scheme of the present application, a substrate unit is further included, the substrate unit includes a mounting substrate, the mounting substrate is provided with a middle opening, one side of the middle opening is provided with a nitrogen filling port, and a third air outlet is arranged on the other side of the middle opening.

[0020] The present application has the following beneficial effects:

[0021] 1. The fifth flexible sealing member and the sixth flexible sealing member arranged on the door opening unit can be stretched and contracted along the movement direction, and can not hinder the movement of the movement components connected at the two ends while playing a sealing role. Thus, a sealing space composed of the cover plate, the side frame, the inner frame, the fifth flexible sealing member, the unlocking plate and the sixth flexible sealing member can be formed in the door opening unit, so that the particles generated by the internal movement components are basically not diffused to the outside.

[0022] 2. The fourth air outlet is arranged on the door opening unit, the door opening mechanism cavity in the door opening unit is subjected to air extraction, the internal particles are extracted away, the internal particle concentration is reduced, and the particle pollution of the door opening unit to the FOUP cavity and the process chamber is further reduced.

[0023] 3. The full-sealed horizontal movement driving unit is arranged, and the internal cavity becomes a closed space due to the existence of the first flexible sealing member and the second flexible sealing member, and the horizontal movement of the mechanism is not affected. Thus, the particles generated in the movement process in the internal cavity are basically not diffused to the outside of the internal cavity; meanwhile, the first air outlet is arranged on the full-sealed horizontal movement driving unit to extract air from the internal cavity, the internal particles are extracted away, and the particle pollution of the full-sealed horizontal movement driving unit to the process chamber is further reduced.

[0024] 4、Through the setting of the full-sealed horizontal moving guide unit, the inner cavity becomes a closed space due to the existence of the third flexible sealing member and the fourth flexible sealing member, and does not affect the horizontal moving motion of the mechanism, so that the particles generated in the moving process in the inner cavity basically cannot spread to the outside of the inner cavity; meanwhile, the second air exhaust port can exhaust air to the inner cavity, and the internal particles are exhausted, further reducing the pollution of the particles generated in the full-sealed horizontal moving guide unit to the process chamber.

[0025] 5、In the critical state of the device, such as the transition position in the moving process, through the continuous sealing of the flexible sealing member and the continuous action of the air exhaust port, the internal cleanliness can still be effectively maintained, and the particle leakage is prevented. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the present application, the drawings needed in the following specific embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained according to these drawings without creative labor for those skilled in the art.

[0027] Figure 1 : The overall structure schematic diagram in the present application;

[0028] Figure 2 : The structure schematic diagram of the door opening unit moving opening in the present application;

[0029] Figure 3 : The overall cross-sectional structure schematic diagram in the present application;

[0030] Figure 4 : The cross-sectional structure schematic diagram of the FOUP unit in the present application;

[0031] Figure 5 : The cross-sectional structure schematic diagram of the door opening unit in the present application;

[0032] Figure 6 : The structure schematic diagram of the full-sealed horizontal moving drive unit in the present application;

[0033] Figure 7 : The structure schematic diagram of the full-sealed horizontal moving guide unit in the present application;

[0034] Figure 8 : The cross-sectional structure schematic diagram of the first moving stage of the door opening unit in the present application;

[0035] Figure 9 : The cross-sectional structure schematic diagram of the second moving stage of the door opening unit in the present application;

[0036] Figure 10 : The cross-sectional structure schematic diagram of the third moving stage of the door opening unit in the present application;

[0037] Figure 11 Fig. 4 is a schematic view of a cross-sectional structure of a fourth movement stage of the door opening unit in the present application.

