A method, system, device and storage medium for identifying a jitter factor of a motor

Abstract

This invention relates to the field of motor technology, specifically to a method, system, device, and storage medium for identifying motor vibration factors. The method involves adjusting the air pressure of an air-floating platform according to preset air pressure adjustment parameters to obtain the platform's air pressure adjustment state; controlling a motor encoder to measure motor vibration to obtain a first static vibration amplitude; controlling the motor encoder to measure motor vibration again according to the first static vibration amplitude and a preset first measurement cycle to obtain a second static vibration amplitude; analyzing the second static vibration amplitude using a preset Fast Fourier Transform (FFT) algorithm and a preset frequency threshold range to obtain vibration factors; reducing air pressure fluctuation interference through precise pressure control; collecting environmental baseline and operating condition data in stages; and accurately identifying multi-source vibration causes using an FFT algorithm combined with frequency thresholds, thereby improving vibration identification accuracy, shortening troubleshooting cycles, reducing debugging costs, and adapting to precision manufacturing.

Description

Technical Field

[0001] This invention relates to the field of motor technology, and specifically to a method, system, device, and storage medium for identifying motor vibration factors. Background Technology

[0002] Existing technologies for static vibration testing and optimization of high-precision motion platforms suffer from widespread technical deficiencies, making them unsuitable for applications such as precision manufacturing, semiconductor processing, and optical inspection. For example, they often overlook the coupled impact of air pressure fluctuations on platform support stability and vibration transmission; vibration measurements lack phased control logic, resulting in fragmented and unrepresentative data that fails to reflect dynamic vibration patterns; vibration factor analysis methods are rudimentary, relying heavily on intuitive observations or simple threshold judgments, failing to accurately distinguish between multiple causes such as air pressure imbalance, mechanical drag (e.g., cable chains), and environmental interference; and the solutions are overly generic, lacking specific optimization strategies based on individual vibration factors, resulting in poor adaptability and difficulty in addressing vibration issues under different operating conditions, thus hindering improvements in the platform's static accuracy. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the present invention aims to provide a method, system, device and storage medium for identifying motor vibration factors.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: The present invention provides a method for identifying motor vibration factors, applied to a motor vibration factor identification system. The motor vibration factor identification system includes a motor, an air-bearing platform, and a motor encoder. The motor and the motor encoder are both mounted on the air-bearing platform, and the output end of the motor is connected to the motor encoder. The motor vibration factor identification method includes: adjusting the air pressure of the air-bearing platform according to preset air pressure adjustment parameters to obtain a platform air pressure adjustment state; controlling the motor encoder to measure the vibration of the motor in the platform air pressure adjustment state to obtain a first static vibration amplitude; controlling the motor encoder to measure the vibration of the motor according to the first static vibration amplitude and a preset first measurement cycle to obtain a second static vibration amplitude; analyzing the second static vibration amplitude according to a preset fast Fourier algorithm and a preset frequency threshold range to obtain vibration factors; and generating a vibration response plan based on the vibration factors.

[0005] Furthermore, the motor vibration factor identification system also includes an air bearing and a marble slab. The air bearing is mounted on the marble slab, and the air platform is mounted on the air bearing. The control motor encoder measures the motor vibration to obtain a first static vibration amplitude, including: acquiring the contact force between the air bearing and the marble slab; determining whether the contact force is greater than a preset contact force threshold; when the contact force is greater than the contact force threshold, acquiring the motor's enabled state; performing state analysis on the enabled state; when the enabled state is an unenabled state, controlling the motor encoder to measure the motor vibration according to a preset second measurement cycle to obtain the first static vibration amplitude.

[0006] Further, the step of controlling the motor encoder to measure the vibration of the motor according to the first static vibration amplitude and a preset first measurement cycle to obtain the second static vibration amplitude includes: controlling the air bearing to perform a pressure increase operation according to the first static vibration amplitude and a preset air pressure increase condition to obtain a first air pressure adjustment state; in the first air pressure adjustment state, controlling the air bearing to perform an air pressure adjustment operation according to the first measurement cycle to obtain a second air pressure adjustment state; in the second air pressure adjustment state, controlling the motor encoder to measure the vibration of the motor to obtain the second static vibration amplitude.

