Vacuum flash evaporation equipment for perovskite thin film and use method of vacuum flash evaporation equipment

Abstract

The invention discloses vacuum flash evaporation equipment for a perovskite thin film and a using method, and relates to the technical field of vacuum coating. The vacuum flash evaporation equipment comprises a vacuum machine, a closing mechanism is installed at the top of the vacuum machine, a feeding mechanism is arranged in the vacuum machine, a discharging mechanism is installed on the feeding mechanism, and the closing mechanism is connected with the feeding mechanism; the closing mechanism comprises a cover plate, the feeding mechanism comprises a placing plate arranged in the vacuum machine in a sliding mode, the two ends of the placing plate are rotatably connected with second connecting rods, the other ends of the second connecting rods are slidably connected with first connecting rods, and the other ends of the two first connecting rods are both rotatably connected with the cover plate; when the cover plate is opened or closed, the placing plate is driven to move up and down through the first connecting rod and the second connecting rod, feeding and discharging of workers are facilitated, the operation safety coefficient is improved, operation is more convenient and faster, and materials are prevented from being collided and damaged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a perovskite film vacuum flash evaporation device and a use method thereof. BACKGROUND

[0002] With the rapid development of energy and electronic technology, perovskite films have shown great application potential in the fields of solar cells, light-emitting diodes, etc. due to their excellent photoelectric properties. As a key means for preparing high-quality perovskite films, vacuum flash evaporation technology can accurately control the composition and structure of the film, thereby improving the performance of the device, and therefore has attracted widespread attention and in-depth research. However, in actual production and application, the existing perovskite film vacuum flash evaporation device still has many problems to be improved.

[0003] The existing vacuum coating equipment needs to stretch the hands into the vacuum machine for operation when carrying out the feeding and discharging operation, which not only reduces the operation safety factor, but also causes the material to be damaged due to the certain weight and shape of the material, and the operation process is complicated and easy to be damaged by knocking. SUMMARY

[0004] The purpose of the present application is to provide a perovskite film vacuum flash evaporation device and a use method thereof, which solves the problem that the existing vacuum coating equipment needs to stretch the hands into the vacuum machine for operation when carrying out the feeding and discharging operation, which reduces the operation safety factor and easily causes the material to be damaged by knocking.

[0005] The purpose of the present application can be achieved by the following technical solutions: The perovskite film vacuum flash evaporation device comprises a vacuum machine, a closing mechanism is installed on the top of the vacuum machine, a feeding mechanism is arranged inside the vacuum machine, a discharging mechanism is installed on the feeding mechanism, and the closing mechanism is connected with the feeding mechanism. The closing mechanism comprises a cover plate, which is clamped on the top of the vacuum machine when closed. The feeding mechanism comprises a placement plate slidingly arranged inside the vacuum machine, second connecting rods are rotatably connected to both ends of the placement plate, first connecting rods are slidingly connected to the other ends of the second connecting rods, and both ends of the first connecting rods are rotatably connected with the cover plate. When the cover plate is opened or closed, the placement plate is driven to move up and down by the first connecting rods and the second connecting rods.

[0006] As a further scheme of the present application, the closing mechanism further comprises driving plates, and two driving plates are provided, the top of each driving plate is perpendicularly connected with the bottom surface of the cover plate, and a rotating shaft is arranged on the outer side of the middle part of the driving plate. Two bottom parts of the driving plates are fixedly connected with connecting shafts, two ends of the connecting shafts respectively penetrate through the driving plates on the corresponding sides and extend to the outside; Symmetrical inverted "h" shaped movable grooves are formed in the two sides of the vacuum machine, and the extending ends of the rotating shafts and the connecting shafts are all slidingly connected in the corresponding movable grooves.

[0007] As a further scheme of the present application, first driving blocks are rotatably connected to the two ends of the connecting shafts, second driving blocks are rotatably connected to the bottom parts of the first driving blocks, and driving shafts are arranged on the second driving blocks; Connecting grooves are symmetrically formed in the two sides of the vacuum machine, the driving shafts are rotatably connected with the connecting grooves, driving assemblies are symmetrically arranged on the outer sides of the vacuum machine, and the driving assemblies are connected with the corresponding driving shafts.

