Liquid coating apparatus, maintenance method, and article manufacturing method

Abstract

The invention provides a liquid coating apparatus, a maintenance method, and an article manufacturing method. The liquid coating apparatus includes: a discharge head having a head surface in which a discharge port for discharging liquid is disposed; a maintenance member that can be disposed so as to face the head surface in order to maintain the function of the discharge head; and a cleaning mechanism that cleans the maintenance member by pressing a cleaning member against the maintenance member at a position away from the discharge head.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to a liquid coating device, a maintenance method, and an article manufacturing method. BACKGROUND

[0002] For example, in a liquid discharge device such as an inkjet printer that has a discharge nozzle for discharging ink from a discharge port, a failure can occur in which the discharge port becomes a non-discharge state due to drying of the discharge port or mixing of foreign matter. Various countermeasures for solving such a failure have been proposed. In particular, in a liquid discharge device that uses ink in which a pigment or a functional material and a volatile liquid are mixed, or ink such as QD ink for manufacturing a liquid crystal display that has a high viscosity, a residue easily accumulates, and sometimes causes a significant obstacle to the discharge operation. Thus, it is necessary to efficiently clean the periphery of the discharge port, and a recovery device that restores the discharge function by efficiently removing the discharge material attached to the periphery of the discharge port and the cleaning liquid used at the time of cleaning has also been proposed.

[0003] As an example of the recovery device, there is a cover device that, after an area in which the discharge port is disposed is sealed by a cover, sets the inside of the cover to a negative pressure, thereby forcibly sucking ink or the like that is clogged in the discharge port. The cover device has a function of filling a cleaning liquid in the sealed space to clean the periphery of the discharge port, and a function of preventing the surface of the discharge chip from drying during a non-operation period, in addition to the sucking function. In Japanese Patent No. 6905118, a configuration is described in which a sucking nozzle is disposed at a prescribed interval with respect to the surface of the discharge port, and the liquid on the surface of the discharge port is sucked by the sucking nozzle.

[0004] In the past, dirt on maintenance components such as the recovery device and the cover for maintaining the function of the discharge nozzle has not been noticed. However, for example, with respect to the sucking nozzle of the recovery device, in order to reliably suck the liquid that can remain on the surface of the nozzle, the gap between the surface of the nozzle and the sucking nozzle can be strictly managed at a very small distance of about 50 μm to 500 μm. Thus, if a residue accumulates on the surface of the sucking nozzle and the gap between the surface of the nozzle and the residue is less than a prescribed value, there is a possibility that the sucking performance will fail. Of course, if the accumulation develops as the gap disappears, the residue that accumulates on the sucking nozzle comes into contact with the surface of the nozzle, and can contaminate the surface of the nozzle. In addition, if the residue that accumulates on the sucking nozzle is a solidified ink accumulation, when the sucking nozzle is scanned and moved in a state in which it comes into contact with the surface of the nozzle, the surface of the nozzle can be damaged.

[0005] Further, the cap can also malfunction. By pressing the outer periphery of the cap against the face of the head, a sealed space is formed between the cap and the face of the head. Thus, if there is a deposit adhered to the surface of the cap, the dirt of the deposit can stain the face of the head. Further, if the deposit accumulated on the cap is a deposit of solidified ink, the face of the head can be damaged when the cap is pressed against the face of the head. Furthermore, in order to improve the tightness of the internal space of the cap, the outer peripheral portion of the cap can be composed of a material having flexibility and resistance to the discharged liquid, such as fluorine rubber. If a deposit is adhered to such an outer peripheral portion, the flexibility is lost, the tightness is reduced, and there is a possibility that the desired tightness cannot be obtained.

[0006] Of course, if the maintenance parts such as the suction nozzle and the cap are frequently replaced or the cleaning operation is performed by the operator, the above-mentioned malfunction can be avoided, but the operation takes a lot of time. In particular, in a liquid discharge apparatus using anaerobic ink or light-hardening ink, since the vicinity of the discharge head is a sealed space or a light-shielded space, it is not easy for the operator to approach the vicinity of the discharge head. SUMMARY

[0007] The present disclosure provides a technology that is advantageous in maintaining the function of a discharge head.

[0008] A first aspect of the present disclosure relates to a liquid application apparatus including: a discharge head having a head face on which a discharge port of a discharge liquid is provided; a maintenance part provided so as to face the head face in order to maintain the function of the discharge head; and a cleaning mechanism that cleans the maintenance part by pressing a cleaning member against the maintenance part at a position away from the discharge head.

[0009] A second aspect of the present disclosure relates to an article manufacturing method including: an application step of applying a liquid to a substrate using the liquid application apparatus according to the first aspect; and a processing step of obtaining an article by processing the substrate after the application step.

[0010] A third aspect of the present disclosure relates to a maintenance method for maintaining the function of a discharge head having a head face on which a discharge port of a discharge liquid is provided, the maintenance method including: a step of maintaining the function of the discharge head by providing a maintenance part so as to face the head face; and a cleaning step of cleaning the maintenance part by pressing a cleaning member against the maintenance part at a position away from the discharge head.

[0011] The fourth aspect of the present disclosure relates to an article manufacturing method including: a maintenance step of maintaining the function of a discharge head by the maintenance method described in the third aspect; a coating step of coating a substrate with a liquid by discharging the liquid from the discharge head; and a processing step of obtaining an article by processing the substrate after the coating step. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a perspective view illustrating the overall configuration of the liquid discharge apparatus of the first embodiment.

[0013] Figure 2 is a perspective view illustrating the configuration of the discharge head.

[0014] Figure 3 is a perspective view illustrating the configuration of the maintenance section (cover, cleaner).

[0015] Figure 4 is a perspective view illustrating the configuration of the cleaning mechanism of the first embodiment.

