Portable small optical flatness measuring device

Abstract

The invention relates to the technical field of flatness measurement, and discloses a portable small optical flatness measuring device, which comprises an air floatation vibration isolation base, an XY air floatation vibration isolation guide rail is mounted at the top of the air floatation vibration isolation base, and a substrate sliding seat for storing samples is mounted on the XY air floatation vibration isolation guide rail; the measuring machine shell is detachably installed on the top of the air floatation vibration isolation base. According to the portable small optical flatness measuring device, the transparent measuring unit and the opaque measuring unit in the measuring system are switched through the switching unit, so that the two measuring units are alternately aligned with a sample, the same device is compatible with different materials, redundancy of multiple instruments needed in a traditional scheme is avoided, and the measuring efficiency is improved. Transparent and opaque materials can be covered by single equipment, so that the equipment cost and the occupied area are obviously reduced; and the two units are independently mounted on the symmetrical moving seats, and do not shield light paths during switching, so that cross interference between the optical elements of the transparent units and the laser light paths of the non-transparent units is prevented.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of flatness measurement, in particular to a portable small optical flatness measurement device. BACKGROUND

[0002] In the fields of semiconductor, optics, precision manufacturing, etc., the surface flatness of materials such as wafers, glass, ceramics, and metal films directly affects the performance and yield of devices. The existing technology usually adopts the following two schemes:

[0003] For transparent materials (such as glass, sapphire substrate, optical film), mainly rely on white light interferometer or laser interferometer, use wide spectrum light source or single frequency laser to form interference figure between sample surface and reference mirror, obtain nanometer level longitudinal resolution through phase calculation. However, such device has complex optical path, needs precise reference mirror and longitudinal scanning mechanism, is high in cost, and is sensitive to vibration, and is difficult to miniaturize and deploy on site.

[0004] For opaque materials (such as silicon wafer back surface, metal substrate), laser triangulation, confocal or spectral confocal sensor are generally used. These schemes take oblique laser or dispersive objective lens as the core, measure the displacement of diffuse reflection spot through position sensitive detector (PSD) or spectrometer, and then calculate the surface height. Its advantages are relatively simple structure, fast scanning speed, but the lateral resolution is limited by the spot size, and it is difficult to consider transparent samples due to the difference in reflectivity of the material.

[0005] The optical path, detector type and signal processing method of the above two types of measurement principles are significantly different, resulting in that the existing equipment can only cover a single material. If there are transparent and opaque workpieces on the production line, two or more instruments need to be configured, which not only increases the equipment investment and floor space, but also needs to recalibrate the coordinate system when switching samples, reducing the detection efficiency. In addition, the traditional instrument is large in size and requires strict vibration isolation from the environment, which is difficult to meet the needs of portable and on-site rapid measurement.

[0006] Therefore, how to integrate two measurement modes in one device, realize high-precision, fast, and non-interference switching of transparent / opaque materials, and at the same time meet the requirements of miniaturization and low cost, has become a technical problem to be solved in the field of flatness detection. SUMMARY

[0007] (I) Technical problems solved

[0008] In view of the deficiencies of the prior art, the present application provides a portable small optical flatness measurement device to solve the problems described in the background.

[0009] (II) Technical solutions

[0010] In order to achieve the above-mentioned purpose, the application provides the following technical scheme: a portable small optical flatness measuring device comprises:

[0011] The air floating vibration isolation base is provided with an XY air floating vibration isolation rail on the top, and a base slide for storing samples is arranged on the XY air floating vibration isolation rail;

[0012] The measuring machine shell is detachably arranged on the top of the air floating vibration isolation base, and a cylindrical cavity is formed in the inside of the measuring machine shell, and a measuring system for measuring the flatness of the sample is arranged in the cavity;

[0013] The measuring system comprises a transparent measuring unit, an opaque measuring unit and a switching unit;

[0014] The transparent measuring unit is used for measuring the flatness of a transparent object;

[0015] The opaque measuring unit is used for measuring the flatness of an opaque object;

[0016] The switching unit is used for switching the transparent measuring unit and the opaque measuring unit in the measuring system, so as to measure the flatness of the transparent object or the opaque object.

[0017] Preferably, a clamping unit for fixing the sample is arranged on the base slide;

[0018] The clamping unit comprises a plurality of electromagnets embedded on the top of the base slide and a vacuum suction nozzle embedded on the middle part of the base slide;

[0019] The air floating vibration isolation base is provided with a fixing unit for fixing the film-shaped sample.

