Liquid source bottle and control method thereof

Abstract

The invention provides a liquid source bottle and a control method of the liquid source bottle. The liquid source bottle comprises a bottle body, an inner container with an opening and a controller. The inner container is movably fixed in the bottle body and divides the space in the bottle body into a first space and a second space which are independent from each other, the first space is formed between the inner side of the inner container and the bottle body, and the second space is formed between the outer side of the inner container and the bottle body; the first space is used for storing a liquid source and a gaseous source; the second space is used for storing compressed gas so as to support the inner container; the controller is used for controlling the storage amount of the compressed gas in the second space, so that the size of the first space changes along with the change of the size of the second space, and the horizontal height of the gas source is within a preset height range along with the change of the size of the first space. Therefore, in the continuous source consumption process, the volume of the gaseous source is kept unchanged, so that the uniformity and stability of chemical deposition are ensured, and the process performance is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a liquid source bottle and a control method of the liquid source bottle. BACKGROUND

[0002] With the continuous progress of scientific and technological productivity, the degree of informatization and intelligentization of the whole society is getting higher and higher, and the demand for semiconductors is getting more and more vigorous, and thus the demand for semiconductor process equipment is also getting more and more vigorous. Among them, metal-organic chemical vapor deposition (MOCVD) as an indispensable technology in semiconductor process deposition uniformity is an important factor to maintain process performance. Therefore, how to ensure the uniformity of deposition is a problem to be solved. SUMMARY

[0003] Therefore, the present application is committed to providing a liquid source bottle and a control method of the liquid source bottle, which can ensure the uniformity of deposition and improve the process performance.

[0004] In a first aspect, the present application provides a liquid source bottle, comprising: a bottle body, an inner container with an open mouth, and a controller;

[0005] The inner container is movably fixed in the bottle body, and the inner container divides the space in the bottle body into a first space and a second space which are independent of each other, the first space is formed between the inner side of the inner container and the bottle body, and the second space is formed between the outer side of the inner container and the bottle body; the first space is used for storing a liquid source and a gaseous source; the second space is used for storing compressed gas to support the inner container;

[0006] The controller is used for controlling the storage amount of compressed gas in the second space, so that the size of the first space changes with the size of the second space, and the horizontal height of the gaseous source is within a preset height range with the change of the size of the first space.

[0007] Optionally, the bottle body comprises a first bottle body and a second bottle body; the first bottle body and the second bottle body are detachably connected;

[0008] The first bottle body is movably connected with the inner container, and the first space is formed between the inner side of the first bottle body and the inner side of the inner container;

[0009] The second bottle body is movably connected with the inner container, and the second space is formed between the inner side of the second bottle body and the outer side of the inner container.

[0010] Optionally, it further comprises a first movable assembly;

[0011] The first bottle body is movably connected with the inner container through the first movable assembly.

[0012] Optionally, the sealing member is further included.

[0013] The sealing member is arranged on the first movable assembly and is used to isolate the first space from the second space.

[0014] Optionally, the first bottle body is provided with an air inlet and an air outlet; the air inlet is used to introduce carrier gas into the first space, so that the gaseous source in the first space is output through the air outlet.

[0015] The second bottle body is provided with an air charging port and an air exhaust port; the air charging port is used to connect an air charging device, so that external compressed gas is charged into the second space through the air charging port; the air exhaust port is used to connect an air exhaust device, so that the compressed gas in the second space flows out through the air exhaust port.

[0016] Optionally, a first control assembly arranged on the air charging port and a second control assembly arranged on the air exhaust port are further included.

[0017] The first control assembly is used to adjust the opening degree under the control of the controller, so as to control the gas flow charged into the second space through the air charging port, so that the horizontal height of the gaseous source is within a preset height range.

[0018] The second control assembly is used to adjust the opening degree under the control of the controller, so as to control the gas flow exhausted from the second space through the air exhaust port, so that the horizontal height of the gaseous source is within a preset height range.

[0019] Optionally, a liquid level meter and / or a range finder arranged in the inner container are further included.

[0020] The liquid level meter is used to measure the horizontal height of the liquid source in the inner container and feed back to the controller.

[0021] The controller is further used to issue a prompt information when the horizontal height of the liquid source is lower than a minimum use height.

[0022] The range finder is used to measure the horizontal height of the gaseous source in the inner container and feed back to the controller.

[0023] Optionally, a guide device arranged between the second bottle body and the inner container is further included.

[0024] The guide device is used to guide the inner container to move along a direction perpendicular to the horizontal plane when moving.

[0025] In a second aspect, the application further provides a control method of a liquid source bottle, applied to a controller of the liquid source bottle as described in the first aspect of the application, and the method comprises:

[0026] acquiring a level of the gaseous source in the liquid source bottle and detecting whether the level of the gaseous source is within a preset level range;

[0027] if the level of the gaseous source is not within the preset level range, controlling a storage amount of compressed gas in a second space of the liquid source bottle, so that a size of a first space of the liquid source bottle changes with a size of the second space to make the level of the gaseous source within the preset level range.

[0028] Optionally, the control of the storage amount of the compressed gas in the second space of the liquid source bottle comprises:

[0029] if the level of the gaseous source is lower than the preset level range, controlling an opening degree of a second control component in the liquid source bottle to make the compressed gas in the second space flow out, and when the level of the gaseous source is within the preset level range, controlling the second control component to be closed;

[0030] if the level of the gaseous source is higher than the preset level range, controlling an opening degree of a first control component in the liquid source bottle to make external compressed gas fill into the second space, and when the level of the gaseous source is within the preset level range, controlling the first control component to be closed.

