Laser heating device

Abstract

The invention relates to a laser heating device. The laser heating device comprises a laser, a base, a sample bearing piece and a heat storage block, the laser is connected with one end of the base; the other end of the base is used for being connected with a vacuum coating system; one end of the sample bearing part is connected with the base, the other end of the sample bearing part is used for extending into a vacuum cavity of the vacuum coating system, a heating cavity communicated with the vacuum cavity is formed in the sample bearing part, a light-transmitting plate is arranged at the top of the heating cavity, and the light-transmitting plate is used for transmitting light to the sample bearing part. The light-transmitting plate is used for transmitting a laser beam of the laser into the heating cavity; the heat storage block and the substrate sample are arranged in the heating cavity at an interval, and the heat storage block is used for absorbing the laser beam so as to generate heat irradiation to heat the substrate sample. The laser heating device can be connected with a vacuum coating system, heating of the transparent substrate is completed in a vacuum environment, the thermal irradiation efficiency of the transparent substrate is improved, and oxidation volatilization pollution is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a laser heating device. BACKGROUND

[0002] In the vacuum coating technology, thin film growth uniformity is a basic and key element, and the heater is a key component of thin film growth. In the process of coating growth of the substrate, the substrate is fixed in the deposition cavity for manufacturing steps such as pulsed laser deposition (PLD), magnetron sputtering (Magnetron Sputtering), chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD) or physical vapor deposition (PVD), and the substrate is heated.

[0003] At present, the common substrate heating methods are divided into contact heating and non-contact heating, wherein the contact heating needs to paste or fix the substrate with a clamp for heating, so that only single-sided coating of the substrate can be performed. The non-contact heating method does not cause any damage to the other end surface of the substrate during the deposition of the thin film on the substrate, so that double-sided coating of the substrate can be realized and the coating efficiency is improved.

[0004] In the non-contact heating method, the substrate is generally placed in a resistance heating furnace for heat radiation baking, which is suitable for heating of non-transparent substrates (such as silicon substrates). However, the commonly used transparent substrates have poor heat absorption, and the transparent substrates need higher heat radiation efficiency to be heated to the same temperature, that is, the heating furnace needs to be set to a higher "heater wire" temperature, which causes volatilization pollution (including oxidation volatilization pollution) of the high-temperature heating materials (such as heater wires) in the furnace. Especially when the transparent substrate is heated in an oxygen atmosphere, the oxidation volatilization pollution is serious, which affects the actual use performance of the transparent substrate. SUMMARY

[0005] Therefore, it is necessary to provide a laser heating device to improve the heat radiation efficiency of the transparent substrate, which can be connected with a vacuum coating system to complete the heating of the transparent substrate in a vacuum environment and avoid oxidation volatilization pollution.

[0006] The present application provides a laser heating device, which comprises a laser, a base, a sample carrier and a heat storage block.

[0007] The laser is connected with one end of the base.

[0008] The other end of the base is used for connecting with a vacuum coating system.

[0009] One end of the sample carrier is connected with the base, and the other end is used to extend into a vacuum cavity of the vacuum coating system, a heating cavity for communicating with the vacuum cavity is arranged in the sample carrier, and a light-transmitting plate is arranged at the top of the heating cavity, which is used to transmit a laser beam of the laser into the heating cavity.

[0010] The heat storage block and the substrate sample are arranged in the heating cavity, and the heat storage block is used to absorb the laser beam to generate thermal radiation to heat the substrate sample.

[0011] In one of the embodiments, the sample carrier comprises a rotating mechanism and a carrying unit, the rotating mechanism is fixedly connected with the base, the carrying unit is connected with the output end of the rotating mechanism and rotationally connected with the base, and the heating cavity is arranged in the carrying unit.

[0012] In one of the embodiments, the rotating mechanism comprises a driving motor and a driving gear, the driving motor is fixedly connected with the base, and the output shaft of the driving motor is connected with the driving gear.

