A manipulator for an extraction system and an ion implanter

Abstract

The application discloses an extractor system manipulator and an ion implanter, and belongs to the technical field of ion implanters. The extractor system manipulator comprises a first driving assembly, a second driving assembly, a first connecting block, a rotating shaft and a locking assembly. The first driving assembly is used for driving the extractor system to move in a first direction. The second driving assembly drives the first driving assembly and the extractor system to move in a second direction. The first direction and the second direction are arranged at an included angle. The first connecting block is slidingly connected to the second driving assembly. One end of the rotating shaft is supported and connected to the first connecting block, and the other end is connected to the first driving assembly. The first driving assembly is used for driving the rotating shaft to move. The rotating shaft can rotate about its own axis relative to the first connecting block and the first driving assembly under the action of external force. The extractor system is connected to the rotating shaft. The locking assembly can lock the rotating shaft to the first connecting block. The extractor system manipulator is simple in structure, so that the assembly process is simplified, and the cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion implanters, in particular to a manipulator of an extraction system and an ion implanter. BACKGROUND

[0002] In the working process of the ion implanter, the ions generated in the ion source arc chamber are extracted to form the initial ion beam through the extraction system. The extraction system includes an extraction electrode and a suppression electrode. The extraction electrode is a ground electrode. An extraction power supply (+40kV) and a suppression power supply (-10kV) are introduced from the outside of the device. The positive electrode of the extraction power supply is connected to the ion source arc chamber, and the negative electrode is connected to the extraction electrode, so that the potential of the ion source arc chamber is 40kV higher than that of the extraction electrode (ground electrode). An extraction electric field is formed between the two, under the action of the extraction electric field, the ions obtain energy and leave the ion source arc chamber, and also obtain extraction energy. The positive electrode of the suppression power supply is connected to the extraction electrode, and the negative electrode is connected to the suppression electrode, so that the potential of the suppression electrode is -10kV lower than that of the extraction electrode (ground electrode). A suppression electric field is formed between the two, under the action of the suppression electric field, the secondary electrons are suppressed from entering the ion source arc chamber, thereby ensuring the quality and stability of the ion beam. In addition, the suppression electrode also plays a role in focusing the ion beam. The vertical and horizontal distances between the extraction system and the extraction hole of the ion source arc chamber change, which will cause the shape and size of the extracted ion beam to change accordingly, so it is necessary to reasonably configure according to different process requirements.

[0003] In the related art, a three-axis manipulator is used to adjust the three degrees of freedom of the position and angle of the extraction system. However, the three-axis manipulator has three sets of driving structures, which are respectively used to drive the extraction system to move in three directions. The structure is complex, which leads to complex assembly process and high cost. SUMMARY

[0004] The purpose of the present application is to provide a manipulator of an extraction system and an ion implanter, which simplifies the structure, thereby simplifying the assembly process and reducing the cost.

[0005] To achieve this purpose, the present application adopts the following technical solutions:

[0006] A manipulator of an extraction system for driving the extraction system to move, comprising:

[0007] A first driving assembly for driving the extraction system to move in a first direction, and a second driving assembly for driving the first driving assembly and the extraction system to move in a second direction, the first direction and the second direction being arranged at an angle, the angle being greater than 0 and less than or equal to 90°;

[0008] A first connecting block slidingly connected to the second driving assembly;

[0009] a rotating shaft, one end of which is connected to the first connecting block, and the other end of which is connected to the first driving assembly, the first driving assembly being configured to drive the rotating shaft to move, the rotating shaft being configured to rotate about its own axis relative to the first connecting block and the first driving assembly under the action of an external force; and the lead-out system being connected to the rotating shaft;

[0010] a locking assembly, the locking assembly being configured to lock the rotating shaft to the first connecting block.

[0011] In some embodiments, the first driving assembly comprises a first driving member, a screw rod, a nut cooperating with the screw rod, and a connecting assembly, the first driving member being configured to drive the screw rod to rotate, the nut being connected to the rotating shaft through the connecting assembly, and the nut and the connecting assembly being configured to rotate relative to each other.

[0012] In some embodiments, the connecting assembly comprises a nut mounting block, an adjusting ring, and an elastic member, one end of the nut mounting block being connected to the rotating shaft, the adjusting ring and the elastic member both being connected to the nut mounting block, and the nut being clamped between the adjusting ring and the elastic member.