[0016] Figure 5 is a side view illustrating the configuration of the cleaning mechanism of the first embodiment.

[0017] Figure 6 is a perspective view illustrating the configuration of the cleaning mechanism of the first embodiment.

[0018] Figure 7 is a side view illustrating the configuration of the cleaning mechanism of the first embodiment.

[0019] Figure 8 is a side view illustrating the configuration of the cleaning mechanism of the first embodiment.

[0020] Figure 9 is a perspective view illustrating the configuration of the cleaning mechanism of the liquid discharge apparatus of the second embodiment.

[0021] Figure 10 is a perspective view illustrating the configuration of the cleaning mechanism of the liquid discharge apparatus of the second embodiment.

[0022] Figure 11 is a perspective view illustrating the configuration of the cleaning mechanism of the liquid discharge apparatus of the second embodiment.

[0023] Figure 12 is a diagram for explaining the operation of the liquid discharge apparatus of the first embodiment.

[0024] Figure 13 is a perspective view showing a configuration example of the cleaner.

[0025] Figure 14is a perspective view showing a configuration example of the cover. DETAILED DESCRIPTION

[0026] Hereinafter, the embodiments will be described in detail with reference to the drawings. Further, the following embodiments are not intended to limit the application covered by the claims. The embodiments describe a plurality of features, but the plurality of features are not necessarily essential to the application, and the plurality of features can be arbitrarily combined. Furthermore, in the drawings, the same reference numerals are assigned to the same or similar components, and repeated description is omitted.

[0027] Figure 1 and Figure 2 is a view showing a configuration example of the liquid application device 13 according to the first embodiment. Figure 1 is a perspective view illustrating the configuration of the entire liquid application device 13. Figure 2 is a perspective view of the discharge module 6 viewed from below. The liquid application device 13 can be configured to apply ink (liquid) to the substrate 3. The substrate 3 is fixed to the substrate stage 4, and the substrate 3 is moved relative to the stage 5 by the substrate stage 4 moving on the platform 5. One or a plurality of discharge nozzles 16 can be arranged in the discharge module 6. Each discharge nozzle 16 can have a nozzle face HS on which a discharge port 18 discharging ink (liquid) is arranged. The discharge module 6 is supported by the carriage 11 in a manner facing the upper surface of the substrate 3, and the interval between the substrate 3 and the nozzle face HS of the discharge nozzle 16 of the discharge module 6 can be adjusted to a desired value by the carriage 11 moving up and down. On the substrate stage 4, an ink collector 7 can be provided outside a region in which the substrate 3 is attracted by vacuum attraction or the like.

[0028] In the example shown in Figure 2 , a plurality of discharge nozzles 16 are arranged in two rows in the discharge module 6. Each discharge nozzle 16 has a nozzle face HS on which one or a plurality of discharge ports 18 are arranged, and each discharge nozzle 16 is arranged in a manner in which the nozzle face HS (from another viewpoint, the discharge port 18) faces downward. In the example shown in Figure 1 , the length direction of the discharge nozzle 16 is parallel to the X direction (the first direction 9), and the width direction of the discharge nozzle 16 is parallel to the Y direction. The arrangement of the two rows of a plurality of discharge nozzles 16 can be a staggered arrangement. Figure 2

[0029] ​In the coating operation (printing operation) of applying ink to the substrate 3, first, the interval between the substrate 3 and the discharge module 6 (the nozzle face HS) can be set to a desired value by up-and-down driving of the carriage 11. Then, the substrate 3 and the ink collector 7 can be relatively driven with respect to the discharge module 6 by driving the substrate stage 4 in the Y direction. Also, at the timing when the ink collector 7 reaches below the discharge module 6, ink can be discharged from the discharge ports 18 of all the discharge nozzles 16 provided in the discharge module 6. A negative pressure suction device not shown can be connected to the ink collector 7, and all the discharged ink can be recovered by the ink collector 7. The discharge of ink from each discharge port 18 is determined in accordance with the pattern of ink to be applied to the substrate 3, and thus there can be a discharge port 18 that does not perform the discharge operation for a long period of time among the plurality of discharge ports 18. For the discharge port 18 that does not perform the discharge operation for a long period of time, the discharge port 18 can become a state of being clogged due to evaporation of a volatile component of the ink. Thus, by discharging ink from all the discharge ports 18 with respect to the ink collector 7, clogging of the discharge ports 18 can be prevented. Further, by detecting the vibration waveform of each discharge port 18 in the discharge operation, it can be determined whether each discharge port 18 is in a normal state.

[0030] Next, ink can be discharged from the discharge ports 18 selected in accordance with the pattern of ink to be applied to the substrate 3 at the timing when the substrate 3 passes below the discharge module 6 at a constant speed. The liquid coating device 13 using ink containing a volatile solvent can be provided with a drying unit that dries the ink after the ink is applied to the substrate 3 by the discharge module 6. In the liquid coating device 13 using ink of an ultraviolet hardening type, an ultraviolet irradiation unit that irradiates ultraviolet rays to the ink after the ink is applied to the substrate 3 by the discharge module 6 can be provided.

[0031] In one example, the diameter of the discharge port 18 can be in the range of 10 μm to 50 μm, and the interval between the discharge nozzle 16 (the nozzle face HS) in the coating operation (printing operation) and the substrate 3 can be in the range of 50 μm to 500 μm. If the discharge port 18 is clogged due to drying of the ink or the like, or if there is a residue of the ink accumulated around the discharge port 18, or if there is a foreign matter attached, either of the discharge angle and the discharge speed of the ink discharged from the discharge port 18 can change. In such a case, the application position of the ink to the substrate 3 can deviate from the target position. In order to eliminate such a failure, that is, in order to maintain the function of the discharge nozzle 16, a maintenance member can be used.

