Modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment

Abstract

This application discloses a modular, high-purity, multi-station terminal ultrafiltration membrane cleaning device, specifically relating to the field of water treatment technology. It includes an ultrapure water storage facility provided by the front-end water source, as well as a water quality control module, a particle control module, a reagent supply module, a cleaning module, and a testing module. The cleaning and testing modules, supplied by the ultrapure water storage facility and in cooperation with the water quality control, particle control, and reagent supply modules, can complete the cleaning and testing of one or more terminal ultrafiltration membranes while ensuring high purity. After cleaning and testing the terminal ultrafiltration membranes with pure water from the ultrapure water storage facility, the cleaning and testing water are returned to the front-end water source and the ultrapure water storage facility according to different processes and water quality conditions, achieving a sustainable water resource utilization model. Furthermore, the terminal ultrafiltration membranes that have passed cleaning and testing on this device can be installed on the particle control module for recycling.

Description

Technical Field

[0001] This application relates to the field of water treatment technology, and more specifically, to a modular high-purity multi-station terminal ultrafiltration membrane cleaning device. Background Technology

[0002] Ultrafiltration membranes are semi-permeable polymer membranes used in ultrafiltration processes to separate polymer colloids or suspended particles of a certain size from a solution using pressure as the driving force. The membrane pore size is 1-100 nm, and it is widely used in the deep treatment of industrial wastewater and process water, as well as the preparation of ultrapure water.

[0003] Terminal ultrafiltration membranes refer to cross-flow ultrafiltration membranes used at the end of ultrapure water production systems to remove particulates. Because they are closest to the point of use, they are called terminal ultrafiltration membranes (see patent CN108779006A). The core purpose of this ultrafiltration membrane is to remove particles with a diameter of less than 20 nm (especially less than 10 nm) from ultrapure water that has undergone multi-stage treatment, thereby achieving high-efficiency and high-quality production of ultrapure water (see patent CN213202707U). It is significantly different from ultrafiltration membranes or ultrafiltration units used in wastewater or seawater desalination systems, which are generally located before the reverse osmosis system (see patent CN102249459A).

[0004] Ultrafiltration (UF) membranes require cleaning due to cloggedness caused by microparticle buildup. This is typically achieved by removing contaminants using physical or chemical methods to restore performance. Terminal ultrafiltration membranes, used at the end of ultrapure water systems, retain most particles during pretreatment, but clogging still occurs after 5-8 years of use. Unlike general ultrafiltration membranes, terminal ultrafiltration membranes require extremely high levels of suspended particles and cleanliness in the water at both the inlet and outlet. Failure to meet these standards will contaminate the membrane, leading to the release of microparticles during use, affecting product water quality, and ultimately causing membrane failure. However, while the clogging mechanism of terminal ultrafiltration membranes is similar to that of general ultrafiltration membranes, the clogging cycle is longer. Current technologies and patents have not yet solved the problem of achieving high-cleanliness cleaning.

[0005] Therefore, a modular, high-purity, multi-station terminal ultrafiltration membrane cleaning device is proposed to address the above problems. Summary of the Invention

[0006] In order to overcome the above-mentioned defects of the prior art, fill the gap in terminal ultrafiltration membrane cleaning equipment, ensure high cleanliness during the terminal ultrafiltration membrane cleaning process, ensure compatibility of the terminal ultrafiltration membrane to be cleaned, ensure the diversity of ultrapure water sources at the cleaning site, and ensure the recycling of water resources used for cleaning, this application provides a modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this application provides the following technical solution: a modular high-purity multi-station terminal ultrafiltration membrane cleaning device, comprising an ultrapure water source storage mechanism, a water quality control module, a particle control module, a reagent supply module, a cleaning module, and a testing module. The water quality control module is connected to the side of the ultrapure water source storage mechanism, and the particle control module is located on the side of the water quality control module away from the ultrapure water source storage mechanism. The reagent supply module, the cleaning module, and the testing module are located on the side of the particle control module away from the water quality control module. The testing module consists of a type I testing station, a type II testing station, and a return pipeline structure.

[0008] Preferably, the cleaning module includes a cleaning water supply pipeline assembly, a cleaning concentrate pipeline assembly, a cleaning product water pipeline assembly, a cleaning common pipeline assembly, a cleaning agent return pipe, a cleaning ultrapure water return pipe, a cleaning raw water return pipe, a cleaning wastewater pipe, and a combination of one or more Type I or Type II cleaning stations. The Type I and Type II cleaning stations are connected to the cleaning water supply pipeline assembly, the cleaning concentrate pipeline assembly, the cleaning product water pipeline assembly, and the cleaning common pipeline assembly via pipelines. The cleaning concentrate pipeline assembly, the cleaning product water pipeline assembly, and the cleaning common pipeline assembly are connected to the cleaning agent return pipe, the cleaning ultrapure water return pipe, the cleaning raw water return pipe, and the cleaning wastewater pipe.

[0009] Preferably, the test module includes a test water supply pipeline assembly, a test concentrate pipeline assembly, a test product water pipeline assembly, a test pure water return pipe, a test raw water return pipe, and a combination of one or more Type I or Type II test stations. The Type I or Type II test stations are connected to the test water supply pipeline assembly, the test concentrate pipeline assembly, and the test product water pipeline assembly via pipelines. The test concentrate pipeline assembly and the test product water pipeline assembly are connected to the test pure water return pipe and the test raw water return pipe. The surface of the pipeline in the cleaning product water pipeline assembly connected to the cleaning ultrapure water return pipe is provided with an ultrapure water resistivity meter and an ultrapure water particle counter, or for connecting to the probe sampling port of the corresponding testing equipment. The surface of the pipeline in the test product water pipeline assembly connected to the test pure water return pipe is provided with an ultrapure water resistivity meter and an ultrapure water particle counter or a probe sampling port of the corresponding equipment.

[0010] Preferably, the Type I cleaning station includes a Type I membrane to be cleaned. A first bottom-end pressure gauge assembly with a valve is installed at the bottom end of the Type I membrane. A bottom-end direct connection pipe and a bottom-end side connection pipe are connected to the side of the first bottom-end pressure gauge assembly away from the Type I membrane. A bottom-end direct connection valve is installed on the outer diameter surface of the bottom-end direct connection pipe connected to the cleaning water supply pipe assembly. A bottom-end side connection valve is installed on the outer diameter surface of the bottom-end side connection pipe connected to the cleaning product water pipe assembly. A side-side pressure gauge assembly with a valve is installed on the side wall of the Type I membrane. These two sets of components... The side of the pressure gauge assembly with valve is connected to the side outlet pipe and the side inlet pipe on the side away from the Type I membrane to be cleaned. The side outlet pipe is connected to the outer diameter surface of the cleaning concentrate pipeline assembly and a side outlet valve is provided. The side inlet pipe is connected to the outer diameter surface of the cleaning water supply pipeline assembly and a side inlet valve is provided. The top of the Type I membrane to be cleaned is provided with a first top connecting pipe. The first top connecting pipe is connected to the outer diameter surface of the cleaning common pipeline assembly and a second top valve and a first top valve pressure gauge assembly are provided.

[0011] The Type II cleaning station includes a Type II membrane to be cleaned. A pressure gauge assembly with a valve is installed at the lower end of the side wall of the Type II membrane. The side of the pressure gauge assembly with a valve, away from the Type II membrane, is connected to a direct lower-end pipe and a side lower-end side-connecting pipe. A direct lower-end valve is installed on the outer diameter surface of the cleaning water supply pipe assembly, and a side lower-end side-connecting valve is installed on the outer diameter surface of the cleaning product water pipe assembly. An upper side-end pressure gauge assembly with a valve is installed on the upper side of the side wall of the Type II membrane. The sides of the two upper side-end pressure gauge assemblies with valves, away from the Type II membrane, are respectively connected to the upper side-end outlet. On the pipes and the upper side inlet pipes, the upper side outlet pipe is connected to the cleaning concentrate pipe assembly and is equipped with an upper side outlet valve on the outer diameter surface. The upper side inlet pipe is connected to the cleaning water supply pipe assembly and is equipped with an upper side inlet valve on the outer diameter surface. The top of the Type II membrane to be cleaned is equipped with a second top connecting pipe. The second top connecting pipe is connected to the cleaning common pipe assembly and is equipped with a second top valve and a second top valve pressure gauge assembly on the outer diameter surface. The bottom of the Type II membrane to be cleaned is equipped with a bottom connecting pipe. The bottom connecting pipe is connected to the cleaning common pipe assembly and is equipped with a bottom valve and a second bottom valve pressure gauge assembly on the outer diameter surface.

