Method, device, equipment, medium and program for detecting concentration of multi-component mixed gas

Abstract

The application relates to the technical field of semiconductor process gas detection, and provides a multi-component mixed gas concentration detection method, device, equipment, medium and program, which comprises the following steps: generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, receiving the ultrasonic signals propagated through the multi-component mixed gas, digitally mixing the received ultrasonic signals with a reference signal, extracting a low-frequency envelope phase difference after low-pass filtering, and calculating a high-frequency phase difference; calculating the number of periods spanned by the total phase difference, and obtaining a corrected total phase difference in combination with the phase difference in a single period; calculating the sound velocity of the ultrasonic signal based on the corrected total phase difference and a known sound wave propagation distance; and substituting the sound velocity into a sound velocity-concentration inversion model of the multi-component mixed gas to real-timely solve the concentration of each gas component. The application is used for high-precision and real-time online detection of the multi-component gas concentration of a gas supply system in a semiconductor manufacturing process without phase ambiguity.

Description

Technical Field

[0001] This invention relates to the field of semiconductor process gas detection technology, and in particular to a method, apparatus, equipment, medium, and procedure for detecting the concentration of multi-component mixed gases. Background Technology

[0002] In semiconductor manufacturing processes, the accurate detection and control of process gases are crucial for ensuring device performance and production yield. As semiconductor technology nodes advance towards 7nm, 5nm, and more advanced processes, increasingly stringent requirements are placed on the accuracy, response speed, and reliability of process gas concentration detection. Ultrasonic velocity measurement, due to its advantages of non-contact measurement, zero consumption, and fast response speed, has been adopted for gas concentration detection.

[0003] Existing multi-frequency sound velocity methods measure sound velocity by applying ultrasonic signals of multiple frequencies, but are only suitable for single-gas concentration analysis. Semiconductor manufacturing processes involve various special process gases, including inert gases, reactive gases, and dopant gases, which exhibit complex interactions in their acoustic properties. Therefore, semiconductor processing often requires simultaneous, real-time, and accurate detection of the concentrations of multiple gas components. When a mixed gas contains multiple components, the relationship between sound velocity and concentration may be non-monotonic, making it impossible to uniquely determine the concentration of each component solely based on sound velocity measurements. Secondly, existing technologies have failed to effectively address the cross-cycle ambiguity problem of high-frequency phase differences. For example, in a 100% hydrogen environment, even using typical sound paths (e.g., 0.1 m) and megahertz-level ultrasonic frequencies, the measured phase difference can reach 16π or even higher. Since single-frequency or simple multi-frequency measurements can only obtain the folded phase modulo 2π, they cannot accurately identify the integer number of cycles, resulting in a deviation of several times in sound velocity calculations, with measurement errors increasing dramatically in high-concentration regions.

[0004] Therefore, there is an urgent need for a method, apparatus, equipment, medium, and procedure for detecting the concentration of multi-component mixed gases to improve the above-mentioned problems. Summary of the Invention

[0005] This invention provides a method, apparatus, device, medium, and program for detecting the concentration of multi-component mixed gases. This invention is used for high-precision, real-time online detection of the concentration of multi-component gases in a gas supply system without phase ambiguity during semiconductor manufacturing processes.

[0006] According to a first aspect of the present invention, a method for detecting the concentration of a multi-component mixed gas is provided, applied to a gas supply system for a semiconductor device and used to detect the concentration of the multi-component mixed gas supplied thereon, comprising the following steps: generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold; transmitting the ultrasonic signals into the multi-component mixed gas to be tested; wherein the maximum frequency of the ultrasonic signals is in the range of 40 kHz to 2 MHz; the preset threshold is in the range of 0.5 kHz to 1 kHz; receiving the ultrasonic signals propagated through the multi-component mixed gas; and digitally mixing the received ultrasonic signals with a reference signal. The low-frequency envelope phase difference is extracted after low-pass filtering. Based on the received ultrasonic signal, frequency difference, and low-frequency envelope phase difference, the high-frequency phase difference is calculated. According to the relationship between the low-frequency envelope phase difference and the original frequencies and frequency differences of at least two ultrasonic signals, the number of cycles spanned by the total phase difference is calculated, and the corrected total phase difference is obtained by combining the phase difference within a single cycle. Based on the corrected total phase difference and the known sound wave propagation distance, the speed of sound of the ultrasonic signal propagating in the gas is calculated. The speed of sound is substituted into the speed of sound-concentration inversion model of multi-component mixed gas, and the concentration of each gas component is calculated in real time through an iterative algorithm.