[0013] The carrying unit comprises a connecting ring and a hollow shaft arranged coaxially, one end of the connecting ring is connected with the light-transmitting plate, the other end of the connecting ring is connected with the hollow shaft, the inside of the connecting ring and the hollow shaft is in communication to form the heating cavity, and a driven gear meshing with the driving gear is arranged on the outer circumferential wall of the connecting ring.

[0014] The hollow shaft penetrates through the base and extends into the vacuum cavity, the hollow shaft is rotationally connected with the base, the outer wall of the hollow shaft and the inner wall of the base are sealed by a magnetic fluid, and a first step surface and a second step surface are arranged at the end of the hollow shaft away from the connecting ring, the first step surface is used to place the heat storage block, and the second step surface is used to place a transparent substrate sample.

[0015] In one of the embodiments, the hollow shaft comprises a first shaft body, a second shaft body and a tray connected in sequence in the direction in which the laser points to the base, the first shaft body is rotationally connected with the base, the second shaft body is inserted into the first shaft body at the top and is threadedly connected with the first shaft body, an opening is arranged on the circumferential wall of the second shaft body, the tray is located at the end of the second shaft body away from the first shaft body, and the first step surface and the second step surface are arranged in the tray.

[0016] In one of the embodiments, the length of the second shaft body in the axial direction is adjustable.

[0017] In one of the embodiments, the connecting ring comprises a first ring body, a sealing ring and a second ring body arranged in sequence in the direction in which the laser device points to the base;

[0018] An end of the first ring body facing the laser device is provided with a mounting groove for mounting the light-transmitting plate, and an end of the first ring body facing the sealing ring is provided with a first groove;

[0019] The second ring body is sleeved on the hollow shaft, and an end of the second ring body facing the sealing ring is provided with a second groove, and the outer circumferential sidewall of the second ring body is provided with the driven teeth;

[0020] The first groove and the second groove jointly form a sealing groove, and the sealing ring is arranged in the sealing groove.

[0021] In one of the embodiments, the bottom surface of the first groove and the bottom surface of the second groove are both provided with a ring-shaped protrusion facing the sealing ring, and the ring-shaped protrusion is arranged against the end surface of the sealing ring.

[0022] In one of the embodiments, the base comprises a first seat body and a second seat body connected in sequence in the direction in which the laser device points to the sample carrier;

[0023] The first seat body is provided with a mounting cavity penetrating through the first seat body in the direction in which the laser device points to the sample carrier, the laser device is inserted into the mounting cavity, the circumferential sidewall of the first seat body is uniformly provided with a plurality of adjusting screw holes, an adjusting screw is arranged in each adjusting screw hole, and the threaded end of the adjusting screw is arranged against the sidewall of the laser device.

[0024] An end of the second seat body away from the first seat body is used for connecting with the vacuum coating system, and the second seat body is connected with the sample carrier.

[0025] In one of the embodiments, a camera module and a temperature measuring module are further included, the camera module is used for image monitoring in the heating cavity, and the temperature measuring module is used for temperature measurement on the heat storage block in the heating cavity.

[0026] In one of the embodiments, the laser device comprises a plurality of array-arranged laser units, each laser unit comprises a laser diode and a laser shaping mirror, and the light beam emitted by the laser diode is transmitted to the heating cavity in sequence through the laser shaping mirror and the light-transmitting plate.

[0027] The laser heating device uses a laser as a heat radiation source of the transparent substrate. The laser beam of the laser is absorbed by the heat storage block to generate heat radiation, which can provide a high heating temperature to meet the heating requirements of the transparent substrate, and avoid using a resistance heating furnace to increase the temperature of the furnace wire to heat the transparent substrate, which causes high-temperature heating materials to volatilize and pollute. At the same time, the base is connected with the vacuum coating system, and no other structure needs to be added in the vacuum coating system, which is easy to install and simplifies the structure. In addition, the heating cavity is in communication with the vacuum cavity of the vacuum coating system, the laser beam is transmitted to the heating cavity through the light transmission plate, and the transparent substrate is heated in a vacuum environment to avoid oxidation and volatilization pollution. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 FIG. 1 is a structural schematic diagram of a laser heating device in one embodiment.