[0007] Further, the step of controlling the air bearing to perform a pressure boosting operation based on the first static vibration amplitude and preset air pressure boosting conditions to obtain the first air pressure regulation state includes: calculating the first static vibration amplitude according to a preset ratio to obtain a vibration amplitude threshold; acquiring the ambient vibration amplitude and determining whether the ambient vibration amplitude is less than the vibration amplitude threshold; when the ambient vibration amplitude is less than the vibration amplitude threshold, controlling the motor to switch states according to preset upper enable parameters to obtain an upper enable state; in the upper enable state, controlling the air bearing to perform a pressure boosting operation based on the air pressure boosting conditions, a preset air pressure range, and a preset boosting frequency to obtain the first air pressure regulation state.

[0008] Furthermore, the step of controlling the air bearing to perform air pressure adjustment operation according to the first measurement cycle to obtain the second air pressure adjustment state includes: controlling the motor encoder to perform vibration measurement on the motor according to the first measurement cycle to obtain the third static vibration amplitude; performing feature analysis on the third static vibration amplitude to obtain the minimum amplitude value; mapping the minimum amplitude value to obtain the air pressure adjustment value; and controlling the air bearing to perform air pressure adjustment operation according to the air pressure adjustment value to obtain the second air pressure adjustment state.

[0009] Furthermore, in the second air pressure regulation state, controlling the motor encoder to measure the vibration of the motor to obtain the second static vibration amplitude includes: in the second air pressure regulation state, acquiring the motor PID parameters and filter parameters; adjusting the motor PID parameters and filter parameters according to preset adjustment parameters to obtain motor parameters; controlling the motor to operate according to preset optimal conditions and motor parameters; and in the motor operating state, controlling the motor encoder to measure the vibration of the motor according to a preset third measurement cycle to obtain the second static vibration amplitude.

[0010] Furthermore, the step of analyzing the second stationary jitter amplitude according to a preset fast Fourier algorithm and a preset frequency threshold range to obtain jitter factors includes: processing the second stationary jitter amplitude according to the fast Fourier algorithm to obtain an FFT graph; performing feature analysis on the FFT graph to obtain vibration peak frequency features; and analyzing the vibration peak frequency features according to the frequency threshold range to obtain jitter factors.

[0011] Furthermore, a motor vibration factor identification system executes the steps of a motor vibration factor identification method as described in any one of the above descriptions. The motor vibration factor identification system includes a control device, a marble, an air bearing electrically connected to the control device, a motor, an air bearing platform, and a motor encoder. The output end of the motor is connected to the motor encoder. Both the motor and the motor encoder are mounted on the air bearing platform. The air bearing platform is mounted on the air bearing, and the air bearing is mounted on the marble.

[0012] Furthermore, a motor vibration factor identification device includes: a memory and at least one processor, wherein the memory stores instructions; the at least one processor invokes the instructions in the memory to cause the motor vibration factor identification device to perform the various steps of the motor vibration factor identification method as described in any one of the above descriptions.

[0013] Furthermore, a computer-readable storage medium stores instructions that, when executed by a processor, implement the steps of a motor vibration factor identification method as described in any one of the above descriptions.

[0014] In the technical solution of this invention, precise pressure control is achieved by adjusting air pressure parameters in conjunction with an air pressure regulating valve, reducing the interference of air pressure fluctuations on vibration transmission. Data is collected in stages: first, environmental interference benchmarks (first static vibration amplitude) are obtained through a motor encoder, and then comprehensive data (second static vibration amplitude) that fits the actual working conditions are collected. By using a fast Fourier transform algorithm to achieve time-domain to frequency-domain analysis, and combining the frequency threshold range, multiple causes such as cable chain dragging and flatness deviation are accurately distinguished, and customized optimization strategies are generated to improve the overall vibration recognition accuracy, shorten the troubleshooting cycle, reduce debugging costs, and adapt to high-end scenarios such as precision manufacturing. Attached Figure Description

[0015] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0016] Figure 1 A first flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0017] Figure 2 This is a second flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0018] Figure 3 A third flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0019] Figure 4 A fourth flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0020] Figure 5 A fifth flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0021] Figure 6 A sixth flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0022] Figure 7 The seventh flowchart of a method for identifying motor vibration factors provided in an embodiment of the present invention;

[0023] Figure 8 This is a schematic diagram of the structure of a motor vibration factor identification system provided in an embodiment of the present invention;

[0024] Figure 9 This is a schematic diagram of the structure of a motor vibration factor identification device provided in an embodiment of the present invention.

