Flexible flight operation device and application method

Abstract

The invention relates to the technical field of precision manufacturing, in particular to a flexible flight operation device and an application method. The flexible flight operation device comprises a horizontal driving mechanism, a longitudinal driving mechanism and a contact piece, and the horizontal driving mechanism drives the longitudinal driving mechanism to move in the horizontal direction; the longitudinal driving mechanism comprises a micro-motion driver and a micro-motion amplification mechanism, the micro-motion driver is connected with the micro-motion amplification mechanism, the contact piece is arranged at the tail end of the micro-motion amplification mechanism, and the micro-motion amplification mechanism sequentially conducts lever amplification and bridge amplification on micro-displacement output by the micro-motion driver and then transmits the micro-displacement to the contact piece. Therefore, the contact piece moves in the longitudinal direction. The micro displacement of the micro driver is amplified by the micro amplification mechanism, so that the contact piece has enough displacement distance, and the micro workpiece can smoothly fall into the target carrier plate. And the longitudinal stroke of the contact piece can be adjusted according to requirements to adapt to diversified transfer working conditions, so that the transfer success rate and the transfer yield are greatly improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision manufacturing technology, in particular to a flexible flying operation device and a use method thereof. BACKGROUND

[0002] In the field of precision manufacturing technology such as microelectronic manufacturing, nanotechnology and 3D printing, a direct contact type transfer technology is used to transfer a micro workpiece from a source carrier to a target carrier by physical contact. For example, some existing flying operation devices drive a contact member (such as a needle) to vertically move and collide with a micro workpiece (such as a chip) on the source carrier, so that the micro workpiece on the source carrier is peeled off and vertically falls on the target carrier. In this process, the contact member maintains the same horizontal speed as the source carrier.

[0003] In order to meet the requirements of high precision and high response, piezoelectric ceramics are used as the driver in the prior art. However, the displacement generated by the piezoelectric ceramics is small, which may result in insufficient displacement distance of the contact member, and thus the micro workpiece cannot be successfully dropped on the target carrier. In addition, the stroke of the contact member is fixed, which is difficult to adapt to various transfer conditions. For example, when processing a micro or fragile workpiece, the excessive stroke or force may cause crushing or damage; when processing a slightly larger workpiece, insufficient stroke or force may cause pickup failure or poor placement. SUMMARY

[0004] The main purpose of the present application is to provide a flexible flying operation device and a use method thereof, which aims to amplify the micro displacement of a micro drive to provide sufficient displacement distance for the contact member, so that the micro workpiece can be successfully dropped on the target carrier. At the same time, the longitudinal stroke of the contact member can be adjusted according to the requirements to adapt to various transfer conditions, and the transfer success rate and yield are greatly improved.

[0005] To achieve the above purpose, the present application provides a flexible flying operation device, which comprises a horizontal driving mechanism, a longitudinal driving mechanism and a contact member, wherein the horizontal driving mechanism drives the longitudinal driving mechanism to move in the horizontal direction;

[0006] The longitudinal driving mechanism comprises a micro drive and a micro amplification mechanism, the micro drive is connected with the micro amplification mechanism, the contact member is arranged at the tail end of the micro amplification mechanism, and the micro amplification mechanism sequentially amplifies the micro displacement output by the micro drive through lever amplification and bridge amplification and then transmits the amplified displacement to the contact member, so that the contact member moves in the longitudinal direction.

[0007] The flexible flight operating device, the micro-motion amplifier mechanism comprises a lever amplification structure and a bridge amplification structure, the micro-motion driver is connected with the lever amplification structure to input micro displacement to the lever amplification structure, the lever amplification structure is connected with the bridge amplification structure to input the micro displacement amplified by the lever to the bridge amplification structure, and the contact piece is arranged at the output end of the bridge amplification structure.

[0008] The flexible flight operating device, the micro-motion driver can be adjusted in position relative to the micro-motion amplifier mechanism to change the position of the force application point of the lever amplification structure, and then adjust the lever ratio of the lever amplification structure.

[0009] The flexible flight operating device, the horizontal driving mechanism comprises a macro-motion frame, the lever amplification structure comprises a horizontally extending micro-motion beam and longitudinally extending first and second lever frames, the micro-motion beam is rigidly connected with the macro-motion frame, the first and second lever frames are located on both sides of the micro-motion beam in the horizontal direction, the top ends of the first and second lever frames are connected with the macro-motion frame through flexible hinges respectively, and the two ends of the micro-motion beam are connected with the first and second lever frames through flexible hinges correspondingly.

