A polishing apparatus

Abstract

The present application relates to the technical field of polishing equipment, and particularly relates to a polishing device, which comprises a guide rail assembly and a driving stator assembly, the driving stator assembly is in sliding connection with the guide rail assembly, a plurality of polishing tool groups are arranged in the magnetic field generation area of the driving stator assembly along the length direction of the driving stator assembly, each polishing tool group is in magnetic connection with the driving stator assembly, and adjacent polishing tool groups are in movable connection; the guide rail assembly is used for driving the driving stator assembly to make linear reciprocating motion; the driving stator assembly is used for driving each polishing tool group to make reciprocating rotation around the sliding direction of the driving stator assembly; by means of the electromagnetic driving and movable connection design, the number of mechanical components can be reduced, and the risk of mirror surface damage is reduced; at the same time, the distributed layout of the plurality of polishing tool groups is beneficial to improving the uniformity and controllability of polishing; in the machining process, the movement of the polishing tool group can be adjusted through the magnetic field, real-time feedback is realized to a certain extent, and the surface error control is optimized.

Description

Technical Field

[0001] This invention relates to the field of polishing equipment technology, and in particular to a polishing apparatus. Background Technology

[0002] Currently, for cylindrical mirrors made of microcrystalline materials with shaping capabilities, polishing equipment with mechanical connections is typically used to perform translational motion to polish the mirror surface. However, the application of such polishing equipment carries the following risks: fatigue damage to the mechanical connections in the polishing section can easily lead to mirror damage; polishing tools are mostly one-piece structures, which are prone to low-frequency errors; and it is difficult to provide polishing feedback during processing, allowing only error measurement of the finished mirror surface shape.

[0003] It is evident that existing technologies still need improvement and enhancement. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a polishing device that uses electromagnetic drive to reduce the mechanical connections of the polishing device and reduce the risk of mirror damage.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A polishing apparatus includes a guide rail assembly and a drive stator assembly. The drive stator assembly is slidably connected to the guide rail assembly. Multiple sets of polishing tools are arranged along the length of the magnetic field generating region of the drive stator assembly. Each set of polishing tools is magnetically connected to the drive stator assembly, and adjacent sets of polishing tools are movably connected. The guide rail assembly drives the drive stator assembly to perform linear reciprocating motion. The drive stator assembly drives each set of polishing tools to perform reciprocating rotational motion around the sliding direction of the drive stator assembly.

[0007] In the polishing device, the drive stator assembly includes a stator core, the outer wall of the stator core is slidably connected to the guide rail assembly, the inner wall of the stator core is distributed with multiple winding portions, each winding portion is wound with a stator cut wire, and the magnetic field generating region is formed below the end face of the winding portion.

[0008] In the polishing device, the polishing tool groups are connected by multiple polishing liquid delivery pipes, and the polishing surfaces of each polishing tool group are connected to each polishing liquid delivery pipe.

[0009] In the polishing apparatus, the polishing tool group includes multiple polishing components distributed along the width direction of the drive stator assembly. The left and right adjacent polishing components are movably connected, and the front and rear adjacent polishing components are connected through the polishing liquid delivery pipe.

[0010] In the polishing device, the polishing assembly includes a polishing seat, and the top of the polishing seat is provided with a magnet part that is magnetically connected to the drive stator assembly; the left and right adjacent polishing seats are hinged together, and the front and rear adjacent polishing seats are connected through the polishing liquid delivery pipe.

[0011] In the polishing device, the top of the polishing seat is provided with at least one first hinge shaft, and the bottom of the magnet part is provided with a first hinge groove that is hinged to the first hinge shaft.

[0012] In the polishing device, at least one second hinge shaft is provided on one side of the polishing seat, and a second hinge groove adapted to the shape of the second hinge shaft is provided on the other side of the polishing seat. The left and right adjacent second hinge shafts and second hinge grooves are hinged together.

[0013] In the polishing device, the polishing seat is provided with a liquid storage cavity that is connected to the polishing liquid delivery pipeline, and at least one liquid outlet that is connected to the liquid storage cavity is provided on each of the two bottom sides of the polishing seat.

[0014] In the polishing device, a polishing pad is provided at the bottom of the polishing seat below the liquid outlet.