[0020] Preferably, the transparent measuring unit comprises a wide-spectrum light source, a light splitting prism, a microscopic objective lens, a reference mirror and a first detector;

[0021] The wide-spectrum light source is used for emitting wide-spectrum light;

[0022] The light splitting prism is arranged at 45 degrees and directly below the wide-spectrum light source, and divides the incident light into two paths: one vertically downward to the sample, and the other horizontally to the reference mirror;

[0023] The microscopic objective lens is closely arranged below the light splitting prism, so that the light beam is focused on the upper surface of the sample;

[0024] The first detector is arranged on the horizontal exit side of the light splitting prism, and is used for collecting an interference pattern.

[0025] Preferably, the opaque measuring unit comprises a single-mode semiconductor laser, a projection lens, a receiving lens and a second detector.

[0026] The single-mode semiconductor laser is used for oblique projection of laser;

[0027] The projection lens shapes the laser beam into a collimated spot with a diameter of about 50 μm, and irradiates the sample at an incident angle of θ ≈ 30°;

[0028] The receiving lens is arranged in mirror symmetry with the incident plane, and matches the size of laser speckle;

[0029] The second detector is located at the focal plane of the receiving lens, and is used for triangulation height measurement.

[0030] Preferably, the switching unit comprises a guide rail frame fixed inside the cylindrical cavity, two moving seats are symmetrically and slidingly connected to the guide rail frame, the bottom of each moving seat is fixedly connected with a mounting frame, and the transparent measurement unit and the opaque measurement unit are respectively mounted on the two mounting frames.

[0031] The inside of the cylindrical cavity is provided with a driving member for horizontally driving the transparent measurement unit or the opaque measurement unit, so that the detection end of the transparent measurement unit or the opaque measurement unit faces the sample placed on the substrate slide, forming flatness measurement.

[0032] Preferably, the driving member comprises a sector-shaped frame capable of rotating by 360 degrees, which is used for horizontally driving one of the mounting frames through its rotation;

[0033] Both of the mounting frames are fixedly connected with the bottom of the two moving seats through transmission shafts;

[0034] The inside end of the sector-shaped frame is provided with a notch slightly larger than or equal to the diameter of the transmission shaft, so that the transmission shaft is clamped in the notch, forming self-locking after horizontal adjustment of the transparent measurement unit or the opaque measurement unit;

[0035] Two tension springs for resetting the moving seats are mounted on the guide rail frame.

[0036] Preferably, the inner surface of the cylindrical cavity is connected with a connecting frame in a ring-shaped sliding manner, and the top of the connecting frame is fixedly connected with the sector-shaped frame;

[0037] The bottom of the connecting frame is fixedly connected with a measurement end head, and the bottom of the cylindrical cavity is rotatably connected with a control end head.

[0038] Preferably, the top of the sector-shaped frame is fixedly connected with a gear sleeve, the inside of the cylindrical cavity is fixedly connected with an adjusting motor for rotationally driving the gear sleeve, and the output shaft of the adjusting motor is fixedly connected with a transmission gear meshing with the outer surface of the gear sleeve;

[0039] The measuring system also comprises a discrimination unit for discriminating the transparency of the sample.

[0040] (III) Beneficial Effects

[0041] Compared with the prior art, the present application provides a portable small optical flatness measuring device with the following beneficial effects:

[0042] The present application uses a switching unit to switch the transparent measuring unit and the opaque measuring unit in the measuring system, so that the two measuring units are alternately aligned with the sample, realizing compatibility of different materials in the same device, avoiding the redundancy of multiple instruments in the traditional scheme, and covering transparent and opaque materials with a single device, significantly reducing the equipment cost and floor space; and the two units are independently installed on the symmetrical moving seat, and do not block the light path when switching, preventing the optical elements of the transparent unit and the laser light path of the opaque unit from crossing and interfering with each other; sharing the same air floating vibration isolation base and substrate slide, ensuring that the coordinate system does not need to be recalibrated after switching, and maintaining sub-micron level precision.