[0031] Optionally, before the control of the storage amount of the compressed gas in the second space of the liquid source bottle, the method further comprises:

[0032] acquiring a level of the liquid source in the liquid source bottle and detecting whether the level of the liquid source is lower than a minimum use level;

[0033] if the level of the liquid source is lower than the minimum use level, issuing a prompt information to prompt that the liquid source is insufficient;

[0034] if the level of the liquid source is not lower than the minimum use level, continuing to execute the step of controlling the storage amount of the compressed gas in the second space of the liquid source bottle.

[0035] Optionally, when the level of the gaseous source is within the preset level range, a corresponding relationship between a change amount of the level of the liquid source and a change amount of the amount of substance of the compressed gas comprises:

[0036] △n = - ρ2g△H2 2 S / RT

[0037] wherein, Δn is the change of the amount of substance of the compressed gas, ΔH2 is the change of the level of the liquid source, ρ2 is the density of the liquid source, S is the surface area of the inner container close to the compressed gas, R is the molar gas constant, T is the temperature of the compressed gas, and g is the acceleration of gravity.

[0038] In the solution of the present application, a liquid source bottle is provided, comprising: a bottle body, an inner container with an open mouth, and a controller; the inner container is movably fixed in the bottle body, and the inner container divides the space in the bottle body into a first space and a second space which are independent of each other, the inner side of the inner container and the bottle body form the first space, and the outer side of the inner container and the bottle body form the second space; the first space is used for storing a liquid source and a gaseous source; the second space is used for storing compressed gas to support the inner container; the controller is used for controlling the storage amount of the compressed gas in the second space, so that the size of the first space changes with the size of the second space, and the level of the gaseous source is within a preset height range as the size of the first space changes. In this way, the level of the gaseous source can be adjusted by controlling the movement of the inner container in the bottle body, ensuring that the level of the gaseous source is within the preset height range, i.e., the volume of the gaseous source is maintained constant, thereby ensuring that the output amount of the gaseous source remains stable during continuous consumption of the source, and further ensuring the uniformity and stability of deposition, and improving the process performance. BRIEF DESCRIPTION OF DRAWINGS

[0039] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description of embodiments of the present application taken in conjunction with the accompanying drawings. The drawings provided in the present application are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification, and are used to explain the present application together with the embodiments of the present application, but do not constitute a limitation on the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0040] Figure 1 is a structural schematic diagram of an existing source bottle;

[0041] Figure 2 is a structural schematic diagram of an existing source bottle in another state;

[0042] Figure 3 is a structural schematic diagram of a liquid source bottle provided by an embodiment of the present application;

[0043] Figure 4 is a structural schematic diagram of a liquid source bottle provided by another embodiment of the present application;

[0044] Figure 5 is a structural schematic diagram of a liquid source bottle provided by another embodiment of the present application;

[0045] Figure 6is a structural diagram of a liquid source bottle provided by another embodiment of the present application;

[0046] Figure 7 is a flow chart of a control method of a liquid source bottle provided by an embodiment of the present application;

[0047] Figure 8 is a signaling flow chart of a control method of a liquid source bottle provided by an embodiment of the present application;

[0048] Figure 9 is a structural diagram of a controller of a liquid source bottle provided by an embodiment of the present application. DETAILED DESCRIPTION

[0049] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative effort fall within the protection scope of the present application.

[0050] MOCVD is a new technology for preparing compound semiconductor thin sheet single crystal, which performs vapor deposition on the surface of a wafer in a thermal decomposition reaction mode to grow thin layer single crystal materials of various compound semiconductors and their multi-component solid solutions. In the MOCVD process, liquid metal organic compounds are stored in a source bottle as precursors of a CVD reaction, and a certain amount of gaseous source is evaporated from the surface of the liquid source. By introducing an inert gas with a certain flow rate and pressure into the source bottle as a carrier gas, the gaseous metal organic compounds (gaseous source) evaporated from the source bottle can be carried out of the source bottle. This blowing-out mode is called a vapor draw mode. The carrier gas carrying the gaseous source passes through a series of process gas pipelines and finally reaches a process chamber, where a thermal decomposition reaction occurs on the surface of the wafer and a certain thickness of a thin film is grown.

[0051] Figure 1 The structural diagram of the existing source bottle is shown, and the source bottle is a one-piece. Among them, a is the gas inlet, b is the gas outlet, c is the carrier gas inlet, d is the carrier gas carrying source outlet, e is the liquid source, f is the gaseous source evaporated from the surface of the liquid source, g is the gas flow direction in the source bottle, and h is the filling port of the source bottle. In the MOCVD process, the carrier gas can carry the gaseous source evaporated from the source bottle out of the source bottle and participate in the growth reaction of the metal film on the surface of the wafer.

[0052] The inventor has found that according to the principle of liquid evaporation, the vapor evaporated from a liquid in a closed space at a certain temperature will not increase all the time, but will reach a gas-liquid equilibrium state after reaching a saturated vapor pressure. Therefore, in a constant-temperature space, for a specific liquid, the amount of vapor is only related to the volume of vapor. For MOCVD reaction, the temperature set for the source bottle during the entire life cycle of the process is kept constant. However, as the process proceeds, as shown in Figure 2 , the amount of liquid source e in the source bottle will gradually decrease, while the volume of the source bottle remains unchanged, which will cause the volume occupied by the vapor in the source bottle to gradually increase, that is, the amount of gaseous source f in the source bottle will gradually increase. Therefore, during the continuous consumption of the source, the amount of gaseous source taken out later is more, which will cause the thickness of the film deposited in the later period of the entire process cycle to gradually increase, thereby causing uneven deposition and poor process performance.