[0010] The micro-motion driver is located below the micro-motion beam, and the two ends of the micro-motion driver correspondingly apply horizontal force to the first and second lever frames.

[0011] The bridge amplification structure is located below the micro-motion driver, and the two ends of the bridge amplification structure are correspondingly connected with the first and second lever frames.

[0012] The flexible flight operating device, the middle part of the macro-motion frame is provided with a connecting plate, the connecting plate is provided with a connecting seat, the connecting seat can be locked to adjust the position relative to the connecting plate in the longitudinal direction, and the micro-motion driver is horizontally arranged in the connecting seat and can move in the horizontal direction relative to the connecting seat.

[0013] The flexible flight operating device, the side wall of the first lever frame is provided with a strip-shaped sliding groove, and the output shaft of the micro-motion driver is lockably and slidably matched with the strip-shaped sliding groove.

[0014] The flexible flight operating device, the bridge amplification structure comprises a first connecting arm, an output arm and a second connecting arm sequentially connected through flexible hinges in the horizontal direction, the first connecting arm and the second connecting arm are connected with the corresponding first and second lever frames through flexible hinges, and the output arm is connected with the contact piece.

[0015] The flexible flight operating device, the micro-motion amplifier mechanism is a left-right axis symmetrical structure.

[0016] The flexible flight operation device further comprises a vibration isolation frame, the horizontal driving mechanism further comprises a macro driver, the upper and lower sides of the macro frame are connected with the vibration isolation frame through flexible hinges, and the macro driver is arranged on one side in the vibration isolation frame, and the output shaft of the macro driver is connected with one side of the macro frame in the horizontal direction.

[0017] The second aspect of the present application discloses a use method applied to the flexible flight operation device, comprising the following steps:

[0018] Step S1: the horizontal driving mechanism and the longitudinal driving mechanism drive the contact to move in the horizontal direction and the longitudinal direction until reaching the operation point of transferring the workpiece, at this time, the contact is located above the workpiece to be transferred;

[0019] Step S2: the longitudinal driving mechanism drives the contact to move downward and collide with the workpiece to be transferred, so that the workpiece to be transferred is peeled off from the source carrier plate and falls on the target carrier plate; after the contact moves downward to the preset position, the longitudinal driving mechanism drives the contact to move upward, so that the contact is located above the source carrier plate again;

[0020] The horizontal driving mechanism always drives the contact to move in the horizontal direction, and the horizontal moving speed of the contact is the same as the moving speed of the source carrier plate;

[0021] Step S3: repeating steps S1-S2.

[0022] The technical scheme provided by the present application can include the following beneficial effects:

[0023] In the flexible flight operation device provided in the embodiment, the micro displacement of the micro driver is amplified by the micro-amplification mechanism, so that the contact has sufficient displacement distance, and the small workpiece can be smoothly transferred to the target carrier plate. In addition, after the micro displacement of the micro driver is sequentially amplified by the lever amplification and the bridge amplification, the micro-amplification mechanism has greater amplification capacity, so that the contact can have greater longitudinal displacement.

[0024] By adjusting the position of the micro driver, the amplification ratio of the micro-amplification mechanism as a whole can be changed, so that the longitudinal stroke of the contact can be adjusted according to the demand, and the transfer working condition is adapted to the diversity, and the transfer success rate and yield are greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0026] Figure 1 Structure diagram of a flexible flight operating device according to an embodiment of the present application;

[0027] Figure 2 Structure diagram of a longitudinal driving mechanism according to an embodiment of the present application;

[0028] Figure 3 Structure diagram of a macro-motion frame according to an embodiment of the present application;

[0029] Figure 4 Diagram of a first lever frame connected with a micro-motion driver according to an embodiment of the present application;

[0030] Figure 5 Diagram of displacement of a contact according to an embodiment of the present application;

[0031] Figure 6 Diagram of a mechanical model of a flexible flight operating device according to an embodiment of the present application;

[0032] Figure 7 Diagram of force analysis of a macro-motion frame according to an embodiment of the present application;

[0033] Figure 8 Diagram of force analysis of a first lever frame according to an embodiment of the present application;

[0034] Figure 9 Diagram of force analysis of a second lever frame according to an embodiment of the present application;

[0035] Figure 10 Diagram of an operating flow of a flexible flight operating device according to an embodiment of the present application.

[0036] Figure 11 Diagram of a motion curve of a contact according to an embodiment of the present application.