[0013] In some embodiments, the first driving assembly and the second driving assembly both comprise a motor, a worm wheel, a worm cooperating with the worm wheel, the screw rod, and the nut, an output shaft of the motor being connected to the worm, and a worm mounting shaft provided with the worm wheel being connected to the screw rod.

[0014] In some embodiments, the locking assembly comprises a limiting block and a locking member, the limiting block being arranged on the first connecting block and configured to limit the rotating shaft in the radial direction, and the locking member being configured to lock the rotating shaft to the limiting block.

[0015] In some embodiments, the manipulator further comprises a base plate, the second driving assembly comprises a fixed end and an output end configured to move relative to the fixed end in a second direction, the fixed end of the second driving assembly is arranged on the base plate, the first driving assembly is fixed to the output end of the second driving assembly, and the first connecting block is slidingly connected to the output end of the second driving assembly in the first direction.

[0016] In some embodiments, the manipulator further comprises a first potentiometer, a fixed end of the first potentiometer being arranged on the base plate, and a sliding end of the first potentiometer being arranged on the output end of the second driving assembly; and / or, the manipulator further comprises a second potentiometer, a fixed end of the second potentiometer being arranged on the output end of the second driving assembly, and a sliding end of the second potentiometer being arranged on the first connecting block.

[0017] In some embodiments, an elastic reset member is arranged between the substrate and the output end of the second driving assembly, and the elastic reset member is configured to provide an elastic force for moving the output end of the second driving assembly away from the substrate.

[0018] In some embodiments, a sealing assembly is further included, and the extraction system is connected to the rotating shaft through a connecting rod, the extraction system and the rotating shaft are arranged on both sides of the substrate, and the connecting rod is sealingly connected to the rotating shaft through the sealing assembly.

[0019] An ion implanter includes an extraction system and a manipulator of the extraction system as claimed in any one of the preceding claims, and the extraction system is connected to the rotating shaft of the manipulator.

[0020] Advantages of the present application:

[0021] The manipulator of the extraction system and the ion implanter provided by the present application have the following advantages: the rotating shaft is driven to rotate around its own axis by an external force, so that the extraction system connected to the rotating shaft rotates with the rotating shaft, and after the extraction system rotates to a preset angle, the locking assembly locks the rotating shaft to the first connecting block, thereby achieving adjustment of the extraction system rotating in a first direction. The first driving assembly and the second driving assembly are used to respectively realize movement of the extraction system in the first direction and the second direction. Since the large-beam machine itself has no third-axis movement requirement, the first driving assembly and the second driving assembly can meet the process requirements. When the extraction system has a rotation requirement, the rotating shaft can be adjusted in rotation by manual operation or the like. Compared with the prior art of using a three-axis manipulator to adjust the extraction system in three degrees of freedom, the driving structure for driving the extraction system to rotate is saved, the structure is simplified, the structure is more compact, the assembly process is simplified, and the cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a schematic view of the manipulator of the extraction system from a first perspective according to the embodiment of the present application;

[0023] Figure 2 is a schematic view of the manipulator of the extraction system from a second perspective according to the embodiment of the present application;

[0024] Figure 3 is a sectional view of the manipulator of the extraction system according to the embodiment of the present application;

[0025] Figure 4 is a schematic view of the manipulator of the extraction system from a third perspective according to the embodiment of the present application;

[0026] Figure 5 is a partial sectional view of the first driving assembly according to the embodiment of the present application;

[0027] Figure 6 is a first drive part sectional view provided by the embodiment of the present application.

[0028] In the figure:

[0029] 1. Base plate;

[0030] 2. First drive assembly; 21. First drive part; 221. Screw rod; 222. Nut; 23. Second potentiometer;

[0031] 24. Rotation shaft; 241. Avoidance hole; 242. Bearing cover; 243. Flange;

[0032] 25. Connection assembly; 251. Nut mounting block; 252. Adjusting ring; 253. Elastic part; 254. Screw; 255. Fixed block; 26. First connecting block; 27. Locking assembly; 271. Limiting block; 272. Limiting groove; 273. Fastening part; 28. Second connecting block; 291. First guide rail; 292. First sliding block;

[0033] 3. Second drive assembly; 31. Second drive part; 32. Fixed seat; 33. Sliding seat; 34. First potentiometer; 35. Elastic reset part; 36. Second guide rail; 37. Second sliding block;

[0034] 7. Sealing assembly; 71. Sealing cavity; 72. Bellows;

