A gas supply device for supplying special gas to a coating cabin

Abstract

The application relates to the technical field of coating processing, and discloses a gas supply device for supplying special gas to a coating cabin, which mainly comprises a main special gas tank, a standby special gas tank, a pre-charging buffer tank and a gas flow dispersion assembly; the main special gas tank and the standby special gas tank are connected with the pre-charging buffer tank through a pneumatic three-way valve, forming a double-gas-source gas supply system; when the pressure of the main special gas tank is insufficient, the pneumatic three-way valve is automatically switched to the standby special gas tank; in this process, the pre-charging buffer tank preferentially releases the stored high-pressure gas, and the coating cabin is continuously supplied with the gas through a gas supply main pipe, so that the problem of gas pressure fluctuation caused by valve switching in the traditional design is completely avoided. The pre-charging buffer tank adopts a coaxial double-chamber design, including a high-pressure chamber in the outer layer and a pressure stabilizing chamber in the inner layer; the high-pressure chamber is connected with the pneumatic three-way valve; the pressure stabilizing chamber is connected with the coating cabin through the gas supply main pipe; and the pressure stabilizing chamber is provided with an annular metal isolation plate, and the gas pressure is automatically balanced through an automatic adjusting mechanism.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating processing, in particular to a gas supply device for supplying special gas to a coating cabin. BACKGROUND

[0002] In the coating process, precise supply of process gases such as argon and nitrogen plays a decisive role in the quality of the coated film. The gas supply device directly affects the stability of the coating process and the performance of the product by maintaining a vacuum environment, participating in film reactions, and optimizing film performance.

[0003] The traditional gas supply system is composed of a gas cylinder group, a purification module, a pressure regulating mechanism, and a gas distribution assembly. Its main function is to ensure continuous and stable gas delivery while maintaining high purity and precise pressure control. With the development of coating technology towards high precision, especially the application of advanced processes such as ALD, more stringent requirements are placed on the stability of the gas supply system.

[0004] The existing gas supply device generally adopts a main and backup dual-gas cylinder design, which ensures continuous gas supply through electromagnetic valve switching. When the pressure of the main gas cylinder is insufficient, the system automatically switches to the backup gas cylinder. However, there are obvious defects in the switching process: first, the mechanical delay (100-300 ms) of valve operation can cause temporary pressure fluctuations; second, the traditional single-cavity buffer tank cannot quickly compensate for pressure changes; and the electronic feedback control system has signal delay, making it difficult to respond to pressure changes in a timely manner. The above problems can cause uneven film thickness, increased defects, and other quality issues in high-precision coating processes, restricting the yield improvement of high-end coated products.

[0005] Therefore, we propose a gas supply device for supplying special gas to a coating cabin to solve the problems in the above background. SUMMARY

[0006] The present application provides a gas supply device for supplying special gas to a coating cabin, which can solve the problem of temporary pressure fluctuations caused by gas cylinder switching in the prior art, leading to uneven film thickness, increased defects, and other quality issues in high-precision coating processes.

[0007] To solve the above technical problems, the present application provides the following technical solutions:

[0008] The utility model provides a kind of gas supply device for coating cabin supplies special gas, including main special gas cabinet and backup special gas cabinet, main special gas cabinet and backup special gas cabinet are used to supply special gas for coating cabin, the main special gas cabinet and backup special gas cabinet are communicated with gas supply mechanism, main special gas cabinet and backup special gas cabinet are jointly communicated with pre-charged buffer tank, pre-charged buffer tank is used for the instantaneous gas supply buffer of special gas;Pneumatic tee valve is installed between main special gas cabinet and backup special gas cabinet and pre-charged buffer tank, pneumatic tee valve is used for special gas gas supply air path switching, pre-charged buffer tank is fixedly communicated with the inside of coating cabin with gas supply main pipe, and the inside of coating cabin is provided with airflow dispersion assembly cooperating with gas supply main pipe.

[0009] Preferably, the pre-charged buffer tank is installed with a fixed seat at the bottom, and the fixed seat is used to keep the stability of the pre-charged buffer tank.

[0010] Preferably, the gas supply mechanism includes a first gas inlet pipe and a backup gas inlet pipe, and the first gas inlet pipe and the backup gas inlet pipe are jointly communicated with a tee manifold, the other end of the tee manifold is fixedly communicated with a main gas inlet pipe, and the other end of the main gas inlet pipe is fixedly communicated with a special gas cabinet gas inlet end.

