Temperature control methods, devices, computer equipment, and readable storage media

Abstract

This application relates to a temperature control method, apparatus, computer device, and readable storage medium. Applied to the field of etching equipment technology, the method includes: determining a target heating power for a heating region based on target temperature data and a preset heating model; if, when the heating region operates based on the target heating power, the real-time temperature data of the heating region meets a preset stability condition, then determining a compensation heating power for the heating region based on a preset ignition interference model, a preset ignition power, and the real-time temperature data meeting the preset stability condition; and compensating the temperature data of the heating region based on the compensation heating power to obtain compensated temperature data. This method can improve the temperature stability and efficiency of temperature stability control during the ignition process of a plasma etching machine.

Description

Technical Field

[0001] This application relates to the field of etching equipment technology, and in particular to a temperature control method, apparatus, computer equipment, and readable storage medium. Background Technology

[0002] Plasma etching machines are widely used in semiconductor manufacturing processes for precision machining of wafer surfaces. In plasma etching, gas is excited to generate plasma. The active particles in this plasma, such as ions, free radicals, and excited-state molecules, react with the wafer surface to etch, remove, or deposit materials. However, the stability of the system's internal temperature directly affects the process performance and etching accuracy during plasma etching. Especially during plasma ignition, the formation of plasma introduces a large amount of energy instantaneously, causing rapid temperature fluctuations within the chamber, which adversely affects the equipment and process accuracy.

[0003] In related technologies, temperature control systems typically employ proportional-integral-derivative (PID) control or flow control, which primarily maintain chamber temperature balance by adjusting gas flow rate or heating power. However, PID control inherently suffers from hysteresis, responding slowly to rapid temperature fluctuations during the ignition process and often failing to compensate for temperature changes in a timely manner, making it difficult to stabilize the temperature at the target value. While flow control can mitigate temperature fluctuations to some extent, its system response speed remains limited, especially under instantaneous disturbances during the ignition stage, resulting in significant temperature fluctuations and poor temperature stability of the plasma etching machine during the ignition process. Summary of the Invention

[0004] Therefore, it is necessary to provide a temperature control method, apparatus, computer equipment, and readable storage medium that can improve the temperature stability and efficiency of temperature stability control during the ignition process of a plasma etching machine, in order to address the above-mentioned technical problems.

[0005] In a first aspect, this application provides a temperature control method, comprising:

[0006] Based on the target temperature data and the preset heating model, the target heating power of the heating area is determined;

[0007] When the heating zone operates based on the target heating power, if it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, then the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions.

[0008] The temperature data of the heating area is compensated based on the compensated heating power to obtain the compensated temperature data.

[0009] In one embodiment, the heating area includes multiple heating sub-regions, each with a different target temperature.

[0010] In one embodiment, determining that the real-time temperature data of the heating area meets a preset stability condition includes:

[0011] For each of the heating sub-regions, multiple real-time temperature data are acquired, and a stable value of the multiple real-time temperature data is determined. If the stable value exceeds a preset stability threshold, it is determined that the real-time temperature data of the heating sub-region meets the preset stability condition.

[0012] If the real-time temperature data of each of the heating sub-regions meets the preset stability condition, then the real-time temperature data of the heating region meets the preset stability condition.

[0013] In one embodiment, the sample heating power and sample ignition power are different for each of the heated sub-regions, and the method further includes:

[0014] For each of the heating sub-regions, multiple sample heating powers are obtained, and the multiple sample heating powers are sequentially input into the heating sub-regions;

[0015] For each sample heating power, the real-time temperature data of the first sample in the heating sub-region is obtained; the real-time temperature data of the first sample that meets the preset stability condition is determined as the first sample steady-state temperature data, and the ignition power of multiple samples is sequentially input into the heating sub-region to obtain the real-time temperature data of the second sample corresponding to each sample ignition power. The real-time temperature data of the second sample that meets the preset stability condition is determined as the second sample steady-state temperature data.

[0016] In one embodiment, the method further includes:

[0017] If the real-time temperature data of the first sample or the real-time temperature data of the second sample exceeds the preset safe temperature threshold, then stop inputting the sample heating power or the sample ignition power.

[0018] In one embodiment, the method further includes:

[0019] For each of the heating sub-regions, multiple first sample steady-state temperature data and sample heating power corresponding to each first sample steady-state temperature data are obtained; the multiple first sample steady-state temperature data and sample heating power corresponding to each first sample steady-state temperature data are fitted to obtain the heating correspondence between each sample steady-state temperature data and the sample heating power, and to determine the first linear coefficient of the heating correspondence.

[0020] The preset heating model is determined based on the heating correspondence of each heating sub-region and the first linear coefficient of the heating correspondence.

[0021] In one embodiment, the method further includes:

[0022] For each of the heating sub-regions, multiple second sample steady-state temperature data, sample heating power, and sample ignition power corresponding to each second sample steady-state temperature data are acquired; the multiple second sample steady-state temperature data, sample heating power, and sample ignition power corresponding to each second sample steady-state temperature data are fitted to obtain a temperature influence relationship, and a second linear coefficient of the temperature influence relationship is determined, wherein the temperature influence relationship characterizes the influence of the sample heating power and the sample ignition power on the temperature;

[0023] Based on the temperature influence relationship of each of the heating sub-regions and the second linear coefficient, the preset ignition interference model is determined.

[0024] Secondly, this application also provides a temperature control device, comprising:

[0025] The first determining module is used to determine the target heating power of the heating area based on the target temperature data and the preset heating model;

[0026] The second determining module is used to determine the compensation heating power of the heating area based on a preset ignition interference model, a preset ignition power, and the real-time temperature data that meets the preset stability conditions when the heating area is operating based on the target heating power.

[0027] The compensation module is used to compensate the temperature data of the heating area based on the compensation heating power to obtain the compensated temperature data.

