A pre-feeding carrier plate for a chip ultrasonic scanning detector

Abstract

The application discloses a pre-feeding carrier plate for a chip ultrasonic scanning detector. The chip ultrasonic scanning detector comprises a machine body, a water tank is arranged on the machine body, a fixing seat is arranged in the water tank, and the pre-feeding carrier plate is detachably connected to the fixing seat. The pre-feeding carrier plate comprises a plate body, a surrounding fence is arranged on the plate body, and a pre-feeding space is defined in the surrounding fence. The pre-feeding space is filled with a coupling agent. When the chip ultrasonic scanning detector detects a chip, an operator can place the chip to be detected in the pre-feeding space of the pre-feeding carrier plate. After the detection of the previous chip is completed, the operator can replace the pre-feeding carrier plate on the fixing seat, so that the rapid feeding of the chip to be detected is realized. Compared with the prior art, the pre-feeding carrier plate is used to pre-feed the chip by using the detection time of the chip, and the pre-feeding space is filled with the coupling agent, so that the surface of the pre-fed chip is free of bubbles.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip detection, in particular, to a pre-feeding carrier plate for a chip ultrasonic scanning detector. BACKGROUND

[0002] The ultrasonic scanning detector is a non-destructive testing equipment for imaging micro-objects by using ultrasonic waves as a transmission medium. It is widely used in various fields by using the properties of ultrasonic pulse echo to excite a piezoelectric transducer to emit multiple beams of ultrasonic waves through a coupling liquid medium to the sample being tested. The ultrasonic scanning microscope uses pulse echo technology to emit and receive short ultrasonic pulses with high repetition rate by a specific acoustic assembly. To form an acoustic image, the scanning mechanism needs to move back and forth above the sample.

[0003] Currently, when using the ultrasonic scanning detector to analyze the failure of the chip, the scanning detection of the chip and the feeding of the next chip are carried out independently. For example, during the scanning detection of the chip, the operator can only wait on the side; after the detection of the chip is completed, the operator can replace the new chip to be tested, during which the ultrasonic scanning detector is in standby state, which finally leads to the reduction of the detection efficiency of the chip. SUMMARY

[0004] The purpose of the present application is to overcome the shortcomings of the prior art and provide a pre-feeding carrier plate for a chip ultrasonic scanning detector.

[0005] The purpose of the present application is achieved by the following technical solutions:

[0006] A pre-feeding carrier plate for a chip ultrasonic scanning detector, the chip ultrasonic scanning detector comprising a body, a water tank is configured on the body, a fixing seat is arranged in the water tank, the pre-feeding carrier plate is detachably connected to the fixing seat, the pre-feeding carrier plate comprising: a plate body, a surrounding barrier is arranged on the plate body, a pre-feeding space is defined in the surrounding barrier; a coupling agent is filled in the pre-feeding space.

[0007] Preferably, an overflow port is arranged on the side wall of the surrounding barrier.

[0008] Preferably, the surrounding barrier comprises a first surrounding part and a second surrounding part, the second surrounding part is located in the first surrounding part, the pre-feeding space is defined in the second surrounding part, a filling space is defined between the second surrounding part and the first surrounding part; a filling hole is formed through the plate body and communicates with the filling space.

[0009] Preferably, the spacing height between the first surrounding part and the plate body is greater than or equal to the spacing height between the second surrounding part and the plate body.

[0010] Preferably, a flow filling hole is formed through the plate body and communicates with the pre-feeding space, and a blocking shaft is arranged in the flow filling hole.

[0011] Preferably, a float is arranged at the bottom of the blocking shaft, and the float is adapted to lift the blocking shaft under the buoyancy of the coupling agent in the sink.

[0012] Preferably, a flow channel is arranged on the side wall of the blocking shaft, and both ends of the flow channel communicate with the side wall of the blocking shaft, and the both ends of the flow channel are arranged axially and spaced apart.

[0013] Preferably, a spring and / or a counterweight are arranged on the blocking shaft.

