Single crystal furnace centralized control system and method

Abstract

A single crystal furnace centralized control system comprises a centralized control server and a local industrial personal computer server in communication connection with the centralized control server. And the centralized control server comprises a data storage module, a data acquisition module and a data processing module. A single crystal furnace centralized control method comprises the following steps: S0, acquiring current data of a monitoring point; s1, comparing the current data of the monitoring point with a first judgment standard, and if the current data exceed the range, judging that the monitoring point is abnormal; s2, when the abnormal state is judged to be abnormal for three continuous times, judging primary abnormal category attributes of the three abnormal states, if the abnormal state is judged to be regular abnormal state, continuing to execute the step S3, and if the abnormal state is judged to be irregular abnormal state, outputting corresponding equipment fault information; s3, continuously judging to obtain the secondary abnormal state category of the monitoring point; s4, acquiring data corresponding to the association points according to the secondary abnormal state category; and S5, judging data corresponding to the association points, and outputting corresponding equipment fault information and alarm information according to a judgment result.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal manufacturing, in particular to a single crystal furnace centralized control system and method. BACKGROUND

[0002] The single crystal furnace is a key equipment for manufacturing single crystals in the semiconductor and photovoltaic industries. With the development of the semiconductor and photovoltaic industries, the demand for single crystal manufacturing equipment is increasing, and accordingly, the demand for personnel for equipment inspection and maintenance is also increasing. In the prior art, the maintenance of single crystal equipment mainly relies on manual inspection, which cannot timely discover faults and causes maintenance lag, thereby affecting production efficiency and capacity. SUMMARY

[0003] Therefore, it is necessary to provide a single crystal furnace centralized control system and method to improve the timeliness of single crystal furnace maintenance.

[0004] A single crystal furnace centralized control system, comprising: a centralized control server and a local industrial computer server of each single crystal furnace; the centralized control server is in communication connection with the local industrial computer server of each single crystal furnace; the centralized control server comprises a data storage module, a data acquisition module and a data processing module;

[0005] The data storage module comprises:

[0006] The first storage unit is configured to store the first judgment standard;

[0007] The second storage unit is configured to store a primary abnormal state classification table;

[0008] The third storage unit is configured to store a secondary abnormal state classification table;

[0009] The fourth storage unit is configured to store the second judgment standard;

[0010] The fifth storage unit is configured to store a fault category table;

[0011] The sixth storage unit is configured to store abnormal state data of each monitoring point;

[0012] The data acquisition module is in communication connection with the local industrial computer server of each single crystal furnace and comprises:

[0013] The first data acquisition unit is configured to acquire current data of each monitoring point of each single crystal furnace and send a first comparison signal to the first comparison unit;

[0014] The second data acquisition unit is configured to, in response to the first data acquisition signal, acquire corresponding data of an associated point corresponding to the monitoring point according to the secondary abnormal state category of the monitoring point and send a fourth comparison signal to the fourth comparison unit;

[0015] a data processing module, comprising:

[0016] a first comparison unit, configured to read a first judgment criterion stored in a first storage unit in response to a first comparison signal, and compare the current data of the monitoring point with the first judgment criterion, and determine that the monitoring point is in an abnormal state when the current data of the monitoring point is out of the range of the first judgment criterion, and send a counting signal to a counting unit and send abnormal state data to a sixth storage unit;

[0017] a counting unit, configured to count the number of abnormal states of the monitoring point in response to the counting signal, and send a second comparison signal to a second comparison unit when the number of abnormal states of a certain monitoring point reaches 3 times in succession;

[0018] the second comparison unit, configured to read a primary abnormal state classification table stored in a second storage unit and the abnormal state data in the sixth storage unit in response to the second comparison signal, and determine the primary abnormal state classification attribute of the three abnormal states of the monitoring point, and send a third comparison signal to a third comparison unit when the determination is a regular abnormality, and send a first fault signal to a fault output unit when the determination is an irregular abnormality;

[0019] the third comparison unit, configured to read a secondary abnormal state classification table stored in a third storage unit and the abnormal state data in the sixth storage unit in response to the third comparison signal, and determine the monitoring point with the regular abnormality of the primary abnormal state, and obtain the secondary abnormal state classification of the monitoring point, and send a first data acquisition signal to a second data acquisition unit;

[0020] a fourth comparison unit, configured to read a second judgment criterion stored in a fourth storage unit in response to a fourth comparison signal, determine the corresponding data of the associated point, and send the determination result to the fault output unit through a second fault signal;

[0021] the fault output unit, configured to read a fault classification table in a fifth storage unit when receiving the first fault signal or the second fault signal, and output the corresponding equipment fault information.

[0022] Preferably, the centralized control server further comprises a monitoring module, configured to receive the equipment fault information output by the fault output unit, and display and alarm the fault information of the monitoring point when receiving the equipment fault information.

[0023] Preferably, the first judgment criterion is a 3σ range obtained from historical data of the monitoring point.