[0035] 8. Leading-out system; 81. Connecting rod; 82. Slit;

[0036] 101. Motor; 102. Drive mounting seat; 103. First coupling; 104. Worm; 105. Worm wheel; 106. Worm wheel mounting shaft; 107. Worm wheel transmission shaft; 108. Bearing bearing cover; 109. Second coupling; 110. Screw rod clamping shaft; 111. Screw rod clamping ring; 112. Locking nut; 113. Screw rod bearing seat; 114. Bearing seat fixed seat. DETAILED DESCRIPTION

[0037] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present application will be further described in detail below with reference to the drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0038] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0039] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the first feature is higher than the second feature in horizontal height. The first feature "under", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the first feature is lower than the second feature in horizontal height.

[0040] As shown in Figures 1-6 The present embodiment provides a manipulator of an extraction system for driving the extraction system 8 to move, the manipulator comprising a first driving assembly 2, a second driving assembly 3, a first connecting block 26, a rotating shaft 24 and a locking assembly 27, the first driving assembly 2 is used to drive the extraction system 8 to move in a first direction, the second driving assembly 3 drives the extraction system 8 and the first driving assembly 2 to move in a second direction, the first direction and the second direction are arranged at an included angle, and the included angle ranges from greater than 0 to less than or equal to 90°. The first connecting block 26 is slidingly connected to the second driving assembly 3; one end of the rotating shaft 24 is supported and connected to the first connecting block 26, and the other end is connected to the first driving assembly 2, the first driving assembly 2 is used to drive the rotating shaft 24 to move, the rotating shaft 24 can rotate around its own axis relative to the first connecting block 26 and the first driving assembly 2 under the action of external force; the extraction system 8 is connected to the rotating shaft 24; the locking assembly 27 can lock the rotating shaft 24 to the first connecting block 26.

[0041] The external force drives the rotating shaft 24 to rotate around its own axis, so that the extraction system 8 connected to the rotating shaft 24 rotates with the rotating shaft 24. When the extraction system 8 rotates to a preset angle, the locking assembly 27 locks the rotating shaft 24 to the first connecting block 26, so as to realize the adjustment of the rotation of the extraction system 8 around the rotating shaft 24 arranged in the first direction. The rotating shaft 24 is slidably connected to the second driving assembly 3 through the first connecting block 26. The first driving assembly 2 drives the rotating shaft 24 to move, so as to drive the extraction system 8 and the first connecting block 26 on the rotating shaft 24 to move relative to the second driving assembly 3 in the first direction. The second driving assembly 3 drives the first driving assembly 2, the rotating shaft 24 and the extraction system 8 connected to the first driving assembly 2 to move in the second direction, so as to realize the movement of the extraction system 8 in the first direction and the second direction through the first driving assembly 2 and the second driving assembly 3.

[0042] Exemplarily, the included angle between the first direction and the second direction is 90°. The first driving assembly 2 drives the extraction system 8 to move in the first direction, so as to adjust the vertical distance from the extraction system 8 to the extraction hole of the ion source arc chamber. The second driving assembly 3 drives the extraction system 8 to move in the second direction, so as to adjust the horizontal distance from the extraction system 8 to the extraction hole of the ion source arc chamber. Therefore, the vertical and horizontal distances between the extraction system 8 and the extraction hole can be reasonably adjusted according to the process requirements, so as to realize the best extraction beam.

[0043] The second driving assembly 3 drives the extraction system 8 to move in the second direction, so as to adjust the horizontal position of the extraction system 8 and the horizontal centering of the suppression electrode to the extraction hole. Two slits 82 are arranged on the suppression electrode. According to the process, the two slits 82 on the suppression electrode can be selected by adjusting the horizontal position of the suppression electrode.

[0044] Since the large beam machine itself does not have the third axis movement requirement, the first driving assembly 2 and the second driving assembly 3 can meet the process requirements. When the extraction system 8 has a rotation requirement, the rotating shaft 24 can be adjusted by manual rotation or the like. Compared with the prior art of using a three-axis manipulator to adjust the extraction system 8 in three degrees of freedom, the driving structure for driving the rotation of the extraction system 8 is saved, the structure is simplified, the structure is more compact, the assembly process is simplified, and the cost is saved.