[0008] As a further scheme of the present application, a plurality of groups of fixing blocks are symmetrically arranged in the two sides of the vacuum machine, connecting springs are connected to the bottom parts of the groups of fixing blocks, and the other ends of the groups of connecting springs are connected with the corresponding corners on the top part of the placing plate.

[0009] As a further scheme of the present application, a cavity is formed in the first connecting rod, a telescopic spring is arranged in the cavity, and the top part of the second connecting rod extends into the cavity of the first connecting rod and is connected with the telescopic spring.

[0010] As a further scheme of the present application, the material placing mechanism comprises a material disc, and handles are symmetrically arranged on the top part of the material disc. A plurality of groups of magnetic blocks are arranged on the top part of the placing plate, and the bottom part of the material disc is magnetically adsorbed with the magnetic blocks.

[0011] As a further scheme of the present application, a protection mechanism is further included, the protection mechanism comprises four groups of protection assemblies, and the four groups of protection assemblies are respectively arranged at the four corner positions on the top part of the vacuum machine. The protection assembly comprises a supporting seat, a supporting rod is vertically connected to the top part, and a grating is arranged on the supporting rod.

[0012] As a further scheme of the present application, the protection mechanism further comprises pneumatic assemblies, the pneumatic assemblies are arranged in four groups, and the output shafts of the four groups of pneumatic assemblies are connected with the corresponding supporting seats.

[0013] As a further scheme of the present application, a sealing mechanism is further included, the sealing mechanism comprises a sealing ring and a sealing gasket, the sealing ring is clamped on the inner wall on the top part of the vacuum machine, and the sealing gasket is arranged on the outer sidewall on the bottom part of the cover plate. The sealing ring is in the form of a hollow rectangular frame structure. The connecting pipes are connected with two ends of the sealing ring, and the other ends of the two connecting pipes are respectively connected with a gas bag.

[0014] As a further scheme of the present application: a method for using the vacuum flash evaporation device for perovskite thin film, applied to the vacuum flash evaporation device for perovskite thin film, comprising the following steps: Step one, control the protective mechanism inside the vacuum machine to rise to the top of the vacuum machine through the control panel of the vacuum machine, and the protective mechanism drives the sealing mechanism to reset, facilitating the opening of the closing mechanism; Step two, control the closing mechanism to rotate after rising to a set height on the top of the vacuum machine through the control panel of the vacuum machine, realize the automatic opening of the closing mechanism, and the closing mechanism drives the feeding mechanism to rise to the top of the vacuum machine, which is convenient for disassembly and cleaning under the cooperation of the discharging mechanism; Step three, control the closing mechanism start-stop through the light signal control on the protective mechanism during feeding and discharging, control the closing mechanism to close after feeding is completed, and control the feeding mechanism to slide to a specified position; Step four, after the closing mechanism is closed tightly, the protective mechanism also slides down until it is hidden in the vacuum machine, and the vacuum machine starts to work through the operation of the control panel, realizing the glass vacuum coating work.

[0015] The present application has the following advantages: The present application realizes the synchronous rising of the feeding mechanism when the closing mechanism is opened, drives the discharging mechanism to move to the top of the vacuum machine, facilitates the feeding and discharging of the staff, improves the operation safety factor, and is more convenient to operate, avoiding damage caused by knocking of materials. BRIEF DESCRIPTION OF DRAWINGS

[0016] The present application will be further described below with reference to the accompanying drawings.