[0024] In the primary abnormal state classification table, the primary abnormal state classification includes:

[0025] The regularity abnormality, provided that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range or continuously exceeds the lower limit of the 3σ range for three times;

[0026] The irregularity abnormality, provided that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range and continuously exceeds the lower limit of the 3σ range for three times;

[0027] The secondary abnormality state classification table, wherein the secondary abnormality state category comprises:

[0028] The first category, provided that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range for three times;

[0029] The second category, provided that the current data of the monitoring point continuously exceeds the lower limit of the 3σ range for three times;

[0030] The second judging standard is the change trend of the data corresponding to the associated point before and after;

[0031] The first judging standard, the primary abnormality state classification table, the secondary abnormality state classification table, the second judging standard and the fault category table are associated.

[0032] Preferably, the monitoring point comprises a furnace table water pressure, a crystal rotation speed, a crucible rotation speed, an argon flow and a furnace temperature.

[0033] A single crystal furnace centralized control method, comprising the following steps:

[0034] S0, obtaining the current data of each monitoring point of each single crystal furnace;

[0035] S1, comparing the current data of each monitoring point with the corresponding first judging standard, if the current data of the monitoring point exceeds the range of the first judging standard, determining that the monitoring point is in an abnormal state;

[0036] S2, when the monitoring point is continuously determined to be in an abnormal state for three times, judging the primary abnormality category attribute of the three abnormal states according to the primary abnormality state classification table, if the regularity abnormality is determined, continuing to execute step S3, if the irregularity abnormality is determined, outputting the corresponding equipment fault information and alarm information according to the fault category table;

[0037] S3, judging the monitoring point with the regularity abnormality according to the secondary abnormality state classification table, and obtaining the secondary abnormality state category of the monitoring point;

[0038] S4, obtaining the data corresponding to the associated point according to the secondary abnormality state category of the monitoring point;

[0039] S5, judging the data corresponding to the associated point according to the second judging standard, and outputting the corresponding equipment fault information and alarm information according to the judging result and the fault category table.

[0040] Preferably, the first judging criterion is a 3σ range obtained from historical data of the monitoring point;

[0041] In the primary abnormal state classification table, the primary abnormal state categories include:

[0042] Regular abnormality, provided that the current data of the monitoring point exceeds the upper limit of the 3σ range or the lower limit of the 3σ range for three times in succession;

[0043] Irregular abnormality, provided that the current data of the monitoring point exceeds both the upper limit of the 3σ range and the lower limit of the 3σ range for three times in succession;

[0044] In the secondary abnormal state classification table, the secondary abnormal state categories include:

[0045] The first category, provided that the current data of the monitoring point exceeds the upper limit of the 3σ range for three times in succession;

[0046] The second category, provided that the current data of the monitoring point exceeds the lower limit of the 3σ range for three times in succession;

[0047] The second judging criterion is the trend of the data of the associated point before and after;

[0048] The first judging criterion, the primary abnormal state classification table, the secondary abnormal state classification table, the second judging criterion and the fault category table are associated.

[0049] Preferably, the monitoring point includes: furnace table water pressure, crystal rotation speed, crucible rotation speed, argon flow rate and furnace temperature.

[0050] Preferably, when the secondary abnormal state category of the furnace table water pressure is determined as the first category, the data of the associated point is the power of the water supply pump;

[0051] When the secondary abnormal state category of the furnace table water pressure is determined as the second category, the data of the associated point is the pressure difference before and after the filter screen;

[0052] When the secondary abnormal state category of the crystal rotation speed is determined as the first category or the second category, the data of the associated point is the power of the crystal rotation motor;

[0053] When the secondary abnormal state category of the crucible rotation speed is determined as the first category or the second category, the data of the associated point is the power of the crucible rotation motor;

[0054] When the secondary abnormal state category of the argon flow rate is determined as the first category or the second category, the data of the associated point is the argon pressure at the outlet of the pressure reducing valve;

[0055] When the secondary abnormal state category of the temperature in the furnace is determined as the first category or the second category, the associated point corresponding data is the heater power.

[0056] Preferably, when the secondary abnormal state of the water pressure on the furnace table is determined as the first category, and the front and back change trend of the power of the water supply pump is larger, the output fault equipment information is the water supply pump failure;

[0057] When the secondary abnormal state category of the current data of the water pressure on the furnace table is determined as the second category, and the front and back change trend of the pressure difference in front of the filter screen is larger, the output fault equipment information is the filter screen failure;

[0058] When the secondary abnormal state category of the crystal rotation speed is determined as the first category, and the front and back change trend of the power of the crystal rotation motor is larger, the output fault equipment information is the crystal rotation motor and its control device;

[0059] When the secondary abnormal state category of the crystal rotation speed is determined as the second category, and the front and back change trend of the power of the crystal rotation motor is smaller, the output fault equipment information is the crystal rotation motor and its control device;

[0060] When the secondary abnormal state category of the crystal rotation speed is determined as the second category, and the front and back change trend of the power of the crystal rotation motor is unchanged, the output fault equipment information is the speed reducer, the winding wheel and the seed crystal rope matched with the crystal rotation motor;

[0061] When the secondary abnormal state category of the crucible rotation motor is determined as the first category, and the front and back change trend of the power of the crucible rotation motor is larger, the output fault equipment information is the crucible rotation motor and its control device;

