Coating device

Abstract

The invention provides a coating device, which can restrain the condition that the elongation amount of a film is different due to the part of an adherend. A coating device is provided with: a first gripping part that grips the tip of a film; a first movement mechanism capable of moving the first gripping part in a first direction in which the film is conveyed onto an adherend and in a second direction opposite to the first direction; and a displacement mechanism that relatively displaces the first gripping part and the adherend so that the film covers the adherend, and the first gripping part moves in the second direction after the film and the adherend begin to come into contact with each other and before the film and the adherend come into contact with each other.

Description

Technical Field

[0001] This invention relates to a coating device. Background Technology

[0002] There are known forming methods for covering a three-dimensional substrate with a film. For example, Patent Document 1 discloses a method for covering a motor vehicle or the like with a film expanded into a planar shape.

[0003] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 2021-62625 Summary of the Invention The problem that the invention aims to solve When a membrane is expanded into a planar shape and wrapped around a three-dimensional substrate, the amount of membrane elongation varies depending on the location of the substrate and the distance between the substrate and the membrane, which is the main cause of wrinkles.

[0004] The purpose of this invention is to suppress the situation where the amount of membrane elongation varies due to different locations of the adhered material.

[0005] means for solving problems According to the present invention, a coating device is provided, characterized in that, The coating device comprises: The first gripping part grips the front end of the membrane; A first moving mechanism is capable of moving the first gripping portion in a first direction for transporting the film onto the substrate and in a second direction opposite to the first direction; and A displacement mechanism that displaces the first holding portion relative to the adherend by means of the membrane abutting against the adherend. After the membrane begins to come into contact with the adherend and before the contact is completed, the first gripping portion moves in the second direction.

[0006] Invention Effects According to the present invention, it is possible to suppress the situation where the amount of membrane elongation varies due to the location of the adhered body. Attached Figure Description

[0007] Figure 1 This is a schematic diagram of the coating system.

[0008] Figure 2 This is a diagram showing the internal structure of the covering device.

[0009] Figure 3 This is a diagram showing the internal structure of the covering device.

[0010] Figure 4This is a partial cross-sectional view of the covering device.

[0011] Figure 5 This is a magnified view of a portion of the covering device.

[0012] Figure 6 This is a magnified view of a portion of the covering device.

[0013] Figure 7 This is a diagram illustrating the operation of the covering device.

[0014] Figure 8 This is a diagram illustrating the operation of the covering device.

[0015] Figure 9 This is a diagram illustrating the operation of the covering device.

[0016] Figure 10 This is a diagram illustrating the operation of the covering device.

[0017] Figure 11 This is a diagram illustrating the operation of the covering device.

[0018] Figure 12 This is a diagram illustrating the operation of the covering device.

[0019] Figure 13 This is a diagram illustrating the operation of the covering device.

[0020] Figure 14 This is a diagram illustrating the operation of the covering device.

[0021] Figure 15 This is a diagram illustrating the operation of the covering device.

[0022] Figure 16 This is a diagram showing the internal structure of the covering device.

[0023] Figure 17 This is a diagram showing the internal structure of the covering device.

[0024] Figure 18 This is a diagram showing the internal structure of the covering device.

[0025] Explanation of reference numerals in the attached figures 1: Covering device; 5: Membrane supply unit; 55: Cutting device; 6: Membrane moving unit; 60: Front end holding part; 61: Rear end holding part; 62: First moving mechanism; 63: Second moving mechanism; 620: Guide rail; 621: First control mechanism; 630: Guide rail; 631: Second control mechanism; 7: Chamber; 71: Upper chamber component; 72: Lower chamber component; 8: Air pressure adjustment unit; 9: Displacement unit; 11: Multiple first abutting components; 12: Multiple second abutting components; 13: First continuous body; 14: Second continuous body; 17: First suspension unit; 18: Second suspension unit; 19: First restraining unit; 20: Second restraining unit; 21: Heating unit; 22a: Connecting component; 22b: Connecting component; 25: Bridge component; F: Membrane; W: Adhesive; G: Fixture. Detailed Implementation

[0026] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Furthermore, the embodiments described below do not limit the invention to which the technical solution pertains, and not all combinations of features described in the embodiments are necessary for the invention. Two or more features from the plurality of features described in the embodiments can be arbitrarily combined. Additionally, identical or identical components are labeled with the same reference numerals, and repeated descriptions are omitted.

[0027] <First Implementation> <The Composition of the Encapsulation System> Figure 1 This is a schematic diagram showing a portion of the configuration of the coating system 1 to which the coating apparatus of the present invention can be applied. In each figure, arrows X and Y represent mutually orthogonal horizontal directions, and arrow Z represents the vertical direction (the height direction of the coating apparatus).

[0028] The coating system 1 is a decoration system that coats the substrate W with a film F to decorate the substrate W. The coating system 1 includes a control device 2, a conveying device 3, and a coating device 4.

[0029] Control device 2 is an electronic circuit that controls the entire encapsulation system 1. Control device 2 includes, for example, a processing unit, a storage unit, an input / output interface (I / O), a display unit, and an input unit. The processing unit, represented by a CPU, is a processor that executes programs stored in the storage unit to control the encapsulation system 1. The storage unit is a storage device such as ROM, RAM, or HDD, which stores not only the programs executed by the processing unit but also various control information. The input / output interface is an interface for receiving and transmitting signals between the processing unit and external devices (actuators such as motors, sensors). The display unit is a monitor that displays information to the user. The input unit consists of push-button switches for user input instructions. The display unit and input unit can also be composed of a touch screen.

[0030] The transport device 3 transports the adherend W into and out of the coating device 4. The arrows in the figure indicate the transport direction of the adherend W. In this embodiment, the transport device 3 is a roller conveyor equipped with multiple rollers. The adherend W is transported from the upstream transport path 3a to the coating device 4 by the transport device 3 while being held in a clamp G mounted on a transport table T such as a pallet. Then, after the adherend W is coated with a film inside the chamber of the coating device 4, it is transported out from the downstream transport path 3b. In addition, the transport device 3 may also be equipped with a transport position adjustment unit for adjusting the transport position of the transport table T. Furthermore, the transport device 3 may be various conveyors such as belt conveyors other than roller conveyors, or it may be a multi-joint robot.

[0031] The coating apparatus 4 is a device for coating the film F onto the substrate W. As an example, the coating apparatus 4 is a vacuum forming device that utilizes a pressure difference to improve the adhesion of the film F to the substrate W. The coating apparatus 4 will be described in detail later.

[0032] In this embodiment, the adherend W is described as a component such as the front bumper or rear bumper of a vehicle (e.g., a four-wheeled vehicle), but the adherend W is not limited to this and the invention can be applied to various objects.

[0033] In this embodiment, the film F is, for example, a material with extensibility, specifically a film F using a thermoplastic resin. For example, the film F has the following multi-layer structure: a decorative layer with a color and pattern for decorating the substrate W is attached to its surface, and an adhesive layer is attached to the bottom layer. By covering the substrate W with such a film F, it is possible to decorate vehicle components, for example, according to the vehicle's color.