[0014] Preferably, a loading plate is arranged in the pre-feeding space of the plate body, and the loading plate or the baffle is adapted to be vertically movable so as to change the height of the pre-feeding space.

[0015] Preferably, the loading plate and the plate body are connected through a recess, the baffle is sealingly and slidingly arranged in the recess, and a spring is arranged on the baffle; a driving shaft is slidingly arranged on the plate body in the vertical direction, a float is arranged at the bottom of the driving shaft, and a transmission mechanism is arranged between the driving shaft and the baffle; the float is adapted to lift the driving shaft under the buoyancy of the coupling agent in the sink, and the transmission mechanism is adapted to receive the lifting driving force of the driving shaft and actuate the baffle to sink.

[0016] Preferably, an air chamber is arranged in the recess, a connecting shaft is sealingly and slidingly arranged on the bottom surface of the baffle and extends into the air chamber, a piston plate is arranged on the connecting shaft, and the piston plate is sealingly and slidingly arranged in the air chamber; an adsorption hole and a liquid injection hole are arranged on the loading plate, the adsorption hole communicates with an upper cavity of the air chamber, a liquid storage bag is arranged in the upper cavity of the air chamber, the liquid injection hole communicates with the liquid storage bag, a liquid inlet of the liquid storage bag sealingly and penetratingly extends into the air chamber, and a one-way valve is arranged in the liquid inlet of the liquid storage bag; when the baffle sinks, the piston plate synchronously descends and forms a negative pressure in the upper cavity of the air chamber; when the baffle rises, the piston plate can extrude the liquid storage bag and make the liquid injection hole spray liquid.

[0017] The beneficial effects of the present application are as follows:

[0018] 1. In the chip ultrasonic scanning detector, the operator can place the chip to be detected in the pre-feeding space of the pre-feeding carrier plate; after the previous chip detection is completed, the operator can replace the pre-feeding carrier plate on the fixing seat, so as to realize the rapid feeding of the chip to be detected. Compared with the prior art, the pre-feeding carrier plate of the present application utilizes the detection time of the chip for pre-feeding, and the pre-feeding space is filled with coupling agent, so that the surface of the pre-feeding chip is free of bubbles.

[0019] 2. The overflow port constructed on the enclosure realizes the slow inflow of the coupling liquid in the water tank into the pre-feeding space, thereby avoiding the situation that the chip is impacted by the water flow.

[0020] 3. The filling hole makes the coupling liquid in the water tank flow into the enclosure from bottom to top, thereby further avoiding the phenomenon of water flow impact in the enclosure. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a structural schematic view of the chip ultrasonic detector;

[0022] Figure 2 It is a structural schematic view of the enclosure;

[0023] Figure 3 It is a structural schematic view of the overflow port;

[0024] Figure 4 It is a structural schematic view of the filling space;

[0025] Figure 5 It is a structural schematic view of the filling hole;

[0026] Figure 6 It is a structural schematic view of the plugging shaft (wherein the left plugging shaft is in the lowered position, and the right plugging shaft is in the raised position);

[0027] Figure 7 It is a structural schematic view of the carrier plate;

[0028] Figure 8 It is Figure 7 the enlarged view of A part.

[0029] Fig. 1, plate body; 2, enclosure; 3, pre-feeding space; 4, overflow port; 5, first enclosing part; 6, second enclosing part; 7, filling space; 8, filling hole; 9, plugging shaft; 10, float; 11, flow channel; 12, carrier plate; 13, recess; 14, drive shaft; 15, transmission mechanism; 16, air chamber; 17, connecting shaft; 18, piston plate; 19, adsorption hole; 20, liquid injection hole; 21, liquid storage bag; 22, first wedge surface; 23, transmission shaft; 24, second wedge surface; 25, machine body; 26, water tank; 27, scanning head; 28, fixing seat. DETAILED DESCRIPTION

[0030] The technical solutions of the present application will be described clearly and completely below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative effort fall within the scope of the present application.