[0017] Figure 1 is a schematic diagram of the overall structure of the present application; Figure 2 is a schematic diagram of the opening state of the closing mechanism of the present application; Figure 3 is a schematic diagram of the connection structure of the closing mechanism and the feeding mechanism of the present application; Figure 4This is a schematic diagram of the end structure of the vacuum machine of the present invention; Figure 5 This is a schematic diagram of the closing mechanism of the present invention; Figure 6 This is a schematic diagram of the opening and operating state of the closing mechanism of the present invention; Figure 7 This is a schematic diagram of the combined structure of the feeding mechanism and the unloading mechanism of the present invention; Figure 8 This is a schematic diagram of the connection structure between the first connecting rod and the second connecting rod of the present invention; Figure 9 This is a schematic diagram of the connection structure between the protective mechanism and the airbag of the present invention; Figure 10 This is a schematic diagram of the mating structure of the sealing ring and the connecting pipe of the present invention.

[0018] In the diagram: 1. Vacuum machine; 2. Closing mechanism; 201. Cover plate; 202. Drive assembly; 203. Drive plate; 204. Rotating shaft; 205. Movable groove; 206. Connecting shaft; 207. First drive block; 208. Drive shaft; 209. Second drive block; 210. Connecting groove; 3. Feeding mechanism; 301. First connecting rod; 302. Second connecting rod; 303. Placement plate; 304. Fixing block; 305. Connecting spring; 306. Telescopic spring; 4. Discharging mechanism; 401. Material tray; 402. Handle; 403. Magnetic block; 5. Protective mechanism; 501. Grating; 502. Support rod; 503. Support base; 504. Pneumatic assembly; 6. Sealing mechanism; 601. Sealing ring; 602. Connecting pipe; 603. Airbag; 604. Support plate; 605. Sealing gasket. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Example 1

[0021] like Figures 1-10 As shown, this embodiment provides a vacuum flash evaporation device for perovskite thin films, including a vacuum machine 1, a closing mechanism 2 installed on the top of the vacuum machine 1, and a feeding mechanism 3 provided inside the vacuum machine 1. A discharging mechanism 4 is installed on the feeding mechanism 3, and the closing mechanism 2 is connected to the feeding mechanism 3 and generates a linkage. By cooperating with the closing mechanism 2 and the feeding mechanism 3, the feeding mechanism 3 rises synchronously when the closing mechanism 2 is opened, driving the discharging mechanism 4 to move to the top position of the vacuum machine 1, which facilitates the loading and unloading of materials by the staff, improves the safety factor of operation, and makes the operation more convenient, avoiding damage to materials caused by bumps.

[0022] Preferably, such as Figures 2-6 As shown, the closing mechanism 2 includes a cover plate 201, which is engaged with the top of the vacuum machine 1 when closed. Drive plates 203 are symmetrically arranged on both sides of the bottom surface of the cover plate 201. The tops of both drive plates 203 are perpendicular to the bottom surface of the cover plate 201. A rotating shaft 204 is provided on the outer side of the middle of the drive plate 203, and a connecting shaft 206 is fixedly connected to the bottom of the two drive plates 203. The two ends of the connecting shaft 206 pass through the corresponding drive plates 203 and extend to the outside. Inverted "h"-shaped movable grooves 205 are symmetrically opened on both sides inside the vacuum machine 1. The extended ends of the rotating shaft 204 and the connecting shaft 206 are slidably connected in the corresponding movable grooves 205 on both sides.

[0023] Furthermore, such as Figures 4-6 As shown, both ends of the connecting shaft 206 are rotatably connected to first drive blocks 207, and the bottoms of the two first drive blocks 207 are rotatably connected to second drive blocks 209. A drive shaft 208 is provided on the outer side of the bottom of each second drive block 209. Connecting slots 210 are symmetrically provided on both sides inside the vacuum machine 1. The drive shaft 208 is rotatably connected to the connecting slots 210, and the two second drive blocks 209 are rotatably connected to the vacuum machine 1 via the drive shaft 208. Driving assemblies 202 are also symmetrically provided on the outer surface of the vacuum machine 1. The positions of the two driving assemblies 202 correspond to the positions of the connecting slots 210 on the same side, and the driving assemblies 202 are connected to the drive shaft 208 rotatably installed in the connecting slots 210, thereby driving the drive shaft 208.

