Metal mask

Abstract

This application provides a metal photomask. The metal photomask includes an effective area, a clamping area, and a transition area. The clamping area spacing is located at at least one end of the effective area along a first direction; the clamping area includes a gripper area located at at least one end along a second direction; the second direction intersects the first direction and is parallel to the metal photomask; the transition area is located between the effective area and the clamping area; the transition area includes at least one strip area; along the second direction, the strip area includes a middle area, a gripper-corresponding area, and an edge area; the edge area surrounds the gripper-corresponding area and the middle area; along the first direction, the gripper area and the gripper-corresponding area at least partially overlap; the middle area includes a plurality of first through holes, the gripper-corresponding area includes a plurality of second through holes, and the edge area includes a plurality of third through holes; within a unit volume, the volume ratio of the edge area, the gripper-corresponding area, and the middle area decreases sequentially. This application, through a zoned design of the transition area, provides it with sufficient strength to resist the pulling force of the grippers.

Description

Technical Field

[0001] This invention relates to the field of display device manufacturing technology, and more specifically, to a metal photomask. Background Technology

[0002] In the manufacturing process of semiconductor display devices (such as Organic Light-Emitting Diodes, OLEDs), many film structures are formed by vapor deposition using metal masks. Specifically, the metal mask is strip-shaped, including an effective region in the middle, clamping regions at both ends, and a transition region between the effective region and the clamping regions. The effective region has pixel deposition holes corresponding to the substrate of the display device. Before deposition, the metal mask needs to be soldered onto a mask frame in the form of a mesh. Then, the clamping regions are removed, leaving the effective region, and the light-emitting material is deposited onto the substrate through the pixel deposition holes. The transition region buffers the stress abrupt change from the clamping region to the effective region and bears the deformation caused by stress buffering, protecting the effective region and preventing deformation that would affect the deposition effect.

[0003] In the prior art, the transition zone adopts the same pixel vapor deposition hole structure as the effective zone. The holes in the transition zone are the same size and evenly distributed, which has the following problems: (1) During the stretching process, the clamping area needs to be clamped by the clamping claw. The tension from the clamping claw acts on the clamping area. The area in the transition zone corresponding to the clamping area is also subjected to the tension from the clamping claw, which causes local stress concentration in the direction of tension in the transition zone. Its own strength is insufficient, resulting in excessive deformation or even breakage. In the end, the transition zone cannot play the expected buffering role. (2) The uniform design of the holes in the transition zone results in the edge area and the middle area of ​​the transition zone having the same strength. Since the edge area bears greater edge stress during the stretching process, the uniform design leads to insufficient strength in the edge area. During the stretching process, the edge area is prone to plastic deformation or even breakage, which means that the transition zone cannot play the expected stress buffering role. Summary of the Invention

[0004] This invention provides a metal mask that allows the strength of the corresponding area of ​​the gripper to be higher in the middle area than in the gripper area, and the strength of the edge area to be higher than that of the corresponding area of ​​the gripper. This enables the corresponding area of ​​the gripper to have sufficient strength to resist tensile forces, thereby reducing the possibility of excessive deformation or even breakage of the corresponding area of ​​the gripper due to insufficient strength. The specific technical solution is as follows.

[0005] This application provides a metal photomask, including:

[0006] Effective area;

[0007] The clamping area is spaced at at least one end of the effective area along a first direction; the clamping area includes: a gripper area located at at least one end along a second direction; the second direction intersects the first direction and is parallel to the metal mask.

[0008] A transition zone is provided between the effective zone and the clamping zone; the transition zone includes at least one strip zone; along the second direction, the strip zone includes: an intermediate zone, a jaw corresponding zone connected to at least one end of the intermediate zone, and an edge zone surrounding the intermediate zone and the jaw corresponding zone; along the first direction, the jaw zone and the jaw corresponding zone at least partially overlap.

[0009] The middle area includes multiple arrays of first through holes, the gripper area includes multiple arrays of second through holes, and the edge area includes multiple arrays of third through holes. Within a unit volume, the proportion of solid volume in the edge area, the proportion of solid volume in the gripper area, and the proportion of solid volume in the middle area decrease sequentially. Along the direction from the outer edge of the edge area to the inner edge, the proportion of solid volume within a unit volume of the edge area gradually decreases.

[0010] In some embodiments, the unperforated area of ​​the metal mask has a designed thickness, and the two sides are located on a first plane and a second plane, respectively;

[0011] In the edge region, the spacing between the third through holes remains unchanged; along the direction from the outer edge of the edge region to the inner edge, the large diameter of the third through hole on the first plane gradually increases, while the small diameter on the second plane remains unchanged.

