Liquid-liquid pressurization pressure loading control device and use method

Abstract

The invention discloses a liquid-liquid pressurization pressure loading control device and a using method, and belongs to the technical field of liquid-liquid pressurization, the liquid-liquid pressurization pressure loading control device comprises a liquid-liquid pressurization cylinder, a main body of the liquid-liquid pressurization cylinder is a cylinder barrel, a piston and a sealing ring are arranged in the cylinder barrel, the cylinder barrel is divided into an upper cavity and a lower cavity by the piston and the sealing ring, the upper cavity is filled with quick-drying oil, and the lower cavity is filled with quick-drying oil; the lower cavity is filled with hydraulic oil, the upper cavity pipeline is connected with a gas-liquid conversion oil supplementing system used for providing quick-drying oil and a loading cylinder assembly used for bearing loading pressure and preventing leakage, and the lower cavity pipeline is connected with a hydraulic loading system used for achieving pressurization in a hydraulic mode. According to the invention, efficient and accurate pressure loading can be realized, and strict requirements of various industrial scenes on pressure loading are met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of liquid-liquid supercharging, in particular to a liquid-liquid supercharging pressure loading control device and a use method thereof. BACKGROUND

[0002] Under the trend of continuous evolution of electronic devices towards miniaturization and high performance, third-generation semiconductor devices are increasingly widely used in high-end manufacturing fields due to their excellent electrical properties, and at the same time, the reliability, thermal conductivity and temperature resistance of packaging technology are increasingly stringent requirements. Silver sintering technology can precisely match the packaging needs of third-generation semiconductor devices due to its outstanding characteristics such as low-temperature sintering forming, high-temperature operation resistance and high thermal conductivity efficiency, and has gradually replaced traditional packaging processes and become a core and key technology in the packaging field.

[0003] However, the existing silver sintering process needs to be completed under high pressure loading conditions of 10-40 MPa, and the technical defects of the high pressure loading link have become the main bottleneck restricting its large-scale application. The current industry's main high pressure loading methods are mainly divided into hydraulic loading and pneumatic loading, but both have significant shortcomings. Among them, the hydraulic loading method can achieve high pressure output, but the risk of hydraulic oil leakage is high. Once leakage occurs, not only will it contaminate semiconductor devices and affect product packaging quality, but it may also cause equipment failure, posing a potential threat to production safety; the pneumatic loading method can avoid the problem of hydraulic leakage, but it relies on high-pressure gas as a power source, not only is the preparation and storage of high-pressure gas costly, but it also produces a large amount of industrial noise, and the core pneumatic components are expensive, significantly increasing production costs and the difficulty of managing the production environment.

[0004] In addition, whether it is hydraulic or pneumatic loading, it is difficult to meet the fine requirements of third-generation semiconductor packaging for process parameters in terms of pressure control accuracy and loading process stability, further limiting the full play of the performance advantages of silver sintering technology. Therefore, improving the existing silver sintering process high pressure loading method, reducing the difficulty of pressure control under the premise of ensuring sintering effect, overcoming the existing drawbacks such as leakage, high cost and noise, has become a key problem to be solved in the packaging technology field. SUMMARY

[0005] The technical problem to be solved by the present application is to provide a liquid-liquid supercharging pressure loading control device and a use method thereof, aiming to solve the deficiencies of the existing pressure loading system in terms of pressure control accuracy, stability and leakage prevention, and to realize efficient and accurate pressure loading to meet the strict requirements of various industrial scenarios for pressure loading.

[0006] To solve the above technical problems, the technical scheme adopted by the present application is: a liquid-liquid pressure boosting pressure loading control device, comprising a liquid-liquid pressure boosting cylinder, the main body of the liquid-liquid pressure boosting cylinder is a cylinder barrel, a piston and a sealing ring are arranged inside the cylinder barrel, the piston and the sealing ring divide the cylinder barrel into an upper cavity and a lower cavity, the upper cavity is filled with quick-drying oil, the lower cavity is filled with hydraulic oil, a gas-liquid conversion oil supplement system for providing quick-drying oil and a loading cylinder assembly for bearing loading pressure and preventing leakage are connected and arranged on the upper cavity pipeline, and a hydraulic loading system for realizing pressure boosting by using hydraulic mode is connected and arranged on the lower cavity pipeline.

