Switching and micro-rotation Mask adjusting device
By designing a micro-rotation mask adjustment device, the problems of difficulty in controlling volume, thickness, and precision in existing technologies have been solved, thereby improving the stability and processing efficiency of high-precision optical masks.
Patent Information
- Application Number
- CN202511188130.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-25
- Publication Date
- 2025-11-21
AI Technical Summary
Existing mask adjustment devices are bulky and difficult to control in terms of precision, which affects processing efficiency and optical effects.
A micro-rotation mask adjustment device is adopted, including an optical mask, a pitch adjustment assembly, a horizontal adjustment assembly, and a height adjustment assembly. High-precision positioning is achieved through precision threaded connections and grating rulers, reducing thickness and weight, and improving the verticality and stability of the optical mask.
It achieves high-precision adjustment of the optical mask, avoids light diffraction effects, improves the compatibility and efficiency of processing equipment, and reduces the risk of load and sway.
Smart Images
Figure CN120993659A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of automated processing, specifically to a switching and micro-rotation mask adjustment device. Background Technology
[0002] Mask adjustment devices are core tools in integrated circuit manufacturing. Laser-driven transfer technology is applied in the field of Micro LED processing: the wafer consists of a transparent substrate such as quartz or sapphire, with the chip supported by an intermediate material (adhesive layer). A laser irradiates the transparent substrate, causing a reaction on the material (adhesive layer), and selective transfer of the chip is achieved using a laser mask. With the increasing variety of chips, different optical masks are needed on a single machine to process different chips. During the switching between different chip processing, manual mask replacement and adjustments are required, impacting wafer processing efficiency.
[0003] Existing technology uses two sets of slit devices stacked together to adjust the slit width in the horizontal and vertical directions, which makes it difficult to ensure the horizontal and verticality of the cross-section, and the increased thickness makes it easy to produce light diffraction effects. Summary of the Invention
[0004] The purpose of this invention is to provide a switching and micro-rotation mask adjustment device to solve the technical problem of the thick volume of double-layer superimposed masks and the difficulty in controlling precision mentioned in the background art.
[0005] To achieve the above objectives, the present invention provides the following technical solution: A micro-rotation mask adjustment device includes an optical mask plate, a pitch adjustment assembly, a horizontal adjustment assembly, and a height adjustment assembly; the pitch adjustment assembly includes a pitch adjustment plate, a precision adjustment screw, a locking device, a fixed wire, a tension spring assembly, a pressure plate, a pitch adjustment support assembly, and a set screw. An optical mask is set inside the pitch adjustment plate cavity; the mask is fixed by a set screw and a pressure plate; the pitch adjustment plate is fixed to the horizontal axis sliding plate by a tension spring assembly and a pitch adjustment support assembly; the precision adjustment screw is connected to the horizontal axis sliding plate by a thread; the locking device is also connected to the precision adjustment screw by a thread; and a fixed wire is installed on the locking device.
[0006] Preferably, the horizontal adjustment assembly includes a horizontal axis sliding plate, a horizontal axis guide rail, a horizontal axis nut seat, a horizontal axis motor, a horizontal axis front bearing seat, a horizontal axis sensor, a horizontal axis precision lead screw, a horizontal axis protective cover, a horizontal axis sensing plate, a horizontal axis sliding plate connecting block, a horizontal axis rear bearing seat, a horizontal axis motor mounting base, a coupling, a horizontal axis lead screw nut, a reading head one, and a grating ruler two. The horizontal axis front bearing housing, horizontal axis sensor, horizontal axis protective cover, horizontal axis rear bearing housing, horizontal axis motor mounting base, and grating ruler are all mounted on the lifting axis sliding plate. The horizontal axis motor is mounted on the horizontal axis motor mounting base. The horizontal axis precision lead screw is mounted on the horizontal axis front bearing housing and the horizontal axis rear bearing housing. The horizontal axis precision lead screw coupling is connected to the horizontal axis motor. The horizontal axis precision lead screw and the horizontal axis lead screw nut are connected by threads. The horizontal axis lead screw nut is mounted on the horizontal axis nut seat. The horizontal axis nut seat is equipped with a lifting axis sensor plate. The horizontal axis nut seat is connected to the horizontal axis sliding plate through the horizontal axis sliding plate connecting block. The horizontal axis sliding plate is equipped with a horizontal axis guide rail connected to the lifting axis sliding plate. The horizontal axis sliding plate is equipped with a reading head.