[0011] Preferably, a backup pipeline is arranged between the corresponding main gas inlet pipes of the main special gas cabinet and the backup special gas cabinet, and a normally closed valve is installed on the backup pipeline.

[0012] Preferably, the airflow dispersion assembly includes a pneumatic slip ring rotatably connected to the inside of the coating cabin, and pneumatic blades are arranged in a circular array inside the pneumatic slip ring.

[0013] Preferably, an annular chute is arranged in the middle of the coating cabin, the pneumatic slip ring is rotatably connected to the inside of the annular chute, a bearing disc is installed between the pneumatic slip ring and the annular chute, and the gas supply main pipe is tangentially communicated with the inside of the annular chute.

[0014] Preferably, a first set of guide vanes is arranged at one end of the pneumatic slip ring inside the coating cabin, a second set of guide vanes is arranged at the other end of the pneumatic slip ring inside the coating cabin, the first set of guide vanes and the second set of guide vanes are symmetrically arranged at the two ends of the pneumatic slip ring, and the guide directions of the first set of guide vanes and the second set of guide vanes are opposite.

[0015] Preferably, the pre-charged buffer tank adopts a coaxial double-chamber design, including a cylindrical high-pressure chamber in the outer layer and a pressure stabilizing chamber in the inner layer, the top of the high-pressure chamber is communicated with the end of the pneumatic tee valve away from the main special gas cabinet and the backup special gas cabinet, for inputting special gas inside the main special gas cabinet and the backup special gas cabinet, and the pressure stabilizing chamber is coaxially nested inside the high-pressure chamber, and the outlet of the pressure stabilizing chamber is fixedly communicated with the coating cabin through the gas supply main pipe.

[0016] A ring-shaped metal isolation plate with a microporous structure is rotatably connected inside the pressure stabilizing chamber, and an automatic adjusting mechanism is arranged between the high-pressure chamber and the pressure stabilizing chamber.

[0017] A rotating groove is formed on the inner wall of the stable pressure chamber, and the annular metal isolation plate is rotatably connected to the inside of the rotating groove, and the rotating groove and the annular metal isolation plate are both provided with a micro-porous area and a closed area, and when the micro-porous area and the closed area completely coincide, the opening degree is the largest, and when the micro-porous area and the closed area are completely staggered, the opening degree is the smallest.

[0018] The high-pressure chamber is composed of a metal shell and is provided with a reinforcing layer on the inner wall, and the stable pressure chamber is made of aluminum alloy and coaxially nested in the inside of the high-pressure chamber.

[0019] Preferably, the automatic adjusting mechanism comprises a piston head and a piston rod, the piston head is slidably sleeved at the bottom of the stable pressure chamber, the two ends of the piston head are respectively in contact with the gas in the high-pressure chamber and the stable pressure chamber, the piston rod is coaxially arranged in the stable pressure chamber and is slidably connected to the inside of the stable pressure chamber, a guide ring is arranged in the middle of the inside of the stable pressure chamber, one end of the piston rod is fixedly connected with the piston head, and the other end of the piston rod is slidably sleeved in the inside of the guide ring, a thread is arranged in the middle of the piston rod, a rotating rod is fixedly connected with a thread sleeve in the middle of the rotating rod, and the thread sleeve is threadedly connected with the piston rod.

[0020] Preferably, a pre-tightening spring is arranged in the inside of the stable pressure chamber, one end of the pre-tightening spring is fixedly connected with the inner wall of the stable pressure chamber, the other end of the pre-tightening spring is fixedly connected with the annular metal isolation plate, the pre-tightening spring drives the annular metal isolation plate to rotate, the elastic force of the pre-tightening spring is the same as the gravity of the piston head and the piston rod, so that the initial gas hole opening degree between the annular metal isolation plate and the rotating groove is maintained, at this time, the gas pressure between the stable pressure chamber and the high-pressure chamber is in static balance, and the initial state pressure difference is zero.