[0037] In the drawings: 100 - a horizontal driving mechanism, 110 - a macro-motion frame, 111 - a connecting plate, 112 - a connecting seat, 120 - a macro-motion driver, 200 - a longitudinal driving mechanism, 210 - a micro-motion driver, 220 - a micro-motion amplification mechanism, 221 - a lever amplification structure, 2211 - a micro-motion suspension beam, 2212 - a first lever frame, 2213 - a second lever frame, 2214 - a strip-shaped sliding groove, 2215 - a fastening nut, 222 - a bridge-type amplification structure, 2221 - a first connecting arm, 2222 - an output arm, 2223 - a second connecting arm, 300 - a contact, 400 - a flexible hinge, 500 - a vibration isolation frame. DETAILED DESCRIPTION

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0039] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0040] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0041] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the word "and / or" throughout the text means including three parallel solutions; taking "A and / or B" as an example, it includes solution A, solution B, or a solution that simultaneously satisfies A and B. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0042] The following is combined Figures 1 to 4 This invention describes a flexible flight control device according to an embodiment of the present invention, which can be applied to precision manufacturing fields such as microelectronics manufacturing, nanotechnology, and 3D printing. Figure 1In the illustrated embodiment, the flexible flight control device includes a horizontal drive mechanism 100, a longitudinal drive mechanism 200, and a contact 300. The horizontal drive mechanism 100 drives the longitudinal drive mechanism 200 to move horizontally. The longitudinal drive mechanism 200 includes a micro-motion actuator 210 and a micro-motion amplification mechanism 220. The micro-motion actuator 210 is connected to the micro-motion amplification mechanism 220. The contact 300 is disposed at the end of the micro-motion amplification mechanism 220. The micro-motion amplification mechanism 220 transmits the micro-displacement output by the micro-motion actuator 210 to the contact 300 after sequential lever amplification and bridge amplification, thereby causing the contact 300 to move in the longitudinal direction. Preferably, the micro-motion actuator 210 is a piezoelectric ceramic.

[0043] In the flexible flight control device provided in this embodiment, the micro-displacement of the micro-actuator 210 is amplified by the micro-motion amplification mechanism 220, so that the contact member 300 has sufficient displacement distance, allowing the small workpiece to fall smoothly into the target carrier plate. Furthermore, after the micro-motion amplification mechanism 220 sequentially amplifies the micro-displacement of the micro-actuator 210 using lever and bridge amplification, it has a greater amplification capability, enabling the contact member 300 to have a greater longitudinal displacement.

[0044] For example, such as Figure 2 The illustrated flexible flight control device includes a micro-motion amplification mechanism 220 comprising a lever amplification structure 221 and a bridge amplification structure 222. A micro-motion actuator 210 is connected to the lever amplification structure 221 to input a micro-displacement. The lever amplification structure 221 is connected to the bridge amplification structure 222 to input a lever-amplified micro-displacement to the bridge amplification structure 222. A contact element 300 is disposed at the output end of the bridge amplification structure 222. The micro-motion amplification mechanism 220, formed by the combined lever amplification structure 221 and the bridge amplification structure 222, amplifies the micro-displacement of the micro-motion actuator 210 in multiple stages, ensuring sufficient displacement distance for the contact element 300, allowing the small workpiece to smoothly land on the target carrier.

[0045] Preferably, the micro-motion actuator 210 can be adjusted relative to the micro-motion amplification mechanism 220 to change the position of the force application point acting on the lever amplification structure 221, thereby adjusting the lever ratio of the lever amplification structure 221. In this embodiment, by adjusting the position of the micro-motion actuator 210 to change the position of the force application point acting on the lever amplification structure 221, the lever ratio of the lever amplification structure 221 can be adjusted, thereby changing the amplification ratio of the lever amplification structure 221. Since the amplification ratio of the bridge amplification structure 222 does not change due to the lever ratio or the position of the micro-motion actuator 210, the overall amplification ratio of the micro-motion amplification mechanism 220 will change according to the lever ratio of the lever amplification structure 221. This allows the longitudinal stroke of the contact member 300 to be adjusted as needed, adapting to diverse transfer conditions and significantly improving the transfer success rate and yield. For example, when dealing with small workpieces of different sizes, the overall magnification ratio of the micro-amplification mechanism 220 can be increased by adjusting the lever ratio, thereby increasing the longitudinal stroke of the contact element 300 and overcoming the defects of insufficient stroke or insufficient force of the contact element 300 leading to pickup failure or improper placement. When dealing with smaller workpieces, the overall magnification ratio of the micro-amplification mechanism 220 can be decreased by adjusting the lever ratio, thereby decreasing the longitudinal stroke of the contact element 300 and overcoming the defects of excessive longitudinal stroke or excessive force of the contact element 300 leading to crushing or damage.