[0034] The coating system 1 is not limited to the above-described configuration. For example, it may also include a robotic device for changing the substrate W and the clamp G, and a dust removal device for removing contaminants from the substrate W. Furthermore, the coating system 1 may include a light irradiation unit for irradiating the substrate W and the membrane F with ultraviolet light, and a drying unit for drying the substrate W and the membrane F. Additionally, the coating system 1 may include a cutting unit for locally removing unwanted portions of the membrane F after coating the substrate W.

[0035] <Covering Device> Next, the details of the coating device 4 will be explained. For example... Figure 1 As shown, the coating device 4 includes a membrane supply unit 5, a membrane moving unit 6, a chamber 7, and a pressure regulating unit 8. The coating device 4 moves the membrane F supplied from the membrane supply unit 5 into the interior of the chamber 7 via the membrane moving unit 6. Figure 1The dashed line portion of chamber 7 shown represents the interior of chamber 7. The coating device 4 coats the substrate W with membrane F inside chamber 7. During the coating process, the air pressure inside chamber 7 is adjusted by the air pressure adjustment unit 8.

[0036] Below, in Figure 1 Based on reference Figure 2 as well as Figure 3 The components of the coating device 4 will be explained. Figure 2 as well as Figure 3 This is a diagram showing the internal structure of the covering device 4. Figure 2 From Figure 1 The diagram shows the downstream side of the transport path, observing the covering device 4. Figure 3 This is equivalent to a view of chamber 7 of the coating device 4 from the side of the membrane supply unit 5. Furthermore, Figure 3 The dashed line portion of chamber 7 shown indicates a part of the interior of chamber 7. Furthermore, in the following description, for convenience, the transport direction of the membrane F will sometimes be referred to as the X direction, the transport direction of the adherend W as the Y direction, and the height direction (vertical direction) of the coating device 4 as the Z direction.

[0037] like Figure 1 as well as Figure 2 As shown, the film supply unit 5 supports the film F used to cover the substrate W. The film supply unit 5 includes a support platform 50, a support roller 51, a winding roller 52, a winding roller 53, a guide roller 54, and a cutting device 55. The support roller 51, mounted on the support platform 50, is a roller that supports the film F, which is wound in a cylindrical shape, and allows it to rotate. The winding rollers 52 and 53 are rollers used to wind a release film (protective film) when a release film is laminated on the surface and back of the film F covering the substrate W. The guide rollers 54 are a pair of rollers that pull out the film F supported on the support rollers 51 in a planar shape. The cutting device 55 is a device for cutting the film F. In this embodiment, the cutting device 55 has a cutter. Alternatively, the cutting device 55 may be a device that cuts the film F by irradiating it with a laser.

[0038] The membrane moving unit 6 performs a transporting action to move the membrane F onto the adherend W inside the chamber 7. Additionally, during the covering action of the membrane F covering the adherend W, the membrane moving unit 6 moves the membrane F. Furthermore, as... Figure 2 as well as Figure 3 As shown, the membrane moving unit 6 is disposed on the upper chamber member 71 (described later) and moves up and down along the Z direction together with the upper chamber member 71. Figures 1-3 As shown, the membrane moving unit 6 includes a front end holding part 60, a rear end holding part 61, a first moving mechanism 62, and a second moving mechanism 63.

[0039] The front end gripping portion 60 grips the front end of the membrane F. The front end of the membrane F is the portion that is pulled out in a direction orthogonal to the axial direction of the membrane F wound in a cylindrical shape. The front end gripping portion 60 grips both ends of the membrane F in the Y direction at the front end of the membrane F. Alternatively, the front end gripping portion 60 may grip the entire front end of the membrane F in the width direction. Furthermore, the front end gripping portion 60 can switch between a gripping state of the front end of the membrane F and an open state where the front end of the membrane F is not gripped. Additionally, the front end gripping portion 60 is supported by a first moving mechanism 62 via a movable support member 622.

[0040] The rear end gripping part 61 grips the rear end of the film F such that the film F covers the adherend W. As described later, the front end gripping part 60 moves in a manner that covers the adherend W while gripping the front end of the film F via the first moving mechanism 62. Then, the rear end gripping part 61 grips the rear end of the film F. The rear end gripping part 61 grips both ends of the film F in the Y direction at the rear end of the film F. In addition, the rear end gripping part 61 can also grip the entire width direction of the film F at the rear end of the film F. Furthermore, the rear end gripping part 61 can switch between a gripping state where it grips the rear end that is pulled out in a direction orthogonal to the axial direction of the roll-shaped film F, and an open state where it does not grip the rear end of the film F and is open. In addition, the rear end gripping part 61 is supported by the second moving mechanism 63 by supporting the rear end gripping part 61 as a movable support member 632.

[0041] The first moving mechanism 62 enables the front end gripping portion 60 to move in the X direction (first direction) and in the opposite direction (second direction) for transporting the membrane F onto the substrate W. Specifically, the first moving mechanism 62 includes a guide rail 620 that enables the front end gripping portion 60 to move in the X direction (first direction) and in the opposite direction (second direction). That is, the first moving mechanism 62 can also be described as including a guide member that guides the movement of the front end gripping portion 60 in the X direction (first direction) and the opposite direction (second direction) for transporting the membrane F onto the substrate W.

[0042] like Figure 1 as well as Figure 3 As shown, guide rails 620 are provided on the two sidewall portions 71R to 71L outside the upper chamber member 71 of the chamber 7. Additionally, as... Figure 1 as well as Figure 2 As shown, the guide rail 620 is arranged along the X direction of the chamber 7 and is configured to protrude from the upper chamber member 71. That is, the guide rail 620 is longer than the upper chamber member 71 in the X direction. Therefore, as will be described later, when the upper chamber member 71 descends and abuts against the lower chamber member 72, the front end gripping part 60 can be moved to the outside of the chamber 7.

[0043] like Figure 2 as well as Figure 3 As shown, the first moving mechanism 62 has a first control mechanism 621 inside the guide rail 620. The first control mechanism 621 may be, for example, an electric actuator, an electric cylinder, an electric ball screw mechanism, etc. By controlling the first control mechanism 621, the support member 622 of the support front end gripping part 60 is moved, so that the front end gripping part 60 can move in the X direction and in the opposite direction to the X direction.

[0044] The second moving mechanism 63 enables the rear end gripping portion 61 to move in the X direction and in the opposite direction. The second moving mechanism 63 includes a guide rail 630 that enables the rear end gripping portion 61 to move in the X direction and in the opposite direction. That is, the second moving mechanism 63 can also be referred to as a guide member that guides the movement of the rear end gripping portion 61 in the X direction and in the opposite direction.

[0045] like Figure 1 as well as Figure 3 As shown, guide rails 630 are provided on the two side wall portions 71R to 71L outside the upper chamber member 71 of the chamber 7. Additionally, as... Figure 1 as well as Figure 2 As shown, the guide rail 630 is arranged along the X direction and is configured to protrude from the upper chamber member 71 toward the membrane supply unit 5 (the supply source side of the membrane F). Thus, as will be described later, when the upper chamber member 71 descends and abuts against the lower chamber member 72, the rear end gripping part 61 can be moved to the outside of the chamber 7.