[0012] Preferably, the particle control module includes a first precision filter, an inlet connection channel, a drain channel, and an outlet connection channel. The inlet connection channel is provided at the edge of the first precision filter, the outlet connection channel is provided on the side of the first precision filter away from the inlet connection channel, and the drain channel is installed at the bottom of the first precision filter.

[0013] Preferably, the particle control module further includes one or more parallel Type I terminal ultrafiltration membranes, one or more parallel Type II terminal ultrafiltration membranes, a third purification delivery pipeline, and a particle resistance meter. A Type II terminal ultrafiltration membrane is installed on the side of the first precision filter away from the inlet connection channel. The Type II terminal ultrafiltration membrane has symmetrically arranged first connection ports on its side, and second connection ports are provided at both its upper and lower ends. A Type I terminal ultrafiltration membrane is installed on the side of the Type II terminal ultrafiltration membrane away from the first precision filter. An independent third connection port is provided on the side of the Type I terminal ultrafiltration membrane, and third connection ports are provided at both its upper and lower ends. The first and third connection ports of the Type II and Type I terminal ultrafiltration membranes, which perform ultrapure water purification, are connected to the third purification delivery pipeline, and a particle resistance meter is installed on the outer diameter surface of the third purification delivery pipeline.

[0014] Preferably, the ultrapure water storage mechanism includes an ultrapure water inlet pipe, an ultrapure water return pipe, an ultrapure water near-end return pipe, an ultrapure water far-end return pipe, a return control valve, and a nitrogen-sealed water tank. The ultrapure water inlet pipe is provided with an ultrapure water return pipe on its side. The output ends of both the ultrapure water inlet pipe and the ultrapure water return pipe are equipped with the top of the nitrogen-sealed water tank. The nitrogen-sealed water tank is provided with a nitrogen gas delivery end on one side of the ultrapure water inlet pipe. A breathing end is provided on the side of the nitrogen gas delivery end away from the ultrapure water inlet pipe. The ultrapure water far-end return pipe is connected to the cleaning ultrapure water return pipe and the test pure water return pipe.

[0015] Preferably, the ultrapure water storage mechanism also includes a first resistivity meter and an outlet pipe. The first resistivity meter is installed on the outlet pipe of the nitrogen-sealed water tank. The delivery end of the ultrapure water return pipe is connected to a return control valve. The other two connection ports of the return control valve are respectively connected to an ultrapure water near-end return pipe and an ultrapure water far-end return pipe.

[0016] Preferably, the water quality control module includes a first pump unit, a second pump unit is arranged on the side of the first pump unit, the inlet and outlet of the first and second pump units are connected in parallel, and the outlet of the first pump unit is connected to a primary polishing mixed bed, a secondary polishing mixed bed is arranged on the side of the primary polishing mixed bed, the primary polishing mixed bed and the secondary polishing mixed bed are connected by a pipeline to realize the flow of ultrapure water, the bottom of the secondary polishing mixed bed is connected to a secondary purification delivery pipeline, and a second resistivity meter is arranged on the outer surface of the secondary purification delivery pipeline.

[0017] Preferably, the medicine supply module includes a medicine tank, and a dispensing tank is connected to the side of the medicine tank via a pipe. The top of the dispensing tank is provided with a purified water guide pipe connected to the third purification delivery pipe and a medicine return pipe connected to the cleaning medicine return pipe. The bottom of the dispensing tank is connected to a finished medicine delivery pipe.

[0018] The technical effects and advantages of this application are as follows:

[0019] Compared to existing technologies, this modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment offers exceptional flexibility. The pretreatment modules can be selected based on the quality of the on-site ultrapure water source. For on-site water sources that already meet the conditions for terminal ultrafiltration cleaning, water quality control and particle control modules are unnecessary. For on-site water sources that do not meet the requirements, one or a combination of water quality control and particle control modules can be selected to raise the on-site pure water to the cleanliness and microparticle concentration necessary for terminal ultrafiltration membrane cleaning. This ensures effective cleaning of the terminal ultrafiltration membrane, prevents secondary contamination, and allows the membrane to be reused after cleaning. The availability of a testing module can also be determined based on the on-site water quality and available water volume. Not configuring a testing module reduces manufacturing costs, while configuring it improves terminal ultrafiltration cleaning efficiency. Furthermore, the modular configuration fully utilizes customer site space. This is particularly beneficial for ultrapure water stations already built within semiconductor manufacturing plants that provide production ultrapure water, where space for retrofitting is often limited. The flexible arrangement of modules after modularization significantly reduces space constraints.

[0020] Compared with existing technologies, this modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment has comprehensive compatibility. Currently, the imported terminal ultrafiltration membrane brands are Nitto and Asahi Kasei, while domestic brands, represented by Hangzhou Kebote, occupy the majority of the market share. These three brands mainly provide terminal ultrafiltration membranes with two different pipeline flow methods. Nitto and Asahi Kasei each provide one type, while Kebote can provide both. To ensure compatibility with these different terminal ultrafiltration membranes, this technology specifically sets up Type I and Type II stations in the cleaning and testing modules. Therefore, it can simultaneously and compatibly clean and test the vast majority of terminal ultrafiltration membranes from imported brands Nitto and Asahi Kasei, as well as domestic brand Kebote.

[0021] 3. Compared with existing technologies, this modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment has a higher recycling rate for cleaning water and chemicals. The cleaning module is equipped with chemical return pipelines, pure water return pipelines, and raw water return pipelines at its rear end, while the testing module is equipped with pure water return pipelines and raw water return pipelines at its rear end. By separating water and chemicals in batches and according to water quality during different cleaning processes, the module effluent is returned to the chemical tank, ultrapure water source tank, and the upstream raw water source, achieving a sustainable utilization mode for cleaning and testing water. Furthermore, the terminal ultrafiltration membranes that have completed cleaning on the cleaning module can be installed on the particle control module at any time for recycling. Regarding ultrapure water, the effluent from the cleaning and testing modules that meets the standards as detected by instruments is returned through the ultrapure water return pipeline and the testing... The pure water return pipe and the ultrapure water remote return pipe return the water to the nitrogen-sealed water tank, enabling direct recycling of ultrapure water. Substandard product water and concentrate are sent to the front-end ordinary raw water tank via the cleaning raw water return pipe and the test raw water return pipe. After purification, they re-enter the ultrapure water source system. Furthermore, chemicals whose concentration decreases during the cleaning process but whose cleanliness meets the standards are returned to the chemical tank via the cleaning chemical return pipe and the chemical return pipe. After remixing, they are reused for cleaning, reducing chemical waste and secondary pollution, and lowering consumable costs. Simultaneously, the circulation system, combined with a control structure and real-time data feedback from water quality monitoring instruments, precisely regulates the return path of different water qualities through linked valves. The chemical delivery system is equipped with a flow sensor and an electric regulating valve to adapt to circulation needs. This design ensures the cleanliness of the circulating water while allowing for recycling.

[0022] 4. Compared with existing technologies, this modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment has higher efficiency and greater capacity improvement potential. Due to the high cleanliness requirements of terminal ultrafiltration membranes, the cleaned membranes cannot be used immediately. Firstly, the operating pressure difference and particulate matter need to be monitored. Secondly, the particulate matter requirements of the effluent cannot be quickly met in a short time. Furthermore, the user end often cannot provide a long-term water supply and circulation to perform this operation on the terminal ultrafiltration membrane within the system in use. Therefore, to improve capacity, a testing module is additionally set up on the side of the cleaning module. Terminal ultrafiltration membranes awaiting cleaning or those that have completed cleaning are installed on the testing module. Testing is performed on the ultrafiltration membranes awaiting cleaning or on the cleaned membranes after rinsing and testing. This avoids performing the relatively time-consuming rinsing and testing processes within the cleaning module, increasing the efficiency of the cleaning module to allow for uninterrupted cleaning. Simultaneously, the design of the cleaning and testing station piping is replicable, allowing for the installation of one or more corresponding Type I or Type II stations as needed, significantly improving equipment efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of this application;

[0024] Figure 2This is a structural diagram of the ultrapure water storage facility of this application;

[0025] Figure 3 This is a schematic diagram of the particle control module of this application;

[0026] Figure 4 This is a schematic diagram of the pharmaceutical supply module of this application;

[0027] Figure 5 This is a structural schematic diagram of the Type I cleaning station of this application;

[0028] Figure 6 This is a structural schematic diagram of the Type II cleaning station of this application;

[0029] Figure 7 This is a structural schematic diagram of the Type I test station of this application;

[0030] Figure 8 This is a structural schematic diagram of the Type II test station of this application;