[0032] Figure 3 is a perspective view showing a configuration example of the maintenance unit 2. Figure 13 and Figure 14 is a perspective view showing a detailed configuration example of a configuration element of the maintenance member. The maintenance unit 2 can include one or a plurality of maintenance members. Alternatively, the maintenance unit 2 can include one or a plurality of kinds of maintenance members. In the example shown inFigure 3 In the example shown, maintenance unit 2 includes a cover 41 as one example of a maintenance component and a cleaner 46 as another example of a maintenance component. Figure 3 The illustration shows cleaners 46 arranged in two rows and covers 41 arranged in two rows. The center-to-center distance between the two rows of cleaners 46 is equal to the center-to-center distance between the two rows of discharge nozzles 16 arranged in two rows. Similarly, the center-to-center distance between the two rows of covers 41 is equal to the center-to-center distance between the two rows of discharge nozzles 16 arranged in two rows.

[0033] Each cleaner 46 has a nozzle guide rail 49 and a suction nozzle 47 that moves in the X direction while being guided by the nozzle guide rail 49. Each cover 41 is configured to face the corresponding discharge nozzle 16 among the plurality of discharge nozzles 16, covering the nozzle surface HS of the discharge nozzle 16 when the liquid coating apparatus 13 is not in operation or in standby mode. The cleaner 46 is an example of a restoration unit for restoring the function of the discharge nozzle 16. The cleaner 46 can be configured as a non-contact cleaner that cleans the nozzle surface HS of the discharge nozzle 16 without contacting it.

[0034] Figure 12 Viewed from the side (towards the -X direction) Figure 1 Side view of the illustrated liquid coating apparatus 13. The maintenance unit 2 can be supported by the support mechanism 14. The discharge module 6 can be discharged from... Figure 12 The coating action position shown in (a) rises, towards Figure 12 The retraction position shown in (b) is moved. Then, the maintenance unit 2 can move in the -Y direction on the maintenance platform 15, as shown in (b). Figure 12 As shown in (c), it is positioned below the discharge module 6. Here, by fine-tuning the movement of the maintenance unit 2 on the maintenance table 15, either the cover 41 arranged in two rows or the cleaner 46 arranged in two rows can be positioned below the discharge nozzle 16 arranged in two rows.

[0035] Figure 14is a perspective view showing a state in which the discharge nozzle 16 faces the cover 41. The discharge nozzle 16 can include, for example, a ceramic discharge chip 17 disposed with a nozzle face HS (not shown) having a discharge port 18 (not shown) facing downward, and a chip shroud 19 of metal surrounding the nozzle face HS of the discharge chip 17. In one example, the lower surface of the chip shroud 19 can be disposed several μm below the nozzle face HS (lower surface) of the discharge chip 17. This can function to prevent the discharge chip 17 from being damaged by contact with other objects. The cover body 43 constituting the cover 41 is, for example, a ceramic structure, and a recessed portion in the shape of a groove can be formed in the upper surface. The cover body 43 can have, for example, a supply port 45 and a discharge port 53 communicating with the recessed portion, and a connection port 51 communicating therewith to be connected to the outside. A cover seal 42 of fluorine rubber can be attached to the upper surface of the cover body 43. The cover body 43 can be raised by a cover lifter 44, and the cover seal 42 can be brought into close contact with the lower surface of the discharge nozzle 16, thereby forming a closed space below the discharge nozzle 16. The cover 41 can be used to achieve, for example, the following four functions.

[0036] The first function is a function of preventing deterioration of ink. The discharged ink can be, for example, ink obtained by dispersing a pigment in an organic solvent having high volatility, or ultraviolet-curable ink, or ink containing an anaerobic solvent. The liquid application device 13 can be configured to control the environment around the discharge port 18 to prevent such ink from deteriorating. However, there are cases where the liquid application device 13 is stopped for a long period of time, or the control of the environment around the discharge port 18 is stopped for maintenance. In such cases, the nozzle face HS of the discharge nozzle 16 is covered by the cover 41, and deterioration of the ink can be prevented. In addition, foreign matter can be prevented from adhering to the discharge nozzle 16.

[0037] The second function is a function of eliminating clogging of the discharge port 18. For example, in a case where the viscosity of the ink increases due to evaporation of volatile components of the ink or foreign matter adheres to the discharge port 18 to become a state where the discharge port 18 is clogged, the clogging can be eliminated by forcibly discharging the ink by increasing the discharge pressure higher than usual. In this case, it is necessary to collect the ink to prevent the forcibly discharged ink from flying around. In the liquid application device 13, the cover body 43 can be raised by the cover lifter 44, and stopped at a position before the cover seal 42 comes into close contact with the nozzle face HS of the discharge nozzle 16. Further, by operating a not-shown negative pressure source connected to the discharge port 53, the ink discharged into the internal space of the cover 41 can be collected without flying around and discarded.

[0038] The third function is to more strongly perform the forced discharge function. In the second function, the operation of forcibly discharging the ink from the inside of the discharge chip 17 is performed by increasing the pressure on the discharge side, but there are cases where the ink needs to be discharged with more force. In such a case, the cover body 43 is raised until the cover seal 42 is in close contact with the nozzle face HS of the discharge nozzle 16, and the inside of the cover 41 is made into a closed state. Also, the supply port 45 is blocked, and an unillustrated negative pressure source connected to the discharge port 53 is operated, whereby the inside of the cover 41 is made into a negative pressure state. In this state, if the forced discharge performed in the second function is performed, the differential pressure applied to the discharge port 18 increases, and stronger forced discharge can be performed.