[0025] Figure Labels

[0026] 1-Control device; 2-Marble; 3-Air bearing; 4-Motor; 5-Air platform; 6-Motor encoder. Detailed Implementation

[0027] The terms "first," "second," "third," "fourth," etc. (if present) in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" or "having" and any variations thereof are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0028] A method for identifying motor vibration factors is provided, applied to a motor vibration factor identification system. The system includes a motor, an air-bearing platform, and a motor encoder. Both the motor and the encoder are mounted on the air-bearing platform. The output terminal of the motor is connected to the encoder. For ease of understanding, the specific process of this embodiment is described below. Please refer to [link to relevant documentation]. Figure 1 One embodiment of a method for identifying motor vibration factors according to the present invention includes:

[0029] 101. Adjust the air pressure of the air flotation platform according to the preset air pressure adjustment parameters to obtain the air pressure adjustment status of the platform;

[0030] In this embodiment, the air pressure of the air flotation platform is adjusted according to air pressure regulation parameters (such as the air pressure zeroing threshold, the opening command of the regulating valve, the pressure relief rate, and the pressure increase rate). For example, the air pressure of the air flotation platform can be adjusted to zero by adjusting the air pressure of the air flotation platform through the air pressure regulating valve.

[0031] 102. Under the condition of platform air pressure adjustment, control the motor encoder to measure the vibration of the motor to obtain the first static vibration amplitude;

[0032] In this embodiment, the motor encoder can capture the tiny vibration displacement of the motor, adapting to the vibration measurement requirements of high-precision motion platforms (such as semiconductor processing and optical inspection equipment).

[0033] 103. Based on the first static jitter amplitude and the preset first measurement cycle, control the motor encoder to measure the jitter of the motor to obtain the second static jitter amplitude;

[0034] In this embodiment, a 220V AC power supply is used to provide the working voltage for the test system; during the continuous acquisition time of 6 seconds, the motor encoder acquires jitter measurement data at a first measurement cycle of 30ms (i.e., every 30ms interval);

[0035] 104. Analyze the second stationary jitter amplitude according to the preset fast Fourier algorithm and the preset frequency threshold range to obtain the jitter factors;

[0036] In this embodiment, the time-domain data of the second static jitter amplitude is transformed into frequency-domain features by the Fast Fourier Transform algorithm. Combined with the preset frequency threshold range, the vibration peaks are accurately analyzed, multi-source jitter causes are efficiently distinguished, the accuracy of jitter factor identification is improved, a reliable basis is provided for subsequent customized optimization, and the problem investigation cycle is shortened.

[0037] 105. Generate jitter response plans based on jitter factors;

[0038] In this embodiment, if the jitter factor is the drag force of the cable chain affecting static jitter, a jitter response plan needs to be generated to replace it with a cable chain that does not exert drag on the motion module. If the jitter factor is the marble's flatness not meeting standards, a jitter response plan needs to be generated to measure the marble's flatness, identify the areas with unacceptable flatness, and repair them. If the jitter factor is the presence of a vibration frequency spike at a 50Hz harmonic, a jitter response plan needs to be generated to replace the AC power filter with one of higher filter levels and the DC power supply with one of more stable output voltage.

[0039] In this embodiment, precise pressure control is achieved by adjusting air pressure parameters in conjunction with an air pressure regulating valve, reducing the interference of air pressure fluctuations on vibration transmission. Data is collected in stages: first, environmental interference baseline (first static vibration amplitude) is obtained through a motor encoder, and then comprehensive data (second static vibration amplitude) that fits the actual working conditions is collected. By using a fast Fourier transform algorithm to achieve time-domain to frequency-domain analysis, and combining the frequency threshold range, multiple causes such as cable chain dragging and flatness deviation are accurately distinguished, and customized optimization strategies are generated to improve the overall vibration recognition accuracy, shorten the troubleshooting cycle, reduce debugging costs, and adapt to high-end scenarios such as precision manufacturing.

[0040] The motor vibration factor identification system also includes an air bearing and a marble slab. The air bearing is mounted on the marble slab, and the air-bearing platform is mounted on the air bearing. (See also...) Figure 2 In a second embodiment of the method for identifying motor vibration factors according to the present invention, step 102 specifically includes:

[0041] 201. Obtain the contact force between the air bearing and the marble;

[0042] In this embodiment, for example, the air pressure of the air flotation platform is adjusted to zero, allowing the air bearing to directly contact the marble. At this moment, the contact force between the air bearing and the marble must be greater than zero. The contact force threshold is usually 1-3N, which verifies the effectiveness of the contact.

