Detection device and method of heating disc posture adjusting mechanism and thin film deposition equipment

Abstract

The invention discloses a detection device and method for a heating disc posture adjusting mechanism and thin film deposition equipment, and the detection device for the heating disc posture adjusting mechanism comprises a support assembly which is used for being fixedly connected with the part, outside a cavity, of a heating disc; the distance measuring sensor is arranged on the support assembly and used for measuring the height between the distance measuring sensor and the bottom of the cavity in the vertical direction. The first angular displacement sensor is arranged on the support assembly and used for measuring a first inclination angle of the first angular displacement sensor on a first horizontal coordinate axis; the second angular displacement sensor is arranged on the support assembly and used for measuring a second inclination angle of the second angular displacement sensor on a second horizontal coordinate axis, and the first horizontal coordinate axis is perpendicular to the second horizontal coordinate axis. The posture of the heating disc and the state of the adjusting mechanism can be indirectly judged through measurement data of the distance measuring sensor and the double-shaft angular displacement sensor, so that whether the posture adjusting mechanism breaks down or not is quickly checked, alarm reasons can be positioned without comprehensive troubleshooting, time is saved, and production efficiency is improved.

Description

TECHNICAL FIELD

[0002] The present application relates to the technical field of semiconductor technology, and in particular to a detection device and method for a heater posture adjustment mechanism and a thin film deposition device. BACKGROUND

[0003] In a semiconductor manufacturing process, in order to ensure the uniformity of wafer coating, the wafer is adjusted to the corresponding angle according to the actual performance of different equipment in the thin film deposition process. To achieve precise adjustment of the wafer at any angle, a three-axis linkage posture adjustment mechanism (Auto Leveling) is usually used to control the tilt angle of the heater. Therefore, the stability of the Auto Leveling mechanism is strongly related to the thin film deposition effect. When the mechanism has an alarm problem, a detection mechanism is needed to classify and troubleshoot to ensure production quality. However, the equipment is in a vacuum and high temperature environment during normal operation, and in order to maintain the stability of each component, the equipment needs to follow a strict process during the temperature rising and falling process, resulting in a long overall time consumption. In addition, the Auto Leveling mechanism is set outside the cavity, while the heater is located inside the cavity, so the actual state of the heater inside the cavity cannot be directly observed, and thus the expected adjustment effect of the Auto Leveling mechanism cannot be determined by directly checking the posture of the heater. This makes it difficult for workers to determine the type of alarm cause at the first time when the equipment sends an Auto Leveling mechanism related alarm information, and it is difficult to distinguish whether the problem is caused by the failure of the Auto Leveling mechanism itself or the abnormality of signal transmission and other factors. Only the overall comprehensive troubleshooting of the mechanism can be carried out, which seriously wastes time and affects production efficiency. SUMMARY

[0004] Embodiments of the present application provide a detection device and method for a heater posture adjustment mechanism and a thin film deposition device, aiming to solve the problem that when the Auto Leveling mechanism alarms, only comprehensive troubleshooting can be used to locate the cause, wasting time and affecting production efficiency.

[0005] In a first aspect, the present application provides a detection device for a heater posture adjustment mechanism, comprising: a support assembly for fixedly connecting with a part of the heater outside the cavity; a distance measuring sensor arranged on the support assembly for measuring the height in the vertical direction between the support assembly and the bottom of the cavity; a first angular displacement sensor arranged on the support assembly for measuring a first tilt angle of the support assembly in a first horizontal coordinate axis; A second angular displacement sensor is arranged on the support assembly to measure a second tilt angle of the support assembly on a second horizontal coordinate axis, wherein the first horizontal coordinate axis is perpendicular to the second horizontal coordinate axis.

[0006] Further, the heat pipe assembly comprises a first heat pipe array and / or a second heat pipe array, the first heat pipe array is distributed along a radial direction of the heating ring, and the second heat pipe array is distributed along an axial direction of the heating ring.

[0007] Further, the support comprises a fixed support and a movable support, the fixed support is fixedly connected to a part of the heating disc outside the cavity, the movable support is rotatably arranged on the fixed support, the first angular displacement sensor is arranged on the fixed support along the first horizontal coordinate axis, the second angular displacement sensor is arranged on the movable support along the second horizontal coordinate axis, and the distance measuring sensor is arranged on the movable support along a vertical direction and has a measuring end always vertically pointing to the bottom of the cavity.

[0008] Further, the movable support comprises an outer ring support, an inner ring support, a first rotating shaft arranged along the first horizontal coordinate axis, and a second rotating shaft arranged along the second horizontal coordinate axis, opposite ends of the outer side of the inner ring support are rotatably connected to the inner side of the outer ring support through the second rotating shaft, opposite ends of the outer side of the outer ring support are rotatably connected to the fixed support through the first rotating shaft, the distance measuring sensor is fixedly arranged on the inner side of the inner ring support along the vertical direction, and the second angular displacement sensor is arranged on the inner ring support along the second horizontal coordinate axis.

[0009] Further, the detection device further comprises a counterweight with the same weight as the second angular displacement sensor, and the counterweight and the second angular displacement sensor are arranged on opposite sides of the inner ring support along the second horizontal coordinate axis.

[0010] Further, the fixed support comprises an arc-shaped support portion in a semicircular shape, and opposite ends of the outer side of the outer ring support are rotatably connected to the inner side of the arc-shaped support portion through the first rotating shaft.

[0011] Further, the first angular displacement sensor is arranged on the outer side of the arc-shaped support portion along the first horizontal coordinate axis.

[0012] Further, the fixed support further comprises a clamping portion arranged on the outer side of the arc-shaped support portion along the vertical direction.

[0013] Further, the distance measuring sensor is a wireless laser distance measuring instrument.