[0028] Thirdly, this application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to perform the following steps:

[0029] Based on the target temperature data and the preset heating model, the target heating power of the heating area is determined;

[0030] When the heating zone operates based on the target heating power, if it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, then the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions.

[0031] The temperature data of the heating area is compensated based on the compensated heating power to obtain the compensated temperature data.

[0032] Fourthly, this application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, performs the following steps:

[0033] Based on the target temperature data and the preset heating model, the target heating power of the heating area is determined;

[0034] When the heating zone operates based on the target heating power, if it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, then the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions.

[0035] The temperature data of the heating area is compensated based on the compensated heating power to obtain the compensated temperature data.

[0036] Fifthly, this application also provides a computer program product, including a computer program that, when executed by a processor, performs the following steps:

[0037] Based on the target temperature data and the preset heating model, the target heating power of the heating area is determined;

[0038] When the heating zone operates based on the target heating power, if it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, then the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions.

[0039] The temperature data of the heating area is compensated based on the compensated heating power to obtain the compensated temperature data.

[0040] The aforementioned temperature control method, device, computer equipment, and readable storage medium determine the target heating power of the heating area based on target temperature data and a preset heating model, ensuring that the temperature of the heating area remains within the allowable error range of the target temperature data. If the real-time temperature data of the heating area meets the preset stability conditions, a compensation heating power is determined based on a preset ignition interference model, a preset ignition power, and the real-time temperature data that meets the preset stability conditions. The temperature data of the heating area is then compensated based on this compensation heating power to obtain compensated temperature data. This achieves rapid compensation of the heating area temperature data by the compensation heating power when the ignition power is input, ensuring that the temperature of the heating area is not affected by fluctuations caused by the input ignition power, and that the temperature of the heating area remains stable within the allowable error range of the target temperature data. By using a feedforward-feedback hybrid approach to achieve rapid compensation of the heating area during ignition, the plasma etching machine achieves stable temperature control and high temperature control efficiency during the ignition process, while maintaining temperature uniformity within the heating area. This improves the stability and accuracy of the etching process, thereby enhancing the reliability of the plasma etching machine and the stability of the process. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this application or related technologies, the drawings used in the description of the embodiments of this application or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a flowchart illustrating a temperature control method in one embodiment;

[0043] Figure 2 This is a schematic diagram of the anti-winding feedforward control process for the ignition temperature of the etching equipment in one embodiment;

[0044] Figure 3 This is a structural block diagram of a temperature control device in one embodiment;

[0045] Figure 4 This is an internal structural diagram of a computer device in one embodiment. Detailed Implementation

[0046] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0047] In one exemplary embodiment, such as Figure 1As shown, a temperature control method is provided. This embodiment illustrates the application of this method to a terminal. It is understood that this method can also be applied to a server, and to a system including both a terminal and a server, and implemented through interaction between the terminal and the server. This temperature control method is suitable for the start-up process of etching equipment, controlling the temperature of the heating area of ​​the etching equipment. In this embodiment, the method includes the following steps:

[0048] Step 101: Determine the target heating power of the heating area based on the target temperature data and the preset heating model.

[0049] The target temperature data is a preset temperature baseline value for the heating zone during the ignition process. For example, the target temperature data can be based on the thermodynamic properties of the material to be processed, the kinetics of the etching gas reaction, and the hardware limitations of the heating zone. The material to be processed can be a semiconductor material; the thermodynamic properties refer to the thermal stability boundary of the material; the etching gas can be the gas to be excited in the heating zone; the gas reaction kinetics can be the minimum temperature required for the thermal dissociation of the gas; and the hardware limitations can be the temperature control range within the heating zone. The preset heating model is the thermal relationship between the temperature data and the heating power. The target heating power is the energy input to the heating zone through the heating module, causing the temperature of the heating zone to reach the target temperature data.

[0050] Specifically, the terminal can pre-set the target temperature data during the ignition process, determine the target heating power of the heating area based on the target temperature data and the preset heating model, and input the target heating power to the heating module corresponding to the heating area.

[0051] Step 102: When the heating zone is operating based on the target heating power, if it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, then the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions.

[0052] The preset stability condition is used to determine whether the real-time temperature data of the heating area is in a stable state. A stable state means that the real-time temperature data does not fluctuate significantly within a certain period of time. The preset ignition interference model is the correspondence between ignition power, heating power, and temperature data. The preset ignition power is the minimum power value required to excite the ionization of the reactive gas and maintain a stable plasma state. The preset ignition power can be pre-set, for example, it can be determined based on the material to be processed, the type of etching gas, the flow rate of the etching gas, the actual process requirements, the equipment parameters of the etching machine, environmental factors, etc. Compensating heating power is used to change or maintain the temperature of the heating area. The real-time temperature data that meets the preset stability condition is stable within the allowable error range of the target temperature data. The allowable error range can be determined according to the actual application scenario and is not specifically limited here. The preset ignition power includes bottom radio frequency power (BRF) and source radio frequency power (SRF).

[0053] Specifically, when the heating zone operates based on the target heating power, the terminal can acquire real-time temperature data of the heating zone through temperature sensors within the heating zone. The terminal can determine whether the real-time temperature data in the heating zone meets preset stability conditions. If it is determined that the real-time temperature data of the heating zone meets the preset stability conditions, the ignition program of the etching equipment is initiated, and the compensation heating power of the heating zone is determined based on the preset ignition interference model, the preset ignition power, and the real-time temperature data of the heating zone. Optionally, the etching equipment can be a plasma etching machine.

[0054] Step 103: Compensate the temperature data of the heating area based on the compensated heating power to obtain the compensated temperature data.

[0055] The compensated temperature data is stable within the allowable error range of the target stable data.

[0056] Specifically, the terminal inputs the preset ignition power to the heating area while simultaneously inputting the compensation heating power to the heating area. Based on the compensation heating power, the temperature of the heating area is compensated to obtain the compensated temperature data.