[0043] 202. Determine whether the contact force is greater than the preset contact force threshold;

[0044] 203. When the contact force is greater than the contact force threshold, the motor's enable state is obtained;

[0045] In this embodiment, the core function of the air flotation platform is to form an air film through air pressure to reduce motion friction and buffer external vibration. However, the goal of this embodiment is to measure the impact of pure environmental vibration on the motor. If the air film is retained, the environmental vibration will be attenuated by the air film and cannot truly reflect its actual vibration intensity. Therefore, zeroing the air pressure is the key operation to cut off the buffering effect of the air film, ensuring that the environmental vibration can be fully transmitted to the motor through the rigid contact between the marble and the bearing, providing a pure vibration transmission path without buffer for subsequent measurements.

[0046] 204. Perform state analysis on the enabling state;

[0047] 205. When the enable state is disabled, the motor encoder is controlled to measure the motor jitter according to the preset second measurement cycle to obtain the first static jitter amplitude.

[0048] In this embodiment, a 220V AC power supply is used to provide the working voltage for the test system. During the 6-second acquisition period, the motor encoder acquires jitter measurement data at a second measurement cycle of 10ms (i.e., every 10ms interval), and generates the first static jitter amplitude based on the jitter measurement data. The motor is not enabled. By observing the static jitter amplitude of the motor measured by the motor encoder at a measurement cycle of 10 seconds on the oscilloscope, the amplitude of the static jitter caused by environmental vibration is measured to obtain the first static jitter amplitude. At this time, the air bearing is de-aired and the motor is disabled, so the vibration effect of environmental jitter on the motor can be analyzed.

[0049] In this embodiment, by zeroing the air pressure of the air-bearing platform and verifying the 1-3N contact force threshold, the rigid contact between the air-bearing bearing and the marble is ensured, cutting off the air film buffering effect and allowing the environmental vibration energy to be fully transferred to the motor, avoiding data distortion caused by vibration attenuation. At the same time, the measurement is only started when the motor is not enabled, isolating the electrical jitter interference of the motor itself, realizing single-variable testing. Combined with the high-precision capture of the motor encoder and the visualization verification of the oscilloscope, the reliability of the data is ensured. The first static jitter amplitude generated at the end provides a pure benchmark for distinguishing between the equipment's own jitter and environmental interference, improving the accuracy of subsequent jitter factor identification, adapting to the needs of high-precision scenarios such as semiconductor processing, reducing the cost of ineffective debugging, and shortening the overall optimization cycle.

[0050] Please see Figure 3 In a third embodiment of the method for identifying motor vibration factors according to the present invention, step 103 specifically includes:

[0051] 301. Control the air bearing to perform a pressure boosting operation based on the first static shaking amplitude and the preset air pressure boosting conditions to obtain the first air pressure regulation state;

[0052] In this embodiment, the first static jitter amplitude is used as a reference, and the air bearing is pressurized according to the preset air pressure increase conditions to form the first air pressure regulation state. This is in line with the actual working conditions of the motor, and can fully traverse the effective air pressure range, laying the foundation for locking the optimal air pressure and reducing hardware jitter, improving data reliability and motor operation stability, and adapting to the needs of precision equipment.

[0053] 302. In the first air pressure regulation state, the air bearing is controlled to perform air pressure regulation operation according to the first measurement cycle to obtain the second air pressure regulation state.

[0054] 303. Under the second air pressure regulation state, control the motor encoder to measure the vibration of the motor to obtain the second static vibration amplitude;

[0055] In this embodiment, the first static vibration amplitude, after environmental interference has been eliminated, is used as a reference. The air bearing is gradually pressurized according to the preset air pressure increase conditions to form the first air pressure regulation state. This design closely matches the actual working conditions of the motor, can traverse the effective air pressure range, avoids blindly adjusting the air pressure, improves the reliability of subsequent vibration measurement data, effectively ensures the authenticity of the data, and enhances the stability of motor operation. It adapts to the stringent requirements of precision equipment for motor stability, laying a high-quality preliminary foundation for the overall vibration factor identification and optimization process.

[0056] Please see Figure 4 In the fourth embodiment of the method for identifying motor vibration factors according to the present invention, step 301 specifically includes:

[0057] 401. Calculate the first static jitter amplitude according to the preset ratio to obtain the jitter amplitude threshold;

[0058] In this embodiment, the preset ratio is one-tenth;

[0059] 402. Obtain the ambient vibration amplitude and determine whether the ambient vibration amplitude is less than the jitter amplitude threshold;

[0060] 403. When the ambient vibration amplitude is less than the jitter amplitude threshold, the motor is controlled to switch states according to the preset upper enable parameters to obtain the upper enable state.