[0062] When the secondary abnormal state category of the crucible rotation motor is determined as the second category, and the front and back change trend of the power of the crucible rotation motor is smaller, the output fault equipment information is the crucible rotation motor and its control device;

[0063] When the secondary abnormal state category of the crucible rotation motor is determined as the second category, and the front and back change trend of the power of the crucible rotation motor is unchanged, the output fault equipment information is the speed reducer matched with the crucible rotation motor;

[0064] When the secondary abnormal state category of the argon flow is determined as the first category, and the front and back change trend of the argon pressure at the outlet of the pressure reducing valve is unchanged or smaller, the output fault equipment information is the pressure reducing valve;

[0065] When the secondary abnormal state category of the argon flow is determined as the second category, and the front and back change trend of the argon pressure at the outlet of the pressure reducing valve is unchanged or smaller, the output fault equipment information is the pressure reducing valve;

[0066] When the secondary abnormal state category of the temperature in the furnace is determined as the first category, and the change trend of the heater power before and after is unchanged or smaller, the output fault device information is the temperature sensor;

[0067] When the secondary abnormal state category of the temperature in the furnace is determined as the second category, and the change trend of the heater power before and after is unchanged or larger, the output device fault information is the temperature sensor.

[0068] Preferably, when the primary abnormal state category of the water pressure of the furnace table is determined as irregularity abnormality, the output device fault information is the water supply pump;

[0069] When the primary abnormal state category of the crystal rotation speed is determined as irregularity abnormality, the output device fault information is the crystal rotation motor;

[0070] When the primary abnormal state category of the bucket rotation speed is determined as irregularity abnormality, the output device fault information is the bucket rotation motor;

[0071] When the primary abnormal state category of the argon gas flow is determined as irregularity abnormality, the output device fault information is the argon gas flow meter;

[0072] When the primary abnormal state category of the temperature in the furnace is determined as irregularity abnormality, the output device fault information is the heater.

[0073] The single crystal furnace centralized control system and the single crystal furnace centralized control method, by setting the centralized control system in communication connection with each single crystal furnace local industrial computer server, enable the centralized control system to read the data of the monitoring points in each single crystal furnace, and finally judge the fault equipment information by judging the monitoring point data in two or four levels; the judgment process is as follows: first level, judging whether the current data of the monitoring point is abnormal through the first comparison unit and the first judgment standard stored in the first storage unit; second level, when the current data of the monitoring point is abnormal for three times in succession, judging the primary abnormal state category attribute of the three abnormal states through the second comparison unit and the primary abnormal state classification table stored in the second storage unit, when judging as regular abnormality, continuing the next level judgment, and when judging as irregular abnormality, the fault output unit outputs the equipment fault information; third level, continuing to judge the monitoring point with regular abnormal primary abnormal state through the third comparison unit and the secondary abnormal state classification table stored in the third storage unit, and obtaining the secondary abnormal state category of the monitoring point; fourth level, judging the associated point data through the fourth comparison unit and the second judgment standard stored in the fourth storage unit, and sending the judgment result to the fault output unit, and finally the fault output unit outputs the corresponding equipment fault information according to the fault category table stored in the fifth storage unit; compared with the prior art which needs to find the fault through artificial inspection, the technical scheme provided by the present application enables the operating personnel to find and obtain the equipment fault information of each single crystal furnace in time without artificial inspection, improves the equipment maintenance efficiency, and saves the labor cost. BRIEF DESCRIPTION OF DRAWINGS

[0074] Figure 1 It is a whole structure schematic diagram of the single crystal furnace centralized control system in the present application.

[0075] Figure 2 It is a flow chart of the single crystal furnace centralized control method in the present application.

[0076] In the figure: centralized control server 1; data storage module 10; first storage unit 100; second storage unit 101; third storage unit 102; fourth storage unit 103; fifth storage unit 104; sixth storage unit 105; data acquisition module 11; first data acquisition unit 110; second data acquisition unit 111; data processing module 12; first comparison unit 120; counting unit 121; second comparison unit 122; third comparison unit 123; fourth comparison unit 124; fault output unit 125; monitoring module 13; local industrial computer server 2. DETAILED DESCRIPTION

[0077] The technical scheme and technical effects of the embodiments of the present application are further described in detail in combination with the drawings of the present application.

[0078] Please refer toFigure 1 A single crystal furnace centralized control system, comprising: a centralized control server 1 and a local industrial computer server 2 of each single crystal furnace; the centralized control server 1 is in communication connection with the local industrial computer server 2 of each single crystal furnace; the centralized control server 1 comprises: a data storage module 10, a data acquisition module 11 and a data processing module 12;

[0079] The data storage module 10 comprises:

[0080] The first storage unit 100 is used for storing the first judgment standard;

[0081] The second storage unit 101 is used for storing the primary abnormal state classification table;

[0082] The third storage unit 102 is used for storing the secondary abnormal state classification table;

[0083] The fourth storage unit 103 is used for storing the second judgment standard;

[0084] The fifth storage unit 104 is used for storing the fault category table;

[0085] The sixth storage unit 105 is used for storing the abnormal state data of each monitoring point;