[0029] Figure 2 FIG. 2 is a sectional view of the laser heating device in one embodiment.

[0030] Figure 3 FIG. 3 is an exploded view of the laser heating device in one embodiment.

[0031] Figure 4 FIG. 4 is an exploded view of a sample carrier of the laser heating device in one embodiment.

[0032] Figure 5 FIG. 5 is a sectional view of the sample carrier of the laser heating device in one embodiment.

[0033] Figure 6 FIG. 6 is a structural schematic diagram of a laser unit of the laser heating device in one embodiment. Figure 5 FIG. 7 is a partial enlarged view of position A in FIG. 6.

[0034] Figure 7 FIG. 8 is a partial enlarged view of position B in FIG. 6. Figure 5 FIG. 9 is a structural schematic diagram of a laser unit of the laser heating device in one embodiment.

[0035] Figure 8

[0036] The reference signs are as follows:

[0037] ​1, laser; 11, laser unit; 111, laser diode; 112, laser shaping mirror; 2, base; 21, first seat body; 211, mounting cavity; 212, adjusting screw hole; 22, second seat body; 3, sample carrier; 30, heating cavity, 301, light transmission plate; 31, rotating mechanism; 311, driving motor; 312, driving gear; 32, carrying unit; 321, connecting ring; 3211, first ring body; 32111, mounting groove; 32112, first groove; 3212, sealing ring; 3213, second ring body; 32131, driven gear; 32132, second groove; 3214, annular protrusion; 322, hollow shaft; 322a, first step surface; 322b, second step surface; 3221, first shaft body; 3222, second shaft body; 32221, opening; 32222, first connecting section; 32223, second connecting section; 32224, limiting ring; 3223, tray; 4, heat storage block; 5, camera module; 6, temperature measurement module; a, substrate sample. DETAILED DESCRIPTION

[0038] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a variety of ways beyond the specific embodiments described herein without departing from the scope of the present application, and it is understood that similar modifications can be made by those skilled in the art in the light of the following disclosure, and therefore the present application is not limited to the following disclosed specific embodiments.

[0039] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0040] In addition, if these terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features referred to. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "multiple" appears, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0041] In the present application, unless specifically defined otherwise and limited, if there are terms such as "mount", "connect", "connect", "fix", etc., these terms should be understood in a broad sense. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0042] In the present application, unless specifically defined otherwise and limited, if there are similar descriptions such as "first feature on" or "second feature", the meaning can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" of the second feature can be directly above or obliquely above the first feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature can be directly below or obliquely below the first feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0043] It should be noted that if an element is referred to as "fixed to" or "provided to" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are for illustrative purposes only and are not the only embodiment.

[0044] As shown in Figure 1 An embodiment of the present application provides a laser heating device, which comprises a laser 1, a base 2, a sample carrier 3 and a heat storage block 4; wherein the laser 1 is used as a thermal radiation source for heating the substrate. The base 2 is used as a mounting carrier for mounting the laser 1 and the sample carrier 3. Specifically, the laser 1 is connected to one end of the base 2; the other end of the base 2 is used to connect with a vacuum coating system; one end of the sample carrier 3 is connected with the base 2, and the other end is used to extend into the vacuum cavity of the vacuum coating system. The sample carrier 3 is provided with a heating cavity 30 for communication with the vacuum cavity. The top of the heating cavity 30 is provided with a light transmission plate 301, which is used to transmit the laser beam of the laser 1 into the heating cavity 30. The heat storage block 4 and the substrate sample a are arranged in the heating cavity 30. The heat storage block 4 is used to absorb the laser beam to generate thermal radiation to heat the substrate sample a.