[0007] In one implementation, the high-frequency phase difference is calculated based on the received ultrasonic signal, the frequency difference, and the low-frequency envelope phase difference, satisfying:

[0008]

[0009] in, For high-frequency phase difference, For the low-frequency envelope phase difference, f high f is a frequency in ultrasonic signals. low This represents the frequency difference.

[0010] In one implementation, the number of cycles spanned by the total phase difference is calculated based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two ultrasonic signals. The corrected total phase difference is then obtained by combining this with the phase difference within a single cycle, satisfying the following:

[0011]

[0012] Where n is the number of cycles spanned by the total phase difference. The phase difference within a single period This is the corrected total phase difference.

[0013] In one implementation, the number of cycles n spanned by the total phase difference satisfies:

[0014]

[0015] Where Int is the floor function. This represents the low-frequency envelope phase difference.

[0016] In one implementation, the speed of sound of the ultrasonic signal propagating in the gas is calculated based on the corrected total phase difference and the known sound wave propagation distance L, satisfying the following:

[0017]

[0018] in, The total phase difference is the corrected value, and f is a frequency of the ultrasonic signal.

[0019] In one embodiment, generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and transmitting the ultrasonic signals into a multi-component mixed gas to be tested, includes: transmitting the ultrasonic signals into the multi-component mixed gas to be tested through an ultrasonic transducer array, wherein the ultrasonic transducer array covers multiple sound path paths; the multiple sound path paths include propagation paths with the same sound path length but different spatial directions.

[0020] In one embodiment, the speed of sound of an ultrasonic signal propagating in a gas is calculated based on the corrected total phase difference and the known propagation distance of the sound wave, including: calculating multiple speed values ​​based on the corrected total phase difference corresponding to each sound path and the known propagation distance of the sound wave, and taking the average of the multiple speed values ​​as the speed of sound of the ultrasonic signal propagating in the gas.

[0021] In one implementation, the method includes: invoking a field-programmable gate array (FPGA) to perform digital mixing, high-frequency phase difference calculation, and iterative algorithms in real time.

[0022] In one embodiment, the sound speed is substituted into the sound speed-concentration inversion model of a multi-component mixed gas, including: obtaining the real-time temperature of the multi-component mixed gas through a temperature sensor, and performing temperature compensation on the sound speed or sound speed-concentration inversion model based on the real-time temperature.

[0023] In one embodiment, the maximum frequency range of the ultrasonic signal is 40 kHz to 2 MHz; the preset threshold range is 0.5 kHz to 1 kHz.

[0024] In one embodiment, the components of the multi-component mixed gas include X types selected from Cl2, CF4, SF6, HBr, CHF3, SiH4, NH3, WF6, TMA, O2, PH3, B2H6, AsH3, N2, H2, CO, Ar, He, N2O, C4F6, NF3, and F2, where X is 2, 3, or 4; the components of the multi-component mixed gas are chemically compatible with each other.

[0025] According to a second aspect of the present invention, a multi-component mixed gas concentration detection device is provided, which is used in the method of any one of the first aspects, comprising: a multi-frequency signal generation unit, configured to generate at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and to transmit the ultrasonic signals to a multi-component mixed gas to be tested; an ultrasonic transducer unit, configured to receive the ultrasonic signals after propagation through the multi-component mixed gas, and to digitally mix the received ultrasonic signals with a reference signal, and to extract the low-frequency envelope phase difference after low-pass filtering; to calculate the high-frequency phase difference based on the received ultrasonic signals, the frequency difference, and the low-frequency envelope phase difference; a digital mixing unit, configured to calculate the number of cycles spanned by the total phase difference according to the low-frequency envelope phase difference and the relationship between the original frequencies and the frequency difference of the at least two ultrasonic signals, and to obtain a corrected total phase difference by combining the phase difference within a single cycle; to calculate the speed of sound of the ultrasonic signal propagating in the gas based on the corrected total phase difference and a known sound wave propagation distance; and to substitute the speed of sound into the speed of sound-concentration inversion model of the multi-component mixed gas, and to calculate the concentration of each gas component in real time through an iterative algorithm.