[0086] The data acquisition module 11 is in communication connection with the local industrial computer server of each single crystal furnace, and comprises:

[0087] The first data acquisition unit 110 is used for acquiring the current data of each monitoring point of each single crystal furnace, and sending a first comparison signal to the first comparison unit 120;

[0088] The second data acquisition unit 111 is used for acquiring the corresponding data of the associated point corresponding to the monitoring point according to the secondary abnormal state category of the monitoring point in response to the first data acquisition signal, and sending a fourth comparison signal to the fourth comparison unit 124;

[0089] The data processing module 12 comprises:

[0090] The first comparison unit 120 is used for reading the first judgment standard stored in the first storage unit 100 in response to the first comparison signal, comparing the current data of the monitoring point with the first judgment standard, determining that the monitoring point is in an abnormal state when the current data of the monitoring point is out of the range of the first judgment standard, and sending a counting signal to the counting unit 121 and sending the abnormal state data to the sixth storage unit 105;

[0091] The counting unit 121 is used for counting the number of abnormal states of the monitoring point in response to the counting signal, and sending a second comparison signal to the second comparison unit 122 when the number of abnormal states of a certain monitoring point reaches 3 times in succession;

[0092] The second comparison unit 122 is configured to read the primary abnormal state classification table stored in the second storage unit 101 and the abnormal state data in the sixth storage unit 105 in response to the second comparison signal, and determine the primary abnormal state classification attribute of the third abnormal state of the monitoring point. When the determination result is regular abnormality, the third comparison signal is sent to the third comparison unit 123; when the determination result is irregular abnormality, the first fault signal is sent to the fault output unit 125.

[0093] The third comparison unit 123 is configured to read the secondary abnormal state classification table stored in the third storage unit 102 and the abnormal state data in the sixth storage unit 105 in response to the third comparison signal, and determine the monitoring point with regular abnormality of the primary abnormal state, and obtain the secondary abnormal state classification of the monitoring point, and send the first data acquisition signal to the second data acquisition unit 111.

[0094] The fourth comparison unit 124 is configured to read the second determination standard stored in the fourth storage unit 103 in response to the fourth comparison signal, determine the corresponding data of the associated point, and send the determination result to the fault output unit 125 through the second fault signal.

[0095] The fault output unit 125 is configured to read the fault classification table in the fifth storage unit 104 when receiving the first fault signal or the second fault signal, and output the corresponding equipment fault information.

[0096] In the embodiment, the first data acquisition unit 110 and the second data acquisition unit 111 are in communication connection with the local industrial computer server 2 of each single crystal furnace; the first data acquisition unit 110 is also in communication connection with the first comparison unit 120 and the sixth storage unit 105; the second data acquisition unit 111 is in communication connection with the third comparison unit 122 and the fourth comparison unit 124; the first comparison unit 120 is in communication connection with the counting unit 121, the first storage unit 100 and the sixth storage unit 105; the second comparison unit 122 is in communication connection with the counting unit 121, the second storage unit 101, the sixth storage unit 105, the third comparison unit 123 and the fault output unit 125; the third comparison unit 123 is in communication connection with the third storage unit 102, the sixth storage unit 105 and the second data acquisition unit 111; the fourth comparison unit 124 is in communication connection with the fourth storage unit 103, the second data acquisition unit 111 and the fault output unit 125; and the fault output unit 125 is also in communication connection with the fifth storage unit 104.

[0097] In the embodiment, different counting signals, first comparison signals, second comparison signals, third comparison signals, fourth comparison signals, first fault signals and second fault signals are set for each monitoring point.

[0098] Through the above setting, the centralized control system can read the data of the monitoring points in each single crystal furnace, and finally determine the equipment fault information by judging the monitoring point data in two or four levels. The judgment process is as follows: in the first level, whether the current data of the monitoring point is abnormal is judged by the first comparison unit 120 and the first judgment standard stored in the first storage unit 100; in the second level, when the current data of the monitoring point is abnormal for three times in succession, the primary abnormal state category attribute of the three abnormal states is judged by the second comparison unit 122 and the primary abnormal state classification table stored in the second storage unit 101, when it is determined to be regular abnormality, the next level is continued, and when it is determined to be irregular abnormality, the equipment fault information is output by the fault output unit 125; in the third level, the monitoring point with regular abnormality of the primary abnormal state is further judged by the third comparison unit 123 and the secondary abnormal state classification table stored in the third storage unit 102, and the secondary abnormal state category of the monitoring point is obtained; in the fourth level, the associated point data is judged by the fourth comparison unit 124 and the second judgment standard stored in the fourth storage unit 103, and the judgment result is sent to the fault output unit 125, and finally the corresponding equipment fault information is output by the fault output unit 125 according to the fault category table stored in the fifth storage unit 104; compared with the prior art which needs to be manually inspected to find the fault, the technical scheme provided by the present application can timely find and obtain the equipment fault information of each single crystal furnace without manual inspection, improve the efficiency of equipment maintenance, and save the labor cost.