[0031] Chip ultrasonic detector, commonly known as ultrasonic scanning microscope (SAT), is a kind of high-precision equipment for non-destructive testing of internal structure of chip by using high-frequency ultrasonic waves. Its working principle is similar to medical B-ultrasound. High-frequency ultrasonic waves are generated by piezoelectric transducer, transmitted to the chip through coupling liquid (such as water), and the signals reflected by internal interfaces such as delamination, cavity, crack and other defects are received, and high-resolution two-dimensional or three-dimensional images of the internal structure of the chip are reconstructed by computer processing.

[0032] Referring to Figure 1 , a typical chip ultrasonic detector includes a body 25, and a water tank 26 for accommodating coupling liquid is constructed in the body 25. A scanning head 27 can move reciprocally in the water tank 26 through a transfer station in the form of a gantry, so as to scan and detect the chip in the water tank 26. Usually, a detection platform is supported in the water tank 26 by a fixing seat 28, and the detection platform only provides a flat chip loading surface, and the chip to be detected needs to be placed on the chip loading surface and receive scanning and detection from the scanning head 27 above.

[0033] During the detection of the chip by the scanning head 27, in order to avoid disturbance to the coupling liquid in the water tank 26, it is difficult to perform the placement of the next chip to be detected on the chip loading surface in the water tank 26. For example, the chip can only be fed after the detection of the chip is completed and the scanning head 27 stops working.

[0034] To this end, as shown in Figures 2 to 8 , the present disclosure proposes a pre-feeding carrier plate for chip ultrasonic scanning detector, which is adapted to be detachably connected to the fixing seat 28 in the water tank 26, and includes a plate body 1 and a surrounding barrier 2 arranged on the end face of the plate body 1. It can be understood that under the stop of the surrounding barrier 2, a pre-feeding space 3 is defined in the surrounding barrier 2 on the end face of the plate body 1, and the pre-feeding space 3 is filled with coupling agent.

[0035] For example, two pre-loading carriers can be pre-configured, one of which is installed to the fixing seat 28 for chip detection, at which time the staff can place the next chip to be detected in the pre-loading space 3 of the other pre-loading carrier during the chip detection time; after the previous chip completes the detection, only the pre-loading carrier in the water tank 26 needs to be replaced to realize the rapid loading of the chip. Through the filling of the coupling liquid in the pre-loading space 3, the chip is not easy to have air bubbles attached to the surface during the placement or transfer process.

[0036] Referring to Figure 2 , Figure 3 In some embodiments, the overflow port 4 can be formed on the side wall of the enclosure 2, so that during the process of sinking the pre-loading carrier into the water tank 26 to be installed to the fixing seat 28, the coupling liquid in the water tank 26 can flow into the enclosure 2 through the overflow port 4 more gently. That is, the coupling liquid is not easy to cause impact on the chip when it quickly flows into the enclosure 2.

[0037] Referring to Figure 4 , Figure 5 In a possible example, the enclosure 2 can be adapted as a double-layer structure, for example, the enclosure 2 can include the second enclosing part 6 and the first enclosing part 5 enclosed outside the second enclosing part 6. The above-mentioned pre-loading space 3 is defined in the second enclosing part 6, and the first enclosing part 5 and the second enclosing part 6 are defined to form the filling space 7. The plate body 1 is provided with the filling hole 8 which is in communication with the filling space 7.

[0038] It can be imagined that when the pre-loading carrier sinks into the water tank 26, the coupling liquid in the water tank 26 will be stopped outside the first enclosing part 5 first, and the coupling liquid at the bottom of the plate body 1 will flow into the filling space 7 through the filling hole 8 first. On the one hand, the coupling liquid flowing into the filling space 7 can flow into the pre-loading space 3 slowly, thereby avoiding the coupling liquid in the water tank 26 from impacting the chip from top to bottom; on the other hand, since the coupling liquid is filled in the filling space 7, when the coupling liquid in the water tank 26 flows into the filling space 7 after passing over the first enclosing part 5, the coupling liquid in the filling space 7 can buffer it, thereby further avoiding the turbulence in the enclosure 2 and the displacement of the chip caused by the impact.