[0014] The present invention also provides a thin film deposition apparatus, including a cavity, a heating plate, a heating plate attitude adjustment mechanism, and a detection device for the heating plate attitude adjustment mechanism. The heating plate is disposed inside the cavity, the heating plate attitude adjustment mechanism is disposed outside the cavity and connected to the portion of the heating plate outside the cavity, for adjusting the tilt angle of the heating plate inside the cavity, and the detection device for the heating plate attitude adjustment mechanism is fixedly connected to the portion of the heating plate outside the cavity. The detection device is the aforementioned detection device for the heating plate attitude adjustment mechanism.

[0015] Furthermore, the detection device is provided in three parts. The heating plate includes a water-cooled base located outside the cavity. The heating plate attitude adjustment mechanism is a three-axis attitude adjustment mechanism, which includes a first axis adjustment component, a second axis adjustment component, and a third axis adjustment component. The first axis adjustment component, the second axis adjustment component, and the third axis adjustment component are arranged at intervals along the circumference of the water-cooled base and connected to the water-cooled base. The three detection devices are fixed to the water-cooled base at the connection points of the first axis adjustment component, the second axis adjustment component, and the third axis adjustment component, respectively.

[0016] The present invention also provides a method for detecting a heating plate attitude adjustment mechanism, applicable to the above-mentioned detection device for a heating plate attitude adjustment mechanism, or applicable to the above-mentioned thin film deposition equipment, the method comprising: Before the heating plate attitude adjustment mechanism adjusts the attitude of the heating plate, the initial measurement parameters of the distance sensor, the first angular displacement sensor and the second angular displacement sensor are acquired; After the heating plate attitude adjustment mechanism adjusts the attitude of the heating plate, the current measurement parameters of the ranging sensor, the first angular displacement sensor, and the second angular displacement sensor are obtained. The actual travel distance of the heating plate attitude adjustment mechanism is calculated based on the initial measurement parameters and the current measurement parameters. The instruction to adjust the attitude of the heating plate is obtained, and it is determined whether the difference between the actual travel distance and the instruction travel distance is less than a preset travel error threshold. If not, an alarm message indicating a malfunction in the heating plate attitude adjustment mechanism itself will be output.

[0017] This invention provides a detection device, method, and thin film deposition equipment for a heating plate posture adjustment mechanism. The detection device includes a support assembly fixedly connected to the portion of the heating plate outside the cavity, and a distance sensor, a first angular displacement sensor, and a second angular displacement sensor mounted on the support assembly. The distance sensor measures the vertical height of the bottom of the cavity, the first angular displacement sensor measures a first tilt angle on a first horizontal coordinate axis, and the second angular displacement sensor measures a second tilt angle on a second horizontal coordinate axis perpendicular to the first horizontal coordinate axis. By acquiring height and dual-axis tilt angle data using sensors, this invention can indirectly determine the posture of the heating plate and the status of the adjustment mechanism. It can locate the cause of the alarm without a comprehensive investigation, solving the problem that Auto Leveling mechanisms require a comprehensive investigation to locate the cause of an alarm, wasting time and affecting production efficiency. This saves investigation time, quickly locates the cause of the alarm, and improves production efficiency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the detection device for the heating plate posture adjustment mechanism according to an embodiment of the present invention is shown; Figure 2 A side view schematic diagram of the detection device of the heating plate posture adjustment mechanism according to an embodiment of the present invention is shown; Figure 3 A front view schematic diagram of the detection device of the heating plate posture adjustment mechanism according to an embodiment of the present invention is shown; Figure 4 A schematic diagram showing the detection device of the heating plate posture adjustment mechanism according to an embodiment of the present invention when it is tilted; Figure 5 A schematic diagram of a thin film deposition apparatus according to an embodiment of the present invention is shown; Figure label: 1. Support assembly; 11. Fixed support; 111. Arc-shaped support; 112. Engaging part; 12. Outer ring frame; 13. Inner ring frame; 2. Distance sensor; 3. First angular displacement sensor; 4. Second angular displacement sensor; 5. Counterweight; 10. Detection device; 20. Heating plate; 30. Water-cooled base; 40. Cavity; 50. Attitude adjustment mechanism. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] The directional terms used in this invention, such as "up," "down," "front," "back," "left," "right," "inner," "outer," and "side," are merely for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding this invention, and not for limiting it. Furthermore, in the drawings, structures that are similar or identical are indicated by the same reference numerals.

[0022] In semiconductor thin film deposition processes, the heating plate attitude adjustment mechanism (Auto Leveling) is a key component ensuring the uniformity of wafer deposition. Its stability directly determines the film deposition effect, and the cause must be located promptly once an alarm occurs. However, because the equipment operates in a vacuum high-temperature environment, with the heating plate inside the cavity and the adjustment mechanism outside, the heating plate attitude cannot be directly observed. Furthermore, the equipment's heating and cooling processes are strict and lengthy, making it difficult for operators to quickly distinguish whether the problem stems from a fault in the mechanism itself or an abnormal signal transmission when an alarm occurs. A comprehensive inspection of the entire mechanism is necessary, which is not only time-consuming but also interrupts the production process and reduces efficiency. Therefore, an efficient solution to this pain point is urgently needed.

[0023] To address this, embodiments of the present invention provide a detection device, method, and thin film deposition equipment for a heating plate attitude adjustment mechanism. By fixing the support assembly to the external heating plate, and using a distance sensor to measure the vertical height and a dual angular displacement sensor to measure the vertical axis tilt angle, the attitude of the heating plate and the status of the mechanism can be indirectly obtained without disassembly or lengthy temperature rise and fall troubleshooting. It can quickly distinguish whether the alarm is due to a mechanism failure or a signal problem, avoiding time-consuming comprehensive troubleshooting, thereby reducing production interruptions and ultimately achieving the technical effect of efficient fault location and improved production efficiency.

