Tuning fork type piezoelectric vibrating reed and oscillator

Abstract

The embodiment of the invention relates to a tuning fork type piezoelectric vibrating reed and an oscillator, which are used for improving a Q value. The tuning fork type piezoelectric vibrating reed comprises a base part, two vibrating arm parts extending from one end of the base part and a middle island part, the middle island part is located between the two vibrating arm parts, a widened part is arranged at the tail end or in the middle of the middle island part, the length direction of the widened part is perpendicular to the length direction of the middle island part, and the width direction of the widened part is perpendicular to the length direction of the middle island part. The two ends of the widening part in the length direction are each provided with a vibration constraint point. The two vibration restraining points are located on the same main face, and at the two vibration restraining points, an adhesive is used for fixing the middle island part so as to avoid vibration.

Description

[0001] This application is a divisional application of the invention patent application filed on December 29, 2023, with application number 2023118458812 and invention title "A tuning fork type piezoelectric vibrator and oscillator". Technical Field

[0002] This application relates to the field of piezoelectric vibration elements, and in particular to a tuning fork type piezoelectric vibrator and oscillator. Background Technology

[0003] Tuning fork piezoelectric resonators have excellent frequency-temperature characteristics and are widely used as frequency reference sources in various electronic devices. However, with the miniaturization of devices, the temperature difference generated by the bending vibration of tuning fork piezoelectric resonators is difficult to eliminate, resulting in a significant decrease in the Q value. Summary of the Invention

[0004] This application provides a tuning fork type piezoelectric vibrator and an oscillator to improve the Q value.

[0005] In a first aspect, embodiments of this application provide a tuning fork-type piezoelectric vibrator, comprising a base, two vibrating arms extending from one end of the base, and a central island, wherein: The two vibrating arms are provided with driving electrodes, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The intermediate island is located between the two vibrating arms, and two driving electrodes with opposite polarities are simultaneously provided on the intermediate island. A widening portion is provided at the end or middle of the middle island portion, the length direction of the widening portion is perpendicular to the length direction of the middle island portion, and a vibration constraint point is provided at each end of the length direction of the widening portion; the two vibration constraint points are located on the same main surface, and the middle island portion is fixed at the two vibration constraint points using adhesive to avoid vibration.

[0006] In one possible implementation, when the end of the intermediate island is provided with a widened portion, the intermediate island is T-shaped as a whole and symmetrical about the length direction.

[0007] In one possible implementation, when the middle of the central island is widened, the central island is shaped like a cross and is symmetrical about its length.

[0008] In one possible implementation, a through hole is provided on the intermediate island portion, and a connecting electrode is provided on the inner wall of the through hole for connecting the same polarity electrodes of the first main surface and the second main surface of the intermediate island portion, wherein the first main surface and the second main surface are two opposing surfaces.

[0009] In one possible implementation, the through holes are located at both ends of the widened portion along its length.

[0010] In one possible implementation, the location of the vibration constraint point is the same as the location of the through hole.

[0011] Secondly, embodiments of this application provide an oscillator, including the tuning fork type piezoelectric vibrator described in the first aspect.

[0012] The tuning fork piezoelectric vibrator provided in this application has a widened portion on the middle island for fixing the piezoelectric vibrator. Since the widened portion provides a constraint in the width direction, it can effectively suppress energy leakage caused by vibration, thereby improving the Q value.

[0013] Other features and advantages of this application will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures particularly pointed out in the written description, claims, and drawings. Attached Figure Description

