A breakage-resistant crystal oscillator system for vacuum evaporation machines

Abstract

This invention relates to the field of crystal oscillator systems for vacuum evaporation coating machines, specifically a breakage-resistant crystal oscillator system for such machines. The system includes a first rotating mechanism and a support ring assembly mounted on its lower outer side. A carrier to be coated is connected to the lower interior of the support ring assembly. A second rotating mechanism is housed within the cavity of the first rotating mechanism, and the rotating shaft of the second rotating mechanism is connected to an intermediate rotating shaft. A crystal oscillator assembly is connected to the bottom end of the intermediate rotating shaft. A water-cooling jacket for storing cooling water is provided inside the water-cooling shaft, and an adjustment assembly is installed inside the water-cooling jacket. This breakage-resistant crystal oscillator system for vacuum evaporation coating machines ensures uniform temperature of the cooling water within the water-cooling jacket, thereby improving the cooling effect and preventing the crystal oscillator from breaking due to the high-temperature environment generated during vacuum evaporation coating machine operation, thus avoiding impact on the manufacturing of electronic materials.

Description

Technical Field

[0001] This invention relates to the field of crystal oscillator system technology for vacuum evaporation machines, specifically to a breakage-resistant crystal oscillator system for vacuum evaporation machines. Background Technology

[0002] Vacuum evaporation machines are widely used in the manufacturing process of electronic special materials. As a component of the vacuum evaporation machine, the crystal oscillator system is mainly used as a key monitoring device in the thin film deposition process. It achieves real-time thickness monitoring through the piezoelectric effect of quartz crystals to ensure the uniformity and accuracy of the coating, so that the vacuum evaporation machine can effectively manufacture electronic special materials.

[0003] For example, the patent application published in the prior art with the publication number "CN120272864A" is entitled "A Crystal Oscillator System for a Vacuum Evaporation Machine". It discloses that a water-cooling shaft is connected to the upper part of the probe cap, and a water-cooling jacket is provided in the inner ring of the water-cooling shaft. The water-cooling jacket is an annular hollow cavity. The water inlet of the water-cooling jacket is connected to the water inlet pipe, and the water outlet of the water-cooling jacket is connected to the water outlet pipe. The water inlet and the water outlet are symmetrically arranged. The input end of the water inlet pipe is connected to cooling water. The cooling water enters the water-cooling jacket from the water inlet pipe and is discharged from the water outlet pipe, forming a circulating cooling water path to cool the crystal oscillator mechanism and form a directional thermal radiation shield for the crystal oscillator mechanism.

[0004] In the existing crystal oscillator systems described above, cooling water is directly injected into the water-cooling jacket for cooling. Since the cooling water in the jacket is static, the temperature of the cooling water at the bottom of the jacket is higher than that at the top, resulting in uneven cooling. This leads to poor cooling efficiency and can cause the crystal oscillator to break due to the high-temperature environment generated during vacuum evaporation. Consequently, it affects the subsequent use of the crystal oscillator and the ability of the vacuum evaporation machine to manufacture electronic materials. Therefore, we propose a breakage-resistant crystal oscillator system for vacuum evaporation machines to solve the aforementioned problems. Summary of the Invention

[0005] The purpose of this invention is to provide a breakage-resistant crystal oscillator system for vacuum evaporation machines, addressing the aforementioned issues raised in the background section. Currently available crystal oscillator systems rely on directly injecting cooling water into a water-cooling jacket for cooling. Since the cooling water in the jacket is static, the temperature of the cooling water at the bottom of the jacket is higher than that at the top, resulting in uneven cooling and poor cooling performance. This leads to the high-temperature environment generated during vacuum evaporation machine operation causing the crystal oscillator to break, thus affecting its future usability and hindering the vacuum evaporation machine's ability to manufacture electronic materials.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a breakage-resistant crystal oscillator system for a vacuum evaporation coating machine, comprising a first rotating mechanism and a support ring assembly installed on the lower outer side of the first rotating mechanism, wherein a carrier to be coated is connected to the lower inner side of the support ring assembly, a second rotating mechanism is sleeved inside the cavity of the first rotating mechanism, and the rotating shaft of the second rotating mechanism is connected to an intermediate rotating shaft, wherein a crystal oscillator mechanism is connected to the bottom end of the intermediate rotating shaft, and a water-cooled shaft located above the crystal oscillator mechanism is sleeved on the lower outer side of the intermediate rotating shaft, wherein a water-cooled jacket for storing cooling water is provided inside the water-cooled shaft, and an adjustment component is installed inside the water-cooled jacket.