[0061] In this embodiment, if the environmental vibration is only one-tenth of the amplitude of the first static shaking, it can be ignored. If the environmental vibration is greater than one-tenth of the amplitude of the first static shaking, the vibration problem needs to be addressed. For example, an active or passive vibration isolation system can be added to the bottom of the system to filter out low-frequency vibrations transmitted from the ground; a baffle can be added around the air flotation platform to filter out the shaking caused by airflow; after the environmental test meets the standards, the motor is switched to the working ready state according to the preset enable parameters. Enabling the motor is a prerequisite for its normal operation. Only in this state can changes in air pressure be controlled. The impact on motor vibration is consistent with the actual application scenario, ensuring that the subsequent correlation analysis between air pressure and vibration is of practical significance. The upper enable parameter is a key configuration for controlling the motor to switch from the non-working state to the working ready state after the environmental vibration meets the standard (≤ one-tenth of the first static vibration amplitude). Its core function is to ensure that the motor enters the normal working pre-state that can respond to commands. The upper enable parameter includes key parameters related to power supply basis (voltage, current, etc.), enable control signal (type, port, etc.), safety interlock parameters (environment, equipment status threshold) and status confirmation (feedback signal, delay).

[0062] 404. In the enabled state, the air bearing is controlled to perform pressure boosting operation according to the air pressure boosting conditions, the preset air pressure range and the preset boosting frequency to obtain the first air pressure regulation state.

[0063] In this embodiment, the boost frequency is, for example, 0.5 MPa, and the air pressure range is obtained from the technical manual. The air pressure boosting condition is that, in the enabled state, the minimum air pressure in the air pressure range is used as a reference, and the boost frequency is 0.5 MPa. The air pressure of the air bearing is gradually increased until the maximum air pressure in the air pressure range is reached.

[0064] In this embodiment, one-tenth of the first static vibration amplitude is used as the threshold to judge environmental vibration. External interference is pre-processed to prevent it from masking the vibration problem of the platform itself, ensuring the authenticity and reliability of subsequent data. After the environment meets the standard, the motor is precisely switched to the working ready state by using the enable parameters, which include power supply foundation, control signals, safety interlocks and status confirmation. This ensures that the correlation analysis between air pressure and vibration fits the actual application scenario. After the motor is enabled, the air pressure range in the technical manual is used as the basis, and the pressure is gradually increased at a frequency of 0.5 MPa to achieve a comprehensive traversal of the air pressure range. This provides complete data support for selecting the optimal air pressure, improves testing efficiency and versatility, reduces ineffective costs, and lays a solid foundation for the accurate identification and response to vibration factors.

[0065] Please see Figure 5 The fifth embodiment of a method for identifying motor vibration factors in this invention includes step 302, which specifically includes:

[0066] 501. Control the motor encoder to measure the motor's vibration according to the first measurement cycle, so as to obtain the third static vibration amplitude;

[0067] In this embodiment, a 220V AC power supply is used to provide the working voltage for the test system. During the 6-second acquisition period, the motor encoder acquires jitter measurement data at a first measurement cycle of 30ms (i.e., every 30ms interval), and generates a third static jitter amplitude based on the jitter measurement data, providing basic data for subsequent screening of the minimum amplitude value. By acquiring the amplitude through the motor encoder, relying on its high-precision position feedback capability, the accuracy of the amplitude data is ensured, providing high-quality basic data for subsequent feature analysis.

[0068] 502. Perform characteristic analysis on the third static jitter amplitude to obtain the minimum amplitude value;

[0069] 503. Obtain the air pressure regulation value by mapping the minimum amplitude value;

[0070] In this embodiment, there is a clear quantitative correlation between amplitude and air pressure, and the minimum amplitude value corresponds to a unique air pressure parameter during the measurement process;

[0071] 504. Control the air bearing to perform air pressure adjustment operation according to the air pressure adjustment value to obtain the second air pressure adjustment state;

[0072] In this embodiment, the minimum amplitude, which corresponds to the minimum static vibration, is the most suitable air pressure value (i.e., the air pressure adjustment value). The air pressure of the air bearing is adjusted to the most suitable air pressure value. The air pressure regulating valve controls the valve opening and closing size through analog signal control, which can control the air pressure in the air bearing air circuit.

[0073] In this embodiment, based on the first measurement cycle and relying on the high-precision position feedback capability of the motor encoder, the accuracy and reliability of the third static jitter amplitude data are ensured, providing a high-quality foundation for subsequent analysis. The minimum amplitude value is screened through feature analysis, and the optimal air pressure adjustment value is mapped by combining the quantitative correlation between amplitude and air pressure. Then, the air pressure regulating valve controlled by analog quantity is precisely adjusted to achieve the optimal air pressure configuration of the air bearing, reduce the static jitter of the motor, and improve the adjustment accuracy and efficiency, laying a stable foundation for subsequent parameter optimization and full-stroke testing.