[0031] The attached diagram is labeled as follows: 1. Ultrapure water storage mechanism; 2. Water quality control module; 3. Particle control module; 4. Chemical supply module; 401. Chemical tank; 402. Dosing tank; 403. Purified water guide pipe; 404. Finished drug delivery pipe; 405. Chemical return pipe; 5. Cleaning module; 501. Cleaning water supply pipeline assembly; 502. Cleaning concentrate pipeline assembly; 503. Cleaning product water pipeline assembly; 504. Cleaning common pipeline assembly; 6. Testing module; 601. Test water supply pipeline assembly; 602. Test concentrate pipeline assembly; 603. Test product water pipeline assembly; 7. Type I cleaning station; 701. Type I membrane to be cleaned; 702. Bottom direct connection pipe; 703. Bottom direct connection valve; 704. Bottom side connection pipe; 705. Bottom side connecting valve; 706. First bottom pressure gauge assembly with valve; 707. Side water outlet pipe; 708. Side water outlet valve; 709. Side water inlet pipe; 710. Side water inlet valve; 711. Side pressure gauge assembly with valve; 712. First top connecting pipe; 713. First top valve; 714. First top pressure gauge assembly with valve; 8. Type II cleaning station; 801. Type II membrane to be cleaned; 802. Lower side direct connecting pipe; 803. Lower side direct connecting valve; 804. Lower side side connecting pipe; 805. Lower side side connecting valve; 806. Lower side pressure gauge assembly with valve; 807. Upper side water outlet pipe; 808. Upper side water outlet valve; 809. Upper side water inlet pipe; 810. Side 811. Upper inlet valve; 812. Upper side pressure gauge assembly with valve; 813. Second top connecting pipe; 814. Second top valve; 815. Second top pressure gauge assembly with valve; 816. Bottom connecting pipe; 817. Bottom valve; 818. Second bottom pressure gauge assembly with valve; 9. Type I test station; 901. Type I ultrafiltration membrane under test; 902. Test concentrate channel; 903. Bottom inlet channel; 904. First top outlet channel; 905. Product water pressure gauge; 906. Inlet pressure gauge; 10. Type II test station; 1001. Type II ultrafiltration membrane under test; 1002. Upper side concentrate channel; 1003. Lower side inlet channel; 1004. Second top outlet channel; 1005. Bottom outlet channel; Water channel; 1006, Side lower end inlet pressure gauge; 1007, Top end product water pressure gauge; 1008, Bottom end product water pressure gauge; 11, Ultrapure water inlet pipe; 12, Ultrapure water return pipe; 1201, Ultrapure water near end return pipe; 1202, Ultrapure water far end return pipe; 13, Return control valve; 14, Nitrogen-sealed water tank; 15, Nitrogen delivery end; 16, Breathing end; 17, First resistivity meter; 18, Outlet water pipe; 19, First pump unit; 20, Second pump unit; 21, Primary polishing mixed bed; 22, Secondary polishing mixed bed; 23, Secondary purification delivery pipe; 2301, Secondary resistivity meter; 24, First precision filter; 2401, Inlet water connection channel; 2402, Sewage discharge channel; 2403, Outlet water connection channel;25. Type II terminal ultrafiltration membrane; 26. Type I terminal ultrafiltration membrane; 27. Third purification delivery pipeline; 28. Particle resistance connection meter; 29. ​​Cleaning reagent return pipe; 30. Cleaning ultrapure water return pipe; 31. Cleaning raw water return pipe; 32. Cleaning wastewater pipe; 33. Test pure water return pipe; 34. Test raw water return pipe. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. Example

[0033] As attached Figures 1 to 8 The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment shown includes an ultrapure water storage unit 1, a water quality control module 2, a particle control module 3, a reagent supply module 4, a cleaning module 5, and a testing module 6. The water quality control module 2 is connected to the side of the ultrapure water storage unit 1, and the particle control module 3 is located on the side of the water quality control module 2 away from the ultrapure water storage unit 1. The reagent supply module 4, cleaning module 5, and testing module 6 are located on the side of the particle control module 3 away from the water quality control module 2. The cleaning module 5 includes a cleaning water supply pipeline assembly 501. The test module 6 includes a combination of a concentrated water pipeline assembly 502, a product water pipeline assembly 503, a common pipeline assembly 504, a chemical return pipe 29, an ultrapure water return pipe 30, a raw water return pipe 31, a wastewater pipe 32, and one or more Type I cleaning stations 7 or Type II cleaning stations 8; the test module 6 includes a test water supply pipeline assembly 601, a concentrated water pipeline assembly 602, a product water pipeline assembly 603, a pure water return pipe 33, a raw water return pipe 34, and one or more Type I test stations 9 or Type II test stations 10.

[0034] There are two types of flow channel designs (specifically, 1: the inlet and outlet are located at the top and bottom of the ultrafiltration membrane, and the concentrate outlet is located on the side wall of the ultrafiltration membrane; 2: two outlets are located at the top and bottom of the ultrafiltration membrane, and the inlet and concentrate outlet are located on the side wall of the ultrafiltration membrane). Nitto, Asahi Kasei, and Cobot use both designs for their terminal ultrafiltration membranes, which have a high market share. However, during use, these terminal ultrafiltration membranes may experience high energy consumption or high pressure operation before reaching their lifespan due to filter cartridge clogging. In such cases, one... If the blockage inside the ultrafiltration membrane cannot be treated in time, the blockage will solidify and adhere to the filter element, causing damage to the ultrafiltration membrane and ultimately rendering the terminal ultrafiltration membrane unusable. Therefore, considering the situation where the ultrafiltration membrane becomes clogged before reaching its service life, a cleaning framework is constructed that adapts to two different flow pipe designs and is compatible with Nitto, Asahi Kasei, and Cobot brand models of terminal ultrafiltration membranes. The pure water in the ultrapure water storage unit 1 undergoes secondary purification through the water quality control module 2 and particle control module 3, and is further purified by the reagent supply module 4. The cleaning agent is mixed in pure water, and by forward and backwashing the two types of terminal ultrafiltration membranes mentioned above, tiny particles are removed from the filter element, thus completing the purification of two terminal ultrafiltration membrane models from Nitto and Asahi Kasei brands. Because the inlet ends of the two types of terminal ultrafiltration membranes are different, the cleaning module 5 is designed to simultaneously accommodate both types of terminal ultrafiltration membranes through pipeline diversion, ball valve settings, and the placement of Type I cleaning station 7 and Type II cleaning station 8. Although the design of the cleaning module 5 allows it to complete the process simultaneously... The entire process of testing and cleaning is carried out. However, since the testing process is usually time-consuming and uses a lot of water, in order to improve the overall cleaning efficiency, an additional testing module 6 is set up on the side of the cleaning module 5. The terminal ultrafiltration membranes that have not been cleaned or have been cleaned are installed on the testing module 6 to conduct pre-cleaning status tests and post-cleaning performance tests. This way, the time-consuming testing work is handled by a dedicated module. While the testing module 6 is working, the cleaning module 5 can complete the cleaning process of the terminal ultrafiltration membranes that have passed the pre-cleaning test. The division of labor and cooperation between the two modules greatly improves the overall equipment cleaning efficiency.

[0035] Furthermore, when the cleaning module 5 and the testing module 6 are working, the quality of the effluent is determined by the ultrapure water resistivity meter and ultrapure water particle counter installed on the cleaning product water pipeline assembly 503 and the testing product water pipeline assembly 603. For ultrapure water that meets the standards, it can be returned to the ultrapure water source storage mechanism 1 through the ultrapure water return pipe 30 and the testing pure water return pipe 33 via the ultrapure water remote return pipe 1202 to achieve the effect of sustainable use of ultrapure water; while the substandard product water and concentrated water generated by the two modules are treated by cleaning the raw water. The return pipe 31 and the test raw water return pipe 34 return the ordinary raw water to the upstream tank. After purification treatment, the water enters the ultrapure water storage unit 1 to achieve the effect of sustainable use of water resources. The cleaning agent return pipe 29 will send the reusable agent back to the medicine tank for recycling. The ultrapure water return pipe 30 contains uncontaminated ultrapure water, which can be transported back to the water tank for reuse. The terminal ultrafiltration membrane that has been cleaned on the cleaning module 5 can be installed on the particle control module 3 at any time for recycling. Example

[0036] Based on Example 1, the solution in Example 1 will be further described in detail below with reference to the specific working method, such as... Figures 1 to 8 As shown below, see details:

[0037] In a preferred embodiment, the Type I cleaning station 7 includes a Type I membrane to be cleaned 701, a bottom direct connection pipe 702, a bottom direct connection valve 703, a bottom side connection pipe 704, a bottom side connection valve 705, a first bottom pressure gauge assembly with valve 706, a side water outlet pipe 707, a side water outlet valve 708, a side water inlet pipe 709, a side water inlet valve 710, a side pressure gauge assembly with valve 711, a first top connection pipe 712, a first top valve 713, and a first top pressure gauge assembly with valve 714. The bottom end of the Type I membrane to be cleaned 701 is provided with the first bottom pressure gauge assembly with valve 706, which includes a valve body pressure gauge and a connector for connecting to the Type I membrane to be cleaned 701. The system includes a valve body for controlling the outlet of ultrapure water, a pressure gauge for detecting the pressure of ultrapure water during transport, and a first bottom-valve pressure gauge assembly 706 connected to the type I membrane to be cleaned 701 via a connection port. A bottom-direct connection pipe 702 and a bottom-side connection pipe 704 are connected to the side of the first bottom-valve pressure gauge assembly 706 away from the type I membrane to be cleaned 701. The bottom-direct connection pipe 702 is connected to a bottom-direct valve 703 on the outer diameter surface of the cleaning water supply pipeline assembly 501 to regulate the ultrapure water supplied during forward cleaning, thereby controlling the cleaning position of the ultrapure water supplied to the type I membrane to be cleaned 701. A bottom-side valve 705 is connected to the outer diameter surface of the bottom-side connection pipe 704. The ultrapure water rinsing direction is adjusted by restricting the inlet and outlet of the ultrapure water. A side-mounted pressure gauge assembly 711 with a valve is installed on the side wall of the Type I membrane 701 to be cleaned. A side outlet pipe 707 and a side inlet pipe 709 are connected to the side of the side-mounted pressure gauge assembly 711 away from the Type I membrane 701. A side outlet valve 708 is connected to the outer diameter surface of the side outlet pipe 707, and a side inlet valve 710 is connected to the outer diameter surface of the side inlet pipe 709. The flow of water through the corresponding valves is regulated to achieve rinsing of the membrane from the concentrate outlet. A first top-end connecting pipe 712 is installed at the top of the Type I membrane 701, and the outer diameter surface of the first top-end connecting pipe 712 is connected to… The system is equipped with a first top valve 713 and a first top valve-equipped pressure gauge assembly 714. The first top valve-equipped pressure gauge assembly 714 has the same structure as the first bottom valve-equipped pressure gauge assembly 706. The Type I cleaning station 7 is designed for the corresponding filter membrane element. The first bottom valve-equipped pressure gauge assembly 706 at the bottom of the Type I membrane to be cleaned 701 monitors the membrane pressure in real time. The first top valve 713 of the bottom direct connection pipe 702, the bottom side connection pipe 704, and the first top connection pipe 712, in conjunction with the first top valve-equipped pressure gauge assembly 714, can realize forward flushing, reverse flushing, and segmented sewage discharge. Then, the side water inlet pipe 709 and the side water outlet pipe 707 on the side wall, in conjunction with the side valve-equipped pressure gauge assembly 711, support sewage discharge and cleaning from the concentrate outlet.

[0038] In a preferred embodiment, the Type II cleaning station 8 includes a Type II membrane to be cleaned 801, a side lower end direct connection pipe 802, a side lower end direct connection valve 803, a side lower end side connection pipe 804, a side lower end side connection valve 805, a side lower end pressure gauge assembly with valve 806, a side upper end water outlet pipe 807, a side upper end water outlet valve 808, a side upper end water inlet pipe 809, a side upper end water inlet valve 810, a side upper end pressure gauge assembly with valve 811, a second top end connecting pipe 812, a second top end valve 813, a second top end pressure gauge assembly with valve 814, a bottom end connecting pipe 815, a bottom end valve 816, and a second bottom end pressure gauge assembly with valve 817. The Type II membrane to be cleaned 801... A side-mounted pressure gauge assembly 806 with a valve is provided at the lower end of the side wall of component 1. The side-mounted pressure gauge assembly 806 includes a valve body pressure gauge and a connection port for connection with the assembly. The valve body controls the ultrapure water delivery position at the inlet and outlet, while the pressure gauge detects the pressure of the ultrapure water during delivery. A side-mounted direct connection pipe 802 and a side-mounted side connection pipe 804 are connected to the side of the side-mounted pressure gauge assembly 806 away from the type II membrane 801 to be cleaned. A side-mounted direct connection valve 803 is connected to the outer diameter surface of the side-mounted direct connection pipe 802 to regulate the ultrapure water delivered during forward cleaning. A lower-end side-connecting valve 805 is connected to the outer diameter surface of the lower-end side-connecting pipe 804. Similarly, by restricting the inlet and outlet of ultrapure water, the cleaning direction of ultrapure water can be adjusted. A side-upper-end pressure gauge assembly 811 with a valve is installed on the upper side wall of the Type II membrane to be cleaned 801. The side-upper-end pressure gauge assembly 811 with a valve has the same structure as the side-lower-end pressure gauge assembly 806 with a valve, both used to adjust the delivery of ultrapure water to modify the cleaning path of ultrapure water within the filter membrane. A side-upper-end outlet pipe 807 and a side-upper-end inlet pipe 809 are connected to the side of the side-upper-end pressure gauge assembly 811 away from the Type II membrane to be cleaned 801. The outer diameter of the side-upper-end outlet pipe 807... The surface of the membrane to be cleaned is connected to a side upper end water outlet valve 808, and the outer diameter surface of the side upper end water inlet pipe 809 is connected to a side upper end water inlet valve 810. The top end of the type II membrane to be cleaned 801 is provided with a second top end connecting pipe 812, and the outer diameter surface of the second top end connecting pipe 812 is connected to a second top end valve 813 and a second top end valve pressure gauge assembly 814. The bottom end of the type II membrane to be cleaned 801 is provided with a second bottom end connecting pipe 815, and the outer diameter surface of the bottom end connecting pipe 815 is connected to a bottom end valve 816 and a second bottom end valve pressure gauge assembly 817. The second bottom end valve pressure gauge assembly 817 has the same structure as the side upper end valve pressure gauge assembly 811.

[0039] Due to the high cleanliness requirements of the terminal ultrafiltration membrane, the membrane cannot be used immediately after cleaning. Firstly, the permeate pressure and particulate matter need to be tested. Secondly, it cannot quickly reach the required particulate matter level for operation. Since the user end often cannot provide a long-term water supply and circulation for this operation of the terminal ultrafiltration on the system, it is necessary to conduct long-term testing and forward operation through test module 6 to achieve a low-particulate normal operating state. Similarly, the filter membrane placement rack and pipeline design of test module 6 are also reproducible. Therefore, one or more corresponding test racks can be installed as needed. One or more Type I or Type II test racks can be assembled according to the testing requirements, and multiple Type I and Type II racks can be mixed to achieve compatibility.

[0040] In a preferred embodiment, the particle control module 3, cleaning module 5, and testing module 6 are all multi-station and compatible, adaptable to terminal ultrafiltration membranes from well-known brands such as Nitto, Asahi Kasei, and Cobot. They can perform simultaneous cleaning and testing at multiple stations, and the designed piping is reproducible. Therefore, one or more corresponding Type I or Type II racks can be installed as needed. Since the three brands offer two terminal ultrafiltration membranes with significantly different inlet and outlet designs, the racks and piping for placing the membranes to be cleaned all include corresponding designs. Compatibility can be achieved by assembling one or more racks of a single model, or one or more racks of multiple models, depending on the cleaning requirements.

[0041] In a preferred embodiment, the particle control module 3 includes a first precision filter 24, an inlet connection channel 2401, a drain channel 2402, and an outlet connection channel 2403. The inlet connection channel 2401 is located at the edge of the first precision filter 24, and the outlet connection channel 2403 is located on the side of the first precision filter 24 away from the inlet connection channel 2401. The particle control module 3 further purifies the ultrapure water purified by the water quality control module 2. The first precision filter 24, through the inlet connection channel 2401, the drain channel 2402, and the outlet connection channel 2403, achieves preliminary interception and targeted discharge of fine particulate pollutants in the transported ultrapure water, and can perform secondary treatment on the fine particles attached to the ultrapure water during the flow process. The drain channel 2402 is installed at the bottom of the first precision filter 24. The particle control module 3 also includes one or more parallel Type II terminal ultrafiltration membranes 25, one or more parallel Type I terminal ultrafiltration membranes 26, a third purification conveying pipe 27, and a particle resistance meter 2. 8. The Type II terminal ultrafiltration membrane 25 is located on the side furthest from the first precision filter 24. The Type II terminal ultrafiltration membrane 25 has symmetrically arranged connection ports on its side, both at the top and bottom. The Type II terminal ultrafiltration membrane 25 is located on the side furthest from the first precision filter 24, while the Type I terminal ultrafiltration membrane 26 has an independent connection port on its side. The symmetrical connection port design of the Type II terminal ultrafiltration membrane 25, in conjunction with the Type I terminal... The side connection port of the ultrafiltration membrane 26 forms a purification channel through the third purification delivery pipe 27 to adapt to the filter membranes on the market. The connection ports of the Type II terminal ultrafiltration membrane 25 and the Type I terminal ultrafiltration membrane 26 for ultrapure water purification are connected to the third purification delivery pipe 27, and a particle resistance meter 28 is installed on the outer diameter surface of the third purification delivery pipe 27 for convenient use. The particle resistance meter 28 on the surface of the pipe can detect the particle concentration in the water in real time to ensure that the particle content of the effluent meets the standard for cleaning the filter membrane.