[0007] Preferably, the crystal oscillator mechanism includes a crystal oscillator fixing seat, and a fixing seat connecting rod for locking connection with the bottom end of the intermediate rotating shaft is fixed in the middle of the upper surface of the crystal oscillator fixing seat. The crystal oscillator fixing seat has a first through hole for placing the crystal oscillator body inside, and the first through hole serves as a channel for testing the film material. A crystal oscillator three-jaw fixing plate for fixing the crystal oscillator body is slidably connected to the outside of the fixing seat connecting rod, and the crystal oscillator three-jaw fixing plate is located at the upper part of the crystal oscillator fixing seat.

[0008] Preferably, a vertical rod is fixed to the lower outer side of the intermediate rotating shaft, and the lower end of the vertical rod abuts against the upper surface of the crystal oscillator three-jaw fixing plate. A protrusion is installed on the inner side wall of the crystal oscillator three-jaw fixing plate, and the protrusion is engaged and slidably connected with a slot opened on the outer side of the fixing seat connecting rod. A reset spring connected to the protrusion is installed in the slot opened on the outer side of the fixing seat connecting rod.

[0009] Preferably, the lower part of the crystal oscillator body is provided with a probe cap connected to the bottom surface of the water-cooling shaft, and a second through hole is opened inside the probe cap. The crystal oscillator mechanism and the crystal oscillator body are rotated by the intermediate rotating shaft, so that the position of one of the crystal oscillator bodies is completely matched with the second through hole. The coating amount of one of the crystal oscillator bodies is used to monitor the coating thickness of the vacuum evaporation machine in the current state.

[0010] Preferably, a crystal oscillator detection device mounting block is installed on the upper part of the crystal oscillator three-jaw fixing plate, and a third through hole is opened inside the crystal oscillator detection device mounting block. The position of the third through hole corresponds one-to-one with the position of the first through hole, and the detection end of the crystal oscillator detection device is connected to the third through hole.

[0011] Preferably, the inlet of the water-cooling jacket is connected to an inlet pipe, and the outlet of the water-cooling jacket is connected to an outlet pipe. The top of the water-cooling shaft is locked with a protective sleeve fitted on the outside of the intermediate rotating shaft, and the top of the protective sleeve is locked to the bottom of the external adapter. The inlet pipe and the outlet pipe both pass through the interlayer between the protective sleeve and the intermediate rotating shaft and are connected to the external adapter. The external connection end of the crystal oscillator detection device passes through the interlayer between the protective sleeve and the intermediate rotating shaft and is connected to the external crystal oscillator detection mechanism.

[0012] Preferably, the outer side of the water-cooling shaft is fitted with a probe outer cylinder, and the probe outer cylinder extends upward to be connected to the third rotating mechanism. The lower part of the probe outer cylinder is connected to a light control structure for detecting the refractive index or transmittance of the coating on the light control structure. The third rotating mechanism is used to rotate the light control structure, and the bottom of the probe outer cylinder is flush with the probe cap.

[0013] The upper outer side of the first rotating mechanism is connected to the lower end of the shaft of the magnetic fluid through two meshing rotating gears, and the upper end of the shaft of the magnetic fluid is connected to an external driver through a sprocket assembly, forming a multi-stage transmission system to ensure the smooth rotation of the first rotating mechanism. The upper ends of the first rotating mechanism, the second rotating mechanism, the third rotating mechanism, the magnetic fluid and the external adapter are all installed inside the dustproof housing.