[0039] As a preference, the spacing height between the first enclosing part 5 and the plate body 1 is adapted to be greater than or equal to the spacing height between the second enclosing part 6 and the plate body 1, especially when the spacing height of the first enclosing part 5 is greater than the spacing height of the second enclosing part 6, the first enclosing part 5 can significantly stop and prevent the coupling liquid in the water tank 26 from flowing into the enclosure 2.

[0040] Referring to Figure 6As other configurations, the fence 2 is still a single-layer structure, and the plate body 1 is provided with a filling hole 8 penetratingly formed and communicating with the pre-feeding space 3. Differently, the filling hole 8 is fitted with a blocking shaft 9, and the bottom of the blocking shaft 9 is provided with a float 10. For example, the float 10 can be a foam body with an inner cavity or other structure capable of floating in the coupling agent.

[0041] When the pre-feeding carrier plate sinks into the water tank 26, the float 10 will lift the blocking shaft 9 to the raised position under the action of the buoyancy, at this time the blocking shaft 9 will open the flow path of the filling hole 8, so that the coupling liquid at the bottom of the plate body 1 can flow into the pre-feeding space 3 from bottom to top through the filling hole 8; and after the pre-feeding carrier plate is separated from the water tank 26, the blocking shaft 9 loses the support of the buoyancy and falls back to the lowered position, at this time the blocking shaft 9 will reseal the flow path of the filling hole 8, so that the pre-feeding space 3 can maintain the coupling liquid for the pre-feeding of the chip.

[0042] For example, the side wall of the blocking shaft 9 can be provided with a flow channel 11 with a "H" shaped cross section, and the two ends of the flow channel 11 are fitted to be communicated with the side wall of the blocking shaft 9, and the flow direction of the flow channel 11 is axially extending. That is, the openings of the two ends of the flow channel 11 are axially spaced. In the lowered position of the blocking shaft 9, the top end of the flow channel 11 is stopped by the side wall of the filling hole 8, realizing the sealing of the flow path of the filling hole 8; and in the raised position of the blocking shaft 9, the top end of the flow channel 11 enters the pre-feeding space 3, and the bottom end of the flow channel 11 is located in the water tank 26, which makes the flow path of the filling hole 8 unobstructed, and the coupling liquid in the water tank 26 can flow into the pre-feeding space 3 through the filling hole 8 via the flow channel 11.

[0043] It can be understood that in this example, the inner wall of the blocking shaft 9 and the filling hole 8 is always tightly fitted, at this time if the drift phenomenon occurs during the detection of the chip, it is not easy for the chip to fall out of the filling hole 8.

[0044] In order to enhance the sealing of the flow path of the filling hole 8 when the blocking shaft 9 is in the lowered position, a connecting spring and / or a counterweight can be provided on the blocking shaft 9, at this time the blocking shaft 9 can be stably maintained in the lowered position by the action of the elastic force or gravity. As preferred, the top end of the blocking shaft 9 can also be provided with a sealing disc, for example, the sealing disc can also be simultaneously configured as the above-mentioned counterweight, at this time under the action of the elastic force or gravity, the sealing disc will abut against the top surface of the plate body 1, thereby further preventing the coupling liquid in the pre-feeding space 3 from leaking out of the filling hole 8.

