Multifunctional single-wire silicon carbide processing equipment

Abstract

The invention relates to the technical field of crystal bar machining equipment. Multifunctional single-line silicon carbide processing equipment comprises a base, a take-up and pay-off mechanism, a workpiece bonding rotary table and a cutting head mechanism are installed on the base, a horizontal sliding table used for driving the workpiece bonding rotary table to slide front and back is installed right in front of the cutting head mechanism, and the workpiece bonding rotary table is installed on the horizontal sliding table; the workpiece bonding rotary table comprises a mounting base which is detachably mounted above the horizontal sliding table; a swing mechanism used for driving a to-be-machined workpiece to swing with the front-back direction as the rotation center line direction is installed above the installation base, a rotating mechanism used for driving the to-be-machined workpiece to rotate in the circumferential direction is installed on the swing mechanism, and the to-be-machined workpiece is installed above the rotating mechanism. The rotating center line of the rotating mechanism is perpendicular to the rotating center line of the swinging mechanism. Multi-dimensional adjustment of front-back sliding, swinging and circumferential rotation of a workpiece is conveniently achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of crystal bar processing equipment, in particular to a cutting-off machine. BACKGROUND

[0002] Silicon carbide, as an important raw material of the third generation of semiconductors, has characteristics such as high voltage resistance, high frequency resistance, high temperature resistance and excellent electrical conductivity, which can meet the needs of high power and high frequency devices. Various advantages show that the demand for silicon carbide in the future semiconductor field will continue to grow. However, silicon carbide is difficult to process due to its high hardness and brittleness. At present, in the field of semiconductors, sapphire and high-hardness and brittle materials, the processing equipment mainly includes cutting-off machines, slicing machines and the like. With the development of the semiconductor industry, the demand for processing capacity and efficiency of the equipment is increasing, but the traditional equipment has single processing specification and low processing efficiency, which cannot meet the market demand.

[0003] Therefore, multifunctional and multi-compatible processing equipment must be the mainstream equipment in the future related industry. SUMMARY

[0004] In view of the problems existing in the prior art, the present application provides a multifunctional single-wire silicon carbide processing equipment to solve at least one of the above technical problems.

[0005] In order to achieve the above purpose, the present application provides a multifunctional single-wire silicon carbide processing equipment, which comprises a base, the base is provided with a take-up and pay-off mechanism, a workpiece bonding turntable, a cutting head mechanism and a cutting fluid mechanism, characterized in that it comprises a cutting head mechanism, the cutting mechanism comprises a lifting assembly for driving the main cutting wheel to lift, two cutting heads are installed on the sliding frame of the lifting assembly and arranged left and right, and a main cutting wheel is installed on the cutting head;

[0006] The take-up and pay-off mechanism is installed on the left and right sides of the cutting head mechanism, and the cutting line conducted by the take-up and pay-off mechanism is wound on the main cutting wheel;

[0007] A horizontal sliding table for driving the workpiece bonding turntable to slide forward and backward is installed in front of the cutting head mechanism, and the workpiece bonding turntable is installed on the horizontal sliding table;

[0008] The workpiece bonding turntable comprises a mounting base, and the mounting base is detachably mounted above the horizontal sliding table;

[0009] A swing mechanism for swinging the workpiece to be processed with the front and back direction as the center line direction is installed above the mounting base, a rotating mechanism for rotating the workpiece to be processed in the circumferential direction is installed on the swing mechanism, and the workpiece to be processed is installed above the rotating mechanism;

[0010] The rotation center line of the rotating mechanism is perpendicular to the rotation center line of the swinging mechanism;

[0011] The cutting fluid mechanism comprises a box for storing cutting fluid and a spraying assembly, the box is located at the rear of the cutting mechanism, the box is connected to the spraying assembly through a pipeline, and the spraying opening of the spraying assembly faces the cutting line of the workpiece to be processed.

[0012] The workpiece bonding turntable structure is optimized, so that the front and rear sliding, swinging and circumferential rotation of the workpiece are adjusted in multiple dimensions.