[0053] Therefore, embodiments of the present application provide a liquid source bottle, as shown in Figure 3 , which can at least include a bottle body P, an inner container 8 with an open mouth, and a controller.

[0054] The inner container 8 is movably fixed in the bottle body P, and the inner container 8 divides the space in the bottle body P into a first space and a second space independent of each other.

[0055] Specifically, the inner side of the inner container 8 and the bottle body P form the first space, which is used to store the liquid source 13 and the gaseous source 12; the outer side of the inner container 8 and the bottle body P form the second space, which is used to store compressed gas 7 to support the inner container 8.

[0056] The controller is used to control the storage amount of the compressed gas 7 in the second space, so that the size of the first space changes with the size of the second space, and the level of the gaseous source 12 is within a preset height range with the change of the size of the first space.

[0057] The volume of the gaseous source within the preset height range is within a preset volume range.

[0058] In implementation, the initial height of the gaseous source can be taken as the reference height, and the initial volume of the gaseous source can be taken as the reference volume. An error range of the reference volume is set, and the amount of the gaseous source output with the carrier gas remains constant within the error range of the reference volume. The error range of the reference volume is determined as the preset volume range, and the height range corresponding to the preset volume range is determined as the preset height range. In this way, the level of the gaseous source is within the preset height range, which indicates that the volume of the gaseous source is within the preset volume range, thereby ensuring the constant amount of the gaseous source output and ensuring the uniformity of deposition. In application, the preset height range can be set according to actual needs, which is not limited here.

[0059] Specifically, in the fixed space in the bottle body P, the inner container 8 is arranged, which divides the fixed space in the bottle body P into two layers, the upper layer is the first space, that is, the space between the inner side of the inner container 8 and the bottle body P; the lower layer is the second space, that is, the space between the outer side of the inner container 8 and the bottle body P. The compressed gas 7 is stored in the second space, and the inner container 8 is in force balance by the support force provided by the compressed gas 7 stored in the second space, that is, the inner container 8 is movably connected with the bottle body P inside the bottle body P, and the height (i.e. the height of the inner container 8 relative to the bottom of the bottle body P) is affected by the compressed gas 7 stored in the second space and changes with the size of the second space supported by the compressed gas 7.

[0060] During the process, the source is continuously consumed, that is, the liquid source is continuously reduced, and the force balance of the support force provided by the compressed gas 7 stored in the second space will be broken, the height of the inner container 8 will change, and the size of the first space will change, and accordingly, the horizontal height of the gaseous source 12 will also change. In order to ensure that the horizontal height of the gaseous source 12 continues to be within the preset height range, the size of the second space needs to be adjusted, and accordingly, when the size of the second space changes, the height of the inner container 8 changes, and the first space also changes, so as to realize the adjustment of the horizontal height of the gaseous source 12, that is, the adjustment of the volume of the gaseous source 12, to ensure that the horizontal height of the gaseous source 12 is within the preset height range, that is, the volume of the gaseous source remains constant. In this way, during the continuous consumption of the source, the volume of the gaseous source 12 remains unchanged, and the amount of carrier gas output also remains stable, thereby ensuring the uniformity and stability of chemical deposition and improving the process performance.

[0061] For example, a certain amount of compressed gas is stored in the second space, and at this time the height of the inner container remains at A. When it is necessary to increase the height of the inner container 8, a part of the compressed gas can be extracted from the second space, so that the height of the inner container 8 is increased.

[0062] In some embodiments, still as Figure 3 shown, the bottle body P can include a first bottle body 1 and a second bottle body 2; the first bottle body 1 and the second bottle body 2 are detachably connected.

[0063] Among them, the first bottle body 1 is movably connected with the inner container 8, and the first space is formed between the inner side of the first bottle body 1 and the inner side of the inner container 8; the second bottle body 2 is movably connected with the inner container 8, and the second space is formed between the inner side of the second bottle body 2 and the outer side of the inner container 8.

[0064] In implementation, the first bottle body 1 and the second bottle body 2 can be fixed components, and the two can be connected by screws. The inner container 8 is a movable component, and the inner container 8 is movably connected with the first bottle body 1, and the size of the first space can be adjusted by the movement of the inner container 8; the inner container 8 is movably connected with the second bottle body 2, and the size of the second space can also be adjusted by the movement of the inner container 8. In this way, the inner container 8 is arranged between the first bottle body 1 and the second bottle body 2, and the fixed space in the bottle formed by the first bottle body 1 and the second bottle body 2 can be divided into the first space and the second space. When the inner container 8 moves in the bottle P, the size of the second space changes, and the size of the first space changes with the change of the size of the second space. In this way, structural guarantee is provided for keeping the volume of the gaseous source 12 in the first space unchanged.

[0065] In addition, the first bottle body 1 and the second bottle body 2 can be detachably connected, so that when the bottle P needs to be supplemented or replaced with a liquid source, the first bottle body 1 and the second bottle body 2 can be disassembled, and the inner container 8 can be directly taken out for supplementing or cleaning the liquid source, thereby greatly facilitating the supplement of the liquid source and the independent cleaning of the bottle and the inner container.

[0066] In some embodiments, as shown in Figure 4 and Figure 5 , the liquid source bottle can further include a first movable assembly 3, and the first bottle body 1 is movably connected with the inner container 8 through the first movable assembly 3.