[0024] It should be noted that the aforementioned drive component 202 is not specifically limited and can be a micro motor, a micro rotary cylinder, etc.

[0025] Specifically, when the cover plate 201 needs to be closed, the drive assembly 202 drives the drive shaft 208 to rotate (to... Figure 2For the base perspective, then counterclockwise rotation), the two second driving blocks 209 are deflected downward, the two second driving blocks 209 pull the corresponding two first driving blocks 207 to move, the first driving blocks 207 pull the connecting shaft 206, the connecting shaft 206 pulls the driving plate 203, the driving plate 203 is deflected with the pivot 204 as the center, until the connecting shaft 206 and the pivot 204 are located in the same vertical section of the movable slot 205, the cover plate 201 is deflected to the horizontal state, and then the driving assembly 202 continues to rotate, the second driving blocks 209 continue to deflect, the first driving blocks 207 continue to move, the first driving blocks 207 continue to pull the connecting shaft 206, the connecting shaft 206 continues to pull the driving plate 203, the driving plate 203 drives the pivot 204, so that the connecting shaft 206 and the pivot 204 move vertically in the movable slot 205, until the connecting shaft 206 moves to the bottom of the movable slot 205, and then the cover plate 201 is pulled downward and closed with the top of the vacuum machine 1.

[0026] Similarly, when the cover plate 201 needs to be opened, the two driving assemblies 202 drive the driving shaft 208 to rotate reversely, the two second driving blocks 209 are deflected upward, the two second driving blocks 209 push the corresponding two first driving blocks 207 to move, the first driving blocks 207 push the connecting shaft 206, the connecting shaft 206 pushes the driving plate 203, the driving plate 203 drives the pivot 204, so that the connecting shaft 206 and the pivot 204 move vertically in the movable slot 205, the driving plate 203 pushes the cover plate 201 to move vertically upward at the same time, until the pivot 204 moves to the top of the movable slot 205, and then the driving assembly 202 continues to rotate, the second driving blocks 209 continue to deflect, the first driving blocks 207 continue to move, the first driving blocks 207 continue to push the connecting shaft 206, the connecting shaft 206 continues to push the driving plate 203, so that the driving plate 203 is deflected with the pivot 204 as the center (as shown in Figure 6 When the pivot 204 moves to the top of the movable slot 205, the connecting shaft 206 is located at the intersection of the vertical section and the arc section of the movable slot 205, loses the limitation of the vertical section, and enters the arc section of the movable slot 205 under the push of the first driving blocks 207), so that the connecting shaft 206 enters the arc section of the movable slot 205, and then the cover plate 201 is deflected and opened (as shown in Figure 2 The two inverted "h" shaped movable slots 205 are provided, so that the cover plate 201 can realize the composite action of vertical movement and deflection, and then the cover plate 201 is opened to perform the feeding and discharging operation.

[0027] The two inverted "h" shaped movable slots 205 are provided, so that the cover plate 201 can realize the composite action of vertical movement and deflection, and then the cover plate 201 is opened to perform the feeding and discharging operation.

[0028] Preferably, as shown in Figure 2 and Figure 3As shown, the feeding mechanism 3 includes a placement plate 303 slidably arranged inside the vacuum machine 1, and the two ends of the top of the placement plate 303 are symmetrically connected with the second connecting rods 302, and the second connecting rods 302 are rotatably connected with the placement plate 303, and the other ends of the second connecting rods 302 are slidably connected with the first connecting rods 301, and the other ends of the two first connecting rods 301 are rotatably connected with the cover plate 201; The first connecting rods 301 and the second connecting rods 302 are connected with the placement plate 303 and the cover plate 201, so that when the cover plate 201 is closed, the two first connecting rods 301 drive the two second connecting rods 302 to press down on both ends of the placement plate 303, so that the placement plate 303 slides into the inside of the vacuum machine 1, and the vacuum coating work of the material is realized. When the cover plate 201 is opened, the two first connecting rods 301 drive the second connecting rods 302 to pull the placement plate 303, so that the placement plate 303 rises to the top of the vacuum machine 1, which is convenient for the operator to feed and discharge, and the operation is more convenient.

