An automated semiconductor ingot into water tank control method and device

Abstract

The embodiment of the application provides a kind of automation semiconductor crystal ingot into water tank control method and device, it is related to semiconductor crystal ingot processing auxiliary equipment technical field, it includes rack, lifting transplantation device is equipped on rack, lifting transplantation device one side is equipped with turnover positioning device, and the other side is equipped with first conveying device, and U-shaped conveying group is equipped on the other side of turnover positioning device, lifting transplantation device includes lifting mechanism, and lifting mechanism is arranged at the end of first conveying device, and lifting mechanism top is equipped with horizontal moving mechanism, and turnover positioning device includes turnover workbench, and lifting device is equipped on turnover workbench, and lifting device is equipped with turnover drive part, and turnover drive part is equipped with turnover workbench, and positioning tool is equipped on turnover workbench, and turnover drive part is servo motor.The application has the effect of stable operation and avoids crystal ingot knock damage.

Description

Technical Field

[0001] This invention relates to the field of semiconductor ingot processing auxiliary equipment technology, and in particular to an automated semiconductor ingot water tank control method and device. Background Technology

[0002] In the semiconductor ingot processing, the cut ingots need to be transferred to a water tank for cleaning or soaking. Current ingot placement in water tanks largely relies on manual labor or semi-automated equipment: manual transfer is inefficient, labor-intensive, and the ingots are easily damaged by impacts; semi-automated equipment typically consists of independent conveying, lifting, and flipping devices, but these devices lack coordinated control, resulting in the following problems: First, the alignment accuracy between the ingot and the water tank opening is poor, often with an error of 5-10mm, easily leading to ingot jamming or impact with the water tank; second, the water tank is prone to shifting during transport, requiring manual adjustment; third, the flipping device only achieves simple rotation and cannot dynamically correct the angle according to the ingot's posture, resulting in poor stability during placement.

[0003] To address the aforementioned issues, the semiconductor ingot water tank device urgently needs to resolve its low operational stability problem. Summary of the Invention

[0004] To address the issue of low operational stability in semiconductor ingot water tank devices, this application provides an automated semiconductor ingot water tank control method and apparatus.

[0005] The automated semiconductor ingot water tank control method and apparatus provided in this application adopts the following technical solution:

[0006] An automated method for controlling the loading of semiconductor ingots into a water tank includes the following steps:

[0007] S1. When the first positioning sensor detects the crystal ingot, the first conveying device starts transporting the crystal ingot;

[0008] S2. When the second positioning sensor detects that the crystal ingot has arrived at the lifting and transplanting device, the positioning device of the lifting and transplanting device positions the base supporting the crystal ingot base. Then the lifting mechanism is raised to lift the base away from the first conveying device. Subsequently, the disassembly cylinder of the disassembly device fixes the base and cooperates with the gripper cylinder on the transverse mechanism to lift the crystal ingot base upwards and remove it from the base. Then the crystal ingot base is transferred to the flipping worktable of the flipping positioning device, and the positioning fixture fixes the crystal ingot base.

[0009] S3. The water tank is conveyed to the bottom of the tilting worktable by the second conveyor belt. After the fourth positioning sensor detects the water tank, the water tank positioning device is activated and the water tank positioning cylinder realizes the positioning of the water tank.

[0010] S4. The tilting table first rises, then the servo motor drives the tilting table to tilt. The third positioning sensor detects the center position of the water tank opening. When it approaches the water tank opening, it decelerates and slowly rotates until the crystal ingot faces the center of the water tank opening. Then the tilting table descends, sends the crystal ingot into the water tank, the positioning fixture is released, and the tilting positioning device is reset.

[0011] S5. The water tank positioning cylinder retracts, and the second conveyor belt transports the water tank containing the crystal ingot to the third conveyor belt. The third conveyor belt transports the crystal ingot in a direction perpendicular to the second conveyor belt, and then the fourth conveyor belt changes direction and continues to move, completing the entire box entry process.

[0012] An apparatus comprising an automated semiconductor ingot water tank loading control method includes a frame, on which a lifting and transplanting device is mounted. A flipping and positioning device is located on one side of the lifting and transplanting device, and a first conveying device is located on the other side. A U-shaped conveyor group is located on the other side of the flipping and positioning device. The lifting and transplanting device includes a lifting mechanism located at the end of the first conveying device, and a traversing mechanism is located above the lifting mechanism. The flipping and positioning device includes a flipping work frame mounted on the frame, with a lifting device on the work frame, a flipping drive component on the lifting device, a flipping worktable on the flipping drive component, and a positioning fixture on the flipping worktable. The flipping drive component is a servo motor. A first positioning sensor is located on the first conveying device, a second positioning sensor on the lifting and transplanting device, a third positioning sensor on the flipping and positioning device, and a fourth positioning sensor on the U-shaped conveyor group.