[0057] Optionally, such as Figure 2 As shown, Figure 2 This is a schematic diagram of the anti-winding feedforward control process for the ignition temperature of the etching equipment. Figure 2 The interference input is the preset start-up power, and the feedforward compensation is the input compensation heating power. Under the action of the target heating power, the temperature of the heating area gradually stabilizes. After the temperature stabilizes, the preset start-up power and the compensation heating power are input simultaneously to keep the temperature in the heating area stable.

[0058] The aforementioned temperature control method determines the target heating power of the heating area based on the target temperature data and a preset heating model, ensuring that the temperature of the heating area remains within the allowable error range of the target temperature data. If the real-time temperature data of the heating area meets the preset stability conditions, a compensation heating power is determined based on a preset ignition interference model, a preset ignition power, and the real-time temperature data that meets the preset stability conditions. The temperature data of the heating area is then compensated based on this compensation heating power to obtain the compensated temperature data. This method achieves rapid compensation of the heating area temperature data by the compensation heating power when the ignition power is input, preventing temperature fluctuations caused by the input ignition power and ensuring that the temperature of the heating area remains stable within the allowable error range of the target temperature data. By using a feedforward-feedback hybrid approach to achieve rapid compensation of the heating area during ignition, the method achieves stable temperature control of the plasma etching machine during the ignition process, while maintaining temperature uniformity within the heating area. This improves the stability and accuracy of the etching process, thereby enhancing the reliability of the plasma etching machine and the stability of the process.

[0059] In one exemplary embodiment, the heating area includes multiple heating sub-areas, each with different target temperature data.

[0060] Specifically, the heating area can be divided into multiple heating sub-areas based on the structure of the electrostatic chuck (which adsorbs the wafer by electrostatic force). The target temperature data of each heating sub-area is different. The terminal can determine the target temperature data of each heating sub-area based on the preset temperature threshold and the preset temperature adjustment strategy. Optionally, the preset temperature adjustment strategy is to determine a random number and adjust the preset temperature threshold based on the random number to obtain the target temperature data of each heating sub-area.

[0061] Optionally, for each heating sub-region, the target temperature data of that heating sub-region is acquired. Based on the target temperature data and a preset heating model, the target heating power of that heating sub-region is determined and input into that heating sub-region. When the heating sub-region operates based on the target heating power, the real-time temperature data of that heating sub-region is acquired. If the real-time temperature data of each heating sub-region meets the preset stability conditions, the ignition program is started, and based on the preset ignition interference model, the preset ignition power, and the real-time temperature data that meets the preset stability conditions, the compensation heating power of that heating sub-region is determined. The compensation heating power and the preset ignition power are simultaneously input into that heating sub-region to obtain the compensated temperature data.

[0062] In this embodiment, by dividing the heating area into multiple heating sub-areas and adjusting each heating sub-area separately, precise adjustment of each area can be achieved, effectively improving the temperature anti-interference capability, thereby improving the reliability of the equipment and the stability of the process.

[0063] In an exemplary embodiment, the specific implementation process of the step "determining that the real-time temperature data of the heating area meets the preset stability conditions" may include:

[0064] For each heating sub-region, multiple real-time temperature data are acquired, and stable values ​​of multiple real-time temperature data are determined. If the stable value exceeds a preset stability threshold, the real-time temperature data of the heating sub-region is determined to meet the preset stability condition; if the real-time temperature data of each heating sub-region meets the preset stability condition, the real-time temperature data of the heating region meets the preset stability condition.

[0065] The multiple real-time temperature data points correspond to temperature data collected at different time points within the heating sub-region. The stability value is used to determine whether the real-time temperature data within the heating sub-region is in a stable state; for example, the stability value can be the variance of multiple real-time temperature data points. The preset stability threshold can be a preset variance threshold.

[0066] Specifically, for each heating sub-region, the terminal can collect multiple real-time temperature data points sequentially using a temperature sensor and calculate the variance of these data points. If the variance exceeds a preset stability threshold, the real-time temperature data for that heating sub-region is determined to meet the preset stability condition. If the real-time temperature data for all heating sub-regions meets the preset stability condition, the real-time temperature data for the heating region is determined to meet the preset stability condition.

[0067] Optionally, when the real-time temperature data of each heating sub-region meets the preset temperature conditions, the heating sub-region can send a stabilization signal to the terminal. If the terminal receives the stabilization signal from each heating sub-region, it can determine that the real-time temperature data of the heating region meets the preset stabilization conditions. For example, the stabilization signal can be sign=1.

[0068] In this embodiment, the stability value is used to determine whether each heating sub-region has reached a stable state. When the heating region reaches a stable state, the start-up procedure is initiated, which improves the accuracy of temperature stability judgment, ensures the consistency of etching effect, protects the etching equipment, and ensures the stability of plasma.

[0069] In one exemplary embodiment, the temperature control method further includes:

[0070] For each heating sub-region, multiple sample heating powers are acquired and sequentially input into the heating sub-region. For each sample heating power, the first sample real-time temperature data of the heating sub-region is acquired. The first sample real-time temperature data that meets the preset stability conditions is determined as the first sample steady-state temperature data. The sample heating power of each heating sub-region corresponding to the first sample steady-state temperature data is acquired, and multiple sample ignition powers are sequentially input into the heating sub-region. The second sample real-time temperature data corresponding to each sample ignition power is acquired. The second sample real-time temperature data that meets the preset stability conditions is determined as the second sample steady-state temperature data. The sample ignition power and the sample heating power of each heating sub-region corresponding to the second sample steady-state temperature data are acquired.

[0071] The sample heating power of each heating sub-region is different, the sample ignition power of each heating sub-region is consistent, but the sample heating power of each heating sub-region is similar.