[0045] Referring to Figure 7 , Figure 8Alternatively, a carrier plate 12 can be constructed in the pre-loading space 3, and either the carrier plate 12 or the enclosure 2 can be adapted to move vertically. For example, when the pre-loading carrier plate is submerged in the water tank 26, the height of the pre-loading space 3 can be gradually reduced by the relative movement of the carrier plate 12 or the enclosure 2. This prevents the coupling fluid in the water tank 26 from rushing into the pre-loading space 3 at an excessively high water level. In other words, the impact force of the coupling fluid on the chip on the carrier plate 12 can be reduced. On the other hand, due to the reduction in the height of the pre-loading space 3, the scanning head 27 can reach a lower position, thereby shortening the distance between the scanning head 27 and the chip. That is, the scanning moment of the scanning head 27 on the chip is reduced, and the chip can be scanned and detected with higher accuracy.

[0046] During the chip pre-loading process, the pre-loading space 3 can maintain a suitable height, so that the coupling fluid in it has a suitable water depth, thereby ensuring that there are no air bubbles on the surface of the pre-loaded chip.

[0047] In some embodiments, the relative movement of the loading plate 12 and the enclosure 2 can be achieved by braking an electromagnetic mechanism (not shown). For example, an electromagnet can be installed on the enclosure 2. When the pre-loading loading plate is submerged in the water tank 26, the electromagnet is energized and the loading plate 12 is lifted by magnetic force, thereby lowering the height of the pre-loading space 3. In possible examples, the relative movement of the loading plate 12 and the enclosure 2 can also be achieved by braking an ejection mechanism (not shown) such as an electric cylinder or a pneumatic cylinder.

[0048] In a preferred embodiment, the carrier plate 12 is adapted to be connected to the plate body 1 via a recess 13, thereby forming an annular groove between the carrier plate 12 and the plate body 1. The aforementioned enclosure 2 is slidably fitted into the annular groove, and the bottom end of the enclosure 2 can extend into the recess 13. In addition, a spring is connected to the enclosure 2, and the elastic restoring force of the spring drives the enclosure 2 to remain in the raised state to retain the coupling fluid inside the enclosure 2. A drive shaft 14 is also slidably fitted vertically on the plate body 1, and a float 10 is provided at the bottom of the drive shaft 14. A transmission mechanism 15 is also adapted between the drive shaft 14 and the enclosure 2.

[0049] When the pre-loading carrier plate sinks into the water tank 26, the float 10 will lift the drive shaft 14 under the buoyancy, and the transmission mechanism 15 can receive the lifting driving force of the drive shaft 14 and convert it into the driving force to drive the enclosure 2 to sink. Thus, the height of the pre-loading space 3 can be reduced without an external power source, so that the chips on the carrier plate 12 are not easily impacted by the water flow.

[0050] In a possible example, the side wall of the fence 2 and the drive shaft 14 can be provided with a rack-like toothed structure (not shown in the figure), and the transmission mechanism 15 can include a transmission gear set (not shown in the figure) rotatably arranged on the plate body 1, which can be connected by a belt wheel. When the drive shaft 14 is lifted, the fence 2 will sink under the meshing transmission of the toothed structure and the transmission gear set.

[0051] In another possible example, a first wedge surface 22 can be arranged on the side wall of the fence 2, and a transmission shaft 23 can be elastically arranged on the plate body 1, and the end of the transmission shaft 23 can be provided with a wedge surface for transmission, and a second wedge surface 24 can be arranged on the side wall of the drive shaft 14. For example, when the drive shaft 14 is lifted, the second wedge surface 24 can push the transmission shaft 23 to move laterally, and then the transmission shaft 23 will push the fence 2 to sink through the transmission of the first wedge surface 22.

[0052] When the pre-loading carrier plate is taken out of the water tank 26, the transmission shaft 23 will be reset under the action of the elastic member, so that the fence 2 rises again.

[0053] Referring to Figure 8 , the recess 13 can also be provided with an air chamber 16, and a piston plate 18 is sealingly and slidingly fitted in the air chamber 16. The bottom surface of the fence 2 is provided with a connecting shaft 17 sealingly extending into the air chamber 16, and the bottom end of the connecting shaft 17 is fixed to the piston plate 18. It can be imagined that with the sinking and rising of the above-mentioned fence 2, the piston plate 18 will synchronously descend and move upward in the air chamber 16.