[0013] Optionally, the first conveying device includes a first conveyor belt and a first positioning sensor, wherein the first positioning sensor is disposed at the starting end of the first conveyor belt.

[0014] Optionally, the U-shaped conveyor group includes a second conveyor belt, a third conveyor belt, and a fourth conveyor belt. The third conveyor belt is parallel to the conveying direction of the first conveyor belt, and the conveying directions of the second and fourth conveyor belts are perpendicular to the direction of the third conveyor belt. The second conveyor belt is connected to a flipping positioning device, and the fourth positioning sensor is located at the end of the second conveyor belt. The second conveyor belt is also equipped with a water tank positioning device, which includes a water tank positioning cylinder.

[0015] Optionally, the lifting mechanism includes a lifting work frame, the height of which is higher than the first conveying device. The lifting work frame has a cavity and a lifting cylinder is also provided inside. The lifting cylinder's actuating end is provided with a lifting platform. A second positioning sensor is installed on the lifting work frame at the same height as the first conveyor belt. A positioning device is provided on the lifting platform. A disassembly device is provided on the lifting work frame. The traversing mechanism includes a two-axis linear module, which is installed on a frame. The actuating end of the two-axis linear module is provided with a gripper cylinder.

[0016] Optionally, the positioning device includes positioning cylinders, four of which are respectively located at the four corners of the lifting platform, and the disassembly device includes disassembly cylinders, two of which are respectively located on both sides of the lifting frame.

[0017] Optionally, the lifting device includes a lifting platform and a linear module. The linear module is mounted on a tilting workbench, and the lifting platform is slidably mounted on the execution end of the linear module. The positioning fixture includes a base support fixing cylinder, and a second conveyor belt is located below the tilting workbench.

[0018] Optionally, the first positioning sensor, the second positioning sensor, the third positioning sensor and the fourth positioning sensor are all laser beam sensors.

[0019] Optionally, both the first conveying device and the U-shaped conveyor group are rigid conveyor belts.

[0020] In summary, this application includes at least one of the following beneficial technical effects:

[0021] The opening of the water tank is detected by a laser beam sensor, and the position of the water tank is fixed by a water tank positioning mechanism. When entering the tank, the ingot first rises and then flips. When it flips and approaches the water tank, the speed is reduced to achieve accurate alignment between the ingot and the opening of the water tank, avoiding jamming and impact during entry. The entire process, from ingot conveying, lifting and transferring to entering the tank and water tank circulation, is seamlessly connected, improving work efficiency. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a front view of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the first conveying device and the lifting and transplanting device of the present invention;

[0025] Figure 4 This is a schematic diagram of the lifting and transplanting device and the U-shaped transport assembly of the present invention;

[0026] Figure 5 This is an enlarged view of the water tank positioning device of the present invention.

[0027] Explanation of reference numerals in the attached drawings: 1. Frame; 2. First conveying device; 21. First conveyor belt; 3. Lifting and transplanting device; 31. Lifting mechanism; 311. Lifting work frame; 312. Lifting cylinder; 313. Lifting worktable; 314. Positioning cylinder; 315. Disassembly cylinder; 32. Transverse mechanism; 321. Two-axis linear module; 322. Gripper cylinder; 4. Tilting and positioning device; 41. Tilting work frame; 42. Lifting device; 421. Lifting platform; 42 2. Linear module; 43. Servo motor; 44. Tilting worktable; 45. Positioning fixture; 451. Base support fixing cylinder; 5. U-shaped conveyor group; 51. Second conveyor belt; 511. Water tank positioning device; 52. Third conveyor belt; 53. Fourth conveyor belt; 6. Crystal ingot; 61. Crystal ingot base support; 62. Base; 63. Water tank; 71. First positioning sensor; 72. Second positioning sensor; 73. Third positioning sensor; 74. Fourth positioning sensor. Detailed Implementation

[0028] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of this application, “at least one” and “one or more” refer to one, two, or more than two. The term “and / or” is used to describe the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can indicate: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character “ / ” generally indicates that the preceding and following related objects are in an “or” relationship.

[0029] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0030] The following is in conjunction with the appendix Figure 1-5 The present invention will be described in further detail below.