[0072] Specifically, for each heating sub-region, the terminal can determine the heating power range and the ignition power range of the heating region, and set multiple sample heating powers in steps within the heating power range, and multiple sample ignition powers in steps within the ignition power range. The heating power range and the ignition power range of the heating region can be determined according to the actual application scenario. The steps between two adjacent sample heating powers and two adjacent sample ignition powers can be the same or different. Optionally, multiple sample heating powers can be input to the heating sub-region in ascending order, and multiple sample ignition powers can also be input to the heating sub-region in ascending order. Multiple sample heating powers can include m sample heating powers, 0 < m ≤ M, where m is a positive integer; multiple sample ignition powers can include n sample heating powers, 0 < n ≤ N, where n is a positive integer.

[0073] For each heating sub-region, the heating power of the first sample is input into the heating sub-region, and the real-time temperature data of the first sample in the heating sub-region is obtained through the temperature sensor. It is determined whether the real-time temperature data of the first sample meets the preset stability condition. If the real-time temperature data of the first sample meets the preset stability condition, the real-time temperature data of the first sample that meets the preset stability condition is determined as the steady-state temperature data of the first sample. The heating power of each heating sub-region corresponding to the steady-state temperature data of the first sample is obtained, and the start-up program is started.

[0074] After the ignition process is initiated, the ignition power of the first sample is input to the heating sub-region. Multiple real-time temperature data of the first and second samples in the heating sub-region are acquired using a temperature sensor. It is then determined whether the real-time temperature data of the first and second samples meets a preset stability condition. The real-time temperature data of the first and second samples that meets the preset stability condition is identified as the first and second sample steady-state temperature data. The ignition power of the sample corresponding to the steady-state temperature data of the first and second samples and the sample heating power of each heating sub-region at this time are also acquired. The ignition power of the second sample is then input to the heating sub-region, and the real-time temperature data of the second and second samples in the heating sub-region is acquired using a temperature sensor. It is then determined whether the real-time temperature data of the second sample meets the preset stability condition. The ignition power of the sample corresponding to the steady-state temperature data of the first and second samples is identified as the first and second sample steady-state temperature data. The real-time temperature data of the second sample under certain conditions is determined as the steady-state temperature data of the second sample, and the sample ignition power and the sample heating power of each heating sub-region at this time are obtained; ...; The ignition power of the Nth sample is input into the heating sub-region, and the real-time temperature data of the Nth sample of the heating sub-region is obtained through the temperature sensor, and it is determined whether the real-time temperature data of the Nth sample meets the preset stability conditions. The real-time temperature data of the Nth sample that meets the preset stability conditions is determined as the steady-state temperature data of the Nth sample, and the sample ignition power and the sample heating power of each heating sub-region at this time are obtained; The second stage of heating settings is then entered.

[0075] After entering the second stage of heating settings, the heating power of the second sample is input to the heating sub-region, and the real-time temperature data of the second first sample in the heating sub-region is obtained through the temperature sensor. It is determined whether the real-time temperature data of the second first sample meets the preset stability conditions. If the real-time temperature data of the second first sample meets the preset stability conditions, the real-time temperature data of the second first sample that meets the preset stability conditions is determined as the steady-state temperature data of the second first sample. The sample heating power of each heating sub-region corresponding to the steady-state temperature data of the second first sample at this time is obtained, and the start-up program is started.

[0076] After the ignition program is started, the ignition power of the first sample is input into the heating sub-region, and multiple real-time temperature data of the first and second samples in the heating sub-region are acquired through a temperature sensor. It is also determined whether the real-time temperature data of the first and second samples meets the preset stability conditions. The real-time temperature data of the first and second samples that meets the preset stability conditions is determined as the first and second sample steady-state temperature data. The ignition power of the sample corresponding to the steady-state temperature data of the first and second samples and the sample heating power of each heating sub-region at this time are also acquired. ... The ignition power of the Nth sample is input into the heating sub-region, and the real-time temperature data of the Nth second sample in the heating sub-region is acquired through a temperature sensor. It is also determined whether the real-time temperature data of the Nth second sample meets the preset stability conditions. The real-time temperature data of the Nth second sample that meets the preset stability conditions is determined as the Nth second sample steady-state temperature data. The ignition power of the sample corresponding to the steady-state temperature data of the Nth second sample and the sample heating power of each heating sub-region at this time are also acquired. The heating settings for the third stage are then entered.

[0077] After entering the heating setting of the Mth stage, the heating power of the Mth sample is input to the heating sub-region, and the real-time temperature data of the Mth first sample in the heating sub-region is obtained through the temperature sensor. It is determined whether the real-time temperature data of the Mth first sample meets the preset stability condition. If the real-time temperature data of the Mth first sample meets the preset stability condition, the real-time temperature data of the Mth first sample that meets the preset stability condition is determined as the steady-state temperature data of the Mth first sample. The sample heating power of each heating sub-region corresponding to the steady-state temperature data of the Mth first sample at this time is obtained, and the start-up program is started.

[0078] After the ignition process is started, the ignition power of the first sample is input into the heating sub-region, and multiple real-time temperature data of the first and second samples of the heating sub-region are acquired through a temperature sensor. It is also determined whether the real-time temperature data of the first and second samples meets the preset stability conditions. The real-time temperature data of the first and second samples that meets the preset stability conditions is determined as the first and second sample steady-state temperature data. The ignition power of the sample corresponding to the steady-state temperature data of the first and second samples and the sample heating power of each heating sub-region at this time are also acquired. ... The ignition power of the Nth sample is input into the heating sub-region, and the real-time temperature data of the Nth second sample of the heating sub-region is acquired through a temperature sensor. It is also determined whether the real-time temperature data of the Nth second sample meets the preset stability conditions. The real-time temperature data of the Nth second sample that meets the preset stability conditions is determined as the Nth second sample steady-state temperature data. The ignition power of the sample corresponding to the steady-state temperature data of the Nth second sample and the sample heating power of each heating sub-region at this time are also acquired.