[0012] In some embodiments, in the outermost third through hole of the edge region, the edges of adjacent third through holes are spaced on the first plane, and the spaced area has a designed thickness;

[0013] In the innermost third through hole of the edge region, the edges of adjacent third through holes intersect, and the thickness of the solid part at the intersection is less than the design thickness but not less than 40% of the design thickness.

[0014] In some embodiments, in the area corresponding to the gripper, the hole spacing of the second through hole remains unchanged and is equal to the hole spacing of the third through hole, and the large diameter of the second through hole is not less than the large diameter of the third through hole.

[0015] In some embodiments, the third through hole in the edge region closest to the corresponding area of ​​the gripper is the same size as the second through hole in the corresponding area of ​​the gripper closest to the edge region.

[0016] In some embodiments, the edges of adjacent second through holes intersect, and the thickness of the solid portion at the intersection is not greater than the thickness of the solid portion at the intersection of the edges of the third through hole and not less than 40% of the design thickness.

[0017] In some embodiments, the hole spacing of the first through hole in the intermediate region remains unchanged; the hole spacing of the second through hole in the corresponding region of the gripper is greater than the hole spacing of the first through hole in the intermediate region.

[0018] On the first plane, the ratio of the large diameter of the second through hole to the large diameter of the first through hole is not less than 20% and not more than 30%; on the second plane, the small diameter of the second through hole is the same as the small diameter of the first through hole.

[0019] In some embodiments, along the first direction, two transition regions are respectively connected to both ends of the effective region, and two clamping regions are respectively connected to the end of each transition region away from the effective region;

[0020] Along the second direction, the two gripper areas are located at the two ends of the gripping area, respectively;

[0021] Within each strip, the two grippers are connected to the two ends of the middle strip respectively.

[0022] In some embodiments, in the transition region, multiple strip regions are arranged along a first direction;

[0023] Along the direction away from the effective area, the proportion of solid volume per unit volume in multiple strip areas gradually decreases.

[0024] In some embodiments, along the direction away from the effective area, among the plurality of strip areas, the large diameter of at least one of the first through hole, the second through hole, and the third through hole at the same position gradually increases, while the hole spacing and the small diameter remain unchanged.

[0025] The metal photomask provided by this invention has the following technical effects:

[0026] 1. This invention comprehensively considers the stress conditions of the edge region of the transition zone and the corresponding area of ​​the grippers in the transition zone during the tensioning process, and designs the through-hole distribution of the transition zone. By dividing the transition zone into three areas: the edge region, the gripper corresponding area, and the middle region, the proportion of solid volume per unit volume is such that the edge region is larger than the gripper corresponding area, which is larger than the middle region. This ensures that during the tensioning process, the transition zone has sufficient strength to resist the non-uniform stress changes from the outermost edge of the mask to the edge region of the transition zone, as well as the tensile force on the gripper corresponding area, thus preventing severe deformation or even damage to the transition zone. Therefore, it can play a buffering role between the gripping area and the effective area.

[0027] (1) Specifically, in the edge region of the transition zone, the present invention sets the hole spacing of the edge region from the outermost to the innermost edge to remain unchanged, and the small diameter of the third through hole on the second plane remains unchanged, but the large diameter of the third through hole on the first plane gradually increases, so that the proportion of the solid volume per unit volume in the edge region gradually decreases from the outermost to the innermost edge, thereby making the strength of the edge region change uniformly in this direction, avoiding stress abrupt changes caused by strength jumps, and thus ensuring that the edge region has sufficient strength to resist the non-uniform stress changes that occur from the outermost edge of the mask to the edge region of the transition zone. Furthermore, (a) at the outermost edge of the edge region, there is a spacing between adjacent third through holes on the first plane, with the spacing equal to the design thickness of the mask, forming a full-circumference reinforcing rib structure at the outermost edge of the edge region to enhance the deformation resistance of the outermost edge; (b) from the outermost to the innermost part, by increasing the large aperture of the third through holes on the first plane, the large apertures of two adjacent third through holes in the innermost part intersect, forming a residual thickness at the intersection of the mask, controlling the residual thickness to be no less than 40% of the design thickness of the mask, ensuring that the innermost part still has sufficient strength. Through the above-mentioned distribution design of the third through holes, the edge region can resist the non-uniform stress changes that occur from the outermost edge of the mask to the edge region of the transition zone.