[0045] The first driving assembly 2 comprises a first driving member 21, a screw rod 221, a nut 222 matched with the screw rod 221, and a connecting assembly 25. The first driving member 21 is configured to drive the screw rod 221 to rotate. The nut 222 is connected to the rotating shaft 24 through the connecting assembly 25, and the nut 222 and the connecting assembly 25 are capable of relative rotation. The first driving member 21 drives the screw rod 221 to rotate, and the nut 222, the connecting assembly 25 connected to the nut 222, and the rotating shaft 24 all move in the first direction, so as to realize the movement of the lead-out system 8 connected to the rotating shaft 24 in the first direction. By adopting the connecting assembly 25 to connect the rotating shaft 24 and the nut 222, the nut 222 is connected to the connecting assembly 25 and is capable of relative rotation. When the rotating shaft 24 is driven to rotate, the connecting assembly 25 rotates with the rotating shaft 24, the connecting assembly 25 rotates relative to the nut 222, and the nut 222, the screw rod 221, the first driving member 21 and other structures remain stationary, which facilitates the adjustment of the rotation of the rotating shaft 24 and the lead-out system 8, is convenient to operate, and has a simple structure.

[0046] As shown in Figure 3 and Figure 5 , the connecting assembly 25 comprises a nut mounting block 251, an adjusting ring 252, and an elastic member 253. The nut mounting block 251 is connected to one end of the rotating shaft 24. The elastic member 253 and the adjusting ring 252 are both connected to the nut mounting block 251, and the nut 222 is clamped between the adjusting ring 252 and the elastic member 253. On the one hand, the adjusting ring 252 and the elastic member 253 are top-mounted on both sides of the nut 222. The elastic member 253 presses the nut 222 against the adjusting ring 252 through the elastic force, prevents the axial movement of the nut 222, and enables the nut 222 to rotate with the screw rod 221 to realize precise transmission. The adjusting ring 252 cooperates with the elastic member 253 to eliminate the gap between the threaded engagement surface of the nut 222 and the screw rod 221, and ensures the long-term stability of the pre-tightening force. On the other hand, under the action of external force, the adjusting ring 252 and the elastic member 253 connected to the nut mounting block 251 are capable of relative rotation with respect to the nut 222, thereby facilitating the adjustment of the angle of the lead-out system 8.

[0047] In an embodiment, the rotating shaft 24 and the screw rod 221 are coaxially arranged in the first direction. The rotating shaft 24 is provided with a relief hole 241, and the screw rod 221 extends through the nut 222 to the relief hole 241. The nut mounting block 251 is provided with a mounting groove. The nut mounting block 251 is mounted on the rotating shaft 24. The mounting groove and the relief hole 241 form an accommodation cavity. The fixing block 255, the nut 222, and the adjusting ring 252 are sequentially arranged in the accommodation cavity. The screw 254 connects the nut mounting block 251 and the fixing block 255. The elastic member 253 is a spring. The spring is sleeved on the screw 254, and the two ends of the spring abut against the fixing block 255 and the nut 222. The spring and the screw 254 are one-to-one corresponding. Two or more groups of the spring and the screw 254 can be arranged.

[0048] The locking assembly 27 comprises a limiting block 271 and a fastening member 273. The limiting block 271 is arranged on the first connecting block 26 and is used for limiting the radial direction of the rotating shaft 24. The fastening member 273 is arranged on the limiting block 271 and is used for locking the rotating shaft 24. The first connecting block 26 is used for providing structural support for the locking assembly 27. In an embodiment, the end of the rotating shaft 24 is connected with a pressing cover 242. The pressing cover 242 is arranged on one side of the first connecting block 26. The pressing cover 242 is provided with a flange 243 on the circumferential side. The limiting block 271 is provided with a limiting groove 272 which is matched with the shape of the flange 243. The width of the limiting groove 272 is greater than that of the flange 243. The limiting groove 272 is provided with the fastening member 273 on each side. The two fastening members 273 abut against the flange 243 from both sides. The pressing cover 242 is arranged on the end of the rotating shaft 24 and covers the first connecting block 26. On one hand, the pressing cover 242 is used for protecting the rotating shaft 24. On the other hand, an external force can act on the pressing cover 242. The fastening member 273 is a jackscrew. By adjusting the end position of the jackscrew, the angle of the flange 243 and the rotating shaft 24 can be adjusted, so that the electrode rotates around the rotating shaft 24. The rotating shaft 24 is indirectly adjusted by the pressing cover 242, and the radial locking of the rotating shaft 24 is indirectly realized. The operation is convenient. The gap between the limiting groove 272 and the flange 243 can be set according to requirements and is not limited.