[0024] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0025] Please see Figures 1-5This invention discloses a detection device 10 for a heating plate 20 attitude adjustment mechanism 50, comprising: a support assembly 1, a distance sensor 2, a first angular displacement sensor 3, and a second angular displacement sensor 4. The support assembly 1 is fixed to the portion of the heating plate 20 outside the cavity 40. The distance sensor 2 is mounted on the support assembly 1 and is used to measure its vertical height from the bottom of the cavity 40. The first angular displacement sensor 3 is mounted on the support assembly 1 and is used to measure its first tilt angle on a first horizontal coordinate axis. The second angular displacement sensor 4 is mounted on the support assembly 1 and is used to measure its second tilt angle on a second horizontal coordinate axis, wherein the first horizontal coordinate axis is perpendicular to the second horizontal coordinate axis.

[0026] Reference Figure 1 Specifically, the bracket assembly 1 serves as the mounting base for the detection device 10. Its structure can be implemented in various ways to adapt to different semiconductor device installation scenarios. Its function is to achieve a stable connection with the water-cooled base 30 of the heating plate 20 (i.e., the part of the heating plate 20 outside the cavity 40). The connection method can be bolt connection, snap-fit, or flange docking, etc., to ensure that the bracket assembly 1 can move synchronously with the movement of the water-cooled base 30 and the heating plate 20, so that the measurement data of the subsequent sensors can be accurately correlated with the actual state of the heating plate 20. The ranging sensor 2 is used to acquire vertical height reference data. Its type can be a wireless laser rangefinder, an infrared ranging sensor 2, or an ultrasonic ranging sensor 2, etc. Taking a wireless laser rangefinder as an example, it has a laser emitting module and a signal receiving module. It can calculate the vertical distance between itself and the bottom of the cavity 40 by emitting a laser beam and receiving the laser signal reflected from the bottom of the cavity 40. The ranging sensor 2 is installed on the bracket assembly 1 through a preset installation structure. The installation position can be selected in the central area of ​​the bracket assembly 1. The installation method includes thread fastening, slot positioning, or pressure plate fixing, etc. After installation, it is necessary to ensure that its measurement direction always remains vertical in order to avoid height data errors caused by measurement direction deviation.

[0027] Reference Figure 2 The first angular displacement sensor 3 is used to measure the first tilt angle in the direction of the first horizontal coordinate axis (i.e., the X-axis). The type of sensor can be a photoelectric angular displacement sensor, a capacitive angular displacement sensor, or an inductive angular displacement sensor. Taking a photoelectric angular displacement sensor as an example, it includes an encoder disk and a photoelectric detection unit. It can convert the light signal generated by the encoder disk as it tilts with the bracket assembly 1 into a corresponding angular electrical signal. The first angular displacement sensor 3 is installed on the bracket assembly 1 by means of bolt fastening or adhesive fixing (the adhesive strength must meet the vibration requirements during equipment operation). The specific installation position corresponds to the side frame of the bracket assembly 1 along the X-axis direction, and its measurement axis must be consistent with the X-axis to accurately capture the tilt change of the bracket assembly 1 in the X-axis direction, thereby reflecting the X-axis orientation of the heating plate 20.

[0028] Reference Figure 3 The second angular displacement sensor 4 is used to measure the second tilt angle in the direction of the second horizontal coordinate axis (i.e., the Y-axis, which is perpendicular to the X-axis). The type of the second angular displacement sensor 4 is the same as that of the first angular displacement sensor 3, and can be photoelectric, capacitive or inductive, etc. The structural principle is the same as that of the first angular displacement sensor 3, except that the measurement direction corresponds to the Y-axis. The second angular displacement sensor 4 is installed on the bracket assembly 1 in the same or similar way as the first angular displacement sensor 3. The installation position corresponds to the side frame of the bracket assembly 1 along the Y-axis direction. Its measurement axis must be consistent with the Y-axis, and the perpendicular relationship between the X-axis and the Y-axis must be ensured in order to fully capture the tilt state of the bracket assembly 1 in the two vertical directions on the horizontal plane.

[0029] Specifically, the bracket assembly 1 is rigidly connected to the water-cooled base 30 of the heating plate 20 by bolts, clips, or flanges to prevent relative displacement between the two; the distance sensor 2 is fixed to a preset position on the bracket assembly 1 by threads, slots, etc., with its measuring end facing the bottom of the cavity 40 and kept vertical; the first angular displacement sensor 3 and the second angular displacement sensor 4 are respectively installed on the X-axis and Y-axis corresponding sides of the bracket assembly 1, and their signal output ends can be connected to an external data processing unit through wires or wireless modules. After installation, calibration is required to ensure the vertical accuracy of the X-axis and Y-axis, forming a complete measurement system covering vertical height and horizontal dual-axis tilt. Since the support assembly 1 is directly fixed to the water-cooled base 30 of the heating plate 20, and the water-cooled base 30 serves as the associated component of the heating plate 20 outside the cavity 40, its movement is completely synchronized with that of the heating plate 20. This allows the vertical height measured by the distance sensor 2, the X-axis tilt angle measured by the first angular displacement sensor 3, and the Y-axis tilt angle measured by the second angular displacement sensor 4 to be indirectly converted into the actual attitude data of the heating plate 20. This eliminates the need to disassemble the equipment cavity 40 and wait for a lengthy heating and cooling process for comprehensive troubleshooting, thus obtaining key information about the Auto Leveling mechanism's operating status. This avoids the tedious process of checking the entire mechanism piece by piece in traditional methods, and solves the problem that when the Auto Leveling mechanism alarms, only a comprehensive investigation can locate the cause, wasting time and affecting production efficiency. In this embodiment, the height and dual-axis tilt angle data reflecting the attitude of the heating plate 20 are accurately acquired through the coordinated measurement of the ranging sensor 2 and the dual-angular displacement sensor. Based on this data, it is possible to quickly determine whether the cause of the Auto Leveling mechanism alarm is a mechanical failure of the mechanism itself or an abnormal signal transmission, effectively shortening the troubleshooting time, avoiding production interruptions caused by prolonged downtime for troubleshooting, and ensuring the continuous production efficiency of semiconductor equipment. The various structural implementations of the support assembly 1 and the selection of various sensor types can be adapted to semiconductor thin film deposition equipment of different specifications and models, improving the equipment compatibility and applicability of the detection device 10. The stable connection and precise installation between the components ensure the accuracy and reliability of the measurement data, providing scientific and effective data support for the status judgment of the Auto Leveling mechanism and reducing ineffective maintenance operations caused by misjudgment.

