Exposure apparatus

Abstract

The invention relates to exposure equipment, and belongs to the field of exposure machines, the exposure equipment is used for double-sided exposure of strip-shaped materials, the exposure equipment comprises a mask device, two material conveying devices and a pair of illumination devices, the mask device comprises two mask mechanisms, each mask mechanism comprises a mask assembly, the mask assemblies of the two mask mechanisms are symmetrically arranged at intervals and are suitable for being tightly attached, and the two material conveying devices are arranged on the mask assemblies. And one section of the strip-shaped material is clamped and sealed. According to the mask assembly of the exposure equipment, the suction holes are formed in the mask frame, after the two mask assemblies clamp the to-be-exposed material and are tightly attached, air between the two mask assemblies is extracted through the suction holes, so that the to-be-exposed material and the mask plate are tightly attached together in a vacuum adsorption mode, the exposure quality is improved, the projection error is reduced, and the exposure efficiency is improved. And meanwhile, deformation of the mask cannot be caused.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of exposure machine, in particular to an exposure device. BACKGROUND

[0002] Currently, in electronic device manufacturing, exposure process is the core technology of auxiliary patterning. Certain strip materials, such as metal mask (FMM), metal mesh (a layer of almost invisible conductive mesh woven on a transparent film by very fine metal wires on a TV, mobile phone), flexible chip metal mounting frame, although the specific application fields are different, but they all need to realize micron-level structure precise control through double-sided exposure auxiliary patterning.

[0003] The current double-sided exposure process is to make the strip material to be exposed (such as metal mesh, chip mounting frame, metal mask) pass between a pair of spaced mask plates, the flat light passes through the mask plate and is shot to the material, and the exposure of the material is completed. The exposed material is etched or plated to obtain a finished product. The current exposure process still has the problem that the exposure quality is not high, there is an error between the light projection position on the material and the theoretically designed position, which affects the subsequent etching precision. Even if the pair of spaced mask plates are pressed to tightly adhere to the material, the error is still relatively large. At the same time, the pressing force on the mask plate cannot be too large, otherwise the mask plate itself will be deformed once the pressing force on the mask plate is too large, which will further deteriorate the exposure quality. SUMMARY

[0004] In order to solve the problem of low mask plate exposure quality in the current double-sided exposure process mentioned in the background art, the present application provides an exposure device.

[0005] The exposure device provided by the present application is used for double-sided exposure of strip material, which comprises a mask device, two material conveying devices and a pair of light devices. The mask device comprises two mask mechanisms, and the mask mechanisms comprise mask assemblies. The mask assemblies of the two mask mechanisms are symmetrically arranged and adapted to be tightly adhered to each other to clamp and seal one section of the strip material. The mask assembly comprises a mask frame and a mask plate. The mask frame is provided with a through hole one, and the mask plate is attached to one side of the mask frame provided with the through hole one and seals one end of the through hole one. The side is provided with a plurality of air suction holes one, and the plurality of air suction holes one are distributed circumferentially around the through hole one. The side is attached with a guide frame, and the air suction hole one is located between the mask plate and the guide frame. The thickness of the guide frame is not less than the thickness of the mask plate. The inside of the mask frame is provided with an air suction hole in communication with the air suction hole one, and one end of the air suction hole extends to the outer wall of the mask frame. When the strip material penetrates between a pair of mask plates, the pair of guide frames tightly adhere to each other to seal the strip material inside the guide frame from the outside, and at this time the pair of mask plates tightly adhere to the strip material. A pair of light illumination devices are arranged on both sides of the mask device, and parallel light is respectively irradiated to the mask plate of a mask assembly, the light illumination device comprises a rack one, a light source, a mirror one, a mirror two, and a mirror three arranged on the rack one, the rack one is configured with an out-light door hole, the light emitted by the light source can be reflected by the mirror one, the mirror two, and the mirror three in sequence to form horizontal parallel light, and the horizontal parallel light can pass through the out-light door hole and irradiate to the mask plate; Two material conveying devices are arranged on the side away from the mask device of the pair of light illumination devices, one of the two material conveying devices is used for unfolding the rolled material to be exposed, and the unfolded material to be exposed passes through between the pair of mask plates, and the other material conveying device is used for winding the material to be exposed into a roll; the material conveying device comprises a rack two and a material rolling device and a tension adjusting assembly arranged on the rack two, the material rolling device has: An air inflation shaft connected with the rack two in rotation; A winding pipe arranged outside the air inflation shaft; A driving part two in transmission connection with the air inflation shaft, used for driving the air inflation shaft to rotate; The tension adjusting assembly has: At least one pair of guide rollers four arranged in parallel and spaced apart, and connected with the rack two in rotation; A guide roller five connected with the rack two in rotation and movable in a radial direction; A distance adjusting device arranged on the rack two and connected with the guide roller five, used for driving the guide roller five to move radially to adjust the distance between the guide roller five and the guide roller four; A tension detection element arranged at the axial end of the guide roller four and / or the guide roller five; One end of the material to be exposed is adapted to pass through one of the guide rollers four, the guide roller five, and the other guide roller four in sequence and then wind around the outer circumferential surface of the winding pipe.

[0006] By adopting the above technical scheme, when the two mask assemblies clamp and tightly adhere to the material to be exposed, the air between the two mask assemblies is extracted through the air suction hole, so that the material to be exposed and the mask plate are tightly adhered by vacuum adsorption, thereby improving the exposure quality and reducing the projection error, and the mask version itself will not be deformed.

[0007] Preferably, the mask device further comprises a fixed base, a movable base in sliding connection with the fixed base, and a pair of machine seats in sliding connection with the movable base, the sliding direction of the movable base is parallel to the side surface of the mask frame configured with the through hole one, the sliding direction of the machine seat is perpendicular to the side surface of the mask frame configured with the through hole one, the pair of machine seats are arranged in parallel, and the two mask mechanisms are respectively installed on the two machine seats; The fixed base is provided with a guide roller one below a pair of mask assemblies, the movable base is configured with a discharge port one, the outer cover of the two mask mechanisms is provided with a machine cover, the top of the machine cover is configured with an inlet, and the inlet is located above a pair of mask assemblies; The top of the machine cover is provided with a feeding mechanism one, the feeding device outputs the strip-shaped material unwound from the roll-shaped material, the strip-shaped material is conveyed from the inlet to the discharge port one through the feeding mechanism one, penetrates between the pair of mask assemblies, passes around the guide roller one, and extends out of the discharge port one into the feeding device for winding the strip-shaped material after exposure into a roll-shaped material.

[0008] By adopting the above technical scheme, the strip-shaped material flow line exposure operation is realized, and the exposure speed is fast and the efficiency is high.

[0009] Preferably, the feeding mechanism one has: A driving roller two and an adjusting roller two are arranged in parallel at intervals to allow the strip-shaped material to pass between the driving roller two and the adjusting roller two, the driving roller two is drivingly connected with a driving member three, and the driving member three is used to drive the driving roller two to rotate; A push-pull device five is connected with the machine cover and the adjusting roller two, and is used to drive the adjusting roller two to move relative to the machine cover to adjust the distance between the driving roller two and the adjusting roller two, so as to clamp the strip-shaped material.

[0010] By adopting the above technical scheme, the strip-shaped material is conveyed by means of the feeding mechanism one.

[0011] Preferably, the machine frame one is provided with a feeding mechanism two and a discharge port two, the strip-shaped material extending out of the discharge port one is conveyed through the feeding mechanism two and extends out of the discharge port two to leave the light exposure device and enters the feeding device for winding the strip-shaped material after exposure into a roll-shaped material.

[0012] By adopting the above technical scheme, the strip-shaped material is conveyed by means of the feeding mechanism two, and the strip-shaped material is ensured to move stably.

[0013] Preferably, the feeding mechanism two includes: At least one guide roller two is connected with the machine frame one; A driving roller one and an adjusting roller one are arranged in parallel at intervals to allow the strip-shaped material to pass between the driving roller one and the adjusting roller one, the driving roller one is drivingly connected with a driving member one, and the driving member one is used to drive the driving roller one to rotate; A push-pull device four is connected with the machine frame one and the adjusting roller one, and is used to drive the adjusting roller one to move relative to the machine frame one to adjust the distance between the driving roller one and the adjusting roller one, so as to clamp the strip-shaped material.

[0014] By adopting the above technical scheme, the strip-shaped material is conveyed by means of the feeding mechanism two, and the strip-shaped material is ensured to move stably.

[0015] Preferably, the side face one is provided with a back-shaped groove one, the back-shaped groove one is provided with an air suction hole two communicated with the air extraction hole, the through hole one is located inside the back-shaped groove one, and the mask plate covers the back-shaped groove one.

[0016] By using the above technical scheme, the mask plate is adsorbed and mounted on the mask frame, the mounting difficulty of the mask plate is reduced, and the mask plate is convenient to disassemble and assemble.

[0017] Preferably, the side face one is provided with a back-shaped groove two communicated with the air extraction hole, the guide frame covers the back-shaped groove two, a sealing ring one is tightly clamped between the guide frame and the side face one, the back-shaped groove two is located inside the sealing ring one, a gap is formed between the guide frame and the side face one located inside the back-shaped groove two, and the gap is configured to allow the gas inside the guide frame to pass through and enter the back-shaped groove two.