[0013] Further preferably, the swinging mechanism comprises support seats symmetrically arranged in front and back, and an arc guide rail is installed on the support seat;

[0014] The swinging mechanism further comprises a swinging frame, and an arc slider sliding in the arc guide rail is installed on the swinging frame;

[0015] The swinging mechanism further comprises a first driving motor, a gear is installed on the power output shaft of the first driving motor, an arc rack is installed on the swinging frame, and the gear is engaged with the arc rack.

[0016] Further preferably, the swinging frame is a U-shaped frame with an opening facing the front, and the U-shaped frame comprises a top plate and two side plates arranged in front and back;

[0017] The inner wall of the side plate is provided with the arc slider;

[0018] The outer side of the support seat is provided with the arc guide rail, and the support seat is located on the inner side of the two side plates.

[0019] Further preferably, the rotating mechanism comprises a rotating shaft mounting seat, a bearing sleeve, a rotating shaft, a locking nut, a first bearing, a second bearing, a spacer sleeve, an end cover, an internal gear and a connecting plate;

[0020] The connecting plate, the internal gear, the bearing sleeve, the first bearing, the spacer sleeve, the second bearing and the locking nut are sequentially sleeved on the rotating shaft;

[0021] The locking nut abuts against the inner ring of the second bearing;

[0022] The bearing sleeve is threadedly connected with the end cover, and the end cover abuts against the outer ring of the second bearing;

[0023] The spacer sleeve is clamped between the outer rings of the first bearing and the second bearing;

[0024] The bearing sleeve is arranged on the rotating shaft mounting seat in an overlapping manner;

[0025] The rotating shaft mounting seat is mounted on the swing frame of the swing mechanism;

[0026] The connecting plate is connected to the rotating shaft, and the connecting plate is provided with a bonding die for bonding workpieces.

[0027] Further preferably, the rotating mechanism further comprises an outer gear and an inner gear arranged in meshing relation with each other;

[0028] The outer wall of the outer gear and the inner wall of the inner gear are provided with meshing teeth in meshing relation with each other;

[0029] The side wall of the rotating shaft mounting seat is provided with a rotating motor mounting seat, and the rotating motor mounting seat is provided with a rotating motor, and the power output shaft of the rotating motor is in transmission connection with the outer gear;

[0030] The inner gear is mounted on the connecting plate.

[0031] Further preferably, an adjusting pad is arranged between the side wall of the rotating shaft mounting seat and the rotating motor mounting seat.

[0032] By adjusting the adjusting pad, the center distance of the inner gear and the outer gear is adjusted to achieve stable operation of the gear meshing.

[0033] Further preferably, the lifting assembly comprises a gantry, and the gantry is mounted in the center of the base;

[0034] The left and right sides of the gantry are provided with guide rails for longitudinally slidingly connecting sliding frames.

[0035] Further preferably, the sliding frame is provided with a distance adjusting mechanism for adjusting the distance between the two main cutting wheels. The center distance of the two main cutting wheels can be adjusted according to actual needs to meet the processing requirements of 4-8 inches.

[0036] Further preferably, the winding and unwinding mechanism comprises an unwinding wheel and a winding wheel;

[0037] The unwinding wheel is mounted on the left side of the base through an unwinding wheel support, and the winding wheel is mounted on the right side of the base through a winding wheel support;

[0038] The diamond wire is released from the unwinding wheel, and the diamond wire first passes through the unwinding tension pulley on the unwinding balance pendulum device, and then passes through the wire guide pulley on the tension control device;

[0039] Then, the diamond wire is wound on the main cutting wheels through the three reversing wire guide pulleys of the side gantry column of the gantry, and the diamond wire is wound from one side main cutting wheel to the other side main cutting wheel;

[0040] Then the three reversing wire passing guide wheels on the gantry uprights on the other side of the gantry pass, then the wire passing guide wheels on the tension control device pass, then the wire collecting tension wire wheels on the wire collecting balance wheel device pass, and finally the single wire diamond wire loops back to the wire collecting wheel, and the single wire diamond wire thus reciprocates and high-speed circulates the wire collecting and releasing process.

