Smelting equipment and preparation method of copper sputtering target material

Abstract

The invention relates to the technical field of smelting devices, and provides smelting equipment of a copper sputtering target material and a preparation method of the smelting equipment. Vacuum smelting and linkage pouring integrated design is adopted, specifically, a supporting plate is driven to ascend and descend through an electric hydraulic device, and synchronous linkage is completed; a channel (a top pipe and a bottom pipe) between the smelting furnace and the ingot mould box is broken through; according to the transmission mechanism, a supporting plate ascends to drive a transmission toothed plate to be meshed with a gear, and the smelting barrel is forced to overturn anticlockwise to pour molten copper liquid. The molten copper liquid is directly injected into a sand box in a vacuum environment, and oxide inclusion caused by air contact is avoided; smelting, pouring and sealing actions are completed in a linkage mode, and the production period is shortened compared with a traditional process of smelting, transferring, ingot casting and machining; manual operation is replaced by mechanical linkage, pollution is avoided, and the risk that high-temperature molten copper splashes and scalds is eradicated.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of smelting devices, in particular to a copper sputtering target material smelting device and a preparation method thereof. BACKGROUND

[0002] The copper sputtering target material is a core material in the physical vapor deposition (PVD) technology and is mainly used in the vacuum coating process. The essence is that high-purity copper (usually purity ≥ 99.99%) is processed into a specific shape (such as a sheet or a pipe) metal blank through processes such as smelting, forging, and rolling. The purity and microstructure directly affect the coating quality of high-end electronic products such as semiconductor chips and display devices. The mainstream technology for industrialized preparation of high-purity copper target material currently mainly includes vacuum induction smelting, powder metallurgy, and multi-pass forging and rolling processes, but still has the following significant defects: multi-process separation leads to low efficiency and oxidation risk: the process is fragmented, and the traditional process needs to independently complete smelting and ingot transfer, which is more troublesome and inconvenient, reducing work efficiency. Since the ingot needs to be taken out after smelting, it is transported to the mold for pouring, which exposes the air during this process, leading to oxidation inclusions, which is easy to cause pollution and has the risk of sputtering burns.

[0003] In view of this, the present application provides a copper sputtering target material smelting device and a preparation method thereof. SUMMARY

[0004] The present application provides a copper sputtering target material smelting device and a preparation method thereof, which solves the problem of low efficiency and oxidation risk caused by multi-process separation in the copper sputtering target material smelting process in the related art.

[0005] The technical solution of the present application is as follows: a copper sputtering target material smelting device, comprising: a bracket and a vacuum assembly installed on the upper side of the bracket, further comprising: a smelting mechanism arranged on one side of the bracket; an ingot mold mechanism arranged below the smelting mechanism; a sealing mechanism arranged between the smelting mechanism and the ingot mold mechanism for opening and closing between the smelting mechanism and the ingot mold mechanism; a support frame arranged on the lower side of the ingot mold mechanism for supporting the ingot mold mechanism; an electric hydraulic device fixedly installed at the bottom of the support frame, and a hydraulic rod on the electric hydraulic device slidingly extends to the inside of the ingot mold mechanism; a transmission mechanism arranged between the smelting mechanism and the ingot mold mechanism; a linkage mechanism arranged between the sealing mechanism and the ingot mold mechanism; The ingot mold mechanism comprises an ingot mold box and a containing part arranged inside the ingot mold box, and the containing part can be lifted inside the ingot mold box by the electric hydraulic device. During the process of the holding component moving up and down inside the ingot mold box, the closing mechanism can be driven by the linkage mechanism. The smelting mechanism includes a smelting furnace and a smelting component disposed inside the smelting furnace. During the process of the holding component moving up and down inside the ingot mold box, the smelting component can be flipped by the transmission mechanism.

[0006] Preferably, the smelting component includes a hollow rotating cylinder that rotatably penetrates the outer wall of the smelting furnace. A right-angled piece is fixedly connected to one end of the hollow rotating cylinder located inside the smelting furnace. A smelting cylinder for holding the material to be molten is fixedly installed at the bottom of the right-angled piece. A heating tube is wound around the outside of the smelting cylinder.

[0007] Preferably, the container includes a support plate fixed to the top of the hydraulic rod of the electro-hydraulic device, and a sand box is placed on the upper side of the support plate.