[0049] As shown in Figure 1 and Figure 2 , the manipulator further comprises a base plate 1. The second driving assembly 3 comprises a fixed end and an output end which moves along the second direction relative to the fixed end. The fixed end of the second driving assembly 3 is arranged on the base plate 1. The first driving assembly 2 is connected to the output end of the second driving assembly 3, i.e. the first driving member 21 is fixed to the output end of the second driving assembly 3. The first connecting block 26 is slidingly connected to the output end of the second driving assembly 3 along the first direction. The first driving assembly 2 drives the lead-out system 8 and the first driving assembly 2 to move along the second direction.

[0050] In an embodiment, the second driving assembly 3 comprises a fixed seat 32, a sliding seat 33 and a second driving member 31. The fixed seat 32 is arranged on the base plate 1. The second driving member 31 is arranged on the fixed seat 32. The second driving member 31 drives the sliding seat 33 to move along the second direction relative to the fixed seat 32. The second driving assembly 3 is connected to the sliding seat 33. The second driving assembly 3 further comprises a second guide rail 36 and a second sliding block 37 which is slidingly connected to the second guide rail 36. The second guide rail 36 is connected to the fixed seat 32 and is arranged to extend along the second direction. The second sliding block 37 is connected to the sliding seat 33. The second driving member 31 is arranged on the end face of the fixed seat 32 which is away from the base plate 1. The second driving member 31 drives the sliding seat 33 to move through the screw rod 221 and the nut 222.

[0051] In the related art, the manipulator performs motion closed-loop control without sensors or only uses proximity switches as in-place feedback, and the control precision is low. Therefore, the manipulator further comprises a first potentiometer 34, a fixed end of the first potentiometer 34 is arranged on the base plate 1, and a sliding end of the first potentiometer 34 is arranged on the output end of the second driving assembly 3. In an embodiment, the fixed end of the first potentiometer 34 is indirectly connected to the base plate 1 through a fixed seat 32, and the sliding end is connected to a sliding seat 33, displacement distance feedback is realized through the first potentiometer 34, the first potentiometer 34 can output a position signal in real time, motion closed-loop control is realized, and motion precision is improved.

[0052] In the related art, the manipulator needs to overcome the vacuum force to drive the lead-out system 8, and the required load is large, the corresponding driving assembly is large in size, short in service life, high in cost, and large in space occupation. Therefore, an elastic reset member 35 is arranged between the base plate 1 and the output end of the second driving assembly 3, the elastic reset member 35 is used to provide an elastic force for moving the output end of the second driving assembly 3 away from the base plate 1, so that the output end of the second driving assembly 3 always has a tendency to move away from the base plate 1. The elastic reset member 35 exerts a reaction force on the sliding seat 33 to offset the vacuum force, thereby reducing the load, improving the service life of the first driving member 21, and at the same time, the structure is more compact, space and cost are saved. In an embodiment, the elastic reset member 35 comprises two nitrogen gas springs, the two nitrogen gas springs are arranged on both sides of the second driving assembly 3 along the first direction, the cylinder body of the nitrogen gas spring is arranged on the base plate 1, and the piston rod of the nitrogen gas spring is arranged on the output end of the second driving assembly 3, i.e., the sliding seat 33. The nitrogen gas spring has the advantages of strong force stability, and the two nitrogen gas springs can increase the elastic force and are arranged on both sides of the second driving assembly 3 to realize uniform stress.

[0053] As shown in Figure 2 and Figure 3 In an embodiment, the first driving assembly 2 further comprises a second connecting block 28, and the first connecting block 26 and the second connecting block 28 are connected to both ends of the rotating shaft 24. The first driving assembly 2 further comprises a first guide rail 291 and a first sliding block 292 slidingly connected to the first guide rail 291, and the first guide rail 291 and the first sliding block 292 form a linear guide rail pair. Four linear guide rail pairs are arranged, two of which are used for sliding connection between the first connecting block 26 and the sliding seat 33, and the other two are used for sliding connection between the second connecting block 28 and the sliding seat 33. Exemplarily, the first guide rail 291 is connected to the sliding seat 33 and extends along the first direction, and the corresponding sliding block is connected to the first connecting block 26 or the second connecting block 28. The first driving member 21 is connected to the sliding seat 33, and drives the rotating shaft 24, the first connecting block 26 and the second connecting block 28 to move relative to the sliding seat 33 along the first direction through the screw rod 221 and the nut 222.