[0099] Further, please refer to Figure 1 In order to make the operating personnel more convenient to obtain the fault alarm information, the centralized control server further comprises a monitoring module 13 for receiving the equipment fault information output by the fault output unit 125 and displaying and alarming the fault information of the monitoring point when receiving the equipment fault information. In the embodiment, the monitoring module 13 is in communication connection with the fault output unit 125.

[0100] Further, the first judgment standard is a 3σ range obtained from the historical data of the monitoring point;

[0101] In the primary abnormal state classification table, the primary abnormal state category includes:

[0102] The regular abnormality is that the current data of the monitoring point exceeds the upper limit of the 3σ range or exceeds the lower limit of the 3σ range for three times in succession;

[0103] The irregular abnormality is that the current data of the monitoring point exceeds the upper limit of the 3σ range and exceeds the lower limit of the 3σ range for three times in succession;

[0104] The secondary abnormal state classification table, wherein the secondary abnormal state category comprises:

[0105] The first category is that the current data of the monitoring point exceeds the upper limit of the 3σ range for three times in succession;

[0106] The second category is that the current data of the monitoring point exceeds the lower limit of the 3σ range for three times in succession;

[0107] The second judgment standard is the change trend of the data corresponding to the associated point;

[0108] The first judgment standard, the primary abnormal state classification table, the secondary abnormal state classification table, the second judgment standard, and the fault category table are associated.

[0109] In the embodiment, the first judgment standard is a 3σ range obtained from the historical data of the monitoring point, and the specific obtaining process is as follows: the historical data in a fixed period of the monitoring point is taken, the fixed period can be three months or half a year or one year, then the overall mean μ in the fixed period is obtained according to formula (1), and the standard deviation σ in the fixed period is obtained according to formula (2), in formulas (1) and (2), N is the total number of samples, is the sample value, is the sample serial number, and finally the 3σ range is obtained as ; Formula (1); Formula (2);

[0110] Further, the monitoring point comprises a furnace table water pressure, a crystal rotation speed, a crucible rotation speed, an argon flow rate, and a furnace temperature.

[0111] Please refer to Figure 2 A single crystal furnace centralized control method, comprising the following steps:

[0112] S0, obtaining the current data of each monitoring point of each single crystal furnace;

[0113] S1, comparing the current data of each monitoring point with the corresponding first judgment standard, if the current data of the monitoring point exceeds the range of the first judgment standard, it is determined that the monitoring point is in an abnormal state;

[0114] S2, when the monitoring point is determined to be in an abnormal state for three times in succession, the primary abnormal category attribute of the three abnormal states is judged according to the primary abnormal state classification table, if it is determined to be a regular abnormality, step S3 is continued to be executed, if it is determined to be an irregular abnormality, corresponding equipment fault information and alarm information are output according to the fault category table;

[0115] S3, according to the secondary abnormal state classification table, continue to judge the monitoring point with regular abnormality, and obtain the secondary abnormal state category of the monitoring point;

[0116] S4, according to the secondary abnormal state category of the monitoring point, obtain the corresponding data of the associated point;

[0117] S5, according to the second judgment standard, judge the corresponding data of the associated point, and output the corresponding equipment fault information and alarm information according to the judgment result and the fault category table.

[0118] Further, the first judgment standard is a 3σ range obtained from the historical data of the monitoring point;

[0119] In the primary abnormal state classification table, the primary abnormal state category includes:

[0120] Regular abnormality, provided that the current data of the monitoring point exceeds the upper limit of the 3σ range or the lower limit of the 3σ range for three times in succession;

[0121] Irregular abnormality, provided that the current data of the monitoring point exceeds both the upper limit of the 3σ range and the lower limit of the 3σ range for three times in succession;

[0122] In the secondary abnormal state classification table, the secondary abnormal state category includes:

[0123] The first category, provided that the current data of the monitoring point exceeds the upper limit of the 3σ range for three times in succession;

[0124] The second category, provided that the current data of the monitoring point exceeds the lower limit of the 3σ range for three times in succession;

[0125] The second judgment standard is the trend of change of the corresponding data of the associated point;

[0126] The first judgment standard, the primary abnormal state classification table, the secondary abnormal state classification table, the second judgment standard and the fault category table are associated.

[0127] In this embodiment, the second judgment standard is the trend of change of the corresponding data of the associated point, specifically, the corresponding data of the associated point refers to the data of the associated point at the same time as the data collected by the monitoring point, and the trend of change of the data collected last time is the trend of change of the corresponding data of the associated point;

[0128] In this embodiment, the first judgment standard, the primary abnormal state classification table, the secondary abnormal state classification table, the second judgment standard and the fault category table are associated with each other, as shown in Table 1.

[0129] Further, the monitoring point includes: furnace table water pressure, crystal rotation speed, crucible rotation speed, argon flow and furnace temperature.