[0046] For example, the horizontal drive mechanism 100 includes a macro-motion frame 110, and the lever amplification structure 221 includes a horizontally extending micro-motion beam 2211 and a longitudinally extending first lever frame 2212 and second lever frame 2213; the micro-motion beam 2211 is rigidly connected to the macro-motion frame 110, the first lever frame 2212 and the second lever frame 2213 are located on both sides of the micro-motion beam 2211 in the horizontal direction, and the top ends of the first lever frame 2212 and the second lever frame 2213 are respectively connected to the macro-motion frame via flexible hinges 400. The micro-motion lifting beam 2211 is connected at both ends to the first lever frame 2212 and the second lever frame 2213 via flexible hinges 400. The micro-motion actuator 210 is located below the micro-motion lifting beam 2211, and both ends of the micro-motion actuator 210 apply horizontal force to the first lever frame 2212 and the second lever frame 2213. The bridge amplification structure 222 is located below the micro-motion actuator 210, and both ends of the bridge amplification structure 222 are connected to the first lever frame 2212 and the second lever frame 2213. The micro-motion amplification mechanism 220 of this embodiment, which first uses lever amplification and then bridge amplification, has a simple structure, fewer impact-affected parts, and the micro-motion lifting beam 2211 can be used to withstand impacts.

[0047] Specifically, such as Figure 2As shown, the top ends of the first lever frame 2212 and the second lever frame 2213 are first connected to the macro-motion frame 110 via flexible hinges 400 to limit the movement of the top ends of the first lever frame 2212 and the second lever frame 2213, making the top ends of the first lever frame 2212 and the second lever frame 2213 fixed fulcrums. Furthermore, the end of the micro-motion beam 2211 is connected to the first lever frame 2212 and the second lever frame 2213 via flexible hinges 400, allowing the first lever frame 2212 and the second lever frame 2213 to rotate slightly around their own top ends, forming a lever amplification structure 221. When the output shaft of the micro-motion actuator 210 located on the micro-motion beam 2211 extends or retracts, both ends of the micro-motion actuator 210 exert forces on the first lever frame 2212 and the second lever frame 2213. Points in the section between the bottom of the first lever frame 2212 and the point of force application of the micro-motion actuator 210 are all amplification points. In the first lever frame 2212 and the second lever frame 2213, the leverage ratio is L1 is the distance from the point of force application of the micro-actuator 210 to its own top, and L2 is the distance from the connection point with the bridge amplification structure 222 to its own top.

[0048] It is worth noting that the micro-motion lifting beam 2211 is rigidly connected to the macro-motion frame 110, and the end of the micro-motion lifting beam 2211 is connected to the first lever frame 2212 and the second lever frame 2213 through the flexible hinge 400. This avoids the absorption of part of the amplified displacement by the micro-motion lifting beam 2211 while ensuring that the amplification ratio can be completely transmitted to the contact member 300, thereby further improving the transmission effect of the amplified displacement.

[0049] More specifically, the macro-motion frame 110 has a connecting plate 111 in the middle, and the connecting plate 111 has a connecting seat 112. The connecting seat 112 can be locked and its position can be adjusted longitudinally relative to the connecting plate 111. The micro-motion actuator 210 is horizontally disposed on the connecting seat 112 and can move horizontally relative to the connecting seat 112. Figure 2 In the optional embodiment shown, the connecting seat 112 can be a linear bearing, and the micro-actuator 210 is slidably inserted into the middle of the linear bearing. When the output shaft of the micro-actuator 210 extends and retracts, both ends of the micro-actuator 210 simultaneously apply a horizontal force to the first lever frame 2212 and the second lever frame 2213. For example, as... Figure 3As shown, the connecting plate 111 is provided with a longitudinally extending groove. The connecting seat 112 is fixed to the connecting plate 111 by bolts and nuts, that is, the bolt passes through the connecting seat 112 and then through the groove to be threadedly connected to the nut. By loosening the bolts and nuts, the connecting seat 112 is unlocked, allowing it to move within the groove, thereby adjusting the micro-motion actuator 210 and changing the force application point of the micro-motion actuator 210 on the first lever frame 2212 and the second lever frame 2213, thus changing the lever ratio. Of course, in other embodiments, the connecting plate 111 can also be provided with multiple longitudinally spaced through holes, and the bolt passes through the connecting seat 112 and the through holes to be connected to the nut. When it is necessary to adjust the longitudinal position of the connecting seat 112, the bolt can be connected to the nut through another through hole. Of course, in other optional embodiments, the connecting seat 112 can also be moved longitudinally by a linear drive mechanism to change the longitudinal position of the micro-motion actuator 210.