[0007] Preferably, the lifting adjustment assembly includes a lifting shaft sliding plate, a lifting shaft guide rail, a lifting shaft nut seat, a lifting shaft motor, a lifting shaft front bearing seat, a lifting shaft sensor, a lifting shaft precision lead screw, a lifting shaft protective cover, a lifting shaft sensing plate, a lifting shaft sliding plate connecting block, a lifting shaft rear bearing seat, a lifting shaft motor mounting base, a coupling, a horizontal shaft lead screw nut, a lifting shaft base plate, two reading heads, and two grating rulers. The lifting shaft base plate is equipped with a lifting shaft front bearing seat, a lifting shaft sensor, a lifting shaft protective cover, a lifting shaft rear bearing seat, a lifting shaft motor mounting seat, and two grating rulers. The lifting shaft motor is mounted on the lifting shaft motor mounting seat. The lifting shaft precision lead screw is mounted on the lifting shaft front bearing seat and the lifting shaft rear bearing seat. The lifting shaft precision lead screw is connected to the lifting shaft motor via a coupling. The lifting shaft precision lead screw and the lifting shaft lead screw nut are connected by threads. The lifting shaft lead screw nut is mounted on the lifting shaft nut seat. The lifting shaft nut seat is equipped with a lifting shaft sensor plate. The lifting shaft nut seat is connected to the lifting shaft sliding plate via a horizontal shaft sliding plate connecting block. The lifting shaft sliding plate is equipped with a lifting shaft guide rail connected to the lifting shaft base plate. The lifting shaft sliding plate is equipped with two reading heads.
[0008] Preferably, it also includes a pressure plate, a base, a turntable, a motor support, a bearing, a torque motor stator, a torque motor mover, three reading heads, three grating rulers, and a fixed support; The rotary bearing is located between the pressure plate and the base, and inside the rotary bearing is located between the turntable and the motor support. The base is equipped with a torque motor stator and a reading head, and its bottom is connected to the fixed support. The motor support is equipped with a torque motor mover and a grating ruler. The turntable is connected to the lifting shaft base plate.
[0009] Compared with the prior art, the beneficial effects of the present invention are: 1. The pitch adjustment component is fixedly integrated on the switching component, eliminating the need for an adjustment substrate, effectively reducing the thickness of the adjustment module and shortening the optical path. At the same time, pitch adjustment is beneficial for the perpendicular incidence of incident light, avoiding shadow effects and uneven exposure caused by angle deviation. 2. The switching component's lifting shaft sliding plate and horizontal shaft fixing plate are integrated into one piece, reducing thickness and weight. Side-driven operation expands the hollow area, ensuring sufficient light transmission aperture, while the inclusion of a grating ruler facilitates high-precision positioning. 3. The reduction in the size of the pitch and switching components in the device not only shortens the load cantilever of the micro-motion rotation component, but also reduces the load and improves the anti-sway capability of the Mask rotation. At the same time, the grating ruler facilitates high-precision positioning. 4. The device uses a mask plate instead of the traditional bidirectional adjustable slit, which can process a variety of chips, improving the compatibility and processing efficiency of laser processing equipment. Attached Figure Description
[0010] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the planar structure of the horizontal adjustment component of the present invention; Figure 3 This is a schematic diagram of the planar structure of the lifting and adjusting component of the present invention; Figure 4 This is a cross-sectional view of the support assembly of the present invention. Detailed Implementation
[0011] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.