[0042] In a preferred embodiment, the ultrapure water storage mechanism 1 includes an ultrapure water inlet pipe 11, an ultrapure water return pipe 12, an ultrapure water near-end return pipe 1201, an ultrapure water far-end return pipe 1202, a return control valve 13, and a nitrogen-sealed water tank 14. The ultrapure water inlet pipe 11 is provided with the ultrapure water return pipe 12 on its side, and the output ends of both the ultrapure water inlet pipe 11 and the ultrapure water return pipe 12 are installed at the top of the nitrogen-sealed water tank 14. The return control valve 13 controls the flow of water from the ultrapure water far-end return pipe 1202 into the ultrapure water tank. The ultrapure water return pipe 12 uses ultrapure water from the cleaning module 5 and the testing module 6 that has passed instrument testing and is returned via the cleaned ultrapure water return pipe 30 and the test pure water return pipe 33, achieving the effect of ultrapure water reuse. Simultaneously, when the water consumption of the self-cleaning module 5 and the testing module 6 is low, the ultrapure water will return to the nitrogen-sealed water tank 14 via the ultrapure water near-end return pipe 1201 to avoid waste. The nitrogen-sealed water tank 14 is located on one side of the ultrapure water inlet pipe 11 and has a nitrogen delivery end 15, which is located far from the nitrogen inlet pipe 11. A breather end 16 is provided on one side of the ultrapure water inlet pipe 11. The nitrogen delivery end 15 and the breather end 16 of the nitrogen-sealed water tank 14, through the nitrogen protection mechanism, can reduce the dissolved oxygen and carbon dioxide in the ultrapure water, thereby reducing the generation of microorganisms and preventing the ultrapure water quality from deteriorating. The breather end 16 on the nitrogen-sealed water tank 14 balances the pressure inside the nitrogen-sealed water tank 14, ensuring that the ultrapure water in the nitrogen-sealed water tank 14 remains stable during the system's ultrapure water delivery process. In a stable state, the ultrapure water storage mechanism 1 also includes a first resistivity meter 17 and an outlet pipe 18. The first resistivity meter 17 is installed on the surface of the nitrogen-sealed water tank 14, and an outlet channel is provided below the first resistivity meter 17. The delivery end of the ultrapure water return pipe 12 is connected to a return control valve 13. The first resistivity meter 17 installed on the surface of the nitrogen-sealed water tank 14 is used to detect the water quality of the ultrapure water in the nitrogen-sealed water tank 14, ensuring that the outlet pipe 18 below can stably deliver qualified ultrapure water.

[0043] In a preferred embodiment, the water quality control module 2 includes a first pump unit 19, and a second pump unit 20 is disposed on the side of the first pump unit 19. The inlet and outlet ends of the first pump unit 19 and the second pump unit 20 are both connected in parallel. The outlet end of the first pump unit 19 is connected to a primary polishing mixed bed 21. Since the primary polishing mixed bed 21 and the secondary polishing mixed bed 22 operate in series, the synergistic effect of the anion and cation exchange resins in the polishing mixed bed can deeply remove ionic impurities in the water, thereby reducing the fine impurities mixed in with the ultrapure water during transportation. The water quality control module 2 is constructed with a secondary polishing mixed bed purification structure. The bottom end of the secondary polishing mixed bed 22 is connected to a secondary purification delivery pipe 23. A second resistivity meter 2301 is set on the outer surface of the secondary purification delivery pipe 23. The second resistivity meter 2301 on the surface of the secondary purification delivery pipe 23 is used to monitor the resistivity of the ultrapure water in real time during the transportation process of the secondary purification delivery pipe 23. When the value is lower than the set threshold, an alarm can be triggered and the operating parameters of the mixed bed can be automatically adjusted to ensure that the resistivity of the ultrapure water is stable and meets the required purification effect.

[0044] In a preferred embodiment, the medicine supply module 4 includes a medicine tank 401, a dispensing tank 402, a purified water guide pipe 403, a finished drug delivery pipe 404, and a medicine return pipe 405. The dispensing tank 402 is connected to the side of the medicine tank 401 via a pipe. The medicine tank 401 in the medicine supply module 4 stores concentrated medicine and is connected to the dispensing tank 402 via a pipe to achieve quantitative dilution of the medicine. The top of the dispensing tank 402 is provided with a purified water guide pipe 403 connected to the third purified delivery pipe 27, and the purified water guide pipe 403 can then be introduced into the third purified delivery pipe 27. The ultrapure water is thoroughly mixed with the reagents in the dosing tank 402. The bottom end of the dosing pipe is connected to the finished product delivery pipe 404. The finished product delivery pipe 404 is equipped with a flow sensor and an electric regulating valve. The concentration of the delivered reagents is dynamically adjusted according to the water quality monitoring data to ensure that the amount of reagents used in the filter membrane cleaning process meets the requirements for cleaning the filter membrane. The reagents used in the cleaning process but whose concentration has been reduced but still meet the cleanliness requirements will be transported from the cleaning reagent return pipe 29 to the reagent return pipe 405 and then to the reagent tank 401 to achieve the effect of reagent reuse and avoid reagent waste and secondary pollution.

[0045] In a preferred embodiment, the Type I test station 9 includes a Type I ultrafiltration membrane 901 to be tested, a test concentrate channel 902, a bottom inlet channel 903, a first top outlet channel 904, a product water pressure gauge 905, and an inlet pressure gauge 906. The Type I test station 9 constructs a testing framework. The Type I ultrafiltration membrane 901, through the test concentrate channel 902, the bottom inlet channel 903, and the first top outlet channel 904, simulates the water flow path under actual operating conditions. The bottom of the Type I ultrafiltration membrane 901 is provided with a bottom inlet channel 903, and the top of the Type I ultrafiltration membrane 901 is provided with a first top outlet channel 904. The side of the first top outlet channel 904 is provided with... A product water pressure gauge 905 and an inlet water pressure gauge 906 are installed on the side of the bottom inlet water channel 903. The product water pressure gauge 905 and the inlet water pressure gauge 906 monitor the pressure at the corresponding inlet and outlet ends of the placed filter membrane during the ultrapure water delivery process. The purification effect of the purified filter membrane, i.e., the degree of pressure difference reduction, is confirmed by calculating the transmembrane pressure difference. The Type II test station 10 includes a Type II test terminal ultrafiltration membrane 1001, an upper side concentrate channel 1002, a lower side inlet water channel 1003, a second top outlet water channel 1004, a bottom outlet water channel 1005, a lower side inlet water pressure gauge 1006, a top product water pressure gauge 1007, and a bottom product water pressure gauge 1008. (Type II test station) 10. Construct a testing framework, wherein the Type II test terminal ultrafiltration membrane 1001, through a side upper concentrate channel 1002, a side lower inlet channel 1003, a second top outlet channel 1004, and a bottom outlet channel 1005, simulates the water flow path under actual operating conditions. The Type II test terminal ultrafiltration membrane 1001 has a side lower inlet channel 1003 on its side, and a second top outlet channel 1004 and a bottom outlet channel 1005 at its top and bottom. A top product water pressure gauge 1007 and a bottom product water pressure gauge 1008 are respectively installed on the sides of the second top outlet channel 1004 and the bottom outlet channel 1005. The side of the side lower inlet channel 1003... A side-bottom inlet pressure gauge 1006 is installed. At this time, the side-bottom inlet pressure gauge 1006, together with the top product water pressure gauge 1007 and the bottom product water pressure gauge 1008, monitors the pressure at the corresponding inlet and outlet ends of the placed filter membrane during the ultrapure water transportation process. By calculating the transmembrane pressure difference, the purification effect of the purified filter membrane, i.e., the degree of pressure difference reduction, is confirmed. In addition, the test product water pipeline assembly 603, which is connected to the first top outlet water channel 904, the second top outlet water channel 1004 and the bottom outlet water channel 1005, is equipped with an ultrapure water particle counter on its surface. Combined with the data of particle resistance connection table 28, the particle density of the purified terminal ultrafiltration inlet and outlet water is analyzed to confirm whether the removal rate of the filter membrane meets the standard.Furthermore, the test concentrate pipeline assembly 602, the test product water pipeline assembly 603, the test pure water return pipe 33, and the test raw water return pipe 34 are connected, and the instrument intelligently controls the test output water of different water qualities through valves. Example

[0046] Based on Example 2, the solution in Example 2 will be further described in detail below with reference to the specific working method, such as... Figures 1 to 8 As shown below, see details:

[0047] Before the ultrafiltration membrane is formally cleaned, the terminal ultrafiltration membrane test module 6 must be tested first.