[0067] Specifically, the first movable assembly 3 can include a bellows. The setting direction of the bellows is consistent with the movement direction of the inner container, and the two ends of the bellows are fixed on the first bottle body and the inner container respectively, and the outer side of the bellows is attached to the inner side wall of the second bottle body 2, so that the inner container 8 and the first bottle body 1 are movably connected through the bellows, thereby facilitating the adjustment of the size of the first space, ensuring that the change of the volume of the liquid source will not cause the change of the volume of the gaseous source, and ensuring that the volume of the gaseous source remains constant.

[0068] Of course, the present application only takes the bellows as an example for the first movable assembly 3, but the present application is not limited thereto, and in some other embodiments, the first movable assembly 3 can also be other movable components, such as a spring tube, etc.

[0069] In some embodiments, as shown in Figure 4 and Figure 5 , the liquid source bottle can further include a sealing member 4. The sealing member 4 is arranged on the first movable assembly 3 and is used to isolate the first space from the second space.

[0070] In implementation, the sealing member 4 can be an O-ring, and the number of O-rings can be at least one. The at least one O-ring is sleeved on the first movable assembly 3, which can increase the sealing between the first movable assembly 3 and the second bottle body 2, avoid the compressed gas in the second space from contacting the gaseous source in the first space, and affect the output of the gaseous source from the liquid source bottle.

[0071] Preferably, when the first movable assembly 3 is a bellows, the number of O-rings can be two, and the two O-rings are sleeved on the two end sides of the bellows, respectively, to ensure the isolation between the first space and the second space.

[0072] It should be noted that when the inner container 8 is movable, the outer side wall of the inner container 8 will have friction with the inner side wall of the second bottle body 2 due to the adhesion of the inner side wall of the second bottle body 2. In order to ensure the flexibility of the inner container and meet the high cleanliness requirement of the process, the roughness of the outer side of the inner container 2 and the inner side of the bottle body P (the inner side of the first bottle body 1 and the inner side of the second bottle body 2) can be set below a preset roughness.

[0073] The preset roughness can be set according to actual requirements, which is not limited here. For example, the preset roughness can be 0.2.

[0074] In some embodiments, as shown in Figure 4 The liquid source bottle can further include a guide device 5 arranged between the second bottle body 2 and the inner container 8. The guide device 5 is used to guide the inner container 8 to move in a direction perpendicular to the horizontal plane when the inner container 8 is movable.

[0075] In application, the guide device 5 can include a guide column, which provides a guide function for the movement of the inner container 8. In arrangement, the guide column can be threadedly connected with the second bottle body 2, or pressed into the second bottle body 2 in the form of a positioning pin to realize the connection with the second bottle body 2.

[0076] Similarly, the present application only takes the guide device 5 including a guide column as an example for description, but the present application is not limited thereto. In some other embodiments, the guide device 5 can also be other devices with a guide function.

[0077] In some embodiments, as shown in Figure 4 The first bottle body 1 can be provided with an air inlet 11 and an air outlet 14. The air inlet 11 is used to introduce carrier gas into the first space, so that the gaseous source 12 in the first space can be output through the air outlet 14, to ensure the smooth progress of chemical vapor deposition.

[0078] In implementation, the air inlet port of the air inlet 11 can be used to connect a carrier gas input device, and the air outlet 14 can be used to connect a process gas pipeline, so that the output gaseous source 12 can enter the process chamber.

[0079] In order to ensure that the carrier gas can carry a sufficient amount of gaseous source, the gas outlet of the gas inlet 11 can be deep into the liquid source 13 of the inner container 8, so that the carrier gas first enters the liquid source 13 and then enters the gaseous source 12 from the liquid source 13, thereby ensuring that the input carrier gas and the gaseous source 12 can be fully mixed, and the uniformity of the output of the gaseous source 12 is improved.

[0080] In addition, the center distance of the gas inlet 11 and the gas outlet 14 in the horizontal direction can be greater than or equal to a preset distance, thereby further improving the uniformity of the content of the gaseous source in the output carrier gas.

[0081] The preset distance can be set according to the actual size of the liquid source bottle and the demand, which is not limited here. For example, the center distance of the gas inlet and the gas outlet in the horizontal direction can be greater than or equal to 40 mm.

[0082] In some embodiments, as shown in Figure 4 The second bottle body 2 can be provided with a gas extraction port 6-a and a gas filling port 6-b.

[0083] The gas filling port 6-b is used to connect a gas filling device to fill compressed gas into the second space through the gas filling port 6-b; and the gas extraction port 6-a is used to connect a gas extraction device to flow out the compressed gas in the second space through the gas extraction port 6-a.

[0084] By filling the compressed gas through the gas filling port 6-b and extracting the compressed gas through the gas extraction port 6-a, the storage amount of the compressed gas 7 in the second space can be changed, and then the size of the first space can be adjusted. In this way, during the continuous consumption of the source, as the volume of the liquid source 13 becomes smaller, the size of the first space can be adaptively reduced by adjusting the storage amount of the compressed gas 7 in the second space, thereby ensuring that the volume of the gaseous source 12 remains within a preset volume range.

[0085] In order to facilitate the control of the amount of compressed gas 7 filled into and extracted from the second space, in some embodiments, as shown in Figure 4 The liquid source bottle can further include a first control assembly 6-2 arranged at the gas filling port 6-b and a second control assembly 6-1 arranged at the gas extraction port 6-a; the first control assembly 6-2 is used to adjust the opening degree under the control of the controller to control the gas flow rate filled into the second space through the gas filling port 6-b, so that the horizontal height of the gaseous source 12 is within a preset height range; and the second control assembly 6-1 is used to adjust the opening degree under the control of the controller to control the gas flow rate extracted from the second space through the gas extraction port 6-a, so that the height of the gaseous source 12 is within a preset height range.