[0008] Preferably, the transmission mechanism includes a cylinder and a transmission gear fixedly sleeved on the outer wall of the hollow rotating cylinder. The cylinder slides through the bottom of the melting furnace and the top of the ingot mold box. A transmission gear plate that cooperates with the transmission gear is fixedly connected to the upper side of the cylinder. A connecting rod is fixedly connected to the bottom end of the cylinder. The top end of the connecting rod is fixedly connected to the bottom of the support plate.

[0009] Preferably, the sealing mechanism includes a top pipe fixedly connected to the bottom of the smelting furnace and a bottom pipe fixedly connected to the top of the ingot mold box, the central axes of the top pipe and the bottom pipe coincide, and the top pipe is eccentrically positioned at the bottom of the smelting furnace.

[0010] Preferably, the sealing mechanism further includes a sealing frame fixedly connected between the top pipe and the bottom pipe, and a sealing plate is slidably sleeved in the inner cavity of the sealing frame. The upper and lower end faces of the sealing plate are respectively in contact with the lower end wall of the top pipe and the upper end wall of the bottom pipe.

[0011] Preferably, the sealing mechanism further includes two limiting rods symmetrically fixed to the inner sidewall of the sealing frame. The limiting rods slide to the inner side of the sealing plate, and a return spring is sleeved on the outer side of the limiting rod. The two ends of the return spring are respectively connected to the inner sidewall of the sealing frame and the end of the sealing plate.

[0012] Preferably, the linkage mechanism includes a support rod fixed to the side wall of the ingot mold box, one end of the support rod is rotatably connected to a first positioning wheel, the inner side of the ingot mold box is rotatably connected to a second positioning wheel via a shaft, a traction rope is connected between the sealing plate and the support plate, the traction rope is sleeved on the inner side of the first positioning wheel and the second positioning wheel, and the traction rope slides through the outer wall of the ingot mold box.

[0013] Preferably, the upper port of the smelting furnace is provided with a cover for sealing the upper port of the smelting furnace; The vacuum assembly includes a vacuum pump fixedly installed on the top of the bracket. The suction end of the vacuum pump is fixedly connected to a first pipe. The outer wall of the first pipe is fixedly connected to a second pipe. The second pipe and the first pipe are respectively fixedly connected to the smelting furnace and the ingot mold box. On-off valves for controlling the on-off state are provided on both the second pipe and the first pipe.

[0014] A method for preparing a copper sputtering target by melting includes the following steps: Step 1: First, close the on / off valve on the first pipe and open the on / off valve on the second pipe, start the vacuum pump, and evacuate the inside of the melting furnace through the second pipe. Step 2: Connect the external power supply and start the heating element to heat the melting cylinder and melt the raw materials inside the melting cylinder. Step 3: After the raw material is melted inside the melting cylinder, the ingot mold mechanism is evacuated through a vacuum pump and the first through pipe to make the vacuum level inside the ingot mold mechanism similar to that inside the melting mechanism. Step 4: Start the electric hydraulic actuator. The electric hydraulic actuator uses its hydraulic rod to push the pallet upward, so that the pallet pushes the sand box upward and places the sand box at the jacking pipe port. Step 5: In step 4, when the sand box moves upward, the linkage mechanism can drive the sealing mechanism, causing the sealing plate to move to the left, thus connecting the top pipe and the bottom pipe. Step Six: In Step Four, as the sand box moves upward in the channel formed by the top and bottom pipes, the carrying components can be flipped by the transmission mechanism, so that the molten material inside the melting cylinder can be poured into the inside of the sand box for collection.

[0015] The working principle and beneficial effects of this invention are as follows: This application adopts an integrated design of vacuum melting and linked casting: the pallet is driven to rise and fall by an electric hydraulic device to complete synchronous linkage; the sealing mechanism: the traction rope pulls the sealing plate to the left, opening the channel (top pipe and bottom pipe) between the melting furnace and the ingot mold box; the transmission mechanism: the pallet rises and drives the transmission gear plate to mesh with the gear, forcing the melting cylinder to turn counterclockwise and pour out the molten copper; achieving zero-contamination transfer: the molten copper is directly injected into the sand box in a vacuum environment, avoiding oxidation inclusions caused by air contact; improving work efficiency: the melting, casting and sealing actions are completed in linkage, shortening the production cycle compared to the traditional "melting → transfer → ingot casting → machining" process; improving yield and safety: mechanical linkage replaces manual operation, avoiding contamination and eliminating the risk of burns from hot copper splashes. Attached Figure Description