[0028] (2) In the area corresponding to the grippers, the second through hole is set to be the same as the third through hole at the innermost edge of the edge area, that is, the hole spacing, the large hole diameter on the first plane, and the small hole diameter on the second plane are all the same; in the middle area, the mask has multiple first through holes, and compared with the area corresponding to the grippers, the hole spacing of the second through holes is greater than the hole spacing of the first through holes, and the small hole diameter of the second through hole on the second plane is also the same as the small hole diameter of the first through hole, but the large hole diameter of the second through hole on the first plane is smaller than the large hole diameter of the first through hole on the first plane. Through the above settings, the strength of the mask in the transition area can be transitioned more evenly from the edge area, the area corresponding to the grippers to the middle area, and the non-uniform stress change that occurs from the outermost edge of the mask to the edge area of ​​the transition area, as well as the clamping tension effect in the area corresponding to the grippers, are fully considered to ensure that the transition area has sufficient strength and can not be severely deformed or even damaged during the tensioning process, thereby providing the desired buffering effect in the effective area and the clamping area.

[0029] 2. Based on this, the present invention further designs the through-hole distribution in the transition zone, and arranges multiple strip zones sequentially along the direction from the effective zone to the clamping zone in the transition zone, so that the solid volume ratio per unit volume of the strip zone closer to the clamping zone is smaller, that is, the strip zone closest to the clamping zone bears the greatest stress buffering effect, and thus deformation occurs on the strip zone closest to the clamping zone, thereby ensuring that the other side of the transition zone closest to the welding zone is relatively flat. Therefore, the mask welding zone adjacent to the other side is also kept as flat as possible to ensure the welding effect and avoid the welding zone being affected by stress, which would cause uneven welding between the mask and the frame, and ultimately affect the vapor deposition effect of the effective zone. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of a metal photomask provided in an embodiment of this application;

[0032] Figure 2 This application provides a schematic diagram of the structure of a strip region in a metal photomask.

[0033] Figure 3 This is a schematic diagram of the arrangement of the third through hole in a metal mask provided in an embodiment of this application;

[0034] Figure 4 This is a schematic diagram of the arrangement of the second through holes in a metal mask provided in an embodiment of this application;

[0035] Figure 5 This is a schematic diagram of the arrangement of the first through holes in a metal mask provided in an embodiment of this application;

[0036] Figure 6 A cross-sectional schematic diagram of a through hole in a metal mask provided for an embodiment of this application;

[0037] Figure 7 This is a cross-sectional schematic diagram of another type of through hole in a metal mask provided in an embodiment of this application.

[0038] Figure label:

[0039] 100 - Effective area; 101 - Welding area;

[0040] 200 - Transition zone; 201 - Strip zone; 210 - Intermediate zone; 211 - First through hole; 220 - Gripper corresponding zone; 221 - Second through hole; 230 - Edge zone; 231 - Third through hole;

[0041] 300 - Gripping area; 310 - Gripper area;

[0042] A - First plane; B - Second plane. Detailed Implementation

[0043] The embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the embodiments described below with reference to the accompanying drawings are exemplary descriptions for explaining the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions of the embodiments of this application.

[0044] Those skilled in the art will understand that, unless specifically stated otherwise, the terms "described" and "the" as used herein may also include plural forms. It should be further understood that the term "comprising" as used in this application's specification means the presence of the described features, integers, and / or components, but does not exclude other features, data, elements, components, and / or combinations thereof supported by this art. It should be understood that when we say an element is "connected to" another element, the element may be directly connected or coupled to the other element, or it may mean that the element and the other element are connected through an intermediate element. The term "and / or" as used herein refers to at least one of the items defined by the term.

[0045] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0046] This application provides a metal photomask, the structural schematic diagram of which is shown below. Figures 1-5 As shown, the metal mask includes: an effective area 100, a clamping area 300, and a transition area 200.

[0047] The clamping areas 300 are spaced at at least one end of the effective area 100 along the first direction; the clamping areas 300 include: a gripper area 310 located at at least one end along the second direction; the second direction intersects the first direction and is parallel to the metal mask.

[0048] A transition zone 200 is disposed between the effective zone 100 and the clamping zone 300; the transition zone 200 includes at least one strip zone 201; along the second direction, the strip zone 201 includes: an intermediate zone 210, a jaw corresponding zone 220 connected to at least one end of the intermediate zone 210, and an edge zone 230 surrounding the intermediate zone 210 and the jaw corresponding zone 220; along the first direction, the jaw zone 310 and the jaw corresponding zone 220 at least partially overlap.