[0018] By using the above technical scheme, the vacuum pressure around the mask plate can be homogenized, and the vacuum adsorption quality of the material and the mask plate is improved.

[0019] Preferably, the guide frame is provided with a sealing ring two away from the side face of the mask frame.

[0020] By using the above technical scheme, the clamping and sealing of the two mask assemblies on the material to be exposed are improved, and the air between the two mask assemblies is removed better and faster.

[0021] Preferably, the upper and lower ends of the mask frame are respectively provided with a roller one and a roller two. The side face one is provided with a plurality of limiting blocks circumferentially arranged around the mask plate, and the limiting blocks are in abutment with the edges of the mask plate. The side face one is provided with a guide wheel, and the guide wheel is adapted to be connected with the bottom surface of the mask plate in rolling.

[0022] By using the above technical scheme, the mask assembly and the mask plate are convenient to disassemble and assemble.

[0023] Preferably, the mask mechanism further comprises a mounting frame one and a mounting frame two, the mounting frame one and the mounting frame two are connected through a connector, and the connector is configured to drive the mounting frame two to slide up and down and left and right relative to the mounting frame one. The mounting frame one is provided with a through hole two, and the mounting frame one is provided with a clamp, the clamp is configured to clamp and fix the mask assembly on the side of the mounting frame one provided with the through hole two, and the through hole one and the through hole two are opposite.

[0024] By using the above technical scheme, the mask assembly is convenient to disassemble and assemble.

[0025] In summary, the present application has at least one of the following beneficial technical effects: The mask assembly of the exposure device of the present application is provided with air suction holes on the mask frame. When the two mask assemblies clamp and tightly adhere to the material to be exposed, the air between the two mask assemblies is extracted by means of the air suction holes, so that the material to be exposed and the mask plate are tightly adhered by vacuum adsorption, thereby improving the exposure quality, reducing the projection error, and without causing the deformation of the mask plate itself. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is a structural schematic diagram of the mask assembly in the first embodiment of the present application.

[0027] Figure 2 is Figure 1 the schematic diagram after removing the mask plate and the guide frame.

[0028] Figure 3 is Figure 2 the partial enlarged view.

[0029] Figure 4 is a structural schematic diagram of the guide frame in the first embodiment Figure 1 .

[0030] Figure 5 is a structural schematic diagram of the guide frame in the first embodiment Figure 2 .

[0031] Figure 6 is a structural schematic diagram of the mask mechanism in the second embodiment of the present application Figure 1 .

[0032] Figure 7 is a structural schematic diagram of the mask mechanism in the second embodiment of the present application Figure 2 .

[0033] Figure 8 is an installation schematic diagram of the first installation frame and the mask assembly in the second embodiment of the present application Figure 1 .

[0034] Figure 9 is an installation schematic diagram of the first installation frame and the mask assembly in the second embodiment of the present application Figure 2 .

[0035] Figure 10 is an installation schematic diagram of the first installation frame and the mask assembly in the second embodiment of the present application Figure 3 .

[0036] Figure 11 is a structural schematic diagram of the first installation frame in the second embodiment of the present application Figure 1 .

[0037] Figure 12 is a structural schematic diagram of the first installation frame in the second embodiment of the present application Figure 2 .

[0038] Figure 13 is a structural diagram of the mask mechanism in Embodiment Three of the present application Figure 1 .

[0039] Figure 14 is a structural diagram of the mask mechanism in Embodiment Three of the present application Figure 2 .

[0040] Figure 15 is a structural diagram of the connector four in Embodiment Three of the present application

[0041] Figure 16 is an enlarged view of the H part in Figure 15 .

[0042] Figure 17 is a structural diagram of the mask device in Embodiment Four of the present application Figure 1 .

[0043] Figure 18 is a structural diagram of the mask device in Embodiment Four of the present application Figure 2 .

[0044] Figure 19 is a structural diagram of the mask device in Embodiment Four of the present application without the machine cover Figure 1 .

[0045] Figure 20 is a structural diagram of the mask device in Embodiment Four of the present application without the machine cover Figure 2 .

[0046] Figure 21 is a structural diagram of Figure 19 without two mask mechanisms Figure 1 .

[0047] Figure 22 is a structural diagram of Figure 19 without two mask mechanisms Figure 2 .

[0048] Figure 23 is a structural diagram of the light device in Embodiment Five of the present application Figure 1 .

[0049] Figure 24 is a structural diagram of the light device in Embodiment Five of the present application Figure 2 .

[0050] Figure 25 is a structural diagram of the light device in Embodiment Five of the present application Figure 3 .

[0051] Figure 26 is a structural diagram of the material feeding mechanism two in Embodiment Five of the present application

[0052] Figure 27This is a schematic diagram of the material conveying mechanism 2 in Embodiment 5 of this application.

[0053] Figure 28 This is a schematic diagram of the winding mechanism in Embodiment Six of this application.

[0054] Figure 29 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 1 .

[0055] Figure 30 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 2 .

[0056] Figure 31 This is the internal structure of the winding mechanism in Embodiment Six of this application. Figure 3 .

[0057] Figure 32 This is a schematic diagram of the winding mechanism in Embodiment Six of this application.

[0058] Figure 33 This is a schematic diagram of the unwinding mechanism in Embodiment Six of this application.

[0059] Figure 34 This is an internal structural diagram of the unwinding mechanism in Embodiment Six of this application.

[0060] Figure 35 This is an internal structural diagram of the cleaner in Embodiment Six of this application.

[0061] Figure 36 This is a schematic diagram of the unwinding mechanism in Embodiment Six of this application.

[0062] Figure 37 This is a schematic diagram of the exposure device in Embodiment 7 of this application. Figure 38 This is a schematic diagram of the exposure device in Embodiment 7 of this application.

[0063] Figure 39 This is a schematic diagram of the material conveying mechanism 1 in Embodiment 7 of this application.

[0064] Figure 40 yes Figure 39 Enlarged view of part J in the image.

[0065] Figure 41 This is a schematic diagram of the material conveying mechanism 1 in Embodiment 7 of this application.

[0066] Explanation of reference signs: A, mask assembly; 1, mask frame; 2, guide frame; 3, pipe joint; 4, pressing block; 5, air extraction hole; 6, air suction hole one; 7, limiting block; 8, guide wheel; 9, mask plate; 10, handle; 11, roller two; 12, roller one; 13, meandering groove one; 14, meandering groove two; 15, sealing ring one; 16, air suction hole two; 17, meandering groove three; 18, sealing ring two; 19, through hole one; B, mask mechanism; 20, mounting frame one; 21, connector one; 211, lifting assembly one; 212, sliding block one; 22, connector two; 221, horizontal movement assembly one; 222, sliding block two; 23, connector three; 231, sliding block three; 232, sliding block four; 24, positioning detector; 241, three-axis translation assembly; 242, visual camera; 25, mounting frame one; 251, through hole two; 26, sliding rail one; 27, sliding rail two; 28, limiting wheel; 29, connecting block; 30, clamp one; 301, push-pull device one; 302, mounting seat one; 303, pressing rod one; 31, clamp two; 310, mounting seat two; 311, push-pull device two; 312, push-pull device three; 313, pressing rod two; 314, mounting seat three; 32, clamp three; 33, stop block; 34, mounting frame two; 35, connector four; 351, mounting seat four; 352, sliding block five; 353, lifting assembly two; 354, sliding block six; 355, sliding rail three; C, mask device; 39, machine base; 40, fixed base; 41, horizontal movement assembly two; 42, movable base; 43, horizontal movement assembly three; 44, guide roller one; 45, roller frame one; 46, discharge port one; 47, carrier frame; 48, guide rail; 49, machine cover; 50, feeding port; D, illumination device; 51, machine frame one; 52, light source; 53, mirror one; 54, mirror two; 55, mirror three; 56, light exit door; 57, discharge port two; 58, material conveying mechanism two; 580, roller frame two; 581, guide roller two; 582, driving roller one; 583, adjusting roller one; 584, driving member one; 585, push-pull device four; 586, rotating shaft one; 587, gear one; 588, rack one; 589, sliding seat one; E, unwinding mechanism; G, winding mechanism; 60, rack two; 61, transverse moving assembly four; 62, positioning assembly; 621, pivot two; 622, swing arm; 623, shaft support; 63, material winding device; 631, driving member two; 632, air inflation shaft; 633, winding pipe; 64, guide roller three; 65, position detector; 66, splicing assembly; 661, splicing plate; 662, pressing strip; 663, lifter one; 664, falling knife groove; 67, tension adjusting assembly; 671, guide roller four; 672, guide roller five; 673, distance adjuster; 68, guide roller six; 69, static electricity removing filter; 70, impurity removing device; 701, case; 702, impurity sticking roller one; 703, lifter two; 704, impurity sticking roller two; 705, lifter three; 706, roller support three; 707, roller support four; 71, transverse moving assembly five; 72, guide roller seven; 73, baffle; 74, rack three; 75, isolation cover; F, material conveying mechanism one; 80, rack four; 81, guide roller eight; 82, driving roller two; 83, driving member three; 84, adjusting roller two; 85, roller support five; 86, sliding seat two; 87, push-pull device five; 88, pivot three; 89, gear two; 90, rack two; 91, guide roller nine; 92, guide roller ten; K, belt-shaped material. DETAILED DESCRIPTION

[0067] The following will be described in detail below with reference to the accompanying drawings. Figures 1-41 The present application will be described in further detail.