[0054] The end surface of the carrier plate 12 is provided with an adsorption hole 19 and a liquid injection hole 20, wherein the adsorption hole 19 is in communication with the upper cavity of the air chamber 16, for example, the adsorption hole 19 and the upper cavity of the air chamber 16 can be connected by a pipeline. At this time, the chip to be detected can be placed above the adsorption hole 19 and the liquid injection hole 20; with the sinking of the fence 2, the piston plate 18 will descend and drive the upper cavity of the air chamber 16 to form a negative pressure; under the negative pressure, the chip to be detected can be adsorbed at the adsorption hole 19 to realize the fixation of the chip, thereby preventing the chip from drifting during the detection process.

[0055] The upper cavity of the air chamber 16 is also preferably provided with a liquid storage bag 21, and the liquid injection hole 20 and the liquid storage bag 21 can also be connected by a pipeline. And the liquid inlet of the liquid storage bag 21 passes through the air chamber 16 in a sealed manner, for example, when the pre-loading carrier plate sinks into the water tank 26, the liquid inlet of the liquid storage bag 21 will be exposed to the coupling liquid in the water tank 26. And, the liquid inlet of the liquid storage bag 21 is also provided with a one-way valve that allows liquid to flow only to one side of the liquid storage bag 21.

[0056] It can be imagined that after the above-mentioned enclosure 2 sinks, the upper cavity of the air chamber 16 forms a negative pressure, the liquid storage bag 21 will drive the coupling liquid in the water tank 26 to flow into its bag body under the action of the negative pressure; and when the pre-feeding carrier plate is taken out of the water tank 26, the enclosure 2 rises, the synchronously rising piston plate 18 will squeeze the liquid storage bag 21, and the coupling liquid in the liquid storage bag 21 will be sprayed out of the liquid injection hole 20, which makes the chip more easily separated from the carrier plate 12, and the phenomenon that the chip is difficult to take out due to the tension adsorption between the chip and the carrier plate 12 does not easily occur.

[0057] Based on the setting of the liquid storage bag 21, on the one hand, the chip is fixed in the coupling liquid by using the air pressure adsorption, because the traditional chip air pressure adsorption is only suitable for a non-liquid environment, and in a liquid environment, the chip is easily adsorbed on the carrier plate 12 due to the liquid tension, which is difficult to take out. The disclosure utilizes the spray flow of the liquid injection hole 20 on the bottom surface of the chip to make the chip more easily separated from the carrier plate 12.

[0058] On the other hand, the air pressure adsorption of the chip in the disclosure is dynamic, in the initial stage of the descent of the piston plate 18, the upper cavity of the air chamber 16 will quickly form a negative pressure, so that the chip can be stably adsorbed on the carrier plate 12. But with the expansion of the liquid storage bag 21, the volume of the upper cavity of the air chamber 16 will become smaller, according to the Boyle law, the negative pressure formed in the upper cavity of the air chamber 16 will rise at this time, so that the adsorption hole 19 can adsorb the chip with a more appropriate negative pressure, so as not to easily cause excessive compression or damage to the surface of the chip.

[0059] The above-mentioned is only the preferred embodiment of the present application, it should be understood that the present application is not limited to the form disclosed herein, should not be regarded as excluding other embodiments, and can be used in various other combinations, modifications and environments, and can be modified within the scope of the concept described herein, by the above-mentioned teaching or related technical or knowledge. The modification and change made by the person skilled in the art without departing from the spirit and scope of the present application shall be within the protection scope of the claims attached to the present application.