[0086] As shown in Figure 6The initial state of the liquid source bottle is shown, wherein the gaseous source 12 has a height H1 and a pressure P1. The liquid source 13 has a height H2 and a density p2. The inner container 8 has a height H3 and a density p3. The compressed gas has a height H4 and a pressure P4. The lower surface area (the surface area of the side of the inner container close to the compressed gas) and the upper surface area of the inner container 8 are both S, and the gravity of the inner container can be considered as p3gH3S.

[0087] Thus, when the inner container 8 is in a static state, the upper and lower surface forces of the inner container 8 are equal, and the formula is:

[0088] P1S+ p2gH2S+ p3gH3S= P4S (1)

[0089] That is,

[0090] P4= P1+ p2gH2+ p3gH3 (2)

[0091] At this time, as long as the first control group 6-2 and the second control group 6-1 are closed, the compressed gas is sealed, and the height of the gaseous source can be maintained, that is, the height of the gaseous source is within the preset height range.

[0092] The ideal gas state equation is:

[0093] PV= nRT (3)

[0094] Wherein, P is the pressure, V is the volume of the gas, T is the temperature, n is the amount of substance of the gas, and R is the molar gas constant.

[0095] The ideal gas state equation of the compressed gas is:

[0096] P4H4S= nRT (4)

[0097] The process starts, the liquid source is consumed, the height H2 decreases by AH2, at this time the height H4 of the compressed gas needs to increase AH2 to ensure that the height H1 of the gaseous source is unchanged, that is, the amount of the gaseous source is unchanged.

[0098] At this time, the pressure of the compressed gas becomes:

[0099] P4= P1+ p2g(H2- AH2)+ p3gH3 (5)

[0100] The gas state equation of the compressed gas becomes:

[0101] [P1+ p2g(H2- AH2)+ p3gH3][H4+ AH2]S= (n+ An)RT (6)

[0102] An is the amount of substance of the change of the compressed gas.

[0103] According to the above formula (6)-(4) can be obtained:

[0104] [P1△H2+ρ2g(H2△H2-H4△H2-△H2 2 )+ρ3gH3△H2]S=△nRT (7)

[0105] That is:

[0106] △H2[P1+ρ2g(H2-H4-△H2)+ρ3g H3]=△nRT / S (8)

[0107] Because△H2is a small amount, let

[0108] P1+ρ2g(H2-H4)+ρ3gH3=0 (9)

[0109] Can be derived from the initial state:

[0110] H4=P1 / ρ2g+H2+H3ρ3 / ρ2 (10)

[0111] At this time, the change amount△H2of the horizontal height of the liquid source and the change amount△n of the amount of substance of the compressed gas include:

[0112] △n=-ρ2g△H2 2 S / RT (11)

[0113] Let k=ρ2gS / RT, k is a constant, then

[0114] △n=-k△H2 2 (12)

[0115] Thus it can be determined that the amount of compressed gas△n is inversely proportional to the square of△H2. When the liquid level of the liquid source decreases△H2, the amount of substance of the compressed gas is extracted k△H2 2 , which can ensure that the inner container is lifted△H2, ensure that the height of the gaseous source is unchanged, so as to ensure that the horizontal height of the gaseous source is maintained within the preset height range.

[0116] If the liquid level of the liquid source drops without extracting gas:△H2> 0,△n=0, we can get:

[0117] (P4+△P4)(H4+△H4)S=nRT (13)

[0118] From formula (12)-(4)=0, we can simplify to:

[0119] △H4=-△P4 H4 / (P4+△P4) (14)

[0120] And

[0121] AP4 = -p2gAH2 (15)

[0122] Therefore, we can get:

[0123]

[0124] At this time, AH4 > AH2, the rising amount of the inner container is greater than the decreasing amount of the liquid level of the liquid source, the height H1 of the gaseous source becomes smaller, and therefore a certain amount of compressed gas needs to be discharged.

[0125] Therefore, when the controller detects that the liquid level of the liquid source 13 decreases by AH2, the opening of the second control component 6-1 can be controlled to extract compressed gas 7 from the second space through the air extraction port 6-a, and the extracted amount is kAH2 2 , i.e., the amount of substance, so as to ensure that the inner container 8 is lifted by AH2, and the height of the gaseous source 12 remains unchanged, i.e., the volume of the gaseous source 12 remains unchanged. Similarly, when the excess compressed gas 7 is extracted from the second space through the air extraction port 6-a, the opening of the first control component 6-2 needs to be adjusted, so that the external compressed gas is filled into the second space through the air filling port 6-b, thereby making up for the excess compressed gas extracted from the second space, and ensuring that the height of the gaseous source 12 remains unchanged, i.e., the volume of the gaseous source 12 remains constant.

[0126] Specifically, the control of the controller on the first control component 6-2 and the second control component 6-1 can be determined based on the above formulas (1)-(16) combined with the actual application scenario, which will not be described here.

[0127] In some embodiments, the first control component 6-2 can include a first mass flow meter, and the second control component 6-1 can include a second mass flow meter.

[0128] In implementation, the first mass flow meter 6-2 and the second mass flow meter 6-1 can be the same mass flow meter. Using a mass flow meter to control the filling and extraction of compressed gas in the second space can more conveniently control the amount of filled and extracted compressed gas, thereby more accurately controlling the horizontal height of the gaseous source within the preset height range.

