Remote control method and device for semiconductor production machine, production system and equipment

Abstract

Embodiments of the present application disclose a kind of remote control method and device of semiconductor production machine, production system and equipment, which comprises: real-time receiving the machine alarm code sent by the alarm server of semiconductor production machine;Machine alarm code is parsed, and the alarm type of semiconductor production machine is obtained;Based on the permission mapping relationship table between alarm type and remote control authority, the remote control authority corresponding to the alarm type of semiconductor production machine is determined;When determining the remote control authority corresponding to the alarm type of semiconductor production machine is the type of prohibition remote control, remote control function is set to disable state.The misoperation risk of remote control is reduced in embodiments of the present application, and equipment security and production stability are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a remote control method and device of a semiconductor production machine, a production system and equipment. BACKGROUND

[0002] Recently, the remote control function of the semiconductor production machine plays an important role in improving production efficiency, but the existing technology still has significant defects. When the clean room machine has an abnormality, the system cannot autonomously determine whether the abnormality type is suitable for remote processing, which increases the risk of misoperation of remote control and reduces the safety of equipment and the stability of production. For example, in the scenarios of mechanical arm position deviation or wafer carrying state abnormality, if the operator forcibly controls remotely without confirming the physical state of the equipment, it is easy to cause wafer collision and breakage or damage to the core components of the equipment due to mechanical linkage error. SUMMARY

[0003] In view of the above problems, the purpose of the present application is to provide a remote control method and device of a semiconductor production machine, a production system and equipment, aiming to reduce the risk of misoperation of remote control and improve the safety of equipment and the stability of production.

[0004] According to a first aspect of an embodiment of the present application, a remote control method of a semiconductor production machine is provided, comprising:

[0005] receiving a machine alarm code sent by an alarm server of the semiconductor production machine in real time;

[0006] parsing the machine alarm code to obtain an alarm type of the semiconductor production machine;

[0007] determining a remote control permission corresponding to the alarm type of the semiconductor production machine based on a permission mapping relationship table between the alarm type and the remote control permission;

[0008] when it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is a prohibited remote control type, setting the remote control function to a disabled state.

[0009] Optionally, the remote control method further comprises:

[0010] after receiving the machine alarm code, sending alarm prompt information to a preset maintenance terminal, the alarm prompt information containing an alarm type, an alarm event occurrence timestamp and a machine identifier.

[0011] Optionally, the remote control method further comprises:

[0012] The following information is recorded in the machine alarm code processing log: alarm code receiving timestamp, parsed alarm type, remote control function state change record, alarm release timestamp, and alarm release operator identity.

[0013] Optionally, the remote control method further comprises:

[0014] The disabled state of the remote control function is released under any of the following conditions:

[0015] The alarm server sends an alarm release signal;

[0016] The operator presses a physical release button for releasing alarms set locally on the semiconductor production machine.

[0017] Optionally, the alarm type includes one or more combinations of mechanical arm position abnormality, wafer carrying state abnormality, vacuum environment abnormality, temperature overrun, and gas leakage.

[0018] Optionally, the remote control method further comprises:

[0019] Receiving a permission policy update instruction uploaded by a maintenance terminal;

[0020] Adjusting the corresponding relationship between alarm types and remote control permissions in the permission mapping relationship table according to the permission policy update instruction.

[0021] Optionally, the remote control method further comprises:

[0022] When it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the allow remote control type, the remote control function is kept in the enabled state.

[0023] According to a second aspect of the embodiments of the present application, a remote control device for a semiconductor production machine is provided, comprising:

[0024] An alarm code receiving unit is configured to receive machine alarm codes sent by an alarm server of a semiconductor production machine in real time;

[0025] An alarm type parsing unit is configured to parse the machine alarm codes to obtain the alarm type of the semiconductor production machine;

[0026] A remote control permission determination unit is configured to determine the remote control permission corresponding to the alarm type of the semiconductor production machine based on a permission mapping relationship table between alarm types and remote control permissions;

[0027] A remote control function setting unit is configured to set the remote control function to a disabled state when it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the prohibit remote control type.