[0048] The particle density of the influent and effluent of the test module 6 was detected using an AnatelUP100 ultrapure water particle counter installed on the particle resistance connection meter 28 and the test product water pipeline assembly 603. The product water particle size and / or removal rate were normal: that is, when the influent (≥0.1μm) particles were less than 100 / ml, the ultrafiltration membrane of the tested terminal could reach less than 10 (≥0.1μm) particles / ml after 120 minutes of operation, or the removal rate of (≥0.1μm) particles under other test conditions reached more than 99%, which means that there were no broken fibers or membrane penetration in the membrane before cleaning, and it is a washable membrane.

[0049] After testing, the terminal ultrafiltration membrane will be cleaned on cleaning module 5. Cleaning methods typically include pure water backwashing, pure water forward washing, chemical backwashing, chemical forward washing, gas backwashing, gas forward washing, and vibration cleaning. The specific method will be selected based on the actual condition of the membrane to be cleaned, and will be performed in a predetermined order (not sequentially). Details of each method are as follows:

[0050] (1) Pure water backwashing: This refers to ultrapure water passing through the membrane from the product water side of the membrane to be washed into the inlet and concentrate outlet. Since the specific inlet and concentrate outlets of different filter membranes vary, the location of the inlet or concentrate outlet needs to be determined according to the actual structure of the membrane to be washed. The water flow direction is opposite to that during production, hence the name backwashing. To prevent backwash water from carrying in contaminants that accumulate on the product water side and subsequently release particles, bacteria, and TOC, which affect the normal product water quality of ultrafiltration, qualified ultrapure water (such as water that has been treated to meet standards by water quality control module 2 and particle control module 3) must be used as the backwash water source.

[0051] (2) Pure water forward wash: This refers to the process where ultrapure water enters through the inlet of the membrane to be washed. Since the specific inlet of the filter membrane varies depending on the product, the location of the inlet needs to be determined based on the actual structure of the membrane to be washed. The water flow direction is exactly the same as during production. The forward wash process is generally used to remove residual trace particles or chemicals after the backwashing process, as well as for the final testing process of membrane cleaning.

[0052] (3) Chemical backwashing: This refers to the process where chemicals permeate through the membrane from the permeate side to the inlet and concentrate outlet. The choice of chemicals depends on the fouling and contaminant levels. Chemical backwashing is preferred when fouling can be removed by other methods. Different chemicals are selected for cleaning different types of fouling contaminants. For example, water with high microbial activity can be backwashed by soaking with oxidizing chemicals; water with high organic content can be backwashed by soaking with alkaline or surfactant chemicals. The selected chemicals should be of high purity, low particle size, and have excellent tolerance to the membrane fiber material. In addition, to prevent contaminants introduced by the chemicals from accumulating on the permeate side and subsequently releasing particles, bacteria, and TOC, which affect the normal permeate water quality of ultrafiltration, it is necessary to ensure that the prepared chemicals meet the same level as the UF permeate water in terms of parameters other than the required chemical properties, such as particle size, bacteria, and TOC, before they can be used as a backwashing chemical source.

[0053] (4) Chemical backwashing: This refers to the chemical agent passing through the membrane from the inlet side of the membrane to be cleaned into the product water outlet, with some not passing through the membrane and being discharged from the concentrate outlet. The direction of the chemical agent flow is completely consistent with that during production. Different chemicals are selected for cleaning different types of fouling contaminants. For example, water with strong microbial activity can be backwashed by chlorination; water with high organic matter content can be backwashed by alkali or surfactant. The chemical agent selected should be of high purity, low particle size, and have excellent tolerance to the membrane fiber material.

[0054] (5) Gas backwashing: This refers to the process where gas enters from the permeate side of the membrane to be washed and exits through the inlet or concentrate outlet. The gas flow direction is opposite to the permeate flow direction during production, hence the name backwashing. To prevent backwashing gas from carrying in contaminants that can be intercepted by ultrafiltration and accumulating on the permeate side, which would then continuously release particles, bacteria, and TOC, affecting the normal permeate quality of ultrafiltration; and because ultrafiltration membrane fibers become very brittle and easily break when dehydrated, qualified gas must be used as the gas source. Qualified gas sources must meet the following conditions: 1. The gas source must use relatively inert gases such as nitrogen or argon, which do not oxidize the membrane; 2. The gas must be filtered through a precision filter to ensure that the particles (≥0.1μm) carried after compression are less than 10 per ml; 3. The gas humidity must be fully humidified by the UF permeate water to reach saturation, to prevent the gas from carrying away moisture from the UF membrane during the cleaning process, causing the UF membrane to dry and become brittle.

[0055] (6) Gas forward washing: This refers to gas entering the membrane from the feed water side and exiting through the permeate outlet. Some gas exits through the concentrate outlet without passing through the membrane. The gas flow direction is the same as the permeate flow direction during production, hence the name forward washing. Ultrafiltration membrane fibers become very brittle and easily break when dehydrated, so a qualified gas must be used as the gas source. A qualified gas source must meet the following conditions: 1. The gas source must use a relatively inert gas such as nitrogen or argon, which does not oxidize the membrane; 2. The gas humidity must be fully humidified by the UF permeate water to reach saturation, to prevent the gas from carrying away moisture from the UF membrane during the gas washing process, causing the UF membrane to dry and crack.

[0056] (7) Vibration cleaning: This refers to the method of cleaning contaminants adhering to the membrane surface using mechanical or ultrasonic vibration when the membrane is in a static or non-fluid environment. The vibration source is concentrated on the feed water side and the concentrate side to remove contaminants accumulated on these two sides of the membrane. The selected mechanical / ultrasonic vibration must meet the following conditions: 1. The frequency must not be the same as or resonate with the fundamental frequency of all membrane materials; 2. The energy density must be within the mechanical deformation range of all membrane materials.

[0057] In the actual cleaning of a customer's severely fouled terminal ultrafiltration membrane, model NTU-3306-K6R from Nitto:

[0058] Before cleaning, test module 6 controls the pressure gauge reading of the pressure gauge assembly 806 with valve at the lower side to be 6.0 kg / cm². 2 Furthermore, the concentrate outlet flow rate is controlled at 0.6 m³ / s. 3 At / h, the pressure gauge reading of the pressure gauge assembly 811 with valve on the upper side was measured to be 0 kg / cm. 2 The inlet flow rate was measured to be 8.2 m³ / s. 3 / h, product water pressure differential is 6.0 kg / cm 2 The particle density of the inlet and outlet water of test module 6 was detected using an Anatel UP100 ultrapure water particle counter. The inlet (≥0.1μm) had approximately 58 particles / ml, and the product water (≥0.1μm) had 1.5 particles / ml (<10 particles / ml), indicating that the membrane is washable.

[0059] The cleaning process is performed in the following order and duration as a complete cleaning cycle. The membrane is cleaned on cleaning module 5, and then transferred to testing module 6 for testing and rinsing. After the membrane cleaning module completes the following 5 cleaning steps, it is considered a complete cleaning cycle and then tested:

[0060] 1. Rinse with pure water for 2 hours; 2. Rinse with medication for 8 hours; 3. Rinse with pure water for 8 hours; 4. Rinse with medication for 2 hours; 5. Rinse with pure water for 4 hours;

[0061] After the first cleaning cycle, the pressure gauge reading of the pressure gauge assembly 806 with valve at the lower side is controlled at 6.0 kg / cm². 2 And the inlet flow rate is 12m³ / h 3 / h and the concentrate outlet flow rate is controlled at 0.6m³ / h. 3 At a rate of / h, the pressure gauge reading at the product outlet was measured to be 3.2 kg / cm². 2 The pressure differential of the permeate water was calculated to drop to 2.8 kg / cm² after the first cleaning cycle. 2 .