[0129] Since the horizontal height of the liquid source 13 in the inner container 8 needs to be monitored in real time, so as to timely respond to the change in the size of the first space during the continuous consumption of the source, in some embodiments, as shown in Figure 4 the liquid source bottle can further include a liquid level meter 10 arranged in the inner container 8. The liquid level meter 10 can be used to measure the horizontal height of the liquid source 7 in the inner container 8 and feed back to the controller, so that the controller can timely obtain the horizontal height of the liquid source 7, thereby ensuring that the change in the size of the first space is timely adjusted, and the horizontal height of the gaseous source 12 is within the preset height range.

[0130] Meanwhile, the controller can also be configured to send a prompt when the liquid source is below the minimum use level.

[0131] If the liquid source is below the minimum use level, it means that the amount of liquid source in the liquid source bottle is insufficient, and the liquid source needs to be filled to maintain the normal use of the liquid source bottle. The specific value of the minimum use level can be set according to actual use requirements, which is not limited here.

[0132] Similarly, in order to further ensure that the level of the gaseous source in the liquid source bottle is within the preset height range, in some embodiments, as shown in Figure 4 The liquid source bottle can also include a range finder 9 disposed in the inner container 8; the range finder 9 is used to measure the level of the gaseous source 12 in the inner container 8 and feed back to the controller.

[0133] In implementation, the controller can determine whether the level of the gaseous source 12 has changed according to the obtained level of the gaseous source 12. Once it is detected that the level of the gaseous source has changed, and the changed level of the gaseous source is not within the preset height range, it means that the volume of the gaseous source has changed significantly and affected the amount of gaseous source output with the carrier gas. Therefore, the amount of compressed gas 7 in the second space needs to be adjusted to adjust the size of the second space, so that the size of the first space changes with the size of the second space, and then the level of the gaseous source changes with the size of the first space to adjust the level of the gaseous source within the preset height range, thereby ensuring the uniformity of the output amount of the gaseous source.

[0134] As another optional implementation of the disclosure, the embodiments of the present application also provide a control method of a liquid source bottle, which is applied to the controller of the liquid source bottle as described in any of the above embodiments. Specifically, as shown in Figure 7 The control method of the liquid source bottle can include the following steps:

[0135] S701, obtaining the level of the gaseous source in the liquid source bottle and detecting whether the level of the gaseous source is within the preset height range.

[0136] S702, if the level of the gaseous source is not within the preset height range, controlling the storage amount of the compressed gas in the second space of the liquid source bottle, so that the size of the first space of the liquid source bottle changes with the size of the second space to make the level of the gaseous source within the preset height range.

[0137] The volume of the gaseous source within the preset height range is within the preset volume range.

[0138] In the embodiments of the present application, the height of the gaseous source in the liquid source bottle is first acquired, and it is detected whether the height of the gaseous source is in the preset height range, thereby providing a basis for judging whether the volume of the gaseous source is in the preset volume range. If the height of the gaseous source is not in the preset height range, it indicates that the volume of the gaseous source has changed greatly, and such change has affected the amount of the gaseous source output with the carrier gas. Therefore, the storage amount of the compressed gas in the second space of the liquid source bottle can be controlled, so that the size of the first space of the liquid source bottle changes with the size of the second space, and the height of the gaseous source changes with the size of the first space and is in the preset height range. In this way, by controlling the storage amount of the compressed gas in the second space, the height of the gaseous source can be adjusted, that is, the volume of the gaseous source can be adjusted, and the uniformity of the amount of the gaseous source output with the carrier gas in the process of continuous consumption of the source is ensured, thereby improving the process performance.

[0139] In some embodiments, when the storage amount of the compressed gas in the second space of the liquid source bottle is controlled, it can specifically include: if the height of the gaseous source is lower than the preset height range, the opening degree of the second control component in the liquid source bottle is controlled, so that the compressed gas in the second space flows out, and when the height of the gaseous source is in the preset height range, the second control component is controlled to be closed; if the height of the gaseous source is higher than the preset height range, the opening degree of the first control component in the liquid source bottle is controlled, so that the external compressed gas is filled into the second space, and when the height of the gaseous source is in the preset height range, the first control component is controlled to be closed.

[0140] In some embodiments, when the height of the gaseous source is in the preset height range, the corresponding relationship between the change amount of the height of the liquid source and the change amount of the amount of substance of the compressed gas can refer to the above formula (10).

[0141] In specific implementation, with the consumption of the source, the change amount of the amount of substance of the compressed gas can be adjusted based on the corresponding relationship between the change amount of the height of the liquid source and the change amount of the amount of substance of the compressed gas, so that the height of the gaseous source is always in the preset height range in the process, and the uniformity of the amount of the gaseous source output with the carrier gas in the process of continuous consumption of the source is ensured, thereby improving the process performance.

[0142] In some embodiments, before controlling the storage amount of compressed gas in the second space of the liquid source bottle, the control method of the liquid source bottle can further include: obtaining the liquid level of the liquid source in the liquid source bottle, and detecting whether the liquid level of the liquid source is lower than the minimum use height; if the liquid level of the liquid source is lower than the minimum use height, issuing a prompt information to prompt that the liquid source is insufficient; if the liquid level of the liquid source is not lower than the minimum use height, continuing to execute the step of controlling the storage amount of compressed gas in the second space of the liquid source bottle.

[0143] Specifically, taking the liquid source bottle shown in Figure 4 as an example, Figure 8 the signaling flow chart of the control method of the liquid source bottle is as follows.

[0144] Wherein, H: ideal height of gaseous source; H1: actual height value of gaseous source; H min : minimum use height of liquid source: 20mm; H2: initial height of liquid level of liquid source; H2': actual height of liquid level of liquid source; △n: theoretical amount of pumped gas; △n1: actual amount of pumped gas; K: conversion coefficient, k = ρ2gS / RT; ε: pumping error of second mass flow meter, ε = |△n-△n1| / △n*100%.