[0068] The present application provides an exposure device for double-sided exposure of a belt-shaped material K, as shown in Figure 40 and Figure 41 which comprises a material conveying mechanism one F, a mask device C, two material conveying devices and a pair of light exposure devices D, the mask device C comprises two mask mechanisms B, the mask mechanism B comprises a mask assembly A, and the two material conveying devices are respectively an unwinding mechanism E and a winding mechanism G.

[0069] The following will be described in detail below with reference to the accompanying drawings.

[0070] Example one: The present application discloses a mask assembly A. Referring to Figures 1-3As shown in the figure, the mask assembly A includes a mask frame 1 and a mask plate 9. The mask frame 1 is configured with a through hole 19. The mask plate 9 is attached to the side 1 of the mask frame 1 configured with the through hole 19, and blocks and seals one end of the through hole 19. The side 1 is configured with a plurality of air suction holes 6 which are distributed circumferentially around the through hole 19. In this way, the air around the mask plate 9 can be quickly sucked away, the vacuum adsorption of the material and the mask plate 9 can be quickly realized, the vacuum pressure around the mask plate 9 can be homogenized, and the vacuum adsorption quality of the material and the mask plate 9 can be improved.

[0071] In this embodiment, as shown in the figure, Figures 1-3 The side 1 is attached with a guide frame 2. The air suction hole 6 is located between the mask plate 9 and the guide frame 2. The thickness of the guide frame 2 is not less than the thickness of the mask plate 9. In this way, the pair of mask assemblies A cannot be tightly attached and cannot tightly seal the material. The pair of mask assemblies A are tightly attached by the two guide frames 2 of the pair of mask assemblies A.

[0072] In this embodiment, as shown in the figure, Figures 1-3 The mask frame 1 is internally configured with an air suction hole 5 which is in communication with the air suction hole 6. One end of the air suction hole 5 extends to the outer wall of the mask frame 1. By connecting one end of the air suction hole 5 to the air suction equipment, the air between the pair of mask assemblies A can be sucked after the pair of mask assemblies A are tightly attached, so that a vacuum is formed between the pair of mask assemblies A. In this way, the material located between the pair of mask assemblies A can be tightly attached to the mask plate 9. The exposure material and the mask plate 9 are tightly attached by vacuum adsorption, thereby improving the exposure quality, reducing the projection error, and also not causing the mask plate to deform. In order to facilitate the connection of the air suction hole 5 and the air suction equipment, a pipe joint 3 can be installed at one end of the air suction hole 5.

[0073] In this embodiment, further, as shown in the figure, Figure 2 The side 1 is configured with a back-shaped groove 13. The back-shaped groove 13 is configured with an air suction hole 16 which is in communication with the air suction hole 5. The through hole 19 is located inside the back-shaped groove 13. The mask plate 9 covers the back-shaped groove 13. In this way, the air suction hole 5 sucks the air in the back-shaped groove 13 through the air suction hole 16, realizes the adsorption of the mask frame 1 to the mask plate 9, reduces the installation difficulty of the mask plate 9, and facilitates the disassembly and assembly of the mask plate 9. The mask plate 9 blocks and seals one end of the through hole 19 by vacuum adsorption.

[0074] In this embodiment, further, as shown in the figure, Figure 2 The side 1 is configured with a back-shaped groove 14 which is in communication with the air suction hole 5. The guide frame 2 covers the back-shaped groove 14. The guide frame 2 and the side 1 are tightly clamped with a sealing ring 15. The position of the sealing ring 15 on the guide frame 2 is as shown in the figure. Figure 4As shown in the figure, the backshaped groove two 14 is located inside the sealing ring one 15, and a gap is formed between the guiding frame 2 inside the backshaped groove two 14 and the side one, which is configured to allow the gas inside the guiding frame 2 to pass through the gap and enter the backshaped groove two 14. The sealing ring one 15 is arranged to reliably seal and connect the guiding frame 2 and the mask frame 1. When the suction hole 5 is suctioning, the air between the pair of mask assemblies A enters the backshaped groove two 14 through the gap between the guiding frame 2 inside the backshaped groove two 14 and the side one, and then enters the suction hole 5. The arrangement of the sealing ring one 15 effectively prevents air leakage. By setting the gap and then using the backshaped groove two 14 to assist the suction hole one 6 in suctioning, the suction speed can be accelerated, the vacuum pressure around the mask plate 9 is further homogenized, and the vacuum adsorption quality of the material and the mask plate 9 is improved.

[0075] In this embodiment, further, as shown in the figure, Figure 5 The side of the guiding frame 2 facing away from the mask frame 1 is provided with a sealing ring two 18. After the pair of mask assemblies A are tightly attached, the pair of guiding frames 2 press the sealing ring two 18, and the arrangement of the sealing ring two 18 improves the tightness of the pair of mask assemblies A. To facilitate the installation of the sealing ring two 18 on the guiding frame 2, as shown in the figure, Figure 5 A backshaped groove three 17 can be arranged on the side of the guiding frame 2 facing away from the mask frame 1, and part of the sealing ring two 18 is placed in the backshaped groove three 17.

[0076] In this embodiment, further, as shown in the figure, Figures 1-2 The side wall of the mask frame 1 is provided with a pressing block 4, which is used to cooperate with the clamp three 32 of the mask mechanism B to clamp and fix the mask assembly A.

[0077] In this embodiment, further, as shown in the figure, Figures 1-3 The upper and lower ends of the mask frame 1 are respectively provided with a roller one 12 and a roller two 11. The arrangement of the roller one 12 and the roller two 11 can adapt to the slide rail one 26 and the slide rail two 27 of the mask mechanism B, so as to realize the horizontal sliding of the mask assembly A on the installation frame one 25, and facilitate the disassembly and assembly of the mask assembly A.

[0078] In this embodiment, further, as shown in the figure, Figures 1-3 The side one is provided with a plurality of limiting blocks 7 arranged circumferentially around the mask plate 9. The limiting blocks 7 are in contact with the edge of the mask plate 9, and are used to limit the mask plate 9 during installation, so that the mask plate 9 is quickly and accurately installed to the specified position on the mask frame 1. The side one is provided with a guide wheel 8, which is adapted to roll with the bottom surface of the mask plate 9. Because the mask plate 9 is heavy, the arrangement of the guide wheel 8 facilitates the movement of the mask plate 9 to the installation position on the mask frame 1, reduces the wear of the mask plate 9 during disassembly and assembly, and facilitates the disassembly and assembly of the mask plate 9.

[0079] In this embodiment, further, as shown in the figure, Figures 1-2As shown, the mask frame 1 side is provided with a handle 10, so that the hand pulls the mask assembly A on the installation frame one 25 lateral sliding.

[0080] Embodiment two: The embodiment discloses a mask mechanism B, as shown in Figure 6 and Figure 7 The installation frame one 20 and the installation frame one 25 are connected through a connector, and the connector is configured to drive the installation frame one 25 to slide up and down and left and right relative to the installation frame one 20.

[0081] Specifically, the connector includes connector one 21, connector two 22 and connector three 23, the connector one 21, the connector two 22 and the connector three 23 are distributed around the installation frame one 20, and the number is at least one, such as Figure 11 and Figure 12 The connector one 21 has two, which are respectively arranged on the left and right sides of the upper end of the installation frame one 20, the connector two 22 and the connector three 23 are respectively arranged on the left and right sides of the lower end of the installation frame one 20, as shown in Figure 12 The connector one 21 includes a lifting assembly one 211 fixedly connected with the installation frame one 20 and a sliding block one 212 connected with the lifting assembly one 211 for transverse sliding, as shown in Figure 11 The connector two 22 includes a horizontal moving assembly one 221 fixedly connected with the installation frame one 20 and a sliding block two 222 connected with the horizontal moving assembly one 221 for lifting and sliding, and the connector three 23 includes a sliding block three 231 connected with the installation frame one 20 for transverse sliding and a sliding block four 232 connected with the sliding block three 231 for lifting and sliding, the moving direction of the lifting assembly one 211 is parallel to the sliding direction of the sliding block two 222 and the sliding block four 232, and the moving direction of the horizontal moving assembly one 221 is parallel to the sliding direction of the sliding block one 212 and the sliding block three 231; the sliding block one 212, the sliding block two 222 and the sliding block four 232 are all fixedly connected with the installation frame one 25, the lifting assembly one 211 drives the installation frame one 25 to move up and down, and the horizontal moving assembly one 221 drives the installation frame one 25 to move left and right. The connector with the above structure design realizes the smooth up and down and left and right movement of the installation frame one 25 to adjust the position of the mask assembly A on the installation frame one 20, and the moving precision of the installation frame one 25 is high. Of course, in other embodiments, the connector can also use a two-axis translation mechanism or other conventional moving mechanism to realize the up and down and left and right movement of the installation frame one 25 relative to the installation frame one 20.

[0082] In order to connect the sliding block one 212, the sliding block two 222 and the sliding block four 232 with the installation frame one 25, as shown in Figure 9 and Figure 10As shown, the slider one 212, the slider two 222 and the slider four 232 are connected with the mounting frame one 25 through the connecting block 29, the slider one 212, the slider two 222 and the slider four 232 are fixedly connected with the connecting block 29, and the connecting block 29 is rotatably connected with the mounting frame one 25.