[0054] The manipulator further comprises a second potentiometer 23, a fixed end of the second potentiometer 23 is arranged at an output end of the second driving assembly 3, i.e. the sliding seat 33, and a sliding end of the second potentiometer 23 is arranged at the first connecting block 26, so as to realize displacement feedback of the rotating shaft 24, thereby realizing closed-loop control of the rotating shaft 24 and improving motion precision.

[0055] The manipulator further comprises a sealing assembly 7, and the lead-out system 8 is connected to the rotating shaft 24 through a connecting rod 81, the lead-out system 8 and the rotating shaft 24 are arranged on both sides of the base plate 1, specifically, the rotating shaft 24, the first connecting block 26, the locking assembly 27, the first driving assembly 2 and the second driving assembly 3 are arranged on one side of the base plate 1, the lead-out system 8 is arranged on the other side of the base plate 1, the connecting rod 81 is sealingly connected to the rotating shaft 24 through the sealing assembly 7, and the base plate 1 and the sealing assembly 7 realize a protection function of the manipulator, so as to avoid corrosion by process gas, and in addition, air and volatile substances such as lubricating oil on one side of the manipulator can be prevented from entering the vacuum chamber and damaging the vacuum degree.

[0056] In an embodiment, the sealing assembly 7 comprises a sealing cavity 71 and a bellows 72, the sealing cavity 71 is connected to an output end of the second driving assembly 3, both ends of the rotating shaft 24 are connected to the first connecting block 26 and the second connecting block 28, respectively, and pass through the sealing cavity 71, the sealing cavity 71 is located at a middle position of the rotating shaft 24, the first connecting block 26 and the second connecting block 28 are both sealingly connected to both sides of the sealing cavity 71 through the bellows 72, and the sealing cavity 71 is sealingly connected to the base plate 1 through the bellows 72; the connecting rod 81 passes through the bellows 72 and the sealing cavity 71 and is connected to the rotating shaft 24. The sealing cavity 71 is fixedly connected to the sliding seat 33, so as to avoid movement of the sealing cavity 71 with the rotating shaft 24 and reduce the load requirement of the first driving member 21.

[0057] When the first driving member 21 drives the rotating shaft 24 to move in the direction from the second connecting block 28 to the first connecting block 26, the bellows 72 between the first connecting block 26 and the sealing cavity 71 is compressed, the bellows 72 between the second connecting block 28 and the sealing cavity 71 is stretched, and the bellows 72 between the substrate 1 and the sealing cavity 71 remains unchanged. When the first driving member 21 drives the rotating shaft 24 to move in the direction from the first connecting block 26 to the second connecting block 28, the bellows 72 between the first connecting block 26 and the sealing cavity 71 is stretched, the bellows 72 between the second connecting block 28 and the sealing cavity 71 is compressed, and the bellows 72 between the substrate 1 and the sealing cavity 71 remains unchanged. When the rotating shaft 24 rotates around its axis, the bellows 72 between the first connecting block 26 and the sealing cavity 71 and the bellows 72 between the second connecting block 28 and the sealing cavity 71 are twisted, and the bellows 72 between the substrate 1 and the sealing cavity 71 remains unchanged. When the second driving member 31 drives the sliding seat 33, the first driving assembly 2 and the lead-out system 8 to move in the second direction, the bellows 72 between the substrate 1 and the sealing cavity 71 is stretched or compressed, and the bellows 72 between the first connecting block 26 and the sealing cavity 71 and the bellows 72 between the second connecting block 28 and the sealing cavity 71 remains unchanged. Since the bellows 72 can be deformed, when the connecting rod 81, i.e. the lead-out system 8, moves in the first direction along the rotating shaft 24 or rotates around the axis of the rotating shaft 24, or the connecting rod 81 moves in the second direction along the first driving assembly 2, the end of the bellows 72 connected to the sealing cavity 71 remains unchanged, and the other end deforms correspondingly, thereby realizing the sealing of the connecting rod 81.