[0039] The fourth function is a function of cleaning the nozzle face HS of the discharge nozzle 16. In the case where residues or foreign matter of the ink are attached to the vicinity of the discharge port 18 of the nozzle face HS of the discharge nozzle 16, the ink application position with respect to the substrate 3 can be shifted from the target position. Therefore, the process of removing these residues and foreign matter should be performed periodically or at any time. As an example of this process, the following is performed. In the liquid applicator 13, first, the cover body 43 is raised, and a state in which the cover seal 42 is in close contact with the nozzle face HS of the discharge nozzle 16 is formed. Next, after the cleaning liquid is supplied to the inside of the cover 41 from the supply port 45, the cleaning liquid is brought into contact with the nozzle face HS of the discharge nozzle 16 and left for a certain period of time. Then, in a state in which the discharge port 53 is open, cleaning is performed while the cleaning liquid is continuously supplied. Then, the supply of the cleaning liquid is stopped, and the unillustrated negative pressure source connected to the discharge port 53 is operated, whereby the cleaning liquid in the inside of the cover 41 is discharged. Finally, the chemical cleaning nitrogen gas is supplied from the supply port 45, and the cleaning liquid attached to the nozzle face HS of the discharge nozzle 16 is removed.

[0040] Further, in the case where the cover 41 is allowed to come into contact with the region of the nozzle face HS of the discharge nozzle 16 including the discharge port 18, the residues or foreign matter of the ink attached to the nozzle face HS can also be scraped off by the cover 41. As an example, the cover body 43 is raised until the cover seal 42 is in close contact with the nozzle face HS of the discharge nozzle 16, and the cover seal 42 is pressed slightly. In this state, the cover 41 is relatively moved in parallel with respect to the nozzle face HS of the discharge nozzle 16. In this case, the cover seal 42 is preferably made of a material having flexibility, such as fluorine rubber.

[0041] While the discharge performance of the liquid application device 13 can be maintained by the above-described method, there can be cases where the maintenance is insufficient. For example, in the case of using the first function, the cover seal 42 is in contact with the head face HS of the discharge head 16. Therefore, the residue of ink adhering to the contact area of the cover seal 42 and the head face HS remains on the head face HS of the discharge head 16 even after the cover seal 42 is separated from the head face HS. In the case of using the second function, the discharged ink is recovered by the cover 41, but the mist of ink generated at the time of discharge adheres again to the head face HS of the discharge head 16. In the case of using the third and fourth functions, the cover seal 42 is in contact with the head face HS of the discharge head 16, and therefore the residue of ink adhering to the contact area of the cover seal 42 and the head face HS remains on the head face HS of the discharge head 16 even after the cover seal 42 is separated from the head face HS.

[0042] Figure 13 The state in which the cleaner 46 faces the head face HS of the discharge head 16 is exemplified. The suction nozzle 47 is driven in the Z direction by the nozzle lifter 48, and the suction nozzle 47 can be disposed so as to set a prescribed gap (for example, in the range of 5 μm to 30 μm) between the upper end of the suction nozzle 47 and the head face HS of the discharge head 16. That is, the suction nozzle 47 can be disposed so as to face the head face HS of the discharge head 16 without being in contact with the head face HS. The suction nozzle 47 can be moved in the X direction (the length direction of the discharge head 16) while being guided by the nozzle guide 49 in a state in which the gap is maintained. Thus, the entire area of the head face HS can be cleaned. In one example, the suction nozzle 47 can be provided with a suction port 50 having a width in the X direction in the range of 50 μm to 200 μm and a width in the Y direction that is slightly larger than the width of the head face HS in the Y direction. The suction port 50 is in communication with a connection port 51. A negative pressure source not shown is connected to the connection port 51, and suction can be performed through the suction port 50. According to the above-described configuration, the residue of ink, cleaning liquid, foreign matter, and the like adhering to the head face HS of the discharge head 16 can be effectively removed by the suction nozzle 47. In order to increase the efficiency of the process of removing the adhering matter from the head face HS, it is preferable to apply a liquid-repellent treatment to the head face HS of the discharge head 16.

[0043] As described above, the function of the discharge head 16 can be maintained by causing the maintenance member (the cover 41 and / or the cleaner 46) to operate. However, this is premised on the ability to maintain the performance of the maintenance member (the cover 41 and / or the cleaner 46).

[0044] Specifically, in the case of using the first function, the cover seal 42 is in contact with the head face HS of the discharge head 16. Therefore, the residue of ink adhering to the contact area of the cover seal 42 and the head face HS remains on the head face HS of the discharge head 16 even after the cover seal 42 is separated from the head face HS. In the case of using the second function, the discharged ink is recovered by the cover 41, but the mist of ink generated at the time of discharge adheres again to the head face HS of the discharge head 16. In the case of using the third and fourth functions, the cover seal 42 is in contact with the head face HS of the discharge head 16, and therefore the residue of ink adhering to the contact area of the cover seal 42 and the head face HS remains on the head face HS of the discharge head 16 even after the cover seal 42 is separated from the head face HS. Figure 13In the example shown, the suction port 50 of the suction nozzle 47, due to its narrow slit shape, is susceptible to clogging by highly viscous ink or foreign matter, similar to the discharge port 18 of the discharge nozzle 16. Furthermore, there is a possibility of ink residue or foreign matter accumulating on the suction surface 52. As previously explained, the gap between the suction surface 52 and the nozzle surface HS of the discharge nozzle 16 is managed with a very small value. Therefore, there is a possibility of decreased suction performance due to changes in the gap caused by accumulation, and a possibility of damage to the nozzle surface HS due to dragging while the accumulation is in contact with it.