[0083] In the embodiment, as shown in Figures 8-10 the mounting frame one 25 is configured with the through hole two 251, the mounting frame one 25 is provided with a clamp, the clamp is configured to clamp and fix the mask assembly A on the side of the mounting frame one 25 configured with the through hole two 251, and the through hole one 19 and the through hole two 251 are opposite, and the design is that the parallel light is sequentially emitted to the mask plate 9 after passing through the through hole two 251 and the through hole one 19.

[0084] In the embodiment, further, as shown in Figure 6 and Figure 8 the mounting frame one 25 is provided with the slide rail one 26 and the slide rail two 27, the roller one 12 is rollingly connected with the slide rail one 26, the roller two 11 is rollingly connected with the slide rail two 27, and the rolling directions of the roller one 12 and the roller two 11 are parallel to the side of the mounting frame one 25 configured with the through hole two 251, and the design is that the hand can pull the mask assembly A to slide on the mounting frame one 25 by relying on the handle 10, the roller one 12 rolls along the slide rail one 26 and the roller two 11 rolls along the slide rail two 27 during the sliding process, so that the mask assembly A is taken off from the mounting frame one 25 or installed to the mounting position of the mounting frame one 25, the existence of the roller one 12 and the roller two 11 facilitates the movement of the mask assembly A on the mounting frame one 25, reduces the friction loss of the mounting frame one 25 and the mask assembly A, and facilitates the disassembly and assembly of the mask assembly A.

[0085] Preferably, as shown in Figure 9 and Figure 10 a plurality of limiting wheels 28 are circumferentially arranged on the mounting frame one 25 around the through hole two 251, as shown in Figure 6 and Figure 8As shown, the clamps include a clamp one 30, a clamp two 31 and a clamp three 32, the clamp one 30 and the clamp two 31 are multiple and are arranged circumferentially around the through hole two 251 to ensure reliable clamping and fixing of the mask assembly A, the clamp one 30 and the clamp two 31 are suitable for pressing the mask assembly A to abut against the limiting wheel 28, and the pressing direction is perpendicular to the side of the mounting frame one 25 which is configured with the through hole two 251; the clamp three 32 is located on one side of the mounting frame one 25, and the other side of the mounting frame one 25 is fixedly provided with a stop block 33, the clamp three 32 is suitable for pressing the mask assembly A to abut against the stop block 33, and the pressing direction is parallel to the side of the mounting frame one 25 which is configured with the through hole two 251, so as to realize clamping and fixing of the mask assembly A on the mounting frame one 25, and the limiting wheel 28 is arranged to ensure clamping and fixing of the mask assembly A without causing wear of the mask assembly A and the mounting frame one 25, and facilitating movement of the mask assembly A on the mounting frame one 25.

[0086] Specifically, as shown in the figure, Figure 8 The clamp one 30 includes a push-pull device one 301, a mounting seat one 302 and a pressing rod one 303, the fixed end of the push-pull device one 301 and the mounting seat one 302 are fixedly connected with the mounting frame one 25, the movable end of the push-pull device one 301 is hingedly connected with one end of the pressing rod one 303, the pressing rod one 303 is hingedly connected with the mounting seat one 302, and the push-pull device one 301 drives the other end of the pressing rod one 303 to move close to or away from the mask frame 1, and abuts against the side of the mask frame 1 when the mask assembly A needs to be fixed, and then presses the mask frame 1 to abut against the limiting wheel 28, and the mask frame 1 is clamped and fixed by the limiting wheel 28 and the other end of the pressing rod one 303.

[0087] Preferably, as shown in the figure, Figure 6 The clamp two 31 is located on the side of the mask frame 1 where the handle 10 is arranged, so that when the clamp two 31 is opened, the mask frame 1 can move along the slide rail one 26 and the slide rail two 27 under the pulling of the handle 10, and at this time the clamp one 30 and the clamp two 31 will not hinder the movement of the mask frame 1.

[0088] Specifically, the clamp two 31 comprises a mounting seat two 310, a push-pull device two 311, a push-pull device three 312, a pressing rod two 313, and a mounting seat three 314. The mounting seat two 310 is fixedly connected with the mounting frame one 25, and the mounting seat three 314 is hingedly connected with the mounting frame one 25. The fixed end and the movable end of the push-pull device two 311 are hingedly connected with the mounting seat two 310 and the mounting seat three 314, respectively, so that the push-pull device two 311 drives the mounting seat three 314 to swing. The fixed end and the movable end of the push-pull device three 312 are hingedly connected with the mounting seat three 314 and one end of the pressing rod two 313, respectively. The other end of the pressing rod two 313 is also hingedly connected with the mounting seat three 314. The push-pull device three 312 is used to drive the other end of the pressing rod two 313 to move close to or away from the mask frame 1, and to abut against the side of the mask frame 1 when it is necessary to fix the mask assembly A, and then to press the mask frame 1 to abut against the limiting wheel 28. The mask frame 1 is clamped and fixed by the limiting wheel 28 and the other end of the pressing rod two 313. When the clamp two 31 is opened, the push-pull device two 311 drives the mounting seat three 314 to rotate 90 degrees from the position shown in the figure, so that the pressing rod two 313 is away from the moving path of the mask frame 1, avoiding the pressing rod two 313 from hindering the mask frame 1 from moving along the slide rail one 26 and the slide rail two 27 under the pulling of the pull handle 10. Figure 6 When the clamp two 31 is opened, the push-pull device two 311 drives the mounting seat three 314 to rotate 90 degrees from the position shown in the figure, so that the pressing rod two 313 is away from the moving path of the mask frame 1, avoiding the pressing rod two 313 from hindering the mask frame 1 from moving along the slide rail one 26 and the slide rail two 27 under the pulling of the pull handle 10.

[0089] In this embodiment, further, as shown in Figure 7 , Figure 11 , Figure 12 The mounting rack one 20 is provided with a position detector 24 for detecting the position of the mask assembly A relative to the mounting rack one 20, so as to timely control the connector to act to adjust the position of the mask assembly A according to the detection result, to realize the positioning of the mask assembly A installed on the mounting frame one 25, and to facilitate the accurate and rapid adjustment and installation of the mask assembly A in place.

[0090] Preferably, as shown in Figure 12 The position detector 24 comprises a three-axis translation assembly 241 and a vision camera 242. The three-axis translation assembly 241 is connected with the mounting rack one 20, and the vision camera 242 is connected with the three-axis translation assembly 241. The vision camera 242 moves forward, backward, left, right, and upward and downward under the drive of the three-axis translation assembly 241 to detect the position of the mask assembly A relative to the mounting rack one 20. Of course, in other embodiments, the position detector 24 can also adopt a common positioning method such as laser positioning.

[0091] Embodiment three: The difference between this embodiment and embodiment two is that the connector is further configured to drive the mounting frame one 25 to slide forward and backward relative to the mounting rack one 20, to realize the forward and backward movement of the mask assembly A relative to the mounting rack one 20, and to clamp and seal the belt-shaped material K to be exposed in cooperation with another mask assembly A.

[0092] Specifically, the connector further comprises a connector four 35, the slider one 212, the slider two 222 and the slider four 232 are fixedly connected with the connector four 35, further, in order to facilitate the connection of the slider one 212, the slider two 222, the slider four 232 and the connector four 35, as shown in Figures 13-15 The slider one 212, the slider two 222 and the slider four 232 are fixedly connected with a mounting frame two 34, and the connector four 35 is fixedly mounted on the mounting frame two 34. The connector four 35 is provided in plurality and is connected with the mounting frame one 25. The mounting frame one 25 is driven to move forward and backward by the connector four 35.

[0093] Specifically, as shown in Figure 15 and Figure 16 The connector four 35 at least comprises a slider five 352 and a lifting assembly two 353. The fixed end of the lifting assembly two 353 is fixedly connected with the slider one 212 or the slider two 222 or the slider four 232 or the mounting frame two 34. The mounting frame one 25 is slidably connected with the fixed end of the lifting assembly two 353. The slider five 352 is connected with the movable end of the lifting assembly two 353. The slider five 352 is configured to be obliquely slidably connected with the mounting frame one 25, so that the mounting frame one 25 is driven to slide forward and backward when the slider five 352 is lifted by the lifting assembly two 353. The connector four 35 with such structure can realize the stable forward and backward movement of the mounting frame one 25 to adjust the position of the mask assembly A, and the moving precision of the mounting frame one 25 is high. Of course, in other embodiments, the connector four 35 can also adopt a conventional linear driver such as a linear motor, a pneumatic cylinder or a hydraulic cylinder.

[0094] Further, in order to facilitate the assembly connection of the slider five 352 and the lifting assembly two 353 with the slider one 212, the slider two 222, the slider four 232, the mounting frame two 34 and the mounting frame one 25, and improve the sliding stability of the mounting frame one 25, the connector four 35 further comprises a mounting seat four 351, a slider six 354 and a slide rail three 355, as shown in Figure 15 and Figure 16 The mounting seat four 351 is fixedly connected with the slider one 212 or the slider two 222 or the slider four 232 or the mounting frame two 34. The fixed end of the lifting assembly two 353 is fixedly mounted on the mounting seat four 351. The slider five 352 is slidably mounted on the mounting seat four 351. The slide rail three 355 is horizontally fixedly mounted on the mounting seat four 351. The slider six 354 is slidably connected with the slide rail three 355, and is further fixedly connected with the mounting frame one 25. The slider five 352 and the slider six 354 are obliquely slidably connected. The slider six 354 is driven to slide forward and backward along the slide rail three 355 by the lifting assembly two 353 pushing the slider five 352 to lift, and then drives the mounting frame one 25 to slide forward and backward.