[0145] The distance meter transmits the collected real-time gaseous height to the controller. When the liquid level of the liquid source decreases, the inner container is lifted by the compressed gas, and the lifting amount is greater than the amount of liquid level decrease. At this time, H1 is less than H. The controller outputs an enable signal to start the liquid level meter to collect the actual height H2' of the liquid level of the liquid source in real time, and to judge whether H2' is less than the minimum use height of the liquid source.

[0146] Case1: H2'>H min At this time, the automatic replenishment algorithm of the liquid source bottle can be executed, and the algorithm content is as follows:

[0147] Calculate △H2 = H2-H2', according to the above formula (12)△n = -k△H2 2 , determine△n. After determining△n, the storage amount of compressed gas in the second space needs to be controlled, so as to adjust the actual height value of the gaseous source. When the storage amount of compressed gas in the second space is controlled through the opening degree of the mass flow meter, the full scale of the first mass flow meter and the second mass flow meter can be set as 500sccm, and 0-500sccm corresponds to the flow meter opening degree 0-100%. The controller controls the flow meter opening degree by controlling△n, so as to achieve the purpose of adjusting the height of the inner container.

[0148] The controller calculates the △n and sends it to the corresponding second mass flow meter to open a certain angle. The second mass flow meter 6-1 opens the valve, and the amount of substance of the extracted compressed gas can be detected by controlling the angle of the valve. If the calculated ε is less than 10%, the second mass flow meter 6-1 is closed at this time. Because of the pressure balance, P4 becomes P1+ρ2g(H2-△H2)+ρ3gH3, and because the compressed gas is extracted, the H4 lifting amount becomes △H2 at this time, and the distance meter measures H1=H at this time, and the horizontal height of the gaseous source returns to H.

[0149] If the opening angle of the second mass flow meter at the moment is too large, the amount of compressed gas extracted will be too much, and ε will be greater than 10%. The H4 lifting amount will be very small or even H4 will decrease, resulting in H1>H. At this time, the first mass flow meter 6-2 needs to intake air to make up for △n until ε is less than 10%.

[0150] Case2: H2'≤H min The controller triggers the safety interlock, cuts off the control, and reminds the upper computer that the liquid source in the liquid source bottle is insufficient and cannot maintain the continuation of the process.

[0151] As another optional implementation of the disclosure, the embodiments of the present application also provide a liquid source bottle controller, as shown in Figure 9 The liquid source bottle controller can include a memory 901 and a processor 902; wherein the memory 901 is connected with the processor 902, and is used to store programs; the processor 902 is used to realize the control method of the liquid source bottle disclosed in any of the above embodiments by running the programs stored in the memory 901.

[0152] Specifically, the above-mentioned liquid source bottle controller can further include a bus, a communication interface 903, an input device 904 and an output device 905.

[0153] The processor 902, the memory 901, the communication interface 903, the input device 904 and the output device 905 are connected with each other through the bus. Among them:

[0154] The bus can include a channel for transmitting information between various components of the computer system.

[0155] The processor 902 can be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits for controlling the execution of programs of the present application scheme. It can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a ready-to-use programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components.

[0156] The processor 902 can include a main processor, and can further include a baseband chip, a modem, etc.

[0157] The memory 901 stores programs for implementing the technical solutions of the present application, and can also store operating systems and other key services. Specifically, the programs can include program codes, and the program codes include computer operation instructions. More specifically, the memory 901 can include a read-only memory (ROM), other types of static storage devices that can store static information and instructions, a random access memory (RAM), other types of dynamic storage devices that can store information and instructions, a disk memory, a flash, etc.

[0158] The input device 904 can include devices that receive data and information input by a user, such as a keyboard, a mouse, a camera, a scanner, a light pen, a voice input device, a touch screen, a pedometer, or a gravity sensor, etc.

[0159] The output device 905 can include devices that allow information to be output to a user, such as a display screen, a printer, a speaker, etc.

[0160] The communication interface 903 can include devices using any transceiver to communicate with other devices or communication networks, such as an Ethernet, a radio access network (RAN), a wireless local area network (WLAN), etc.

[0161] The processor 902 executes the programs stored in the memory 901 and calls other devices, which can be used to implement the steps of the control method of the liquid source bottle provided by the embodiments of the present application.

[0162] Those skilled in the art can understand that, Figure 9 The structure shown in the figure is only a block diagram of part of the structure related to the solution of the present application, and does not constitute a limitation on the lower-level machine to which the solution of the present application is applied. Specifically, the liquid source bottle controller can include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

[0163] The embodiments of the present application also provide a semiconductor process equipment, which includes the liquid source bottle as described in any of the above embodiments, and the liquid source bottle controller as described in any of the above embodiments.

[0164] In addition to the above method and equipment, the embodiments of the present application can also be a computer program product, which includes computer program instructions that, when executed by a processor, cause the processor to perform the steps of the control method of the liquid source bottle according to various embodiments of the present application described in the above “Exemplary Method” section of the present application.

[0165] The computer program product can be written in any combination of one or more programming languages, including an object oriented programming language such as Java, C++ or the like, and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code can execute entirely on the user's computing device, partly on the user's device, as a stand-alone software package, partly on the user's computing device and partly on a remote computing device or entirely on the remote computing device or server.

[0166] In addition, an embodiment of the present application can also be a storage medium storing the computer program, which is executed by a processor to perform each step of the control method of the liquid source bottle according to various embodiments of the present application described in the above "Exemplary Method" section of the specification.