[0043] The present application uses a 90° reciprocating rotation mechanism composed of a fan-shaped frame, a tooth sleeve and an adjusting motor to complete the "working position / storage position" switching of the transparent unit and the opaque unit within 0.5s; after rotation to the position, the notch-drive shaft is self-locked, and the repeated positioning accuracy is ≤10μm, without the need for additional locking devices; and the switching process is closed-loop controlled by the discrimination unit: the identifier detects the transparent / non-transparent light signal, so that the motor automatically selects the corresponding measuring unit, with manual zero intervention, reducing the probability of misoperation. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 It is a structural schematic diagram of the portable small optical flatness measuring device of the present application;

[0045] Figure 2 It is a sectional side view of the measuring machine shell of the present application;

[0046] Figure 3 It is a sectional front view of the measuring machine shell of the present application;

[0047] Figure 4 It is a structural schematic diagram of the present application Figure 2 It is a local enlarged view of A in the present application;

[0048] Figure 5 It is a structural schematic diagram of the switching unit of the present application;

[0049] Figure 6 It is a structural schematic diagram of the air floating vibration isolation base of the present application;

[0050] Figure 7 It is a structural schematic diagram of the fixing unit of the present application;

[0051] Figure 8A partial view of the conforming roller and the pressing roller of the present application.

[0052] In the figure: 100, air floating vibration isolation base; 101, XY air floating vibration isolation guide rail; 102, base plate sliding seat; 103, electromagnet; 104, vacuum suction nozzle;

[0053] 110, fixing unit; 111, winding shaft support; 112, U-shaped support; 113, conforming roller; 114, movable cover plate; 115, pressing roller; 116, U-shaped control frame; 117, control rope; 118, arc-shaped driving groove;

[0054] 200, measuring machine shell;

[0055] 300, transparent measuring unit;

[0056] 400, non-transparent measuring unit;

[0057] 500, switching unit; 501, guide rail frame; 502, moving seat; 503, sector frame; 504, transmission shaft; 505, notch; 506, mounting frame; 507, tooth cover; 508, adjusting motor; 509, transmission gear;

[0058] 600, identification unit; 601, laser emitter; 602, identifier. DETAILED DESCRIPTION

[0059] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0060] Embodiment 1:

[0061] Referring to the accompanying drawings, Figures 1 to 8 The portable small optical flatness measuring device comprises:

[0062] The air floating vibration isolation base 100 is provided with the XY air floating vibration isolation guide rail 101 on the top, and the base plate sliding seat 102 for storing samples is installed on the XY air floating vibration isolation guide rail 101.

[0063] In the embodiment, the air floating vibration isolation base 100 and the XY air floating vibration isolation guide rail 101 both adopt the air floating vibration isolation mechanism in the prior art, which is used to reduce the shaking of the measured object and improve the measurement accuracy. The XY air floating vibration isolation guide rail 101 is used to drive the base plate sliding seat 102 to displace in the XY axis direction, so as to realize measurement at different positions.

[0064] A measuring machine housing 200 is detachably mounted on the top of the air floating vibration isolation base 100, the inside of the measuring machine housing 200 is provided with a cylindrical cavity, and a measuring system for measuring the flatness of a sample is arranged in the cavity;

[0065] The measuring system comprises a transparent measuring unit 300, an opaque measuring unit 400 and a switching unit 500;

[0066] The transparent measuring unit 300 is used for measuring the flatness of a transparent object;

[0067] It should be noted that the transparent measuring unit 300 takes a wide-spectrum interference light path as the core, uses a beam splitter prism + a microscopic objective lens + a reference mirror to obtain nanometer-level longitudinal resolution, and can obtain the sub-micron flatness distribution of transparent materials (glass, wafer, optical film, etc.) at one time;

[0068] The opaque measuring unit 400 is used for measuring the flatness of an opaque object;

[0069] It should be noted that the opaque measuring unit 400 adopts a single-mode laser oblique projection-trigonometric height measurement method, the spot diameter is 50 μm, the incident angle is 30°, the microscopic undulation on the back of metal, ceramic and silicon wafer can be scanned at high speed, and the transverse resolution is better than 5 μm;

[0070] The two light paths are independent of each other and do not block each other in the mechanical structure, avoiding the coupling of aberration and the loss of precision caused by the traditional "common objective lens";

[0071] The switching unit 500 is used for switching the transparent measuring unit 300 and the opaque measuring unit 400 in the measuring system, forming the measurement of the flatness of the transparent object or the opaque object;

[0072] By switching the transparent measuring unit 300 and the opaque measuring unit 400 in the measuring system through the switching unit 500, the two measuring units are alternately aligned with the sample, the same device is compatible with different materials, the redundancy of multiple instruments in the traditional scheme is avoided, the two units are independently installed on the symmetrical moving seat 502, the light paths are not blocked when switching, the optical elements of the transparent unit and the laser light path of the opaque unit are prevented from crossing and interfering with each other, and the same air floating vibration isolation base (100) and base plate sliding seat (102) are shared, so that the coordinate system does not need to be recalibrated after switching, and the sub-micron level precision is maintained.