[0095] Embodiment four: The embodiment discloses a mask device C for double-sided exposure of a strip material K, the mask device C comprises at least two mask mechanisms B, and at least one of the mask mechanisms B is the mask mechanism B of the third embodiment, so that the two mask mechanisms B of the embodiment can be both the mask mechanism B of the third embodiment, or one of the mask mechanisms B is the mask mechanism B of the third embodiment and the other is the mask mechanism B of the second embodiment. In addition, at least one of the two mask assemblies A of the two mask mechanisms B is provided with a sealing ring two 18, so that one of the strip material K can be reliably clamped and sealed.

[0096] In the embodiment, as shown in Figure 19 and Figure 20 , the two mask assemblies A of the two mask mechanisms B are symmetrically arranged and adapted to be closely fitted, so that one of the strip material K can be clamped and sealed. After the two mask assemblies A are closely fitted, the air between the two mask assemblies A can be pumped out through the air outlet hole 5, so that one of the strip material K can be closely fitted with the mask plate 9 in a vacuum state, thereby improving the exposure quality of the strip material K, reducing the projection error, and without causing deformation of the mask plate itself.

[0097] Further, as shown in Figures 19-22 , the mask device C further comprises a fixed base 40, a movable base 42 adapted to be slidably connected with the fixed base 40, and a pair of machine seats 39 adapted to be slidably connected with the movable base 42, the sliding direction of the movable base 42 is parallel to the side of the mounting frame one 25 provided with the through hole two 251, the sliding direction of the machine seat 39 is perpendicular to the side of the mounting frame one 25 provided with the through hole two 251, the pair of machine seats 39 are arranged in parallel, the two mask mechanisms B are respectively installed on the two machine seats 39, the two machine seats 39 are moved closer to or away from each other, so as to drive the two mask mechanisms B to be closer to or away from each other, the movable base 42 is moved relative to the fixed base 40 to adjust the positions of the two mask mechanisms B, so as to facilitate accurate clamping and sealing of the strip material K. Preferably, the horizontal movement of the two mask mechanisms B to be closer to or away from each other can be achieved by a horizontal moving assembly three 43, as shown in Figure 21 and Figure 22 , the horizontal moving assembly three 43 is installed on the movable base 42 and connected with the machine seat 39, the machine seat 39 is moved by the horizontal moving assembly three 43, correspondingly, the horizontal sliding of the two mask mechanisms B along the direction parallel to the side of the mounting frame one 25 provided with the through hole two 251 can be achieved by a horizontal moving assembly two 41, the horizontal moving assembly two 41 is installed on the fixed base 40 and connected with the movable base 42, the movable base 42 is moved on the fixed base 40 by the horizontal moving assembly two 41, specifically, the horizontal moving assembly two 41 and the horizontal moving assembly three 43 are linear actuators such as linear motors, air cylinders or hydraulic cylinders.

[0098] In the embodiment, as shown in Figure 21 andFigure 22 As shown in the figure, the fixed base 40 is provided with a guide roller I 44 below the pair of mask assemblies A, the guide roller I 44 is rotatably installed on a roller frame I 45, the roller frame I 45 is fixedly connected with the fixed base 40, and the movable base 42 is configured with a discharge port I 46, as Figure 17 and Figure 18 As shown in the figure, the two mask mechanisms B are provided with a machine cover 49, the top of the machine cover 49 is configured with a feeding port 50, the feeding port 50 is above the pair of mask assemblies A, the strip material K penetrates from the feeding port 50 downward between the pair of mask assemblies A, and then passes around the guide roller I 44 and extends from the discharge port I 46, when the strip material K stops moving, the pair of mask assemblies A are close to each other to clamp and seal one segment of the strip material K, and then the parallel light is emitted from Figure 18 the mask device C to the left and right sides of the mask assembly A, the parallel light penetrates the through hole II 51 and the through hole I 19 in sequence and then irradiates on the mask plate 9, so as to perform double-sided exposure on one segment of the strip material K, after the exposure is completed, the pair of mask assemblies A are separated from each other, and then the strip material K continues to move, so that the next segment of the material to be exposed enters between the pair of mask assemblies A, and then the above exposure action is repeated, so that the pipeline type continuous exposure operation can be realized, the exposure speed is fast, and the efficiency is high.

[0099] In this embodiment, further, as shown in the figure Figure 17 and Figure 19 As shown in the figure, the fixed base 40 is provided with a carrier frame 47, the carrier frame 47 is provided with a guide rail 48, and the carrier frame 47 is located at one side of the mask frame 1 provided with the handle 10, so that after the mask assembly A is pulled out from the mask mechanism B, the mask assembly A can be temporarily placed on the carrier frame 47, and the roller II 11 rolls on the guide rail 48, so as to facilitate the disassembly and assembly of the mask assembly A.

[0100] Of course, in other embodiments, the two mask mechanisms B can also be the mask mechanism B of the second embodiment, and at this time, the mask device C also has a moving mechanism for driving the mask assemblies A of the two mask mechanisms B to approach each other.

[0101] Embodiment five: This embodiment discloses a light device D for double-sided exposure of a strip material K, as shown in the figure Figures 23-25As shown in the figure, it comprises a rack one 51 and a light source 52, a mirror one 53, a mirror two 54, a mirror three 55 arranged on the rack one 51, the light source 52 is a LED or a mercury lamp, the rack one 51 is configured with an out-light door hole 56, the light emitted by the light source 52 is reflected by the mirror one 53, the mirror two 54 and the mirror three 55 in turn to form horizontal parallel light, and the horizontal parallel light is emitted out of the rack one 51 after penetrating through the out-light door hole 56. In this way, the light irradiation device D emits horizontal parallel light, and by arranging one light irradiation device D on each of the left and right sides of the mask device C in the fourth embodiment, double-sided exposure can be carried out, without the need to modify the installation base and the mask device C itself, which is simple and convenient, and the symmetrical arrangement of the light irradiation device D on the left and right sides of the mask device C will not cause slight changes in the light path, and the light quality is guaranteed.

[0102] In the embodiment, at least one of the mirror one 53, the mirror two 54 and the mirror three 55 is a concave mirror, which transforms the light emitted by the light source 52 into parallel light. Preferably, the mirror one 53 and the mirror two 54 are plane mirrors, and the mirror three 55 is a concave mirror. In this way, the light emitted by the light source 52 can be transformed into parallel light more quickly and simply.

[0103] In the embodiment, as shown in the figures, Figure 24 and Figure 25 Further, the mirror one 53, the mirror two 54 and the mirror three 55 are all connected to the rack one 51 for rotation, the rotation axis of the mirror one 53 is horizontal, and the rotation axes of the mirror two 54 and the mirror three 55 are vertical. In this way, the shooting direction of the parallel light can be adjusted according to the position of the mask device C, so that precise exposure can be achieved.

[0104] In the embodiment, as shown in the figures, Figure 24 and Figure 25 Further, the rack one 51 is provided with a material conveying mechanism two 58 and a material outlet two 57, the material conveying mechanism two 58 is used for conveying the belt-shaped material K to leave the light irradiation device D through the material outlet two 57, and the belt-shaped material K after exposure is conveyed by the material conveying mechanism two 58.

[0105] Specifically, as shown in the figures, Figure 25 and Figure 26 The material conveying mechanism two 58 comprises at least one guide roller two 581, a driving roller one 582 and an adjusting roller one 583, and a push-pull device four 585, the at least one guide roller two 581 is connected to the rack one 51 for rotation, for example, Figure 26Two guide rollers 581 are shown in the middle, the driving roller 582 and the adjusting roller 583 are arranged in parallel at intervals, the driving roller 582 is drivingly connected with a driving member 584, which is used to drive the driving roller 582 to rotate; the push-pull device 585 is connected with the rack 51 and the adjusting roller 583, which is used to drive the adjusting roller 583 to move relative to the rack 51 to adjust the interval between the driving roller 582 and the adjusting roller 583, so as to adapt to the conveying of the strip material K with different thicknesses.

[0106] Preferably, as shown in Figure 25 and Figure 26 , the driving roller 582 is connected with the rack 51 to rotate, and the driving member 584 is fixedly connected with the rack 51; the rack 51 is slidingly connected with a sliding seat 589, the adjusting roller 583 is connected with the sliding seat 589 to rotate, and the push-pull device 585 is connected with the sliding seat 589, which is used to drive the sliding seat 589 to slide relative to the rack 51 to adjust the interval between the driving roller 582 and the adjusting roller 583; the adjusting roller 583 is provided with a sliding seat 589 and a push-pull device 585 at both ends in the axial direction, the sliding seat 589 is provided with a rack 588, the rack 51 is rotatably installed with a rotating shaft 586, both ends of the rotating shaft 586 are installed with gears 587 which are engaged with the racks 588 on the two sliding seats 589, and the sliding seat 589 slidingly drives the rotating shaft 586 to rotate. This design makes the driving roller 582 and the adjusting roller 583 rotate stably and the interval adjustment stable, and the problem of different displacement of the two ends of the adjusting roller 583 does not occur.