[0046] like Figure 3 As shown, the second moving mechanism 63 has a second control mechanism 631 inside the guide rail 630 to control the movement of the rear end gripping part 61. The second control mechanism 631 can be, for example, a drive device such as an electric actuator, an electric cylinder, or an electric ball screw mechanism. By controlling the second control mechanism 631, the support member 632 supporting the rear end gripping part 61 is moved, thereby enabling the rear end gripping part 61 to move in the X direction and in the opposite direction to the X direction.

[0047] like Figure 2 as well as Figure 3 As shown, the coating device 4 has an upper chamber member 71 and a lower chamber member 72, which together form a chamber 7 that defines the coating space for the adherend W.

[0048] The upper chamber member 71 has a front wall portion 71F, a rear wall portion 71B, a side wall portion 71R, a side wall portion 71L, and an upper wall portion 71U, with an opening on its lower surface. Guide rails 620 are provided on the side wall portions 71R and 71L. Additionally, guide rails 630 are provided on the side wall portions 71R and 71L. In other words, the upper chamber member 71 is a member that supports the front end gripping portion 60 and the rear end gripping portion 61 in a movable manner.

[0049] Additionally, a lower chamber member 72 is disposed below the upper chamber member 71 for mounting the adherend W. The lower chamber member 72 has a front wall portion 72F, a rear wall portion 72B, a side wall portion 72R, a side wall portion 72L, a lower wall portion 72D, and an opening on its upper surface.

[0050] like Figures 1-3 As shown, the covering device 4 has a displacement unit 9 that displaces the upper chamber member 71 and the lower chamber member 72 relative to each other. The displacement unit 9 includes, for example, a support member 90, a moving mechanism 91, and a guide rail 92. The support member 90 supports the upper chamber member 71 so that it can move in the vertical direction of the covering device 4. The moving mechanism 91 moves the support member 90 in the vertical direction of the covering device 4. That is, the displacement unit 9 displaces the first continuous body 13 and the second continuous body 14 (described later) relative to the adhered body W by raising and lowering the upper chamber member 71. The moving mechanism 91 may be, for example, a drive device such as an electric actuator, an electric cylinder, or an electric ball screw mechanism. The guide rail 92 extends along the Z direction and is a member that guides the movement of the moving mechanism 91 in the Z direction. Furthermore, the upper chamber member 71 descends via the displacement unit 9 and comes into contact with the lower chamber member 72, thereby sealing the interior of the chamber 7. Furthermore, in this embodiment, an example of the displacement unit 9 causing the upper chamber member 71 to rise or fall relative to the lower chamber member 72 has been described, but it is not limited to this. For example, the displacement unit 9 may also be used to cause the lower chamber member 72 to rise or fall relative to the upper chamber member 71.

[0051] like Figure 1 As shown, the coating device 4 has an adherend moving unit 10 inside the chamber 7. Here, in Figures 1-3 Based on and refer to Figure 4 . Figure 4 This is a cross-sectional view of chamber 7 used to illustrate the interior of chamber 7, equivalent to showing... Figure 2 Diagram of the interior of chamber 7.

[0052] The adherend moving unit 10 is disposed on the lower chamber member 72. The adherend moving unit 10 includes an adherend lifting section 110 and an adherend transport section 111 supported by the adherend lifting section 110. The adherend lifting section 110 can move the adherend W, which is moved into the chamber 7, up and down in the covering device 4 to adjust the position of the adherend W or to bring the adherend W into contact with the film F. The adherend transport section 111 transports the adherend W by means of multiple rotatable rollers. The adherend lifting section 110 and the adherend transport section 111 may also be actuators such as electric cylinders or electric ball screw mechanisms.

[0053] like Figure 1As shown, the covering device 4 includes a pressure regulating unit 8 for adjusting the air pressure inside the chamber 7. The pressure regulating unit 8 includes a pipe 80 communicating with the interior of the lower chamber member 72, a pipe 81 communicating with the interior of the upper chamber member 71, a pressure reducing unit 82, a valve 820, and a valve 821. In this embodiment, the pressure reducing unit 82 includes a pump 822 and a pressure reducing tank 823, with the pressure reducing tank 823 being depressurized by the pump 822. The pressure reducing unit 82 may also consist only of the pump 822. By providing the pressure reducing tank 823, the pressure inside the chamber 7 can be reduced in a shorter time using a pump 822 with a lower output. The pipe 80 communicates with the pressure reducing tank 823, and the pipe 81 communicates with the pressure reducing tank 823 via valve 821, pipe 83, and valve 820.

[0054] Valve 820 switches the connection between piping 80 and pressure reducing tank 823. Valve 821 switches the connection between piping 81, piping 83, and piping 84. Pipe 84 is open to the atmosphere. Valve 821 can switch between the state where piping 81 is only connected to piping 83 and the state where piping 81 is only connected to piping 84.

[0055] like Figure 1 As shown, the covering device 4 has multiple first abutting members 11, multiple second abutting members 12, a first continuous body 13, and a second continuous body 14 inside the chamber 7.

[0056] A plurality of first abutting members 11 are arranged along a first side of the film F being transported onto the adherend W and abut against the first side. A plurality of second abutting members 12 are arranged along a second side of the film F opposite to the first side and abut against the second side. The plurality of first abutting members 11 and the plurality of second abutting members 12 are arranged in opposing positions. Furthermore, the number of the plurality of first abutting members 11 and the plurality of second abutting members is not limited to the example shown in the figure and can be varied appropriately.

[0057] The first continuous body 13 is a component that extends continuously along the first side of the membrane F, supports a plurality of first abutting members 11, and is deformable in the contact separation direction in which the plurality of first abutting members 11 contact and separate from the membrane F.

[0058] The second continuous body 14 is a member that extends continuously along the second side of the membrane F, supports a plurality of second abutment members 12, and is deformable in the contact separation direction in which the plurality of second abutment members 12 contact and separate from the membrane F. The extending direction of the first continuous body 13 and the second continuous body 14 is the transport direction of the membrane F.

[0059] During the covering action, the aforementioned displacement unit 9 causes the first continuous body 13 and the second continuous body 14 to be displaced relative to the adhered body W by means of the membrane F abutting against the adhered body W through multiple first abutting members 11 and multiple second abutting members 12.

[0060] In this embodiment, the plurality of contact members 11 and 12 that abut against the membrane F are supported by deformable continuums 13 and 14. Therefore, during the covering operation, it is possible to prevent the contact interval from becoming too large.

[0061] Here, refer to Figure 5 as well as Figure 6 . Figure 5 This diagram illustrates the interior of chamber 7, and is a magnified view of a portion of the interior of chamber 7 viewed in the X direction. Additionally, Figure 6 This is a diagram illustrating the interior of chamber 7, and it is a magnified view of a portion of the interior of chamber 7 when viewed in the Y direction.