[0050] Optionally, the side wall of the first lever frame 2212 is provided with a strip groove 2214, and the output shaft of the micro-actuator 210 is lockably slidably engaged with the strip groove 2214. For example, as... Figure 4 As shown, the output shaft of the micro-actuator 210 can be slidably engaged with the strip groove 2214 by means of a fastening bolt and a fastening nut 2215. Specifically, the head of the fastening bolt is fixed to the end of the output shaft of the micro-actuator 210, and the stud of the fastening bolt passes through the strip groove 2214 and is threadedly engaged with the fastening nut 2215. When the fastening nut 2215 is tightened, it abuts against the outer wall of the first lever frame, and the micro-actuator 210 abuts against the inner wall of the first lever frame 2212, thus achieving a stable connection between the output shaft of the micro-actuator 210 and the first lever frame 2212. When it is necessary to adjust the position of the micro-actuator 210, the fastening nut 2215 can be loosened, allowing the micro-actuator 210 to change its position relative to the first lever frame 2212 in the longitudinal direction.

[0051] Optionally, the bridge-type amplification structure 222 includes a first connecting arm 2221, an output arm 2222, and a second connecting arm 2223 sequentially connected in a horizontal direction via a flexible hinge 400. The first connecting arm 2221 and the second connecting arm 2223 are connected to a first lever frame 2212 and a second lever frame 2213 on corresponding sides via the flexible hinge 400. The output arm 2222 is connected to the contact member 300. For example, as shown... Figure 2In the optional embodiment shown, the first connecting arm 2221, the output arm 2222, and the second connecting arm 2223 are horizontally spaced apart. The flexible hinge 400 between the first connecting arm 2221 and the first lever frame 2212 is located below the horizontal centerline l of the bridge amplification structure 222, and the flexible hinge 400 between the first connecting arm 2221 and the output arm 2222 is located above the horizontal centerline l of the bridge amplification structure 222. The flexible hinge 400 between the output arm 2222 and the second connecting arm 2223 is located above the horizontal centerline l of the bridge amplification structure 222, and the flexible hinge 400 between the second connecting arms 2223 is located below the horizontal centerline l of the bridge amplification structure 222. When the output shaft of the micro-actuator 210 extends, the micro-actuator 210 undergoes a small displacement, causing the first lever frame 2212 and the second lever frame 2213 to bulge outwards simultaneously, stretching the first connecting arm 2221 and the second connecting arm 2223. This causes the first connecting arm 2221 and the second connecting arm 2223 to rotate downwards around the connection point, thereby causing the output arm 2222 to move downwards, driving the contact member 300 to move downwards in the longitudinal direction. Conversely, when the micro-actuator 210 retracts axially, the opposite occurs. Figure 5 As shown, the bridge amplification structure 222 returns to its original state at this time.

[0052] Preferably, the micro-amplification mechanism 220 has a left-right axis symmetric structure. This enhances the structural stability of the device.

[0053] More specifically, the flexible flight control device further includes a vibration isolation frame 500, and the horizontal drive mechanism 100 further includes a macro actuator 120. The upper and lower sides of the macro actuator frame 110 are connected to the vibration isolation frame 500 via flexible hinges 400. The macro actuator 120 is disposed on one side within the vibration isolation frame 500, and the output shaft of the macro actuator 120 is connected to one side of the macro actuator frame 110 in the horizontal direction. Preferably, the macro actuator 120 can be a voice coil motor.

[0054] Specifically, such as Figure 1 In the embodiment shown, the top and bottom of the macro-motion frame 110 are connected to the vibration isolation frame 500 via two flexible hinges 400, respectively.

[0055] In one specific embodiment of the present invention, the flexible flight manipulation device operates on a flexible source substrate with an array of chips and a target substrate on which the chips are placed. During operation, both the source substrate and the target substrate maintain a constant horizontal speed. The objective of the flexible flight manipulation device is to peel the array of chips on the source substrate onto the target substrate using a contact member 300. In this embodiment, the contact member 300 is a needle.

[0056] First, the force process and dynamic equations of this flexible flight control device are described. With the center of the needle tip as the origin, the direction of motion of the source carrier plate is defined as the X-axis, and the direction of the needle's up-and-down motion is defined as the Z-axis, thus establishing the needle's motion coordinate system.