[0107] Further, in order to facilitate the connection of the guide roller 581, the driving roller 582 and the adjusting roller 583, the driving member 584, the sliding seat 589, the rotating shaft 586 and the push-pull device 585 with the rack 51, the roller frame 580 can be fixedly connected with the rack 51, and then the guide roller 581, the driving roller 582, the adjusting roller 583, the driving member 584, the push-pull device 585, the rotating shaft 586 and the sliding seat 589 are installed on the roller frame 580, as shown in Figures 25-27 .

[0108] The working process of the material conveying mechanism 58 of the embodiment is as follows: as shown in Figure 27 , the strip material K extending from the discharge port 46 of the mask device C of the fourth embodiment enters the material conveying mechanism 58, passes between the driving roller 582 and the adjusting roller 583, and then extends from the discharge port 57 and leaves the illumination device D.

[0109] Embodiment six: The embodiment discloses a material conveying device for conveying a strip material K, which refers to Figures 28-36As shown in the figure, the material feeding device comprises a frame two 60 and a material winding device 63 and a tension adjusting assembly 67 provided on the frame two 60, the material winding device 63 is used for winding or unwinding, the tension adjusting assembly 67 is used for adjusting the tension of the strip material K, when the material winding device 63 is used for winding, the material feeding device is a winding mechanism G, when the material winding device 63 is used for unwinding, the material feeding device is an unwinding mechanism E.

[0110] In the embodiment, as shown in the figures, Figure 30 and Figure 34 the material winding device 63 has an inflatable shaft 632, a winding pipe 633 and a driving member two 631, the inflatable shaft 632 is connected with the frame two 60 in rotation, the winding pipe 633 is sleeved on the inflatable shaft 632, the driving member two 631 is in transmission connection with the inflatable shaft 632 and is used for driving the inflatable shaft 632 to rotate, the inflatable shaft 632 is in action to make the winding pipe 633 fixedly connected with the inflatable shaft 632, and then the winding pipe 633 can be driven to rotate to carry out the winding operation of the strip material K or the strip material K sleeved on the winding pipe 633 can be unwound.

[0111] In the embodiment, as shown in the figures, Figure 29 and Figure 34 the tension adjusting assembly 67 has at least one pair of guide rollers four 671, guide rollers five 672, a distance adjuster 673 and a tension detecting element, the at least one pair of guide rollers four 671 are arranged in parallel and spaced apart and are connected with the frame two 60 in rotation, the guide rollers five 672 are connected with the frame two 60 in rotation and can move radially (such as up and down), the guide rollers five 672 are connected with the frame two 60 in rotation and can move radially according to the need, the distance adjuster 673 is provided on the frame two 60 and is connected with the guide rollers five 672 and is used for driving the guide rollers five 672 to move radially to adjust the distance between the guide rollers five 672 and the guide rollers four 671, so as to adjust the tension of the strip material K, the specific structure of the distance adjuster 673 is a linear motor, a pneumatic cylinder, a hydraulic cylinder, a synchronous belt assembly and the like, Figure 29 the distance adjuster 673 shown in the figure is a synchronous belt assembly, a motor drives the synchronous belt to rotate, the guide rollers five 672 are connected with the synchronous belt and are driven by the synchronous belt to move up and down on the frame two 60, the tension detecting element is provided on the axial end of the guide rollers four 671 and / or the guide rollers five 672 and is used for detecting the tension of the strip material K, and a common tension detecting element is a tension sensor.

[0112] In the embodiment, as shown in the figures, Figure 32 and Figure 36As shown, one end of the strip material K is adapted to pass around one of the guide rollers four 671, the guide roller five 672, the other guide roller four 671 in turn and then wrap around the outer circumferential surface of the pipe 633. Therefore, no matter whether the material winder 63 is winding or unwinding, the tension of the strip material K can be accurately detected by the tension detection element, and then the tension of the strip material K is adjusted by the distance adjuster 673. The tension detection and adjustment are accurate and fast, thereby ensuring that the tension of the strip material K is stable and does not fluctuate sharply, and ensuring the safe and stable conveying of the strip material K.

[0113] In this embodiment, further, as shown in Figure 29 and Figure 34 shown, the rack two 60 is provided with a splicing assembly 66 for splicing and connecting the front and rear two strip materials K, the splicing assembly 66 includes a splicing plate 661, a lifter one 663, a pair of pressing strips 662, a cutter, and a sticking material. The splicing plate 661 is fixedly connected with the rack two 60, and the upper surface of the splicing plate 661 is configured with a cutter falling groove 664. The strip material K passes along the upper surface of the splicing plate 661 during conveying. The lifter one 663 is fixedly connected with the splicing plate 661. The pair of pressing strips 662 are respectively located at both ends of the strip material K in the conveying direction above the splicing plate 661 and are connected with the lifter one 663. The lifter one 663 is configured to drive the pressing strips 662 to descend and press and fix the strip material K on the upper surface of the splicing plate 661. The cutter (not shown in the figure) is arranged above the cutter falling groove 664. The cutter is driven to descend and insert into the cutter falling groove 664 by a person or a machine, and cuts the strip material K on the upper surface of the splicing plate 661, thereby forming a cutout with a flat end face at one end of the strip material K. After the cutouts of the two strip materials K are aligned and closely attached together, the two strip materials K are connected by the sticking material driven by a machine or a person. In this way, the front and rear two strip materials K are spliced and connected with the assistance of the splicing assembly 66. Compared with the manual splicing without the aid of any equipment, the difficulty of manual splicing is reduced, and the splicing efficiency is improved.

[0114] In this embodiment, further, as shown in Figure 30 and Figure 34As shown, the rack two 60 is provided with a positioning assembly 62 for positioning the material roll sleeved on the roll pipe 633, the positioning assembly 62 comprises a pivot two 621, a swing arm 622, and a shaft support 623, the shaft support 623 is fixedly connected with the rack two 60, the pivot two 621 is rotatably fixedly connected with the shaft support 623, which means that the pivot two 621 and the shaft support 623 are normally fixedly connected, when the pivot two 621 is actuated, the pivot two 621 can rotate, the swing arm 622 is fixedly connected with the pivot two 621, in this way, the pivot two 621 can be actuated to rotate and adjust the position of the swing arm 622 according to the need, so that the swing arm 622 can better axially position the material roll sleeved on the roll pipe 633, preventing the material roll from deviating and affecting the winding or unwinding of the strip material K.

[0115] Further, as shown in Figure 30 and Figure 34 , the rack two 60 is provided with a rack three 74 adapted to axially slide along the inflation shaft 632, the material roll device 63 and the positioning assembly 62 are arranged on the rack three 74, in this way, the position of the material roll device 63 and the positioning assembly 62 can be finely adjusted to the material roll winding and unwinding position after the material conveying device is installed and fixed, which is convenient and practical, and avoids the trouble of finely adjusting the position of the rack two 60. Further, in order to facilitate the sliding of the rack three 74, a horizontal moving assembly four 61 can be arranged, which drives the rack three 74 to move relative to the rack two 60.

[0116] In this embodiment, as shown in Figures 29-31 , the rack two 60 or the rack three 74 is provided with a position detector 65, which is used to detect the position of the strip material K, so as to timely correct the position deviation of the strip material K and ensure the safety of material conveying. Further, as shown in Figure 34 , the rack two 60 or the rack three 74 is provided with a horizontal moving assembly five 71, which is connected with the position detector 65 and is used to drive the position detector 65 to axially move along the inflation shaft 632, in this way, the position detector 65 can be applied to strip materials K with different widths.

[0117] Specifically, the position detector 65 comprises an ultrasonic sensor, a photoelectric sensor, a laser sensor, and other detection elements commonly used for detecting the position of materials.

[0118] In this embodiment, as shown in Figure 28 and Figures 32-36As shown, the rack two 60 is provided with a plurality of baffles 73, which are configured as an isolation cover 75 for separating the internal environment of the conveying device from the outside; the isolation cover 75 is externally provided with an electrostatic filter 69, which includes a plasma generating device, a blowing device and a filter element, the plasma generating device is used to provide plasma for the internal environment of the conveying device, and the blowing device is used to drive the outside air to flow through the filter element for filtering and then enter the internal environment of the conveying device. In this design, on the one hand, the electrostatic filter 69 inputs clean air to the internal environment of the conveying device, prevents the external dust-containing gas from entering the conveying device to pollute the strip-shaped material K, and keeps the strip-shaped material K clean; on the other hand, the electrostatic filter 69 provides plasma for the internal environment of the conveying device, and the plasma can eliminate the static electricity carried by the strip-shaped material K, avoid the secondary pollution of the strip-shaped material K caused by static dust collection, and ensure the exposure quality of the strip-shaped material K.

[0119] Specifically, the filter element is filter paper, and the plasma generating device is located downstream or upstream of the filter element in the air flow direction, and the plasma is sent to each position in the internal environment of the conveying device by means of air flow.