[0062] like Figure 5 as well as Figure 6 As shown, the first continuous body 13 and the second continuous body 14 are chains. Furthermore, the plurality of first abutting members 11 are rotating members rotatably supported on the first continuous body 13. The plurality of second abutting members 12 are rotating members rotatably supported on the second continuous body 14. The rotating members are, for example, rollers. By making the members that abut against the membrane F rotating members, it is possible to prevent the membrane F from being worn when the plurality of first abutting members 11 and the plurality of second abutting members 12 abut against the membrane F.

[0063] like Figure 5 As shown, a plurality of first abutting members 11 are each disposed on the first continuous body 13 via a pressing member 15a and an elastic member 15b. In addition, a plurality of second abutting members 12 are each disposed on the second continuous body 14 via a pressing member 16a and an elastic member 16b.

[0064] The pressing member 15a is, for example, a member that presses the first abutting member 11 when it abuts against the membrane F. Similarly, the pressing member 16a is, for example, a member that presses the second abutting member 12 when it abuts against the membrane F. The pressing members 15a and 16a can also be actuators. Furthermore, the elastic members 15b and 16b can also be springs. For example, depending on the adherend W, it sometimes has a concave bending portion. When the membrane F is wrapped around the adherend W, there is a situation where the abutting members 11 and 12 are difficult to abut against the membrane F in the concave bending portion of the adherend W. On the other hand, by providing the pressing members 15a and 16a, the abutting members 11 and 12 can be supported to abut against the membrane F when they abut against the membrane F.

[0065] like Figure 1 As shown, the covering device 4 has a first suspension unit 17 and a second suspension unit 18 inside the chamber 7.

[0066] like Figure 4 As shown, the first suspension unit 17 supports both ends of the first continuous body 13 and suspends the first continuous body 13. The first suspension unit 17 includes a first fixing member 170 that fixes one end of the first continuous body 13 to the interior of the upper chamber member 71. In addition, the first suspension unit 17 also includes a first adjustment device 171 for adjusting the slack of the first continuous body 13. The first adjustment device 171 is, for example, an electric cylinder.

[0067] exist Figure 4 The diagram shows the first suspension unit 17 on the side of the first continuous body 13, but the second suspension unit 18 on the side of the second continuous body 14 is the same (see reference). Figure 1 as well as Figure 3 That is, the second suspension unit 18 is disposed inside the upper chamber member 71. The second suspension unit 18 includes a second fixing member 180 that fixes one end of the second continuous body 14 to the interior of the upper chamber member 71. The second suspension unit 18 also includes a second adjustment device 181 for adjusting the slack of the second continuous body 14 (see reference). Figure 1 The second adjustment device 181 is, for example, an electric cylinder.

[0068] The slack of the first continuous body 13 can be adjusted using the first adjustment device 171, thereby allowing the first continuous body 13 to follow the shape of the adherend W. Furthermore, the slack of the second continuous body 14 can be adjusted using the second adjustment device 181, thereby allowing the second continuous body 14 to follow the shape of the adherend W.

[0069] In addition, the first adjustment device 171 and the second adjustment device 181 may be, for example, a lifting mechanism provided on the upper wall portion 71U of the upper chamber member 71 and capable of moving up and down in the vertical direction inside the upper chamber member 71.

[0070] In addition, such as Figures 3-6 As shown, the covering device 4 also includes a first limiting unit 19. The first limiting unit 19 limits the displacement of the first continuous body 13 in a direction different from the contact separation direction. Multiple first limiting units 19 are arranged in the first extending direction, each including a guide rail 190 extending in the first contact separation direction and a sliding member 191 that engages with the guide rail 190 and the first continuous body 13 and is capable of displacement along the guide rail 190. Furthermore, the first limiting unit 19 includes a support member that supports the first continuous body 13 in a deformable manner. The support member may, for example, be a sprocket.

[0071] By using the first limiting unit 19 to limit the displacement of the first continuous body 13 in a direction different from the contact separation direction, it is possible to suppress the positional deviation of the first abutting member 11 when it initially abuts against the membrane F and when the final abutment is completed during the covering action.

[0072] Furthermore, the covering device 4 also includes a second limiting unit 20. The second limiting unit 20 limits the displacement of the second continuous body 14 in a direction different from the contact separation direction. Multiple second limiting units 20 are arranged in the second extending direction, and each includes a guide rail 200 extending along the second contact separation direction, and a sliding member 201 that engages with the guide rail 200 and the second continuous body 14 and is capable of displacement along the guide rail 200. Additionally, the second limiting unit 20 includes a support member that supports the second continuous body 14 in a deformable manner. The support member may, for example, be a sprocket.

[0073] By using the second limiting unit 20 to limit the displacement of the second continuous body 14 in a direction different from the contact separation direction, it is possible to suppress the positional deviation of the second abutting member 12 when it initially abuts against the membrane F and when the final abutment is completed during the covering action.

[0074] like Figures 3-5 As shown, the coating device 4 has a heating unit 21 inside the chamber 7 for heating the membrane F that is transported onto the substrate W. The heating unit 21 generates heat, for example, by means of an electric power supply. By using the heat from the heating unit 21 to soften the membrane F, the adhesion of the membrane F to the substrate W can be improved.

[0075] The heating unit 21 is a heater 210 disposed corresponding to each of the plurality of first abutting members 11. The covering device 4 includes a connecting member 22a that connects the heater 210 to the corresponding first abutting member 11. The connecting member 22a is configured to connect the heating unit 21 and the first continuous body 13. In addition, the heating unit 21 is also a heater 210 disposed corresponding to each of the plurality of second abutting members 12. The covering device 4 includes a connecting member 22b that connects the heater 210 to the corresponding second abutting member 12. The connecting member 22b is configured to connect the heating unit 21 and the second continuous body 14.

[0076] By connecting the heater 210 and the corresponding abutment members 11 and 12 using connecting members 22a and 22b, the distance between the heater 210 and the abutment members 11 and 12 can be prevented from increasing when the membrane F is in contact with the adherend W. Therefore, the amount of heating of the membrane F will not vary greatly depending on the location of the adherend W, and the elongation of the membrane F can be suppressed.

[0077] like Figures 3-5As shown, the covering device 4 includes a third continuous body 23 and a fourth continuous body 24. As described above, a plurality of first abutting members 11 and a plurality of second abutting members 12 are arranged in opposing positions. The covering device 4 includes a bridge member 25 connecting the plurality of first abutting members 11 and the plurality of second abutting members 12. The heating unit 21 is provided in combination with the plurality of first abutting members 11 and the plurality of second abutting members 12, and is provided on the bridge member 25. That is, the heating unit 21 is supported by the third continuous body 23 and the fourth continuous body 24.

[0078] The third continuous body 23 extends continuously in a first extending direction along the first side of the membrane F. The third continuous body 23 is, for example, a chain. The third continuous body 23 is suspended by a third suspension unit 26 provided on the upper wall of the upper chamber member 71. The third suspension unit 26 is a unit that supports both ends of the third continuous body 23 and suspends the third continuous body 23. The third suspension unit 26 includes a third fixing member 260 for fixing one end of the third continuous body 23 and a third adjustment device 261 for adjusting the slack of the third continuous body 23. The third adjustment device 261 is, for example, an electric cylinder.