[0030] Reference Figures 1-4In one embodiment, the support includes a fixed support 11 and a movable support. The fixed support 11 is fixedly connected to the portion of the heating plate 20 outside the cavity 40. The movable support is rotatably mounted on the fixed support 11. The first angular displacement sensor 3 is mounted on the fixed support 11 along the first horizontal coordinate axis, and the second angular displacement sensor 4 is mounted on the movable support along the second horizontal coordinate axis. The distance measuring sensor 2 is mounted vertically on the movable support, with its measuring end always vertically facing the bottom of the cavity 40. Specifically, the fixed support 11 can be a frame structure made of metal (such as a rectangular frame, U-shaped frame, etc.). Its function is to form a stable connection with the water-cooled base 30 of the heating plate 20 (i.e., the portion of the heating plate 20 outside the cavity 40), providing basic installation support for the entire detection device 10. The movable support can be designed as a lightweight frame structure adapted to the fixed support 11, possessing a certain structural rigidity to support the sensors. Its function is to install the distance measuring sensor 2 and the second angular displacement sensor 4, and it can rotate relative to the fixed support 11 to adjust its posture. In terms of component connection and positioning, the fixed bracket 11 is fixed to the water-cooled base 30 by bolts, flanges, etc., ensuring no relative displacement. The movable bracket is rotatably mounted on the fixed bracket 11 by rotating components such as shafts and bearings. The axis of rotation can be adjusted according to actual needs to adapt to the posture changes of the heating plate 20. The first angular displacement sensor 3 is mounted on the side of the fixed bracket 11 along the first horizontal coordinate axis (X-axis) by threaded fastening, slot positioning, etc., and its measuring axis is consistent with the X-axis. The second angular displacement sensor 4 is mounted on the corresponding side of the movable bracket along the second horizontal coordinate axis (Y-axis), and its measuring axis is aligned with the Y-axis. The distance sensor 2 is mounted vertically in the center or a preset mounting position of the movable bracket by pressure plate fixing, threaded connection, etc., and its measuring end always remains vertically facing the bottom of the cavity 40, and its posture is adjusted synchronously with the rotation of the movable bracket to maintain a vertical state. The stable connection between the fixed bracket 11 and the water-cooled base 30 ensures that the measurement reference and the state of the heating plate 20 are synchronized. The rotatable design of the movable bracket ensures that the distance sensor 2 can always remain vertical, avoiding deviation in the distance measurement direction due to the tilt of the heating plate 20, thus improving the accuracy of height measurement. The first and second angular displacement sensors 4 are respectively set for the fixed bracket 11 and the movable bracket, and can respectively capture the tilt state of the fixed reference and the movable part, forming complementary tilt angle measurements, further improving the accuracy of the attitude judgment of the heating plate 20, and providing more reliable data support for locating the cause of the alarm.

[0031] Continue to refer to Figures 1-4In this embodiment, the movable support includes an outer ring frame 12, an inner ring frame 13, a first rotating shaft arranged along a first horizontal coordinate axis, and a second rotating shaft arranged along a second horizontal coordinate axis. The two opposite ends of the outer side of the inner ring frame 13 are rotatably connected to the inner side of the outer ring frame 12 through the second rotating shaft. The two opposite ends of the outer side of the outer ring frame 12 are rotatably connected to the fixed support 11 through the first rotating shaft. The distance measuring sensor 2 is fixedly mounted on the inner side of the inner ring frame 13 in the vertical direction, and the second angular displacement sensor 4 is mounted on the inner ring frame 13 along the second horizontal coordinate axis. Specifically, the outer ring frame 12 of the movable support can adopt a ring or square frame structure, and the material is a lightweight and high-rigidity metal alloy. Its function is to connect the fixed support 11 and the inner ring frame 13, providing rotational support for the inner ring frame 13. The inner ring frame 13 is designed as an adapter frame with a smaller size than the outer ring frame 12 (e.g., the ring inner ring frame 13 adapts to the ring outer ring frame 12), and the material is the same as the outer ring frame 12. Its function is to install the distance sensor 2 and the second angular displacement sensor 4, and it can rotate relative to the outer ring frame 12. The first rotating shaft is set along the first horizontal coordinate axis (X-axis) and adopts a cylindrical structure made of metal material. Its function is to realize the rotational connection between the outer ring frame 12 and the fixed support 11. The second rotating shaft is set along the second horizontal coordinate axis (Y-axis), and its structure is similar to the first rotating shaft. Its function is to realize the rotational connection between the inner ring frame 13 and the outer ring frame 12. The two opposite ends of the outer side of the inner ring frame 13 are rotatably connected to the preset shaft holes on the inner side of the outer ring frame 12 via second rotating shafts. Bearings can be installed between the second rotating shafts and the shaft holes to reduce rotational friction. The two opposite ends of the outer side of the outer ring frame 12 are rotatably connected to the corresponding mounting positions of the fixed bracket 11 via first rotating shafts. Bearings can also be adapted to improve rotational flexibility. The distance sensor 2 is fixed in the inner center area of ​​the inner ring frame 13 in the vertical direction by bolt fastening, adhesive fixing (ensuring that the adhesive strength meets the vibration requirements), etc., with the measuring end pointing vertically upwards towards the bottom of the cavity 40. The second angular displacement sensor 4 is set in the side frame of the inner ring frame 13 in the Y-axis direction by threaded connection, slot fixing, etc., with its measuring axis consistent with the Y-axis. Thus, the inner ring frame 13 and the outer ring frame 12 achieve rotation around the Y-axis and X-axis respectively through the second rotating shaft and the first rotating shaft, forming a dual-axis rotation structure. This structure can adapt to the attitude changes of the heating plate 20 at any angle, ensuring that the ranging sensor 2 always remains vertical, and structurally eliminating ranging errors caused by the tilt of the heating plate 20. The frame structure of the inner and outer ring frames 12 balances lightweight and rigidity, avoiding additional load on the heating plate 20 while stably supporting the sensor, thus improving the overall operational reliability of the device.