[0074] Please see Figure 6 In the sixth embodiment of the method for identifying motor vibration factors in this invention, step 303 specifically includes:

[0075] 601. Under the second air pressure regulation state, obtain the motor PID parameters and filter parameters;

[0076] In this embodiment, under the second air pressure regulation state (optimal air pressure), the current PID parameters and filter parameters of the motor are first obtained. The optimal air pressure solves the jitter problem at the hardware support level, while the motor PID parameters directly affect the dynamic response accuracy of the motor, and the filter parameters are related to the power supply interference suppression effect. The regulation parameters are key configurations used to optimize the motor's operating state, mainly including the motor PID parameters (proportional coefficient, integral coefficient, derivative coefficient), filter parameters (low-pass filter cutoff frequency, notch filter parameters), as well as the filter level adapted to the 3-level power supply filter, high-frequency interference suppression threshold, etc. The core function is to reduce jitter, filter high-frequency power supply interference, and enable the motor to reach a state of minimum static jitter.

[0077] 602. Adjust the motor PID parameters and filter parameters according to the preset adjustment parameters to obtain the motor parameters;

[0078] In this embodiment, the adjustment parameters are key configurations used to optimize the motor PID parameters and filter parameters. They mainly include PID adjustment terms (adjustment range and step size of proportional coefficient, integral coefficient, and derivative coefficient), filter adjustment terms (low-pass filter cutoff frequency, notch filter parameters), and the number of filter stages and high-frequency interference suppression threshold adapted to the 3-stage power supply filter. The 3-stage power supply filter can be adjusted according to the adjusted filter parameters. Using a multi-stage AC power supply filter can effectively filter high-frequency interference from the incoming power supply, which is also a type of static jitter excitation source.

[0079] 603. Control the motor to operate according to the preset optimal conditions and motor parameters;

[0080] In this embodiment, the optimal condition is to control the motor's operating state according to the motor parameters until the motor's static vibration amplitude is minimized.

[0081] 604. When the motor is running, the motor encoder is controlled to measure the vibration of the motor according to the preset third measurement cycle to obtain the second static vibration amplitude.

[0082] In this embodiment, while the motor is in operation, the motor encoder is controlled to measure and record the static jitter amplitude at each position along the entire stroke of the motor in a third measurement cycle (e.g., the third measurement cycle is 20mm interval) to obtain the second static jitter amplitude.

[0083] In this embodiment, based on the hardware support of optimal air pressure, the motor PID parameters and filter parameters are accurately acquired and adjusted, and the number of stages and high-frequency suppression threshold of the 3-stage power filter are simultaneously adapted to effectively filter high-frequency interference from the incoming power supply. The jitter is further reduced from the software control and interference suppression level. The calibration is based on the minimum static jitter amplitude as the optimal condition. Then, the jitter data at each position is fully captured through full-stroke measurements at 20mm intervals. The overall process is standardized and repeatable, which not only solves the pain point of the limited effect of single optimization methods, but also improves the data accuracy and motor operation stability, laying a solid foundation for the subsequent accurate positioning and targeted treatment of jitter factors.

[0084] Please see Figure 7 The seventh embodiment of a method for identifying motor vibration factors according to the present invention includes step 104, which specifically includes:

[0085] 701. Process the second stationary jitter amplitude according to the Fast Fourier Transform algorithm to obtain the FFT plot;

[0086] In this embodiment, the second static jitter amplitude is the time-domain data of the motor at various positions in the third measurement cycle. It can only reflect the jitter intensity at different positions and cannot distinguish the frequency source of the jitter. However, the FFT algorithm can decompose the complex time-domain signal into a superposition of sine waves of different frequencies. The intensity distribution of each frequency component can be presented intuitively through the FFT graph, making the frequency characteristics hidden in the time-domain data explicit. Different jitter factors (such as mechanical drag and flatness deviation) will correspond to vibration signals of specific frequencies, providing a traceable data basis for subsequent root cause analysis.