[0167] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by a computer program instructing related hardware, and the computer program can be stored in a non-volatile computer readable storage medium. When the computer program is executed, it can include the processes of the above-mentioned embodiments of each method. Any reference to memory, storage, databases, or other media in the embodiments of the present application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration but not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0168] Each technical feature of the above embodiments can be combined arbitrarily, and for the sake of brevity, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not contradict, they should be considered within the scope of the present application.

[0169] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, several modifications and improvements can be made, which are within the scope of protection of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A liquid source bottle, characterized in that, include: The bottle body, the open inner liner, and the controller; The inner liner is movably fixed to the bottle body, and the inner liner divides the space inside the bottle body into a first space and a second space that are independent of each other. The first space is formed between the inner side of the inner liner and the bottle body, and the second space is formed between the outer side of the inner liner and the bottle body. The first space is used to store liquid and gas sources. The second space is used to store compressed gas to support the inner liner. The controller is used to control the amount of compressed gas stored in the second space, so that the size of the first space changes with the size of the second space, and the horizontal height of the gas source changes with the size of the first space and remains within a preset height range.

2. The liquid source bottle according to claim 1, characterized in that, The bottle body includes a first bottle body and a second bottle body; the first bottle body and the second bottle body are detachably connected; The first bottle body is movably connected to the inner liner, and the first space is formed between the inner side of the first bottle body and the inner side of the inner liner; The second bottle body is movably connected to the inner liner, and the second space is formed between the inner side of the second bottle body and the outer side of the inner liner.

3. The liquid source bottle according to claim 2, characterized in that, It also includes the first active component; The first bottle body and the inner liner are movably connected via the first movable component.

4. The liquid source bottle according to claim 3, characterized in that, It also includes seals; The seal is disposed on the first movable component and is used to isolate the first space from the second space.

5. The liquid source bottle according to claim 2, characterized in that, The first bottle body is provided with an air inlet and an air outlet; the air inlet is used to introduce carrier gas into the first space so that the gaseous source in the first space is output through the air outlet. The second bottle body is provided with an inflation port and an exhaust port; the inflation port is used to connect to an inflation device so that external compressed gas can be injected into the second space through the inflation port; The air extraction port is used to connect to an air extraction device so that the compressed gas in the second space can flow out through the air extraction port.

6. The liquid source bottle according to claim 5, characterized in that, It also includes a first control component disposed at the air inlet and a second control component disposed at the air outlet; The first control component is used to adjust the opening degree under the control of the controller to control the gas flow rate that is filled into the second space through the air inlet, so that the horizontal height of the gas source is within a preset height range; The second control component is used to adjust the opening degree under the control of the controller to control the gas flow rate extracted from the second space through the air extraction port, so that the horizontal height of the gas source is within a preset height range.

7. The liquid source bottle according to claim 1, characterized in that, Also includes: A level gauge and / or a rangefinder are installed in the inner tank; The level gauge is used to measure the horizontal height of the liquid source in the inner tank and feed it back to the controller; The controller is also used to issue a warning message when the horizontal height of the liquid source is lower than the minimum operating height; The rangefinder is used to measure the horizontal height of the gas source in the inner liner and feed it back to the controller.

8. The liquid source bottle according to claim 2, characterized in that, It also includes a guide device disposed between the second bottle body and the inner liner; The guiding device is used to guide the inner liner to move in a direction perpendicular to the horizontal plane when it is in motion.

9. A method for controlling a liquid source bottle, characterized in that, Applied to the liquid source bottle as described in any one of claims 1-8, the method comprises: Obtain the horizontal height of the gaseous source inside the liquid source bottle, and detect whether the horizontal height of the gaseous source is within a preset height range; If the horizontal height of the gas source is not within the preset height range, the amount of compressed gas stored in the second space of the liquid source bottle is controlled so that the size of the first space of the liquid source bottle changes with the size of the second space, so that the horizontal height of the gas source is within the preset height range.

10. The method according to claim 9, characterized in that, The control of the storage amount of compressed gas in the second space of the liquid source bottle includes: If the horizontal height of the gas source is lower than the preset height range, the opening of the second control component in the liquid source bottle is controlled to allow the compressed gas in the second space to flow out, and when the horizontal height of the gas source is within the preset height range, the second control component is controlled to close. If the horizontal height of the gas source is higher than the preset height range, the opening degree of the first control component in the liquid source bottle is controlled to allow external compressed gas to fill the second space, and when the horizontal height of the gas source is within the preset height range, the first control component is controlled to close.

11. The method according to claim 9, characterized in that, Before controlling the amount of compressed gas stored in the second space of the liquid source bottle, the method further includes: Obtain the horizontal height of the liquid source inside the liquid source bottle, and detect whether the horizontal height of the liquid source is lower than the minimum operating height; If the level of the liquid source is lower than the minimum operating height, a prompt message will be issued to indicate that the liquid source is low. If the horizontal height of the liquid source is not lower than the minimum operating height, then the step of controlling the storage amount of compressed gas in the second space of the liquid source bottle continues.

12. The method according to claim 9, characterized in that, When the horizontal height of the gaseous source is within a preset horizontal height range, the correspondence between the change in the horizontal height of the liquid source and the change in the amount of substance of the compressed gas includes: △n=-ρ2g△H2 2 S / RT Wherein, Δn is the change in the amount of substance of the compressed gas, ΔH2 is the change in the horizontal height of the liquid source, ρ2 is the density of the liquid source, S is the surface area of ​​the inner liner near the compressed gas, R is the molar gas constant, T is the temperature of the compressed gas, and g is the gravitational acceleration.

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