[0026] According to a third aspect of the present invention, an electronic device is provided, including a memory and a processor, wherein the memory is used to store a computer program executable by the processor; and the processor is used to execute the computer program in the memory to implement the method described above.

[0027] According to a fourth aspect of the present invention, a computer-readable storage medium is provided having a computer program stored thereon, which, when executed by a processor, enables the implementation of the above-described method.

[0028] According to a fifth aspect of the present invention, a computer program product is provided, comprising a computer program that, when executed by a processor, implements the method described above.

[0029] Compared with existing technologies, the advantages of this invention are as follows: By generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold (e.g., hundreds of hertz to thousands of hertz), and transmitting them into the multi-component mixed gas to be tested, a composite signal with a low-frequency beat envelope superimposed on a high-frequency carrier is naturally formed at the receiving end by utilizing the principle of linear superposition of sound waves in the medium. Specifically, when two ultrasonic waves with similar frequencies (e.g., f1 and f2) propagate and superimpose in the gas, their composite signal can be represented as a high-frequency oscillation term (center frequency approximately (f1+f2) / 2) and a low-frequency modulation term (frequency of |f1| / 2). The product of f2| / 2) physically constructs a slowly changing envelope structure. The frequency of this low-frequency envelope is limited to the range of hundreds to thousands of hertz, ensuring both a sufficiently fast dynamic response and a phase change of much less than 2π within one period, providing a reliable time-domain reference for subsequent unambiguous phase demodulation. Because the phase offset is proportional to the carrier frequency, high-frequency ultrasonic signals can more accurately reflect minute changes in sound velocity caused by gas composition, temperature, or pressure. By using a high-frequency carrier for high-sensitivity detection and a low-frequency envelope for eliminating phase ambiguity, this design provides a physical basis for subsequent unambiguous phase demodulation while preserving the high sensitivity of high-frequency ultrasonic signals to changes in sound velocity, thus effectively solving the phase ambiguity problem while ensuring measurement accuracy.

[0030] Furthermore, based on the mathematical relationship between the low-frequency envelope phase difference and the original frequency and frequency difference of the ultrasonic signal, the number of integer cycles spanned by the total phase difference is accurately calculated. Combined with the phase difference within a single cycle, the corrected total phase difference is reconstructed. This fully utilizes the inherently unambiguous nature of the low-frequency envelope phase difference, achieving a reliable estimate of the number of integer cycles of the high-frequency phase. This eliminates the phase ambiguity problem present in traditional single-frequency ultrasonic measurements, improving the accuracy and robustness of sound velocity calculation. Attached Figure Description

[0031] Figure 1 This is a flowchart illustrating a method for detecting the concentration of a multi-component mixed gas according to an exemplary embodiment.

[0032] Figure 2 This is a structural block diagram of a multi-component mixed gas concentration detection device according to an exemplary embodiment.

[0033] Figure 3 This is a block diagram illustrating an electronic device according to an exemplary embodiment.

[0034] Explanation of the reference numerals in the figure:

[0035] 1. Multi-frequency signal generation unit; 2. Ultrasonic transducer unit; 3. Digital mixing unit; 4. Multi-component mixed gas concentration detection device;

[0036] 900. Electronic device; 922. Processing component; 926. Power supply component; 932. Memory; 950. Network interface; 958. Input / output interface. Detailed Implementation

[0037] Unless otherwise defined, the technical or scientific terms used in this specification should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. Specific embodiments of the invention will be described below with reference to the accompanying drawings. It should be noted that, in order to provide a concise description, this specification cannot provide a detailed description of all features of the actual embodiments. Without departing from the spirit and scope of the invention, those skilled in the art can make modifications and substitutions to the embodiments of the invention, and the resulting embodiments are also within the protection scope of the invention.

[0038] like Figure 1 As shown, the first embodiment of the present invention provides a method for detecting the concentration of a multi-component mixed gas, applied to a semiconductor device gas supply system to detect the concentration of the multi-component mixed gas supplied thereon, including the following steps S1-S5:

[0039] S1, generate at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and transmit the ultrasonic signals to the multi-component mixed gas to be tested; the maximum frequency range of the ultrasonic signals is 40KHz-2MHz; the preset threshold range is 0.5KHz-1KHz;

[0040] S2 receives the ultrasonic signal propagated through a multi-component mixed gas, digitally mixes the received ultrasonic signal with a reference signal, extracts the low-frequency envelope phase difference after low-pass filtering, and calculates the high-frequency phase difference based on the received ultrasonic signal, frequency difference, and low-frequency envelope phase difference.