[0031] This application discloses an automated semiconductor ingot water tank loading device, referring to... Figure 1 and Figure 2 The system includes a frame 1, on which a lifting and transplanting device 3 is mounted. A flipping and positioning device 4 is located on one side of the lifting and transplanting device 3, and a first conveying device 2 is located on the other side. A U-shaped conveyor group 5 is located on the other side of the flipping and positioning device 4. Both the first conveying device 2 and the U-shaped conveyor group 5 are rigid conveyor belts. The first conveying device 2 includes a first conveyor belt and a first positioning sensor 71. The first positioning sensor 71 is located at the starting end of the first conveyor belt 21 to detect whether an ingot has entered the first conveyor belt 21. The first conveyor belt is used to transport ingots 6. For stable transport, the ingots 6 are placed on an ingot base 61, and a base 62 is also provided under the ingot base 61. The lifting and transplanting device 3 includes a lifting mechanism 31 located at the end of the first conveyor belt. A lateral movement mechanism 32 is located above the lifting mechanism. The flipping and positioning device 4 includes a flipping work frame 41 mounted on the frame 1. 1 is equipped with a lifting device 42, which is equipped with a flipping drive component. The flipping drive component is equipped with a flipping worktable 44, which is equipped with a positioning fixture 45. The U-shaped conveyor group 5 includes a second conveyor belt 51, a third conveyor belt 52, and a fourth conveyor belt 53. All three conveyor belts are rigid and form a U-shape. The third conveyor belt 52 is parallel to the conveying direction of the first conveyor belt 21. The conveying directions of the second conveyor belt 51 and the fourth conveyor belt 53 are perpendicular to the direction of the third conveyor belt 52. The second conveyor belt 51 is connected to the flipping positioning device 4 to transport the empty water tank 63 to the flipping positioning device 4 for loading crystal ingots. The third conveyor belt 52 and the fourth conveyor belt 53 are used to transport the loaded water tank 63. The U-shaped structure makes the conveying path of the water tank 63 folded, which improves the space utilization rate compared with the straight layout and is suitable for compact workshop scenarios. The first conveyor belt 21 and the third conveyor belt 52 are in the same direction, which facilitates the connection with the production lines of the preceding and following processes.

[0032] Reference Figure 2 and Figure 3The lifting mechanism 31 includes a lifting work frame 311, which is higher than the first conveying device 2. The lifting work frame 311 has a cavity and is equipped with a lifting cylinder 312. The lifting cylinder 312 has a lifting worktable 313 at its actuating end. The lifting worktable 313 is docked to the first conveyor belt 21 in its default working state. A second positioning sensor 72 is also provided on the lifting work frame 311. The second positioning sensor 72 is set at the same height as the first conveyor belt 21 to detect whether an ingot has arrived at the lifting and transplanting device 3. A positioning device is provided on the lifting worktable 313, and a disassembly device is provided on the lifting work frame 311. The positioning device includes four positioning cylinders 314, which are respectively located on the lifting worktable 311. At the four corners of the workbench 313, the base 62 is constrained to a designated position from four directions. The disassembly device includes disassembly cylinders 315. There are two disassembly cylinders 315, which are respectively set on both sides of the lifting work frame 311 to fix the base and cooperate with the transverse mechanism 32 to separate the base 62 and the ingot base 61. The transverse mechanism 32 includes a two-axis linear module 321, which is set on the frame. The execution end of the two-axis linear module 321 is equipped with a gripper cylinder 322, which is used to grip the ingot base 61. The end of the transverse mechanism 32 is equipped with a flipping positioning device 4. The two-axis linear module 321 moves the gripper cylinder 322 after gripping to separate the ingot base 61 from the base 62, and then moves it transversely to the flipping positioning device 4.

[0033] Reference Figure 2 and Figure 4 The lifting device 42 includes a lifting platform 421 and a linear module 422. The linear module 422 is mounted on the tilting work frame 41. The lifting platform 421 is slidably mounted on the execution end of the linear module 422. The tilting drive is a servo motor 43, which is mounted on the lifting platform 421. The positioning fixture 45 includes a base fixing cylinder 451, which is used to fix the ingot base 61. The tilting work table 44 is used to receive the ingot base 61 conveyed by the transverse mechanism 32. Below the worktable 44 is the second conveyor belt 51. The flipping worktable 44 is also equipped with a third positioning sensor 73 for detecting the position of the water tank 63. The flipping positioning device 4 integrates three-level action logic of lifting, flipping and lowering. With the synchronous connection of the lifting and transplanting device 3, the flipping positioning device 4 first lifts the crystal ingot after receiving it to avoid the bottom support scraping against the water tank during the flipping process. The flipping shaft is driven by a servo motor 43. The flipping angular velocity is adjustable. When it approaches the opening of the water tank 63, it decelerates to 20° / s to reduce the inertial impact of the crystal ingot.