[0058] In other embodiments, the bellows 72 can also be other elastic connecting pipes, and the connection modes between the bellows 72 and the sealing cavity 71, the first connecting block 26, the second connecting block 28 and the substrate 1 are the same. For example, the two ends of the bellows 72 have mounting tables, the mounting tables are connected to the sealing cavity 71 by bolts or other fasteners, and sealing rings are arranged between the mounting tables and the sealing cavity 71, thereby realizing the sealed connection between the bellows 72 and the sealing cavity 71. The mounting table at the other end is connected to the first connecting block 26 by bolts, and sealing rings are arranged between the mounting table and the first connecting block 26, thereby realizing the sealed connection between the bellows 72 and the first connecting block 26, and the sealed connection between the first connecting block 26, the sealing cavity 71 and the bellows 72. Similarly, the mounting tables at the two ends of the second bellows 72 are correspondingly sealed and connected to the sealing cavity 71 and the substrate 1, and the mounting tables at the two ends of the third bellows 72 are correspondingly sealed and connected to the sealing cavity 71 and the second connecting block 28.

[0059] The sealing cavity 71 comprises a cavity body and a cover plate. The side of the cavity body opposite to the substrate 1 is provided with an opening, and the cover plate is sealed and connected to the opening, so as to facilitate the connection of the connecting rod 81 and the rotating shaft 24 in the cavity through the opening.

[0060] Optionally, the connecting rod 81 and the rotating shaft 24 can be directly connected or indirectly connected through other adapters, which will not be described again.

[0061] As shown in Figure 5 and Figure 6 The first driving assembly 2 and the second driving assembly 3 are the same, the first driving assembly 2 comprises a first driving member 21, a screw rod 221 and a nut 222, the second driving assembly 3 comprises a second driving member 31, a screw rod 221 and a nut 222, the first driving member 21 and the second driving member 31 are the same, and the first driving member 21 is exemplarily described. The first driving member 21 comprises a motor 101, a worm wheel 105, a worm 104 engaged with the worm wheel 105, an output shaft of the motor 101 connected with the worm 104, and a worm wheel mounting shaft 106 provided with the worm wheel 105 connected with the screw rod 221. The motor 101 and the screw rod 221 are in transmission through the worm wheel 105 and the worm 104, the worm wheel 105 and the worm 104 are in transmission connection, vertical staggered transmission can be realized, intermediate transmission links are reduced, the worm 104 is a driving member, the worm wheel 105 is a driven member, reverse self-locking is realized, no additional stop structure is needed, installation space is saved, and safety is improved.

[0062] Specifically, the first driving assembly 2 comprises a motor 101, a driving mounting base 102, a first coupling 103, a worm 104, a worm wheel 105, a worm wheel mounting shaft 106, a worm wheel transmission shaft 107, a bearing pressing cover 108, a second coupling 109, a screw rod clamping shaft 110, a screw rod clamping ring 111, a locking nut 112, a screw rod bearing seat 113 and a bearing seat fixing seat 114, and the motor 101 is a direct current brush motor 101. The fixed end of the motor 101 is mounted on the sliding seat 33 through the driving mounting base 102, the output shaft of the motor 101 is connected with the worm 104 through the first coupling 103, the worm 104 and the worm wheel 105 form a pair of motion, the worm wheel 105 is mounted on the worm wheel mounting shaft 106, the worm wheel mounting shaft 106 is positioned and mounted at one end of the inner ring of the four-point angular contact bearing through a pin, the worm wheel transmission shaft 107 is mounted at the other end of the inner ring of the bearing, and the screw 254 passes through the worm wheel transmission shaft 107 and the worm wheel mounting shaft 106 to lock the worm wheel 105. The bearing pressing cover 108 presses the outer ring of the four-point angular contact bearing to prevent it from moving. The screw rod clamping ring 111 and the screw rod clamping shaft 110 jointly clamp and fix one end of the screw rod 221, the screw rod clamping shaft 110 and the worm wheel transmission shaft 107 are connected through the second coupling 109 to realize transmission, and the distance therebetween can be adjusted to reduce assembly difficulty.

[0063] The second driving assembly 3 adopts the above structure, wherein the fixed end is the driving mounting base 102, and the motor 101 is mounted on the fixed seat 32 through the driving mounting base 102.

[0064] The first driving assembly 2 and the second driving assembly 3 are driven by a worm gear 105, a worm 104 and a screw rod 221, and guided by a guide rail, and can output a position signal to a host computer in real time by cooperating with a second potentiometer 23 and a first potentiometer 34, so as to realize closed-loop control of movement, improve the movement precision of the manipulator, and make the output ion beam more stable and controllable.

[0065] The embodiment also provides an ion implanter, which comprises an extraction system 8 and a manipulator of the extraction system as described above, and the extraction system 8 is connected to the rotating shaft 24 of the manipulator. By using the manipulator, the structure is simplified and the cost is reduced.