[0021] Compared with the prior art, the present application has the following beneficial effects:

[0022] Firstly, the gas supply device effectively solves the two technical problems of pressure fluctuation and uneven gas distribution existing in the traditional gas supply system during gas source switching. The device mainly comprises a main special gas tank, a standby special gas tank, a pre-charged buffer tank and a gas flow dispersion assembly. The main special gas tank and the standby special gas tank are connected with the pre-charged buffer tank through a pneumatic three-way valve, forming a double-gas-source gas supply system. When the pressure of the main special gas tank is insufficient, the pneumatic three-way valve automatically switches to the standby special gas tank. During this process, the pre-charged buffer tank preferentially releases the stored high-pressure gas, and continuously supplies gas to the coating cabin through the gas supply main pipe, completely avoiding the problem of pressure fluctuation caused by valve switching in the traditional design.

[0023] Secondly, the pre-charged buffer tank of the present application adopts coaxial double-chamber design, including high-pressure chamber of outer layer and pressure stabilizing chamber of inner layer, the high-pressure chamber is connected with the pneumatic three-way valve, the pressure stabilizing chamber is communicated with the coating cabin through the gas supply main pipe, the annular metal isolation plate is arranged in the pressure stabilizing chamber, and the automatic pressure balance is realized through the automatic adjusting mechanism; when the pressure of the high-pressure chamber changes, the piston head and the piston rod drive the annular metal isolation plate to rotate, the opening degree of the micro-porous area is adjusted, the millisecond pressure regulation is realized, and the gas supply pressure fluctuation is controlled within ±0.5% of the set value.

[0024] Thirdly, the gas supply main pipe of the present application introduces the special gas into the pneumatic sliding ring of the annular chute, drives the pneumatic blade to rotate the pneumatic sliding ring, the first guide vane group and the second guide vane group symmetrically arranged at both ends of the pneumatic sliding ring rotate with the sliding ring, generates centrifugal force in opposite directions, and uniformly disperses the special gas to both ends of the axial direction of the coating cabin. The normally closed valve on the standby pipeline is opened when the main special gas cabinet or the standby special gas cabinet fails, ensuring the continuity of gas supply.

[0025] Fourthly, through the cooperative work of the double-chamber design of the pre-charged buffer tank and the airflow dispersion assembly, the stability and uniformity of the special gas supply are realized, and the present application is especially suitable for ALD and other high-precision coating processes sensitive to gas pressure fluctuation, and the coating quality and product yield are significantly improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall connection structure of the device of the present application;

[0027] Figure 2 It is a schematic diagram of the connection structure of the pneumatic sliding ring and the coating cabin of the present application;

[0028] Figure 3 It is a schematic diagram of the Figure 2 enlarged structure of A of the present application;

[0029] Figure 4 It is a schematic diagram of the external structure of the coating cabin of the present application;

[0030] Figure 5 It is a schematic diagram of the structure of the pneumatic sliding ring of the present application;

[0031] Figure 6 It is a schematic diagram of the external structure of the pre-charged buffer tank of the present application;

[0032] Figure 7 It is a schematic diagram of the internal cross-sectional structure of the pre-charged buffer tank of the present application;

[0033] Figure 8 It is a schematic diagram of the structure of the annular metal isolation plate of the present application.

[0034] Wherein: 1, main special gas tank; 2, standby special gas tank; 3, special gas bottle; 4, pre-charged buffer tank; 5, pneumatic three-way valve; 6, gas supply main pipe; 7, first gas inlet pipe; 8, standby gas inlet pipe; 9, main gas inlet pipe; 11, three-way manifold; 12, standby pipeline; 13, normally closed valve; 14, pneumatic slip ring; 15, pneumatic vane; 16, annular chute; 17, bearing disc; 18, first guide vane group; 19, second guide vane group; 20, high-pressure chamber; 21, pressure stabilizing chamber; 22, annular metal isolation plate; 23, coated cabin; 24, rotating groove; 25, microporous area; 26, closed area; 30, piston rod; 31, piston head; 32, guide ring; 33, rotating rod; 34, threaded sleeve; 35, pre-tightening spring. DETAILED DESCRIPTION

[0035] The specific embodiments of the present application are described in detail below, but it should be understood that the scope of protection of the present application is not limited by the specific embodiments.