Claims

1. A pre-loading carrier board for a chip ultrasonic scanning detector, the chip ultrasonic scanning detector comprising a body, a water tank constructed on the body, and a fixing seat disposed in the water tank, characterized in that: The pre-loading carrier plate is detachably connected to the fixed base, and the pre-loading carrier plate includes: A plate (1), on which a enclosure (2) is provided, and a pre-loading space (3) is defined in the enclosure (2); The pre-feeding space (3) is appropriately filled with coupling agent; The enclosure (2) includes a first enclosure (5) and a second enclosure (6), the second enclosure (6) being located inside the first enclosure (5), the pre-feeding space (3) being defined in the second enclosure (6), and a filling space (7) being defined between the second enclosure (6) and the first enclosure (5); The plate (1) has a through-hole (8) that communicates with the filling space (7); or, The plate (1) has a through-hole (8) that communicates with the pre-feeding space (3), and a sealing shaft (9) is adapted in the through-hole (8); The bottom of the sealing shaft (9) is provided with a float (10), which is adapted to lift the sealing shaft (9) under the buoyancy of the coupling agent in the water tank; When the sealing shaft (9) is in the lowered position, the sealing shaft (9) maintains the seal on the flow path of the filling hole (8); When the sealing shaft (9) is in the raised position, the sealing shaft (9) releases the seal on the flow path of the filling hole (8); or, The plate (1) has a loading plate (12) constructed in the pre-loading space (3), and the loading plate (12) or the enclosure (2) is adapted to be vertically movable, thereby changing the height of the pre-loading space (3).

2. The pre-loading carrier board for the chip ultrasonic scanning detector according to claim 1, characterized in that: An overflow outlet (4) is provided on the side wall of the enclosure (2).

3. The pre-loading carrier board for the chip ultrasonic scanning detector according to claim 1, characterized in that: The distance between the first enclosure (5) and the plate (1) is greater than or equal to the distance between the second enclosure (6) and the plate (1).

4. The pre-loading carrier board for the chip ultrasonic scanning detector according to claim 1, characterized in that: The sealing shaft (9) has a flow channel (11) on its side wall. Both ends of the flow channel (11) are connected to the side wall of the sealing shaft (9), and the two ends of the flow channel (11) are spaced apart along the axial direction.

5. The pre-loading carrier board for a chip ultrasonic scanning detector according to claim 1 or 4, characterized in that: The sealing shaft (9) is equipped with a spring and / or a counterweight.

6. The pre-loading carrier board for the chip ultrasonic scanning detector according to claim 1, characterized in that: The loading plate (12) is connected to the plate body (1) through a recess (13), the enclosure (2) is sealed and slidably adapted to the recess (13), and a spring is connected to the enclosure (2); The plate (1) is fitted with a drive shaft (14) that slides vertically along the upper edge. A float (10) is provided at the bottom of the drive shaft (14). A transmission mechanism (15) is fitted between the drive shaft (14) and the enclosure (2). The float (10) is adapted to lift the drive shaft (14) under the buoyancy of the coupling agent in the water tank, and the transmission mechanism (15) is adapted to receive the lifting driving force of the drive shaft (14) and thereby actuate to drive the enclosure (2) to sink.

7. The pre-loading carrier board for a chip ultrasonic scanning detector according to claim 6, characterized in that: An air chamber (16) is provided in the recess (13), and a connecting shaft (17) is provided on the bottom surface of the enclosure (2) and extends into the air chamber (16). A piston plate (18) is provided on the connecting shaft (17) and the piston plate (18) is adapted to the air chamber (16) in a sealed sliding manner. The carrier plate (12) is provided with an adsorption hole (19) and a spray hole (20), and the adsorption hole (19) is connected to the upper cavity of the air chamber (16). The upper cavity of the air chamber (16) is also provided with a liquid storage bladder (21), the spray hole (20) is connected to the liquid storage bladder (21), the liquid inlet of the liquid storage bladder (21) is sealed through the air chamber (16), and a one-way valve is provided in the liquid inlet of the liquid storage bladder (21). When the enclosure (2) sinks, the piston plate (18) descends synchronously, creating a negative pressure in the upper cavity of the air chamber (16); When the enclosure (2) rises, the piston plate (18) can squeeze the liquid reservoir (21) and cause the liquid jet from the spray hole (20).

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