[0029] Preferably, as shown in Figure 3 and Figure 7 The inside of the vacuum machine 1 is symmetrically provided with a plurality of fixed blocks 304, and the bottom of each fixed block 304 is connected with a connecting spring 305, and the other end of each connecting spring 305 is connected with the corresponding corner of the top of the placement plate 303. By arranging the connecting spring 305, the placement plate 303 can smoothly operate during the opening and closing of the cover plate 201, and can assist the opening of the cover plate 201 by the first connecting rod 301 and the second connecting rod 302, so that the cover plate 201 is easier to open.

[0030] Further preferably, as shown in Figure 8 The first connecting rod 301 is internally provided with a cavity, and the cavity is internally provided with a telescopic spring 306, and the top of the second connecting rod 302 extends into the cavity of the first connecting rod 301 and is connected with the telescopic spring 306, and the second connecting rod 302 is slidably connected with the first connecting rod 301 through the telescopic spring 306. By arranging the telescopic spring 306, the second connecting rod 302 and the first connecting rod 301 can be telescopic and slid, and after the cover plate 201 is closed, the second connecting rod 302 and the first connecting rod 301 can be squeezed and contracted, so as to ensure the tightness of the cover plate 201, and under the elastic potential of the telescopic spring 306, the placement plate 303 is pressed against the inside of the vacuum machine 1, so as to ensure the stability thereof.

[0031] It should be understood that most of the existing technology trays are fixedly installed inside the vacuum machine by bolts, and are easy to attach dirt after long-term use. When cleaning, multiple bolts need to be disassembled, which is time-consuming and laborious, reduces the maintenance efficiency, and the replacement process is also relatively cumbersome.

[0032] Preferably, as shown in Figure 3 andFigure 7 As shown, the above material placing mechanism 4 is arranged on the top of the placing plate 303, a plurality of installation grooves are formed on the top of the placing plate 303, magnetic blocks 403 are installed in the installation grooves, the material placing mechanism 4 includes a material tray 401, handles 402 are symmetrically arranged on the top of the material tray 401, the material tray 401 is detachably connected with the placing plate 303 through the magnetic attraction between the bottom of the material tray 401 and the magnetic blocks 403, which facilitates the disassembly, assembly and maintenance of the material tray 401 and plays a positioning role, when the material tray 401 needs to be replaced and cleaned, the material tray 401 can be conveniently taken out through the handles 402, and different types of material trays 401 can be replaced to adapt to different specifications of materials.

[0033] Embodiment Two

[0034] As shown in Figure 1 and Figure 9 The difference between the present embodiment and the first embodiment is that the present embodiment is provided with a protection mechanism 5 arranged on the top of the vacuum machine 1, and the protection mechanism 5 includes four groups of protection assemblies arranged at the four corner positions on the top of the vacuum machine 1, each group of protection assemblies includes a support seat 503 connected with the vacuum machine 1, a support rod 502 is vertically connected on the top of the support seat 503, and a grating 501 is installed on the support rod 502, four gratings 501 are respectively located on the outside of the top of the vacuum machine 1, a protection wall is formed by the light signals emitted by the four gratings 501, the gratings 501 can detect the operation of the workers when they are loading and unloading, so that the vacuum machine 1 cannot work after being accidentally touched, thereby playing a safety protection role, and when the workers finish loading, the gratings 501 have no signal to block, so that the vacuum machine 1 can be controlled to work.

[0035] It should be understood that the grating protection devices of the existing vacuum machines are mostly fixedly installed on the top of the equipment, are inconvenient to store and hide, are easy to be damaged by knocking, and take a long time to maintain.