[0007] Further improvement of the technical scheme of the present application is that the gas-liquid conversion oil supplement system comprises an air inlet valve in communication with an air source, a gas-liquid converter is connected and arranged on the pipeline of the air inlet valve, a travel switch is arranged on the gas-liquid converter, and a supplement oil switch valve is connected and arranged on the pipeline of the gas-liquid converter, and the pipeline of the supplement oil switch valve is connected to the upper cavity pipeline of the liquid-liquid pressure boosting cylinder.

[0008] Further improvement of the technical scheme of the present application is that the loading cylinder assembly comprises a loading cylinder body, an oil cavity arranged inside the loading cylinder body is connected to the upper cavity of the liquid-liquid pressure boosting cylinder through a pipeline, the oil cavity comprises a main oil cavity, a plurality of branch oil cavities are connected and arranged below the main oil cavity, a force transmission rod is arranged in each branch oil cavity, a sealing ring group composed of a plurality of sealing rings is sleeved on the force transmission rod, a loading cylinder cover is arranged at the opening of the bottom of the loading cylinder body, and a through hole is formed in the loading cylinder cover for the tail end of the force transmission rod to extend out.

[0009] Further improvement of the technical scheme of the present application is that the hydraulic loading system comprises a servo motor as a power source, the servo motor drives a plunger pump through a shaft coupling, the plunger pump is connected to a reversing valve through an oil inlet pipeline, the reversing valve is connected to the lower cavity of the liquid-liquid pressure boosting cylinder through a pipeline, the reversing valve is further provided with an oil return pipeline corresponding to the oil inlet pipeline, the oil return pipeline is connected with an oil return throttle valve, an overflow valve and a pressure gauge, and the ends of the oil return pipeline and the oil inlet pipeline are both deep into an oil tank.

[0010] Further improvement of the technical scheme of the present application is that a hydraulic pressure sensor A is arranged at the interface of the lower cavity of the liquid-liquid pressure boosting cylinder, and a hydraulic pressure sensor B is arranged at the interface of the upper cavity of the liquid-liquid pressure boosting cylinder.

[0011] A use method of a liquid-liquid pressure boosting pressure loading control device, the specific steps are as follows:

[0012] Step 1: Before starting, set each component in the device to a specific initial state;

[0013] Step 2: Adjust the air source pressure value to complete oil supplement;

[0014] Step 3: Control the servo motor to start to complete hydraulic pressure boosting;

[0015] Step 4: Perform a voltage reduction operation on the device to restore the system to its initial state.

[0016] A further improvement to the technical solution of the present invention is as follows: Step 1 is specifically as follows: Before the device is started, each component is placed in a specific initial state, the hydraulic pressure in the loading cylinder is 0, the pressure in the upper chamber of the liquid-liquid booster cylinder is 0, and the pressure in the lower chamber of the liquid-liquid booster cylinder is 0; the oil replenishment switch valve is in the closed state, the air intake valve is also in the closed state, and the hydraulic reversing valve is not energized when the return oil circuit is connected, so that the pressure of the hydraulic system is in the released state, ensuring the safety and stability of the system and preparing for subsequent start-up.

[0017] A further improvement to the technical solution of this invention is as follows: Step 2 is as follows: When starting work, the operator first adjusts the pressure of the air source to a preset pressure value P1. The pressure value P1 is determined by the actual working requirements, that is, the actual working requirements pressure value is P2. The volume of the lower chamber of the gas-liquid converter is V2, and the volume of the upper chamber of the gas-liquid converter is V1. Then, according to the formula P1V1=P2V2, P1 can be obtained; this provides a reference pressure for the subsequent inflation process. After adjustment, the oil replenishment switch valve and the air intake valve are opened; the gas is quickly replenished through the air intake valve; at the same time, the gas is converted by the gas-liquid converter, which can convert the gas pressure P1 into the liquid pressure P2, realizing the rapid replenishment of hydraulic oil. When the limit switch on the gas-liquid converter is triggered, the oil replenishment switch valve and the air intake valve are closed, and the oil replenishment is completed.