[0012] Example
[0013] A micro-rotation mask adjustment device and a chip mass transfer device, as shown in the attached figure. Figure 1-4As shown, it includes the following features: optical mask 101, pitch adjustment plate 201, precision adjustment screw 202, locking device 203, fixed wire 204, tension spring assembly 205, pressure plate 206, pitch adjustment support assembly 207, set screw 208, horizontal axis sliding plate 301, horizontal axis guide rail 302, horizontal axis nut seat 303, horizontal axis motor 304, horizontal axis front bearing seat 305, horizontal axis sensor 306, horizontal axis precision lead screw 307, horizontal axis protective cover 308, horizontal axis sensing plate 309, horizontal axis sliding plate connecting block 310, horizontal axis rear bearing seat 311, horizontal axis motor mounting base 312, coupling 313, horizontal axis lead screw nut 314, reading head 315, and grating ruler 316. The components include: lifting shaft sliding plate 401, lifting shaft guide rail 402, lifting shaft nut seat 403, lifting shaft motor 404, lifting shaft front bearing seat 405, lifting shaft sensor 406, lifting shaft precision lead screw 407, lifting shaft protective cover 408, lifting shaft sensing plate 409, lifting shaft sliding plate connecting block 410, lifting shaft rear bearing seat 411, lifting shaft motor mounting seat 412, coupling 413, horizontal shaft lead screw nut 414, lifting shaft base plate 415, reading head two 416, grating ruler two 417, pressure plate 501, base 502, turntable 503, motor support seat 504, bearing 505, torque motor stator 506, torque motor mover 507, reading head three 508, grating ruler three 509, and fixed support 510.
[0014] The specific connection methods and the functions of each component are as follows: like Figure 1 As shown, the optical mask 101 is disposed inside the cavity of the pitch adjustment plate 201. The mask 101 is fixed by the set screw 208 and the pressure plate 206, so that it is firmly fixed along the right-angle side inside the cavity of the pitch adjustment plate 201 without swaying, ensuring stability and reliability. The pitch adjustment plate 201 is fixed on the horizontal axis sliding plate 301 by the tension spring assembly 205 and the pitch adjustment support assembly 207. The precision adjustment screw 202 is threadedly connected to the horizontal axis sliding plate 301, and the locking device 203 is also threadedly connected to the precision adjustment screw 202. A fixed wire 204 is installed on the locking device 203. By adjusting the precision adjustment screw 202, the pitch adjustment plate 201 can be angled (pitch, yaw) along the center point of the pitch adjustment support assembly 207. When adjusted to a suitable position, the fixed wire 204 is locked to ensure that the threads of the pitch adjustment plate 201 and the precision adjustment screw 202 are loosened, so that it is firmly fixed. The pitch adjustment plate 201 can be adjusted to facilitate the vertical passage of the laser through the optical mask plate 101; like Figure 2As shown, the lifting shaft sliding plate 401 is equipped with a horizontal shaft front bearing seat 305, a horizontal shaft sensor 306, a horizontal shaft protective cover 308, a horizontal shaft rear bearing seat 311, a horizontal shaft motor mounting seat 312, and a grating ruler 316. The horizontal shaft motor 304 is mounted on the horizontal shaft motor mounting seat 312. The horizontal shaft precision lead screw 307 is mounted on the horizontal shaft front bearing seat 305 and the horizontal shaft rear bearing seat 311. The horizontal shaft precision lead screw 307 is connected to the horizontal shaft motor 304 via a coupling 313. The horizontal shaft precision lead screw 307 is threadedly connected to the horizontal shaft lead screw nut 314, which is mounted on the horizontal shaft nut seat 316. On the 03, the horizontal axis nut seat 303 is equipped with a lifting axis sensing plate 309. The horizontal axis nut seat 303 is connected to the horizontal axis sliding plate 301 through the horizontal axis sliding plate connecting block 310. The horizontal axis sliding plate 301 is equipped with a horizontal axis guide rail 302 connected to the lifting axis sliding plate 401. The horizontal axis sliding plate 301 is equipped with a reading head 315. The horizontal axis motor 304 drives the horizontal axis precision lead screw 307 to rotate. Through the horizontal axis sliding plate connecting block 310, the horizontal axis sliding plate 301 moves linearly. The reading head 315 collects the position information of the grating ruler 316 to realize MASK switching. It has high accuracy, stability and reliability.