[0032] Reference Figure 1Furthermore, the detection device 10 also includes a counterweight 5 with the same weight as the second angular displacement sensor 4. The counterweight 5 and the second angular displacement sensor 4 are disposed on opposite sides of the inner ring frame 13 along the second horizontal coordinate axis. Specifically, the counterweight 5 is made of a high-density metal material (such as steel, copper, etc.) and is constructed in a block or column shape. Its function is to balance the weight of the second angular displacement sensor 4, preventing the inner ring frame 13 from becoming unbalanced due to weight concentration on one side, and ensuring the rotational balance of the inner ring frame 13. The weight of the counterweight 5 is exactly the same as that of the second angular displacement sensor 4 to achieve precise balance. The counterweight 5 and the second angular displacement sensor 4 are symmetrically arranged on opposite sides of the inner ring frame 13 along the second horizontal coordinate axis (Y-axis). That is, if the second angular displacement sensor 4 is installed on the left side of the inner ring frame 13 along the Y-axis, the counterweight 5 is installed on the right side of the inner ring frame 13 along the Y-axis. The counterweight 5 is fixed to the preset installation position of the inner ring frame 13 by means of bolt connection, slot engagement, etc., which is convenient for subsequent adjustment or replacement according to the weight of the sensor. Through the weight balance design of the counterweight 5 and the second angular displacement sensor 4, the problem of unbalanced weight of the inner ring frame 13 is effectively eliminated, ensuring the flexibility and stability of the inner ring frame 13 when rotating around the second rotation axis (Y-axis), avoiding rotational jamming or attitude deviation caused by unbalanced weight, thereby ensuring the measurement accuracy of the second angular displacement sensor 4, and also providing a stable structural foundation for the vertical attitude of the distance sensor 2, reducing the measurement error caused by the imbalance of the inner ring frame 13.

[0033] Continue to refer to Figure 1In this embodiment, the fixed bracket 11 includes a semi-circular arc-shaped support portion 111. The two opposite ends of the outer ring frame 12 are rotatably connected to the inner side of the arc-shaped support portion 111 via the first rotating shaft. Specifically, the arc-shaped support portion 111 of the fixed bracket 11 is made of metal and has a U-shaped structure. The opening direction of the U-shape can be adjusted according to the equipment installation space (e.g., the opening faces the cavity 40 direction). Its function is to provide arc-shaped support and rotation space for the outer ring frame 12, adapt to the rotation trajectory of the outer ring frame 12 around the first rotating shaft (X-axis), and at the same time improve the structural stability of the fixed bracket 11. Regarding component connection and positioning, the two opposite ends of the outer ring frame 12 are rotatably connected to the inner pre-set shaft holes of the U-shaped arc support 111 via the first rotating shaft. The axis of the first rotating shaft is consistent with the first horizontal coordinate axis (X-axis), and the inner curvature of the U-shaped arc support 111 matches the trajectory curvature of the outer ring frame 12 during rotation, ensuring that the outer ring frame 12 does not interfere with the arc support 111 during rotation. Connecting ear plates can extend from both ends of the arc support 111, which are connected to other parts of the fixed bracket 11 or the water-cooled base 30 via bolts. The structural design of the U-shaped arc support 111 better adapts to the rotation requirements of the outer ring frame 12, providing the outer ring frame 12 with a larger rotation range and more stable support, avoiding the problems of limited rotation or unstable support caused by traditional straight plate supports. At the same time, the U-shaped structure itself has high bending strength, which can improve the overall structural rigidity of the fixed bracket 11 and reduce the impact of equipment operation vibration on measurement.

[0034] Continue to refer to Figure 1In this embodiment, the first angular displacement sensor 3 is disposed on the outside of the arc-shaped support portion 111 along the first horizontal coordinate axis. Specifically, the first angular displacement sensor 3 is disposed on the outside of the arc-shaped support portion 111 of the fixed bracket 11 along the first horizontal coordinate axis (X-axis). Its installation method can be threaded fastening (connecting the sensor's own mounting hole to a pre-set threaded hole on the outside of the arc-shaped support portion 111) or pressure plate fixing (pressing the sensor onto a pre-set platform on the outside of the arc-shaped support portion 111 using a metal pressure plate). The measurement axis of the first angular displacement sensor 3 must be precisely aligned with the X-axis. Its signal output terminal can be connected to an external data processing unit via a wire or wireless signal module. The installation position must avoid the rotation trajectory of the outer ring frame 12 to prevent motion interference. A flat mounting platform or mounting hole position must be pre-set on the outside of the arc-shaped support portion 111 to ensure the stability of the first angular displacement sensor 3 after installation. A buffer pad can be added between the sensor and the arc-shaped support portion 111 to reduce the impact of equipment vibration on the sensor. By placing the first angular displacement sensor 3 on the outside of the arc-shaped support 111, interference with the movable outer ring frame 12 can be avoided, ensuring the safe operation of the sensor. It also keeps the sensor away from the high-temperature area of ​​the cavity 40, reducing the impact of high temperature on the sensor's measurement accuracy. At the same time, the external installation facilitates the later inspection and calibration of the sensor, improving the maintenance convenience of the device and ensuring the long-term stability of the tilt angle measurement in the X-axis direction.