[0016] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0017] Figure 1 This is a three-dimensional structural diagram of a copper sputtering target melting equipment proposed in this invention; Figure 2 This is a cross-sectional structural schematic diagram of a copper sputtering target melting equipment proposed in this invention; Figure 3 This is a schematic diagram of the linkage mechanism structure proposed in this invention; Figure 4 This is a schematic diagram of the tilted state of the melting cylinder proposed in this invention; Figure 5 This is a schematic diagram of the inner assembly structure of the smelting furnace proposed in this invention; Figure 6 for Figure 5 Enlarged structural diagram at point A in the middle; In the picture: 1. Melting mechanism; 11. Melting furnace; 12. Cover; 13. Hollow rotary drum; 14. Melting cylinder; 15. Heating tube; 16. Right-angle component; 2. Ingot mold mechanism; 21. Ingot mold box; 22. Sand box; 23. Pallet; 3. Linkage mechanism; 31. First positioning wheel; 32. Second positioning wheel; 33. Support rod; 34. Traction rope; 4. Support frame; 5. Electro-hydraulic actuator; 6. Vacuum assembly; 61. Vacuum pump; 62. First connecting pipe; 63. Second connecting pipe; 7. Bracket; 8. Sealing mechanism; 81. Sealing plate; 82. Sealing frame; 83. Top pipe; 84. Bottom pipe; 85. Limiting rod; 86. Return spring; 9. Transmission mechanism; 91. Transmission gear; 92. Transmission gear plate; 93. Cylinder; 94. Connecting rod. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention. Example 1

[0019] Please see Figure 1 , Figure 2 , Figure 4 , Figure 5 as well as Figure 6A copper sputtering target smelting apparatus and its preparation method are disclosed, comprising: a bracket 7 and a vacuum assembly 6 mounted on the upper side of the bracket 7; a smelting mechanism 1 disposed on one side of the bracket 7; an ingot mold mechanism 2 disposed below the smelting mechanism 1; a sealing mechanism 8 disposed between the smelting mechanism 1 and the ingot mold mechanism 2 for connecting and disconnecting the smelting mechanism 1 and the ingot mold mechanism 2; a support frame 4 disposed below the ingot mold mechanism 2 for supporting the ingot mold mechanism 2; an electro-hydraulic actuator 5 fixedly mounted on the bottom of the support frame 4, with the hydraulic rod on the electro-hydraulic actuator 5 slidingly extending to the inner side of the ingot mold mechanism 2; and a transmission mechanism 9 disposed between the smelting mechanism 1 and the ingot mold mechanism 2. A cover 12 is disposed at the upper port of the smelting furnace 11 for sealing the upper port of the smelting furnace 11. Vacuum assembly 6 includes a vacuum pump 61 fixedly installed on the top of bracket 7. The suction end of vacuum pump 61 is fixedly connected to a first pipe 62. The outer wall of the first pipe 62 is fixedly connected to a second pipe 63. The second pipe 63 and the first pipe 62 are respectively fixedly connected to the melting furnace 11 and the ingot mold box 21. On-off valves for controlling the on-off state are provided on both the second pipe 63 and the first pipe 62.

[0020] Furthermore, the ingot mold mechanism 2 includes an ingot mold box 21 and a container disposed inside the ingot mold box 21. The container can be raised and lowered inside the ingot mold box 21 by an electric hydraulic device 5. The smelting mechanism 1 includes a smelting furnace 11 and a smelting component disposed inside the smelting furnace 11. During the process of the container being raised and lowered inside the ingot mold box 21, the smelting component can be flipped by a transmission mechanism 9.

[0021] Specifically, the smelting component includes a hollow rotating cylinder 13 that rotates through the outer wall of the smelting furnace 11. A right-angled piece 16 is fixedly connected to one end of the hollow rotating cylinder 13 located inside the smelting furnace 11. A smelting cylinder 14 for holding the material to be molten is fixedly installed at the bottom of the right-angled piece 16. A heating tube 15 is wound around the outside of the smelting cylinder 14.

[0022] Specifically, the container includes a support plate 23 fixed to the top of the hydraulic rod of the electro-hydraulic unit 5, and a sand box 22 is placed on the upper side of the support plate 23.

[0023] Specifically, the transmission mechanism 9 includes a cylinder 93 and a transmission gear 91 fixedly sleeved on the outer wall of the hollow rotating cylinder 13. The cylinder 93 slides through the bottom of the melting furnace 11 and the top of the ingot mold box 21. A transmission gear plate 92 that cooperates with the transmission gear 91 is fixedly connected to the upper side of the cylinder 93. A connecting rod 94 is fixedly connected to the bottom end of the cylinder 93. The top end of the connecting rod 94 is fixedly connected to the bottom of the support plate 23.