[0057] The macro actuator 120 displaces by pushing the macro frame 110. The thrust is transmitted to the micro-amplification mechanism 220. The flexible hinge 400 connecting the macro-moving frame 110 and the vibration isolation frame 500 can be considered as a spring-damped structure, with an equivalent stiffness of... Damping is Quality is The force applied by the micro-actuator 210 to the first lever frame 2212 is... The flexible hinge 400 connected to the first lever frame 2212 can be considered as a spring-damped structure, with an equivalent stiffness of [missing value]. Damping is Quality is The flexible hinge 400 connected to the second lever frame 2213 can be considered as a spring-damped structure, with an equivalent stiffness of [missing value]. Damping is Quality is The symmetrical bridge-type amplification structure 222 has the same displacement amplification ratio.

[0058] like Figure 7 As shown, the macro-motion frame 110 has the following force characteristics: it is directly subjected to the thrust of the macro-motion driver 120. The direction is to the right. The macro-moving frame 110 is connected to the vibration isolation frame 500 via a flexible hinge 400, and the macro-moving frame 110 is subjected to frictional force connected to the vibration isolation frame 500. Size is The direction is to the right. For the macro frame displacement of 110 The derivative of The coefficient of viscous friction between the vibration isolation frame 500 and the macro-motion frame 110 is given. The macro-motion frame 110 is connected to the micro-motion amplification mechanism 220 via a flexible hinge 400. The flexible hinge 400 connecting the macro-motion frame 110 and the first lever frame 2212 can be considered as a spring-damped structure, and the macro-motion frame 110 will be subjected to the spring force exerted by the first lever frame 2212. Size is The direction is to the left. The displacement of the first lever frame 2212; damping force Size is The direction is to the left. For the displacement of the first lever frame 2212 The derivative of the second lever frame 2213. The flexible hinge 400 connecting the macro-motion frame 110 and the second lever frame 2213 can be regarded as a spring-damped structure, and the macro-motion frame 110 will be subjected to the spring force of the second lever frame 2213. Size is The direction depends on and Size, For the displacement of the second lever frame 2213, if Greater than The direction is to the right, if Less than Direction to the left; damping force Size is , For the displacement of the second lever frame 2213 The derivative, the direction of which depends on and The size, if Greater than The direction is to the right, if Less than The direction is to the left. The micro-actuator 210 is fixed to the connecting plate 111 and connected to the micro-actuator beam 2211, i.e., connected to the macro-actuator frame 110. The inconsistent forces applied by the micro-actuator to the first lever frame 2212 and the second lever frame 2213 will cause the macro-actuator frame 110 to also experience frictional forces from the first lever frame 2212 and the second lever frame 2213. The frictional force of the first lever frame 2212 on the macro-actuator frame 110 is... Size is The direction is to the left. The coefficient of viscous friction between the first lever frame 2212 and the macromotion frame 110 is given. The frictional force exerted by the second lever frame 2213 on the macromotion frame 110 is given. Size is The direction depends on and The size, if Greater than The direction is to the right, if Less than The direction is to the left. It is the coefficient of viscous friction between the second lever frame 2213 and the macro motion frame 110.

[0059] like Figure 8 As shown, the first lever frame 2212 has the following force characteristics: it is directly subjected to the thrust of the micro-actuator 210. The direction is to the left. The first lever frame 2212 is connected to the macro-motion frame 110 via a flexible hinge 400, which can be considered a spring-damped structure. The micro-motion left side frame will be subjected to the spring force exerted by the macro-motion frame 110. Size is Direction to the right; damping force Size is The direction is to the right. The micro-actuator 210 is mounted on the connecting plate 111. The inconsistent force it applies to the first lever frame 2212 and the second lever frame 2213 causes both the first and second lever frames 2212 to also experience frictional force from the macro-actuator 110. The frictional force of the first lever frame 2212 on the macro-actuator 110 is... Size is The direction is to the right.

[0060] like Figure 9 As shown, the second lever frame 2213 has the following force characteristics: it is directly subjected to the thrust of the micro-actuator 210. The direction is to the right. The second lever frame 2213 is connected to the macro-motion frame 110 via a flexible hinge 400, which can be considered a spring-damped structure. The second lever frame 2213 will be subjected to the spring force exerted on it by the macro-motion frame 110. Size is The direction depends on and The size, if Greater than The direction is to the left, if Less than Direction to the right; damping force Size is The direction depends on and The size, if Greater than The direction is to the left; if Less than The direction is to the right. The micro-actuator 210 is mounted on the connecting plate 111. The inconsistent force it applies to the first lever frame 2212 and the second lever frame 2213 causes both the first and second lever frames 2212 and 2213 to also experience frictional force from the macro-actuator 110. The frictional force of the second lever frame 2213 on the macro-actuator 110 is... Size is The direction depends on and The size, if Greater than The direction is to the left, if Less than The direction is to the right.