[0014] Figure 1 This is a three-dimensional schematic diagram of the tuning fork piezoelectric vibrator provided in Embodiment 1 of this application; Figure 2 This is a schematic diagram of the first main electrode of the tuning fork piezoelectric vibrator provided in Embodiment 1 of this application; Figure 3 This is a schematic diagram of the second main electrode of the tuning fork piezoelectric vibrator provided in Embodiment 1 of this application; Figure 4 This is a cross-sectional schematic diagram of the tuning fork piezoelectric vibrator provided in Embodiment 1 of this application; Figure 5 This is a schematic diagram of the structure of the tuning fork piezoelectric vibrator provided in Embodiment 2 of this application; Figure 6 This is one of the schematic diagrams of the first main electrode of the tuning fork piezoelectric vibrating sheet provided in Embodiment 2 of this application; Figure 7 This is a second schematic diagram of the first main electrode of the tuning fork piezoelectric vibrating sheet provided in Embodiment 2 of this application; Figure 8 This is a schematic diagram of the structure of the tuning fork piezoelectric vibrator provided in Embodiment 3 of this application; Figure 9 This is a schematic diagram of the first main electrode of the tuning fork piezoelectric vibrator provided in Embodiment 3 of this application; Figure 10 This is a schematic diagram of the structure of the tuning fork piezoelectric vibrator provided in Embodiment 4 of this application; Figure 11This is a schematic diagram of the first main electrode of the tuning fork piezoelectric vibrator provided in Embodiment 4 of this application; Figure 12 A cross-sectional schematic diagram of the packaging of the tuning fork type piezoelectric vibrator provided in the embodiments of this application; Attached image labels: 10: Base; 35a, 35b, 36a, 36b: planar driving electrodes; 43, 44: electrode patterns; 11, 12: Vibrating arm; 11a, 11b, 12a, 12b: sidewalls of the vibrating arm; 23a, 24a: first drive groove; 23b, 24b: second drive groove; 31a, 31b, 32a, 32b: sidewall driving electrodes; 33a, 34a: inner wall driving electrodes of the first driving groove; 33b, 34b: inner wall driving electrodes of the second driving groove; 21, 22, 23: Middle island section; 40a, 40b: Through holes; 41, 42: Driving electrodes for the middle island section; 110, 120: Heavy-duty section; 220: Top cap; 221: Top cap adhesive; 222: Side seal; 223: Bottom seal; 224: Bottom cap; 210a, 210b: Vibration restraint point adhesive; 211a, 211b: Base pad. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this application. Obviously, the described embodiments are only some embodiments of the technical solutions of this application, and not all embodiments. Based on the embodiments recorded in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the technical solutions of this application.

[0016] This application provides a tuning fork type piezoelectric vibrating plate, such as Figure 1-7 As shown, it includes a base, two vibrating arms extending from one end of the base, and multiple intermediate islands, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. Multiple intermediate islands are located between the two vibrating arms, arranged in parallel and at certain intervals, and each intermediate island is equipped with a vibration constraint point. At least two of the multiple intermediate islands are provided with driving electrodes, and the polarities of the driving electrodes on the at least two intermediate islands are not exactly the same.

[0017] By using the tuning fork-type piezoelectric vibrator provided in the embodiments of this application, multiple intermediate islands are provided to provide vibration constraint, which can improve the Q value and thus improve the device performance.

[0018] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application. Furthermore, the embodiments and features in the embodiments of this application can be combined with each other without conflict. Example 1

[0019] The tuning fork-type piezoelectric vibrating sheet provided in Embodiment 1 of this application is as follows: Figure 1-4 As shown.

[0020] In this embodiment, as Figure 1 As shown, a tuning fork type piezoelectric vibrator includes a base, two vibrating arms extending from one end of the base, and two intermediate islands, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The two intermediate islands are located between the two vibrating arms, and vibration constraint points are set on the two intermediate islands; Two driving electrodes are provided on the two intermediate islands, and the driving electrodes of the two intermediate islands have opposite polarities.

[0021] In this embodiment, as Figure 2 , Figure 3 As shown, the two middle islands are exactly the same shape, symmetrically arranged, and parallel to each other. That is to say, along the width direction of the middle islands, the tuning fork piezoelectric vibrator has a symmetrical constraint structure.

[0022] By setting a symmetrical constraint structure, energy leakage caused by vibration can be further reduced, and displacement in other directions caused by vibration can also be effectively suppressed, thus ensuring further improvement of Q value.

[0023] Preferably, the vibration constraint point is located at the end of the middle island section.