[0045] It should be noted that the vacuum coating system is mainly composed of a vacuum chamber, an air exhaust system (mechanical pump, Roots pump, diffusion pump, etc.), an evaporation source (resistance heating, electron gun, sputtering target, etc.), a heating system (laser heating device in the present application) and a film thickness control device (quartz crystal oscillator, light control sensor, etc.). Its working process is as follows: vacuum environment creation: the vacuum chamber is initially pumped to a low vacuum state by a mechanical pump, and then further pumped to a high vacuum by a diffusion pump or the like to reduce the interference of gas molecules. Material evaporation / sputtering: the evaporation source heats the coating material (metal, alloy, etc.) to an evaporation or sputtering state by resistance heating, electron beam bombardment or magnetron sputtering, etc., to release atoms or molecules. Thin film deposition: gaseous particles migrate directionally to the substrate surface in a vacuum, undergo adsorption, diffusion, condensation and other processes to form a uniform thin film. The heating system optimizes the crystallinity and adhesion by controlling the substrate temperature. Cooling and solidification: after the heating source is turned off, the system cools the substrate in a vacuum or inert gas environment to make the thin film adhere stably. The whole process is precisely controlled by the vacuum degree, temperature and deposition rate to realize the preparation of high-quality thin films.

[0046] In the present application, as shown in Figure 2 , the heating process of the laser heating device for the transparent substrate is as follows: the laser 1 emits a laser beam, the laser beam transmits through the light-transmitting plate 301 to the heating cavity 30, and irradiates on the heat storage block 4, the heat storage block 4 absorbs the energy of the laser beam to heat up and form a thermal radiation, which can provide a higher heating temperature to meet the heating needs of the transparent substrate, without using a resistance heating furnace, avoiding the volatilization pollution of high-temperature heating materials (furnace wire) in the resistance heating furnace. In addition, since the heating cavity 30 is in communication with the vacuum chamber, the transparent substrate is always in a vacuum working condition during the heating process, avoiding oxidation and volatilization pollution. The laser heating device in the present application can also be used for heating of non-transparent substrates.

[0047] It should be noted that, in the present application, since the heat storage block 4 needs to uniformly heat each region on the substrate sample to meet the uniform growth of the coating, the projection range of the laser beam on the horizontal plane needs to completely cover the heat storage block 4, and at the same time, the projection range of the heat storage block 4 on the horizontal plane must completely cover the substrate sample. The heat storage block 4 is selected from high-infrared, high-radiation and high-thermal-stability ceramic materials, such as black silicon carbide ceramic, dyed 99 high-temperature ceramic (99 alumina ceramic), etc.

[0048] In some embodiments, as shown in Figure 1 , Figure 3As shown, the sample carrier 3 comprises a rotating mechanism 31 and a carrying unit 32, wherein the rotating mechanism 31 is fixedly connected with the base 2, the carrying unit 32 is connected with the output end of the rotating mechanism 31 and is rotationally connected with the base 2, and the carrying unit 32 is provided with a heating cavity 30. Since the laser 1 is generally fixedly connected with the base 2, the carrying unit 32 is driven to rotate by the rotating mechanism 31, so that the heat storage block 4 and the transparent substrate in the heating cavity 30 are synchronously rotated with the sample, that is, the light source is stationary, and the transparent substrate sample is rotated, which is beneficial to improving the uniformity of the transparent substrate sample heating process.