[0079] As described above, the heating unit 21 is connected to the corresponding first abutting member 11 via the connecting member 22a. That is, the third continuous body 23 is connected to the first continuous body 13 via the connecting member 22a. Thus, the third continuous body 23 and the first continuous body 13 deform synchronously.

[0080] The fourth continuous body 24 extends continuously in a second extending direction along the second side of the membrane F. The fourth continuous body 24 is, for example, a chain. The fourth continuous body 24 is suspended by a fourth suspension unit 27 provided on the upper wall of the upper chamber member 71. The fourth suspension unit 27 is a unit that supports both ends of the fourth continuous body 24 and suspends the fourth continuous body 24. The fourth suspension unit 27 includes a fourth fixing member 270 for fixing one end of the fourth continuous body 24 and a fourth adjustment device 271 for adjusting the slack of the fourth continuous body 24. The fourth adjustment device 271 is, for example, an electric cylinder.

[0081] As described above, the heating unit 21 is connected to the corresponding second abutment member 12 via the connecting member 22b. That is, the fourth continuous body 24 is connected to the second continuous body 14 via the connecting member 22b. Thus, the fourth continuous body 24 and the second continuous body 14 deform synchronously.

[0082] <Action Example> Reference Figures 7-15 An example of the operation of the covering system 1 will be explained. Figures 7-15 This is an explanatory diagram of the operation of the coating device 4, showing an example of the operation from the introduction of the membrane F and the adherend W to the coating of the membrane F onto the adherend W and the removal of the adherend W coated with the membrane F.

[0083] <The movement of adherents and the migration of membranes> Reference Figure 7 as well as Figure 8 . Figure 7 This indicates the state in which the adherend W and membrane F are transported into the interior of chamber 7. Figure 8 express Figure 7 The interior of chamber 7 in the X direction. For example... Figure 7 as well as Figure 8 As shown, the transport of the adherend W and the membrane F into the chamber 7 is carried out in a state in which the upper chamber member 71 is raised by the displacement unit 9 and the upper chamber member 71 and the lower chamber member 72 are separated.

[0084] The adherend W is moved onto the adherend moving unit 10, which is provided on the lower chamber member 72, for example, by the aforementioned conveying device 3. The adherend moving unit 10 can also adjust the position of the adherend W after it has been moved into the chamber 7. The membrane moving unit 6 transports the membrane F onto the adherend W. Specifically, the front end gripping part 60 grips the front end of the membrane F supplied from the membrane supply unit 5. Then, the front end gripping part 60 moves in the X direction to cover the adherend W via the first moving mechanism 62. For example, the first control mechanism 621 provided on the guide rail 620 can also control the movement of the front end gripping part 60 based on the shape (size) of the adherend W.

[0085] <Membrane severing, membrane holding> Reference Figure 9 . Figure 9 This indicates the interior of chamber 7 in the X direction. In Figure 9 The image shows the state where the rear end gripping part 61 holds the film F and the cutting device 55 cuts the film F. After the front end gripping part 60 moves in the X direction to cover the adherend W with the film F, the rear end gripping part 61 holds the rear end of the film F. The cutting device 55 then cuts the film F held by the front end gripping part 60 and the rear end gripping part 61 from the supply source of the film F (the roll-shaped film F). This prevents unwanted film F from being pulled out by using the cutting device 55 to cut the film F from its supply source. The cutting device 55 can also cut the film F by sliding a cutter along the width direction of the film F. The width direction of the film F is the axial direction of the roll-shaped film F. Alternatively, the cutting device 55 can lower a wide cutter provided along the width direction of the film F and press it against the thickness direction of the film F to cut it.

[0086] <Membrane transport> Reference Figure 10 . Figure 10 This indicates the interior of chamber 7 in the X direction. Figure 10This indicates the state of the membrane F after it has been moved and is held by the front end holding part 60 and the back end holding part 61.

[0087] The front gripping part 60 and the rear gripping part 61 perform a transporting action on the membrane F. The front gripping part 60, while gripping the front end of the membrane F, moves in the X direction via the first moving mechanism 62. The rear gripping part 61, while gripping the rear end of the membrane F, moves in the X direction via the second moving mechanism 63. During the transporting action of moving the membrane F in the X direction, the front gripping part 60 and the rear gripping part 61 move in a manner that applies tension to the membrane F. Furthermore, applying tension to the membrane F means applying tension to a degree that does not cause plastic deformation or breakage of the membrane. That is, the front gripping part 60 and the rear gripping part 61 transport the membrane F while it is unfolded into a flat plane. This prevents the membrane F from covering the substrate W when wrinkles have formed. For example, the first control mechanism 621 can also be controlled to cause the front gripping part 60 to begin moving in the X direction before the rear gripping part 61. Alternatively, for example, before the transport operation is performed by the front end gripping part 60 and the rear end gripping part 61, the second control mechanism 631 controls the rear end gripping part 61 to move in the opposite direction to the X direction, thereby applying tension to the membrane F.

[0088] <Action of contact> Reference Figure 11 as well as Figure 12 . Figure 11 This indicates the state in which the coating device 4 brings the membrane F into contact with the substrate W. Figure 12 express Figure 11 The interior of chamber 7 in the X direction.

[0089] The displacement unit 9 displaces the upper chamber member 71 relative to the lower chamber member 72. Specifically, the displacement unit 9 lowers the upper chamber member 71 toward the lower chamber member 72. When the upper chamber member 71 and the lower chamber member 72 are displaced relative to each other by the displacement unit 9, a plurality of first abutting members 11 abut against the first side of the membrane F, and a plurality of second abutting members 12 abut against the second side of the membrane F.

[0090] When the plurality of first abutting members 11 abut against the membrane F, the first continuous body 13 deforms in the first contact separation direction in which the plurality of first abutting members 11 separate from the membrane F. For example... Figure 11 As shown, the first continuum 13 is deformable along a clamp G having a mounting surface that follows the shape of the adhered body W. Figure 11The configuration of the first continuous body 13 side is shown, but the configuration of the second continuous body 14 side is the same. That is, when the plurality of second abutting members 12 abut against the membrane F, the second continuous body 14 deforms in the second contact separation direction where the plurality of second abutting members 12 and the membrane F are separated. The second continuous body 14 can be deformed along the clamp G having a mounting surface having a shape along the adherend W.

[0091] Multiple first abutting members 11 are supported by a first continuous body 13 that can deform in a first contact separation direction between the multiple first abutting members 11 and the membrane F. This allows the spacing between the multiple first abutting members 11 and the membrane F to be approximately equal. Furthermore, multiple second abutting members 12 are supported by a second continuous body 14 that can deform in a second contact separation direction between the multiple second abutting members 12 and the membrane F. This allows the spacing between the multiple second abutting members and the membrane F to be approximately equal. Therefore, it is possible to suppress variations in the elongation of the membrane F due to the location of the adherend W.