[0045] In addition, Figure 14 The same applies to the illustrated cover 41. For example, ink and cleaning fluid tend to accumulate at the boundary between the cover body 43 and the cover seal 42, especially since negative pressure suction cannot be applied to the outer surface of the cover seal, causing the accumulated ink to solidify easily. At the contact point between the cover seal 42 and the discharge nozzle 16, ink and cleaning fluid residues tend to remain after leaving the discharge nozzle 16. Regarding the contact point on the discharge nozzle 16 side, as previously explained, the residues can be removed by suction from the cleaner 46. On the other hand, regarding the contact point on the cover seal 42 side, if there is no mechanism to remove residues, they will continue to accumulate. If the ink accumulated on the surface of the cover seal 42, which requires flexibility, solidifies, the airtightness of the contact surface can no longer be maintained. Furthermore, there is a possibility that the solidified residues may cause damage to the contact surface on the discharge nozzle 16 side.

[0046] Therefore, the liquid coating apparatus 13 of the first embodiment may include a cleaning mechanism 1 for cleaning the maintenance components (cover 41, cleaner 46). The cleaning mechanism 1 may be configured to clean the maintenance components at a position away from the discharge nozzle 16 (discharge module 6). By cleaning the maintenance components at a position away from the discharge nozzle 16 (discharge module 6) by the cleaning mechanism 1, interference between the cleaning mechanism 1 and the discharge nozzle 16 (discharge module 6) can be prevented. This is beneficial for protecting the discharge nozzle 16 (discharge module 6) and also for preventing the discharge nozzle 16 (discharge module 6) from being recontaminated by the cleaning mechanism 1. The cleaning mechanism 1 may, for example, be configured to clean the maintenance components by pressing a cleaning member onto the maintenance components. The liquid coating apparatus 13 may include a drive mechanism for moving at least one of the maintenance components and the cleaning member so that the cleaning member moves relative to the maintenance components.

[0047] As mentioned above, Figure 12 As shown in (c), a maintenance component can be configured below the discharge module 6 to perform actions for maintaining the function of the discharge module 6. Then, as... Figure 12The maintenance member is retracted from below the discharge module 6 by moving in the +Y direction on the maintenance table 15 away from the discharge module 6 as shown in (b) of FIG. 6. Then, the carriage 11 on which the discharge module 6 is mounted is moved in the -Z direction as shown in (c) of FIG. 6, and the cleaning mechanism 1 is positioned above the maintenance member as shown in (d) of FIG. 6. Figure 12 The maintenance member is retracted from below the discharge module 6 by moving in the +Y direction on the maintenance table 15 away from the discharge module 6 as shown in (b) of FIG. 6. Then, the carriage 11 on which the discharge module 6 is mounted is moved in the -Z direction as shown in (c) of FIG. 6, and the cleaning mechanism 1 is positioned above the maintenance member as shown in (d) of FIG. 6.

[0048] Figure 1 is Figure 12 is a perspective view of the liquid applicator 13 in the state shown in (c) of FIG. 6. The cleaning mechanism 1 is positioned above the maintenance member, is supported by the guide shaft 8, and is configured to be movable in the +X direction. Figure 4 is shown in (c) of FIG. 6 to Figure 12 is shown in (b) of FIG. 6, the relative positions of the cleaning module 21 and the cleaner 46 can be adjusted. Figure 12 is shown in (b) of FIG. 6, the relative positions of the cleaning module 21 and the cleaner 46 can be adjusted. Figure 5 is a view showing the relative positions of the internal configuration of the cleaning module 21 and the cleaner 46. Hereinafter, the operation of maintaining the function of the cleaner 46 (restoring section) by cleaning the cleaner 46 will be described with reference to Figure 4 and Figure 5 , the operation of maintaining the function of the cleaner 46 (restoring section) by cleaning the cleaner 46 will be described with reference to

[0049] The cleaning module 21 can have a pay-off roll 23 and a take-up roll 24 disposed inside a housing 27. The pay-off roll 23 is a roll that pays out the cleaning medium 22 in a roll shape, and the take-up roll 24 is a roll that winds up the cleaning medium 22 that has been paid out. The cleaning medium 22 has a width that is larger than the width of the suction nozzle 47 in the Y direction. The cleaning medium 22 is, for example, a nonwoven fabric. The cleaning mechanism 1 can include a pressing member 25 that presses the cleaning medium 22 as a cleaning member against the cleaner 46 as an example of a maintenance member. The pressing member 25 is supported by a guide 29 and receives a pressing force in the -Z direction by a compression spring 26. The moving direction and the moving amount of the pressing member 25 can be limited by a guide window 28 opened in the housing 27. The cleaning mechanism 1 can have a cleaning nozzle 20 (supply section) that is disposed so as to drip a cleaning liquid to the cleaning medium 22 between the pressing member 25 and the pay-off roll 23. The liquid applicator 13 can have a drive mechanism DRV that moves at least one of the cleaner 46 and the cleaning medium 22 so that the cleaning medium 22 (cleaning member) moves relatively to the cleaner 46 (maintenance member).

[0050] In one example, an ink using an organic solvent as a solvent is used, and a non-woven fabric resistant to organic solvents is used as the cleaning medium 22. The pressing member 25 can be made of PTFE. Of course, in cases where resistance to organic solvents is not required, elasticity can be achieved by using, for example, polyurethane foam as the material of the pressing member 25, thus omitting the construction of the compression spring 26.