[0079] The terminal can identify the first first sample steady-state temperature data, the second first sample steady-state temperature data, ..., the Mth first sample steady-state temperature data as first sample steady-state temperature data; the terminal can identify multiple first second sample steady-state temperature data, multiple second second sample steady-state temperature data, ..., multiple Nth second sample steady-state temperature data as second sample steady-state temperature data; and determine the sample heating power corresponding to each first sample steady-state temperature data, and determine the sample ignition power and sample heating power corresponding to each second sample steady-state temperature data.

[0080] In this embodiment, by collecting a large amount of steady-state temperature data of each heating sub-region, as well as the heating power and / or ignition power corresponding to the steady-state temperature data, the accuracy of the preset heating model and the preset ignition interference model is improved.

[0081] In one exemplary embodiment, the temperature control method further includes:

[0082] If the real-time temperature data of the first sample or the real-time temperature data of the second sample exceeds the preset safe temperature threshold, then stop inputting the sample heating power or sample ignition power.

[0083] The preset safe temperature threshold is the maximum temperature parameter of the electrostatic chuck. The electrostatic chuck is a key component in semiconductor manufacturing equipment (plasma etching machine) used to fix and support wafers (or other substrates).

[0084] Specifically, for each heating sub-region, after the sample heating power is input, the real-time temperature data of the first sample changes. If it is determined that the real-time temperature data of the first sample is greater than or equal to the preset safe temperature threshold, then the input of the sample heating power or sample ignition power for the next stage to the heating region is stopped.

[0085] After the sample ignition power is input, the real-time temperature data of the second sample changes. If it is determined that the real-time temperature data of the second sample is greater than or equal to the preset safe temperature threshold, then the input of the next stage of sample ignition power or sample heating power to the heating area is stopped.

[0086] Optionally, after entering the heating setting of the m-th stage, the heating power of the m-th sample is input to the heating sub-region, and the real-time temperature data of the m-th first sample in the heating sub-region is obtained through the temperature sensor. If the real-time temperature data of the m-th first sample is greater than or equal to the preset safety threshold, the subsequent process is stopped.

[0087] The ignition power of the nth sample is input into the heating sub-region, and the real-time temperature data of the nth second sample in the heating sub-region is obtained through the temperature sensor. If the real-time temperature data of the nth first sample is greater than or equal to the preset safety threshold, the subsequent process is stopped.

[0088] In this embodiment, the input of sample heating power or sample ignition power is stopped when the real-time temperature data exceeds the preset safe temperature threshold, thus ensuring the safety and stability of the equipment.

[0089] In one exemplary embodiment, the temperature control method further includes:

[0090] For each heating sub-region, multiple first sample steady-state temperature data and the sample heating power of each heating sub-region corresponding to each first sample steady-state temperature data are obtained; the multiple first sample steady-state temperature data and the sample heating power of each heating sub-region corresponding to each first sample steady-state temperature data are fitted to obtain the heating correspondence between each sample steady-state temperature data and the sample heating power of each heating sub-region, and to determine the first linear coefficient of the heating correspondence; based on the heating correspondence between each heating sub-region and the first linear coefficient of the heating correspondence, a preset heating model is determined.

[0091] The fitting process can be a least squares algorithm, which can be determined based on the specific application scenario and is not specifically limited here. The heating correspondence is the relationship between heating power and temperature data, which can be a linear relationship between heating power and temperature data. The first linear coefficient is obtained by fitting the first sample steady-state temperature data and the sample heating power corresponding to the first sample steady-state temperature data.

[0092] Specifically, for each heating sub-region, the terminal can acquire multiple first sample steady-state temperature data and the sample heating power corresponding to each first sample steady-state temperature data; based on the heat conduction model, heat conduction principle, and least squares algorithm, the terminal performs fitting processing on the multiple first sample steady-state temperature data and the sample heating power of each heating sub-region corresponding to each first sample steady-state temperature data to obtain the heating relationship between the sample heating power and sample temperature data of the heating sub-region, and can determine the first linear coefficient in the heating relationship. The specific expression of the heating correspondence relationship can be:

[0093]

[0094] Among them, T i This is the temperature data for the i-th heating sub-region. b i , , … All are the first linear coefficients of the i-th heating sub-region, and are obtained by linear fitting based on multiple first sample steady-state temperature data and the sample heating power of each heating sub-region corresponding to each first sample steady-state temperature data. P iIt represents the heating power of the i-th heating sub-region. The principle of heat conduction takes into account the mutual influence between the heating power of each heating sub-region on the temperature data of each heating sub-region.

[0095] For each heating sub-region, a heat conduction model can be established at the terminal. This heat conduction model is a static and stable model, where the energy of the heating power input per unit area is equal to the heat dissipation and conduction energy of the heating sub-region's own chamber. The expression for this heat conduction model can be:

[0096]

[0097] Among them, S i It is the area of ​​the i-th heated sub-region. It refers to the emissivity emitted by an object. It is the Boltzmann constant, λ k Where L is the thermal conductivity, h is the load thickness, and h is the convective heat transfer coefficient. ch It is the coolant temperature, T g It is the gas temperature, T q It is the temperature of the chamber.

[0098] In addition, due to The value is small, so this coefficient is ignored.

[0099] The terminal determines a preset heating model based on the heating correspondence between each heating sub-region and the first linear coefficient of that correspondence. The specific expression of the preset heating model can be:

[0100]

[0101] in, This represents the temperature data for each heating sub-region within the heating region, where I is the number of heating sub-regions. This refers to the power in each heating sub-region of the heating area; It is the first linear coefficient matrix, a ii These are the linear coefficients of the i-th heating sub-region. It is the first linear coefficient matrix, b i is the linear coefficient of the i-th heating sub-region.