[0120] Further, as shown in the drawings, Figure 35 As shown, the rack two 60 of the unwinding mechanism E is provided with a foreign matter cleaner 70, the foreign matter cleaner 70 includes at least one pair of parallel and spaced apart foreign matter sticking rollers one 702, the foreign matter sticking rollers one 702 are connected with the rack two 60 to rotate, and a pair of foreign matter sticking rollers one 702 are configured to make the two side surfaces of the strip-shaped material K roll in contact with the outer circumferential surface of a foreign matter sticking roller one 702 when the strip-shaped material K passes between the pair of foreign matter sticking rollers one 702, and the outer circumferential surface of the foreign matter sticking roller one 702 is configured to be able to stick the foreign matter on the surface of the strip-shaped material K, so as to remove the foreign matter on the surface of the strip-shaped material K by means of the foreign matter cleaner 70, so that the surface of the strip-shaped material K is clean and neat, and the strip-shaped material K treated by the foreign matter cleaner 70 carries static electricity, and the plasma injected into the internal environment of the conveying device by the electrostatic filter 69 can eliminate the static electricity, avoid the secondary pollution of the strip-shaped material K caused by static dust collection, and ensure the exposure quality of the strip-shaped material K.

[0121] In this embodiment, as shown in the drawings, Figure 35As shown, the impurity cleaner 70 further comprises at least two sticky rollers two 704 parallel to the sticky rollers one 702 and a lifter three 705 rotatably connecting the sticky rollers two 704, the lifter three 705 is installed on the rack two 60 and used to drive the two sticky rollers two 704 to move radially to contact the two sticky rollers one 702 respectively, and the outer circumferential surface of the sticky rollers two 704 is detachably attached with adhesive paper which can stick away the impurities on the outer circumferential surface of the sticky rollers one 702 after contacting the sticky rollers one 702. By using the above technical scheme, when the surface of the sticky rollers one 702 needs to be cleaned due to too many impurities, the sticky rollers two 704 are controlled to move radially to contact the sticky rollers one 702, and the adhesive paper is used to stick away the impurities on the surface of the sticky rollers one 702, so that the surface of the sticky rollers one 702 is cleaned, the adhesive paper is detachable and convenient to replace, when the surface of the sticky rollers one 702 does not need to be cleaned, the sticky rollers two 704 are controlled to move radially to separate from the sticky rollers one 702. In this way, the surface of the sticky rollers one 702 is conveniently cleaned and maintained. Generally, in order to make the sticky rollers one 702 have good impurity sticking effect, the outer circumferential surface of the sticky rollers one 702 is made of sticky silica gel or latex. This kind of sticky material has good weather resistance, long service life and sticky property which is not easy to decline, and can completely stick away the impurities on the surface of the strip-shaped material K. However, when the outer circumferential surface of the sticky rollers one 702 has too many impurities, it is inconvenient to clean. Therefore, the sticky rollers two 704 are arranged to clean the impurities on the outer circumferential surface of the sticky rollers one 702 by using the adhesive paper, and then the adhesive paper is removed and replaced, so that the cleaning and maintenance of the sticky rollers one 702 is simple and convenient, and has good practicability.

[0122] Further, as shown in the drawings, Figure 35 The sticky rollers one 702 have two pairs, and the two pairs of sticky rollers one 702 are parallel and spaced apart, and one sticky roller two 704 can contact the two sticky rollers one 702 by moving radially. The multiple sticky rollers one 702 can better remove the impurities on the surface of the strip-shaped material K and ensure that the surface of the strip-shaped material K is clean and tidy.

[0123] Further, as shown in the drawings, Figure 35 The impurity cleaner 70 further comprises a lifter two 703 installed on the rack two 60, the lifter two 703 is rotatably connected with the sticky rollers one 702 and used to drive the sticky rollers one 702 to move radially to adjust the distance between the two pairs of sticky rollers one 702 to adapt to strip-shaped materials K of different thicknesses.

[0124] Preferably, in order to facilitate the installation of the sticky rollers one 702 and the sticky rollers two 704 and the rotatable connection with the lifter three 705 and the lifter two 703, as shown in the drawings, Figure 32As shown, the cleaner 70 has a machine box 701, the lifter three 705 and the lifter two 703 are fixedly installed in the machine box 701, the machine box 701 is fixedly connected with the rack two 60, the roller frame three 706 and the roller frame four 707 are slidably installed in the machine box 701, two pairs of the sticky roller one 702 are rotatably installed on the roller frame three 706, the lifter two 703 is connected with the roller frame three 706 to drive the roller frame three 706 to lift and adjust the distance between the two pairs of the sticky roller one 702, the sticky roller two 704 is rotatably installed on the roller frame four 707, the roller frame four 707 is connected with the lifter three 705 to drive the roller frame four 707 to lift and make the sticky roller two 704 move radially to contact the sticky roller one 702.

[0125] Further, as shown in Figure 36 and Figure 32 , the rack two 60 or the rack three 74 is rotatably installed with the guide roller three 64 and the guide roller six 68 for guiding the conveying of the belt material K, the guide roller three 64 is located between the material winder 63 and the tension adjusting assembly 67 in the conveying direction of the belt material K, the splicing assembly 66 is located between the guide roller three 64 and the tension adjusting assembly 67 in the conveying direction of the belt material K, in the winding mechanism G, the guide roller six 68 is located upstream of the tension adjusting assembly 67 in the conveying direction of the belt material K, in the unwinding mechanism E, the guide roller six 68 is located downstream of the tension adjusting assembly 67 in the conveying direction of the belt material K, and the cleaner 70 is located between the guide roller six 68 and the tension adjusting assembly 67 in the conveying direction of the belt material K.

[0126] Further, as shown in Figure 36 and Figure 37 , the rack two 60 is provided with the guide roller seven 72, the guide roller seven 72 is located downstream of the guide roller six 68 in the conveying direction of the belt material K, and the guide roller seven 72 is used to guide the belt material K unwound by the unwinding mechanism E to leave the unwinding mechanism E.

[0127] Embodiment seven: The embodiment discloses an exposure device, as shown in Figure 38 and Figures 37-39As shown, it comprises the mask device C of Example Four, two light devices D of Example Five, the winding mechanism G of Example Six, the unwinding mechanism E, one of the light devices D has the material conveying mechanism two 58, and the two light devices D are located on the left and right sides of the mask device C. The light devices D on the left and right sides of the mask device C respectively irradiate parallel light to the mask plate 9 of a mask assembly A to perform double-sided exposure operation on the strip material K. The mask device C comprises the mask mechanism B, and the mask mechanism B comprises the mask assembly A. The specific structure and working principle of the mask device C, the mask mechanism B and the mask assembly A have been described in detail in the foregoing Examples One to Four, and will not be described here. The winding mechanism G and the unwinding mechanism E are arranged on the side away from the mask device C of the two light devices D. The unwinding mechanism E is used to unwind the wound strip material K to be exposed. The unwound strip material K enters the mask device C and penetrates between a pair of mask plates 9. The winding mechanism G is used to wind up the exposed strip material K to form a roll. When the strip material K penetrates between the pair of mask plates 9, the pair of guide frames 2 tightly abut the strip material K inside the guide frames 2 and the outside world to seal and separate the strip material K inside the guide frames 2 from the outside world. At this time, the pair of mask plates 9 tightly abut the strip material K, and then the gas between the pair of mask assemblies A can be drawn out to achieve vacuum adsorption of the mask plates 9 and the strip material K.

[0128] Further, as shown in Figures 39-41 The top of the housing 49 is provided with a material conveying mechanism one F. The material conveying mechanism one F is used to convey the strip material K output by the unwinding mechanism E from the feeding port 50 downward through the material conveying mechanism one F, penetrate between the pair of mask assemblies A, pass around the guide roller one 44, and then extend out of the discharging port one 46 into the material conveying mechanism two 58. The material conveying mechanism two 58 continues to convey the strip material K out of the discharging port two 57, away from the light device D, and into the winding mechanism G to wind up the exposed strip material K to form a roll.

[0129] Specifically, as shown in Figures 39-41 The material conveying mechanism one F has: a driving roller two 82 and an adjusting roller two 84, and a push-pull device five 87. The driving roller two 82 and the adjusting roller two 84 are arranged in parallel and spaced apart to allow the strip material K to pass between the driving roller two 82 and the adjusting roller two 84. The driving roller one 582 is rotatably connected to the housing 49. The adjusting roller one 583 is rotatably connected to the housing 49. The driving roller two 82 is drivingly connected with a driving member three 83. The driving member three 83 is used to drive the driving roller two 82 to rotate. The push-pull device five 87 is connected with the housing 49 and the adjusting roller two 84, and is used to drive the adjusting roller two 84 to move relative to the housing 49 to adjust the distance between the driving roller two 82 and the adjusting roller two 84, so as to clamp the strip material K with different thicknesses.

[0130] Further, as shown in Figures 39-41In order to facilitate the active roller two 82, the adjusting roller two 84, the push-pull device five 87 and the machine cover 49, the feeding mechanism one F further has a rack four 80, the rack four 80 is fixedly connected with the machine cover 49, the rack four 80 is fixedly installed with a roller rack five 85, the active roller two 82 is rotatably installed on the roller rack five 85, the push-pull device five 87 is fixedly installed on the roller rack five 85, the roller rack five 85 is slidably installed with a sliding seat two 86, the adjusting roller two 84 is rotatably installed on the roller rack five 85, the push-pull device five 87 is connected with the sliding seat two 86, and the sliding seat two 86 is driven to slide by the push-pull device five 87 to adjust the distance between the active roller two 82 and the adjusting roller two 84. Further, the sliding seat two 86 is fixedly installed with a rack two 90, the roller rack five 85 is rotatably installed with a rotating shaft three 88, the rotating shaft three 88 is installed with a gear two 89, the gear two 89 is engaged with the rack two 90, and the sliding seat two 86 drives the rotating shaft three 88 to rotate. In this way, the active roller two 82 and the adjusting roller two 84 can stably rotate and the distance between them can be stably adjusted, and the problem of different displacement of the adjusting roller two 84 at both ends can be avoided.