[0038] Reference signs are as follows:

[0039] 10, FOUP unit; 11, FOUP housing; 12, FOUP inner cavity; 13, FOUP door plate;

[0040] 20, door opening unit; 21, outer frame; 22, fourth air outlet; 23, inner frame; 24, first guide shaft; 25, frame driving mechanism; 26, fifth flexible sealing member; 27, lock opening plate; 28, sixth flexible sealing member; 29, second guide shaft; 210, lock opening driving mechanism; 211, lock opening and closing component; 212, door opening mechanism inner cavity;

[0041] 30, fully-sealed horizontal movement driving unit; 31, driving base; 32, driving connecting plate; 33, horizontal movement guide mechanism; 34, horizontal movement driving mechanism; 35, first flexible sealing member; 36, second flexible sealing member; 37, first air outlet;

[0042] 40, fully-sealed horizontal movement guide unit; 41, guide base; 42, guide connecting plate; 43, auxiliary guide mechanism; 44, third flexible sealing member; 45, fourth flexible sealing member; 46, second air outlet; 50, substrate unit; 51, mounting substrate; 52, middle opening; 53, nitrogen gas filling port; 54, third air outlet. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0044] Embodiment 1

[0045] Referring to Figure 1 - Figure 5 As shown in Fig. 1, the first embodiment of the present application provides a front opening unified pod mechanical unit device of a semiconductor process equipment, which comprises a FOUP unit 10, a door opening unit 20, a fully-sealed horizontal movement driving unit 30, a fully-sealed horizontal movement guide unit 40 and a substrate unit 50.

[0046] The FOUP unit 10 comprises a FOUP shell 11 and a FOUP inner cavity 12 formed in the FOUP shell 11, and the FOUP inner cavity 12 is internally provided with a FOUP door plate 13; the substrate unit 50 comprises a mounting substrate 51, and the mounting substrate 51 is provided with a middle opening 52, a nitrogen filling port 53 is formed on one side of the middle opening 52, and a third air outlet 54 is formed on the other side of the middle opening 52;

[0047] The door opening unit 20 comprises an outer frame 21 and a fourth air outlet 22 connected to the outer frame 21, one side of the outer frame 21 is connected with a fifth flexible sealing piece 26, the other end of the fifth flexible sealing piece 26 is connected with an inner frame 23, one end of the inner frame 23 is connected with a first guide shaft 24 and is slidingly installed on the outer frame 21, the other end of the inner frame 23 is connected with a frame driving mechanism 25 and is fixedly installed on the outer frame 21, the inner frame 23 is internally connected with a sixth flexible sealing piece 28, and the other end of the sixth flexible sealing piece 28 is connected with a lock releasing plate 27;

[0048] The second guide shaft 29 is fixedly connected to the lock releasing plate 27 and is slidingly connected to the inner frame 23, and the second guide shaft 29 is arranged on both sides of the lock releasing plate 27; a lock releasing and locking component 211 is also fixedly connected to the middle position of the lock releasing plate 27, the lock releasing and locking component 211 is connected with the FOUP door plate 13, a lock releasing driving mechanism 210 is installed on the inner frame 23, one end of the lock releasing driving mechanism 210 is fixedly connected to the lock releasing plate 27, the lock releasing driving mechanism 210 can drive the lock releasing plate 27 to move, thereby driving the lock releasing and locking component 211 to move and cooperating with the FOUP door plate 13.

[0049] The upper and lower ends of the outer frame 21 are fixed to the fully-sealed horizontal movement driving unit 30 and the fully-sealed horizontal movement guide unit 40 by bolts, thereby integrally installing the door opening unit 20 on the mounting substrate 51 and on one side of the middle opening 52; in addition to the bolt connection, other existing technologies can also be used to fix the outer frame 21;

[0050] The inner frame 23 is fixedly installed on one side of the outer frame 21 and can move on one side of the outer frame 21, the lock releasing plate 27 is installed in the inner frame 23 and can move in the inner frame 23, and the door opening mechanism inner cavity 212 is formed between the outer frame 21 and the inner frame 23.

[0051] The fourth air outlet 22 is fixedly connected to one side of the outer frame 21, and the door opening mechanism inner cavity 212 is communicated with the outside.