[0041] S3. Based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two ultrasonic signals, calculate the number of cycles spanned by the total phase difference, and combine the phase difference within a single cycle to obtain the corrected total phase difference.

[0042] S4. Based on the corrected total phase difference and the known sound wave propagation distance, calculate the speed of sound of the ultrasonic signal when it propagates in the gas.

[0043] S5 substitutes the speed of sound into the speed of sound-concentration inversion model of multi-component mixed gas, and calculates the concentration of each gas component in real time through an iterative algorithm.

[0044] In some embodiments, the high-frequency phase difference is calculated based on the received ultrasonic signal, frequency difference, and low-frequency envelope phase difference, satisfying:

[0045]

[0046] in, For high-frequency phase difference, For the low-frequency envelope phase difference, f highf is a frequency in ultrasonic signals. low This represents the frequency difference.

[0047] In some specific embodiments, the ultrasonic signal includes two frequencies, f1 and f2, and the frequency difference between f1 and f2 is f. low Substitute f1 and f2 into f respectively high The high-frequency phase difference corresponding to f1 and f2 is calculated. and :

[0048]

[0049]

[0050] The aforementioned high-frequency phase difference is used for subsequent single-cycle phase extraction and total phase difference correction, thereby providing high-precision input for sound speed calculation.

[0051] In some examples, f1 = 40kHz and f2 = 39.5kHz, the frequency difference f low =0.5KHz.

[0052] In some embodiments, based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two ultrasonic signals, the number of cycles spanned by the total phase difference is calculated, and the corrected total phase difference is obtained by combining the phase difference within a single cycle, satisfying:

[0053]

[0054] Where n is the number of cycles spanned by the total phase difference. The phase difference within a single period This is the corrected total phase difference.

[0055] In some specific embodiments, the number of periods n is based on the low-frequency envelope phase difference. and phase difference within a single period Sure.

[0056] In some examples, the number of cycles n spanned by the total phase difference satisfies:

[0057]

[0058] Where Int is the floor function. This represents the low-frequency envelope phase difference.

[0059] In some embodiments, the speed of sound of the ultrasonic signal propagating in the gas is calculated based on the corrected total phase difference and the known sound wave propagation distance L, satisfying:

[0060]

[0061] in, The total phase difference is the corrected value, and f is a frequency of the ultrasonic signal.

[0062] In some specific embodiments, The corrected total phase difference corresponding to frequency f is obtained through defuzzification processing in the aforementioned steps, satisfying... =2nπ+ ,and >0.

[0063] Furthermore, due to Phase ambiguity in traditional single-frequency methods has been eliminated, and its value accurately reflects the true propagation time τ of ultrasound in gas. / (2πf), therefore the calculated sound velocity c=L / τ has high accuracy and continuity, and is especially suitable for multi-component mixed gas scenarios containing high sound velocity components such as hydrogen.

[0064] In practical implementation, the corrected total phase difference corresponding to frequencies f1 and f2 can be used respectively. and Calculate the two sets of sound velocity values ​​and take the average or use them for cross-verification to further improve the system robustness.

[0065] In some embodiments, generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and transmitting the ultrasonic signals into the multi-component mixed gas to be tested includes: transmitting the ultrasonic signals into the multi-component mixed gas to be tested through an ultrasonic transducer array, wherein the ultrasonic transducer array covers multiple sound path paths; the multiple sound path paths include propagation paths with the same sound path length but different spatial directions.

[0066] In some specific embodiments, the ultrasonic transducer array consists of multiple transmitting units and multiple receiving units, configured to support simultaneous or time-division measurement of multiple sound path paths.

[0067] Furthermore, the multiple sound path paths include paths with the same sound path length but different spatial propagation directions. For example, in a typical embodiment, a transducer array is arranged around the cross-section of the gas supply pipe, forming multiple pairs of transceiver channels symmetrical about the center of the pipe. The straight-line distance (i.e., sound path length) between each pair of channels is equal to the pipe diameter D, but their azimuth angles are different (e.g., 0°, 60°, 120°, etc.), thereby forming multiple sound wave propagation paths of equal length but opposite directions.