[0049] The intermediate region 210 includes multiple arrayed first through holes 211, the gripper-corresponding region 220 includes multiple arrayed second through holes 221, and the edge region 230 includes multiple arrayed third through holes 231. Within a unit volume, the volume percentage of the edge region 230, the volume percentage of the gripper-corresponding region 220, and the volume percentage of the intermediate region 210 decrease sequentially. Along the direction from the outer edge to the inner edge of the edge region 230, the volume percentage of the edge region 230 within a unit volume gradually decreases.

[0050] This embodiment comprehensively considers the stress conditions of the edge region 230 of the transition zone 200 and the gripper corresponding region 220 of the transition zone 200 corresponding to the clamping region 300 during the tensioning process, and designs the through-hole distribution of the transition zone 200 accordingly. By dividing the transition zone 200 into three regions: the edge region 230, the gripper corresponding region 220, and the middle region 210, the proportion of solid volume per unit volume is such that the edge region 230 is larger than the gripper corresponding region 220, which is larger than the middle region 210. This ensures that during the tensioning process, the transition zone 200 has sufficient strength to resist the non-uniform stress changes from the outermost edge of the metal mask to the edge region of the transition zone 200, as well as the tensile force on the gripper corresponding region 220, thus preventing severe deformation or even damage to the transition zone 200. Therefore, it can play a buffering role between the clamping region 300 and the effective region 100.

[0051] Specifically, in this embodiment, a transition zone 200 is provided between the effective area 100 and the clamping area 300. The strip area 201 within the transition zone 200 is divided along the second direction into a claw-corresponding area 220, an intermediate area 210, and an edge area 230 surrounding the outer ring. The third through hole 231 of the edge area 230, the second through hole 221 of the claw-corresponding area 220, and the first through hole 211 of the intermediate area 210 can buffer stress and protect the effective area 100 when the claw-corresponding area 220 and the intermediate area 210 are not deformed or are appropriately deformed, thereby ensuring that the effective area 100 remains flat during the netting process and reducing the possibility of deformation of the effective area 100.

[0052] Secondly, the pulling direction from the gripper is mainly parallel to the first direction in the embodiment of this application. In the first direction, the gripper area 310 in the gripping area 300 that is in contact with the gripper corresponds at least partially to the gripper-corresponding area 220. The area in the gripping area 300 that is not in contact with the gripper corresponds at least partially to the middle area 210. The volume ratio of the solid volume per unit volume of the gripper-corresponding area 220 is larger than that of the middle area 210, which makes the gripper-corresponding area 220 stronger than the middle area 210. This allows the gripper-corresponding area 220 to have sufficient strength to resist the pulling force when subjected to a pulling force parallel to the first direction, thereby reducing the possibility of the gripper-corresponding area 220 deforming excessively or breaking due to insufficient strength.

[0053] Furthermore, in strip region 201, edge region 230 surrounds the connected intermediate region 210 and gripper corresponding region 220. The proportion of solid volume per unit volume of intermediate region 210, gripper corresponding region 220, and edge region 230 increases sequentially. Therefore, the strength of intermediate region 210, gripper corresponding region 220, and edge region 230 increases sequentially. The solid portion of edge region 230 located outside strip region 201 can act as annular reinforcing ribs to ensure the strength of the entire strip region 201, thereby preventing excessive deformation or breakage of strip region 201 during the stretching process of metal mask.

[0054] Furthermore, the proportion of solid volume per unit volume in the edge region 230 gradually increases from the inside to the outside, and the strength gradually increases. This causes the strength in the strip region 201 to increase from the middle region 210 to the corresponding regions 220 of the claws on both sides, and also to gradually increase from the edge region 230 to the edge of the strip region 201. This allows the strip region 201 to better connect with the unopened areas outside the strip region 201, preventing excessive deformation or cracking due to sudden stress changes.

[0055] It should be noted that the metal mask is strip-shaped, with the first direction aligned with the length of the metal mask and the second direction aligned with the width of the metal mask.

[0056] It should be noted that the intermediate region 210 has a first through hole 211, so the area of ​​the intermediate region 210 without an opening is the solid part of the intermediate region 210. The gripper corresponding region 220 has a second through hole 221, so the area of ​​the gripper corresponding region 220 without an opening is the solid part of the gripper corresponding region 220. The edge region 230 has a third through hole 231, so the area of ​​the edge region 230 without an opening is the solid part of the edge region 230. The ratio of the solid part of each region to the overall volume of each region is the solid volume percentage of each region.