[0092] Furthermore, the first continuous body 13 and the second continuous body 14 can be deformed along the clamp G having a mounting surface that is shaped along the adherend W. Thus, the plurality of first abutting members 11 and the plurality of second abutting members 12 can abut against the membrane F in accordance with the shape of the adherend W.

[0093] Here, it can also be said that the displacement unit 9 displaces the first continuous body 13 and the second continuous body 14 relative to the adhered body W by having the membrane F abut against the adhered body W through multiple first abutting members 11 and multiple second abutting members 12. Alternatively, it can be said that the displacement unit 9 displaces the front end holding part 60 relative to the adhered body W by having the membrane F abut against the adhered body W. Furthermore, it can be said that the displacement unit 9 displaces the membrane F held by the front end holding part 60 and the rear end holding part 61 relative to the adhered body W by raising and lowering the upper chamber member 71.

[0094] In addition, such as Figure 11As shown, after the membrane F begins to contact the adherend W but before the contact is complete, the front end gripping portion 60 moves in the opposite direction to the X direction. That is, after the membrane F begins to contact the adherend W, the front end gripping portion 60 moves in the opposite direction to the X direction by being guided by the guide member (guide rail 620). For example, when the membrane F begins to contact the adherend W, the first control mechanism 621 can also be controlled to move the support member 622 supporting the front end gripping portion 60 in the opposite direction to the X direction. Alternatively, the first control mechanism 621 can also be configured to release the control of the movement of the front end gripping portion 60 to a state with low friction with the guide rail 620, allowing the front end gripping portion 60 to move by the tension of the membrane F. That is, the front end gripping portion 60 is not limited to moving by the first control mechanism 621, but can also move in the opposite direction to the X direction by the deformation of the membrane F when it covers the adherend W. Thus, with the membrane F in contact with the adherend W, the front end holding portion 60 moves in the opposite direction to the X direction. This prevents the membrane F from being pulled out between the front end of the membrane F and the portion of the membrane F in contact with the adherend W.

[0095] Furthermore, after the membrane F begins to abut against the adherend W but before the abutment is complete, the rear end gripping portion 61 moves in the X direction. For example, the second control mechanism 631 can also be controlled to move the support member 632 supporting the rear end gripping portion 61 in the X direction when the membrane F begins to abut against the adherend W. Alternatively, the second control mechanism 631 can be configured such that the movement of the rear end gripping portion 61 is released, resulting in minimal friction with the guide rail 630, allowing the front end gripping portion 60 to move under the tension of the membrane F. In this way, when the membrane F abuts against the adherend W, the rear end gripping portion 61 moves in the X direction. As a result, the pulling out of the membrane F between the rear end of the membrane F and the abutting portion of the membrane F that abuts against the adherend W can be suppressed. Therefore, the change in the amount of elongation of the membrane F due to the portion of the adherend W can be further suppressed.

[0096] For example, the contact between a portion of the membrane F and the adherend W can be defined as the start of contact. Alternatively, the contact completion can be defined as the membrane F covering the entire adherend W after a portion of the membrane F has contacted the adherend W. Specifically, for example, the contact start can be defined as the upper chamber member 71 descending to a first height relative to the lower chamber member 72 via the displacement unit 9. Alternatively, the contact completion can be defined as the upper chamber member 71 descending to a second height relative to the lower chamber member 72 via the displacement unit 9, which is lower than the first height. The first height and the second height can be preset values, for example, based on the size, shape, etc., of the adherend W.

[0097] Furthermore, during the contact action of abutting the membrane F against the adherend W, the front gripping portion 60 and the rear gripping portion 61 move in a manner that applies tension to the membrane F. For example, under the control of the first control mechanism 621, the front gripping portion 60 may move in the opposite direction to the X direction at a speed slower than the speed at which the upper chamber member 71 descends due to the displacement unit 9, without hindering the contact action. Alternatively, under the control of the second control mechanism 631, the rear gripping portion 61 may move in the X direction at a speed slower than the speed at which the upper chamber member 71 descends due to the displacement unit 9, without hindering the contact action. In this way, the front gripping portion 60 and the rear gripping portion 61 move in a manner that applies tension to the membrane F, thereby suppressing the formation of wrinkles on the membrane F.

[0098] In addition, such as Figure 11 as well as Figure 12 As shown, in this embodiment, the clamp G has a first protrusion G1 extending along a first side edge of the membrane F, and a first abutting portion G2 that is opposite to the mounting surface of the adherend W of the first protrusion G1 and has a lower height than the first protrusion G1. Additionally, the clamp G has a second protrusion G3 extending along a second side edge of the membrane F, and a second abutting portion G4 that is opposite to the mounting surface of the adherend W of the second protrusion G3 and has a lower height than the second protrusion G3. Furthermore, as... Figure 12 As shown, multiple first abutting members 11 abut against the first abutted portion G2 through the membrane F, and multiple second abutting members 12 abut against the second abutted portion G4 through the membrane F. By having multiple first abutting members 11 and multiple second abutting members 12 abutting at such a location on the clamp G, the sealing performance of the sealed space surrounded by the membrane F and the clamp G on which the adherend W is placed can be improved. As a result, when adjusting the air pressure inside the chamber 7 of the air pressure adjustment unit 8 described later, the adhesion of the membrane F to the adherend W can be improved.

[0099] <Wrapping Action> Reference Figure 13 as well as Figure 14 . Figure 13 This indicates the state in which the membrane F covers the adherend W. Figure 14 express Figure 13 The interior of chamber 7 in the X direction.

[0100] The first moving mechanism 62 protrudes from the upper chamber member 71 via the guide rail 620, enabling the front end gripping part 60 to move in the X direction to a position further outward than the upper chamber member 71. After the multiple first abutting members 11 and multiple second abutting members 12 have completed contact with the membrane F, the front end gripping part 60 releases its grip on the membrane F and moves in the X direction to a position further outward than the upper chamber member 71. Meanwhile, the second moving mechanism 63 protrudes towards the membrane supply unit 5 via the guide rail 630, enabling the rear end gripping part 61 to move in the opposite direction to the X direction to a position further outward than the upper chamber member 71. After the multiple first abutting members 11 and multiple second abutting members 12 have completed contact with the membrane F, the rear end gripping part 61 releases its grip on the membrane F and moves in the opposite direction to the X direction to a position further outward than the upper chamber member 71. Then, after the displacement unit 9 moves the front end holding part 60 and the rear end holding part 61 to the outside of the upper chamber member 71, the upper chamber member 71 is lowered by abutting against the lower chamber member 72.

[0101] Thus, after the multiple first abutting members 11 and multiple second abutting members 12 have completed contact with the membrane F, the front end gripping portion 60 and the rear end gripping portion 61 release the membrane F from gripping. Therefore, when the membrane F is pressed tightly against the substrate W by the air pressure difference inside the chamber 7, the possibility of the membrane F being pulled out can be prevented. Furthermore, the front end gripping portion 60 and the rear end gripping portion 61 move outwards from the upper chamber member 71, thereby preventing the front end gripping portion 60 and the rear end gripping portion 61 from contacting the lower chamber member 72 when the upper chamber member 71 contacts the lower chamber member 72.