[0015] like Figure 3 As shown, the lifting shaft base plate 415 is equipped with a lifting shaft front bearing seat 405, a lifting shaft sensor 406, a lifting shaft protective cover 408, a lifting shaft rear bearing seat 411, a lifting shaft motor mounting seat 412, and a grating ruler 417. The lifting shaft motor 404 is mounted on the lifting shaft motor mounting seat 412. The lifting shaft precision lead screw 407 is mounted on the lifting shaft front bearing seat 405 and the lifting shaft rear bearing seat 411. The lifting shaft precision lead screw 407 is connected to the lifting shaft motor 404 through a coupling 413. The lifting shaft precision lead screw 407 is threadedly connected to the lifting shaft lead screw nut 414. The lifting shaft lead screw nut 414 is mounted on the lifting shaft nut seat 403. The lifting shaft nut seat 403 is equipped with a lifting shaft sensing plate 409. The lifting shaft nut seat 403 is connected to the lifting shaft sliding plate 401 through the horizontal shaft sliding plate connecting block 410. The lifting shaft sliding plate 401 is equipped with a lifting shaft guide rail 402 connected to the lifting shaft base plate 415. The lifting shaft sliding plate 401 is equipped with a second reading head 416. The lifting shaft motor 404 drives the lifting shaft precision lead screw 407 to rotate. Through the lifting shaft sliding plate connecting block 410, the lifting shaft sliding plate 401 moves linearly. The second reading head 416 collects the position information of the second grating ruler 417 to realize the center adjustment of the mask plate and ensure that the optical axis passes through the center. Its accuracy, stability and reliability are high.
[0016] like Figure 4As shown, the rotary bearing 505 is disposed between the pressure plate 501 and the base 502, and its outer ring is fixed by locking. The rotary bearing 505 is disposed between the turntable 503 and the motor support 504, and its inner ring is fixed by locking. The base 502 is provided with a torque motor stator 506 and a reading head 508, and its bottom is connected to the fixed support 510. The motor support 504 is provided with a torque motor mover 507 and a grating ruler 509. The turntable 503 is disposed and connected to the lifting shaft base plate 415. The driving torque motor drives the mask plate 101 to rotate through the turntable 503. The reading head 508 collects the position information of the grating ruler 509 to realize the rotation angle correction. Its structure is compact and has high precision, stability and reliability.
[0017] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A micro-rotation mask adjustment device, characterized in that, It includes an optical mask (101), a pitch adjustment assembly, a horizontal adjustment assembly, and a height adjustment assembly; the pitch adjustment assembly includes a pitch adjustment plate (201), a precision adjustment screw (202), a locking device (203), a fixed wire (204), a tension spring assembly (205), a pressure plate (206), a pitch adjustment support assembly (207), and a set screw (208); An optical mask (101) is disposed inside the cavity of a pitch adjustment plate (201); the mask (101) is fixed by a set screw (208) and a pressure plate (206); the pitch adjustment plate (201) is fixed on a horizontal axis sliding plate (301) by a tension spring assembly (205) and a pitch adjustment support assembly (207); a precision adjustment screw (202) is threadedly connected to the horizontal axis sliding plate (301); a locking device (203) is threadedly connected to the precision adjustment screw (202); and a fixed wire (204) is installed on the locking device (203).