[0052] The air vent is arranged in the middle region of the inner frame 23 to ensure air communication between the left and right sides of the inner frame 23. The two ends of the fifth flexible sealing member 26 are fixedly connected to the outer frame 21 and the inner frame 23, respectively. The frame driving mechanism 25 is fixedly connected to the outer frame 21 by bolts or other connecting methods. The frame driving mechanism 25 is fixedly connected to the inner frame 23 by bolts or other connecting methods. On the other side of the inner frame 23, the first guide shaft 24 is fixedly connected by bolts or other connecting methods. The first guide shaft 24 is slidingly connected to the outer frame 21. The outer frame 21 and the inner frame 23 are fixedly connected together through the above structures.

[0053] The two ends of the sixth flexible sealing member 28 are fixedly connected to the inner frame 23 and the unlocking plate 27, respectively. The second guide shaft 29 is symmetrically arranged on the unlocking plate 27 and is limitingly and slidingly connected to the inner frame 23.

[0054] The second guide shaft 29 is fixedly connected to the unlocking plate 27 by bolts or other connecting methods. The unlocking driving mechanism 210 is arranged on the inner frame 23. One end of the unlocking driving mechanism 210 is fixedly connected to the unlocking plate 27 by bolts or other connecting methods. The unlocking driving mechanism 210 can drive the unlocking plate 27 to move. The switch lock component 211 is fixedly arranged on the unlocking plate 27. A connecting head for fixedly connecting with the FOUP door plate 13 is arranged at one end of the switch lock component 211. When the switch lock component 211 moves and contacts with the FOUP door plate 13, the switch lock component 211 can be connected with the FOUP door plate 13. Then, the movement of the switch lock component 211 can drive the FOUP door plate 13 to move synchronously.

[0055] Embodiment 2

[0056] Referring to Figure 1 - Figure 2 and Figure 6 - Figure 7 As shown in FIG. 2, this embodiment is a second embodiment of the present application. Based on the first embodiment, the full-sealing horizontal movement driving unit 30 further comprises a driving base 31 and a driving connecting plate 32 connected to the driving base 31. The inside of the driving base 31 is provided with a horizontal movement guide mechanism 33. The inside of the driving base 31 is provided with a horizontal movement driving mechanism 34. The horizontal movement driving mechanism 34 is fixedly connected to the driving connecting plate 32. One side of the driving connecting plate 32 is connected with a first flexible sealing member 35. The other side of the driving connecting plate 32 is fixedly connected with a second flexible sealing member 36. One end of the driving base 31 is connected with a first air outlet 37.

[0057] The two ends of the driving connecting plate 32 are fixedly connected with the first flexible sealing member 35 and the second flexible sealing member 36 respectively, and the other ends of the first flexible sealing member 35 and the second flexible sealing member 36 are fixedly connected on the driving base 31; the driving connecting plate 32 is fixedly connected on the transverse driving mechanism 34 by means of bolts or other connecting modes, and the driving connecting plate 32 can be driven to move by the movement of the transverse driving mechanism 34, and the transverse driving mechanism 34 moves in the transverse direction in the transverse guiding mechanism 33, and the movement of the transverse driving mechanism 34 is limited by the transverse guiding mechanism 33; and one side of the driving connecting plate 32 is fixedly connected on the outer frame 21 by means of bolts or other connecting modes, and the door opening unit 20 is installed on the full-sealed transverse driving unit 30, and the door opening unit 20 can be driven to move by the movement of the full-sealed transverse driving unit 30.

[0058] The driving base 31, the driving connecting plate 32, the first flexible sealing member 35 and the second flexible sealing member 36 are connected to form a closed space in the inside of the driving base 31, and the sealing effect of the space can be maintained when the driving connecting plate 32 moves due to the first flexible sealing member 35 and the second flexible sealing member 36.

[0059] The full-sealed transverse guiding unit 40 comprises a guiding base 41 and a guiding connecting plate 42 connected on the guiding base 41, and the inside of the guiding base 41 is provided with an auxiliary guiding mechanism 43, one end of the guiding connecting plate 42 is fixedly connected with a third flexible sealing member 44, and the other end of the guiding connecting plate 42 is fixedly connected with a fourth flexible sealing member 45, and one end of the guiding base 41 is connected with a second air outlet 46.