[0102] In addition, in specific applications, the terminal can input the target temperature data into the preset heating model to obtain the target heating power.

[0103] For example, the heating area may include 4 heating sub-regions, i.e., I=4. It should be understood that this is only an example and does not constitute a specific limitation. The specific number of heating sub-regions is determined based on the specific application scenario.

[0104] In this embodiment, by using different heating powers and steady-state temperature data to process the correspondence between each heating sub-region, the decoupling of different heating sub-regions is achieved, the heating correspondence is accurately expressed, and the accuracy of the preset heating model in determining the heating power based on temperature is improved.

[0105] In one exemplary embodiment, the temperature control method further includes:

[0106] For each heating sub-region, multiple second sample steady-state temperature data, sample heating power, and sample ignition power of each heating sub-region corresponding to each second sample steady-state temperature data are acquired; the multiple second sample steady-state temperature data, sample heating power, and sample ignition power of each heating sub-region corresponding to each second sample steady-state temperature data are fitted to obtain the temperature influence relationship and determine the second linear coefficient of the temperature influence relationship; based on the temperature influence relationship and the second linear coefficient of each heating sub-region, a preset ignition interference model is determined.

[0107] The sample ignition power can include BRF and SRF. The fitting process can be a least squares algorithm, which can be determined based on the specific application scenario and is not specifically limited here. The temperature influence relationship is the relationship between temperature data and heating power / ignition power, which can be a linear relationship between temperature data and heating power / ignition power. The temperature influence relationship characterizes the effect of sample heating power and sample ignition power on temperature. The second linear coefficient is obtained by linearly fitting the second sample steady-state temperature data and the sample heating power and sample ignition power of each heating sub-region corresponding to the second sample steady-state temperature data.

[0108] Specifically, for each heating sub-region, multiple second-sample steady-state temperature data, sample heating power, and sample ignition power corresponding to each second-sample steady-state temperature data for each heating sub-region are acquired. The multiple second-sample steady-state temperature data, the sample heating power, and the sample ignition power corresponding to each second-sample steady-state temperature data are fitted to obtain the temperature influence relationship and determine the second linear coefficient of the temperature influence relationship. The expression for the temperature influence relationship of the i-th heating sub-region can be:

[0109]

[0110] Among them, T i This is the temperature data of the i-th heating sub-region, α i μ1, μ2, d i , , ... , , P is the second linear coefficient of the i-th heated sub-region.i It is the heating power of the i-th heating sub-region. BRF is the lower radio frequency power of the sample ignition power of the heating region, and SRF is the upper radio frequency power of the sample ignition power of the heating region.

[0111] The terminal determines a preset start-up interference model based on the temperature influence relationship and the second linear coefficient of each heating sub-region. The specific expression of the preset start-up interference model can be:

[0112]

[0113] in, It is the second linear coefficient matrix, c ii c is the second linear coefficient of the i-th heated sub-region. iI+1 c is the second linear coefficient corresponding to the lower radio frequency power of the i-th heating sub-region. iI+2 It is the second linear coefficient corresponding to the upper radio frequency power of the i-th heating sub-region. It is the second linear coefficient matrix, d i It is the second linear coefficient of the i-th heated sub-region.

[0114] For example, the heating area may include four heating sub-regions, i.e., I=4. It should be understood that this is merely an example and does not constitute a specific limitation; the specific number of heating sub-regions is determined based on the specific application scenario. The terminal can input real-time temperature data that meets preset stability conditions and preset ignition power into the preset ignition model to obtain the compensated heating power. The specific expression for calculating the compensated heating power can be:

[0115]

[0116] In this embodiment, by using different heating powers and steady-state temperature data to process the correspondence between each heating sub-region, the decoupling of different heating sub-regions is achieved, the heating correspondence is accurately expressed, and the accuracy of the preset ignition interference model in determining the compensation heating power based on temperature and preset ignition power is improved.

[0117] In one embodiment, such as Figure 2 As shown, upon receiving the ignition signal, transient compensation is performed on the set process stable temperature and the corresponding compensation heating power based on the current ignition power. Feedforward control is initiated simultaneously with the ignition power input to ensure that the system maintains temperature stability in each heating sub-region even under ignition power interference. When ignition power is applied, and even when switching between different ignition power states, the temperature remains consistently within the allowable error range of the target temperature data.

[0118] In this embodiment, temperature data of multiple heated sub-regions are obtained by inputting different powers into the multi-region heating sub-regions and inputting ignition power under stable conditions. Different types of input power data are screened, classified, and decoupled. The temperature data is fitted and analyzed to determine the heating model and the ignition interference model. Through feedforward feedback hybrid control, the heater input is compensated in advance at the ignition moment. This application can effectively reduce temperature fluctuations during the etching process, reduce the impact of temperature changes caused by ignition on the wafer etching effect, significantly improve the stability of process conditions during plasma etching, and simultaneously improve the robustness and precision of the etching process. This anti-interference technology helps improve the performance of semiconductor manufacturing equipment, achieving higher quality and finer etching effects.

[0119] It should be understood that although the steps in the flowcharts of the embodiments described above are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the embodiments described above may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the steps or stages of other steps.

[0120] Based on the same inventive concept, this application also provides a temperature control device for implementing the temperature control method described above. The solution provided by this device is similar to the solution described in the above method; therefore, the specific limitations in one or more temperature control device embodiments provided below can be found in the limitations of the temperature control method described above, and will not be repeated here.

[0121] In one exemplary embodiment, such as Figure 3 As shown, a temperature control device 30 is provided, including: a first determining module 31, a second determining module 32, and a compensation module 33, wherein:

[0122] The first determining module 31 is used to determine the target heating power of the heating area based on the target temperature data and the preset heating model;

[0123] The second determining module 32 is used to determine the compensation heating power of the heating area based on a preset ignition interference model, a preset ignition power, and the real-time temperature data that meets the preset stability conditions when the heating area is operating based on the target heating power.