[0068] In some embodiments, the speed of sound of an ultrasonic signal propagating in a gas is calculated based on the corrected total phase difference and the known propagation distance of the sound wave, including: calculating multiple speed values ​​based on the corrected total phase difference corresponding to each sound path and the known propagation distance of the sound wave, and taking the average of the multiple speed values ​​as the speed of sound of the ultrasonic signal propagating in the gas.

[0069] In some specific embodiments, the multiple sound path paths have the same sound path length, i.e., L1=L2=…=LN=L, but different spatial propagation directions, such as being distributed circumferentially along the cross-section of a pipe. Under this configuration, if the gas is uniformly mixed, the sound velocities measured along each path should be basically consistent; if there is a significant deviation, it can be determined as local concentration unevenness or flow field disturbance, triggering a data validity judgment mechanism. For example, abnormal sound velocity values ​​deviating from the mean by more than the allowable error value, such as ±3%, are removed before the average value is calculated.

[0070] It is worth noting that this multi-path sound velocity fusion strategy not only improves the repeatability and anti-interference ability of the measurement results, but also provides a more robust input for subsequent multi-element mixed gas concentration inversion, which is especially suitable for the online monitoring needs of high-purity and high-stability gas supply systems in semiconductor processes.

[0071] In some embodiments, the method includes: invoking a field-programmable gate array to perform digital mixing, high-frequency phase difference calculation, and iterative algorithms in real time.

[0072] In some specific embodiments, the detection method is implemented in parallel pipeline mode inside the FPGA without the need for external processor intervention. The typical end-to-end latency is less than 2 milliseconds, the power consumption is less than 25mW, and the sampling rate is not less than 50MSPS, which fully meets the stringent requirements of semiconductor manufacturing equipment for low latency, low power consumption and high reliability embedded processing. At the same time, the reconfigurable characteristics of the FPGA also support flexible adaptation to different gas formulations or pipeline configurations through firmware updates, which significantly improves the field adaptability and versatility of the system.

[0073] In some embodiments, substituting the speed of sound into the speed of sound-concentration inversion model of a multi-component mixed gas includes: obtaining the real-time temperature of the multi-component mixed gas through a temperature sensor, and performing temperature compensation on the speed of sound or the speed of sound-concentration inversion model based on the real-time temperature.

[0074] In some specific embodiments, when incorporating the sound velocity into the sound velocity-concentration inversion model of a multi-component gas mixture, a temperature compensation step is also included: the current temperature of the multi-component gas mixture is acquired in real time using a temperature sensor integrated in the gas pipeline or measurement chamber; subsequently, the sound velocity measurement results or the inversion model itself are dynamically corrected based on this real-time temperature. Specifically, since the gas sound velocity is significantly affected by temperature, even a small temperature drift can lead to significant deviations in concentration calculations without compensation. Therefore, before performing concentration inversion, the system normalizes the original sound velocity using the measured temperature, correcting it to the equivalent value at a standard reference temperature, or directly inputs the temperature as a key parameter into the sound velocity-concentration inversion model, enabling the model to accurately calculate the concentrations of each component under the current thermodynamic conditions. This temperature compensation mechanism effectively improves the measurement stability and accuracy of the system in actual process environments, and is particularly suitable for applications in semiconductor manufacturing where temperature fluctuations are frequent but gas ratio requirements are extremely high.

[0075] In low-frequency applications, such as monitoring large-diameter pipes or high-attenuation gases, a maximum frequency of 40 kHz can be selected, with a frequency difference of 0.5 kHz, i.e., transmitting dual-frequency signals of 40.0 kHz and 39.5 kHz. At this point, the low-frequency envelope frequency is 500 Hz, and under typical sound paths (e.g., 0.1 m), the envelope phase difference is much less than 2π, ensuring no ambiguity.

[0076] In standard semiconductor gas supply monitoring scenarios, 1MHz is often used as the high-frequency carrier, combined with a frequency difference of 0.8kHz, i.e., transmitting signals of 1.0008MHz and 1.0000MHz. This configuration maintains high acoustic sensitivity while achieving stable deambiguity through an 800Hz difference frequency envelope, making it suitable for low-attenuation dry gas systems such as H2 / N2 / Ar.