[0035] Continue to refer to Figure 1In this embodiment, the fixed bracket 11 further includes a locking part 112, which is vertically disposed on the outer side of the arc-shaped support part 111. Specifically, the locking part 112 of the fixed bracket 11 is made of metal and has a clamping structure. It can be designed as two opposing clamping arms. The ends of the clamping arms can be provided with anti-slip pads (such as rubber anti-slip pads). The clamping arms can be clamped together by bolts, springs or other locking components. Its function is to assist the fixed bracket 11 in positioning and clamping with other fixed structures on the equipment (such as equipment frame, cavity 40 support, etc.), improve the overall stability of the fixed bracket 11 after installation, and avoid loosening of the installation due to reliance solely on the connection with the water-cooling base 30. The engaging part 112 is located on the outside of the arc-shaped support part 111 along the vertical direction by welding, bolting, or other methods, or it is integrally formed with the arc-shaped support part 111. The installation height needs to be adjusted according to the position of the structure to be clamped on the equipment to ensure that the clamping arm can accurately clamp the target structure. The opening range of the clamping arm can be adjusted by the locking component to adapt to different sizes of the structure to be clamped. The engaging part 112 of the clamping structure can provide additional fixed support for the fixed bracket 11, further enhancing the connection stability between the fixed bracket 11 and the equipment, reducing the vibration or displacement of the fixed bracket 11 during equipment operation, and providing a more stable reference for sensor measurement. At the same time, the adjustable clamping design allows the fixed bracket 11 to adapt to different specifications of equipment structures, improving the equipment compatibility of the detection device 10, and the clamping and loosening operations are simple, facilitating the quick installation and disassembly of the device.

[0036] Reference Figure 5 This invention also provides a thin film deposition apparatus, including a cavity 40, a heating plate 20, a heating plate 20 attitude adjustment mechanism 50, and a detection device 10 for the heating plate 20 attitude adjustment mechanism 50. The heating plate 20 is disposed inside the cavity 40, and the heating plate 20 attitude adjustment mechanism 50 is disposed outside the cavity 40 and connected to the portion of the heating plate 20 outside the cavity 40, for adjusting the tilt angle of the heating plate 20 within the cavity 40. The detection device 10 is fixedly connected to the portion of the heating plate 20 outside the cavity 40, and the detection device 10 is the same as the detection device 10 for the heating plate 20 attitude adjustment mechanism 50 described in the above embodiments. This detection device 10 for the heating plate 20 attitude adjustment mechanism 50 has been described in detail in the above embodiments, and for the sake of brevity, it will not be repeated here.

[0037] Specifically, the cavity 40 provides a closed reaction space for the thin film deposition process. It can be made of metal (such as stainless steel, aluminum alloy, etc.) and has a hollow structure with a preset volume. The inner wall of the cavity 40 can be coated according to process requirements (such as anti-corrosion coating, high-temperature resistant coating, etc.). Its function is to maintain the vacuum, high temperature and other environmental conditions required by the process, and at the same time provide installation space for the heating plate 20. The heating plate 20 is made of a metal material with excellent thermal conductivity and is made into a disc shape or a plate structure adapted to the wafer size. Heating elements (such as heating wire, heating tube, etc.) can be integrated inside the plate. Its function is to provide a stable temperature environment for the wafer coating process and ensure the uniformity of thin film deposition. The heating plate 20 attitude adjustment mechanism 50 (AutoLeveling mechanism) is located outside the cavity 40 and can be in the form of motor drive, lead screw drive, etc. Its function is to indirectly adjust the tilt angle of the heating plate 20 inside the cavity 40 by driving the associated part of the heating plate 20 outside the cavity 40 (such as the water-cooled base 30) to adapt to different thin film deposition requirements. The detection device 10 of the heating plate 20 attitude adjustment mechanism 50 acquires the height and tilt angle data related to the attitude of the heating plate 20 in real time, providing a basis for judging the mechanism status and locating the cause of the alarm. Specifically, the heating plate 20 is set inside the cavity 40 through a support structure (such as a support column, suspension assembly, etc.) to ensure no interference with the inner wall of the cavity 40 and to achieve attitude adjustment; the execution end of the heating plate 20 attitude adjustment mechanism 50 is fixed to the part of the heating plate 20 outside the cavity 40 (such as the water-cooled base 30) through bolt connection, flange docking, etc., to ensure the stability of power transmission; the detection device 10 is rigidly connected to the part of the heating plate 20 outside the cavity 40 (such as the water-cooled base 30) through its bracket assembly 1, and the measuring end of the distance sensor 2 of the detection device 10 is vertically facing the bottom of the cavity 40, the first and second angular displacement sensors 4 correspond to the X-axis and Y-axis directions respectively, and the signal output ends of each sensor are connected to the main control system or data processing unit of the equipment. The detection device 10 enables the thin film deposition equipment to have real-time detection capability for the attitude adjustment mechanism 50 of the heating plate 20. The operating status data of the mechanism can be obtained without disassembling the cavity 40 or interrupting the process, which solves the problem of needing to conduct a comprehensive investigation when traditional equipment alarms. The reasonable layout of each component not only ensures the normal operation of the thin film deposition process, but also ensures the accuracy and timeliness of the detection data, improves the fault response efficiency of the equipment, reduces production losses caused by downtime for investigation, and enhances the overall operational stability and reliability of the equipment.

[0038] In one embodiment, three detection devices 10 are provided. The heating plate 20 includes a water-cooled base 30 disposed outside the cavity 40. The attitude adjustment mechanism 50 of the heating plate 20 is a three-axis attitude adjustment mechanism 50, which includes a first axis adjustment component, a second axis adjustment component, and a third axis adjustment component. The first axis adjustment component, the second axis adjustment component, and the third axis adjustment component are arranged at intervals along the circumference of the water-cooled base 30 and connected to the water-cooled base 30. The three detection devices 10 are fixed on the water-cooled base 30 at the connection points of the first axis adjustment component, the second axis adjustment component, and the third axis adjustment component, respectively.