[0087] 702. Perform feature analysis on the FFT plot to obtain the vibration peak frequency characteristics;

[0088] 703. Analyze the characteristics of vibration peak frequencies based on the frequency threshold range to obtain the jitter factors;

[0089] In this embodiment, the frequency threshold range is 30Hz-50Hz. By analyzing the vibration frequency spikes on the FFT graph, the factors affecting stationary jitter at each location can be identified. For example, the difference in drag force of the drag chain cable on the motor at different locations will affect the amplitude of stationary jitter. If the flatness of the marble is not up to standard at a specific location, it will produce dense spikes in the 30-50Hz range on the FFT graph. The stationary jitter amplitude on the oscilloscope and the vibration spike frequency of the FFT graph can be analyzed to find the cause of the stationary jitter and solve it.

[0090] In this embodiment, to address the limitation that the second static jitter amplitude can only reflect the jitter intensity, a Fast Fourier Transform (FFT) algorithm is used to convert it into an FFT graph, making the hidden frequency features explicit and effectively distinguishing different jitter sources. With 30Hz-50Hz as the targeted frequency threshold range, by analyzing the vibration peak frequency characteristics in the FFT graph, jitter factors at each location can be accurately identified. Combined with cross-verification of jitter amplitude using an oscilloscope, the jitter factors can be pinpointed, shortening the problem-solving cycle, adapting to the working conditions of precision equipment, effectively reducing motor static jitter, and improving operational stability and positioning accuracy.

[0091] The above describes a method for identifying motor vibration factors in an embodiment of the present invention. The following describes a system for identifying motor vibration factors in an embodiment of the present invention. Please refer to [link to relevant documentation]. Figure 8 One embodiment of the motor vibration factor identification system of the present invention includes:

[0092] A motor vibration factor identification system executes the steps of a motor vibration factor identification method as described in any one of the above descriptions. The motor vibration factor identification system includes a control device 1, a marble 2, an air bearing 3 electrically connected to the control device 1, a motor 4, an air bearing platform 5, and a motor encoder 6. The output end of the motor 4 is connected to the motor encoder 6. The motor 4 and the motor encoder 6 are both mounted on the air bearing platform 5. The air bearing platform 5 is mounted on the air bearing 3, and the air bearing 3 is mounted on the marble 2.

[0093] Figure 9This is a schematic diagram of the structure of a motor vibration factor identification device 900 provided in an embodiment of the present invention. This motor vibration factor identification device 900 can vary significantly due to different configurations or performance. It may include one or more central processing units (CPUs) 910 (e.g., one or more processors) and a memory 920, and one or more storage media 930 (e.g., one or more mass storage devices) storing application programs 933 or data 932. The memory 920 and storage media 930 can be temporary or persistent storage. The program stored in the storage media 930 may include one or more modules (not shown in the diagram), each module may include a series of instruction operations on the motor vibration factor identification device 900. Furthermore, the processor 910 may be configured to communicate with the storage media 930 and execute a series of instruction operations in the storage media 930 on the motor vibration factor identification device 900 to implement the steps of the motor vibration factor identification method provided in the above-described method embodiments.

[0094] A motor vibration factor identification device 900 may further include one or more power supplies 940, one or more wired or wireless network interfaces 950, one or more input / output interfaces 960, and / or one or more operating devices 931, such as Windows Server, MacOSX, Unix, Linux, FreeBSD, etc. Those skilled in the art will understand that... Figure 9 The structure of the motor vibration factor identification device 900 shown does not constitute a limitation on the motor vibration factor identification device 900. It may include more or fewer components than shown, or combine certain components, or have different component arrangements.

[0095] The present invention also provides a computer-readable storage medium, which can be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium, wherein the computer-readable storage medium stores instructions that, when executed on a computer, cause the computer to perform the steps of a method for identifying motor vibration factors.