[0049] In some embodiments, as Figure 3 As shown, the rotating mechanism 31 comprises a driving motor 311 and a driving gear 312, the driving motor 311 is fixedly connected with the base 2, and the output shaft of the driving motor 311 is connected with the driving gear 312. As Figure 4 As shown, the carrying unit 32 comprises a coaxially arranged connecting ring 321 and a hollow shaft 322, one end of the connecting ring 321 is connected with the light-transmitting plate 301, the other end of the connecting ring 321 is connected with the hollow shaft 322, the inside of the connecting ring 321 and the hollow shaft 322 is communicated to form the heating cavity 30, and the outer peripheral sidewall of the connecting ring 321 is provided with a driven tooth 32131 meshing with the driving gear 312. The hollow shaft 322 penetrates through the base 2 and extends into the vacuum cavity, the hollow shaft 322 is rotationally connected with the base 2, the outer wall of the hollow shaft 322 and the inner wall of the base 2 are sealed by a magnetic fluid, and the end of the hollow shaft 322 away from the connecting ring 321 is provided with a first step surface 322a and a second step surface 322b arranged at intervals. It should be noted that the first step surface 322a and the second step surface 322b are arranged at intervals along the vertical direction, and the first step surface 322a is located above the second step surface 322b, wherein the first step surface 322a is used for placing the heat storage block 4, and the second step surface 322b is used for placing the transparent substrate sample, and the heat storage block 4 is used for absorbing the laser beam to generate thermal radiation to heat the transparent substrate sample.

[0050] The connecting ring 321 and the rotating mechanism 31 are located outside the vacuum environment, and the hollow shaft 322 is located inside the vacuum environment. It should be noted that in this embodiment, the connecting ring 321 is fixedly connected with the hollow shaft 322. When the transparent substrate needs to be heated, the driving motor 311 drives the driving gear 312 to rotate. Since the outer peripheral sidewall of the connecting ring 321 is provided with the driven tooth 32131 meshing with the driving gear 312, the driving motor 311 can drive the connecting ring 321 and the hollow shaft 322 to rotate synchronously, thereby simplifying the transmission structure between the rotating mechanism 31 and the carrying unit 32 and reducing the production cost. The outer wall of the hollow shaft 322 and the inner wall of the base 2 are sealed by a magnetic fluid, which avoids abrasion between the hollow shaft 322 and the base 2, prevents substances in the external environment from entering the vacuum cavity, affects the vacuum environment inside the vacuum coating system, improves the stability of the coating process.

[0051] In some embodiments, combined with Figure 4 , Figure 5 As shown, the hollow shaft 322 includes a first shaft body 3221, a second shaft body 3222, and a tray 3223 connected sequentially in the direction from the laser 1 to the base 2. The first shaft body 3221 is rotatably connected to the base 2, and the second shaft body 3222 is detachably connected to the first shaft body 3221. An opening 32221 is provided on the circumferential sidewall of the second shaft body 3222. The tray 3223 is located at the end of the second shaft body 3222 away from the first shaft body 3221. Figure 7 As shown, the tray 3223 has a first stepped surface 322a and a second stepped surface 322b. The first shaft 3221 and the second shaft 3222 are detachably connected, which facilitates disassembly and assembly. At the same time, an opening 32221 is provided to facilitate the placement and removal of the tray 3223, so as to facilitate the handling of transparent samples.

[0052] To fine-tune the heating temperature of the transparent substrate, the distance from the laser beam irradiating the light-transmitting plate 301 to the heat storage block 4 can be changed, thereby adjusting the heating temperature of the transparent substrate. In some embodiments, the axial length of the second shaft 3222 is adjustable. In one embodiment, such as... Figure 4 , Figure 5 As shown, the second shaft 3222 includes a first connecting section 32222 and a second connecting section 32223. The top of the first connecting section 32222 is sleeved outside the first shaft 3221, and a locking screw is radially provided on the side wall of the first connecting section 32222 for detachable connection with the first shaft 3221. The top of the second connecting section 32223 is inserted into the first connecting section 32222 and threadedly connected to it. The tray 3223 is located inside the second connecting section 32223. Rotating the second connecting section 32223 adjusts the distance between the heat storage block 4 and the light-transmitting plate 301 to meet the heating requirements of different substrates.