2. The micro-rotation mask adjustment device according to claim 1, characterized in that, The horizontal adjustment assembly includes a horizontal axis sliding plate (301), a horizontal axis guide rail (302), a horizontal axis nut seat (303), a horizontal axis motor (304), a horizontal axis front bearing seat (305), a horizontal axis sensor (306), a horizontal axis precision lead screw (307), a horizontal axis protective cover (308), a horizontal axis sensing plate (309), a horizontal axis sliding plate connecting block (310), a horizontal axis rear bearing seat (311), a horizontal axis motor mounting seat (312), a coupling (313), a horizontal axis lead screw nut (314), a reading head one (315), and a grating ruler two (316). The horizontal shaft front bearing housing (305), horizontal shaft sensor (306), horizontal shaft protective cover (308), horizontal shaft rear bearing housing (311), horizontal shaft motor mounting base (312), and grating ruler (316) are mounted on the lifting shaft sliding plate (401). The horizontal shaft motor (304) is mounted on the horizontal shaft motor mounting base (312). The horizontal shaft precision lead screw (307) is mounted on the horizontal shaft front bearing housing (305) and the horizontal shaft rear bearing housing (311). The horizontal shaft precision lead screw (307) coupling (313) is connected to the horizontal shaft motor (304). The horizontal axis precision lead screw (307) and the horizontal axis lead screw nut (314) are connected by threads. The horizontal axis lead screw nut (314) is installed on the horizontal axis nut seat (303). The horizontal axis nut seat (303) is provided with a lifting shaft sensing plate (309). The horizontal axis nut seat (303) is connected to the horizontal axis sliding plate (301) through the horizontal axis sliding plate connecting block (310). The horizontal axis sliding plate (301) is provided with a horizontal axis guide rail (302) connected to the lifting shaft sliding plate (401). The horizontal axis sliding plate (301) is provided with a reading head (315).
3. The micro-rotation mask adjustment device according to claim 1, characterized in that, The lifting adjustment assembly includes a lifting shaft sliding plate (401), a lifting shaft guide rail (402), a lifting shaft nut seat (403), a lifting shaft motor (404), a lifting shaft front bearing seat (405), a lifting shaft sensor (406), a lifting shaft precision lead screw (407), a lifting shaft protective cover (408), a lifting shaft sensing plate (409), a lifting shaft sliding plate connecting block (410), a lifting shaft rear bearing seat (411), a lifting shaft motor mounting seat (412), a coupling (413), a horizontal shaft lead screw nut (414), a lifting shaft base plate (415), a second reading head (416), and a second grating ruler (417). The lifting shaft base plate (415) is provided with a lifting shaft front bearing seat (405), a lifting shaft sensor (406), a lifting shaft protective cover (408), a lifting shaft rear bearing seat (411), a lifting shaft motor mounting seat (412), and a grating ruler (417); the lifting shaft motor (404) is mounted on the lifting shaft motor mounting seat (412), and the lifting shaft precision lead screw (407) is mounted on the lifting shaft front bearing seat (405) and the lifting shaft rear bearing seat (411). The lifting shaft precision lead screw (407) is connected to the lifting shaft motor (404) via a coupling (413). The lifting shaft precision lead screw (407) and the lifting shaft lead screw nut (414) are connected by threads. The lifting shaft lead screw nut (414) is installed on the lifting shaft nut seat (403). The lifting shaft nut seat (403) is provided with a lifting shaft sensing plate (409). The lifting shaft nut seat (403) is connected to the lifting shaft sliding plate (401) through the horizontal shaft sliding plate connecting block (410). The lifting shaft sliding plate (401) is provided with a lifting shaft guide rail (402) and a lifting shaft base plate (415). The lifting shaft sliding plate (401) is provided with a reading head two (416).
4. The micro-rotation mask adjustment device according to claim 1, characterized in that, It also includes a pressure plate (501), a base (502), a turntable (503), a motor support (504), a bearing (505), a torque motor stator (506), a torque motor mover (507), a reading head (508), a grating ruler (509), and a fixed support (510). A rotary bearing (505) is disposed between a pressure plate (501) and a base (502). The rotary bearing (505) is disposed between a turntable (503) and a motor support (504). The base (502) is provided with a torque motor stator (506) and a reading head (508), the bottom of which is connected to a fixed support (510). The motor support (504) is provided with a torque motor mover (507) and a grating ruler (509). The turntable (503) is disposed on a lifting shaft base plate (415).