[0061] Specifically, the force process and dynamic equations of the device are as follows:

[0062] ;

[0063] make The X matrix is , The matrix is ​​then , The matrix is ; This represents a function of the change in time of an external force exerted by the macro actuator on the macro frame; This represents a function of the change in time of an external force exerted by the micro-actuator on the first lever frame 2212; This represents a function of the change in time of an external force exerted by the micro-actuator on the second lever frame 2213;

[0064] The dynamic equations are as follows:

[0065] ;

[0066] Specifically, matrices M and K are shown below:

[0067] ;

[0068] ;

[0069] like Figure 5 As shown, under the macro-motion action, the micro-motion amplification mechanism 220, and the macro-motion driver 120, displace the macro-motion frame 110 by pushing the macro-motion mechanism 220. The force is transmitted to the micro-motion amplification mechanism 220, and then to the needle. When the micro-motion amplification mechanism 220 is not activated, the force applied by the micro-motion actuator 210 to the first lever frame 2212 is... The direction is to the left, and the displacement will be... The force transmitted to the first lever frame 2212 and applied to the second lever frame 2213 by the micro-actuator 210 is... The direction is to the right, and the displacement will be... The displacement of the needle in the X direction is transmitted to the first lever frame 2212. .

[0070] When the micro-motion amplification mechanism 220 is not subjected to macro-motion, the micro-motion actuator 210 will displace... The displacement is transmitted to the first lever frame 2212, and the micro actuator 210 will move the lever frame 2212. The force is transmitted to the second lever frame 2213. In the lever amplification structure 221 composed of the first lever frame 2212, the second lever frame 2213, the micro-motion lifting beam 2211, and the flexible hinge 400, the tops of the first lever frame 2212 and the second lever frame 2213 are the fulcrums, the point of action of the micro-motion actuator 210 is the force application point, and the sections of the first lever frame 2212 and the second lever frame 2213 below the force application point are the displacement amplification points. The distance from the point of action of the micro-motion actuator 210 is... The distance from the connection point of the bridge-type amplification structure 222 to its own top end leverage ratio Under the action of the lever, the displacement of the connection point between the first lever frame 2212 and the bridge amplification structure 222 is... The displacement of the point where the first lever frame 2212 connects to the bridge amplification structure 222 is It amplifies the displacement through the bridge-type amplification structure 222. and displacement The amplification is transmitted to the needle, where the amplification ratio of the bridge amplification structure 222 is... The displacement formula for the needle is as follows:

[0071] ;

[0072] .

[0073] like Figures 10-11 As shown, the present invention also provides a method for using the flexible flight operation device applied to any of the above embodiments, comprising the following steps:

[0074] Step S1: The horizontal drive mechanism 100 and the longitudinal drive mechanism 200 drive the contact member 300 to move in the horizontal and longitudinal directions until they reach the operation point for transferring the workpiece. At this point, the contact member 300 is positioned above the workpiece to be transferred. Figure 10 A schematic diagram of states ① and ②. Figure 10 ① indicates that the needle starts moving and changes speed in the X and Z directions to move the needle to the operation point for transferring the workpiece. Figure 10 In Figure ①, it indicates that the needle has reached the operating point of the workpiece to be transferred, at which point the needle maintains a uniform speed in the X direction. The source carrier plate and the target carrier plate have the same speed. ; Let be the velocity of the needle in the X direction. The velocity of the needle in the Z direction is denoted as .

[0075] Step S2: The longitudinal drive mechanism 200 drives the contact member 300 to move downward and collide with the workpiece to be transferred, so that the workpiece to be transferred is peeled off from the source carrier plate and falls onto the target carrier plate; after the contact member 300 moves down to the preset position, the longitudinal drive mechanism 200 drives the contact member 300 to move upward, so that the contact member 300 is above the source carrier plate.

[0076] In this configuration, the horizontal drive mechanism 100 continuously maintains the horizontal movement of the drive contact 300, and the horizontal movement speed of the contact 300 is the same as the movement speed of the source carrier plate; for example... Figure 10 A schematic diagram of state ③. Figure 10 In the diagram, ③ indicates that the needle moves along the Z-direction to separate the workpiece. For example... Figure 10 The diagram shows state ④. After the needle moves along the Z-direction above the source carrier plate, the velocity of the needle in the X-direction is less than... This allows the workpiece to be moved to the next operation point for transfer.

[0077] Step S3: Repeat steps S1-S2. Specifically, Figure 11 The diagram illustrates the flight trajectory of a flexible flight control device according to an embodiment, where the contact 300 operates continuously. This allows chips arranged in an array on a source substrate to be stripped to a target substrate via the contact 300.