[0041] Further preferably, the left and right sides of the gantry are respectively provided with the wire collecting and arranging device and the wire releasing and arranging device;

[0042] The wire collecting and arranging device is a front-rear horizontal sliding mechanism, and the horizontal sliding table of the wire collecting and arranging device is provided with a wire collecting balance wheel device;

[0043] The wire releasing and arranging device is a front-rear horizontal sliding mechanism, and the horizontal sliding table of the wire releasing and arranging device is provided with a wire releasing balance wheel device.

[0044] Compared with the prior art, the present application has the following beneficial effects:

[0045] The device can realize the switching of various motion modes of the workpiece, provide various process cutting forms, and can complete the functions of cutting, head and tail removal, and square cutting. Moreover, the device has high precision, stable operation, simple structure, convenient maintenance, low manufacturing cost, and greatly improved efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0046] Figure 1 Fig. 1 is a structural schematic diagram of a specific embodiment 1 of the present application;

[0047] Figure 2 Fig. 2 is a structural schematic diagram of another perspective view of the specific embodiment 1 of the present application;

[0048] Figure 3 Fig. 3 is a structural schematic diagram of a workpiece bonding turntable of the specific embodiment 1 of the present application;

[0049] Figure 4 Fig. 4 is a structural schematic diagram of a swing mechanism of the specific embodiment 1 of the present application;

[0050] Figure 5 Fig. 5 is a sectional view of a rotating mechanism of the specific embodiment 1 of the present application.

[0051] In the figure: 1 is the base, 2 is the gantry, 3 is the lifting assembly, 4 is the workpiece bonding turntable, 5 is the horizontal sliding table, 6 is the cutting head, 7 is the main cutting wheel, 8 is the wire guide wheel, 9 is the tension control device, 10 is the hanging device, 11 is the take-up wheel support, 12 is the take-up wheel, 13 is the pay-off wheel support, 14 is the pay-off wheel, 15 is the take-up wire arrangement device, 16 is the pay-off wire arrangement device, 17 is the take-up balance wheel device, 18 is the pay-off balance wheel device, 19 is the cutting fluid tank, 20 is the spraying assembly, 21 is the take-up tension pulley, 22 is the pay-off tension pulley;

[0052] 1 is a rotary mechanism, 2 is a rotary drive mechanism, 3 is a swing mechanism, 4 is a swing drive mechanism;

[0053] 411 is a rotary shaft mounting seat, 412 is a bearing sleeve, 413 is a rotary shaft, 414 is a locking nut, 415 is a second bearing, 416 is a spacer, 417 is an end cover; 418 is a first bearing;

[0054] 421 is an internal gear, 422 is a connecting plate, 425 is an external gear, 426 is a rotary motor mounting seat, 427 is a rotary motor, 428 is an adjustment pad, 429 is a speed reducer;

[0055] 431 is a swing frame, 432 is a circular arc guide rail, 433 is a support seat; 434 is a bottom plate;

[0056] 443 is a circular arc rack, 444 is a gear, 445 is a motor mounting seat, 446 is a first speed reducer, 447 is a first drive motor. DETAILED DESCRIPTION

[0057] The application will be further described below with reference to the accompanying drawings.

[0058] Reference Figures 1 to 5, specific embodiment 1: a multifunctional single-wire silicon carbide processing equipment, comprising a base 1, the base 1 is provided with a take-up and pay-off mechanism, a workpiece bonding turntable 4, a cutting head mechanism and a cutting fluid mechanism, the cutting head mechanism comprises a lifting assembly 3 for driving the main cutting wheel 7 to lift, the sliding frame of the lifting assembly 3 is provided with two left and right cutting heads 6, and the main cutting wheel 7 is installed on the cutting head 6; the left and right sides of the cutting head mechanism are provided with the take-up and pay-off mechanism, and the cutting wire conducted by the take-up and pay-off mechanism is wound on the main cutting wheel 7; a horizontal sliding table 5 for driving the workpiece bonding turntable 4 to slide forward and backward is installed in front of the cutting head mechanism, and the workpiece bonding turntable 4 is installed on the horizontal sliding table 5; the workpiece bonding turntable 4 comprises a mounting base, and the mounting base is detachably mounted above the horizontal sliding table 5; a swing mechanism for driving the workpiece to be processed to swing around the rotation center line direction in the forward and backward direction is installed above the mounting base, a rotating mechanism for driving the workpiece to be processed to rotate in the circumferential direction is installed on the swing mechanism, and the workpiece to be processed is installed above the rotating mechanism; the rotation center line of the rotating mechanism is perpendicular to the rotation center line of the swing mechanism; the cutting fluid mechanism comprises a box body 19 for storing cutting fluid and a spraying assembly 20, the box body 19 is located behind the cutting mechanism, the box body 19 is connected to the spraying assembly 20 through a pipeline, and the spraying port of the spraying assembly 20 faces the cutting wire cutting position of the workpiece to be processed. Through the optimization of the structure of the workpiece bonding turntable 4, the multidimensional adjustment of the forward and backward sliding, swinging and circumferential rotation of the workpiece is realized. Further, the direction and angle can be adjusted during slicing or cutting.