[0015] In the polishing device, ball joints communicating with the liquid storage cavity are respectively provided on the front and rear sides of the polishing seat, and the polishing liquid delivery pipe is connected to the liquid storage cavity through the ball joints.

[0016] Beneficial effects:

[0017] This invention provides a polishing device that, through electromagnetic drive and movable connection design, reduces the number of mechanical parts and lowers the risk of mirror damage. At the same time, the distributed layout of multiple polishing tool sets helps to improve the uniformity and controllability of polishing. During the processing, the movement of the polishing tool sets can be adjusted by a magnetic field to achieve a certain degree of real-time feedback, thereby optimizing the control of surface error. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the polishing device provided by the present invention;

[0019] Figure 2 Disassembly diagram of the polishing device provided by the present invention Figure 1 ;

[0020] Figure 3 Disassembly diagram of the polishing device provided by the present invention Figure 2 ;

[0021] Figure 4This is a schematic diagram of the assembly structure of the polishing components in the polishing apparatus provided by the present invention;

[0022] Figure 5 This is a disassembled structural diagram of the polishing component in the polishing device provided by the present invention.

[0023] Explanation of main component symbols: 1-Guide rail assembly, 2-Drive stator assembly, 21-Stator core, 22-Winding section, 23-Stator cut-wrap wire, 3-Polishing tool set, 31-Polishing assembly, 311-Polishing seat, 312-Magnet section, 313-First hinge shaft, 314-First hinge slot, 315-Second hinge shaft, 316-Second hinge slot, 317-Liquid outlet, 318-Polishing pad, 319-Spherical hinge, 4-Polishing fluid delivery pipe, 5-Optical element. Detailed Implementation

[0024] This invention provides a polishing apparatus. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0025] In the description of this invention, it should be understood that the terms "middle," "inner side," "outer side," etc., indicate the orientation or positional relationship of this invention based on the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features.

[0026] Please see Figures 1 to 5 This invention provides a polishing device, including a guide rail assembly 1 and a drive stator assembly 2. The drive stator assembly 2 is slidably connected to the guide rail assembly 1. Multiple sets of polishing tool groups 3 are arranged along the length of the magnetic field generating region of the drive stator assembly 2, and each set of polishing tool groups 3 is magnetically connected to the drive stator assembly 2. The sliding connection between the drive stator assembly 2 and the guide rail assembly 1 allows the drive stator assembly 2 to smoothly perform linear reciprocating motion on the guide rail assembly 1. Within the magnetic field generating region of the drive stator assembly 2, multiple sets of polishing tool groups 3 are arranged along its length, and each set of polishing tool groups 3 is magnetically connected to the drive stator assembly 2, enabling power transmission between the two.

[0027] Specifically, adjacent polishing tool groups 3 are movably connected; the guide rail assembly 1 drives the drive stator assembly 2 to perform linear reciprocating motion; the drive stator assembly 2 drives each polishing tool group 3 to perform reciprocating rotation around the sliding direction of the drive stator assembly 2. The movable connection between adjacent polishing tool groups 3 allows them to move relative to each other during operation to adapt to different polishing needs. When polishing cylindrical mirrors of different shapes, the movable connection between adjacent polishing tool groups 3 allows them to better conform to the mirror surface, improving the uniformity and precision of polishing. This design reduces the number of mechanical transmission components in the polishing device, lowering the risk of failure due to component fatigue.

[0028] In practical use, the guide rail assembly 1 drives the drive stator assembly 2 to perform linear reciprocating motion. Current is supplied to the drive stator assembly 2, causing it to generate a changing magnetic field that drives each set of polishing tools 3 to reciprocate around the sliding direction of the drive stator assembly 2. The drive stator assembly 2 also uses magnetic force to drag each set of polishing tools 3 in the sliding direction, ultimately causing each set of polishing tools 3 to perform translational motion on the optical element 5, thus achieving the polishing process of the optical element 5. In addition, during the polishing process, when the optical element 5 is polished to a certain extent, its removal amount increases. When the mirror surface is lowered, the polishing tool set 3 will follow the surface of the optical element 5 and move away from the drive stator assembly 2. During this process, the drive stator assembly 2 will generate a change in electromagnetic induction current, thereby judging whether the polishing removal amount has reached the preset removal amount, achieving an early warning effect.