[0036] Example one:

[0037] Please refer to Figures 1-8 , the present application provides a technical solution:

[0038] A gas supply device for supplying special gas to a coated cabin, comprising a main special gas tank 1 and a standby special gas tank 2, both of which are used to supply special gas to the coated cabin 23, and both of which are connected to a gas supply mechanism, and the main special gas tank 1 and the standby special gas tank 2 are jointly connected to a pre-charged buffer tank 4, which is used for instantaneous gas supply buffering of the special gas; a pneumatic three-way valve 5 is installed between the main special gas tank 1 and the standby special gas tank 2 and the pre-charged buffer tank 4, and the pneumatic three-way valve 5 is used for switching the gas supply path of the special gas;

[0039] The pre-charged buffer tank 4 is fixedly connected to the inside of the coated cabin 23 through a gas supply main pipe 6, and the inside of the coated cabin 23 is provided with a gas flow dispersing assembly cooperating with the gas supply main pipe 6. The pre-charged buffer tank 4 is installed with a fixing seat at the bottom, which is used to keep the pre-charged buffer tank 4 stable.

[0040] In the above scheme, the main special gas tank 1 and the standby special gas tank 2 are connected to the pre-charged buffer tank 4 through the pneumatic three-way valve 5 to form a double-gas-source gas supply system. When the pressure of the main special gas tank 1 is insufficient, the pneumatic three-way valve 5 automatically switches to the standby special gas tank 2, and in this process, the pre-charged buffer tank 4 will preferentially release the stored high-pressure gas, continuously supplying gas to the coated cabin 23 through the gas supply main pipe 6, completely avoiding the gas pressure fluctuation problem caused by valve switching in the traditional design, and the double-chamber design of the pre-charged buffer tank 4 enables it to simultaneously realize high-pressure energy storage and pressure stabilizing output functions.

[0041] The gas supply mechanism comprises a first air inlet pipe 7 and a standby air inlet pipe 8, the first air inlet pipe 7 and the standby air inlet pipe 8 are communicated with a three-way manifold 11, the other end of the three-way manifold 11 is fixedly communicated with a main air inlet pipe 9, the other end of the main air inlet pipe 9 is fixedly communicated with a special gas cabinet air inlet end, the main air inlet pipe 9 and the standby air inlet pipe 8 are respectively connected with gas cylinders, which are used for switching the gas cylinders, the main and standby double gas cylinder design is adopted, and the gas supply continuity is ensured through electromagnetic valve switching. When the pressure of the main gas cylinder is insufficient, the system automatically switches to the standby gas cylinder.

[0042] A standby pipeline 12 is arranged between the main air inlet pipe 9 corresponding to the main special gas cabinet 1 and the standby special gas cabinet 2; a normally closed valve 13 is installed on the standby pipeline 12, in the normal working state, the normally closed valve 13 is in the closed state, and the independent stable work is maintained, when one of the main special gas cabinet 1 or the standby special gas cabinet 2 fails, the normally closed valve 13 is opened, the standby pipeline 12 is conducted, the special gas supply is avoided to be interrupted, and the stability and continuity of the special gas supply are ensured.

[0043] The airflow dispersion assembly comprises a pneumatic sliding ring 14 rotatably connected in the inner part of the coating cabin 23, a plurality of pneumatic blades 15 are distributed in the inner part of the pneumatic sliding ring 14 in a circular array mode, the air inlet of the gas supply main pipe 6 blows to the pneumatic blades 15, so as to drive the pneumatic sliding ring 14 to rotate, and meanwhile, when the pneumatic sliding ring 14 rotates, the entering special gas is dispersed in the inner part of the coating cabin 23 through the pneumatic blades 15.

[0044] An annular chute 16 is arranged in the middle part of the coating cabin 23, the pneumatic sliding ring 14 is rotatably connected in the inner part of the annular chute 16, a bearing disc 17 is arranged between the pneumatic sliding ring 14 and the annular chute 16, the gas supply main pipe 6 is tangentially communicated with the inner part of the annular chute 16, which is beneficial to the blowing of the special gas to the pneumatic blades 15, the annular chute 16 makes the pneumatic sliding ring 14 stably rotate, and the bearing disc 17 is used for reducing the resistance between the pneumatic sliding ring 14 and the annular chute 16, so that the rotation is smoother.

[0045] One end of the pneumatic sliding ring 14 located in the inner part of the coating cabin 23 is provided with a first guide vane group 18, the other end of the pneumatic sliding ring 14 located in the inner part of the coating cabin 23 is provided with a second guide vane group 19, the first guide vane group 18 and the second guide vane group 19 are symmetrically distributed at the two ends of the pneumatic sliding ring 14, the guide directions of the first guide vane group 18 and the second guide vane group 19 are opposite, the pneumatic sliding ring 14 drives the first guide vane group 18 and the second guide vane group 19 to rotate synchronously when rotating, the first guide vane group 18 and the second guide vane group 19 generate opposite wind forces, the special gas entering the pneumatic sliding ring 14 is dispersed to the two ends of the pneumatic sliding ring 14, the special gas is uniformly distributed in the coating cabin 23, and the uniform stability of the coating quality is ensured.