[0014] The upper end of the third rotating mechanism forms a rotating structure through the cooperation of two control gears installed inside the dustproof housing and a motor.

[0015] Preferably, the water-cooling jacket is a circular hollow cavity, and the adjustment assembly includes a single-turn reciprocating screw installed inside the water-cooling jacket. A fan blade body is fixed on the upper outer side of the single-turn reciprocating screw, and a water inlet pipe is provided on the left side of the fan blade body. The transverse center line of the water inlet pipe is not on the same horizontal line as the transverse center line of the single-turn reciprocating screw. An annular plate is threaded to the outer side of the single-turn reciprocating screw, and a rotating rod is installed with equally spaced slots on the inner and outer sides of the annular plate. A swing plate is installed on the outer side of the rotating rod, and a spiral spring is nested on the outer side of one end of the rotating rod. A fixed rod is installed inside the water-cooling jacket, and an inclined swing plate is correspondingly provided above the fixed rod. The swing plate forms a reciprocating swing structure through the fixed rod.

[0016] Preferably, the water-cooling jacket has water exchange chambers installed at equal intervals inside, and a piston assembly is fitted inside the water exchange chamber. The upper end of the piston assembly is connected to the bottom surface of the annular plate. A water spray pipe and a water suction pipe are installed through the lower part of the water exchange chamber. The upper end of the "L"-shaped water spray pipe penetrates the interior of the annular plate, and the highest point of the water spray pipe is higher than the highest point of the annular plate.

[0017] Preferably, air-storage airbags are installed at equal intervals on the bottom surface of the annular plate, and the bottom surface of the air-storage airbags is connected to the interior of the water-cooling jacket.

[0018] Compared with the prior art, the beneficial effects of the present invention are: the anti-breakage crystal oscillator system for the vacuum evaporation machine ensures uniform temperature of the cooling water in the water-cooled jacket, thereby improving the cooling effect of the cooling water in the water-cooled jacket, preventing the crystal oscillator body from breaking due to the high temperature environment generated during the operation of the vacuum evaporation machine, and avoiding affecting the manufacturing of electronic special materials by the vacuum evaporation machine. The specific details are as follows:

[0019] (1) The water in the inlet pipe will drive the fan blade body and the single-rotor reciprocating screw to rotate, so that the single-rotor reciprocating screw drives the ring plate to move up and down in a reciprocating manner. At the same time, the fixed rod will make the swing plate swing back and forth, so that the swing plate can stir the water in the water-cooled jacket up and down, making the temperature of the cooling water in the water-cooled jacket uniform, thereby improving the cooling effect of the cooling water in the water-cooled jacket, avoiding the high temperature environment generated when the vacuum evaporation machine is working, which will cause the crystal oscillator body to break, and avoid affecting the manufacturing of electronic special materials by the vacuum evaporation machine.

[0020] (2) Furthermore, the piston assembly moves up and down while the annular plate moves up and down, thus causing the water exchange chamber to intermittently draw water from the bottom of the water-cooled jacket and spray it upward through the water spray pipe, so that the water below and the water above are well mixed, thereby further improving the temperature uniformity of the cooling water in the water-cooled jacket.

[0021] (3) Furthermore, the annular plate reciprocates and squeezes the air storage bag while it is rising and falling, causing the volume of the air storage bag to expand. Therefore, the air storage bag can further agitate the water in the water-cooling jacket, thereby further improving the temperature uniformity of the cooling water in the water-cooling jacket.