[0073] Through the above arrangement, the transparent material measuring structure and the opaque material measuring structure are independent of each other and do not block each other in the mechanical structure, and share the same sample table and reference coordinate system.

[0074] Referring to the accompanying drawings Figure 1 and Figure 6The substrate slide 102 is provided with a clamping unit for fixing the sample;

[0075] The clamping unit is provided for clamping and fixing the sample to be measured, thereby improving the accuracy of the flatness measurement;

[0076] The clamping unit includes a plurality of electromagnets 103 embedded on the top of the substrate slide 102 and a vacuum nozzle 104 embedded in the middle of the substrate slide 102;

[0077] The electromagnets 103 are used to generate an adsorption force by being energized to adsorb the metal sample to be measured placed on the substrate slide 102, forming a self-fixing work;

[0078] The vacuum nozzle 104 is used to generate an adsorption force by itself to adsorb and fix the non-metal sample to be measured placed on the substrate slide 102, forming a self-fixing work;

[0079] It should be noted that the top of the electromagnet 103 and the vacuum nozzle 104 is flush with the top of the substrate slide 102;

[0080] The air-floating vibration isolation base 100 is provided with a fixing unit 110 for fixing the film-shaped sample;

[0081] The fixing unit 110 is provided for fixing the film-shaped sample, so that the flatness measurement device can meet the flatness measurement work of different materials and improve the application range of the device.

[0082] Referring to the accompanying drawings Figure 2 The transparent measurement unit 300 includes a wide-spectrum light source, a light splitting prism, a microscope objective, a reference mirror, and a first detector;

[0083] The wide-spectrum light source is used to emit wide-spectrum light;

[0084] The light splitting prism is placed at 45 degrees and is located directly below the wide-spectrum light source, splitting the incident light into two paths: one vertically downward to the sample, and the other horizontally to the reference mirror;

[0085] The microscope objective is tightly attached to the lower side of the light splitting prism to focus the light beam onto the upper surface of the sample;

[0086] The first detector is located on the horizontal exit side of the light splitting prism and is used to collect the interference pattern;

[0087] Wide-spectrum light source: halogen lamp or white light LED, with a coherence length of only a few microns; provides a continuous spectrum with a short coherence length, ensuring that visible interference fringes only appear when the optical path lengths of the two arms are almost equal.

[0088] The spectroscope prism divides the incident light into two paths: one path is directed to the objective lens and the surface of the transparent sample to be measured, and the other path is directed to the reference mirror integrated in the objective lens.

[0089] The objective lens + reference mirror: a semi-transparent and semi-reflective micro mirror (i.e. the reference mirror) is placed near the focal plane of the objective lens, with the lower surface as the reference surface; the upper surface continues to focus the light downward to the upper surface of the transparent sample.

[0090] In this way, the measurement light returned from the surface of the sample and the reference light reflected from the reference mirror are superimposed again at the spectroscope prism to form interference.

[0091] The first detector is a CCD / CMOS camera or a spectrometer: when the objective lens is scanned along the optical axis (or the sample is scanned), only when the optical path difference between the measurement light and the reference light falls within the coherence length of the light source, the interference pattern with the maximum contrast appears.

[0092] The surface height can be calculated by one of the following two signal processing methods:

[0093] Vertical scanning white light interference: the peak value of the light intensity envelope of each pixel point at different scanning positions is recorded, and the peak position is the height of the corresponding point.

[0094] Spectral domain interference: if a spectrometer is added in front of the detector, the interference spectrum can be directly collected, and the sub-nanometer level height information can be obtained by Fourier transform or phase calculation.