[0036] In view of this, the protection mechanism 5 in the present embodiment further includes pneumatic assemblies 504 arranged inside the four corners of the vacuum machine 1, the output shafts of the four pneumatic assemblies 504 are respectively connected with the corresponding support seats 503, and the support seats 503 are slidingly connected with the vacuum machine 1, the support seats 503 and the gratings 501 can slide in the vacuum machine 1 under the drive of the pneumatic assemblies 504, the pneumatic assemblies 504 are used to drive and control the support seats 503, which is beneficial to extending the gratings 501 to the outside of the vacuum machine 1 for safety protection, and when not in use, the gratings 501 are stored in the vacuum machine 1 under the control of the pneumatic assemblies 504, thereby playing a hidden protection role.

[0037] It should be noted that the above-mentioned pneumatic assemblies 504 are not limited to cylinders.

[0038] Embodiment Three

[0039] It should be understood that the prior art vacuum machine is sealed after closing, mostly relying on the sealing ring for sealing. Although the sealing ring has a certain elasticity, frequent opening and closing can easily cause the sealing door to be damaged by friction with the equipment, and the elasticity of the sealing ring decreases after a long time of use, the sealing effect becomes poor, and then affects the smooth progress of the coating work.

[0040] As shown in Figures 2-10 The difference between the present embodiment and embodiment two is that the present embodiment is provided with a sealing mechanism 6, which includes a sealing ring 601 and a sealing gasket 605, wherein the sealing ring 601 is clamped on the inner wall of the top of the vacuum machine 1, and the sealing gasket 605 is arranged on the outer side wall of the bottom of the cover plate 201, as shown in Figure 4 and Figure 6 Through the arrangement of the sealing ring 601 and the sealing gasket 605, the cover plate 201 is more closely fitted after being closed with the vacuum machine 1, and the sealing effect is improved. The sealing ring 601 is in a hollow rectangular frame structure, so that the sealing ring 601 has elasticity and can deform after the cover plate 201 is closed, so that the sealing effect is better.

[0041] Further, the sealing ring 601 of the present embodiment is further connected with a connecting pipe 602, the connecting pipe 602 is in communication with the cavity inside the sealing ring 601, the other end of the two connecting pipes 602 is respectively connected with a gas bag 603, the gas bag 603 is in a cylindrical structure, and is sleeved on the output shaft of the pneumatic assembly 504, a supporting plate 604 is connected at the bottom of the gas bag 603, the supporting plate 604 is sleeved on the output shaft of the pneumatic assembly 504, and the supporting plate 604 is fixedly connected with the inner side wall of the vacuum machine 1.

[0042] By arranging the supporting plate 604 to support the gas bag 603, and by arranging the gas bag 603, when the cover plate 201 is closed and the supporting seat 503 is contracted and slides down, the supporting seat 503 will extrude the gas bag 603, so that the volume of the gas bag 603 is contracted, the gas in the gas bag 603 enters the inside of the sealing ring 601 through the connecting pipe 602, so that the sealing ring 601 is inflated and tightly contacts with the sealing gasket 605, and the sealing effect is improved; when the supporting seat 503 rises, the volume of the gas bag 603 returns to normal, the gas in the inside of the sealing ring 601 returns to the inside of the gas bag 603, and the fit between the sealing ring 601 and the sealing gasket 605 is relaxed, so that the cover plate 201 is easily opened, and the abrasion of the sealing ring 601 is reduced.

[0043] It should be noted that the inflation degree of the sealing ring 601 can be controlled by the moving distance of the supporting seat 503, and the connecting pipe 602 can be a telescopic pipe, so that the connecting pipe 602 can grow when the gas bag 603 is compressed.

[0044] Preferably, when the cover plate 201 is in an open state, the sealing ring 601 is slightly concave to the inner wall of the top of the vacuum machine 1.