[0046] Through the above technical scheme, the gas supply main pipe 6 guides the special gas into the annular sliding groove 16 of the gas dynamic sliding ring 14, the high-speed airflow drives the circumferential array of gas dynamic blades 15 to rotate the gas dynamic sliding ring 14, and the first guide vane group 18 and the second guide vane group 19 symmetrically arranged at both ends of the gas dynamic sliding ring 14 generate centrifugal forces in opposite directions when the gas dynamic sliding ring 14 rotates, so that the entering special gas is uniformly dispersed to the axial both ends of the coating cabin 23. The design of the bearing disc 17 significantly reduces the rotation resistance between the gas dynamic sliding ring 14 and the annular sliding groove 16, and ensures the stability and uniformity of the gas dispersion.

[0047] The complete working principle of embodiment one is as follows: the main special gas cabinet 1 and the standby special gas cabinet 2 are connected with the pre-charged buffer tank 4 through the pneumatic three-way valve 5 to form a double-gas-source gas supply system, the main gas inlet pipe 9 and the standby gas inlet pipe 8 are respectively connected with the gas cylinder and connected with the special gas cabinet through the three-way manifold 11 for switching of the special gas cylinder 3; when the pressure of the main special gas cabinet 1 is insufficient, the pneumatic three-way valve 5 is automatically switched to the standby special gas cabinet 2, and in this process, the pre-charged buffer tank 4 preferentially releases the stored high-pressure gas, and continuously supplies the coating cabin 23 with gas through the gas supply main pipe 6, completely avoiding the gas pressure fluctuation problem caused by valve switching in the traditional design; the gas supply main pipe 6 guides the special gas into the annular sliding groove 16 of the gas dynamic sliding ring 14, the high-speed airflow drives the circumferential array of gas dynamic blades 15 to rotate the gas dynamic sliding ring 14, and the first guide vane group 18 and the second guide vane group 19 symmetrically arranged at both ends of the gas dynamic sliding ring 14 generate centrifugal forces in opposite directions when the gas dynamic sliding ring 14 rotates, so that the entering special gas is uniformly dispersed to the axial both ends of the coating cabin 23; when one of the main special gas cabinet 1 or the standby special gas cabinet 2 fails, the normally closed valve 13 on the standby pipeline 12 is opened to ensure the continuity of the special gas supply; the pre-charged buffer tank 4 realizes the functions of high-pressure energy storage and stable output through the design of its double-chamber, the fixed seat keeps the stable working state of the buffer tank, the bearing disc 17 reduces the rotation resistance between the gas dynamic sliding ring 14 and the annular sliding groove 16, and finally realizes the uniform and stable distribution of the special gas in the coating cabin 23, ensuring the quality and stability of the coating process.

[0048] Embodiment two:

[0049] Please refer to Figures 6-8 , and further obtain, according to embodiment one, that the pre-charged buffer tank 4 adopts a coaxial double-chamber design, including an outer cylindrical high-pressure chamber 20 and an inner stable pressure chamber 21, the top of the high-pressure chamber 20 is communicated with the end of the pneumatic three-way valve 5 away from the main special gas cabinet 1 and the standby special gas cabinet 2, for input of the special gas in the main special gas cabinet 1 and the standby special gas cabinet 2; the stable pressure chamber 21 is coaxially nested in the high-pressure chamber 20, and the outlet of the stable pressure chamber 21 is fixedly communicated with the coating cabin 23 through the gas supply main pipe 6;

[0050] The stable pressure chamber 21 is rotatably connected with an annular metal isolation plate 22 with a microporous structure inside, and an automatic adjusting mechanism is arranged between the high-pressure chamber 20 and the stable pressure chamber 21.

[0051] A rotating groove 24 is formed on the inner wall of the pressure stabilizing cavity 21, and the annular metal isolation plate 22 is rotationally connected to the inside of the rotating groove 24. The annular metal isolation plate 22 and the rotating groove 24 are both provided with a micropore area 25 and a closed area 26. When the micropore area 25 and the closed area 26 completely coincide, the opening degree is the largest. When the micropore area 25 and the closed area 26 are completely staggered, the opening degree is the smallest.