[0095] Special consideration for the flatness of the transparent sample

[0096] Since the sample is transparent, the upper and lower surfaces will reflect light, and thus two sets of interference patterns will appear. By selecting a suitable reference mirror position and scanning range, only the interference fringes of the "upper surface of the sample-reference mirror" can enter the coherence window, thereby excluding the influence of the lower surface.

[0097] If it is necessary to measure the thickness distribution at the same time, the signals of the upper and lower surfaces can be allowed to enter the coherence window, and the thickness can be calculated by the distance between the two envelopes or the spectral phase difference.

[0098] Refer to the attached Figure 2 The opaque measurement unit 400 includes a single-mode semiconductor laser, a projection lens, a receiving lens, and a second detector;

[0099] The single-mode semiconductor laser is used to project laser obliquely;

[0100] The projection lens shapes the laser beam into a collimated spot with a diameter of about 50 μm, and irradiates the sample at an incident angle of θ ≈ 30°;

[0101] The receiving lens is arranged in mirror symmetry with the incident surface, and matches the size of the laser speckle;

[0102] The second detector is located at the focal plane of the receiving lens for height measurement by triangulation.

[0103] The point-like laser beam is focused by the projection lens and obliquely incident on the opaque sample surface at an angle θ to form a small spot.

[0104] The scattered light of the spot is collected by the receiving lens and imaged on the image plane of the second detector (usually a position sensitive detector (PSD), a four-quadrant detector or a high-speed camera).

[0105] When the flatness of the sample surface changes by Δh, the image point of the spot on the image plane of the detector shifts laterally by Δx; they satisfy Δh = Δx / (M·tanθ);

[0106] where M is the lateral magnification of the receiving lens and θ is the included angle between the light axes of the light projection and light reception.

[0107] By measuring Δx in real time, the height change of the sample surface can be obtained, and the flatness of the entire line or surface can be reconstructed.

[0108] Since the single-mode semiconductor laser has high coherence and good beam quality, the system can obtain micron or even sub-micron longitudinal resolution, and can be directly used for opaque samples without additional mirrors.

[0109] It is noted here that the opaque measurement unit 400 is essentially a laser triangulation profiler.

[0110] Referring to the accompanying drawings Figures 2 to 5 The switching unit 500 includes a guide rail frame 501 fixed inside the cylindrical cavity, two moving seats 502 are symmetrically and slidingly connected to the guide rail frame 501, the bottom of each moving seat 502 is fixedly connected with a mounting frame 506, and the transparent measurement unit 300 and the opaque measurement unit 400 are respectively mounted on the two mounting frames 506;

[0111] By mounting the transparent measurement unit 300 and the opaque measurement unit 400 on the two mounting frames 506, when the two moving seats 502 are displaced relative to or away from each other, the transparent measurement unit 300 and the opaque measurement unit 400 can be simultaneously driven to displace relative to or away from each other, forming switching work of the two measurement units, so as to form flatness measurement work of samples of different materials;

[0112] The inside of the cylindrical cavity is provided with a driving member for horizontally driving the transparent measurement unit 300 or the opaque measurement unit 400, so that the detection end of the transparent measurement unit 300 or the opaque measurement unit 400 faces the sample placed on the substrate slide 102, forming flatness measurement;

[0113] The driving member is used to drive the single displacement of the transparent measuring unit 300 or the opaque measuring unit 400, so that the measuring end of one of the two measuring units is directed to the sample placed on the substrate slide 102 to form the flatness measurement work, and the driving member is driven again to form the measurement work of the other measuring unit, so as to form the flatness measurement work of the sample of different materials.

[0114] Referring to the drawings Figure 4 and Figure 5 The driving member includes a sector 503 that can rotate by 360 degrees, and the sector 503 is used to drive one of the mounting frames 506 horizontally through the rotation thereof;

[0115] The driving member includes the sector 503 that can rotate by 360 degrees, and the sector 503 is used to drive one of the mounting frames 506 through the annular movement thereof, and the continuous movement of the sector 503 can form the switching work of the two mounting frames 506, so as to form the switching work of the transparent measuring unit 300 and the opaque measuring unit 400;

[0116] Both of the mounting frames 506 are fixedly connected to the bottom of the two moving bases 502 through the transmission shafts 504;

[0117] The mounting frame 506 is fixedly connected to the moving base 502 through the transmission shaft 504, so that the horizontal movement of the transmission shaft 504 can drive the horizontal displacement of the mounting frame 506 and the moving base 502 to form the position switching work of the measuring unit;