[0028] According to a third aspect of the embodiments of the present application, a semiconductor production system is provided, comprising:

[0029] a semiconductor production machine arranged in a clean room;

[0030] an alarm server configured to monitor an abnormality of the semiconductor production machine and generate a machine alarm code;

[0031] a remote control terminal comprising the remote control device and configured to implement the method.

[0032] According to a fourth aspect of the embodiments of the present application, an electronic device is provided, comprising:

[0033] one or more processors;

[0034] a memory configured to store executable instructions, which, when executed by the one or more processors, cause the electronic device to implement the method.

[0035] The unexpected technical effects of the present application are:

[0036] The machine alarm code sent by the alarm server of the semiconductor production machine is received in real time, the machine alarm code is parsed to obtain the alarm type of the semiconductor production machine, the alarm type of the semiconductor production machine is determined based on the permission mapping relationship table between the alarm type and the remote control permission, and when the alarm type of the semiconductor production machine corresponds to the remote control permission of the prohibition remote control type, the remote control function is set to the disabled state. In this way, by establishing a real-time data interaction channel between the remote control terminal and the alarm server of the semiconductor production machine, and cooperating with the dynamic permission determination mechanism based on the alarm code, intelligent start-stop control of the remote operation function of the semiconductor production machine in the clean room under abnormal working conditions is realized, the risk of misoperation of remote control is significantly reduced, the risk of secondary damage to the equipment caused by unknown physical state (such as the position offset of the mechanical arm and the abnormal state of the wafer carrier) is effectively avoided, and through the flexible configuration characteristics of the permission mapping relationship table, the system can adapt to the differentiated management and control requirements of different machine types and process scenes, thereby significantly improving the safety and stability of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0037] The above and other objects, features and advantages of the present application will become more apparent from the following description of embodiments of the present application, taken in conjunction with the accompanying drawings, in which:

[0038] Figure 1 Fig. 1 shows a structural schematic diagram of an exemplary semiconductor production system according to an embodiment of the present application;

[0039] Figure 2 The diagram shown is a schematic flowchart of an exemplary remote control method for a semiconductor manufacturing machine according to an embodiment of this application.

[0040] Figure 3 The diagram shown is a schematic representation of the structure of a remote control device for an exemplary semiconductor manufacturing machine according to an embodiment of this application.

[0041] Figure 4 The diagram shown is a schematic representation of an exemplary electronic device according to an embodiment of this application.

[0042] Explanation of reference numerals in the attached drawings: 100-Semiconductor production system; 110-Semiconductor production machine; 120-Alarm server; 130-Remote control terminal; 140-Maintenance terminal; 300-Remote control device; 310-Alarm code receiving unit; 320-Alarm type parsing unit; 330-Remote control permission determination unit; 340-Remote control function setting unit. Detailed Implementation

[0043] The present application will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale. Furthermore, some well-known parts may not be shown.

[0044] This application may be presented in various forms, some of which will be described below.

[0045] Figure 1 The diagram shown is a schematic representation of an exemplary semiconductor manufacturing system according to an embodiment of this application. Figure 1 As shown, the semiconductor manufacturing system 100 provided in this embodiment includes: a plurality of semiconductor manufacturing machines 110, an alarm server 120, a remote control terminal 130, and a maintenance terminal 140. The alarm server 120 and the remote control terminal 130 can communicate via a network, and the remote control terminal 130 and the maintenance terminal 140 can also communicate via a network. This network can be a wired network or a wireless network, for example, a local area network (LAN) or a wide area network (WAN) (e.g., the Internet).