[0062] Repeat the above cleaning cycle. After the second cleaning cycle, control the pressure gauge reading of the pressure gauge assembly 806 with valve at the lower side to 6.0 kg / cm². 2 Furthermore, the inlet flow rate is 12 m³ / h, and the concentrate flow rate is controlled at 0.6 m³ / h. 3 At a rate of / h, the pressure gauge reading at the permeate outlet was measured to be 4 kg / cm², and the calculated pressure differential after the second cleaning cycle was reduced to 2 kg / cm². 2 .

[0063] Repeat the above cleaning cycle. After the third cleaning cycle, control the pressure gauge reading of the pressure gauge assembly 806 with valve at the lower side to 6.0 kg / cm². 2 Furthermore, the inlet flow rate is 12 m³ / h, and the concentrate flow rate is controlled at 0.6 m³ / h. 3 At a time of / h, the pressure gauge reading of the pressure gauge assembly 811 with valve on the upper side was measured to be 4.4 kg / cm². 2 The calculated pressure differential of the permeate water decreased to 1.6 kg / cm² after the third cleaning cycle. 2 The particle density of the inlet and outlet water of test module 6 was detected using an Anatel UP100 ultrapure water particle counter. The particle density at the inlet (≥0.1μm) was 65 particles / ml, and the particle density at the outlet (≥0.1μm) was 0.9 particles / ml.

[0064] After three cleaning cycles, the terminal ultrafiltration membrane has recovered to a state with a low pressure differential, capable of normal water production and meeting particle removal standards. A comparison of particle removal before and after cleaning using an Anatel UP100 ultrapure water particle counter showed that the entire cleaning process did not negatively impact the terminal ultrafiltration membrane's microparticle removal capacity or water quality; it only reduced the water production pressure differential and improved the membrane's water production capacity, effectively achieving the cleaning objectives.

[0065] The membrane to be cleaned, the terminal ultrafiltration membrane, and the terminal ultrafiltration membrane specifically referred to as Nitto model NTU-3306-K6R described in this example are the Type I membrane to be cleaned 701 in this application.

[0066] The working process of this application is as follows: First, the ultrapure water inlet pipe 11 and the ultrapure water return pipe 12 transport ultrapure water to the nitrogen-sealed water tank 14. The nitrogen delivery end 15 and the breathing end 16 set on the nitrogen-sealed water tank 14 can reduce the dissolution of oxygen and carbon dioxide in the ultrapure water by adopting a nitrogen protection mechanism. This reduces the generation of microorganisms in the ultrapure water in the nitrogen-sealed water tank 14 and avoids the degradation of ultrapure water quality caused by the dissolution of oxygen and carbon dioxide in the air. The breathing end 16 set on the nitrogen-sealed water tank 14 balances the pressure in the nitrogen-sealed water tank 14 to ensure that the ultrapure water in the nitrogen-sealed water tank 14 is in a stable state during the transportation of ultrapure water. The first resistivity meter 17 installed on the surface of the nitrogen-sealed water tank 14 is used to detect the water quality of the ultrapure water in the nitrogen-sealed water tank 14 to ensure that the lower water outlet pipe 18 can stably transport qualified ultrapure water.

[0067] The water quality control module 2 is configured to construct a dual polishing mixed bed purification structure. The first pump unit 19 and the second pump unit 20 are connected in parallel to the water outlet channel to achieve one standby and one use. Since the primary polishing mixed bed 21 and the secondary polishing mixed bed 22 are connected in series, the synergistic effect of the anion and cation exchange resins in the polishing mixed bed can deeply remove ionic impurities in the water, thereby reducing the fine impurities mixed in the ultrapure water during transportation. Then, the second resistivity meter 2301 installed on the surface of the secondary purification transportation pipeline 23 monitors the water resistivity of the ultrapure water in real time during the transportation process of the secondary purification transportation pipeline 23. When the value is lower than the set threshold, an alarm can be triggered and the operating parameters of the mixed bed can be automatically adjusted to ensure that the resistivity of the ultrapure water is stable and meets the required purification effect.

[0068] The particle control module 3 further purifies the ultrapure water purified by the water quality control module 2. The first precision filter 24, through the inlet connection channel 2401, the sewage discharge channel 2402, and the outlet connection channel 2403, achieves the initial interception and directional discharge of fine particulate pollutants in the ultrapure water. It can perform secondary treatment on the fine particles attached to the ultrapure water during the flow process. Then, the upper and lower symmetrical connection port design of the Type II terminal ultrafiltration membrane 25, together with the side connection port of the Type I terminal ultrafiltration membrane 26, forms a purification channel through the third purification delivery pipe 27 to adapt to the filter membranes on the market for easy use. In addition, the particle resistance meter 28 on the surface of the pipe detects the particle concentration in the water in real time. When the number of particles exceeds the standard, the backwashing program is automatically started to ensure that the particle content of the effluent reaches the standard for cleaning the filter membrane.

[0069] The reagent supply module 4 uses a reagent tank 401 to store concentrated reagents and connects to a reagent mixing tank 402 via a pipeline to achieve quantitative dilution of the reagents. The top of the reagent mixing tank 402 is equipped with a purified water guide pipe 403 connected to the third purification delivery pipeline 27. The purified water guide pipe 403 can introduce ultrapure water from the third purification delivery pipeline 27 and mix it thoroughly with the reagents in the reagent mixing tank 402. The bottom of the reagent mixing pipe is connected to a finished drug delivery pipe 404. The finished drug delivery pipe 404 is equipped with a flow sensor and an electric regulating valve to dynamically adjust the concentration of the delivered reagents based on water quality monitoring data to ensure that the amount of reagents used in the filter membrane cleaning process is in line with the cleaning requirements of the filter membrane.

[0070] Cleaning module 5, with the supply of qualified ultrapure water and reagents provided by the above modules, cleans the terminal ultrafiltration membranes of three brands, namely Nitto, Asahi Kasei and Cobot, using two different flow pipeline designs through type I cleaning station 7 or type II cleaning station 8, so that they are restored from the fouled state to a state with low pressure difference and qualified particle removal rate.

[0071] Test module 6, with the supply of qualified ultrapure water and reagents provided by the above modules, uses either type I test station 9 or type II test station 10 to test the membrane to be cleaned to ensure that the membrane to be cleaned meets the cleaning conditions; and tests and runs the cleaned membrane to ensure that the membrane pressure difference and particle removal rate meet the standards after cleaning, and that it can stably produce water.

[0072] The water and reagents generated during the operation of the cleaning module 5 and the testing module 6 are recycled through the cleaning reagent return pipe 29, the ultrapure water return pipe 30, the raw water return pipe 31, the wastewater pipe 32, the pure water return pipe 33, and the raw water return pipe 34, so as to achieve the recycling of ultrapure water and reagents.

[0073] The above describes the working principle of this modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment.

Claims

1. A modular high-purity multi-station terminal ultrafiltration membrane cleaning device, comprising an ultrapure water source storage mechanism (1), a water quality control module (2), a particle control module (3), a reagent supply module (4), a cleaning module (5), and a testing module (6), characterized in that: The ultrapure water storage mechanism (1) is connected to a water quality control module (2) on its side. A particle control module (3) is provided on the side of the water quality control module (2) away from the ultrapure water storage mechanism (1). A reagent supply module (4), a cleaning module (5), and a testing module (6) are provided on the side of the particle control module (3) away from the water quality control module (2). The testing module (6) includes a test water supply pipeline assembly (601), a test concentrate pipeline assembly (602), a test product water pipeline assembly (603), a test pure water return pipe (33), a test raw water return pipe (34), and a combination of one or more Type I test stations (9) or Type II test stations (10). The cleaning module (5) comprises a cleaning water supply pipeline assembly (501), a cleaning concentrate pipeline assembly (502), a cleaning product water pipeline assembly (503), a cleaning common pipeline assembly (504), a cleaning agent return pipe (29), a cleaning ultrapure water return pipe (30), a cleaning raw water return pipe (31), a cleaning wastewater pipe (32), and a combination of one or more Type I cleaning stations (7) or Type II cleaning stations (8). Position (8) is connected to the cleaning water supply pipeline assembly (501), the cleaning concentrate pipeline assembly (502), the cleaning product water pipeline assembly (503), and the cleaning common pipeline assembly (504) via pipelines. The cleaning concentrate pipeline assembly (502), the cleaning product water pipeline assembly (503), and the cleaning common pipeline assembly (504) are connected to the cleaning agent return pipe (29), the cleaning ultrapure water return pipe (30), the cleaning raw water return pipe (31), and the cleaning wastewater pipe (32).

2. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 1, characterized in that: The Type I test station (9) or Type II test station (10) is connected to the test water supply pipeline assembly (601), the test concentrate pipeline assembly (602), and the test product water pipeline assembly (603) via pipelines. The test concentrate pipeline assembly (602) and the test product water pipeline assembly (603) are connected to the test pure water return pipe (33) and the test raw water return pipe (34). The surface of the pipeline of the cleaning product water pipeline assembly (503) connected to the cleaning ultrapure water return pipe (30) is provided with an ultrapure water resistivity meter and an ultrapure water particle counter, or for connecting the probe sampling port of the corresponding detection equipment. The surface of the pipeline of the test product water pipeline assembly (603) connected to the test pure water return pipe (33) is provided with an ultrapure water resistivity meter and an ultrapure water particle counter or the corresponding equipment probe sampling port.

3. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 1, characterized in that: The Type I cleaning station (7) includes a Type I membrane to be cleaned (701). A first bottom-end pressure gauge assembly (706) with a valve is provided at the bottom end of the Type I membrane to be cleaned (701). A bottom-end direct connection pipe (702) and a bottom-end side connection pipe (704) are connected to the side of the first bottom-end pressure gauge assembly (706) away from the Type I membrane to be cleaned (701). A bottom-end direct connection valve (703) is provided on the outer diameter surface of the bottom-end direct connection pipe (702) connected to the cleaning water supply pipeline assembly (501). A bottom-end side connection valve (705) is provided on the outer diameter surface of the bottom-end side connection pipe (704) connected to the cleaning product water pipeline assembly (503). A side-side pressure gauge assembly (711) with a valve is provided on the side wall of the Type I membrane to be cleaned (701). The two sets of... The side of the pressure gauge assembly with valve (711) away from the Type I membrane to be cleaned (701) is connected to the side outlet pipe (707) and the side inlet pipe (709) respectively. The side outlet pipe (707) is connected to the outer diameter surface of the cleaning concentrate pipeline assembly (502) and a side outlet valve (708) is provided. The side inlet pipe (709) is connected to the outer diameter surface of the cleaning water supply pipeline assembly (501) and a side inlet valve (710) is provided. The top of the Type I membrane to be cleaned (701) is provided with a first top connecting pipe (712). The first top connecting pipe (712) is connected to the outer diameter surface of the cleaning common pipeline assembly (504) and a first top valve (713) and a first top valve pressure gauge assembly (714) are provided. The type II cleaning station (8) includes a type II membrane to be cleaned (801). A side-lower end pressure gauge assembly (806) with a valve is provided at the lower end of the side wall of the type II membrane to be cleaned (801). The side-lower end pressure gauge assembly (806) with a valve is connected to a side-lower end direct connection pipe (802) and a side-lower end side connection pipe (804) on the side away from the type II membrane to be cleaned (801). The side-lower end direct connection pipe (802) is connected to the outer diameter of the cleaning water supply pipeline assembly (501). A side-lower end direct-connection valve (803) is provided on the surface. The side-lower end side-connection pipe (804) is connected to the cleaning water pipeline assembly (503). A side-lower end side-connection valve (805) is provided on the outer diameter surface of the side-lower end side-connection pipe (804). A side-upper end pressure gauge assembly (811) with a valve is provided on the upper side of the side wall of the Type II membrane to be cleaned (801). The two sets of side-upper end pressure gauge assemblies (811) with valves are respectively connected to the side-upper end outlet pipe (805) on the side away from the Type II membrane to be cleaned (801). 7) On the side upper water inlet pipe (809), the side upper water outlet pipe (807) is connected to the outer diameter surface of the cleaning concentrate pipeline assembly (502) and a side upper water outlet valve (808) is provided. The side upper water inlet pipe (809) is connected to the outer diameter surface of the cleaning water supply pipeline assembly (501) and a side upper water inlet valve (810) is provided. The top end of the type II membrane to be cleaned (801) is provided with a second top connecting pipe (812). The second top connecting pipe (812) is connected to the outer diameter surface of the cleaning common pipeline assembly (504) and a second top valve (813) and a second top valve pressure gauge assembly (814) are provided. The bottom end of the type II membrane to be cleaned (801) is provided with a bottom connecting pipe (815). The bottom connecting pipe (815) is connected to the outer diameter surface of the cleaning common pipeline assembly (504) and a bottom valve (816) and a second bottom valve pressure gauge assembly (817) are provided.

4. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 1, characterized in that: The particle control module (3) includes a first precision filter (24), an inlet connection channel (2401), a drain channel (2402), and an outlet connection channel (2403). The inlet connection channel (2401) is provided at the edge of the first precision filter (24), and the outlet connection channel (2403) is provided on the side of the first precision filter (24) away from the inlet connection channel (2401). The drain channel (2402) is installed at the bottom of the first precision filter (24).

5. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 4, characterized in that: The particle control module (3) also includes one or more parallel Type I terminal ultrafiltration membranes (26), one or more parallel Type II terminal ultrafiltration membranes (25), a third purification delivery pipeline (27), and a particle resistance connection meter (28). A Type II terminal ultrafiltration membrane (25) is provided on the side of the first precision filter (24) away from the inlet connection channel (2401). The Type II terminal ultrafiltration membrane (25) has first connection ports symmetrically arranged on its sides, and second connection ports are provided at both the top and bottom ends of the Type II terminal ultrafiltration membrane (25). A type I terminal ultrafiltration membrane (26) is provided on the side of the membrane (25) away from the first precision filter (24). The side of the type I terminal ultrafiltration membrane (26) is provided with an independent third connection port, and the upper and lower ends of the type I terminal ultrafiltration membrane (26) are provided with third connection ports. The first connection port and the third connection port of the type II terminal ultrafiltration membrane (25) and the type I terminal ultrafiltration membrane (26) are connected to a third purification delivery pipe (27) for purifying ultrapure water. A particle resistance meter (28) is installed on the outer diameter surface of the third purification delivery pipe (27).

6. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 1, characterized in that: The ultrapure water storage mechanism (1) includes an ultrapure water inlet pipe (11), an ultrapure water return pipe (12), an ultrapure water near-end return pipe (1201), an ultrapure water far-end return pipe (1202), a return control valve (13), and a nitrogen-sealed water tank (14). The ultrapure water inlet pipe (11) is provided with an ultrapure water return pipe (12) on its side. The output ends of the ultrapure water inlet pipe (11) and the ultrapure water return pipe (12) are both equipped with the top of the nitrogen-sealed water tank (14). The nitrogen-sealed water tank (14) is provided with a nitrogen gas delivery end (15) on one side of the ultrapure water inlet pipe (11). The nitrogen gas delivery end (15) is provided with a breathing end (16) on the side away from the ultrapure water inlet pipe (11). The ultrapure water far-end return pipe (1202) is connected to the cleaning ultrapure water return pipe (30) and the test pure water return pipe (33).

7. A modular high-purity multi-station terminal ultrafiltration membrane cleaning device according to claim 6, characterized in that: The ultrapure water storage mechanism (1) also includes a first resistivity meter (17) and an outlet pipe (18). The first resistivity meter (17) is installed on the outlet pipe of the nitrogen-sealed water tank (14). The delivery end of the ultrapure water return pipe (12) is connected to a return control valve (13). The other two connection ports of the return control valve (13) are respectively connected to an ultrapure water near-end return pipe (1201) and an ultrapure water far-end return pipe (1202).

8. The modular high-purity multi-station terminal ultrafiltration membrane cleaning equipment according to claim 1, characterized in that: The water quality control module (2) includes a first pump unit (19), a second pump unit (20) is provided on the side of the first pump unit (19), the inlet and outlet of the first pump unit (19) and the second pump unit (20) are connected in parallel, and the outlet of the first pump unit (19) is connected to a primary polishing mixed bed (21), a secondary polishing mixed bed (22) is provided on the side of the primary polishing mixed bed (21), the primary polishing mixed bed (21) and the secondary polishing mixed bed (22) are connected by a pipeline to realize the flow of ultrapure water, the bottom end of the secondary polishing mixed bed (22) is connected to a secondary purification conveying pipeline (23), and a second resistivity meter (2301) is provided on the outer surface of the secondary purification conveying pipeline (23).

9. A modular high-purity multi-station terminal ultrafiltration membrane cleaning device according to claim 1, characterized in that: The drug supply module (4) includes a drug tank (401), and a drug preparation tank (402) is connected to the side of the drug tank (401) via a pipe. The top of the drug preparation tank (402) is provided with a purified water guide pipe (403) connected to the third purification delivery pipe (27) and a drug return pipe (405) connected to the cleaning agent return pipe (29). The bottom of the drug preparation tank (402) is connected to a finished drug delivery pipe (404).

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