[0059] The direction of the spraying port of the spraying assembly 20 is adjustable. The spraying outlet of the spraying assembly 20 is connected with a flexible bending pipe, and the outlet of the bending pipe is the spraying outlet of the spraying assembly 20.

[0060] The swing mechanism comprises front and rear mirror image symmetrical support seats 433, and the support seats 433 are provided with circular arc guide rails 432; the swing mechanism further comprises a swing frame 431, and the swing frame 431 is provided with circular arc sliding blocks which are in sliding connection with the circular arc guide rails; the swing mechanism further comprises a first driving motor 447, a gear 444 is installed on the power output shaft of the first driving motor 447, the swing frame is provided with a circular arc rack 443, and the gear 444 is in meshing connection with the circular arc rack 443. The first driving motor 447 is a reduction motor with a first speed reducer 446. The power output end of the first speed reducer is the power output end of the first driving motor 447.

[0061] The swing frame 431 is a U-shaped frame with an opening facing outward, and the U-shaped frame comprises a top plate and two front and rear side plates; the inner wall of the side plate is provided with a circular arc sliding block; the outer side of the support seat 433 is provided with a circular arc guide rail 432, and the support seat 433 is located on the inner side of the two side plates.

[0062] The swing mechanism further comprises a base plate 434, and the support seat 433 is mounted on the base plate 434.

[0063] The rotating mechanism comprises a rotating shaft mounting seat 411, a bearing sleeve 412, a rotating shaft 413, a locking nut 414, a first bearing 418, a second bearing 415, a spacer sleeve 416, an end cover 417, an internal gear 421 and a connecting plate 422; the connecting plate 422, the internal gear 421, the bearing sleeve 412, the first bearing 418, the spacer sleeve 416, the second bearing 415 and the locking nut 414 are sequentially sleeved on the rotating shaft 413; the locking nut 414 abuts against the inner ring of the second bearing 415; the bearing sleeve 412 is threadedly connected with the end cover 417, and the end cover 417 abuts against the outer ring of the second bearing 415; the spacer sleeve 416 is clamped between the first bearing 418 and the outer ring of the second bearing 415; the bearing sleeve 412 is overlapped and arranged on the rotating shaft mounting seat 411; the rotating shaft mounting seat 411 is mounted on the swing frame of the swing mechanism; the connecting plate 422 is connected to the rotating shaft 413, and the connecting plate 422 is mounted with a bonding fixture for bonding workpieces.

[0064] The rotating mechanism further comprises an external gear 425 and the internal gear 421 which are arranged in meshing with each other; the outer wall of the external gear 425 and the inner wall of the internal gear 421 are provided with meshing teeth which mesh with each other; the rotating motor mounting seat 426 is mounted on the side wall of the rotating shaft mounting seat 411, the rotating motor 427 is mounted on the rotating motor mounting seat 426, and the power output shaft of the rotating motor 427 is in transmission connection with the external gear 425; the internal gear 421 is mounted on the connecting plate 422. The rotating motor 427 is a reduction motor with a reducer 429, and the power output shaft of the rotating motor 427 is the power output shaft of the reducer 429.

[0065] The adjusting pad 428 is clamped between the side wall of the rotating shaft mounting seat 411 and the rotating motor 427 mounting seat 426. By adjusting the adjusting pad 428, the center distance of the internal gear 421 and the external gear 425 is adjusted to achieve stable operation of the gear meshing.