[0053] To ensure axial fixation after the first connecting segment 32222 and the second connecting segment 32223 are adjusted, the second shaft 3222 also includes a limiting ring 32224. The limiting ring 32224 is sleeved on the second connecting segment 32223 and threadedly connected to it. The top surface of the limiting ring 32224 abuts against the bottom surface of the first connecting segment 32222. After adjusting the distance between the heat storage block 4 and the light-transmitting plate 301 by rotating the second connecting segment 32223, the limiting ring 32224 is rotated so that its top surface abuts against the bottom surface of the first connecting segment 32222. This axially limits the second connecting segment 32223, preventing it from rotating and ensuring that the distance between the heat storage block 4 and the light-transmitting plate 301 is fixed, thus guaranteeing the stability of the substrate heating.

[0054] The tray 3223 is located at the bottom of the second shaft body 3222 and detachably connected with the second shaft body 3222. In a specific embodiment, as shown in Figure 3 the bottom of the second shaft body 3222 (i.e. the second connecting section 32223) is provided with a counterbore, and the outer shape of the tray 3223 corresponds to the counterbore, which facilitates the taking and placing of the tray 3223. When the transparent substrate needs to be heated, the transparent substrate is first placed on the second step surface 322b, and then the heat storage block is placed on the first step surface 322a, above the transparent substrate, so that the tray 3223, the heat storage block and the transparent substrate as a whole pass through the opening 32221 into the heating cavity 30 and are placed at the bottom of the second shaft body 3222. By providing the opening 32221, the heating cavity 30 is not only in communication with the vacuum cavity, but also facilitates the taking and placing of the tray 3223.

[0055] In some embodiments, as shown in Figure 5 , Figure 6 the connecting ring 321 comprises, in the direction in which the laser 1 points to the base 2, a first ring body 3211, a sealing ring 3212 and a second ring body 3213 arranged in sequence; one end of the first ring body 3211 facing the laser 1 is provided with a mounting groove 32111 for mounting the light-transmitting plate 301, and the other end of the first ring body 3211 facing the sealing ring 3212 is provided with a first groove 32112; the second ring body 3213 is sleeved on the hollow shaft 322, and the other end of the second ring body 3213 facing the sealing ring 3212 is provided with a second groove 32132, and the outer circumferential side wall of the second ring body 3213 is provided with a driven tooth 32131; the first groove 32112 and the second groove 32132 jointly form a sealing groove, and the sealing ring 3212 is arranged in the sealing groove. The connecting ring 321 is divided into the first ring body 3211 and the second ring body 3213, which can be simultaneously cut and processed, thereby reducing the processing cost and improving the production efficiency. The first ring body 3211 and the second ring body 3213 are fixedly connected by screws. Since the interiors of the first ring body 3211 and the second ring body 3213 are in communication with the vacuum cavity, the sealing groove and the sealing ring 3212 improve the sealing performance when the first ring body 3211 and the second ring body 3213 are connected.

[0056] In some embodiments, as shown in Figure 6As shown, the bottom surface of the first groove 32112 and the second groove 32132 is provided with an annular protrusion 3214 facing the sealing ring 3212, the annular protrusion 3214 is arranged on the end surface of the sealing ring 3212, and the annular protrusion 3214 is in linear or surface contact with the sealing ring 3212. When the first ring body 3211 and the second ring body 3213 are connected, the annular protrusion 3214 can form an annular indentation on the two end surfaces of the sealing ring 3212 by tightening the screw, and the annular protrusion 3214 can be in sufficient contact with the end surface of the sealing ring 3212, thereby improving the sealing performance when the first ring body 3211 and the second ring body 3213 are connected. By arranging the annular protrusion 3214, the planar machining precision of the sealing ring 3212 can be reduced, and the risk of poor sealing after the first ring body 3211 and the second ring body 3213 are assembled can be reduced.