[0124] The compensation module 33 is used to compensate the temperature data of the heating area based on the compensation heating power to obtain the compensated temperature data.

[0125] In one embodiment, the heating area includes multiple heating sub-regions, each with a different target temperature.

[0126] In one embodiment, the second determining module 32 is used to acquire multiple real-time temperature data for each of the heating sub-regions and determine a stable value of the multiple real-time temperature data. If the stable value exceeds a preset stability threshold, it is determined that the real-time temperature data of the heating sub-region meets the preset stability condition.

[0127] If the real-time temperature data of each of the heating sub-regions meets the preset stability condition, then the real-time temperature data of the heating region meets the preset stability condition.

[0128] In one embodiment, the first determining module 31 is further configured to acquire multiple sample heating powers for each of the heating sub-regions, and sequentially input the multiple sample heating powers into the heating sub-regions;

[0129] For each sample heating power, the real-time temperature data of the first sample in the heating sub-region is obtained; the real-time temperature data of the first sample that meets the preset stability condition is determined as the first sample steady-state temperature data, and the ignition power of multiple samples is sequentially input into the heating sub-region to obtain the real-time temperature data of the second sample corresponding to each sample ignition power. The real-time temperature data of the second sample that meets the preset stability condition is determined as the second sample steady-state temperature data.

[0130] In one embodiment, the first determining module 31 is further configured to stop inputting the sample heating power or the sample ignition power if the real-time temperature data of the first sample or the real-time temperature data of the second sample exceeds a preset safe temperature threshold.

[0131] In one embodiment, the first determining module 31 is further configured to acquire, for each of the heating sub-regions, a plurality of first sample steady-state temperature data and sample heating power corresponding to each first sample steady-state temperature data; perform fitting processing on the plurality of first sample steady-state temperature data and sample heating power corresponding to each first sample steady-state temperature data to obtain the heating correspondence between each sample steady-state temperature data and the sample heating power, and determine the first linear coefficient of the heating correspondence;

[0132] The preset heating model is determined based on the heating correspondence of each heating sub-region and the first linear coefficient of the heating correspondence.

[0133] In one embodiment, the second determining module 32 is configured to acquire, for each of the heating sub-regions, a plurality of second sample steady-state temperature data, a sample heating power corresponding to each second sample steady-state temperature data, and a sample ignition power; perform fitting processing on the plurality of second sample steady-state temperature data, the sample heating power corresponding to each second sample steady-state temperature data, and the sample ignition power to obtain a temperature influence relationship; and determine a second linear coefficient of the temperature influence relationship, wherein the temperature influence relationship characterizes the influence of the sample heating power and the sample ignition power on the temperature;

[0134] Based on the temperature influence relationship of each of the heating sub-regions and the second linear coefficient, the preset ignition interference model is determined.

[0135] Each module in the aforementioned temperature control device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of a computer device in hardware form or independent of it, or stored in the memory of a computer device in software form, so that the processor can call and execute the operations corresponding to each module.

[0136] In one exemplary embodiment, a computer device is provided, which may be a terminal, and its internal structure diagram may be as follows: Figure 4As shown, the computer device includes a processor, memory, input / output interfaces, a communication interface, a display unit, and an input device. The processor, memory, and input / output interfaces are connected via a system bus, and the communication interface, display unit, and input device are also connected to the system bus via the input / output interfaces. The processor provides computing and control capabilities. The memory includes non-volatile storage media and internal memory. The non-volatile storage media stores the operating system and computer programs. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage media. The input / output interfaces are used for exchanging information between the processor and external devices. The communication interface is used for wired or wireless communication with external terminals; wireless communication can be achieved through Wi-Fi, mobile cellular networks, Near Field Communication (NFC), or other technologies. When the computer program is executed by the processor, it implements a temperature control method. The display unit is used to form a visually visible image and can be a display screen, a projection device, or a virtual reality imaging device. The display screen can be an LCD screen or an e-ink screen. The input device of the computer device can be a touch layer covering the display screen, or buttons, trackballs, or touchpads set on the casing of the computer device, or external keyboards, touchpads, or mice, etc.

[0137] Those skilled in the art will understand that Figure 4 The structure shown is merely a block diagram of a portion of the structure related to the present application and does not constitute a limitation on the computer device to which the present application is applied. Specific computer devices may include more or fewer components than those shown in the figure, or combine certain components, or have different component arrangements.

[0138] In one embodiment, a computer device is provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps in the above-described method embodiments.

[0139] In one embodiment, a computer-readable storage medium is provided having a computer program stored thereon that, when executed by a processor, implements the steps in the above method embodiments.

[0140] In one embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the steps in the above method embodiments.

[0141] It should be noted that the user information (including but not limited to user device information, user personal information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of the relevant data must comply with relevant regulations.

[0142] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile memory and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetic random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM). The databases involved in the embodiments provided in this application may include at least one type of relational database and non-relational database. Non-relational databases may include, but are not limited to, blockchain-based distributed databases. The processors involved in the embodiments provided in this application may be general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic devices, quantum computing-based data processing logic devices, artificial intelligence (AI) processors, etc., and are not limited to these.

[0143] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this application.