[0066] The lifting assembly 3 comprises a gantry 2 which is mounted in the center of the base 1; the left and right sides of the gantry 2 are provided with guide rails for slidingly connecting sliding frames in the longitudinal direction. The gantry 2 is further provided with a hanging device 10 at the top for mounting an operation screen for control.

[0067] The sliding frame is provided with a distance adjusting mechanism for adjusting the distance between the two main cutting wheels 7. The center distance of the two main cutting wheels 7 can be adjusted according to actual needs to meet the processing requirements of 4-8 inches.

[0068] The pay-off and take-up mechanism comprises a pay-off wheel 14 and a take-up wheel 12; the pay-off wheel 14 is installed on the left side of the base 1 through a pay-off wheel support 13, and the take-up wheel 12 is installed on the right side of the base 1 through a take-up wheel support 11; the diamond wire is released from the pay-off wheel 14, and then passes through a pay-off tension pulley 22 on a pay-off balance wheel device 18, a wire guide 8 on a tension control device 9, three reversing wire guides 8 on a side column of the gantry 2, a main cutting wheel 7, another main cutting wheel 7, three reversing wire guides 8 on the other side column of the gantry 2, the wire guide 8 on the tension control device 9, a take-up tension pulley 21 on a take-up balance wheel device 17, and finally the take-up wheel 12; the single diamond wire is thus repeatedly and high-speed cycled in the pay-off and take-up process.

[0069] The pay-off and take-up mechanism comprises a pay-off wheel 14 and a take-up wheel 12; the pay-off wheel 14 is installed on the left side of the base 1 through a pay-off wheel support 13, and the take-up wheel 12 is installed on the right side of the base 1 through a take-up wheel support 11; the diamond wire is released from the pay-off wheel 14, and then passes through a pay-off tension pulley 22 on a pay-off balance wheel device 18, a wire guide 8 on a tension control device 9, three reversing wire guides 8 on a side column of the gantry 2, a main cutting wheel 7, another main cutting wheel 7, three reversing wire guides 8 on the other side column of the gantry 2, the wire guide 8 on the tension control device 9, a take-up tension pulley 21 on a take-up balance wheel device 17, and finally the take-up wheel 12; the single diamond wire is thus repeatedly and high-speed cycled in the pay-off and take-up process.

[0070] The above is only the preferred embodiment of the present application, and it should be noted that, for those skilled in the art, some improvements and refinements can be made without departing from the principles of the present application, and these improvements and refinements should also be considered as the protection scope of the present application.

Claims

1. A multifunctional single-wire silicon carbide processing equipment, comprising a base, on which a wire take-up and unwinding mechanism, a workpiece bonding turntable, a cutting head mechanism, and a cutting fluid mechanism are mounted, characterized in that, It includes a cutting head mechanism, the cutting mechanism including a lifting assembly for driving the main cutting wheel to move up and down, the sliding frame of the lifting assembly is equipped with two cutting heads arranged left and right, and the main cutting wheel is installed on the cutting head; The wire take-up and untake-up mechanisms are installed on the left and right sides of the cutting head mechanism, and the cutting wire transmitted by the wire take-up and untake-up mechanisms is wound around the main cutting wheel. A horizontal slide is installed in front of the cutting head mechanism to drive the workpiece bonding turntable to slide back and forth, and the workpiece bonding turntable is installed on the horizontal slide. The workpiece bonding turntable includes a mounting base, which is detachably mounted above the horizontal slide table; Above the mounting base is a swing mechanism for driving the workpiece to be processed to swing in the direction of rotation center line with the back-and-forth direction. On the swing mechanism is a rotating mechanism for driving the workpiece to be processed to rotate circumferentially. Above the rotating mechanism is the workpiece to be processed. The rotation center line of the rotating mechanism is perpendicular to the rotation center line of the swing mechanism. The cutting fluid mechanism includes a tank for storing the cutting fluid and a spray assembly. The tank is located behind the cutting mechanism and is connected to the spray assembly via a pipeline. The spray nozzles of the spray assembly face the workpiece to be processed by the cutting line.