[0022] (4) When the vertical rod separates from the crystal oscillator three-jaw fixing plate, the crystal oscillator three-jaw fixing plate is automatically moved upward by the stored force of the reset spring. Therefore, the crystal oscillator three-jaw fixing plate can be automatically released from fixing the crystal oscillator body, which is convenient for the crystal oscillator body to be replaced later. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0024] Figure 2This is a three-dimensional structural diagram of the first rotating mechanism of the present invention;

[0025] Figure 3 This is a cross-sectional view of the first rotating mechanism of the present invention;

[0026] Figure 4 This is a schematic diagram of the water-cooled shaft cross-section structure of the present invention;

[0027] Figure 5 This is a schematic diagram of the water-cooled shaft structure from below in this invention;

[0028] Figure 6 This is a cross-sectional view of the crystal oscillator mechanism of the present invention;

[0029] Figure 7 This is a schematic diagram of the separation structure of the crystal oscillator fixing base and the crystal oscillator three-jaw fixing disk of the present invention;

[0030] Figure 8 This is a schematic diagram of the top sectional view of the water-cooled jacket structure of the present invention;

[0031] Figure 9 This is a schematic diagram of the main cross-sectional structure of the water-cooled jacket of the present invention;

[0032] Figure 10 For the present invention Figure 9 Enlarged structural diagram at point B;

[0033] Figure 11 This is a schematic diagram of the three-dimensional structure of the annular plate of the present invention;

[0034] Figure 12 For the present invention Figure 11 Enlarged structural diagram at point C;

[0035] Figure 13 This is a schematic cross-sectional view of the water exchange chamber of the present invention;

[0036] Figure 14 For the present invention Figure 6 Enlarged structural diagram at point A in the middle.

[0037] In the diagram: 1. First rotating mechanism; 101. Support ring assembly; 2. Second rotating mechanism; 201. Intermediate rotating shaft; 202. Vertical rod; 3. Crystal oscillator mechanism; 301. Crystal oscillator fixing seat; 302. Crystal oscillator three-jaw fixing plate; 303. Fixing seat connecting rod; 304. Crystal oscillator body; 305. First through hole; 306. Probe cap; 307. Second through hole; 308. Protrusion; 309. Return spring; 4. Water-cooling shaft; 401. Water-cooling jacket; 402. Protective sleeve; 403. External adapter; 40 4. Inlet pipe; 405. Outlet pipe; 5. Probe outer cylinder; 6. Third rotating mechanism; 7. Light control structure; 8. Dustproof outer shell; 9. Magnetofluid; 10. Rotary gear; 11. Crystal oscillator detection device mounting block; 111. Third through hole; 12. Annular plate; 121. Rotating rod; 122. Swing plate; 123. Vortex spring; 13. Single-rotation reciprocating screw; 131. Fan blade body; 14. Water exchange chamber; 141. Piston assembly; 142. Water suction pipe; 143. Water spray pipe; 15. Air storage bag; 16. Fixing rod. Detailed Implementation

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] Please see Figures 1-14 The present invention provides the following technical solution:

[0040] Example 1: The anti-breakage crystal oscillator system for the vacuum evaporation machine in this example can further improve the temperature uniformity of the cooling water in the water-cooled jacket 401, thereby improving the cooling effect of the cooling water in the water-cooled jacket 401. This prevents the high-temperature environment generated during the operation of the vacuum evaporation machine from causing the crystal oscillator body 304 to break, thus avoiding affecting the manufacturing of electronic special materials by the vacuum evaporation machine. For the specific structure, please refer to the attached diagram. Figures 1-13As shown, the device includes a first rotating mechanism 1 and a support ring assembly 101 mounted on its lower outer side. A carrier to be coated is connected to the lower inner side of the support ring assembly 101. A second rotating mechanism 2 is fitted inside the cavity of the first rotating mechanism 1. The rotating shaft of the second rotating mechanism 2 is connected to an intermediate rotating shaft 201. A crystal oscillator mechanism 3 is connected to the bottom end of the intermediate rotating shaft 201. A water-cooled shaft 4, located above the crystal oscillator mechanism 3, is fitted on the lower outer side of the intermediate rotating shaft 201. A water-cooled jacket 401 for storing cooling water is provided inside the water-cooled shaft 401. The unit is equipped with an adjustment component. The crystal oscillator mechanism 3 includes a crystal oscillator fixing seat 301. A fixing seat connecting rod 303 for locking and connecting with the bottom end of the intermediate rotating shaft 201 is fixed in the middle of the upper surface of the crystal oscillator fixing seat 301. A first through hole 305 for placing the crystal oscillator body 304 is opened inside the crystal oscillator fixing seat 301. The first through hole 305 serves as a channel for detecting the film material. A crystal oscillator three-jaw fixing plate 302 for fixing the crystal oscillator body 304 is slidably connected to the outside of the fixing seat connecting rod 303. The crystal oscillator three-jaw fixing plate 302 is located on the upper part of the crystal oscillator fixing seat 301.