[0066] Obviously, the above embodiment of the present application is only an example for clearly illustrating the present application, and is not a limitation on the embodiments of the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the claims of the present application.

Claims

1. A manipulator of an extraction system for driving movement of an extraction system (8), characterized in that, The application relates to a device for guiding a workpiece (1) along a predetermined path, comprising: a first driving assembly (2) for driving the guiding system (8) to move in a first direction, and a second driving assembly (3) for driving the first driving assembly (2) and the guiding system (8) to move in a second direction, the first direction and the second direction being arranged at an angle, the angle being greater than 0 and less than or equal to 90 degrees; a first connecting block (26) connected to the second driving assembly (3) in a sliding mode; a rotating shaft (24) connected to the first connecting block (26) at one end and connected to the first driving assembly (2) at the other end, the first driving assembly (2) being used for driving the rotating shaft (24) to move, the rotating shaft (24) being capable of rotating relative to the first connecting block (26) and the first driving assembly (2) around an axis of the rotating shaft (24) under the action of an external force, and the guiding system (8) being connected to the rotating shaft (24); a locking assembly (27) capable of locking the rotating shaft (24) to the first connecting block (26).

2. The extractor system's handler according to claim 1, characterized in that, The first driving assembly (2) comprises a first driving member (21), a screw rod (221), a nut (222) matched with the screw rod (221) and a connecting assembly (25), the first driving member (21) being used for driving the screw rod (221) to rotate, the nut (222) being connected to the rotating shaft (24) through the connecting assembly (25), and the nut (222) and the connecting assembly (25) being capable of relative rotation.

3. The extractor system manipulator of claim 2, wherein, The connecting assembly (25) comprises a nut mounting block (251), an adjusting ring (252) and an elastic member (253), the nut mounting block (251) being connected to one end of the rotating shaft (24), the elastic member (253) and the adjusting ring (252) both being connected to the nut mounting block (251), and the nut (222) being clamped between the adjusting ring (252) and the elastic member (253).

4. The extractor system manipulator of claim 2, wherein, The first driving assembly (2) and the second driving assembly (3) both comprise a motor (101), a worm wheel (105), a worm (104) meshed with the worm wheel (105), the screw rod (221) and the nut (222), the output shaft of the motor (101) being connected to the worm (104), a worm wheel mounting shaft (106) provided with the worm wheel (105) being connected to the screw rod (221).

5. The extractor system handler of claim 1, wherein, The locking assembly (27) comprises a limiting block (271) and a locking member (273), the limiting block (271) being arranged on the first connecting block (26) and used for limiting the rotating shaft (24) in a radial direction, and the locking member (273) locking the rotating shaft (24) to the limiting block (271).

6. The extractor system manipulator of any of claims 1-5, wherein, The second driving assembly (3) comprises a fixed end and an output end moving in a second direction relative to the fixed end, the fixed end of the second driving assembly (3) is arranged on the base plate (1), the first driving assembly (2) is fixed on the output end of the second driving assembly (3), and the first connecting block (26) is slidingly connected to the output end of the second driving assembly (3) in the first direction.

7. The extractor system manipulator of claim 6, wherein, The manipulator further comprises a first potentiometer (34), a fixed end of the first potentiometer (34) is arranged on the base plate (1), and a sliding end of the first potentiometer (34) is arranged on the output end of the second driving assembly (3); and / or the manipulator further comprises a second potentiometer (23), a fixed end of the second potentiometer (23) is arranged on the output end of the second driving assembly (3), and a sliding end of the second potentiometer (23) is arranged on the first connecting block (26).

8. The extractor system manipulator of claim 6, wherein, An elastic reset member (35) is arranged between the base plate (1) and the output end of the second driving assembly (3), and the elastic reset member (35) is used to provide an elastic force for moving the output end of the second driving assembly (3) away from the base plate (1).

9. The extractor system manipulator of claim 6, wherein, The sealing assembly (7) is further arranged, the lead-out system (8) is connected to the rotating shaft (24) through a connecting rod (81), the lead-out system (8) and the rotating shaft (24) are arranged on both sides of the base plate (1), and the connecting rod (81) is sealingly connected to the rotating shaft (24) through the sealing assembly (7).

10. An ion implanter, comprising: The manipulator comprises a lead-out system (8) and the manipulator of any one of claims 1-9, and the lead-out system (8) is connected to the rotating shaft (24) of the manipulator.

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