[0057] It should be noted that within the same metal mask, the volume ratio of each region is directly proportional to its strength; the larger the volume ratio, the higher the strength.

[0058] In some embodiments, in the first direction, the gripper area 310 corresponds completely to the gripper corresponding area 220, and the area in the gripping area 300 where the gripper does not contact corresponds completely to the intermediate area 210.

[0059] In some embodiments, such as Figures 6-7 As shown, Figures 6-7The through-holes in the middle of the strip area 201 can refer to the first through-hole 211, the second through-hole 221, or the third through-hole 231. Each through-hole (such as the first through-hole 211, the second through-hole 221, or the third through-hole 231) in the metal mask is manufactured using a double-sided semi-etching one-time forming process. Specifically, a large funnel-shaped blind hole and a small funnel-shaped blind hole are etched on both sides of the metal mask. The solid portion at the intersection of the large and small funnel-shaped blind holes is etched away, forming the central opening connecting the large and small funnel-shaped blind holes. Therefore, each through-hole (such as the first through-hole 211, the second through-hole 221, or the third through-hole 231) in the metal mask has a large diameter opening at one end and a small diameter opening at the other end, tapering in the middle.

[0060] It should be noted that the thickness of the metal photomask before drilling is the design thickness. For example... Figure 7 As shown, when the large diameter of each through-hole (such as the first through-hole 211, the second through-hole 221, or the third through-hole 231) is large, the funnel edges of adjacent through-holes may intersect inside the metal mask. The overlapping portion at the intersection has no solid support and will be etched away, making the intersection the lowest point of the metal mask, where the thickness is less than the designed thickness of the metal mask. Therefore, the thickness of the metal mask varies.

[0061] In some embodiments, such as Figures 2-3 , Figures 4-5 As shown, the area of ​​the metal mask without openings has a designed thickness, and the two sides are located on the first plane A and the second plane B, respectively.

[0062] In the edge region 230, the hole spacing of the third through hole 231 remains unchanged; along the direction from the outer edge to the inner edge of the edge region 230, the large diameter of the third through hole 231 on the first plane A gradually increases, while the small diameter on the second plane B remains unchanged.

[0063] In this embodiment, the first plane A can be considered as the plane containing the bottom surface of the un-perforated area of ​​the metal mask, and the second plane B can be considered as the plane containing the top surface of the metal mask. In the edge region 230, this embodiment adopts a design where the spacing between the third through holes 231 remains constant from the outside to the inside, the small hole diameter remains constant, and the large hole diameter gradually increases. This makes the size of the third through holes 231 transition evenly, thereby making the strength of the edge region 230 gradually and stably weaken from the outer edge to the junction with the corresponding area 220 of the gripper and the middle area 210, so as to connect the strength of the corresponding area 220 of the gripper and the middle area 210, and avoid the strength jump caused by insufficient uniform strength transition.

[0064] It should be noted that the hole spacing is the distance between the center lines of adjacent through holes (such as the first through hole 211, the second through hole 221, or the third through hole 231), or the distance between the centers of the larger diameter openings of adjacent through holes, or the distance between the centers of the smaller diameter openings of adjacent through holes.

[0065] It should be noted that, Figure 3 231 in each of the third through holes Figure 4 In each of the second through holes 221 and Figure 5 In each first through hole 211, the solid square represents the small-diameter opening of the through hole on the second plane B, the dashed square represents the large-diameter opening of the through hole on the first plane A, and the intersection of the dashed squares represents the intersection of the edges of the through holes.

[0066] In some embodiments, the edge region 230 has seven concentric rings of third through holes 231 from the outside in. Adjacent third through holes 231 in the outermost ring do not intersect, with a spacing of 2-3 micrometers, forming reinforcing ribs to ensure appropriate strength for the outermost ring of the edge region. The large-diameter third through holes 231 in the 6th-7th rings (the 7th ring being the innermost ring) intersect, and the residual thickness at the intersection (e.g., ...) Figure 7 The thickness of H in the design should not be less than 40%.

[0067] In some embodiments, such as Figure 3 , Figure 6 and Figure 7 As shown, in the outermost third through hole 231 of the edge region 230, the edges of adjacent third through holes 231 have a spacing on the first plane A, and the spacing has a designed thickness.

[0068] In the innermost third through hole 231 of the edge region 230, the edges of adjacent third through holes 231 intersect, and the thickness of the solid part at the intersection is less than the design thickness and not less than 40% of the design thickness.