[0052] The high-pressure cavity 20 is composed of a metal shell and is provided with a reinforcing layer on the inner wall. The pressure stabilizing cavity 21 is made of aluminum alloy and is coaxially nested inside the high-pressure cavity 20.

[0053] The automatic adjusting mechanism includes a piston head 31 and a piston rod 30. The piston head 31 is slidingly sleeved at the bottom of the pressure stabilizing cavity 21. The two ends of the piston head 31 are respectively in contact with the gas in the high-pressure cavity 20 and the pressure stabilizing cavity 21. The piston rod 30 is coaxially arranged with the pressure stabilizing cavity 21 and is slidingly connected to the inside of the pressure stabilizing cavity 21. The middle part of the inside of the pressure stabilizing cavity 21 is provided with a guide ring 32. One end of the piston rod 30 is fixedly connected with the piston head 31. The other end of the piston rod 30 is slidingly sleeved in the inside of the guide ring 32. The middle part of the piston rod 30 is provided with a thread. The inside of the annular metal isolation plate 22 is fixedly connected with a rotating rod 33 along the meridian direction. The middle part of the rotating rod 33 is fixedly connected with a threaded sleeve 34. The threaded sleeve 34 is threadedly connected with the piston rod 30.

[0054] In the above scheme, the piston head 31 of the automatic adjusting mechanism is slidingly sleeved at the bottom of the pressure stabilizing cavity 21. The two ends are respectively in contact with the gas in the high-pressure cavity 20 and the pressure stabilizing cavity 21. When the pressure of the high-pressure cavity 20 rises, the gas pressure drives the piston head 31 to move towards the pressure stabilizing cavity 21, driving the piston rod 30 to slide along the guide ring 32. Since the middle part of the piston rod 30 is provided with a thread and is connected with the threaded sleeve 34 on the rotating rod 33 of the annular metal isolation plate 22, the linear motion of the piston rod 30 is converted into the rotary motion of the rotating rod 33, driving the annular metal isolation plate 22 to rotate in the rotating groove 24, increasing the coincidence degree of the micropore area 25 on the isolation plate 25 and the micropore area 25 of the rotating groove 24, increasing the opening degree, and accelerating the gas in the high-pressure cavity 20 to flow into the pressure stabilizing cavity 21.

[0055] Conversely, when the pressure of the pressure stabilizing cavity 21 is too high, the gas pressure drives the piston head 31 to move in the opposite direction, driving the annular metal isolation plate 22 to rotate in the opposite direction to reduce the opening degree. The pure mechanical structure in the above scheme automatically adjusts the opening degree of the micropore through the change of the gas pressure, solves the problem that the traditional electronic control system responds slowly and cannot realize millisecond-level pressure balance, ensures that the gas supply pressure of the film coating cabin 23 is stable within ±0.5%, the pressure of the special gas cylinder 3 is 12-15 MPa, and the working process gas supply pressure of the vacuum magnetron sputtering equipment is 0.2 MPa-0.5 MPa, that is, through the pressure reducing valve, the pressure of the special gas cylinder 3 is reduced to the above range, and when the gas source pressure gauge feedbacks that the pressure of the special gas cylinder 3 is lower than 0.2 MPa, the three-way electromagnetic valve should be switched to another special gas cylinder 3 for gas supply.

[0056] The pre-tightening spring 35 is arranged in the stable pressure cavity 21, one end of the pre-tightening spring 35 is fixedly connected with the inner wall of the stable pressure cavity 21, and the other end is fixedly connected with the annular metal isolation plate 22. The pre-tightening spring 35 pushes the annular metal isolation plate 22 to rotate. The elastic force of the pre-tightening spring 35 is the same as the gravity of the piston head 31 and the piston rod 30, so that the initial gas hole opening degree between the annular metal isolation plate 22 and the rotating groove 24 is maintained. At this time, the gas pressure between the stable pressure cavity 21 and the high pressure cavity 20 is in static balance, and the initial state pressure difference is zero.

[0057] Through the above technical scheme, one end of the pre-tightening spring 35 arranged in the stable pressure cavity 21 is fixed to the inner wall of the stable pressure cavity 21, and the other end is connected with the annular metal isolation plate 22. The elastic force of the pre-tightening spring 35 and the gravity of the piston and the piston rod 30 are balanced with each other, so that the initial gas hole opening degree between the annular metal isolation plate 22 and the rotating groove 24 is always maintained.