[0024] In actual implementation, through holes are provided on the two intermediate islands. Both the first and second main surfaces of the intermediate islands are provided with driving electrodes of the same polarity. A connecting electrode is provided on the inner wall of the through hole to connect the electrodes of the same polarity on the first and second main surfaces.

[0025] By setting through holes, the driving electrodes on the sidewalls of the middle island can be omitted, simplifying the manufacturing process.

[0026] Preferably, the through hole is also located at the end of the middle island, at the same position as the vibration constraint point.

[0027] It should be noted that the through hole can also be set in other positions of the tuning fork piezoelectric vibrator, such as on the base. As long as it can connect the electrodes of the same polarity on the first main surface and the second main surface, this application does not limit the specific location of the through hole.

[0028] In this embodiment, as Figure 2 , Figure 3 As shown, the two vibrating arms have the same shape and are symmetrically arranged, and the polarities of the driving electrodes at corresponding positions are opposite. Therefore, the electric driving force generated is in opposite directions, and the two vibrating arms repeatedly approach or move away from each other.

[0029] Each vibrating arm can be implemented in the following form: The first main surface of the vibrating arm is provided with a first drive groove, and the second main surface of the vibrating arm is provided with a second drive groove at a position corresponding to the first drive groove; wherein, the first main surface and the second main surface are two opposing surfaces.

[0030] In actual implementation, the lengths of the first drive groove and the second drive groove account for 60%-80% of the length of the vibrating arm.

[0031] Preferably, the length, width and depth of the first drive slot and the second drive slot are exactly the same.

[0032] like Figure 2 , Figure 3 As shown, the inner wall of the first drive groove is provided with an inner wall drive electrode, and the inner wall of the second drive groove is provided with an inner wall drive electrode; the side wall of the vibrating arm is provided with a side wall drive electrode; the polarity of the inner wall drive electrode of the first drive groove is the same as the polarity of the inner wall drive electrode of the second drive groove, and opposite to the polarity of the side wall drive electrode.

[0033] At this point, the cross-section of the tuning fork piezoelectric vibrator at the through hole is as follows: Figure 4 As shown, the cross-section of the vibrating arm is "H" shaped.

[0034] This allows for the generation of a sufficiently large electric field driving force to drive the vibrating arm to perform alternating bending vibrations, while preventing the crystal impedance value from being too large and affecting the device performance.

[0035] It should be noted that in other embodiments of this application, the vibrating arm may also be implemented in other forms, and this application does not make specific limitations on this.

[0036] In this embodiment, as Figure 1 As shown, the tuning fork type piezoelectric vibrator also includes two weight-applying parts located at the ends of the two vibrating arms. The two weight-applying parts have the same shape and are symmetrically arranged, and the polarities of the driving electrodes at corresponding positions are opposite.

[0037] In actual implementation, the width of the weight-applying part is slightly larger than the width of the vibrating arm. A width transition area is provided near the vibrating arm of the weight-applying part, and its shape is a straight line connection.

[0038] By setting up a weighting element, the resonant frequency of the vibrating plate can be effectively reduced, and coarse adjustment of the resonant frequency can be achieved.

[0039] Preferably, the end of the weighting part is provided with a metal of a preset thickness, which can achieve fine adjustment of the resonant frequency.

[0040] like Figure 2 , Figure 3 As shown, driving electrodes are provided on both the first and second main surfaces of the weight-applying part. The polarity of the driving electrodes of the weight-applying part is opposite to the polarity of the driving electrodes on the inner wall of the first driving groove on the first main surface of the corresponding vibrating arm part and the polarity of the driving electrodes on the inner wall of the second driving groove on the second main surface.

[0041] In this embodiment, as Figure 1 As shown, the tail end of the base is arc-shaped, that is, the rear side between the first main surface and the second main surface is curved.

[0042] By setting an arc-shaped base end, the energy circle formed by vibration can be completely confined within the coverage area of ​​the base shape. This makes it difficult for displacement changes caused by vibration to be transmitted from the vibrating arm to the base, thus effectively reducing vibration leakage from the vibrating arm to the base and further improving the Q value.