[0077] In high-precision applications, such as monitoring the concentration of hydrogen-containing gas mixtures at the ppm level, the maximum frequency can be increased to 2MHz, with a frequency difference of 1kHz, i.e., using a dual-frequency combination of 2.001MHz and 2.000MHz. At this point, the high-frequency phase is extremely sensitive to changes in the speed of sound, while the 1kHz envelope frequency is still low enough to ensure accuracy within a typical sound path (L≤0.1m). <2π, thus reliably estimating the number of integer cycles.

[0078] In some embodiments, the components of the multi-component gas mixture include X types selected from Cl2, CF4, SF6, HBr, CHF3, SiH4, NH3, WF6, TMA, O2, PH3, B2H6, AsH3, N2, H2, CO, Ar, He, N2O, C4F6, NF3, and F2, where X is 2, 3, or 4; the components of the multi-component gas mixture are chemically compatible with each other.

[0079] It is worth noting that the number of components in the multi-component gas mixture is limited to two to four. This design stems from comprehensive considerations regarding controllability, repeatability, and chemical stability in semiconductor manufacturing processes. Although modern wafer fabs use dozens of process gases overall, engineers typically employ combinations of only two to four gases in a single specific process step. This is to achieve key process objectives, such as etching selectivity, thin film stress, and / or contour control, while avoiding problems such as uncontrolled chemical complexity, unpredictable byproducts, accumulated flow control errors, and increased system safety risks caused by an excessive number of gas types.

[0080] In one embodiment, the mixed gas used for etching the polysilicon gate comprises four components: HBr as the primary etching gas, Cl2 for auxiliary etching and rate regulation, CF4 or CHF3 as a fluorine source to form a polymer protective film on the sidewalls to achieve high anisotropy, and Ar as an inert carrier gas to provide physical bombardment and promote the desorption of reaction byproducts. This quaternary combination ensures high selectivity for the gate oxide layer while precisely controlling the etching morphology, making it a standard formulation in the fabrication of advanced logic devices.

[0081] In another embodiment, the contact hole etching employs three to four gases: C4F6 as a carbon-rich fluorine source to form a selective passivation layer at the silicon dioxide-silicon interface; O2 to regulate the polymer formation rate and prevent hole bottom clogging; Ar to provide ion bombardment energy; and optionally, N2 or CO to fine-tune plasma characteristics and etching selectivity. This combination achieves extremely high stop selectivity for the underlying silicon layer in thick oxide layer etching.

[0082] Another embodiment relates to plasma-enhanced chemical vapor deposition (PECVD) silicon nitride thin films, wherein the gas formulation includes SiH4 as a silicon source, NH3 as a nitrogen source, and N2 as a dilution carrier gas, with an optional addition of a small amount of N2O to modulate the film stress. This ternary to quaternary system is sufficient to meet the stringent requirements of the passivation layer or hard mask for refractive index, hydrogen content, and mechanical stress.

[0083] Another embodiment is tungsten chemical vapor deposition (W-CVD) for contact plug filling. WF6 is used as the tungsten precursor, H2 as the reducing agent, and Ar as the carrier gas to form a typical ternary mixed gas system, which ensures uniform deposition of high-purity tungsten and good step coverage.

[0084] The above embodiments demonstrate that combinations of 2 to 4 gases can cover the core requirements of mainstream semiconductor front-end processes. If the number of components exceeds this range, it not only significantly increases the difficulty of process window optimization but may also trigger uncontrollable side reactions, particulate contamination, or batch-to-batch fluctuations, ultimately reducing yield. Therefore, this invention limits the number of components in the multi-component gas mixture to X=2, 3, or 4, and ensures that the selected components are chemically compatible with each other under process conditions, thereby guaranteeing measurement accuracy.

[0085] like Figure 2 As shown, the second embodiment of the present invention provides a multi-component mixed gas concentration detection device, which is used for any of the methods in the above embodiments, including: a multi-frequency signal generation unit, used to generate at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and to transmit the ultrasonic signals to the multi-component mixed gas to be tested; an ultrasonic transducer unit, used to receive the ultrasonic signals after propagation through the multi-component mixed gas, and to digitally mix the received ultrasonic signals with a reference signal, and extract the low-frequency envelope phase difference after low-pass filtering; to calculate the high-frequency phase difference based on the received ultrasonic signals, the frequency difference, and the low-frequency envelope phase difference; a digital mixing unit, used to calculate the number of cycles spanned by the total phase difference according to the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of the at least two ultrasonic signals, and to obtain the corrected total phase difference by combining the phase difference within a single cycle; to calculate the speed of sound of the ultrasonic signal propagating in the gas based on the corrected total phase difference and the known sound wave propagation distance; and to substitute the speed of sound into the speed of sound-concentration inversion model of the multi-component mixed gas, and to calculate the concentration of each gas component in real time through an iterative algorithm.