[0057] In some embodiments, as shown in Figure 1 、 Figure 3 The base 2 includes a first seat body 21 and a second seat body connected in sequence in the direction in which the laser 1 points to the sample carrier 3. The first seat body 21 is provided with a mounting cavity 211 penetrating the first seat body 21 in the direction in which the laser 1 points to the sample carrier 3, and the laser 1 is inserted into the mounting cavity 211. The circumferential side wall of the first seat body 21 is uniformly provided with a plurality of adjusting screw holes 212, and an adjusting screw is arranged in each adjusting screw hole 212. The threaded end of the adjusting screw is arranged on the side wall of the laser 1. That is, the position of the laser 1 and the first seat body 21 in the vertical direction can be adjusted to adjust the distance between the laser beam and the heat storage block 4 to meet the heating temperature adjustment requirement of the transparent substrate. The end of the second seat body 22 away from the first seat body 21 is used to connect with the vacuum coating system, and the second seat body 22 is connected with the sample carrier 3. In one embodiment, the second seat body 22 is fixedly connected with a driving motor 311, a hollow shaft 322 extends into the vacuum cavity through the second seat body 22, and the hollow shaft 322 is rotatably connected with the second seat body 22 and is sealed by a magnetic fluid.

[0058] In some embodiments, as shown in Figure 2 The laser heating device further includes a camera module 5 and a temperature measurement module 6. The camera module 5 is used for image monitoring in the heating cavity 30, and the temperature measurement module 6 is used for temperature measurement of the heat storage block 4 in the heating cavity 30. The actual working condition and temperature in the vacuum environment are monitored to meet the heating requirement of the transparent substrate and improve the stability of the device during operation. In one embodiment, the camera module 5 and the temperature measurement module 6 are arranged on the base 2, and the detection ends of the camera module 5 and the temperature measurement module 6 are arranged towards the light transmission plate 301 to monitor the working condition in the heating cavity 30. The installation positions of the camera module 5 and the temperature measurement module 6 can be adaptively adjusted according to the actual design requirement.

[0059] In some embodiments, as shown in Figure 8As shown, the laser includes a plurality of arrayed laser units 11, wherein the laser unit 11 includes a laser diode 111 and a laser shaping mirror 112, the laser diode 111 has a wiring electrode, the light beam emitted by the laser diode 111 is transmitted to the heating cavity 30 in turn through the laser shaping mirror 112 and the light transmission plate 301, the wiring motor is connected with an external power supply to make the laser diode 111 emit laser, and the laser is output to the light transmission plate 301 after being simply shaped by the laser shaping mirror 112. In an embodiment, the laser diode 111 selects a 45-65W gallium arsenide laser diode 111, the wavelength of which is generally 880nm, 915nm, 940nm and 976nm, which can be selected according to actual heating requirements. In the present application, a plurality of arrayed laser units 11 are arranged according to a specific rule to form a laser beam surface light source, which can be assembled into different shapes of surface light spots according to different heating scenes to meet the substrate heating requirements. At the same time, the overall structure is relatively simple, which reduces the cost.

[0060] It should be noted that in the present application, the shape of the surface light spot is circular, and the shape of the surface light spot can be adjusted according to actual heating requirements. The shapes of the light transmission plate 301, the hollow shaft 322, the heating cavity 30, the tray 3223 and the heat storage block 4 are all circular, and are coaxially arranged to make the heat storage block 4 evenly heated to uniformly heat the transparent substrate.

[0061] The technical features of the above-mentioned embodiments can be combined arbitrarily, and in order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, however, as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the present application.

[0062] The above-mentioned embodiments only express several implementation manners of the present application, the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A laser heating device, characterized by, The utility model relates to a laser heating device for vacuum coating system, including: laser, pedestal, sample carrier and heat storage block; The laser is connected with one end of the pedestal; The other end of the pedestal is used for connecting with vacuum coating system; One end of the sample carrier is connected with the pedestal, and the other end is used for extending to the vacuum cavity of the vacuum coating system, a heating cavity for communicating with the vacuum cavity is arranged in the sample carrier, a light transmission plate is arranged on the top of the heating cavity, and the light transmission plate is used for transmitting the laser beam of the laser to the heating cavity; The heat storage block and the substrate sample are arranged in the heating cavity, and the heat storage block is used for absorbing the laser beam to generate thermal radiation to heat the substrate sample.