[0130] Further, when the furnace water pressure secondary abnormal state category is determined as the first category, the associated point corresponding data is the water supply pump power;

[0131] When the furnace water pressure secondary abnormal state category is determined as the second category, the associated point corresponding data is the pressure difference before and after the filter screen;

[0132] When the crystal rotation speed secondary abnormal state category is determined as the first category or the second category, the associated point corresponding data is the crystal rotation motor power;

[0133] When the crucible rotation speed secondary abnormal state category is determined as the first category or the second category, the associated point corresponding data is the crucible rotation motor power;

[0134] When the argon gas flow secondary abnormal state category is determined as the first category or the second category, the associated point corresponding data is the argon gas pressure at the outlet of the pressure reducing valve;

[0135] When the furnace temperature secondary abnormal state category is determined as the first category or the second category, the associated point corresponding data is the heater power.

[0136] Table 1

[0137] Further, when the furnace water pressure secondary abnormal state is determined as the first category, and the water supply pump power before and after the change trend is larger, the output fault equipment information is the water supply pump failure;

[0138] When the furnace water pressure current data secondary abnormal state category is determined as the second category, and the pressure difference before and after the filter screen before and after the change trend is larger, the output fault equipment information is the filter screen failure;

[0139] When the crystal rotation speed secondary abnormal state category is determined as the first category, and the crystal rotation motor power before and after the change trend is larger, the output fault equipment information is the crystal rotation motor and its control device;

[0140] When the crystal rotation speed secondary abnormal state category is determined as the second category, and the crystal rotation motor power before and after the change trend is smaller, the output fault equipment information is the crystal rotation motor and its control device;

[0141] When the crystal rotation speed secondary abnormal state category is determined as the second category, and the crystal rotation motor power before and after the change trend is unchanged, the output fault equipment information is the speed reducer, winding wheel and seed crystal rope matched with the crystal rotation motor;

[0142] When the crucible rotation motor secondary abnormal state category is determined as the first category, and the crucible rotation motor power before and after the change trend is larger, the output fault equipment information is the crucible rotation motor and its control device;

[0143] When the secondary abnormal state category of the crucible rotating motor is determined as the second category, and the trend of the power change of the crucible rotating motor before and after is decreasing, the output fault device information is the crucible rotating motor and its control device;

[0144] When the secondary abnormal state category of the crucible rotating motor is determined as the second category, and the trend of the power change of the crucible rotating motor before and after is constant, the output fault device information is the speed reducer matched with the crucible rotating motor;

[0145] When the secondary abnormal state category of the argon gas flow is determined as the first category, and the trend of the argon gas pressure change at the outlet of the pressure reducing valve before and after is constant or decreasing, the output fault device information is the pressure reducing valve;

[0146] When the secondary abnormal state category of the argon gas flow is determined as the second category, and the trend of the argon gas pressure change at the outlet of the pressure reducing valve before and after is constant or decreasing, the output fault device information is the pressure reducing valve;

[0147] When the secondary abnormal state category of the furnace temperature is determined as the first category, and the trend of the heater power change before and after is constant or decreasing, the output fault device information is the temperature sensor;

[0148] When the secondary abnormal state category of the furnace temperature is determined as the second category, and the trend of the heater power change before and after is constant or increasing, the output fault device information is the temperature sensor.

[0149] Further, when the primary abnormal state category of the water pressure of the furnace table is determined as irregularity, the output fault device information is the water supply pump;

[0150] When the primary abnormal state category of the crystal rotating speed is determined as irregularity, the output fault device information is the crystal rotating motor;

[0151] When the primary abnormal state category of the crucible rotating speed is determined as irregularity, the output fault device information is the crucible rotating motor;

[0152] When the primary abnormal state category of the argon gas flow is determined as irregularity, the output fault device information is the argon gas flow meter;

[0153] When the primary abnormal state category of the furnace temperature is determined as irregularity, the output fault device information is the heater.

[0154] The single crystal furnace centralized control system and the single crystal furnace centralized control method, by setting the centralized control system, the data of the monitoring points in each single crystal furnace can be read, and the fault equipment information is finally judged by judging the monitoring point data in two or four levels; the judgment process is as follows: first level, whether the current data of the monitoring point is abnormal is judged by the first comparison unit 120 and the first judgment standard stored in the first storage unit 100; second level, when the current data of the monitoring point is abnormal for three times in succession, the primary abnormal state classification table stored in the second storage unit 101 is used to judge the primary abnormal state classification attribute of the three abnormal states by the second comparison unit 122, when it is judged to be regular abnormality, the next level is continued, when it is judged to be irregular abnormality, the fault output unit 125 outputs the equipment fault information; third level, the secondary abnormal state classification table stored in the third storage unit 102 is used to continue to judge the monitoring point with regular abnormality of the primary abnormal state by the third comparison unit 123, and the secondary abnormal state classification of the monitoring point is obtained; fourth level, the second judgment standard stored in the fourth storage unit 103 is used to judge the associated point data by the fourth comparison unit 124, and the judgment result is sent to the fault output unit 125, finally the corresponding equipment fault information is outputted by the fault output unit 125 according to the fault classification table stored in the fifth storage unit 104; compared with the prior art which needs to find the fault by artificial inspection, the technical scheme provided by the present application can make the operating personnel find and obtain the equipment fault information of each single crystal furnace in time without artificial inspection, improve the efficiency of equipment maintenance, and save the labor cost.