[0034] Reference Figure 5The second conveyor belt 51 is equipped with a fourth positioning sensor 74 at its end. The fourth positioning sensor is used to detect whether the water tank 63 enters below the flipping positioning device 4. The second conveyor belt 51 is also equipped with a water tank positioning device 511. The water tank positioning device 511 includes a water tank positioning cylinder. When the water tank 63 reaches the working position, the water tank positioning cylinder positions the water tank to facilitate the subsequent entry of the crystal ingot 6.

[0035] The first positioning sensor 71, the second positioning sensor 72, the third positioning sensor 73, and the fourth positioning sensor 74 are all laser beam sensors.

[0036] The automated control method for semiconductor ingot water tank is as follows:

[0037] S1. When the first positioning sensor 71 detects the crystal ingot, the first conveying device 2 starts to transport the crystal ingot 6.

[0038] S2. When the second positioning sensor 72 detects that the crystal ingot has arrived at the lifting and transplanting device 3, the positioning device of the lifting and transplanting device 3 positions the base 62 that carries the crystal ingot base 61. Then the lifting mechanism 31 lifts up and lifts the base 62 away from the first conveying device 2. Subsequently, the disassembly cylinder 315 of the disassembly device fixes the base 62 and cooperates with the gripper cylinder 322 on the transverse mechanism 32 to lift the crystal ingot base 61 upward away from the base 62. Then the crystal ingot base 61 is transferred to the flipping worktable 44 of the flipping positioning device 4, and the positioning fixture 45 fixes the crystal ingot base 61.

[0039] S3. Water tank 63 is conveyed by the second conveyor belt 51 to the bottom of the tilting worktable 44. After the fourth positioning sensor 74 detects water tank 63, the water tank positioning device 511 is activated and the water tank positioning cylinder realizes the positioning of water tank 63.

[0040] S4. The flipping worktable 44 rises first, and then the servo motor 43 drives the flipping worktable 44 to flip. The third positioning sensor 73 detects the center position of the opening of the water tank 63. When it approaches the opening of the water tank 63, it decelerates and slowly rotates until the crystal ingot 6 faces the center of the opening of the water tank 63. Then the flipping worktable 44 descends and sends the crystal ingot 6 into the water tank 63. The positioning fixture 45 is released and the flipping positioning device 4 is reset.

[0041] S5. The water tank positioning cylinder retracts, and the second conveyor belt 51 transports the water tank 63 containing the crystal ingot to the third conveyor belt 52. The third conveyor belt 52 transports the crystal ingot in a direction perpendicular to the second conveyor belt 51, and then the fourth conveyor belt 53 changes direction and continues to move, completing the entire box entry process.

[0042] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. Any equivalent modifications or variations made by those skilled in the art based on the content disclosed in the present invention should be included within the scope of protection set forth in the claims.