[0018] A further improvement to the technical solution of this invention is as follows: Step 3 is as follows: After the oil replenishment is completed, the device enters the hydraulic boosting stage, opens the reversing valve to close the pressure relief channel of the hydraulic loading system, and creates conditions for pressure increase; then, the servo motor is controlled to rotate at the set speed n; the servo motor, as a power source, drives the plunger pump to operate; the plunger pump works to replenish oil to the lower chamber of the liquid-liquid boosting cylinder; as hydraulic oil is continuously injected, the pressure in the lower chamber gradually increases, and the generated pressure pushes the piston to move upward in the cylinder; the movement of the piston changes the volume of the upper chamber of the liquid-liquid boosting cylinder. According to the law of liquid state change, the volume of the upper chamber decreases, causing the liquid in it to be compressed, and the pressure increases accordingly, realizing the conversion of hydraulic energy in the lower chamber to hydraulic energy in the upper chamber; during this process, the hydraulic pressure sensor B monitors the pressure change in the upper chamber of the boosting cylinder in real time; when the hydraulic pressure sensor B detects that the pressure reaches the preset pressure setting value, the speed of the servo motor is adjusted, thereby ensuring that the hydraulic boosting process is safe, stable and efficient.

[0019] A further improvement to the technical solution of the present invention is as follows: Step 4 is as follows: After the loading work is completed, the device needs to be depressurized to restore the device to its initial state and prepare for the next working cycle; close the reversing valve and open the oil replenishment switch valve; completely release the remaining pressure in the hydraulic loading system and restore the entire device to its initial state to ensure the repeatability and stability of the device.

[0020] The technological advancements achieved by this invention, due to the adoption of the above technical solutions, are as follows: By setting up a liquid-liquid booster cylinder, a piston isolates the hydraulic oil and the fast-evaporating oil, and the clean, fast-evaporating oil is used as the pressure transmission medium for the end-loading cylinder; a fast-evaporating oil is used, and the hydraulic oil is replenished through a gas-liquid converter, and then pressurized by a booster system. This satisfies the high-pressure loading requirements of silver sintering while reducing the pollution of equipment caused by hydraulic oil leakage to a certain extent. It overcomes the shortcomings of existing pressure loading systems in terms of pressure control accuracy, stability, and leakage prevention, achieving efficient and precise pressure loading and meeting the stringent pressure loading requirements of various industrial scenarios. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a liquid-liquid pressurization pressure loading control device according to the present invention;

[0023] Figure 2 This is a schematic diagram of the multi-stage pressurization type liquid-liquid booster cylinder assembly in this invention;

[0024] Figure 3 This is a schematic diagram of the loading cylinder assembly structure in this invention;

[0025] Figure 4 This is a flowchart illustrating how the device is used;

[0026] Figure 5 This is a control block diagram of the device during operation.

[0027] The components are as follows: 1. Servo motor; 2. Piston pump; 3. Overflow valve; 4. Throttle valve; 5. Pressure gauge; 6. Directional valve; 7. Hydraulic pressure sensor A; 8. Hydraulic booster cylinder; 9. Oil replenishment switch valve; 10. Gas-liquid converter; 11. Intake valve; 12. Air source; 13. Hydraulic pressure sensor B; 14. Main oil chamber; 15. Loading cylinder body; 16. Force transmission rod; 17. Cylinder barrel; 18. Piston; 19. Sealing ring; 20. Upper chamber; 21. Lower chamber; 22. Upper chamber pipeline; 23. Lower chamber pipeline; 24. Oil distribution chamber; 25. Loading cylinder cover; 26. Sealing ring assembly. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to embodiments:

[0029] like Figure 1 The diagram shows a schematic of a liquid-liquid boosting pressure loading control device, including a liquid-liquid boosting cylinder 8. The main body of the liquid-liquid boosting cylinder 8 is a cylinder barrel 17. A piston 18 is installed inside the cylinder barrel 17. A sealing ring 19 is fitted on the piston 10. The piston 10 and the sealing ring 19 divide the cylinder barrel 17 into an upper chamber 20 and a lower chamber 21. The upper chamber 20 is filled with quick-drying oil, and the lower chamber 21 is filled with hydraulic oil. An upper chamber pipeline 22 is connected to the upper chamber 20. An air-liquid conversion oil replenishment system for providing quick-drying oil and a loading cylinder assembly for bearing the loading pressure and preventing leakage are connected to the upper chamber pipeline 22. A hydraulic loading system that uses hydraulic pressure to achieve boosting is connected to the lower chamber pipeline 23. The entire device is connected to multiple PID controllers and controlled by a control system.

[0030] like Figure 2 The diagram shows the structure of a multi-pressure type liquid-liquid booster cylinder 8. The principle is the same, except that the upper chamber 20 and lower chamber 21 have different volumes. The bottom of the upper chamber can be connected to the top of the lower chamber, which can produce higher pressure liquids. The upper and lower chambers are respectively equipped with pistons 18 and sealing rings 19 of different sizes. The two pistons 18 are connected to each other by a connecting rod. Different types of liquid-liquid booster cylinders 8 can be selected according to different needs.

[0031] The gas-liquid conversion oil replenishment system includes an air inlet valve 11, which is connected to an air source 12. A gas-liquid converter 10 is connected to the air inlet valve 11, and a limit switch is provided on the gas-liquid converter 10. An oil replenishment switch valve 9 is connected to the gas-liquid converter 10, and the pipeline on the oil replenishment switch valve 9 is connected to the upper chamber pipeline of the liquid-liquid booster cylinder 8.

[0032] like Figure 3 As shown, the loading cylinder assembly includes a loading cylinder body 15. An oil chamber inside the loading cylinder body 15 is connected to the upper chamber 20 of the liquid-liquid booster cylinder 8 via a pipe. The oil chamber includes a main oil chamber 14, and multiple branch oil chambers 24 are connected below the main oil chamber. The bottom of each branch oil chamber 24 is open. Each branch oil chamber 24 contains a force transmission rod 16. A sealing ring group 26 composed of multiple sealing rings is fitted onto the force transmission rod 16. The sealing ring group 26, in conjunction with the rod body of the force transmission rod 16, can block the opening of the branch oil chamber 24, maintaining a relatively sealed space to prevent oil leakage, while simultaneously achieving external pressure through oil pressure. A loading cylinder cover 25 is provided at the bottom of the loading cylinder body. The loading cylinder cover has a through hole for the tail end of the force transmission rod 16 to extend from the corresponding through hole.

[0033] The hydraulic loading system includes a servo motor 1 as a power source, on which a plunger pump 2 is mounted. The plunger pump 2, driven by a coupling, supplies hydraulic oil to the system. An inlet pipe is connected to the plunger pump 2, which in turn connects to a directional valve 6 to deliver hydraulic oil. The directional valve 6, via a pipe, connects to the lower chamber of a hydraulic booster cylinder 8, controlling its pressurization and depressurization actions to regulate the loading force. A return pipe is also connected to the directional valve 6, corresponding to the inlet pipe. The return pipe is equipped with a return throttle valve 4, a relief valve 3, and a pressure gauge 5. The throttle valve 4 precisely regulates the return flow rate to ensure stable system operation. The pressure gauge 5 monitors the pressure changes at the outlet of the plunger pump 2 in real time. The relief valve 3 automatically opens to relieve pressure when the system pressure exceeds a set value, providing overload protection and ensuring safe and reliable system operation. Both the return and inlet pipes extend into the oil tank.

[0034] A hydraulic pressure sensor A7 is installed at the lower chamber interface of the liquid-liquid booster cylinder 8, and a hydraulic pressure sensor B13 is installed at the upper chamber interface of the liquid-liquid booster cylinder 8. The detected data will be transmitted to the control system as an indicator for reference.

[0035] The use of this device involves several parameters and calculation formulas, as detailed below:

[0036] Chip sintering process parameter settings: Set the chip area S IC Loading cylinder area S C Sintering pressure P s Boost rate V S Parameters such as pressure holding time T are input into the calculation system.