[0131] In the embodiment, in order to further facilitate the feeding mechanism one F to convey the strip material K, the roller rack five 85 is rotatably installed with a guide roller eight 81, a guide roller nine 91 and a guide roller ten 92, as shown in Figure 36 Figure 41 Figure 27 As shown in the drawings, the strip material K output by the guide roller seven 72 enters the feeding mechanism one F, and then sequentially passes through the guide roller eight 81, the active roller two 82, the guide roller nine 91 and the guide roller ten 92, and then enters the mask device C through the feeding port 50. In the mask device C, the strip material K passes through a pair of mask assemblies A, and then passes through the guide roller one 44 to extend out of the discharging port one 46 and enter the feeding mechanism two 58. The conveying path of the strip material K in the feeding mechanism two 58 is as shown in Figure 32 ​ As shown in the drawings, the strip material K output by the guide roller seven 72 enters the feeding mechanism one F, and then sequentially passes through the guide roller eight 81, the active roller two 82, the guide roller nine 91 and the guide roller ten 92, and then enters the mask device C through the feeding port 50. In the mask device C, the strip material K passes through a pair of mask assemblies A, and then passes through the guide roller one 44 to extend out of the discharging port one 46 and enter the feeding mechanism two 58. The conveying path of the strip material K in the feeding mechanism two 58 is as shown in Figure 32 ​ As shown in the drawings, the strip material K output by the guide roller seven 72 enters the feeding mechanism one F, and then sequentially passes through the guide roller eight 81, the active roller two 82, the guide roller nine 91 and the guide roller ten 92, and then enters the mask device C through the feeding port 50. In the mask device C, the strip material K passes through a pair of mask assemblies A, and then passes through the guide roller one 44 to extend out of the discharging port one 46 and enter the feeding mechanism two 58. The conveying path of the strip material K in the feeding mechanism two 58 is as shown in

Claims

1. An exposure apparatus for double-sided exposure of strip materials, characterized in that: It includes a mask device, two feeding devices and a pair of light-illuminating devices. The mask device includes two mask mechanisms, each mask mechanism including a mask assembly. The mask assemblies of the two mask mechanisms are symmetrically spaced and adapted to fit tightly together to clamp and seal one segment of the strip material. The mask assembly includes a mask frame and a mask plate. The mask frame has a through hole. The mask plate is attached to a side of the mask frame with the through hole and blocks and seals one end of the through hole. The side has multiple suction holes distributed circumferentially around the through hole. A guide frame is attached to the side, and the suction holes are located between the mask plate and the guide frame. The thickness of the guide frame is not less than the thickness of the mask plate. The mask frame has an extraction hole communicating with the suction holes, and one end of the extraction hole extends to the outer wall of the mask frame. When a strip of material passes through between a pair of mask plates, the pair of guide frames fit tightly together, sealing and separating the strip of material inside the guide frames from the outside. At this time, the pair of mask plates are in close contact with the strip of material. A pair of lighting devices are respectively disposed on both sides of a mask device, and respectively illuminate parallel light onto the mask plate of a mask assembly. The lighting device includes a frame 1 and a light source, a reflector 1, a reflector 2, and a reflector 3 disposed on the frame 1. The frame 1 is constructed with a light exit hole. The light emitted by the light source can be reflected upwards by the reflector 1, the reflector 2, and the reflector 3 in sequence to form horizontal parallel light, which passes through the light exit hole and shines onto the mask plate. Two feeding devices are respectively installed on one side of a pair of illumination devices away from the mask device. One feeding device is used to unroll the rolled strip material to be exposed, and the unrolled strip material passes through the gap between the pair of masks. The other feeding device is used to retract the exposed strip material and wind it into a roll. The feeding device includes a frame two and a winding device and a tension adjustment assembly mounted on the frame two. The winding device has the following features: The air shaft is connected to the second rotary shaft of the machine frame; A coiled tube is fitted over the air shaft; Drive component two is connected to the air shaft drive and is used to drive the air shaft to rotate. The tension adjustment component has: At least one pair of guide rollers are arranged in parallel at intervals and are rotatably connected to frame two. Guide roller five is radially movable and rotatably connected to frame two; The distance adjuster is located on frame 2 and connected to guide roller 5. It is used to drive guide roller 5 to move radially and adjust the distance between guide roller 5 and guide roller 4. Tension detection elements are located at the axial ends of guide roller four and / or guide roller five; One end of the strip material is adapted to be wound around the outer circumference of the tube after passing sequentially around one of the guide rollers four, five, and another guide roller four.

2. The exposure apparatus according to claim 1, characterized in that: The mask device further includes a fixed base and a movable base adapted to be slidably connected to the fixed base, and a pair of machine bases adapted to be slidably connected to the movable base. The sliding direction of the movable base is parallel to the side of the mask frame with the through hole, and the sliding direction of the machine bases is perpendicular to the side of the mask frame with the through hole. The pair of machine bases are spaced apart, and the two mask mechanisms are respectively mounted on the two machine bases. The fixed base is provided with a guide roller located below between a pair of mask assemblies. The movable base is provided with a discharge port. The two mask mechanisms are covered with a machine cover. The top of the machine cover is provided with a feed port located above between a pair of mask assemblies. The top of the machine cover is provided with a feeding mechanism 1, which is used to unwind the rolled strip material to be exposed. The strip material output by the feeding device is conveyed by the feeding mechanism 1 from the feed port downward, passing through the space between a pair of mask assemblies, passing around the guide roller 1, and extending out from the discharge port 1 into the feeding device used to collect and wind the exposed strip material into a roll.

3. The exposure apparatus according to claim 2, characterized in that: The material conveying mechanism has: The active roller 2 and the adjusting roller 2 are arranged parallel to each other at intervals so that the strip material can pass through between the active roller 2 and the adjusting roller 2. The active roller 1 is rotatably connected to the machine cover. The adjusting roller 1 is rotatably connected to the machine cover. The active roller 2 is driven by a driving component 3, which is used to drive the active roller 2 to rotate. Push-pull device five is connected to the machine cover and adjusting roller two. It is used to drive adjusting roller two to move relative to the machine cover and adjust the distance between the active roller two and adjusting roller two to clamp strip materials of different thicknesses.

4. The exposure apparatus according to claim 2, characterized in that: The frame is equipped with a material conveying mechanism and a discharge port. The strip material extending from the discharge port is conveyed by the material conveying mechanism and extends out from the discharge port, leaving the light exposure device and entering the material conveying device used to collect and wind the exposed strip material into a roll.

5. The exposure apparatus according to claim 4, characterized in that: The second material conveying mechanism includes: At least one guide roller is rotatably connected to the first frame; Active roller 1 and adjusting roller 1 are arranged parallel to each other at intervals so that the strip material can pass between active roller 1 and adjusting roller 1. Active roller 1 is rotatably connected to frame 1. Adjusting roller 1 is rotatably connected to frame 1 in a radially movable manner. Active roller 1 is driven by a drive component 1, which is used to drive active roller 1 to rotate. Push-pull device four is connected to frame one and adjusting roller one. It is used to drive adjusting roller one to move relative to frame one to adjust the distance between drive roller one and adjusting roller one, so as to clamp strip materials of different thicknesses.

6. The exposure apparatus according to claim 1, characterized in that: The side has a spiral groove, and the spiral groove has a suction hole that communicates with the suction hole. The through hole is located inside the spiral groove, and the mask covers the spiral groove.

7. The exposure apparatus according to claim 1, characterized in that: The side surface has a U-shaped groove 2 that communicates with the air extraction hole. The guide frame covers the U-shaped groove 2. A sealing ring 1 is tightly clamped between the guide frame and the side surface. The U-shaped groove 2 is located inside the sealing ring 1. A gap is constructed between the guide frame located inside the U-shaped groove 2 and the side surface. The gap is designed to allow gas inside the guide frame to pass through and enter the U-shaped groove 2.

8. The exposure apparatus according to claim 1, characterized in that: A second sealing ring is provided on the side of the guide frame facing away from the mask frame.

9. The exposure apparatus according to claim 1, characterized in that: The upper and lower ends of the mask frame are respectively provided with roller one and roller two; The side surface is provided with a plurality of limiting blocks around the circumference of the mask, and the limiting blocks abut against the edge of the mask; One side is provided with a guide wheel, which is adapted to be rolled and connected with the bottom surface of the mask.

10. The exposure apparatus according to claim 1, characterized in that: The mask mechanism also includes a mounting bracket and a mounting frame. The mounting bracket and the mounting frame are connected by a connector. The connector is configured to drive the mounting frame to slide up and down and left and right relative to the mounting bracket. The mounting frame 1 has a through hole 2 and a clamp is provided on the mounting frame 1. The clamp is configured to clamp and fix the mask assembly on the side of the mounting frame 1 with the through hole 2, and to make the through hole 1 and the through hole 2 face each other.

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