[0060] The two ends of the guiding connecting plate 42 are fixedly connected with the third flexible sealing member 44 and the fourth flexible sealing member 45 respectively, and the other ends of the third flexible sealing member 44 and the fourth flexible sealing member 45 are fixedly connected on the guiding base 41; the guiding connecting plate 42 is fixed on the auxiliary guiding mechanism 43 by means of bolts or other connecting modes, and the movement of the guiding connecting plate 42 is limited by the movement of the auxiliary guiding mechanism 43, and one side of the guiding connecting plate 42 is fixedly connected with the outer frame 21 by means of bolts or other connecting modes, and the movement of the door opening unit 20 can be driven more stably by the connection between the full-sealed transverse driving unit 30 and the other side of the outer frame 21; there is also a closed space in the inside of the guiding base 41, and the movement of the guiding connecting plate 42 will not affect the sealing effect of the space by the third flexible sealing member 44 and the fourth flexible sealing member 45.

[0061] Example 3

[0062] Reference Figure 3 and Figure 8 -Figure 11 As shown in Fig. 3, the frame driving mechanism 25 pushes the inner frame 23 to move in the direction opposite to the unlocking direction until the inner frame 23 is attached to the mounting base plate 51, at which time the middle opening 52 forms a closed space. At this time, the nitrogen filling port 53 fills high-purity nitrogen, and the third exhaust port 54 exhausts to remove the particles existing in the closed space of the middle opening 52, at which time the middle opening 52 can be regarded as a clean area. Figure 8 As shown in Fig. 3, the frame driving mechanism 25 pushes the inner frame 23 to move in the direction opposite to the unlocking direction until the inner frame 23 is attached to the mounting base plate 51, at which time the middle opening 52 forms a closed space. At this time, the nitrogen filling port 53 fills high-purity nitrogen, and the third exhaust port 54 exhausts to remove the particles existing in the closed space of the middle opening 52, at which time the middle opening 52 can be regarded as a clean area.

[0063] The specific setting position of the nitrogen filling port 53 and the third exhaust port 54 on the mounting base plate 51 is only one example, and according to the design, they can also be arranged on other parts to fill high-purity nitrogen and remove particles in the middle opening 52 and the inner cavity 12 of the FOUP.

[0064] The door opening mechanism inner cavity 212 is a closed space surrounded by the outer frame 21, the inner frame 23, the fifth flexible sealing member 26, the unlocking plate 27, and the sixth flexible sealing member 28. The particles in the door opening mechanism inner cavity 212 cannot spread to the outside. At the same time, the fourth exhaust port 22 exhausts the door opening mechanism inner cavity 212 to remove the tiny particles generated by the relative motion and friction of various driving components and guide components, at which time the door opening mechanism inner cavity 212 can be regarded as a clean area, greatly reducing the contamination of the wafer by the particles in the door opening mechanism inner cavity 212.

[0065] The fifth flexible sealing member 26 and the sixth flexible sealing member 28 are flexible members that can stretch and contract along the motion direction, and at the same time, they will not hinder the motion of the motion components connected at both ends. The flexible member is, for example, an organ seal cover or other functional parts.

[0066] The fourth exhaust port 22 is arranged on the outer frame 21, which is only one example. According to the design, it can also be arranged on other parts to remove particles in the door opening mechanism inner cavity 212.

[0067] As shown in Fig. 3, the frame driving mechanism 25 pushes the inner frame 23 to move in the direction opposite to the unlocking direction until the inner frame 23 is attached to the mounting base plate 51, at which time the middle opening 52 forms a closed space. At this time, the nitrogen filling port 53 fills high-purity nitrogen, and the third exhaust port 54 exhausts to remove the particles existing in the closed space of the middle opening 52, at which time the middle opening 52 can be regarded as a clean area. Figure 9 As shown in Fig. 3, the frame driving mechanism 25 pushes the inner frame 23 to move in the direction opposite to the unlocking direction until the inner frame 23 is attached to the mounting base plate 51, at which time the middle opening 52 forms a closed space. At this time, the nitrogen filling port 53 fills high-purity nitrogen, and the third exhaust port 54 exhausts to remove the particles existing in the closed space of the middle opening 52, at which time the middle opening 52 can be regarded as a clean area.