[0118] The inner side end of the sector 503 is provided with a notch 505 that is slightly larger than or equal to the diameter of the transmission shaft 504, so that the transmission shaft 504 is clamped in the notch 505 to form the self-locking of the transparent measuring unit 300 or the opaque measuring unit 400 after the horizontal adjustment;

[0119] The annular movement of the sector 503 can press one of the transmission shafts 504 through the inclined surface of the side, so that the transmission shaft 504 is horizontally displaced to drive one of the measuring units to be displaced, and when the measuring unit is moved to the center of gravity position of the cylindrical cavity, the transmission shaft 504 is located in the notch 505 at the inner side end of the sector 503, and the transmission shaft 504 is limited by the notch 505 to form the self-locking work of the displacement adjustment of the measuring unit without the need of a single self-locking structure;

[0120] The continuous rotation of the sector 503 can move the transmission shaft 504 in the notch 505 away to form the reset work of the measuring unit, and the continuous movement of the sector 503 can form the switching work of the next measuring unit;

[0121] Two tension springs are installed on the guide rail frame 501 to reset the moving seat 502;

[0122] The two tension springs are used to reset the two moving seats 502, so that when the sector frame 503 loses contact with one of the moving seats 502, the tension spring can drive the horizontally moved moving seat 502 to reset, waiting for the driving work of the next measurement unit.

[0123] Referring to the accompanying Figure 2 , Figure 3 and Figure 5 , the inner surface of the cylindrical cavity is connected in a ring sliding manner with a connecting frame, the top of the connecting frame is fixedly connected with the sector frame 503; the bottom of the cylindrical cavity is rotatably connected with a control end, and the bottom of the connecting frame is fixedly connected with a measurement end;

[0124] By manually rotating the control end, the sector frame 503 can be driven to move in a ring shape through the connecting frame, so that the operator himself can switch the transparent measurement unit 300 or the opaque measurement unit 400 according to the situation of the sample to be measured.

[0125] Embodiment 2: Different from embodiment 1 is that

[0126] Referring to the accompanying Figures 6 to 8 , the fixed unit 110 includes two groups of fixing members, and the two groups of fixing members are drivingly connected through a winding shaft frame 111;

[0127] The winding shaft frame 111 is composed of a winding roller and a self-locking member. By rotating the winding roller, the two groups of fixing members can be driven to form automatic fastening work, and the self-locking member can self-lock the driven winding roller.

[0128] It should be noted that the self-locking member can also be an electric motor with forward and reverse rotation and power-off self-locking, so as to form electric control driving work;

[0129] The fixing member includes a U-shaped support 112 fixed to one side of the air floating vibration isolation base 100, a lamination roller 113 rotatably connected in the inside of the U-shaped support 112, two movable cover plates 114 fixedly connected to the outer surfaces of the two ends of the lamination roller 113, a pressing roller 115 connected between the two movable cover plates 114, an inclined U-shaped control frame 116 fixedly connected between the two ends of the lamination roller 113, a control rope 117 connected between the bottom of the U-shaped control frame 116 and the winding shaft frame 111, and a torsion spring installed between the U-shaped support 112 and the U-shaped control frame 116;

[0130] The setting of the fitting roller 113 is used for winding the end of the film sample, the cooperation control rope 117 drives the fan-shaped movement of the U-shaped control frame 116 through the winding shaft frame 111, which drives the fitting roller 113 to rotate, and then forms the winding of the film sample, and the setting of the pressing roller 115 can press and hold the sample wound on the outer surface of the fitting roller 113, finally guarantee the stability of the film sample after the muscle and bone are formed;

[0131] It should be noted here that the torsional spring is used to reset the U-shaped control frame 116 automatically when the winding shaft frame 111 loses the driving of the control rope 117, so as to form the loosening of the film sample, and thus the replacement work of the film sample is formed;

[0132] The inside of the two movable sleeve plates 114 and the two sides of the U-shaped support 112 are provided with movable grooves and arc-shaped driving grooves 118 into which the ends of the pressing rollers 115 are inserted;