[0029] like Figures 1 to 5As shown, further, the drive stator assembly 2 includes a stator core 21. The outer wall of the stator core 21 is slidably connected to the guide rail assembly 1. Multiple winding portions 22 are distributed on the inner wall of the stator core 21, and each winding portion 22 is wound with a stator cut-out wire 23. The magnetic field generating region is formed below the end face of each winding portion 22. The drive stator assembly 2 is composed of a stator core 21, and the outer wall of the stator core 21 is slidably connected to the guide rail assembly 1. This design ensures the stable sliding of the drive stator assembly 2 on the guide rail assembly 1. Multiple winding portions 22 are distributed on the inner wall of the stator core 21, providing a carrier for the winding of the stator cut-out wire 23. Each winding portion 22 is tightly wound with a stator cut-out wire 23. When the stator core 21 and the stator cut-out wire 23 are energized, a magnetic field is generated. A magnetic field generating region is formed below the end face of the winding section 22. Through the action of this magnetic field, the polishing tool assembly 3 can reciprocate around the sliding direction of the drive stator assembly 2, thereby achieving the polishing of the mirror surface. When current passes through the stator cut-out wire 23, an alternating magnetic field is formed below the end face of the winding section 22. This alternating magnetic field exerts a magnetic force on the polishing tool assembly 3 located within the magnetic field generating region, driving the polishing tool assembly 3 to reciprocate along a specific trajectory, thus grinding and polishing the cylindrical mirror surface.

[0030] In this embodiment, the guide rail assembly 1 includes two sliders and a linear sliding module. The two sliders are respectively connected to the outer wall of the stator core 21, and the two sliders are respectively slidably connected to the linear sliding module. It should be noted that the linear sliding module can be an existing linear sliding module such as an existing screw drive module or a synchronous belt drive module.

[0031] In this embodiment, the stator core 21 can be a silicon steel stator core, and the stator cut-out wire 23 can be a copper stator cut-out wire.

[0032] like Figures 1 to 5As shown, furthermore, the polishing tool groups 3 are connected by multiple polishing fluid delivery pipes 4, and the polishing surfaces of each polishing tool group 3 are connected to each of the polishing fluid delivery pipes 4. The polishing fluid delivery pipes 4 form a complete polishing fluid delivery network for the polishing tool groups 3; moreover, the connection between the polishing surfaces of each polishing tool group 3 and each polishing fluid delivery pipe 4 ensures that the polishing fluid is evenly delivered to the polishing surfaces of each polishing tool group 3. During the polishing process, the polishing fluid not only acts as a lubricant but also reduces friction between the polishing tools and the mirror surface, lowering the risk of mirror damage. It also removes heat and debris generated during polishing, ensuring the stability and quality of the polishing process. In actual polishing, the polishing fluid is delivered to the polishing surfaces of the polishing tool groups 3 through the delivery pipes, forming a lubricating film. This allows the polishing tool groups 3 to move more smoothly on the mirror surface while effectively cooling the polishing area, preventing the mirror surface from deforming or being damaged due to overheating.

[0033] Furthermore, in one embodiment, the polishing tool group 3 includes multiple polishing components 31 distributed along the width direction of the drive stator assembly 2. Adjacent polishing components 31 on the left and right sides are movably connected, and adjacent polishing components 31 front and rear are connected via the polishing fluid delivery pipe 4. This arrangement forms an array structure for each polishing tool group 3, effectively reducing errors caused by low frequencies. The movable connection between adjacent polishing components 31 on the left and right sides allows them to be flexibly adjusted according to the shape of the mirror surface and polishing requirements during operation, better conforming to the mirror surface and improving polishing accuracy and effect. The connection between adjacent polishing components 31 front and rear via the polishing fluid delivery pipe 4 not only ensures that the polishing fluid is evenly supplied to each polishing component 31 but also enhances the structural stability of the entire polishing tool group 3. For example, when polishing a cylindrical mirror with a complex curved surface, the left and right adjacent polishing components 31 can be adjusted in angle and position through movable connection to adapt to the changes in the curved surface. The front and rear adjacent polishing components 31 are connected by polishing fluid delivery pipes 4, which ensures that the entire polishing tool group 3 can receive a sufficient supply of polishing fluid during the polishing process, thus ensuring the consistency and stability of polishing.