[0051] like Figure 12 As shown in (b), when the cleaner 46 (maintenance component) faces the cleaning mechanism 1, the pressing member 25 of the cleaning module 21 moves away from the cleaner 46 in the +Z direction. Therefore, even if the cleaning module 21 moves in the X direction, the two will not come into contact. If the cleaning action is changed to the cleaner 46, the cleaner 46 is pushed up by the nozzle lifter 48 in the +Z direction to a position Δh higher than the lower end of the cleaning module 21. And, cleaning liquid drips from the cleaning nozzle 20 onto the cleaning medium 22. Then, the unwinding roller 23 and the take-up roller 24 are controlled to release the cleaning medium 22 such that the portion of the cleaning medium 22 to which the dripped cleaning liquid is located is below the pressing member 25. In this state, if the cleaning module 21 is moved in the +X direction by the drive mechanism DRV, then as Figure 5 As in (a), the cleaning medium 22 comes into contact with the suction nozzle 47. Furthermore, the cleaning module 21 is further moved in the +X direction by the drive mechanism DRV. Thus, as... Figure 5 As in (b), after the pressing member 25 is pushed upward, it presses the cleaning medium 22 onto the suction nozzle 47 while passing over the suction nozzle 47. After the pressing member 25 passes over the suction nozzle 47, the unwinding roller 23 and the take-up roller 24 are controlled to release the cleaning medium 22 such that the portion of the cleaning medium 22 that has not been soaked in cleaning fluid is below the pressing member 25. Furthermore, by moving the cleaning module 21 in the -X direction, the cleaning fluid remaining on the surface of the suction nozzle 47 can be wiped away.

[0052] In the above description, the relative movement between the cleaning module 21 (cleaning medium 22) and the cleaner 46 can be achieved by moving the cleaning module 21 using the drive mechanism DRV. However, this is only one example. The relative movement between the cleaning module 21 (cleaning medium 22) and the cleaner 46 can also be achieved by moving the cleaner 46 along the X direction. Furthermore, while the cleaning medium 22 is in contact with the suction nozzle 47, the cleaning effect can be improved by varying the amount of cleaning medium 22 released (e.g., by applying micro-vibration).

[0053] exist Figure 4 as well as Figure 5The image shows only one cleaner 46 and one cleaning module 21, but multiple cleaners 46 and multiple cleaning modules 21 corresponding to them can also be set.

[0054] Figure 6 This diagram illustrates the operation of the cleaning module 21 cleaning the cover 41. First, in Figure 12 In the state shown in (b), the cleaning module 21 is positioned above the cover 41 by moving the maintenance component in the Y direction. Similarly to the cleaning action of the cleaner 46, the cover 41 is cleaned by pressing the cleaning medium 22 against the cover 41 while simultaneously pressing the roll of paper against it and moving the cleaning module 21 in the +X direction. Then, by moving the cleaning module 21 in the -X direction, the cleaning fluid remaining on the surface of the cover 41 can be wiped away.

[0055] The following is a detailed explanation. When the cover 41 (maintenance component) faces the cleaning mechanism 1, the pressing member 25 of the cleaning module 21 moves away from the cover 41 in the +Z direction. Therefore, even if the cleaning module 21 moves in the X direction, the two will not come into contact. If the cleaning action of the cover 41 is switched to cleaning, the cover 41 pushes the cover body 43 in the +Z direction to a position slightly higher than the lower end of the cleaning module 21 via the cover lifter 44. Then, cleaning fluid is dripped onto the cleaning medium 22 from the cleaning nozzle 20. Next, the unwind roller 23 and the take-up roller 24 are controlled to release the cleaning medium 22 such that the portion of the cleaning medium 22 to which the dripped cleaning fluid is located below the pressing member 25. In this state, if the cleaning module 21 is moved in the +X direction by the drive mechanism DRV, the cleaning medium 22 comes into contact with the cover 41. Furthermore, if the cleaning module 21 is moved further in the +X direction by the drive mechanism DRV, the pressing member 25, after being pushed upward, presses the cleaning medium 22 onto the cover 41, while simultaneously passing over the cover 41. After the pressing member 25 has passed over the cover 41, the unwinding roller 23 and the take-up roller 24 are controlled to release the cleaning medium 22 such that the portion of the cleaning medium 22 that has not dripped cleaning liquid is located below the cover 41. Furthermore, by moving the cleaning module 21 in the -X direction, the cleaning liquid remaining on the surface of the cover 41 can be wiped away.

[0056] In the above configuration example, when the pressing member 25 is made of a cylindrical rigid body, the contact area between the surface of the maintenance component (cleaner 46, cover 41) and the cleaning medium 22 can be limited to a narrow linear area.

[0057] Figure 7 This diagram shows a modified example of the cleaning module 21 (cleaning mechanism 1) that facilitates expanding the contact area between the surfaces of the maintenance components (cleaner 46, cover 41) and the cleaning medium 22. Figure 7In the modification shown, the cleaning module 21 includes a pair of cylindrical supports 30 that guide the cleaning medium 22. The cleaning module 21 presses the cleaning medium 22 against the maintenance member (cleaner 46, cover 41) between the pair of cylindrical supports 30 by the tension of the cleaning medium 22 acting on the pair of cylindrical supports 30. In one example, the cleaning medium 22 makes surface contact with the entire upper surface of the suction nozzle 47, and can also make partial contact with the inclined surface of the periphery of the upper surface of the suction nozzle 47.

[0058] In Figure 7 In the modification shown, the pressing member 25, the compression spring 26, and the guide 29 can be removed. In addition, the cleaning operation can be simplified to only raising and lowering the maintenance member (cleaner 46, cover 41). This is advantageous in reducing the components that perform the rubbing operation and reducing the generation of particles.