[0045] Embodiment four

[0046] The embodiment provides a use method of a perovskite film vacuum flash evaporation equipment, and the use method comprises the following steps:

[0047] Step one, through the control panel of the vacuum machine 1, the vacuum machine 1 is operated, the protection mechanism 5 in the vacuum machine 1 is lifted to the top of the vacuum machine 1, and meanwhile the sealing mechanism 6 is reset by the protection mechanism 5, so that the opening of the closing mechanism 2 is facilitated; Step two, through the control panel of the vacuum machine 1, the closing mechanism 2 is controlled to rotate after being lifted to a certain height on the top of the vacuum machine 1, so that the automatic opening of the closing mechanism 2 is realized, and the closing mechanism 2 drives the feeding mechanism 3 to be lifted to the top of the vacuum machine 1, so that the feeding and discharging operations are facilitated, meanwhile, the feeding and discharging mechanisms 4 are facilitated to be disassembled and cleaned, and the feeding and discharging mechanisms 4 can also be replaced according to different materials; Step three, through the light signal control of the protection mechanism 5, the starting and stopping control of the closing mechanism 2 is realized, and the closing mechanism 2 cannot be closed during the feeding and discharging, so that the safety protection is realized, finally, after the feeding is completed, the closing mechanism 2 is controlled to be closed, and the feeding mechanism 3 is controlled to slide to a specified position; Step four, after the closing mechanism 2 is closed tightly, the protection mechanism 5 also slides down and is hidden in the vacuum machine 1, through the control panel, the vacuum machine 1 starts to work, and the glass vacuum coating work is realized.

[0048] In the description of the present application, it should be understood that the terms "upper", "lower", "left", "right" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, and a particular orientation configuration and operation, therefore, it cannot be understood as a limitation on the present application. In addition, "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include one or more features. In the description of the present application, unless otherwise specified, the meaning of "multiple" is two or more.

[0049] In the description of the application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" and the like should be understood in a broad sense, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0050] The above describes one embodiment of the present application in detail, but the content described is only a preferred embodiment of the present application, and cannot be considered as limiting the scope of the present application. Any equivalent changes and improvements made within the scope of the present application should still be attributed to the patent coverage of the present application.

Claims

1. Vacuum flash-off apparatus for perovskite thin films, comprising a vacuum machine (1), characterized by, The vacuum machine (1) is provided with a closing mechanism (2) on the top, an upper feeding mechanism (3) is arranged in the vacuum machine (1), and a discharging mechanism (4) is arranged on the upper feeding mechanism (3); the closing mechanism (2) is connected with the upper feeding mechanism (3); The closing mechanism (2) comprises a cover plate (201), which is clamped on the top of the vacuum machine (1) when closed; The upper feeding mechanism (3) comprises a placing plate (303) slidingly arranged in the vacuum machine (1), second connecting rods (302) rotatably connected to both ends of the placing plate (303), and first connecting rods (301) slidingly connected to the other ends of the second connecting rods (302); the other ends of the two first connecting rods (301) are rotatably connected with the cover plate (201); When the cover plate (201) is opened or closed, the first connecting rods (301) and the second connecting rods (302) drive the placing plate (303) to move up and down.

2. The vacuum flash-off apparatus for perovskite thin film according to claim 1, wherein The closing mechanism (2) further comprises two driving plates (203), the top of each driving plate (203) is perpendicularly connected with the bottom surface of the cover plate (201), and a rotating shaft (204) is arranged on the outer side of the middle part of each driving plate (203); The bottom of each driving plate (203) is fixedly connected with a connecting shaft (206), and the connecting shaft (206) extends to the outside through the corresponding driving plate (203) on both ends. The inside of the vacuum machine (1) is symmetrically provided with two inverted "h"-shaped movable grooves (205), and the extending ends of the rotating shaft (204) and the connecting shaft (206) are slidingly connected in the corresponding movable grooves (205).

3. The vacuum flash-off apparatus for perovskite thin films according to claim 2, characterized by, The connecting shaft (206) is rotatably connected with a first driving block (207) on both ends, the bottom of the first driving block (207) is rotatably connected with a second driving block (209), and a driving shaft (208) is arranged on the second driving block (209); The inside of the vacuum machine (1) is symmetrically provided with a connecting groove (210) on both sides, the driving shaft (208) is rotatably connected with the connecting groove (210), and the outside of the vacuum machine (1) is symmetrically provided with a driving assembly (202), and the driving assembly (202) is connected with the corresponding driving shaft (208).