[0133] When the two ends of the pressing roller 115 are inserted into the corresponding movable grooves, the end of the fitting roller 113 is fixedly connected with the movable sleeve plate 114, so that when the fitting roller 113 rotates, the pressing roller 115 is driven to rotate around the fitting roller 113 as the center, and the short of the pressing roller 115 is located in the inside of the arc-shaped driving groove 118, and as shown in the accompanying drawings, the arc-shaped track of the arc-shaped driving groove 118 is in an inner arc state, so that the fitting roller 113 rotates synchronously in the direction of the pressing roller 115, and the distance between the two is pulled in, so as to form the tightening work of the film sample; Figure 7

[0134] The film sample tightening work is good, and the pressing roller 115 and the fitting roller 113 are both arranged in a rotating manner, which can not only improve the uniformity of the film sample force, prevent the film sample from being wrinkled during the tightening process, but also cooperate with the continuous movement of the pressing roller 115 and the rotation of the fitting roller 113, so as to straighten the film sample which is loose after being tightened, and form the tightening-tensioning degree adjustment integrated work.

[0135] Example 3: different from example 1;

[0136] Referring to the accompanying drawings, Figures 3 to 5 The top of the fan-shaped frame 503 is fixedly connected with a tooth sleeve 507, the inside of the cylindrical cavity is fixedly connected with an adjusting motor 508 for rotating driving the tooth sleeve 507, and the output shaft of the adjusting motor 508 is fixedly connected with a transmission gear 509 engaged with the outer surface of the tooth sleeve 507;

[0137] ​The adjusting motor 508 is connected with the control system outside, is a positive and negative rotation non-self-locking motor, and is set by using the connection mode and the coding mode of the prior art. The adjusting motor 508 is used for driving the transmission gear 509 to rotate, so that the gear sleeve 507 is driven to rotate, and finally the sector frame 503 is driven to rotate, thereby forming the switching work of the transparent measurement unit 300 and the non-transparent measurement unit 400.

[0138] It should be noted that the adjusting motor 508 drives the rotation of one quarter of a circle each time, so that the sector frame 503 is rotated by ninety degrees by one time of starting of the adjusting motor 508. Since the transparent measurement unit 300 and the non-transparent measurement unit 400 are in a symmetrical state, when the sector frame 503 is rotated between the two, neither of the two is driven, thereby ensuring the stability of storage and reset of the two.

[0139] The measurement system further comprises an identification unit 600 for identifying the transparency of the sample.

[0140] Through the setting of the identification unit 600, the material of the real-time sample to be measured can be detected, so that the control system of the external device drives the adjusting motor 508 in the switching unit 500, so that the adjusting motor 508 drives the transparent measurement unit 300 or the non-transparent measurement unit 400. According to the identification result of the identification unit 600, the flatness measurement work of the transparent sample or the non-transparent sample is performed, without manual visual identification and manual adjustment, thereby improving the convenience of operation.

[0141] The identification unit 600 comprises a laser emitter 601 mounted on the measurement housing 200 and an identifier 602 mounted on the base plate sliding seat 102. The identifier 602 is used for receiving the light emitted by the laser emitter 601, so as to determine whether the sample is transparent or non-transparent.

[0142] When the identifier 602 can receive the light emitted by the laser emitter 601, it indicates that the sample to be measured is transparent, so that the flatness measurement work of the sample is performed by the transparent measurement unit 300. On the contrary, when the identifier 602 cannot receive the light emitted by the laser emitter 601, it indicates that the sample to be measured is non-transparent, and the light cannot penetrate the sample to be measured, so that the flatness measurement work of the sample is performed by the non-transparent measurement unit 400.

[0143] It should be noted that the identification unit 600 can also use other instruments or methods for detecting the transparent material of the sample to be measured, such as LED photoelectric sensor, spectral analysis technology, optical microscope and imaging technology, and fluorescence method, which are used for detecting the transparency of the sample to be measured.

[0144] Finally, it should be noted that the above is only the preferred embodiment of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application are described in detail, for those skilled in the art, it still can be modified to the technical solution recorded in the foregoing embodiments, or equivalent replacement of some technical features, any modification, equivalent replacement, improvement, etc. within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. A portable, small optical flatness measuring device, characterized in that, include: An air-float vibration isolation base (100) is provided, with an XY air-float vibration isolation guide rail (101) mounted on its top, and a substrate slide (102) for storing samples is mounted on the XY air-float vibration isolation guide rail (101). Measuring housing (200), which is detachably installed on the top of air-float vibration isolation base (100), the measuring housing (200) has a cylindrical cavity inside, and a measuring system for measuring the flatness of the sample is provided inside the cavity. The measurement system includes a transparent measurement unit (300), an opaque measurement unit (400), and a switching unit (500); The transparent measuring unit (300) is used to measure the flatness of transparent objects; The opaque measuring unit (400) is used to measure the flatness of opaque objects; The switching unit (500) is used to switch between the transparent measuring unit (300) and the opaque measuring unit (400) in the measuring system to measure the flatness of the transparent or opaque object.