[0102] When the upper chamber member 71 abuts against the lower chamber member 72, and the interior of chamber 7 is sealed, the pressure regulating unit 8 adjusts the pressure inside chamber 7. Specifically, the pressure regulating unit 8 adjusts the pressure in the sealed space (enclosed space) surrounded by the upper chamber member 71 and the lower chamber member 72, and in the outer space relative to the sealed space. For example, the pressure regulating unit 8 depressurizes the interior space of chamber 7. Here, after switching valve 821 to connect pipe 81 to pipe 83, valve 820 is switched to connect pipe 83 to pressure reducing tank 823. Air in the interior space of chamber 7 is discharged from pipe 81 and pipe 83, and the sealed space and the outer space are depressurized together (see reference). Figure 1 Additionally, after sealing the chamber 7, the heating unit 21 is heated to heat the membrane F. The membrane F softens and becomes easily stretchable.

[0103] Next, valve 821 is switched to connect pipe 81 and pipe 84. In the internal space (encasing space) of chamber 7, the outer space above membrane F is opened to the atmosphere via pipe 84, creating a pressure difference between the sealed space and the outer space. Due to this pressure difference, membrane F is drawn to one side of the sealed space. The adhesion of membrane F to the adherend W increases, and membrane F extends in a small, uneven shape to adhere tightly to the adherend W. That is, the adherend W is encased by membrane F. As described above, in this embodiment, it is possible to suppress variations in the elongation of membrane F due to different locations on the adherend W; therefore, during this tight adhesion, the elongation of membrane F due to locational deviations is also suppressed. Furthermore, the pressure adjustment unit 8 may also include a compressor or similar component that pressurizes the outer space above membrane F, or it may be configured to increase the pressure difference between the outer space and the sealed space when the adherend W is encased by membrane F by pressurizing the outer space.

[0104] <Moving out action> Reference Figure 15 . Figure 15 This indicates the state of removing the adherend W covered by the membrane F. Figure 15 This is a cross-sectional view showing the interior of chamber 7 in the X direction. After the membrane F is wrapped around the adherend W, the displacement unit 9 raises the upper chamber member 71. After the upper chamber member 71 rises, the adherend W covered with the membrane F is moved out of chamber 7 by the membrane moving unit 6. For example, the membrane moving unit 6 can adjust the height of the transport table T to be parallel with the transport device 3 when the adherend W is moved out. At this point, the wrapping operation is complete. Thereafter, if necessary, the remaining portion of the membrane F covering the adherend W can also be cut.

[0105] Thus, according to this embodiment, after the film F begins to come into contact with the substrate W but before the contact is completed, the front end holding portion 60 moves in the direction opposite to the X direction. This suppresses the possibility of varying elongation of the film F depending on the location of the substrate W. Therefore, the formation of wrinkles can be prevented.

[0106] <Second Implementation> Reference Figures 16-18 Other configuration examples of the coating device 4 will be described. Figures 16-18 Other internal components of the covering device 4 are indicated. Figure 16 as well as Figure 17 This is equivalent to a view of the chamber 7 of the coating device 4 from the side of the membrane supply unit 5. Figure 18 From Figure 1 The diagram shows the downstream side of the transport path, observing the covering device 4.

[0107] In the first embodiment, the configuration in which the third continuous 23 deforms synchronously with the first continuous 13 via the connecting member 22a, and the fourth continuous 24 deforms synchronously with the second continuous 14 via the connecting member 22b, is described. In this embodiment, the third continuous 23 deforms independently of the first continuous 13, and the fourth continuous 24 deforms independently of the second continuous 14.

[0108] like Figure 16 as well as Figure 17 As shown, the coating device 4 includes a heater displacement unit 28 disposed inside the upper chamber member 71. The heater displacement unit 28 is disposed independently of the displacement unit 9. The heater displacement unit 28 supports the third continuous body 23 and the fourth continuous body 24 so that they can be raised and lowered. In this embodiment, the first continuous body 13 and the third continuous body 23 are not connected. In addition, the second continuous body 14 and the fourth continuous body 24 are not connected. For example, when the membrane F is heated, the third continuous body 23 and the fourth continuous body 24 are raised and lowered by the heater displacement unit 28, and the third continuous body 23 and the first continuous body 13 deform independently, and the fourth continuous body and the second continuous body 14 deform independently. That is, the heater displacement unit 28 can displace the heating unit 21 supported by the third continuous body 23 and the fourth continuous body 24 relative to the adherend W. As a result, the heating position of the adherend W based on the heating unit 21 can be appropriately adjusted.

[0109] In addition, such as Figure 18 As shown, a plurality of heater displacement units 28 are disposed in a first extending direction along a first side of the membrane F. Furthermore, a plurality of heater displacement units 28 are disposed in a second extending direction along a second side of the membrane F (not shown).

[0110] In addition, such as Figure 16 as well as Figure 17 As shown, for example, the heater displacement unit 28 includes a support member 281 supporting the third continuous body 23, a moving mechanism 282 for moving the support member 281 in the up-down direction, and a guide rail 283 for guiding the moving mechanism 282. Additionally, the heater displacement unit 28 includes a support member 284 supporting the fourth continuous body 24, a moving mechanism 285 for moving the support member 284 in the up-down direction, and a guide rail 286 for guiding the moving mechanism 285.

[0111] Support member 281 supports the third continuous body 23 in a deformable manner. For example, support member 281 may also have a pair of rotating members to support the third continuous body 23 by clamping the third continuous body 23 with the pair of rotating members. Support member 284 supports the fourth continuous body 24 in a deformable manner. Support member 284 may also have a pair of rotating members to support the fourth continuous body 24 by clamping the pair of rotating members. The rotating members may be, for example, rollers, sprockets, etc., that can rotate about the Y-axis.

[0112] The moving mechanism 282 and the moving mechanism 285 can be, for example, an actuator, an electric cylinder, an electric ball screw mechanism, etc. For example, the moving mechanism 282 and the moving mechanism 285 are arranged in opposite positions. Figure 17 This indicates that the heater displacement unit 28 moves the third continuous body 23 and the fourth continuous body 24 upwards into the interior of the upper chamber member 71. Furthermore, the moving mechanisms 282 and 285 can also move the support members 281 and 284 synchronously. In this way, the heater displacement unit 28 moves the third continuous body 23 and the fourth continuous body 24 in the vertical direction, thereby enabling the heating unit 21 to be displaced relative to the adhered body W.

[0113] Furthermore, in the first embodiment, an example was described in which the separation distance between the first continuous 13 and the second continuous 14 is constant, but it is also possible for the separation distance between the first continuous 13 and the second continuous 14 to be variable.

[0114] like Figures 16-18 As shown, the covering device 4 includes a continuous body moving unit 29 disposed inside the upper chamber member 71. The continuous body moving unit 29 moves at least one of the continuous bodies, for example, by changing the separation distance between the first continuous body 13 and the second continuous body 14. Thus, the positions of the first continuous body 13 and the second continuous body 14 can be adjusted according to the size of the adhered body W.