4. The vacuum flash-off apparatus for perovskite thin films according to any one of claims 1 to 3, characterized by, The inside of the vacuum machine (1) is symmetrically provided with a plurality of groups of fixing blocks (304), the bottom of each group of fixing blocks (304) is connected with a connecting spring (305), and the other end of each group of connecting springs (305) is connected with the corresponding corner of the top of the placing plate (303).

5. The vacuum flash-off apparatus for perovskite thin film according to any one of claims 1 to 3, characterized by, A cavity is formed in the first connecting rod (301), a telescopic spring (306) is arranged in the cavity, and the top of the second connecting rod (302) extends into the cavity of the first connecting rod (301) and is connected with the telescopic spring (306).

6. The vacuum flash-off apparatus for perovskite thin films according to any one of claims 1 to 3, characterized by, The discharging mechanism (4) comprises a tray (401), and handles (402) are symmetrically arranged on the top of the tray (401); The placing plate (303) is provided with a plurality of groups of magnetic blocks (403) on the top, and the material tray (401) is magnetically adsorbed with the magnetic blocks (403) on the bottom.

7. The vacuum flash-off apparatus for perovskite thin film according to claim 1, wherein Further comprising a protection mechanism (5), the protection mechanism (5) comprises four groups of protection assemblies, and the four groups of protection assemblies are respectively arranged at the top four corner positions of the vacuum machine (1). The protection assembly comprises a supporting seat (503), a supporting rod (502) is vertically connected to the top, and a grating (501) is installed on the supporting rod (502).

8. The vacuum flash-off apparatus for perovskite thin films according to claim 7, characterized by, The protection mechanism (5) further comprises a pneumatic assembly (504), and the pneumatic assembly (504) is provided with four groups, and the output shafts of the four groups of pneumatic assemblies (504) are connected with the corresponding supporting seats (503).

9. The vacuum flash-off apparatus for perovskite thin films according to claim 8, wherein Further comprising a sealing mechanism (6), the sealing mechanism (6) comprises a sealing ring (601) and a sealing gasket (605), the sealing ring (601) is clamped on the inner wall of the top of the vacuum machine (1), and the sealing gasket (605) is arranged on the outer sidewall of the bottom of the cover plate (201). The sealing ring (601) is in a hollow rectangular frame structure; Two connecting pipes (602) are connected to the two ends of the sealing ring (601), one air bag (603) is connected to the other end of each connecting pipe (602), the air bag (603) is in a cylindrical structure, and is sleeved on the output shaft of the corresponding pneumatic assembly (504).

10. Method of using a vacuum flash evaporation apparatus for perovskite thin films, characterized in that Applied to the vacuum flash evaporation equipment of the perovskite film as claimed in any one of claims 1-9, comprising the following steps: Step one, control the protection mechanism (5) inside the vacuum machine (1) to rise to the top of the vacuum machine (1) through the control panel of the vacuum machine (1), at the same time, the protection mechanism (5) drives the sealing mechanism (6) to reset, so as to facilitate the opening of the closing mechanism (2); Step two, control the closing mechanism (2) to rise to a set height on the top of the vacuum machine (1) and then rotate through the control panel of the vacuum machine (1), so as to realize the automatic opening of the closing mechanism (2), and the closing mechanism (2) drives the feeding mechanism (3) to rise to the top of the vacuum machine (1), which is convenient for disassembly and cleaning under the cooperation of the discharging mechanism (4); Step three, control the start and stop of the closing mechanism (2) through the light signal control on the protection mechanism (5) during feeding and discharging, after the feeding is completed, control the closing mechanism (2) to close, and control the feeding mechanism (3) to slide to a specified position; Step four, after the closing mechanism (2) is closed tightly, the protection mechanism (5) also slides down and hides in the vacuum machine (1), and the vacuum machine (1) starts to work through the control panel, so as to realize the glass vacuum coating work.

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