[0041] The lower part of the crystal oscillator body 304 is provided with a probe cap 306 connected to the bottom surface of the water-cooling shaft 4, and the probe cap 306 has a second through hole 307 inside. The crystal oscillator mechanism 3 and the crystal oscillator body 304 are rotated by the intermediate rotating shaft 201, so that the position of one of the crystal oscillator bodies 304 is completely matched with the second through hole 307. The coating amount of one of the crystal oscillator bodies 304 is used to monitor the coating thickness of the vacuum evaporation machine in the current state. The upper part of the crystal oscillator three-jaw fixing plate 302 is equipped with a crystal oscillator detection device mounting block 11, and the crystal oscillator body 304 is connected to the bottom surface of the water-cooling shaft 4. The vibration detection device mounting block 11 has a third through hole 111 inside, and the position of the third through hole 111 corresponds one-to-one with the position of the first through hole 305. The detection end of the crystal oscillator detection device is connected to the third through hole 111. The water inlet of the water-cooling jacket 401 is connected to the water inlet pipe 404, and the water outlet of the water-cooling jacket 401 is connected to the water outlet pipe 405. The top of the water-cooling shaft 4 is locked with a protective sleeve 402 that is sleeved on the outside of the intermediate rotating shaft 201, and the top of the protective sleeve 402 is locked with the bottom of the external adapter 403. Both pipe 404 and outlet pipe 405 pass through the interlayer between protective sleeve 402 and intermediate rotating shaft 201 and connect to external adapter 403. The external connection end of crystal oscillator detection device passes through the interlayer between protective sleeve 402 and intermediate rotating shaft 201 and connects to external crystal oscillator detection mechanism. A probe outer cylinder 5 is sleeved on the outer side of the water-cooled shaft 4, and the probe outer cylinder 5 extends upward to connect with the third rotating mechanism 6. A light control structure 7 is connected to the lower part of the probe outer cylinder 5 for detecting the refractive index or transmittance of the coating on the light control structure 7. The third rotating... The rotating mechanism 6 is used to rotate the optical control structure 7, and the bottom of the probe outer cylinder 5 is flush with the probe cap 306. The upper outer side of the first rotating mechanism 1 is connected to the lower end of the shaft of the magnetic fluid 9 through two meshing rotating gears 10, and the upper end of the shaft of the magnetic fluid 9 is connected to the external driver through a sprocket assembly to form a multi-stage transmission system to ensure that the first rotating mechanism 1 rotates smoothly. The upper ends of the first rotating mechanism 1, the second rotating mechanism 2, the third rotating mechanism 6, the magnetic fluid 9 and the external adapter 403 are all installed inside the dustproof housing 8.