[0144] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A temperature control method characterized by, The method comprises: determining a target heating power of a heating area based on target temperature data and a preset heating model; if it is determined that real-time temperature data of the heating area meets a preset stable condition, determining a compensation heating power of the heating area based on a preset ignition interference model, a preset ignition power and the real-time temperature data meeting the preset stable condition, under the condition that the heating area operates based on the target heating power; compensating temperature data of the heating area based on the compensation heating power to obtain compensated temperature data; wherein the heating area comprises a plurality of heating sub-areas, and target temperature data of each heating sub-area is different; The method further comprises: for each heating sub-area, obtaining a plurality of second sample steady-state temperature data, sample ignition power corresponding to each second sample steady-state temperature data and sample heating power of each heating sub-area corresponding to each second sample steady-state temperature data; fitting processing is performed on the plurality of second sample steady-state temperature data, the sample ignition power corresponding to each second sample steady-state temperature data and the sample heating power of each heating sub-area corresponding to each second sample steady-state temperature data to obtain a temperature influence relationship, and a second linear coefficient of the temperature influence relationship is determined, wherein the temperature influence relationship represents the influence of the sample heating power and the sample ignition power on temperature; determining the preset ignition interference model based on the temperature influence relationship and the second linear coefficient of each heating sub-area.

2. The method of claim 1, wherein, The determination that the real-time temperature data of the heating area meets the preset stable condition comprises: for each heating sub-area, obtaining a plurality of real-time temperature data and determining a stable value of the plurality of real-time temperature data, and if the stable value exceeds a preset stable threshold, it is determined that the real-time temperature data of the heating sub-area meets the preset stable condition; if the real-time temperature data of each heating sub-area meets the preset stable condition, the real-time temperature data of the heating area meets the preset stable condition.

3. The method of claim 1, wherein, The sample heating power and the sample ignition power of each heating sub-area are different, and the method further comprises: for each heating sub-area, obtaining a plurality of sample heating powers and sequentially inputting the plurality of sample heating powers into the heating sub-area; for each sample heating power, obtaining first sample real-time temperature data of the heating sub-area; determining first sample steady-state temperature data meeting the preset stable condition, and obtaining sample heating power of each heating sub-area corresponding to the first sample steady-state temperature data; and sequentially inputting a plurality of sample ignition powers into the heating sub-area, respectively obtaining second sample real-time temperature data corresponding to each sample ignition power, determining second sample steady-state temperature data meeting the preset stable condition, and obtaining sample ignition power and sample heating power of each heating sub-area corresponding to the second sample steady-state temperature data.

4. The method of claim 3, wherein, The method further comprises: If the first sample real-time temperature data or the second sample real-time temperature data exceeds a preset safety temperature threshold, inputting of the sample heating power or the sample ignition power is stopped.

5. The method of claim 3, wherein, The method further comprises: For each of the heating sub-regions, a plurality of first sample steady-state temperature data and sample heating power of each of the heating sub-regions corresponding to each of the first sample steady-state temperature data are obtained; the plurality of first sample steady-state temperature data and the sample heating power of each of the heating sub-regions corresponding to each of the first sample steady-state temperature data are subjected to fitting processing to obtain a heating corresponding relationship between each sample steady-state temperature data and the sample heating power of each of the heating sub-regions, and a first linear coefficient of the heating corresponding relationship is determined; The preset heating model is determined based on the heating corresponding relationship of each heating sub-region and the first linear coefficient of the heating corresponding relationship.

6. A temperature control device, characterized by The device comprises: A first determination module is configured to determine target heating power of a heating region based on target temperature data and a preset heating model; A second determination module is configured to, if it is determined that real-time temperature data of the heating region meets a preset stability condition in a case where the heating region operates based on the target heating power, determine compensation heating power of the heating region based on a preset ignition interference model, a preset ignition power, and the real-time temperature data meeting the preset stability condition; A compensation module is configured to compensate temperature data of the heating region based on the compensation heating power to obtain compensated temperature data; The heating region comprises a plurality of heating sub-regions, and target temperature data of each of the heating sub-regions is different; The second determination module is further configured to, for each of the heating sub-regions, obtain a plurality of second sample steady-state temperature data, sample ignition power corresponding to each of the second sample steady-state temperature data, and sample heating power of each of the heating sub-regions corresponding to each of the second sample steady-state temperature data; and perform fitting processing on the plurality of second sample steady-state temperature data, the sample ignition power corresponding to each of the second sample steady-state temperature data, and the sample heating power of each of the heating sub-regions corresponding to each of the second sample steady-state temperature data to obtain a temperature influence relationship and determine a second linear coefficient of the temperature influence relationship, the temperature influence relationship representing influence of the sample heating power and the sample ignition power on temperature; The preset ignition interference model is determined based on the temperature influence relationship of each of the heating sub-regions and the second linear coefficient.

7. The apparatus of claim 6, wherein, The second determination module is configured to, for each of the heating sub-regions, obtain a plurality of real-time temperature data and determine a stable value of the plurality of real-time temperature data, and if the stable value exceeds a preset stability threshold, determine that the real-time temperature data of the heating sub-region meets a preset stability condition; If the real-time temperature data of each of the heating sub-regions meets the preset stability condition, the real-time temperature data of the heating region meets the preset stability condition.

8. The apparatus of claim 6, wherein, The sample heating power and the sample ignition power of each heating sub-region are different, the first determining module is further configured to acquire a plurality of sample heating powers for each heating sub-region, and sequentially input the plurality of sample heating powers into the heating sub-region; For each sample heating power, first sample real-time temperature data of the heating sub-region is acquired, first sample steady-state temperature data is determined as the first sample real-time temperature data satisfying the preset stability condition, sample heating power of each heating sub-region corresponding to the first sample steady-state temperature data is acquired, a plurality of sample ignition powers are sequentially input into the heating sub-region, second sample real-time temperature data corresponding to each sample ignition power is acquired, second sample steady-state temperature data is determined as the second sample real-time temperature data satisfying the preset stability condition, and sample ignition power and sample heating power of each heating sub-region corresponding to the second sample steady-state temperature data are acquired. 9.A computer device, comprising a memory and a processor, wherein the memory stores a computer program, and the computer device is configured to perform the method according to any one of claims 1-8 when the computer program is executed by the processor. The processor executes the computer program to implement the steps of the method of any one of claims 1 to 5.

10. A computer-readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to implement the steps of the method of any one of claims 1 to 5.

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