[0069] In this embodiment, based on the design of the third through holes 231 in the edge region 230 having a constant spacing and gradually increasing large aperture, there is a gap between the outermost third through holes 231 in the edge region 230, so that the un-holeed solid portion of the outer region of the edge region 230 has a designed thickness; the edge portions between the innermost third through holes 231 in the edge region 230 intersect, so that the thickness of the solid portion at the intersection is less than the designed thickness. However, the solid thickness at the intersection is greater than 40% of the designed thickness, so that the intersection, as the thinnest position of the edge region 230, can still ensure sufficient strength required by the metal mask, and prevent the edge region 230 from being too thin and damaged.

[0070] It should be noted that, Figure 6 In the middle, adjacent through holes do not intersect and have a gap. The thickness at the gap has the designed thickness and is consistent with the thickness of other unopened areas. Figure 7 In this process, adjacent through holes intersect, causing the thickness at the intersection to be less than the designed thickness, which is H and is called the residual thickness. Therefore, in areas where the metal mask is thinner, the bottom surface of the metal mask is no longer within the first plane A. The large aperture of the first through hole 211, the second through hole 221, or the third through hole 231 is a virtual aperture, and is not equal to the aperture of their respective openings on the bottom surface of the metal mask.

[0071] In some embodiments, such as Figures 2-4 As shown, in the corresponding area 220 of the gripper, the hole spacing of the second through hole 221 remains unchanged and is equal to the hole spacing of the third through hole 231, and the large diameter of the second through hole 221 is not less than the large diameter of the third through hole 231.

[0072] In this embodiment, based on the design that the spacing of the third through holes 231 in the edge region 230 remains unchanged and the large diameter gradually increases, the spacing of the second through holes 221 in the gripper corresponding region 220 and the small diameter also remain unchanged. The large diameter of the second through holes 221 in the gripper corresponding region 220 is not less than the large diameter of the third through holes 231, so that the strength of the gripper corresponding region 220 is definitely less than the strength of the edge region 230, avoiding the situation of thin-strong-thin strength, avoiding the occurrence of strength peaks in small areas, and thus reducing the risk of wrinkles or breakage.

[0073] In some embodiments, such as Figures 2-4 As shown, the third through hole 231 of the edge region 230 closest to the gripper corresponding region 220 is the same size as the second through hole 221 of the gripper corresponding region 220 closest to the edge region 230.

[0074] In this embodiment, based on the fact that the strength of the edge region 230 gradually weakens from the outside to the inside, the third through hole 231 of the edge region 230 closest to the gripper corresponding region 220 is the same size as the second through hole 221 of the gripper corresponding region 220 closest to the edge region 230. This ensures that the strength of the gripper corresponding region 220 is definitely less than the strength of the edge region 230, and is closest to the strength of the innermost region of the edge region 230. This keeps the strength of the position of the edge region 230 closest to the gripper corresponding region 220 and the position of the gripper corresponding region 220 closest to the edge region 230 unchanged, preventing abrupt changes in the strength of the edge region 230 and the gripper corresponding region 220.

[0075] In some embodiments, such as Figures 3-4 As shown, the edges of adjacent second through holes 221 intersect, and the thickness of the solid portion at the intersection is not greater than the thickness of the solid portion at the intersection of the edges of the third through hole 231 and not less than 40% of the design thickness.

[0076] In this embodiment, based on the intersection of the edges of adjacent third through holes 231 at the innermost periphery of the edge region 230, and the large diameter of the second through hole 221 in the gripper corresponding region 220 being no less than the large diameter of the third through hole 231, the edges of adjacent second through holes 221 also intersect. The thickness of the solid portion at the intersection of the edges of the second through holes 221 is no greater than the thickness of the solid portion at the intersection of the edges of the third through holes 231, so that the strength of the edge region 230 to the gripper corresponding region 220 gradually weakens, preventing the strength from increasing again in the gripper corresponding region 220 and thus generating a strength peak.

[0077] Moreover, the thickness of the solid portion at the intersection of the edges of the second through hole 221 is not less than 40% of the design thickness, so that the corresponding area 220 of the gripper has reduced strength compared with the edge area 230 while ensuring its own minimum required strength, preventing the corresponding area 220 of the gripper from being damaged during the netting process due to insufficient strength.

[0078] In some embodiments, such as Figures 2-5 As shown, the hole spacing of the first through hole 211 in the intermediate region 210 remains unchanged; the hole spacing of the second through hole 221 in the corresponding region 220 of the gripper is greater than the hole spacing of the first through hole 211 in the intermediate region 210.