[0086] A third embodiment of the present invention provides an electronic device, including a memory and a processor, wherein the memory is used to store a computer program executable by the processor; and the processor is used to execute the computer program in the memory to implement the method described in any of the above embodiments.

[0087] Figure 3 This is a block diagram illustrating an electronic device according to an exemplary embodiment. For example, electronic device 900 may be provided as a server. (Refer to...) Figure 3 The electronic device 900 includes a processing component 922, which further includes one or more processors, and memory resources represented by memory 932 for storing instructions, such as application programs, that can be executed by the processing component 922. The application programs stored in memory 932 may include one or more modules, each corresponding to a set of instructions. Furthermore, the processing component 922 is configured to execute instructions to perform the methods described above.

[0088] Electronic device 900 may also include a power supply component 926 configured to perform power management of electronic device 900, a wired or wireless network interface 950 configured to connect electronic device 900 to a network, and an input / output (I / O) interface 958. Electronic device 900 may operate on an operating system stored in memory 932, such as Windows Server™, MacOS X™, Unix™, Linux™, FreeBSD™, or similar.

[0089] In an exemplary embodiment, a non-transitory computer-readable storage medium including instructions is also provided, such as a memory 932 including instructions, which can be executed by a processing component 922 of an electronic device 900 to perform the above-described method. For example, the non-transitory computer-readable storage medium may be a ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, and optical data storage device.

[0090] In an exemplary embodiment, a non-transitory computer-readable storage medium including instructions is also provided, such as a memory 932 including instructions, which can be executed by a processing component 922 of an electronic device 900 to perform the above-described method. For example, the non-transitory computer-readable storage medium may be a ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, and optical data storage device.

[0091] A fourth embodiment of the present invention provides a readable storage medium storing a program, which, when executed, implements the method described in any one of the above embodiments.

[0092] The fifth embodiment of the present invention provides a computer program product, including a computer program, which, when executed, implements the method described in any one of the above embodiments.

[0093] In this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The term "multiple" refers to two or more unless otherwise expressly defined.

[0094] The above description of the embodiments is intended to enable those skilled in the art to understand and apply the present invention. It will be apparent to those skilled in the art that various modifications can be made to these embodiments, and the general principles described herein can be applied to other embodiments without creative effort. Therefore, the present invention is not limited to the embodiments described herein, and any improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope and spirit of the invention are within the scope of the present invention.

Claims

1. A method for detecting the concentration of a multi-component mixed gas, applied to a gas supply system for semiconductor equipment and used to detect the concentration of the multi-component mixed gas supplied thereon, characterized in that, Includes the following steps: At least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold are generated, and the ultrasonic signals are emitted into the multi-component mixed gas to be tested; the maximum frequency of the ultrasonic signals is in the range of 40KHz-2MHz; the preset threshold is in the range of 0.5KHz-1KHz. The ultrasonic signal propagated through the multi-element mixed gas is received, and the received ultrasonic signal is digitally mixed with a reference signal. After low-pass filtering, the low-frequency envelope phase difference is extracted. Based on the received ultrasonic signal, the frequency difference, and the low-frequency envelope phase difference, the high-frequency phase difference is calculated. The high-frequency phase difference is used for subsequent single-cycle phase extraction and total phase difference correction, thereby providing high-precision input for sound speed calculation. Based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two of the ultrasonic signals, the number of cycles spanned by the total phase difference is calculated, and the corrected total phase difference is obtained by combining the phase difference within a single cycle. Based on the corrected total phase difference and the known sound wave propagation distance, the speed of sound of the ultrasonic signal propagating in the gas is calculated. The sound velocity is substituted into the sound velocity-concentration inversion model of the multi-component mixed gas, and the concentration of each gas component is calculated in real time through an iterative algorithm.

2. The method according to claim 1, characterized in that, Based on the received ultrasonic signal, the frequency difference, and the low-frequency envelope phase difference, the high-frequency phase difference is calculated, satisfying: in, The high-frequency phase difference, Let f be the low-frequency envelope phase difference. high f is a frequency in the ultrasonic signal. low The frequency difference is mentioned.