[0068] As shown in Fig. 3, the frame driving mechanism 25 pushes the inner frame 23 to move in the direction opposite to the unlocking direction until the inner frame 23 is attached to the mounting base plate 51, at which time the middle opening 52 forms a closed space. At this time, the nitrogen filling port 53 fills high-purity nitrogen, and the third exhaust port 54 exhausts to remove the particles existing in the closed space of the middle opening 52, at which time the middle opening 52 can be regarded as a clean area. Figure 10As shown, the unlocking driving mechanism 210 pulls the unlocking plate 27 to move along the unlocking direction, and the FOUP door plate 13 is pulled open by the unlocking plate 27. At this time, the middle opening 52 is communicated with the FOUP inner cavity 12. Since the middle opening 52 has been considered as a clean area after the nitrogen filling and gas extraction actions, it will not cause particle pollution to the FOUP inner cavity 12.

[0069] As shown, the unlocking driving mechanism 210 continues to pull the unlocking plate 27 to move along the unlocking direction until the switch locking component 211 is attached to the inner frame 23, and the FOUP door plate 13 is completely opened. At this time, the high-purity nitrogen gas is filled by the nitrogen filling port 53, and the third gas extraction port 54 extracts the particles that may exist in the middle opening 52 and the FOUP inner cavity 12, so that the FOUP inner cavity 12 is filled with high-purity nitrogen gas. At this time, the area formed by the FOUP inner cavity 12 and the middle opening 52 can be considered as a clean area. Figure 11 The inner cavity of the fully-sealed horizontal movement driving unit 30 is a closed space, and the particles generated in the movement of the horizontal movement guiding mechanism 33 and the horizontal movement driving mechanism 34 will not spread outside the inner cavity. At the same time, the first gas extraction port 37 extracts the particles in the inner cavity, which further reduces the particle pollution to the process chamber caused by the fully-sealed horizontal movement driving unit 30.

[0070] The function of the fully-sealed horizontal movement driving unit 30 is to drive the door opening unit 20 to move horizontally, so that the FOUP door plate 13 is completely opened to provide a space for the wafer transfer. In this embodiment, the horizontal movement guiding mechanism 33 is provided. If the horizontal movement driving mechanism 34 also has the guiding function, the horizontal movement driving mechanism 34 can be omitted.

[0071] The inner cavity of the fully-sealed horizontal movement guiding unit 40 is a closed space, and the particles generated in the movement of the auxiliary guiding mechanism 43 will not spread outside the inner cavity. At the same time, the second gas extraction port 46 extracts the particles in the inner cavity, which further reduces the particle pollution to the process chamber caused by the fully-sealed horizontal movement guiding unit 40.

[0072] The fully-sealed horizontal movement guiding unit 40 drags the door opening unit 20 to move along the horizontal direction. At this time, the FOUP door plate 13 is completely opened, and the FOUP inner cavity 12 is communicated with the process chamber. The wafer can be transferred to the process chamber. The process chamber is a clean area. This process will not cause particle pollution to the wafer.

[0073] The horizontal direction of the door opening unit 20 in this embodiment is the horizontal direction. When the door opening unit 20 moves horizontally in other directions, it can still provide a space for the wafer to be transferred from the FOUP inner cavity 12 to the process chamber. When the door opening unit 20 moves horizontally in other directions, it still belongs to the protection scope of this embodiment.

[0074] ​

[0075] Finally, the closing process is the reverse of the above described process, with the same seal and particle control, and no particle contamination of the wafer or process chamber.