Claims

1. An automated semiconductor ingot into water tank control method, characterized by: The utility model provides a kind of lifting and transplanting device for wafering, including rack (1), the lifting and transplanting device (3) is equipped on the rack (1), the lifting and transplanting device (3) one side is equipped with turnover positioning device (4), the lifting and transplanting device (3) other side is equipped with first conveying device (2), the turnover positioning device (4) other side is equipped with U type conveying group (5), the lifting and transplanting device (3) includes lifting mechanism (31), the lifting mechanism (31) is arranged in first conveying device (2) end, the lifting mechanism (31) includes lifting work stand (311), the lifting work stand (311) is equipped with dismounting device, the lifting mechanism (31) top is equipped with horizontal moving mechanism (32), the turnover positioning device (4) includes turnover work stand (41), the turnover work stand (41) is arranged on rack (1), the turnover work stand (41) is equipped with lifting device (42), the lifting device (42) is equipped with turnover drive part, the turnover drive part is equipped with turnover workbench (44), the turnover workbench (44) is equipped with positioning tooling (45), the turnover drive part is servo motor (43), the first conveying device (2) is equipped with first positioning sensor (71), the lifting and transplanting device (3) is equipped with second positioning sensor (72), the turnover positioning device (4) is equipped with third positioning sensor (73), the U type conveying group (5) is equipped with fourth positioning sensor (74), the U type conveying group (5) includes second conveying belt (51), third conveying belt (52) and fourth conveying belt (53), control method includes following steps: S1, when the first positioning sensor detects the ingot, the first conveying device starts to transport the ingot; S2, when the second positioning sensor detects that the ingot reaches the lifting and transplanting device, the positioning device of the lifting and transplanting device positions the base bearing the ingot bottom support, then the lifting mechanism lifts up, lifts the base away from the first conveying device, then the dismounting cylinder of the dismounting device fixes the base and cooperates with the clamping jaw cylinder on the horizontal moving mechanism to separate the ingot bottom support from the base upward, then the ingot bottom support is transferred to the turnover workbench of the turnover positioning device, and the positioning tooling fixes the ingot bottom support; S3, the water tank is conveyed to the lower side of the turnover workbench by the second conveying belt, and the fourth positioning sensor detects the water tank, then the water tank positioning device starts, and the water tank positioning cylinder realizes the positioning of the water tank; S4, the turnover workbench first rises, then the servo motor drives the turnover workbench to overturn, the third positioning sensor detects the center position of the water tank opening, slows down when approaching the water tank opening, and slowly rotates until the ingot faces the center of the water tank opening, then the turnover workbench descends, the ingot is sent into the water tank, the positioning tooling is released, and the turnover positioning device is reset; S5, the water tank positioning cylinder is retracted, the second conveying belt conveys the water tank loaded with the ingot to the third conveying belt, the third conveying belt is conveyed in a direction perpendicular to the second conveying belt, and then the fourth conveying belt is reversed to continue moving, to complete the whole process of entering the tank.

2. The method of claim 1, wherein the method further comprises: determining whether the water level in the water tank is below a predetermined level; and if the water level is below the predetermined level, automatically filling the water tank with water. The first conveying device (2) includes a first conveyor belt (21) and a first positioning sensor (71), wherein the first positioning sensor (71) is located at the starting end of the first conveyor belt (21).

3. The automated semiconductor ingot water tank control method according to claim 2, characterized in that: The third conveyor belt (52) is parallel to the conveying direction of the first conveyor belt (21), and the conveying directions of the second conveyor belt (51) and the fourth conveyor belt (53) are perpendicular to the direction of the third conveyor belt (52). The second conveyor belt (51) is connected to the flipping positioning device (4). The fourth positioning sensor (74) is set at the end of the second conveyor belt (51). The second conveyor belt (51) is also provided with a water tank positioning device (511). The water tank positioning device (511) includes a water tank positioning cylinder (314).

4. The method of claim 3, wherein the method further comprises: determining whether the water level in the water tank is below a predetermined level; and if the water level is below the predetermined level, automatically generating a signal to a water supply to fill the water tank to the predetermined level. The height of the lifting work frame (311) is higher than that of the first conveying device (2). The lifting work frame (311) has a cavity inside. The lifting work frame (311) is also equipped with a lifting cylinder (312). The lifting cylinder (312) has a lifting worktable (313) at its execution end. The second positioning sensor (72) is set on the lifting work frame (311). The second positioning sensor (72) is set at the same height as the first conveyor belt (21). The lifting worktable (313) is equipped with a positioning device. The transverse mechanism (32) includes a two-axis linear module (321). The two-axis linear module (321) is set on the frame (1). The two-axis linear module (321) has a gripper cylinder (322) at its execution end.

5. The automated semiconductor ingot water tank control method according to claim 4, characterized in that: The positioning device includes positioning cylinders (314), four of which are respectively located at the four corners of the lifting workbench (313). The disassembly device includes disassembly cylinders (315), two of which are respectively located on both sides of the lifting workbench (311).

6. The method of claim 5, wherein the method further comprises: The lifting device (42) includes a lifting platform (421) and a linear module (422). The linear module (422) is mounted on the flipping work frame (41). The lifting platform (421) is slidably mounted on the execution end of the linear module (422). The positioning fixture (45) includes a bottom support fixing cylinder (451). Below the flipping work frame (44) is a second conveyor belt (51).

7. The automated semiconductor ingot water tank control method according to claim 1, characterized in that: The first positioning sensor (71), the second positioning sensor (72), the third positioning sensor (73) and the fourth positioning sensor (74) are all laser beam sensors.

8. The automated semiconductor ingot water tank control method according to claim 1, characterized in that: Both the first conveying device (2) and the U-shaped conveyor group (5) are rigid conveyor belts.

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