[0078] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made under the concept of the present invention using the contents of the present invention specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present invention.

Claims

1. A flexible flight control device, characterized in that, It includes a horizontal drive mechanism, a vertical drive mechanism, and a contact element, wherein the horizontal drive mechanism drives the vertical drive mechanism to move in the horizontal direction; The longitudinal drive mechanism includes a micro-motion actuator and a micro-motion amplification mechanism. The micro-motion actuator is connected to the micro-motion amplification mechanism. The contact element is disposed at the end of the micro-motion amplification mechanism. The micro-motion amplification mechanism transmits the micro-displacement output by the micro-motion actuator to the contact element after sequential lever amplification and bridge amplification, so as to make the contact element move in the longitudinal direction.

2. The flexible flight operation device according to claim 1, characterized in that: The micro-motion amplification mechanism includes a lever amplification structure and a bridge amplification structure. The micro-motion driver is connected to the lever amplification structure to input micro-displacement to the lever amplification structure. The lever amplification structure is connected to the bridge amplification structure to input the lever-amplified micro-displacement into the bridge amplification structure; The contact element is located at the output end of the bridge amplification structure.

3. The flexible flight operation device according to claim 2, characterized in that: The micro-motion actuator can be adjusted relative to the micro-motion amplification mechanism to change the position of the force application point acting on the lever amplification structure, thereby adjusting the lever ratio of the lever amplification structure.

4. A flexible flight operation device according to any one of claims 2-3, characterized in that: The horizontal drive mechanism includes a macro-motion frame, and the lever amplification structure includes a horizontally extending micro-motion beam and a longitudinally extending first lever frame and second lever frame. The micro-motion beam is rigidly connected to the macro-motion frame, and the first lever frame and the second lever frame are located on both sides of the micro-motion beam in the horizontal direction. The top ends of the first lever frame and the top ends of the second lever frame are respectively connected to the macro-motion frame via flexible hinges. The two ends of the micro-motion beam are connected to the first lever frame and the second lever frame respectively via flexible hinges. The micro-motion actuator is located below the micro-motion lifting beam, and the two ends of the micro-motion actuator apply horizontal force to the first lever frame and the second lever frame respectively. The bridge-type amplification structure is located below the micro-motion actuator, and the two ends of the bridge-type amplification structure are connected to the first lever frame and the second lever frame respectively.

5. A flexible flight operation device according to claim 4, characterized in that: The macro-motion frame has a connecting plate in the middle, and the connecting plate has a connecting seat. The connecting seat can be locked and its position can be adjusted longitudinally relative to the connecting plate. The micro-motion actuator is horizontally arranged on the connecting seat and can move horizontally relative to the connecting seat.

6. The flexible flight operation device according to claim 5, characterized in that: The side wall of the first lever frame is provided with a strip groove, and the output shaft of the micro-motion actuator can be locked and slidably engaged with the strip groove.

7. A flexible flight operation device according to claim 4, characterized in that: The bridge-type amplification structure includes a first connecting arm, an output arm, and a second connecting arm connected sequentially in the horizontal direction by flexible hinges. The first connecting arm and the second connecting arm are connected to the first lever frame and the second lever frame on the corresponding side by flexible hinges. The output arm is connected to the contact element.

8. The flexible flight operation device according to claim 1, characterized in that: The micro-amplification mechanism has a left-right axis symmetrical structure.

9. A flexible flight operation device according to claim 4, characterized in that: It also includes a vibration isolation frame, and the horizontal drive mechanism further includes a macro actuator. The upper and lower sides of the macro actuator frame are connected to the vibration isolation frame via flexible hinges. The macro actuator is disposed on one side inside the vibration isolation frame, and the output shaft of the macro actuator is connected to one side of the macro actuator frame in the horizontal direction.

10. A method of using the flexible flight operation device as described in any one of claims 1-9, characterized in that: Includes the following steps: Step S1: The horizontal drive mechanism and the vertical drive mechanism drive the contact element to move in the horizontal and vertical directions until it reaches the operation point for transferring the workpiece. At this time, the contact element is located above the workpiece to be transferred. Step S2: The longitudinal drive mechanism drives the contact member to move downward and collide with the workpiece to be transferred, so that the workpiece to be transferred is peeled off from the source carrier and falls onto the target carrier. After the contact element moves down to the preset position, the longitudinal drive mechanism drives the contact element to move upward, so that the contact element is back above the source carrier plate; The horizontal drive mechanism keeps the drive contact moving in the horizontal direction, and the horizontal movement speed of the contact is the same as the movement speed of the source carrier plate. Step S3: Repeat steps S1-S2.

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