[0039] Specifically, there are three detection devices 10, all with identical structures. Their function is to correspond to the three axis adjustment components of the heating plate 20 attitude adjustment mechanism 50, enabling independent detection of the adjustment state of each axis. The water-cooled base 30 of the heating plate 20 is located outside the cavity 40. It is made of metal and has a disc-shaped or ring-shaped structure adapted to the heating plate 20. It has an internal water-cooling channel to provide cooling for the heating plate 20, preventing excessive temperature from affecting the process or equipment components. It also serves as a connection carrier between the heating plate 20, the attitude adjustment mechanism 50, and the detection devices 10. The first axis adjustment component, second axis adjustment component, and third axis adjustment component of the heating plate 20 attitude adjustment mechanism 50 all employ a transmission structure composed of a motor, lead screw, and guide rail. Their function is to drive the water-cooled base 30 to move along the corresponding axis direction, thereby adjusting the tilt angle of the heating plate 20. The three components are arranged at intervals around the circumference of the water-cooled base 30 (e.g., in an equilateral triangle distribution) to ensure uniform driving force on the water-cooled base 30 and improve the stability and accuracy of attitude adjustment. The actuators of the first, second, and third axis adjustment components are fixed to three connection points arranged circumferentially on the water-cooled base 30 using bolts, pins, or other means, ensuring that each component can independently drive the water-cooled base 30 to move at the corresponding position. The bracket components 1 of the three detection devices 10 are fixed to the connection points on the water-cooled base 30 corresponding to the three axis adjustment components using bolts, snap-fits, or other means. That is, each detection device 10 corresponds to the connection position of one axis adjustment component, and the distance sensor 2 and angular displacement sensor of each detection device 10 are installed in the same direction (the distance sensor is vertically upward, and the angular displacement sensor corresponds to the X-axis and Y-axis, respectively). The signal output terminals of each detection device 10 are connected to the main control system of the equipment to realize synchronous data acquisition and processing. By setting three detection devices 10 corresponding to the three axis adjustment components respectively, the operating status of each axis adjustment component can be accurately captured. When the equipment alarms, it can quickly locate which axis adjustment component is malfunctioning, further narrowing the scope of fault diagnosis. Compared with a single detection device 10, it can improve the accuracy and efficiency of fault location. The water-cooled base 30 serves as a unified connecting carrier, ensuring that the installation positions of the three axis adjustment components and the three detection devices 10 are precisely aligned, avoiding data distortion caused by installation deviations. The combination of circumferential uniform arrangement and independent detection of each axis adjustment component not only ensures the stability of the heating plate 20's posture adjustment but also enables individual monitoring and fault diagnosis of each axis, further reducing equipment downtime and improving the continuous production capacity and process stability of the thin film deposition equipment.

[0040] This invention also provides a detection method for the attitude adjustment mechanism 50 of the heating plate 20, which is applied to the detection device 10 of the attitude adjustment mechanism 50 of the heating plate 20, or to the thin film deposition equipment, and the method includes steps S1-S4.

[0041] S1. Before the attitude adjustment mechanism 50 of the heating plate 20 adjusts the attitude of the heating plate 20, the initial measurement parameters of the distance sensor 2, the first angular displacement sensor 3 and the second angular displacement sensor 4 are obtained. S2. After the attitude adjustment mechanism 50 of the heating plate 20 adjusts the attitude of the heating plate 20, the current measurement parameters of the distance sensor 2, the first angular displacement sensor 3 and the second angular displacement sensor 4 are obtained. S3. Calculate the actual operating stroke of the heating plate 20 attitude adjustment mechanism 50 based on the initial measurement parameters and the current measurement parameters; S4. Obtain the instruction running stroke of the heating plate 20 posture adjustment mechanism 50, and determine whether the stroke difference between the actual running stroke and the instruction running stroke is less than a preset stroke error threshold. S5. If not, output an alarm message indicating a fault in the attitude adjustment mechanism 50 of the heating plate 20 itself.

[0042] Specifically, firstly, before the heating plate 20 attitude adjustment mechanism 50 adjusts the attitude of the heating plate 20, the initial vertical height parameter from the bottom of the cavity 40 is obtained by the ranging sensor 2 in the detection device 10, the initial tilt angle parameter of the first horizontal coordinate axis (X-axis) is obtained by the first angular displacement sensor 3, and the initial tilt angle parameter of the second horizontal coordinate axis (Y-axis, perpendicular to the X-axis) is obtained by the second angular displacement sensor 4. These initial measurement parameters are recorded and stored. Then, when an alarm message is received from the heating plate 20 attitude adjustment mechanism 50, the heating plate 20 attitude adjustment mechanism 50 adjusts the attitude of the heating plate 20. After the entire mechanism 50 adjusts the attitude of the heating plate 20, it again obtains the current vertical height parameter through the distance sensor 2, the current X-axis tilt angle parameter through the first angular displacement sensor 3, and the current Y-axis tilt angle parameter through the second angular displacement sensor 4 to obtain the current measurement parameters; then, using a pre-set stroke conversion model (based on the principles of geometric coordinate transformation, the stroke is calculated by using the initial and current vertical height and dual-axis tilt angle parameters), the actual operating stroke of the heating plate 20 attitude adjustment mechanism 50 is calculated according to the initial measurement parameters and the current measurement parameters; For example, first obtain the initial value of the measuring device, assuming an initial vertical height. Initial X-axis tilt angle Initial Y-axis tilt angle Then obtain the measurement value fed back by the measuring device, the current vertical height. Current X-axis tilt angle Current Y-axis tilt angle Then, according to the formula: Calculate the actual motor stroke and substitute the values ​​to obtain: .