[0046] In some embodiments, the semiconductor production machine 110 is arranged in a clean room, and its running state is monitored in real time by the alarm server 120. The alarm server 120 is the core module of the machine abnormality detection, which can collect the data of the robot position sensor, the wafer carrying platform state monitor and the environmental parameter detection unit. When detecting the alarm events such as robot position abnormality, wafer carrying state deviation or vacuum environment instability, the corresponding machine alarm code is generated. In some embodiments, through the real-time data interaction channel between the alarm server 120 and the remote control terminal 130, the alarm server 120 transmits the corresponding machine alarm code to the remote control terminal 130 through the MQ (English full name: Message Queue) message queue. The remote control terminal 130 can determine the alarm type of the semiconductor production machine and the remote control permission corresponding to the alarm type of the semiconductor production machine according to the remote control method in the embodiments of the present application, and realize the intelligent start-stop control of the remote control function of the semiconductor production machine in the abnormal working condition. In some embodiments, through the real-time data interaction channel between the remote control terminal 130 and the maintenance terminal 140, the remote control terminal 130 transmits the corresponding alarm prompt information to the maintenance terminal 140. It should be noted that the maintenance terminal 140 is a mobile terminal registered and bound by the preset maintenance personnel in the remote control terminal 130, so that the preset maintenance personnel can receive the alarm prompt information through the maintenance terminal 140 in the form of sound and light prompt, short message push and work order system linkage, etc. The alarm prompt information includes alarm type, alarm event timestamp and machine identification.

[0047] Figure 2 The flowchart shown is an exemplary semiconductor production machine remote control method according to an embodiment of the present application. The remote control method of the present application can be executed by the remote control terminal 130 in Figure 1 , as shown in Figure 2 , the remote control method comprises:

[0048] In step S210, the machine alarm code sent by the alarm server of the semiconductor production machine is received in real time.

[0049] In some embodiments, the alarm server 120 monitors the running state of the semiconductor production machine 110 in the clean room. For example, the alarm server 120 serves as the core module of the machine abnormality detection, and can collect data of the robot position sensor, the wafer carrier platform state monitor and the environmental parameter detection unit. When detecting an alarm event such as abnormal position of the robot, abnormal state of the wafer carrier or instability of the vacuum environment, the alarm server 120 generates a corresponding machine alarm code. In some embodiments, through the real-time data interaction channel between the alarm server 120 and the remote control terminal 130, the alarm server 120 transmits the corresponding machine alarm code to the remote control terminal 130 through the MQ message queue. The remote control terminal 130 receives the machine alarm code sent by the alarm server 120 of the semiconductor production machine 110 in real time. It should be noted that the form of the machine alarm code can be a machine alarm data packet encapsulated according to the communication protocol between the alarm server 120 and the remote control terminal 130. The structured data format of the data packet can include machine identification, alarm type code and alarm event timestamp.

[0050] In step S220, the machine alarm code is parsed to obtain the alarm type of the semiconductor production machine.

[0051] In some embodiments, the remote control terminal 130 parses the received machine alarm code according to the communication protocol between the alarm server 120 and the remote control terminal 130 to obtain the alarm type of the semiconductor production machine 110. For example, the remote control terminal 130 parses the received machine alarm data packet encapsulated in the JSON (English full name: JavaScript Object Notation, Chinese: JavaScript Object Notation) format to obtain the machine identification and alarm type code of the semiconductor production machine 110 that occurs an abnormal alarm event, and the alarm event timestamp. It should be noted that the alarm type code includes one or more combinations of codes corresponding to the abnormal position of the robot, the abnormal state of the wafer carrier, the abnormality of the vacuum environment, the temperature overrun and the gas leakage. The alarm type includes one or more combinations of the abnormal position of the robot, the abnormal state of the wafer carrier, the abnormality of the vacuum environment, the temperature overrun and the gas leakage.

[0052] In some embodiments, when the remote control terminal 130 receives the machine alarm code, the alarm prompt information is sent to the preset maintenance terminal 140, and the alarm prompt information includes the alarm type, the alarm event timestamp, and the machine identifier. In some embodiments, when the remote control function is in the disabled state, the remote control terminal 130 synchronously starts the multi-channel alarm notification mechanism to synchronously push the alarm prompt information to the maintenance terminal 140 in the sound and light prompt, the short message push, and the work order system linkage mode. The alarm prompt information includes the alarm type, the alarm event timestamp, and the machine identifier. This multi-dimensional information push mode significantly improves the alarm event response efficiency.