[0059] Figure 8 is a diagram showing another modification of the cleaning module 21 (cleaning mechanism 1) that is advantageous in expanding the contact area of the surface of the maintenance member (cleaner 46, cover 41) with the cleaning medium 22. In Figure 8 In the other modification shown, the pressing member 25 and the compression spring 26 are added with respect to Figure 7 In the modification shown, the pressing member 25 and the compression spring 26 are added. The pressing member 25 can have a size corresponding to the contact surface of the cover seal 42, such as a size larger than the contact surface of the cover seal 42. In the cleaning operation according to the above configuration, first, the cover 41 can be raised until the upper surface of the cover 41 contacts the portion between the two cylindrical supports 30 in the cleaning medium 22, and cleaning is performed in this state. Then, in the case where it is determined that cleaning with a stronger pressing pressure is required, the cleaning medium 22 is pressed against the pressing member 25 by further raising the cover 41, and a strong pressing pressure is obtained.

[0060] Figure 9 and Figure 10 is a perspective view showing a part of the liquid application device 13 of the second embodiment. The liquid application device 13 of the second embodiment can have a configuration in which the measuring section 31 is added with respect to the liquid application device 13 of the first embodiment. Such a configuration is useful, for example, for a liquid discharge device that has a configuration in which the discharge head 16, the maintenance member, and the cleaning mechanism 1 are housed in the chamber in a manner that blocks air or light, such as a liquid discharge device that uses anaerobic ink or light-hardening ink.

[0061] The measuring section 31 can be held by the bracket (housing) 35 together with the cleaning module 21 (cleaning mechanism 1). A mover 36 (one example of the driving mechanism DRV) of a linear motor is provided on the outside of the bracket 35, and the bracket 35 can be moved along the direction of the axis of the mover 36. Figure 1The guide shaft 8 shown moves in the X direction. The measurement section 31 can include, for example, a camera 32 that takes an image of the maintenance member (cleaner 46, cover 41). The measurement section 31 can also include an illumination section 33 that illuminates the field of view of the camera 32. The measurement section 31 can also include an optical system such as a folding mirror 34 that adjusts the field of view of the camera 32.

[0062] As Figure 9 illustrated, the measurement section 31 can be configured to be disposed above the maintenance member (cleaner 46, cover 41). The measurement section 31 can be configured to be movable together with the cleaning module 21, for example. Adjustment of the relative positions of the maintenance member and the measurement section 31 with respect to the Y direction can be achieved by moving the maintenance member in the Y direction. Adjustment of the relative positions of the maintenance member and the measurement section 31 with respect to the Z direction (focal point direction) can be achieved by moving the maintenance member in a direction parallel to the Z direction. The illumination light generated by the illumination section 33 has a wavelength that does not harden ink remaining in the maintenance member.

[0063] If the process for maintaining the function of the discharge head 16 by the maintenance member ends, the discharge module 6 can be positioned at a position where ink can be discharged with respect to the substrate 3, as shown in (a) of Figure 12 On the other hand, the maintenance member can be positioned at a position where it can be cleaned by the cleaning mechanism 1. According to such a configuration, it is possible to apply ink to the substrate 3 while maintaining the function of the maintenance member by the cleaning mechanism 1.

[0064] As Figure 9 illustrated, the measurement section 31 can take an image of each maintenance member (cleaner 46, cover 41). The measurement section 31 can be configured to determine or analyze the presence or absence of an adherent such as ink, based on the image of the surface of the maintenance member (cleaner 46, cover 41), for example. The maintenance member (cleaner 46, cover 41) is preferably colored in a color that makes it easy to recognize ink. In order to make it easy to determine the concave-convex shape (surface shape) of the deposit or adherent, the illumination section 33 can also perform dark field illumination on the measurement target region of the maintenance member.

[0065] The measurement section 31 can also include a distance sensor. In this case, the measurement section 31 can determine or analyze the presence or absence of an adherent by measuring the surface shape (height distribution) of the measurement target region of the maintenance member (cleaner 46, cover 41) using the distance sensor.

[0066] The measurement section 31 can also include a light interrupter. In this case, the measurement section 31 can determine that the height of the measurement target region of the light interrupter, the maintenance member (cleaner 46, cover 41) exceeds an allowable value, i.e., that an adherent is attached to the measurement target region in excess of the allowable value. The optical axis of the light interrupter can be disposed in parallel with the measurement target region.

[0067] In a case where it is determined by the measurement unit 31 that the adhering matter exists in the measurement target region of the maintenance member (the cleaner 46, the cover 41), the liquid application device 13 cleans the maintenance member by the cleaning mechanism 1. Then, the liquid application device 13 can perform an operation to confirm the state of the measurement target region of the maintenance member using the measurement unit 31. Also, in a case where it is determined that the adhering matter still exists in the measurement target region of the maintenance member, the liquid application device 13 can perform cleaning again by the cleaning mechanism 1. At this time, as described above, first, the cleaning medium 22 can be pressed against the maintenance member at a first pressure while cleaning is performed. Also, second, the cleaning medium 22 can be pressed against the maintenance member at a second pressure stronger than the first pressure while cleaning is performed. The change in the conditions of cleaning is not limited to the change in the pressing pressure of the cleaning medium 22, and, for example, the amount of the cleaning liquid can be changed. Figure 8

[0068] Figure 11 is a perspective view of the cleaning mechanism 1 shown in FIG. 2 as viewed from below. Figure 10 The cleaning mechanism 1 can move in the +X direction while cleaning the maintenance member (the cleaner 46 or the cover 41) of the maintenance unit 2. In this configuration, before the cleaning module 21 comes into contact with the maintenance member, the cleaning liquid can be applied to the maintenance member using the cleaning nozzle 20.

[0069] In a case where the ink adhering to the maintenance member is removed by cleaning, sometimes the cleaning effect is higher if wiping is performed after a lapse of a certain period of time after the cleaning liquid is applied to the maintenance member. Thus, in a case where it is determined by the measurement unit 31 that cleaning is necessary, the cleaning liquid or the like can be wiped by the cleaning medium 22 after the cleaning liquid is applied to the cleaning target site by the cleaning nozzle 20. In this case, since it is not necessary to apply the cleaning liquid by the cleaning medium 22, it is not necessary to send out the cleaning medium 22 after the cleaning liquid is applied.