[0079] On the first plane A, the ratio of the large diameter of the second through hole 221 to the large diameter of the first through hole 211 is not less than 20% and not more than 30%; on the second plane B, the small diameter of the second through hole 221 is the same as the small diameter of the first through hole 211.

[0080] In this embodiment, from the edge region 230 to the gripper-corresponding region 220 and then to the middle region 210, the hole spacing of the third through hole 231 and the hole spacing of the second through hole 221 remain unchanged and are the same, which is greater than the hole spacing of the first through hole 211; the small diameters of the third through hole 231, the second through hole 221 and the first through hole 211 remain unchanged and are the same; the large diameter of the third through hole 231 gradually changes to be consistent with the large diameter of the second through hole 221, the large diameter of the second through hole 221 remains unchanged, and the large diameter of the first through hole 211 is slightly larger than the large diameter of the second through hole 221, thereby making the strength of the edge region 230 gradually weaken and transition to the gripper-corresponding region 220. The strength of the gripper-corresponding region 220 remains unchanged to resist the clamping force of the gripper, and the strength of the middle region 210 is less than the strength of the gripper-corresponding region 220, so as to avoid the metal mask being too heavy and the deformation ability being insufficient due to the excessive strength of the middle region 210, resulting in poor buffering ability.

[0081] In some embodiments, the ratio of the hole spacing of the second through hole 221 to the hole spacing of the first through hole 211 is not less than 1.4 and not greater than 1.6, for example, 1.5, that is, the hole spacing of the second through hole 221 is 1.5 times the hole spacing of the first through hole 211.

[0082] In some embodiments, such as Figure 1 As shown, along the first direction, two transition zones 200 are respectively connected to the two ends of the effective zone 100, and two clamping zones 300 are respectively connected to the end of each transition zone 200 away from the effective zone 100.

[0083] Along the second direction, the two gripper areas 310 are located at both ends of the gripping area 300.

[0084] Within each strip 201, two gripper corresponding areas 220 are respectively connected to the two ends of the intermediate area 210.

[0085] In this embodiment, the first direction can be understood as the length direction. The effective area 100 is located in the middle of the entire metal mask. The edges of both ends of the effective area 100 along the length direction are connected to transition areas 200. The edges of the two transition areas 200 away from the effective area 100 are connected to clamping areas 300, so that the two clamping areas 300 are located at both ends of the metal mask, which facilitates clamping with claws at both ends of the metal mask. During the clamping process, each claw has its own transition area 200 to buffer the stress from the claw.

[0086] Furthermore, the second direction can be understood as the width direction. The two ends of the clamping area 300 along the width direction are the jaw areas 310, that is, the areas where the jaws contact each other, while the middle area is not contacted by the jaws. Therefore, the jaw corresponding areas 220 located at both ends of the transition area 200 correspond to the jaw areas 310 in the direction of the jaw's pulling force, and have higher strength than the middle area 210, making it easier to resist the pulling force from the jaws.

[0087] Generally, such as Figure 1 As shown, the welding area 101 is located at the edge of the effective area 100. After the wire mesh is stretched, the welding area 101 needs to be welded to the frame. However, the welding area 101 may also become uneven due to the stretching of the wire mesh.

[0088] Therefore, in some embodiments, in the transition region 200, a plurality of strip regions 201 are arranged along a first direction.

[0089] Along the direction away from the effective area 100, the proportion of the solid volume within the unit volume of multiple strip areas 201 gradually decreases.

[0090] In this embodiment, each transition region 200 has multiple strip regions 201 arranged sequentially along the length of the metal mask. The closer the strip region 201 is to the metal mask, the higher the proportion of solid volume per unit volume and the higher the strength. Conversely, the farther away the strip region 201 is from the metal mask, the lower the proportion of solid volume per unit volume and the weaker the strength. Moreover, the proportion of solid volume per unit volume of the multiple strip regions 201 gradually changes, meaning that the strength of the multiple strip regions 201 also gradually changes.

[0091] In other words, the strip area 201 closest to the welding area 101 within the transition zone 200 has the strongest strength, while the strip area 201 closest to the clamping area 300 has the weakest strength. This means that the strip area 201 closest to the clamping area bears the greatest stress buffering effect, so that if damage occurs during the tensioning process, the area that breaks first is the area of ​​the transition zone 200 closest to the clamping area 300, thus ensuring the integrity of the effective area 100.

[0092] Furthermore, during the meshing process, the stress-bearing portion of the transition zone 200 is concentrated in the area closest to the clamping zone 300, which is also the area furthest from the effective zone 100. This ensures the flatness of the welding area 101 in the effective zone 100 as much as possible, guarantees the welding effect, and prevents the welding area 101 from being affected by stress, which could lead to uneven welding between the mask and the frame and ultimately affect the vapor deposition effect in the effective zone.