[0053] In step S230, the remote control permission corresponding to the alarm type of the semiconductor production machine is determined based on the permission mapping relationship table between the alarm type and the remote control permission.

[0054] In some embodiments, the remote control terminal 130 can construct the permission mapping relationship table based on the historical alarm data and the device damage association, and in combination with the remote control risk assessment level of each type of abnormal scene in the semiconductor manufacturing process. In some embodiments, the remote control terminal 130 can receive the permission policy update instruction uploaded by the preset maintenance personnel through the maintenance terminal 140, and adjust the corresponding relationship between the alarm type and the remote control permission in the permission mapping relationship table according to the permission policy update instruction. The remote control terminal 130 can also adjust the corresponding relationship between the alarm type and the remote control permission in the permission mapping relationship table periodically. In some embodiments, the remote control permission corresponding to the alarm type of the semiconductor production machine 110 can be determined based on the permission mapping relationship table between the alarm type and the remote control permission.

[0055] In step S240, when it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the prohibited remote control type, the remote control function is set to the disabled state.

[0056] In some embodiments, the remote control terminal 130 sets the remote control function to a disabled state when it determines that the remote control permission corresponding to the alarm type of the semiconductor production machine 1110 is a prohibited remote control type. For example, when the parsed alarm type is an abnormal robot arm position, the remote control terminal 130 triggers the prohibited remote control function, automatically locking the robot arm motion control module and wafer transfer related operation interface. In some embodiments, the remote control terminal 130 maintains the enabled state of the remote control function when it determines that the remote control permission corresponding to the alarm type of the semiconductor production machine 110 is a permitted remote control type. For example, when the parsed alarm type is a temperature overrun and is in the process of process suspension, the remote control terminal 130 allows the remote control function to remain enabled, and the cooling compensation program can be remotely started. This risk classification control strategy based on alarm type can ensure that the remote control function is prohibited when the physical state of the device is uncertain (such as mechanical parts not returning to zero position, wafer not completing the evacuation action), avoiding improper remote control instructions causing wafer collision or equipment linkage damage, while retaining the ability to remotely intervene in alarm events with low risk of secondary damage to the device. It can be understood that by establishing a real-time data interaction channel between the remote control terminal 130 and the alarm server 120 of the semiconductor production machine 110, and cooperating with the dynamic permission determination mechanism based on the alarm code, the intelligent start-stop control of the remote control function of the clean room semiconductor production machine 110 under abnormal conditions is realized, the risk of misoperation of remote control is significantly reduced, and the risk of secondary damage to the equipment due to unknown physical state (such as robot arm position offset, wafer bearing state abnormality) is effectively avoided. At the same time, through the flexible configuration characteristics of the permission mapping relationship table, the system can adapt to the differentiated management and control needs of different machine types and process scenarios, thereby significantly improving the safety of the equipment and the stability of the production.

[0057] In some embodiments, the remote control terminal 130 can release the disabled state of the remote control function when any of the following conditions is met: the alarm server 120 sends an alarm release signal; the operator presses a physical release button for releasing the alarm set locally on the semiconductor production machine 110 and inputs an authorization code. In some embodiments, when the alarm server 120 detects that the abnormal state of the semiconductor production machine 110 has been repaired through a local self-recovery mechanism or manual intervention, a structured alarm release signal containing the machine identification and the alarm release identification will be generated. After the remote control terminal 130 receives the signal in real time through the MQ message queue, it first verifies the legitimacy and integrity of the signal source, and then retrieves whether the corresponding alarm type has been released according to the pre-set permission mapping table. If the verification is passed and the alarm type matches the release condition, the remote control terminal 130 will automatically restore the disabled remote control function and send a status update notification to the maintenance terminal 140, prompting that the remote control permission has been restored to normal. This process does not require manual intervention, ensuring that the device can quickly return to a remotely controllable state after the exception is resolved, while avoiding the risk of incorrect recovery of permissions due to signal transmission delay or false alarms.