[0042] The upper end of the third rotating mechanism 6 forms a rotating structure through the cooperation of two control gears and a motor installed inside the dustproof housing 8. The water-cooling jacket 401 is a circular hollow cavity, and the adjustment component includes a single-rotation reciprocating screw 13 installed inside the water-cooling jacket 401. A fan blade body 131 is fixed on the upper outer side of the single-rotation reciprocating screw 13, and a water inlet pipe 404 is provided on the left side of the fan blade body 131. The transverse center line of the water inlet pipe 404 is not on the same transverse center line as the single-rotation reciprocating screw 13. An annular plate 12 is threadedly connected to the outer side of the single-rotation reciprocating screw 13. A rotating rod 121 is installed with equally spaced slots on the inner and outer sides of the annular plate 12. A swing plate 122 is installed on the outer side of the rotating rod 121, and a spiral spring is nested on the outer side of one end of the rotating rod 121. 123. A fixing rod 16 is installed inside the water-cooling jacket 401. A tilted swing plate 122 is correspondingly arranged above the fixing rod 16. The swing plate 122 forms a reciprocating swing structure through the fixing rod 16. Water exchange chambers 14 are installed at equal intervals inside the water-cooling jacket 401. A piston assembly 141 is fitted inside the water exchange chamber 14. The upper end of the piston assembly 141 is connected to the bottom surface of the annular plate 12. A water spray pipe 143 and a water suction pipe 142 are installed through the lower part of the water exchange chamber 14. The upper end of the "L"-shaped water spray pipe 143 penetrates the interior of the annular plate 12. The highest point of the water spray pipe 143 is higher than the highest point of the annular plate 12. Air storage bags 15 are installed at equal intervals on the bottom surface of the annular plate 12. The bottom surface of the air storage bags 15 is connected to the interior of the water-cooling jacket 401.

[0043] The top of the dustproof housing 8 is connected to the top of the vacuum evaporation machine to connect the entire crystal oscillator system to the top of the vacuum evaporation machine. The carrier to be coated is installed inside the support ring assembly 101 below. The crystal oscillator mechanism 3 is placed in the cavity opened in the center of the carrier, and the crystal oscillator mechanism 3 does not interfere with the cavity opened in the center of the carrier. Then the vacuum evaporation machine starts the coating operation. During this process, the external driver drives the magnetofluid 9 to rotate. The magnetofluid 9 drives the first rotating mechanism 1 to rotate through the rotating gear 10. The rotation of the first rotating mechanism 1 drives the support ring assembly 101 and the carrier to rotate. The first through hole 305 serves as a channel for detecting the film material.

[0044] Meanwhile, cooling water is injected into the water-cooled jacket 401 through the water inlet pipe 404, so that the cooling water in the water-cooled jacket 401 cools the crystal oscillator mechanism 3 below. The water in the water inlet pipe 404 drives the fan blade body 131 and the single-rotor reciprocating screw 13 to rotate. When the single-rotor reciprocating screw 13 rotates, it drives the annular plate 12 and the swing plate 122 to reciprocate up and down. When the swing plate 122 descends to contact the upper end of the fixed rod 16 and continues to descend, the fixed rod 16 will cause the swing plate 122 to swing back and forth due to the stored force of the spiral spring 123. Therefore, the swing plate 122 can easily stir the water in the water-cooled jacket 401 up and down. The movement of the ring plate 12 causes the cooling water in the water-cooled jacket 401 to move up and down, thereby improving the cooling effect of the cooling water in the water-cooled jacket 401 and preventing the crystal oscillator body 304 from breaking due to the high temperature environment generated during the operation of the vacuum evaporation machine, thus avoiding affecting the manufacturing of electronic special materials by the vacuum evaporation machine. At the same time, when the ring plate 12 moves up and down, it will drive the piston assembly 141 to move up and down together. Therefore, the water exchange chamber 14 intermittently draws water from the bottom surface of the water-cooled jacket 401 and sprays it upward through the water spray pipe 143, so that the water below and the water above mix well, thereby further improving the temperature uniformity of the cooling water in the water-cooled jacket 401.

[0045] As the annular plate 12 rises and falls, it reciprocates to compress the air storage bladder 15, causing the volume of the air storage bladder 15 to expand. This allows the air storage bladder 15 to further agitate the water in the water-cooling jacket 401, thereby further improving the temperature uniformity of the cooling water in the water-cooling jacket 401.