2. The multifunctional single-wire silicon carbide processing equipment according to claim 1, characterized in that: The swing mechanism includes a support base arranged symmetrically in front and rear mirrors, and an arc guide rail is installed on the support base; The swing mechanism further includes a swing frame, on which an arc slider is mounted and slidably connected to the arc guide rail; The swing mechanism also includes a first drive motor, on which a gear is mounted on the power output shaft of the first drive motor, and on which an arc rack is mounted, with the gear meshing with the arc rack.

3. The multifunctional single-wire silicon carbide processing equipment according to claim 2, characterized in that: The swing frame is a U-shaped frame with the opening facing outwards. The U-shaped frame includes a top plate and two side plates arranged front and rear. The inner wall of the side plate is equipped with the arc-shaped slider; The arc-shaped guide rail is installed on the outer side of the support base, and the support base is located on the inner side of the two side plates.

4. The multifunctional single-wire silicon carbide processing equipment according to claim 1, characterized in that: The rotating mechanism includes a rotary shaft mounting base, a bearing sleeve, a rotary shaft, a lock nut, a first bearing, a second bearing, a spacer, an end cover, an internal gear, and a connecting plate; The rotating shaft is sequentially fitted with the connecting plate, the internal gear, the bearing sleeve, the first bearing, the spacer, the second bearing, and the locking nut; The locking nut abuts against the inner ring of the second bearing; The bearing sleeve is threadedly connected to the end cap, and the end cap abuts against the outer ring of the second bearing; The spacer is sandwiched between the outer rings of the first bearing and the second bearing; The bearing sleeve is overlapped on the rotary shaft mounting base; The rotary shaft mounting base is mounted on the swing frame of the swing mechanism; The connecting plate is connected to the rotating shaft, and an adhesive jig for bonding workpieces is mounted on the connecting plate.

5. The multifunctional single-wire silicon carbide processing equipment according to claim 4, characterized in that: The rotating mechanism also includes an external gear and an internal gear that mesh with each other; The outer wall of the external gear and the inner wall of the internal gear are provided with meshing teeth that mesh with each other. A rotary motor mounting base is installed on the side wall of the rotary shaft mounting base, and a rotary motor is installed on the rotary motor mounting base. The power output shaft of the rotary motor is connected to the external gear transmission. The internal gear is mounted on the connecting plate.

6. The multifunctional single-wire silicon carbide processing equipment according to claim 5, characterized in that: An adjustment pad is provided between the side wall of the rotary shaft mounting base and the rotary motor mounting base.

7. The multifunctional single-wire silicon carbide processing equipment according to claim 1, characterized in that: The wire feeding and take-up mechanism includes a wire feeding reel and a wire take-up reel; The pay-off reel is mounted on the left side of the base via a pay-off reel support, and the take-up reel is mounted on the right side of the base via a take-up reel support; The diamond wire is released from the pay-off wheel. The diamond wire first passes through the pay-off tension wheel on the pay-off balance wheel device, and then passes through the guide wheel on the tension control device. Then, the diamond wire is passed through the three reversing guide rollers on one side of the gantry column of the gantry frame and wound around the main cutting wheel. The diamond wire is wound from one side of the main cutting wheel to the other side of the main cutting wheel. Then it passes through the three reversing guide rollers on the gantry column on the other side of the gantry frame, then through the guide roller on the tension control device, then through the take-up tension roller on the take-up balance wheel device, and finally back onto the take-up roller. The single-line diamond wire repeats this high-speed cycle of take-up and untake-up.

8. The multifunctional single-wire silicon carbide processing equipment according to claim 7, characterized in that: The cable take-up wiring device and the cable release wiring device are respectively installed on the left and right sides of the gantry frame. The take-up cable routing device is a front-to-back horizontal sliding mechanism, and a take-up balance wheel device is installed on the horizontal slide of the take-up cable routing device. The wire laying device is a front-to-back horizontal sliding mechanism, and a wire laying balance wheel device is installed on the horizontal slide table of the wire laying device.

9. The multifunctional single-wire silicon carbide processing equipment according to claim 1, characterized in that: The sliding frame is equipped with a spacing adjustment mechanism for adjusting the distance between the two main cutting wheels.

10. A multifunctional single-wire silicon carbide processing equipment according to claim 1, characterized in that: The direction and position of the spray nozzles of the spray assembly are adjustable.

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