[0058] In some embodiments, when the remote control restriction needs to be released through physical interaction, the RCM (Remote Control and Monitoring) offline button set locally on the semiconductor production machine 110 will serve as a hard trigger switch. The operator needs to trigger the release request through the physical button in the clean room during the alarm period, and input an encrypted authorization code on the machine-side human-machine interface. The authorization code is generated by the alarm server 120 and the remote control terminal 130 in coordination, containing a timestamp and a dynamic token feature unique to the machine. After receiving the authorization code that meets the format requirements, the remote control terminal 130 will perform double verification: first, it checks the timeliness and permission level of the authorization code, and second, it confirms whether the physical state feedback from the machine-side sensor meets the safe operation condition. Only when both verifications are passed, the system will release the disabled state of the remote control function. This mechanism combining local physical interaction and dynamic encryption verification not only ensures the feasibility of manual intervention in emergency situations, but also effectively prevents unauthorized false release operations through multi-dimensional verification.

[0059] In some embodiments, the remote control terminal 130 may record the following information in the machine alarm code processing log: alarm code reception timestamp, parsed alarm type, remote control function status change record, alarm clearance timestamp, and the identity of the operator who cleared the alarm. The machine alarm code processing log may adopt a distributed storage architecture, synchronously recorded in the local storage unit of the remote control terminal 130 and the cloud database of the alarm server 120. Maintenance personnel can retrieve log data within a specific machine identifier and time range through the maintenance terminal 140. The remote control terminal 130 will automatically associate the equipment operating parameters, remote operation command sequence, and alarm event processing results for that period to generate a visual analysis report. This dual storage and intelligent analysis mechanism not only provides a complete chain of evidence for tracing equipment faults but also provides a decision-making basis for the optimization and iteration of the permission mapping relationship table through historical data mining.

[0060] Figure 3 The diagram shown is a schematic representation of an exemplary remote control device for a semiconductor manufacturing machine according to an embodiment of this application. Figure 3 As shown, the remote control device 300 includes an alarm code receiving unit 310, an alarm type parsing unit 320, a remote control permission determination unit 330, and a remote control function setting unit 340.

[0061] The alarm code receiving unit 310 is used to receive machine alarm codes sent by the alarm server of the semiconductor production machine in real time.

[0062] Alarm type parsing unit 320 is used to parse the machine alarm code to obtain the alarm type of the semiconductor production machine.

[0063] The remote control permission determination unit 330 is used to determine the remote control permission corresponding to the alarm type of the semiconductor production machine based on the permission mapping relationship table between alarm type and remote control permission.

[0064] The remote control function setting unit 340 is used to disable the remote control function when it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the prohibited remote control type.

[0065] Since the specific process of remote control of semiconductor manufacturing equipment has been described in detail above, it will not be repeated here.

[0066] This disclosure also provides an electronic device, such as... Figure 4As shown, it includes a memory 420, a processor 410, and a program stored in the memory 420 and executable on the processor 410. When the program is executed by the processor 410, it can implement the various processes of the embodiments of the above methods and achieve the same technical effect. To avoid repetition, it will not be described again here.

[0067] Those skilled in the art will understand that all or part of the steps in the various methods of the above embodiments can be implemented by instructions, or by instructions controlling related hardware. These instructions can be stored in a computer-readable storage medium and loaded and executed by a processor. Therefore, this disclosure also provides a storage medium storing a computer program or instructions that, when executed by a processor, can implement the various processes of the embodiments of the above methods.