3. The method according to claim 1, characterized in that, Based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two of the ultrasonic signals, the number of cycles spanned by the total phase difference is calculated, and the corrected total phase difference is obtained by combining the phase difference within a single cycle, satisfying: Where n is the number of cycles spanned by the total phase difference. The phase difference within a single period This is the corrected total phase difference.

4. The method according to claim 3, characterized in that, The total phase difference spans the number of cycles n that satisfy: Where Int is the floor function. The low-frequency envelope phase difference is denoted as .

5. The method according to claim 1, characterized in that, Based on the corrected total phase difference and the known sound wave propagation distance L, the speed of sound of the ultrasonic signal propagating in the gas is calculated, satisfying: in, The total phase difference is the corrected value, and f is a frequency of the ultrasonic signal.

6. The method according to claim 1, characterized in that, Generating at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and transmitting the ultrasonic signals into a multi-component mixed gas to be tested, includes: transmitting the ultrasonic signals into the multi-component mixed gas to be tested through an ultrasonic transducer array, wherein the ultrasonic transducer array covers multiple sound path paths; the multiple sound path paths include propagation paths with the same sound path length but different spatial directions.

7. The method according to claim 6, characterized in that, Based on the corrected total phase difference and the known sound wave propagation distance, the speed of sound of the ultrasonic signal propagating in the gas is calculated, including: calculating multiple speed of sound values ​​based on the corrected total phase difference corresponding to each sound path and the known sound wave propagation distance, and taking the average of the multiple speed of sound values ​​as the speed of sound of the ultrasonic signal propagating in the gas.

8. The method according to claim 1, characterized in that, The method includes: calling a field-programmable gate array to perform the digital mixing, the calculation of the high-frequency phase difference, and the iterative algorithm in real time.

9. The method according to claim 1, characterized in that, Substituting the sound speed into the sound speed-concentration inversion model of the multi-component mixed gas includes: obtaining the real-time temperature of the multi-component mixed gas through a temperature sensor, and performing temperature compensation on the sound speed or the sound speed-concentration inversion model based on the real-time temperature.

10. The method according to claim 1, characterized in that, The components of the multi-component mixed gas include X types selected from Cl2, CF4, SF6, HBr, CHF3, SiH4, NH3, WF6, TMA, O2, PH3, B2H6, AsH3, N2, H2, CO, Ar, He, N2O, C4F6, NF3, and F2, where X is 2, 3, or 4; the components of the multi-component mixed gas are chemically compatible with each other.

11. A multi-component mixed gas concentration detection device, used in the method according to any one of claims 1 to 10, characterized in that, include: A multi-frequency signal generating unit is used to generate at least two ultrasonic signals with different frequencies and a frequency difference within a preset threshold, and to transmit the ultrasonic signals into the multi-component mixed gas to be tested. An ultrasonic transducer unit is used to receive ultrasonic signals propagated through the multi-element mixed gas, and digitally mix the received ultrasonic signals with a reference signal. After low-pass filtering, the low-frequency envelope phase difference is extracted. Based on the received ultrasonic signals, the frequency difference, and the low-frequency envelope phase difference, the high-frequency phase difference is calculated. The high-frequency phase difference is used for subsequent single-cycle phase extraction and total phase difference correction, thereby providing high-precision input for sound velocity calculation. A digital mixing unit is used to calculate the number of cycles spanned by the total phase difference based on the low-frequency envelope phase difference and the relationship between the original frequencies and frequency differences of at least two ultrasonic signals, and to obtain a corrected total phase difference by combining the phase difference within a single cycle; based on the corrected total phase difference and the known sound wave propagation distance, to calculate the speed of sound of the ultrasonic signal propagating in the gas; and to substitute the speed of sound into the speed of sound-concentration inversion model of the multi-component mixed gas, and to calculate the concentration of each gas component in real time through an iterative algorithm.

12. An electronic device, characterized in that, The method includes a memory and a processor, the memory being used to store a computer program executable by the processor; the processor being used to execute the computer program in the memory to implement the method as described in any one of claims 1 to 10.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the executable computer program in the storage medium is executed by a processor, it can implement the method as described in any one of claims 1 to 10.

14. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the method as described in any one of claims 1 to 10.

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