[0096] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working process of the device or unit described above can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0097] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0098] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for identifying vibration factors in a motor, characterized in that, A vibration factor identification system for a motor is provided. The system includes a motor, an air-bearing platform, and a motor encoder. Both the motor and the motor encoder are mounted on the air-bearing platform. The output terminal of the motor is connected to the motor encoder. The vibration factor identification method for the motor includes: The air pressure of the air flotation platform is adjusted according to the preset air pressure adjustment parameters to obtain the air pressure adjustment status of the platform. With the platform air pressure adjusted, the motor encoder is controlled to measure the motor vibration in order to obtain the first static vibration amplitude; The motor vibration factor identification system also includes an air bearing and a marble slab, the air bearing being mounted on the marble slab, the air bearing platform being mounted on the air bearing, and the motor encoder controlling the motor to measure vibration to obtain a first static vibration amplitude, including: Obtain the contact force between the air bearing and the marble; Determine whether the contact force is greater than the preset contact force threshold; When the contact force is greater than the contact force threshold, the motor's enable state is obtained; Perform state analysis on the enabling state; When the enable state is disabled, the motor encoder is controlled to measure the motor jitter according to the preset second measurement cycle to obtain the first static jitter amplitude. The motor encoder is controlled to measure the vibration of the motor based on the first static vibration amplitude and the preset first measurement cycle, so as to obtain the second static vibration amplitude. The step of controlling the motor encoder to perform vibration measurement on the motor based on the first static vibration amplitude and a preset first measurement cycle to obtain the second static vibration amplitude includes: The air bearing is controlled to perform a pressure boosting operation based on the first static jitter amplitude and the preset air pressure boosting conditions to obtain the first air pressure regulation state. In the first air pressure regulation state, the air bearing is controlled to perform air pressure regulation operation according to the first measurement cycle to obtain the second air pressure regulation state; In the second air pressure regulation state, the motor encoder is controlled to measure the vibration of the motor in order to obtain the second static vibration amplitude; The second stationary jitter amplitude is analyzed based on a preset fast Fourier algorithm and a preset frequency threshold range to obtain jitter factors. Generate jitter response plans based on jitter factors.

2. The method for identifying motor vibration factors as described in claim 1, characterized in that, The step of controlling the air bearing to perform a pressure boosting operation based on the first static vibration amplitude and preset air pressure boosting conditions to obtain the first air pressure regulation state includes: The first static jitter amplitude is calculated according to a preset ratio to obtain the jitter amplitude threshold. Acquire the ambient vibration amplitude and determine whether the ambient vibration amplitude is less than the jitter amplitude threshold; When the ambient vibration amplitude is less than the jitter amplitude threshold, the motor is controlled to switch states according to the preset upper enable parameters to obtain the upper enable state. In the enabled state, the air bearing is controlled to perform pressure boosting operation according to the air pressure boosting conditions, the preset air pressure range and the preset boosting frequency, so as to obtain the first air pressure regulation state.

3. The method for identifying motor vibration factors as described in claim 1, characterized in that, The step of controlling the air bearing to perform air pressure regulation operation according to the first measurement cycle to obtain the second air pressure regulation state includes: The motor encoder is controlled according to the first measurement cycle to measure the motor jitter in order to obtain the third static jitter amplitude; Characteristic analysis is performed on the third static jitter amplitude to obtain the minimum amplitude value; The air pressure regulation value is obtained by mapping the minimum amplitude value; The air bearing is controlled to perform air pressure regulation operation according to the air pressure regulation value to obtain the second air pressure regulation state.

4. The method for identifying motor vibration factors as described in claim 1, characterized in that, In the second air pressure regulation state, controlling the motor encoder to measure the motor vibration to obtain the second static vibration amplitude includes: Under the second air pressure regulation state, obtain the motor PID parameters and filter parameters; The motor PID parameters and filter parameters are adjusted according to preset adjustment parameters to obtain the motor parameters; The motor is controlled to operate according to the preset optimal conditions and motor parameters; When the motor is running, the motor encoder is controlled to measure the vibration of the motor according to the preset third measurement cycle to obtain the second static vibration amplitude.

5. The method for identifying motor vibration factors as described in claim 1, characterized in that, The second stationary jitter amplitude is analyzed according to a preset Fast Fourier Transform algorithm and a preset frequency threshold range to obtain jitter factors, including: The second stationary jitter amplitude is processed using the Fast Fourier Transform algorithm to obtain the FFT plot; Feature analysis was performed on the FFT plot to obtain the vibration peak frequency characteristics; The vibration peak frequency characteristics are analyzed based on the frequency threshold range to obtain the jitter factors.

6. A vibration factor identification system for an electric motor, characterized in that, Perform each step of the motor vibration factor identification method as described in any one of claims 1-5. The motor vibration factor identification system includes a control device, a marble, an air bearing electrically connected to the control device, a motor, an air bearing platform, and a motor encoder. The output end of the motor is connected to the motor encoder. The motor and the motor encoder are both mounted on the air bearing platform. The air bearing platform is mounted on the air bearing, and the air bearing is mounted on the marble.

7. A device for identifying vibration factors in a motor, characterized in that, include: A memory and at least one processor, wherein the memory stores instructions; At least one of the processors invokes the instructions in the memory to cause the motor vibration factor identification device to perform the steps of the motor vibration factor identification method as described in any one of claims 1-5.

8. A computer-readable storage medium storing instructions thereon, characterized in that, When the instructions are executed by the processor, they implement the various steps of the motor vibration factor identification method as described in any one of claims 1-5.

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