[0043] It should be noted that in other embodiments of this application, the tail end of the base may also be of other shapes, and this application does not specifically limit this.

[0044] In actual implementation, a planar drive electrode can be provided on the base to realize the electrode connection between the vibrating arm and the middle island.

[0045] In this embodiment, each driving electrode can be made of a metal with good conductivity. The electrodes are attached to the piezoelectric vibrating sheet by sputtering, and the thickness is usually 50nm-200nm.

[0046] The electrode polarity of the first main surface of the tuning fork-type piezoelectric vibrator provided in Embodiment 1 of this application is as follows: Figure 2 As shown, the electrode polarity of the second principal surface is as follows: Figure 3 As shown, different shades of gray represent different electrode polarities.

[0047] For the first polarity, such as Figure 2 As shown, the driving electrode 41 on the first main surface of the middle island portion 21 is connected to the planar driving electrode 35a and the inner wall driving electrode 33a of the first driving groove 23a of the vibrating arm portion 11 through the electrode pattern; as Figure 3As shown, the driving electrode 41 on the second main surface of the middle island 21 is connected to the side wall driving electrode 32b of the vibrating arm 12, the driving electrode of the weighting part 120, and the side wall driving electrode 32a of the vibrating arm 12 through the electrode pattern 44. At the same time, the driving electrode 41 on the second main surface of the middle island 21 is connected to the planar driving electrode 36a and the inner wall driving electrode 33b of the second driving groove 23b of the vibrating arm 11 through the electrode pattern. The driving electrodes 41 on the first and second main surfaces of the middle island 21 are connected through the connecting electrode on the inner wall of the through hole 40a, thereby realizing the connection of the first polarity electrode on the two main surfaces of the tuning fork piezoelectric vibrator.

[0048] Correspondingly, for the second type of polarity, such as Figure 2 As shown, the driving electrode 42 on the first main surface of the intermediate island portion 22 is connected to the side wall driving electrode 31a of the vibrating arm portion 11, the driving electrode of the weighting portion 110, and the side wall driving electrode 31b of the vibrating arm portion 11 via the electrode pattern 43. Simultaneously, the driving electrode 42 on the first main surface of the intermediate island portion 22 is connected to the planar driving electrode 35b and the inner wall driving electrode 34a of the first driving groove 24a of the vibrating arm portion 12 via the electrode pattern. Figure 3 As shown, the driving electrode 42 on the second main surface of the middle island 22 is connected to the planar driving electrode 36b and the inner wall driving electrode 34b of the second driving groove 24b of the vibrating arm 12 through the electrode pattern; the driving electrodes 42 on the first and second main surfaces of the middle island 22 are connected through the connecting electrode on the inner wall of the through hole 40b, thereby realizing the connection of the second polarity electrode on the two main surfaces of the tuning fork piezoelectric vibrator. Example 2

[0049] The tuning fork-type piezoelectric vibrating sheet provided in Embodiment 2 of this application is as follows: Figure 5-7 As shown.

[0050] In this embodiment, as Figure 5 As shown, a tuning fork type piezoelectric vibrator includes a base, two vibrating arms extending from one end of the base, and three intermediate islands, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The three intermediate islands are located between the two vibrating arms, and vibration constraint points are set on the three intermediate islands. At least two of the three intermediate islands are provided with driving electrodes, and the polarities of the driving electrodes on the at least two intermediate islands are not exactly the same.

[0051] In other words, the tuning fork piezoelectric vibrator provided in Embodiment 2 of this application has the following two implementation methods: Method 1: For example Figure 6As shown, when driving electrodes are provided on two of the three intermediate islands, the polarities of the driving electrodes on the two intermediate islands are opposite.

[0052] In practice, the driving electrodes can be set on the middle islands on either side of the three middle islands.

[0053] At this point, through holes can be provided on the two intermediate islands where the driving electrodes are located.

[0054] Method 2: For example Figure 7 As shown, driving electrodes are provided on all three intermediate islands, with the driving electrodes of two intermediate islands having the same polarity and the driving electrodes of the other intermediate island having the opposite polarity.