[0034] Specifically, the polishing assembly 31 includes a polishing seat 311, the top of which is provided with a magnet part 312 that is magnetically connected to the drive stator assembly 2; adjacent polishing seats 311 on the left and right are hinged together, and adjacent polishing seats 311 in front and behind are connected by the polishing fluid delivery pipe 4; the movable connection between adjacent polishing assemblies 31 on the left and right allows the polishing seat 311 to be flexibly adjusted according to the shape of the mirror surface and polishing requirements during operation, so as to better fit the mirror surface and improve the polishing accuracy and effect. The connection between adjacent polishing assemblies 31 in front and behind by the polishing fluid delivery pipe 4 not only ensures that the polishing fluid can be evenly supplied to each polishing assembly 31, but also enhances the structural stability of the entire polishing tool assembly 3. When polishing a cylindrical mirror with a complex curved surface, the left and right adjacent polishing components 31 can be adjusted in angle and position through movable connections to adapt to changes in the curved surface. The front and rear adjacent polishing components 31 are connected by polishing fluid delivery pipes 4, ensuring that the entire polishing tool group 3 receives a sufficient supply of polishing fluid during the polishing process, thus guaranteeing the consistency and stability of polishing. In addition, the local polishing intensity can be adjusted by changing the magnet part 312 with varying magnetic strength, thereby achieving the purpose of changing the local polishing effect.

[0035] In one embodiment, the polishing seat 311 has at least one first hinge shaft 313 at its top, and the magnet part 312 has a first hinge groove 314 at its bottom that hinges to the first hinge shaft 313. The first hinge shaft 313 and the first hinge groove 314 allow the magnet part 312 to rotate relative to the polishing seat 311 at a certain angle. Therefore, when the magnet part 312 drives the polishing seat 311 to move under the influence of a magnetic field, it can better adapt to changes in the magnetic field and the polishing requirements. When the direction of the magnetic field generated by the stator assembly 2 changes, the magnet part 312 can flexibly adjust its angle through the hinge structure with the first hinge shaft 313 and the first hinge groove 314 at the top of the polishing seat 311 to better receive the drive of the magnetic field, thereby driving the polishing seat 311 and the polishing pad 318 to polish the mirror surface.

[0036] It should be noted that the magnet part 312 is a conventional permanent magnet structure, and its specific structure and working principle are existing technologies, which will not be described in detail here.

[0037] In another embodiment, at least one second hinge shaft 315 is provided on one side of the polishing seat 311, and a second hinge groove 316 adapted to the shape of the second hinge shaft 315 is provided on the other side of the polishing seat 311. The left and right adjacent second hinge shafts 315 and second hinge grooves 316 are hinged together. The hinge structure of adjacent polishing seats 311 further enhances the movable connection performance between adjacent polishing seats 311, allowing them to adjust their relative positions and angles more flexibly during operation. When polishing a cylindrical mirror with complex curvature changes, the left and right adjacent polishing seats 311 can adjust their angles and positions in real time according to the curvature changes through the hinge structure of the second hinge shaft 315 and the second hinge groove 316, so that the polishing pad 318 can always maintain good contact with the mirror surface, achieving high-quality polishing.

[0038] like Figures 1 to 5 As shown, furthermore, the polishing seat 311 is provided with a liquid storage cavity communicating with the polishing fluid delivery pipe 4, and at least one outlet 317 communicating with the liquid storage cavity is provided on each of the bottom sides of the polishing seat 311. The liquid storage cavity buffers the polishing fluid, ensuring a continuous supply of polishing fluid during the polishing process. The polishing fluid flows out through the outlet 317 and reaches the contact area between the polishing surface and the mirror surface of the polishing seat 311, playing a role in lubrication, cooling, and removing debris. During the polishing process, the polishing fluid in the liquid storage cavity flows out evenly through the outlet 317 under the action of pressure difference, forming a lubricating film between the polishing surface and the mirror surface, effectively reducing the friction between the polishing pad 318 and the mirror surface, while removing the heat and debris generated during the polishing process, ensuring the quality and efficiency of polishing.

[0039] In this embodiment, a polishing pad 318 is provided at the bottom of the polishing seat 311 below the liquid outlet 317. The polishing pad 318 enhances the polishing effect of the mirror surface. The polishing liquid flowing out of the liquid outlet 317 forms a lubricating film between the polishing pad 318 and the mirror surface, reducing the friction between the polishing pad 318 and the mirror surface. At the same time, it removes the heat and debris generated during the polishing process, ensuring the quality and efficiency of polishing.