[0024] Specifically, the sealing mechanism 8 includes a top pipe 83 fixedly connected to the bottom of the melting furnace 11 and a bottom pipe 84 fixedly connected to the top of the ingot mold box 21. The central axes of the top pipe 83 and the bottom pipe 84 coincide, and the top pipe 83 is eccentrically positioned at the bottom of the melting furnace 11. The sealing mechanism 8 also includes a sealing frame 82 fixedly connected between the top pipe 83 and the bottom pipe 84. A sealing plate 81 is slidably fitted inside the sealing frame 82, and the upper and lower end faces of the sealing plate 81 are respectively in contact with the lower end wall of the top pipe 83 and the upper end wall of the bottom pipe 84. The sealing mechanism 8 also includes two limiting rods 85 symmetrically fixed to the inner side wall of the sealing frame 82. The limiting rods 85 slide to the inner side of the sealing plate 81, and a return spring 86 is fitted on the outer side of the limiting rods 85. The two ends of the return spring 86 are respectively attached to the inner side wall of the sealing frame 82 and the end of the sealing plate 81.

[0025] In this embodiment, the on / off valve on the first pipe 62 is closed and the on / off valve on the second pipe 63 is opened. The vacuum pump 61 is started, and the inside of the melting furnace 11 is evacuated through the second pipe 63. The external power supply is connected, and the heating tube 15 is started to heat the melting cylinder 14, melting the raw materials inside the melting cylinder 14. After the raw materials inside the melting cylinder 14 are melted, the ingot mold mechanism 2 is evacuated through the vacuum pump 61 and the first pipe 62, so that the vacuum degree inside the ingot mold mechanism 2 is similar to that inside the melting mechanism 1. The electric hydraulic device 5 is started, and the electric hydraulic device 5 pushes the support plate 23 upward through its hydraulic rod, so that the support plate 23 pushes the sand box 22 upward, placing the sand box 22 at the port of the top pipe 83. As the sand box 22 moves upward in the channel formed by the top pipe 83 and the bottom pipe 84, the carrying component can be flipped through the transmission mechanism 9, so that the molten material inside the melting cylinder 14 can be poured into the inside of the sand box 22 for collection. Example 2

[0026] Please see Figures 1-6 A copper sputtering target smelting apparatus and its preparation method are disclosed, comprising all the contents of Example 1, and further comprising a linkage mechanism 3 disposed between the enclosing mechanism 8 and the ingot mold mechanism 2. During the lifting and lowering of the holding component inside the ingot mold box 21, the enclosing mechanism 8 can be driven by the linkage mechanism 3.

[0027] Specifically, the linkage mechanism 3 includes a support rod 33 fixed to the side wall of the ingot mold box 21. One end of the support rod 33 is rotatably connected to a first positioning wheel 31. A second positioning wheel 32 is rotatably connected to the inside of the ingot mold box 21 via a shaft. A traction rope 34 is connected between the sealing plate 81 and the support plate 23. The traction rope 34 is sleeved inside the first positioning wheel 31 and the second positioning wheel 32. The traction rope 34 slides through the outer wall of the ingot mold box 21.

[0028] In this embodiment, when the sand box 22 moves upward, the linkage mechanism 3 can drive the sealing mechanism 8. Specifically, when the pallet 23 moves upward, it pulls the traction rope 34, which pulls the sealing plate 81 to the left, causing the sealing plate 81 to move to the left and the return spring 86 to stretch, thus connecting the top pipe 83 and the bottom pipe 84, allowing the sand box 22 to pass through.

[0029] Working principle and usage procedure: First, close the on / off valve on the first connecting pipe 62 and open the on / off valve on the second connecting pipe 63. Start the vacuum pump 61 to evacuate the inside of the melting furnace 11 through the second connecting pipe 63. Next, connect the external power supply and start the heating tube 15 to heat the melting cylinder 14, thus melting the raw materials inside the melting cylinder 14. The hollow rotating cylinder 13 design facilitates wiring inside the hollow rotating cylinder 13 to power the heating tube 15.