[0093] In some embodiments, along the direction away from the effective area 100, among the multiple strip areas 201, at least one of the first through hole 211, the second through hole 221 and the third through hole 231 in the same position gradually increases in size, while the hole spacing and the small hole diameter remain unchanged, so that the proportion of the solid volume per unit volume of the multiple strip areas 201 gradually decreases.

[0094] It should be noted that the through-hole layout of multiple strip areas 201 is roughly the same. Through-holes in the same position among multiple strip areas 201 refer to through-holes located in different strip areas 201 at the same row number, the same column number, or at the same point.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A metal mask, characterized by, The metal mask plate comprises: an effective area; a clamping area arranged at at least one end of the effective area along a first direction; the clamping area comprises a clamping jaw area at at least one end along a second direction, the clamping jaw area is in contact with a clamping jaw; the middle area of the clamping area is not contacted by the clamping jaw; the second direction intersects the first direction and is parallel to the metal mask plate; a transition area arranged between the effective area and the clamping area; the transition area comprises at least one strip area; along the second direction, the strip area comprises a middle area, a clamping jaw corresponding area connected to at least one end of the middle area, and an edge area surrounding the middle area and the clamping jaw corresponding area; along the first direction, the clamping jaw area at least partially overlaps the clamping jaw corresponding area; The middle area comprises a plurality of first through holes arranged in an array, the clamping jaw corresponding area comprises a plurality of second through holes arranged in an array, and the edge area comprises a plurality of third through holes arranged in an array; the solid volume ratio of the edge area, the clamping jaw corresponding area and the middle area in unit volume decreases in turn; along the direction from the outer edge to the inner edge of the edge area, the solid volume ratio of the edge area in unit volume gradually decreases.

2. The metal mask according to claim 1, wherein The non-porous area of the metal mask plate has a design thickness, and the planes on both sides are respectively a first plane and a second plane; In the edge area, the hole spacing of the third through hole is constant; along the direction from the outer edge to the inner edge of the edge area, the large aperture of the third through hole on the first plane gradually increases, and the small aperture on the second plane is constant.

3. The metal mask according to claim 2, wherein In the third through hole at the outermost periphery of the edge area, the edges of adjacent third through holes have a spacing on the first plane, and the spacing has the design thickness; In the third through hole at the innermost periphery of the edge area, the edges of adjacent third through holes intersect, and the thickness of the solid part at the intersection is less than the design thickness and not less than 40% of the design thickness.

4. The metal mask according to claim 2, wherein In the clamping jaw corresponding area, the hole spacing of the second through hole is constant and equal to the hole spacing of the third through hole, and the large aperture of the second through hole is not less than the large aperture of the third through hole.

5. The metal mask according to claim 4, wherein The third through hole of the edge area closest to the clamping jaw corresponding area is the same size as the second through hole of the clamping jaw corresponding area closest to the edge area.

6. The metal mask according to claim 4, wherein The edges of adjacent second through holes intersect, and the thickness of the solid part at the intersection is not greater than the thickness of the solid part at the intersection of the edges of the third through hole and not less than 40% of the design thickness.

7. The metal mask according to claim 4, wherein The hole spacing of the first through hole of the middle area is constant; the hole spacing of the second through hole of the clamping jaw corresponding area is greater than the hole spacing of the first through hole of the middle area; On the first plane, the ratio of the large aperture of the second through hole to the large aperture of the first through hole is not less than 20% and not greater than 30%; on the second plane, the small aperture of the second through hole is the same as the small aperture of the first through hole.

8. The metal mask according to claim 1, wherein Along the first direction, two transition areas are respectively connected to the two ends of the effective area, and two clamping areas are respectively connected to one end of each transition area away from the effective area; In the second direction, two of the jaw regions are respectively located at two ends of the clamping region; In each of the strip regions, two of the jaw corresponding regions are respectively connected to two ends of the intermediate region.

9. The metal mask according to claim 1, wherein In the transition region, the plurality of strip regions are arranged in the first direction; In a direction away from the effective region, the solid volume ratio of the plurality of strip regions per unit volume gradually decreases.

10. The metal mask according to claim 9, wherein In a direction away from the effective region, the large aperture of at least one of the first through hole, the second through hole and the third through hole at the same position gradually increases between the plurality of strip regions, and the hole spacing and the small aperture remain unchanged.

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