[0046] Example 2: The anti-breakage crystal oscillator system for the vacuum evaporation machine in this example, based on Example 1, can automatically engage and clamp the crystal oscillator body 304 in subsequent operations. See attached diagram for the specific structure. Figure 6 and attached Figure 14 As shown, a vertical rod 202 is fixed on the lower outer side of the intermediate rotating shaft 201, and the lower end of the vertical rod 202 abuts against the upper surface of the crystal oscillator three-jaw fixing plate 302. A protrusion 308 is installed on the inner side wall of the crystal oscillator three-jaw fixing plate 302, and the protrusion 308 is engaged and slidably connected with the slot opened on the outer side of the fixing seat connecting rod 303. A reset spring 309 connected to the protrusion 308 is installed in the slot opened on the outer side of the fixing seat connecting rod 303.

[0047] When the intermediate rotating shaft 201 is moved upward and separated from the fixed base connecting rod 303, the vertical rod 202 separates from the crystal oscillator fixing base 301. Then, the stored force of the return spring 309 automatically drives the protrusion 308 and the crystal oscillator three-jaw fixing plate 302 to move upward, so that the crystal oscillator three-jaw fixing plate 302 separates from the crystal oscillator body 304. This automatically releases the crystal oscillator three-jaw fixing plate 302 from the crystal oscillator body 304, making it easier to replace the crystal oscillator three-jaw fixing plate 302 later.

[0048] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A kind of anti-break type crystal oscillator system for vacuum evaporation machine, including first rotating mechanism (1) and the support ring assembly (101) being installed in its lower end outside, and the support ring assembly (101) is connected with the carrier to be plated in the lower inside, it is characterized by: The first rotating mechanism (1) is internally sleeved with the second rotating mechanism (2), the rotating shaft of the second rotating mechanism (2) is connected with the intermediate rotating shaft (201), the bottom end of the intermediate rotating shaft (201) is connected with the crystal oscillator mechanism (3), the lower outer side of the intermediate rotating shaft (201) is sleeved with the water-cooling shaft (4) located above the crystal oscillator mechanism (3), the inside of the water-cooling shaft (4) is provided with the water-cooling jacket (401) for storing cooling water, the inside of the water-cooling jacket (401) is mounted with the position adjusting assembly, the water-cooling jacket (401) is a circular hollow chamber, and the position adjusting assembly comprises the single-rotation reciprocating screw rod (13) mounted in the inside of the water-cooling jacket (401), the upper outer side of the single-rotation reciprocating screw rod (13) is fixedly provided with the fan blade body (131), the left side of the fan blade body (131) is provided with the water inlet pipe (404), the transverse center line of the water inlet pipe (404) and the transverse center line of the single-rotation reciprocating screw rod (13) are not on the same horizontal line, the outer side of the single-rotation reciprocating screw rod (13) is threadedly connected with the annular plate (12), the inner side and the outer side of the annular plate (12) are both equally spacedly provided with the rotating rod (121) installed through grooves, the outer side of the rotating rod (121) is mounted with the swing plate (122), one end of the rotating rod (121) is externally connected with the vortex spring (123), the inside of the water-cooling jacket (401) is mounted with the fixing rod (16), the upper side of the fixing rod (16) is correspondingly provided with the swing plate (122) in an inclined shape, the swing plate (122) forms a reciprocating swing structure through the fixing rod (16), the inside of the water-cooling jacket (401) is equally spacedly mounted with the water replacement cavity (14), the inside of the water replacement cavity (14) is connected with the piston assembly (141) in a close fit manner, the upper end of the piston assembly (141) is connected with the bottom surface of the annular plate (12), the lower inside of the water replacement cavity (14) is mounted with the water injection pipe (143) and the water suction pipe (142) in a penetrating manner, the upper end of the water injection pipe (143) in an "L" shape penetrates the inside of the annular plate (12), the highest point of the water injection pipe (143) is higher than the highest point of the annular plate (12), the bottom surface of the annular plate (12) is equally spacedly mounted with the gas storage air bag (15), and the bottom surface of the gas storage air bag (15) is connected with the inside of the water-cooling jacket (401).

2. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 1, wherein: The crystal oscillator mechanism (3) comprises a crystal oscillator fixing seat (301), the upper surface of the crystal oscillator fixing seat (301) is fixedly provided with a fixing seat connecting rod (303) for locking connection with the bottom end of the intermediate rotating shaft (201), the inside of the crystal oscillator fixing seat (301) is provided with a first through hole (305) for placing a crystal oscillator body (304), the first through hole (305) serves as a channel for detecting film materials, the outer side of the fixing seat connecting rod (303) is slidably connected with a crystal oscillator three-claw fixing disc (302) for fixing the crystal oscillator body (304), and the crystal oscillator three-claw fixing disc (302) is located at the upper portion of the crystal oscillator fixing seat (301).

3. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 2, wherein: The lower outer side of the intermediate rotating shaft (201) is fixed with a vertical rod (202), the lower end of the vertical rod (202) is in abutting contact with the upper surface of the crystal vibration three-jaw fixing disc (302), the inner side wall of the crystal vibration three-jaw fixing disc (302) is provided with a protrusion (308), the protrusion (308) is in sliding connection with the groove provided on the outer side of the fixed seat connecting rod (303), and the groove provided on the outer side of the fixed seat connecting rod (303) is provided with a reset spring (309) connected with the protrusion (308).

4. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 3, wherein: The lower part of the crystal vibration piece body (304) is provided with a probe cover cap (306) connected with the bottom surface of the water-cooled shaft (4), the inner part of the probe cover cap (306) is provided with a second through hole (307), the crystal vibration piece mechanism (3) and the crystal vibration piece body (304) are driven to rotate by the intermediate rotating shaft (201), so that one of the crystal vibration piece bodies (304) is completely matched with the position of the second through hole (307), and the coating thickness of the vacuum evaporation machine under the current state is monitored by the coating amount of the crystal vibration piece body (304).

5. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 4, wherein: The upper part of the crystal vibration three-jaw fixing disc (302) is provided with a crystal vibration detection device mounting block (11), the inner part of the crystal vibration detection device mounting block (11) is provided with a third through hole (111), the position of the third through hole (111) is one-to-one corresponding with the position of the first through hole (305), and the third through hole (111) is connected with the detection end of the crystal vibration detection device.

6. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 5, wherein: The water inlet of the water-cooled jacket (401) is connected with a water inlet pipe (404), the water outlet of the water-cooled jacket (401) is connected with a water outlet pipe (405), the top of the water-cooled shaft (4) is locked with a protective sleeve (402) sleeved on the outer side of the intermediate rotating shaft (201), the top of the protective sleeve (402) is locked with the bottom of the external switching device (403), the water inlet pipe (404) and the water outlet pipe (405) are connected with the external switching device (403) through the interlayer between the protective sleeve (402) and the intermediate rotating shaft (201), and the external connection end of the crystal vibration detection device is connected with the external crystal vibration detection mechanism through the interlayer between the protective sleeve (402) and the intermediate rotating shaft (201).

7. The anti-break crystal oscillator system for a vacuum deposition machine according to claim 6, wherein: The outer side of the water-cooled shaft (4) is sleeved with a probe outer cylinder (5), the probe outer cylinder (5) extends upward to be connected with a third rotating mechanism (6), the lower part of the probe outer cylinder (5) is connected with a light control structure (7), the refractive index or light transmittance of the coating on the light control structure (7) is detected, the third rotating mechanism (6) is used for rotating the light control structure (7), and the bottom of the probe outer cylinder (5) is flush with the probe cover cap (306). The upper end outer side of the first rotating mechanism (1) is connected with the lower end of the shaft of the magnetic fluid (9) through two rotating gears (10) connected with each other in engagement, and the upper end of the shaft of the magnetic fluid (9) is connected with an external driver through a chain wheel assembly, forming a multi-stage transmission system, ensuring that the first rotating mechanism (1) rotates stably, and the upper ends of the first rotating mechanism (1), the second rotating mechanism (2), the third rotating mechanism (6), the magnetic fluid (9) and the external adapter device (403) all penetrate into the inside of the dustproof outer shell (8); The upper end of the third rotating mechanism (6) is connected with the motor through two control gears installed in the dustproof outer shell (8) to form a rotating structure.

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