2. The laser heating device of claim 1, wherein, The sample carrier includes a rotating mechanism and a carrying unit, the rotating mechanism is fixedly connected with the pedestal, the carrying unit is connected with the output end of the rotating mechanism and rotationally connected with the pedestal, and the carrying unit is provided with the heating cavity.

3. The laser heating device of claim 2, wherein, The rotating mechanism includes a drive motor and a drive gear, the drive motor is fixedly connected with the pedestal, and the output shaft of the drive motor is connected with the drive gear; The carrying unit includes a coaxially arranged connecting ring and a hollow shaft, one end of the connecting ring is connected with the light transmission plate, the other end of the connecting ring is connected with the hollow shaft, the inside of the connecting ring and the hollow shaft is communicated to form the heating cavity, and the outer circumferential wall of the connecting ring is provided with a driven gear meshing with the drive gear; The hollow shaft penetrates through the pedestal and extends into the vacuum cavity, the hollow shaft is rotationally connected with the pedestal, the outer wall of the hollow shaft and the inner wall of the pedestal are sealed by a magnetic fluid, one end of the hollow shaft away from the connecting ring is provided with a first step surface and a second step surface arranged at intervals, the first step surface is used for placing the heat storage block, and the second step surface is used for placing a transparent substrate sample.

4. The laser heating device of claim 3, wherein, The hollow shaft includes a first shaft body, a second shaft body and a tray connected in sequence in the direction that the laser points to the pedestal, the first shaft body is rotationally connected with the pedestal, the second shaft body is detachably connected with the first shaft body, the circumferential side wall of the second shaft body is provided with an opening, the tray is located at one end of the second shaft body away from the first shaft body, and the first step surface and the second step surface are arranged in the tray.

5. The laser heating device of claim 4, wherein, The length of the second shaft body in the axial direction is adjustable.

6. The laser heating device of claim 3, wherein, The connecting ring includes a first ring body, a sealing ring and a second ring body arranged in sequence in the direction that the laser points to the pedestal; One end of the first ring body towards the laser is provided with a mounting groove for mounting the light transmission plate, and one end of the first ring body towards the sealing ring is provided with a first groove; The second ring body is sleeved on the outer wall of the hollow shaft, one end of the second ring body towards the sealing ring is provided with a second groove, and the outer circumferential side wall of the second ring body is provided with the driven gear; The first groove and the second groove jointly form a sealing groove, and the sealing ring is arranged in the sealing groove.

7. The laser heating device of claim 6, wherein, The bottom surfaces of the first groove and the second groove are both provided with annular protrusions towards the sealing ring, and the annular protrusions abut against the end surface of the sealing ring.

8. The laser heating device of claim 1, wherein, The base comprises a first seat body and a second seat body connected in sequence in the direction in which the laser points to the sample carrier; The first seat body is provided with a mounting cavity penetrating through the first seat body in the direction in which the laser points to the sample carrier, the laser is inserted into the mounting cavity, the circumferential side wall of the first seat body is uniformly distributed with a plurality of adjusting screw holes, an adjusting screw is inserted into the adjusting screw hole, and the threaded end of the adjusting screw abuts against the side wall of the laser; The second seat body is connected with the vacuum coating system at one end away from the first seat body, and the second seat body is connected with the sample carrier.

9. The laser heating device of claim 1, wherein, The camera module is used for image monitoring in the heating cavity, and the temperature measurement module is used for temperature measurement of the heat storage block in the heating cavity.

10. The laser heating device of claim 1, wherein, The laser comprises a plurality of arrayed laser units, the laser unit comprises a laser diode and a laser shaping mirror, and the light beam emitted by the laser diode is transmitted to the heating cavity through the laser shaping mirror and the light transmission plate in sequence.

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