[0058] When the system is in a static balance state, the elastic force of the pre-tightening spring 35 accurately offsets the gravity of the piston system, ensuring that the initial pressure difference between the high pressure cavity 20 and the stable pressure cavity 21 is zero. When the gas supply pressure changes, the balance state is broken, and the elastic restoring force of the pre-tightening spring 35 will work together with the automatic adjusting mechanism to ensure the stability of the initial state of the system and provide auxiliary torque in the dynamic adjustment process, so that the rotation response of the annular metal isolation plate 22 is more sensitive and stable, thereby realizing accurate control of the gas flow.

[0059] The working principle of the second embodiment is as follows: the pre-charged buffer tank 4 adopts a coaxial double-chamber design, receives special gas from the main special gas tank 1 or the standby special gas tank 2 through the high pressure cavity 20, and supplies gas to the film coating cabin 23 through the stable pressure cavity 21 and the gas supply main pipe 6.

[0060] When the pressure in the high pressure cavity 20 rises, the gas pressure pushes the piston head 31 of the automatic adjusting mechanism to move, drives the piston rod 30 to slide, rotates the annular metal isolation plate 22 through threaded transmission, increases the coincidence degree of the micropore area 25, and accelerates the gas flow into the stable pressure cavity 21. Conversely, when the pressure in the stable pressure cavity 21 is too high, the gas pressure acts in the opposite direction to reduce the coincidence degree of the micropore area 25. The pre-tightening spring 35 balances with the gravity of the piston system, ensures that the initial state pressure difference is zero, and provides auxiliary adjusting torque when the pressure changes.

[0061] The design solves the problem of gas pressure fluctuation caused by electromagnetic valve delay when the traditional gas supply system switches the gas source. The scheme realizes millisecond pressure regulation through a pure mechanical structure, controls the gas supply pressure fluctuation within ±0.5% of the set value, ensures the gas pressure stability required by the film coating process, and ensures the uniform distribution of special gas in the film coating cabin 23 through the double-chamber design and the gas flow dispersion assembly, which meets the requirements of high-precision film coating process.

[0062] The above disclosed are only several specific embodiments of the present application, but the embodiments of the present application are not limited thereto, and any changes that can be thought of by those skilled in the art shall fall within the protection scope of the present application.

Claims

1. A gas supply device for supplying special gas to a coating cabin, comprising a main special gas tank (1) and a standby special gas tank (2), both of which are used for supplying special gas to a coating cabin (23), characterized in that: the main special gas tank (1) and the standby special gas tank (2) are both connected to a gas supply mechanism, the main special gas tank (1) and the standby special gas tank (2) are jointly connected to a pre-charged buffer tank (4) for instant gas supply buffering of the special gas; a pneumatic three-way valve (5) is installed between the main special gas tank (1) and the standby special gas tank (2) and the pre-charged buffer tank (4), and the pneumatic three-way valve (5) is used for switching the special gas supply gas path; the pre-charged buffer tank (4) is fixedly connected to the inside of the coating cabin (23) through a gas supply main pipe (6), and the coating cabin (23) is provided with an air flow dispersion assembly cooperating with the gas supply main pipe (6). The pre-charged buffer tank (4) adopts a coaxial double-chamber design, comprising an outer cylindrical high-pressure chamber (20) and an inner pressure stabilizing chamber (21), the top of the high-pressure chamber (20) is connected to one end of the pneumatic three-way valve (5) away from the main special gas tank (1) and the standby special gas tank (2), and is used for inputting the special gas inside the main special gas tank (1) and the standby special gas tank (2); The pressure stabilizing chamber (21) is coaxially nested inside the high-pressure chamber (20), and the outlet of the pressure stabilizing chamber (21) is fixedly connected to the coating cabin (23) through the gas supply main pipe (6); The pressure stabilizing chamber (21) is rotatably connected to an annular metal isolation plate (22) with a microporous structure inside, and an automatic adjusting mechanism is provided between the high-pressure chamber (20) and the pressure stabilizing chamber (21); A rotating groove (24) is formed on the inner wall of the pressure stabilizing chamber (21), and the annular metal isolation plate (22) is rotatably connected to the inside of the rotating groove (24), and microporous areas (25) and closed areas (26) are formed on the annular metal isolation plate (22) and the rotating groove (24), when the microporous areas (25) and the closed areas (26) completely overlap, the opening degree is the largest, and when the microporous areas (25) and the closed areas (26) are completely staggered, the opening degree is the smallest; The automatic adjusting mechanism comprises a piston head (31) and a piston rod (30), the piston head (31) is slidably sleeved at the bottom of the pressure stabilizing chamber (21), the two ends of the piston head (31) are respectively in contact with the gas in the high-pressure chamber (20) and the pressure stabilizing chamber (21), the piston rod (30) is coaxially arranged with the pressure stabilizing chamber (21), and the piston rod (30) is slidably connected inside the pressure stabilizing chamber (21), and a guide ring (32) is arranged in the middle of the pressure stabilizing chamber (21); One end of the piston rod (30) is fixedly connected with the piston head (31), the other end is slidably sleeved in the guide ring (32), a thread is arranged in the middle of the piston rod (30), an inner thread sleeve (34) is fixedly connected to the middle of the annular metal isolation plate (22) along the meridian direction, and a threaded sleeve (34) is fixedly connected to the middle of the annular metal isolation plate (22) along the meridian direction. A fixing seat is installed at the bottom of the pre-charged buffer tank (4), and the fixing seat is used to keep the pre-charged buffer tank (4) stable.