[0070] In one aspect, the liquid application device 13 performs a maintenance method for maintaining the function of the discharge head 16 having the head face HS on which the discharge port from which the liquid is discharged is arranged. The maintenance method can include a process of arranging the maintenance member so as to face the head face HS to maintain the function of the discharge head 16, and a cleaning process of cleaning the maintenance member.

[0071] ​The liquid coating apparatus described above can be appropriately used, for example, in an article manufacturing method of manufacturing an article such as an OLED. In one aspect, the article manufacturing method can include a coating step of coating a liquid to a substrate using the liquid coating apparatus 13, and a processing step of obtaining an article by processing the substrate after the coating step. The processing step can include, for example, a drying step of drying the liquid coated by the coating step, and a subsequent firing step. A plurality of organic films can also be formed by performing such processing a plurality of times. The processing step can further include a step of forming an electrode on the plurality of organic films stacked. The article manufacturing method can further include the maintenance method described above.

[0072] (Other)

[0073] The technical concept derived from the present disclosure is not limited by the disclosed illustrative embodiments, and is intended to include various modifications or equivalent structures or function-based substitutions of the illustrative embodiments, and the like. The following scope of claims should be given the broadest interpretation so as to include all such modifications and equivalent structures and functions.

[0074] Explanation of Reference Signs

[0075] 13: liquid discharging apparatus, 1: cleaning mechanism, 6: discharging head, HS: head face, 41: cover (maintenance member), 46: cleaner (maintenance member).

Claims

1. A liquid coating apparatus, characterized in that, The above-mentioned liquid coating apparatus includes: A discharge nozzle having a nozzle face configured with a discharge port for discharging liquid; A maintenance component is configured to face the nozzle surface in order to maintain the function of the discharge nozzle. as well as A cleaning mechanism that cleans the maintenance component by pressing a cleaning member onto the maintenance component from a position away from the discharge nozzle.

2. The liquid coating apparatus as described in claim 1, characterized in that, The liquid coating apparatus further includes a drive mechanism that moves at least one of the maintenance component and the cleaning component so that the cleaning component moves relative to the maintenance component.

3. The liquid coating apparatus as described in claim 2, characterized in that, The liquid coating apparatus described above also includes a measuring unit for measuring the condition of the maintenance components.

4. The liquid coating apparatus as described in claim 3, characterized in that, The aforementioned measuring unit includes a camera.

5. The liquid coating apparatus as described in claim 3, characterized in that, The aforementioned measuring unit includes a distance sensor.

6. The liquid coating apparatus as described in claim 3, characterized in that, The aforementioned measuring unit includes a light interruptor.

7. The liquid coating apparatus as described in claim 3, characterized in that, The aforementioned liquid coating apparatus also includes a housing for maintaining the aforementioned cleaning mechanism and the aforementioned measuring unit. The aforementioned drive mechanism causes the aforementioned housing to move.

8. The liquid coating apparatus as described in claim 1, characterized in that, The aforementioned maintenance components include a cover that covers the nozzle surface.

9. The liquid coating apparatus as claimed in claim 1, characterized in that, The aforementioned maintenance components include a restoration unit that restores the function of the aforementioned discharge nozzle.

10. The liquid coating apparatus as described in claim 9, characterized in that, The aforementioned recovery section includes a suction nozzle that is disposed facing the nozzle surface without contacting it. The aforementioned recovery section removes foreign objects adhering to the nozzle surface by suctioning them from the aforementioned suction nozzle.

11. The liquid coating apparatus as claimed in claim 1, characterized in that, The aforementioned cleaning component is a rolled cleaning medium. The cleaning mechanism includes an unwinding roller for discharging the cleaning medium and a take-up roller for winding the cleaning medium.

12. The liquid coating apparatus as claimed in claim 11, characterized in that, The aforementioned cleaning mechanism includes a pressing member that presses the cleaning medium onto the aforementioned maintenance component.

13. The liquid coating apparatus as claimed in claim 11, characterized in that, The cleaning mechanism includes a pair of cylindrical supports that guide the cleaning medium. The tension exerted by the pair of cylindrical supports on the cleaning medium presses the cleaning medium onto the maintenance component between the pair of cylindrical supports.

14. The liquid coating apparatus as claimed in claim 11, characterized in that, The aforementioned cleaning facility includes a supply unit that supplies cleaning fluid to the aforementioned cleaning media.

15. The liquid coating apparatus as claimed in claim 11, characterized in that, The aforementioned cleaning mechanism includes a supply unit that drips cleaning fluid onto the aforementioned maintenance components.

16. A method for manufacturing an article, characterized in that, The methods for manufacturing the above-mentioned items include: A coating process in which liquid is applied to a substrate using the liquid coating apparatus according to any one of claims 1 to 15; and The processing step involves processing the substrate after the above coating process to obtain an article.

17. A maintenance method for maintaining the function of a discharge nozzle having a nozzle face with a discharge port for discharging liquid, characterized in that, The above maintenance methods include: The process of maintaining the function of the discharge nozzle by arranging maintenance components facing the nozzle surface; and The cleaning process involves pressing the cleaning component onto the maintenance component from a position away from the discharge nozzle to clean the maintenance component.

18. A method for manufacturing an article, characterized in that, The methods for manufacturing the above-mentioned items include: A maintenance procedure for maintaining the function of the discharge nozzle using the maintenance method described in claim 17; A coating process in which liquid is applied to a substrate by discharging liquid from the aforementioned discharge nozzle; and The processing step involves processing the substrate after the above coating process to obtain an article.

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