[0043] Subsequently, the instruction travel distance of the heating plate 20 attitude adjustment mechanism 50 is obtained from the equipment control system. This instruction travel distance is the travel distance that the equipment expects the heating plate 20 attitude adjustment mechanism 50 to reach. Then, it is determined whether the travel difference between the actual travel distance and the instruction travel distance is less than a preset travel error threshold. This preset travel error threshold is determined based on the transmission accuracy of the heating plate 20 attitude adjustment mechanism 50 and the requirements of the thin film deposition process on the attitude of the heating plate 20. If the travel difference is not less than the preset travel error threshold, an alarm message indicating a fault in the heating plate 20 attitude adjustment mechanism 50 itself is output to the alarm module, prompting the need for inspection and maintenance. If the travel difference is less than the preset travel error threshold, it can help determine whether the alarm cause is a signal transmission abnormality or a non-mechanism-related fault. This detection method allows for direct comparison between the actual operating condition of the heating plate 20 attitude adjustment mechanism 50 and the expected instruction operating condition, accurately determining whether the mechanism itself has a fault. It eliminates the need to disassemble the equipment cavity 40 or perform complex comprehensive troubleshooting, quickly locating the cause of the fault and ensuring the production efficiency and process stability of the thin film deposition equipment.

[0044] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A detection device for a heating plate posture adjustment mechanism, characterized in that, include: A bracket assembly for securing the portion of the heating plate outside the cavity; A ranging sensor, mounted on the bracket assembly, is used to measure its vertical height from the bottom of the cavity. A first angular displacement sensor is mounted on the bracket assembly and is used to measure its first tilt angle on the first horizontal coordinate axis; A second angular displacement sensor, mounted on the bracket assembly, is used to measure its second tilt angle on a second horizontal coordinate axis, wherein the first horizontal coordinate axis is perpendicular to the second horizontal coordinate axis.

2. The detection device according to claim 1, characterized in that, The support includes a fixed support and a movable support. The fixed support is fixedly connected to the portion of the heating plate outside the cavity. The movable support is rotatably mounted on the fixed support. The first angular displacement sensor is mounted on the fixed support along the first horizontal coordinate axis. The second angular displacement sensor is mounted on the movable support along the second horizontal coordinate axis. The distance measuring sensor is mounted on the movable support in a vertical direction, and its measuring end always remains vertically facing the bottom of the cavity.

3. The detection device according to claim 2, characterized in that, The movable support includes an outer ring frame, an inner ring frame, a first rotating shaft arranged along a first horizontal coordinate axis, and a second rotating shaft arranged along a second horizontal coordinate axis. The two opposite ends of the outer side of the inner ring frame are rotatably connected to the inner side of the outer ring frame through the second rotating shaft. The two opposite ends of the outer side of the outer ring frame are rotatably connected to the fixed support through the first rotating shaft. The distance measuring sensor is fixedly mounted on the inner side of the inner ring frame in the vertical direction, and the second angular displacement sensor is mounted on the inner ring frame along the second horizontal coordinate axis.

4. The detection device according to claim 3, characterized in that, It also includes a counterweight of the same weight as the second angular displacement sensor, and the counterweight and the second angular displacement sensor are disposed on opposite sides of the inner ring frame along the second horizontal coordinate axis.

5. The detection device according to claim 3, characterized in that, The fixed bracket includes a semi-circular arc-shaped support portion, and the two opposite ends of the outer ring frame are rotatably connected to the inner side of the arc-shaped support portion through the first rotating shaft.

6. The detection device according to claim 5, characterized in that, The first angular displacement sensor is located on the outside of the arc-shaped support along the first horizontal coordinate axis.

7. The detection device according to claim 5, characterized in that, The fixed bracket also includes a locking part, which is located on the outside of the arc-shaped support part in a vertical direction.

8. The detection device according to any one of claims 1-7, characterized in that, The ranging sensor is a wireless laser rangefinder.

9. A thin film deposition apparatus, characterized in that, The device includes a cavity, a heating plate, a heating plate posture adjustment mechanism, and a detection device for the heating plate posture adjustment mechanism. The heating plate is disposed inside the cavity, and the heating plate posture adjustment mechanism is disposed outside the cavity and connected to the portion of the heating plate outside the cavity. The heating plate posture adjustment mechanism is used to adjust the tilt angle of the heating plate inside the cavity. The detection device for the heating plate posture adjustment mechanism is fixedly connected to the portion of the heating plate outside the cavity. The detection device is the detection device for the heating plate posture adjustment mechanism as described in any one of claims 1-8.

10. The thin film deposition apparatus according to claim 9, characterized in that, The detection device is provided in three parts. The heating plate includes a water-cooled base located outside the cavity. The heating plate attitude adjustment mechanism is a three-axis attitude adjustment mechanism, which includes a first axis adjustment component, a second axis adjustment component, and a third axis adjustment component. The first axis adjustment component, the second axis adjustment component, and the third axis adjustment component are arranged at intervals along the circumference of the water-cooled base and connected to the water-cooled base. The three detection devices are fixed to the water-cooled base at the connection points of the first axis adjustment component, the second axis adjustment component, and the third axis adjustment component, respectively.

11. A method for detecting a heating plate posture adjustment mechanism, characterized in that, The detection device applied to the heating plate attitude adjustment mechanism according to any one of claims 1-8, or applied to the thin film deposition apparatus according to any one of claims 9-10, the method comprises: Before the heating plate attitude adjustment mechanism adjusts the attitude of the heating plate, the initial measurement parameters of the distance sensor, the first angular displacement sensor and the second angular displacement sensor are acquired; After the heating plate attitude adjustment mechanism adjusts the attitude of the heating plate, the current measurement parameters of the ranging sensor, the first angular displacement sensor, and the second angular displacement sensor are obtained. The actual travel distance of the heating plate attitude adjustment mechanism is calculated based on the initial measurement parameters and the current measurement parameters. The instruction to adjust the attitude of the heating plate is obtained, and it is determined whether the difference between the actual travel distance and the instruction travel distance is less than a preset travel error threshold. If not, an alarm message indicating a malfunction in the heating plate attitude adjustment mechanism itself will be output.

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