2. The gas supply device for supplying special gas to a coating chamber according to claim 1, wherein: ​ 3. The gas supply device for supplying special gas to a coating chamber according to claim 1, wherein: The air supply mechanism comprises a first air inlet pipe (7) and a standby air inlet pipe (8), the first air inlet pipe (7) and the standby air inlet pipe (8) are communicated with a three-way manifold (11) in common, the other end of the three-way manifold (11) is fixedly communicated with a main air inlet pipe (9), and the other end of the main air inlet pipe (9) is fixedly communicated with an air inlet end of the special gas cabinet.

4. The gas supply device for supplying special gas to a coating chamber according to claim 3, wherein: A standby pipeline (12) is arranged between the main air inlet pipes (9) corresponding to the main special gas cabinet (1) and the standby special gas cabinet (2); and a normally closed valve (13) is installed on the standby pipeline (12).

5. The gas supply device for supplying special gas to a coating chamber according to claim 1, wherein: The airflow dispersing assembly comprises a pneumatic sliding ring (14) rotatably connected in the film-coating cabin (23), and pneumatic blades (15) are arranged in a circumferential array in the pneumatic sliding ring (14).

6. The gas supply device for supplying a special gas to a coating chamber according to claim 5, wherein: An annular sliding groove (16) is arranged in the middle of the film-coating cabin (23), the pneumatic sliding ring (14) is rotatably connected in the annular sliding groove (16), a bearing disc (17) is arranged between the pneumatic sliding ring (14) and the annular sliding groove (16), and the air supply main pipe (6) is tangentially communicated with the annular sliding groove (16).

7. The gas supply device for supplying a special gas to a coating chamber according to claim 6, wherein: A first guide vane group (18) is arranged at one end of the pneumatic sliding ring (14) in the film-coating cabin (23), a second guide vane group (19) is arranged at the other end of the pneumatic sliding ring (14) in the film-coating cabin (23), the first guide vane group (18) and the second guide vane group (19) are symmetrically arranged at the two ends of the pneumatic sliding ring (14), and the guide directions of the first guide vane group (18) and the second guide vane group (19) are opposite.

8. The gas supply device for supplying a special gas to a coating chamber according to claim 1, wherein: The high-pressure cavity (20) is composed of a metal shell and is provided with a reinforcing layer on the inner wall, and the pressure stabilizing cavity (21) is made of an aluminum alloy and coaxially nested in the high-pressure cavity (20).

9. The gas supply device for supplying a special gas to a coating chamber according to claim 1, wherein: The pressure stabilizing cavity (21) is provided with a pre-tightening spring (35), one end of the pre-tightening spring (35) is fixedly connected with the inner wall of the pressure stabilizing cavity (21), the other end is fixedly connected with the annular metal isolation plate (22), the pre-tightening spring (35) pushes the annular metal isolation plate (22) to rotate, the elastic force of the pre-tightening spring (35) is the same as the gravity of the piston head (31) and the piston rod (30), so that the initial air hole opening degree between the annular metal isolation plate (22) and the rotating groove (24) is maintained, at this time, the air pressure between the pressure stabilizing cavity (21) and the high-pressure cavity (20) is in static balance, and the initial state pressure difference is zero.

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