[0040] It should be noted that the polishing pad 318 is a polishing pad made of plastic materials with low hardness such as tetrafluoroethylene and polyurethane.

[0041] like Figures 1 to 5As shown, furthermore, ball joints 319 communicating with the liquid storage cavity are respectively provided on the front and rear sides of the polishing seat 311, and the polishing liquid delivery pipe 4 is connected to the liquid storage cavity through the ball joints 319; the ball joints 319 make the connection between the polishing liquid delivery pipe 4 and the polishing seat 311 more flexible, and can adapt to the movement and angle changes of the polishing seat 311 to a certain extent. When the polishing seat 311 undergoes angle adjustment during operation, the ball joints 319 allow the polishing liquid delivery pipe 4 to rotate relative to the polishing seat 311 at a certain angle, ensuring that the delivery of polishing liquid is not affected, and ensuring the stability and reliability of the entire polishing system; in addition, when the polishing seat 311 has a certain degree of freedom in multiple directions, it can prevent collisions between the magnet parts 312 that cause mutual attraction or repulsion.

[0042] In summary, the polishing device of the present invention reduces the number of mechanical parts and lowers the risk of mirror damage through electromagnetic drive and movable connection design; at the same time, the distributed arrangement of multiple polishing tool groups 3 helps to improve polishing uniformity and controllability; during the processing, the movement of the polishing tool group 3 can be adjusted by magnetic field to achieve a certain degree of real-time feedback, thereby improving surface error control.

[0043] It is understood that those skilled in the art can make equivalent substitutions or modifications to the technical solution and inventive concept of the present invention, and all such substitutions or modifications should fall within the protection scope of the appended claims.

Claims

1. A polishing apparatus, characterized in that, The device includes a guide rail assembly and a drive stator assembly. The drive stator assembly is slidably connected to the guide rail assembly. Multiple polishing tool groups are arranged along the length of the magnetic field generating region of the drive stator assembly. Each polishing tool group is magnetically connected to the drive stator assembly, and adjacent polishing tool groups are movably connected. The guide rail assembly drives the drive stator assembly to perform linear reciprocating motion. The drive stator assembly drives each polishing tool group to perform reciprocating rotational motion around the sliding direction of the drive stator assembly. Each polishing tool group is connected to multiple polishing fluid delivery pipes, and the polishing surface of each polishing tool group is connected to each polishing fluid delivery pipe. Each polishing tool group includes multiple polishing components distributed along the width of the drive stator assembly. Left and right adjacent polishing components are movably connected, and front and rear adjacent polishing components are connected through the polishing fluid delivery pipes. Each polishing component includes a polishing base, and the top of the polishing base is provided with a magnet part magnetically connected to the drive stator assembly. Left and right adjacent polishing bases are hinged, and front and rear adjacent polishing bases are connected through the polishing fluid delivery pipes.

2. The polishing apparatus according to claim 1, characterized in that, The drive stator assembly includes a stator core, the outer wall of which is slidably connected to the guide rail assembly. The inner wall of the stator core has multiple winding sections, each of which is wound with a stator cut wire. The magnetic field generating region is formed below the end face of the winding section.

3. The polishing apparatus according to claim 1, characterized in that, The polishing seat has at least one first hinge shaft on its top, and the magnet part has a first hinge groove on its bottom that is hinged to the first hinge shaft.

4. The polishing apparatus according to claim 1, characterized in that, One side of the polishing seat is provided with at least one second hinge shaft, and the other side of the polishing seat is provided with a second hinge groove that matches the shape of the second hinge shaft. The left and right adjacent second hinge shafts and second hinge grooves are hinged together.

5. A polishing apparatus according to claim 1, characterized in that, The polishing seat is provided with a liquid storage cavity that is connected to the polishing liquid delivery pipeline, and at least one liquid outlet that is connected to the liquid storage cavity is provided on each of the two bottom sides of the polishing seat.

6. A polishing apparatus according to claim 5, characterized in that, A polishing pad is provided at the bottom of the polishing seat, below the liquid outlet.

7. A polishing apparatus according to claim 5, characterized in that, The polishing seat is provided with ball joints on its front and rear sides, which are connected to the liquid storage cavity. The polishing liquid delivery pipe is connected to the liquid storage cavity through the ball joints.

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