[0030] After the raw materials are melted inside the melting cylinder 14, a vacuum is drawn into the ingot mold mechanism 2 through the vacuum pump 61 and the first through pipe 62, making the vacuum level inside the ingot mold mechanism 2 similar to that inside the melting mechanism 1. Then, the electric hydraulic actuator 5 is activated, and its hydraulic rod pushes the support plate 23 upwards, causing the support plate 23 to push the sand box 22 upwards, placing the sand box 22 at the port of the top pipe 83. As the sand box 22 moves upwards, the linkage mechanism 3 drives the sealing mechanism 8. Specifically, when the support plate 23 moves upwards, it pulls the traction rope 34, which pulls the sealing plate 81 to the left, causing the sealing plate 81 to move to the left and the return spring 86 to stretch, thus connecting the top pipe 83 and the bottom pipe 84, allowing the sand box 22 to pass through. As the sand box 22 moves upward in the channel formed by the top pipe 83 and the bottom pipe 84, the container can be flipped through the transmission mechanism 9. Specifically, the pallet 23 drives the cylinder 93 to move upward through the connecting rod 94. After the cylinder 93 drives the transmission gear plate 92 to move upward a certain distance, it will mesh with the transmission gear 91 and drive the transmission gear 91 to rotate counterclockwise, so that the molten material inside the melting cylinder 14 can be poured into the sand box 22 for collection.

[0031] After the molten material is poured out, the electric hydraulic unit 5 controls the lowering of the pallet 23 via its hydraulic rod, releasing the traction rope 34. At this time, under the action of the return spring 86, the return spring 86 pulls the sealing plate 81 to reset and re-seal the top pipe 83 and the bottom pipe 84. Before the sealing plate 81 completes the sealing of the top pipe 83 and the bottom pipe 84, the pallet 23 drives the sand box 22 to pass through the channel between the top pipe 83 and the bottom pipe 84. Furthermore, the pallet 23 lowers the cylinder 93 via the connecting rod 94, and the cylinder 93 drives the transmission gear plate 92 to lower. The transmission gear plate 92 rotates the transmission gear 91 clockwise, causing the hollow rotating drum 13 to drive the right-angle piece 16 to rotate clockwise, thus re-aligning the melting cylinder 14.

[0032] It is worth noting that the circuits, electronic components, and modules involved in this invention are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this invention does not involve improvements to the software and methods.

[0033] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A melting apparatus for copper sputtering targets, comprising: The bracket (7) and the vacuum assembly (6) mounted on the upper side of the bracket (7) are characterized in that they further include: A smelting mechanism (1) is disposed on one side of the bracket (7); The ingot mold mechanism (2) is located below the smelting mechanism (1); A closing mechanism (8) is provided between the smelting mechanism (1) and the ingot mold mechanism (2) for switching the connection between the smelting mechanism (1) and the ingot mold mechanism (2); A support frame (4) is provided on the lower side of the ingot mold mechanism (2) to support the ingot mold mechanism (2); An electric hydraulic unit (5) is fixedly installed at the bottom of the support frame (4), and the hydraulic rod on the electric hydraulic unit (5) slides to the inside of the ingot mold mechanism (2); A transmission mechanism (9) is disposed between the melting mechanism (1) and the ingot mold mechanism (2); The linkage mechanism (3) is located between the closing mechanism (8) and the ingot mold mechanism (2); The ingot mold mechanism (2) includes an ingot mold box (21) and a container disposed inside the ingot mold box (21). The container can be raised and lowered inside the ingot mold box (21) by the electric hydraulic device (5). During the process of the holding component moving up and down inside the ingot mold box (21), the closing mechanism (8) can be driven by the linkage mechanism (3); The smelting mechanism (1) includes a smelting furnace (11) and a smelting component disposed inside the smelting furnace (11). During the process of the holding component moving up and down inside the ingot mold box (21), the smelting component can be flipped by the transmission mechanism (9).

2. The copper sputtering target smelting equipment according to claim 1, characterized in that, The smelting component includes a hollow rotating cylinder (13) that rotatably penetrates the outer wall of the smelting furnace (11). A right-angle piece (16) is fixedly connected to one end of the hollow rotating cylinder (13) located inside the smelting furnace (11). A smelting cylinder (14) for holding the material to be molten is fixedly installed at the bottom of the right-angle piece (16). A heating tube (15) is wound around the outside of the smelting cylinder (14).

3. The copper sputtering target smelting equipment according to claim 2, characterized in that, The container includes a support plate (23) fixed to the top of the hydraulic rod of the electro-hydraulic unit (5), and a sand box (22) is placed on the upper side of the support plate (23).