[0037] Calculation of sintering pressure and sintering pressure increase rate:

[0038] Sintering pressure P S The maximum pressure P of the chip sintering process IC The ratio of the chip area to the loading cylinder area The decision, the relationship can be described as: ;

[0039] Sintering pressure increase rate V S The boost rate V required by the chip sintering process SD The ratio of the chip area to the loading cylinder area The decision, the relationship can be described as:

[0040] The liquid filling process of the upper chamber of the liquid-liquid booster cylinder: Open the air intake valve and the oil replenishment switch valve to inject fast-evaporating oil into the upper chamber of the liquid-liquid booster cylinder. The limit switch built into the gas-liquid converter is triggered, and the air intake valve and the oil replenishment switch valve are closed, thus completing the liquid filling of the liquid-liquid booster cylinder.

[0041] The loading process of the liquid-liquid booster cylinder: The loading strategy of the liquid-liquid booster cylinder adopts a preset target pressure control strategy, based on the steady-state hydraulic pressure P. DN The target pressure for filling the liquid-liquid booster cylinder is used as the control objective. The target value of the loading pressure for the liquid-liquid booster cylinder can be calculated as follows:

[0042]

[0043] In the formula S UP For the effective area of ​​the piston in the upper chamber of the liquid-liquid booster cylinder, S DN Effective area of ​​the lower chamber piston.

[0044] The working process of the liquid-liquid booster cylinder uses a PID controller to control the pump speed, with a preset P value. DN For a step command, the value collected by pressure sensor A is used as the feedback signal to form a closed-loop control. Observe the hydraulic pressure P fed back by hydraulic pressure sensor A. DN ,when At that time, the loading process of the liquid-liquid booster cylinder is completed.

[0045] Depressurization process: Close the directional valve, open the oil replenishment switch valve, and observe the hydraulic pressure P fed back by hydraulic pressure sensors A and B. DN and sintering pressure P S， The pressure relief is complete when both approaches 0.

[0046] like Figure 4 , 5 The diagram illustrates a method for using a liquid-liquid pressurization pressure loading control device to control the aforementioned device. The specific steps are as follows:

[0047] Step 1: Before starting, set all components in the device to a specific initial state; before starting the device, set all components to a specific initial state, with the hydraulic pressure in the loading cylinder at 0, the upper chamber pressure of the liquid-liquid booster cylinder 8 at 0, and the lower chamber pressure of the liquid-liquid booster cylinder 8 at 0; the oil replenishment switch valve 9 is in the closed state, the air intake valve 11 is also in the closed state, and the hydraulic directional valve 6 is not energized and the return oil circuit is connected, so that the pressure of the hydraulic system is in a released state, ensuring the safety and stability of the system and preparing for subsequent start-up.

[0048] Step 2: Adjust the pressure of air source 12 to complete oil replenishment; When starting work, the operator first adjusts the pressure of air source 12 to the preset pressure value P1. The pressure value P1 is determined by the actual working requirements, that is, the actual working required pressure value is P2. The volume of the lower chamber of the gas-liquid converter 10 is V2, and the volume of the upper chamber of the gas-liquid converter 10 is V1. Then, according to the formula P1V1=P2V2, P1 can be obtained; This provides a reference pressure for the subsequent inflation process; After adjustment, open the oil replenishment switch valve 9 and the air inlet valve 11; Gas is quickly replenished through the air inlet valve 11; At the same time, the gas is converted by the gas-liquid converter 10, which can convert the gas pressure P1 into the liquid pressure P2, realizing the rapid replenishment of hydraulic oil. When the limit switch on the gas-liquid converter 10 is triggered, the oil replenishment switch valve 9 and the air inlet valve 11 are closed, and the oil replenishment is completed.