[0115] Figure 17 An example is given where the continuous body moving unit 29 moves the first continuous body 13 in the Y direction and the second continuous body 14 in the opposite direction to the Y direction. This movement reduces the separation distance between the first continuous body 13 and the second continuous body 14. Alternatively, the continuous body moving unit 29 may move only the first continuous body 13 in the Y direction, or it may move only the second continuous body 14 in the opposite direction to the Y direction.

[0116] The continuous movement unit 29 includes, for example, a support member 291 that supports the first fixed member 170 to be movable, and a support member 292 that supports the second fixed member 180 to be movable. The support members 291 and 292 are, for example, provided on a guide rail 293, which is disposed inside the upper chamber member 71 and extends along the Y direction. The guide rail 293 guides the support members 291 and 292 in the Y direction and in a direction opposite to the Y direction. Furthermore, the continuous movement unit 29 includes, for example, a movement mechanism 294 capable of moving at least one of the support members 291 and 292 in the Y direction and in a direction opposite to the Y direction. The movement mechanism 294 can be, for example, an actuator, an electric cylinder, an electric ball screw mechanism, etc.

[0117] like Figure 18 As shown, the continuous movement unit 29 includes, for example, a support member 295 that supports the first adjustment device 171 so that it is movable. Additionally, the continuous movement unit 29 includes a support member (not shown) that supports the second adjustment device 181 so that it is movable. The support member 295 and the support member (not shown) are, for example, provided on a guide rail 297, which is disposed inside the upper chamber member 71 and extends along the Y direction. Furthermore, the continuous movement unit 29 includes, for example, a movement mechanism 298 capable of moving either the support member 295 or the support member (not shown) in the Y direction and in a direction opposite to the Y direction. The movement mechanism 298 can be, for example, an actuator, an electric cylinder, an electric ball screw mechanism, etc.

[0118] In this example, the illustration shows moving mechanisms 294 and 298 supported by the two side walls of the upper chamber member 71, but the illustration is not limited to this. For example, a moving mechanism such as an actuator may be installed inside the guide rail 293. Alternatively, for example, a moving mechanism such as an actuator may be installed inside the guide rail 297.

[0119] <Other Implementation Methods> In the above embodiment, an example of covering the substrate W with membrane F by depressurizing the interior of chamber 7 through air pressure adjustment unit 8 and then opening it to the atmosphere was described. The method of covering membrane F with substrate W is not limited to this. For example, membrane F may be covered with substrate W without heating. Alternatively, membrane F may be covered with substrate W without depressurizing the interior of chamber 7. For example, compressed air or the like may be used to pressurize membrane F from the side of membrane F opposite to the substrate W, thereby covering membrane F with substrate W. Alternatively, membrane F may be pressed with a mold or the like, thereby covering it with substrate W.

[0120] Furthermore, in the above embodiments, an example was described where, when the film F held by the front end gripping portion 60 and the rear end gripping portion 61 abuts against the adherend W, a plurality of first abutting members 11 abut against the first side of the film, and a plurality of second abutting members abut against the second side of the film, but this is not a limitation. For example, the covering device 4 may also include: a plurality of first gripping members arranged along the first side of the film F being transported onto the covering body and gripping the first side; and a plurality of second gripping members arranged along the second side of the film F opposite to the first side and gripping the second side. In addition, the covering device 4 may also include a lifting unit that moves the plurality of first gripping members and the plurality of second gripping members up and down along the shape of the adherend W. The covering device 4 may, for example, have the plurality of first gripping members and the plurality of second gripping members grip both sides of the film F held by the front end gripping portion 60 and the rear end gripping portion 61. Then, while in contact with the adherend W, the lifting unit raises and lowers multiple first holding members and multiple second holding members, so that the two sides of the membrane F come into contact with the adherend W.

[0121] The invention is not limited to the above-described embodiments, and various modifications and alterations can be made within the scope of the invention's intent.

Claims

1. A coating device, characterized in that, The coating device comprises: The first gripping part grips the front end of the membrane; A first moving mechanism is capable of moving the first gripping portion in a first direction for transporting the film onto the substrate and in a second direction opposite to the first direction. as well as A displacement mechanism that displaces the first holding portion relative to the adherend by means of the membrane abutting against the adherend. After the membrane begins to come into contact with the adherend and before the contact is completed, the first gripping portion moves in the second direction.

2. The coating device according to claim 1, characterized in that, The first moving mechanism includes a guide rail that allows the first gripping portion to move in the first direction and the second direction.

3. The coating device according to claim 1, characterized in that, The first moving mechanism also includes a first control mechanism, which controls the movement of the first gripping part.

4. The coating device according to claim 1, characterized in that, The coating device also includes: The second gripping part grips the rear end of the membrane such that the membrane covers the adherend; and The second moving mechanism is capable of moving the second gripping part in the first direction and the second direction. After the membrane begins to come into contact with the adherend and before the contact is completed, the second gripping portion moves in the first direction.

5. The coating device according to claim 4, characterized in that, The second moving mechanism includes a guide rail capable of moving the second gripping part in the first direction and the second direction.

6. The coating device according to claim 4, characterized in that, The second moving mechanism also includes a second control mechanism that controls the movement of the second gripping part.

7. The coating device according to claim 4, characterized in that, The first gripping portion and the second gripping portion move in a manner that applies tension to the membrane during the transporting action of transporting the membrane in a way that covers the substrate and the abutting action of abutting the membrane against the substrate.

8. The coating device according to claim 4, characterized in that, The coating device also includes: A roller that supports the film wound into a roll so that it can rotate; and A cutting mechanism that cuts the membrane. After the film is held by the first holding part and the second holding part, the film is cut by the cutting mechanism between the second holding part and the roller.

9. The coating device according to claim 4, characterized in that, The coating device also includes: A first chamber component, which supports the first gripping portion and the second gripping portion so that they are movable; and A second chamber component, disposed below the first chamber component, is used for transporting the adherend. The displacement mechanism causes the membrane held by the first and second holding portions to move relative to the adherend by raising and lowering the first chamber member and the second chamber member relative to each other.

10. The coating device according to claim 9, characterized in that, The covering device also includes a pressure adjustment mechanism that adjusts the pressure in the sealed space surrounded by the membrane and the clamp on which the adhesive is placed, and in the outer space relative to the sealed space, within the space surrounded by the first chamber member and the second chamber member.

11. The coating device according to claim 9, characterized in that, The first moving mechanism is capable of moving the first gripping portion to a position further outward than the first chamber member in the first direction. After the membrane and the adherend have come into contact, the first holding part releases its grip on the membrane and moves in the first direction to a position further outward than the first chamber member. The second moving mechanism is capable of moving the second gripping part to a position further outward than the first chamber member in the second direction. After the membrane and the adherend have come into contact, the second holding part releases the membrane from the grip and moves in the second direction to a position further outward than the first chamber member. After the first and second gripping parts move to the outside of the first chamber member, the displacement mechanism lowers the first chamber member so that the first chamber member abuts against the second chamber member.

12. The coating device according to claim 1, characterized in that, The coating device also includes a heating mechanism that heats the film being transported onto the substrate.

Images