[0068] Since the instructions stored in the storage medium can execute the steps of the method provided in the embodiments of this disclosure, the beneficial effects achievable by the method provided in the embodiments of this disclosure can be realized, as detailed in the preceding embodiments, and will not be repeated here. Specific implementations of the above operations can be found in the preceding embodiments, and will not be repeated here.

[0069] Finally, it should be noted that the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The embodiments described above, as per the implementation of this application, do not exhaustively describe all details, nor do they limit the application to only the specific embodiments described. Clearly, many modifications and variations can be made based on the above description. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this application, thereby enabling those skilled in the art to make good use of this application and modifications based on it. This application is limited only by the claims and their full scope and equivalents.

Claims

1. A method for remotely controlling a semiconductor manufacturing machine, comprising: Receive machine alarm codes sent in real time from the alarm server of the semiconductor manufacturing machine; The alarm codes of the machines are parsed to obtain the alarm types of the semiconductor production machines; Based on the permission mapping table between alarm types and remote control permissions, the remote control permissions corresponding to the alarm types of the semiconductor production equipment are determined. The permission mapping table is constructed based on the correlation between historical alarm data and equipment damage, and in combination with the remote control risk assessment level of various abnormal scenarios in the semiconductor manufacturing process. When it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the prohibited remote control type, the remote control function is set to the disabled state. The remote control function will be undisabled if any of the following conditions are met: The alarm server sends an alarm cancellation signal; The operator presses a physical deactivation button located locally on the semiconductor manufacturing machine to deactivate the alarm.

2. The remote control method according to claim 1, wherein, The remote control method also includes: Upon receiving the machine alarm code, an alarm notification message is sent to a preset maintenance terminal. The alarm notification message includes the alarm type, the timestamp of the alarm event, and the machine identifier.

3. The remote control method according to claim 1, wherein, The remote control method also includes: The following information is recorded in the machine alarm code processing log: alarm code reception timestamp, parsed alarm type, remote control function status change record, alarm clearance timestamp, and alarm clearance operator identification.

4. The remote control method according to claim 1, wherein, The alarm types include one or more combinations of abnormal robotic arm position, abnormal wafer carrying status, abnormal vacuum environment, excessive temperature, and gas leakage.

5. The remote control method according to claim 1, wherein, The remote control method also includes: Receive permission policy update instructions uploaded by the maintenance terminal; The permission policy update instruction adjusts the correspondence between alarm types and remote control permissions in the permission mapping table.

6. The remote control method according to claim 1, wherein, The remote control method also includes: When it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the type that allows remote control, the remote control function remains enabled.

7. A remote control device for a semiconductor manufacturing machine, comprising: The alarm code receiving unit is used to receive machine alarm codes sent by the alarm server of the semiconductor production machine in real time; An alarm type parsing unit is used to parse the alarm code of the machine to obtain the alarm type of the semiconductor production machine; The remote control permission determination unit is used to determine the remote control permission corresponding to the alarm type of the semiconductor production machine based on the permission mapping relationship table between alarm type and remote control permission. The permission mapping relationship table is constructed based on the correlation between historical alarm data and equipment damage, and in combination with the remote control risk assessment level of various abnormal scenarios in the semiconductor manufacturing process. The remote control function setting unit is used to disable the remote control function when it is determined that the remote control permission corresponding to the alarm type of the semiconductor production machine is the prohibited remote control type. The remote control function will be undisabled if any of the following conditions are met: The alarm server sends an alarm cancellation signal; The operator presses a physical deactivation button located locally on the semiconductor manufacturing machine to deactivate the alarm.

8. A semiconductor manufacturing system, comprising: Semiconductor manufacturing equipment is located in a cleanroom; An alarm server is used to monitor abnormalities in the semiconductor production equipment and generate equipment alarm codes. A remote control terminal, including the remote control device as described in claim 7, implements the method as described in any one of claims 1 to 6.

9. An electronic device, comprising: One or more processors; A memory for storing executable instructions, which, when executed by the one or more processors, cause the electronic device to perform the method as described in any one of claims 1-6.

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