[0155] The above only discloses the preferred embodiments of the present application, of course, cannot limit the scope of the present application, those skilled in the art can understand that the whole or part of the above-mentioned embodiments can be implemented, and the equivalent changes made according to the claims of the present application still belong to the scope covered by the present application.

Claims

1. A single crystal furnace control system, characterized by, The application relates to a single crystal furnace monitoring system. The system comprises a centralized control server and local industrial computer servers of single crystal furnaces. The centralized control server is in communication connection with the local industrial computer servers of the single crystal furnaces. The centralized control server comprises a data storage module, a data acquisition module and a data processing module. The data storage module comprises: a first storage unit for storing first judgment criteria; a second storage unit for storing a primary abnormal state classification table; a third storage unit for storing a secondary abnormal state classification table; a fourth storage unit for storing second judgment criteria; a fifth storage unit for storing a fault category table; a sixth storage unit for storing abnormal state data of each monitoring point; The data acquisition module is in communication connection with the local industrial computer servers of the single crystal furnaces and comprises: a first data acquisition unit for acquiring current data of each monitoring point of each single crystal furnace and sending a first comparison signal to a first comparison unit; a second data acquisition unit for acquiring corresponding data of associated points corresponding to the monitoring points according to the secondary abnormal state category of the monitoring points and sending a fourth comparison signal to a fourth comparison unit in response to a first data acquisition signal; The data processing module comprises: the first comparison unit for reading the first judgment criteria stored in the first storage unit in response to the first comparison signal, comparing the current data of the monitoring points with the first judgment criteria, determining that the monitoring points are in an abnormal state when the current data of the monitoring points is out of the range of the first judgment criteria, sending a counting signal to a counting unit and sending abnormal state data to the sixth storage unit; the counting unit for counting the number of abnormal states of the monitoring points in response to the counting signal and sending a second comparison signal to a second comparison unit when the number of abnormal states of a certain monitoring point is continuously counted for three times; the second comparison unit for reading the primary abnormal state classification table stored in the second storage unit and the abnormal state data in the sixth storage unit in response to the second comparison signal, judging the primary abnormal state category attribute of the three abnormal states of the monitoring points, sending a third comparison signal to a third comparison unit when the abnormal state is determined to be regular, and sending a first fault signal to a fault output unit when the abnormal state is determined to be irregular; the third comparison unit for reading the secondary abnormal state classification table stored in the third storage unit and the abnormal state data in the sixth storage unit in response to the third comparison signal, judging the monitoring points with regular primary abnormal states, acquiring the secondary abnormal state category of the monitoring points and sending a first data acquisition signal to the second data acquisition unit; the fourth comparison unit for reading the second judgment criteria stored in the fourth storage unit, judging the corresponding data of the associated points and sending the judgment result to the fault output unit through a second fault signal in response to the fourth comparison signal; the fault output unit for reading the fault category table in the fifth storage unit when the first fault signal or the second fault signal is received and outputting corresponding equipment fault information.

2. The system of claim 1, wherein the controller is configured to: The centralized control server further comprises a monitoring module configured to receive the equipment failure information output by the failure output unit and display and alarm the failure information of the monitoring point when receiving the equipment failure information.

3. The single crystal furnace centralized control system of claim 1, wherein: the first judging criterion is a 3σ range obtained from historical data of the monitoring point; the primary abnormal state classification table comprises the following primary abnormal state categories: regular abnormality, with the condition that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range or continuously exceeds the lower limit of the 3σ range for three times; irregular abnormality, with the condition that the current data of the monitoring point continuously exceeds both the upper limit of the 3σ range and the lower limit of the 3σ range for three times; the secondary abnormal state classification table comprises the following secondary abnormal state categories: a first category, with the condition that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range for three times; a second category, with the condition that the current data of the monitoring point continuously exceeds the lower limit of the 3σ range for three times; the second judging criterion is a change trend of the data corresponding to the associated point; the first judging criterion, the primary abnormal state classification table, the secondary abnormal state classification table, the second judging criterion and the failure category table are associated with each other.

4. The system of claim 1, wherein the controller is configured to: the monitoring point comprises the following: water pressure of a furnace table, crystal rotation speed, crucible rotation speed, argon flow rate and furnace temperature.

5. A method for controlling a single crystal furnace using the single crystal furnace control system according to any one of claims 1 to 3, wherein The method comprises the following steps: S0, obtaining current data of each monitoring point of each single crystal furnace; S1, comparing the current data of each monitoring point with the corresponding first judging criterion, and determining that the monitoring point is in an abnormal state if the current data of the monitoring point exceeds the range of the first judging criterion; S2, when the monitoring point is determined to be in an abnormal state for three times, judging the primary abnormal category attribute of the three abnormal states according to the primary abnormal state classification table, and if the abnormality is determined to be regular, continuing to perform step S3, and if the abnormality is determined to be irregular, outputting corresponding equipment failure information and alarm information according to the failure category table; S3, judging the monitoring point in the regular abnormal state according to the secondary abnormal state classification table to obtain the secondary abnormal state category of the monitoring point; S4, obtaining the data corresponding to the associated point according to the secondary abnormal state category of the monitoring point; S5, judging the data corresponding to the associated point according to the second judging criterion, and outputting corresponding equipment failure information and alarm information according to the judging result and the failure category table.