[0049] Step 3: Control the servo motor 1 to start and complete the hydraulic boosting; after the oil replenishment is completed, the device enters the hydraulic boosting stage, opens the reversing valve 6 to close the pressure relief channel of the hydraulic loading system, and creates conditions for pressure increase; then, control the servo motor 1 to rotate at the set speed n; the servo motor 1, as the power source, drives the plunger pump 2 to operate; the plunger pump 2 works to replenish oil to the lower chamber of the liquid boosting cylinder 8; as hydraulic oil is continuously injected, the pressure in the lower chamber gradually increases, and the generated pressure pushes the piston to move upward in the cylinder; the movement of the piston changes the volume of the upper chamber of the liquid boosting cylinder 8. According to the law of liquid state change, the volume of the upper chamber decreases, causing the liquid in it to be compressed, and the pressure increases accordingly, realizing the conversion of hydraulic energy in the lower chamber to hydraulic energy in the upper chamber; during this process, the hydraulic pressure sensor B13 monitors the pressure change in the upper chamber of the boosting cylinder in real time; when the hydraulic pressure sensor B13 detects that the pressure reaches the preset pressure setting value, it adjusts the speed of the servo motor 1, thereby ensuring that the hydraulic boosting process is safe, stable and efficient.

[0050] Step 4: Perform a pressure reduction operation on the device to restore the system to its initial state. After the loading work is completed, a pressure reduction operation needs to be performed on the device to restore it to its initial state and prepare for the next work cycle; close the reversing valve 6 and open the oil replenishment switch valve 9; completely release the remaining pressure in the hydraulic loading system, and restore the entire device to its initial state to ensure the repeatability and stability of the device.

[0051] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A liquid-liquid boost pressure loading control device, characterized by: The liquid-liquid pressure boosting cylinder (8) is mainly a cylinder barrel (17), and the inside of the cylinder barrel (17) is provided with a piston (18) and a sealing ring (19), the piston (18) and the sealing ring (19) divide the cylinder barrel into an upper cavity (20) and a lower cavity (21), the upper cavity (20) is filled with quick-drying oil, the lower cavity (21) is filled with hydraulic oil, an air-liquid conversion oil supplement system for providing quick-drying oil and a loading cylinder assembly for bearing loading pressure and preventing leakage are connected to an upper cavity pipeline (22), and a hydraulic loading system for realizing hydraulic pressure boosting is connected to a lower cavity pipeline (23).

2. A liquid-liquid pressurized pressure loading control device according to claim 1, characterized by: The air-liquid conversion oil supplement system comprises an air inlet valve (11) in communication with an air source (12), the air inlet valve (11) is provided with an air-liquid converter (10) connected through a pipeline, the air-liquid converter (10) is provided with a travel switch, and the pipeline of the air-liquid converter (10) is connected to the upper cavity pipeline of the liquid-liquid pressure boosting cylinder (8) through a supplement switch valve (9).

3. The liquid-liquid pressure boosting pressure loading control device according to claim 1, characterized in that: The loading cylinder assembly comprises a loading cylinder barrel (15), an oil cavity arranged in the loading cylinder barrel (15) is connected to the upper cavity (20) of the liquid-liquid pressure boosting cylinder (8) through a pipeline, the oil cavity comprises a main oil cavity (14), a plurality of branch oil cavities (24) are arranged below the main oil cavity in communication, a force transmission rod (16) is arranged in each branch oil cavity, a sealing ring group (26) composed of a plurality of sealing rings is arranged on the force transmission rod (16), a loading cylinder cover (25) is arranged at an opening of the bottom of the loading cylinder barrel, and a through hole is formed in the loading cylinder cover for the tail end of the force transmission rod to extend out.

4. A liquid-liquid pressurized pressure loading control device according to claim 1, characterized by: The hydraulic loading system comprises a servo motor (1) as a power source, the servo motor (1) drives a plunger pump (2) through a shaft coupling, the plunger pump (2) is connected to a reversing valve (6) through an oil inlet pipeline, the reversing valve (6) is connected to the lower cavity of the liquid-liquid pressure boosting cylinder (8) through a pipeline, the reversing valve (6) is further provided with an oil return pipeline corresponding to the oil inlet pipeline, the oil return pipeline is connected with an oil return throttle valve (4), an overflow valve (3) and a pressure gauge (5), and the ends of the oil return pipeline and the oil inlet pipeline are immersed in an oil tank.