4. The copper sputtering target smelting equipment according to claim 3, characterized in that, The transmission mechanism (9) includes a cylinder (93) and a transmission gear (91) fixedly sleeved on the outer wall of the hollow rotating cylinder (13). The cylinder (93) slides through the bottom of the melting furnace (11) and the top of the ingot mold box (21). A transmission gear plate (92) that cooperates with the transmission gear (91) is fixedly connected to the upper side of the cylinder (93). A connecting rod (94) is fixedly connected to the bottom end of the cylinder (93). The top end of the connecting rod (94) is fixedly connected to the bottom of the support plate (23).

5. The copper sputtering target smelting equipment according to claim 4, characterized in that, The closing mechanism (8) includes a top pipe (83) fixedly connected to the bottom of the smelting furnace (11) and a bottom pipe (84) fixedly connected to the top of the ingot mold box (21). The central axes of the top pipe (83) and the bottom pipe (84) coincide, and the top pipe (83) is eccentrically located at the bottom of the smelting furnace (11).

6. The copper sputtering target smelting equipment according to claim 5, characterized in that, The sealing mechanism (8) further includes a sealing frame (82) fixedly connected between the top pipe (83) and the bottom pipe (84). The sealing frame (82) is slidably fitted with a sealing plate (81). The upper and lower end faces of the sealing plate (81) are respectively attached to the lower end wall of the top pipe (83) and the upper end wall of the bottom pipe (84).

7. The copper sputtering target smelting equipment according to claim 6, characterized in that, The closing mechanism (8) also includes two limiting rods (85) symmetrically fixed to the inner side wall of the sealing frame (82). The limiting rods (85) slide to the inner side of the sealing plate (81). A return spring (86) is sleeved on the outer side of the limiting rods (85). The two ends of the return spring (86) are respectively connected to the inner side wall of the sealing frame (82) and the end of the sealing plate (81).

8. The copper sputtering target smelting equipment according to claim 7, characterized in that, The linkage mechanism (3) includes a support rod (33) fixed to the side wall of the ingot mold box (21). One end of the support rod (33) is rotatably connected to a first positioning wheel (31). The inner side of the ingot mold box (21) is rotatably connected to a second positioning wheel (32) via a shaft. A traction rope (34) is connected between the sealing plate (81) and the support plate (23). The traction rope (34) is sleeved on the inner side of the first positioning wheel (31) and the second positioning wheel (32). The traction rope (34) slides through the outer wall of the ingot mold box (21).

9. The copper sputtering target smelting equipment according to claim 1, characterized in that, The upper port of the smelting furnace (11) is provided with a cover (12) for sealing the upper port of the smelting furnace (11); The vacuum assembly (6) includes a vacuum pump (61) fixedly installed on the top of the bracket (7). The vacuum pump (61) has a first pipe (62) fixedly connected to its suction end. The outer wall of the first pipe (62) is fixedly connected to a second pipe (63). The second pipe (63) and the first pipe (62) are fixedly connected to the smelting furnace (11) and the ingot mold box (21) respectively. On the second pipe (63) and the first pipe (62), on / off valves for controlling the on / off state are provided.

10. A method for smelting and preparing a copper sputtering target, using the smelting equipment for a copper sputtering target as described in any one of claims 1-9, characterized in that, Includes the following steps: Step 1: First, close the on / off valve on the first pipe (62) and open the on / off valve on the second pipe (63), start the vacuum pump (61), and evacuate the inside of the melting furnace (11) through the second pipe (63); Step 2: Connect the external power supply and start the heating tube (15). Heat the melting cylinder (14) through the heating tube (15) to melt the raw materials inside the melting cylinder (14). Step 3: After the raw materials are melted inside the melting cylinder (14), the ingot mold mechanism (2) is evacuated by the vacuum pump (61) and the first through pipe (62) so that the vacuum degree inside the ingot mold mechanism (2) is similar to that inside the melting mechanism (1); Step 4: Start the electric hydraulic unit (5). The electric hydraulic unit (5) pushes the pallet (23) upward through its hydraulic rod, so that the pallet (23) pushes the sand box (22) upward and places the sand box (22) at the end of the jacking pipe (83). Step 5: In step 4, when the sand box (22) moves upward, the linkage mechanism (3) can drive the sealing mechanism (8), causing the sealing plate (81) to move to the left, so that the top pipe (83) and the bottom pipe (84) are connected. Step 6: In step 4, when the sand box (22) moves upward in the channel formed by the top pipe (83) and the bottom pipe (84), the container can be flipped by the transmission mechanism (9) so that the molten material inside the melting cylinder (14) can be poured into the inside of the sand box (22) for collection.

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