[0055] At this time, a through hole can be provided on at least one of the two intermediate islands with the same driving electrode polarity, and a through hole can be provided on the other intermediate island with the opposite driving electrode polarity.

[0056] Preferably, for the middle island section with through holes, the position of the through holes is the same as the position of the vibration constraint points, both located at the end of the middle island section.

[0057] The specific implementation of other parts of the tuning fork piezoelectric vibrator provided in Embodiment 2 of this application can be found in the aforementioned Embodiment 1, and will not be repeated here.

[0058] In other embodiments of this application, the number of intermediate island portions included in the tuning fork piezoelectric vibrator may be four, five, or other numbers, which will not be described in detail here.

[0059] It should be noted that at the vibration constraint points of the middle island, adhesive is usually used to fix the middle island to prevent vibration. When there are many middle islands, in order to avoid the problem of electrode polarity being connected due to the small spacing between the middle islands, at least one of the following two methods can be used: Method 1: Along the length of multiple intermediate islands, the vibration constraint points of any two adjacent intermediate islands are staggered to avoid short circuits caused by adhesive flow. Method 2: Drive electrodes are set on the middle islands on both sides, and no drive electrodes are set on the other middle islands.

[0060] This application also provides a tuning fork type piezoelectric vibrating sheet, such as Figure 8-11 As shown, it includes a base, two vibrating arms extending from one end of the base, and a central island, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The middle island is located between the two vibrating arms, and vibration constraint points are set on the middle island. Two driving electrodes with opposite polarities are simultaneously provided on the central island section.

[0061] By using the tuning fork-type piezoelectric vibrator provided in the embodiments of this application, a central island is provided to provide vibration constraint, which can improve the Q value and thus improve the device performance.

[0062] Furthermore, it can effectively enhance the strength of the central island and prevent cracking due to excessive stress.

[0063] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application. Furthermore, the embodiments and features in the embodiments of this application can be combined with each other without conflict. Example 3

[0064] The tuning fork-type piezoelectric vibrating sheet provided in Embodiment 3 of this application is as follows: Figure 8-9 As shown.

[0065] In this embodiment, as Figure 8 As shown, a tuning fork type piezoelectric vibrator includes a base, two vibrating arms extending from one end of the base, and a central island, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The middle island is located between the two vibrating arms. A widened section is provided at the end of the middle island, and vibration constraint points are provided at both ends of the widened section. like Figure 9 As shown, two driving electrodes with opposite polarities are simultaneously arranged on the middle island section.

[0066] The length direction of the widened portion is perpendicular to the length direction of the middle island portion. In other words, in Embodiment 3 of this application, the middle island portion is T-shaped and symmetrical about the length direction.

[0067] By setting a "T"-shaped central island, the spacing in the width direction can be widened, thereby better preventing displacement in other directions and effectively improving the Q value.

[0068] At this point, two through holes can be set on the middle island section. Preferably, the positions of the through holes are the same as the positions of the vibration constraint points, both located at the two ends of the widened section.

[0069] The specific implementation of other parts of the tuning fork piezoelectric vibrator provided in Embodiment 3 of this application can be found in the aforementioned Embodiment 1, and will not be repeated here. Example 4

[0070] The tuning fork-type piezoelectric vibrating sheet provided in Embodiment 4 of this application is as follows: Figure 10-11 As shown.

[0071] In this embodiment, as Figure 10 As shown, a tuning fork type piezoelectric vibrator includes a base, two vibrating arms extending from one end of the base, and a central island, wherein: Two driving electrodes are provided on the two vibrating arms, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The middle island is located between the two vibrating arms. A widened section is provided in the middle of the middle island, and vibration constraint points are provided at both ends of the widened section. like Figure 11 As shown, two driving electrodes with opposite polarities are simultaneously arranged on the middle island section.

[0072] In this embodiment, the length direction of the widened portion is perpendicular to the length direction of the middle island portion. That is to say, in embodiment 4 of this application, the middle island portion is shaped like a "+" and is symmetrical about the length direction.