5. A liquid-liquid pressurized pressure loading control device according to claim 1, characterized by: A hydraulic pressure sensor A (7) is arranged at the lower cavity interface of the liquid-liquid pressure boosting cylinder (8), and a hydraulic pressure sensor B (13) is arranged at the upper cavity interface of the liquid-liquid pressure boosting cylinder (8).

6. A method of using a liquid-liquid boost pressure loading control device for use in a control device as claimed in any one of claims 1 to 5, characterised by: The specific steps are as follows: Step 1: Before starting, set all components in the device to a specific initial state; Step 2: Adjust the air source (12) pressure value to complete oil supplement; Step 3: Control the servo motor (1) to start to complete hydraulic pressure boosting; Step 4: Perform pressure reduction operation on the device to restore the system to the initial state.

7. A method of using a liquid-liquid boost pressure loading control device according to claim 6, characterized in that: Step 1: Before starting the device, each component is in a specific initial state. The hydraulic pressure in the cylinder is 0, the pressure in the upper chamber of the liquid-liquid booster cylinder (8) is 0, and the pressure in the lower chamber of the liquid-liquid booster cylinder (8) is 0. The oil supplementing switch valve (9) is in the closed state, and the intake valve (11) is also in the closed state. When the hydraulic reversing valve (6) is not powered, it connects the oil return line, allowing the hydraulic system to release pressure and ensuring system safety and stability, preparing for subsequent startup.

8. The method of using a liquid-liquid booster pressure charge control device of claim 6, wherein: Step 2: When starting work, the operator first adjusts the pressure of the gas source (12) to the pre-set pressure value P1. The pressure value P1 is determined by the actual work requirements, i.e., the actual work requirement pressure value is P2, the lower chamber volume of the gas-liquid converter (10) is V2, and the upper chamber volume of the gas-liquid converter (10) is V1. According to the formula P1V1 = P2V2, P1 can be obtained. This provides a reference pressure for the subsequent air charging process. After adjustment, open the oil supplementing switch valve (9) and the intake valve (11). The gas quickly charges through the intake valve (11). At the same time, the gas is converted by the gas-liquid converter (10), which can convert the gas pressure P1 to the liquid pressure P2, achieving rapid oil supplementing of the hydraulic oil. When the upper travel switch of the gas-liquid converter (10) is triggered, the oil supplementing switch valve (9) and the intake valve (11) are closed, and the oil supplementing is completed.

9. The method of using a liquid-liquid booster pressure charge control device of claim 6, wherein: Step 3: After oil supplementing is completed, the device enters the hydraulic pressure boosting phase. Open the reversing valve (6) to close the pressure relief channel of the hydraulic loading system, creating conditions for pressure rise. Then, control the servo motor (1) to rotate at the set speed n. The servo motor (1) serves as the power source, driving the plunger pump (2) to operate. The plunger pump (2) works to supplement oil to the lower chamber of the liquid-liquid booster cylinder (8). As the hydraulic oil continuously enters, the pressure in the lower chamber gradually rises, pushing the piston to move upwards in the cylinder. The movement of the piston changes the volume of the upper chamber of the liquid-liquid booster cylinder (8). According to the law of liquid state change, the decrease in the volume of the upper chamber causes the liquid therein to be compressed, and the pressure rises, realizing the conversion of the lower chamber hydraulic energy to the upper chamber hydraulic energy. In this process, the hydraulic pressure sensor B (13) monitors the pressure change in the upper chamber of the booster cylinder in real time. When the hydraulic pressure sensor B (13) detects that the pressure reaches the pre-set pressure set value, adjust the speed of the servo motor (1), and then ensure the safety, stability, and efficiency of the hydraulic pressure boosting process.

10. The method of using a liquid-liquid booster pressure charge control device of claim 6, wherein: Step 4: After the loading work is completed, the device needs to be depressurized to restore it to the initial state, preparing for the next work cycle. Close the reversing valve (6) and open the oil supplementing switch valve (9). The remaining pressure in the hydraulic loading system is completely discharged, and the entire device returns to the initial state, ensuring the repeatability and stability of the device.

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