6. The single crystal furnace centralized control method of claim 5, wherein: the first judging criterion is a 3σ range obtained from historical data of the monitoring point; the primary abnormal state classification table comprises the following primary abnormal state categories: regular abnormality, with the condition that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range or continuously exceeds the lower limit of the 3σ range for three times; irregular abnormality, with the condition that the current data of the monitoring point continuously exceeds both the upper limit of the 3σ range and the lower limit of the 3σ range for three times; the secondary abnormal state classification table comprises the following secondary abnormal state categories: a first category, with the condition that the current data of the monitoring point continuously exceeds the upper limit of the 3σ range for three times; a second category, with the condition that the current data of the monitoring point continuously exceeds the lower limit of the 3σ range for three times; The second judging criterion is a change trend of the data corresponding to the associated point before and after the change; The first judging criterion, the primary abnormal state classification table, the secondary abnormal state classification table, the second judging criterion, and the fault category table are associated.

7. The single crystal furnace control method of claim 6, wherein, The monitoring points include: furnace water pressure, crystal rotation speed, crucible rotation speed, argon flow rate, and furnace temperature.

8. The single crystal furnace centralized control method of claim 7, wherein: When the secondary abnormal state category of the furnace water pressure is determined to be the first category, the data corresponding to the associated point is the water supply pump power; When the secondary abnormal state category of the furnace water pressure is determined to be the second category, the data corresponding to the associated point is the pressure difference before and after the filter screen; When the secondary abnormal state category of the crystal rotation speed is determined to be the first category or the second category, the data corresponding to the associated point is the crystal rotation motor power; When the secondary abnormal state category of the crucible rotation speed is determined to be the first category or the second category, the data corresponding to the associated point is the crucible rotation motor power; When the secondary abnormal state category of the argon flow rate is determined to be the first category or the second category, the data corresponding to the associated point is the argon pressure at the outlet of the pressure reducing valve; When the secondary abnormal state category of the furnace temperature is determined to be the first category or the second category, the data corresponding to the associated point is the heater power.

9. The single crystal furnace centralized control method of claim 8, wherein: When the secondary abnormal state of the furnace water pressure is determined to be the first category, and the change trend of the water supply pump power before and after the change is larger, the output fault equipment information is a water supply pump fault; When the secondary abnormal state category of the furnace water pressure is determined to be the second category, and the change trend of the pressure difference before and after the filter screen before and after the change is larger, the output fault equipment information is a filter screen fault; When the secondary abnormal state category of the crystal rotation speed is determined to be the first category, and the change trend of the crystal rotation motor power before and after the change is larger, the output fault equipment information is the crystal rotation motor and its control device; When the secondary abnormal state category of the crystal rotation speed is determined to be the second category, and the change trend of the crystal rotation motor power before and after the change is smaller, the output fault equipment information is the crystal rotation motor and its control device; When the secondary abnormal state category of the crystal rotation speed is determined to be the second category, and the change trend of the crystal rotation motor power before and after the change is unchanged, the output fault equipment information is the speed reducer, the winding wheel, and the seed crystal rope matched with the crystal rotation motor; When the secondary abnormal state category of the crucible rotation motor is determined to be the first category, and the change trend of the crucible rotation motor power before and after the change is larger, the output fault equipment information is the crucible rotation motor and its control device; When the secondary abnormal state category of the crucible rotation motor is determined to be the second category, and the change trend of the crucible rotation motor power before and after the change is smaller, the output fault equipment information is the crucible rotation motor and its control device; When the secondary abnormal state category of the crucible rotation motor is determined to be the second category, and the change trend of the crucible rotation motor power before and after the change is unchanged, the output fault equipment information is the speed reducer matched with the crucible rotation motor; When the secondary abnormal state category of the argon flow rate is determined to be the first category, and the change trend of the argon pressure at the outlet of the pressure reducing valve before and after the change is unchanged or smaller, the output fault equipment information is the pressure reducing valve. When the secondary abnormality state category of the argon gas flow is determined as the second category, and the argon gas pressure at the outlet of the pressure reducing valve has no change or a decreasing trend, the output fault device information is the pressure reducing valve; When the secondary abnormality state category of the furnace temperature is determined as the first category, and the heater power has no change or a decreasing trend, the output fault device information is the temperature sensor; When the secondary abnormality state category of the furnace temperature is determined as the second category, and the heater power has no change or an increasing trend, the output fault device information is the temperature sensor.

10. The single crystal furnace centralized control method of claim 9, wherein: When the primary abnormality state category of the water pressure of the furnace table is determined as irregularity, the output fault device information is the water supply pump; When the primary abnormality state category of the crystal rotation speed is determined as irregularity, the output fault device information is the crystal rotation motor; When the primary abnormality state category of the crucible rotation speed is determined as irregularity, the output fault device information is the crucible rotation motor; When the primary abnormality state category of the argon gas flow is determined as irregularity, the output fault device information is the argon gas flow meter; When the primary abnormality state category of the furnace temperature is determined as irregularity, the output fault device information is the heater.

Images