[0073] By setting a "+" shaped central island, the spacing in the width direction can be widened, which can better prevent displacement in other directions and effectively improve the Q value.

[0074] At this point, two through holes can be set on the middle island section. Preferably, the positions of the through holes are the same as the positions of the vibration constraint points, both located at the two ends of the widened section.

[0075] The specific implementation of other parts of the tuning fork piezoelectric vibrator provided in Embodiment 4 of this application can be found in the aforementioned Embodiment 1, and will not be repeated here.

[0076] In other embodiments of this application, the central island portion of the tuning fork piezoelectric vibrator may also be of other shapes, which will not be described in detail here.

[0077] This application also provides an oscillator, including the tuning fork type piezoelectric vibrator provided in the foregoing embodiments. The piezoelectric vibrator is housed in the internal space of the package and vacuum-sealed, thus having a certain degree of airtightness.

[0078] The packaging cross-sectional view provided in the embodiments of this application is as follows: Figure 12 As shown, the packaging structure includes an upper cover, side packages, a lower package, and a lower cover. The side packages and the lower package are integrated, and the upper cover and the side packages are connected by adhesive. By applying an adhesive around the perimeter, the tightness of the packaging is ensured, maximizing the internal vacuum environment.

[0079] In this embodiment, a power supply point for a tuning fork-type piezoelectric vibrator is provided on the middle island portion where the driving electrode is located.

[0080] In practice, two vibration constraint points with opposite electrode polarities can be selected, and conductive particles can be added to the corresponding adhesive so that these two vibration constraint points with opposite electrode polarities can be used as power supply points for the tuning fork type piezoelectric vibrator, which can simplify the production process.

[0081] Taking the tuning fork-type piezoelectric vibrator provided in Embodiment 1 of this application as an example, such as Figure 12 As shown, inside the package, the vibration constraint points of the two intermediate islands are fixed to the base pad of the lower package body with adhesive. The driving electrodes of the two intermediate islands have opposite polarities. Therefore, conductive particles can be added to the adhesive at the vibration constraint points of the two intermediate islands, allowing power to be input from the vibration constraint points to the electrodes of the tuning fork piezoelectric vibrator. The power supply circuit is also housed within the internal space of the package. Figure 12 Not shown in the image.

[0082] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0083] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A tuning fork type piezoelectric vibrator, characterized in that, It includes a base, two vibrating arms extending from one end of the base, and an intermediate island, wherein: The two vibrating arms are provided with driving electrodes, and the driving electrodes at corresponding positions on the two vibrating arms have opposite polarities. The intermediate island is located between the two vibrating arms, and two driving electrodes with opposite polarities are simultaneously provided on the intermediate island. A widening portion is provided at the end or middle of the middle island portion, the length direction of the widening portion is perpendicular to the length direction of the middle island portion, and a vibration constraint point is provided at each end of the length direction of the widening portion; the two vibration constraint points are located on the same main surface, and the middle island portion is fixed at the two vibration constraint points using adhesive to avoid vibration.

2. The tuning fork type piezoelectric vibrator according to claim 1, characterized in that, When the end of the middle island is widened, the middle island is T-shaped and symmetrical about its length.

3. The tuning fork type piezoelectric vibrator according to claim 1, characterized in that, When the middle of the central island is widened, the central island is shaped like a cross and is symmetrical about its length.

4. The tuning fork type piezoelectric vibrating sheet according to any one of claims 1-3, characterized in that, The intermediate island is provided with a through hole, and the inner wall of the through hole is provided with a connecting electrode for connecting the same polarity electrodes of the first main surface and the second main surface of the intermediate island, wherein the first main surface and the second main surface are two opposite surfaces.

5. The tuning fork type piezoelectric vibrating sheet according to claim 4, characterized in that, The through holes are located at both ends of the widened portion along its length.

6. The tuning fork type piezoelectric vibrator according to claim 5, characterized in that, The location of the vibration constraint point is the same as the location of the through hole.

7. An oscillator, characterized in that, Including the tuning fork type piezoelectric vibrating plate as described in any one of claims 1-6.

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