[0076] The preferred embodiments of the application disclosed above are only to help explain the principles of the present application. The preferred embodiments are not intended to limit the present application to specific embodiments. Obviously, many modifications and variations are possible in light of the above teachings. The preferred embodiments are selected and described so that one skilled in the art can best understand and utilize the present application. It is intended that the scope of the present application be limited only by the appended claims and their equivalents.

Claims

1. A front opening unified pod mechanical unit device of a semiconductor process equipment, characterized by: Including open door unit (20), the open door unit (20) includes outer frame (21) and the fifth flexible seal (26) connected in the outer frame (21) one side, and the other end of fifth flexible seal (26) is connected with inner frame (23), one end of inner frame (23) is connected with first guide shaft (24), and is installed on the sliding of outer frame (21), and the other end of inner frame (23) is connected with frame drive mechanism (25), and is fixedly installed on outer frame (21), the inside of inner frame (23) is connected with the sixth flexible seal (28), and the other end of sixth flexible seal (28) is connected with lock plate (27); Also including full sealing horizontal translation drive unit (30), the full sealing horizontal translation drive unit (30) includes drive base (31) and drive connecting plate (32) connected on drive base (31), and the inside of drive base (31) is provided with horizontal translation guide mechanism (33), the inside of drive base (31) is installed with horizontal translation drive mechanism (34), and horizontal translation drive mechanism (34) is fixedly connected with drive connecting plate (32), one side of drive connecting plate (32) is connected with first flexible seal (35), and the other side of drive connecting plate (32) is fixedly connected with second flexible seal (36); Also including full sealing horizontal translation guide unit (40), the full sealing horizontal translation guide unit (40) includes guide base (41) and guide connecting plate (42) connected on guide base (41), and the inside of guide base (41) is provided with auxiliary guide mechanism (43), one end of guide connecting plate (42) is fixedly connected with third flexible seal (44), and the other end of guide connecting plate (42) is fixedly connected with fourth flexible seal (45); The fifth flexible seal (26) is provided on the upper and lower sides of the inner frame (23), and the outer frame (21) is cooperated with the inner frame (23) and the fifth flexible seal (26) to form an inner cavity (212) of the door opening mechanism. The sixth flexible seal (28) is provided on the upper and lower sides of the lock plate (27), and the sixth flexible seal (28) is cooperated with the inner frame (23) and the lock plate (27) to form a sealed space.

2. Front opening unified pod apparatus for semiconductor process equipment according to claim 1, characterized in that The fourth air outlet (22) is fixedly arranged on the outer frame (21) to connect the inside of the outer frame (21) with the outside space.

3. The front opening unified pore interface mechanical unit device of a semiconductor process apparatus according to Claim 1, characterized by: The first air outlet (37) is connected to one end of the drive base (31) to connect the inside of the drive base (31) with the outside space. The second air outlet (46) is connected to one end of the guide base (41) to connect the inside of the guide base (41) with the outside space.

4. The front opening unified pore interface mechanical unit device of a semiconductor process apparatus according to Claim 1, characterized by: The ventilation hole is arranged in the middle region of the inner frame (23) to ensure the air communication between the left and right sides of the inner frame (23).

5. The front opening unified pore interface mechanical unit device of a semiconductor process apparatus according to Claim 1, characterized by: The first flexible seal (35) and the second flexible seal (36) are fixedly connected to the both ends of the drive connecting plate (32), and the other ends of the first flexible seal (35) and the second flexible seal (36) are fixedly connected to the drive base (31). Two ends of the guide connecting plate (42) are fixedly connected with a third flexible sealing piece (44) and a fourth flexible sealing piece (45) respectively, and the other ends of the third flexible sealing piece (44) and the fourth flexible sealing piece (45) are fixedly connected on the guide base (41).

6. The front opening unified pore interface mechanical unit device of a semiconductor process apparatus according to Claim 1, characterized by: Further comprising a substrate unit (50), the substrate unit (50) comprises a mounting substrate (51), the mounting substrate (51) is provided with an intermediate opening (52), one side of the intermediate opening (52) is provided with a nitrogen filling port (53), and the other side of the intermediate opening (52) is provided with a third air outlet (54).

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