2. The portable miniature optical flatness measuring device according to claim 1, characterized in that: The substrate slide (102) is provided with a clamping unit for fixing the sample; The clamping unit includes several electromagnets (103) embedded in the top of the substrate slide (102) and a vacuum nozzle (104) embedded in the middle of the substrate slide (102). The air flotation vibration isolation base (100) is equipped with a fixing unit (110) for fixing the membrane sample.

3. The portable miniature optical flatness measuring device according to claim 1, characterized in that: The transparent measurement unit (300) includes a broadband light source, a beam splitter, a microscope objective, a reference mirror, and a first detector; The broadband light source is used to emit broadband light; The beam splitter is positioned at a 45-degree angle and is located directly below the broadband light source, splitting the incident light into two paths: one path is directed vertically downward toward the sample, and the other path is directed horizontally toward the reference mirror. The microscope objective is placed close to the bottom of the beam splitter, so that the beam is focused onto the upper surface of the sample. The first detector is located on the horizontal output side of the beam splitter and is used to acquire interferograms.

4. The portable miniature optical flatness measuring device according to claim 1, characterized in that: The opaque measurement unit (400) includes a single-mode semiconductor laser, a projection lens, a receiving lens, and a second detector; The single-mode semiconductor laser is used for oblique laser projection; The projection lens shapes the laser beam into a collimated spot with a diameter of approximately 50 μm, illuminating the sample at an incident angle of θ≈30°. The receiving lens is arranged in a mirror-symmetric manner with the incident surface to match the laser speckle size; The second detector is located at the focal plane of the receiving lens and is used for triangulation to measure height.

5. The portable miniature optical flatness measuring device according to claim 1, characterized in that: The switching unit (500) includes a guide rail frame (501) fixed inside the cylindrical cavity. Two movable seats (502) are symmetrically slidably connected on the guide rail frame (501). The bottom of each of the two movable seats (502) is fixedly connected to a mounting bracket (506). The transparent measuring unit (300) and the opaque measuring unit (400) are respectively mounted on the two mounting brackets (506). The cylindrical cavity is provided with a driving component for horizontally driving the transparent measuring unit (300) or the opaque measuring unit (400), so that the detection end of the transparent measuring unit (300) or the opaque measuring unit (400) faces the sample placed on the substrate slide (102) to form a flatness measurement.

6. The portable miniature optical flatness measuring device according to claim 5, characterized in that: The drive unit includes a 360-degree rotatable fan-shaped frame (503) for horizontally driving one of the mounting brackets (506) by its own rotation; Both mounting brackets (506) are fixedly connected to the bottom of the two movable seats (502) via a drive shaft (504); The inner end of the fan-shaped frame (503) is provided with a notch (505) larger than or equal to the diameter of the drive shaft (504), so that the drive shaft (504) is locked in the notch (505) to form a self-locking mechanism after the transparent measuring unit (300) or the opaque measuring unit (400) is horizontally adjusted. Two tension springs are installed on the guide rail frame (501) for resetting the movable seat (502).

7. The portable miniature optical flatness measuring device according to claim 6, characterized in that: The inner surface of the cylindrical cavity is connected to a connecting frame in a ring-sliding manner, and the top of the connecting frame is fixedly connected to the fan-shaped frame (503). The bottom of the cylindrical cavity is rotatably connected to a control end, and the bottom of the connecting frame is fixedly connected to the measuring end.

8. The portable miniature optical flatness measuring device according to claim 6, characterized in that: The top of the fan-shaped frame (503) is fixedly connected to a toothed sleeve (507), and the interior of the cylindrical cavity is fixedly connected to an adjusting motor (508) for rotating the toothed sleeve (507), and the output shaft of the adjusting motor (508) is fixedly connected to a transmission gear (509) that meshes with the outer surface of the toothed sleeve (507). The measurement system also includes an identification unit (600) for identifying the transparency of the sample.

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